WO2016197553A1 - 动态特性可调微运动平台 - Google Patents

动态特性可调微运动平台 Download PDF

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Publication number
WO2016197553A1
WO2016197553A1 PCT/CN2015/095409 CN2015095409W WO2016197553A1 WO 2016197553 A1 WO2016197553 A1 WO 2016197553A1 CN 2015095409 W CN2015095409 W CN 2015095409W WO 2016197553 A1 WO2016197553 A1 WO 2016197553A1
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Prior art keywords
micro
motion
platform
outer frame
sub
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English (en)
French (fr)
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陈新
杨志军
白有盾
陈新度
高健
贺云波
陈云
李成祥
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Guangdong University of Technology
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Guangdong University of Technology
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Priority to US15/376,658 priority Critical patent/US10232477B2/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
    • B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
    • B25H1/02—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby of table type

Definitions

  • the invention relates to a precision motion platform, which can be used for precision operation and macro-micro composite high-speed precision compensation.
  • the invention relates to a dynamic characteristic adjustable micro motion platform.
  • micro-feed mechanism In order to achieve one-dimensional precision movement, accurate and stable feeding mechanism is particularly important because it is closely related to the quality of the product. In addition, due to the small size and high precision of complex optical free-form surfaces, strict requirements are imposed on the micro-feed mechanism.
  • the micro feed system is the basis for processing such products, and is widely used in fast knife servo feed systems, micro motion tables and macro micro composite platforms.
  • Conventional micro-feed devices usually adopt fixed frequency design, which imposes extremely high requirements on material properties and manufacturing errors. Especially when processing different products, the driving frequency usually changes, so that the displacement amplification factor of the fixed-frequency motion platform is inconsistent. Thereby the displacement is amplified and distorted.
  • a fast-tuning fast-blade servo (Invention Patent Application No. 201210055119.X) invented a fast-torque fast-serving servo mechanism that uses a symmetrically arranged flexible hinge to eliminate vertical associated motion .
  • the stiffness adjustment is achieved by the compression spring mounted on the front, which can only be changed by replacing the spring and cannot be continuously adjusted.
  • Prior Art 2 A frequency-tunable fast-blade servo feed device based on a flexible hinge amplifying mechanism (Invention Application No. 201210250524.7) invents a fast-knife servo mechanism based on a flexible hinge shrapnel, the frequency adjustment principle is through the tension of the elastic piece, Continuous adjustment of frequency and stiffness can be achieved.
  • the mechanism uses a displacement amplification method to have a flexible hinge with stress concentration, which affects the service life of the mechanism.
  • Prior Art 3 A stiffness-frequency adjustable one-dimensional micro-motion platform based on the principle of stress stiffening (Invention Application No.: 201410214605.0) invents a pre-stressed film based on frequency adjustable, which can be used according to different working conditions and driving frequencies.
  • the natural frequency of the micro-motion platform can be adjusted before or during work, and the flexible hinge can be eliminated.
  • the chain amplifying mechanism uses a voice coil motor instead of the piezoelectric ceramic.
  • the non-contact driving and displacement measurement can determine the load condition in real time, and dynamically adjust the frequency of the driving mechanism according to the change of the load condition, so that the dynamic characteristic can be realized. match.
  • the mechanism will have a resonance point during the working motion, so that the micro-motion platform can not work at any frequency point, and it is necessary to adjust the avoidance resonance point to define the working frequency range.
  • the invention adds an anti-resonance damping structure, so that the micro-motion platform can work at any frequency point without generating infinite amplitude, and can operate in any frequency band without avoiding the resonance point.
  • the object of the present invention is to provide a dynamically adjustable micro-motion platform that can work at any frequency point, by adjusting the tension and changing the stiffness and natural frequency of the mechanism, and setting the maximum frequency point by the variable damper. Excellent damping to achieve consistent displacement output requirements at any frequency.
  • Dynamically adjustable micro-motion platform including base, shrapnel set, micro-motion sub-platform, outer frame, drive, micro-motion table, tension adjustment mechanism, displacement sensor and variable damper;
  • Two sides of the micro-motion sub-platform are connected to the inner wall of the outer frame by the elastic piece group, the elastic pieces in the elastic piece group are arranged in parallel, and the longitudinal direction of the elastic piece is perpendicular to the movement of the micro-motion sub-platform direction;
  • the outer frame is rigidly fixed to the base, and the micro-motion table is rigidly fixed to the micro-motion sub-platform;
  • the driver includes a stator and a mover, the stator is fixed to the base or the outer frame, and the mover is fixed on the micro-motion sub-platform;
  • the displacement sensor is disposed at an end of the micro motion sub-platform in a feeding direction
  • a groove is formed at a joint between the outer frame and the elastic piece group, so that a thinner inner side of the outer frame is formed.
  • variable damper is disposed within the displacement sensor.
  • variable damper is an extrusion damper or a magnetorheological damper.
  • variable damper is a shear damper.
