WO2016194061A1 - Optical-characteristic-detection optical system, measurement probe, and optical-characteristic-detection device - Google Patents

Optical-characteristic-detection optical system, measurement probe, and optical-characteristic-detection device Download PDF

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Publication number
WO2016194061A1
WO2016194061A1 PCT/JP2015/065612 JP2015065612W WO2016194061A1 WO 2016194061 A1 WO2016194061 A1 WO 2016194061A1 JP 2015065612 W JP2015065612 W JP 2015065612W WO 2016194061 A1 WO2016194061 A1 WO 2016194061A1
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WO
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Prior art keywords
light
optical
detection
light receiving
refractive index
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PCT/JP2015/065612
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French (fr)
Japanese (ja)
Inventor
花野　和成
山崎　健
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オリンパス株式会社
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Priority to PCT/JP2015/065612 priority Critical patent/WO2016194061A1/en
Publication of WO2016194061A1 publication Critical patent/WO2016194061A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length

Definitions

  • the present invention relates to an optical characteristic detection optical system used when detecting the refractive index of a test object such as a living body, a measurement probe including the optical characteristic detection optical system, and an optical characteristic detection device.
  • a compact wave called a plasma wave in which free electrons collectively vibrate by electromagnetic waves such as light is generated.
  • Quantum corresponding to the dense wave generated on the metal surface is called surface plasmon.
  • a surface plasmon resonance sensor that analyzes the refractive index in a sample attached to a metal surface using this surface plasmon is known (see Patent Document 1).
  • a prism in which a metal thin film is formed on one plane on an internal optical path, a collimated light source that emits light toward the surface of the prism on which the metal thin film is formed, and an optical axis of light emitted from the collimated light source
  • the incident angle of the light incident on the metal thin film is changed by providing a sweep mechanism that rotates the collimated light source around the center.
  • Patent Document 1 described above, there is a problem that the configuration of the apparatus is complicated because a sweep mechanism is required.
  • the present invention has been made in view of the above, and an object thereof is to provide an optical property detection optical system, a measurement probe, and an optical property detection device having a simple configuration.
  • an optical characteristic detection optical system uses a light-emitting member having a plurality of light-emitting portions that emit light having a predetermined wavelength and a member having a predetermined refractive index.
  • a detection unit having a detection surface that is formed in contact with the test object, and the light emitted from each of the plurality of light emitting units is converted into substantially parallel light, and the substantially parallel light is discretely formed on the detection surface.
  • the detection unit is characterized in that a metal film is formed on the detection surface.
  • the plurality of incident angles are between the maximum angle and the minimum angle, the refractive index of the test object, the refractive index of the detection unit, It includes an angle that satisfies a plasmon resonance condition determined from the material and thickness of the metal film and the wavelength emitted by the light emitting member.
  • the plurality of input angles include 69 degrees and 73 degrees between a maximum angle and a minimum angle.
  • the pitch of each of the plurality of input angles is between 0.2 degrees and 2 degrees.
  • the plurality of incident angles are between the maximum angle and the minimum angle, the refractive index of the test object, the refractive index of the detection unit, and An angle satisfying a total reflection condition determined from a wavelength emitted by the light emitting member is included.
  • the detection surface is at an optical substantially pupil position formed by the first optical member with each of the plurality of light emitting units as an object surface. It is characterized by being arranged.
  • optical characteristic detection optical system is characterized in that, in the above invention, the plurality of light emitting units and the light receiving unit are in an optically conjugate positional relationship.
  • optical characteristic detection optical system is characterized in that, in the above invention, the detection surface and the light receiving portion are in an optically conjugate positional relationship.
  • the light emitting member is a surface emitting laser array.
  • the light emitting member is a plurality of optical fibers
  • the light emitting unit is an emission end of each of the plurality of optical fibers.
  • the optical characteristic detection optical system according to the present invention is characterized in that, in the above invention, the light receiving member is configured using an optical fiber, and the light receiving unit is an incident end of the optical fiber.
  • the light emitting member further includes the light receiving portion.
  • the optical characteristic detection optical system according to the present invention is characterized in that, in the above invention, the longitudinal axes of the optical fibers constituting the light emitting member and the light receiving member are substantially parallel.
  • the measurement probe according to the present invention includes the optical characteristic detection optical system according to the present invention, and the detection surface is arranged in contact with the test object.
  • An optical property detection apparatus includes an optical property detection optical system according to the above invention and a calculation unit that calculates a refractive index of the test object based on intensity information of the light received by the light receiving member. , Provided.
  • FIG. 1 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 1 of the present invention.
  • FIG. 2A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 1 of the present invention.
  • FIG. 2B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 1 of the present invention.
  • FIG. 3 is a schematic diagram showing a schematic configuration of the optical characteristic detection apparatus according to Embodiment 2 of the present invention.
  • FIG. 4A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 2 of the present invention.
  • FIG. 1 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 1 of the present invention.
  • FIG. 2A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 1 of the present invention.
  • FIG. 2B is a diagram schematically
  • FIG. 4B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 2 of the present invention.
  • FIG. 5 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 3 of the present invention.
  • FIG. 6A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 3 of the present invention.
  • FIG. 6B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 3 of the present invention.
  • FIG. 7 is a schematic diagram showing a schematic configuration of an optical characteristic detection apparatus according to a modification of the third embodiment of the present invention.
  • FIG. 8 is a schematic diagram showing a schematic configuration of an optical characteristic detection apparatus according to Embodiment 4 of the present invention.
  • FIG. 9A is a diagram schematically illustrating a detection result of the light amount detection unit according to the fourth embodiment of the present invention.
  • FIG. 9B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 4 of the present invention.
  • FIG. 10 is a schematic diagram showing a schematic configuration of an optical characteristic detection apparatus according to Embodiment 5 of the present invention.
  • FIG. 11A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 5 of the present invention.
  • FIG. 11B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 5 of the present invention.
  • FIG. 12 is a diagram schematically illustrating a detection result of the light amount detection unit according to the specific example of the fifth embodiment of the present invention.
  • FIG. 1 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 1 of the present invention.
  • a refractive index detection device that detects the refractive index of a test object will be described as an optical property detection device.
  • a refractive index detection device 1 shown in FIG. 1 includes a light source unit 2 that emits light of a predetermined wavelength, a light emitting member 3 that propagates light emitted from the light source unit 2 from an incident end and exits from the exit end, and a light emitting member 3.
  • a first optical member 4 that converts light emitted from the first optical member 4 into substantially parallel light
  • a polarizing member 5 that transmits a component in a specific direction among components of the substantially parallel light converted by the first optical member 4, and a test object SP.
  • a detection unit 6 having a test surface in contact with the second optical member 7, a second optical member 7 for condensing the light from the detection unit 6, a light receiving member 8 for receiving the light collected by the second optical member 7, and a light receiving member 8 includes a light amount detection unit 9 that detects the amount of light received by the light 8 and a control unit 10 that controls the configuration of each unit of the refractive index detection device 1.
  • the light emitting member 3, the first optical member 4, the polarizing member 5, the detection unit 6, the second optical member 7, and the light receiving member 8 function as a refractive index detection optical system.
  • the light source unit 2 emits light having a predetermined wavelength to each of a plurality of optical fibers constituting a light emitting member 3 to be described later.
  • the light source unit 2 is configured using a single light source such as a monochromatic light source (semiconductor laser) such as a laser light source or a white light source (light emitting diode (LED)).
  • the light source part 2 may provide individually the light source which radiate
  • the light emitting member 3 is configured using a plurality of optical fibers.
  • the light emitting member 3 is configured using at least two optical fibers.
  • the light emitting member 3 includes a first irradiation fiber 31 and a second irradiation fiber 32.
  • first irradiation fiber 31 and the second irradiation fiber 32 In each of the first irradiation fiber 31 and the second irradiation fiber 32, light having a predetermined wavelength emitted from the light source unit 2 is incident from the incident end (base end side), and the light having the predetermined wavelength is emitted from the emission end 311. The light exits from the exit end 321.
  • each of the output end 311 of the 1st irradiation fiber 31 and the output end 321 of the 2nd irradiation fiber 32 functions as a light emission part.
  • the first optical member 4 is configured using at least a collimating lens.
  • the first optical member 4 converts light emitted from each of the emission end 311 of the first irradiation fiber 31 and the emission end 321 of the second irradiation fiber 32 into substantially parallel light.
  • Incident light is incident on the detection surface 621 at a plurality of discrete incident angles.
  • the plurality of incident angles are determined between the maximum angle and the minimum angle based on the refractive index of the test object SP, the refractive index of the detection unit 6, the material and thickness of the metal film 62, and the wavelength emitted by the light emitting member 3. Includes an angle that satisfies a defined plasmon resonance condition.
  • the refractive index of the specimen SP is assumed to be 1.3 to 1.4, more specifically 1.33 to 138.
  • the refractive index of the detection unit 6 is 1.38 to 1.80, preferably 1.43 to 1.49.
  • the wavelength emitted by the light emitting member 3 is 405 nm to 2000 nm, preferably 1500 nm to 1600 nm, and more preferably 1550 nm because the sensitivity increases when the wavelength is long when measuring by surface plasmon resonance.
  • the polarizing member 5 is disposed on the optical path between the light emitting member 3 and the detection unit 6.
  • the polarization member 5 transmits a specific polarization component of the substantially parallel light components converted by the first optical member 4.
  • the polarizing member 5 is configured using a polarizing plate.
  • the detection unit 6 is arranged so as to have predetermined angles different from each other in the longitudinal direction (axial direction) of the light emitting member 3 and the longitudinal direction (axial direction) of the light receiving member 8. Specifically, the detection unit 6 is arranged so that the longitudinal direction of the first irradiation fiber 31 and the surface on which the light emitted from the first irradiation fiber 31 enters or exits is approximately 45 degrees, and receives light. It arrange
  • the detection unit 6 includes a prism 61 and a metal film 62 formed on the detection surface 621 that comes into contact with the test object SP.
  • the refractive index of the prism 61 is 1.38 to 1.80, preferably 1.43 to 1.49.
  • the metal film 62 is composed of a member having high reflectivity, for example, gold, silver and platinum, alone or in combination.
  • the thickness of the metal film 62 is 10 to 200 nm, preferably 10 to 50 nm, and more preferably 32 nm. In this case, the reflected light intensity due to resonance can be reduced to near zero.
  • the metal film 62 is formed at an optical substantially pupil position 622 formed by the first optical member 4 with each of the emission end 311 of the first irradiation fiber 31 and the emission end 321 of the second irradiation fiber 32 as the object plane. Be placed.
  • the second optical member 7 is configured using at least a condenser lens.
  • the second optical member 7 condenses the light from the detection unit 6 and emits it to the light receiving member 8.
  • the light receiving member 8 is configured using a plurality of optical fibers.
  • the first embodiment is configured using two or more optical fibers.
  • the light receiving member 8 includes a first light receiving fiber 81 and a second light receiving fiber 82.
  • Each of the incident end 811 of the first light receiving fiber 81 and the incident end 821 of the second light receiving fiber 82 receives light from the detection unit 6, propagates the received light, and emits it to the light amount detection unit 9.
  • each of the incident end 811 of the first light receiving fiber 81 and the emission end 311 of the first irradiation fiber 31 has an optically conjugate positional relationship.
  • each of the incident end 821 of the second light receiving fiber 82 and the emission end 321 of the second irradiation fiber 32 is in an optical positional relationship.
  • each of the incident end 811 of the first light receiving fiber 81 and the incident end 821 of the second light receiving fiber 82 functions as a light receiving unit.
  • the light amount detection unit 9 detects the amount of light emitted from the light receiving member 8 and outputs the detection result to the control unit 10.
  • the light amount detector 9 is provided with a PD (Photo Diode) light receiving sensor for each optical fiber.
  • PD Photo Diode
  • two PD light receiving sensors are provided corresponding to each of the first irradiation fiber 31 and the second irradiation fiber 32.
  • a light receiving sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) may be used instead of the PD light receiving sensor of the light amount detection unit 9.
  • the control unit 10 is configured using a CPU (Central Processing Unit) or the like, and controls each unit of the refractive index detection device 1.
  • the control unit 10 includes a calculation unit 101 that calculates the refractive index of the test object SP based on the light intensity information input from the light amount detection unit 9.
  • the light source unit 2 emits light having a predetermined wavelength under the control of the control unit 10.
  • the light emitted from the light source unit 2 is emitted from the emission end 311 of the first irradiation fiber 31.
  • the light emitted from the first irradiation fiber 31 is converted into substantially parallel light by the first optical member 4.
  • the substantially parallel light converted by the first optical member 4 enters the detection unit 6 via the polarizing member 5.
  • the light incident on the detection unit 6 is reflected by the detection surface 621 and collected by the second optical member 7.
  • the light condensed by the second optical member 7 enters from the incident end 811 (light receiving unit) of the first light receiving fiber 81.
  • the amount of light incident from the incident end 811 of the first light receiving fiber 81 is detected by the light amount detector 9. Further, the light emitted from the second irradiation fiber 32 passes through the same optical path as that of the first irradiation fiber 31 described above, and is detected by the light amount detection unit 9.
  • FIG. 2A is a diagram schematically illustrating the detection result of the light amount detection unit 9, and is a diagram illustrating the relationship between the received light amount and the incident angle when the test object SP is not in contact with the detection surface 621 of the detection unit 6.
  • FIG. 2B is a diagram schematically illustrating the detection result of the light amount detection unit 9, and is a diagram illustrating the relationship between the received light amount and the incident angle in a state where the test object SP is in contact with the detection surface 621 of the detection unit 6.
  • the horizontal axis indicates the incident angle
  • the vertical axis indicates the amount of received light.
  • the refractive index detection apparatus 1 has a specific incident angle of light irradiated by the first irradiation fiber 31 when the test object SP is in contact with the detection surface 621 of the detection unit 6. Is not reflected by resonance, the amount of light received by the first light receiving fiber 81 is reduced from the amount of light received by the second light receiving fiber 82. Thereby, it is possible to detect the incident angle dependency of the test object SP in contact with the detection surface 621 of the detection unit 6. By detecting the incident angle dependency, the refractive index of the specimen SP can be calculated.
  • light having a predetermined wavelength emitted from each of the emission end 311 of the first irradiation fiber 31 and the emission end 321 of the second irradiation fiber 32 is emitted from the first optical member 4.
  • the substantially parallel light is incident on the detection surface 621 of the detection unit 6 at a plurality of discrete incident angles, and the light reflected from the detection unit 6 through the second optical member 7 is converted into the first light. Since light is detected at each of the incident end 811 of the first light receiving fiber 81 and the incident end 821 of the second light receiving fiber 82 and is detected by the light amount detection unit 9, the dependency on the incident angle of the test object SP can be detected with a simple configuration. Can do.
  • the refractive index of the test object SP and the detection unit are between the maximum angle and the minimum angle in the light incident by the first optical member 4.
  • 6 includes an angle satisfying a surface plasmon resonance condition determined from the material (refractive index) 6, the material and film thickness of the metal film 62, and the wavelength of light emitted from the light emitting member 3, so that highly sensitive detection by surface plasmon resonance is simple. This can be done with a simple configuration.
  • the detection surface 621 of the detection unit 6 is optically formed by the first optical member 4 with each of the emission end 311 and the emission end 321 of the light emitting member 3 as object surfaces. Since the light emitted from each of the emission end 311 and the emission end 321 of the light emitting member 3 can be guided to the detection surface 621 of the detection unit 6 in a substantially parallel light state by being arranged at a substantially pupil position. It is difficult to depend on the position and part of the specimen SP, and the detection ability can be ensured.
  • the exit end 311 and exit end 321 of the light emitting member 3 and the entrance end 811 and the entrance end 821 of the light receiving member 8 are in an optically conjugate positional relationship, respectively. Can be detected independently for each incident angle.
  • the light source part 2 can be arrange
  • the light receiving member 8 is configured by an optical fiber, so that the light quantity detecting unit 9 can be disposed at a separated location, and thus the light receiving unit can be reduced in size.
  • the polarizing member 5 is provided on the optical path between the first optical member 4 and the detection unit 6, but the polarizing member 5 may be omitted.
  • the optical fiber which comprises the light emitting member 3 with a polarization-maintaining fiber is just to comprise the optical fiber which comprises the light emitting member 3 with a polarization-maintaining fiber.
  • Embodiment 1 of the present invention there are two irradiation fibers and light receiving fibers, but the present invention can be applied even when there is only one illumination fiber and light receiving fiber.
  • the presence or absence of the known test object SP can be detected by detecting a standard substance having no test object or a known refractive index.
  • the metal film 62 is not used, and a plurality of light incident angles on the detection surface 621 of the detection unit 6 are between the maximum angle and the minimum angle. If it is configured to include the minimum incident angle (critical angle) satisfying the total reflection condition determined from the refractive index of the object SP, the refractive index of the detector 6 and the wavelength emitted from the light emitting member 3, simple detection by the total reflection method can be performed. It can be carried out.
  • FIG. 3 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 2 of the present invention.
  • a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
  • the refractive index detection device 1b shown in FIG. 3 includes a light source unit 2, a light emitting member 3a, a dual-purpose member 3b, a first optical member 4, a polarizing member 5, a detection unit 6b, a light receiving member 8b, and a light amount detection.
  • the light emitting member 3a is configured using a plurality of optical fibers. Specifically, the light emitting member 3a includes a first irradiation fiber 31a and a second irradiation fiber 32a.
  • the first irradiation fiber 31a has one end connected to the light source unit 2 and the other end connected to a first optical path separation unit 111 described later.
  • the second irradiation fiber 32a has one end connected to the light source unit 2 and the other end connected to a second optical path separation unit 112 described later.
  • the dual-purpose member 3b irradiates the light input through the optical path separation unit 11 toward the first optical member 4 from the emission end 311a and the emission end 321a (light emitting unit) and is incident from the first optical member 4. Light is received by the emitting ends 311a and 321a.
