WO2016072668A1

WO2016072668A1 - Movable element having two-dimensional halbach array without nonmagnetic space

Info

Publication number: WO2016072668A1
Application number: PCT/KR2015/011614
Authority: WO
Inventors: 전정우; 김종문
Original assignee: 한국전기연구원
Priority date: 2014-11-04
Filing date: 2015-11-02
Publication date: 2016-05-12
Also published as: KR20160052162A

Abstract

The present invention relates to a movable element to be used in a magnetic levitation stage device and, more specifically, to a movable element having a two-dimensional Halbach array without a nonmagnetic space, the movable element allowing square pillar shaped first type permanent magnets, in which the magnetic poles are respectively directed toward the upper and lower sides, and hexagonal pillar shaped second type permanent magnets, in which the magnetic poles are respectively directed toward the lateral sides, to be arranged in a two-dimensional Halbach array form such that there is no space filled with a nonmagnetic substance between the first type permanent magnets and the second type permanent magnets, thereby enabling precise position control by minimizing a distortion of magnetic flux. The present invention having the above configuration provides, as the subject matter thereof, a movable element having a two-dimensional Halbach array without a nonmagnetic space, wherein a plurality of first type permanent magnets, which are formed in a square pillar (hexahedron) shape and in which magnetic poles thereof are respectively directed toward the upper and lower sides, and a plurality of second type permanent magnets, which are formed in a hexagonal pillar shape and in which magnetic poles thereof are respectively directed toward the lateral sides, are arranged.

Description

Movable two-dimensional Halbach array without nonmagnetic space

The present invention relates to a mover used in a magnetically levitated stage apparatus, and more particularly, a first-class permanent magnet having a rectangular column shape in which the direction of the magnetic pole is located on the upper and lower sides, and a hexagonal column shape in which the direction of the magnetic pole is located on the side. By disposing the permanent magnet of type 2 in the form of a two-dimensional Halbach array, there is no space filled with nonmagnetic material between the permanent magnet of type 1 and the permanent magnet of type 2 so that the distortion of magnetic flux is minimized. The present invention relates to a mover having a two-dimensional Halbach arrangement without a nonmagnetic space that enables precise position control.

In general, a magnetic levitation stage is a device that is applied as a driving means of a magnetic levitation train or a transfer means of a semiconductor manufacturing facility by using the repulsive force and the suction force generated by the action of the mover and the coil.

The mover constituting the magnetically levitated stage is configured by arranging a plurality of permanent magnets in a predetermined arrangement. A one-dimensional array in which permanent magnets are arranged in a straight line and a two-dimensional array of permanent magnets in a matrix form according to the arrangement form. Distinguished by an array.

Here, the two-dimensional array is mainly used as the magnet array of the mover because it has the advantage that it can be configured in a large area while providing a relatively larger area than the one-dimensional array.

Meanwhile, among the two-dimensional arrays, the magnet array is mainly used a regular and logical two-dimensional Halbach array (Halbach array), which is shown in Figure 1 as the first pole of the rectangular column shape is located in the upper and lower direction of the magnetic pole A second permanent magnet having a rectangular column shape in which the magnets 66 are arranged in a plurality of rows and columns so that odd and even columns are alternated at regular intervals, and the direction of the magnetic pole is located on the side of the first permanent magnet 66 ( 62,64).

However, in the two-dimensional Halbach array, as described above, both the first permanent magnet 66 and the second permanent magnets 62 and 64 are configured in the shape of a square pillar, and thus the two first neighboring columns are arranged in a column as described above. Between the permanent magnets and between two neighboring first permanent magnets in a row, there is an empty space 68 which cannot determine the direction of the stimulus according to the arrangement rule.

This space is inevitably filled with a non-magnetic metal having a rectangular column shape corresponding to the shape of the first permanent magnet and the second permanent magnet so that the two-dimensional Halbach arrangement is maintained.

However, as described above, the space 68 filled with the non-magnetic metal does not have a magnetic pole, thereby causing the magnetic flux to be distorted by the first permanent magnet 66 and the second permanent magnets 62 and 64, thereby causing the mover 60 to move. There is a problem that the position control is not made precisely while the sudden inflection phenomenon occurs when the operation.

