WO2016061910A1 - 一种双入射狭缝光谱仪的设计方法以及双入射狭缝光谱仪 - Google Patents

一种双入射狭缝光谱仪的设计方法以及双入射狭缝光谱仪 Download PDF

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WO2016061910A1
WO2016061910A1 PCT/CN2015/070173 CN2015070173W WO2016061910A1 WO 2016061910 A1 WO2016061910 A1 WO 2016061910A1 CN 2015070173 W CN2015070173 W CN 2015070173W WO 2016061910 A1 WO2016061910 A1 WO 2016061910A1
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incident
wavelength
angle
concave grating
diffraction efficiency
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English (en)
French (fr)
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倪凯
周倩
逄锦超
张锦超
田瑞
许明飞
董昊
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清华大学深圳研究生院
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Priority to JP2016554788A priority Critical patent/JP6257065B2/ja
Publication of WO2016061910A1 publication Critical patent/WO2016061910A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum

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  • the invention relates to a design method of a spectrometer, in particular to a design method of a double incident slit spectrometer using a concave grating and a double incident slit spectrometer.
  • the spectrometer By designing the parameters of the concave grating, the incident angle of the incident slit and the relative position between the devices, the spectrometer is built to realize the detection of light waves in a certain range of wavelengths.
  • the spectrometer built under the existing design method can realize the light wave detection in a wide spectral region, but the corresponding diffraction efficiency in a partial spectral region is low, which cannot meet the demanding application.
  • the technical problem to be solved by the present invention is to make up for the deficiencies of the above prior art, and to propose a design method of a double incident slit spectrometer and a double incident slit spectrometer, which has high diffraction efficiency and overall diffraction in most spectral regions. More efficient.
  • a design method of a double incident slit spectrometer wherein a spectrometer is constructed by using a concave grating, two incident slits and two photodetectors, and the spectral detection range of the spectrometer is ⁇ 1 ⁇ ⁇ 4 ;
  • the method comprises the following steps: 1) calculating, according to a fixed structural parameter of the spectrometer, an incident angle value at a single incident slit and a groove shape of the concave grating under the incident angle value based on an optical path function series expansion method a period, the obtained incident angle value is taken as the value of the incident angle ⁇ A1 of the first incident slit; 2) estimating the blaze angle of the concave grating, determining the surface material and the groove structure of the concave grating; 3) according to the spectrum a blazed condition, determining an incident angle range satisfying the spectral blazing condition at the same blaze angle with the incident angle ⁇ A1 , the incident angle range being
  • a dual incident slit spectrometer comprising a concave grating, two incident slits and two photodetectors, fabrication parameters of the concave grating and two incident slits and two photodetectors relative to the concave grating The position is determined according to the design method described above.
  • the design method of the dual incident slit spectrometer of the present invention first determines a single incident angle value, and then determines another incident angle by the diffraction efficiency of each wavelength at an angle ⁇ A1 and the diffraction efficiency in the estimated angular range of ⁇ A2 . And the band cutoff points ⁇ 2 and ⁇ 3 in the spectral detection region ( ⁇ 1 ⁇ ⁇ 4 ), and then optically design according to the determined two incident angles and four wavelength values, thereby obtaining recording structural parameters and using structural parameters, thereby determining
  • the structure of the concave grating and the relative position between the concave grating and the two incident slits and the two photodetectors are constructed to obtain a spectrometer.
  • the built spectrometer can achieve the desired target and detect light waves in the range of ⁇ 1 ⁇ ⁇ 4 .
  • the spectrometer achieves dual-angle luminescence through double-incident slits, achieving dual-wavelength blaze. Only one blaze wavelength can be achieved compared to existing spectrometers.
  • the spectrometer designed by the present invention uses a large-angle incident slit to illuminate the wavelength phase. The incident slit incident at a smaller angle will move toward the short-wave portion, thereby achieving two different blazed wavelengths at two different incident angles, thereby improving the diffraction efficiency, and the majority of the spectral region can be improved relative to the existing spectrometer.
  • the diffraction efficiency, and the ratio of the band region where the diffraction efficiency is as high as 0.4 also accounts for the proportion of the entire light wave detection range (up to 81.9% or more).
  • FIG. 1 is a schematic view showing the optical path structure of a double incident slit spectrometer according to an embodiment of the present invention
  • FIG. 2 is a flow chart of a method for designing a double incident slit spectrometer according to an embodiment of the present invention
  • 3 is a graph showing a wavelength-diffraction efficiency curve obtained at an incident angle ⁇ A1 in the step P3) at the time of design in the embodiment of the present invention
  • FIG. 4 is a schematic view showing the comparison of the diffraction efficiencies of the new structure spectrometer and the ordinary spectrometer at various wavelengths in the embodiment of the invention.
  • FIG. 1 it is a schematic diagram of the optical path structure of the dual incident slit spectrometer to be designed for the specific embodiment.
  • the spectrometer consists of two incident slits, a concave grating and two photodetectors.
  • the photodetector may preferably be a photomultiplier tube, a pyroelectric detector, a semiconductor photodetector or a CCD (Charge-coupled Device) array detector, but is not limited to these.
  • a 1 and A 2 are incident slits
  • B 1 B 2 and B 1 'B 2 ' are photodetectors.
  • a coordinate system is established with the center O point of the concave grating G as a coordinate origin, and an incident slit, a concave grating G, and a photodetector are sequentially disposed on the optical path in accordance with the light propagation direction.
  • the parameters of the concave grating G and the positions of the entrance slit and the photodetector are designed by the following design method to construct a concave grating spectrometer capable of detecting light waves having wavelengths in the range of ⁇ 1 to ⁇ 4 .
  • a 1 via entrance slit of the first concave grating spectroscope G after converging a light beam emitted to the optical detector is irradiated on the B 1 'B 2', the wavelength range ⁇ 3 ⁇ ⁇ 4;
  • a 2 second entrance slit The light emitted by the concave grating G after being split and irradiated is irradiated onto the photodetector B 1 B 2 in a wavelength range of ⁇ 1 to ⁇ 2 , where ⁇ 1 < ⁇ 2 ⁇ ⁇ 3 < ⁇ 4 .
