WO2016194939A1 - 金属体の形状検査装置及び金属体の形状検査方法 - Google Patents
金属体の形状検査装置及び金属体の形状検査方法 Download PDFInfo
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- WO2016194939A1 WO2016194939A1 PCT/JP2016/066159 JP2016066159W WO2016194939A1 WO 2016194939 A1 WO2016194939 A1 WO 2016194939A1 JP 2016066159 W JP2016066159 W JP 2016066159W WO 2016194939 A1 WO2016194939 A1 WO 2016194939A1
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- illumination light
- metal body
- inclination
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- light source
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Definitions
- the present invention relates to a metal body shape inspection apparatus and a metal body shape inspection method.
- a fluorescent lamp, a light emitting diode (LED), or illumination light using laser light or the like is used, and the reflection of the illumination light from the measurement object is performed.
- Patent Document 1 discloses a method of measuring the shape of the tire surface by a so-called light cutting method using line light and an imaging camera.
- Patent Document 2 can be obtained by using periodically modulated linear laser light as illumination light and imaging the reflected light of the linear laser light with a delay integration type imaging device.
- a technique for measuring the shape of an object to be measured using a striped image is disclosed.
- JP 2012-225795 A Japanese Patent Application Laid-Open No. 2004-3930 Chinese Patent Application No. 102830123 Specification
- the present inventor has intensively studied a method capable of inspecting the shape of the metal body at higher speed and higher density.
- the present inventor is not a technique related to the shape inspection of the metal body, but the red linear light and the blue linear light are applied to the surface of the metal body such as a steel plate as disclosed in Patent Document 3 above.
- the inspection method of inspecting fine defects existing on the surface of the metal body by imaging the reflected light from the metal body with a color line camera was also examined for applying to the shape measurement of the metal body.
- Patent Document 3 the inspection method disclosed in Patent Document 3 is applied to inspection of a metal body having a relatively rough surface, such as a cold-rolled steel sheet, and the surface of the metal body.
- a metal body having a relatively rough surface such as a cold-rolled steel sheet
- the surface of the metal body When inspecting the shape, it became clear that sufficient inspection accuracy could not be obtained.
- an object of the present invention is to inspect the shape of the metal body at higher speed, higher density and more accurately regardless of the surface roughness of the metal body.
- An object of the present invention is to provide a metal body shape inspection apparatus and a metal body shape inspection method that can be performed.
- At least two illumination lights are irradiated on a metal body, and the reflected lights of the two illumination lights from the metal body are measured separately from each other.
- a measurement device ; and an arithmetic processing device that calculates information used for shape inspection of the metal body based on a measurement result of a luminance value of the reflected light by the measurement device, the measurement device comprising the metal body
- first and second illumination light sources that respectively irradiate strip-shaped illumination light having different peak wavelengths, reflected light of the first illumination light emitted from the first illumination light source, and the first
- a color line sensor camera that distinguishes and measures the reflected light of the second illumination light emitted from the two illumination light sources, wherein the first illumination light source and the second illumination light source are the color lines.
- An angle formed between the specular reflection direction of the shaft on the surface of the metal body and the optical axis of the first illumination light source, and an angle formed between the specular reflection direction and the optical axis of the second illumination light source are approximately
- the wavelength difference between the peak wavelength of the first illumination light and the peak wavelength of the second illumination light is not less than 5 nm and not more than 90 nm.
- Metal body shape inspection device that calculates the inclination of the surface of the metal body as the information using the difference between the brightness value of the reflected light of the first illumination light and the brightness value of the reflected light of the second illumination light Is provided.
- the surface temperature of the metal body may be 570 ° C. or less.
- the angle formed by the optical axis of the color line sensor camera and the normal direction of the surface of the metal body is preferably 5 degrees or less, and is formed by the specular reflection direction and the optical axis of the first illumination light source. It is preferable that an angle and an angle formed by the regular reflection direction and the optical axis of the second illumination light source are 30 degrees or more.
- the measurement apparatus includes a third illumination light source capable of irradiating a third illumination light having a peak wavelength of 5 nm or more different from each of the first illumination light and the second illumination light in the vicinity of the regular reflection direction.
- the color line sensor camera may further measure reflected light from the metal body of the third illumination light, and the arithmetic processing unit may calculate the difference and the third illumination.
- the inclination of the surface of the metal body may be calculated using the brightness value of the reflected light of the light.
- the peak wavelength of the first illumination light may be 450 nm or more, and the peak wavelength of the second illumination light may be 540 nm or less.
- the peak wavelength of the third illumination light may be not less than 600 nm and not more than 700 nm.
- the difference is corrected in advance so that, when the metal body having a flat surface is measured, the difference between the luminance values of the two reflected lights from the metal body having the flat surface is zero,
- the processing device preferably specifies the direction of the inclination based on the sign of the difference and specifies the magnitude of the inclination based on the absolute value of the difference.
- the arithmetic processing unit integrates the calculated inclination of the surface of the metal body along a relative movement direction of the color line sensor camera and the metal body, and calculates the height of the surface of the metal body. May be further calculated.
- the arithmetic processing unit may inspect the shape of the metal body by comparing the calculated inclination of the surface of the metal body with a predetermined threshold value.
- the first and second illumination light sources that respectively irradiate the metal body with strip-shaped illumination light having different peak wavelengths, and A color line sensor camera that distinguishes and measures the reflected light of the first illumination light emitted from the first illumination light source and the reflected light of the second illumination light emitted from the second illumination light source;
- the first illumination light source and the second illumination light source include a specular reflection direction of the optical axis of the color line sensor camera on the surface of the metal body and an optical axis of the first illumination light source.
- the angle formed by the specular reflection direction and the angle formed by the optical axis of the second illumination light source are substantially equal to each other, and the peak wavelength of the first illumination light and the second The wavelength difference with the peak wavelength of the illumination light is 5 nm or more and 90 nm or less.
- the measuring device irradiates at least the first illumination light and the second illumination light on the metal body, and measures the reflected light of the illumination light from the metal body separately from each other, and the reflection by the measurement device
- an arithmetic processing unit that calculates information for inspecting the shape of the metal body based on the measurement result of the luminance value of light, the luminance value of the reflected light of the first illumination light and the second illumination light
- a metal body shape inspection method for calculating a tilt of a surface of the metal body as the information using a difference with a luminance value of reflected light.
- the surface temperature of the metal body may be 570 ° C. or less.
- the angle formed by the optical axis of the color line sensor camera and the normal direction of the surface of the metal body is preferably set to 5 degrees or less, and the specular reflection direction and the optical axis of the first illumination light source And the angle formed between the specular reflection direction and the optical axis of the second illumination light source is preferably set to 30 degrees or more.
- the measurement apparatus includes a third illumination light source capable of irradiating a third illumination light having a peak wavelength of 5 nm or more different from each of the first illumination light and the second illumination light in the vicinity of the regular reflection direction.
- the color line sensor camera may further measure reflected light from the metal body of the third illumination light.
- the inclination of the surface of the metal body may be calculated using the difference and the luminance value of the reflected light of the third illumination light.
- the peak wavelength of the first illumination light may be set to 450 nm or more, and the peak wavelength of the second illumination light may be set to 540 nm or less.
- the peak wavelength of the third illumination light may be set to 600 nm or more and 700 nm or less.
- the difference is corrected in advance so that, when the metal body having a flat surface is measured, the difference between the luminance values of the two reflected lights from the metal body having the flat surface is zero,
- the direction of the inclination is specified based on the sign of the difference, and the magnitude of the inclination is specified based on the absolute value of the difference. .
- the arithmetic processing unit integrates the calculated inclination of the surface of the metal body along the relative movement direction of the color line sensor camera and the metal body, and the metal body The height of the surface may be further calculated as the information.
- the shape of the metal body may be inspected by comparing the calculated inclination of the surface of the metal body with a predetermined threshold.
- the present invention it is possible to inspect the shape of the metal body at higher speed, higher density and more accurately regardless of the surface roughness of the metal body.
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 3 is an explanatory diagram for explaining Example 1;
- FIG. 1 is an explanatory diagram showing a configuration example of the shape inspection apparatus 10 according to the present embodiment.
- the shape inspection apparatus 10 inspects the shapes (for example, surface shapes) of various metal bodies S such as a steel plate placed at a predetermined location or a steel plate conveyed on a predetermined conveyance line. It is a device to do.
- the shape inspection apparatus 10 and the metal body only have to move relative to each other, and as described above, the measuring apparatus 100 of the shape inspection apparatus 10 is fixed to the conveyance line, and The metal body may be transported on the transport line, and the measuring apparatus 100 may be moved relative to the stationary metal body.
- the macro shape of the metal body S is not particularly limited, and may be, for example, a plate shape such as a slab or billet, or may be a belt shape.
- the component of the metal body S is not particularly limited, and may be various steels mainly composed of iron elements, various alloys of iron and other metal elements, Various non-ferrous metals may be used.
- the metal body S usually passes through a pickling process and a cold rolling process after the hot rolling process, and becomes a product through a plating process or the like, but in a red hot state of 570 ° C. or higher in the hot rolling process, There is a possibility that the thermal radiation of the metal body S itself becomes an error factor of imaging in the measuring apparatus 100 described later.
- the steel sheet after the hot rolling process has an oxide film called scale on the surface, and the unevenness of the surface roughness is small, but the interface between the oxide film and the steel It is not flat but uneven. Therefore, in the pickling process for removing the scale, the surface of the ground iron appears and becomes a rough surface. Further, in the cold rolling treatment, the surface roughness is intentionally imparted to the product, so that the unevenness of the surface roughness is large in the steel sheet after the cold rolling. Therefore, when the technique as disclosed in Patent Document 3 is used for the steel sheet after cold rolling, it is difficult to accurately measure the surface shape.