  • the dual-purpose member 3b is configured using a plurality of optical fibers. Specifically, the dual-purpose member 3b includes a first dual-purpose fiber 3b1 and a second dual-purpose fiber 3b2. One end of the first combined fiber 3b1 is connected to a first optical path separation unit 111 described later. Further, one end of the second combined fiber 3b2 is connected to a second optical path separation unit 112 described later.
  • the detection unit 6b has two-dimensionally arranged a right-angle prism 64, a metal film 62 formed on the detection surface 621 in contact with the object SP on the oblique side of the right-angle prism 64, and a minute corner cube prism 65a. And a corner cube prism array 65.
  • the corner cube prism is a prism in which three surfaces are perpendicular to each other.
  • the light receiving member 8b is configured using an optical fiber.
  • the light receiving member 8 b includes a first light receiving fiber 81 and a second light receiving fiber 82.
  • the first light receiving fiber 81 has one end connected to the first optical path separation unit 111 and the other end connected to the first light quantity detection unit 91.
  • the second light receiving fiber 82 has one end connected to the second optical path separation unit 112 and the other end connected to the second light quantity detection unit 92.
  • the light quantity detection unit 9b includes a first light quantity detection unit 91 and a second light quantity detection unit 92.
  • the first light quantity detection unit 91 and the second light quantity detection unit 92 detect the amount of received light emitted from the light receiving member 8 b and output the detection result to the control unit 10.
  • the 1st light quantity detection part 91 and the 2nd light quantity detection part 92 are comprised using light receiving sensors, such as PD.
  • the optical path separating unit 11 transmits the light having a predetermined wavelength emitted from the light emitting member 3a to the dual-purpose member 3b and reflects the light incident from the dual-purpose member 3b to the light receiving member 8b.
  • the optical path separation unit 11 includes a first optical path separation unit 111 and a second optical path separation unit 112.
  • the first optical path separation unit 111 transmits the light incident from the first irradiation fiber 31 a to the first combined fiber 3 b 1, and reflects the light incident from the first combined fiber 3 b 1 to the first light receiving fiber 81.
  • the second optical path separation unit 112 transmits the light incident from the second irradiation fiber 32 a to the second duplex fiber 3 b 2, and reflects the light incident from the second duplex fiber 2 b 2 to the second light receiving fiber 82.
  • the thus configured refractive index detection device 1b emits light from each of the emission end 311a and the emission end 321a of the dual-purpose member 3b.
  • the light emitted from each of the emission end 311a and the emission end 321a of the combined member 3b enters the incident surface 61b of the detection unit 6b via the first optical member 4 and the polarizing member 5.
  • the light transmitted through the incident surface 61b is reflected by the metal film 62 as parallel light and then enters the corner cube prism 65a.
  • the light incident on the corner cube prism 65a is reflected in a direction almost opposite to the direction in which the light is incident by reflection on the three reflecting surfaces.
  • the light reflected by the corner cube prism 65a again enters the right-angle prism 64, is reflected by the metal film 62, and is emitted from the incident surface 61b.
  • the light emitted from the detection unit 6b is collected by the first optical member 4 via the polarizing member 5 and enters each of the emission end 311a and the emission end 321a of the dual-purpose member 3b.
  • the optical path in FIG. 3 is shown in a simplified manner, the focal plane of the first optical member 4 overlaps with the emission ends 311a and 321a. Therefore, even if the light (light flux) is slightly shifted by the reflection of the corner cube prism 65a. The light is condensed on each of the emission ends 311a and 321a.
  • the light incident on each of the emission end 311 a and the emission end 321 a of the dual-purpose member 3 b is reflected by the light path separating unit 11 to the light receiving member 8 b and detected by the first light quantity detection unit 91 or the second light quantity detection unit 92.
  • FIG. 4A is a diagram schematically illustrating the detection result of the light amount detection unit 9b, and is a diagram illustrating the relationship between the amount of received light and the incident angle when the test object SP is not in contact with the detection surface 621.
  • FIG. 4B is a diagram schematically illustrating the detection result of the light amount detection unit 9b, and is a diagram illustrating the relationship between the received light amount and the incident angle in a state where the test object SP is in contact with the detection surface 621.
  • the horizontal axis indicates the incident angle
  • the vertical axis indicates the amount of received light.
  • the light emitted from each of the emission end 311a and the emission end 321a of the dual-purpose member 3b passes through the detection surface 621 of the detection unit 6b twice. Therefore, since the light amount decrease due to resonance by the detection surface 621 near the optical pupil position occurs twice, the ratio of received light amount for each incident angle to the detection surface 621 can be increased, and the measurement accuracy of the test object SP is improved. Can be made.
  • the emission end 311a and the emission end 321a also serve as a light receiving unit, the number of optical fibers can be reduced.
  • the corner cube prism array 65 may be formed by forming a corner cube prism 65a on one surface of a right-angle prism, or may be processed by grinding or a three-dimensional printer. Further, a corner cube prism array configured in a sheet shape may be attached to one plane of a right-angle prism.
  • FIG. 5 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 3 of the present invention.
  • a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
  • the refractive index detection apparatus 1c removes the polarizing member 5 from the configuration of the refractive index detection apparatus 1 according to Embodiment 1 described above. Furthermore, the refractive index detection device 1c includes a detection unit 6c and a light receiving member 8c instead of the detection unit 6 and the light receiving member 8 of the refractive index detection device 1 according to Embodiment 1 described above.
  • the surface emitting laser array 12 light sources 121 to 129 that emit light of a predetermined wavelength are arranged in a two-dimensional matrix.
  • the light sources 121 to 129 emit light in a time-sharing manner under the control of the control unit 10.
  • the surface emitting laser array 12 may be irradiated with light simultaneously under the control of the control unit 10.
  • the number of light sources 121 to 129 of the surface emitting laser array 12 is nine.
  • the present invention is not limited to this, and at least two light sources are sufficient.
  • the detection unit 6 c is configured using a prism 61.
  • the detector 6c is arranged at a predetermined angle with respect to the optical path of the light emitted from the surface emitting laser array 12.
  • the predetermined angle is set such that the total reflection condition is broken by the refractive index of the target test object.
  • the detector 6c is arranged so that the optical path of the light emitted from the surface emitting laser array 12 and the surface on which the light incident from the surface emitting laser array 12 enters or exits are approximately 45 degrees, And it arrange
  • the light receiving member 8c is configured using a plurality of optical fibers.
  • the light receiving member 8 c receives the light collected by the second optical member 7 at the incident end 841 (light receiving unit) and emits the light to the light amount detecting unit 9.
  • the light receiving member 8 c is configured by using optical fibers corresponding to the number of light sources constituting the surface emitting laser array 12.
  • the light receiving member 8 c is configured using the first light receiving fiber 81 to the ninth light receiving fiber 89.
  • the incident end 841 (light receiving portion) of the light receiving member 8c and the surface emitting laser array 12 are in an optically conjugate positional relationship.
  • the thus configured refractive index detection device 1c emits light having a predetermined wavelength from the surface emitting laser array 12 under the control of the control unit 10.
  • the light emitted from the surface emitting laser array 12 is converted into substantially parallel light by the first optical member 4, and is incident on the detection surface 621 of the detection unit 6c at a plurality of discrete incident angles.
  • the light incident on the detection unit 6c is totally reflected by the detection surface 621 of the detection unit 6c, enters the second optical member 7, and is collected.
  • the light condensed by the second optical member 7 enters from the incident end 841 of the light receiving member 8c.
  • the amount of light incident from the incident end 841 of the light receiving member 8c is detected by the light amount detector 9.
  • FIG. 6A is a diagram schematically showing a detection result of the light quantity detection unit 9, and the first light receiving fiber to the ninth light receiving fiber receive light when the test object SP is not in contact with the detection surface 621 of the detection unit 6c. It is a figure which shows the relationship between the received light quantity and incident angle.
  • FIG. 6B is a diagram schematically showing the detection result of the light quantity detection unit 9. The light reception received by the first light receiving fiber to the ninth light receiving fiber with the test object SP in contact with the detection surface 621 of the detection unit 6c. It is a figure which shows the relationship between quantity and an incident angle.
  • the horizontal axis represents the incident angle
  • the vertical axis represents the amount of received light.
  • the first light receiving fiber, the second light receiving fiber, and the ninth light receiving fiber are used in order from the smaller incident angle on the detection surface 621 regardless of the reference numeral in FIG.
  • each of the light sources 121 to 129 in the surface emitting laser array 12 is detected.
  • the emitted light light having a specific incident angle is totally reflected.
  • the amount of light received by each of the first light receiving fiber, the second light receiving fiber, and the third light receiving fiber is greater than the amount of light received by each of the fourth light receiving fiber to the ninth light receiving fiber. descend.
  • the angle of the third light receiving fiber is an angle close to the total reflection condition, and the refractive index of the test object SP in contact with the detection surface 621 of the detection unit 6c can be derived.
  • the detected light amount is saturated, and the total reflection condition is applied, so that the metal film is applied to the detection surface 621 of the detection unit 6c. Even if it is not provided, it is possible to detect the incident angle dependency of the test object SP.
  • the light emitting point of the surface emitting laser array 12 is small, it is easy to produce parallel light, so that the detection accuracy can be increased.
  • FIG. 7 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to a modification of the third embodiment of the present invention.
  • a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
  • the refractive index detection device 1d further includes a light receiving member 8d obtained by removing the sixth light receiving fiber 86 to the ninth light receiving fiber 89 from the first light receiving fiber 81 to the ninth light receiving fiber 89 described above.
  • the refractive index detection device 1d configured in this manner emits light having a predetermined wavelength from each of the emission ends 311 of the first irradiation fiber 31 to the fifth irradiation fiber 35 under the control of the control unit 10.
  • the light emitted from each of the first irradiation fiber 31 to the fifth irradiation fiber 35 is converted into substantially parallel light by the first optical member 4 and discretely incident on the detection surface 621 of the detection unit 6c at a plurality of incident angles. To do.
  • the light that has entered the detection unit 6 c is reflected by the detection surface 621, enters the second optical member 7, and is collected.
  • the light condensed by the second optical member 7 is incident on the incident end 811 of each of the first light receiving fiber 81 to the fifth light receiving fiber 85 of the light receiving member 8d.
  • the amount of light incident on each of the incident ends 811 of each of the first light receiving fiber 81 to the fifth light receiving fiber 85 of the light receiving member 8d is detected by the light amount detecting unit 9.
  • the fourth embodiment is different in the configuration of the light receiving member according to the modification of the third embodiment described above.
  • the same number of light receiving fibers as the number of irradiation fibers are provided as light receiving members, but in the fourth embodiment, a plurality of irradiations are performed by one light receiving fiber. Light emitted from each of the fibers is received.
  • the structure of the refractive index detection apparatus which concerns on this Embodiment 4 is demonstrated.
  • symbol is attached
  • FIG. 8 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 4 of the present invention.
  • a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
  • a light receiving member 8e instead of the light receiving member 8d of the modified example of the third embodiment described above. Further, a second optical member 7e is provided instead of the second optical member 7.
  • the second optical member 7e condenses the light emitted from the detection unit 6 on the incident end 811e of the light receiving member 8e.
  • the second optical member 7e is configured using two condenser lenses 71 and a condenser lens 72.
  • the light receiving member 8e is configured by using a multimode optical fiber having a numerical aperture larger than the numerical aperture (NA) of the first irradiation fiber 31 to the fifth irradiation fiber 35.
  • the light receiving member 8 e receives the light collected by the second optical member 7 e at the incident end 811 e, propagates the received light, and emits it to the light amount detection unit 9.
  • the incident end 811e of the light-receiving member 8e functions as a light-receiving part.
  • the incident end 811e of the light receiving member 8e and the detection surface 621 of the detection unit 6 are in an optically conjugate positional relationship.
  • the thus configured refractive index detection device 1e sequentially emits light having a predetermined wavelength from the emission ends 311 of the first irradiation fiber 31 to the fifth irradiation fiber 35 under the control of the control unit 10.
  • the light sequentially emitted from each of the first irradiation fiber 31 to the fifth irradiation fiber 35 enters the detection unit 6 via the first optical member 4 and the polarizing member 5.
  • the light incident on the detection unit 6 is reflected by the detection surface 621 and enters the incident end 811e of the light receiving member 8e via the second optical member 7e.
  • the amount of light incident from the incident end 811e of the light receiving member 8e is detected by the light amount detector 9.
  • FIG. 9A is a diagram schematically showing the detection result of the light quantity detection unit 9, and shows the relationship between the received light amount received by the light receiving member 8 e and the incident angle in a state where the test object SP is not in contact with the detection surface 621.
  • FIG. 9B is a diagram schematically showing the detection result of the light amount detection unit 9, and shows the relationship between the received light amount received by the light receiving member 8 e and the incident angle in a state where the test object SP is in contact with the detection surface 621.
  • the horizontal axis indicates the incident angle (irradiation fiber), and the vertical axis indicates the amount of received light.
  • the refractive index detection device 1e is configured so that the specimen SP is in contact with the detection surface 621 of the detection unit 6 from each of the first irradiation fiber 31 to the fifth irradiation fiber 35.
  • the emitted light light having a specific incident angle (specific wavelength) resonates.
  • the received light amount of the light emitted from the fourth irradiation fiber 34 is lower than the received light amount of the light emitted from the first irradiation fiber 31 to the third irradiation fiber 33 and the fifth irradiation fiber 35.
  • the refractive index of the specimen SP in contact with the detection surface 621 of the detection unit 6 can be derived from the resonance condition.
  • the light emitted from each of the first irradiation fiber 31 to the fifth irradiation fiber 35 is received by one light receiving member 8e, so that the refraction of the test object SP is performed. Since the rate is detected, a simpler configuration can be obtained as compared with the first to third embodiments.
  • Embodiment 5 Next, a fifth embodiment of the present invention will be described.
  • the angle formed by the longitudinal direction of the light emitting member and the longitudinal direction of the light receiving member is arranged to be substantially perpendicular, but in Embodiment 5, the longitudinal direction of the light emitting member and the light receiving member are arranged.
  • the longitudinal direction of the member is arranged substantially in parallel.
  • symbol is attached
  • FIG. 10 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 5 of the present invention.
  • a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
  • the refractive index detection device 1f shown in FIG. 1 includes a light source unit 2, a measurement probe 20, a light amount detection unit 9, and a control unit 10.
  • the measurement probe 20 includes a light emitting member 3f, a polarizing member 5, a first optical member 4f, a detection unit 6f, a second optical member 7e, and a light receiving member 8f.
  • the light emitting member 3f is configured using a fiber bundle or the like.
  • the light emitting member 3 f propagates light having a predetermined wavelength band emitted from the light source unit 2.
  • the first optical member 4f converts the light transmitted through the polarizing member 5 into substantially parallel light, and causes the substantially parallel light to enter the detection surface 621f of the detection unit 6f with a plurality of discrete incident angles.
  • the first optical member 4f is configured using a collimating lens.
  • the detection unit 6f is configured using a prism having a substantially trapezoidal cross section.
  • the detection unit 6f has a detection surface 621f that comes into contact with the test object.
  • the detection surface 621f is an optical substantially pupil position formed by the first optical member 4f with the emission ends 311 of the plurality of first irradiation fibers 31 to seventh irradiation fibers 37 constituting the light emitting member 3f as object surfaces. Placed in.
  • a metal film 622f is provided on the detection surface 621f.
  • the detection unit 6f reflects the light emitted from the first optical member 4f toward the second optical member 7e.
  • the second optical member 7e is configured by using two condenser lenses 71 and a condenser lens 72.
  • the second optical member 7e condenses the light emitted from the detection unit 6f and emits it toward the incident end 811 (light receiving unit) of the light receiving member 8f.
  • the light receiving member 8f is configured by using a multimode optical fiber having a larger numerical aperture than each of the first irradiation fiber 31 to the seventh irradiation fiber 37.
  • the light receiving member 8 f receives light collected by the second optical member 7 e at the incident end (light receiving unit), propagates the received light, and emits the light to the light amount detecting unit 9.
  • the incident end of the light receiving member 8f and the detection surface 621f of the detection unit 6f are arranged at optically conjugate positions.
  • the optical fibers constituting the light receiving member 8f and the light emitting member 3f are substantially parallel in the longitudinal axis.
  • the refractive index detection device 1 f configured as described above emits light having a predetermined wavelength band from the respective emission ends 311 of the first irradiation fiber 31 to the seventh irradiation fiber 37 under the control of the control unit 10. .
  • the light emitted from each of the first irradiation fiber 31 to the seventh irradiation fiber 37 enters the detection unit 6f via the polarizing member 5 and the first optical member 4f.
  • the light incident on the detection unit 6f is reflected by the detection surface 621f, and enters the incident end 811 of the light receiving member 8f via the second optical member 7e.
  • the light amount of light incident on the incident end 811 of the light receiving member 8f via the second optical member 7e is detected by the light amount detector 9.
  • FIG. 11A is a diagram schematically showing the detection result of the light quantity detection unit 9, and shows the relationship between the amount of received light and the incident angle when the test object SP is not in contact with the detection surface 621f of the detection unit 6f.
  • FIG. 11B is a diagram schematically showing the detection result of the light quantity detection unit 9, and shows the relationship between the amount of received light and the incident angle in a state where the test object SP is in contact with the detection surface 621f of the detection unit 6f.
  • FIG. 11A and 11B the horizontal axis indicates the incident angle, and the vertical axis indicates the amount of received light.
  • a curve L11 indicates a change in received light amount and incident angle in a state where a substance (refractive index standard solution) whose refractive index is known in advance is in contact with the detection surface 621F of the detection unit 6F.
  • the curve L12 is different from the curve L11 and shows a change in the amount of received light and the incident angle received in a state where a substance having a known refractive index is in contact with the detection surface 621f of the detection unit 6f.
  • the refractive index detection device 1f is configured so that each of the first irradiation fiber 31 to the seventh irradiation fiber 37 is in contact with the test object SP when the detection surface SP 621f of the detection unit 6f is in contact.
  • light having a specific incident angle (specific wavelength) resonates.
  • the refractive index of the test object SP in contact with the detection surface 621f of the detection unit 6f can be derived from the resonance condition.
