WO2016061406A1 - Mosaïque de superpixels de transducteurs piézoélectriques à ultrasons pour formation de faisceau 2d - Google Patents

Mosaïque de superpixels de transducteurs piézoélectriques à ultrasons pour formation de faisceau 2d Download PDF

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Publication number
WO2016061406A1
WO2016061406A1 PCT/US2015/055821 US2015055821W WO2016061406A1 WO 2016061406 A1 WO2016061406 A1 WO 2016061406A1 US 2015055821 W US2015055821 W US 2015055821W WO 2016061406 A1 WO2016061406 A1 WO 2016061406A1
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WO
WIPO (PCT)
Prior art keywords
input terminal
drive input
pixel
pixel set
array
Prior art date
Application number
PCT/US2015/055821
Other languages
English (en)
Inventor
Yipeng Lu
Hao-Yen TANG
Hrishikesh Vijaykumar PANCHAWAGH
Original Assignee
Qualcomm Incorporated
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Filing date
Publication date
Priority claimed from US14/883,586 external-priority patent/US10139479B2/en
Application filed by Qualcomm Incorporated filed Critical Qualcomm Incorporated
Priority to EP15788514.6A priority Critical patent/EP3207498A1/fr
Priority to CN201580054066.1A priority patent/CN106999985B/zh
Publication of WO2016061406A1 publication Critical patent/WO2016061406A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00—Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10—Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12—Fingerprints or palmprints
    • G06V40/13—Sensors therefor
    • G06V40/1306—Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/34—Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
    • G10K11/341—Circuits therefor
    • G10K11/346—Circuits therefor using phase variation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/20—Application to multi-element transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50—Application to a particular transducer type
    • B06B2201/55—Piezoelectric transducer

Definitions

  • This disclosure relates to an array of piezoelectric ultrasonic transducers for imaging and liveness determination, and more particularly to techniques for configuring portions of the array as superpixels for two-dimensional (2-D) beamforming. DESCRIPTION OF THE RELATED TECHNOLOGY
  • Thin film piezoelectric acoustic transducers are attractive candidates for numerous applications including biometric sensors such as fingerprint sensors, gesture detection, microphones and speakers, ultrasonic imaging, and chemical sensors.
  • biometric sensors such as fingerprint sensors, gesture detection, microphones and speakers, ultrasonic imaging, and chemical sensors.
  • Such transducers may include piezoelectric micromechanical ultrasonic transducers
  • PMUTs configured as a multilayer stack that includes a piezoelectric layer stack and a mechanical layer disposed over a cavity.
  • the piezoelectric layer stack may include a layer of piezoelectric material.
  • a respective upper and lower electrode layer may be disposed on or proximate to each of an upper and a lower surface of the piezoelectric layer.
  • the electrode layers may be patterned or unpatterned.
  • biometric sensors that include an array of PMUTs, each PMUT in the array corresponding to an individual pixel of a rendered image of, for example, a fingerprint.
  • the PMUTs may be actuated approximately simultaneously, a technique that may be referred to as plane wave excitation.
  • Figure 1A illustrates an example of plane wave excitation in which each PMUT in an array 100 emits ultrasonic energy with substantially the same timing and phase of ultrasonic emissions originating from neighboring PMUTs.
  • the aggregate ultrasonic signal approximates a plane wave.
  • the acoustic pressure for such a plane wave is fairly uniform with respect to position across the PMUT array (Detail B).
  • a pixel array operating in a plane wave excitation and transmission mode has been shown to produce sufficient average acoustic pressure to provide a fingerprint image resolution on the order of 500 dpi (dots per inch).
  • One innovative aspect of the subject matter described in this disclosure relates to an apparatus including transceiver electronics and an array of piezoelectric ultrasonic transducer elements, the array including a plurality of superpixel regions, each superpixel region including at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region, and an electrical coupling between the transceiver electronics and the array.
  • the transceiver electronics may be configured to operate the array in a selectable one of a first mode and a second mode.
  • the array In the first mode, the array generates a substantially plane ultrasonic wave having a first acoustic pressure.
  • the array In the second mode, the array generates, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.
  • the electrical coupling between the transceiver electronics and the array may include a first fixedly configured conductive path connecting pixels in the first pixel set with a first drive input terminal and a second fixedly configured conductive path connecting pixels in the second pixel set with a second drive input terminal, the first drive input terminal and the second drive input terminal being coupled with the transceiver electronics.
  • the transceiver electronics may concurrently transmit signals to each of the first drive input terminal and the second drive input terminal, and in the second mode, the transceiver electronics may sequentially transmits signals to each of the first drive input terminal and the second drive input terminal such that a time delay occurs between delivery of a first transmission signal to the second drive input terminal and delivery of a second transmission signal to the first drive input terminal.
  • the superpixel region may include seven pixels arranged on a hexagonal lattice so as to form a hexagon, the first pixel set may include one center pixel disposed proximate to a center of the hexagon; and the second pixel set may include six pixels, each disposed in the outer portion of the superpixel region approximately equidistant from the center pixel.
  • the apparatus may further include a third pixel set and a fourth pixel set.
  • the superpixel region may include nineteen pixels arranged on a hexagonal lattice so as to form a hexagon.
  • the first pixel set may include one center pixel disposed proximate to a center of the hexagon.
  • the second pixel set may include six pixels disposed in an outer portion of the superpixel region approximately equidistant from the center pixel.
