WO2016128249A1 - Procédé et dispositif de mesure optique de grande précision sur des objets sur lesquels adhèrent des couches fluidiques - Google Patents
Procédé et dispositif de mesure optique de grande précision sur des objets sur lesquels adhèrent des couches fluidiques Download PDFInfo
- Publication number
- WO2016128249A1 WO2016128249A1 PCT/EP2016/052138 EP2016052138W WO2016128249A1 WO 2016128249 A1 WO2016128249 A1 WO 2016128249A1 EP 2016052138 W EP2016052138 W EP 2016052138W WO 2016128249 A1 WO2016128249 A1 WO 2016128249A1
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- WO
- WIPO (PCT)
- Prior art keywords
- measuring
- measurement
- radiation
- electromagnetic radiation
- optical
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
Definitions
- the present invention relates to a method and a device for high-precision optical measurement of geometrical variables of objects, on the surface of which a fluidic layer adheres, the optical measurement taking place selectively on the object with optical measuring radiation.
- Measuring object is irradiated to measure certain geometric features.
- Location-selective also means in the present patent application that the measuring radiation is directed, for example, as a collimated beam, as a beam focus or as a line onto the object to be measured in order to measure geometric variables in the irradiated area.
- a planar illumination so i. A. illuminates only parts of the surface of the measuring ⁇ object.
- the interferometric distance measurement, the confocal measurement or the autofocus method is the irradiated area through the beam cross-section or beam waist of one laser beam or the radiation of another partially coherent one
- Given radiation source and has, for example, the shape of a slice with a diameter of 0.3 ⁇ to 5 mm (1D measurement) or the shape of a line with a width of 0.3 ⁇ to 500 ⁇ and a length of 100 ⁇ to 1000th mm (2D measurement).
- the method and the associated device can be, for example, for the optical measurement of the thickness of rolled sheets, the measurement of the straightness and the cross-sectional profile of rails, the measurement of
- Coolant components the examination of geometric characteristics of shafts (drive shafts, crankshafts, camshafts, balance shafts), the measurement of the roughness of surfaces, the measurement of micro-topology of surface-processed semi-finished products or the inline measurement of workpieces and tools in assembly lines or
- These influencing factors include fluidic layers adhering to the surface of the test object with thicknesses in the range from 1 nm to 500 ⁇ m, which can influence the measurement result both systematically and statistically.
- the achievable measurement uncertainty of the dimensional inspection of the actual measurement object generally a solid, is basically limited.
- these fluidic layers are oil films or oily ones
- fluidic layers for example by washing before a measurement to remove.
- this requires additional work steps and the cost and lead time increase.
- the fluidic layers usually have to return to the
- Object surface are applied to the corrosion ⁇ protection or to ensure the cooling and lubricating action again. This procedure also involves washing residues that have to be disposed of or recycled. In addition, the consumption of substances for the fluidic layers increases with corresponding costs and environmental impacts.
- Layers consists in the use of tactile measurement methods. With tactile measurement methods such objects can be measured with less uncertainty, since the sensing process, the adhesive fluid in the field of
- the object of the present invention is therefore to provide a method and a device with which a high-precision optical measurement of geometric variables - such as distances, shapes, contours, curvatures, etc. - is made possible by objects on the surface of which fluidic layers adhere, without the To remove layers with difficulty.
- the task is with the method and the
- the optical measurement on the object takes place in a known manner in a location-selective manner with optical measuring radiation.
- the method is characterized in that the fluidic layer at the location of the respective optical measurement by local heating with another electromagnetic
- Radiation preferably in the form of a beam, for the duration of the optical measurement transient in the
- Thickness is reduced. This reduction in layer ⁇ or film thickness based on the fact that local thermal energy is coupled into the fluidic layer with the further radiation of the viscosity
- the parameters of the further electromagnetic radiation are chosen so that a given limit ⁇ value of the layer thickness is locally undershot at the location of the measurement. This limit is chosen so that it is significantly lower than the desired measurement uncertainty of the optical measurement. In this way, the systematic and statistical error influences of the adhering fluidic layer on the optical measurement are largely reduced.
- the fluidic layer is not removed but only the thickness of which is temporarily reduced at the respective measuring location, then no new fluidic layer must be applied to the object.
- the fluidic layer or fluidic film e.g. a corrosion protection film always remains on the test object. It is reduced in thickness only locally for the duration of the measurement in order to obtain precise measurement results with the used
- the proposed method and the associated apparatus thus make it possible for the first time to make measurements of objects with optical measuring methods that allow measurement uncertainties in the range of 50 ⁇ m down to 1 nm, despite fluidic films adhering to the surface of the objects.