  • the incident angle value at the single incident slit and the slot period of the concave grating under the incident angle value are calculated based on the optical path function series expansion method, and the incident incidence is obtained.
  • the angle value is taken as the value of the incident angle ⁇ A1 of the first incident slit.
  • the fixed structural parameters such as the spectral detection range value, the exposure wavelength of the concave grating, the working order, the side length, the base curvature radius, the grating constant, and the width of the two incident slits selected are inherent.
  • the attribute parameters are known.
  • the incident angle of the grating at a single incident slit can be calculated by using the optical path function series expansion method, and the groove period of the concave grating under the incident angle value can be obtained at the same time.
  • the calculated incident angle is taken as the value of the incident angle ⁇ A1 of the first incident slit.
  • the fixed structural parameters of the spectrometer are as shown in Table 1 below:
  • Spectral detection range 190nm ⁇ 800nm Exposure wavelength of concave grating 441.6nm Work level of concave grating +1 Incident slit width 5 ⁇ m Concave grating side length 30mm Concave grating base radius of curvature 83.684mm Grating constant d/mm 1/650 ⁇ 1/350
  • the method is as follows, and the blaze angle can be estimated more accurately and quickly.
  • PCGrate obtained using the first software when the corresponding concave grating at an incident angle ⁇ A1 a plurality of wavelengths in the range ( ⁇ 0, ⁇ 0 +100) were used as a blaze wavelength - diffraction efficiency curve, select the entire detection range of the spectrum
  • the average value of the diffraction efficiency in the long wavelength range is higher than the average value of the diffraction efficiency in the range at other wavelengths, and the variance of the diffraction efficiency in the range is smaller than the variance at other wavelengths ( ⁇ y )
  • the blaze angle is estimated.
  • ⁇ 0 represents the wavelength at which the spectrometer has a relatively high average value of the diffraction efficiency of the concave grating over the entire spectral detection range when the incident angle ⁇ A1 is incident, and the variance is relatively small, that is, the grating is only provided with one incident narrow
  • the blazed wavelength of the spectrometer built at the time of sewing When it is determined that ⁇ 0 is expressed, a plurality of wavelengths in the entire spectrum detection range may be used as blazed wavelengths, and the average value and variance of the diffraction efficiency curve may be determined.
  • the diffraction efficiency curves corresponding to each wavelength are interlaced with each other, and the curves corresponding to some wavelengths have higher values in the long wavelength band and lower values in the short wavelength band; while the curves corresponding to some wavelengths have higher values in the short wavelength band, in the long wavelength band.
  • the time value is lower. Therefore, considering the overall value, the value of the curve is relatively high (the average value is high), and the corresponding wavelength is the blazed wavelength when the change is gentle (the variance is small).
  • a plurality of wavelengths in the range (310, 350) for example, five wavelengths of 310 nm, 320 nm, 330 nm, 340 nm, and 350 nm, can be obtained by using PCGrate software at an incident angle ⁇ A1 , 310 nm, 320 nm, 330 nm, 340 nm, 350 nm.
  • Five wavelength-diffraction efficiency curves were obtained as the blaze wavelengths respectively.
  • the average of the diffraction efficiency of the long-wavelength range (the spectral range of 190 to 800 nm, the long-wavelength of 300 nm to 800 nm) is compared with the other four.
  • the average value of the diffraction efficiency of the long wavelength band at one wavelength is high, and the corresponding variance is lower than the diffraction efficiency of the long wavelength band at the other four wavelengths (that is, the curve is gentle), and 340 nm is used as the final blaze wavelength.
  • the blaze angle ⁇ 4.5°.
  • the average value and variance of the diffraction efficiency can be directly obtained by calculation.
  • the diffraction efficiency curve can also be judged directly by the designer according to the diffraction efficiency curve. If the diffraction efficiency is high in most areas of the long-wavelength range, the average value can be considered to be relatively high, and the diffraction efficiency varies in the long-wavelength range. If you are flat, you can determine that the variance is relatively low, without accurately calculating the average value of the mean and variance.
  • the surface material and the groove structure of the concave grating can be freely selected by the designer.
  • an A1 type material customized in PCGrate is used as the surface material, and the groove shape is zigzag.
  • Other materials, other groove types, such as a trapezoidal structure, may be selected and applied, and are not limited to the above examples.
  • the spectral blaze condition determines, according to the spectral blaze condition, an incident angle range satisfying the spectral blazing condition at the same blaze angle with the incident angle ⁇ A1 , the incident angle range being the range of the incident angle ⁇ A2 of the second incident slit, the blaze angle
  • the value takes the value of the blazed angle estimated in the step P2); the wavelength-diffraction efficiency curve of the concave grating when the incident angle is ⁇ A1 , and the plurality of incident angles distributed in the second incident slit a wavelength-diffraction efficiency curve of the concave grating at an angle;
  • the design method of this embodiment is designed to achieve two incident angles of incidence by the same grating spectrometer optical path, and the second incident angle is a larger incident angle with respect to the first incident angle. Therefore, the incident angle ⁇ A1 and the incident angle ⁇ A2 should satisfy the same spectral blazed condition equation.
  • the incident angle range can be determined from the incident angle ⁇ A1 and the spectral blaze condition equation as the range of the incident angle ⁇ A2 of the second incident slit.
  • ⁇ A2 the value of ⁇ A2 can be solved according to the above two equations.
  • ⁇ b varies within the range of ( ⁇ 0 -100, ⁇ 0 )
  • the corresponding range of the incident angle ⁇ A2 is obtained.
  • ⁇ 0 is determined as described above, and the grating only sets the blazed wavelength of the spectrometer built when the incident slit is formed. In this embodiment, the determined range is -35° to -45°.
  • the corresponding wavelength-diffraction efficiency graph at the corresponding angle can be obtained using the raster design software PCGrate software.