  • the measuring probe 20 is thin.
  • the diameter can be increased.
  • the light emitting member 3f includes the first irradiation fiber 31 to the seventh irradiation fiber 37.
  • the divergent light beam emitted from the emission end 311 (end surface) of the first illumination fiber becomes a substantially parallel light beam by the first optical member 4f, is reflected by the leg portion of the trapezoidal prism of the detection unit 6f, and is guided to the detection surface 621f. It is burned.
  • the light beam emitted from the second irradiation fiber 32 to the seventh irradiation fiber 37 also follows the same optical path as the light beam emitted from the first irradiation fiber 31 and becomes substantially parallel light and is guided to the detection surface 621f.
  • the incident angle of the substantially parallel light beam on the detection surface 621f is 68 degrees for the light beam by the first irradiation fiber 31, 69 degrees for the light beam by the second irradiation fiber 32, and thereafter 70 degrees, 71 degrees, 72 degrees, 73 degrees, 74. It is laid out to be a degree.
  • the wavelength used is 1550 nm of the communication band.
  • Gold is used as the metal film 622f, and the thickness of the gold thin film is set to around 32 nm.
  • FIG. 12 is a diagram schematically showing the detection result of the light quantity detection unit 9 according to the specific example of Embodiment 5 of the present invention, in which the test object SP is in contact with the detection surface 621f of the detection unit 6f. It is a figure which shows the relationship between the light-receiving amount of and the incident angle.
  • the horizontal axis indicates the incident angle
  • the vertical axis indicates the amount of received light.
  • the curve Lsp shows the resonance curve of the specimen SP (cells of a living body, etc.) (depending on the refractive index of the specimen shown in the figure), and each of the straight lines L1 to L7 is the first irradiation fiber. Shows the incident angle of the light beam corresponding to the seventh irradiation fiber on the detection surface. The intersections of these straight lines L1 to L7 and the resonance curve that changes depending on the refractive index correspond to the amount of received light at each angle incident angle.
  • the resonance curve (curved line) shown by the curve Lsp is obtained, so that the first irradiation fiber to the first irradiation fiber detected by the light amount detection unit 9.
  • the amount of light emitted from each of the seven irradiation fibers becomes a signal pattern at the intersection of each of the straight lines L1 to L7 and the resonance curve (thick line). Therefore, the plurality of discrete incident angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 are between the maximum angle and the minimum angle, and the refractive index of the test object SP and the detection unit. 6 includes an angle satisfying a plasmon resonance condition determined from a refractive index of 6, a material of the metal film 62, a film thickness, and a wavelength emitted from the light emitting member 3.
  • the plurality of incident angles include 69 degrees and 73 degrees, preferably 68 degrees and 74 degrees, between the maximum angle and the minimum angle.
  • the minimum angle among the plurality of incident angles is preferably 65 degrees or more and 79 degrees or less.
  • the incident angle pitch at a plurality of discrete incident angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 is at least between the incident angles of 69 degrees and 73 degrees. It is preferably between 2 and 2 degrees.
  • an incident angle region suitable for measurement can be specified by surface plasmon resonance in consideration of detection of optical characteristics of the specimen SP such as a living body.
  • the maximum angle and the minimum angle among the plurality of discrete input angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 When 68 degrees and 74 degrees are included in between, it is possible to specify a suitable incident angle region depending on the optical characteristics of the test object SP such as a living body.
  • the minimum angle among the plurality of discrete input angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 is 65 degrees or more and 75.
  • the angle is less than or equal to the degree, when performing measurement based on the refractive index of the specimen SP such as a living body, it is possible to reduce the size of the apparatus by not using unnecessary incident light.
  • the plurality of discrete input angle pitches incident on the detection surface 621f of the detection unit 6f by the first optical member 4 are at least 69 degrees and 73 degrees.
  • the angle is between 0.2 ° and 2 ° between the incident angles, the measurement accuracy can be maintained while maintaining the measurement accuracy and increasing the size of the optical system due to the excessive number of light emitting sections.
  • the present invention is not limited to the above-described embodiments and modifications as they are, and in the implementation stage, the constituent elements can be modified and embodied without departing from the spirit of the invention.
  • Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments. For example, some constituent elements may be deleted from all the constituent elements described in the above-described embodiments and modifications. Furthermore, you may combine suitably the component demonstrated by each embodiment and the modification.

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Abstract

Provided are an optical-characteristic-detection optical system, measurement probe, and optical-characteristic-detection device capable of simplifying a device configuration. An optical-characteristic-detection optical system is provided with a light emitting member 3 having a plurality of light emitting units for emitting light of a prescribed wavelength, a detection unit 6 that is formed using a member having a prescribed refractive index and has a test surface in contact with a test object, a first optical member 4 that converts light emitted from each of the plurality of light emitting units 311 into substantially collimated light and causes the substantially collimated light to discretely strike a detection surface 621 at a plurality of angles of incidence, a second optical member 7 for converging the light from the detection unit 6, and a light reception member 8 for receiving the light converged by the second optical member 7.

Description

光学特性検出光学系、測定プローブおよび光学特性検出装置Optical characteristic detection optical system, measurement probe, and optical characteristic detection apparatus
　本発明は、生体等の被検物の屈折率を検出する際に用いる光学特性検出光学系、該光学特性検出光学系を備えた測定プローブおよび光学特性検出装置に関する。 The present invention relates to an optical characteristic detection optical system used when detecting the refractive index of a test object such as a living body, a measurement probe including the optical characteristic detection optical system, and an optical characteristic detection device.
　従来、金属のような自由電荷を有する物質の表面では、光等の電磁波により自由電子が集団的に振動するプラズマ波という粗密波が生じる。金属表面に生じる粗密波に対応する量子を表面プラズモンという。この表面プラズモンを利用して、金属表面に付着させた試料中の屈折率を分析する表面プラズモン共鳴センサが知られている（特許文献１参照）。この技術では、内部の光路上の一平面に金属薄膜が形成されたプリズムと、金属薄膜が形成されたプリズムの面に向けて光を出射するコリメート光源と、コリメート光源が出射する光の光軸を中心にコリメート光源を回転させる掃引機構とを設けることによって、金属薄膜に入射する光の入射角を変化させる。 Conventionally, on the surface of a substance having a free charge such as a metal, a compact wave called a plasma wave in which free electrons collectively vibrate by electromagnetic waves such as light is generated. Quantum corresponding to the dense wave generated on the metal surface is called surface plasmon. A surface plasmon resonance sensor that analyzes the refractive index in a sample attached to a metal surface using this surface plasmon is known (see Patent Document 1). In this technique, a prism in which a metal thin film is formed on one plane on an internal optical path, a collimated light source that emits light toward the surface of the prism on which the metal thin film is formed, and an optical axis of light emitted from the collimated light source The incident angle of the light incident on the metal thin film is changed by providing a sweep mechanism that rotates the collimated light source around the center.
特開２０１２－７８１１０号公報JP 2012-78110 A
　しかしながら、上述した特許文献１では、掃引機構が必要であるため、装置の構成が複雑であるという問題点があった。 However, in Patent Document 1 described above, there is a problem that the configuration of the apparatus is complicated because a sweep mechanism is required.
　本発明は、上記に鑑みてなされたものであって、単純な構成を有する光学特性検出光学系、測定プローブおよび光学特性検出装置を提供することを目的とする。 The present invention has been made in view of the above, and an object thereof is to provide an optical property detection optical system, a measurement probe, and an optical property detection device having a simple configuration.
　上述した課題を解決し、目的を達成するために、本発明に係る光学特性検出光学系は、所定波長の光を出射する複数の発光部を有する発光部材と、所定の屈折率の部材を用いて形成され、被検物と接触する検出面を有する検出部と、前記複数の発光部の各々から出射された前記光を略平行光に変換し、該略平行光を前記検出面において離散的な複数の入射角によって入射させる第１光学部材と、前記検出部からの光を集光する第２光学部材と、前記第２光学部材が集光した光を受光する受光部を有する受光部材と、を備えたことを特徴とする。 In order to solve the above-described problems and achieve the object, an optical characteristic detection optical system according to the present invention uses a light-emitting member having a plurality of light-emitting portions that emit light having a predetermined wavelength and a member having a predetermined refractive index. A detection unit having a detection surface that is formed in contact with the test object, and the light emitted from each of the plurality of light emitting units is converted into substantially parallel light, and the substantially parallel light is discretely formed on the detection surface. A first optical member that is incident at a plurality of incident angles, a second optical member that condenses light from the detection unit, and a light receiving member that includes a light receiving unit that receives the light collected by the second optical member; , Provided.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記検出部は、前記検出面に金属膜が成膜されていることを特徴とする。 In the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the detection unit is characterized in that a metal film is formed on the detection surface.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記複数の入射角は、その最大角と最小角との間に、前記被検物の屈折率、前記検出部の屈折率、前記金属膜の材質、膜厚および前記発光部材が出射する波長から定まるプラズモン共鳴条件を満たす角度を含むことを特徴とする。 Further, in the optical characteristic detection optical system according to the present invention, in the above invention, the plurality of incident angles are between the maximum angle and the minimum angle, the refractive index of the test object, the refractive index of the detection unit, It includes an angle that satisfies a plasmon resonance condition determined from the material and thickness of the metal film and the wavelength emitted by the light emitting member.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記複数の入力角は、その最大角と最小角との間に、６９度と７３度を含むことを特徴とする。 In the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the plurality of input angles include 69 degrees and 73 degrees between a maximum angle and a minimum angle.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記複数の入力角の各々のピッチは、０.２度～２度の間とすることを特徴とする。 In the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the pitch of each of the plurality of input angles is between 0.2 degrees and 2 degrees.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記複数の入射角は、その最大角と最小角との間に、前記被検物の屈折率、前記検出部の屈折率および前記発光部材が出射する波長から定まる全反射条件に満たす角度を含むことを特徴とする。 Further, in the optical characteristic detection optical system according to the present invention, in the above invention, the plurality of incident angles are between the maximum angle and the minimum angle, the refractive index of the test object, the refractive index of the detection unit, and An angle satisfying a total reflection condition determined from a wavelength emitted by the light emitting member is included.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記検出面は、前記複数の発光部の各々を物体面として、前記第１光学部材によって形成される光学的な略瞳位置に配置されることを特徴とする。 Further, in the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the detection surface is at an optical substantially pupil position formed by the first optical member with each of the plurality of light emitting units as an object surface. It is characterized by being arranged.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記複数の発光部と前記受光部は、光学的に共役な位置関係にあることを特徴とする。 Further, the optical characteristic detection optical system according to the present invention is characterized in that, in the above invention, the plurality of light emitting units and the light receiving unit are in an optically conjugate positional relationship.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記検出面と前記受光部は、光学的に共役な位置関係にあることを特徴とする。 Further, the optical characteristic detection optical system according to the present invention is characterized in that, in the above invention, the detection surface and the light receiving portion are in an optically conjugate positional relationship.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記発光部材は、面発光レーザアレイであることを特徴とする。 In the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the light emitting member is a surface emitting laser array.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記発光部材は、複数の光ファイバであり、前記発光部は、前記複数の光ファイバの各々の出射端であることを特徴とする。 In the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the light emitting member is a plurality of optical fibers, and the light emitting unit is an emission end of each of the plurality of optical fibers. To do.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記受光部材は、光ファイバを用いて構成され、前記受光部は、前記光ファイバの入射端であることを特徴とする。 The optical characteristic detection optical system according to the present invention is characterized in that, in the above invention, the light receiving member is configured using an optical fiber, and the light receiving unit is an incident end of the optical fiber.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記発光部材は、前記受光部をさらに有することを特徴とする。 In the optical characteristic detection optical system according to the present invention as set forth in the invention described above, the light emitting member further includes the light receiving portion.
　また、本発明に係る光学特性検出光学系は、上記発明において、前記発光部材および前記受光部材を構成する光ファイバ同士は、長手方向の軸が略平行であることを特徴とする。 The optical characteristic detection optical system according to the present invention is characterized in that, in the above invention, the longitudinal axes of the optical fibers constituting the light emitting member and the light receiving member are substantially parallel.
　また、本発明に係る測定プローブは、上記発明の光学特性検出光学系を備え、前記検出面が前記被検物に接触して配置されていることを特徴とする。 The measurement probe according to the present invention includes the optical characteristic detection optical system according to the present invention, and the detection surface is arranged in contact with the test object.
　また、本発明に係る光学特性検出装置は、上記発明の光学特性検出光学系と、前記受光部材によって受光した前記光の強度情報に基づいて、前記被検物の屈折率を算出する算出部と、を備えたことを特徴とする。 An optical property detection apparatus according to the present invention includes an optical property detection optical system according to the above invention and a calculation unit that calculates a refractive index of the test object based on intensity information of the light received by the light receiving member. , Provided.
　本発明によれば、装置の構成を簡略化することができるという効果を奏する。 According to the present invention, there is an effect that the configuration of the apparatus can be simplified.
図１は、本発明の実施の形態１に係る光学特性検出装置の概略構成を示す模式図である。FIG. 1 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 1 of the present invention. 図２Ａは、本発明の実施の形態１に係る光量検出部の検出結果を模式的に示す図である。FIG. 2A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 1 of the present invention. 図２Ｂは、本発明の実施の形態１に係る光量検出部の検出結果を模式的に示す図である。FIG. 2B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 1 of the present invention. 図３は、本発明の実施の形態２に係る光学特性検出装置の概略構成を示す模式図である。FIG. 3 is a schematic diagram showing a schematic configuration of the optical characteristic detection apparatus according to Embodiment 2 of the present invention. 図４Ａは、本発明の実施の形態２に係る光量検出部の検出結果を模式的に示す図である。FIG. 4A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 2 of the present invention. 図４Ｂは、本発明の実施の形態２に係る光量検出部の検出結果を模式的に示す図である。FIG. 4B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 2 of the present invention. 図５は、本発明の実施の形態３に係る光学特性検出装置の概略構成を示す模式図である。FIG. 5 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 3 of the present invention. 図６Ａは、本発明の実施の形態３に係る光量検出部の検出結果を模式的に示す図である。FIG. 6A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 3 of the present invention. 図６Ｂは、本発明の実施の形態３に係る光量検出部の検出結果を模式的に示す図である。FIG. 6B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 3 of the present invention. 図７は、本発明の実施の形態３の変形例に係る光学特性検出装置の概略構成を示す模式図である。FIG. 7 is a schematic diagram showing a schematic configuration of an optical characteristic detection apparatus according to a modification of the third embodiment of the present invention. 図８は、本発明の実施の形態４に係る光学特性検出装置の概略構成を示す模式図である。FIG. 8 is a schematic diagram showing a schematic configuration of an optical characteristic detection apparatus according to Embodiment 4 of the present invention. 図９Ａは、本発明の実施の形態４に係る光量検出部の検出結果を模式的に示す図である。FIG. 9A is a diagram schematically illustrating a detection result of the light amount detection unit according to the fourth embodiment of the present invention. 図９Ｂは、本発明の実施の形態４に係る光量検出部の検出結果を模式的に示す図である。FIG. 9B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 4 of the present invention. 図１０は、本発明の実施の形態５に係る光学特性検出装置の概略構成を示す模式図である。FIG. 10 is a schematic diagram showing a schematic configuration of an optical characteristic detection apparatus according to Embodiment 5 of the present invention. 図１１Ａは、本発明の実施の形態５に係る光量検出部の検出結果を模式的に示す図である。FIG. 11A is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 5 of the present invention. 図１１Ｂは、本発明の実施の形態５に係る光量検出部の検出結果を模式的に示す図である。FIG. 11B is a diagram schematically illustrating a detection result of the light amount detection unit according to Embodiment 5 of the present invention. 図１２は、本発明の実施の形態５の具体例に係る光量検出部の検出結果を模式的に示す図である。FIG. 12 is a diagram schematically illustrating a detection result of the light amount detection unit according to the specific example of the fifth embodiment of the present invention.
　以下、本発明を実施するための形態を図面とともに詳細に説明する。なお、以下の実施の形態により本発明が限定されるものではない。また、以下の説明において参照する各図は、本発明の内容を理解でき得る程度に形状、大きさ、および位置関係を概略的に示してあるに過ぎない。即ち、本発明は、各図で例示された形状、大きさ、および位置関係のみに限定されるものではない。また、同一の構成には同一の符号を付して説明する。 Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by the following embodiment. The drawings referred to in the following description only schematically show the shape, size, and positional relationship so that the contents of the present invention can be understood. That is, the present invention is not limited only to the shape, size, and positional relationship illustrated in each drawing. Further, the same components are described with the same reference numerals.
（実施の形態１）
　〔屈折率検出装置の構成〕
　図１は、本発明の実施の形態１に係る光学特性検出装置の概略構成を示す模式図である。ここでは、光学特性として、被検物の屈折率の検出を行う屈折率検出装置を光学特性検出装置として説明する。 (Embodiment 1)
[Configuration of refractive index detector]
FIG. 1 is a schematic diagram showing a schematic configuration of an optical property detection apparatus according to Embodiment 1 of the present invention. Here, a refractive index detection device that detects the refractive index of a test object will be described as an optical property detection device.
　図１に示す屈折率検出装置１は、所定波長の光を出射する光源部２と、光源部２が出射した光を入射端から伝播して出射端から出射する発光部材３と、発光部材３から出射された光を略平行光に変換する第１光学部材４と、第１光学部材４が変換した略平行光の成分のうち特定方向の成分を透過する偏光部材５と、被検物ＳＰと接触する被検面を有する検出部６と、検出部６からの光を集光する第２光学部材７と、第２光学部材７が集光した光を受光する受光部材８と、受光部材８が受光した光の受光量を検出する光量検出部９と、屈折率検出装置１の各部の構成を制御する制御部１０と、を備える。本実施の形態１では、発光部材３、第１光学部材４、偏光部材５、検出部６、第２光学部材７および受光部材８が屈折率検出光学系として機能する。 A refractive index detection device 1 shown in FIG. 1 includes a light source unit 2 that emits light of a predetermined wavelength, a light emitting member 3 that propagates light emitted from the light source unit 2 from an incident end and exits from the exit end, and a light emitting member 3. A first optical member 4 that converts light emitted from the first optical member 4 into substantially parallel light, a polarizing member 5 that transmits a component in a specific direction among components of the substantially parallel light converted by the first optical member 4, and a test object SP. A detection unit 6 having a test surface in contact with the second optical member 7, a second optical member 7 for condensing the light from the detection unit 6, a light receiving member 8 for receiving the light collected by the second optical member 7, and a light receiving member 8 includes a light amount detection unit 9 that detects the amount of light received by the light 8 and a control unit 10 that controls the configuration of each unit of the refractive index detection device 1. In the first embodiment, the light emitting member 3, the first optical member 4, the polarizing member 5, the detection unit 6, the second optical member 7, and the light receiving member 8 function as a refractive index detection optical system.
