WO2016175552A1

WO2016175552A1 - Method for preparing conductive resin composite, and conductive resin composite prepared thereby

Info

Publication number: WO2016175552A1
Application number: PCT/KR2016/004406
Authority: WO
Inventors: 고석근; 이철수; 이정환; 강병관; 이성원; 조북룡
Original assignee: 주식회사 지엘머티리얼즈; 주식회사 화진
Priority date: 2015-04-30
Filing date: 2016-04-27
Publication date: 2016-11-03
Also published as: KR101733222B1; KR20160129253A

Abstract

The present invention relates to a method for preparing a conductive resin composite, comprising the steps of: a) forming inorganic nanoparticles on the surface of a carbon-based material by using a physical vacuum deposition method; and b) preparing a carbon-based material/polymer resin composite by mixing the carbon-based material, having inorganic nanoparticles formed thereon, and a polymer resin.

Description

METHOD OF MANUFACTURING CONDUCTIVE RESIN COMPOSITE AND CONDUCTIVE RESIN COMPOSITE THEREFROM

The present invention relates to a method for producing a conductive resin composite in which a carbon-based material is uniformly dispersed and a conductive resin composite produced thereby.

Due to the development of science and technology, plastic materials have been used for the purpose of lightening and functionalizing materials in various fields. As the demand for improvement of electrical characteristics, thermal characteristics, and structural characteristics of plastic materials It is a fact that it is increasing.

For example, in the case of an automobile, various safety devices and convenience devices as well as an electronic control system related to driving are mounted, and materials for efficiently emitting heat generated from electronic devices are required. Particularly, the Green Cine electric vehicle is increasingly important to increase the distance traveled by a single charge through the lightening of the cooling system of the battery cell, especially the heat sink. Also, when the housing of the electronic device is made of a polymer resin in various automobiles, antistatic property is required to avoid malfunction due to static electricity.

BACKGROUND ART [0002] With recent improvements in function and performance of electronic devices, electric power consumption and heat generation of electronic components are increasing. The heat generated between the heat generating bodies mounted on the circuit boards of electronic devices and heat discharging bodies, A thermally conductive sheet, a thermally conductive grease, a thermally conductive adhesive, a thermally conductive phase change member, and the like are inserted in order to emit light.

On the other hand, as the size and thickness of electronic devices have decreased, the space within the electronics housing for placing members such as circuit boards has become increasingly narrow. Therefore, in order to effectively diffuse the heat generated by the heating element in the limited space in the housing, there is a demand for thin and lightweight graphite, carbon-based material, or thermal diffusion sheets made of a metal material.

In general, a conductive material is added to the polymer resin in order to selectively or simultaneously impart electrical and thermal conductivity. Generally, the higher the aspect ratio of the conductive material to be added, the higher the conductivity improvement effect can be obtained even with a smaller amount of additive used. However, in order to achieve uniform dispersion, many shearing forces are required in processing. In general, conductive materials are not well dispersed in the resin and are dispersed in a specific portion. Therefore, in order to form a conductive path in the polymeric resin matrix, a larger amount of conductive material than the theoretical value must be used, which causes another problem such as a decrease in mechanical properties and an increase in cost.

On the other hand, when the carbon-based material is added to improve the electrical conductivity or thermal conductivity of the polymer resin, the conductive property of the conductive carbon-based material / polymer resin composite is determined by the characteristics and the amount of the filler contained in the resin composite, And the nature of the conductive network across the polymer resin composite. In order to obtain a conductive network that exhibits optimum physical properties, the conductive material as a filler must be well dispersed in the polymer resin and evenly dispersed in the polymer resin matrix (composite).

However, the carbon-based material is likely to be agglomerated by a strong van der Waals force. This causes degradation of the mechanical properties and thermal properties of the polymer resin composite. Therefore, it is very important to uniformly disperse the conductive carbon-based material in the polymer resin in the production of the conductive carbon-based material / polymer resin composite.

