WO2017054272A1 - Oled显示面板及其制作方法 - Google Patents

Oled显示面板及其制作方法 Download PDF

Info

Publication number
WO2017054272A1
WO2017054272A1 PCT/CN2015/092810 CN2015092810W WO2017054272A1 WO 2017054272 A1 WO2017054272 A1 WO 2017054272A1 CN 2015092810 W CN2015092810 W CN 2015092810W WO 2017054272 A1 WO2017054272 A1 WO 2017054272A1
Authority
WO
WIPO (PCT)
Prior art keywords
organic material
region
deposited
applying
liquid supply
Prior art date
Application number
PCT/CN2015/092810
Other languages
English (en)
French (fr)
Inventor
邹成
Original Assignee
深圳市华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US14/892,326 priority Critical patent/US20170189934A1/en
Publication of WO2017054272A1 publication Critical patent/WO2017054272A1/zh

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B5/00Electrostatic spraying apparatus; Spraying apparatus with means for charging the spray electrically; Apparatus for spraying liquids or other fluent materials by other electric means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/731Liquid crystalline materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/32Processes for applying liquids or other fluent materials using means for protecting parts of a surface not to be coated, e.g. using stencils, resists
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers

Definitions

  • the present invention belongs to the field of display technologies, and in particular, to an OLED display panel and a method of fabricating the same.
  • OLED Organic Light Emitting Diode
  • the fabrication methods of OLED devices in OLED displays mainly include: 1. Heating and evaporation coating methods, which require the use of a mask to form a specific shape or pixel; 2. Inkjet printing, which requires high precision of the nozzles. degree. In these two methods, the heating evaporation coating method is adopted, the utilization rate of the coating material is low, and an additional mask plate is required; and the inkjet printing method requires high precision of the nozzle and the like, and the like. Cost of production.
  • an object of the present invention is to provide a method for fabricating an OLED display panel, comprising: providing a substrate; placing a spray device above the substrate and applying a forward voltage to the spray device Applying a reverse voltage to a region of the substrate on which the organic material is to be deposited, and applying a forward voltage to a region outside the region where the organic material is to be deposited; the spray device ejects the misty organic material to The misty organic material is deposited in the region where the organic material is to be deposited.
  • a reverse voltage is applied to a region of the substrate on which a red organic material is to be deposited, and a forward voltage is applied to a region outside the region where the red organic material is to be deposited; the spray device ejects a mist A red organic material is deposited to deposit the hazy red organic material in the region where the red organic material is to be deposited.
  • the spraying device includes a first liquid supply pipe and a first nozzle disposed under the first liquid supply pipe; wherein the first liquid supply pipe is provided with a red organic material, the first nozzle The red organic material is atomized and ejected by applying a forward voltage.
  • a reverse voltage is applied to a region of the substrate on which a green organic material is to be deposited, and a forward voltage is applied to a region outside the region where the green organic material is to be deposited; the spray device ejects a mist A green organic material is deposited to deposit the hazy green organic material in the region where the green organic material is to be deposited.
  • the spraying device further includes a second liquid supply pipe and a second nozzle disposed under the second liquid supply pipe; wherein the second liquid supply pipe is provided with a green organic material, and the second The nozzle is applied with a forward voltage to atomize the green organic material.
  • a reverse voltage is applied to a region of the substrate on which a blue organic material is to be deposited, and a forward voltage is applied to a region outside the region where the blue organic material is to be deposited; the spray device sprays a mist A blue organic material is formed to deposit the hazy blue organic material in the region where the blue organic material is to be deposited.
  • the spraying device further includes a third liquid supply pipe and a third nozzle disposed under the third liquid supply pipe; wherein the third liquid supply pipe is provided with a blue organic material, the The three nozzles are sprayed with a forward voltage to atomize the blue organic material.
  • the spray device sprays the misty organic material by means of electrospraying.
  • the present invention also provides an OLED display panel fabricated by the above-described fabrication method.
  • the method for fabricating the OLED display panel of the present invention does not require the use of a mask to fabricate each sub-pixel, and the spray device that sprays the misty organic material by the electrospray spraying device and the spray device that is sprayed by the electric spray method No need to have high precision, greatly reducing production costs.