　光源部２は、後述する発光部材３を構成する複数の光ファイバの各々に所定波長の光を出射する。光源部２は、レーザ光源等の単色光源（半導体レーザ）または白色光源（発光ＬＥＤ（Light　Emitting　Diode））等の単一の光源を用いて構成される。なお、光源部２は、後述する発光部材３を構成する複数の光ファイバの各々に対して所定波長を有する光を出射する光源を個別に設けてもよい。 The light source unit 2 emits light having a predetermined wavelength to each of a plurality of optical fibers constituting a light emitting member 3 to be described later. The light source unit 2 is configured using a single light source such as a monochromatic light source (semiconductor laser) such as a laser light source or a white light source (light emitting diode (LED)). In addition, the light source part 2 may provide individually the light source which radiate | emits the light which has a predetermined wavelength with respect to each of the some optical fiber which comprises the light emitting member 3 mentioned later.
　発光部材３は、複数の光ファイバを用いて構成される。本実施の形態１では、発光部材３は、少なくとも２本の光ファイバを用いて構成される。具体的には、発光部材３は、第１照射ファイバ３１と、第２照射ファイバ３２と、を有する。第１照射ファイバ３１および第２照射ファイバ３２の各々は、光源部２から出射された所定波長を有する光が入射端（基端側）から入射され、この所定波長を有する光を出射端３１１，出射端３２１から出射する。このため、本実施の形態１では、第１照射ファイバ３１の出射端３１１および第２照射ファイバ３２の出射端３２１の各々が発光部として機能する。 The light emitting member 3 is configured using a plurality of optical fibers. In the first embodiment, the light emitting member 3 is configured using at least two optical fibers. Specifically, the light emitting member 3 includes a first irradiation fiber 31 and a second irradiation fiber 32. In each of the first irradiation fiber 31 and the second irradiation fiber 32, light having a predetermined wavelength emitted from the light source unit 2 is incident from the incident end (base end side), and the light having the predetermined wavelength is emitted from the emission end 311. The light exits from the exit end 321. For this reason, in this Embodiment 1, each of the output end 311 of the 1st irradiation fiber 31 and the output end 321 of the 2nd irradiation fiber 32 functions as a light emission part.
　第１光学部材４は、少なくともコリメートレンズを用いて構成される。第１光学部材４は、第１照射ファイバ３１の出射端３１１および第２照射ファイバ３２の出射端３２１の各々から出射された光を略平行光に変換し、この略平行光を検出部６の検出面６２１において離散的な複数の入射角によって入射させる。この複数の入射角は、その最大角と最小角との間に、被検物ＳＰの屈折率、検出部６の屈折率、金属膜６２の材質、膜厚および発光部材３が出射する波長から定まるプラズモン共鳴条件を満たす角度を含む。被検物ＳＰの屈折率としては、１．３～１．４が想定され、より具体的には１.３３～１３８が想定される。また、検出部６の屈折率は、１．３８～１．８０、好ましくは１．４３～１．４９である。さらに、発光部材３が出射する波長は、４０５ｎｍ～２０００ｎｍ、好ましくは１５００ｎｍ～１６００ｎｍであり、より好ましくは、表面プラズモン共鳴で測定する場合、波長が長いと感度が高まるため、１５５０ｎｍである。 The first optical member 4 is configured using at least a collimating lens. The first optical member 4 converts light emitted from each of the emission end 311 of the first irradiation fiber 31 and the emission end 321 of the second irradiation fiber 32 into substantially parallel light. Incident light is incident on the detection surface 621 at a plurality of discrete incident angles. The plurality of incident angles are determined between the maximum angle and the minimum angle based on the refractive index of the test object SP, the refractive index of the detection unit 6, the material and thickness of the metal film 62, and the wavelength emitted by the light emitting member 3. Includes an angle that satisfies a defined plasmon resonance condition. The refractive index of the specimen SP is assumed to be 1.3 to 1.4, more specifically 1.33 to 138. The refractive index of the detection unit 6 is 1.38 to 1.80, preferably 1.43 to 1.49. Furthermore, the wavelength emitted by the light emitting member 3 is 405 nm to 2000 nm, preferably 1500 nm to 1600 nm, and more preferably 1550 nm because the sensitivity increases when the wavelength is long when measuring by surface plasmon resonance.
　偏光部材５は、発光部材３と検出部６の光路上に配置される。偏光部材５は、第１光学部材４が変換した略平行光の成分のうち特定偏光成分を透過する。偏光部材５は、偏光板を用いて構成される。 The polarizing member 5 is disposed on the optical path between the light emitting member 3 and the detection unit 6. The polarization member 5 transmits a specific polarization component of the substantially parallel light components converted by the first optical member 4. The polarizing member 5 is configured using a polarizing plate.
　検出部６は、発光部材３の長手方向（軸方向）および受光部材８の長手方向（軸方向）それぞれに対して互いに異なる所定の角度となるように配置される。具体的には、検出部６は、第１照射ファイバ３１の長手方向と第１照射ファイバ３１から出射された光が入射または出射する面とが略４５度となるように配置されるとともに、受光部材８の長手方向と検出部６の面とが略４５度となるように配置される。検出部６は、プリズム６１と、被検物ＳＰと接触する検出面６２１に成膜された金属膜６２と、を有する。プリズム６１の屈折率は、前述の通り、１．３８～１．８０、好ましくは１．４３～１．４９である。金属膜６２は、高い反射率を有する部材、例えば金、銀および白金を単独または組み合わせて構成される。金属膜６２の厚さは、１０～２００ｎｍ、好ましくは１０～５０ｎｍであり、より好ましくは３２ｎｍである。この場合、共鳴による反射光強度を０付近まで落とすことができる。また、金属膜６２は、第１照射ファイバ３１の出射端３１１および第２照射ファイバ３２の出射端３２１の各々を物体面として、第１光学部材４によって形成される光学的な略瞳位置６２２に配置される。 The detection unit 6 is arranged so as to have predetermined angles different from each other in the longitudinal direction (axial direction) of the light emitting member 3 and the longitudinal direction (axial direction) of the light receiving member 8. Specifically, the detection unit 6 is arranged so that the longitudinal direction of the first irradiation fiber 31 and the surface on which the light emitted from the first irradiation fiber 31 enters or exits is approximately 45 degrees, and receives light. It arrange | positions so that the longitudinal direction of the member 8 and the surface of the detection part 6 may become about 45 degree | times. The detection unit 6 includes a prism 61 and a metal film 62 formed on the detection surface 621 that comes into contact with the test object SP. As described above, the refractive index of the prism 61 is 1.38 to 1.80, preferably 1.43 to 1.49. The metal film 62 is composed of a member having high reflectivity, for example, gold, silver and platinum, alone or in combination. The thickness of the metal film 62 is 10 to 200 nm, preferably 10 to 50 nm, and more preferably 32 nm. In this case, the reflected light intensity due to resonance can be reduced to near zero. In addition, the metal film 62 is formed at an optical substantially pupil position 622 formed by the first optical member 4 with each of the emission end 311 of the first irradiation fiber 31 and the emission end 321 of the second irradiation fiber 32 as the object plane. Be placed.
　第２光学部材７は、少なくとも集光レンズを用いて構成される。第２光学部材７は、検出部６からの光を集光して受光部材８に出射する。 The second optical member 7 is configured using at least a condenser lens. The second optical member 7 condenses the light from the detection unit 6 and emits it to the light receiving member 8.
　受光部材８は、複数の光ファイバを用いて構成される。本実施の形態１では、２本以上の光ファイバを用いて構成される。具体的には、受光部材８は、第１受光ファイバ８１と、第２受光ファイバ８２と、を有する。第１受光ファイバ８１の入射端８１１および第２受光ファイバ８２の入射端８２１の各々は、検出部６からの光を受光し、この受光した光を伝播して光量検出部９へ出射する。また、第１受光ファイバ８１の入射端８１１および第１照射ファイバ３１の出射端３１１の各々は、光学的に共役な位置関係にある。さらに、第２受光ファイバ８２の入射端８２１および第２照射ファイバ３２の出射端３２１の各々は、光学的に位置関係にある。本実施の形態１では、第１受光ファイバ８１の入射端８１１および第２受光ファイバ８２の入射端８２１の各々が受光部として機能する。 The light receiving member 8 is configured using a plurality of optical fibers. The first embodiment is configured using two or more optical fibers. Specifically, the light receiving member 8 includes a first light receiving fiber 81 and a second light receiving fiber 82. Each of the incident end 811 of the first light receiving fiber 81 and the incident end 821 of the second light receiving fiber 82 receives light from the detection unit 6, propagates the received light, and emits it to the light amount detection unit 9. In addition, each of the incident end 811 of the first light receiving fiber 81 and the emission end 311 of the first irradiation fiber 31 has an optically conjugate positional relationship. Furthermore, each of the incident end 821 of the second light receiving fiber 82 and the emission end 321 of the second irradiation fiber 32 is in an optical positional relationship. In the first embodiment, each of the incident end 811 of the first light receiving fiber 81 and the incident end 821 of the second light receiving fiber 82 functions as a light receiving unit.
　光量検出部９は、受光部材８から出射された光の受光量を検出し、この検出結果を制御部１０へ出力する。光量検出部９は、光ファイバ毎にＰＤ（Photo　Diode）受光センサを設けている。本実施の形態１では、第１照射ファイバ３１および第２照射ファイバ３２の各々に対応させて２つのＰＤ受光センサを設けている。なお、光量検出部９のＰＤ受光センサに換えて、ＣＣＤ（Charge　Coupled　Device）やＣＭＯＳ（Complementary　Metal　Oxide　Semiconductor）等の受光センサを用いて構成してもよい。 The light amount detection unit 9 detects the amount of light emitted from the light receiving member 8 and outputs the detection result to the control unit 10. The light amount detector 9 is provided with a PD (Photo Diode) light receiving sensor for each optical fiber. In the first embodiment, two PD light receiving sensors are provided corresponding to each of the first irradiation fiber 31 and the second irradiation fiber 32. Note that a light receiving sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) may be used instead of the PD light receiving sensor of the light amount detection unit 9.
　制御部１０は、ＣＰＵ（Central　Processing　Unit）等を用いて構成され、屈折率検出装置１の各部を制御する。制御部１０は、光量検出部９から入力された光の強度情報に基づいて、被検物ＳＰの屈折率を算出する算出部１０１を有する。 The control unit 10 is configured using a CPU (Central Processing Unit) or the like, and controls each unit of the refractive index detection device 1. The control unit 10 includes a calculation unit 101 that calculates the refractive index of the test object SP based on the light intensity information input from the light amount detection unit 9.
　このように構成された屈折率検出装置１は、制御部１０の制御のもと、光源部２が所定波長を有する光を出射する。光源部２から出射された光は、第１照射ファイバ３１の出射端３１１から出射される。第１照射ファイバ３１から出射された光は、第１光学部材４によって略平行光に変換される。第１光学部材４によって変換された略平行光は、偏光部材５を介して検出部６に入射する。検出部６に入射した光は、検出面６２１で反射し、第２光学部材７によって集光される。第２光学部材７によって集光された光は、第１受光ファイバ８１の入射端８１１（受光部）から入射する。第１受光ファイバ８１の入射端８１１から入射した光の光量は、光量検出部９によって検出される。また、第２照射ファイバ３２から出射された光は、上述した第１照射ファイバ３１と同様の光路を通り、光量検出部９によって検出される。 In the refractive index detection device 1 configured as described above, the light source unit 2 emits light having a predetermined wavelength under the control of the control unit 10. The light emitted from the light source unit 2 is emitted from the emission end 311 of the first irradiation fiber 31. The light emitted from the first irradiation fiber 31 is converted into substantially parallel light by the first optical member 4. The substantially parallel light converted by the first optical member 4 enters the detection unit 6 via the polarizing member 5. The light incident on the detection unit 6 is reflected by the detection surface 621 and collected by the second optical member 7. The light condensed by the second optical member 7 enters from the incident end 811 (light receiving unit) of the first light receiving fiber 81. The amount of light incident from the incident end 811 of the first light receiving fiber 81 is detected by the light amount detector 9. Further, the light emitted from the second irradiation fiber 32 passes through the same optical path as that of the first irradiation fiber 31 described above, and is detected by the light amount detection unit 9.
　次に、光量検出部９が検出する受光量について説明する。図２Ａは、光量検出部９の検出結果を模式的に示す図であり、検出部６の検出面６２１に被検物ＳＰが接触していない状態の受光量と入射角との関係を示す図である。図２Ｂは、光量検出部９の検出結果を模式的に示す図であり、検出部６の検出面６２１に被検物ＳＰが接触している状態の受光量と入射角との関係を示す図である。なお、図２Ａおよび図２Ｂにおいて、横軸が入射角を示し、縦軸が受光量を示す。 Next, the amount of received light detected by the light amount detector 9 will be described. FIG. 2A is a diagram schematically illustrating the detection result of the light amount detection unit 9, and is a diagram illustrating the relationship between the received light amount and the incident angle when the test object SP is not in contact with the detection surface 621 of the detection unit 6. It is. FIG. 2B is a diagram schematically illustrating the detection result of the light amount detection unit 9, and is a diagram illustrating the relationship between the received light amount and the incident angle in a state where the test object SP is in contact with the detection surface 621 of the detection unit 6. It is. 2A and 2B, the horizontal axis indicates the incident angle, and the vertical axis indicates the amount of received light.
　図２Ａおよび図２Ｂに示すように、屈折率検出装置１は、検出部６の検出面６２１に被検物ＳＰが接触している場合、第１照射ファイバ３１が照射した特定の入射角の光が共鳴によって反射しないため、第１受光ファイバ８１で受光された受光量が第２受光ファイバ８２で受光された受光量より低減する。これにより、検出部６の検出面６２１において接触した被検物ＳＰの入射角依存性を検出することができる。この入射角依存性の検出により、被検物ＳＰの屈折率の算出を行うことができる。 As shown in FIGS. 2A and 2B, the refractive index detection apparatus 1 has a specific incident angle of light irradiated by the first irradiation fiber 31 when the test object SP is in contact with the detection surface 621 of the detection unit 6. Is not reflected by resonance, the amount of light received by the first light receiving fiber 81 is reduced from the amount of light received by the second light receiving fiber 82. Thereby, it is possible to detect the incident angle dependency of the test object SP in contact with the detection surface 621 of the detection unit 6. By detecting the incident angle dependency, the refractive index of the specimen SP can be calculated.
　以上説明した本発明の実施の形態１によれば、第１照射ファイバ３１の出射端３１１および第２照射ファイバ３２の出射端３２１の各々から出射された所定波長を有する光を第１光学部材４によって略平行光に変換し、この略平行光を検出部６の検出面６２１において離散的な複数の入射角によって入射させ、第２光学部材７を介して検出部６から反射された光を第１受光ファイバ８１の入射端８１１および第２受光ファイバ８２の入射端８２１の各々で受光させて光量検出部９によって検出するので、単純な構成で被検物ＳＰの入射角依存性を検出することができる。 According to the first embodiment of the present invention described above, light having a predetermined wavelength emitted from each of the emission end 311 of the first irradiation fiber 31 and the emission end 321 of the second irradiation fiber 32 is emitted from the first optical member 4. Is converted into substantially parallel light, and the substantially parallel light is incident on the detection surface 621 of the detection unit 6 at a plurality of discrete incident angles, and the light reflected from the detection unit 6 through the second optical member 7 is converted into the first light. Since light is detected at each of the incident end 811 of the first light receiving fiber 81 and the incident end 821 of the second light receiving fiber 82 and is detected by the light amount detection unit 9, the dependency on the incident angle of the test object SP can be detected with a simple configuration. Can do.
　また、本発明の実施の形態１によれば、第１光学部材４によって入射される光における複数の入射角がその最大角と最小角との間に、被検物ＳＰの屈折率、検出部６の材質（屈折率）、金属膜６２の材料と膜厚、および発光部材３が出射する光の波長から定まる表面プラズモン共鳴条件を満たす角度を含むので、表面プラズモン共鳴による高感度な検出を単純な構成で行うことができる。 Further, according to the first embodiment of the present invention, the refractive index of the test object SP and the detection unit are between the maximum angle and the minimum angle in the light incident by the first optical member 4. 6 includes an angle satisfying a surface plasmon resonance condition determined from the material (refractive index) 6, the material and film thickness of the metal film 62, and the wavelength of light emitted from the light emitting member 3, so that highly sensitive detection by surface plasmon resonance is simple. This can be done with a simple configuration.
　また、本発明の実施の形態１によれば、検出部６の検出面６２１が発光部材３の出射端３１１，出射端３２１の各々を物体面として、第１光学部材４によって形成される光学的な略瞳位置に配置することによって、発光部材３の出射端３１１，出射端３２１の各々から出射された光を略平行光の状態で検出部６の検出面６２１に導くことができるので、被検物ＳＰの位置や部分に依存しにくく、検出能を確保することができる。 Further, according to the first embodiment of the present invention, the detection surface 621 of the detection unit 6 is optically formed by the first optical member 4 with each of the emission end 311 and the emission end 321 of the light emitting member 3 as object surfaces. Since the light emitted from each of the emission end 311 and the emission end 321 of the light emitting member 3 can be guided to the detection surface 621 of the detection unit 6 in a substantially parallel light state by being arranged at a substantially pupil position. It is difficult to depend on the position and part of the specimen SP, and the detection ability can be ensured.