Currently, it is generally known in the art to add expanded graphite to polymer resins to increase the thermal conductivity of the resin composite. However, when expanded graphite is added to a polymer material, it has disadvantages such as difficulty in working and difficulty in processing, low lubrication property, low oxidation resistance, and adhesion of dust. Particularly, when the expanded graphite is processed in a polymeric compounder, there arises a fluidity problem that makes it difficult to extrude the polymer including expanded graphite.

In general, when additives such as graphite are mixed with a polymer resin, the mechanical properties such as flexural strength and impact strength of the polymer resin are reduced by 50% or more even if the amount of additives is only about 10%. These results are attributed to the fact that the graphite powder was not uniformly distributed in the polymer resin.

Generally, when the thermally conductive additive is added to the polymer resin, the workability of the polymer resin decreases and the thermal conductivity increases as the amount of the additive increases. Even if the thermal conductivity improves, the amount of additive that can be added is limited because the function of the polymer raw material is lost if the processability is deteriorated. As a result, it is essential to prepare a thermally conductive additive having excellent dispersibility in order to improve the heat conductivity and the processability of the polymer resin.

Accordingly, there is a continuing need in the art for a method for uniformly dispersing a conductive carbon-based material in a polymeric resin and improving the mutual affinity with the polymeric resin.

An object of the present invention is to provide a method for producing a conductive resin composite having excellent electrical, thermal and mechanical properties by uniformly dispersing a carbon-based material and enhancing mutual affinity with a polymer resin.

According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: a) forming inorganic nanoparticles on a surface of a carbon-based material by physical vacuum deposition; And b) mixing the carbon-based material in which the inorganic nanoparticles are formed with a polymer resin to prepare a carbon-based material / polymer resin composite.

According to another aspect of the present invention, there is provided a method of manufacturing a carbon-based material, comprising the steps of: a1) modifying a surface of a carbon-based material by injecting a reactive gas while irradiating an ion beam onto the surface of the carbon- And b1) preparing a carbon-based material / polymer resin composite by mixing the surface-modified carbon-based material with a polymer resin.

According to the present invention, it is possible to mix the carbon-based material and the polymeric resin quickly and uniformly in the production of the carbon / polymer resin composite due to the excellent dispersibility of the functionalized carbon-based material, Can be produced.

The resin composite prepared according to the present invention has excellent compatibility with existing processes and can be easily applied to various application fields using existing manufacturing processes used in various plastic materials applications requiring electric conductivity or thermal conductivity.

The functional polymer resin composite produced according to the present invention has improved electrical conductivity, thermal conductivity, and mechanical properties, and can be used as a material for parts such as an electric / electronic device, thereby securing the safety of the device and increasing the efficiency.

Fig. 1 is a conceptual diagram of a process for forming inorganic nanoparticles on the surface of a powdery or granular carbonaceous material.

2 is a schematic view of a vacuum deposition apparatus equipped with a stirring vessel for forming inorganic nanoparticles on the surface of a powdery or granular carbonaceous material according to an embodiment of the present invention.

3 is a schematic view of an apparatus for modifying the surface of a carbon-based material in powder or granular form using an ion beam and a reactive gas according to another embodiment of the present invention.

4 is a photograph showing the dispersion state of conventional graphite powder and distilled water in the distilled water and the functional graphite (5% copper / graphite) powder produced by the method of the present invention.

Figure 5 is a photograph of a surface of conventional graphite powder and functional graphite (5% copper / graphite) powder.

FIG. 6 is a graph showing a change in processability and functionality of a general polymer composite resin depending on the amount of graphite added.

7 is a photograph of the surface of graphite / epoxy and functional graphite / epoxy composite resin prepared according to the present invention.

8 is a graph showing changes in elastic modulus, tensile strength, and tensile strain of a polymer resin composite prepared by adding functional graphite powder to PVC and PE according to the present invention. In the figure, 5% PVC means that the addition amount of the functional graphite powder is 5 vol% based on the volume of polyvinyl chloride (PVC).

