WO2016116036A1 - 消杂光双光路光学定中仪 - Google Patents

消杂光双光路光学定中仪 Download PDF

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WO2016116036A1
WO2016116036A1 PCT/CN2016/071372 CN2016071372W WO2016116036A1 WO 2016116036 A1 WO2016116036 A1 WO 2016116036A1 CN 2016071372 W CN2016071372 W CN 2016071372W WO 2016116036 A1 WO2016116036 A1 WO 2016116036A1
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light
optical
lens
reflected
analyzer
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PCT/CN2016/071372
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English (en)
French (fr)
Inventor
刘为森
徐敏
王军华
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复旦大学
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Priority to GB1617404.7A priority Critical patent/GB2539844B/en
Publication of WO2016116036A1 publication Critical patent/WO2016116036A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested

Definitions

  • the invention belongs to the technical field of optical assembly, and particularly relates to an instrument capable of measuring and centering a center deviation of a coaxial optical component in an optical system.
  • optical centering instrument is an indispensable measuring instrument for measuring the center deviation of precision optical systems.
  • the optical centering accuracy is about 100 times that of the mechanical centering method. It plays an important role in optical lens bonding, optical system assembly and inspection.
  • the commonly used centering equipment generally adopts single-path reflection measurement method.
  • This method needs to measure two measurement surfaces before and after the lens in turn.
  • the measured value of the center deviation of the measurement surface is the composite value of the center deviation of the two measurement surfaces of the lens, which needs to be solved.
  • the center deviation of the measured surface is obtained, so the accuracy of the measured surface is always affected by the accuracy of the measurement of the front measuring surface, resulting in a cumulative effect of the error.
  • the dual optical path optical centering instrument can directly measure the center deviation of the two measuring surfaces of the lens, thereby eliminating the influence of the accuracy of the front measuring surface on the accuracy of the measuring surface and solving the error accumulation problem.
  • the optical path of one optical path of the dual optical path optical aligner transmits the optical component to be tested, and a strong stray light is formed in the other optical path, which interferes with the information light of the optical path, and even floods the information light.
  • the polarization beam splitter is used to generate two linearly polarized light paths whose polarization directions are perpendicular to each other, and the orthogonal design of the analyzer is used in the double optical path to eliminate the interference of the stray light on the information light.
  • Both measuring optical paths use air bearing turret
  • the rotation axis is used as the reference axis, and the center deviations of the two optical path measurements are all displayed in the same photodetector.
  • the same reference standard is beneficial to reduce the center deviation measurement error. Only one self-collimator produces a double optical path and uses a photodetector to achieve simultaneous measurement of dual optical paths, which is low in cost and improves centering efficiency.
  • the roundness meter detects the reset condition of the optical component to be tested, the operation is complicated, and the reset efficiency is low.
  • the dual optical path centering device can be used to fix the subsequent optical components, and the optical component to be tested can be quickly detected and quickly reset by the lower optical path, thereby improving the overall centering efficiency.
  • An object of the present invention is to provide an optical centering instrument which is low in manufacturing cost, high in measurement accuracy, and capable of simultaneously measuring the center deviation of two measuring surfaces of an optical component, thereby quickly achieving center deviation correction.
  • the optical centering instrument has the structure as shown in FIG. 1 , and is composed of a photodetector 1, a self-collimator 2, a polarizer 3, a polarization beam splitter 4, and three plane mirrors 5, 13, 14 , three analyzers 6, 7, 8, two close-range zoom telescopes 9, 10, an air bearing turntable 12, a roundness meter 15, a computer platform 16;
  • the self-collimator is used to provide a cross-image signal Parallel light, to the polarizer 3 to generate linearly polarized light, and the polarization beam splitter 4 generates S light and P light whose polarization directions are perpendicular to each other;
  • the S light passes through the first analyzer 6 and the second analyzer 7 and
  • the center of curvature of the upper surface of the lens measured by the optical component 11 to be tested fixed to the air bearing turret 12 is focused by the second close-range zoom telescope 10;
  • the P light is reflected by the first plane mirror 5 through the third analyzer 8 and
  • the photodetector 1 can be a CCD, CMOS or other photodetector. Place The photodetector can simultaneously take the cross image signal of the reflected S light and the transmitted P light, and simultaneously measure the center deviation of the upper and lower surfaces of the measured lens in the same coordinate system, thereby improving the center deviation measurement accuracy.