　また、本発明の実施の形態１によれば、発光部材３の出射端３１１，出射端３２１と受光部材８の入射端８１１，入射端８２１が光学的に共役な位置関係にあることによって、各々の入射角毎に独立して検出することができる。 Further, according to Embodiment 1 of the present invention, the exit end 311 and exit end 321 of the light emitting member 3 and the entrance end 811 and the entrance end 821 of the light receiving member 8 are in an optically conjugate positional relationship, respectively. Can be detected independently for each incident angle.
　また、本発明の実施の形態１によれば、発光部材３を光ファイバによって構成することによって、光源部２を離間した場所に配置することができるので、生体等への熱の影響を低減することができる。 Moreover, according to Embodiment 1 of this invention, since the light source part 2 can be arrange | positioned in the place spaced apart by comprising the light emission member 3 with an optical fiber, the influence of the heat | fever to a biological body etc. is reduced. be able to.
　また、本発明の実施の形態１によれば、受光部材８を光ファイバによって構成することによって、光量検出部９を離間した場所に配置することができるので、受光部を小型化することができる。 Further, according to the first embodiment of the present invention, the light receiving member 8 is configured by an optical fiber, so that the light quantity detecting unit 9 can be disposed at a separated location, and thus the light receiving unit can be reduced in size. .
　なお、本発明の実施の形態１では、第１光学部材４と検出部６との光路上に偏光部材５を設けていたが、この偏光部材５を省略してもよい。この場合、発光部材３を構成する光ファイバを偏波保存ファイバによって構成すればよい。これにより、光学特性検出光学系としての屈折率検出光学系の構成をより簡易な構成にすることができる。 In the first embodiment of the present invention, the polarizing member 5 is provided on the optical path between the first optical member 4 and the detection unit 6, but the polarizing member 5 may be omitted. In this case, what is necessary is just to comprise the optical fiber which comprises the light emitting member 3 with a polarization-maintaining fiber. Thereby, the structure of the refractive index detection optical system as the optical characteristic detection optical system can be made simpler.
　また、本発明の実施の形態１では、照射ファイバおよび受光ファイバそれぞれが２本であったが、照明ファイバおよび受光ファイバそれぞれが１本であっても適用することができる。この場合、何も被検物がない状態、もしくは既知の屈折率を有する標準物質を検出しておけば、既知の被検物ＳＰの有無を検出することができる。 Further, in Embodiment 1 of the present invention, there are two irradiation fibers and light receiving fibers, but the present invention can be applied even when there is only one illumination fiber and light receiving fiber. In this case, the presence or absence of the known test object SP can be detected by detecting a standard substance having no test object or a known refractive index.
　また、本発明の実施の形態１の変形例として、金属膜６２を用いずに、検出部６の検出面６２１における複数の光の入射角がその最大角と最小角との間に、被検物ＳＰの屈折率、検出部６の屈折率および発光部材３が出射する波長から定まる全反射条件を満たす最小入射角度（臨界角）を含むように構成すれば、全反射法による簡易な検出を行うことができる。 In addition, as a modification of the first embodiment of the present invention, the metal film 62 is not used, and a plurality of light incident angles on the detection surface 621 of the detection unit 6 are between the maximum angle and the minimum angle. If it is configured to include the minimum incident angle (critical angle) satisfying the total reflection condition determined from the refractive index of the object SP, the refractive index of the detector 6 and the wavelength emitted from the light emitting member 3, simple detection by the total reflection method can be performed. It can be carried out.
（実施の形態２）
　次に、本発明の実施の形態２について説明する。本実施の形態２では、一つの光ファイバで照射ファイバと受光ファイバとを兼用する。このため、以下においては、本実施の形態２に係る光学特性検出装置の構成について説明する。なお、上述した実施の形態１に係る屈折率検出装置１の構成と同一の構成には同一の符号を付して説明を省略する。 (Embodiment 2)
Next, a second embodiment of the present invention will be described. In the second embodiment, a single optical fiber serves as both an irradiation fiber and a light receiving fiber. Therefore, in the following, the configuration of the optical property detection apparatus according to the second embodiment will be described. In addition, the same code | symbol is attached | subjected to the structure same as the structure of the refractive index detection apparatus 1 which concerns on Embodiment 1 mentioned above, and description is abbreviate | omitted.
　〔屈折率検出装置の構成〕
　図３は、本発明の実施の形態２に係る屈折率検出装置の概略構成を示す模式図である。ここでも、光学特性として、被検物の屈折率の検出を行う屈折率検出装置を光学特性検出装置として説明する。 [Configuration of refractive index detector]
FIG. 3 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 2 of the present invention. Here, as an optical characteristic, a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
　図３に示す屈折率検出装置１ｂは、光源部２と、発光部材３ａと、兼用部材３ｂと、第１光学部材４と、偏光部材５と、検出部６ｂと、受光部材８ｂと、光量検出部９ｂと、光路分離部１１と、を備える。 The refractive index detection device 1b shown in FIG. 3 includes a light source unit 2, a light emitting member 3a, a dual-purpose member 3b, a first optical member 4, a polarizing member 5, a detection unit 6b, a light receiving member 8b, and a light amount detection. A unit 9b and an optical path separating unit 11.
　発光部材３ａは、複数の光ファイバを用いて構成される。具体的には、発光部材３ａは、第１照射ファイバ３１ａと、第２照射ファイバ３２ａと、を有する。第１照射ファイバ３１ａは、一端が光源部２に接続され、他端が後述する第１光路分離部１１１に接続される。また、第２照射ファイバ３２ａは、一端が光源部２に接続され、他端が後述する第２光路分離部１１２に接続される。 The light emitting member 3a is configured using a plurality of optical fibers. Specifically, the light emitting member 3a includes a first irradiation fiber 31a and a second irradiation fiber 32a. The first irradiation fiber 31a has one end connected to the light source unit 2 and the other end connected to a first optical path separation unit 111 described later. The second irradiation fiber 32a has one end connected to the light source unit 2 and the other end connected to a second optical path separation unit 112 described later.
　兼用部材３ｂは、光路分離部１１を介して入力された光を第１光学部材４に向けて出射端３１１ａ，出射端３２１ａ（発光部）から照射するとともに、第１光学部材４から入射された光を出射端３１１ａ、３２１ａによって受光する。兼用部材３ｂは、複数の光ファイバを用いて構成される。具体的には、兼用部材３ｂは、第１兼用ファイバ３ｂ１と、第２兼用ファイバ３ｂ２と、を有する。第１兼用ファイバ３ｂ１は、一端が後述する第１光路分離部１１１に接続される。また、第２兼用ファイバ３ｂ２は、一端が後述する第２光路分離部１１２に接続される。 The dual-purpose member 3b irradiates the light input through the optical path separation unit 11 toward the first optical member 4 from the emission end 311a and the emission end 321a (light emitting unit) and is incident from the first optical member 4. Light is received by the emitting ends 311a and 321a. The dual-purpose member 3b is configured using a plurality of optical fibers. Specifically, the dual-purpose member 3b includes a first dual-purpose fiber 3b1 and a second dual-purpose fiber 3b2. One end of the first combined fiber 3b1 is connected to a first optical path separation unit 111 described later. Further, one end of the second combined fiber 3b2 is connected to a second optical path separation unit 112 described later.
　検出部６ｂは、直角プリズム６４と、直角プリズム６４の斜辺に被検物ＳＰと接触する検出面６２１に成膜された金属膜６２と、微小なコーナーキューブプリズム６５ａを二次元的に配列させたコーナーキューブプリズムアレイ６５と、を有する。ここで、コーナーキューブプリズムとは、三つの面が互いに直角をなすプリズムである。 The detection unit 6b has two-dimensionally arranged a right-angle prism 64, a metal film 62 formed on the detection surface 621 in contact with the object SP on the oblique side of the right-angle prism 64, and a minute corner cube prism 65a. And a corner cube prism array 65. Here, the corner cube prism is a prism in which three surfaces are perpendicular to each other.
　受光部材８ｂは、光ファイバを用いて構成される。受光部材８ｂは、第１受光ファイバ８１と、第２受光ファイバ８２と、を有する。第１受光ファイバ８１は、一端が第１光路分離部１１１に接続され、他端が第１光量検出部９１に接続される。また、第２受光ファイバ８２は、一端が第２光路分離部１１２に接続され、他端が第２光量検出部９２に接続される。 The light receiving member 8b is configured using an optical fiber. The light receiving member 8 b includes a first light receiving fiber 81 and a second light receiving fiber 82. The first light receiving fiber 81 has one end connected to the first optical path separation unit 111 and the other end connected to the first light quantity detection unit 91. The second light receiving fiber 82 has one end connected to the second optical path separation unit 112 and the other end connected to the second light quantity detection unit 92.
　光量検出部９ｂは、第１光量検出部９１と、第２光量検出部９２と、を備える。第１光量検出部９１および第２光量検出部９２は、受光部材８ｂから出射された光の受光量を検出し、この検出結果を制御部１０へ出力する。第１光量検出部９１および第２光量検出部９２は、ＰＤ等の受光センサを用いて構成される。 The light quantity detection unit 9b includes a first light quantity detection unit 91 and a second light quantity detection unit 92. The first light quantity detection unit 91 and the second light quantity detection unit 92 detect the amount of received light emitted from the light receiving member 8 b and output the detection result to the control unit 10. The 1st light quantity detection part 91 and the 2nd light quantity detection part 92 are comprised using light receiving sensors, such as PD.
　光路分離部１１は、発光部材３ａから出射された所定波長を有する光を兼用部材３ｂへ透過するとともに、兼用部材３ｂから入射した光を受光部材８ｂへ反射する。光路分離部１１は、第１光路分離部１１１と、第２光路分離部１１２と、を有する。第１光路分離部１１１は、第１照射ファイバ３１ａから入射された光を第１兼用ファイバ３ｂ１へ透過する一方、第１兼用ファイバ３ｂ１から入射された光を第１受光ファイバ８１へ反射する。また、第２光路分離部１１２は、第２照射ファイバ３２ａから入射された光を第２兼用ファイバ３ｂ２へ透過する一方、第２兼用ファイバ２ｂ２から入射した光を第２受光ファイバ８２へ反射する。 The optical path separating unit 11 transmits the light having a predetermined wavelength emitted from the light emitting member 3a to the dual-purpose member 3b and reflects the light incident from the dual-purpose member 3b to the light receiving member 8b. The optical path separation unit 11 includes a first optical path separation unit 111 and a second optical path separation unit 112. The first optical path separation unit 111 transmits the light incident from the first irradiation fiber 31 a to the first combined fiber 3 b 1, and reflects the light incident from the first combined fiber 3 b 1 to the first light receiving fiber 81. The second optical path separation unit 112 transmits the light incident from the second irradiation fiber 32 a to the second duplex fiber 3 b 2, and reflects the light incident from the second duplex fiber 2 b 2 to the second light receiving fiber 82.
　このように構成された屈折率検出装置１ｂは、兼用部材３ｂの出射端３１１ａ，出射端３２１ａの各々から光が出射される。兼用部材３ｂの出射端３１１ａ，出射端３２１ａの各々から出射された光は、第１光学部材４および偏光部材５を介して検出部６ｂの入射面６１ｂに入射する。この入射面６１ｂを透過した光は、平行光のまま金属膜６２で反射した後、コーナーキューブプリズム６５ａに入射する。コーナーキューブプリズム６５ａに入射した光は、三つの反射面での反射により、光が入射した方向に対してほぼ逆方向に反射する。コーナーキューブプリズム６５ａで反射された光は、再度、直角プリズム６４に入射して金属膜６２で反射されて入射面６１ｂから出射される。検出部６ｂから出射された光は、偏光部材５を介して第１光学部材４によって集光されて兼用部材３ｂの出射端３１１ａ，出射端３２１ａの各々に入射する。図３の光路は、簡略に記してあるが、第１光学部材４の焦点面が出射端３１１ａ，３２１ａと重なるので、コーナーキューブプリズム６５ａの反射にて光（光束）が僅かにシフトしても、出射端３１１ａ，３２１ａの各々に集光する。兼用部材３ｂの出射端３１１ａ，出射端３２１ａの各々に入射した光は、光路分離部１１によって受光部材８ｂに反射され、第１光量検出部９１または第２光量検出部９２によって検出される。 The thus configured refractive index detection device 1b emits light from each of the emission end 311a and the emission end 321a of the dual-purpose member 3b. The light emitted from each of the emission end 311a and the emission end 321a of the combined member 3b enters the incident surface 61b of the detection unit 6b via the first optical member 4 and the polarizing member 5. The light transmitted through the incident surface 61b is reflected by the metal film 62 as parallel light and then enters the corner cube prism 65a. The light incident on the corner cube prism 65a is reflected in a direction almost opposite to the direction in which the light is incident by reflection on the three reflecting surfaces. The light reflected by the corner cube prism 65a again enters the right-angle prism 64, is reflected by the metal film 62, and is emitted from the incident surface 61b. The light emitted from the detection unit 6b is collected by the first optical member 4 via the polarizing member 5 and enters each of the emission end 311a and the emission end 321a of the dual-purpose member 3b. Although the optical path in FIG. 3 is shown in a simplified manner, the focal plane of the first optical member 4 overlaps with the emission ends 311a and 321a. Therefore, even if the light (light flux) is slightly shifted by the reflection of the corner cube prism 65a. The light is condensed on each of the emission ends 311a and 321a. The light incident on each of the emission end 311 a and the emission end 321 a of the dual-purpose member 3 b is reflected by the light path separating unit 11 to the light receiving member 8 b and detected by the first light quantity detection unit 91 or the second light quantity detection unit 92.
　次に、光量検出部９ｂが検出する受光量について説明する。図４Ａは、光量検出部９ｂの検出結果を模式的に示す図であり、検出面６２１に被検物ＳＰが接触していない状態の受光量と入射角との関係を示す図である。図４Ｂは、光量検出部９ｂの検出結果を模式的に示す図であり、検出面６２１に被検物ＳＰが接触した状態の受光量と入射角との関係を示す図である。図４Ａおよび図４Ｂにおいて、横軸が入射角を示し、縦軸が受光量を示す。 Next, the amount of received light detected by the light amount detector 9b will be described. FIG. 4A is a diagram schematically illustrating the detection result of the light amount detection unit 9b, and is a diagram illustrating the relationship between the amount of received light and the incident angle when the test object SP is not in contact with the detection surface 621. FIG. 4B is a diagram schematically illustrating the detection result of the light amount detection unit 9b, and is a diagram illustrating the relationship between the received light amount and the incident angle in a state where the test object SP is in contact with the detection surface 621. 4A and 4B, the horizontal axis indicates the incident angle, and the vertical axis indicates the amount of received light.
　以上説明した本発明の実施の形態２によれば、検出部６ｂの検出面６２１に対して、兼用部材３ｂの出射端３１１ａおよび出射端３２１ａの各々から出射された光が２回介することになるので、光学瞳位置付近となる検出面６２１による共鳴による光量低下が２回生じるため、検出面６２１への入射角度毎の受光量比を大きくすることができ、被検物ＳＰの測定精度を向上させることができる。 According to the second embodiment of the present invention described above, the light emitted from each of the emission end 311a and the emission end 321a of the dual-purpose member 3b passes through the detection surface 621 of the detection unit 6b twice. Therefore, since the light amount decrease due to resonance by the detection surface 621 near the optical pupil position occurs twice, the ratio of received light amount for each incident angle to the detection surface 621 can be increased, and the measurement accuracy of the test object SP is improved. Can be made.
　また、本発明の実施の形態２によれば、出射端３１１ａおよび出射端３２１ａ（発光部）が受光部を兼ねるので、光ファイバの数を低減することができる。 Further, according to the second embodiment of the present invention, since the emission end 311a and the emission end 321a (light emitting unit) also serve as a light receiving unit, the number of optical fibers can be reduced.
　なお、本発明の実施の形態２では、コーナーキューブプリズムアレイ６５を直角プリズムの一面にコーナーキューブプリズム６５ａを成形したものや、研削や３次元プリンタ等で加工を施したものでもよい。さらに、シート状に構成されたコーナーキューブプリズムアレイを直角プリズムの一方の平面に貼り付ける構成にしてもよい。 In the second embodiment of the present invention, the corner cube prism array 65 may be formed by forming a corner cube prism 65a on one surface of a right-angle prism, or may be processed by grinding or a three-dimensional printer. Further, a corner cube prism array configured in a sheet shape may be attached to one plane of a right-angle prism.
（実施の形態３）
　次に、本発明の実施の形態３について説明する。本実施の形態３では、照射ファイバに換えて面発光レーザアレイによって所定波長を有する光を照射する。このため、以下においては、本実施の形態３に係る屈折率検出装置の構成について説明する。なお、上述した実施の形態１に係る屈折率検出装置１の構成と同一の構成には同一の符号を付して説明を省略する。 (Embodiment 3)
Next, a third embodiment of the present invention will be described. In the third embodiment, light having a predetermined wavelength is irradiated by a surface emitting laser array instead of the irradiation fiber. For this reason, below, the structure of the refractive index detection apparatus which concerns on this Embodiment 3 is demonstrated. In addition, the same code | symbol is attached | subjected to the structure same as the structure of the refractive index detection apparatus 1 which concerns on Embodiment 1 mentioned above, and description is abbreviate | omitted.
