WO2016045816A1 - Ensemble formant capteur pour mesurer un déplacement et/ou un angle - Google Patents

Ensemble formant capteur pour mesurer un déplacement et/ou un angle Download PDF

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Publication number
WO2016045816A1
WO2016045816A1 PCT/EP2015/066748 EP2015066748W WO2016045816A1 WO 2016045816 A1 WO2016045816 A1 WO 2016045816A1 EP 2015066748 W EP2015066748 W EP 2015066748W WO 2016045816 A1 WO2016045816 A1 WO 2016045816A1
Authority
WO
WIPO (PCT)
Prior art keywords
encoder
coil
sensor
conductive track
conductive
Prior art date
Application number
PCT/EP2015/066748
Other languages
German (de)
English (en)
Inventor
Andre Yashan
Stefan Leidich
Aaron TROOST
Remigius Has
Dayo Oshinubi
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2016045816A1 publication Critical patent/WO2016045816A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/70—Position sensors comprising a moving target with particular shapes, e.g. of soft magnetic targets
    • G01D2205/77—Specific profiles

Definitions

  • No. 7,990,136 B2 describes a sensor arrangement with phase sensors based on Hall sensors.
  • the angle of rotation can be measured continuously.
  • suitable design of the cam could be closed in discrete steps on the angular position.
  • a uniqueness of the angle of rotation is given only for part of the circumference, namely 120 °.
  • a uniqueness about a full extent, d. H. 360 °, can be achieved by using a single wedge structure. The full 360 ° are not achievable in this way, since there is no known solution to reliably detect the return of the wedge structure from the full height to a minimum height. Because each known sensor integrates over part of the circumference, the edge can not be distinguished from a middle level of the gap.
  • Another sensor arrangement are the so-called
  • a shaft is equipped with a ring, which has a survey.
  • the survey has a variable width in the direction of rotation.
  • the width is modeled according to the sine function.
  • a sine and cosine signal can be generated as a function of a rotational angle.
  • the angle can be deduced. To achieve a sufficiently high resolution it is necessary to have several electrical periods on the To place shaft circumference. As a consequence, the full rotation of the shaft can not be determined mechanically.
  • a sensor arrangement according to the invention for path and / or angle measurement comprises a first transmitter with a first conductive track and a sensor with a first coil for generating eddy currents in the first transmitter.
  • the sensor and the first encoder are relative to each other in one
  • the first conductive track is formed such that a complex impedance of the first coil is variable in a scanning of the first track in the direction of movement.
  • the sensor arrangement further comprises a second transmitter with a second conductive track and a second coil for generating eddy currents in the second transmitter.
  • the second conductive track is formed such that a complex impedance of the second coil is variable in a scanning of the second track in the direction of movement.
  • first and second are not used in the context of the present invention to indicate a particular order or weighting, but merely to distinguish the respective components conceptually to be able to. Accordingly, this does not exclude that more than the components mentioned can be present.
  • the first track and / or the second track are formed such that their effective surface opposite the sensor can be changed in the direction of movement.
  • the "effective area” is to be understood as the area of the conductive track which contributes to the generation of eddy currents and thus to the generation of a field opposing the field of the coil.
  • the first track and / or the second track may be designed such that their geometry, their conductivity, their doping or a ratio of conductive areas to non-conductive areas in the direction of movement is variable.
  • the first track and / or the second track may be designed so that their distance to the sensor in the direction of movement is variable. The distance can be variable continuously or discontinuously.
  • the first conductive track of the first encoder and / or the second conductive track of the second encoder may have a variable width in the direction of movement. Under the
  • width is to be understood as meaning a dimension of a conductive track of the encoder perpendicular to the direction of movement
  • the width of the encoder at a first position in the direction of movement differs from a width of the encoder at a second position in the direction of movement.