  • FIG. 1 is a schematic illustration of fabricating a red sub-pixel of an OLED display panel in accordance with an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of fabricating a green sub-pixel of an OLED display panel in accordance with an embodiment of the present invention
  • FIG. 3 is a schematic diagram of fabricating blue sub-pixels of an OLED display panel in accordance with an embodiment of the present invention.
  • 1 is a schematic diagram of a red sub-pixel of an OLED display panel fabricated in accordance with an embodiment of the present invention.
  • 2 is a schematic diagram of a green sub-pixel of an OLED display panel fabricated in accordance with an embodiment of the present invention.
  • 3 is a schematic diagram of fabricating blue sub-pixels of an OLED display panel in accordance with an embodiment of the present invention.
  • a spray device 20 includes a first liquid supply pipe 211 and a first nozzle 212 installed under the first liquid supply pipe 211; a second liquid supply pipe 221 and installation a second nozzle 222 under the second liquid supply pipe 221; a third liquid supply pipe 231 and a second nozzle 232 installed under the third liquid supply pipe 231.
  • the spray device 20 of the present invention includes the number of supply tubes and nozzles and is limited to that shown in the drawings. For example, when the OLED display panel is composed of four sub-pixels (for example, RGBW sub-pixels), the spray device 20 may include Four supply tubes and four nozzles.
  • the first liquid supply tube 211 is filled with a red organic material
  • the first nozzle 212 can atomize the red organic material by electrospraying
  • the second liquid supply tube 221 is filled with the green organic material.
  • the nozzle 222 can atomize the green organic material by electrospraying;
  • the third liquid supply tube 231 is filled with a blue organic material, and the first nozzle 232 can spray the blue organic material by means of electrospraying.
  • the ejection is carried out; however, the invention is not limited thereto.
  • a substrate 10 is provided.
  • the substrate 10 is a transparent glass substrate, but the present invention is not limited thereto.
  • the substrate 10 may be a transparent resin substrate.
  • the spray device 20 is placed above the substrate 10.
  • a forward voltage is applied to the first nozzle 212, and no voltage is applied to both the second nozzle 222 and the third nozzle 232;
  • a region 11 on which a red organic material is to be deposited is applied with a reverse voltage, and a region other than the region 11 where the red organic material is to be deposited (which includes a region 12 where green organic material is to be deposited, a blue organic material to be deposited)
  • the region 13 and the region where the organic material is not deposited is applied with a forward voltage;
  • the first nozzle 212 is applied with a forward voltage to spray the liquid red organic material in the first liquid supply tube 211 by electrospraying.
  • the spray is sprayed to form a misty red organic material deposited in the region 11 where the red organic material is to be deposited, thereby forming a red sub-pixel.
  • a forward voltage is applied to the second nozzle 222, and no voltage is applied to both the first nozzle 212 and the third nozzle 232;
  • a region 12 on which a green organic material is to be deposited is applied with a reverse voltage, and a region other than the region 12 where the green organic material is to be deposited (which includes a region 11 where red organic material is to be deposited, a blue organic material to be deposited) a region 13 and a region where the organic material is not deposited) a forward voltage;
  • the second nozzle 222 is applied with a forward voltage to electrically spray the green organic material in the second liquid supply tube 221
  • the spray is sprayed to form a hazy green organic material deposited in the region 12 where the green organic material is to be deposited, thereby forming a green sub-pixel.
  • a forward voltage is applied to the third nozzle 232, and neither the first nozzle 212 nor the second nozzle 222 applies a voltage; Applying a reverse voltage to the region 13 on the substrate 10 where the blue organic material is to be deposited, and to the region outside the region 13 where the blue organic material is to be deposited (which includes the green organic material to be deposited)
  • the region 12 of the material, the region 11 where the red organic material is to be deposited, and the region where the organic material is not deposited are applied with a forward voltage; then, the third nozzle 232 is applied with a forward voltage to electrically pump the third liquid supply tube 231
  • the liquid blue organic material is atomized and sprayed to form a misty blue organic material deposited in the region 13 where the blue organic material is to be deposited, thereby forming Blue subpixel.
  • the OLED display panel is fabricated by the above-described manufacturing method, and in the above manufacturing method, it is not necessary to use a mask to fabricate each sub-pixel, and the sprayed organic material is sprayed by electrospraying, and electrospray is used.
  • the sprayed spray device does not require high precision and greatly reduces production costs.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Materials Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