  • the surface material and the groove structure of the concave grating determined in step P2) are input into the grating design software PCGrate software, and the wavelength-diffraction efficiency curve of the concave grating and the incident angle distribution are obtained respectively when the incident angle is ⁇ A1 .
  • the incident angle For multiple angles in the range of angle of incidence -35 ° ⁇ -45 °, for example, -35 °, -37 °, -40 °, -43 ° and -45 ° can be selected as the incident angle, respectively, the five Wavelength-diffraction efficiency graph at incident angle.
  • the angle is selected, the design accuracy is higher, but the corresponding workload is also larger.
  • Corresponding wavelength-diffraction efficiency graphs at various angles are obtained correspondingly, and the shape of the curve is similar to that of FIG. 3, except that there is movement in the horizontal direction and the vertical direction, which are not enumerated here.
  • step P4 determining, according to the wavelength-diffraction efficiency curve at a plurality of incident angles obtained in step P3), an angle as a value of the incident angle ⁇ A2 of the second incident slit; a wavelength-diffraction efficiency curve and ⁇ according to the angle ⁇ A1
  • the comparison of the wavelength-diffraction efficiency curves at the A2 angle determines the values of the wavelengths ⁇ 2 and ⁇ 3 .
  • the spectral detection range is 190-800 nm
  • the short-wavelength range is 190 nm-300 nm.
  • the incident angle of the other incident slit and the values of the two wavelengths ⁇ 2 , ⁇ 3 are obtained.
  • the grating blaze angle ⁇ 4.5° is estimated.
  • the concave grating and the relative positional arrangement between the optics are designed based on this information as follows.
  • optical design software ZEMAX software is used for parameter optimization to obtain the recorded structural parameters and the use of structural parameters.
  • the optical design software ZEMAX software is used to bring in two angle values, four wavelength values and the fixed structure parameter values in Table 1 to optimize the parameters, and the obtained recording structure is obtained.
  • the parameters and usage structure parameters are shown in Table 2.
  • r 1 and r 2 respectively represent the polar diameters of the two incident points in the polar coordinates when the concave grating is fabricated by holography; ⁇ 1 and ⁇ 2 represent the polar diameter r 1 and the polar diameter r 2 and the x-axis, respectively.
  • Angle. r A1 and r A2 represent the polar lengths of the two incident slits in polar coordinates, and ⁇ A1 and ⁇ A2 represent the angles between the polar diameters r A1 and r A2 of the incident point and the x-axis, that is, the aforementioned incident incidence.
  • Angles; B 1 , B 2 , B 1 ', B 2 ' are coordinate values of the ends of the photodetectors B 1 B 2 and B 1 'B 2 ' in a Cartesian coordinate system.
  • step P6 determining the fabrication parameters of the concave grating according to the groove period of the concave grating in step P1), the blaze angle of the concave grating of step P2), the surface material and the groove structure, and the recording structure parameters obtained in step P5) A concave grating that satisfies the application. According to the above parameters, a holographic method can be used to produce a concave grating that meets the application requirements.
  • step P7) According to the use of the structural parameters obtained in step P5), the positions of the two incident slits and the two photodetectors relative to the concave grating are determined, thereby constructing a spectrometer. According to the length and length information of the structural parameters, the angle information and the coordinate information can determine the position of the concave grating, the slit and the detector, and build the optical path to obtain the concave grating spectrometer.
  • the spectrometer is designed.
  • the spectrometer design work light exposure after exiting the spectroscopic converging entrance slit of a first concave grating G by A 1 to B 1 on the photodetectors 'B 2', the wavelength range ⁇ 3 ⁇ ⁇ 4; second entrance slit
  • the light emitted by A 2 after being concentrated by the concave grating G is irradiated onto the photodetector B 1 B 2 , and the wavelength range is ⁇ 1 ⁇ ⁇ 2 , where ⁇ 1 ⁇ ⁇ 2 ⁇ ⁇ 3 ⁇ ⁇ 4 .
  • the two photodetectors B 1 B 2 and B 1 'B 2 ' do not interfere with each other during spectral detection.
  • the second incident slit A 2 is opened, the first incident slit A 1 is blocked; when it is necessary to detect the long wavelength band ( ⁇ 3 ⁇ ⁇ 4 )
  • the first incident slit A 1 is opened, and the second incident slit A 2 is concealed, and finally, light wave detection in the range of ⁇ 1 ⁇ ⁇ 2 and ⁇ 3 ⁇ ⁇ 4 can be realized, and ⁇ 2 is equal to ⁇ 3 That is, light wave detection in the range of ⁇ 1 to ⁇ 4 .
  • the detection it is necessary to detect the short-band ⁇ 1 to ⁇ 2 first, and then use the +2-order spectrum of the short-band ⁇ 1 to ⁇ 2 to eliminate the influence of the detection of the long-band ⁇ 3 to ⁇ 4 .
  • the concave grating spectrometer designed in the specific embodiment can realize light wave detection in the range of ⁇ 1 to ⁇ 4 .
  • the small-angle incident slit corresponds to the spectrum of the long-wavelength range
  • the large-angle incident slit corresponds to the spectrum of the short-wavelength range.
  • the distance of most of the spectral distance from the blazed wavelength becomes closer, and the diffraction efficiency is improved, so that the overall diffraction efficiency is improved.
  • a general spectrometer designed for a general design flow is set, and the performance of the spectrometer of the present embodiment in terms of diffraction efficiency is verified by comparing the diffraction efficiency curves of the spectrometer of the present embodiment with a general spectrometer.
  • Ordinary spectrometer including concave grating, one incident slit, two photodetectors.
  • the incident angle is obtained, the structural parameters are recorded, and the structural parameters are used.
  • the PCGrate software is used to find the blaze wavelength which makes the average value of the diffraction efficiency of the whole band relatively high and the variance is relatively small, and then according to the blaze wavelength. Get the blaze angle.
  • the fabrication parameters of the concave grating are determined according to the blaze angle and the recording structure parameters, and the concave grating satisfying the application is obtained.