  • the rotary polarizer 3 may be a polarizing plate, a Nicol prism or the like.
  • the polarizer can change natural light into linearly polarized light, and by rotating the polarizer, the light intensity ratio of the reflected S light and the transmitted P light can be changed.
  • the polarization beam splitter 4 divides a bundle of linearly polarized light into reflected S light and transmitted P light whose polarization directions are perpendicular to each other.
  • the schematic diagram of the polarization beam splitter 4 is shown in Fig. 2.
  • the beam A is incident perpendicularly from the end face of the polarization beam splitter M1.
  • the P light is perpendicularly emitted from the end face M3
  • the S light is perpendicular from the end face M4.
  • the P light and the S light are linearly polarized light whose polarization directions are perpendicular to each other.
  • the analyzer is a polarizing plate.
  • the analyzer that reflects the S light and the transmitted P light path is orthogonal, and the polarization direction of the analyzer is the same as the polarization directions of the S light and the P light, respectively.
  • the reflected S light passing through the optical component to be tested cannot pass through the analyzer in the P light path, and the reflected P light passing through the optical component to be tested cannot pass through the analyzer in the S light path, thereby eliminating stray light. Interference with information light.
  • the polarization direction of the first analyzer 6 is the same as the polarization direction of the S light emitted from the M4 end face of the polarization beam splitter 4, and the second analyzer 7 can change the intensity of the S light, and the second analyzer 7
  • the S light intensity is the largest when parallel to the first analyzer 6 and the S light intensity is the smallest when orthogonal; the two cross image signals in the photodetector 1 and the two measuring surfaces of the lens are resolved by the second rotating analyzer 7 The corresponding situation of the center of curvature.
  • the first analyzer 6 and the third analyzer 8 are orthogonal, so the S light passing through the component to be tested 11 cannot pass through the third analyzer 8; similarly, the P light passing through the component 11 to be tested cannot pass the first inspection.
  • the polarizer 6 eliminates the interference of the stray light on the information light.
  • the rotation of the close-range zoom telescope can change its focal length, thereby focusing the reflected S light and the transmitted P light on the center of curvature of the measurement surface of the optical component to be tested.
  • the structure of the two close-range zoom telescopes is as shown in Fig. 3.
  • the positive lens in structure a, the common optical axis of L1 and L2, the focal positions of L1 and L2 are respectively L1 and L2, and H1 is the distance along the optical axis of lenses L1 and L2.
  • the parallel light incident on the close-range zoom telescope 3 is also parallel light. Change the distance H1 to change
  • the focal point of the outgoing beam can change the focal length of the close-range zoom telescope.
  • L7 is a negative lens
  • changing the distance H2 can also change the focal length of the close-range zoom telescope.
  • Rotating the close-range zoom telescope can change its focal length to focus the reflected S light and the transmitted P light at the center of curvature of the measurement surface.
  • the optical component 11 to be tested is composed of a lens barrel and a lens
  • the roundness meter 15 detects the coaxiality of the lens barrel of the optical component 11 to be tested and the air bearing turntable 12, and is displayed on the computer platform 16.
  • the air bearing turret 12 has a light passing hole, and has a leveling and aligning stage for fixing the optical component 11 to be tested.
  • the computer platform is configured to analyze the cross-image signal of the photodetector, calculate the center deviation of the surface to be measured by the optical component to be tested, and process the roundness meter detection result.
  • both the reflected S light and the transmitted P light use the rotating shaft of the air bearing turret 12 as the reference axis, which reduces the center deviation measurement error.
  • only one self-collimator 2 can provide a beam of two optical paths, which reduces the cost.