  • the first track and / or the second track may be formed so that a complex impedance of the first coil and / or the second coil is periodically variable in a scanning of the first track and / or the second track in the direction of movement.
  • the first track may be different from the second track.
  • the first encoder and / or the second encoder may have a hub, wherein the hub has a recess.
  • the sensor may have a third coil for identifying the recess.
  • FIG. 1 shows a side view of a sensor arrangement according to a first
  • Figure 2 is a side view of a sensor arrangement according to a second
  • FIG. 3 shows a sensor according to a first embodiment
  • FIG. 4 shows a transmitter according to a second embodiment
  • FIG. 5 shows a sensor according to a third embodiment
  • FIG. 6 shows a transmitter according to a fourth embodiment
  • FIG. 7 shows a sensor according to a fifth embodiment
  • FIG. 8 shows a side view of a sensor arrangement according to a third
  • FIG. 9 side view of a sensor arrangement according to a fourth
  • FIG. 10 shows a side view of a sensor arrangement according to a fifth embodiment
  • Embodiment Embodiments of the invention
  • FIG. 1 shows a side view of a sensor arrangement 10 for path and / or angle measurement according to a first embodiment of the present invention
  • the present invention is particularly applicable in the automotive field.
  • the sensor arrangement 10 can be used for the rotational angle measurement of a shaft 12.
  • the shaft 12 may be, for example, a camshaft.
  • the shaft 12 is movable in a direction of movement 14 about its own axis 16 or rotatable.
  • the sensor arrangement comprises
  • the sensor 18 has a circuit board 20. As can be seen from the illustration of FIG. 1, the circuit board 20 is at the first
  • Embodiment arranged radially with respect to the shaft 12 and perpendicular to its axis 16 or oriented.
  • the sensor 18 has a first coil 26 on a first side 24, which may also be referred to as the front side.
  • the sensor 18 further has a second coil 30 on a second side 28, which lies opposite the first side 24 and can therefore also be referred to as the rear side.
  • the sensor arrangement 10 further comprises a first encoder 32, which is designed in the form of a first encoder wheel 34, and a second encoder 36, which is designed in the form of a second encoder wheel 38.
  • the first encoder 32 and the second encoder 36 are arranged on the shaft 12 and connected thereto. In this case, the first encoder 32 of the first coil 26 and the second encoder 36 of the second coil 30 faces. Since the board 20 is oriented perpendicular to the axis 16 of the shaft 12, the first encoder 32 is arranged parallel to the first coil 26 and the second encoder 36 in parallel to the second coil 30.
  • the first encoder 32 has a first conductive trace 40.
  • the second encoder 36 has a second conductive track 42.
  • the first coil 26 serves to generate eddy currents in the first encoder 32 and the second coil 30 serves to generate eddy currents in the second encoder 36.
  • the first conductive trace 40 is formed such that a complex impedance the first coil 26 when scanning the first track 40 in the
  • Movement direction 14 is changeable.
  • the second conductive track 42 is configured such that a complex impedance of the second coil 30 is variable in a scan of the second track 42 in the direction of movement 14.
  • the first conductive trace 40 is disposed on an outer periphery 44 of the first encoder 32 so that the first conductive trace 40 extends 360 degrees about the axis 16 of the shaft 12.
  • the second conductive track 42 is on one, for example
  • Outer periphery 46 of the second encoder 36 is arranged so that the second conductive track 42 extends 360 ° about the axis 16 of the shaft 12.
  • a signal of the sensor 18 changes.
  • the change may be continuous or discontinuous
  • the first conductive track 40 and / or the second conductive track 42 may for this purpose vary in the direction of movement 14
  • Conductivity a varying effective area, a varying doping, a varying ratio of conductive to non-conductive areas, such as hole track or trace with conductive and non-conductive stripes, or have a different varying property, which is a change of
  • the effective area of the first conductive track 40 and / or the second conductive track 42 is formed continuously increasing or decreasing.
  • the opposing field also changes continuously with the path.