  • the displacement sensor is a capacitive sensor or an inductive sensor.
  • the shrapnel group, the micro motion sub-platform and the outer frame are a unitary structure.
  • the tension adjusting mechanism is a bolt passing through the slot, and two ends thereof are respectively connected to both sides of the slot.
  • the tension adjusting mechanism is a piezoelectric ceramic driver passing through the slot, and two ends thereof are respectively connected to both sides of the slot.
  • the technical principle of the frequency adjustment of the micro-motion platform proposed by the invention is that the natural frequency of the compliant mechanism formed by the pre-stressed film is related to the tension of the pre-stressed film, and the natural frequency of the mechanism is adjusted by adjusting the tension in the pre-stressed film.
  • the micro-motion platform can work at any frequency point without adjusting the resonance point; changing the tension of the mechanism by adjusting the tension And the natural frequency, and the optimal damping of any frequency point is set by the variable damper to achieve the consistent displacement output requirement at any frequency.
  • Figure 1 is a front elevational view of an example of the present invention
  • Figure 2 is a front elevational view of another example of the present invention.
  • FIG. 3 is a schematic view showing the integrated structure of the shrapnel group, the micro motion sub-platform and the outer frame of the one-dimensional micro-motion platform of the present invention.
  • the dynamic characteristic adjustable micro motion platform comprises a base 1, a spring group 201, a micro motion sub-platform 202, an outer frame 203, a driver, a micro-motion table 4, a tension adjusting mechanism 7, a displacement sensor 6, and a variable damper 8;
  • the two sides of the micro-motion sub-platform 202 are connected to the inner wall of the outer frame 203 through the elastic group 201.
  • the elastic pieces in the elastic group 201 are arranged in parallel, and the longitudinal direction of the elastic piece is perpendicular to the micro motion.
  • the outer frame 203 is rigidly fixed to the base 1, the micro-motion table 4 is rigidly fixed to the micro-motion sub-platform 202;
  • the driver includes a stator 301 and a mover 302, the stator 301 is fixed to the base 1 or the outer frame 203, and the mover 302 is fixed on the micro-motion sub-platform 202;
  • the displacement sensor 6 is disposed at an end of the micro motion sub-platform 202 in a feeding direction;
  • a groove 2 is formed at the joint of the outer frame 203 and the elastic piece group 201, so that a thin deformable elastic member 5 is formed inside the outer frame 203, and the outer frame 203 is provided to adjust the deformation of the elastic member 5.
  • variable damper 8 is disposed within the displacement sensor 6.
  • the driver drives the micro motion sub-platform 202 and the micro-motion table 4 connected thereto to generate one-dimensional micro-displacement feed.
  • the micro-motion table 4 is mounted with a functional component such as a cutter, and generates a one-dimensional operation under the driving action of the driver. Displacement, complete the corresponding process action, and pass
  • the tension adjusting mechanism 7 changes the degree of tightness of the elastic group 201 to change the natural frequency of the mechanism in the above micro motion, thereby changing the motion characteristics of the fine motion table 4.
  • a displacement sensor 6 is used to detect the one-dimensional micro-displacement of the micro-motion table 4.
  • a displacement damper 8 is disposed in the displacement sensor 6 for connecting the outer frame 203 and the micro-motion table 4, and the variable damper 8 functions to avoid the infinite frequency when the resonance occurs, so that the micro-motion platform works. In any frequency range, there is no need to adjust to avoid the resonance point, which improves the operating frequency range.
  • the variable damper 8 uses the displacement sensor 6 as a carrier to reduce the independent connection structure of the entire dynamic characteristic adjustable micro-motion platform, and reduces the influence of the micro-motion frequency range due to the increase of the connection structure, thereby ensuring the maximum operating frequency range.
  • variable damper 8 is an extruded damper or a magnetorheological damper. Extrusion type damping is large, it can be fixed in package, no leakage, and easy to implement.
  • variable damper 8 is a shear damper.
  • the shear damper has good linearity and is easy to control.
  • the displacement sensor 6 is a capacitive sensor or an inductive sensor.
  • the elastic group 201, the micro motion sub-platform 202 and the outer frame 203 are of a unitary structure. As shown in Fig. 3, the whole piece of material is obtained by milling, EDM, etc., which avoids the assembly error of the parts and can improve the movement precision of the platform.
  • the tension adjusting mechanism 7 is a bolt passing through the slot 2, and two ends thereof are respectively connected to both sides of the slot 2. As shown in FIG. 1 , the bolt can manually adjust the displacement in the longitudinal direction, change the deformation degree of the elastic member 5, and then change the elastic tension of the elastic assembly 201 to realize dynamic adjustment of the natural frequency of the structure of the platform.
  • the tension adjusting mechanism 7 is a piezoelectric ceramic driver passing through the slot 2, and two ends thereof are respectively connected to both sides of the slot 2.
  • the tension adjusting mechanism 7 includes a bolt And a piezoelectric ceramic sheet 701.
  • the piezoelectric ceramic piece 701 can be displaced in the longitudinal direction of the bolt under the applied voltage, and the deformation degree of the elastic member 5 is changed, thereby changing the tension of the elastic piece of the elastic piece group 201, thereby realizing the inherent structure of the platform. Dynamic adjustment of frequency.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)