  • only one photodetector 1 can simultaneously display information of S light and P light, and information processing does not require coordinate conversion to reduce measurement error and reduce cost.
  • the rotating shaft of the air bearing turret 12 serves as a common reference axis for the S light and the P light, and the common reference axis reduces the transmission error during data processing, and the interference of strong stray light can be eliminated.
  • the doubly-light double-optical optical centering instrument provided by the invention can simultaneously detect the center deviation of the two measuring surfaces of the optical component, thereby improving the detection and centering efficiency.
  • the doubly-light double-optical optical centering instrument provided by the invention can simultaneously detect the center deviation of the two measuring surfaces of the optical component, solves the error accumulation problem in the single-light path centering instrument measurement, and improves the center deviation measurement accuracy.
  • the P light can be detected and the quick reset of the optical component 11 to be tested can be realized, instead of the roundness meter 15 detecting the reset condition of the optical component 11 to be tested, and the operation is reduced. Difficulty and improved detection efficiency.
  • Figure 1 is a structural view of a doubly-light dual-optical optical centering instrument.
  • FIG. 2 is a schematic diagram of the polarization beam splitter 4.
  • 3 is a structural view of the close-range zoom telescopes 9, 10.
  • optical component 11 to be tested is composed of a lens barrel E and lenses K1 and K2, wherein O1 and O2 are the centers of curvature of the upper and lower surfaces of the lens K1, and O3 and O4 are the centers of curvature of the upper and lower surfaces of the lens K2, D1.