  • the position of the incident slit and the two photodetectors relative to the concave grating is determined according to the incident angle and the structural parameters, thereby establishing spectrometer.
  • the diffraction efficiency value at each wavelength (190 nm to 800 nm) of the grating spectrometer and the above conventional spectrometer in the present embodiment was calculated using PCGrate software, and has a graph of diffraction efficiency as shown in FIG.
  • the dashed line is the diffraction efficiency of the spectrometer of the new structure of the present embodiment at each wavelength, the incident angle is -7°, -40°, respectively;
  • the solid line is the diffraction efficiency of the ordinary spectrometer at each wavelength, and the incident angle is -4.8°. .
  • the two structures are in the same case (the "same case” means: using the same material, the same spectral range, and the other design parameters are the same in the diffraction efficiency analysis except for the incident angle and the blaze angle)
  • the diffraction efficiency is improved by about 0 to 10% in the range of 230 nm to 235 nm, 330 nm to 380 nm, and 780 nm to 800 nm, and the diffraction efficiency is in the range of 380 nm to 780 nm and 190 nm to 230 nm. 10% to 14% improvement.
  • the wavelength of diffraction efficiency greater than 0.4, 0.5, and 0.6 in the new structure spectrometer accounts for 81.97%, 69.67%, and 55.74%, while the common structure accounts for 67.21 and 52.46%. 37.70%.
  • the diffraction efficiency of the low-bandwidth spectrum of the broad spectrum spectrometer is improved.
  • the new structure sacrifices the diffraction efficiency of some bands, the diffraction efficiency distribution of the spectrometer is optimized as a whole, thereby improving the diffraction efficiency of most spectral regions of the broad spectrum spectrometer.

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Abstract

一种双入射狭缝光谱仪的设计方法以及双入射狭缝光谱仪，使用凹面光栅（G）、两个入射狭缝（A1、A2）和两个光探测器（B1B2、B1'B2'）搭建光谱仪，包括以下步骤：1）确定第一入射狭缝的入射角以及凹面光栅的槽型周期；2）估算凹面光栅的闪耀角，确定凹面光栅的表面材料和槽型结构；3）估算入射角范围；获取入射角度为θA1时和分布在入射角范围内的多个角度下凹面光栅的波长一衍射效率曲线；4）确定入射角θA2的值以及波长λ2和λ3的值；5）得到记录结构参数以及使用结构参数；6）确定凹面光栅的制作参数；7）确定两个入射狭缝和两个光探测器相对于凹面光栅的位置，从而搭建得到光谱仪。这种设计方法得到的光谱仪，能提高大部分光谱区域内的衍射效率。

Description

一种双入射狭缝光谱仪的设计方法以及双入射狭缝光谱仪 【技术领域】
本发明涉及光谱仪的设计方法，特别是涉及一种使用凹面光栅的双入射狭缝光谱仪的设计方法以及双入射狭缝光谱仪。
【背景技术】
近年来，由于环境检测、生物医学、科技农业、军事分析以及工业流程监控等一些需要现场实时测试的应用领域的现代化发展，实验室中的大型光谱仪器已难以满足上述实际使用要求。开发便携式小型光谱仪器产品具有重要的实际意义以及广阔的市场前景。现有小型光谱仪中，有使用凹面光栅进行搭建的光谱仪，通常包括凹面光栅、一个入射狭缝和多个探测器。通过对凹面光栅的制作参数、入射狭缝的入射角度以及各器件之间的相对位置进行设计调整，从而搭建光谱仪，实现在某一波段范围内的光波检测。然而，现有的设计方法下搭建的光谱仪，虽然能实现宽光谱区域的光波检测，但在部分光谱区域内对应的衍射效率却较低，无法满足高要求的应用。
