WO2016070494A1 - 一种高分辨率光谱仪的设计方法以及光谱仪 - Google Patents

一种高分辨率光谱仪的设计方法以及光谱仪 Download PDF

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WO2016070494A1
WO2016070494A1 PCT/CN2015/070172 CN2015070172W WO2016070494A1 WO 2016070494 A1 WO2016070494 A1 WO 2016070494A1 CN 2015070172 W CN2015070172 W CN 2015070172W WO 2016070494 A1 WO2016070494 A1 WO 2016070494A1
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incident
spectrometer
concave grating
photodetector
grating
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PCT/CN2015/070172
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French (fr)
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倪凯
周倩
逄锦超
张锦超
田瑞
许明飞
董昊
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清华大学深圳研究生院
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum

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  • the present invention relates to a method of designing a spectrometer, and more particularly to a method of designing a spectrometer using a concave grating and a spectrometer.
  • the spectrometer By designing the parameters of the concave grating, the incident angle of the incident slit and the relative position between the devices, the spectrometer is built to realize the detection of light waves in a certain range of wavelengths.
  • the spectrometer built under the existing design method can realize the light wave detection in a wide spectral region, but the corresponding resolution in the spectral detection region is low, which cannot meet the demanding application.
  • simply relying on optimizing the image quality of the concave grating cannot increase the resolution of the grating without limitation.
  • the technical problem to be solved by the present invention is to make up for the deficiencies of the above prior art, and to propose a spectrometer design method and a spectrometer, which have higher resolution in most spectral regions, and the spectrometer cost does not increase too much.
  • a design method for a high-resolution spectrometer by designing a spectrometer using a concave grating, two incident slits and a photodetector, and the spectral detection range of the spectrometer is ⁇ 1 ⁇ ⁇ 4 ;
  • the relationship between the two incident angles is determined by the grating equation satisfying the incident angles of the two incident slits; 3) according to the spectrometer
  • a high resolution spectrometer comprising a concave grating, two incident slits and a photodetector, the fabrication parameters of the concave grating and the position of the two incident slits and a photodetector relative to the concave grating according to The design method described is determined.
  • the spectrometer design method of the present invention first determines the cutoff points ⁇ 2 and ⁇ 3 in the spectral detection regions ( ⁇ 1 ⁇ ⁇ 4 ), and then determines two incident slits according to the principle of multiplexing one photodetector in two wavelength ranges.
  • the relative position between the entrance slit and a photodetector is constructed to obtain a spectrometer.
  • the built spectrometer can achieve the desired target and detect light waves in the range of ⁇ 1 ⁇ ⁇ 4 .
  • the spectrometer of the invention realizes double incident slit incidence, and the two incident angles satisfy a certain relationship. Compared with the conventional spectrometer, only one incident slit is passed, and the spectrometer of the invention separately performs spectral detection on two bands through two incident slits.
  • the spectrometer is designed for the two bands ⁇ 1 ⁇ ⁇ 2 and ⁇ 3 ⁇ ⁇ 4 of the two incident slits respectively, and is designed for the entire band ⁇ 1 ⁇ ⁇ 4 by only one incident slit with respect to the existing design.
  • the spectrometer of the present invention can better fit the optimal imaging point at each wavelength, so that the spectrometer has a higher resolution in the entire light wave detection range.
  • the present invention improves the spectrometer resolution, only one incident slit needs to be added without additional additional components, and the spectrometer volume and cost are effectively controlled.
  • FIG. 1 is a schematic view showing the optical path structure of a spectrometer according to an embodiment of the present invention
  • FIG. 2 is a flow chart of a spectrometer design method according to an embodiment of the present invention.
  • FIG. 3 is a schematic diagram showing the comparison of resolutions of a new structure spectrometer and a general spectrometer at various wavelengths in the specific embodiment of the invention.
  • FIG. 1 it is a schematic diagram of the optical path structure of the spectrometer to be designed for the specific embodiment.
  • the spectrometer includes two incident slits, a concave grating, and a photodetector.
  • the photodetector may preferably be a photomultiplier tube, a pyroelectric detector, a semiconductor photodetector or a CCD (Charge-coupled Device) array detector, but is not limited to these.
