WO2017041471A1 - Resource-saving acidic etching waste solution reuse and recovery system - Google Patents

Resource-saving acidic etching waste solution reuse and recovery system Download PDF

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Publication number
WO2017041471A1
WO2017041471A1 PCT/CN2016/077065 CN2016077065W WO2017041471A1 WO 2017041471 A1 WO2017041471 A1 WO 2017041471A1 CN 2016077065 W CN2016077065 W CN 2016077065W WO 2017041471 A1 WO2017041471 A1 WO 2017041471A1
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Prior art keywords
etching
liquid
storage tank
tank
resource
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PCT/CN2016/077065
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French (fr)
Chinese (zh)
Inventor
韦建敏
吴梅
赵兴文
张晓蓓
张小波
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成都虹华环保科技股份有限公司
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Priority claimed from CN201520694170.4U external-priority patent/CN204898084U/en
Priority claimed from CN201510569177.8A external-priority patent/CN105002501A/en
Application filed by 成都虹华环保科技股份有限公司 filed Critical 成都虹华环保科技股份有限公司
Publication of WO2017041471A1 publication Critical patent/WO2017041471A1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Definitions

  • the invention relates to an acid etching waste liquid recycling system capable of saving resources
  • the present invention relates to a waste liquid processing system, and more particularly to an acid etching waste liquid recycling system that can save resources.
  • the acidic etching solution is an etching liquid for fine circuit fabrication of a printed circuit board and fabrication of an inner layer of a multilayer board.
  • the regeneration of acid etching old liquid is mainly converted into an acidic solution of suitable specific gravity, transparency and high oxidation-reduction potential by chemical and electrochemical methods to maintain stable and rapid etching of the printed circuit board.
  • Chemical regeneration is the main method for the regeneration of acidic copper chloride etching solution. The principle is to discharge a certain proportion of the old liquid (high specific gravity), add a certain amount of liquid (low specific gravity), or add a certain amount of water. , to adjust the specific gravity of the etching solution.
  • the oxidizing agent in the same sputum liquid oxidizes the monovalent copper ion to the divalent copper ion, or the oxidizing agent is separately added to increase the oxidation-reduction potential of the etching liquid, thereby restoring the original performance of the etching liquid.
  • Common oxidants are air, oxygen, chlorine, ozone, sodium hypochlorite, sodium chlorate, hydrogen peroxide, and the like.
  • electrochemical regeneration method is an online regeneration method.
  • Metallic copper with commercial value can be produced by electrolysis, but chlorine gas is generated at the same time to form a polluted exhaust gas, which not only pollutes the environment but also causes waste.
  • Chinese Patent Application No. 2010205671550 discloses a copper ion acid etching solution regeneration system, which is used for online processing of an acidic etching solution, which is limited by the etching line production time, and can only be etched with Simultaneous production, and the exhaust gas treatment device inside the system consumes the chlorine inside the system. Although it is environmentally friendly, it causes waste of resources, causing the loss of chlorine inside the system, and additional acid solution is needed to ensure the efficiency of the etching solution. technical problem
  • a resource-saving acidic etching waste liquid recycling system including an etching liquid processing system, a chlorine gas recovery system and a regenerating liquid circulation system, and an etching liquid processing system including an etching production line a mother liquor storage tank, an electrolysis tank and a dissolution absorption system
  • the electrolysis tank comprises a cathode tank, a membrane and an anode tank
  • the mother liquor storage tank, the cathode tank, the anode tank, the dissolution absorption system are sequentially connected
  • the etching production line is respectively connected with the mother liquid storage tank and the dissolution absorption system Connected, the dissolution absorption system is in communication with the etching line
  • the dissolution absorption system is in communication with the etching line
  • the chlorine gas recovery system includes a scrubbing system and an exhaust gas treatment system, and the anode tank, the scrubbing system, and the exhaust gas treatment system are sequentially connected;
  • the regeneration liquid circulation system includes a regeneration liquid storage tank and a regeneration liquid treatment system, and the anode tank, the regeneration liquid storage tank, the reconditioning liquid treatment system, and the etching production line are sequentially connected.
  • the membrane is a membrane, a cationic membrane or an anionic membrane.
  • the cathode tank obtains electrolytic copper by electrolysis.
  • An ion concentration detecting device is disposed in the electrolytic cell.
  • the regenerative liquid processing system is provided with an acidity detecting device.
  • the apparatus and piping in the system are made of an acid-resistant, alkali-resistant, corrosion-resistant material.
  • the present invention has the following advantages:
  • the system is used for processing acid etching waste liquid, and the etching liquid can be recycled and recycled in the same manner as the metal copper is extracted, so that the etching liquid processing can be performed offline, the processing efficiency is improved, and the reasonable distribution is facilitated.