  • the third pixel set may include six pixels, each disposed at a greater distance from the center pixel than each pixel in the second pixel set and at a lesser distance from the center pixel than each pixel in the fourth pixel set.
  • the electrical coupling between the transceiver electronics and the array may include a first fixedly configured conductive path connecting pixels in the first pixel set with a first drive input terminal, a second fixedly configured conductive path connecting pixels in the second pixel set with a second drive input terminal, a third fixedly configured conductive path connecting pixels in the third pixel set with a third drive input terminal, and a fourth fixedly configured conductive path connecting pixels in the fourth pixel set with a fourth drive input terminal.
  • Each of the first drive input terminal, the second drive input, the third drive input, and the fourth drive input may be coupled with the transceiver electronics.
  • the transceiver electronics may concurrently transmit signals to each of the first drive input terminal, the second drive input terminal, the third drive input terminal, and the fourth drive input terminal and, in the second mode, the transceiver electronics may sequentially transmit signals to each of the first drive input terminal, the second drive input terminal, the third drive input terminal, and the fourth drive input terminal, such that: a first time delay occurs between delivery of a first transmission signal to the fourth drive input terminal and delivery of a second transmission signal to the third drive input terminal; a second time delay occurs between delivery of the second transmission signal to the third drive input terminal and delivery of a third
  • the apparatus may further include a third pixel set, wherein the superpixel region includes nine pixels arranged along orthogonal rows and columns so as to form a square.
  • the first pixel set may include one center pixel; the second pixel set may include four pixels, each disposed in the outer portion of the superpixel region approximately equidistant from the center pixel; and the third pixel set may include four pixels, each disposed in the outer portion of the superpixel region approximately equidistant from the center pixel, at a greater distance from the center pixel than each pixel of the second pixel set.
  • the electrical coupling between the transceiver electronics and the array may include a first fixedly configured conductive path connecting pixels in the first pixel set with a first drive input terminal, a second fixedly configured conductive path connecting pixels in the second pixel set with a second drive input terminal; and a third fixedly configured conductive path connecting pixels in the third pixel set with a third drive input terminal.
  • Each of the first drive input terminal, the second drive input, and the third drive input may be coupled with the transceiver electronics.
  • the transceiver electronics may concurrently transmit signals to each of the first drive input terminal, the second drive input terminal, and the third drive input terminal; and in the second mode, the transceiver electronics may sequentially transmit signals to each of the first drive input terminal, the second drive input terminal, and the third drive input terminal, such that: a first time delay occurs between delivery of a first transmission signal to the third drive input terminal and delivery of a second transmission signal to the second drive input terminal; and a second time delay occurs between delivery of the second transmission signal to the second drive input terminal and delivery of a third transmission signal to the first drive input terminal.
  • the apparatus may further include a platen and an acoustic coupling medium disposed above the array, wherein the array is configured to receive or transmit ultrasonic signals through the platen and the coupling medium.
  • a method includes operating an array of piezoelectric ultrasonic transducer elements in a selectable one of a first mode and a second mode, the array including a plurality of superpixel regions, each superpixel region including at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region, the array having an electrical coupling with transceiver electronics.
  • operating the array In the first mode, operating the array generates a substantially plane ultrasonic wave having a first acoustic pressure; and in the second mode, operating the array generates, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.
  • the electrical coupling between the transceiver electronics and the array may include a first fixedly configured conductive path connecting pixels in the first pixel set with a first drive input terminal and a second fixedly configured conductive path connecting pixels in the second pixel set with a second drive input terminal, the first drive input terminal and the second drive input terminal being coupled with the transceiver electronics.
  • the transceiver electronics may concurrently transmit signals to each of the first drive input terminal and the second drive input terminal; and in the second mode, the transceiver electronics may sequentially transmit signals to each of the first drive input terminal and the second drive input terminal such that a time delay occurs between delivery of a first transmission signal to the second drive input terminal and delivery of a second transmission signal to the first drive input terminal.
  • an apparatus includes means for operating an array of piezoelectric ultrasonic transducer elements in a selectable one of a first mode and a second mode, the array including a plurality of superpixel regions, each superpixel region including at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region.
  • Operating the array of piezoelectric ultrasonic transducer elements includes: in the first mode, controlling the array to generate a substantially plane ultrasonic wave having a first acoustic pressure; and in the second mode, controlling the array to generate, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.
  • the means for operating the array may have an electrical coupling with a first drive input terminal and a second drive input terminal of the array, the electrical coupling including a first fixedly configured conductive path connecting pixels in the first pixel set with the first drive input terminal and a second fixedly configured conductive path connecting pixels in the second pixel set with the second drive input terminal.
  • the software includes instructions for causing an apparatus to: operate an array of piezoelectric ultrasonic transducer elements in a selectable one of a first mode and a second mode, the array including a plurality of superpixel regions, each superpixel region including at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region, and at least a second pixel set being disposed in an outer portion of the superpixel region, the array having an electrical coupling with transceiver electronics.
  • the array In the first mode, the array generates a substantially plane ultrasonic wave having a first acoustic pressure.
  • the array In the second mode, the array generates, from each superpixel region, a focused beam having a second acoustic pressure that is substantially higher than the first acoustic pressure.
  • Figure 1 A illustrates an example of plane wave excitation.
  • Figures IB- ID illustrate cross-sectional views of various configurations of PMUT ultrasonic sensor arrays.
  • Figure 2 illustrates a PMUT array according to an implementation.