  • the line connecting O1 and O2 is the optical axis of the lens K1, D2 is the line connecting O3 and O4, that is, the optical axis of the lens K2, and D3 is the axis of rotational symmetry of the lens barrel E.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

一种消杂光双光路光学定中仪，由光电探测器（1）、自准直仪（2）、起偏器（3）、偏振分束器（4）、检偏器（6，7，8）、变焦望远镜（9，10）和计算机平台（16）等组成；偏振分束器（4）将自准直仪（2）提供的平行光分为反射S光和透射P光；S光经过检偏器（6，7）并由变焦望远镜（10）聚焦在待测光学部件（11）所测镜片上表面的曲率中心；P光由平面反射镜（5）反射经过检偏器（8）并由变焦望远镜（9）聚焦在所测镜片下表面曲率中心；光电探测器（1）摄取两光路中反射光的十字像，计算机平台（16）计算所测镜片的中心偏差，根据镜片中心偏差调整镜片进行校正定中。该仪器成本低廉，测量精度高，能对光学部件两测量面中心偏差同时测量，高效快速实现中心偏差的校正。

Description

消杂光双光路光学定中仪 技术领域
本发明属于光学装配技术领域，具体涉及一种能对光学系统中的同轴光学部件的中心偏差进行测量并定中校正的仪器。
背景技术
近年来精密光学系统(如光刻机物镜、航测镜头、标准望远镜等)对镜头成像质量的要求越来越高。系统装配时镜片的光轴与参考轴之间会有偏差，即中心偏差。中心偏差的存在从根本上破坏了光学设计的理论基础—共轴理论，导致成像的像散性和畸变的不对称性，从而降低了成像质量。光学定中仪是测量精密光学系统中心偏差不可缺少的测量仪器，光学定中精度是机械定中方法的100倍左右，它在光学镜片胶合、光学系统装校和检测中都起着重要作用。
目前常用的定心设备普遍采用单光路反射式测量法，这种方法需要依次测量镜片前后两个测量面，后测量面中心偏差测量值是镜片两个测量面中心偏差的合成值，需要通过求解获得后测量面的中心偏差，因此后测量面的准确度总是受前测量面测量准确度的影响，造成误差的累积效应。双光路光学定中仪可以直接测量镜片两测量面的中心偏差，从而消除了前测量面准确度对后测量面准确度的影响，解决误差累积问题。
双光路光学定中仪一个光路的光束透射待测光学部件，就会在另一个光路中形成强杂光，对这个光路的信息光产生干扰，甚至会淹没信息光。利用偏振分束器产生两个偏振方向相互垂直的线偏振光光路，并在双光路中采用检偏器正交设计可以消除杂光对信息光的干扰。两个测量光路均使用空气轴承转台的 旋转轴作为参考轴，并且两个光路测量的中心偏差均在同一光电探测器中显示，相同的参考标准有利于减小中心偏测量误差。只用一个自准直仪产生双光路并用一个光电探测器实现双光路同时测量，成本低廉，并提高了定中效率。
光学系统镜片装配时，圆度仪检测待测光学部件的复位情况，操作复杂，复位效率低下。光学系统第一片镜片定中后，用双光路定中仪定中装配后续镜片时可以通过下光路实现待测光学部件的快速检测并迅速复位，提高了整体定中效率。
发明内容
本发明的目的在于提供一种制作成本低，测量精度高，并能对光学部件两测量面中心偏差同时进行测量，从而快速地实现中心偏差校正的光学定中仪。
本发明提供的光学定中仪，其结构如图1所示，由光电探测器1、自准直仪2、起偏器3、偏振分束器4、三个平面反射镜5、13、14，三个检偏器6、7、8，两个近距离变焦望远镜9、10，空气轴承转台12、圆度仪15、计算机平台16组成；所述自准直仪用于提供携带十字像信号的平行光，至起偏器3产生线偏振光，并由偏振分束器4产生偏振方向相互垂直的S光和P光；S光经过第一检偏器6、第二检偏器7并由第二近距离变焦望远镜10聚焦在固定在空气轴承转台12上的待测光学部件11所测镜片上表面的曲率中心；P光由第一平面反射镜5反射经过第三检偏器8并由第一近距离变焦望远镜9聚焦在所测镜片下表面曲率中心；S光和P光由所测镜片上下表面反射，并由光电探测器1摄取反射光的十字像信号，计算机平台16计算分析所测镜片的中心偏差，根据镜片中心偏差调整镜片进行校正定中；圆度仪15用于检测待测光学部件11的镜筒与空气轴承转台12的同轴性。
本发明中，所述光电探测器1可以为CCD、CMOS或其它光电探测器。所 述光电探测器可以同时摄取反射S光和透射P光的十字像信号，在同一坐标系中同时测量所测镜片上下表面的中心偏差，提高中心偏差测量精度。
本发明中，旋转起偏器3可以为偏振片、尼科耳棱镜等。所述起偏器可以将自然光变为线偏振光，通过旋转该起偏器可以改变反射S光和透射P光的光强比。