【发明内容】
本发明所要解决的技术问题是：弥补上述现有技术的不足，提出一种双入射狭缝光谱仪的设计方法及双入射狭缝光谱仪，在大部分光谱区域内具有较高的衍射效率，整体衍射效率较高。
本发明的技术问题通过以下的技术方案予以解决：
一种双入射狭缝光谱仪的设计方法，通过设计，使用凹面光栅、两个入射狭缝和两个光探测器搭建光谱仪，且所述光谱仪的光谱检测范围为λ1～λ4；所述设计方法包括以下步骤：1)根据所述光谱仪的固定结构参数，基于光程函数级数展开法计算得到在单一入射狭缝时的入射角度值和所述入射角度值下所述凹面光栅的槽型周期，将得到的入射角度值作为第一入射狭缝的入射角θA1的值；2)估算所述凹面光栅的闪耀角，确定所述凹面光栅的表面材料和槽型结构；3)根据光谱闪耀条件，确定出与入射角度θA1满足同一闪耀角下的光谱闪耀条件的入射角范围，将该入射角范围作为第二入射狭缝的入射角θA2的范围，闪耀角的值取所述步骤2)估算的闪耀角的值；获取入射角度为θA1时所述凹面光栅的波长-衍射效率曲线，以及分布在所述第二入射狭缝的入射角 范围内的多个角度下所述凹面光栅的波长-衍射效率曲线；4)根据步骤3)得到的多个入射角度下的波长-衍射效率曲线确定一个角度作为第二入射狭缝的入射角θA2的值；根据角度为θA1时的波长-衍射效率曲线和θA2角度下的波长-衍射效率曲线的对比，确定波长λ2和λ3的值；5)根据得到的两个入射角θA1、θA2的值，四个波长λ1、λ2、λ3、λ4的值以及所述光谱仪的固定结构参数，基于光程函数级数展开法，使用光学设计软件ZEMAX软件进行参数优化，得到记录结构参数以及使用结构参数；6)根据步骤1)中的凹面光栅的槽型周期，步骤2)的凹面光栅的闪耀角、表面材料和槽型结构以及步骤5)得到的记录结构参数确定所述凹面光栅的制作参数，得到满足应用的凹面光栅；7)根据步骤5)得到的使用结构参数，确定两个入射狭缝和两个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。
一种双入射狭缝光谱仪，包括凹面光栅、两个入射狭缝和两个光探测器，所述凹面光栅的制作参数以及两个入射狭缝和两个光探测器相对于所述凹面光栅的位置根据如上所述的设计方法确定得到。
本发明与现有技术对比的有益效果是：
本发明的双入射狭缝光谱仪的设计方法，先确定单一入射角度值，然后通过各波长在角度θA1下的衍射效率以及估算的θA2的角度范围内的衍射效率情况，确定另外一个入射角度以及光谱检测区域(λ1～λ4)内的波段截止点λ2和λ3，进而根据确定的两个入射角度和四个波长值进行光学设计，得到记录结构参数和使用结构参数，进而确定凹面光栅的结构以及凹面光栅与两个入射狭缝、两个光探测器之间的相对位置，搭建得到光谱仪。该搭建的光谱仪能实现预期目标，检测λ1～λ4范围内的光波。光谱仪通过双入射狭缝实现双角度入射，从而实现双波长闪耀，相对于现有的光谱仪仅能实现一个闪耀波长，本发明设计的光谱仪在使用大角度入射的入射狭缝时，其闪耀波长相比小角度入射的入射狭缝会向短波部分移动，从而实现在两个不同的入射角下有两个不同的闪耀波长，从而提高衍射效率，相对于现有的光谱仪，可提高大部分光谱区域的衍射效率，且衍射效率高达0.4的波段区域占整个光波检测范围的比例也有所提高(达81.9％以上)。
【附图说明】
图1是本发明具体实施方式的双入射狭缝光谱仪的光路结构示意图；
图2是本发明具体实施方式的双入射狭缝光谱仪设计方法的流程图；
图3是本发明具体实施方式中设计时步骤P3)中在入射角度θA1时得到的波长-衍射效率曲线图；
图4是发明具体实施方式中新结构的光谱仪与普通光谱仪在各波长处的衍射效率对比示意图。
【具体实施方式】
下面结合具体实施方式并对照附图对本发明做进一步详细说明。
如图1所示，为本具体实施方式要设计的双入射狭缝光谱仪的光路结构示意图。光谱仪包括两个入射狭缝、凹面光栅和两个光探测器。光探测器优选的可以采用光电倍增管、热电探测器、半导体光探测器或者CCD(Charge-coupled Device，电荷耦合器件)阵列探测器，但并非限制于这几种。图1中，A1、A2为入射狭缝，B1B2、B1’B2’为光探测器。以凹面光栅G的中心O点为坐标原点建立坐标系，依光的传播方向，在光路上依次设置入射狭缝、凹面光栅G和光探测器。凹面光栅G的参数以及入射狭缝、光探测器的位置通过如下设计方法设计得到，从而搭建出能够检测波长范围在λ1～λ4的光波的凹面光栅光谱仪。经设计搭建，第一入射狭缝A1经凹面光栅G汇聚分光后出射的光线照射到光探测器B1’B2’上，波长范围为λ3～λ4；第二入射狭缝A2经凹面光栅G汇聚分光后出射的光线照射到光探测器B1B2上，波长范围为λ1～λ2，其中，λ1＜λ2≤λ3＜λ4。
设计方法的流程图如图2所示，包括以下步骤：
P1)确定第一入射狭缝的入射角以及凹面光栅的槽型周期。具体地，根据光谱仪的固定结构参数，基于光程函数级数展开法计算得到在单一入射狭缝时的入射角度值和所述入射角度值下所述凹面光栅的槽型周期，将得到的入射角度值作为第一入射狭缝的入射角θA1的值。
当需要搭建光谱仪时，其固定结构参数，例如光谱检测范围值，选用的凹面光栅的曝光波长、工作级次、边长、基底曲率半径、光栅常数，选用的两个入射狭缝的宽度等固有属性参数是已知的。根据固定结构参数，使用光程函数级数展开法即可计算得到光栅在单一入射狭缝时的入射角度，并可同时得到所述入射角度值下所述凹面光栅的槽型周期。将该计算的入射角度作为第一入射狭缝的入射角θA1的值。本具体实施例中，光谱仪的固定结构参数如下表1所示：
表1
光谱检测范围 190nm～800nm
凹面光栅的曝光波长 441.6nm