- the object can be measured or exceeded in the field of tactile measuring systems.
- the further electromagnetic radiation is preferably directed onto the object such that it has a beam cross section at the location of the optical measurement which is larger than the beam cross section of the measurement beam at the location of the optical measurement.
- the bundled further electro ⁇ magnetic radiation is preferably directed in the direction of movement by a lead distance offset from the measuring beam to the object surface.
- the lead spacing is chosen so that at the time of measurement, the thickness of the fluidic layer is reduced accordingly at the measurement location.
- Measuring beam is preferably set no offset between the measuring beam and the bundled further electromagnetic radiation.
- the further electro-magnetic radiation is preferably directed ⁇ in this case, coaxial to the measurement beam onto the object surface.
- Radiation in the proposed method is preferably chosen so that the fluidic layer does not thermally decompose or otherwise
- the reduction in the thickness of the adherent layer is additionally by a on the place of optical measurement directed, continuous or pulsed gas flow amplified.
- Gas flow are preferably adjusted so that the fluidic layer does not differ from the
- the proposed device has a
- optical sensor for performing the optical measurement
- carrier device for a measuring head of the optical sensor
- carrier device for the object to be measured, which are interconnected by a machine ⁇ structure.
- the measuring head contains optical elements for guiding the measuring radiation and of the further electromagnetic ⁇
- the measuring beam may in this case for example.
- the further electromagnetic radiation can likewise be coupled into the measuring head.
- the radiation source for the further electromagnetic radiation is already arranged in the measuring head.
- At least one of the two carrier devices is preferably designed as a highly accurate axis for the generation of linear or rotary movements, over which then the measuring head or the measurement object for the measurement can be moved according to exactly. The control of the optical measurements, the movements as well as the
- Irradiation of the further electromagnetic radiation takes place via a control device connected to the measuring head and the carrier device (s).
- optical measuring methods the measuring methods already mentioned in the introduction to the description, for example laser triangulation, interferometric distance measurement, confocal measurement, autofocus measurement, transit time measurement or also variants or combinations of these measurement methods can be used. It is obvious that the present invention is not limited to these measurement information model, but can be used for all optical methods in which a site-selective measurement with optical measurement radiation is performed.
- the measurement uncertainty of optical sensors for the geometry measurement on measuring objects with adhering fluidic layers can be considerably improved without these layers having to be removed beforehand.
- the transient reduction of the thickness of the fluidic layer triggered by the action of a further electromagnetic radiation and possibly additionally an external gas flow, both of which act on the fluidic layer in the vicinity of the measurement site, offers the advantage that the layer reconstitutes itself after the measurement and fulfills its intended purpose. Otherwise required process steps such as the washing of the measuring objects to remove the fluidic layers or the reapplication of these layers are eliminated.
- FIG. 1 shows a schematic representation of a
- Fig. 2 is a representation for illustrating the interaction of the measuring radiation with a measuring object with adhering
- Fig. 3 is a schematic representation of
- Fig. 4 is a schematic representation of a
- Figure 1 shows a schematic representation of an exemplary structure of the proposed device for measuring geometric features of a test object with an optical measurement method.
- the figure shows an optical sensor 3 which emits a measuring beam 4 and directs it to the surface 2 of a measuring object 1 in a location-selective manner.
- the optical sensor 3 can, for example, a triangulation sensor, a laser light section sensor, an interferometer, a confocal sensor, an autofocus sensor, an absolute measuring interferometric sensor, a runtime sensor or a comparable sensor based on variants or
- the optical sensor 3 generally consists of an optical measuring head, which is connected via suitable connections, such as, for example, light guides, to one or more further units of the sensor, which may, for example, contain the measuring radiation source and the detector.
- the optical sensor 3 is usually connected to a separate from the sensor control and evaluation.
- the measuring beam 4 hits a point 6, the measuring location, on the surface 2 of the measuring object 1 and the sensor 3 measures the distance between the point 6 and a reference plane 5
- Sensor 3 is connected via a carrier device 9 with a machine structure 8. At this a further support means 7 is mounted, which fixes the measuring ⁇ object 1.
- One or both carrier devices 7, 9 can have controllable axes for the generation of linear or rotational movements, so that the measuring point 6 moves over the surface 2 of the measuring object 1, for example, and in this way successively a series of distances at respectively known axis positions of the carrier devices 7 , 9 and known orientations of the measuring object 1 and the sensor 3 can be measured.