  • Figure 3 shows a portion of a PMUT array according to some
  • Figure 4 illustrates an example of beam forming for a superpixel region.
  • Figure 5 illustrates an example acoustic pressure map for a superpixel of PMUT elements operated in a beamforming mode.
  • Figure 6 illustrates some examples of superpixel arrangements as contemplated by the present disclosure.
  • Figure 7 illustrates further examples of superpixel arrangements as contemplated by the present disclosure.
  • Figure 8 illustrates an array of superpixels, according to some embodiments
  • Figure 9 illustrates an example of a process flow for operating a PMUT array in a selectable one of a first mode and a second mode.
  • the described implementations may be included in or associated with a variety of electronic devices such as, but not limited to: mobile telephones, multimedia Internet enabled cellular telephones, mobile television receivers, wireless devices, smartphones, Bluetooth® devices, personal data assistants (PDAs), wireless electronic mail receivers, hand-held or portable computers, netbooks, notebooks, smartbooks, tablets, handwriting digitizers, fingerprint detectors, printers, copiers, scanners, facsimile devices, global positioning system (GPS) receivers/navigators, cameras, digital media players (such as MP3 players), camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, electronic reading devices (e.g., e-readers), mobile health devices, computer monitors, auto displays (including odometer and
  • EMS electromechanical systems
  • MEMS microelectromechanical systems
  • non-EMS applications aesthetic structures (such as display of images on a piece of jewelry or clothing) and a variety of EMS devices.
  • teachings herein also may be used in applications such as, but not limited to, electronic switching devices, radio frequency filters, sensors, accelerometers, gyroscopes, motion-sensing devices, fingerprint sensing devices, gesture recognition, magnetometers, inertial components for consumer electronics, parts of consumer electronics products, varactors, liquid crystal devices, electrophoretic devices, drive schemes, manufacturing processes and electronic test equipment.
  • electronic switching devices radio frequency filters
  • sensors accelerometers
  • gyroscopes motion-sensing devices
  • fingerprint sensing devices gesture recognition
  • magnetometers magnetometers
  • inertial components for consumer electronics, parts of consumer electronics products, varactors, liquid crystal devices, electrophoretic devices, drive schemes, manufacturing processes and electronic test equipment.
  • the systems, methods and devices of the disclosure each have several innovative aspects, no single one of which is solely responsible for the desirable attributes disclosed herein.
  • the subject matter described in this disclosure can be implemented in a piezoelectric micromechanical ultrasonic transducer (PMUT), certain aspects of which have been described in United States Patent Application No. 14/569,280, filed on December 12, 2014 and entitled "MICROMECHANICAL ULTRASONIC TRANSDUCERS AND DISPLAY," and in United States Patent Application No. 14/569,256, filed on December 12, 2014 and entitled
  • PIEZOELECTRIC ULTRASONIC TRANSDUCER AND PROCESS each assigned to the assignee of the present invention and hereby incorporated by reference into the present application in its entirety for all purposes.
  • One innovative aspect of the subject matter described in this disclosure can be implemented by a PMUT array and associated electronics capable of performing, nearly simultaneously, both imaging of surface topography of a finger and imaging of subdermal tissue of the finger.
  • Finger surface topography may consist of ridges, valleys and minutia that are typically used by fingerprint matching algorithms.
  • Imaging of the subdermal tissue may provide additional three-dimensional (3-D) fingerprint information and may be used to provide additional security for authentication/verification. Further, 3-D fingerprint images may serve as a metric for finger liveness determination.
  • Liveness determination is important to verify that an imaged fingerprint is from a living human digit and not a synthetic, dismembered or cadaver human digit.
  • the presently disclosed techniques enable a PMUT array to selectively switch between a first mode that provides high-resolution epidermal imaging, and a second mode that provides lower resolution and higher acoustic pressure appropriate for 3-D subdermal imaging and liveness determination of an object (purportedly a human finger of a live person) being imaged.
  • the second mode (the "beamforming mode") of operation, transmission side beam-forming may produce a relatively high acoustic pressure, focused beam pattern operable to produce acoustic echoes from subsurface layers of an object being imaged.
  • the characteristic acoustic echoes from subcutaneous tissue e.g., dermis or hypodermis
  • the disclosed techniques enable a high confidence determination of whether or not subsurface features of the object being imaged is consistent with living subcutaneous tissue.
  • a single apparatus may perform both fingerprint surface imaging and fingerprint 3-D imaging for additional security and liveness
  • the same PMUT array may be used for both fingerprint surface imaging and 3-D imaging including liveness determination, and each function may be performed within a few seconds or portion of a second, anti-spoofmg protection may be provided for an existing ultrasonic fingerprint imaging system with little additional cost or user inconvenience.
  • One innovative aspect of the subject matter described in this disclosure may be implemented in an apparatus that includes a one- or two-dimensional array of piezoelectric micromechanical ultrasonic transducer (PMUT) elements positioned below, beside, with, on or above a backplane of a display or an ultrasonic fingerprint sensor array.
  • PMUT piezoelectric micromechanical ultrasonic transducer
  • the PMUT array may be configurable to operate in modes corresponding to multiple frequency ranges.
  • the PMUT array may be configurable to operate in a low-frequency mode corresponding to a low-frequency range (e.g., 50 kHz to 200 kHz) or in a high- frequency mode corresponding to a high-frequency range (e.g., 1 MHz to 25 MHz).