　〔屈折率検出装置の構成〕
　図５は、本発明の実施の形態３に係る屈折率検出装置の概略構成を示す模式図である。ここでも、光学特性として、被検物の屈折率の検出を行う屈折率検出装置を光学特性検出装置として説明する。 [Configuration of refractive index detector]
FIG. 5 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 3 of the present invention. Here, as an optical characteristic, a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
　図５に示す屈折率検出装置１ｃは、上述した実施の形態１に係る屈折率検出装置１の光源部２および発光部材３に換えて、面発光レーザアレイ１２を備える。さらに、屈折率検出装置１ｃは、上述した実施の形態１に係る屈折率検出装置１の構成から偏光部材５を除去している。さらにまた、屈折率検出装置１ｃは、上述した実施の形態１に係る屈折率検出装置１の検出部６および受光部材８の各々に換えて、検出部６ｃおよび受光部材８ｃを備える。 5 includes a surface emitting laser array 12 in place of the light source unit 2 and the light emitting member 3 of the refractive index detecting device 1 according to Embodiment 1 described above. Furthermore, the refractive index detection apparatus 1c removes the polarizing member 5 from the configuration of the refractive index detection apparatus 1 according to Embodiment 1 described above. Furthermore, the refractive index detection device 1c includes a detection unit 6c and a light receiving member 8c instead of the detection unit 6 and the light receiving member 8 of the refractive index detection device 1 according to Embodiment 1 described above.
　面発光レーザアレイ１２は、所定の波長の光を照射する光源１２１～光源１２９が２次元マトリックス状に配列される。面発光レーザアレイ１２は、制御部１０の制御のもと、光源１２１～光源１２９が時分割で光を照射する。なお、面発光レーザアレイ１２は、制御部１０の制御のもと、同時に光を照射してもよい。また、本実施の形態３では、面発光レーザアレイ１２の光源１２１～光源１２９が９個であるが、これに限定されるわけではなく、少なくとも２個あればよい。 In the surface emitting laser array 12, light sources 121 to 129 that emit light of a predetermined wavelength are arranged in a two-dimensional matrix. In the surface emitting laser array 12, the light sources 121 to 129 emit light in a time-sharing manner under the control of the control unit 10. The surface emitting laser array 12 may be irradiated with light simultaneously under the control of the control unit 10. In the third embodiment, the number of light sources 121 to 129 of the surface emitting laser array 12 is nine. However, the present invention is not limited to this, and at least two light sources are sufficient.
　検出部６ｃは、プリズム６１を用いて構成される。検出部６ｃは、面発光レーザアレイ１２が出射する光の光路に対して、所定の角度となるように配置される。所定の角度は、ターゲットとする被検物の屈折率で全反射条件が崩れているような角度を設定する。具体的には、検出部６ｃは、面発光レーザアレイ１２が出射する光の光路と面発光レーザアレイ１２から入射された光が入射または出射する面とが略４５度となるように配置され、かつ、受光部材８ｃの長手方向と検出部６ｃの面とが略４５度となるように配置される。 The detection unit 6 c is configured using a prism 61. The detector 6c is arranged at a predetermined angle with respect to the optical path of the light emitted from the surface emitting laser array 12. The predetermined angle is set such that the total reflection condition is broken by the refractive index of the target test object. Specifically, the detector 6c is arranged so that the optical path of the light emitted from the surface emitting laser array 12 and the surface on which the light incident from the surface emitting laser array 12 enters or exits are approximately 45 degrees, And it arrange | positions so that the longitudinal direction of the light-receiving member 8c and the surface of the detection part 6c may become about 45 degree | times.
　受光部材８ｃは、複数の光ファイバを用いて構成される。受光部材８ｃは、第２光学部材７が集光した光を入射端８４１（受光部）で受光して光量検出部９へ出射する。受光部材８ｃは、面発光レーザアレイ１２を構成する光源の数に応じた光ファイバを用いて構成される。具体的には、受光部材８ｃは、第１受光ファイバ８１～第９受光ファイバ８９を用いて構成される。また、受光部材８ｃの入射端８４１（受光部）および面発光レーザアレイ１２は、光学的に共役な位置関係にある。 The light receiving member 8c is configured using a plurality of optical fibers. The light receiving member 8 c receives the light collected by the second optical member 7 at the incident end 841 (light receiving unit) and emits the light to the light amount detecting unit 9. The light receiving member 8 c is configured by using optical fibers corresponding to the number of light sources constituting the surface emitting laser array 12. Specifically, the light receiving member 8 c is configured using the first light receiving fiber 81 to the ninth light receiving fiber 89. Further, the incident end 841 (light receiving portion) of the light receiving member 8c and the surface emitting laser array 12 are in an optically conjugate positional relationship.
　このように構成された屈折率検出装置１ｃは、制御部１０の制御のもと、面発光レーザアレイ１２から所定波長を有する光を出射する。面発光レーザアレイ１２から出射された光は、第１光学部材４で略平行光に変換され、検出部６ｃの検出面６２１において離散的な複数の入射角によって入射する。検出部６ｃに入射した光は、検出部６ｃの検出面６２１で全反射し、第２光学部材７へ入射して集光される。第２光学部材７によって集光された光は、受光部材８ｃの入射端８４１から入射する。受光部材８ｃの入射端８４１から入射した光の光量は、光量検出部９によって検出される。 The thus configured refractive index detection device 1c emits light having a predetermined wavelength from the surface emitting laser array 12 under the control of the control unit 10. The light emitted from the surface emitting laser array 12 is converted into substantially parallel light by the first optical member 4, and is incident on the detection surface 621 of the detection unit 6c at a plurality of discrete incident angles. The light incident on the detection unit 6c is totally reflected by the detection surface 621 of the detection unit 6c, enters the second optical member 7, and is collected. The light condensed by the second optical member 7 enters from the incident end 841 of the light receiving member 8c. The amount of light incident from the incident end 841 of the light receiving member 8c is detected by the light amount detector 9.
　次に、光量検出部９が検出する受光量について説明する。図６Ａは、光量検出部９の検出結果を模式的に示す図であり、検出部６ｃの検出面６２１に被検物ＳＰが接触していない状態で第１受光ファイバ～第９受光ファイバが受光した受光量と入射角との関係を示す図である。図６Ｂは、光量検出部９の検出結果を模式的に示す図であり、検出部６ｃの検出面６２１に被検物ＳＰが接触した状態で第１受光ファイバ～第９受光ファイバが受光した受光量と入射角との関係を示す図である。図６Ａおよび図６Ｂにおいて、横軸が入射角を示し、縦軸が受光量を示す。なお、以下においては、図５の符号に関係なく、検出面６２１での入射角が小さい方から順に、第１受光ファイバ、第２受光ファイバ、、、および第９受光ファイバとしている。 Next, the amount of received light detected by the light amount detector 9 will be described. FIG. 6A is a diagram schematically showing a detection result of the light quantity detection unit 9, and the first light receiving fiber to the ninth light receiving fiber receive light when the test object SP is not in contact with the detection surface 621 of the detection unit 6c. It is a figure which shows the relationship between the received light quantity and incident angle. FIG. 6B is a diagram schematically showing the detection result of the light quantity detection unit 9. The light reception received by the first light receiving fiber to the ninth light receiving fiber with the test object SP in contact with the detection surface 621 of the detection unit 6c. It is a figure which shows the relationship between quantity and an incident angle. 6A and 6B, the horizontal axis represents the incident angle, and the vertical axis represents the amount of received light. In the following description, the first light receiving fiber, the second light receiving fiber, and the ninth light receiving fiber are used in order from the smaller incident angle on the detection surface 621 regardless of the reference numeral in FIG.
　図６Ａおよび図６Ｂに示すように、屈折率検出装置１ｃは、検出部６ｃの検出面６２１に被検物ＳＰが接触している場合、面発光レーザアレイ１２における光源１２１～光源１２９の各々が出射した光のうち特定の入射角の光が全反射する。例えば、図６Ｂに示すように、第１受光ファイバ、第２受光ファイバおよび第３受光ファイバの各々で受光された受光量が第４受光ファイバ～第９受光ファイバの各々で受光された受光量より低下する。これにより、第３受光ファイバの角度が全反射条件に近い角度と推定でき、検出部６ｃの検出面６２１において接触した被検物ＳＰの屈折率を導出することができる。 As shown in FIGS. 6A and 6B, in the refractive index detection apparatus 1c, when the test object SP is in contact with the detection surface 621 of the detection unit 6c, each of the light sources 121 to 129 in the surface emitting laser array 12 is detected. Of the emitted light, light having a specific incident angle is totally reflected. For example, as shown in FIG. 6B, the amount of light received by each of the first light receiving fiber, the second light receiving fiber, and the third light receiving fiber is greater than the amount of light received by each of the fourth light receiving fiber to the ninth light receiving fiber. descend. Thereby, it can be estimated that the angle of the third light receiving fiber is an angle close to the total reflection condition, and the refractive index of the test object SP in contact with the detection surface 621 of the detection unit 6c can be derived.
　以上説明した本発明の実施の形態３によれば、ある入射角以上は全反射するため、検出光量がサチレーションし、全反射条件を適用することで、検出部６ｃの検出面６２１に金属膜を設けなくても、被検物ＳＰの入射角依存特性を検出することができる。 According to the third embodiment of the present invention described above, since the total reflection is performed at a certain incident angle or more, the detected light amount is saturated, and the total reflection condition is applied, so that the metal film is applied to the detection surface 621 of the detection unit 6c. Even if it is not provided, it is possible to detect the incident angle dependency of the test object SP.
　さらに、本発明の実施の形態３によれば、面発光レーザアレイ１２の発光点が小さいため、平行光を作りやすいので、検出精度を高めることができる。 Furthermore, according to the third embodiment of the present invention, since the light emitting point of the surface emitting laser array 12 is small, it is easy to produce parallel light, so that the detection accuracy can be increased.
（実施の形態３の変形例）
　次に、本発明の実施の形態３の変形例について説明する。上述した実施の形態３では、面発光レーザアレイ１２によって所定波長を有する光を照射していたが、本実施の形態３の変形例１では、複数の照射ファイバの各々によって所定波長を有する光を照射する。このため、以下においては、本実施の形態３の変形例１に係る屈折率検出装置について説明する。なお、上述した実施の形態３に係る屈折率検出装置１ｃと同一の構成には同一の符号を付して説明を省略する。 (Modification of Embodiment 3)
Next, a modification of the third embodiment of the present invention will be described. In Embodiment 3 described above, light having a predetermined wavelength is irradiated by the surface emitting laser array 12, but in Modification 1 of Embodiment 3, light having a predetermined wavelength is emitted from each of a plurality of irradiation fibers. Irradiate. For this reason, in the following, a refractive index detection apparatus according to Modification 1 of Embodiment 3 will be described. In addition, the same code | symbol is attached | subjected to the structure same as the refractive index detection apparatus 1c which concerns on Embodiment 3 mentioned above, and description is abbreviate | omitted.
　〔屈折率検出装置の構成〕
　図７は、本発明の実施の形態３の変形例に係る屈折率検出装置の概略構成を示す模式図である。ここでも、光学特性として、被検物の屈折率の検出を行う屈折率検出装置を光学特性検出装置として説明する。 [Configuration of refractive index detector]
FIG. 7 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to a modification of the third embodiment of the present invention. Here, as an optical characteristic, a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
　図７に示す屈折率検出装置１ｄは、上述した面発光レーザアレイ１２に換えて、光源部２と複数の第１照射ファイバ３１～第５照射ファイバ３５で構成された発光部材３ｄを備える。さらに、屈折率検出装置１ｄは、上述した第１受光ファイバ８１～第９受光ファイバ８９から第６受光ファイバ８６～第９受光ファイバ８９を除去した受光部材８ｄをさらに備える。 7 includes a light emitting member 3d including a light source unit 2 and a plurality of first irradiation fibers 31 to fifth irradiation fibers 35, instead of the surface emitting laser array 12 described above. Further, the refractive index detection device 1d further includes a light receiving member 8d obtained by removing the sixth light receiving fiber 86 to the ninth light receiving fiber 89 from the first light receiving fiber 81 to the ninth light receiving fiber 89 described above.
　このように構成された屈折率検出装置１ｄは、制御部１０の制御のもと、第１照射ファイバ３１～第５照射ファイバ３５の各々の出射端３１１から所定波長を有する光を出射する。第１照射ファイバ３１～第５照射ファイバ３５の各々から出射された光は、第１光学部材４で略平行光に変換され、検出部６ｃの検出面６２１において複数の入射角によって離散的に入射する。検出部６ｃに入射した光は、検出面６２１で反射し、第２光学部材７へ入射して集光される。第２光学部材７によって集光された光は、受光部材８ｄの第１受光ファイバ８１～第５受光ファイバ８５の各々の入射端８１１に入射する。受光部材８ｄの第１受光ファイバ８１～第５受光ファイバ８５の各々の入射端８１１の各々に入射した光の光量は、光量検出部９によって検出される。 The refractive index detection device 1d configured in this manner emits light having a predetermined wavelength from each of the emission ends 311 of the first irradiation fiber 31 to the fifth irradiation fiber 35 under the control of the control unit 10. The light emitted from each of the first irradiation fiber 31 to the fifth irradiation fiber 35 is converted into substantially parallel light by the first optical member 4 and discretely incident on the detection surface 621 of the detection unit 6c at a plurality of incident angles. To do. The light that has entered the detection unit 6 c is reflected by the detection surface 621, enters the second optical member 7, and is collected. The light condensed by the second optical member 7 is incident on the incident end 811 of each of the first light receiving fiber 81 to the fifth light receiving fiber 85 of the light receiving member 8d. The amount of light incident on each of the incident ends 811 of each of the first light receiving fiber 81 to the fifth light receiving fiber 85 of the light receiving member 8d is detected by the light amount detecting unit 9.
　以上説明した本発明の実施の形態３の変形例によれば、装置の構成を簡略化することができる。 According to the modification of the third embodiment of the present invention described above, the configuration of the apparatus can be simplified.
（実施の形態４）
　次に、本発明の実施の形態４について説明する。本実施の形態４は、上述した実施の形態３の変形例に係る受光部材の構成が異なる。具体的には、上述した実施の形態３の変形例では、照射ファイバの数と同じ数の受光ファイバを受光部材として設けていたが、本実施の形態４では、一つの受光ファイバによって複数の照射ファイバの各々から出射された光を受光する。このため、以下においては、本実施の形態４に係る屈折率検出装置の構成について説明する。なお、上述した実施の形態３の変形例に係る屈折率検出装置１ｄと同一の構成には同一の符号を付して説明を省略する。 (Embodiment 4)
Next, a fourth embodiment of the present invention will be described. The fourth embodiment is different in the configuration of the light receiving member according to the modification of the third embodiment described above. Specifically, in the modification of the third embodiment described above, the same number of light receiving fibers as the number of irradiation fibers are provided as light receiving members, but in the fourth embodiment, a plurality of irradiations are performed by one light receiving fiber. Light emitted from each of the fibers is received. For this reason, below, the structure of the refractive index detection apparatus which concerns on this Embodiment 4 is demonstrated. In addition, the same code | symbol is attached | subjected to the structure same as the refractive index detection apparatus 1d which concerns on the modification of Embodiment 3 mentioned above, and description is abbreviate | omitted.
　〔屈折率検出装置の構成〕
　図８は、本発明の実施の形態４に係る屈折率検出装置の概略構成を示す模式図である。ここでも、光学特性として、被検物の屈折率の検出を行う屈折率検出装置を光学特性検出装置として説明する。 [Configuration of refractive index detector]
FIG. 8 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 4 of the present invention. Here, as an optical characteristic, a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
　図８に示す屈折率検出装置１ｅは、上述した実施の形態３の変形例の受光部材８ｄと換えて受光部材８ｅを備える。さらに、第２光学部材７に換えて第２光学部材７ｅを備える。 8 is provided with a light receiving member 8e instead of the light receiving member 8d of the modified example of the third embodiment described above. Further, a second optical member 7e is provided instead of the second optical member 7.
　第２光学部材７ｅは、検出部６から出射された光を受光部材８ｅの入射端８１１ｅに集光する。第２光学部材７ｅは、２つの集光レンズ７１および集光レンズ７２を用いて構成される。 The second optical member 7e condenses the light emitted from the detection unit 6 on the incident end 811e of the light receiving member 8e. The second optical member 7e is configured using two condenser lenses 71 and a condenser lens 72.
　受光部材８ｅは、第１照射ファイバ３１～第５照射ファイバ３５の開口数（ＮＡ）より大きい開口数を有するマルチモード光ファイバを用いて構成される。受光部材８ｅは、第２光学部材７ｅによって集光された光を入射端８１１ｅで受光し、この受光した光を伝播して光量検出部９へ出射する。このため、本実施の形態４では、受光部材８ｅの入射端８１１ｅが受光部として機能する。また、受光部材８ｅの入射端８１１ｅと検出部６の検出面６２１は、光学的に共役関係な位置関係にある。 The light receiving member 8e is configured by using a multimode optical fiber having a numerical aperture larger than the numerical aperture (NA) of the first irradiation fiber 31 to the fifth irradiation fiber 35. The light receiving member 8 e receives the light collected by the second optical member 7 e at the incident end 811 e, propagates the received light, and emits it to the light amount detection unit 9. For this reason, in this Embodiment 4, the incident end 811e of the light-receiving member 8e functions as a light-receiving part. Further, the incident end 811e of the light receiving member 8e and the detection surface 621 of the detection unit 6 are in an optically conjugate positional relationship.
　このように構成された屈折率検出装置１ｅは、制御部１０の制御のもと、第１照射ファイバ３１～第５照射ファイバ３５の各々の出射端３１１から所定波長を有する光を順次出射する。第１照射ファイバ３１～第５照射ファイバ３５の各々から順次出射された光は、第１光学部材４および偏光部材５を介して検出部６へ入射する。検出部６に入射した光は、検出面６２１で反射し、第２光学部材７ｅを介して受光部材８ｅの入射端８１１ｅに入射する。受光部材８ｅの入射端８１１ｅから入射した光の光量は、光量検出部９によって検出される。 The thus configured refractive index detection device 1e sequentially emits light having a predetermined wavelength from the emission ends 311 of the first irradiation fiber 31 to the fifth irradiation fiber 35 under the control of the control unit 10. The light sequentially emitted from each of the first irradiation fiber 31 to the fifth irradiation fiber 35 enters the detection unit 6 via the first optical member 4 and the polarizing member 5. The light incident on the detection unit 6 is reflected by the detection surface 621 and enters the incident end 811e of the light receiving member 8e via the second optical member 7e. The amount of light incident from the incident end 811e of the light receiving member 8e is detected by the light amount detector 9.