  • the measured variable in the form of a path or angle and in particular rotation angle of the shaft 12 can be determined continuously.
  • the unambiguity range must be limited to increase the resolution. Exactly through
  • the present invention proposes the first conductive track 40 and the second one conductive track 42 to make different, so that the sensor 18 detected by the first coil 26 and the second coil 30 different signals indicating a unique position of the first encoder 32 and the second encoder 36. Further details of possible configurations of the first conductive trace 40 and the second conductive trace 42 will be described in more detail below.
  • FIG. 2 shows a sensor arrangement 10 according to a second embodiment of the present invention.
  • the circuit board 20 is arranged parallel to the shaft 12.
  • the first coil 26 and the second coil 30 are arranged on common side on one of the shaft 12 facing side 48 of the board 20.
  • the first coil 26 and the second coil 30 are arranged side by side on the board 20, so that the first encoder 32 of the first coil 26 and the second encoder 36 of the second coil 30 faces.
  • FIG. 3 shows a first embodiment of a first transmitter 32 according to the present invention.
  • the first embodiment of the encoder 32 will be described by way of example only as a possible embodiment of the first encoder 32 and the second encoder 36 may be formed identically.
  • the first conductive track 40 is formed so that the first encoder 32 and the first encoder wheel 34 has a wedge-shaped contour 50 of a height 52. Accordingly, along the circumferential direction of the first encoder 32, the height 52 of the first encoder 32, d. H. a dimension of the first encoder 32 in the radial direction from the outer periphery 44 to a center 54 of the first encoder 32.
  • the sensor 18 operates according to the first shown in Figure 1
  • the first conductive track 40 is formed so that its sensor 18 opposite effective area in a scan of the first conductive trace 40 in the direction of movement 14 is changeable.
  • the opposite arrangement is at a
  • the sensor 18 operates in conjunction with the encoder 32 of the first embodiments shown in FIG. 3 on the principle of the variable distance to the coils 26, 30.
  • the height 52 of the first conductive track 40 of the first encoder 32 changes in a movement of the first encoder 32 in the direction of movement 14, a distance to the first coil 26 and thus the corresponding signal.
  • the distance of the sensor 18 and the first coil 26 opposite effective surfaces of the first conductive trace 40 gradually increases from a point adjacent to the wedge-shaped contour 50 of the height 52 and is at further rotation of the wedge-shaped contour 50 of the height 52 jumped significantly smaller.
  • FIG. 4 shows a transmitter wheel 32 according to a second embodiment of the present invention.
  • the second embodiment of the encoder 32 is described by way of example only as a possible embodiment of the first encoder 32 and the second encoder 36 may be identical.
  • the first encoder 36 has a sinusoidal contour 56 of the height 52.
  • the first conductive track 40 changes continuously and periodically.
  • the first conductive trace 40 is formed such that a complex impedance of the first coil 24 and / or the second coil 28 is periodically changeable upon scanning of the first conductive trace 40 in the direction of movement 14.
  • the sensor 18 operates according to the first shown in FIG.
  • Embodiment of a sensor assembly 10 in conjunction with the encoder 32 of the second embodiments shown in Figure 4 according to the principle of variable coverage of the coils 26, 30.
  • the first conductive track 40 is formed so that their sensor 18 opposite effective area in a scan of the first conductive track 40 in the direction of movement 14 is continuously and periodically variable.
  • the opposing arrangement can be seen when viewed in the axial direction with respect to the axis 16.
  • the effective area of the first conductive track 40 opposite the sensor 18 or the first coil 26 changes in FIG.
  • the sensor 18 operates according to the principle of variable spacing to the coils 26, 30.
  • the height 52 of the first Encoder 32 changes in a movement of the first encoder 32 in the
  • Movement direction 14 a distance to the first coil 26 continuously and periodically and thus the corresponding signal.