  • a low-frequency mode corresponding to a low-frequency range (e.g., 50 kHz to 200 kHz) or in a high- frequency mode corresponding to a high-frequency range (e.g., 1 MHz to 25 MHz).
  • an apparatus may be capable of imaging at relatively higher resolution. Accordingly, the apparatus may be capable of detecting touch, fingerprint, stylus, and biometric information from an object such as a finger placed on the surface of the display or sensor array.
  • Such a high-frequency mode may be referred to herein as a fingerprint sensor mode.
  • the apparatus When operating in the low-frequency mode, the apparatus may be capable of emitting sound waves that are capable of relatively greater penetration into air than when the apparatus is operating in the high-frequency mode.
  • Such lower-frequency sound waves may be transmitted through various overlying layers including a cover glass, a touchscreen, a display array, a backlight, a housing or enclosure, or other layers positioned between an ultrasonic transmitter and a display or sensor surface.
  • a port may be opened through one or more of the overlying layers to optimize acoustic coupling from the PMUT array into air.
  • the lower- frequency sound waves may be transmitted through the air above the display or sensor surface, reflected from one or more objects near the surface, transmitted through the air and back through the overlying layers, and detected by an ultrasonic receiver. Accordingly, when operating in the low- frequency mode, the apparatus may be capable of operating in a gesture detection mode, wherein free-space gestures near but not necessarily touching the display may be detected.
  • the PMUT array may be configurable to operate in a medium- frequency mode corresponding to a frequency range between the low-frequency range and the high-frequency range (e.g., about 200 kHz to about 1 MHz).
  • a medium- frequency mode corresponding to a frequency range between the low-frequency range and the high-frequency range (e.g., about 200 kHz to about 1 MHz).
  • the apparatus may be capable of providing touch sensor functionality, although with somewhat less resolution than the high-frequency mode.
  • the PMUT array may be addressable for wavefront beam forming, beam steering, receive-side beam forming, and/or selective readout of returned signals. For example, individual columns, rows, sensor pixels and/or groups of sensor pixels may be separately addressable.
  • a control system may control an array of transmitters to produce wavefronts of a particular shape, such as planar, circular or cylindrical wavefronts.
  • the control system may control the magnitude and/or phase of the array of transmitters to produce constructive or destructive interference in desired locations.
  • the control system may control the magnitude and/or phase of the array of transmitters to produce constructive interference in one or more locations in which a touch or gesture has been detected or is likely to be detected.
  • PMUT devices may be co-fabricated with thin- film transistor (TFT) circuitry or CMOS circuitry on the same substrate, which may be a silicon, glass or plastic substrate in some examples.
  • TFT substrate may include row and column addressing electronics, multiplexers, local amplification stages and control circuitry.
  • an interface circuit including a driver stage and a sense stage may be used to excite a PMUT device and detect responses from the same device.
  • a first PMUT device may serve as an acoustic or ultrasonic transmitter and a second PMUT device may serve as an acoustic or ultrasonic receiver.
  • different PMUT devices may be capable of low- and high-frequency operation (e.g.
  • the same PMUT device may be used for low- and high-frequency operation.
  • the PMUT may be fabricated using a silicon wafer with active silicon circuits fabricated in the silicon wafer.
  • the active silicon circuits may include electronics for the functioning of the PMUT or PMUT array.
  • the PMUT array may be configured as an ultrasonic sensor array.
  • Figures IB- ID illustrate cross-sectional views of various configurations of PMUT ultrasonic sensor arrays.
  • Figure IB depicts an ultrasonic sensor array 1100A with PMUTs as transmitting and receiving elements that may be used, for example, as an ultrasonic fingerprint sensor, an ultrasonic touchpad, or an ultrasonic imager.
  • PMUT sensor elements 1162 on a PMUT sensor array substrate 1160 may emit and detect ultrasonic waves.
  • an ultrasonic wave 1164 may be transmitted from at least one PMUT sensor element 1 162.
  • the ultrasonic wave 1164 may travel through an acoustic coupling medium 1165 and a platen 1190a towards an object 1102 such as a finger or a stylus positioned on an outer surface of the platen 1190a.
  • a portion of the ultrasonic wave 1164 may be transmitted through the platen 1190a and into the object 1102, while a second portion is reflected from the surface of platen 1190a back towards the sensor element 1162.
  • the amplitude of the reflected wave may depend in part on the acoustic properties of the object 1102.
  • the reflected wave may be detected by the sensor elements 1162, from which an image of the object 1102 may be acquired.
  • sensor arrays having a pitch of about 50 microns (about 500 pixels per inch)
  • ridges and valleys of a fingerprint may be detected.
  • An acoustic coupling medium 1165 such as an adhesive, gel, a compliant layer or other acoustic coupling material may be provided to improve coupling between an array of PMUT sensor elements 1162 disposed on the sensor array substrate 1160 and the platen 1190a.
  • the acoustic coupling medium 1165 may aid in the transmission of ultrasonic waves to and from the sensor elements 1162.
  • the platen 1190a may include, for example, a layer of glass, plastic, sapphire, metal, metal alloy, or other platen material.
  • An acoustic impedance matching layer or coating (not shown) may be disposed on an outer surface of the platen 1190a.
  • the platen 1190a may include a coating (not shown) on the outer surface.
  • Figure 1C depicts an ultrasonic sensor and display array 1100B with PMUT sensor elements 1162 and display pixels 1166 co-fabricated on a sensor and display substrate 1160.