The present invention has been invented to solve the above problems, and in order to configure the mover by arranging the permanent magnets in a certain form, precise position control by eliminating the distortion of the magnetic flux flow caused by the space present in the two-dimensional Halbach array In order to enable the two-dimensional Halbach array, the first-class permanent magnet of the rectangular pillar shape located on the upper and lower sides of the magnetic pole and the second permanent magnet of the hexagonal column shape located on the side of the magnetic poles are two-dimensional. Its purpose is to provide a mover with a two-dimensional Halbach arrangement without a nonmagnetic space having a structure arranged with

The object of the present invention is not limited to the above-mentioned object, and other objects which are not mentioned will be clearly understood from the following description.

The movable member having a two-dimensional Halbach arrangement without a nonmagnetic space according to the present invention for achieving the above object is a plurality of first-class permanent magnets formed in the shape of a square pillar (hexahedron) located in the upper and lower directions of the magnetic poles, and The direction is located on the side and characterized in that arranged in a plurality of permanent magnets of the second type formed in a hexagonal column shape.

The permanent magnets of the first type are arranged in an alternating manner of alternating odd and even rows, and the permanent magnets of the second type are arranged in a diagonal direction between the permanent magnets of the first type and between the permanent magnets of the first type. The first side or the second side of the permanent magnet of the second type is in close contact with each side of the permanent magnet of the first type is arranged adjacent to one side of the third to sixth side of the permanent magnet of the second type One side of the third to sixth side of the second type permanent magnet is in close contact.

Directions of the magnetic poles located on the upper and lower surfaces of the first type permanent magnets of the odd-numbered row and the first type permanent magnets of the even-numbered row are respectively opposite to each other, and the direction of the magnetic poles located on each side of the second type permanent magnets is the first direction. It is characterized in that it is configured in accordance with the direction of the magnetic pole located on the upper and lower surfaces of the first type permanent magnet.

The first type permanent magnet and the second type permanent magnet are arranged in a flat shape, characterized in that having a flat plate shape.

The first type permanent magnet and the second type permanent magnet are characterized in that the upper and lower surfaces are composed of the same area.

The first type of permanent magnets and the second type of permanent magnets are arranged in a curved shape, characterized in that arranged in a planar shape, characterized in that having a cylindrical shape.

The first type permanent magnet and the second type permanent magnet are characterized in that the upper surface and the lower surface is a curved surface while the upper surface is composed of a relatively larger area than the lower surface.

According to the present invention, the non-magnetic metal generated in the existing two-dimensional Halbach array according to the configuration of the permanent magnet is divided into two types according to the form of two-dimensional Halbach array (Halbach array) By eliminating the space that can only be filled, it is expected to eliminate the distortion of the flux flow due to the space and to precisely control the position during operation.

1 is a plan view of a mover having a conventional two-dimensional Halbach arrangement.

2 is a plan view of a mover having a two-dimensional Halbach arrangement without a nonmagnetic space in accordance with a preferred embodiment of the present invention.

Figure 3 is a three-dimensional view showing a permanent magnet of the first type and the second type of permanent magnet of FIG.

4 is a perspective view of a mover having a two-dimensional Halbach arrangement without a nonmagnetic space in accordance with another preferred embodiment of the present invention.

5 is a three-dimensional view showing the first type permanent magnet and the second type permanent magnet of FIG.

A mover having a two-dimensional Halbach arrangement without a nonmagnetic space according to the present invention is a suction force generated between the coil as a component of a magnetically levitated stage applied as a driving means of a magnetically levitated train or a conveying means of a semiconductor manufacturing facility. It is a movable device which is position-controlled by the repulsion force.

In particular, a mover having a two-dimensional Halbach arrangement without a nonmagnetic space according to the present invention removes the space filled with nonmagnetic metal present in a conventional two-dimensional Halbach array, thereby causing magnetic flux induced by the space. It is characterized by precise position control by eliminating flow distortion.

This feature is characterized by the fact that the first type permanent magnets located in the upper and lower directions of the magnetic poles have a square pillar shape, and the second type permanent magnets located in the lateral direction of the magnetic poles have a hexagonal pillar shape. It is achieved by the structure arranged as.

Accordingly, despite the two-dimensional Halbach arrangement, the space is removed by the hexagonal column shape of the permanent magnet of the second type, so that a sudden inflection shape does not occur during position control, thereby enabling precise position control.