  • Resources enable dynamic balancing of etching and etching solutions, avoiding waste of resources and achieving sustainable production
  • the electrolytic chlorine gas can be recovered, and the chlorine gas is dissolved in the production line to react with the cuprous ions to form divalent copper ions, and the regenerated etching liquid is directly returned to the production line for recycling, if not and etching.
  • the electrolyzed chlorine gas can be washed and further processed to produce valuable products containing chlorine, so as to avoid polluting the environment, wasting resources, recycling chlorine and water in the system, and reducing the addition of additives or oxidants. Reduced production costs and saved resources.
  • FIG. 1 is a schematic structural view of a resource-saving acid etching waste liquid recycling system
  • a resource-saving acidic etching waste liquid recycling system includes an etching liquid processing system, a chlorine gas recovery system, and a regenerating liquid circulation system, and the etching liquid processing system includes an etching production line and a mother liquid storage tank.
  • Electrolyzer and dissolution absorption system 6 the electrolytic cell comprises a cathode tank 3, a membrane 4 and an anode tank 5, the mother liquor storage tank 2, the cathode tank 3, the anode tank 5, the dissolution absorption system 6 are sequentially connected, and the etching production line 1 and the mother liquid are respectively
  • the storage tank 2 is in communication with the dissolution absorption system 6, and the dissolution absorption system 6 is in communication with the etching line 1;
  • the chlorine gas recovery system includes a scrubbing system 7 and an exhaust gas treatment system 8, and the anode tank 5, the scrubbing system 7 and the exhaust gas treatment system 8 are sequentially connected;
  • the regenerating liquid circulation system includes a regenerant liquid storage tank 10 and a regenerating liquid processing system 11, and the anode tank 5, the regenerant liquid storage tank 10, the regenerating liquid processing system 11, and the etching production line 1 are sequentially connected.
  • the membrane 4 is a membrane, a cation membrane or an anion membrane, and which specific filtration membrane can be selected according to specific production conditions.
  • the cathode tank 3 obtains electrolytic copper 9 by electrolysis, thereby balancing the copper ions in the liquid, ensuring the benefit of the etching liquid, and avoiding the environmental pollution caused by the loss of copper in the ion form. Copper metal can be used as a commodity of commercial value.
  • an ion concentration detecting device is disposed in the electrolytic cell, and the ion concentration in the liquid is detected by the ion concentration detecting device, and the resource is appropriately allocated according to the detected information, and the flow rate is regulated, so that the etching is performed. It can achieve dynamic balance with etchant treatment, which is conducive to the realization of continuous production.
  • the regeneration liquid processing system 11 is provided with an acidity detecting device.
  • the regenerating liquid processing system 11 separates the high acidity liquid and the low acidity liquid by concentration, and can be detected by the acidity detecting device.
  • the specific value to the acidity can be used as an etchant to be utilized when the acidity reaches the desired level.
  • the device and the pipeline in the system are made of acid-proof, alkali-resistant and corrosion-resistant materials, thereby increasing the service life of the system and reducing the difficulty of maintenance.
  • the working process of the present invention is as follows:
  • the etching liquid flowing out on the etching line 1 is partially stored in the dissolution absorption system 6 for storage, and the other portion is stored in the mother liquid storage tank 2, and the flow rate is controlled by the mother liquid storage tank 2 to make the mother liquid storage tank 2
  • the etching solution enters the cathode tank 3.
  • cuprous ions are reduced to divalent copper ions, and the divalent copper ions are reduced to electrolytic copper.
  • the remaining unreduced copper ions and other ions enter the anode tank 5 through the membrane 4.
  • the working process of the present invention is as follows:
  • the etchant portion flowing out of the etching line 1 enters the dissolution absorbing system 6 for storage, and the other portion enters the mother liquid storage tank 2 for storage, and the flow rate is controlled by the mother liquid storage tank 2 to make the mother liquid storage tank 2
  • the etching solution enters the cathode tank 3.
  • the cuprous ions are reduced to divalent copper ions, and the divalent copper ions are reduced to electrolytic copper, and the electrolytic copper is washed and washed by the copper washing device 9 .
  • the remaining unreduced copper ions and other ions enter the anode tank 5 through the membrane 4.
  • Chloride ions are oxidized to form chlorine gas under the action of electrolysis in the anode tank 5.
  • chlorine gas enters the solvent absorption system 6, and undergoes redox reaction with cuprous ions to obtain copper ions and an acidic liquid.
  • the liquid can be used as an etchant to enter the etching line 1 to complete the production; when the etching line 1 is not produced, the chlorine gas enters the scrubbing system 7 to obtain pure chlorine gas after being removed, and the pure chlorine gas enters the exhaust gas treatment system 8 and is reacted to form a valuable content. Chlorine products.