一种OLED显示面板的制作方法,其包括:提供一基板(10);将喷雾装置(20)设置于基板上方,并向喷雾装置施加正向电压;向基板上将要沉积有机材料的区域(11)施加反向电压,且向将要沉积有机材料的区域之外的区域施加正向电压;喷雾装置喷出雾状的有机材料,以使雾状的有机材料沉积在将要沉积有机材料的区域中。该制作方法无需利用掩模板来制作各子像素,并且采用电喷涂方式的喷涂装置喷出雾状有机材料,无需具有高的精确度,大大地降低了生产成本。

Description

OLED显示面板及其制作方法 技术领域
本发明属于显示技术领域,具体地讲,涉及一种OLED显示面板及其制作方法。
背景技术
有机发光二极管显示器(Organic LightEmitting Diode,OLED)是一种极具发展前景的平板显示器,它不仅具有十分优异的显示性能,还具有自发光、结构简单、超轻薄、响应速度快、宽视角、低功耗及可实现柔性显示等特性,因此被誉为“梦幻显示器”,从而一致被公认为下一代主流显示器。
目前,OLED显示器中的OLED器件的制作方式主要包括:一、加热蒸发镀膜方式,此方式需要利用掩模板形成特定的形状或像素;二、喷墨打印的方式,此方式需要喷头具有高的精确度。在这两种方式中,采用加热蒸发镀膜方式,镀膜材料的利用率较低,并且还需要额外的掩模板;而采用喷墨打印的方式,则要求喷头等设备具有高的精确度,提高了生产成本。
发明内容
为了解决上述现有技术存在的问题,本发明的目的在于提供一种OLED显示面板的制作方法,其包括:提供一基板;将喷雾装置设置于所述基板上方,并向喷雾装置施加正向电压;向所述基板上的将要沉积有机材料的区域施加反向电压,且向所述将要沉积有机材料的区域之外的区域施加正向电压;所述喷雾装置喷出雾状的有机材料,以使所述雾状的有机材料沉积在所述将要沉积有机材料的区域中。
进一步地,向所述基板上的将要沉积红色有机材料的区域施加反向电压,且向所述将要沉积红色有机材料的区域之外的区域施加正向电压;所述喷雾装置喷出雾状的红色有机材料,以使所述雾状的红色有机材料沉积在所述将要沉积红色有机材料的区域中。
进一步地,所述喷雾装置包括第一供液管及设置在所述第一供液管之下的第一喷嘴;其中,所述第一供液管装有红色有机材料,所述第一喷嘴被施加正向电压将所述红色有机材料雾化喷出。
进一步地,向所述基板上的将要沉积绿色有机材料的区域施加反向电压,且向所述将要沉积绿色有机材料的区域之外的区域施加正向电压;所述喷雾装置喷出雾状的绿色有机材料,以使所述雾状的绿色有机材料沉积在所述将要沉积绿色有机材料的区域中。
进一步地,所述喷雾装置还包括第二供液管及设置在所述第二供液管之下的第二喷嘴;其中,所述第二供液管装有绿色有机材料,所述第二喷嘴被施加正向电压将所述绿色有机材料雾化喷出。
