WO2016206966A1 - Dispositif de commande pour une unité piston-cylindre pneumatique servant à déplacer un organe de fermeture d'une soupape à vide - Google Patents

Dispositif de commande pour une unité piston-cylindre pneumatique servant à déplacer un organe de fermeture d'une soupape à vide Download PDF

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Publication number
WO2016206966A1
WO2016206966A1 PCT/EP2016/062854 EP2016062854W WO2016206966A1 WO 2016206966 A1 WO2016206966 A1 WO 2016206966A1 EP 2016062854 W EP2016062854 W EP 2016062854W WO 2016206966 A1 WO2016206966 A1 WO 2016206966A1
Authority
WO
WIPO (PCT)
Prior art keywords
closing
valve
control line
opening
pressure
Prior art date
Application number
PCT/EP2016/062854
Other languages
German (de)
English (en)
Inventor
Florian Ehrne
Daniel Seitz
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of WO2016206966A1 publication Critical patent/WO2016206966A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B11/00—Servomotor systems without provision for follow-up action; Circuits therefor
    • F15B11/02—Systems essentially incorporating special features for controlling the speed or actuating force of an output member
    • F15B11/028—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force
    • F15B11/032—Systems essentially incorporating special features for controlling the speed or actuating force of an output member for controlling the actuating force by means of fluid-pressure converters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205—Systems with pumps
    • F15B2211/20576—Systems with pumps with multiple pumps
    • F15B2211/20592—Combinations of pumps for supplying high and low pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/21—Systems with pressure sources other than pumps, e.g. with a pyrotechnical charge
    • F15B2211/214—Systems with pressure sources other than pumps, e.g. with a pyrotechnical charge the pressure sources being hydrotransformers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/305—Directional control characterised by the type of valves
    • F15B2211/3056—Assemblies of multiple valves
    • F15B2211/30565—Assemblies of multiple valves having multiple valves for a single output member, e.g. for creating higher valve function by use of multiple valves like two 2/2-valves replacing a 5/3-valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/30—Directional control
    • F15B2211/315—Directional control characterised by the connections of the valve or valves in the circuit
    • F15B2211/31523—Directional control characterised by the connections of the valve or valves in the circuit being connected to a pressure source and an output member
    • F15B2211/31535—Directional control characterised by the connections of the valve or valves in the circuit being connected to a pressure source and an output member having multiple pressure sources and a single output member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
    • F15B2211/71—Multiple output members, e.g. multiple hydraulic motors or cylinders
    • F15B2211/7114—Multiple output members, e.g. multiple hydraulic motors or cylinders with direct connection between the chambers of different actuators
    • F15B2211/7128—Multiple output members, e.g. multiple hydraulic motors or cylinders with direct connection between the chambers of different actuators the chambers being connected in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/70—Output members, e.g. hydraulic motors or cylinders or control therefor
    • F15B2211/76—Control of force or torque of the output member