- the axis positions and orientations are known relative to the machine structure 8, so that a series of measurement data can be acquired which describe geometric features of the test object 1 to be tested.
- Examples are distances, positions, diameter, shape, roundness, eccentricity, etc.
- the carrier devices 7, 9 instead of the axes of the carrier devices 7, 9 or in combination with these coupled to the sensor scanner can be used, which deflect the measuring beam 4 and so the point 6 on the target surface.
- fluidic layers 10 such as e.g.
- Oil films as illustrated in Figure 2. Their thickness 11 varies depending on the amount of applied
- the thickness variation ⁇ range is from 1 nm to 500 ⁇ and is thus in a same size class as the targeted measuring ⁇ uncertainties of geometry measurement.
- the measurement ray 4 of the sensor 3 does not interact with the surface 2 of the measuring object 1, but also with the fluidic layer 10. Due to the finite thickness of 11, the measurement signal is distorted because a part of the light already on the free liquid ⁇ keitsober Phantom the fluid scattered is, another part of the surface of the measuring object 1 and possibly another part within the volume of the fluidi ⁇ rule layer 10. The superposition of these Messsignal ⁇ shares leads to a measurement error. If the thickness of the adhered fluidic layer is constant, a systematic error results. In general, however, the thickness 11 of the fluidic layer 10 varies as a function of time, e.g. B. due to the interaction between the triggered by the carrier device 7 for a measurement movement of the measurement object 1 and the geometry of the measurement object. This results in a statistical error. Both error components increase the measurement uncertainty. This applies in particular
- the approach of the proposed method and the proposed device is based on influencing the thickness of the fluidic layer in the local environment of the incident radiation of the optical sensor for at least the duration of the measurement with a further electromagnetic radiation which interacts with the fluidic layer, that theirs local thickness is lowered.
- the measuring head of the optical sensor 3 additionally emits the further electromagnetic radiation, hereinafter referred to as second electromagnetic radiation. This emission is not explicitly shown in FIG. 1, but will be explained in more detail in connection with FIGS. 3 to 5.
- Figure 3 illustrates this approach in a schematic way.
- a beam of second electromagnetic radiation 12 is applied to the surface 2 of the measuring object 1 court ⁇ tet.
- this further beam 12 encloses the measuring beam 4 of the optical sensor 3.
- the second electromagnetic radiation is chosen such that it preferably interacts with the adhering fluid and not with the measuring object 1 carrying this fluid.
- thermal energy is coupled into the fluid in the vicinity of the measuring location 6, which influences the viscosity of the fluid.
- a slight increase in the local temperature of the fluid leads to a locally reduced viscosity of this fluid, so that the layer thickness 13 of the layer 10 on the surface 2 of the test object 1 changes in a location-selective manner.
- the gravitational force and inertial forces - such. B. due to rotation of the measuring object 1 during the measurement - forms locally by the reduced viscosity of the fluid from a smaller layer thickness.
- external pulse currents such.
- a gas flow directed toward the exchange site may be external
- Radiation is preferably chosen so that the
- Absorption length of the radiation at this wavelength in the adhering fluid is about as large as the present before the action of this radiation thickness of the adhering fluid at the measuring location. In any case, the absorption length of the radiation is on the order of the thickness of the adhering fluid.
- This radiation can be both narrowband radiation and broadband radiation. When using narrow-band radiation, the wavelength of this radiation should differ from the wavelength of the measurement radiation so that it does not interfere with the optical measurement. When using broadband radiation, it is also advantageous if the measurement radiation is not within the wavelength range of the broadband radiation, but not absolutely necessary.
- Irradiance, irradiation distribution and duration of action of the second electromagnetic radiation are selected so that in the region of the location-selective measurement with the optical sensor 3, ie at the respective measuring location, a sufficiently small thickness of the fluid is formed during the measurement, the above specified condition is met.
- the irradiation parameters of the second electromagnetic radiation are chosen so that the fluid is not thermally decomposed or otherwise permanently changed. This ensures that after the measurement, the fluid again assumes the originally adhering thickness and the purpose of the fluid -. B. the corrosion protection - is maintained.
- the irradiation parameters are preferably chosen so that only a negligible amount of energy is absorbed in the measurement object.
- the measurement object itself acts as a heat reservoir of great heat capacity and constant temperature, which after the action of the second electromagnetic radiation 12 again establishes a temperature compensation between the fluid and the measurement object at the starting temperature.
