WO2016068332A1 - Buse, dispositif de formation de film, et procédé de formation de film de revêtement - Google Patents

Buse, dispositif de formation de film, et procédé de formation de film de revêtement Download PDF

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Publication number
WO2016068332A1
WO2016068332A1 PCT/JP2015/080831 JP2015080831W WO2016068332A1 WO 2016068332 A1 WO2016068332 A1 WO 2016068332A1 JP 2015080831 W JP2015080831 W JP 2015080831W WO 2016068332 A1 WO2016068332 A1 WO 2016068332A1
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WO
WIPO (PCT)
Prior art keywords
powder
gas
nozzle
film
cyclone
Prior art date
Application number
PCT/JP2015/080831
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English (en)
Japanese (ja)
Inventor
智資 平野
公一 川崎
Original Assignee
日本発條株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本発條株式会社 filed Critical 日本発條株式会社
Priority to JP2016556685A priority Critical patent/JP6588029B2/ja
Publication of WO2016068332A1 publication Critical patent/WO2016068332A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/10—Spray pistols; Apparatus for discharge producing a swirling discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles

Definitions

  • the present invention relates to a nozzle for a film forming apparatus by a cold spray method, a film forming apparatus, and a film forming method.
  • a cold spray method is known as a method for forming a metal film (see, for example, Patent Document 1).
  • the cold spray method is to form a film on the surface of the substrate by injecting the powder of the material from the nozzle together with an inert gas in the state below the melting point or softening point and colliding with the substrate in the solid state. Is the method.
  • the processing is performed at a lower temperature than the thermal spraying method, it is possible to obtain a metal film having no phase transformation and suppressing oxidation. In addition, the influence of thermal stress can be reduced.
  • both the base material and the material to be the film are metal
  • plastic deformation occurs between the powder and the base material when the metal material powder collides with the base material (or the previously formed film). Since the anchor effect is obtained and the oxide films of each other are destroyed and metal bonds are formed by the new surfaces, a laminate with high adhesion strength can be obtained.
  • a dense film can be formed as the powder sprayed from the nozzle is increased in speed.
  • the present invention has been made in view of the above, and an object of the present invention is to provide a nozzle, a film forming apparatus, and a film forming method capable of increasing the speed of powder sprayed from a nozzle with a simple apparatus configuration.
  • the nozzle according to the present invention sprays material powder together with gas and sprays and deposits the powder on the surface of the base material in a solid state.
  • a nozzle used in a film forming apparatus for forming a film the nozzle tube having a passage through which the powder passes together with the gas is formed inside, and provided at the tip of the nozzle tube, and sprayed from the nozzle tube Swirling flow forming means for forming a swirling flow around a region where the powder flows.
  • the swirl flow forming means is a cylindrical member surrounding a region through which the powder flows, at least a cylindrical member having an open end surface on the downstream side of the region through which the powder flows, and the inside of the cylindrical member And a gas supply unit that supplies a gas of a different system from the gas.
  • a cross section of the cylindrical member orthogonal to the spraying direction of the powder sprayed from the nozzle tube has a circular shape or an elliptical shape.
  • the gas supply unit injects gas in a tangential direction of an inner periphery of the cylindrical member.
  • a spiral groove is formed on the inner peripheral side surface of the cylindrical member.
  • the nozzle further includes a partition member that partitions an area in which the powder flows in the cylindrical member and an area in which the swirl flow is formed.
  • the partition member has a cylindrical shape and has a member formed with at least one hole or slit that communicates the inner peripheral side and the outer peripheral side.
  • the film forming apparatus includes the nozzle, a gas powder mixing unit that mixes the powder with a compressed gas and supplies the mixed gas to the nozzle, and a gas that introduces the compressed gas into the gas powder mixing unit And a powder supply unit for supplying the powder to the gas powder mixing unit.
  • the method for forming a film according to the present invention is such that a powder of a film material is accelerated on the surface of the base material together with the gas by the film forming apparatus, and sprayed and deposited in a solid phase state on the base material.
  • the method includes a step of forming a film.
  • the swirl flow forming means for forming the swirl flow around the region where the powder ejected from the nozzle flows is provided at the tip of the nozzle. It becomes possible to increase the speed.
  • FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to an embodiment of the present invention.
  • FIG. 2 is an enlarged longitudinal sectional view showing the tip of the nozzle shown in FIG.
  • FIG. 3 is a cross-sectional view of the cyclone forming portion in the region including the gas inlet shown in FIG.
  • FIG. 4 is a graph showing the relationship between the gas pressure in the spray gun shown in FIG. 1 and the velocity of the gas flow injected from the nozzle.
  • FIG. 5 is a longitudinal sectional view showing a modified example (tapered shape) of the cyclone forming portion.
  • FIG. 6 is a longitudinal sectional view showing a modified example (bell shape) of the cyclone forming part.
  • FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to an embodiment of the present invention.
  • FIG. 2 is an enlarged longitudinal sectional view showing the tip of the nozzle shown in FIG.
  • FIG. 3 is a cross-sectional view of the
  • FIG. 7 is a longitudinal sectional view showing a modified example (bell shape) of the cyclone forming portion.
  • FIG. 8 is a cross-sectional view showing a modification (elliptical shape) of the cyclone forming portion.
  • FIG. 9 is a cross-sectional view showing a modification (rectangular shape) of the cyclone forming portion.
  • FIG. 10 is a cross-sectional view showing a modification (hexagonal shape) of the cyclone forming portion.
  • FIG. 11 is a longitudinal sectional view showing another modification of the cyclone forming portion.
  • FIG. 12 is a cross-sectional view illustrating an example of a partition member.
  • FIG. 13 is a cross-sectional view showing another example of the partition member.
  • FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to an embodiment of the present invention.
  • a film forming apparatus 1 according to the present embodiment is a film forming apparatus using a cold spray method, and a gas heater 2 for heating a high-pressure gas (compressed gas) and a film forming material powder.
  • a powder supply device 3 for storing and supplying to the spray gun 4, a spray gun 4 for mixing the heated high-pressure gas with the powder and introducing it into the nozzle 5, a nozzle 5 for injecting the powder together with the high-pressure gas, and a gas heater 2 and valves 6 and 7 for adjusting the amount of high-pressure gas supplied to the powder supply device 3, respectively.
  • the high-pressure gas helium, nitrogen, air or the like is used.
  • the high-pressure gas supplied to the gas heater 2 is heated to a temperature in a range lower than the melting point of the material powder, and then introduced into the spray gun 4.
  • the heating temperature of the high pressure gas is preferably 150 to 900 ° C.
  • the high-pressure gas supplied to the powder supply device 3 supplies the powder in the powder supply device 3 to the spray gun 4 so that a predetermined discharge amount is obtained.
  • the heated high-pressure gas is jetted as a supersonic flow (about 340 m / s or more) by passing through the nozzle 5.
  • the gas pressure of the high-pressure gas is preferably about 1 to 5 MPa. This is because by adjusting the pressure of the high-pressure gas to this level, the adhesion strength of the film 101 to the substrate 100 can be improved. More preferably, the treatment is performed at a pressure of about 2 to 4 MPa.