进一步地,向所述基板上的将要沉积蓝色有机材料的区域施加反向电压,且向所述将要沉积蓝色有机材料的区域之外的区域施加正向电压;所述喷雾装置喷出雾状的蓝色有机材料,以使所述雾状的蓝色有机材料沉积在所述将要沉积蓝色有机材料的区域中。
进一步地,所述喷雾装置还包括第三供液管及设置在所述第三供液管之下的第三喷嘴;其中,所述第三供液管装有蓝色有机材料,所述第三喷嘴被施加正向电压将所述蓝色有机材料雾化喷出。
进一步地,所述喷雾装置采用电喷涂的方式喷出雾状的有机材料。
本发明还提供了一种利用上述的制作方法制作的OLED显示面板。
本发明的有益效果:本发明的OLED显示面板的制作方法,无需利用掩模板来制作各子像素,并且采用电喷涂方式的喷涂装置喷出雾状有机材料,而采用电喷涂方式喷涂的喷涂装置无需具有高的精确度,大大地降低了生产成本。
附图说明
通过结合附图进行的以下描述,本发明的实施例的上述和其它方面、特点和优点将变得更加清楚,附图中:
图1是根据本发明的实施例的制作OLED显示面板的红色子像素的示意 图;
图2是根据本发明的实施例的制作OLED显示面板的绿色子像素的示意图;
图3是根据本发明的实施例的制作OLED显示面板的蓝色子像素的示意图。
具体实施方式
以下,将参照附图来详细描述本发明的实施例。然而,可以以许多不同的形式来实施本发明,并且本发明不应该被解释为限制于这里阐述的具体实施例。相反,提供这些实施例是为了解释本发明的原理及其实际应用,从而使本领域的其他技术人员能够理解本发明的各种实施例和适合于特定预期应用的各种修改。
在附图中,为了清楚器件,夸大了层和区域的厚度。相同的标号在整个说明书和附图中可用来表示相同的元件。
将理解的是,尽管在这里可使用术语“第一”、“第二”、“第三”等来描述各种元件,但是这些元件不应受这些术语的限制。这些术语仅用于将一个元件与另一个元件区分开来。
图1是根据本发明的实施例的制作OLED显示面板的红色子像素的示意图。图2是根据本发明的实施例的制作OLED显示面板的绿色子像素的示意图。图3是根据本发明的实施例的制作OLED显示面板的蓝色子像素的示意图。
参照图1至图3,根据本发明的实施例的喷雾装置20包括:第一供液管211及安装在第一供液管211之下的第一喷嘴212;第二供液管221及安装在第二供液管221之下的第二喷嘴222;第三供液管231及安装在第三供液管231之下的第二喷嘴232。本发明的喷雾装置20包括的供液管和喷嘴的数量并以附图所示为限,例如,当OLED显示面板是由四子像素(例如,RGBW子像素)构成时,喷雾装置20可包括四个供液管和四个喷嘴。
在本实施例中,第一供液管211盛装有红色有机材料,第一喷嘴212可通过电喷涂的方式将红色有机材料雾化喷出;第二供液管221盛装有绿色有机材 料,第而喷嘴222可通过电喷涂的方式将绿色有机材料雾化喷出;第三供液管231盛装有蓝色有机材料,第一喷嘴232可通过电喷涂的方式将蓝色有机材料雾化喷出;但本发明并不局限于此。