凹面光栅的工作级次 +1
入射狭缝宽度 5μm
凹面光栅边长 30mm
凹面光栅基底曲率半径 83.684mm
光栅常数d/mm 1/650～1/350
从上述参数也可知，λ1＝190nm，λ4＝800nm。根据表1中的固定结构参数，计算得到入射角为-7°，槽型周期为每毫米450个，则θA1＝-7°。
P2)估算凹面光栅的闪耀角，确定凹面光栅的表面材料和槽型结构。
估算闪耀角时，可使用常规的方法进行估算。优选地，采用如下方法进行，可较为准确且快速地估算得到闪耀角。先使用PCGrate软件得到入射角度θA1下，在(λ0，λ0+100)的范围内的多个波长分别作为闪耀波长时对应的凹面光栅的波长-衍射效率曲线，选取整个光谱检测范围内的长波段范围内衍射效率的平均值相对于其它波长时的该范围内的衍射效率的平均值要高、且该范围内衍射效率的方差相对于其它波长时方差要小时的一个波长(λy)作为最终的闪耀波长，进而估算得到闪耀角。其中，λ0表示光谱仪在仅入射角θA1入射时，使所述凹面光栅在整个光谱检测范围的衍射效率的平均值相对较高、方差相对较小时的波长，也即光栅仅设置一个入射狭缝时搭建的光谱仪的闪耀波长。确定λ0表示时，可取整个光谱检测范围内的多个波长分别作闪耀波长，判断衍射效率曲线的平均值、方差。各波长对应的衍射效率曲线彼此交错在一起，有些波长对应的曲线在长波段时值较高，在短波段时值较低；而有些波长对应的曲线在短波段时值较高，在长波段时值较低。因此，综合考虑，曲线的值相对较高(平均值较高)，且变化平缓(方差较小)时对应的波长作为闪耀波长。
本具体实施方式中，当仅一个入射角度θA1＝-7°入射时，对于检测光谱范围为190nm～800nm的光谱仪，可检测确定300nm作为闪耀波长时，相对于其它波长作为闪耀波长时，整个光谱检测范围的衍射效率都较好(较好是指，大部分区域的衍射效率 都较高，衍射效率的平均值相对较高；且方差相对较小，即衍射效率波动相对较小，曲线平缓)，则可确定λ0＝300nm。然后，取范围(310，350)内的多个波长，例如310nm、320nm、330nm、340nm、350nm五个波长，可以使用PCGrate软件得到在入射角度θA1下，310nm、320nm、330nm、340nm、350nm分别作为闪耀波长得到五个波长-衍射效率曲线，如发现在波长340nm下，长波段范围(对于190～800nm的光谱检测范围，长波段为300nm～800nm)的衍射效率的平均值相比其它四个波长时的长波段的衍射效率的平均值要高，且相应的方差相比其它四个波长时的长波段的衍射效率的方差要低(即曲线平缓)，则将340nm作为最终的闪耀波长，进而估算得到闪耀角γ＝4.5°。此处衍射效率的平均值、方差，可通过计算直接获取。也可由设计者直接根据衍射效率曲线进行判断，如衍射效率在长波段范围的大部分区域都较高，即可认定其平均值相对较高，同时衍射效率在长波段范围内的各取值变化平缓，即可认定其方差相对较低，而不用精确计算出平均值、方差的具体值。
凹面光栅的表面材料和槽型结构可由设计者自由选取，本具体实施方式中选用PCGrate中自定义的一种A1类材料作为表面材料，槽型为锯齿形。其它材料，其它槽型，例如梯形结构均可选择适用，并不限于上述示例情形。
P3)根据光谱闪耀条件，确定出与入射角度θA1满足同一闪耀角下的光谱闪耀条件的入射角范围，将该入射角范围作为第二入射狭缝的入射角θA2的范围，闪耀角的值取所述步骤P2)估算的闪耀角的值；获取入射角度为θA1时所述凹面光栅的波长-衍射效率曲线，以及分布在所述第二入射狭缝的入射角范围内的多个角度下所述凹面光栅的波长-衍射效率曲线；
本具体实施方式的设计方法的设计目标是通过同一光栅光谱仪光路实现两个入射角度的入射，且第二入射角度为相对于第一入射角度较大的入射角。因此入射角θA1和入射角θA2应满足相同的光谱闪耀条件方程。根据这一原则，即可根据入射角θA1以及光谱闪耀条件方程确定出入射角范围，将其作为第二个入射狭缝的入射角θA2的范围。优选地，将入射角θA1带入光谱闪耀条件方程，化简后可得到θB1-θA1＝2γ，θB1表示入射角度为θA1时的闪耀波长的出射角度；如入射角θA2满足相同的光谱闪耀条件方程，则也存在θB2-θA2＝2γ，相应地，θB2表示入射角度为θA2时的闪耀波长的出射角度。而根据光栅方程，有方程d(sinθA2+sinθB2)＝mλb。其中，m＝1；d表示步骤P1)估算的槽型周期数，γ表示步骤P2)估算的闪耀角。综上，可根据上述 两个方程解出θA2的值。当λb在(λ0-100，λ0)的范围内变化取值时，即得到相应的入射角θA2的范围。λ0即为上述确定的，光栅仅设置一个入射狭缝时搭建的光谱仪的闪耀波长。本具体实施方式中，确定的范围为-35°～-45°。
获取入射角度范围后，可使用光栅设计软件PCGrate软件得到相应角度下对应的波长-衍射效率曲线图。将步骤P2)确定的所述凹面光栅的表面材料和槽型结构输入光栅设计软件PCGrate软件中，即可分别得到入射角度为θA1时所述凹面光栅的波长-衍射效率曲线，以及入射角度分布在上述范围内多个角度下所述凹面光栅的波长-衍射效率曲线。
如图3所示，为本具体实施方式中，在入射角度θA1＝-7°时得到的波长-衍射效率曲线图。对于入射角度范围-35°～-45°范围下的多个角度，例如可分别选取-35°，-37°，-40°，-43°和-45°作为入射角度，分别得到这五个入射角度下的波长-衍射效率曲线图。当选取的角度越多，设计精度越高，但相应地工作量也较大。相应得到各个角度下对应的波长-衍射效率曲线图，曲线的形状与图3类似，只是在水平方向，竖直方向会有移动，在此不一一列举。
P4)根据步骤P3)得到的多个入射角度下的波长-衍射效率曲线确定一个角度作为第二入射狭缝的入射角θA2的值；根据角度为θA1时的波长-衍射效率曲线和θA2角度下的波长-衍射效率曲线的对比，确定波长λ2和λ3的值。