- Directed fluid layer which supports the local reduction of the thickness of the adhering fluid.
- the gas flow is chosen so that the momentum transfer to the fluid leads only to a local displacement but not to a separation of the fluid.
- the appropriate adjustment of the gas flow and the irradiation parameters for the irradiation with the second electromagnetic radiation can be determined by preliminary experiments.
- measurements with and without adhering fluid can be carried out beforehand in order to compare the respectively achieved measurement uncertainties.
- Figure 4 shows an example of an embodiment of an apparatus for performing the proposed method, wherein the second electromagnetic
- Radiation is a radiation in the range of optical
- Wavelengths between 200 nm and 20 ⁇ is.
- This may be, for example, IR radiation of a globar, a quartz-halogen lamp, a Hg high-pressure lamp, a heating resistor, a light-emitting diode or a laser, which can be used as a radiation source for the further electromagnetic radiation.
- Shown is a superposition of the measuring radiation ⁇ 4 of the optical sensor and the second electromagnetic radiation 12.
- the optical sensor 3 is formed by a measuring head 3a in conjunction with a further sensor unit (not shown) in which the radiation source for the measuring radiation and the optical detection unit required for the measurement are arranged.
- the measuring radiation 4, 4 ' is supplied to the measuring head 3a via an optical waveguide 15.
- the measuring radiation is collimated via an optical system 16 and focused with a further optical system 17 for the location-selective measurement or collimated to a smaller beam diameter.
- the backscattered at the measuring object 1 measuring radiation passes through the same optics 17, 16 back to the optical waveguide 15 and via this to the measuring or detection unit, which generates a distance signal, for example.
- a distance signal for example.
- an interferometric principle or a phase or running time measurement According to an interferometric principle or a phase or running time measurement.
- the measuring head 3a is a radiation source 18 for the second electromagnetic radiation 12, ange ⁇ arranged, which is superimposed on an optics 19 and a dichroic beam splitter 20 with the measuring radiation 4.
- the dichroic beam splitter 20 and the optics 17 and 19 are designed and positioned such that the second electromagnetic radiation 12 'acts on the adhering fluidic layer 10 in the region of the incident measuring radiation 4'.
- the beam axis of the second electro ⁇ magnetic radiation 12 ' is in this case in the z-direction offset to the beam axis 24 of the measuring beam 4' directed to the surface of the measuring object 1, thus the
- Measuring time the required reduction in the thickness of the adhesive layer 10 is achieved at the measurement site.
- FIG. 5 shows a schematic view of the irradiation profile of the measuring radiation 4 'and of the second electromagnetic radiation 12' on the
- the respective penetration points of the beam axes of the measuring radiation 4 'and The second electromagnetic radiation 12 'with the surface 2 of the measuring object 1 - shown as small crosses in Figure 5 - generally have a distance 25 against each other. This is chosen equal to zero - according to a coaxial beam guidance - or has a low in relation to the measuring distance value 0, so that z. B. in a movement of the measuring object 1 relative to the measuring radiation 4 'in the positive z-direction (see. Coordinate system 14) by this offset
- Object points first pass through the center of the irradiation profile of the second electromagnetic radiation 12 'before it reaches the piercing point of the beam axis of the measurement radiation 4' with the measurement object
- the described advance distance 25 is selected so that the exposure time of the second electro ⁇ magnetic radiation 12 'at a given set of parameters of this radiation (radiation power,
- the geometry of the measuring object and its state of motion is sufficient to a local reduction in the thickness of the adhering fluid for the time interval of the measurement in the spatial domain of the Influence of the measuring radiation 4 'to lead.
- FIG. 4 shows an embodiment of the device in which the thickness of the fluidic layer at the measurement location is additionally enhanced by application of an outer layer
- Pulse current in this case a gas flow, supported and strengthened.
- the gas stream is preferably arranged coaxially or parallel to the beam axis 24 of the measuring radiation 4 'or encloses with this only a small angle and is in
- FIG. 4 shows a nozzle 21, which comprises the beam path of the measuring radiation 4 'and the second electromagnetic
- Radiation 12 ' encloses and a gas stream 22 in
- FIG. 4 shows by way of example an arrangement in which the two axes 23, 24 run parallel to one another. With the parallel or slightly inclined arrangement is again a
- Lead spacing is set analogous to that which has already been explained for the piercing points of the beam axes of the measuring radiation 4 'and the second electromagnetic radiation 12' through the surface of the measuring object 1.
