WO2016051283A3 - Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment - Google Patents

Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment Download PDF

Info

Publication number
WO2016051283A3
WO2016051283A3 PCT/IB2015/002350 IB2015002350W WO2016051283A3 WO 2016051283 A3 WO2016051283 A3 WO 2016051283A3 IB 2015002350 W IB2015002350 W IB 2015002350W WO 2016051283 A3 WO2016051283 A3 WO 2016051283A3
Authority
WO
WIPO (PCT)
Prior art keywords
interferometric system
branch
radiation
optical elements
interferometric
Prior art date
Application number
PCT/IB2015/002350
Other languages
French (fr)
Other versions
WO2016051283A2 (en
Inventor
Radim Chmelik
Zbyněk DOSTÁL
Pavel Kolman
Tomáš SLABÝ
Martin LOŠTÁK
Original Assignee
Vysoké Učení Technické V Brně
TESCAN ORSAY HOLDING , a.s.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vysoké Učení Technické V Brně, TESCAN ORSAY HOLDING , a.s. filed Critical Vysoké Učení Technické V Brně
Publication of WO2016051283A2 publication Critical patent/WO2016051283A2/en
Publication of WO2016051283A3 publication Critical patent/WO2016051283A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02024—Measuring in transmission, i.e. light traverses the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02047—Interferometers characterised by particular imaging or detection techniques using digital holographic imaging, e.g. lensless phase imaging without hologram in the reference path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/005—Adaptation of holography to specific applications in microscopy, e.g. digital holographic microscope [DHM]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/04—Processes or apparatus for producing holograms
    • G03H1/0443—Digital holography, i.e. recording holograms with digital recording means
    • G03H2001/0454—Arrangement for recovering hologram complex amplitude
    • G03H2001/0456—Spatial heterodyne, i.e. filtering a Fourier transform of the off-axis record
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2222/00—Light sources or light beam properties
    • G03H2222/20—Coherence of the light source
    • G03H2222/24—Low coherence light normally not allowing valuable record or reconstruction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2223/00—Optical components
    • G03H2223/23—Diffractive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computing Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Interferometric system with variable optics for non-coherent source of radiation and method of interferometric system alignment The invention relates to the interferometric system for creation of hologram with spatial carrier frequency comprising a source of radiation (1) with low coherence, behind which a field plane (2) optically conjugated with an output image plane (10) is arranged, a beam splitter (4) for splitting the beam of radiation into two separate branches of interferometer, an object branch with plurality of optical elements, a reference branch with plurality of optical elements, a diffraction grating (7), an extender (12), a transmission system of reflectors and a detector arranged in the output image plane (10), wherein the plurality of optical elements in the object branch includes a objective lens (5.12), wherein the objective lens used in the reference branch is not identical with the one used in the object branch, which means a significant financial saving. The system comprises object and reference input imaging systems (5.1) and (5.2) and object and reference output imaging systems (8.1) and (8.2) wherein one of them includes an optical element with variable focal length.
PCT/IB2015/002350 2014-08-12 2015-08-12 Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment WO2016051283A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CZPV2014-538 2014-08-12
CZ2014-538A CZ2014538A3 (en) 2014-08-12 2014-08-12 Interferometric system with variable optics for non-coherent radiation source and method of tuning the interferometric system

Publications (2)

Publication Number Publication Date
WO2016051283A2 WO2016051283A2 (en) 2016-04-07
WO2016051283A3 true WO2016051283A3 (en) 2016-08-04

Family

ID=54292824

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2015/002350 WO2016051283A2 (en) 2014-08-12 2015-08-12 Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment

Country Status (2)

Country Link
CZ (1) CZ2014538A3 (en)
WO (1) WO2016051283A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110050234B (en) * 2016-12-09 2022-01-04 Imec 非营利协会 Method and imaging system for holographic imaging
CN106969702A (en) * 2017-05-04 2017-07-21 北京理工大学深圳研究院 It is a kind of can flexible zoom off-axis digital holography measurement apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010037861A1 (en) * 2008-10-03 2010-04-08 Universite Libre De Bruxelles Holographic microscopy and method to investigate nano-sized objects
EP2378244A1 (en) * 2010-04-14 2011-10-19 Vysoke Uceni Technicke V Brne Interferometric system with spatial carrier frequency capable of displaying in polychromatic radiation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690159A (en) * 1970-04-29 1972-09-12 Gc Optronics Inc Holographic interferometry employing image plane holograms
US3715164A (en) * 1971-11-01 1973-02-06 Trw Inc Four beam holographic interferometry
CZ8547U1 (en) 1999-03-09 1999-04-16 Radim Chmelík Holographic confocal microscope for white light
CZ19150U1 (en) 2008-10-06 2008-12-08 Vysoké ucení technické v Brne Holographic microscope
WO2010122530A1 (en) * 2009-04-24 2010-10-28 Ecole Polytechnique Federale De Lausanne (Epfl) A method and apparatus for enhanced spatial bandwidth wavefronts reconstructed from digital interferograms or holograms