- the shape inspection apparatus 10 according to this embodiment described below is a metal body S having a large unevenness in surface roughness, such as a steel sheet after being subjected to cold rolling, It becomes possible to inspect the surface shape with high accuracy.
- the metal body S is transported along a longitudinal direction of the metal body S on a transport line (not shown), and the longitudinal direction of the metal body S is also referred to as a transport direction.
- the shape inspection apparatus 10 mainly includes a measurement apparatus 100 and an arithmetic processing apparatus 200 as shown in FIG.
- the measurement device 100 irradiates at least two types of illumination light onto the metal body S (more specifically, the surface of the metal body S) under the control of the arithmetic processing device 200, and the metal of the illumination light.
- This is a device for generating data related to the luminance value of reflected light by measuring the reflected light from the body S (more specifically, the surface of the metal body S) while distinguishing them from each other.
- the measuring device 100 outputs data relating to the brightness value of the generated reflected light to the arithmetic processing device 200.
- the arithmetic processing unit 200 controls the measurement processing of the metal body S by the measuring device 100.
- the arithmetic processing device 200 acquires data regarding the luminance value of the reflected light generated by the measuring device 100, and performs data processing described in detail below on the acquired data regarding the luminance value, thereby performing the metal body S.
- Various types of information used for inspecting the shape (more specifically, the surface shape) is calculated.
- various types of information used for shape inspection are collectively referred to as “inspection information”.
- the inspection information calculated by the arithmetic processing device 200 relates to the inclination of the surface of the metal body S calculated based on, for example, the difference between the luminance values of reflected light of two types of illumination light, as will be described in detail below.
- the information regarding the height of the surface of the metal body S obtained by integrating information and the inclination of the surface, etc. can be mentioned.
- the information regarding the inclination of the surface of the metal body S and the information regarding the height of the surface are information representing the shape of the metal body S.
- the measurement process of the metal body S by the measuring apparatus 100 and the calculation process of the inspection information by the arithmetic processing apparatus 200 can be performed in real time in accordance with the transport of the metal body S.
- the user of the shape inspection apparatus 10 grasps the shape of the metal body S in real time by paying attention to the inspection result output from the shape inspection apparatus 10 (more specifically, the arithmetic processing apparatus 200). S can be inspected.
- the measuring device 100 and the arithmetic processing device 200 will be described in detail.
- FIGS. 2A to 23 are explanatory views schematically showing an example of a measuring apparatus provided in the shape inspection apparatus 10 according to the present embodiment.
- 5 to 8 and FIGS. 10 to 19 are explanatory diagrams for explaining the wavelength of illumination light in the measurement apparatus 100 according to the present embodiment.
- FIG. 9 is an explanatory view schematically showing the relationship between the reflection angle of illumination light and the inclination angle of the surface in the measuring apparatus according to the present embodiment.
- FIG. 20 is a graph showing an example of the relationship between the luminance difference between the reflected lights of the first and second illumination lights and the inclination angle of the metal body surface.
- FIG. 21 and 22 are explanatory views schematically showing another example of the measuring apparatus provided in the shape inspection apparatus according to the present embodiment.
- FIG. 23 is an explanatory diagram showing an example of the relationship between the luminance value of the reflected light of the third illumination light and the inclination angle of the metal body surface.
- FIG. 2A is a schematic diagram when the measuring device 100 is viewed from the side of the metal body S
- FIGS. 2B and 2C are schematic diagrams when the measuring device 100 is viewed from above the metal body S.
- FIG. 2A is a schematic diagram when the measuring device 100 is viewed from the side of the metal body S
- FIGS. 2B and 2C are schematic diagrams when the measuring device 100 is viewed from above the metal body S.
- the measuring apparatus 100 includes a color line sensor camera 101, a first illumination light source (hereinafter also referred to as “first illumination light source”) 103, and a first. 2 illumination light sources (hereinafter also referred to as “second illumination light sources”) 105.
- the color line sensor camera 101, the first illumination light source 103, and the second illumination light source 105 are fixed by known means so that their setting positions do not change.
- the color line sensor camera 101 is positioned above the metal body S (z axis positive) so that its optical axis is perpendicular to the surface of the metal body S (hereinafter also referred to as “metal body surface”). (Direction side). Note that “perpendicular to the surface of the metal body” means that the angle formed by the optical axis of the color line sensor camera 101 and the tangent plane of the metal body S at the intersection of the optical axis and the surface of the metal body is vertical. I mean.
- the color line sensor camera 101 includes first illumination light emitted from the first illumination light source 103 (hereinafter also referred to as “first illumination light”) and second illumination light emitted from the second illumination light source 105 (hereinafter referred to as “first illumination light”).
- first illumination light first illumination light
- second illumination light second illumination light
- the reflected light on the surface of the metal body of “second illumination light” is measured separately from each other.
- the color line sensor camera 101 can specify data indicating the intensity of the reflected light on the metal surface of the first illumination light and the second illumination light (that is, data indicating the luminance value of the reflected light).
- the color line sensor camera 101 can transmit the reflected light on the metal body surface of the first illumination light in the transport direction and width direction ( The distribution in the xy plane in FIG. 1 and the distribution of the reflected light on the surface of the metal body of the second illumination light in the transport direction and the width direction (in the xy plane in FIG. 1) can be specified.
- the first illumination light source 103 and the second illumination light source 105 are LEDs or lasers, or light sources that emit light that can be regarded as a quasi-monochromatic light obtained by transmitting white light from a white light source through a bandpass filter.
- the peak wavelengths of are different from each other.
- the color line sensor camera 101 has at least two line sensors, and the transmittance of one illumination light with respect to the peak wavelength of each of the line sensors is transmitted with respect to the peak wavelength of the other illumination light.
- a color filter having a transmission wavelength band that is higher than the rate is formed. By forming such color filters on the respective line sensors, the color line sensor camera 101 can measure the reflected light of the first illumination light and the reflected light of the second illumination light separately from each other. Become.
- the color line sensor camera 101 As the color line sensor camera 101, a known one can be used. Thereby, it is possible to simultaneously measure the sizes of various wavelength components (for example, R component, G component, B component) included in the reflected light of the first illumination light and the second illumination light independently of each other. Become.
- various wavelength components for example, R component, G component, B component
- the R component refers to a component corresponding to light with a peak wavelength of 600 to 700 nm, for example
- the G component green component refers to a component corresponding to light with a peak wavelength of 500 to 560 nm, for example
- B component blue component refers to a component corresponding to light having a peak wavelength of 430 nm to 500 nm, for example.
- the color line sensor camera 101 discriminates and measures the luminance values of the reflected light of the first illumination light and the second illumination light, the color line sensor camera 101 generates data corresponding to the obtained measurement result (data regarding the luminance value of the reflected light). And output to the arithmetic processing unit 200 described later.
- the first illumination light source 103 and the second illumination light source 105 irradiate the surface of the metal body S with the first illumination light and the second illumination light, respectively.
- the first illumination light and the second illumination light are light having different peak wavelengths. Note that the emission spectrum distributions of the first illumination light source 103 and the second illumination light source 105 may overlap as long as the peak wavelengths are different from each other.
- the distribution of the luminance value of the reflected light measured by the color line sensor camera 101 is changed to the first illumination light or the second illumination light. It becomes possible to easily identify which of the illumination lights corresponds to.
- the first illumination light source 103 and the second illumination light source 105 are arbitrary light sources as long as they can irradiate illumination light over almost the entire width of the metal body S. It is possible to use.
- a light source it is possible to use, for example, a rod-shaped LED illumination, or it is possible to use a laser beam that is spread linearly by a rod lens or the like.
- the visible light source used for the first illumination light source 103 and the second illumination light source 105 a light source such as a single wavelength laser light or an LED having a narrow emission wavelength band may be used, or a xenon lamp may be used.
- a color filter may be used in combination with a light source having a continuous spectrum.
- the angle formed by the specular reflection direction of the color line sensor camera 101 (in the case of FIG. 2A, the normal direction of the surface of the metal body) and the optical axis of the first illumination light source 103 is represented by ⁇ 1
- the angle between the two illumination light sources 105 and the optical axis is represented by ⁇ 2 .
- the 1st illumination light source 103 and the 2nd illumination light source 105 are arrange
- ⁇ 1 and ⁇ 2 are substantially equal not only when ⁇ 1 and ⁇ 2 are equal, but also when the first illumination light source 103 and the second illumination light source 105 image a flat surface without unevenness.
- a flat surface having no unevenness includes an angular difference in a range that looks the same as each other including a change in luminance due to dirt or the like existing on the flat surface is included.
- between ⁇ 1 and ⁇ 2 is, for example, preferably within 10 degrees, and more preferably within 5 degrees. If the angle difference is within such a range, two captured images appear to be the same as each other when a plane having no irregularities is imaged with each illumination light.
- the magnitudes of ⁇ 1 and ⁇ 2 are set as large as possible within a range where there is no restriction on the installation of the light source. Thereby, the irregular reflection of each illumination light can be measured by the color line sensor camera 101.
- the size of theta 1 and theta 2 is preferably set to both 30 degrees or more.
- the first illumination is obtained.
- the brightness value of the reflected light of the light is substantially equal to the brightness value of the reflected light of the second illumination light.