  • a 1 and A 2 are incident slits
  • B 1 B 2 is the entire photodetector
  • the B 1 B 4 region on the photodetector corresponds to a spectral detection of wavelength range ⁇ 3 to ⁇ 4
  • B 3 B 2 The region corresponds to a spectral region having a wavelength range of ⁇ 1 to ⁇ 2 .
  • a coordinate system is established with the center O point of the concave grating G as a coordinate origin, and an incident slit, a concave grating G, and a photodetector B 1 B 2 are sequentially disposed on the optical path in accordance with the propagation direction of the light.
  • the parameters of the concave grating G and the positions of the entrance slit and the photodetector are designed by the following design method to construct a concave grating spectrometer capable of detecting light waves having wavelengths in the range of ⁇ 1 to ⁇ 4 .
  • light is irradiated after first converging emitted spectral A 1 through an entrance slit to the photodetector concave grating G B B 3 B 2 on the region 1 B 2, the wavelength range ⁇ 1 ⁇ ⁇ 2; second incident
  • the light emitted by the slit A 2 after being concentrated by the concave grating G is irradiated to the B 1 B 4 region on the photodetector B 1 B 2 , and the wavelength range is ⁇ 3 ⁇ ⁇ 4 , where ⁇ 1 ⁇ 2 ⁇ ⁇ 3 ⁇ 4 .
  • P1 determining the values of the wavelengths ⁇ 2 and ⁇ 3 , dividing the entire spectral detection range into two band ranges, ⁇ 1 ⁇ ⁇ 2 and ⁇ 3 ⁇ ⁇ 4 , where ⁇ 1 ⁇ ⁇ 2 ⁇ ⁇ 3 ⁇ ⁇ 4 .
  • the two incident slits respectively correspond to the detected wavelength range, specifically according to the target requirement of the designer to design the spectrometer. For example, if the spectrum detection focuses on a certain two small sections in the detection range, the values of ⁇ 2 and ⁇ 3 can be correspondingly divided into corresponding two small sections.
  • the two band ranges collectively cover the entire spectral detection range.
  • the relationship between the incident angles of the two incident slits is determined by the grating equation satisfying the incident angles of the two incident slits.
  • the incident angles of the two incident slits are incident on the concave grating, respectively satisfying the following grating equations.
  • the grating constant d is also used as an unknown
  • step P3 determining the relationship between the two incident slits determined in step P2) according to the fixed structural parameters of the grating and the four wavelength values determined in step P1), and determining the recorded structural parameters and the use structure based on the optical path function series expansion method parameter.
  • the optical path function series expansion method is implemented by using MATLAB software, and the recording structure parameters are determined according to the fixed structure parameter of Table 1, the four wavelength values, and the relationship between the two incident angles, that is, a port J'.
  • the structural parameters used are shown in Table 2.
  • r 1 and r 2 respectively represent the polar diameters of the two incident points in the polar coordinates when the concave grating is fabricated by holography; ⁇ 1 and ⁇ 2 represent the polar diameter r 1 and the polar diameter r 2 and the x-axis, respectively.
  • Angle. r A1 and r A2 represent the polar lengths of the two incident slits in polar coordinates, and ⁇ A1 and ⁇ A2 represent the angles between the polar diameters r A1 and r A2 of the incident point and the x-axis, that is, the aforementioned incident incidence.
  • Angles; B 1 and B 2 are coordinate values of the two ends of the photodetector B 1 B 2 in a Cartesian coordinate system.
  • L is the length of the photodetector.
  • step P4 determining the fabrication parameters of the concave grating according to the recording structure parameters obtained in step P3), and obtaining a concave grating satisfying the application.
  • a holographic method can be used to produce a concave grating that satisfies the application requirements.
  • step P5 the positions of the two incident slits and one photodetector relative to the concave grating are determined, thereby constructing a spectrometer.
  • the spectrometer can be constructed directly using the structural parameters obtained as described above.
  • the optical design software ZEMAX software is used to adjust and optimize the recording structure parameters obtained in step P3), and the optimized use structural parameters are obtained, and the spectrometer is constructed according to the optimized use structural parameters. It can avoid mutual interference between the incident slit and the photodetector during the actual construction process, and can further improve the resolution of the spectrometer.
  • the position of the concave grating, the slit and the detector can be determined by the polar length information, the angle information and the coordinate information, and the optical path is constructed to obtain a concave grating spectrometer.