  • the sensor elements 1162 and display pixels 1166 may be collocated in each cell of an array of cells.
  • the sensor element 1 162 and the display pixel 1166 may be fabricated side-by-side within the same cell.
  • part or all of the sensor element 1162 may be fabricated above or below the display pixel 1166.
  • Platen 1190b may be positioned over the sensor elements 1162 and the display pixels 1166 and may function as or include a cover lens or cover glass.
  • the cover glass may include one or more layers of materials such as glass, plastic or sapphire, and may include provisions for a capacitive touchscreen.
  • An acoustic impedance matching layer or coating (not shown) may be disposed on an outer surface of the platen 1190b.
  • Ultrasonic waves 1164 may be transmitted and received from one or more sensor elements 1 162 to provide imaging capability for an object 1102 such as a stylus or a finger placed on the cover glass 1190b.
  • the cover glass 1190b is substantially transparent to allow optical light from the array of display pixels 1166 to be viewed by a user through the cover glass 1190b. The user may choose to touch a portion of the cover glass 1190b, and that touch may be detected by the ultrasonic sensor array.
  • Biometric information such as fingerprint information may be acquired, for example, when a user touches the surface of the cover glass 1190b.
  • An acoustic coupling medium 1165 such as an adhesive, gel, or other acoustic coupling material may be provided to improve acoustic, optical and mechanical coupling between the sensor array substrate 1160 and the cover glass.
  • the coupling medium 1 165 may be a liquid crystal material that may serve as part of a liquid crystal display (LCD).
  • LCD liquid crystal display
  • a backlight may be optically coupled to the sensor and display substrate 1160.
  • the display pixels 1166 may be part of an amorphous light-emitting diode (AMOLED) display with light-emitting display pixels.
  • AMOLED amorphous light-emitting diode
  • the ultrasonic sensor and display array 1100B may be used for display purposes and for touch, stylus or fingerprint detection.
  • Figure ID depicts an ultrasonic sensor and display array 1 lOOC with a sensor array substrate 1160a positioned behind a display array substrate 1160b.
  • An acoustic coupling medium 1165 a may be used to acoustically couple the sensor array substrate 1160a to the display array substrate 1160b.
  • An optical and acoustic coupling medium 1 165b may be used to optically and acoustically couple the sensor array substrate 1160a and the display array substrate 1160b to a cover lens or cover glass 1190c, which may also serve as a platen for the detection of fingerprints.
  • An acoustic impedance matching layer or coating may be disposed on an outer surface of the platen 1190c.
  • Ultrasonic waves 1164 transmitted from one or more sensor elements 1162 may travel through the display array substrate 1160b and cover glass 1190c, reflect from an outer surface of the cover glass 1190c, and travel back towards the sensor array substrate 1160a where the reflected ultrasonic waves may be detected and image information acquired.
  • the ultrasonic sensor and display array 1 lOOC may be used for providing visual information to a user and for touch, stylus or fingerprint detection from the user.
  • a PMUT sensor array may be formed on the backside of the display array substrate 1160b.
  • the sensor array substrate 1160a with a PMUT sensor array may be attached to the backside of the display array substrate 1160b, with the backside of the sensor array substrate 1160a attached directly to the backside of the display array substrate 1160b, for example, with an adhesive layer or adhesive material (not shown).
  • Spoofing may include use of synthetic objects having a surface that mimics a human fingerprint's ridge and valley characteristics. Spoofing may also involve the use of real human digits, dismembered from a living or dead human victim.
  • FIG. 2 illustrates a PMUT array according to an implementation.
  • the PMUT array 200 includes 163 PMUT elements or PMUTs 201.
  • Each PMUT element 201 may correspond to or be referred to as a "pixel".
  • the PMUT array 200 includes an arrangement of alternating rows of pixels that are "staggered” such that PMUT elements in alternate rows are shifted by half a pitch distance between adjacent pixels within a row.
  • Such an arrangement may also be referred to as a "hexagonal lattice" by which is meant a honeycomb-like arrangement of pixels configured such that any pixel, other than an edge pixel, is adjacent to six neighboring pixels, rows of adjacent pixels being disposed along or parallel to one of three principle axes, each of the three principle axes being disposed at an
  • first axis 210 is disposed horizontally, whereas second axis 220 and third axis 230 are disposed respectively at +60 degrees and -60 degrees inclination with respect to the horizontal axis.
  • each pixel 201 in PMUT array 200 has been annotated with an integer number: 1, 2, 3 or 4.
  • the meaning of the annotation may be better appreciated by referring to Figure 3, which shows a portion of PMUT array 200, according to some implementations. More particularly, the illustrated portion of PMUT array 200 that includes 121 pixels 201 that are disposed so as to form seven "superpixel" regions 250.
  • a "superpixel”, as the term is used herein and in the claims, means a plurality of pixels, including at least one inner pixel disposed in a central portion of a superpixel region, and one or more sets (e.g. rings) of outer pixels disposed in an outer portion of the superpixel region.
  • a superpixel may include a single center pixel and one or more rings of pixels that surround the center pixel, each pixel in a ring of pixels having a substantially equal distance from the center pixel.
  • each of seven hexagonal superpixel regions 250(i) includes a respective inner pixel (annotated by the integer ⁇ ') located proximate to a center of the superpixel region.
  • An inner pixel 1 may also be referred to as a "center pixel".
  • a single center pixel is disposed proximate to the center of each superpixel region.