Hereinafter, a mover having a two-dimensional Halbach arrangement without a nonmagnetic space according to preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a plan view showing a mover having a two-dimensional Halbach arrangement without a nonmagnetic space in accordance with a preferred embodiment of the present invention, Figure 3 shows a first type permanent magnet and a second type permanent magnet of Figure 2 4 is a perspective view of a movable member having a two-dimensional Halbach arrangement without a nonmagnetic space according to another preferred embodiment of the present invention, and FIG. 5 is a first type permanent magnet and a second type of FIG. Three-dimensional view showing a permanent magnet.

The mover 100 having a two-dimensional Halbach arrangement without a nonmagnetic space according to a preferred embodiment of the present invention is located on the upper and

lower surfaces

110A and 110B as shown in FIGS. 2 and 3 and has a rectangular pillar shape (hexahedral shape). ) A plurality of first type permanent magnets 110 formed of a plurality of permanent magnets 110 and a plurality of second type permanent magnets 120 formed in a hexagonal column with the direction of the magnetic poles are located on the side (120C ~ 120H) in the form of a two-dimensional Halbach It is arranged by arrangement.

At this time, the first type permanent magnet 110 is arranged in such a manner that the odd rows (L1, L3, L5, L7) and even rows (L2, L4, L6) are alternately repeated. However, the first type permanent magnets 110 in the odd rows and the first type permanent magnets 110 in the even rows are arranged in a staggered form from side to side. That is, the even type first permanent magnets 110 are arranged to be positioned between the first type permanent magnets 110 of adjacent odd rows.

And the second type permanent magnet 120 is in close contact with the side of the first type permanent magnet 110 while being arranged in the diagonal direction (C1, C2) between the first type permanent magnet 110 as shown in FIG.

That is, four second type permanent magnets 120 are arranged in close contact with each one type 1 permanent magnet 110. However, the first type permanent magnets 110 are formed such that an angle formed by the side surfaces of the first type permanent magnets 110 and the first type permanent magnets 110 is preferably 45 degrees within an internal angle range within 90 degrees. It must be in a deployed state.

In addition, the first side surface 120C or the second side surface 120D of the second type permanent magnet 120 is in close contact with each side of the first type permanent magnet 110, the third of the permanent magnet 120 of the second type One side of the third to sixth side surfaces 120E to 120H of the second type permanent magnet 120 adjacent to one side of the side to sixth side surfaces 120E to 120H is in close contact with each other.

However, the first side surface 120C of the second type permanent magnet 120 is a side facing the side surface of the first type permanent magnet 110, and the second side surface 120D is opposite to the first side surface 120C. As a side surface, the third side surface 120E and the fourth side surface 120F are located between one side of the first side surface 120C and the second side surface 120D, and the fifth side surface 120G and the sixth side surface. 120H is defined as a side surface facing the third side surface 120E and the fourth side surface 120F, respectively.

Meanwhile, as shown in FIG. 2, odd-numbered rows L1, L3, L5, and L7 of the permanent magnet 110 of the first type are S-poles whose magnetic poles are directed from the upper surface 110A to the lower surface 110B. The even rows L2, L4 and L6 of the first permanent magnet 110 consist of N poles whose magnetic poles are directed from the lower surface 110B to the upper surface 110A.

Although not shown, the odd-numbered rows L1, L3, L5, and L7 of the permanent magnet 110 of the first type are N poles whose magnetic poles are directed from the lower surface 110B to the upper surface 110A. The even rows L2, L4, L6 of the magnet 110 may also be configured as S poles in which the direction of the magnetic pole is directed from the upper surface 110A to the lower surface 110B.

That is, odd rows L1, L3, L5, and L7 of the first type permanent magnet 110 and even rows L2, L4, and L6 are configured such that the directions of the magnetic poles located on the upper and

lower surfaces

110A and 110B are opposite to each other. do. And the direction of the magnetic pole located on each side (120C ~ 120H) of the second type permanent magnet 120 is in the direction of the magnetic pole located on the upper and lower surfaces (110A, 110B) of the first type permanent magnet 110 as shown in FIG. It is configured to fit.

As described above, the direction of the magnetic pole cannot be determined in the two-dimensional Halbach array by the arrangement according to the first type permanent magnet 110 having a square pillar shape and the second type permanent magnet 120 having a hexagonal pillar shape. Eliminate the space you had to fill with metal.