  • the liquid remaining after the electrolysis contains ions such as copper ions, chloride ions, and hydrogen ions as the regenerating liquid, and the regenerating liquid has weak acidity, and the regenerating liquid enters the regenerating liquid storage tank 10 to be stored, and is regenerated.
  • the storage tank 10 controls the flow rate to be delivered to the regenerating liquid processing system 11, and the regenerating liquid is concentrated in the regenerating liquid processing system 11 to separate the high acidity liquid and the low acidity liquid, and the high acidity liquid is stored as the etching liquid and the low acidity liquid separately.
  • the high acidity liquid can be sent to the etching line 1 for production, and the low acidity liquid can be formulated into a new liquid together with the oxidant, the additive, etc., and slowly added back to the etching line to control the etching liquid.
  • ORP value which can achieve water recycling
  • Dynamic balancing can be achieved by controlling the degree of electrolysis and the flow of liquid, facilitating automated production and off-line processing of acid etching waste.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)

Abstract

A resource-saving acidic etching waste solution recycling and recovery system comprises: an etching solution treatment system; a chlorine gas recycling system; and a recovered solution reuse system. The etching solution treatment system comprises an etching production line (1); a mother liquor storage tank (2); an electrolytic cell; and a dissolution and absorption system (6). The electrolytic cell comprises a cathode compartment (3) and an anode compartment (5). The mother liquor storage tank (2), the cathode compartment (3), the anode compartment (5) and the dissolution and absorption system (6) sequentially communicate with each other. The etching production line (1) respectively communicates with the mother liquor storage tank (2) and the dissolution and absorption system (6). The chlorine gas recycling system comprises a gas-scrubbing system (7) and a tail-gas treatment system (8). The recovered solution reuse system comprises a recovered solution storage tank (10) and a recovered solution treatment system (11). The anode compartment (5), the gas-scrubbing system (7) and the tail-gas treatment system (8) sequentially communicate with each other. The acidic etching waste solution reuse and recovery system is configured to treat an acidic etching waste solution, and can perform an off-line production operation, save costs and resources, and prevent environmental pollution.

Description

说明书 发明名称:一种可节约资源的酸性蚀刻废液循环再生系统 技术领域  Description: The invention relates to an acid etching waste liquid recycling system capable of saving resources
[0001] 本发明涉及废液处理系统, 特别是一种可节约资源的酸性蚀刻废液循环再生系 统。  [0001] The present invention relates to a waste liquid processing system, and more particularly to an acid etching waste liquid recycling system that can save resources.
背景技术  Background technique
[0002] 酸性蚀刻液是一种用于印制电路板精细线路制作、 多层板内层制作的蚀刻液。  [0002] The acidic etching solution is an etching liquid for fine circuit fabrication of a printed circuit board and fabrication of an inner layer of a multilayer board.
现代电子工业的高速发展, 电路板生产企业迅猛增加, 此类企业的工业废水对 环境污染比较严重, 而此类工业废水中铜离子含量很高, 因此由线路板生产企 业产生的废水、 废液所造成严重的环境污染和资源浪费问题日益受到社会的普 遍关注。 为了避免浪费以及保护环境, 需要对酸性蚀刻液进行回收再利用。  With the rapid development of the modern electronics industry, the number of circuit board manufacturers has increased rapidly. The industrial wastewater of such enterprises is seriously polluted by the environment, and the copper ion content of such industrial wastewater is very high. Therefore, the wastewater and waste liquid generated by the circuit board production enterprises are high. The serious environmental pollution and waste of resources have been increasingly concerned by the society. In order to avoid waste and protect the environment, it is necessary to recycle and reuse the acidic etching solution.