Definitions

  • a vacuum valve comprising a closure member, a pneumatic piston-cylinder unit having a closing cylinder space and an opening-cylinder space for adjusting the closure member between a position lifted from a valve seat position and a pressed-on the valve seat position, and a control device to a under a system pressure compressed compressed air supply line can be connected and the one connected to the closing cylinder chamber closing control line and connected to the opening cylinder chamber opening control line and a plurality of control valves
  • valve means comprising comprehensive valve means, wherein for adjusting the closure member can be acted upon by the pressure applied to the valve seat position in the position lifted from the valve seat in an opening switching position of the valve means the opening cylinder chamber via the opening control line with under an opening working pressure compressed air and the closing cylinder chamber vented via the closing control line is and for adjusting the closure member of the lifted from the valve seat position in the pressed to the valve seat position in a closed switching position of the valve means of the closing cylinder chamber via the closing control line with under a closing working pressure compressed air is acted upon and the opening-cylinder chamber vented via the opening control line.
  • pneumatic piston-cylinder units For adjusting closure members of vacuum valves to close and open a vacuum valve, are usually used as actuators pneumatic piston-cylinder units. These are by means of pneumatic
  • Control devices which have control valves, driven to pressurize or vent the corresponding cylinder chambers of the piston-cylinder units with compressed air from a compressed air supply line.
  • Open position can be done by separate piston-cylinder units or by a common piston-cylinder unit using appropriate slotted guides. Examples of such L-valves are from the US
  • Closing member is arranged.
  • vacuum valves with inquiresp Rudbaren closure members, with wedge-shaped closure members or with three-dimensional sealing surfaces and seals may be formed.
  • vacuum valves with two closure members which are pressed in the closed state of the vacuum valve to valve seats surrounding the opposite valve openings of the vacuum valve.
  • a vacuum valve with two closure members and opposite Valve openings are disclosed, for example, in US 201 5/01 36236 A1.
  • the closing member closing the vented chamber can not withstand the differential pressure and venting the interior of the vacuum valve, thereby passing through the other closure member the resulting differential pressure is more strongly pressed against the valve seat.
  • Such automatic ventilation of the valve interior and differential pressure of the other closure member is not desired in al len applications. It may also be desirable to increase the tightness of the vacuum valve in the case of sealing against a larger applied differential pressure.
  • the object of the invention is to provide an advantageous control device for a pneumatic piston-cylinder unit of a vacuum valve or an advantageous vacuum valve with such a control device, through which a low-wear operation of a vacuum valve is made possible in a cost effective manner. According to the invention, this is achieved by a control device having the features of claim 1 or by a vacuum valve having the features of claim 9.
  • Booster delivered which is installed in a power closing control line.
  • Differential pressure is desired, which may be in particular atmospheric pressure
  • the force-closing switching position of the valve device is used. Since in this case a provided by a pressure booster force closing working pressure is used, which is above the system pressure in the compressed air supply line, the vacuum valve can have as actuator a relatively small design piston-cylinder unit, which brings space and cost savings.
  • the closing switching position can be used when the vacuum valve is to close against a contrast lower differential pressure and the tightness of the vacuum valve is sufficient in the closed state in this way.
  • pressure booster with larger pressure increases, for example, 1: 3 are known.
  • valve device of the control device further comprises a shut-off switching position. I n this are in connected to a piston-cylinder unit of the vacuum valve
  • the pneumatic control device has a pneumatic valve device which comprises the control valves 12, 13 and 14 and the auxiliary control valve 15. The positions of the control valves 12 and 14 can be shown in the
  • Embodiment be electrically adjusted, but not one
  • the respective opening cylinder chamber 17 is vented and the respective closing cylinder chamber 18 is pressurized with compressed air, which is under a closing working pressure.
  • the opening control line 19 is separated by the control valve 12 from the system pressure in the supply line 16 and connected via the control valve 12 to the environment.
  • the subsequent to the control valve 12 portion of the closing control line 20 is acted upon via the control valve 12 with the system pressure of the compressed air in the supply line 16. From the pressure reducer 22, the system pressure on one of the pressure reducer 22nd
  • Pressure reducer 22 output pressure constant. About the check valve 23 and further via the control valve 1 3, which the two connected thereto sections of the closing control line 20 in this switching position of Valve device connects, this closing working pressure is applied to the respective closing cylinder chamber 18.
  • the passage position of the control valve 13 is taken when the auxiliary control line 35 is vented, which takes place by means of the auxiliary control valve 1 5.
  • Closure members 5, 6 are pressed in the closed-switching position of the valve device with the lower pressing force to its respective valve seat and the valve device is moved into the force-closing switching position, the
  • the force closing working pressure is preferably twice or more than twice as large, e.g. three times as large as that in the supply line
  • Vacuum chambers is present, for example, less than 100 mBar, so can be taken to close the vacuum valve, the closing switching position of the valve device of the control device. If, by contrast, a higher differential pressure exists between the two vacuum chambers, for example of 1 bar, and / or higher demands on the seal between the two chambers, the vacuum valve can be closed by assuming the force-closing switching position of the valve device.
  • This second closed volume includes in
  • control valve 30 From the control valve 30 is connected to the closing cylinder chamber 18 closing control line 20, in which as in the embodiment previously a
  • Pressure reducer 22 and a check valve 23 are installed. Downstream of the check valve 23 branches off from the closing control line 20 from the vent line 34, which can be shut off by the control valve 29 or connected to the environment. From the control valve 32, the force-closing control line 21 goes out, in which, as described above, a pressure booster 24 and a check valve 25 are installed. The force-closing control line 21 opens downstream of the check valve 25 in the closing control line 20th
  • control valves 28, 29 are opened and the control valves 30, 31 and 32 are closed.
  • vent lines 33, 34 with the control valves 29, 31 3 and 2-way valves in the opening control line 19 and the closing control line 20 may be installed at the points of the branches of the vent lines 33, 34. In one position of the 3/2-way valves, the input would be connected to the output and in the other position, the input would be shut off and the output connected to a vent port of the control valve.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