- the inclination of the surface changes due to the unevenness, and a difference occurs in the reflected light intensity in the camera direction of the first and second illumination light. Therefore, a difference occurs between the luminance value of the reflected light of the first illumination light and the luminance value of the reflected light of the second illumination light.
- the longitudinal directions of the first illumination light source 103 and the second illumination light source 105 are installed so as to be substantially parallel to the width direction of the metal body S.
- Each light source may be provided. As shown in FIG.
- each illumination light source by arranging each illumination light source to be inclined, unevenness exists on the surface of the metal body S, and even when the inclination due to the unevenness is generated in parallel with the transport direction, two The inclination can be detected by the difference in the luminance values of the two reflected lights.
- FIG. 3 is a schematic diagram when the measuring apparatus 100 is viewed from the side of the metal body S.
- FIG. 2A the case where the optical axis of the color line sensor camera 101 is arranged so as to be perpendicular to the surface of the metal body S is shown. As shown in FIG. 3, it is inclined with respect to the normal direction of the surface of the metal body (that is, the normal direction of the tangential plane of the metal body at the intersection of the optical axis of the color line sensor camera 101 and the surface of the metal body). It may be.
- the size of the angle formed by the optical axis of the color line sensor camera 101 and the normal of the metal surface is preferably within 5 degrees, for example.
- the luminance value of the reflected light of the first illumination light and the luminance value of the reflected light of the second illumination light on a plane where there is no unevenness are mutually determined.
- the values are almost equal.
- FIG. 4 is a schematic diagram when the measuring apparatus 100 is viewed from the side of the metal body S. 2A to 3 show a case where the first illumination light source 103 and the second illumination light source 105 are evenly arranged on the upstream side and the downstream side in the transport direction of the color line sensor camera 101.
- the color line sensor camera 101 is arranged with a large inclination with respect to the surface, and each of the first illumination light source 103 and the second illumination light source 105 is opposed to the color line sensor camera 101.
- the downstream side of the color line sensor camera 101 (when the color line sensor camera 101 is installed upstream as shown in FIG. 4) or the upstream side (when the color line sensor camera 101 is installed downstream). It is also possible to arrange them together. Even in this case, it is preferable that the angles ⁇ 1 and ⁇ 2 shown in the figure are substantially equal, and the magnitude of each angle is preferably as large as possible.
- the configuration of the measuring apparatus 100 according to the present embodiment has been described in detail above with reference to FIGS. 2A to 4.
- FIG. 2A to 3 illustrate the case where the first illumination light source 103 is disposed on the upstream side in the transport direction and the second illumination light source 105 is disposed on the downstream side in the transport direction.
- the second illumination light source 105 may be disposed on the upstream side in the direction, and the first illumination light source 103 may be disposed on the downstream side.
- KBS model About the upper limit of the difference between the peak wavelengths of the two illumination lights Kirchoff-Beckmann-Spizzichino model (disclosed in Non-Patent Document 1) is one of the models that simulate the reflection of light on a metal rough surface.
- KBS model the reflectance of light on a certain surface is expressed as a function depending on the incident angle and reflection angle of light on the surface, the surface roughness, and the correlation length of the surface shape.
- the KBS model when the correlation length of the surface roughness of the surface of interest is 15 ⁇ m, the incident angle is 45 degrees, and the reflection angle between the incident light and the reflected light reflected in the plane including the normal is 45 degrees
- the surface reflectance at is calculated for four types of surface roughness, it is as shown in FIG.
- the focused surface roughness is of four types with a root mean square roughness Rq of 1 ⁇ m, 2 ⁇ m, 4 ⁇ m, and 10 ⁇ m.
- the vertical axis represents the reflectance
- the reflectance increases as the wavelength of light increases at each surface roughness. Further, the obtained reflectance varies depending on the surface roughness.
- the surface roughness varies due to uneven surface alloying and the like. Therefore, when the illumination light having two types of wavelengths is used as in the measurement apparatus 100 according to the present embodiment, the reflectance varies with each of the illumination lights used.
- the steel sheet In the case of a metal skin that is not mirror-finished, the steel sheet usually has a roughness of about 1 to 3 ⁇ m, and the change in roughness that can occur in normal operation is about ⁇ 10%.
- the arithmetic processing unit 200 uses the luminance value of the reflected light of the two illumination lights to calculate and obtain the difference between these two luminance values.
- the inclination of the surface of the metal body S is calculated from the luminance difference.
- the reflectance on the surface varies depending on the wavelength. End up.
- the brightness difference that should be essentially zero Has a non-zero value.
- FIG. 6 Such a phenomenon is schematically shown in FIG. As schematically shown in FIG. 6, when the surface roughness of a certain surface is a ( ⁇ m), the luminance value of the reflected light from the surface changes between color 1 and color 2.
- the direction of the surface inclination (that is, the direction in which the inclination increases or decreases) is determined, and the magnitude of the inclination angle is determined by the absolute value of the luminance difference. Therefore, if a value other than zero is generated in the calculation of the difference that should be zero in the situation as shown in FIG. 6, it causes a measurement error.
- the difference calculation formula represented by the following formula 101 is a surface that is known to be flat (that is, a surface with a slope of zero). ) Is experimentally set in advance so that it becomes zero when measured.
- Luminance difference (Luminance value for Color 1)-(Luminance value for Color 2) + Correction constant (Equation 101)
- the value of the correction constant of the above equation 101 also varies depending on the surface roughness of the material to be measured. Therefore, when intentionally imparting roughness such as cold rolled material, the value of the correction constant corresponding to the surface roughness of the product to be manufactured is obtained in advance, and the surface roughness and the correction constant are determined. It is desirable to store it in correspondence.
- the correction constant is appropriately determined according to Equation 101 above. The value remains zero.
- the change in luminance value varies depending on the wavelength as schematically shown in FIG. In the example shown in FIG. 7, even when the correction constant for color 2 is appropriately determined in advance for roughness a, if the roughness changes to b (> a) during shape inspection, Thus, the change in luminance value cannot be corrected with only the correction constant determined as described above, and the luminance difference that cannot be corrected is recognized as a false slope.
- the peak wavelengths of the two illumination lights used in the measurement apparatus 100 according to the present embodiment have values as close as possible. Therefore, in the measuring apparatus 100 according to the present embodiment, the upper limit value of the difference between the peak wavelengths of the two illumination lights is defined for the reasons described below.
- An illumination light source that emits illumination light having a peak wavelength of 530 nm and an illumination light source that emits illumination light having a peak wavelength of 460 nm are color line sensor cameras at an angle
- the surface inclination angle ⁇ is different from the reflection angles ⁇ 1 and ⁇ 2 of the illumination light, as schematically shown in FIG.
- the calculation unit 200 shown in FIG. The brightness difference data is generated.
- the horizontal axis is the inclination angle ⁇ representing the degree of inclination of the surface of the metal body of interest
- the vertical axis is the luminance difference.
- the optical axis of the color line sensor camera 101 and the optical axes of the first illumination light source 103 and the second illumination light source 105 are at a predetermined angle
- This angle will be referred to as the light source angle ⁇ .
- the light source angle of the 1st illumination light source 103 and the light source angle of the 2nd illumination light source 105 are installed so that it may become substantially equal.
- the measurement brightness of the reflected light of the first illumination light and the measurement of the reflected light of the second illumination light are measured in the reflected light measurement brightness detected by the color line sensor camera 101.
- the luminance difference from the luminance can be considered to be zero except for a small difference corresponding to the correction constant due to the difference in wavelength.
- an inclination tan ⁇ in the longitudinal direction of the metal body S occurs on a plane that is kept horizontal, the degree of reflection of each illumination light changes, and the luminance difference of each reflected light changes.
- the arithmetic processing apparatus 200 for example, from the relationship between the inclination angle and the luminance difference as illustrated in FIG. 10, the variation in the luminance difference due to the roughness change is converted into the inclination angle. More specifically, a conversion coefficient for converting a luminance difference into an angle is determined from the vicinity of the origin in FIG. 10, that is, the inclination of the graph when the inclination angle ⁇ is 0 degree. Since this conversion coefficient also changes depending on the aperture of the lens provided in the color line sensor camera 101, it is experimentally determined in advance using an optical system used for actual measurement.
- the shape inspection apparatus 10 When the luminance difference is converted into an inclination angle by the above calculation, the shape inspection apparatus 10 according to the present embodiment has a surface inclination calculation error of 1 degree or less with respect to a 10% roughness change.
- the upper limit value of the difference between the peak wavelengths of the two illumination lights is defined. Below, the determination method of the upper limit is demonstrated in detail.
- FIG. 11 even if the surface roughness is the same, the reflection intensity obtained changes when the wavelength of the incident light changes, and (2) the same incidence occurs when the surface roughness changes. It can be seen that the reflection intensity changes even at the wavelength of light.
- the peak wavelength of the first illumination light three types are considered: a wavelength belonging to the blue band (460 nm), a wavelength belonging to the green band (530 nm), and a wavelength belonging to the red band (640 nm).
- a wavelength belonging to the blue band 460 nm
- a wavelength belonging to the green band 530 nm
- a wavelength belonging to the red band 640 nm
- the relationship between the peak wavelength of the second illumination light and the angle error is simulated.
- the angular error is within 1 degree in the range of 620 nm band.
- the angle error when looking at the angle error in the region of 90 nm from the peak wavelength of the first illumination light, the angle error is in the range of 550 to 640 nm. It can be seen that it is within 1 degree.