  • the base material 100 is arranged facing the spray gun 4, and the film forming material powder is put into the powder supply apparatus 3, and the high-pressure gas to the gas heater 2 and the powder supply apparatus 3.
  • the powder supplied to the spray gun 4 is injected into the supersonic flow of the high-pressure gas, accelerated, and injected from the nozzle 5.
  • the powder 101 collides and deposits on the base material 100 at a high speed in a solid phase state, whereby the coating 101 is formed.
  • FIG. 2 is an enlarged longitudinal sectional view showing the tip of the nozzle 5.
  • the nozzle 5 includes a nozzle tube 20 in which a passage 20 a through which powder passes is formed, a cyclone forming portion 21 provided so as to surround a tip portion of the nozzle tube 20, and the cyclone A gas supply unit 23 that supplies gas to the forming unit 21 via a gas supply pipe 22 is provided.
  • the cyclone forming part 21, the gas supply pipe 22, and the gas supply part 23 constitute a swirl flow forming means for forming a swirl flow around the region where the powder injected from the nozzle pipe 20 flows.
  • the tip part of the passage 20a of the nozzle tube 20 has a divergent shape that increases in width toward the tip.
  • the powder introduced from the spray gun 4 passes through the passage 20a together with the gas and is sprayed toward the substrate 100.
  • the cyclone forming part 21 is a cylindrical member that surrounds an area where powder sprayed from the nozzle tube 20 flows. Of the two end faces of the cyclone forming part 21, the end face 21a on the downstream side in the powder injection direction L is open. On the other hand, the upstream end surface 21b in the injection direction L is closed except for the fitting hole 21c provided in the center. The cyclone forming part 21 is fixed to the nozzle tube 20 by fitting the nozzle tube 20 into the fitting hole 21c.
  • a gas introduction port 21d is provided on the side surface of the base end side (upper side in the figure) of the cyclone forming portion 21, and a gas supply pipe 22 is connected to the gas introduction port 21d. As shown in FIG. 2, the gas inlet 21 d and the gas supply pipe 22 are inclined so that the gas introduced into the cyclone forming part 21 flows toward the tip side of the cyclone forming part 21. .
  • FIG. 3 is a cross-sectional view of the cyclone forming part 21 passing through the gas inlet 21d.
  • the cross section of the cyclone forming portion 21 orthogonal to the injection direction L has a circular shape.
  • the gas introduction port 21d and the gas supply pipe 22 are provided along the tangential direction of the inner peripheral surface of the cyclone forming part 21 so that the gas introduced into the cyclone forming part 21 swirls and flows.
  • the gas supply unit 23 is provided in a separate system from the gas supplied to the gas heater 2 that functions as a gas chamber.
  • the gas supplied from the gas supply pipe 22 is referred to as a cyclone gas.
  • a gas of the same type as the gas supplied to the gas heater 2 such as helium, nitrogen, or air is used.
  • FIG. 4 is a graph showing the relationship between the gas pressure (input pressure) in the spray gun 4 and the gas flow velocity (outlet gas velocity) in the vicinity of the outlet of the nozzle tube 20. Note that the data of 1 atmospheric pressure shown in FIG. 4 indicates a case where no cyclone is generated in the cyclone forming unit 21 (that is, the atmospheric pressure is the same as the outside air). As shown in FIG. 4, it can be seen that the outlet gas velocity increases as the pressure in the cyclone forming portion 21 is reduced.
  • the cyclone forming portion 21 is provided at the tip of the nozzle tube 20 and the cyclone is generated around the region where the powder flows. It becomes possible to speed up the sprayed powder.
  • a spiral groove may be formed on the inner peripheral surface of the cyclone forming portion 21 of the above-described embodiment.
  • the cyclone gas introduced from the gas introduction port 21d is easily swirled.
  • a cyclone can be more reliably and easily generated inside the cyclone forming part 21, and the effect of speeding up the powder injected from the nozzle tube 20 can be further enhanced.
  • Modification 3 5 to 7 are longitudinal sectional views showing modified examples of the cyclone forming portion 21.
  • FIG. In the above embodiment, the shape of the cyclone forming portion 21 is a cylindrical shape having the same diameter of both end faces (end faces 21a, 21b), but the diameters of both end faces are different or the long axes of both end faces are short and short. It is good also as a cylinder shape from which the length of shafts differs each.
  • a cyclone forming portion 21A having a tapered side surface may be used.
  • a so-called bell-shaped cyclone forming portion 21 ⁇ / b> C whose side surface is a curved surface convex inward may be used.
  • Modification 4) 8 to 10 are cross-sectional views showing other modified examples of the cyclone forming part.
  • the cross-sectional shape of the cyclone forming portion 21 is circular, but the cross-sectional shape is not limited to a circular shape as long as the cyclone can be formed in the internal space.
  • a cyclone forming portion 21D having an elliptical cross section may be used.
  • a cyclone forming portion 21E having a rectangular cross section may be used.
  • a cyclone forming portion 21 ⁇ / b> F whose cross section has a polygonal shape such as a hexagon may be used.
  • FIG. 11 is a longitudinal sectional view showing another modification of the cyclone forming portion.
  • a partition member 30 provided with holes and slits is provided in the cyclone forming part 21 so that the flow of the powder injected from the nozzle tube 20 is not disturbed by the cyclone generated in the cyclone forming part 21. ing.
  • FIG. 12 is a cross-sectional view showing an example of a partition member.
  • FIG. 12A is a longitudinal sectional view in a plane including the central axis of the partition member
  • FIG. 12B is a transverse sectional view when the partition member is viewed from the powder outlet side.
  • a partition member 30A shown in FIG. 12 includes a cylindrical portion 31 having a cylindrical shape concentric with the cyclone forming portion 21 and a flange 32 provided on one end side of the cylindrical portion 31.
  • the flange 32 is provided for positioning and fixing when the partition member 30 ⁇ / b> A is fitted into the cyclone forming portion 21.
  • the cylindrical portion 31 is provided with a plurality of holes 33 that allow communication between the outer peripheral side and the inner peripheral side.
  • each hole 33 is circular, but the shape of the hole is not particularly limited, and may be, for example, an ellipse or a polygon.
  • ribs 34 projecting toward the inner peripheral side from one end side to the other end side of the cylindrical portion 31 are provided. These ribs 34 rectify the flow of powder ejected from the nozzle tube 20.
  • FIG. 13 is a cross-sectional view showing another example of the partition member.
  • Fig.13 (a) is a longitudinal cross-sectional view in the surface containing the central axis of a partition member
  • FIG.13 (b) is a cross-sectional view at the time of seeing a partition member from the exit side of powder.
  • the 13 includes a cylindrical portion 35 having a cylindrical shape concentric with the cyclone forming portion 21 and a flange 36 provided on one end side of the cylindrical portion 35.
  • the partition member 30B shown in FIG. The flange 36 is provided for positioning and fixing when the partition member 30 ⁇ / b> B is fitted into the cyclone forming portion 21.
  • the cylindrical portion 35 is provided with a plurality of slits 37 that communicate the outer peripheral side and the inner peripheral side.
  • each slit 37 is formed in a straight line parallel to the central axis of the cylindrical portion 35, but the shape of the slit is not limited to a straight line, and may be, for example, a wavy line or a spiral. May be.
  • the cylindrical portion 35 is divided into a plurality of wall portions 38 by these slits 37.
  • the downstream side is slightly opened toward the outer periphery with respect to the upstream side in the rotation direction of the cyclone.
  • the cylindrical portions 31 and 35 are provided with a plurality of holes 33 or slits 37, but at least one hole or slit may be provided. Further, a plurality of holes or a plurality of slits may be connected and integrated.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nozzles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