L'invention concerne un dispositif de commande pour une unité piston-cylindre pneumatique (7, 7'), laquelle comprend un espace cylindrique de fermeture (18) et un espace cylindrique d'ouverture (17) pour déplacer un organe de fermeture (5, 6) d'une soupape à vide entre une position soulevée d'un siège de soupape et une position pressée sur le siège de soupape. Le dispositif comprend une conduite de commande de fermeture (20) pour le raccordement à l'espace cylindrique de fermeture (18) et une conduite de commande d'ouverture (19) pour le raccordement à l'espace cylindrique d'ouverture (17) et un ensemble de soupapes comprenant plusieurs soupapes de commande (12-14 ; 28-32). Pour déplacer l'organe de fermeture (5, 6) à partir de la position soulevée du siège de soupape, la conduite de commande de fermeture (20), dans la position pressée sur le siège de soupape, peut être sollicitée par de l'air comprimé soumis à une pression de travail de fermeture, lorsque l'ensemble de soupapes se trouve dans une position de commande de fermeture, et la commande de conduite d'ouverture (19) est ventilée. Le dispositif de commande comprend en outre une conduite de commande à force (21 ), dans laquelle est agencé un élévateur de pression (24). Lorsque l'ensemble de soupapes se trouve dans une position de commande à force, la conduite de commande de fermeture (20) peut être sollicitée par de l'air comprimé soumis à une pression de travail à force délivrée par l'élévateur de pression et accrue par rapport à la pression de travail de fermeture et à la pression du système, par l'intermédiaire de la conduite de commande à force (21), et la conduite de commande d'ouverture (19) est ventilée.
PCT/EP2016/062854 2015-06-22 2016-06-07 Dispositif de commande pour une unité piston-cylindre pneumatique servant à déplacer un organe de fermeture d'une soupape à vide WO2016206966A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT3952015 2015-06-22
ATA395/2015 2015-06-22

Publications (1)

Publication Number Publication Date
WO2016206966A1 true WO2016206966A1 (fr) 2016-12-29

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PCT/EP2016/062854 WO2016206966A1 (fr) 2015-06-22 2016-06-07 Dispositif de commande pour une unité piston-cylindre pneumatique servant à déplacer un organe de fermeture d'une soupape à vide

Country Status (1)

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WO (1) WO2016206966A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107514395A (zh) * 2017-08-29 2017-12-26 江苏新技机械有限公司 快速夹线装置的控制气路及控制方法
CN108006015A (zh) * 2017-11-24 2018-05-08 四川凌峰航空液压机械有限公司 动态试验台供回油液压循环系统