　次に、光量検出部９が検出する受光量について説明する。図９Ａは、光量検出部９の検出結果を模式的に示す図であり、検出面６２１に被検物ＳＰが接触していない状態で受光部材８ｅが受光した受光量と入射角との関係を示す図である。図９Ｂは、光量検出部９の検出結果を模式的に示す図であり、検出面６２１に被検物ＳＰが接触している状態で受光部材８ｅが受光した受光量と入射角との関係を示す図である。図９Ａおよび図９Ｂにおいて、横軸が入射角（照射ファイバ）を示し、縦軸が受光量を示す。 Next, the amount of received light detected by the light amount detector 9 will be described. FIG. 9A is a diagram schematically showing the detection result of the light quantity detection unit 9, and shows the relationship between the received light amount received by the light receiving member 8 e and the incident angle in a state where the test object SP is not in contact with the detection surface 621. FIG. FIG. 9B is a diagram schematically showing the detection result of the light amount detection unit 9, and shows the relationship between the received light amount received by the light receiving member 8 e and the incident angle in a state where the test object SP is in contact with the detection surface 621. FIG. 9A and 9B, the horizontal axis indicates the incident angle (irradiation fiber), and the vertical axis indicates the amount of received light.
　図９Ａおよび図９Ｂに示すように、屈折率検出装置１ｅは、検出部６の検出面６２１に被検物ＳＰが接触している場合、第１照射ファイバ３１～第５照射ファイバ３５の各々から出射した光のうち、特定の入射角（特定波長）の光が共鳴する。例えば、図９Ｂに示すように、第４照射ファイバ３４から出射された光の受光量が第１照射ファイバ３１～第３照射ファイバ３３および第５照射ファイバ３５から出射された光の受光量より低下する。これにより、共鳴条件から検出部６の検出面６２１において接触した被検物ＳＰの屈折率を導出することができる。 As shown in FIG. 9A and FIG. 9B, the refractive index detection device 1e is configured so that the specimen SP is in contact with the detection surface 621 of the detection unit 6 from each of the first irradiation fiber 31 to the fifth irradiation fiber 35. Of the emitted light, light having a specific incident angle (specific wavelength) resonates. For example, as shown in FIG. 9B, the received light amount of the light emitted from the fourth irradiation fiber 34 is lower than the received light amount of the light emitted from the first irradiation fiber 31 to the third irradiation fiber 33 and the fifth irradiation fiber 35. To do. As a result, the refractive index of the specimen SP in contact with the detection surface 621 of the detection unit 6 can be derived from the resonance condition.
　以上説明した本発明の実施の形態４によれば、第１照射ファイバ３１～第５照射ファイバ３５の各々から出射された光を一つの受光部材８ｅによって受光することによって、被検物ＳＰの屈折率を検出するので、上述した実施の形態１～３に比してより簡易な構成とすることができる。 According to the fourth embodiment of the present invention described above, the light emitted from each of the first irradiation fiber 31 to the fifth irradiation fiber 35 is received by one light receiving member 8e, so that the refraction of the test object SP is performed. Since the rate is detected, a simpler configuration can be obtained as compared with the first to third embodiments.
（実施の形態５）
　次に、本発明の実施の形態５について説明する。上述した実施の形態１では、発光部材の長手方向と受光部材の長手方向とがなす角度が略直角となるように配置されていたが、本実施の形態５では、発光部材の長手方向と受光部材の長手方向とが略平行に配置される。このため、以下においては、本実施の形態５に係る屈折率検出装置の構成を説明する。なお、上述した実施の形態１に係る屈折率検出装置１と同一の構成には同一の符号を付して説明を省略する。 (Embodiment 5)
Next, a fifth embodiment of the present invention will be described. In Embodiment 1 described above, the angle formed by the longitudinal direction of the light emitting member and the longitudinal direction of the light receiving member is arranged to be substantially perpendicular, but in Embodiment 5, the longitudinal direction of the light emitting member and the light receiving member are arranged. The longitudinal direction of the member is arranged substantially in parallel. For this reason, below, the structure of the refractive index detection apparatus which concerns on this Embodiment 5 is demonstrated. In addition, the same code | symbol is attached | subjected to the structure same as the refractive index detection apparatus 1 which concerns on Embodiment 1 mentioned above, and description is abbreviate | omitted.
　〔屈折率検出装置の構成〕
　図１０は、本発明の実施の形態５に係る屈折率検出装置の概略構成を示す模式図である。ここでも、光学特性として、被検物の屈折率の検出を行う屈折率検出装置を光学特性検出装置として説明する。 [Configuration of refractive index detector]
FIG. 10 is a schematic diagram showing a schematic configuration of a refractive index detection apparatus according to Embodiment 5 of the present invention. Here, as an optical characteristic, a refractive index detection device that detects a refractive index of a test object will be described as an optical characteristic detection device.
　図１０に示す屈折率検出装置１ｆは、光源部２と、測定プローブ２０と、光量検出部９と、制御部１０と、を備える。 10 includes a light source unit 2, a measurement probe 20, a light amount detection unit 9, and a control unit 10. The refractive index detection device 1f shown in FIG.
　測定プローブ２０は、発光部材３ｆと、偏光部材５と、第１光学部材４ｆと、検出部６ｆと、第２光学部材７ｅと、受光部材８ｆと、を有する。 The measurement probe 20 includes a light emitting member 3f, a polarizing member 5, a first optical member 4f, a detection unit 6f, a second optical member 7e, and a light receiving member 8f.
　発光部材３ｆは、ファイババンドル等を用いて構成される。発光部材３ｆは、光源部２から出射された所定の波長帯域を有する光を伝播する。 The light emitting member 3f is configured using a fiber bundle or the like. The light emitting member 3 f propagates light having a predetermined wavelength band emitted from the light source unit 2.
　第１光学部材４ｆは、偏光部材５を透過した光を略平行光に変換し、この略平行光を検出部６ｆの検出面６２１ｆにおいて離散的な複数の入射角によって入射させる。第１光学部材４ｆは、コリメートレンズを用いて構成される。 The first optical member 4f converts the light transmitted through the polarizing member 5 into substantially parallel light, and causes the substantially parallel light to enter the detection surface 621f of the detection unit 6f with a plurality of discrete incident angles. The first optical member 4f is configured using a collimating lens.
　検出部６ｆは、断面が略台形をなすプリズムを用いて構成される。検出部６ｆは、被検物と接触する検出面６２１ｆを有する。また、検出面６２１ｆは、発光部材３ｆを構成する複数の第１照射ファイバ３１～第７照射ファイバ３７の出射端３１１を物体面として、第１光学部材４ｆによって形成される光学的な略瞳位置に配置される。また、検出面６２１ｆには、金属膜６２２ｆが設けられている。検出部６ｆは、第１光学部材４ｆから出射された光を第２光学部材７ｅに向けて反射する。 The detection unit 6f is configured using a prism having a substantially trapezoidal cross section. The detection unit 6f has a detection surface 621f that comes into contact with the test object. The detection surface 621f is an optical substantially pupil position formed by the first optical member 4f with the emission ends 311 of the plurality of first irradiation fibers 31 to seventh irradiation fibers 37 constituting the light emitting member 3f as object surfaces. Placed in. A metal film 622f is provided on the detection surface 621f. The detection unit 6f reflects the light emitted from the first optical member 4f toward the second optical member 7e.
　第２光学部材７ｅは、２つの集光レンズ７１および集光レンズ７２を用いて構成される。第２光学部材７ｅは、検出部６ｆから出射された光を集光して受光部材８ｆの入射端８１１（受光部）に向けて出射する。 The second optical member 7e is configured by using two condenser lenses 71 and a condenser lens 72. The second optical member 7e condenses the light emitted from the detection unit 6f and emits it toward the incident end 811 (light receiving unit) of the light receiving member 8f.
　受光部材８ｆは、第１照射ファイバ３１～第７照射ファイバ３７の各々の開口数より大きいマルチモード光ファイバを用いて構成される。受光部材８ｆは、第２光学部材７ｅによって集光された光を入射端（受光部）で受光し、この受光した光を伝播して光量検出部９へ出射する。また、受光部材８ｆの入射端と検出部６ｆの検出面６２１ｆは、光学的に共役関係な位置に配置される。また、受光部材８ｆおよび発光部材３ｆを構成する光ファイバ同士は、長手方向の軸が略平行である。 The light receiving member 8f is configured by using a multimode optical fiber having a larger numerical aperture than each of the first irradiation fiber 31 to the seventh irradiation fiber 37. The light receiving member 8 f receives light collected by the second optical member 7 e at the incident end (light receiving unit), propagates the received light, and emits the light to the light amount detecting unit 9. In addition, the incident end of the light receiving member 8f and the detection surface 621f of the detection unit 6f are arranged at optically conjugate positions. Further, the optical fibers constituting the light receiving member 8f and the light emitting member 3f are substantially parallel in the longitudinal axis.
　このように構成された屈折率検出装置１ｆは、制御部１０の制御のもと、第１照射ファイバ３１～第７照射ファイバ３７の各々の出射端３１１から所定の波長帯域を有する光を出射する。第１照射ファイバ３１～第７照射ファイバ３７の各々から出射された光は、偏光部材５および第１光学部材４ｆを介して検出部６ｆに入射する。検出部６ｆに入射した光は、検出面６２１ｆで反射し、第２光学部材７ｅを介して受光部材８ｆの入射端８１１に入射する。第２光学部材７ｅを介して受光部材８ｆの入射端８１１に入射した光の光量は、光量検出部９によって検出される。 The refractive index detection device 1 f configured as described above emits light having a predetermined wavelength band from the respective emission ends 311 of the first irradiation fiber 31 to the seventh irradiation fiber 37 under the control of the control unit 10. . The light emitted from each of the first irradiation fiber 31 to the seventh irradiation fiber 37 enters the detection unit 6f via the polarizing member 5 and the first optical member 4f. The light incident on the detection unit 6f is reflected by the detection surface 621f, and enters the incident end 811 of the light receiving member 8f via the second optical member 7e. The light amount of light incident on the incident end 811 of the light receiving member 8f via the second optical member 7e is detected by the light amount detector 9.
　次に、光量検出部９が検出する受光量について説明する。図１１Ａは、光量検出部９の検出結果を模式的に示す図であり、検出部６ｆの検出面６２１ｆに被検物ＳＰが接触していない状態で受光した受光量と入射角との関係を示す図である。図１１Ｂは、光量検出部９の検出結果を模式的に示す図であり、検出部６ｆの検出面６２１ｆに被検物ＳＰが接触している状態で受光した受光量と入射角との関係を示す図である。図１１Ａおよび図１１Ｂにおいて、横軸が入射角を示し、縦軸が受光量を示す。また、図１１Ａにおいて、曲線Ｌ１１が予め屈折率が既知な物質（屈折率標準液）を検出部６Ｆの検出面６２１Ｆに接触させた状態で受光した受光量と入射角との変化を示す。さらに、図１１Ｂにおいて、曲線Ｌ１２が曲線Ｌ１１と異なる予め屈折率が既知な物質を検出部６ｆの検出面６２１ｆに接触した状態で受光した受光量と入射角との変化を示す。 Next, the amount of received light detected by the light amount detector 9 will be described. FIG. 11A is a diagram schematically showing the detection result of the light quantity detection unit 9, and shows the relationship between the amount of received light and the incident angle when the test object SP is not in contact with the detection surface 621f of the detection unit 6f. FIG. FIG. 11B is a diagram schematically showing the detection result of the light quantity detection unit 9, and shows the relationship between the amount of received light and the incident angle in a state where the test object SP is in contact with the detection surface 621f of the detection unit 6f. FIG. 11A and 11B, the horizontal axis indicates the incident angle, and the vertical axis indicates the amount of received light. In FIG. 11A, a curve L11 indicates a change in received light amount and incident angle in a state where a substance (refractive index standard solution) whose refractive index is known in advance is in contact with the detection surface 621F of the detection unit 6F. Further, in FIG. 11B, the curve L12 is different from the curve L11 and shows a change in the amount of received light and the incident angle received in a state where a substance having a known refractive index is in contact with the detection surface 621f of the detection unit 6f.
　図１１Ａおよび図１１Ｂに示すように、屈折率検出装置１ｆは、検出部６ｆの検出面６２１ｆに被検物ＳＰが接触している場合、第１照射ファイバ３１～第７照射ファイバ３７の各々から出射した光のうち、特定の入射角（特定波長）の光が共鳴する。これにより、共鳴条件から検出部６ｆの検出面６２１ｆにおいて接触した被検物ＳＰの屈折率を導出することができる。 As shown in FIG. 11A and FIG. 11B, the refractive index detection device 1f is configured so that each of the first irradiation fiber 31 to the seventh irradiation fiber 37 is in contact with the test object SP when the detection surface SP 621f of the detection unit 6f is in contact. Of the emitted light, light having a specific incident angle (specific wavelength) resonates. As a result, the refractive index of the test object SP in contact with the detection surface 621f of the detection unit 6f can be derived from the resonance condition.
　以上説明した本発明の実施の形態５によれば、測定プローブ２０内において発光部材３ｆの長手方向における軸と受光部材８ｆの長手方向における軸とが略平行に配置するので、測定プローブ２０を細径化することができる。 According to the fifth embodiment of the present invention described above, since the axis in the longitudinal direction of the light emitting member 3f and the axis in the longitudinal direction of the light receiving member 8f are arranged substantially in parallel in the measuring probe 20, the measuring probe 20 is thin. The diameter can be increased.
（実施の形態５の具体例）
　次に、本発明の実施の形態５の具体例について説明する。上述した実施の形態５では、発光部材３ｆが第１照射ファイバ３１～第７照射ファイバ３７を有している。 (Specific example of Embodiment 5)
Next, a specific example of the fifth embodiment of the present invention will be described. In the fifth embodiment described above, the light emitting member 3f includes the first irradiation fiber 31 to the seventh irradiation fiber 37.
　第１照明ファイバの出射端３１１（端面）から発した発散光束は、第１光学部材４ｆにて略平行光束となり、検出部６ｆの台形プリズムの脚部分にて反射して、検出面６２１ｆへ導かれる。 The divergent light beam emitted from the emission end 311 (end surface) of the first illumination fiber becomes a substantially parallel light beam by the first optical member 4f, is reflected by the leg portion of the trapezoidal prism of the detection unit 6f, and is guided to the detection surface 621f. It is burned.
　第２照射ファイバ３２～第７照射ファイバ３７から発した光束も、第１照射ファイバ３１から発した光束と同様の光路をたどり、略平行光となって、検出面６２１ｆへ導かれる。 The light beam emitted from the second irradiation fiber 32 to the seventh irradiation fiber 37 also follows the same optical path as the light beam emitted from the first irradiation fiber 31 and becomes substantially parallel light and is guided to the detection surface 621f.
　検出面６２１ｆへの略平行光束の入射角は、第１照射ファイバ３１による光束では６８度、第２照射ファイバ３２による光束では６９度、以降、７０度、７１度、７２度、７３度、７４度となるようにレイアウトされている。 The incident angle of the substantially parallel light beam on the detection surface 621f is 68 degrees for the light beam by the first irradiation fiber 31, 69 degrees for the light beam by the second irradiation fiber 32, and thereafter 70 degrees, 71 degrees, 72 degrees, 73 degrees, 74. It is laid out to be a degree.
　使用波長は通信帯域の１５５０ｎｍを用いている。金属膜６２２ｆとして金を用い、金の薄膜の厚さを３２ｎｍ付近としている。 The wavelength used is 1550 nm of the communication band. Gold is used as the metal film 622f, and the thickness of the gold thin film is set to around 32 nm.
　本実施の形態５の具体例に係る光量検出部９が検出する検出結果について説明する。図１２は、本発明の実施の形態５の具体例に係る光量検出部９の検出結果を模式的に示す図であり、検出部６ｆの検出面６２１ｆに被検物ＳＰが接触している状態の受光量と入射角との関係を示す図である。図１２において、横軸が入射角を示し、縦軸が受光量を示す。また、図１２において、曲線Ｌｓｐが被検物ＳＰ（生体等の細胞）の共鳴曲線（図中記載の披検物の屈折率により異なる）を示し、直線Ｌ１～Ｌ７の各々が第１照射ファイバ～第７照射ファイバに対応する光束の検出面への入射角を現す。こられの直線Ｌ１～Ｌ７と、屈折率により変わる共鳴曲線との交点が角入射角ごとの受光量に対応する。 The detection result detected by the light amount detection unit 9 according to the specific example of the fifth embodiment will be described. FIG. 12 is a diagram schematically showing the detection result of the light quantity detection unit 9 according to the specific example of Embodiment 5 of the present invention, in which the test object SP is in contact with the detection surface 621f of the detection unit 6f. It is a figure which shows the relationship between the light-receiving amount of and the incident angle. In FIG. 12, the horizontal axis indicates the incident angle, and the vertical axis indicates the amount of received light. In FIG. 12, the curve Lsp shows the resonance curve of the specimen SP (cells of a living body, etc.) (depending on the refractive index of the specimen shown in the figure), and each of the straight lines L1 to L7 is the first irradiation fiber. Shows the incident angle of the light beam corresponding to the seventh irradiation fiber on the detection surface. The intersections of these straight lines L1 to L7 and the resonance curve that changes depending on the refractive index correspond to the amount of received light at each angle incident angle.
　生体（細胞）の屈折率は１．３３～１．３８程度なので、概ねこの範囲が測定できればよい。図１２においては、被検物ＳＰの屈折率を１.３４１として説明する。 Since the refractive index of living organisms (cells) is about 1.33 to 1.38, it is only necessary to measure this range. In FIG. 12, description will be made assuming that the refractive index of the test object SP is 1.341.