具体地，对比前述多个入射角度下的波长-衍射效率曲线，选择整个光谱检测范围内的短波段范围内衍射效率的平均值相对较高、方差相对较小时的一个角度作为θA2值，然后寻找在θA1和θA2两个入射角下相同波长处衍射效率相等时的波长λx。如果设计的光谱仪需要整个波段实现检测，则λ2＝λ3＝λx。如果设计的光谱仪不需要在整个波段实现检测，假设λ5～λ6的范围内不需要检测，则若λx在λ5～λ6的范围，则λ2＝λ5，λ3＝λ6；若λx＜λ5，则λ2＝λx，λ3＝λ6；若λx＞λ6，λ2＝λ5，λ3＝λx。通过上述方式得到θA2的值以及波长λ2和λ3的值。本具体实施方式中，光谱检测范围为190～800nm，则其短波段范围为190nm～300nm，通过对比步骤P3)中五个入射角度下的波长-衍射效率曲线，发现-40°下，短波段范围190～300nm的衍射效率的平均值相对其它四个角度时较高，且方差相对其它四个角度时较小，因此最终确定得到角度为θA2＝-40°。而对比-40°和-7°时衍射效率曲线，发现在285nm处两角度下的衍射效率相等，则确定得到波长分别为λ2＝285nm，λ3＝285nm。
经过上述步骤P4)，即获得另外一个入射狭缝的入射角，以及两个波长λ2，λ3的值。至此，经过前述步骤，已确定得到两个角度值，四个波长值，光栅闪耀角。本具体实施方式中，两个角度值为θA1＝-7°、θA2＝-40°；四个波长值λ1＝190nm，λ2＝285nm，λ3＝285nm、λ4＝800nm。且估算得到光栅闪耀角γ＝4.5°。如下即根据这些信息设计凹面光栅以及光学器件之间的相对位置设置。
P5)根据得到的两个入射角θA1、θA2的值，四个波长λ1、λ2、λ3、λ4的值以及所述光谱仪的固定结构参数，基于光程函数级数展开法，使用光学设计软件ZEMAX软件进行参数优化，得到记录结构参数以及使用结构参数。
本具体实施方式中，基于光程函数级数展开法，利用光学设计软件ZEMAX软件，带入两个角度值，四个波长值和表1中的固定结构参数值进行参数优化，得到的记录结构参数以及使用结构参数如表2所示。
表2
Figure PCTCN2015070173-appb-000001
其中，r1和r2分别代表利用全息法制作凹面光栅时的两个入射点在极坐标下的极径长度；θ1和θ2分别代表极径r1和极径r2与x轴的夹角。rA1、rA2代表两个入射狭缝在极坐标下的极径长度，θA1、θA2代表入射点的极径rA1、rA2分别与x轴的夹角，也即前述确定的入射角；B1、B2、B1’、B2’为光探测器B1B2和B1’B2’的两端在笛卡尔坐标系内的坐标值。
P6)根据步骤P1)中的凹面光栅的槽型周期，步骤P2)的凹面光栅的闪耀角、表面材料和槽型结构以及步骤P5)得到的记录结构参数确定所述凹面光栅的制作参数，得到满足应用的凹面光栅。按照上述参数要求，使用全息法即可制作出满足应用要求的凹面光栅。
P7)根据步骤P5)得到的使用结构参数，确定两个入射狭缝和两个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。根据使用结构参数中极径长度信息，角度信息以及坐标信息即可确定凹面光栅、狭缝、探测器的位置，搭建光路，从而得到凹面光栅光谱仪。
综上，即设计得到光谱仪。设计的光谱仪工作时，第一入射狭缝A1经凹面光栅G汇聚分光后出射的光线照射到光探测器B1’B2’上，波长范围为λ3～λ4；第二入射狭缝A2经凹面光栅G汇聚分光后出射的光线照射到光探测器B1B2上，波长范围为λ1～λ2，其中，λ1＜λ2≤λ3＜λ4。光波检测时，两个光探测器B1B2、B1’B2’在光谱检测时互相不干扰。当需要检测短波段(λ1～λ2)时，所述第二入射狭缝A2被打开，第一入射狭缝A1被遮住；当需要检测长波段(λ3～λ4)时，所述第一入射狭缝A1被打开，第二入射狭缝A2被遮住，最终可实现λ1～λ2和λ3～λ4范围内的光波检测，而λ2等于λ3，也即λ1～λ4范围内的光波检测。并且在检测时，需要先进行短波段λ1～λ2的检测，然后利用其排除短波段λ1～λ2的+2级光谱在进行长波段λ3～λ4的检测时的影响。
本具体实施方式设计的凹面光栅光谱仪，能实现λ1～λ4范围内的光波检测。而光波检测过程中，由于两个不同入射角度下分别对应了两个不同的闪耀波长，小角度的入射狭缝对应检测长波段范围的光谱，大角度的入射狭缝对应检测短波段范围的光谱。相对于仅存在一个入射角度检测光谱时，双角度双闪耀波长检测光谱时，大部分光谱距离闪耀波长的距离变近，衍射效率提高，从而使得整体衍射效率提高。
如下，设置普通设计流程设计的普通光谱仪，通过比较本具体实施方式的光谱仪和普通光谱仪的衍射效率曲线，验证本具体实施方式的光谱仪在衍射效率方面的性能提升。
普通光谱仪：包括凹面光栅，一个入射狭缝，两个光探测器。首先，根据光谱仪的固定结构参数，基于光程函数级数展开法和zemax软件优化，得到入射角度，记录结构参数以及使用结构参数。然后，代入入射角度，利用PCGrate软件求出能使整个波段衍射效率的平均值相对较高、且方差相对较小的闪耀波长，进而根据闪耀波长确 定得到闪耀角。本例中，普通光谱仪的入射角度为-4.8°，闪耀波长在300nm，闪耀角为γ＝3.05。最后，根据闪耀角和记录结构参数确定凹面光栅的制作参数，得到满足应用的凹面光栅；根据入射角度和使用结构参数确定入射狭缝和两个光探测器相对于凹面光栅的位置，从而搭建得到光谱仪。
使用PCGrate软件计算本具体实施方式中光栅光谱仪和上述普通光谱仪在各波长(190nm～800nm)下的衍射效率值，具有如图4中所示衍射效率的曲线图。虚线是本具体实施方式的新结构的光谱仪在各个波长处的衍射效率，入射角度分别为-7°，-40°；实线是普通光谱仪在各个波长处的衍射效率，入射角度为-4.8°。从图4可知，两种结构在相同情况(所述“相同情况”指：采用相同的材料、相同光谱范围，并且在衍射效率分析时除入射角度和闪耀角不同外，其它设计参数相同)下，采用本具体实施方式的新结构的光谱仪在230nm～235nm、330nm～380nm和780nm～800nm范围内衍射效率有0～10％左右的提高，而在380nm～780nm和190nm～230nm范围内衍射效率有10％～14％左右的提高。虽然在其它光谱区域235nm～330nm衍射效率有所下降，但总体来看在新结构光谱仪中衍射效率大于0.4、0.5、0.6的波长占81.97％、69.67％、55.74％而普通结构占67.21、52.46％、37.70％。