  • a first group or set of (“first pixel set”) of inner pixels may be contemplated that are disposed proximate to and equidistant from the center of each superpixel region.
  • Each superpixel region 250 also includes outer pixels disposed in an outer portion of the superpixel region 250.
  • each superpixel region 250 includes a second set or group of outer pixels (“second pixel set"), annotated by the integer '2'.
  • second pixel set annotated by the integer '2'.
  • Six outer pixels 2 are shown to be proximate to and substantially equidistant from each respective center pixel 1.
  • each superpixel region 250 also includes a third pixel set that includes pixels that are disposed on a boundary of each superpixel region. Pixels in the third pixel set, annotated by the integer '3', are disposed proximate to a center of each edge of the hexagonal superpixel region 250 and are substantially equidistant from the center pixel 1.
  • a fourth pixel set includes pixels annotated by the integer '4' that are disposed proximate to each corner of the hexagonal superpixel region 250, and are substantially equidistant from the center pixel 1.
  • outer pixels 3 are more distant from the center pixel 1 than outer pixels 2, and less distant from the center pixel 1 than outer pixels 4.
  • PMUT elements in a superpixel may be grouped according to their position from the center of the superpixel.
  • one or more sets or groups of outer pixels may be shared between adjacent superpixels.
  • pixels of the fourth pixel set may be shared between adjacent superpixels.
  • each PMUT element in each pixel set may be systematically coupled with transceiver electronics, such that the pixel sets may be separately actuated with a transmission signal having a controllable phase and/or time delay.
  • the time delay for each respective pixel set may be selected so that the acoustic pressure created by each superpixel is focused at a predetermined distance from the center pixel(s) using beamforming principles.
  • FIG. 4 illustrates an example of beam- focusing or transmitter side beamforming for a superpixel region including pixel sets as described above.
  • time of flight and constructive interference between ultrasonic emissions from each group of PMUT elements within the superpixel may result in a focused, highly shaped, and relatively high intensity ultrasonic signal.
  • each pixel set may be supplied with a transmission signal having a predetermined time delay. The time delay for each pixel set may be selected so that the acoustic pressure created by each superpixel is focused at a predetermined location.
  • the ultrasonic emissions from a superpixel may be focused by first applying an excitation signal to the fourth pixel set; following a time delay, applying the excitation signal to the third pixel set;
  • FIG. 5 illustrates an example acoustic pressure map for a superpixel of PMUT elements operated in a beamforming mode. It may be observed that the superpixel may generate a well-focused beam having relatively high acoustic pressure at a distance of interest along the thickness direction of the object being imaged.
  • the focused beam may have an acoustic pressure that is substantially higher (at least 2X higher) than the average acoustic pressure produced when operating in a plane wave excitation transmission mode.
  • the peak acoustic pressure is approximately six times greater than the average acoustic pressure produced when operating in a plane wave excitation and transmission mode (e.g., comparing Figure 5 with Figure 1 A, Detail B).
  • the distance of interest (which may correspond to a selected depth of focus) is determined by the spacing between pixel sets 250(1) through 250(4) and configurable time delays. By controlling the time delays between pixel sets 250(1) through 250(4) of the superpixel region 250, different depths of the finger tissue may be imaged to provide 3-D tissue imaging as well as liveness determination.
  • Each of the example superpixels 250(i) illustrated in Figure 3 may be characterized as including 19 pixels arranged along a hexagonal lattice. It should be noted that any number of alternative superpixel arrangements are contemplated by the present disclosure, provided only that the superpixel includes, as defined above, a plurality of pixels, including at least one inner pixel disposed in a central portion of a superpixel region, and one or more sets of outer pixels disposed in an outer portion of the superpixel region. [0050] Figure 6 illustrates some examples of superpixel arrangements as contemplated by the present disclosure.
  • Detail E of Figure 6 illustrates a superpixel including seven pixels arranged on a hexagonal lattice so as to form a hexagon that includes one center pixel (1) and a first pixel set of six pixels (2) disposed in an outer portion of the superpixel region approximately equidistant from pixel (1).
  • Detail F illustrates a superpixel including 37 pixels arranged on a hexagonal lattice so as to form a hexagon that includes one center pixel (first pixel set) (1) and five additional pixel sets, each disposed in an outer portion of the superpixel region at various distances from the center pixel (1).
  • each pixel in a third pixel set of pixels (3) is disposed at a greater distance from the center pixel (1) than each of the pixels (2) included in a second pixel set and at a lesser distance from the center pixel (1) than each pixel in a fourth pixel set that includes pixels (4).
  • each of the pixels (5) is disposed at a greater distance from the center pixel (1) than each of the pixels (4) and at a lesser distance from the center pixel (1) than each of the pixels (6).
  • Detail G illustrates a superpixel including ten pixels arranged on a hexagonal lattice so as to form a triangle that includes one center pixel (first pixel set) (1) and two additional pixel sets disposed, in an outer portion of the superpixel region, at various distances from the center pixel (1).
  • Each of a second pixel set that includes six pixels (2) is disposed proximate to the center pixel (1).
  • Each of a third pixel set that includes three pixels (3) is disposed at a greater distance from the center pixel (1) than each of the pixels (2).
  • Figure 7 illustrates further examples of superpixel arrangements as contemplated by the present disclosure.
  • pixels are aligned along orthogonal rows and columns rather than the hexagonal lattice arrangements contemplated in previous examples.