- the direction and magnitude of the flow distance are selected depending on the motion ⁇ state of the measurement object.
- the forward distance ⁇ distance 0 is selected and oriented as it is shown with reference to Figure 5 analogous to the position of the beam axes of the second electromagnetic radiation 12' and the measuring radiation 4 '.
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Abstract
La présente invention concerne un procédé et un dispositif de mesure optique de grande précision sur des objets (1) sur lesquels adhèrent des couches fluidiques (10), avec lesquels la mesure optique sur l'objet (1) est réalisée en sélectivité d'emplacement avec un rayonnement de mesure optique (4, 4'). L'épaisseur (13) de la couche fluidique (10) à l'emplacement (6) de la mesure optique respective est réduite temporairement pendant la durée de la mesure par un réchauffement local avec un rayonnement électromagnétique supplémentaire (12, 12'). L'incertitude de la mesure géométrique est ainsi considérablement améliorée sans qu'il soit nécessaire de retirer les couches fluidiques (10) avant la mesure.
Applications Claiming Priority (2)
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DE102015202470.9A DE102015202470B4 (de) | 2015-02-12 | 2015-02-12 | Verfahren und Vorrichtung zur hochgenauen optischen Messung an Objekten mit anhaftenden fluidischen Schichten |
DE102015202470.9 | 2015-02-12 |
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WO2016128249A1 true WO2016128249A1 (fr) | 2016-08-18 |
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PCT/EP2016/052138 WO2016128249A1 (fr) | 2015-02-12 | 2016-02-02 | Procédé et dispositif de mesure optique de grande précision sur des objets sur lesquels adhèrent des couches fluidiques |
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Citations (5)
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US4309609A (en) * | 1980-01-07 | 1982-01-05 | Sampson Norman N | Heat scaling of traveling articles |
US4377343A (en) * | 1981-07-10 | 1983-03-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Dual-beam skin friction interferometer |
WO2008125102A1 (fr) * | 2007-04-12 | 2008-10-23 | V & M Deutschland Gmbh | Procédé et dispositif destinés à la mesure optique de filets extérieurs |
EP2799809A1 (fr) * | 2011-12-27 | 2014-11-05 | Nippon Steel & Sumitomo Metal Corporation | Procédé de mesure de forme de partie d'extrémité de tube fileté |
US20150017880A1 (en) * | 2013-07-12 | 2015-01-15 | Ebara Corporation | Film-thickness measuring apparatus, film-thickness measuring method, and polishing apparatus having the film-thickness measuring apparatus |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7253901B2 (en) * | 2002-01-23 | 2007-08-07 | Kla-Tencor Technologies Corporation | Laser-based cleaning device for film analysis tool |
US7006222B2 (en) * | 2003-01-08 | 2006-02-28 | Kla-Tencor Technologies Corporation | Concurrent measurement and cleaning of thin films on silicon-on-insulator (SOI) |
DE102005058057A1 (de) * | 2005-12-06 | 2007-06-14 | Volkswagen Ag | Verfahren und Vorrichtung zur optischen Kontrolle von kolbenförmigen Bauteilen |
DE102013202284A1 (de) * | 2013-02-13 | 2014-08-14 | Robert Bosch Gmbh | Verfahren zur Reinigung einer optischen Messsonde |
-
2015
- 2015-02-12 DE DE102015202470.9A patent/DE102015202470B4/de active Active
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2016
- 2016-02-02 WO PCT/EP2016/052138 patent/WO2016128249A1/fr active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4309609A (en) * | 1980-01-07 | 1982-01-05 | Sampson Norman N | Heat scaling of traveling articles |
US4377343A (en) * | 1981-07-10 | 1983-03-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Dual-beam skin friction interferometer |
WO2008125102A1 (fr) * | 2007-04-12 | 2008-10-23 | V & M Deutschland Gmbh | Procédé et dispositif destinés à la mesure optique de filets extérieurs |
EP2799809A1 (fr) * | 2011-12-27 | 2014-11-05 | Nippon Steel & Sumitomo Metal Corporation | Procédé de mesure de forme de partie d'extrémité de tube fileté |
US20150017880A1 (en) * | 2013-07-12 | 2015-01-15 | Ebara Corporation | Film-thickness measuring apparatus, film-thickness measuring method, and polishing apparatus having the film-thickness measuring apparatus |
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DE102015202470B4 (de) | 2018-11-15 |
DE102015202470A1 (de) | 2016-08-18 |
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