- the upper limit value of the difference between the peak wavelength of the first illumination light and the peak wavelength of the second illumination light is set to 90 nm.
- the luminance difference between the two illumination lights is defined as Equation 101, but it goes without saying that the luminance difference may be defined as Equation 103 below.
- Luminance difference (luminance value in color 2)-(luminance value in color 1)-correction constant (Equation 103)
- the output values of the two colors from the color line sensor camera 101 are mixed as a result of color mixing.
- FIG. 15 as shown in FIG. 15
- the value exists in the sandwiched area.
- an angle formed by two straight lines when only one illumination light as shown in FIG. 15 is turned on is referred to as a sandwich angle.
- the output value A when the output value A is output on a flat surface, the surface is inclined, so that the B component has the same inclination as the “straight line when only B is lit” from point A to point A ′.
- the G component since the decrease in the output of the G component is equal to the increase in the output of the B component, the G component has a straight line with the same slope as the “straight line when only G is lit” from point A ′ to point B. Decrease.
- the output value from the color line sensor camera 101 is the value of point B in FIG.
- the luminance difference corresponding to the inclination corresponds to the difference between the y-intercept of the straight line passing through point B and having an inclination of 45 degrees and the origin.
- camera noise is superimposed on the output from the image sensor provided in the color line sensor camera 101, and the camera noise is independent of the pixel component (R component, B component, G component). If the camera noise follows a Gaussian distribution, the camera noise becomes a two-dimensional Gaussian function in the pixel component plane such as the BG plane shown in FIG. 18, and the pixel component plane has a circular shape as shown in FIG. Distribution.
- the sandwiching angle In order to prevent the output of the first illumination light and the second illumination light from being buried in the camera noise, the sandwiching angle needs to be larger than the diameter of the Gaussian noise as shown in FIG.
- a color mixing matrix M representing the degree of color mixing in the image sensor can be expressed as the following Expression 105.
- the matrix component M ij is a value represented by the following expression, where the integration variable is the wavelength ⁇ .
- the degree of color mixture that is, the matrix components M 12 and M 21
- the color mixture matrix M norm is expressed by the following equation: 105 '.
- the pixel component plane as shown in FIG. 18 is represented as shown in FIG.
- two straight lines correspond to M 21 / M 11 and M 12 / M 22 in the formula 105 ′.
- the full width at half maximum (FWHM) of the emission spectrum of the illumination light is set to 20 nm, which is a general full width at half maximum of an LED that is a general illumination light source, and the spectral sensitivity width of the color line sensor camera is set to be the largest of general color filters. It is assumed that the value of the narrow band is 50 nm with reference to it, and the radius of the Gaussian noise is 2% of the maximum output of the image sensor. In this case, two straight lines as shown in FIG. 19 (a straight line corresponding to M 21 / M 11 and a straight line corresponding to M 12 / M 22 ) while changing the difference between the peak wavelengths of the two illumination lights. The positional relationship between the angle between and the radius of Gaussian noise was simulated. As a result, it was found that when the difference between the peak wavelengths of the two illumination lights is less than 5 nm, the circle corresponding to Gaussian noise protrudes from the region sandwiched between the two straight lines.
- the lower limit value of the difference between the peak wavelength of the first illumination light and the peak wavelength of the second illumination light is set to 5 nm.
- the wavelength difference between the peak wavelength of the first illumination light and the peak wavelength of the second illumination light is 5 nm or more and 90 nm or less. And the peak wavelengths of the two illumination lights are selected so that the peak wavelengths are different from each other.
- the peak wavelength of the first illumination light is 450 nm to It is preferable to select from the wavelength band of 470 nm and select the peak wavelength of the second illumination light from the wavelength band of 510 nm to 540 nm. By selecting one peak wavelength from each of these wavelength bands, the first illumination light becomes blue light and the second illumination light becomes green light.
- each bandpass filter may be further installed on the optical axis between the corresponding illumination light source and the metal body S. That is, a first bandpass filter that transmits the first illumination light and a second bandpass filter that transmits the second illumination light are prepared, and the peak wavelength and the second bandpass of the transmission band of the first bandpass filter are prepared. The wavelength difference from the peak wavelength of the transmission band of the filter is set to a value of 5 nm to 90 nm.
- the first band pass filter is disposed on the optical axis between the first illumination light source 103 and the metal body S, and the second band pass filter is disposed between the second illumination light source 105 and the metal body S. On the optical axis. This makes it possible to more reliably realize the wavelength difference between the peak wavelength of the first illumination light and the peak wavelength of the second illumination light as described above.
- the luminance value of the reflected light imaged on the color line sensor camera 101 is small in any of the two illumination light sources.
- an illumination light source that emits illumination light with a peak wavelength of 530 nm and an illumination light source that emits illumination light with a peak wavelength of 460 nm are color lines at an angle
- 45 degrees shown in FIG. 2A.
- the sensor camera 101 is installed.
- the luminance difference of the reflected light is calculated, it is as shown in FIG.
- a third illumination light source (hereinafter referred to as “third illumination light”) that irradiates third illumination light having a peak wavelength different by 5 nm or more from each of the first illumination light and the second illumination light. Also referred to as “illuminating light source”.) 151 may be provided.
- a third bandpass filter having a peak wavelength in the transmission band different from each of the first bandpass filter and the second bandpass filter by 5 nm or more is prepared.
- Such a third band pass filter may be disposed on the optical axis between the illumination light source 151 and the metal body S. This makes it possible to more reliably realize the relationship that “the third illumination light differs from the first illumination light and the second illumination light by a peak wavelength of 5 nm or more”.
- the vicinity of the regular reflection direction of the color line sensor camera 101 is not only on the regular reflection direction of the color line sensor camera 101 as shown in FIG. 22, but also in the regular reflection direction as shown in FIG. shall from including a position spaced apart by a predetermined angle theta 3.
- the separation angle ⁇ 3 from the regular reflection direction is preferably set within a range in which the color line sensor camera 101 can measure regular reflection of the third illumination light on the surface of the metal band.
- Such an angle ⁇ 3 is more preferably within 5 degrees, for example.
- the third illumination light is obtained when the peak wavelength of the first illumination light is a blue light band and the peak wavelength of the second illumination light is a green light band.
- the peak wavelength of may be a red light band (a wavelength band of 600 to 700 nm).
- Rq root mean square roughness
- the correlation length 15 ⁇ m the correlation length 15 ⁇ m
- the incident angle 5 degrees
- FIG. 24 is a block diagram illustrating an example of the overall configuration of the arithmetic processing device 200 according to the present embodiment.
- the arithmetic processing device 200 is a device that calculates inspection information used for shape inspection of the metal body S based on the luminance value of reflected light from the measuring device 100.
- the arithmetic processing device 200 may calculate at least information related to the inclination of the surface of the metal body S as the inspection information, and may further calculate information related to the surface shape of the metal body S.
- the arithmetic processing apparatus 200 mainly includes a data acquisition unit 201, a measurement control unit 203, a data processing unit 205, a display control unit 207, and a storage unit 209.
- the data acquisition unit 201 is realized by, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), a communication device, and the like.
- the data acquisition unit 201 acquires data related to the luminance value of the reflected light generated by the measurement apparatus 100 and output from the measurement apparatus 100, and transmits the data to the data processing unit 205 described later.
- the data acquisition unit 201 may associate the acquired data related to the luminance value of the reflected light with time information related to the date and time when the data is acquired, and store the data in the storage unit 209 described later as history information.
- the measurement control unit 203 is realized by a CPU, a ROM, a RAM, a communication device, and the like.
- the measurement control unit 203 performs measurement control of the metal body S by the measurement apparatus 100 according to the present embodiment. More specifically, when starting measurement of the metal body S, the measurement control unit 203 starts irradiating each illumination light to the first illumination light source 103, the second illumination light source 105, and the third illumination light source 151. A control signal for transmitting the signal is transmitted.
- the measurement control unit 203 causes the metal body S and the measurement apparatus 100 to perform irradiation.
- a color line sensor camera based on a PLG signal (for example, a PLG signal output every time the metal body S moves 1 mm) periodically transmitted from a drive mechanism or the like that changes the relative position between A trigger signal for starting measurement is sent to 101.
- the measuring apparatus 100 can generate measurement data (data on the luminance value of the reflected light) at each position in the transport direction of the metal body S.
- the data processing unit 205 is realized by, for example, a CPU, a ROM, a RAM, a communication device, and the like.
- the data processing unit 205 uses the data relating to the luminance value of the reflected light generated by the measuring apparatus 100 to perform data processing as described below on the data relating to the luminance value of each reflected light, and Inspection information used for shape inspection is calculated.
- the data processing unit 205 transmits information about the obtained processing result to the display control unit 207.
- the data processing unit 205 will be described in detail below.
- the display control unit 207 is realized by, for example, a CPU, a ROM, a RAM, an output device, and the like.
- the display control unit 207 displays various processing results transmitted from the data processing unit 205 including the calculation result of the inspection information regarding the metal body S, such as an output device such as a display provided in the arithmetic processing device 200 or the arithmetic processing device 200. Display control when displaying on an external output device or the like is performed. Thereby, the user of the shape inspection apparatus 10 can grasp various processing results such as inspection information about the metal body S on the spot.
- the storage unit 209 is realized by, for example, a RAM or a storage device provided in the arithmetic processing device 200 according to the present embodiment.
- various parameters, intermediate progress of processing, or various databases or programs that need to be saved when the arithmetic processing apparatus 200 according to the present embodiment performs some processing, or various databases and programs are appropriately stored.
