WO2016176957A1 - 用于制作菲涅尔光栅的优化设计方法 - Google Patents
用于制作菲涅尔光栅的优化设计方法 Download PDFInfo
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- WO2016176957A1 WO2016176957A1 PCT/CN2015/091332 CN2015091332W WO2016176957A1 WO 2016176957 A1 WO2016176957 A1 WO 2016176957A1 CN 2015091332 W CN2015091332 W CN 2015091332W WO 2016176957 A1 WO2016176957 A1 WO 2016176957A1
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- grating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4266—Diffraction theory; Mathematical models
Definitions
- the invention relates to an optimized design method for fabricating a Fresnel grating.
- the core spectroscopic system of micro-spectrum mainly uses the optical system of Czerny-Turner optical system and concave flat field grating, but the Czerny-Turner optical system uses too many optical components, including collimating mirror, grating and focusing mirror, so that the system is installed. Difficulties, poor stability and other shortcomings.
- the optical system of the concave flat field grating uses an optical device, a concave grating, which realizes the functions of a collimating mirror, a grating and a focusing mirror, and makes a great contribution to simplifying the optical system.
- the concave flat field grating is complicated in manufacturing process, and it is difficult to mass-produce, and the glare in the concave grating is difficult to manufacture, which also limits the diffraction efficiency of the grating.
- Fresnel grating is a kind of spectral spectroscopic device which is composed of Fresnel surface and grating. It also has the functions of collimation, splitting and focusing. Fresnel grating can be a plane grating, which is simple in production and convenient for mass production, and can effectively reduce the cost of the spectrometer. However, due to the complex and diverse Fresnel surface, there are problems in optimizing the Fresnel grating structure.
- the main object of the present invention is to provide an optimized design method for fabricating a Fresnel grating according to the deficiencies of the prior art, which can effectively eliminate the partial aberration of the Fresnel grating and improve the resolution of the spectrometer.
- the present invention adopts the following technical solutions:
- An optimized design method for fabricating a Fresnel grating comprising the following steps:
- the Fresnel surface of the Fresnel grating is equivalent to a curved surface type, based on the Fresnel surface type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Lenses (AREA)