继续参照图1至图3,当制作OLED显示面板时,首先,提供一基板10。在本实施例中,基板10为透明的玻璃基板,但本发明并不限制于此,例如,基板10也可为透明的树脂基板。
接着,将喷雾装置20置于基板10的上方。
当在基板10上利用红色有机材料制作红色子像素时,参照图1,首先,向第一喷嘴212施加正向电压,而第二喷嘴222和第三喷嘴232均不施加电压;接着,向基板10上的将要沉积红色有机材料的区域11施加反向电压,而向所述将要沉积红色有机材料的区域11之外的区域(其包括将要沉积绿色有机材料的区域12、将要沉积蓝色有机材料的区域13以及非沉积有机材料的区域)施加正向电压;接着,第一喷嘴212被施加正向电压而采用电喷涂的方式将第一供液管211中的呈液体状的红色有机材料雾化喷出,以形成雾状的红色有机材料,该雾状的红色有机材料沉积在所述将要沉积红色有机材料的区域11中,从而形成红色子像素。
当在基板10上利用绿色有机材料制作绿色子像素时,参照图2,首先,向第二喷嘴222施加正向电压,而第一喷嘴212和第三喷嘴232均不施加电压;接着,向基板10上的将要沉积绿色有机材料的区域12施加反向电压,而向所述将要沉积绿色有机材料的区域12之外的区域(其包括将要沉积红色有机材料的区域11、将要沉积蓝色有机材料的区域13以及非沉积有机材料的区域)施加正向电压;接着,第二喷嘴222被施加正向电压而采用电喷涂的方式将第二供液管221中的呈液体状的绿色有机材料雾化喷出,以形成雾状的绿色有机材料,该雾状的绿色有机材料沉积在所述将要沉积绿色有机材料的区域12中,从而形成绿色子像素。
当在基板10上利用蓝色有机材料制作蓝色子像素时,参照图3,首先,向第三喷嘴232施加正向电压,而第一喷嘴212和第二喷嘴222均不施加电压;接着,向基板10上的将要沉积蓝色有机材料的区域13施加反向电压,而向所述将要沉积蓝色有机材料的区域13之外的区域(其包括将要沉积绿色有机材 料的区域12、将要沉积红色有机材料的区域11以及非沉积有机材料的区域)施加正向电压;接着,第三喷嘴232被施加正向电压而采用电喷涂的方式将第三供液管231中的呈液体状的蓝色有机材料雾化喷出,以形成雾状的蓝色有机材料,该雾状的蓝色有机材料沉积在所述将要沉积蓝色有机材料的区域13中,从而形成蓝色子像素。
综上所述,利用上述的制作方法制作OLED显示面板,而在上述的制作方法中,无需利用掩模板来制作各子像素,并且采用电喷涂的方式喷出雾状有机材料,而采用电喷涂的方式喷涂的喷涂装置无需具有高的精确度,大大地降低了生产成本。
虽然已经参照特定实施例示出并描述了本发明,但是本领域的技术人员将理解:在不脱离由权利要求及其等同物限定的本发明的精神和范围的情况下,可在此进行形式和细节上的各种变化。