  • Detail J of Figure 7 illustrates a superpixel including nine pixels arranged to form a square that includes one center pixel (first pixel set) (1) and two additional pixel sets including pixels disposed, in an outer portion of the superpixel region, at various distances from the center pixel (1).
  • Each of a second pixel set of four pixels (2) is disposed proximate to the center pixel (1).
  • Each of a third pixel set of four pixels (3) is disposed at a greater distance from the center pixel (1) than each of the pixels (2).
  • Detail K of Figure 7 illustrates a superpixel including sixteen pixels arranged to form a square that includes a first pixel set of four pixels (1) disposed in a central portion of the superpixel and two additional groups of pixels disposed, in an outer portion of the superpixel, at various distances from the central portion.
  • Each of a second pixel set of eight pixels (2) is disposed proximate to the first pixel set of pixels (1).
  • Each of a third pixel set of four pixels (3) is disposed at a greater distance from the first pixel set of pixels (1) than each of the second pixel set of pixels (2).
  • the distances from the center of each pixel (2) to the centroid of the first pixel set are substantially the same.
  • the distances from the center of each pixel (3) to the centroid of the first pixel set are substantially the same.
  • Detail L of Figure 7 illustrates a superpixel including 25 pixels arranged to form a square that includes one center pixel (first pixel set) (1) and five additional pixel sets of pixels disposed in an outer portion of the superpixel at various distances from the center pixel (1).
  • Each of a second pixel set of four pixels (2) is disposed proximate to the center pixel (1).
  • Each of a third pixel set of four pixels (3) is disposed at a greater distance from the center pixel (1) than each of the pixels (2) in the second pixel set.
  • Each of a fourth pixel set of four pixels (4) is disposed at a greater distance from the center pixel (1) than each of the pixels (3) in the third pixel set.
  • Each of a fifth pixel set of eight pixels (5) is disposed at a greater distance from the center pixel (1) than each of the pixels (4) in the fourth pixel set.
  • Each of a sixth pixel set of four pixels (6) is disposed at a greater distance from the center pixel (1) than each of the pixels (5) in the fifth pixel set.
  • FIG. 8 illustrates an array 800 of superpixels, according to some implementations.
  • each superpixel region 250(i) includes a center pixel (first pixel set) (1), a second pixel set of pixels (2), a third pixel set of pixels (3), and a fourth pixel set of pixels (4).
  • the array 800 includes drive input terminals 860(1), 860(2), 860(3), 860(4), which may be communicatively coupled with transceiver electronics 810. Each drive input terminal may be electrically coupled by way of a respective fixedly configured (hardwired) conductive path with a corresponding pixel set.
  • drive input terminal 860(1) is conductively coupled by way of fixedly configured conductive path 870(1) with center pixel (first pixel set) (1);
  • drive input terminal 860(2) is conductively coupled by way of fixedly configured conductive path 870(2) with the second pixel set of pixels (2);
  • drive input terminal 860(3) is conductively coupled by way of fixedly configured conductive path 870(3) with the third pixel set of pixels (3);
  • drive input terminal 860(4) is conductively coupled by way of fixedly configured conductive path 870(4) with the fourth pixel set of pixels (4).
  • pixel sets of only a single superpixel region are shown to be coupled with respective drive input terminals (860). It will be appreciated, however, that two or more superpixel regions may be similarly coupled with the same drive input terminals. Alternatively or in addition, some superpixel regions may be coupled with a different set of drive input terminals.
  • each of the drive input terminals 860 may be any of the drive input terminals 860.
  • the transceiver electronics may be configured to transmit signals to each of the drive input terminals. In a first mode of operation, the transceiver electronics may concurrently, or nearly
  • each pixel in each pixel set may be separately actuated with a transmission signal of substantially the same phase delay to produce a plane wave excitation pattern appropriate for fingerprint imaging, for example.
  • the transceiver electronics may sequentially transmit signals to each of the first drive input terminal, the second drive input terminal, and the third drive input terminal, such that a time delay occurs between transmitting signals to each respective pixel set.
  • the time delay for each respective pixel set may be selected so that the acoustic pressure created by each superpixel is focused at a predetermined distance from the center pixel(s) using beamforming principles.
  • Figure 9 illustrates an example of a process flow for operating a PMUT array in a selectable one of a first mode and a second mode. As described
  • the PMUT array may include a plurality of superpixel regions, each superpixel region including at least two pixel sets, a first pixel set of the at least two pixel sets being disposed in a central portion of the superpixel region and at least a second pixel set being disposed in an outer portion of the superpixel region, the array having an electrical coupling with transceiver electronics.
  • method 900 includes a step 910 for selecting one of a first mode and a second mode of operating the PMUT array.
  • the transceiver electronics may be configured to switch rapidly from a transmit mode that allows launching of either plane ultrasonic waves or focused ultrasonic waves to a receive mode that allows the detection of ultrasonic signals reflected from an object, which may be useful for applications such as subdermal imaging where the acoustic path length from the object to the PMUT array is longer than a couple of acoustic wavelengths.
  • the method may proceed, at step 920, to control a PMUT array with the transceiver electronics to generate a substantially plane ultrasonic wave.
  • the electrical coupling between the transceiver electronics and the PMUT array may include a first fixedly configured conductive path connecting pixels in the first pixel set with a first drive input terminal and a second fixedly configured conductive path connecting pixels and the second pixel set with a second drive input terminal. More particularly, in the first operating mode the transceiver electronics may concurrently transmit signals to each of the first drive input terminal and the second drive input terminal. The signals, being received at the input terminals substantially simultaneously, may cause the array to generate a substantially plane ultrasonic wave.