[0003] 酸性蚀刻旧液的再生主要通过化学、 电化学方法将其转变为合适比重、 透明和 高氧化还原电位的酸性溶液, 以维持印制电路板的稳定、 快速的蚀刻。 其中化 学再生是酸性氯化铜蚀刻液再生的主要方法, 其原理是通过排放一定比例的蚀 刻旧液 (高比重) , 加入一定量的子液 (低比重) , 或者在补加一定量的水, 来调节蚀刻液的比重。 同吋子液中的氧化剂将一价铜离子氧化为二价铜离子, 或者单独加入氧化剂, 提高蚀刻液氧化还原电位, 从而恢复蚀刻液的原有性能 。 常见的氧化剂有空气、 氧气、 氯气、 臭氧、 次氯酸钠、 氯酸钠、 双氧水等。 但是总铜不断增加, 最终需要对外排除一部分的酸性蚀刻液以维持一定的总铜 浓度, 不仅污染环境, 还会造成大量铜和酸的浪费; 电化学再生法, 是一种在 线的再生方法, 通过电解可以产出具有商业价值的金属铜, 但同吋会产生氯气 , 形成具有污染的尾气, 不仅污染环境还造成浪费。  [0003] The regeneration of acid etching old liquid is mainly converted into an acidic solution of suitable specific gravity, transparency and high oxidation-reduction potential by chemical and electrochemical methods to maintain stable and rapid etching of the printed circuit board. Chemical regeneration is the main method for the regeneration of acidic copper chloride etching solution. The principle is to discharge a certain proportion of the old liquid (high specific gravity), add a certain amount of liquid (low specific gravity), or add a certain amount of water. , to adjust the specific gravity of the etching solution. The oxidizing agent in the same sputum liquid oxidizes the monovalent copper ion to the divalent copper ion, or the oxidizing agent is separately added to increase the oxidation-reduction potential of the etching liquid, thereby restoring the original performance of the etching liquid. Common oxidants are air, oxygen, chlorine, ozone, sodium hypochlorite, sodium chlorate, hydrogen peroxide, and the like. However, the total copper is increasing, and finally it is necessary to exclude a part of the acidic etching liquid to maintain a certain total copper concentration, which not only pollutes the environment, but also causes a large amount of waste of copper and acid; electrochemical regeneration method is an online regeneration method. Metallic copper with commercial value can be produced by electrolysis, but chlorine gas is generated at the same time to form a polluted exhaust gas, which not only pollutes the environment but also causes waste.
[0004] 中国专利申请号为 2010205671550的专利, 公幵了一种含铜离子酸性蚀刻液再 生系统, 该系统用于在线处理酸性蚀刻液, 受到蚀刻线生产吋间的限制, 只能 与蚀刻线同步生产, 并且其系统内部的废气处理装置, 消耗了系统内部的氯元 素, 虽然实现了环保, 但导致资源的浪费, 使得系统内部氯元素流失, 需要额 外添加酸液以保证蚀刻液的效益。 技术问题 [0004] Chinese Patent Application No. 2010205671550, discloses a copper ion acid etching solution regeneration system, which is used for online processing of an acidic etching solution, which is limited by the etching line production time, and can only be etched with Simultaneous production, and the exhaust gas treatment device inside the system consumes the chlorine inside the system. Although it is environmentally friendly, it causes waste of resources, causing the loss of chlorine inside the system, and additional acid solution is needed to ensure the efficiency of the etching solution. technical problem
[0005] 本发明的目的在于克服现有技术的缺点, 提供一种可节约资源的酸性蚀刻废液 循环再生系统。  [0005] It is an object of the present invention to overcome the shortcomings of the prior art and to provide a resource-saving acidic etching waste liquid recycling system.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0006] 本发明的目的通过以下技术方案来实现: 一种可节约资源的酸性蚀刻废液循环 再生系统, 包括蚀刻液处理系统、 氯气回收系统和再生液循环系统, 蚀刻液处 理系统包括蚀刻生产线、 母液储存罐、 电解槽和溶解吸收系统, 电解槽包括阴 极槽、 膜和阳极槽, 母液储存罐、 阴极槽、 阳极槽、 溶解吸收系统依次连通, 蚀刻生产线分别与母液储存罐和溶解吸收系统连通, 溶解吸收系统与蚀刻生产 线连通;  [0006] The object of the present invention is achieved by the following technical solutions: A resource-saving acidic etching waste liquid recycling system, including an etching liquid processing system, a chlorine gas recovery system and a regenerating liquid circulation system, and an etching liquid processing system including an etching production line a mother liquor storage tank, an electrolysis tank and a dissolution absorption system, the electrolysis tank comprises a cathode tank, a membrane and an anode tank, the mother liquor storage tank, the cathode tank, the anode tank, the dissolution absorption system are sequentially connected, and the etching production line is respectively connected with the mother liquid storage tank and the dissolution absorption system Connected, the dissolution absorption system is in communication with the etching line;
[0007] 氯气回收系统包括洗气系统和尾气处理系统, 阳极槽、 洗气系统和尾气处理系 统依次连通;  [0007] The chlorine gas recovery system includes a scrubbing system and an exhaust gas treatment system, and the anode tank, the scrubbing system, and the exhaust gas treatment system are sequentially connected;
[0008] 再生液循环系统包括再生液储罐和再生液处理系统, 阳极槽、 再生液储罐、 再 生液处理系统和蚀刻生产线依次连通。  [0008] The regeneration liquid circulation system includes a regeneration liquid storage tank and a regeneration liquid treatment system, and the anode tank, the regeneration liquid storage tank, the reconditioning liquid treatment system, and the etching production line are sequentially connected.
[0009] 所述的膜为隔膜、 阳离子膜或阴离子膜。 [0009] The membrane is a membrane, a cationic membrane or an anionic membrane.
[0010] 所述的阴极槽通过电解得到电解铜。 [0010] The cathode tank obtains electrolytic copper by electrolysis.