本发明中，偏振分束器4将一束线偏振光分为偏振方向相互垂直的反射S光和透射P光。偏振分束器4的原理图如图2所示，光束A从偏振分束器M1端面垂直入射，经过偏振分束面M2分束后，P光从端面M3垂直出射，S光从端面M4垂直出射，P光和S光为偏振方向相互垂直的线偏振光。
本发明中，所述检偏器为偏振片。反射S光和透射P光光路的检偏器正交，且上述检偏器透振方向分别与S光和P光偏振方向相同。通过待测光学部件的反射S光不能通过透射P光光路中的检偏器，同理通过待测光学部件的反射P光也不能通过透射S光光路中的检偏器，从而消除了杂光对信息光的干扰。具体而言，第一检偏器6透振方向与偏振分束器4的M4端面出射的S光偏振方向相同，第二检偏器7可以改变S光的光强，第二检偏器7和第一检偏器6透振方向平行时S光光强最大，正交时S光光强最小；通过第二旋转检偏器7分辨光电探测器1中两十字像信号与镜片两测量面曲率中心的对应情况。第一检偏器6和第三检偏器8正交，因此通过待测部件11的S光不能通过第三检偏器8；同理通过待测部件11的P光也不能通过第一检偏器6，从而消除了杂光对信息光的干扰。
本发明中，旋转所述近距离变焦望远镜可以改变其焦距，从而将反射S光和透射P光聚焦在待测光学部件的测量表面的曲率中心。所述两个近距离变焦望远镜结构如图3所示，结构a中正透镜，L1、L2共光轴，F1、F2分别为L1、L2的焦点位置，H1为透镜L1、L2沿光轴的距离，当焦点位置F1、F2相互重合时，平行光入射近距离变焦望远镜3出射光也为平行光。改变距离H1可改变 出射光束的汇聚点，即可以改变近距离变焦望远镜的焦距。同理结构b中，L7为负透镜，改变距离H2也可以改变近距离变焦望远镜的焦距。旋转所述近距离变焦望远镜可以改变其焦距，从而将反射S光和透射P光聚焦在测量面的曲率中心。
本发明中，待测光学部件11由镜筒和镜片组成，圆度仪15检测待测光学部件11镜筒与空气轴承转台12的同轴性，并在计算机平台16显示。
本发明中，所述空气轴承转台12有通光孔，并有调平调心载物台，载物台用于固定待测光学部件11。
本发明中，所述计算机平台用于分析光电探测器十字像信号，计算待测光学部件所测表面的中心偏差和处理圆度仪检测结果。
本发明中，反射S光和透射P光均使用空气轴承转台12旋转轴作为参考轴，减少了中心偏测量误差。
本发明中，只需一个自准直仪2即可提供两个光路的光束，降低了成本。
本发明中，只需一个光电探测器1可以同时显示S光和P光的信息，信息处理不需要坐标转换减少了测量误差，降低了成本。
本发明中，空气轴承转台12的旋转轴作为S光和P光共同参考轴，共参考轴减少了数据处理时的传递误差，可以消除强杂光的干扰。
本发明提供的消杂光双光路光学定中仪，能对光学部件两测量面中心偏差同时检测，提高了检测定中效率。
本发明提供的消杂光双光路光学定中仪，能对光学部件两测量面中心偏差同时检测，解决了单光路定中仪测量时误差累积问题，提高了中心偏差测量精度。
本发明装配含多个镜片的光学部件时，可以用P光检测并实现待测光学部件11的快速复位，代替圆度仪15检测待测光学部件11的复位情况，降低了操 作难度，提高了检测效率。
附图说明
图1为消杂光双光路光学定中仪的结构图。
图2为偏振分束器4的原理图。
图3为近距离变焦望远镜9、10的结构图。
图4为待测光学部件11的一种结构图。
图中标号：1为光电探测器；2为自准直仪；3为起偏器；4为偏振分束器；5、13、14为平面反射镜；6、7、8为检偏器；9、10为近距离变焦望远镜；11为待测光学部件；12为空气轴承转台；15为圆度仪；16计算机平台；M1、M3、M4为偏振分束器4的三个端面；M2为偏振分束器4的偏振分束面；L1、L2、L3为正透镜；L4为负透镜；F1、F2、F3、F4分别为L1、L2、L3、L4的焦点位置；H1为镜片L1、L2沿光轴的距离；H2为镜片L3、L4沿光轴的距离；K1、K2为镜片；E为镜筒；O1、O2为镜片K1上下表面的曲率中心；O4、O3为镜片K2上下表面的曲率中心；D1为O1、O2的连线；D2为O3、O4的连线；D3为镜筒E的旋转对称轴。
具体实施方式
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图对本发明的具体实施方式进行详细描述。
图4为待测光学部件11的一种结构，由镜筒E和镜片K1、K2组成，其中O1、O2为镜片K1上下表面的曲率中心，O3、O4为镜片K2上下表面的曲率中心，D1为O1、O2的连线即镜片K1的光轴，D2为O3、O4的连线即镜片K2的光轴，D3为镜筒E的旋转对称轴。具体步骤如下：