1: Vacuum deposition vessel

2: evaporation source

3: stirring tank

4: stirring blade

Hereinafter, the present invention will be described in detail.

According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising the steps of: a) forming inorganic nanoparticles on a surface of a carbon-based material by physical vacuum deposition; And b) mixing the carbon-based material in which the inorganic nanoparticles are formed with a polymer resin to prepare a carbon / polymer resin composite.

In the step a), inorganic nanoparticles are formed on the surface of the carbon-based material by physical vacuum deposition to produce a functional carbon-based powder.

The carbon-based material may be graphite, carbon nanotube, graphene, carbon black, carbon fiber, or a mixture of two or more thereof.

The carbon-based material is a material having both electrical conductivity and thermal conductivity, and may be a graphite, carbon nanotube, graphene, carbon black, carbon fiber, nano- or micro-sized metal wire, or a mixture of two or more thereof .

Graphite can be natural graphite, impression graphite, high crystalline graphite, synthetic graphite or a mixture thereof.

Graphite particles have a form in which a planar carbon layer is piled up with a weak van der Waals force and exhibits high electrical conductivity and disperses graphite particles in a resin composite to help form an electron transfer path, Effect can be obtained.

In a preferred embodiment of the present invention, expanded graphite can be used. Expanded graphite is also called nano-graphite or nano-structured graphite, in which graphite is oxidized into chromic acid and diluted sulfuric acid solution and heated so that water is accumulated between the graphite layers and expanded to 100 to 700% of the initial volume. Expanded graphite has voids inside thereof and has very low dispersibility, but it is advantageous because it has excellent thermal conductivity and electrical conductivity.

Carbon nanotubes (CNTs) are classified as Single Walled Carbon Nanotubes (SWCNTs), Double Walled Carbon Nanotubes (DWCNTs), and Multi Walled Carbon Nanotubes (MWCNTs). . When it is used as a filler for a polymer resin, it may be used as SWCNT, DWCNT, MWCNT, or a mixture thereof. The size may be selected variously depending on the use of the resin composite.

The graphene is a thin film type nano material in which atoms are intertwined like a wire net in a carbon layer, and the electrical, thermal and mechanical properties are excellent.

The carbon-based material has a particle size of 0.01 to 100 mu m, preferably 0.1 to 100 mu m. When a carbon-based material having a particle size exceeding 100 μm is used, the carbon-based material can not be uniformly dispersed in the resin composite, resulting in deterioration of the physical properties of the resin composite, which is not preferable for use as an electrically conductive or thermally conductive material.

The carbon-based material is preferably a powdery or granular material having a purity of 99.0% or more.

The inorganic nanoparticles are nanosized inorganic materials. The inorganic material may be, but is not necessarily limited to, silver, copper, brass, platinum, gold, palladium, nickel, cobalt, chromium, aluminum, lead or combinations thereof.

Preferably, the inorganic nanoparticles may be conductive copper particles, conductive silver particles, conductive aluminum particles, lead (Pb) particles which are low-melting point metals having high resistance to corrosion, or the like, or a combination thereof, depending on the characteristics of the resin composite.

The step a) is performed in a vacuum deposition apparatus having a vacuum deposition vessel and an evaporation source.

2 shows a vacuum deposition apparatus used for forming nanosized inorganic particles on the surface of a carbon-based powder according to the present invention. The vacuum deposition apparatus disclosed in FIG. 2 includes a vacuum deposition chamber 1; A stirring tank (3) provided in the vacuum evaporation tank; A stirring blade (4) provided in the stirring tank and stirring the carbon-based powder; And an evaporation source (2) provided in the upper part of the stirring tank in the vacuum deposition tank and generating vapor particles for nanoparticle formation.

The shape of the stirring vanes provided in the stirring tank may be any one of a screw type, a paddle type, a turbine type, a propeller type, an anchor type, a ribbon ) Type, or the like, or a combination thereof.