综上，本具体实施方式中，通过采用两个衍射狭缝，分别通过一个小角度入射和一个大角度入射，从而实现了双波长闪耀，提高了宽光谱光谱仪衍射效率较低波段的衍射效率。虽然新结构牺牲了部分波段的衍射效率，但整体上优化了光谱仪的衍射效率分布，从而改善了宽光谱光谱仪大部分光谱区域衍射效率较低的问题。
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明，不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说，在不脱离本发明构思的前提下做出若干替代或明显变型，而且性能或用途相同，都应当视为属于本发明的保护范围。

Claims (9)

  1. 一种双入射狭缝光谱仪的设计方法，其特征在于：通过设计，使用凹面光栅、两个入射狭缝和两个光探测器搭建光谱仪，且所述光谱仪的光谱检测范围为λ1～λ4；所述设计方法包括以下步骤：
    1)根据所述光谱仪的固定结构参数，基于光程函数级数展开法计算得到在单一入射狭缝时的入射角度值和所述入射角度值下所述凹面光栅的槽型周期，将得到的入射角度值作为第一入射狭缝的入射角θA1的值；
    2)估算所述凹面光栅的闪耀角，确定所述凹面光栅的表面材料和槽型结构；
    3)根据光谱闪耀条件，确定出与入射角度θA1满足同一闪耀角下的光谱闪耀条件的入射角范围，将该入射角范围作为第二入射狭缝的入射角θA2的范围，闪耀角的值取所述步骤2)估算的闪耀角的值；获取入射角度为θA1时所述凹面光栅的波长-衍射效率曲线，以及分布在所述第二入射狭缝的入射角范围内的多个角度下所述凹面光栅的波长-衍射效率曲线；
    4)根据步骤3)得到的多个入射角度下的波长-衍射效率曲线确定一个角度作为第二入射狭缝的入射角θA2的值；根据角度为θA1时的波长-衍射效率曲线和θA2角度下的波长-衍射效率曲线的对比，确定波长λ2和λ3的值；
    5)根据得到的两个入射角θA1、θA2的值，四个波长λ1、λ2、λ3、λ4的值以及所述光谱仪的固定结构参数，基于光程函数级数展开法，使用光学设计软件ZEMAX软件进行参数优化，得到记录结构参数以及使用结构参数；
    6)根据步骤1)中的凹面光栅的槽型周期，步骤2)的凹面光栅的闪耀角、表面材料和槽型结构以及步骤5)得到的记录结构参数确定所述凹面光栅的制作参数，得到满足应用的凹面光栅；
    7)根据步骤5)得到的使用结构参数，确定两个入射狭缝和两个光探测器相对于所述凹面光栅的位置，从而搭建得到光谱仪。
  2. 根据权利要求1所述的双入射狭缝光谱仪的设计方法，其特征在于：所述步骤4)中，对比步骤3)中的多个角度下的波长-衍射效率曲线，取使得整个光谱检测范围内的短波段范围内衍射效率的平均值相对较高、方差相对较小时一个角度作为第二入射 狭缝的入射角θA2值；然后，对比入射角θA1和入射角θA2下的波长-衍射效率曲线，寻找相同波长处衍射效率也相等时的波长λx，取λ2＝λ3＝λx。
  3. 根据权利要求1所述的双入射狭缝光谱仪的设计方法，其特征在于：所述步骤3)中根据如下两个公式估算入射角范围：d(sinθA2+sinθB2)＝mλb；2γ＝θB2-θA2；其中，m＝1；d表示步骤1)估算的槽型周期数，γ表示步骤2)的闪耀角；求解出λb在(λ0-100，λ0)的范围内变化取值时对应的入射角θA2的值，从而估算得到入射角范围；λ0表示光谱仪在仅入射角θA1入射时，使所述凹面光栅在整个光谱检测范围的衍射效率的平均值相对较高、方差相对较小的波长。
  4. 根据权利要求1所述的双入射狭缝光谱仪的设计方法，其特征在于：所述步骤1)中，所述光谱仪的固定结构参数包括光谱检测范围值，所述凹面光栅的曝光波长、工作级次、边长、基底曲率半径、光栅常数，所述两个入射狭缝的宽度。
  5. 根据权利要求1所述的双入射狭缝光谱仪的设计方法，其特征在于：所述步骤2)中，估算闪耀角时，先使用PCGrate软件得到入射角度θA1下，在(λ0，λ0+100)的范围内的多个波长分别作为闪耀波长时对应的凹面光栅的波长-衍射效率曲线，如波长λy时的长波段范围内衍射效率的平均值相对较高、方差相对较小，则取波长λy作为最终的闪耀波长，进而估算得到闪耀角；其中，λ0表示光谱仪在仅入射角θA1入射时，使所述凹面光栅在整个光谱检测范围的衍射效率的平均值相对较高、方差相对较小的波长。
  6. 根据权利要求1所述的双入射狭缝光谱仪的设计方法，其特征在于：所述步骤2)中，由设计者根据经验确定凹面光栅的表面材料和槽型结构。
  7. 根据权利要求1所述的双入射狭缝光谱仪的设计方法，其特征在于：所述步骤3)中，获取凹面光栅的波长-衍射效率曲线时，使用光栅设计软件PCGrate软件，输入步骤2)确定的所述凹面光栅的表面材料和槽型结构，分别得到入射角度为θA1时所述凹面光栅的波长-衍射效率曲线，以及入射角度分布在所述第二入射狭缝的入射角范围内的多个角度下所述凹面光栅的波长-衍射效率曲线。
  8. 一种双入射狭缝光谱仪，其特征在于：包括凹面光栅、两个入射狭缝和两个光探测器，所述凹面光栅的制作参数以及两个入射狭缝和两个光探测器相对于所述凹面光栅的位置根据权利要求1～7任一项所述的设计方法确定得到。
  9. 根据权利要求8所述的双入射狭缝光谱仪，其特征在于：所述光探测器为光电倍增管、热电探测器、半导体光探测器或CCD阵列探测器。
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