[0011] 所述的电解槽内设有离子浓度检测装置。 [0011] An ion concentration detecting device is disposed in the electrolytic cell.
[0012] 所述的再生液处理系统内设有酸度检测装置。 [0012] The regenerative liquid processing system is provided with an acidity detecting device.
[0013] 所述的该系统内的装置以及管道都使用耐酸、 耐碱、 耐腐蚀的材料制成。  [0013] The apparatus and piping in the system are made of an acid-resistant, alkali-resistant, corrosion-resistant material.
发明的有益效果  Advantageous effects of the invention
有益效果  Beneficial effect
[0014] 本发明具有以下优点: [0014] The present invention has the following advantages:
[0015] 1.该系统用于处理酸性蚀刻废液, 能够在提取金属铜的同吋使蚀刻液再生循环 回用, 实现蚀刻液处理能够离线进行, 提高了处理效率, 有利于通过合理地分 配资源使得蚀刻与蚀刻液处理达到动态平衡, 避免资源浪费, 实现可持续生产  [0015] 1. The system is used for processing acid etching waste liquid, and the etching liquid can be recycled and recycled in the same manner as the metal copper is extracted, so that the etching liquid processing can be performed offline, the processing efficiency is improved, and the reasonable distribution is facilitated. Resources enable dynamic balancing of etching and etching solutions, avoiding waste of resources and achieving sustainable production
[0016] 2.通过采用酸浓缩技术将再生液分离成高酸度的溶液和低酸度的溶液, 高酸度 的溶液直接回到蚀刻线上循环再用, 低酸度的溶液配制成氧化剂后回到蚀刻线 上添加, 整个循环过程中无废液增量产生, 实现真正的零排放。 [0016] 2. By using acid concentration technology to separate the regeneration liquid into a high acidity solution and a low acidity solution, high acidity The solution is directly returned to the etching line for recycling. The low acidity solution is formulated into an oxidant and then returned to the etching line. No waste liquid is generated during the entire cycle to achieve true zero emissions.
[0017] 3.通过本发明可以回收电解氯气, 与产线联动吋氯气去溶解吸收系统与亚铜离 子发生反应生成二价铜离子, 再生蚀刻液直接回到产线循环利用, 若没有与蚀 刻产线联动, 电解氯气可以通过水洗和进一步处理, 制成含氯的有价产品, 以 此可以避免污染环境、 浪费资源, 实现氯元素和水在系统内的循环, 减少额外 添加添加剂或氧化剂, 降低了生产成本, 节约了资源。  [0017] 3. By the invention, the electrolytic chlorine gas can be recovered, and the chlorine gas is dissolved in the production line to react with the cuprous ions to form divalent copper ions, and the regenerated etching liquid is directly returned to the production line for recycling, if not and etching. Through the production line linkage, the electrolyzed chlorine gas can be washed and further processed to produce valuable products containing chlorine, so as to avoid polluting the environment, wasting resources, recycling chlorine and water in the system, and reducing the addition of additives or oxidants. Reduced production costs and saved resources.
对附图的简要说明  Brief description of the drawing
附图说明  DRAWINGS
[0018] 图 1为本一种可节约资源的酸性蚀刻废液循环再生系统的结构示意图;  1 is a schematic structural view of a resource-saving acid etching waste liquid recycling system;
[0019] 图中, 1-蚀刻生产线, 2-母液储存罐, 3-阴极槽, 4-膜, 5-阳极槽, 6-溶解吸收 系统, 7-洗气系统, 8-尾气处理系统, 9-电解铜, 10-再生液储罐, 11-再生液处 理系统。 [0019] In the figure, 1-etching line, 2-mother liquid storage tank, 3-cathode tank, 4-film, 5-anode tank, 6-dissolving absorption system, 7-gas scrubbing system, 8-exhaust gas treatment system, 9 - Electrolytic copper, 10-regenerant storage tank, 11-regeneration liquid treatment system.