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010037861A1 (en) * 2008-10-03 2010-04-08 Universite Libre De Bruxelles Holographic microscopy and method to investigate nano-sized objects
EP2378244A1 (en) * 2010-04-14 2011-10-19 Vysoke Uceni Technicke V Brne Interferometric system with spatial carrier frequency capable of displaying in polychromatic radiation

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
MARTIN LOST'ÁK ET AL: "Coherence-controlled holographic microscopy in diffuse media", OPTICS EXPRESS, vol. 22, no. 4, 18 February 2014 (2014-02-18), pages 4180, XP055244839, DOI: 10.1364/OE.22.004180 *
SLAB TOMÁS ET AL: "Coherence-controlled holographic microscope", 17TH SLOVAK-CZECH-POLISH OPTICAL CONFERENCE ON WAVE AND QUANTUM ASPECTS OF CONTEMPORARY OPTICS, SPIE, 1000 20TH ST. BELLINGHAM WA 98225-6705 USA, vol. 7746, no. 1, 24 September 2010 (2010-09-24), pages 1 - 8, XP060010624, DOI: 10.1117/12.882048 *
TOMÁS SLABÝ ET AL: "Off-axis setup taking full advantage of incoherent illumination in coherence-controlled holographic microscope", OPTICS EXPRESS, vol. 21, no. 12, 13 June 2013 (2013-06-13), pages 14747, XP055245758, DOI: 10.1364/OE.21.014747 *

Also Published As

Publication number Publication date
WO2016051283A2 (en) 2016-04-07
CZ305665B6 (en) 2016-01-27
CZ2014538A3 (en) 2016-01-27

Similar Documents

Publication Publication Date Title
EP4293414A3 (en) Eyepieces for augmented reality display system
GB2569749A (en) Optical system for collecting distance information within a field
WO2016046514A8 (en) Holographic waveguide opticaltracker
WO2019199447A3 (en) Integrated optical beam steering system
PH12017501062A1 (en) High efficiency optical combiner for multiple non-coherent light sources
WO2015006784A3 (en) Planar waveguide apparatus with diffraction element(s) and system employing same
WO2016188620A3 (en) Interferometric measuring arrangement
BR112014021878A8 (en) STEREOSCOPIC IMAGING DEVICE
WO2016190932A3 (en) Zero optical path difference phased array
WO2014018584A8 (en) Partitioned aperture wavefront imaging method and system
WO2016018478A3 (en) Athermalized optics for laser wind sensing
TW201614200A (en) Light sensor modules and spectrometers including an optical grating structure
EP4273601A3 (en) Methods and apparatuses for reducing stray light emission from an eyepiece of an optical imaging system
WO2015168384A3 (en) System, apparatus and method for using birefringent lenses to create holograms from received electromagnetic radiation
AU2018274706A1 (en) Security device and method
BR112018016506A2 (en) a system to perform spectroscopy
WO2009094979A3 (en) Optical system for projecting an ir or uv test signal with an optical orientation of the projection axis in the visible spectral region
SG10201807071TA (en) An optical interference device
WO2016153599A3 (en) High performance spectrometer device with parallel interferometers
EP2902796A3 (en) Two axis interferometric tracking device and method
WO2016115321A3 (en) Diffraction-grating-based common-path interferometer for imaging fourier-transform spectroscopy
WO2016051283A3 (en) Interferometric system with variable optics for non-coherent light source and method of interferometric system alignment
WO2012005952A3 (en) System and method for interferometric autofocusing
EA201300047A1 (en) STATIC FOURI-SPECTROMETER
EA201100490A2 (en) INTERFEROMETRIC SYSTEM USING CARRIER SPATIAL FREQUENCY, CAPABLE OF FORMING IMAGES IN POLYCHROMATIC RADIATION

Legal Events

Date Code Title Description
NENP Non-entry into the national phase

Ref country code: DE

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15834715

Country of ref document: EP

Kind code of ref document: A2

122 Ep: pct application non-entry in european phase

Ref document number: 15834715

Country of ref document: EP

Kind code of ref document: A2