In a preferred embodiment of the present invention, the physical vacuum deposition method of step a) comprises the steps of: i) introducing the carbon-based powder into a stirring tank in a vacuum deposition chamber; ii) vacuum evacuation to perform a vacuum deposition process; iii) stirring the carbon-based powder; iv) generating evaporation particles for forming nano-sized inorganic particles using an evaporation source; And v) depositing the evaporation particles on the carbon-based powder to form inorganic particles.

In the step iii), it is preferable that the stirring speed of the carbon-based powder to be stirred by the stirring wing of the stirring tank is controlled to be 0.1 to 400 rpm. By controlling the stirring speed within the above range, it is possible to control so that the carbon-based powder is pulverized due to impact or collision between the carbon-based powders so as not to cause aggregation of the carbon-based powder.

In addition, the working pressure of the vacuum deposition chamber is preferably adjusted to 5 × 10 ^-4 to 5 × 10 ^-3 torr. At low vacuum of 5 x 10 ^-3 torr or less, the distance of mean free path of atomic particles becomes short, making it difficult for inorganic nanoparticles to form on the surface of graphite powder.

As a method for generating evaporated particles for forming inorganic nanoparticles in the step iv), thermal evaporation, E-beam evaporation, direct current sputtering (DC sputtering), cathode arc vapor deposition (DC) magnetron sputtering, RF sputtering, ion beam sputtering, molecular beam epitaxy, arc discharge, Discharge process, laser ablation, or the like can be used.

The deposition of the evaporation particles on the carbon-based powder in the step v) may be performed after the inorganic particles are deposited on the carbon-based powder to form nuclei, and then the nuclei form nano-sized metal particles by the additional deposition of the metal particles Inorganic particles or inorganic films are formed by depositing inorganic particles on the carbon-based powder part where inorganic particles are not deposited, or on the carbon-based powder part where inorganic particles are not deposited, Step.

Preferably, in the step v), the evaporation particles are deposited on the carbon-based powder to a thickness of 1 A to 10 mu m per unit area per minute.

The degree of vacuum of the vacuum deposition chamber is controlled by including an inert gas. The inert gas may be argon (Ar), neon (Ne), N ₂ , O _{2, and the} like.

The size of the inorganic particles formed on the carbon-based powder is preferably 1 to 100 nm.

In a preferred embodiment of the present invention, the step a) includes the steps of: injecting graphite powder into a stirring tank in a vacuum evaporation tank; Performing vacuum evacuation to perform a vacuum deposition process; Stirring the graphite powder; Generating nano-sized metal particles or metal particles for forming a metal film by using an evaporation source; And a process for producing a functionalized graphite powder coated with an adhesive on a graphite powder surface which proceeds to a step of depositing metal particles on the surface of the graphite powder.

In one embodiment of the present invention, a high-purity impression graphite powder was placed in a vacuum deposition apparatus equipped with a stirring vessel, and a functional graphite powder having an adhered substance formed on the surface of graphite was prepared by the vacuum deposition method of the present invention.

The resulting adhesives on the graphite surface may be conductive copper particles, conductive silver particles, conductive aluminum particles, lead (Pb) particles which are low-melting metal with high corrosion resistance, or the like, or a combination thereof depending on the characteristics of the resin composite.

The production method of the present invention includes a step of mixing a carbon-based material in which inorganic nanoparticles are formed with a polymer resin to prepare a carbon-based material / polymer resin composite.

In one embodiment of the present invention, a nano-sized metal particle or metal film formed on the surface of graphite powder using physical vacuum vapor deposition, that is, a resin filled with a polymer resin using graphite functionalized with a coating adhesive as a filler Complex.

The content of the carbon-based material used in the resin composite is preferably 1.0 to 20% by weight, and more preferably 5 to 10% by weight based on the weight of the resin composite. When the content is less than 1.0% by weight, And if it exceeds 20% by weight, the physical properties of the resin composite are deteriorated, which is not preferable for use as an electrically conductive or thermally conductive material.