1)将待测光学部件11固定在空气轴承转台12上，旋转空气轴承转台12并用圆度仪15检测待测光学部件11的镜筒与空气轴承转台12的同轴性；
2)微调待测光学部件11的位置，使待测光学部件11的镜筒与空气轴承转台12的同轴性逐渐收敛至所允许的容差；
3)调节近距离变焦望远镜10使S光聚焦在镜片K2上表面的曲率中心O4,调节近距离变焦望远镜9使P光聚焦在镜片K2下表面的曲率中心O3；
4)由计算机平台16观察由光电探测器1摄取的十字像，旋转起偏器3调节两个十字像的亮度至合适的亮度，旋转检偏器7调节S光形成的十字像亮度，确定两十字像与曲率中心O3、O4的对应关系；
5)通过计算机平台16计算出镜片K2的倾斜量与偏移量，根据倾斜量与偏移量微调镜片K2；
6)通过重复步骤1-5循环测量直至旋转空气轴承时两十字像不动为止；
7)定中镜片K1时，检测待测光学部件11的镜筒与空气轴承转台12的同轴性不需要用圆度仪15检测，直接用定中仪S光检测镜片K2的同心性，快速复位待测光学部件11；
8)调节近距离变焦望远镜10使S光聚焦在镜片K1上表面的曲率中心O4,调节近距离变焦望远镜9使P光聚焦在镜片K1下表面的曲率中心O3；
9)由计算机平台16观察由光电探测器1摄取的十字像，旋转起偏器3调节两个十字像的亮度至合适的亮度，旋转检偏器7调节S光所形成的十字像亮度，确定两十字像与曲率中心O1、O2的对应关系；
10)通过计算机平台16计算出镜片K1像的倾斜量与偏移量，根据倾斜量与偏移量微调镜片K1；
11)通过重复步骤7-10循环测量直至旋转空气轴承时两十字像不动为止。

Claims (8)

  1. 一种消杂光双光路光学定中仪，其特征在于由光电探测器(1)、自准直仪(2)、起偏器(3)、偏振分束器(4)、三个平面反射镜(5、13、14)、三个检偏器(6、7、8)、两个近距离变焦望远镜(9、10)、空气轴承转台(12)、圆度仪(15)、计算机平台(16)组成；所述自准直仪用于提供携带十字像信号的平行光，至起偏器(3)产生线偏振光，并由偏振分束器(4)产生偏振方向相互垂直的S光和P光；S光经过第一检偏器(6)、第二检偏器(7)并由第二近距离变焦望远镜(10)聚焦在固定在空气轴承转台(12)上的待测光学部件(11)所测镜片上表面的曲率中心；P光由第一平面反射镜(5)反射经过第三检偏器(8)并由第一近距离变焦望远镜(9)聚焦在所测镜片下表面曲率中心；S光和P光由所测镜片上下表面反射，并由光电探测器(1)摄取反射光的十字像信号，计算机平台(16)计算分析所测镜片的中心偏差，根据镜片中心偏差调整镜片进行校正定中；圆度仪(15)用于检测待测光学部件(11)的镜筒与空气轴承转台(12)的同轴性。
  2. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于所述光电探测器为CCD、CMOS或其它光电探测器。
  3. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于所述起偏器为偏振片或尼科耳棱镜；所述起偏器将自然光变为线偏振光，通过旋转该起偏器改变反射S光和透射P光的光强比。
  4. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于所述检偏器为偏振片；反射S光和透射P光光路的检偏器正交，且上述检偏器透振方向分别与S光和P光偏振方向相同；通过待测光学部件的反射S光不能通过透射P光光路中的检偏器，同理通过待测光学部件的反射P光也不能通过透射S光光路中的检偏器。
  5. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于旋转所述近距离变焦望远镜，以改变其焦距，从而将反射S光和透射P光聚焦在待测光学部件的测量表面的曲率中心。
  6. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于所述空气轴承转台有通光孔，并有调平调心载物台，载物台用于固定待测光学部件。
  7. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于所述计算机平台用于分析光电探测器十字像信号，计算待测光学部件所测表面的中心偏差和处理圆度仪检测结果。
  8. 根据权利要求1所述的消杂光双光路光学定中仪，其特征在于反射S光和透射P光均使用空气轴承转台旋转轴作为参考轴。
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