Abstract

动态特性可调微运动平台，包括基座(1)、弹片组(201)、微运动子平台(202)、外框架(203)、驱动器、微动工作台(4)、张紧力调节机构(7)、位移传感器(6)和可变阻尼器(8)。弹片组设于微运动子平台的两侧，且弹片的长度方向垂直于微运动子平台的运动方向。位移传感器设于微运动子平台的进给方向的端部。可变阻尼器设置于位移传感器内。通过调节张紧力来改变机构的刚度和固有频率，并通过可变阻尼器设置任意频率点的最优阻尼，实现任意频率下的一致位移输出要求。

Description

动态特性可调微运动平台 技术领域
本发明涉及精密运动平台，可用于精密操作和宏微复合高速精密补偿，本发明具体涉及动态特性可调微运动平台。
背景技术
为了实现一维精密运动，精确、稳定的进给机构显得尤为重要，因为它与产品的质量密切相关。另外，复杂光学自由曲面由于体积小，高精度更是对微进给机构提出了严格的要求。微进给系统是加工此类产品的基础，其广泛应用于快刀伺服进给系统，微动工作台和宏微复合平台等中。传统的微进给装置通常采用固定频率设计，对材料特性和制造误差提出了极高的要求，尤其在加工不同产品时，其驱动频率通常会变化，使得固定频率的运动平台位移放大因子不一致，从而使得位移放大失真。
在先技术1：刚度可调节的快刀伺服器(发明专利申请号201210055119.X)发明了一种刚度可调的快刀伺服机构，该机构的原理是采用对称布置的柔性铰链，消除垂向伴生运动。刚度调节是通过安装在前面的压紧弹簧，只能通过更换弹簧来该改变刚度，不能连续可调。
在先技术2：一种基于柔性铰链放大机构的频率可调快刀伺服进给装置(发明申请号：201210250524.7)发明了一种基于柔性铰链弹片的快刀伺服机构，频率调节原理是通过弹片的张力，可以实现频率和刚度的连续可调。但是，该机构采用位移放大方式存在有应力集中的柔性铰链，影响机构的使用寿命。
在先技术3：基于应力刚化原理的刚度频率可调一维微动平台(发明申请号：201410214605.0)发明了一种基于预应力膜，频率可调，能根据不同的工况和驱动频率，可在工作前或工作过程中调节微动平台的固有频率，取消了柔性铰 链放大机构，并采用音圈电机替代压电陶瓷，通过非接触的驱动和位移测量，实时判断载荷工况，并根据载荷工况的变化，动态调节驱动机构的频率，可以实现动态特性的智能匹配。虽然解决了上述两个问题，但是该机构在工作运动过程中会出现共振点，使其微动平台不可工作在任意频率点上，需要通过调节避开共振点，限定了工作频率范围。本发明增设了抗共振的阻尼结构，使微动平台可工作在任意频率点上而不产生无穷的振幅，无需避开共振点，可在任意频带上工作。
发明内容
本发明的目的在于提出一种可在任意频率点上工作的动态特性可调微运动平台，通过调节张紧力来改变机构的刚度和固有频率，并通过可变阻尼器设置任意频率点的最优阻尼，实现任意频率下的一致位移输出要求。
为达此目的，本发明采用以下技术方案：
动态特性可调微运动平台，包括基座、弹片组、微运动子平台、外框架、驱动器、微动工作台、张紧力调节机构、位移传感器和可变阻尼器；
所述微运动子平台的两侧通过所述弹片组与所述外框架内壁连接，所述弹片组内的弹片为平行布置，且所述弹片的长度方向垂直于所述微运动子平台的运动方向；
所述外框架刚性固定于所述基座，所述微动工作台刚性固定于所述微运动子平台；
所述驱动器包括有定子和动子，所述的定子固定于所述基座或者所述外框架，所述动子固定在所述微运动子平台上；
所述位移传感器设于所述微运动子平台的进给方向的端部；
所述外框架与所述弹片组连接处设有槽，使所述外框架内侧形成较薄的可 变形的弹性件，所述外框架设有调节所述弹性件变形度的所述张紧力调节机构；
所述可变阻尼器设置于所述位移传感器内。
优选的，所述可变阻尼器为挤压型阻尼器或磁流变阻尼器。
优选的，所述可变阻尼器为剪切型阻尼器。
优选的，所述位移传感器为电容式传感器或电感式传感器。
优选的，所述弹片组、微运动子平台和外框架为一体式结构。
优选的，所述张紧力调节机构为穿过所述槽的螺栓，其两端分别连接于所述槽的两侧。
优选的，所述张紧力调节机构为穿过所述槽的压电陶瓷驱动器，其两端分别连接于所述槽的两侧。