L'invention fournit une buse, ou similaire, qui dans un dispositif de formation de film mettant en œuvre une projection dynamique par gaz froid, permet au moyen d'une configuration de dispositif simple l'accélération d'une poudre pulvérisée par la buse. Cette buse (5) est mise en œuvre dans un dispositif de formation de film destiné à former un film de revêtement en pulvérisant avec un gaz une poudre de matière, et en accumulant par soufflage cette poudre à l'état de phase solide à la surface d'un matériau de base. En outre, cette buse est équipée : d'un conduit de buse (20) dans la partie interne duquel est formé un trajet de circulation (20a) dans lequel la poudre circule avec le gaz; et d'une partie de formation cyclonique (21), d'un conduit d'alimentation en gaz (22) ainsi que d'une partie d'alimentation en gaz (23) qui sont agencés au niveau de la partie extrémité avant du conduit de buse (20), et qui forment un écoulement rotationnel à la périphérie d'une région d'écoulement de la poudre pulvérisée depuis le conduit de buse (20).
PCT/JP2015/080831 2014-10-31 2015-10-30 Buse, dispositif de formation de film, et procédé de formation de film de revêtement WO2016068332A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016556685A JP6588029B2 (ja) 2014-10-31 2015-10-30 ノズル、成膜装置及び皮膜の形成方法