  • the distance between the effective areas of the first conductive track 40 facing the sensor 18 and the first coil 26 increases and decreases continuously and periodically.
  • FIG. 5 shows a transmitter wheel 32 according to a third embodiment of the present invention.
  • the third embodiment of the encoder 32 will be described by way of example only as a possible embodiment of the first encoder 32 and the second encoder 36 may be identical.
  • the first encoder 32 has a wedge-shaped contour 58 of a width 60. Accordingly, along the circumferential direction of the first encoder 32, the width 60 of the first encoder 32, that is, a dimension of the first encoder 32 in the axial direction of the outer periphery 44 of the first encoder 32 changes. As a result, the sensor 18 operates according to the first shown in FIG.
  • Embodiment of a sensor assembly 10 in conjunction with the encoder 32 of the third embodiments shown in Figure 5 according to the principle of variable distance to the coils 26, 30.
  • the width 60 of the first conductive track 40 of the first encoder 32 changes in one movement the first encoder 32 in the direction of movement 14 a distance from the first coil 26 and thus the corresponding signal.
  • the distance of the sensor 18 and the first coil 26 opposite effective surfaces of the first conductive track 40 from a point adjacent to the wedge-shaped contour 58 of the width 60 gradually increases and becomes further rotation of the wedge-shaped contour 58 of the width 60 suddenly much smaller.
  • the sensor 18 operates in conjunction with the encoder 32 of the third embodiments shown in FIG. 5 according to the principle of variable coverage of the coils 26, 30.
  • the first conductive track 40 is designed such that that their effective area facing the sensor 18 is variable in the direction of movement 14 when the first conductive track 40 is scanned.
  • the opposite arrangement is at a
  • the sensor 18 and the first coil 26 opposite effective surface of the first conductive trace 40 starting from a point adjacent to the wedge-shaped contour 58 of Width 60allmählich to and is at a further rotation of the wedge-shaped contour 58 of the width 60 leaps and bounds much smaller.
  • FIG. 6 shows a transmitter wheel 32 according to a fourth embodiment of the present invention.
  • the fourth embodiment of the encoder 32 is described by way of example only as a possible embodiment of the first encoder 32 and the second encoder 36 may be identical.
  • the first encoder 32 has a sinusoidal contour 62 of width 60. As a result, the first conductive track 40 changes continuously and periodically.
  • the senor 18 operates according to the first shown in FIG.
  • Movement direction 14 a distance to the first coil 26 continuously and periodically and thus the corresponding signal.
  • the distance between the effective areas of the first conductive track 40 facing the sensor 18 and the first coil 26 increases and decreases continuously and periodically.
  • the sensor 18 operates in conjunction with the encoder 32 of the fourth embodiments shown in FIG. 6 according to the principle of variable coverage of the coils 26, 30.
  • the first conductive track 40 is designed such that that their effective area facing the sensor 18 is variable in the direction of movement 14 when the first conductive track 40 is scanned.
  • the opposite arrangement is at a
  • the sensor 18 and the first coil 26 opposite effective surface of the first conductive track 40 continuously increases and decreases.
  • FIG. 7 shows a transmitter wheel 32 according to a fifth embodiment of the present invention.
  • the fifth embodiment of the encoder 32 is described by way of example only as a possible embodiment of the first encoder 32 and the second encoder 36 may be identical.
  • the fifth embodiment of the encoder 32 is described by way of example only as a possible embodiment of the first encoder 32 and the second encoder 36 may be identical.
  • Embodiment of a transmitter 32 is based on the second shown in Figure 4 Embodiment of a sensor 32. Therefore, only the differences from the second embodiment of a sensor 32 shown in Figure 4 will be described below and the same components are provided with the same reference numerals.
  • a hub 64 is provided in the first encoder 32 of the fifth embodiment.
  • the hub 64 has a recess 66.