　図１２に示すように、被検物ＳＰの屈折率が１.３４１の場合、曲線Ｌｓｐに示す共鳴曲線（太線による曲線）となるため、光量検出部９によって検出される第１照射ファイバ～第７照射ファイバの各々から出射された光の光量は、直線Ｌ１～Ｌ７それぞれと、共鳴曲線（太線）との交点の信号パターンとなる。このため、第１光学部材４によって検出部６ｆの検出面６２１ｆに入射される離散的な複数の入射角は、その最大角と最小角との間に、被検物ＳＰの屈折率、検出部６の屈折率、金属膜６２の材質、膜厚および発光部材３が出射する波長から定まるプラズモン共鳴条件を満たす角度を含む。 As shown in FIG. 12, when the refractive index of the test object SP is 1.341, the resonance curve (curved line) shown by the curve Lsp is obtained, so that the first irradiation fiber to the first irradiation fiber detected by the light amount detection unit 9. The amount of light emitted from each of the seven irradiation fibers becomes a signal pattern at the intersection of each of the straight lines L1 to L7 and the resonance curve (thick line). Therefore, the plurality of discrete incident angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 are between the maximum angle and the minimum angle, and the refractive index of the test object SP and the detection unit. 6 includes an angle satisfying a plasmon resonance condition determined from a refractive index of 6, a material of the metal film 62, a film thickness, and a wavelength emitted from the light emitting member 3.
　ここで、複数の入射角は、その最大角と最小角との間に、６９度と７３度を含み、好ましくは６８度と７４度を含む。また、複数の入射角のうち最小角は、６５度以上７９度以下が望ましい。さらにまた、第１光学部材４によって検出部６ｆの検出面６２１ｆに入射される離散的な複数の入射角における入射角のピッチが、少なくとも６９度と７３度の入射角の間にて、０.２度～２度の間であることが好ましい。 Here, the plurality of incident angles include 69 degrees and 73 degrees, preferably 68 degrees and 74 degrees, between the maximum angle and the minimum angle. The minimum angle among the plurality of incident angles is preferably 65 degrees or more and 79 degrees or less. Furthermore, the incident angle pitch at a plurality of discrete incident angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 is at least between the incident angles of 69 degrees and 73 degrees. It is preferably between 2 and 2 degrees.
　以上説明した本発明の実施の形態５の具体例によれば、第１光学部材４によって検出部６ａの検出面６２１に入射される離散的な複数の入力角において、その最大角と最小角との間に、６９度と７３度を含めた場合、生体等の被検物ＳＰの光学特性の検出を考慮した際の表面プラズモン共鳴により測定に適する入射角度領域を特定することができる。 According to the specific example of the fifth embodiment of the present invention described above, the maximum angle and the minimum angle among the plurality of discrete input angles incident on the detection surface 621 of the detection unit 6a by the first optical member 4. In the case where 69 degrees and 73 degrees are included in between, an incident angle region suitable for measurement can be specified by surface plasmon resonance in consideration of detection of optical characteristics of the specimen SP such as a living body.
　また、本発明の実施の形態５の具体例によれば、第１光学部材４によって検出部６ｆの検出面６２１ｆに入射される離散的な複数の入力角において、その最大角と最小角との間に、６８度と７４度を含めた場合、生体等の被検物ＳＰの光学特性により適する入射角度領域を特定することができる。 Further, according to the specific example of the fifth embodiment of the present invention, the maximum angle and the minimum angle among the plurality of discrete input angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 When 68 degrees and 74 degrees are included in between, it is possible to specify a suitable incident angle region depending on the optical characteristics of the test object SP such as a living body.
　また、本発明の実施の形態５の具体例によれば、第１光学部材４によって検出部６ｆの検出面６２１ｆに入射される離散的な複数の入力角のうち、最小角を６５度以上７５度以下とした場合、生体等の被検物ＳＰの屈折率に基づく測定を行うときに、不要となる入射角の光を使用しないことで、装置の小型化を図ることができる。 Further, according to the specific example of the fifth embodiment of the present invention, the minimum angle among the plurality of discrete input angles incident on the detection surface 621f of the detection unit 6f by the first optical member 4 is 65 degrees or more and 75. When the angle is less than or equal to the degree, when performing measurement based on the refractive index of the specimen SP such as a living body, it is possible to reduce the size of the apparatus by not using unnecessary incident light.
　また、本発明の実施の形態５の具体例によれば、第１光学部材４によって検出部６ｆの検出面６２１ｆに入射される離散的な複数の入力角ピッチが、少なくとも６９度と７３度の入射角の間にて、０.２度～２度の間であることで、測定精度の維持と発光部数過剰による光学系の大型化をおさえつつ、測定精度を維持することができる。 Further, according to the specific example of Embodiment 5 of the present invention, the plurality of discrete input angle pitches incident on the detection surface 621f of the detection unit 6f by the first optical member 4 are at least 69 degrees and 73 degrees. When the angle is between 0.2 ° and 2 ° between the incident angles, the measurement accuracy can be maintained while maintaining the measurement accuracy and increasing the size of the optical system due to the excessive number of light emitting sections.
　本発明は、上述した実施の形態および変形例そのままに限定されるものではなく、実施段階では、発明の要旨を逸脱しない範囲内で構成要素を変形して具体化することができる。また、上述した実施の形態に開示されている複数の構成要素を適宜組み合わせることによって、種々の発明を形成することができる。例えば、上述した実施の形態および変形例に記載した全構成要素からいくつかの構成要素を削除してもよい。さらに、各実施の形態および変形例で説明した構成要素を適宜組み合わせてもよい。 The present invention is not limited to the above-described embodiments and modifications as they are, and in the implementation stage, the constituent elements can be modified and embodied without departing from the spirit of the invention. Various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiments. For example, some constituent elements may be deleted from all the constituent elements described in the above-described embodiments and modifications. Furthermore, you may combine suitably the component demonstrated by each embodiment and the modification.
　また、明細書または図面において、少なくとも一度、より広義または同義な異なる用語とともに記載された用語は、明細書または図面のいかなる箇所においても、その異なる用語に置き換えることができる。このように、発明の主旨を逸脱しない範囲内において種々の変形や応用が可能である。 Further, a term described together with a different term having a broader meaning or the same meaning at least once in the specification or the drawings can be replaced with the different term in any part of the specification or the drawings. Thus, various modifications and applications are possible without departing from the spirit of the invention.
　１，１ａ，１ｂ，１ｃ，１ｄ，１ｅ，１ｆ　屈折率検出装置
　２　光源部
　３，３ａ，３ｄ，３ｆ　発光部材
　３ｂ　兼用部材
　３ｂ１　第１兼用ファイバ
　３ｂ２　第２兼用ファイバ
　４，４ｆ　第１光学部材
　５　偏光部材
　６，６ａ，６ｃ，６ｆ　検出部
　７，７ｅ　第２光学部材
　８，８ａ，８ｃ，８ｄ，８ｅ，８ｆ　受光部材
　９　光量検出部
　１０　制御部
　１１　光路分離部
　１２　面発光レーザアレイ
　２０　測定プローブ
　３１　第１照射ファイバ
　３２　第２照射ファイバ
　３３　第３照射ファイバ
　３４　第４照射ファイバ
　３５　第５照射ファイバ
　３６　第６照射ファイバ
　３７　第７照射ファイバ
　６１　プリズム
　６２　金属膜
　６４　直角プリズム
　６５　コーナーキューブプリズムアレイ
　６５ａ　コーナーキューブプリズム
　７１，７２　集光レンズ
　８１　第１受光ファイバ
　８２　第２受光ファイバ
　８３　第３受光ファイバ
　８４　第４受光ファイバ
　８５　第５受光ファイバ
　８６　第６受光ファイバ
　８７　第７受光ファイバ
　８８　第８受光ファイバ
　８９　第９受光ファイバ
　９１　第１光量検出部
　９２　第２光量検出部
　１０１　算出部
　１１１　第１光路分離部
　１１２　第２光路分離部
　１２１～１２９　光源
　３１１　出射端
　６１１，６２１ｆ，６２２　検出面
　８１１　受光部
　ＳＰ　被検物 1, 1a, 1b, 1c, 1d, 1e, 1f Refractive index detection device 2 Light source part 3, 3a, 3d, 3f Light emitting member 3b Combined member 3b1 First combined fiber 3b2 Second combined fiber 4, 4f First optical member 5 Polarizing member 6, 6a, 6c, 6f detection unit 7, 7e Second optical member 8, 8a, 8c, 8d, 8e, 8f Light receiving member 9 Light amount detection unit 10 Control unit 11 Optical path separation unit 12 Surface emitting laser array 20 Measurement probe 31 1st irradiation fiber 32 2nd irradiation fiber 33 3rd irradiation fiber 34 4th irradiation fiber 35 5th irradiation fiber 36 6th irradiation fiber 37 7th irradiation fiber 61 Prism 62 Metal film 64 Right angle prism 65 Corner cube prism array 65a Corner Cube prism 71, 72 Condensing lens 81 First light receiving fiber 82 Second receiving Optical fiber 83 3rd light receiving fiber 84 4th light receiving fiber 85 5th light receiving fiber 86 6th light receiving fiber 87 7th light receiving fiber 88 8th light receiving fiber 89 9th light receiving fiber 91 1st light quantity detection part 92 2nd light quantity detection part 101 Calculation unit 111 First optical path separating unit 112 Second optical path separating unit 121 to 129 Light source 311 Emission end 611, 621f, 622 Detection surface 811 Light receiving unit SP Test object

Claims (16)

  1. 　所定波長の光を出射する複数の発光部を有する発光部材と、
    　所定の屈折率の部材を用いて形成され、被検物と接触する検出面を有する検出部と、
    　前記複数の発光部の各々から出射された前記光を略平行光に変換し、該略平行光を前記検出面において離散的な複数の入射角によって入射させる第１光学部材と、
    　前記検出部からの光を集光する第２光学部材と、
    　前記第２光学部材が集光した光を受光する受光部を有する受光部材と、
    　を備えたことを特徴とする光学特性検出光学系。     A light emitting member having a plurality of light emitting portions that emit light of a predetermined wavelength;
    A detection unit formed using a member having a predetermined refractive index and having a detection surface that comes into contact with the test object;
    A first optical member that converts the light emitted from each of the plurality of light emitting units into substantially parallel light, and causes the substantially parallel light to be incident on the detection surface at a plurality of discrete incident angles;
    A second optical member that collects light from the detection unit;
    A light receiving member having a light receiving portion for receiving the light collected by the second optical member;
    An optical property detection optical system comprising:
  2. 　前記検出部は、前記検出面に金属膜が成膜されていることを特徴とする請求項１に記載の光学特性検出光学系。 2. The optical characteristic detection optical system according to claim 1, wherein the detection unit has a metal film formed on the detection surface.
  3. 　前記複数の入射角は、その最大角と最小角との間に、前記被検物の屈折率、前記検出部の屈折率、前記金属膜の材質、膜厚および前記発光部材が出射する波長から定まるプラズモン共鳴条件を満たす角度を含むことを特徴とする請求項２に記載の光学特性検出光学系。 The plurality of incident angles are determined between the maximum angle and the minimum angle from the refractive index of the test object, the refractive index of the detection unit, the material of the metal film, the film thickness, and the wavelength emitted by the light emitting member. The optical characteristic detection optical system according to claim 2, wherein the optical characteristic detection optical system includes an angle that satisfies a predetermined plasmon resonance condition.
  4. 　前記複数の入射角は、その最大角と最小角との間に、６９度と７３度を含むことを特徴とする請求項１～３のいずれか一つに記載の光学特性検出光学系。 The optical characteristic detecting optical system according to any one of claims 1 to 3, wherein the plurality of incident angles include 69 degrees and 73 degrees between the maximum angle and the minimum angle.
  5. 　前記複数の入射角の各々のピッチは、０.２度～２度の間とすることを特徴とする請求項１～４のいずれか一つに記載の光学特性検出光学系。 5. The optical property detection optical system according to claim 1, wherein a pitch of each of the plurality of incident angles is between 0.2 degrees and 2 degrees.
  6. 　前記複数の入射角は、その最大角と最小角との間に、前記被検物の屈折率、前記検出部の屈折率および前記発光部材が出射する波長から定まる全反射条件に満たす角度を含むことを特徴とする請求項１に記載の光学特性検出光学系。 The plurality of incident angles include an angle satisfying a total reflection condition determined from a refractive index of the test object, a refractive index of the detection unit, and a wavelength emitted from the light emitting member, between the maximum angle and the minimum angle. The optical characteristic detection optical system according to claim 1.
  7. 　前記検出面は、前記複数の発光部の各々を物体面として、前記第１光学部材によって形成される光学的な略瞳位置に配置されることを特徴とする請求項１～６のいずれか一つに記載の光学特性検出光学系。 The detection surface is arranged at an optical substantially pupil position formed by the first optical member with each of the plurality of light emitting units as an object surface. The optical characteristic detection optical system described in 1.
  8. 　前記複数の発光部と前記受光部は、光学的に共役な位置関係にあることを特徴とする請求項１～７のいずれか一つに記載の光学特性検出光学系。 The optical characteristic detection optical system according to any one of claims 1 to 7, wherein the plurality of light emitting units and the light receiving unit are in an optically conjugate positional relationship.
  9. 　前記検出面と前記受光部は、光学的に共役な位置関係にあることを特徴とする請求項１～６のいずれか一つに記載の光学特性検出光学系。 The optical characteristic detection optical system according to any one of claims 1 to 6, wherein the detection surface and the light receiving unit are in an optically conjugate positional relationship.
  10. 　前記発光部材は、面発光レーザアレイであることを特徴とする請求項１～９のいずれか一つに記載の光学特性検出光学系。 The optical characteristic detection optical system according to any one of claims 1 to 9, wherein the light emitting member is a surface emitting laser array.
  11. 　前記発光部材は、複数の光ファイバであり、
    　前記発光部は、前記複数の光ファイバの各々の出射端であることを特徴とする請求項１～１０のいずれか一つに記載の光学特性検出光学系。     The light emitting member is a plurality of optical fibers,
    The optical characteristic detection optical system according to any one of claims 1 to 10, wherein the light emitting unit is an emission end of each of the plurality of optical fibers.
  12. 　前記受光部材は、光ファイバを用いて構成され、
    　前記受光部は、前記光ファイバの入射端であることを特徴とする請求項１～１１のいずれか一つに記載の光学特性検出光学系。     The light receiving member is configured using an optical fiber,
    The optical characteristic detection optical system according to any one of claims 1 to 11, wherein the light receiving unit is an incident end of the optical fiber.
  13. 　前記発光部材は、前記受光部をさらに有することを特徴とする請求項１２に記載の光学特性検出光学系。 The optical characteristic detection optical system according to claim 12, wherein the light emitting member further includes the light receiving unit.
  14. 　前記発光部材および前記受光部材を構成する光ファイバ同士は、長手方向の軸が略平行であることを特徴とする請求項１１または１２に記載の光学特性検出光学系。 13. The optical characteristic detection optical system according to claim 11 or 12, wherein the optical fibers constituting the light emitting member and the light receiving member have substantially parallel axes in the longitudinal direction.
  15. 　請求項１～１４のいずれか一つに記載の光学特性検出光学系を備え、前記検出面が前記被検物に接触して配置されていることを特徴とする測定プローブ。 A measurement probe comprising the optical characteristic detection optical system according to any one of claims 1 to 14, wherein the detection surface is arranged in contact with the test object.
  16. 　請求項１～１４のいずれか一つに記載の光学特性検出光学系と、
    　前記受光部材によって受光した前記光の強度情報に基づいて、前記被検物の屈折率を算出する算出部と、
    　を備えたことを特徴とする光学特性検出装置。     The optical property detection optical system according to any one of claims 1 to 14,
    Based on the intensity information of the light received by the light receiving member, a calculation unit that calculates the refractive index of the test object,
    An optical property detection apparatus comprising:
PCT/JP2015/065612 2015-05-29 2015-05-29 Optical-characteristic-detection optical system, measurement probe, and optical-characteristic-detection device WO2016194061A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109164064A (en) * 2018-09-28 2019-01-08 中国工程物理研究院激光聚变研究中心 A kind of device and method of accurate measurement chemical monolayer film variations in refractive index value

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217431A (en) * 1988-05-10 1990-01-22 Amersham Internatl Plc Surface plasmon resonance sensor
JPH07260678A (en) * 1994-03-25 1995-10-13 Hitachi Ltd Method and device for measuring light
JP2006512577A (en) * 2002-12-25 2006-04-13 プロテオプティクス リミテッド Surface plasmon resonance sensor
JP2006317349A (en) * 2005-05-13 2006-11-24 Fujikura Ltd Optical sensing system
JP2009145102A (en) * 2007-12-12 2009-07-02 Sanyo Electric Co Ltd Evanescent wave generator and observation apparatus using the same
JP2009204484A (en) * 2008-02-28 2009-09-10 Fujifilm Corp Sensing device
CN102253005A (en) * 2011-04-15 2011-11-23 深圳大学 Surface plasmon resonance sensing detection system and method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217431A (en) * 1988-05-10 1990-01-22 Amersham Internatl Plc Surface plasmon resonance sensor
JPH07260678A (en) * 1994-03-25 1995-10-13 Hitachi Ltd Method and device for measuring light
JP2006512577A (en) * 2002-12-25 2006-04-13 プロテオプティクス リミテッド Surface plasmon resonance sensor
JP2006317349A (en) * 2005-05-13 2006-11-24 Fujikura Ltd Optical sensing system
JP2009145102A (en) * 2007-12-12 2009-07-02 Sanyo Electric Co Ltd Evanescent wave generator and observation apparatus using the same
JP2009204484A (en) * 2008-02-28 2009-09-10 Fujifilm Corp Sensing device
CN102253005A (en) * 2011-04-15 2011-11-23 深圳大学 Surface plasmon resonance sensing detection system and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109164064A (en) * 2018-09-28 2019-01-08 中国工程物理研究院激光聚变研究中心 A kind of device and method of accurate measurement chemical monolayer film variations in refractive index value
CN109164064B (en) * 2018-09-28 2023-08-25 中国工程物理研究院激光聚变研究中心 Device and method for accurately measuring refractive index change value of single-layer chemical film

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