Here, the mover 100 having a two-dimensional Halbach arrangement without a nonmagnetic space according to a preferred embodiment of the present invention is the first type permanent magnet 110 and the second type permanent magnet 120 as shown in FIG. Arranged in a planar shape may be configured in a flat plate shape.

In this case, the upper surface 110A and the lower surface 110B of the first type permanent magnet 110 and the upper surface 120A and the lower surface 120B of the second type permanent magnet 120 are formed as shown in FIG. 3 so as to achieve a plane shape. It is preferable that it is comprised by the same area mutually.

In addition, the mover 100 having a two-dimensional Halbach arrangement without a nonmagnetic space according to another embodiment of the present invention is the first type permanent magnet 110 and the second type permanent magnet 120 as shown in FIG. It may be arranged in a curved shape may also be configured in a cylindrical shape.

In this case, the upper surface 110A and the lower surface 110B of the first type permanent magnet 110 and the upper surface 120A and the lower surface 120B of the second type permanent magnet 120 may have a cylindrical shape as shown in FIG. 5. It is preferable that the upper surface is composed of a relatively larger area than the lower surface while forming a curved surface.

As described above, the mover having the two-dimensional Halbach arrangement without the nonmagnetic space according to the present invention eliminates the space filled with the nonmagnetic metal to eliminate the distortion of the flux flow due to the space, thereby preventing sudden inflection caused during operation. This enables precise position control.

The above embodiments are merely exemplary, and those having ordinary skill in the art may have other embodiments modified in various ways.

Therefore, the true technical protection scope of the present invention should include not only the above embodiment but also various other embodiments modified by the technical spirit of the invention described in the claims below.

The present invention relates to a mover used in a magnetically levitated stage apparatus, and more particularly, a first-class permanent magnet having a rectangular column shape in which the direction of the magnetic pole is located on the upper and lower sides, and a hexagonal column shape in which the direction of the magnetic pole is located on the side. By disposing the permanent magnet of type 2 in the form of a two-dimensional Halbach array, there is no space filled with nonmagnetic material between the permanent magnet of type 1 and the permanent magnet of type 2 so that the distortion of magnetic flux is minimized. And a two-dimensional Halbach arrangement without a nonmagnetic space to enable precise position control.

Claims

Characterized in that the direction of the magnetic pole is arranged on the upper and lower sides and formed of a plurality of first type permanent magnets in the shape of a square pillar (hexahedron), and the plurality of the second type permanent magnets arranged in the hexagonal shape with the direction of the magnetic poles arranged on the side A mover with a two-dimensional Halbach arrangement without a nonmagnetic space.
The method of claim 1,

The first type permanent magnets are arranged in an alternating form of alternating odd and even rows alternately and the second type permanent magnets are arranged in a diagonal direction between the first type permanent magnets,

Each side surface of the first type permanent magnet is in close contact with the first side or the second side of the second type permanent magnet and the one side of the third to sixth side of the permanent magnet of the second type A mover having a two-dimensional Halbach arrangement without a nonmagnetic space, wherein one side of the third to sixth sides of the second type permanent magnet is in close contact.
The method of claim 2,

The direction of the magnetic poles respectively located on the upper and lower surfaces of the first type permanent magnets of the odd-numbered rows and the first type permanent magnets of the even-numbered rows are opposite to each other,

The direction of the magnetic poles located on each side of the permanent magnet of the second type has a two-dimensional Halbach arrangement without a nonmagnetic space, characterized in that it is configured in accordance with the direction of the magnetic poles located on the upper and lower surfaces of the permanent magnet of the first type. Mover.
The method of claim 1,

And the first type permanent magnet and the second type permanent magnet are arranged in a planar shape to have a flat plate shape.
The method of claim 4.

The first type permanent magnet and the second type permanent magnet is a mover having a two-dimensional Halbach arrangement without a non-magnetic space, characterized in that the upper surface and the lower surface is composed of the same area.
The method of claim 1,

The first type permanent magnets and the second type permanent magnets are arranged in a curved shape and arranged in a planar shape, characterized in that having a cylindrical shape, a non-magnetic space-free two-dimensional Halbach array having an array .
The method of claim 6,

The first type permanent magnet and the second type permanent magnet have a two-dimensional Halbach arrangement without a nonmagnetic space, wherein the upper and lower surfaces form a curved surface and the upper surface is formed with a relatively larger area than the lower surface. Having mover.