本发明的实施方式 Embodiments of the invention
[0020] 下面结合附图对本发明做进一步的描述, 本发明的保护范围不局限于以下所述  [0020] The present invention will be further described below with reference to the accompanying drawings, and the scope of protection of the present invention is not limited to the following
[0021] 如图 1所示, 一种可节约资源的酸性蚀刻废液循环再生系统, 包括蚀刻液处理 系统、 氯气回收系统和再生液循环系统, 蚀刻液处理系统包括蚀刻生产线 1、 母 液储存罐 2、 电解槽和溶解吸收系统 6, 电解槽包括阴极槽 3、 膜 4和阳极槽 5, 母 液储存罐 2、 阴极槽 3、 阳极槽 5、 溶解吸收系统 6依次连通, 蚀刻生产线 1分别与 母液储存罐 2和溶解吸收系统 6连通, 溶解吸收系统 6与蚀刻生产线 1连通; [0021] As shown in FIG. 1, a resource-saving acidic etching waste liquid recycling system includes an etching liquid processing system, a chlorine gas recovery system, and a regenerating liquid circulation system, and the etching liquid processing system includes an etching production line and a mother liquid storage tank. 2. Electrolyzer and dissolution absorption system 6, the electrolytic cell comprises a cathode tank 3, a membrane 4 and an anode tank 5, the mother liquor storage tank 2, the cathode tank 3, the anode tank 5, the dissolution absorption system 6 are sequentially connected, and the etching production line 1 and the mother liquid are respectively The storage tank 2 is in communication with the dissolution absorption system 6, and the dissolution absorption system 6 is in communication with the etching line 1;
[0022] 氯气回收系统包括洗气系统 7和尾气处理系统 8, 阳极槽 5、 洗气系统 7和尾气处 理系统 8依次连通;  [0022] The chlorine gas recovery system includes a scrubbing system 7 and an exhaust gas treatment system 8, and the anode tank 5, the scrubbing system 7 and the exhaust gas treatment system 8 are sequentially connected;
[0023] 再生液循环系统包括再生液储罐 10和再生液处理系统 11, 阳极槽 5、 再生液储 罐 10、 再生液处理系统 11和蚀刻生产线 1依次连通。  The regenerating liquid circulation system includes a regenerant liquid storage tank 10 and a regenerating liquid processing system 11, and the anode tank 5, the regenerant liquid storage tank 10, the regenerating liquid processing system 11, and the etching production line 1 are sequentially connected.
[0024] 本实施例中, 所述的膜 4为隔膜、 阳离子膜或阴离子膜, 可以根据具体的生产 情况来选择使用具体的哪一类过滤膜。 [0025] 本实施例中, 所述的阴极槽 3通过电解得到电解铜 9, 以此可以使液体中的铜离 子达到平衡, 保证蚀刻液的效益, 并且避免铜以离子形态流失导致环境污染, 而铜金属可以作为具有商业价值的商品。 [0024] In the embodiment, the membrane 4 is a membrane, a cation membrane or an anion membrane, and which specific filtration membrane can be selected according to specific production conditions. [0025] In the embodiment, the cathode tank 3 obtains electrolytic copper 9 by electrolysis, thereby balancing the copper ions in the liquid, ensuring the benefit of the etching liquid, and avoiding the environmental pollution caused by the loss of copper in the ion form. Copper metal can be used as a commodity of commercial value.
[0026] 本实施例中, 所述的电解槽内设有离子浓度检测装置, 通过离子浓度检测装置 检测液体内的离子浓度, 根据检测到的信息进行合理的分配资源以及调控流量 , 使得蚀刻生产与蚀刻液处理能够达到动态平衡, 有利于可以持续生产的实现  [0026] In the embodiment, an ion concentration detecting device is disposed in the electrolytic cell, and the ion concentration in the liquid is detected by the ion concentration detecting device, and the resource is appropriately allocated according to the detected information, and the flow rate is regulated, so that the etching is performed. It can achieve dynamic balance with etchant treatment, which is conducive to the realization of continuous production.
[0027] 本实施例中, 所述的再生液处理系统 11内设有酸度检测装置, 再生液处理系统 11通过浓缩的方式分离出高酸度的液体以及低酸度的液体, 通过酸度检测装置 可以检测到酸度的具体值, 当酸度达到所需的要求后可以作为蚀刻液以便被利 用。 [0027] In the embodiment, the regeneration liquid processing system 11 is provided with an acidity detecting device. The regenerating liquid processing system 11 separates the high acidity liquid and the low acidity liquid by concentration, and can be detected by the acidity detecting device. The specific value to the acidity can be used as an etchant to be utilized when the acidity reaches the desired level.
[0028] 本实施例中, 所述的该系统内的装置以及管道都使用耐酸、 耐碱、 耐腐蚀的材 料制成, 以此可以增加系统的使用寿命, 降低维护保养的难度。  [0028] In the embodiment, the device and the pipeline in the system are made of acid-proof, alkali-resistant and corrosion-resistant materials, thereby increasing the service life of the system and reducing the difficulty of maintenance.