Alternatively, the content of the carbon-based material used in the resin composite is preferably 1 to 20% by volume based on the volume of the polymer resin. When the content is less than 1% by volume, the effect on electrical properties is insignificant. When the content is more than 20% by volume, the physical properties of the resin composite are deteriorated, which is not preferable for use as an electrically conductive or thermally conductive material.

The polymer resin may be a thermoplastic or thermosetting polymer resin.

The thermoplastic polymer resin may be a polyacetal resin, an acrylic resin, a polycarbonate resin, a styrene resin, a polyester resin, a vinyl resin, a polyethylene resin, a polyphenylene ether resin, a polyolefin resin, a polyarylate resin, A polyether sulfone resin, a polyether sulfone resin, a polyether sulfone resin, a polyether sulfone resin, a polyether sulfone resin, a polyether sulfone resin, a polyether sulfone resin, a polyether sulfone resin, A polypyrrolidine resin, a polypyrrolidine resin, a polydibenzofuran resin, a polysulfone resin, a polyurea resin, a polyphosphazene resin, or a liquid crystal polymer resin alone or in combination of two or more of these resins. May be copolymerized or mixed.

The thermosetting polymer resin may be selected from the group consisting of epoxy resin, urethane resin, bismaleimide resin, ester resin, phenol resin and urea resin, and mixtures thereof.

The content of the polymer resin used in the resin composite is 85.0 to 98.9% by weight, preferably 90 to 97.7% by weight. If it is contained in an amount of less than 85.0% by weight, the characteristics specific to the polymer such as impact resistance and elongation can not be exhibited. If it exceeds 98.9% by weight, the electrical conductivity is not sufficiently improved.

It is preferable that the mixing of the carbon-based material in which the inorganic nanoparticles of step b) is formed and the polymer resin is a melt-shearing-kneading process.

When the melt-shear kneading method is used, the carbon-based material / polymer resin pellets are produced by uniformly dispersing the carbon-based material into the polymer at a high temperature and a high shear force by using an extruder or the like to increase the capacity and lower the manufacturing cost .

Alternatively, the mixing of the carbon-based material formed with the inorganic nanoparticles of step b) and the polymer resin may be performed by dispersing the carbon-based material in the polymer resin and curing the carbon-based material.

Another aspect of the present invention is a method for manufacturing a carbon-based material, comprising the steps of: a1) modifying a surface of a carbon-based material by injecting a reactive gas while irradiating an ion beam onto the surface of the carbon- And b1) preparing a carbon / polymer resin composite by mixing the surface-modified carbon-based material and the polymer resin to produce a carbon / polymer resin composite.

The step a1) comprises the steps of: i) introducing the carbon-based powder into a stirring tank in a vacuum evaporation tank; ii) vacuum evacuation to perform a vacuum deposition process; iii) stirring the carbon-based powder; And iv) a step of modifying the surface of the carbon-based powder by injecting a reactive gas while irradiating the surface of the carbon-based powder with an ion beam using an ion source or an ion gun.

The reactive gas may be oxygen, nitrogen, ammonia, or a mixed gas thereof.

Another aspect of the present invention provides a conductive resin composite comprising a carbon-based material in which inorganic nanoparticles formed according to the above-described method are formed, and a polymer resin.

The conductive resin composite may be used as a material for components such as electric / electronic devices in the form of pellets.

In one embodiment of the present invention, the conductive resin composite was used as a metal graphite brush material.

In another embodiment of the present invention, the conductive resin composite was used as an electrode material for a redox flow cell.

Another aspect of the present invention provides a polymer resin molded article produced using the conductive resin composite. The product form of the polymer resin molded article may be embodied without limitation as long as it is in the form of a polymer resin molded article which can be used for an electrically conductive or thermally conductive material.

Hereinafter, the present invention will be described in more detail with reference to Examples. However, the embodiments according to the present invention can be modified into various other forms, and the scope of the present invention should not be construed as being limited to the above-described embodiments.