  • the spectrometer is designed. Spectrometer design work, light exposure after exiting the spectroscopic converging entrance slit of a first concave grating G by A 1 to B 3 B 2 the photodetector region, the wavelength range B 1 B 2 is ⁇ 1 ⁇ ⁇ 2; Second The light emitted from the incident slit A 2 after being concentrated by the concave grating G is irradiated to the B 1 B 4 region on the photodetector B 1 B 2 , and the wavelength range is ⁇ 3 ⁇ ⁇ 4 , where ⁇ 1 ⁇ 2 ⁇ ⁇ 3 ⁇ 4 . When the light wave is detected, the two incident slits and the photodetector do not interfere with each other.
  • the first incident slit A 1 When it is necessary to detect the short wavelength band ( ⁇ 1 ⁇ ⁇ 2 ), the first incident slit A 1 is opened, and the second incident slit A 2 is blocked; when it is necessary to detect the long wavelength band ( ⁇ 3 ⁇ ⁇ 4 )
  • the concave grating spectrometer designed in the specific embodiment can realize light wave detection in the range of ⁇ 1 to ⁇ 4 .
  • the two incident slits are used to detect the two bands respectively, so that the spectra of the two bands can be optimized separately, thereby improving the resolution at most wavelengths in the spectrum.
  • the concave grating spectrometer provided by the specific embodiment realizes the improvement of the spectral resolution and the cost is effectively controlled under the condition that only one incident slit is added without adding other components.
  • a general spectrometer designed for a general design flow is set, and the performance improvement of the spectrometer of the present embodiment is verified by comparing the resolutions of the spectrometer and the ordinary spectrometer of the present embodiment.
  • Ordinary spectrometer including concave grating, an entrance slit, and a photodetector.
  • the incident angle is obtained, the structural parameters are recorded, and the structural parameters are used.
  • a spectrometer is constructed by determining the position of the entrance slit and a photodetector relative to the concave grating based on the angle of incidence and using structural parameters.
  • the resolution of the grating spectrometer and the above-mentioned ordinary spectrometer at each wavelength (190 nm to 800 nm) in the present embodiment is obtained, as shown in FIG.
  • the grid line fill is the resolution of the spectrometer of the new structure of this embodiment at each wavelength; the unfilled is the ordinary spectrometer at each wavelength The resolution at the place.
  • the two structures are in the same situation (the "same case” means that they are all designed using the optical path function series expansion method, and are all optimized using zemax software; in the same band range, one piece of the same length is used.
  • the resolution of the new structure spectrometer with two incident slits is significantly better than that of one incident slit in other spectral ranges. Ordinary spectrometer. Overall, the overall resolution of the new structure spectrometer of this embodiment has been improved.
  • the spectrometer of the invention can better fit the optimal imaging point at each wavelength, so that the resolution of the spectrometer in the entire light wave detection range is high.
  • the resolution at all wavelengths cannot be improved in the new structure, the resolution at most wavelengths is improved, and the resolution at the unimproved position is maintained at a considerable level, thereby improving the broad spectrum spectrometer.