Abstract
公开了一种用于制作菲涅尔光栅的优化设计方法,包括以下步骤:(1)将菲涅尔光栅的菲涅尔面型等效为曲面面型,基于菲涅尔面型等效的曲面面型确定菲涅尔光栅的光程差函数:Φ(λ)=<AP 1P 2B>-<AOB>+Nmλ,其中A点表示物点,B点表示像点,O点表示光栅的参考原点,P 1为物点的光线在透镜表面的入射点,P 2表示光线落在光栅上的点,λ表示波长,m表示衍射级次,N表示栅线分布函数,"<>"表示路径对应的光程;(2)确定使得所述光程差函数的函数值最小化的菲涅尔光栅参数,以用于制作具有消像差效果的菲涅尔光栅。制作的菲涅尔光栅能够有效消除菲涅尔光栅部分像差,提高光谱仪的分辨率。
Description
本发明涉及一种用于制作菲涅尔光栅的优化设计方法。
近年来,随着光谱仪在生物医疗、环境监测、农业科技以及工业流程监控等领域的应用越来越广泛,而传统大型光谱仪由于庞大的体积,笨重的外形严重约束了在这些领域的应用。因此,开发便携式的微型光谱仪有着重要的现实意义。现阶段微型光谱的核心分光系统主要采用Czerny-Turner光学系统和凹面平场光栅的光学系统,但是Czerny-Turner光学系统采用的光学元件过多,包括准直镜、光栅和聚焦镜,使得系统安装困难,稳定性差等缺点。而凹面平场光栅的光学系统采用一个光学器件——凹面光栅,实现了准直镜、光栅和聚焦镜的功能,在简化光学系统上作出很大的贡献。然而凹面平场光栅在制作上工艺复杂,难以批量化生产,同时凹面光栅中闪耀的制作难度很大,这也限制了光栅的衍射效率。
这样,一种新型的菲涅尔光栅光学系统得以提出。菲涅尔光栅是一个由菲涅尔面和光栅组合而成的一种光谱分光器件,其亦同时具有准直、分光以及聚焦的作用。菲涅尔光栅可以平面光栅,在制作上工艺简单,便于批量化生产,能够有效的降低光谱仪的成本。然而由于菲涅尔面复杂多样,在优化菲涅尔光栅结构上存在难题。
发明内容
本发明的主要目的在于针对现有技术的不足,提供一种用于制作菲涅尔光栅的优化设计方法,能够有效消除菲涅尔光栅部分像差,提高光谱仪的分辨率。
为实现上述目的,本发明采用以下技术方案:
一种用于制作菲涅尔光栅的优化设计方法,包括以下步骤:
(1)将菲涅尔光栅的菲涅尔面型等效为曲面面型,基于菲涅尔面型
Claims (1)
- 所等效的曲面面型确定菲涅尔光栅的光程差函数:Φ(λ)=<AP1P2B>-<AOB>+Nmλ其中A点表示物点,B点表示像点,O点表示光栅的参考原点,P1为物点的光线在透镜表面的入射点,P2表示光线落在光栅上的点,λ表示波长,m表示衍射级次,N表示栅线分布函数,“<>”表示路径对应的光程;(2)确定使得所述光程差函数的函数值最小化的菲涅尔光栅参数,以用于制作具有消像差效果的菲涅尔光栅。进一步地:所述菲涅尔面型等效的曲面面型可为球面,步骤(1)中,根据以下的式(4)-(10)确定确定菲涅尔光栅的光程差函数的表达式Φ(λ,x,y,z):将光栅面垂直于栅线延伸的方向设为y方向,栅线数目分布函数N(y)为:N(y)=N1y+N2y2+N3y3+N4y4+...(4)其中N1、N2、N3、N4等分别为各阶次的系数,一组确定的系数对应一种变栅距光栅图案,设定物点A位于XOY平面的主光线上,物点A的坐标为(x1,0,0),像点B也位于XOY平面上,像点B的坐标为(x2,y2,0),设定球面半径为R,球心O2的坐标为(x0,0,0),透镜内折射率为n1,空气折射率为n0,<AOB>=<AO1>+<O1O>+<OB>=n0(x2-x1)+(n1-n0)(R-x0) (5)<AP1P2B>=<AP1>+<P1P2>+<P2B> (6)设定P1的坐标为(x3,y3,z3),P2的坐标为(0,y,z),则<AP1P2B>=n0[(x3-x1)2+y3 2+z3 2]1/2+n1[x3 2+(y-y3)2+(z-z3)2]1/2+n0[x2 2+(y2-y)2+z2]1/2(7)(x3-x1)2+y3 2+z3 2=R2 (8)n0sinα1=n1sinα2 (9)所述菲涅尔面型等效的曲面面型可为球面或非球面。所述菲涅尔光栅的光栅面型可是平面光栅或曲面光栅。所述菲涅尔光栅中的光栅面型可为等间距光栅或变栅距光栅。
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JP2016528910A JP2017520780A (ja) | 2015-05-05 | 2015-09-30 | フレネル回折格子の製造に用いられる最適化設計方法 |
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CN104880753B (zh) * | 2015-05-05 | 2018-07-20 | 清华大学深圳研究生院 | 用于制作菲涅尔光栅的优化设计方法 |
CN108646331B (zh) * | 2018-05-07 | 2020-01-14 | 浙江大学 | 一种使用自由曲面透镜的渐变体全息光栅的曝光方法及曝光平台 |
CN113267889B (zh) * | 2021-06-08 | 2024-05-24 | 中国科学院长春光学精密机械与物理研究所 | 一种二次相位离轴菲涅尔波带片设计方法 |
CN113834439B (zh) * | 2021-09-15 | 2023-10-17 | 清华大学深圳国际研究生院 | 菲涅尔光栅微透镜阵列、光谱仪及光谱共焦面型测量系统 |
CN116625649B (zh) * | 2023-07-25 | 2023-10-20 | 中国测试技术研究院 | 一种面向双焦光学系统的参数测定及检验方法 |
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