- the storage unit 209 can be freely read / written by the data acquisition unit 201, the measurement control unit 203, the data processing unit 205, the display control unit 207, and the like.
- FIGS. 25 and 26 are block diagrams illustrating an example of the configuration of the data processing unit 205 according to the present embodiment.
- the data processing unit 205 based on the difference (that is, the luminance difference) between the luminance value of the reflected light of the first illumination light and the luminance value of the reflected light of the second illumination light. Inspection information including at least information on the inclination of the surface is calculated. As shown in FIG. 25, the data processing unit 205 includes a difference data generation unit 221, an inclination calculation unit 223, a height calculation unit 225, and a result output unit 227.
- the difference data generation unit 221 is realized by, for example, a CPU, a ROM, a RAM, and the like.
- the difference data generation unit 221 includes data relating to the luminance value of the reflected light of the first illumination light acquired by the data acquisition unit 201 (hereinafter simply referred to as “measurement data of the first illumination light”) and the second illumination light.
- Difference data generation processing that is, luminance difference data generation processing as described below is performed on data related to the luminance value of reflected light (hereinafter, simply referred to as “second illumination light measurement data”). ).
- the difference data generation process performed by the difference data generation unit 221 will be described below.
- the difference data generation unit 221 uses the measurement data of the first illumination light and the measurement data of the second illumination light, and the measurement data of the first illumination light and the second illumination light based on the following formula 111 or formula 112: Difference data (that is, luminance difference data) including differences from the measurement data is generated.
- Difference in luminance value (luminance value of reflected light of first illumination light) ⁇ (luminance value of reflected light of second illumination light) + correction constant (Equation 111)
- Difference in luminance value (luminance value of reflected light of second illumination light) ⁇ (luminance value of reflected light of first illumination light) ⁇ correction constant (Equation 113)
- the correction constants in the formula 111 and the formula 113 are measured data of the first illumination light using a plane having no inclination (that is, a plane that is known to be flat). And the measurement data of the second illumination light is actually measured and set in advance so that the value on the right side of Formula 111 or Formula 113 is zero.
- Information on the value of the preset correction constant is stored in the storage unit 209, for example, and the difference data generation unit 221 acquires information on the correction constant from the storage unit 209 when performing the difference data generation process. Then, differential data generation processing is performed.
- difference data generation unit 221 may use either of the above formula 111 or formula 113, as long as the formula used during the shape inspection process of the metal body S is not changed. Good.
- the difference data generation unit 221 can obtain a data group of difference values for the entire surface of the metal body S (in other words, map data related to the difference values). .
- the data group of the difference values obtained in this way becomes inspection information used when inspecting the shape (more specifically, the surface shape) of the metal body S.
- the inspection information can be imaged by replacing the difference value included in the inspection information with the level of brightness and the brightness. It is also possible to perform shape inspection based on the difference image by imaging the generated map data relating to the luminance difference to obtain a difference image.
- the difference data generation unit 221 performs the difference data generation process as described above, so that it is possible to remove influences from illumination unevenness, formation patterns, differences in reflectance, dirt, and the like from the measurement data. Can be detected with high accuracy.
- the difference data generation unit 221 outputs the difference data (luminance difference data) generated as described above to the inclination calculation unit 223. Further, the difference data generation unit 221 may output the generated difference data itself to the result output unit 227.
- the inclination calculation unit 223 is realized by, for example, a CPU, a ROM, a RAM, and the like.
- the inclination calculation unit 223 uses the difference data (luminance difference data) output from the difference data generation unit 221 and based on the relationship between the luminance difference and the inclination, the direction and magnitude of the surface inclination of the metal body S. Is calculated.
- the inclination calculation unit 223 can convert each luminance difference ⁇ L into a surface inclination angle ⁇ by using the data group related to ⁇ L output from the difference data generation unit 221 and the conversion coefficient ⁇ .
- the inclination of the surface of the metal body S of interest corresponds to the tangent at the inclination angle ⁇ converted from the luminance difference.
- the inclination calculation unit 223 can calculate the inclination of the surface of the metal body S of interest by calculating tan ⁇ that is a tangent at the calculated inclination angle ⁇ .
- the inclination calculated in this way indicates the direction of the inclination, and the absolute value indicates the specific magnitude of the inclination.
- the information related to the conversion coefficient specified in advance is stored in, for example, the storage unit 209 or the like, and the inclination calculation unit 223 acquires the information related to the conversion coefficient from the storage unit 209 when performing the inclination calculation processing.
- the brightness difference is converted into a tilt angle.
- the inclination calculation unit 223 performs the above-described processing on all elements of the luminance difference data, so that a data group of inclination values for the entire surface of the metal body S (in other words, the inclination value). Map data regarding values) can be obtained.
- the data group of the slope values obtained in this way becomes inspection information used when inspecting the shape (more specifically, the surface shape) of the metal body S.
- the inspection information can be imaged by replacing the slope value included in the inspection information with the brightness value level or shading.
- the inclination calculation unit 223 can also inspect the shape of the surface of the metal body S by comparing the calculated inclination with a predetermined threshold value. That is, by performing a known statistical process or the like based on past operation data or the like, a threshold value of the surface inclination when an abnormal portion exists on the surface of the metal body S is specified in advance, and the storage unit 209 or the like. Store it in.
- the inclination calculation unit 223 can check whether there is an abnormal portion on the surface of the metal body S of interest by specifying the magnitude relationship between the calculated inclination value and the threshold value. It becomes possible.
- the inclination calculation unit 223 outputs data regarding the inclination of the surface of the metal body S generated as described above to the height calculation unit 225.
- the inclination calculation unit 223 may output data itself regarding the surface inclination of the generated metal body S, the inspection result of the surface of the metal body S, and the like to the result output unit 227.
- the height calculation unit 225 is realized by, for example, a CPU, a ROM, a RAM, and the like.
- the height calculation unit 225 calculates the height of the surface of the metal body S of interest using the surface inclination of the metal body S calculated by the inclination calculation unit 223.
- the height calculation unit 225 uses the inclination S tan ⁇ of the surface of the metal body S calculated by the inclination calculation unit 223 as the metal body S that is the relative movement direction of the color line sensor camera 101 and the metal body S. Is integrated along the longitudinal direction (in other words, the scanning direction of the color line sensor camera 101) to calculate the height of the surface of the metal body S.
- the height calculation unit 225 performs the integration process as described above on all the elements of the data related to the inclination of the surface, so that the data group related to the height of the surface of the entire surface of the metal body S (in other words, Map data relating to the height of the surface).
- the data group relating to the height of the surface thus obtained becomes inspection information used when inspecting the shape of the metal body S (more specifically, the surface shape).
- the inspection information can be imaged by replacing the value related to the height of the surface included in the inspection information with the level of the luminance value or the density. It is also possible to perform shape inspection based on the height image by imaging the generated map data relating to the height of the surface into a height image.
- the height calculation unit 225 outputs data related to the height of the surface of the metal body S generated as described above to the result output unit 227.
- the result output unit 227 is realized by a CPU, a ROM, a RAM, and the like, for example.
- the result output unit 227 is calculated by the difference data generation unit 221, the luminance difference data, the inclination calculation unit 223 surface inclination and inspection result data, and the height calculation unit 225.
- Various information related to the shape inspection result of the metal body such as data related to the height of the surface of the metal body S, is output to the display control unit 207. Thereby, various information regarding the shape inspection result of the metal body S is output to the display unit (not shown).
- the result output unit 227 may output the obtained shape inspection result to an external device such as a manufacturing control computer, and creates various forms related to the product using the obtained shape inspection result. May be.
- the result output unit 227 may store information on the shape inspection result of the metal body S as history information in the storage unit 209 or the like in association with time information on the date and time when the information is calculated.
- the configuration of the data processing unit 205 in the case where the shape inspection of the metal body S is performed using the measurement data of the first illumination light and the measurement data of the second illumination light will be described in detail above with reference to FIG. did.
- the third illumination light source 151 when the third illumination light source 151 is provided for the measurement apparatus 100, in addition to the measurement data of the first illumination light and the second illumination light, It is also possible to use data relating to the luminance value of the reflected light of the three illumination lights (hereinafter simply referred to as “measurement data of the third illumination light”). Therefore, hereinafter, the configuration of the data processing unit 205 when performing shape inspection of the metal body S using the measurement data of the first to third illumination lights will be briefly described with reference to FIG.
- the data processing unit 205 that performs such processing includes a difference data generation unit 221, an inclination calculation unit 251, a height calculation unit 225, and a result output unit 227, as shown in FIG.
- the measurement data of the first illumination light and the second illumination light acquired by the data acquisition unit 201 is output to the difference data generation unit 221 as illustrated in FIG. 26, and the first acquisition light acquired by the data acquisition unit 201 is output.
- the measurement data of the three illumination lights is output to the inclination calculation unit 251.
- the difference data generation process performed by the difference data generation unit 221 shown in FIG. 26 is the same as the difference data generation process shown in FIG.
- the inclination calculation unit 251 is realized by, for example, a CPU, a ROM, a RAM, and the like.
- the inclination calculation unit 251 uses the difference data (luminance difference data) output from the difference data generation unit 221 and the measurement data itself of the third illumination light output from the data acquisition unit 201 to calculate the luminance difference.
- the direction and magnitude of the inclination of the surface of the metal body S are calculated based on the relationship between the inclination and the inclination, and the relationship between the luminance value and the inclination.