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Abstract

一种高分辨率光谱仪的设计方法以及光谱仪，使用凹面光栅（G）、两个入射狭缝（A1、A2）和一个光探测器（B1B2）搭建光谱仪，包括以下步骤：1）确定波长λ 2和λ 3的值，将整个光谱检测范围划分为两个波段范围；2）根据两个波段范围复用一个光探测器的原则，由两个入射狭缝的入射角满足的光栅方程确定两个入射角之间的关系式；3）确定得到记录结构参数和使用结构参数；4）根据记录结构参数确定凹面光栅的制作参数，得到满足应用的凹面光栅；5）根据使用结构参数初值确定两个入射狭缝和一个光探测器相对于凹面光栅的位置，从而搭建得到光谱仪。这种设计方法得到的光谱仪，能提高大部分光谱区域内的分辨率。

Description

一种高分辨率光谱仪的设计方法以及光谱仪 【技术领域】
本发明涉及光谱仪的设计方法，特别是涉及一种使用凹面光栅的光谱仪的设计方法以及光谱仪。
【背景技术】
近年来，由于环境检测、生物医学、科技农业、军事分析以及工业流程监控等一些需要现场实时测试的应用领域的现代化发展，实验室中的大型光谱仪器已难以满足上述实际使用要求。开发便携式小型光谱仪器产品具有重要的实际意义以及广阔的市场前景。现有小型光谱仪中，有使用凹面光栅进行搭建的光谱仪，通常包括凹面光栅、入射狭缝和光探测器。通过对凹面光栅的制作参数、入射狭缝的入射角度以及各器件之间的相对位置进行设计调整，从而搭建光谱仪，实现在某一波段范围内的光波检测。然而，现有的设计方法下搭建的光谱仪，虽然能实现宽光谱区域的光波检测，但在光谱检测区域内对应的分辨率却较低，无法满足高要求的应用。目前，对于光谱仪分辨率的提高，单纯依靠优化凹面光栅的像质不可能无限制提高光栅的分辨率。
【发明内容】
本发明所要解决的技术问题是：弥补上述现有技术的不足，提出一种光谱仪的设计方法及光谱仪，在大部分光谱区域内具有较高的分辨率，且光谱仪成本也不会增加太多。
本发明的技术问题通过以下的技术方案予以解决：
一种高分辨率光谱仪的设计方法，通过设计，使用凹面光栅、两个入射狭缝和一个光探测器搭建光谱仪，且所述光谱仪的光谱检测范围为λ1～λ4；所述设计方法包括以下步骤：1)确定波长λ2和λ3的值，将整个光谱检测范围划分为两个波段范围，分别为λ1～λ2和λ3～λ4；其中，λ1＜λ2≤λ3＜λ4；2)根据两个波段范围复用一个光探测器的原则，由两个入射狭缝的入射角满足的光栅方程确定两个入射角之间的关系式；3)根据光谱仪的固定结构参数和步骤1)确定的四个波长值，步骤2)中确定的两个入射角之间的关系式，基于光程函数级数展开法，确定得到记录结构参数和使用结构参数；4)根据步骤3)得到的记录结构参数确定所述凹面光栅的制作参数，得到满足应用的凹面 光栅；5)根据步骤3)得到的使用结构参数，确定两个入射狭缝和一个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。
一种高分辨率光谱仪，包括凹面光栅、两个入射狭缝和一个光探测器，所述凹面光栅的制作参数以及两个入射狭缝和一个光探测器相对于所述凹面光栅的位置根据如上所述的设计方法确定得到。
本发明与现有技术对比的有益效果是：
本发明的光谱仪的设计方法，先确定光谱检测区域(λ1～λ4)内的截止点λ2和λ3，然后根据两个波段范围复用一个光探测器的原则确定两个入射狭缝的入射角之间的关系式，进而根据确定的两个入射角的关系式和四个波长值进行光学设计，得到记录结构参数和使用结构参数，进而确定凹面光栅的结构以及凹面光栅与两个入射狭缝、一个光探测器之间的相对位置，搭建得到光谱仪。该搭建的光谱仪能实现预期目标，检测λ1～λ4范围内的光波。本发明的光谱仪实现双入射狭缝入射，且两个入射角满足一定关系，相对于传统的光谱仪仅通过一个入射狭缝，本发明的光谱仪通过两个入射狭缝分别对两个波段进行光谱检测，光谱仪设计时分别针对两个入射狭缝的两个波段λ1～λ2、λ3～λ4进行设计，相对于现有设计时仅通过一个入射狭缝针对整个波段λ1～λ4进行设计，本发明的光谱仪能更好的拟合各个波长处的最佳成像点，从而光谱仪在整个光波检测范围内的分辨率较高。本发明改善光谱仪分辨率时，仅需增加一个入射狭缝而不需要额外添加其它元件，光谱仪体积和成本得到有效控制。