本发明所提出的微动平台频率调节的技术原理为：预应力膜所构成的柔顺机构的固有频率与预应力膜的张力相关，通过调节预应力膜内的张紧力来调节机构的固有频率，满足不同工况的要求，并通过在位移传感器上设置有可变阻尼器，使微动平台可在任意频率点上工作，无需调节避开共振点；通过调节张紧力来改变机构的刚度和固有频率，并通过可变阻尼器设置任意频率点的最优阻尼，实现任意频率下的一致位移输出要求。
附图说明
图1是本发明的一种实例的正视图；
图2是本发明的另一种实例的正视图；
图3是本发明的一维微动平台的弹片组、微运动子平台和外框架的一体式结构示意图。
其中，基座1，槽2，弹片组201，微运动子平台202，外框架203，定子301， 动子302，微动工作台4，弹性件5，位移传感器6，张紧力调节机构7，可变阻尼器8，压电陶瓷片701，外框架203。
具体实施方式
下面结合附图并通过具体实施方式来进一步说明本发明的技术方案。
动态特性可调微运动平台，包括基座1、弹片组201、微运动子平台202、外框架203、驱动器、微动工作台4、张紧力调节机构7、位移传感器6和可变阻尼器8；
所述微运动子平台202的两侧通过所述弹片组201与所述外框架203内壁连接，所述弹片组201内的弹片为平行布置，且所述弹片的长度方向垂直于所述微运动子平台202的运动方向；
所述外框架203刚性固定于所述基座1，所述微动工作台4刚性固定于所述微运动子平台202；
所述驱动器包括有定子301和动子302，所述的定子301固定于所述基座1或者所述外框架203，所述动子302固定在所述微运动子平台202上；
所述位移传感器6设于所述微运动子平台202的进给方向的端部；
所述外框架203与所述弹片组201连接处设有槽2，使所述外框架203内侧形成较薄的可变形的弹性件5，所述外框架203设有调节所述弹性件5变形度的所述张紧力调节机构7；
所述可变阻尼器8设置于所述位移传感器6内。
如图1或图2所示，所述驱动器驱动所述微运动子平台202及与其连接的微动工作台4产生一维微位移进给。在所述弹片组201的牵制作用下，所述运动部分在非进给方向的运动被抑制，所述微动工作台4安装有刀具等功能组件，在所述驱动器的驱动作用下产生一维位移，完成相应的工艺动作，并通过 所述张紧力调节机构7改变所述弹片组201的松紧程度可以改变上述微运动中的机构固有频率，从而改变所述微动工作台4运动特性。位移传感器6用于所述检测微动工作台4的一维微位移。
用于连接所述外框架203与所述微动工作台4的位移传感器6内设置有可变阻尼器8，可变阻尼器8的作用是避免产生共振时频率无穷大，使微动平台工作在任意频率范围，无需通过调节来避开共振点，提高了工作频率范围。可变阻尼器8以位移传感器6为载体，减少整个动态特性可调微运动平台的独立连接结构，减少微动频率范围因连接结构的增多而降低的影响，确保最大的工作频率范围。
优选的，所述可变阻尼器8为挤压型阻尼器或磁流变阻尼器。挤压型阻尼大，可以固定封装，无泄露，容易实现。
优选的，所述可变阻尼器8为剪切型阻尼器。剪切型阻尼器线性度好，容易控制。
优选的，所述位移传感器6为电容式传感器或电感式传感器。优选的，所述弹片组201、微运动子平台202和外框架203为一体式结构。如图3所示，由整块材料经过铣削、电火花加工等方式获取，避免了零件的装配误差，可以提高平台运动精度。
优选的，所述张紧力调节机构7为穿过所述槽2的螺栓，其两端分别连接于所述槽2的两侧。如图1所示，所述螺栓可手动调节长度方向产生位移，改变所述弹性件5的变形度，进而改变弹片组201的弹片张紧力，实现对平台的结构固有频率的动态调整。
优选的，所述张紧力调节机构7为穿过所述槽2的压电陶瓷驱动器，其两端分别连接于所述槽2的两侧。如图2所示，所述张紧力调节机构7包括螺栓 和压电陶瓷片701。所述压电陶瓷片701在外加电压作用下可在螺栓的长度方向产生位移，改变所述弹性件5的变形度，进而改变所述弹片组201的弹片张紧力，实现对平台的结构固有频率的动态调整。
以上结合具体实施例描述了本发明的技术原理。这些描述只是为了解释本发明的原理，而不能以任何方式解释为对本发明保护范围的限制。基于此处的解释，本领域的技术人员不需要付出创造性的劳动即可联想到本发明的其它具体实施方式，这些方式都将落入本发明的保护范围之内。