Claims (9)

  1. 一种OLED显示面板的制作方法,其中,包括:
    提供一基板;
    将喷雾装置设置于所述基板上方,并向喷雾装置施加正向电压;
    向所述基板上的将要沉积有机材料的区域施加反向电压,且向所述将要沉积有机材料的区域之外的区域施加正向电压;
    所述喷雾装置喷出雾状的有机材料,以使所述雾状的有机材料沉积在所述将要沉积有机材料的区域中。
  2. 根据权利要求1所述的制作方法,其中,进一步地,
    向所述基板上的将要沉积红色有机材料的区域施加反向电压,且向所述将要沉积红色有机材料的区域之外的区域施加正向电压;
    所述喷雾装置喷出雾状的红色有机材料,以使所述雾状的红色有机材料沉积在所述将要沉积红色有机材料的区域中。
  3. 根据权利要求2所述的制作方法,其中,所述喷雾装置包括第一供液管及设置在所述第一供液管之下的第一喷嘴;其中,所述第一供液管装有红色有机材料,所述第一喷嘴被施加正向电压将所述红色有机材料雾化喷出。
  4. 根据权利要求1所述的制作方法,其中,进一步地,
    向所述基板上的将要沉积绿色有机材料的区域施加反向电压,且向所述将要沉积绿色有机材料的区域之外的区域施加正向电压;
    所述喷雾装置喷出雾状的绿色有机材料,以使所述雾状的绿色有机材料沉积在所述将要沉积绿色有机材料的区域中。
  5. 根据权利要求4所述的制作方法,其中,所述喷雾装置还包括第二供液管及设置在所述第二供液管之下的第二喷嘴;其中,所述第二供液管装有绿 色有机材料,所述第二喷嘴被施加正向电压将所述绿色有机材料雾化喷出。
  6. 根据权利要求1所述的制作方法,其中,进一步地,
    向所述基板上的将要沉积蓝色有机材料的区域施加反向电压,且向所述将要沉积蓝色有机材料的区域之外的区域施加正向电压;
    所述喷雾装置喷出雾状的蓝色有机材料,以使所述雾状的蓝色有机材料沉积在所述将要沉积蓝色有机材料的区域中。
  7. 根据权利要求6所述的制作方法,其中,所述喷雾装置还包括第三供液管及设置在所述第三供液管之下的第三喷嘴;其中,所述第三供液管装有蓝色有机材料,所述第三喷嘴被施加正向电压将所述蓝色有机材料雾化喷出。
  8. 根据权利要求1所述的制作方法,所述喷雾装置采用电喷涂的方式喷出雾状的有机材料。
  9. 一种利用权利要求1所述的制作方法制作的OLED显示面板。
PCT/CN2015/092810 2015-09-28 2015-10-26 Oled显示面板及其制作方法 WO2017054272A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US14/892,326 US20170189934A1 (en) 2015-09-28 2015-10-26 OLED Display Panel And Method For Preparing The Same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201510628785.1 2015-09-28
CN201510628785.1A CN105097887B (zh) 2015-09-28 2015-09-28 Oled显示面板及其制作方法

Publications (1)

Publication Number Publication Date
WO2017054272A1 true WO2017054272A1 (zh) 2017-04-06

Family

ID=54577938

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2015/092810 WO2017054272A1 (zh) 2015-09-28 2015-10-26 Oled显示面板及其制作方法

Country Status (3)

Country Link
US (1) US20170189934A1 (zh)
CN (1) CN105097887B (zh)
WO (1) WO2017054272A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10916704B2 (en) * 2018-04-03 2021-02-09 Universal Display Corporation Vapor jet printing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1538787A (zh) * 2003-04-15 2004-10-20 精工爱普生株式会社 膜形成方法及形成装置、电子装置及其制法、电子机器
US20120098416A1 (en) * 2010-10-26 2012-04-26 Sung-Hwan Cho Apparatus for forming thin layer, method of manufacturing organic light-emitting display apparatus using the same and organic light-emitting display apparatus manufactured using the method
JP2012135704A (ja) * 2010-12-24 2012-07-19 Hitachi High-Technologies Corp エレクトロスプレーデポジション装置
WO2013105557A1 (ja) * 2012-01-11 2013-07-18 コニカミノルタ株式会社 静電スプレー装置
CN104302407A (zh) * 2012-05-25 2015-01-21 奥斯兰姆奥普托半导体有限责任公司 用于制造光电子器件的方法和用于制造光电子器件的设备
CN104823294A (zh) * 2012-11-23 2015-08-05 阿莫绿色技术有限公司 有机薄膜形成装置及有机薄膜形成方法和利用其的有机薄膜元件的制造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW468283B (en) * 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
WO2011001598A1 (ja) * 2009-07-02 2011-01-06 シャープ株式会社 有機el素子、有機el素子の製造方法、および有機el表示装置
KR101975020B1 (ko) * 2012-04-24 2019-05-07 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
KR101885245B1 (ko) * 2012-05-31 2018-09-11 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 유기 발광 표시장치의 제조방법
KR101951029B1 (ko) * 2012-06-13 2019-04-26 삼성디스플레이 주식회사 증착용 마스크 및 이를 이용한 유기 발광 표시장치의 제조방법
US10645218B2 (en) * 2014-10-31 2020-05-05 Avaya Inc. Contact center interactive text stream wait treatments
KR102411659B1 (ko) * 2015-04-27 2022-06-21 삼성전자주식회사 유기 발광 장치의 제조방법
KR102479926B1 (ko) * 2015-09-03 2022-12-20 삼성전자주식회사 박막 형성 장치, 이를 이용한 유기 발광 소자 및 이의 제조 방법