【附图说明】
图1是本发明具体实施方式的光谱仪的光路结构示意图；
图2是本发明具体实施方式的光谱仪设计方法的流程图；
图3是发明具体实施方式中新结构的光谱仪与普通光谱仪在各波长处的分辨率对比示意图。
【具体实施方式】
下面结合具体实施方式并对照附图对本发明做进一步详细说明。
如图1所示，为本具体实施方式要设计的光谱仪的光路结构示意图。光谱仪包括两个入射狭缝、凹面光栅和一个光探测器。光探测器优选的可以采用光电倍增管、热电探测器、半导体光探测器或者CCD(Charge-coupled Device，电荷耦合器件)阵列探测器，但并非限制于这几种。图1中，A1、A2为入射狭缝，B1B2为整个光探测器，光 探测器上B1B4区域对应波长范围为λ3～λ4的光谱检测、B3B2区域对应波长范围为λ1～λ2的光谱区域。以凹面光栅G的中心O点为坐标原点建立坐标系，依光的传播方向，在光路上依次设置入射狭缝、凹面光栅G和光探测器B1B2。凹面光栅G的参数以及入射狭缝、光探测器的位置通过如下设计方法设计得到，从而搭建出能够检测波长范围在λ1～λ4的光波的凹面光栅光谱仪。经设计搭建，第一入射狭缝A1经凹面光栅G汇聚分光后出射的光线照射到光探测器B1B2上的B3B2区域，波长范围为λ1～λ2；第二入射狭缝A2经凹面光栅G汇聚分光后出射的光线照射到光探测器B1B2上的B1B4区域，波长范围为λ3～λ4，其中，λ1＜λ2≤λ3＜λ4。
设计方法的流程图如图2所示，包括以下步骤：
P1)确定波长λ2和λ3的值，将整个光谱检测范围划分为两个波段范围，分别为λ1～λ2和λ3～λ4；其中，λ1＜λ2≤λ3＜λ4。
本步骤中，确定两个入射狭缝分别对应检测的波长范围，具体地根据设计者设计光谱仪的目标要求来确定。例如希望光谱检测重点关注检测范围内的某两个小段区间时，可相应取λ2和λ3的值，从而划分为对应的两个小段区间。当取λ2＝λ3时，两个波段范围共同覆盖整个光谱检测范围。优选地，将整个光谱检测范围等分，均分为两个波段范围，使两个入射狭缝分别对应检测一半。此时，
Figure PCTCN2015070172-appb-000001
本具体实例中，将整个光谱分为长度相等地两段，得到λ2＝λ3＝495nm。四个波长值分别为：λ1＝190nm，λ2＝495nm，λ3＝495nm，λ4＝800nm。
P2)根据两个波段范围复用一个光探测器的原则，由两个入射狭缝的入射角满足的光栅方程确定两个入射狭缝的入射角之间的关系式。
具体地，两个入射狭缝的入射角入射到凹面光栅上，分别满足如下光栅方程
Figure PCTCN2015070172-appb-000002
其中，m＝1，d表示光栅常数，θA1表示第一入射狭缝的入射角度，θA2表示第二入射狭缝的入射角度；θBλ1表示波长为λ1的光波通过第一入射狭缝时的出射角度，θBλ2表示波长为λ2的光波通过第二入射狭缝时的出射角度，而当两个波段范围复用一个光探测器时，有关系式sinθBλ1＝sinθBλ2，从而得到两个入射狭缝的入射角之间的关系
Figure PCTCN2015070172-appb-000003
当带入m以及前述步骤P1)确定的波长λ1和λ2的值，可确定本具体实施方式中两个入射角之间的关系式为：
Figure PCTCN2015070172-appb-000004
此处光栅常数d也作为未知数，在后续光程函数级数展开法求解过程求解得到，求解的记录结构参数中包含光栅常数d的信息。
P3)根据光栅的固定结构参数以及步骤P1)确定的四个波长值，步骤P2)确定的两个入射狭缝的关系式，基于光程函数级数展开法，确定得到记录结构参数和使用结构参数。
当需要搭建光谱仪时，其固定结构参数，例如光谱检测范围值，选用的凹面光栅的曝光波长、工作级次、边长、基底曲率半径、光栅常数的范围，选用的两个入射狭缝的高度等固有属性参数是已知的。本具体实例中，凹面光栅光谱仪的固定结构参数如表1所示：
表1
光谱范围 190nm～800nm
凹面光栅的曝光波长 441.6nm
凹面光栅的工作级次 +1
入射狭缝宽度 5μm
凹面光栅边长 20mm
凹面光栅基底曲率半径 83.684mm
光栅常数d/mm 1/1200～1/350