- the inclination calculation unit 251 calculates the inclination angle ⁇ of the surface of the metal object S of interest using luminance difference data in the same manner as the inclination calculation processing in the inclination calculation unit 223 shown in FIG. .
- the inclination calculation unit 251 uses the measurement data of the third illumination light instead of the luminance difference data to apply the corresponding data position.
- the inclination angle ⁇ of the surface at is calculated.
- a conversion coefficient for converting the luminance value into a slope can be determined. Therefore, a conversion coefficient for converting the luminance value into the slope is specified in advance, and information regarding the conversion coefficient is stored in the storage unit 209 or the like, for example.
- the inclination calculation unit 251 acquires information on the conversion coefficient from the storage unit 209 when performing the inclination calculation process using the measurement data of the third illumination light, and converts the luminance value into an inclination angle.
- the inclination calculation unit 251 does not use the inclination data obtained by converting the inclination data at the data position of interest from the luminance difference, but the inclination calculated from the inclination angle converted from the luminance value. Data. In this way, even if the data position is likely to contain a lot of errors when using the luminance difference, the measurement data of the third illumination light can be used to accurately tilt the surface. Can be obtained.
- the inclination calculation unit 251 can also inspect the shape of the surface of the metal body S by comparing the calculated inclination with a predetermined threshold, similarly to the inclination calculation unit 223 illustrated in FIG. .
- the inclination calculation unit 251 outputs data regarding the surface inclination of the metal body S generated as described above to the height calculation unit 225. In addition, the inclination calculation unit 251 may output data itself regarding the surface inclination of the generated metal body S, the inspection result of the surface of the metal body S, and the like to the result output unit 227.
- the processing performed by the height calculation unit 225 and the result output unit 227 illustrated in FIG. 26 is the same as the processing performed by the height calculation unit 225 and the result output unit 227 illustrated in FIG. Detailed description is omitted.
- each component described above may be configured using a general-purpose member or circuit, or may be configured by hardware specialized for the function of each component.
- the CPU or the like may perform all functions of each component. Therefore, it is possible to appropriately change the configuration to be used according to the technical level at the time of carrying out the present embodiment.
- a computer program for realizing each function of the arithmetic processing apparatus according to the present embodiment as described above can be produced and mounted on a personal computer or the like.
- a computer-readable recording medium storing such a computer program can be provided.
- the recording medium is, for example, a magnetic disk, an optical disk, a magneto-optical disk, a flash memory, or the like.
- the above computer program may be distributed via a network, for example, without using a recording medium.
- FIGS. 27 and 28 are flowcharts showing an example of the flow of the shape inspection method according to the present embodiment.
- the measuring apparatus 100 of the shape inspection apparatus 10 measures a predetermined area on the surface of the metal body S using the first illumination light and the second illumination light under the control of the measurement control unit 203 of the arithmetic processing apparatus 200, respectively.
- the measurement data relating to the illumination light is generated (step S101). Thereafter, the measuring apparatus 100 outputs the generated measurement data to the arithmetic processing apparatus 200.
- the data acquisition unit 201 of the arithmetic processing device 200 acquires the measurement data output from the measurement device 100
- the data acquisition unit 201 outputs the acquired measurement data to the difference data generation unit 221 of the data processing unit 205.
- the difference data generation unit 221 of the data processing unit 205 uses the measurement data of the first illumination light and the measurement data of the second illumination light to process the difference data (that is, data related to the luminance difference) by the process described above. Generate (step S103). Thereafter, the difference data generation unit 221 outputs data regarding the generated luminance difference to the inclination calculation unit 223.
- the inclination calculation unit 223 uses the difference data (data regarding luminance difference) output from the difference data generation unit 221 to calculate data related to the inclination of the surface of the metal body S of interest (that is, the inclination of the measurement region) ( Step S105). Thereafter, the inclination calculation unit 223 outputs data regarding the calculated inclination to the height calculation unit 225.
- the height calculation unit 225 calculates the height of the surface of the metal body by integrating the inclination stored in the data relating to the inclination output from the inclination calculation unit 223 (step S107).
- the height calculation unit 225 outputs data regarding the height of the surface of the obtained metal body to the result output unit 227.
- the result output unit 227 When the various types of inspection information used for the surface inspection of the metal body S are input, the result output unit 227 outputs the obtained results to the user and various devices provided outside (Step S109). Thereby, the user can grasp the inspection result relating to the shape of the metal body S.
- the measuring apparatus 100 of the shape inspection apparatus 10 measures a predetermined region on the surface of the metal body S using the first to third illumination lights under the control of the measurement control unit 203 of the arithmetic processing apparatus 200. And the measurement data regarding each illumination light are produced
- the data acquisition unit 201 of the arithmetic processing device 200 acquires the measurement data output from the measurement device 100, the measurement data related to the first illumination light and the second illumination light among the acquired measurement data is the difference of the data processing unit 205. The data is output to the data generation unit 221. In addition, the data acquisition unit 201 outputs measurement data related to the third illumination light among the acquired measurement data to the inclination calculation unit 251.
- the difference data generation unit 221 of the data processing unit 205 uses the measurement data of the first illumination light and the measurement data of the second illumination light to process the difference data (that is, data related to the luminance difference) by the process described above. Generate (step S153). Thereafter, the difference data generation unit 221 outputs data regarding the generated luminance difference to the inclination calculation unit 251.
- the inclination calculation unit 251 uses the difference data output from the difference data generation unit 221 (data relating to the luminance difference) and the measurement data of the third illumination light, and performs the processing described above to perform the metal object of interest. Data relating to the inclination of the surface of S (that is, the inclination of the measurement region) is calculated (step S155). Thereafter, the inclination calculation unit 251 outputs data regarding the calculated inclination to the height calculation unit 225.
- the height calculation unit 225 calculates the height of the surface of the metal body by integrating the inclination stored in the data relating to the inclination output from the inclination calculation unit 223 (step S157).
- the height calculation unit 225 outputs data regarding the height of the surface of the obtained metal body to the result output unit 227.
- the result output unit 227 outputs the obtained results to the user and various devices provided outside when the various pieces of inspection information used for the surface inspection of the metal body S are input (step S159). Thereby, the user can grasp the inspection result relating to the shape of the metal body S.
- FIG. 29 is a block diagram for explaining a hardware configuration of the arithmetic processing device 200 according to the embodiment of the present invention.
- the arithmetic processing apparatus 200 mainly includes a CPU 901, a ROM 903, and a RAM 905.
- the arithmetic processing device 200 further includes a bus 907, an input device 909, an output device 911, a storage device 913, a drive 915, a connection port 917, and a communication device 919.
- the CPU 901 functions as a central processing device and control device, and performs all or part of the operation in the arithmetic processing device 200 according to various programs recorded in the ROM 903, the RAM 905, the storage device 913, or the removable recording medium 921. Control.
- the ROM 903 stores programs and calculation parameters used by the CPU 901.
- the RAM 905 primarily stores programs used by the CPU 901, parameters that change as appropriate during execution of the programs, and the like. These are connected to each other by a bus 907 constituted by an internal bus such as a CPU bus.
- the bus 907 is connected to an external bus such as a PCI (Peripheral Component Interconnect / Interface) bus via a bridge.
- PCI Peripheral Component Interconnect / Interface
- the input device 909 is an operation means operated by the user such as a mouse, a keyboard, a touch panel, a button, a switch, and a lever.
- the input device 909 may be, for example, remote control means (so-called remote control) using infrared rays or other radio waves, or may be an external connection device 923 such as a PDA corresponding to the operation of the arithmetic processing device 200. May be.
- the input device 909 includes, for example, an input control circuit that generates an input signal based on information input by a user using the operation unit and outputs the input signal to the CPU 901. The user can input various data and instruct a processing operation to the shape inspection apparatus 10 by operating the input device 909.
- the output device 911 is configured by a device that can notify the user of the acquired information visually or audibly. Examples of such devices include CRT display devices, liquid crystal display devices, plasma display devices, EL display devices and display devices such as lamps, sound output devices such as speakers and headphones, printer devices, mobile phones, and facsimiles.
- the output device 911 outputs results obtained by various processes performed by the arithmetic processing device 200, for example. Specifically, the display device displays the results obtained by various processes performed by the arithmetic processing device 200 as text or images.
- the audio output device converts an audio signal composed of reproduced audio data, acoustic data, and the like into an analog signal and outputs the analog signal.
- the storage device 913 is a data storage device configured as an example of a storage unit of the arithmetic processing device 200.
- the storage device 913 includes, for example, a magnetic storage device such as an HDD (Hard Disk Drive), a semiconductor storage device, an optical storage device, or a magneto-optical storage device.
- the storage device 913 stores programs executed by the CPU 901, various data, various data acquired from the outside, and the like.
- the drive 915 is a recording medium reader / writer, and is built in or externally attached to the arithmetic processing unit 200.
- the drive 915 reads information recorded in a removable recording medium 921 such as a mounted magnetic disk, optical disk, magneto-optical disk, or semiconductor memory, and outputs the information to the RAM 905.
- the drive 915 can write a record in a removable recording medium 921 such as a mounted magnetic disk, optical disk, magneto-optical disk, or semiconductor memory.
- the removable recording medium 921 is, for example, a CD medium, a DVD medium, a Blu-ray medium, or the like.
- the removable recording medium 921 may be a compact flash (registered trademark) (CompactFlash: CF), a flash memory, an SD memory card (Secure Digital memory card), or the like. Further, the removable recording medium 921 may be, for example, an IC card (Integrated Circuit card) on which a non-contact IC chip is mounted, an electronic device, or the like.