[0029] 本发明的工作过程如下: 蚀刻生产线 1上流出的蚀刻液部分进入溶解吸收系统 6 进行储存, 另一部分进入母液储存罐 2进行储存, 由母液储存罐 2控制流量使母 液储存罐 2内的蚀刻液进入阴极槽 3, 在阴极槽 3内的电解作用下, 亚铜离子被还 原成二价铜离子, 二价铜离子被还原成电解铜。 剩余的未被还原的铜离子以及 其他离子通过膜 4进入阳极槽 5。  [0029] The working process of the present invention is as follows: The etching liquid flowing out on the etching line 1 is partially stored in the dissolution absorption system 6 for storage, and the other portion is stored in the mother liquid storage tank 2, and the flow rate is controlled by the mother liquid storage tank 2 to make the mother liquid storage tank 2 The etching solution enters the cathode tank 3. Under the action of electrolysis in the cathode tank 3, cuprous ions are reduced to divalent copper ions, and the divalent copper ions are reduced to electrolytic copper. The remaining unreduced copper ions and other ions enter the anode tank 5 through the membrane 4.
[0030] 本发明的工作过程如下: 蚀刻生产线 1上流出的蚀刻液部分进入溶解吸收系统 6 进行储存, 另一部分进入母液储存罐 2进行储存, 由母液储存罐 2控制流量使母 液储存罐 2内的蚀刻液进入阴极槽 3, 在阴极槽 3内的电解作用下, 亚铜离子被还 原成二价铜离子, 二价铜离子被还原成电解铜, 电解铜经过洗铜装置 9清洗之后 回收利用。 剩余的未被还原的铜离子以及其他离子通过膜 4进入阳极槽 5。  [0030] The working process of the present invention is as follows: The etchant portion flowing out of the etching line 1 enters the dissolution absorbing system 6 for storage, and the other portion enters the mother liquid storage tank 2 for storage, and the flow rate is controlled by the mother liquid storage tank 2 to make the mother liquid storage tank 2 The etching solution enters the cathode tank 3. Under the action of the electrolysis in the cathode tank 3, the cuprous ions are reduced to divalent copper ions, and the divalent copper ions are reduced to electrolytic copper, and the electrolytic copper is washed and washed by the copper washing device 9 . The remaining unreduced copper ions and other ions enter the anode tank 5 through the membrane 4.
[0031] 氯离子在阳极槽 5内的电解作用下被氧化形成氯气, 当蚀刻生产线 1在生产吋, 氯气进入溶剂吸收系统 6, 与亚铜离子发生氧化还原反应得到铜离子以及酸性液 体, 该液体能够作为蚀刻液进入蚀刻生产线 1完成生产; 当蚀刻生产线 1未生产 吋, 氯气进入洗气系统 7内除杂后得到纯氯气, 纯氯气进入尾气处理系统 8后经 过反应制成有价的含氯产品。 由于电解槽内的电解反应未完全进行, 电解后剩余的液体作为再生液包含铜离 子、 氯离子、 氢离子等离子, 再生液具有弱酸性, 再生液进入再生液储罐 10储 存, 并被再生液储罐 10控制流量输送到再生液处理系统 11内, 再生液在再生液 处理系统 11被浓缩分离出高酸度的液体和低酸度的液体, 高酸度的液体作为蚀 刻液与低酸度的液体分别储存, 当蚀刻生产线 1在生产吋, 高酸度的液体可以输 送到蚀刻生产线 1用于生产, 低酸度的液体可以与氧化剂、 添加剂等一起配制成 新液, 回到蚀刻线上缓慢添加以控制蚀刻液的 ORP值, 以此可以实现水循环利用[0031] Chloride ions are oxidized to form chlorine gas under the action of electrolysis in the anode tank 5. When the etching line 1 is in production, chlorine gas enters the solvent absorption system 6, and undergoes redox reaction with cuprous ions to obtain copper ions and an acidic liquid. The liquid can be used as an etchant to enter the etching line 1 to complete the production; when the etching line 1 is not produced, the chlorine gas enters the scrubbing system 7 to obtain pure chlorine gas after being removed, and the pure chlorine gas enters the exhaust gas treatment system 8 and is reacted to form a valuable content. Chlorine products. Since the electrolytic reaction in the electrolytic cell is not completely performed, the liquid remaining after the electrolysis contains ions such as copper ions, chloride ions, and hydrogen ions as the regenerating liquid, and the regenerating liquid has weak acidity, and the regenerating liquid enters the regenerating liquid storage tank 10 to be stored, and is regenerated. The storage tank 10 controls the flow rate to be delivered to the regenerating liquid processing system 11, and the regenerating liquid is concentrated in the regenerating liquid processing system 11 to separate the high acidity liquid and the low acidity liquid, and the high acidity liquid is stored as the etching liquid and the low acidity liquid separately. When the etching line 1 is in production, the high acidity liquid can be sent to the etching line 1 for production, and the low acidity liquid can be formulated into a new liquid together with the oxidant, the additive, etc., and slowly added back to the etching line to control the etching liquid. ORP value, which can achieve water recycling
, 减少系统内的水流失, 减少了资源消耗。 通过控制电解的程度以及液体的流 量可以实现动态平衡, 有利于实现自动化生产以及酸性蚀刻废液离线处理。 , reduce water loss in the system and reduce resource consumption. Dynamic balancing can be achieved by controlling the degree of electrolysis and the flow of liquid, facilitating automated production and off-line processing of acid etching waste.