本具体实施方式中，使用MATLAB软件实现光程函数级数展开法，根据表l的固定结构参数、四个波长值以及两个入射角之间的关系式即一口J‘确定得到记录结构参数和使用结构参数如表2所示。
表2
Figure PCTCN2015070172-appb-000005
Figure PCTCN2015070172-appb-000006
其中，r1和r2分别代表利用全息法制作凹面光栅时的两个入射点在极坐标下的极径长度；θ1和θ2分别代表极径r1和极径r2与x轴的夹角。rA1、rA2代表两个入射狭缝在极坐标下的极径长度，θA1、θA2代表入射点的极径rA1、rA2分别与x轴的夹角，也即前述确定的入射角；B1、B2为光探测器B1B2的两端在笛卡尔坐标系内的坐标值。L为光探测器的长度。
P4)根据步骤P3)得到的记录结构参数确定所述凹面光栅的制作参数，得到满足应用的凹面光栅。按照上述记录结构参数，使用全息法即可制作出满足应用要求的凹面光栅。
P5)根据步骤P3)得到的使用结构参数，确定两个入射狭缝和一个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。
该步骤中，可直接用前述得到的使用结构参数搭建光谱仪。但考虑到实际搭建过程中的实现问题，优选地，采用光学设计软件ZEMAX软件对步骤P3)得到的记录结构参数调整、优化，得到优化后的使用结构参数，按照优化后的使用结构参数搭建光谱仪，可避免实际搭建过程中入射狭缝与光探测器的相互干扰，也可进一步提高光谱仪的分辨率。
本具体实施方式中，使用ZEMAX软件优化，输入表2中的记录结构参数和使用结构参数，得到优化的使用结构参数如表3所示。
表3
Figure PCTCN2015070172-appb-000007
Figure PCTCN2015070172-appb-000008
根据表3优化后的使用结构参数，由其中的极径长度信息，角度信息以及坐标信息即可确定凹面光栅、狭缝、探测器的位置，搭建光路，从而得到凹面光栅光谱仪。
综上，即设计得到光谱仪。设计的光谱仪工作时，第一入射狭缝A1经凹面光栅G汇聚分光后出射的光线照射到光探测器B1B2的B3B2区域，波长范围为λ1～λ2；第二入射狭缝A2经凹面光栅G汇聚分光后出射的光线照射到光探测器B1B2上的B1B4区域，波长范围为λ3～λ4，其中，λ1＜λ2≤λ3＜λ4。光波检测时，两个入射狭缝与光探测器相互不干扰。当需要检测短波段(λ1～λ2)时，所述第一入射狭缝A1被打开，第二入射狭缝A2被遮住；当需要检测长波段(λ3～λ4)时，所述第二入射狭缝A2被打开，第一入射狭缝A1被遮住，最终可实现λ1～λ2和λ3～λ4范围内的光波检测，当取λ2＝λ3时，也即λ1～λ4范围内的光波检测。
本具体实施方式设计的凹面光栅光谱仪，能实现λ1～λ4范围内的光波检测。而光波检测过程中，采用双入射狭缝，分别对应检测两个波段，从而能够对两个波段的光谱分别进行优化设计，因此提高了光谱中大部分波长处的分辨率。本具体实施方式提供的凹面光栅光谱仪，在仅增加一个入射狭缝无需增加其它元件的条件下，实现了光谱分辨率的提高，成本得到有效控制。
如下，设置普通设计流程设计的普通光谱仪，通过比较本具体实施方式的光谱仪和普通光谱仪的分辨率，验证本具体实施方式的光谱仪在分辨率方面的性能提升。
普通光谱仪：包括凹面光栅，一个入射狭缝，一个光探测器。首先，根据光谱仪的固定结构参数，基于光程函数级数展开法和zemax软件优化，得到入射角度，记录结构参数以及使用结构参数。根据入射角度和使用结构参数确定入射狭缝和一个光探测器相对于凹面光栅的位置，从而搭建得到光谱仪。
使用ZEMAX软件模拟，得到本具体实施方式中光栅光谱仪和上述普通光谱仪在各波长(190nm～800nm)下的分辨率情况，如图3所示。带格子线填充的是本具体实施方式的新结构的光谱仪在各个波长处的分辨率；未填充的是普通光谱仪在各个波长 处的分辨率。如图3可知，两种结构在相同情况(所述“相同情况”指：均采用光程函数级数展开法进行设计，均使用zemax软件优化；在相同的波段范围内，都采用一块长度相同的探测器)下，除了在波长310nm和720nm处两种结构的分辨率相当之外，在其它光谱范围内，采用两个入射狭缝的新结构光谱仪的分辨率要明显优于一个入射狭缝的普通光谱仪。总体来看，本具体实施方式的新结构光谱仪的整体分辨率有所提高。