Claims (7)

  1. 一种动态特性可调微运动平台，其特征在于：包括基座、弹片组、微运动子平台、外框架、驱动器、微动工作台、张紧力调节机构、位移传感器和可变阻尼器；
    所述微运动子平台的两侧通过所述弹片组与所述外框架内壁连接，所述弹片组内的弹片为平行布置，且所述弹片的长度方向垂直于所述微运动子平台的运动方向；
    所述外框架刚性固定于所述基座，所述微动工作台刚性固定于所述微运动子平台；
    所述驱动器包括有定子和动子，所述的定子固定于所述基座或者所述外框架，所述动子固定在所述微运动子平台上；
    所述位移传感器设于所述微运动子平台的进给方向的端部；
    所述外框架与所述弹片组连接处设有槽，使所述外框架内侧形成较薄的可变形的弹性件，所述外框架设有调节所述弹性件变形度的所述张紧力调节机构；
    所述可变阻尼器设置于所述位移传感器内。
  2. 根据权利要求1所述的动态特性可调微运动平台，其特征在于：所述可变阻尼器为挤压型阻尼器或磁流变阻尼器。
  3. 根据权利要求1所述的动态特性可调微运动平台，其特征在于：所述可变阻尼器为电流变或磁流变阻尼器。
  4. 根据权利要求1所述的动态特性可调微运动平台，其特征在于：所述位移传感器为电容式传感器、电感式传感器或光栅尺等非接触式传感器。
  5. 根据权利要求1所述的动态特性可调微运动平台，其特征在于：所述弹片组、微运动子平台和外框架为一体式结构。
  6. 根据权利要求1所述的动态特性可调微运动平台，其特征在于：所述张紧力调节机构为穿过所述槽的螺栓，其两端分别连接于所述槽的两侧。
  7. 根据权利要求1所述的动态特性可调微运动平台，其特征在于：所述张紧力调节机构为穿过所述槽的压电陶瓷驱动器，其两端分别连接于所述槽的两侧。
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109215730A (zh) * 2018-10-15 2019-01-15 安徽理工大学 一种基于柔性铰链的位移换向放大机构
CN110189791A (zh) * 2019-05-31 2019-08-30 中国工程物理研究院机械制造工艺研究所 基于双向预紧的初始转角误差可调节的微纳平台

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104889950A (zh) * 2015-06-08 2015-09-09 广东工业大学 动态特性可调微运动平台
CN107378514B (zh) * 2016-05-16 2019-02-05 大银微系统股份有限公司 挠性机构及含有该挠性机构的龙门装置
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CN111975412B (zh) * 2020-08-26 2022-03-11 山东理工大学 用于切削加工的单向加工力的测量与补偿装置