&Lt; Production of functional graphite powder >

10 kg of high purity impression graphite (99% or more) powder was charged into a stirring tank and vacuum pumping was performed until a base pressure was reached. The basic vacuum degree at this time was 1 × 10 ^-5 to 5 × 10 ^-5 Torr. After reaching the basic degree of vacuum, the graphite powder was stirred and the deposition process was performed by the sputtering method using the copper target. The working pressure during the vacuum deposition was maintained in the range of 1 x 10 ^-4 to 5 x 10 ^-3 Torr. In the deposition process, the power of the DC power source is 500 W, and the copper nanoparticle content is 1,000 ppm at the time of 3 hours and 20 minutes.

As a result, a functional graphite (copper nanoparticle / graphite) powder having copper nanoparticles of 1 to 100 nm in size formed on the surface of graphite was obtained. The content of copper relative to the functional graphite is 5% by weight.

&Lt; Dispersibility Evaluation Experiment &

The functional graphite powder was dispersed in distilled water to evaluate the degree of dispersion.

4 is a photograph showing the dispersion state of conventional graphite powder and the above-mentioned functional graphite (5 wt% copper / graphite) powder in distilled water. 4, conventional graphite powders are not dispersed in distilled water but are concentrated on the surface of water, but the functional graphite (5 wt% copper / graphite) powders are well dispersed throughout the distilled water. From this, it can be seen that the surface energy of the graphite powder was increased by the copper nanoparticles formed on the surface of the graphite powder, and the surface property of the graphite powder was changed from hydrophobic to hydrophilic.

The surface of the graphite was analyzed by an electron microscope to confirm the surface state of the functional graphite (5 wt% copper / graphite) powder.

5 is a photograph of the surface of conventional graphite powder and the above-mentioned functional graphite (5% copper / graphite) powder. As can be seen from FIG. 5, the surface of the conventional graphite powder has a surface with a low surface roughness, and the surface of the functional graphite has a rough surface with increased roughness due to the formation of copper nanoparticles have.

&Lt; Example 1 >

The functional graphite powder and polyvinyl chloride (PVC) were mixed and melt-shear kneaded to prepare PVC / graphite pellets.

The addition amount of the functional graphite powder was 5 vol% based on the volume of polyvinyl chloride (PVC).

&Lt; Example 2 >

The addition amount of the functional graphite powder was 10% by volume based on the volume of polyvinyl chloride (PVC).

&Lt; Example 3 >

The functional graphite powder and polyethylene (PE) were mixed and melt-shear kneaded to prepare PE / graphite pellets.

The addition amount of the functional graphite powder was 10% by volume based on the volume of polyethylene (PE).

The addition amount of the functional graphite powder was 15 vol% based on the volume of the polyethylene (PE).

&Lt; Example 5 >

The functional graphite powder and the epoxy resin were mixed and melt-shear kneaded to prepare a resin composite. The amount of the functional graphite powder added was 5 vol% based on the volume of the epoxy resin.

The surface of the resin composite was analyzed by an optical microscope. Referring to FIG. 7, it can be seen that, in the case of ordinary graphite powder, when mixed with an epoxy resin, they are not mixed as a whole and are gathered at a specific position. On the other hand, it can be confirmed that the functional graphite powder prepared according to the present invention is uniformly mixed with the epoxy as a whole.

The changes in mechanical properties of the resin complexes prepared according to Examples 1 to 4 were analyzed and the results are shown in Table 1 below.

8 is a graph of changes in elastic modulus, tensile strength, and tensile strain of a polymer composite resin prepared by adding functional graphite to PVC and PE.