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052036A (en) 1974-07-15 1977-10-04 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit
DE2745276A1 (de) * 1976-10-28 1978-05-03 Welko Ind Spa Hydraulische einrichtung zur zufuehrung einer fluessigkeit unter zwei verschiedenen druecken
GB2205926B (en) 1987-05-26 1991-11-20 Schertler Siegfried A valve
US5363872A (en) * 1993-03-16 1994-11-15 Applied Materials, Inc. Low particulate slit valve system and method for controlling same
WO2002024441A1 (fr) * 2000-09-20 2002-03-28 Laeis Bucher Gmbh Dispositif de commande pour une presse hydraulique et procede pour son fonctionnement
US6367770B1 (en) 2000-03-23 2002-04-09 Vat Holding Ag Vacuum valve for separating two vacuum chambers
US6431518B1 (en) 2001-01-11 2002-08-13 Vat Holding Ag Vacuum valve
US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
US7036794B2 (en) 2004-08-13 2006-05-02 Vat Holding Ag Method for control of a vacuum valve arranged between two vacuum chambers
US7066443B2 (en) 2002-12-16 2006-06-27 Smc Corporation Gate valve
US20110175011A1 (en) 2008-09-29 2011-07-21 Vat Holding Ag Vacuum valve
US8141847B2 (en) 2007-07-24 2012-03-27 Vat Holding Ag Method for controlling or regulating a vacuum valve
US20130277590A1 (en) 2012-04-19 2013-10-24 Vat Holding Ag Valve
EP2719839A1 (fr) * 2012-10-09 2014-04-16 Caterpillar Work Tools B. V. Circuit hydraulique d'un vérin hydraulique
US20150136236A1 (en) 2013-11-21 2015-05-21 Vat Holding Ag Method of operating a valve

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4052036A (en) 1974-07-15 1977-10-04 Vat Aktiengesellschaft Fur Vakuum-Apparate-Technik Sliding device for the gas-tight and air-tight closure of a container opening or of a conduit
DE2745276A1 (de) * 1976-10-28 1978-05-03 Welko Ind Spa Hydraulische einrichtung zur zufuehrung einer fluessigkeit unter zwei verschiedenen druecken
GB2205926B (en) 1987-05-26 1991-11-20 Schertler Siegfried A valve
US5363872A (en) * 1993-03-16 1994-11-15 Applied Materials, Inc. Low particulate slit valve system and method for controlling same
US6367770B1 (en) 2000-03-23 2002-04-09 Vat Holding Ag Vacuum valve for separating two vacuum chambers
WO2002024441A1 (fr) * 2000-09-20 2002-03-28 Laeis Bucher Gmbh Dispositif de commande pour une presse hydraulique et procede pour son fonctionnement
US6431518B1 (en) 2001-01-11 2002-08-13 Vat Holding Ag Vacuum valve
US7066443B2 (en) 2002-12-16 2006-06-27 Smc Corporation Gate valve
US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
US7036794B2 (en) 2004-08-13 2006-05-02 Vat Holding Ag Method for control of a vacuum valve arranged between two vacuum chambers
US8141847B2 (en) 2007-07-24 2012-03-27 Vat Holding Ag Method for controlling or regulating a vacuum valve
US20110175011A1 (en) 2008-09-29 2011-07-21 Vat Holding Ag Vacuum valve
US20130277590A1 (en) 2012-04-19 2013-10-24 Vat Holding Ag Valve
EP2719839A1 (fr) * 2012-10-09 2014-04-16 Caterpillar Work Tools B. V. Circuit hydraulique d'un vérin hydraulique
US20150136236A1 (en) 2013-11-21 2015-05-21 Vat Holding Ag Method of operating a valve

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107514395A (zh) * 2017-08-29 2017-12-26 江苏新技机械有限公司 快速夹线装置的控制气路及控制方法
CN107514395B (zh) * 2017-08-29 2023-06-02 江苏星基智能装备有限公司 快速夹线装置的控制气路及控制方法
CN108006015A (zh) * 2017-11-24 2018-05-08 四川凌峰航空液压机械有限公司 动态试验台供回油液压循环系统
CN108006015B (zh) * 2017-11-24 2023-08-15 四川凌峰航空液压机械有限公司 动态试验台供回油液压循环系统

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