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1538787A (zh) * 2003-04-15 2004-10-20 精工爱普生株式会社 膜形成方法及形成装置、电子装置及其制法、电子机器
US20120098416A1 (en) * 2010-10-26 2012-04-26 Sung-Hwan Cho Apparatus for forming thin layer, method of manufacturing organic light-emitting display apparatus using the same and organic light-emitting display apparatus manufactured using the method
JP2012135704A (ja) * 2010-12-24 2012-07-19 Hitachi High-Technologies Corp エレクトロスプレーデポジション装置
WO2013105557A1 (ja) * 2012-01-11 2013-07-18 コニカミノルタ株式会社 静電スプレー装置
CN104302407A (zh) * 2012-05-25 2015-01-21 奥斯兰姆奥普托半导体有限责任公司 用于制造光电子器件的方法和用于制造光电子器件的设备
CN104823294A (zh) * 2012-11-23 2015-08-05 阿莫绿色技术有限公司 有机薄膜形成装置及有机薄膜形成方法和利用其的有机薄膜元件的制造方法

Also Published As

Publication number Publication date
CN105097887A (zh) 2015-11-25
US20170189934A1 (en) 2017-07-06
CN105097887B (zh) 2018-03-09

Similar Documents

Publication Publication Date Title
CN104465671B (zh) 一种显示基板及其制作方法、显示装置
US10079272B2 (en) Substrate assembly and manufacturing method thereof and display device
US9969180B2 (en) Inkjet printing method, inkjet printing device, and method for manufacturing display substrate
US20170104042A1 (en) Organic light emitting diode display panel, fabrication method thereof, and display device
KR102220427B1 (ko) 마스크 어셈블리, 표시 장치의 제조 장치 및 표시 장치의 제조 방법
CN104328377B (zh) 蒸发源、成膜设备及其成膜方法
US9269752B2 (en) Organic electroluminescence display
CN107002221A (zh) 用于真空沉积的材料沉积布置和材料分配布置
WO2016150294A1 (zh) 一种有机发光二极管显示面板及其制作方法、显示装置
WO2021212586A1 (zh) 显示面板及显示面板的制备方法
US10366911B2 (en) Carrier substrate for carrying an OLED in manufacturing process and manufacturing method for the same
US9340864B2 (en) Vacuum evaporation apparatus and evaporation method
US20140033980A1 (en) Deposition apparatus
CN109148533B (zh) 一种有机发光二极管显示器
WO2017054272A1 (zh) Oled显示面板及其制作方法
KR102373436B1 (ko) 표시 장치, 표시 장치의 제조장치 및 표시 장치의 제조방법
US8580335B2 (en) Method for discharging liquid body, method for manufacturing color filter, and method for manufacturing organic EL device
CN106864039B (zh) 一种喷头、喷墨打印方法和连续喷墨打印方法
US20190123111A1 (en) Display panel and manufacturing method thereof
US8944564B2 (en) Printing apparatus and method for manufacturing organic light emitting diode display
CN108364974B (zh) 有机电致发光器件及其制备方法和应用
US20190074330A1 (en) Display substrate, display panel, and method for fabricating the display substrate
WO2020199308A1 (zh) 有机发光器件及其制作方法
CN102222779A (zh) 一种有机发光二极管器件的制造方法
WO2023045002A1 (zh) 有机发光二极管基板及其制造方法

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 14892326

Country of ref document: US

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15905184

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15905184

Country of ref document: EP

Kind code of ref document: A1