  • the method may proceed, at step 930, to control a PMUT array with the transceiver electronics to generate from each superpixel region a focused beam of relatively higher acoustic pressure. More particularly, in the second operating mode, the transceiver electronics may sequentially transmit signals to each of the first drive input terminal and the second drive input terminal such that a time delay occurs between delivery of a first transmission signal to the second drive input terminal and delivery of a second transmission signal to the first drive input terminal. The time delay may be selected, using beamforming principles, so that the acoustic pressure created by each superpixel is focused at a predetermined distance from the center pixel(s).
  • an arrangement including an array of piezoelectric ultrasonic transducers configured as superpixels, operable to selectively perform either fingerprint imaging (e.g. epidermal imaging) or subdermal imaging (e.g. for liveness detection), has been disclosed. It will be appreciated that a number of alternative configurations and fabrication techniques may be contemplated.
  • a phrase referring to "at least one of a list of items refers to any combination of those items, including single members.
  • “at least one of: a, b, or c” is intended to cover: a, b, c, a-b, a-c, b-c, and a-b-c.
  • the hardware and data processing apparatus used to implement the various illustrative logics, logical blocks, modules and circuits described in connection with the aspects disclosed herein may be implemented or performed with a general purpose single- or multi-chip processor, a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any combination thereof designed to perform the functions described herein.
  • a general purpose processor may be a microprocessor or any conventional processor, controller, microcontroller, or state machine.
  • a processor also may be implemented as a combination of computing devices, e.g., a combination of a DSP and a microprocessor, a plurality of microprocessors, one or more microprocessors in conjunction with a DSP core, or any other such configuration.
  • a processor also may be implemented as a combination of computing devices, e.g., a combination of a DSP and a microprocessor, a plurality of microprocessors, one or more microprocessors in conjunction with a DSP core, or any other such configuration.
  • the functions described may be implemented in hardware, digital electronic circuitry, computer software, firmware, including the structures disclosed in this specification and their structural equivalents thereof, or in any combination thereof. Implementations of the subject matter described in this specification also can be implemented as one or more computer programs, i.e., one or more modules of computer program instructions, encoded on a computer storage media for execution by or to control the operation of data processing apparatus.
  • the functions may be stored on or transmitted over as one or more instructions or code on a computer-readable medium, such as a non-transitory medium.
  • a computer-readable medium such as a non-transitory medium.
  • the processes of a method or algorithm disclosed herein may be implemented in a processor-executable software module which may reside on a computer-readable medium.
  • Computer-readable media include both computer storage media and communication media including any medium that can be enabled to transfer a computer program from one place to another. Storage media may be any available media that may be accessed by a computer.
  • non-transitory media may include RAM, ROM, EEPROM, CD-ROM or other optical disk storage, magnetic disk storage or other magnetic storage devices, or any other medium that may be used to store desired program code in the form of instructions or data structures and that may be accessed by a computer. Also, any connection can be properly termed a computer-readable medium.
  • Disk and disc includes compact disc (CD), laser disc, optical disc, digital versatile disc (DVD), floppy disk, and blu-ray disc where disks usually reproduce data

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Abstract

L'invention concerne une mosaïque d'éléments de transducteur à ultrasons piézoélectrique comprenant une pluralité de zones de superpixels. Chaque zone de superpixels comprend au moins deux ensembles de pixels, un premier ensemble de pixels parmi les au moins deux ensembles de pixels étant situé dans une partie centrale de la zone de superpixels, et au moins un second ensemble de pixels étant situé dans une partie externe de la zone de superpixels. Un couplage électrique peut être prévu entre la mosaïque et l'électronique du transducteur. L'électronique de l'émetteur-récepteur peut être configurée pour traiter la mosaïque dans un premier mode et un second mode sélectionnables. Dans le premier mode, la mosaïque génère une onde ultrasonore sensiblement plane possédant une première pression acoustique. Dans le second mode, la mosaïque génère, à partir de chaque zone de superpixels, un faisceau focalisé possédant une seconde pression acoustique sensiblement supérieure à la première pression acoustique.
PCT/US2015/055821 2014-10-15 2015-10-15 Mosaïque de superpixels de transducteurs piézoélectriques à ultrasons pour formation de faisceau 2d WO2016061406A1 (fr)

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CN201580054066.1A CN106999985B (zh) 2014-10-15 2015-10-15 用于2-d波束成形的压电超声换能器的超像素阵列

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US201462064418P 2014-10-15 2014-10-15
US201462064416P 2014-10-15 2014-10-15
US201462064417P 2014-10-15 2014-10-15
US62/064,416 2014-10-15
US62/064,417 2014-10-15
US62/064,418 2014-10-15
US201562241651P 2015-10-14 2015-10-14
US14/883,586 2015-10-14
US14/883,586 US10139479B2 (en) 2014-10-15 2015-10-14 Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming
US14/883,585 2015-10-14
US14/883,583 2015-10-14
US62/241,651 2015-10-14
US14/883,583 US10001552B2 (en) 2014-10-15 2015-10-14 Three-port piezoelectric ultrasonic transducer
US14/883,585 US9995821B2 (en) 2014-10-15 2015-10-14 Active beam-forming technique for piezoelectric ultrasonic transducer array

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