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6042079A (en) * 1996-07-18 2000-03-28 Mikroskopie Und Systeme Gmbh Device for vibration isolation
US6484602B1 (en) * 1999-06-21 2002-11-26 National Institute Of Standards And Technology Six-degree of freedom micro-positioner
CN102829118A (zh) * 2012-09-17 2012-12-19 北京航空航天大学 一种基于2:1内共振的柔性机械臂耗能减振方法及实现装置
CN103963033A (zh) * 2014-05-20 2014-08-06 广东工业大学 基于应力刚化原理的刚度频率可调一维微动平台
CN104455139A (zh) * 2014-11-07 2015-03-25 浙江大学 基于自适应电磁阻尼的弹簧隔振装置及隔振方法
CN104889792A (zh) * 2015-06-08 2015-09-09 广东工业大学 可变阻尼式移动支撑与张紧力复合调节微动平台
CN104889950A (zh) * 2015-06-08 2015-09-09 广东工业大学 动态特性可调微运动平台
CN104889951A (zh) * 2015-06-08 2015-09-09 广东工业大学 动态特性可调宏微一体化复合平台
CN204658384U (zh) * 2015-06-08 2015-09-23 广东工业大学 动态特性可调微运动平台
CN204700849U (zh) * 2015-06-08 2015-10-14 广东工业大学 动态特性可调宏微一体化复合平台
CN204725204U (zh) * 2015-06-08 2015-10-28 广东工业大学 可变阻尼式移动支撑与张紧力复合调节微动平台

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139119A (en) * 1988-08-13 1992-08-18 Robert Bosch Gmbh Apparatus for damping resilient vehicle wheel suspension systems
CN201283758Y (zh) * 2008-10-23 2009-08-05 天津工程师范学院 新型磁控悬架
CN103244603B (zh) * 2013-05-09 2015-02-18 青岛理工大学 板梁结构振动的主动电磁控制系统
CN103867634B (zh) * 2014-03-25 2015-09-09 长安大学 一种变阻尼动力吸振器的控制方法
CN104440343B (zh) * 2014-11-26 2017-05-10 广东工业大学 直线电机共定子双驱动宏微一体化高速精密运动一维平台

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6042079A (en) * 1996-07-18 2000-03-28 Mikroskopie Und Systeme Gmbh Device for vibration isolation
US6484602B1 (en) * 1999-06-21 2002-11-26 National Institute Of Standards And Technology Six-degree of freedom micro-positioner
CN102829118A (zh) * 2012-09-17 2012-12-19 北京航空航天大学 一种基于2:1内共振的柔性机械臂耗能减振方法及实现装置
CN103963033A (zh) * 2014-05-20 2014-08-06 广东工业大学 基于应力刚化原理的刚度频率可调一维微动平台
CN104455139A (zh) * 2014-11-07 2015-03-25 浙江大学 基于自适应电磁阻尼的弹簧隔振装置及隔振方法
CN104889792A (zh) * 2015-06-08 2015-09-09 广东工业大学 可变阻尼式移动支撑与张紧力复合调节微动平台
CN104889950A (zh) * 2015-06-08 2015-09-09 广东工业大学 动态特性可调微运动平台
CN104889951A (zh) * 2015-06-08 2015-09-09 广东工业大学 动态特性可调宏微一体化复合平台
CN204658384U (zh) * 2015-06-08 2015-09-23 广东工业大学 动态特性可调微运动平台
CN204700849U (zh) * 2015-06-08 2015-10-14 广东工业大学 动态特性可调宏微一体化复合平台
CN204725204U (zh) * 2015-06-08 2015-10-28 广东工业大学 可变阻尼式移动支撑与张紧力复合调节微动平台

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109215730A (zh) * 2018-10-15 2019-01-15 安徽理工大学 一种基于柔性铰链的位移换向放大机构
CN109215730B (zh) * 2018-10-15 2024-05-28 安徽理工大学 一种基于柔性铰链的位移换向放大机构
CN110189791A (zh) * 2019-05-31 2019-08-30 中国工程物理研究院机械制造工艺研究所 基于双向预紧的初始转角误差可调节的微纳平台
CN110189791B (zh) * 2019-05-31 2024-01-30 中国工程物理研究院机械制造工艺研究所 基于双向预紧的初始转角误差可调节的微纳平台

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