	실시예 1Example 1	실시예 2Example 2	실시예 3Example 3	실시예 4Example 4
탄성계수 최대증감률Maximum modulus of elasticity modulus	-6%-6%	-20%-20%	+10%+ 10%	+9%+ 9%
인장강도 최대증감률Maximum increase rate of tensile strength	-24%-24%	-22%-22%	-31%-31%	-29%-29%
인장변형 최대증감률Maximum rate of change in tensile strain	-38%-38%	-36%-36%	-37%-37%	-32%-32%

In the case of the conventional graphite-added polymer resin, the mechanical properties are deteriorated by 50% or more by adding 10 vol%. As a result of the analysis, the resin complexes of Examples 1 to 4, to which the functional graphite powder was added, The coefficient, the tensile strength and the reduction rate of the tensile strain were significantly lower. In particular, the resin complexes prepared according to Examples 3 to 4 exhibited increased elastic modulus values of 10% and 9%, respectively. Therefore, it was confirmed that the resin composite produced according to the present invention has superior performance to the conventional product.

Claims

a) forming inorganic nanoparticles on the surface of the carbon-based material by physical vacuum deposition; And

and b) mixing the carbon-based material in which the inorganic nanoparticles are formed with a polymer resin to prepare a carbon-based material / polymer resin composite.
The method according to claim 1,

Wherein the carbon-based material is graphite, carbon nanotube, graphene, carbon black, carbon fiber, or a mixture of two or more thereof.
The method according to claim 1,

Wherein the carbon-based material has a particle size of 0.01 mu m to 100 mu m.
The method according to claim 1,

Wherein the material of the inorganic material is silver, copper, brass, platinum, gold, palladium, nickel, cobalt, chromium, aluminum, lead or a combination thereof.
[2] The method of claim 1, wherein the physical vacuum deposition process of step a) comprises: i) introducing the carbon-based powder into a stirring tank in a vacuum deposition chamber; ii) vacuum evacuation to perform a vacuum deposition process; iii) stirring the carbon-based powder; iv) generating evaporation particles for forming nano-sized inorganic particles using an evaporation source; And v) depositing the evaporation particles on the carbon-based powder to form inorganic particles.
The method of claim 5,

Wherein the carbon-based powder is agitated at a rate of 0.1 to 400 rpm in the step iii).
The method of claim 5,

Wherein the working pressure of the vacuum deposition chamber is adjusted to 5 x 10 -4 to 5 x 10 -3 torr.
The method of claim 5,

In the step iv), thermal evaporation, E-beam evaporation, DC sputtering, cathodic arc sputtering, or the like may be used as a method for generating evaporated particles for forming inorganic nanoparticles. , DC magnetron sputtering, RF sputtering, ion beam sputtering, molecular beam epitaxy, arc discharge process, or laser ablation (laser ablation) Ablation) is used as the conductive resin composite.
The method of claim 5,

Wherein the vaporized particles are deposited on the carbon-based powder in a thickness of 1 to 10 [mu] m per unit area per minute in the step (v).
[2] The method of producing a conductive resin composite material according to claim 1, wherein the content of the carbon-based material used in the resin composite is 1.0 to 20% by weight based on the weight of the resin composite.
The method for producing a conductive resin composite material according to claim 1, wherein the content of the carbon-based material used in the resin composite is 1 to 20% by volume based on the volume of the polymer resin.
The method of producing a conductive resin composite according to claim 1, wherein the content of the polymer resin used in the resin composite is 85.0 to 98.9% by weight.
[4] The method of claim 1, wherein the mixing of the carbon-based material with the inorganic polymer nanoparticles and the polymer resin is performed by melt-shearing.
a1) modifying the surface of the carbon-based material by injecting a reactive gas while irradiating the surface of the carbon-based material with an ion beam; And

b1) preparing a carbon-based material / polymer resin composite by mixing the surface-modified carbon-based material with a polymer resin.
15. The method of claim 14,

Wherein the reactive gas is oxygen, nitrogen, ammonia, or a mixed gas thereof.
A conductive resin composite comprising a carbon-based material in which inorganic nanoparticles formed according to the manufacturing method of claim 1 or 14 is formed and a polymer resin.