- connection port 917 is a port for directly connecting a device to the arithmetic processing device 200.
- Examples of the connection port 917 include a USB (Universal Serial Bus) port, an IEEE1394 port, a SCSI (Small Computer System Interface) port, and an RS-232C port.
- the communication device 919 is a communication interface configured by a communication device for connecting to the communication network 925, for example.
- the communication device 919 is, for example, a communication card for a wired or wireless LAN (Local Area Network), Bluetooth (registered trademark), or WUSB (Wireless USB).
- the communication device 919 may be a router for optical communication, a router for ADSL (Asymmetric Digital Subscriber Line), or a modem for various communication.
- the communication device 919 can transmit and receive signals and the like according to a predetermined protocol such as TCP / IP, for example, with the Internet and other communication devices.
- the communication network 925 connected to the communication device 919 is configured by a wired or wireless network, and may be, for example, the Internet, a home LAN, infrared communication, radio wave communication, satellite communication, or the like. .
- each component described above may be configured using a general-purpose member, or may be configured by hardware specialized for the function of each component. Therefore, it is possible to change the hardware configuration to be used as appropriate according to the technical level at the time of carrying out this embodiment.
- the wavelength of the illumination light source used for the shape inspection is appropriately selected, so that the shape of the surface of the metal body is changed. It is possible to accurately inspect.
- the metal body shape inspection apparatus and shape inspection method according to the embodiment of the present invention since inspection information for each pixel of the captured image captured by the line sensor camera is obtained, a very high-density shape inspection is performed. Is possible.
- the inspection information can be calculated by the simple calculation as described above, so that a very high-speed shape inspection is possible. It is.
- the shape inspection apparatus 10 according to the present invention will be specifically described with reference to specific examples.
- the embodiment shown below is merely an example of the shape inspection apparatus and the shape inspection method according to the present invention, and the shape inspection apparatus and the shape inspection method according to the present invention are limited to the embodiments shown below. It is not a thing.
- Example 1 30 to 33 are explanatory diagrams for explaining the first embodiment.
- a steel plate is used as the metal body S, and two types of uneven shapes such as a concave groove and a V groove as shown in FIG. 30 are intentionally formed on the surface of the steel plate.
- the width of the concave groove and the V groove was 3 mm
- the depth d of the groove was four types of 50 ⁇ m, 100 ⁇ m, 200 ⁇ m, and 300 ⁇ m.
- a V-groove was formed in the right half of the steel plate in the width direction, and a concave groove was formed in the left half of the width direction.
- four types of depth grooves were formed in the longitudinal direction of the steel plate.
- the shape inspection apparatus 10 As the shape inspection apparatus 10 according to the present invention, the shape inspection apparatus 10 having the measuring apparatus 100 shown in FIGS. 2A and 2B was used.
- blue light having a peak wavelength of 460 nm was used as the first illumination light
- green light having a peak wavelength of 530 nm was used as the second illumination light.
- the color line sensor camera 101 was installed perpendicular to the steel plate surface, and ⁇ 1 and ⁇ 2 shown in FIG. 2A were each 45 degrees.
- the color line sensor camera 101 used in this embodiment has a resolution of 0.125 mm.
- the correction constant in the above formula 111 and the conversion coefficient for converting the luminance difference into an angle are those determined appropriately in advance.
- the steel sheet on which the uneven shape was formed was inspected using a shape inspection apparatus by a generally used optical cutting method as disclosed in Patent Document 1. Also in this light cutting method, the imaging resolution was 0.125 mm, the installation angle of the laser linear light source was 45 degrees, and the installation angle of the area camera was 0 degrees.
- the right and left diagrams in FIG. 31 show height images obtained by setting the height of 0 mm to 128 and the range of ⁇ 400 ⁇ m to 400 ⁇ m to correspond to 8-bit images of 0 to 255.
- the width direction of the steel plate, the top and bottom of the figure correspond to the longitudinal direction of the steel plate.
- the center diagram in FIG. 31 is an inclination image obtained by associating an inclination of ⁇ 10 degrees to 10 degrees with an 8-bit image of 0 to 255. In the calculation result of the inclination in the shape inspection apparatus 10 according to the embodiment of the present invention shown in the center of FIG.
- the boundary between the groove and the normal part for each of the concave groove and the V groove regardless of the depth of the groove.
- the contrast is clear.
- the contrast is also clear in the image on the left side of FIG. 31 representing the height of the surface obtained by integrating this inclination.
- the comparative example shown on the right side of FIG. 31 it can be seen that the contrast of the boundary between the groove portion and the normal portion becomes unclear as the groove depth becomes shallower.
- FIG. 32 to 34 are graphs showing a cross-sectional profile of a portion where the groove of the height image shown in FIG. 31 is formed, the vertical axis showing the luminance value of the image, and the horizontal axis showing the image. The longitudinal position is shown.
- FIG. 32 is a profile of the surface inclination in the result of the shape inspection apparatus 10 according to the embodiment of the present invention.
- FIG. 33 shows the height of the surface obtained by integrating the surface inclination shown in FIG. (In other words, a cross-sectional profile).
- FIG. 34 is a cross-sectional profile in the comparative example. As is apparent from FIGS.
- the shape inspecting apparatus 10 can satisfactorily detect a minute uneven shape having a groove depth of 50 ⁇ m.
- first illumination light blue light with a peak wavelength of 460 nm
- second illumination light red light with a peak wavelength of 640 nm
- first illumination light peak wavelength of 530 nm.
- Green light, second illumination light red light with a peak wavelength of 640 nm
- first illumination light blue light with a peak wavelength of 460 nm