综上，本具体实施方式中，通过采用两个衍射狭缝，分别对应检测两个波段，从而能够对两个波段的光谱分别进行设计，相对于现有设计时仅通过一个入射狭缝针对整个波段λ1～λ4进行设计，本发明的光谱仪能更好的拟合各个波长处的最佳成像点，从而光谱仪在整个光波检测范围内的分辨率较高。虽然新结构中不能做到所有波长处的分辨率均有所提高，但大部分波长处的分辨率均有提高，未提高处的分辨率也维持在一个相当的水平，从而改善了宽光谱光谱仪大部分光谱区域分辨率较低的问题。
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明，不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说，在不脱离本发明构思的前提下做出若干替代或明显变型，而且性能或用途相同，都应当视为属于本发明的保护范围。

Claims (7)

  1. 一种高分辨率光谱仪的设计方法，其特征在于：通过设计，使用凹面光栅、两个入射狭缝和一个光探测器搭建光谱仪，且所述光谱仪的光谱检测范围为λ1～λ4；所述设计方法包括以下步骤：
    1)确定波长λ2和λ3的值，将整个光谱检测范围划分为两个波段范围，分别为λ1～λ2和λ3～λ4；其中，λ1＜λ2≤λ3＜λ4；
    2)根据两个波段范围复用一个光探测器的原则，由两个入射狭缝的入射角满足的光栅方程确定两个入射角之间的关系式；
    3)根据光谱仪的固定结构参数和步骤1)确定的四个波长值，步骤2)中确定的两个入射角之间的关系式，基于光程函数级数展开法，确定得到记录结构参数和使用结构参数；
    4)根据步骤3)得到的记录结构参数确定所述凹面光栅的制作参数，得到满足应用的凹面光栅；
    5)根据步骤3)得到的使用结构参数，确定两个入射狭缝和一个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。
  2. 根据权利要求1所述的高分辨率光谱仪的设计方法，其特征在于：所述步骤2)中，具体按照如下方程确定：
    Figure PCTCN2015070172-appb-100001
    Figure PCTCN2015070172-appb-100002
    sinθBλ1＝sinθBλ2，其中，m＝1，d表示光栅常数，θA1表示第一入射狭缝的入射角度，θA2表示第二入射狭缝的入射角度；θBλ1表示波长为λ1的光波通过第一入射狭缝时的出射角度，θBλ2表示波长为λ2的光波通过第二入射狭缝时的出射角度；化简后可得两入射狭缝的入射角的关系式为：
    Figure PCTCN2015070172-appb-100003
  3. 根据权利要求1所述的高分辨率光谱仪的设计方法，其特征在于：所述步骤1)中根据如下公式确定波长λ2的值：
    Figure PCTCN2015070172-appb-100004
    从而使整个光谱检测范围均分为两个波段范围。
  4. 根据权利要求1所述的高分辨率光谱仪的设计方法，其特征在于：所述步骤5)包括对步骤3)得到的使用结构参数采用光学设计软件ZEMAX软件进行优化后得到优化后的使用结构参数，根据优化后的使用结构参数确定两个入射狭缝和一个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。
  5. 根据权利要求1所述的高分辨率光谱仪的设计方法，其特征在于：所述步骤1)中，所述光谱仪的固定结构参数包括光谱检测范围值，所述凹面光栅的曝光波长、工作级次、边长、基底曲率半径、光栅常数，所述两个入射狭缝的宽度。
  6. 一种高分辨率光谱仪，其特征在于：包括凹面光栅、两个入射狭缝和一个光探测器，所述凹面光栅的制作参数以及两个入射狭缝和一个光探测器相对于所述凹面光栅的位置根据权利要求1～5任一项所述的设计方法确定得到。
  7. 根据权利要求6所述的高分辨率光谱仪，其特征在于：所述光探测器为光电倍增管、热电探测器、半导体光探测器或CCD阵列探测器。
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