Claims

权利要求书 Claim
[权利要求 1] 一种可节约资源的酸性蚀刻废液循环再生系统, 其特征在于: 包括蚀 刻液处理系统、 氯气回收系统和再生液循环系统, 蚀刻液处理系统包 括蚀刻生产线 (1) 、 母液储存罐 (2) 、 电解槽和溶解吸收系统 (6 ) , 电解槽包括阴极槽 (3) 、 膜 (4) 和阳极槽 (5) , 母液储存罐 (2) 、 阴极槽 (3) 、 阳极槽 (5) 、 溶解吸收系统 (6) 依次连通, 蚀刻生产线 (1) 分别与母液储存罐 (2) 和溶解吸收系统 (6) 连通 , 溶解吸收系统 (6) 与蚀刻生产线 (1) 连通; 氯气回收系统包括洗气系统 (7) 和尾气处理系统 (8) , 阳极槽 (5 ) 、 洗气系统 (7) 和尾气处理系统 (8) 依次连通;  [Claim 1] A resource-saving acidic etching waste liquid recycling system, comprising: an etching liquid processing system, a chlorine gas recovery system, and a regenerating liquid circulation system, the etching liquid processing system including an etching production line (1), a mother liquid a storage tank (2), an electrolytic cell and a dissolution absorption system (6), the electrolytic cell comprising a cathode tank (3), a membrane (4) and an anode tank (5), a mother liquor storage tank (2), a cathode tank (3), an anode The tank (5) and the dissolution absorption system (6) are sequentially connected, and the etching production line (1) is respectively connected with the mother liquid storage tank (2) and the dissolution absorption system (6), and the dissolution absorption system (6) is connected with the etching production line (1); The chlorine recovery system includes a scrubbing system (7) and an exhaust gas treatment system (8), and the anode tank (5), the scrubbing system (7), and the exhaust gas treatment system (8) are sequentially connected;
再生液循环系统包括再生液储罐 (10) 和再生液处理系统 (11) , 阳 极槽 (5) 、 再生液储罐 (10) 、 再生液处理系统 (11) 和蚀刻生产 线 (1) 依次连通。  The regenerating liquid circulation system includes a regenerant liquid storage tank (10) and a regenerating liquid processing system (11), an anode tank (5), a regenerant liquid storage tank (10), a regenerating liquid processing system (11), and an etching production line (1). .
[权利要求 2] 根据权利要求 1所述的一种可节约资源的酸性蚀刻废液循环再生系统 , 其特征在于: 所述的膜 (4) 为隔膜、 阳离子膜或阴离子膜。  [Claim 2] A resource-saving acidic etching waste liquid recycling system according to claim 1, wherein the film (4) is a separator, a cation film or an anion film.
[权利要求 3] 根据权利要求 1所述的一种可节约资源的酸性蚀刻废液循环再生系统 , 其特征在于: 所述的阴极槽 (3) 通过电解得到电解铜 (9) 。 [Claim 3] A resource-saving acidic etching waste liquid recycling system according to claim 1, characterized in that: the cathode tank (3) obtains electrolytic copper (9) by electrolysis.
[权利要求 4] 根据权利要求 1所述的一种可节约资源的酸性蚀刻废液循环再生系统 , 其特征在于: 所述的电解槽内设有离子浓度检测装置。 [Claim 4] A resource-saving acidic etching waste liquid recycling system according to claim 1, wherein the electrolytic cell is provided with an ion concentration detecting device.
[权利要求 5] 根据权利要求 1所述的一种可节约资源的酸性蚀刻废液循环再生系统 , 其特征在于: 所述的再生液处理系统 (11) 内设有酸度检测装置。 [Claim 5] A resource-saving acidic etching waste liquid recycling system according to claim 1, wherein: the regeneration liquid processing system (11) is provided with an acidity detecting device.
[权利要求 6] 根据权利要求 1所述的一种可节约资源的酸性蚀刻废液循环再生系统 , 其特征在于: 所述的该系统内的装置以及管道都使用耐酸、 耐碱、 耐腐蚀的材料制成。 [Claim 6] A resource-saving acidic etching waste liquid recycling system according to claim 1, wherein: the device and the pipeline in the system are resistant to acid, alkali and corrosion. Made of materials.
PCT/CN2016/077065 2015-09-09 2016-03-23 Resource-saving acidic etching waste solution reuse and recovery system WO2017041471A1 (en)

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CN201510569177.8A CN105002501A (en) 2015-09-09 2015-09-09 Acidic waste etching solution cyclic regeneration system capable of saving resources

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