- second illumination light green light with a peak wavelength of 530 nm.
- the standard deviation of the luminance value is 3.50 in the case (a), but is 3.09 in the case (b). ) was 2.06.
- the angle error is 1.6 degrees in case (a), 1.4 degrees in case (b), and 0 in case (c), reflecting the standard deviation of the luminance value. It was 9 degrees.
- the peak wavelengths are separated as much as possible, as in the case (a), for example.
- the case (b) in which the difference in peak wavelength is smaller than that in case (a) is better than that in case (a).
- the case (c) in which the thickness is 90 nm or less a better result is obtained than in the case (b).
- corrugation amount 10 micrometers x diameter 3mm which existed in the steel plate is shown.
- FIG. 36 by providing the third illumination light source 151 in the vicinity of the regular reflection position and measuring the regular reflection from the steel plate, it is possible to detect a minute shape with an unevenness of 10 ⁇ m.
- Shape inspection apparatus 100 Measuring apparatus 101 Color line sensor camera 103 1st illumination light source 105 2nd illumination light source 151 3rd illumination light source 200 Arithmetic processing apparatus 201 Data acquisition part 203 Measurement control part 205 Data processing part 207 Display control part 209 Storage part 221 Difference data generation unit 223, 251 Inclination calculation unit 225 Height calculation unit 227 Result output unit
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Abstract
Description
まず、図1を参照しながら、本発明の実施形態に係る金属体の形状検査装置(以下、単に「形状検査装置」ともいう。)10の全体的な構成について説明する。図1は、本実施形態に係る形状検査装置10の一構成例を示した説明図である。
まず、図2A~図23を参照しながら、本実施形態に係る測定装置100について、詳細に説明する。
図2A~図4は、本実施形態に係る形状検査装置10が備える測定装置の一例を模式的に示した説明図である。図5~図8、及び、図10~図19は、本実施形態に係る測定装置100における照明光の波長について説明するための説明図である。図9は、本実施形態に係る測定装置における照明光の反射角と表面の傾き角との関係を模式的に示した説明図である。図20は、第1及び第2の照明光の反射光の輝度差と金属体表面の傾き角との関係の一例を示したグラフ図である。図21及び図22は、本実施形態に係る形状検査装置が備える測定装置の別の一例を模式的に示した説明図である。図23は、第3の照明光の反射光の輝度値と金属体表面の傾き角との関係の一例を示した説明図である。
続いて、図5~図23を参照しながら、本実施形態に係る測定装置100における照明光の波長の選択方法について、詳細に説明する。
金属粗面での光の反射を模擬するモデルの一つに、上記非特許文献1に開示されているようなKirchhoff-Beckmann-Spizzichinoモデル(以下、「KBSモデル」と略記する。)がある。KBSモデルでは、ある表面での光の反射率を、表面での光の入射角及び反射角、表面粗さ、並びに、表面形状の相関長に依存する関数として表わしている。
次に、図15~図19を参照しながら、2つの照明光のピーク波長の差の下限値について、詳細に説明する。
ここで、対象とする金属体Sの表面の鏡面性が高く、表面粗さが例えば二乗平均平方根粗さRq=1μm等のように小さな値である場合も生じうる。かかる場合、図5からも明らかなように、2つの照明光源の何れにおいても、カラーラインセンサカメラ101に結像する反射光の輝度値が、小さな値となってしまう。
続いて、図24を参照しながら、本実施形態に係る形状検査装置10が備える演算処理装置200の構成について、詳細に説明する。なお、以下では、測定装置100が、第1照明光源103、第2照明光源105及び第3照明光源151を有している場合について、説明を行うものとする。なお、測定装置100が第3照明光源151を有していない場合、以下の説明における第3照明光源151に関する処理が実施されないことは、言うまでもない。図24は、本実施形態に係る演算処理装置200の全体構成の一例を示したブロック図である。
次に、図25及び図26を参照しながら、本実施形態に係る演算処理装置200が備えるデータ処理部205の構成について、詳細に説明する。図25及び図26は、本実施形態に係るデータ処理部205の構成の一例を示したブロック図である。
差分データ生成部221は、第1照明光の測定データと第2照明光の測定データとを用いて、以下の式111又は式112に基づき、第1照明光の測定データと第2照明光の測定データとの差分からなる差分データ(すなわち、輝度差データ)を生成する。
輝度値の差分=(第2照明光の反射光の輝度値)-(第1照明光の反射光の輝度値)-補正定数 ・・・(式113)
続いて、図27及び図28を参照しながら、本実施形態に係る形状検査装置10で実施される形状検査方法の流れの一例について、簡単に説明する。図27及び図28は、本実施形態に係る形状検査方法の流れの一例を示した流れ図である。
次に、図29を参照しながら、本発明の実施形態に係る演算処理装置200のハードウェア構成について、詳細に説明する。図29は、本発明の実施形態に係る演算処理装置200のハードウェア構成を説明するためのブロック図である。
以上説明したように、本発明の実施形態に係る金属体の形状検査装置及び形状検査方法では、形状検査に用いられる照明光源の波長が適切に選択されることで、金属体の表面の形状を正確に検査することが可能となる。また、本発明の実施形態に係る金属体の形状検査装置及び形状検査方法では、ラインセンサカメラによって撮像された撮像画像の1画素毎の検査用情報が得られるため、非常に高密度な形状検査が可能である。更に、本発明の実施形態に係る金属体の形状検査装置及び形状検査方法では、上記のような簡便な演算により検査用情報を算出することが可能であるため、非常に高速な形状検査が可能である。
図30~図33は、実施例1について説明するための説明図である。図30に示したように、本実施例では、金属体Sとして鋼板を利用し、かかる鋼板の表面に図30に示したような凹溝及びV溝という2種類の凹凸性形状を意図的に形成し、これら2種類の凹凸性形状の検出を試みた。ここで、凹溝及びV溝の幅は3mmとし、溝の深さdは、50μm、100μm、200μ、300μmの4種類とした。また、かかる鋼板では、鋼板の幅方向右半分にV溝を形成し、幅方向左半分に凹溝を形成した。更に、かかる鋼板では、鋼板の長手方向に、4種類の深さの溝を形成した。
100 測定装置
101 カラーラインセンサカメラ
103 第1照明光源
105 第2照明光源
151 第3照明光源
200 演算処理装置
201 データ取得部
203 測定制御部
205 データ処理部
207 表示制御部
209 記憶部
221 差分データ生成部
223,251 傾き算出部
225 高さ算出部
227 結果出力部
Claims (18)
- 金属体に対して少なくとも2つの照明光を照射し、前記金属体からの前記2つの照明光の反射光を互いに区別して測定する測定装置と、
前記測定装置による前記反射光の輝度値の測定結果に基づいて、前記金属体の形状検査に用いられる情報を算出する演算処理装置と、
を備え、
前記測定装置は、
前記金属体に対して、ピーク波長が互いに異なる帯状の照明光をそれぞれ照射する第1及び第2の照明光源と、
前記第1の照明光源から照射された第1の照明光の反射光、及び、前記第2の照明光源から照射された第2の照明光の反射光を互いに区別して測定するカラーラインセンサカメラと、
を有し、
前記第1の照明光源及び前記第2の照明光源は、前記カラーラインセンサカメラの光軸の前記金属体の表面での正反射方向と前記第1の照明光源の光軸とのなす角と、当該正反射方向と前記第2の照明光源の光軸とのなす角とが、略等しくなるように配設されており、
前記第1の照明光のピーク波長と前記第2の照明光のピーク波長との波長差は、5nm以上90nm以下であり、
前記演算処理装置は、前記第1の照明光の反射光の輝度値と、前記第2の照明光の反射光の輝度値との差分を用いて、前記情報として前記金属体の表面の傾きを算出する、金属体の形状検査装置。 - 前記金属体の表面温度が、570℃以下である、請求項1に記載の金属体の形状検査装置。
- 前記カラーラインセンサカメラの光軸と、前記金属体の表面の法線方向とのなす角度が5度以下であり、
前記正反射方向と前記第1の照明光源の光軸とのなす角、及び、前記正反射方向と前記第2の照明光源の光軸とのなす角が、30度以上である、請求項1又は2に記載の金属体の形状検査装置。 - 前記第1の照明光のピーク波長は、450nm以上であり、かつ、前記第2の照明光のピーク波長は、540nm以下である、請求項1~3の何れか1項に記載の金属体の形状検査装置。
- 前記測定装置は、前記正反射方向の近傍に、前記第1の照明光及び前記第2の照明光のそれぞれとピーク波長が5nm以上異なる第3の照明光を照射可能な第3の照明光源を更に有しており、
前記カラーラインセンサカメラは、当該第3の照明光の前記金属体からの反射光を更に測定し、
前記演算処理装置は、前記差分と、前記第3の照明光の反射光の輝度値と、を用いて、前記金属体の表面の傾きを算出する、請求項1~4の何れか1項に記載の金属体の形状検査装置。 - 前記第3の照明光のピーク波長は、600nm以上700nm以下である、請求項5に記載の金属体の形状検査装置。
- 前記差分は、表面が平坦な前記金属体を測定した場合に、当該表面が平坦な金属体からの2つの前記反射光の輝度値の差分がゼロとなるように予め補正されており、
前記演算処理装置は、前記差分の正負に基づいて前記傾きの方向を特定するとともに、前記差分の絶対値に基づいて前記傾きの大きさを特定する、請求項1~6の何れか1項に記載の金属体の形状検査装置。 - 前記演算処理装置は、算出した前記金属体の表面の傾きを、前記カラーラインセンサカメラと前記金属体の相対的な移動方向に沿って積分して、前記金属体の表面の高さを前記情報として更に算出する、請求項1~7の何れか1項に記載の金属体の形状検査装置。
- 前記演算処理装置は、算出した前記金属体の表面の傾きを所定の閾値と比較することで、前記金属体の形状を検査する、請求項1~8の何れか1項に記載の金属体の形状検査装置。
- 金属体に対して、ピーク波長が互いに異なる帯状の照明光をそれぞれ照射する第1及び第2の照明光源と、前記第1の照明光源から照射された第1の照明光の反射光、及び、前記第2の照明光源から照射された第2の照明光の反射光を互いに区別して測定するカラーラインセンサカメラと、を有し、前記第1の照明光源及び前記第2の照明光源は、前記カラーラインセンサカメラの光軸の前記金属体の表面での正反射方向と前記第1の照明光源の光軸とのなす角と、当該正反射方向と前記第2の照明光源の光軸とのなす角とが、略等しくなるように配設されており、前記第1の照明光のピーク波長と前記第2の照明光のピーク波長との波長差が5nm以上90nm以下である測定装置により、前記金属体に前記第1の照明光及び前記第2の照明光を少なくとも照射し、前記金属体からの前記照明光の反射光を互いに区別して測定し、
前記測定装置による前記反射光の輝度値の測定結果に基づいて前記金属体の形状を検査するための情報を算出する演算処理装置により、前記第1の照明光の反射光の輝度値と、前記第2の照明光の反射光の輝度値との差分を用いて、前記情報として前記金属体の表面の傾きを算出する、金属体の形状検査方法。 - 前記金属体の表面温度が、570℃以下である、請求項10に記載の金属体の形状検査方法。
- 前記カラーラインセンサカメラの光軸と、前記金属体の表面の法線方向とのなす角度は、5度以下に設定され、
前記正反射方向と前記第1の照明光源の光軸とのなす角、及び、前記正反射方向と前記第2の照明光源の光軸とのなす角は、30度以上に設定される、請求項10又は11に記載の金属体の形状検査方法。 - 前記第1の照明光のピーク波長を、450nm以上に設定し、かつ、前記第2の照明光のピーク波長を、540nm以下に設定する、請求項10~12の何れか1項に記載の金属体の形状検査方法。
- 前記測定装置は、前記正反射方向の近傍に、前記第1の照明光及び前記第2の照明光のそれぞれとピーク波長が5nm以上異なる第3の照明光を照射可能な第3の照明光源を更に有しており、前記カラーラインセンサカメラは、当該第3の照明光の前記金属体からの反射光を更に測定し、
前記演算処理装置での前記表面の傾きの算出処理では、前記差分と、前記第3の照明光の反射光の輝度値と、を用いて、前記金属体の表面の傾きが算出される、請求項10~13の何れか1項に記載の金属体の形状検査方法。 - 前記第3の照明光のピーク波長を、600nm以上700nm以下に設定する、請求項14に記載の金属体の形状検査方法。
- 前記差分は、表面が平坦な前記金属体を測定した場合に、当該表面が平坦な金属体からの2つの前記反射光の輝度値の差分がゼロとなるように予め補正されており、
前記演算処理装置での前記表面の傾きの算出処理では、前記差分の正負に基づいて前記傾きの方向が特定されるとともに、前記差分の絶対値に基づいて前記傾きの大きさが特定される、請求項10~15の何れか1項に記載の金属体の形状検査方法。 - 前記演算処理装置により、算出した前記金属体の表面の傾きを、前記カラーラインセンサカメラと前記金属体の相対的な移動方向に沿って積分して、前記金属体の表面の高さを前記情報として更に算出する、請求項10~16の何れか1項に記載の金属体の形状検査方法。
- 前記演算処理装置により、算出した前記金属体の表面の傾きを所定の閾値と比較することで、前記金属体の形状を検査する、請求項10~17の何れか1項に記載の金属体の形状検査方法。
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