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JP2014223543 2014-10-31
JP2014-223543 2014-10-31

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WO2016068332A1 true WO2016068332A1 (fr) 2016-05-06

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005163058A (ja) * 2003-11-28 2005-06-23 Fujitsu Ltd エアロゾルデポジッション成膜装置
WO2006080870A1 (fr) * 2005-01-26 2006-08-03 Volvo Aero Corp Procede et dispositif de pulverisation thermique
WO2007033985A1 (fr) * 2005-09-21 2007-03-29 Ramseier Technologies Ag Applicateur electrostatique
DE102008050184A1 (de) * 2008-10-01 2010-04-15 Technische Universität Chemnitz Verfahren und Vorrichtung zum thermischen Beschichten von Oberflächen, insbesondere Hochgeschwindigkeitsflammspritzen
JP2010172817A (ja) * 2009-01-29 2010-08-12 Micronics Japan Co Ltd 金属微粒子の噴射ノズル
JP2011240314A (ja) * 2010-05-21 2011-12-01 Kobe Steel Ltd コールドスプレー装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005163058A (ja) * 2003-11-28 2005-06-23 Fujitsu Ltd エアロゾルデポジッション成膜装置
WO2006080870A1 (fr) * 2005-01-26 2006-08-03 Volvo Aero Corp Procede et dispositif de pulverisation thermique
WO2007033985A1 (fr) * 2005-09-21 2007-03-29 Ramseier Technologies Ag Applicateur electrostatique
DE102008050184A1 (de) * 2008-10-01 2010-04-15 Technische Universität Chemnitz Verfahren und Vorrichtung zum thermischen Beschichten von Oberflächen, insbesondere Hochgeschwindigkeitsflammspritzen
JP2010172817A (ja) * 2009-01-29 2010-08-12 Micronics Japan Co Ltd 金属微粒子の噴射ノズル
JP2011240314A (ja) * 2010-05-21 2011-12-01 Kobe Steel Ltd コールドスプレー装置

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JPWO2016068332A1 (ja) 2017-08-10
JP6588029B2 (ja) 2019-10-09

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