  • the recess 66 is formed, for example, as a slot in a certain radial area. This range corresponds to the width of a third coil 68 to be provided in the sensor assembly 10, as described in more detail below.
  • FIG. 8 shows a sensor arrangement 10 according to a third embodiment of the present invention.
  • the sensor assembly 10 of the third embodiment has the third coil 68.
  • the third coil 68 is at one of
  • the recess 66 corresponds with its dimensions while the width of the third coil 68.
  • the third coil 68 serves to identify the recess 66.
  • a different proportion of this area is perforated or lowered.
  • a possible perforation should be designed in such a way that the mechanical integrity is maintained. This can be done by supporting webs not shown in detail.
  • the discrimination of the periodic formation of the recess 66 can be achieved by varying the diameter or pitch of through holes.
  • the third coil 68 may be designed as a single coil, d. H. as a series connection of the winding on the top or the bottom of the board 20th
  • FIG. 9 shows a sensor arrangement 10 according to a fourth embodiment of the present invention.
  • Figure 9 shows the use
  • FIG. 10 shows a sensor arrangement 10 according to a fifth embodiment of the present invention. In the following, only the differences to the previous embodiments will be described and like components are given the same reference numerals.
  • FIG. 10 shows a modification of FIG.
  • Sensor arrangement 10 for the detection of periodically formed conductive tracks.
  • the third coil 68 is disposed on the same side as the first coil 26 and the second coil 30.
  • FIG. 10 shows an extension to that shown in FIGS. 1 and 2
  • the sensor arrangements 10 shown in FIGS. 1 and 2 have two encoders 32, 36 in the form of encoder wheels 34, 38 with a total of two conductive tracks 40, 42.
  • the two conductive tracks 40, 42 in conjunction with the coils 28, 30 provide a sine / cosine signal, which is achieved by a periodic design of the two conductive tracks 40, 42 is feasible. If the periodic design of the two conductive traces 40, 42
  • Encoder wheels 34, 38 extends, the uniqueness range is 360 °.
  • the periodic design of the two conductive traces 40, 42 may be 90 °. In this case, however, the uniqueness would only be 90 °.
  • the third coil 68 is required. The third coil 68 may be in
  • the third encoder 74 is formed, for example, as a sensor wheel 76 which is disposed on the shaft 12 and connected thereto.
  • the third Gebr 74 has a third conductive track 78.
  • the third coil 68 is used to generate eddy currents in the third encoder 74.
  • the third conductive trace 78 is formed such that a complex impedance of the third coil 68 is variable in a scanning of the third track 78 in the direction of movement 14.
  • the encoder wheels could also have different periods.
  • the second conductive trace 42 has a periodic design of 72 °, can be extrapolated to 360 ° using a vernier or vernier algorithm. The resolution would be increased as well.
  • Track 78 in the two encoder wheels 34, 38 are integrated.
  • the provision of the third track 78 as a separate component is necessary.
  • the two coils 26, 30 are each of a transient or robförmigen
  • High frequency current flows through, whose frequency is e.g. is in a range between 500 kHz and 100 MHz.
  • an equally high-frequency magnetic field is generated in the vicinity of the coils 26, 30, which in turn induces eddy currents in the first conductive track 40 of the first encoder 32 and in the second conductive track 42 of the second encoder 36.
  • the eddy currents in turn generate a magnetic field opposite the magnetic field of the coils 26, 30.
  • the induced eddy currents are different in size.
  • the opposing field is different strong.
  • the relationship applies that the opposing field is small with a small effective area or a large distance and large with a large effective area or small or small distance.
  • Terminals Is a coil 26, 30, for example, a small effective area or the distance is large, so this coil 26, 30 has a large equivalent inductance and thus a magnitude large complex impedance.
  • this coil 26, 30 has a small equivalent inductance and thus a complex impedance of small magnitude.
  • the inductance change can be detected by an evaluation unit of the sensor 18, not shown in detail, for example, the resonant frequency of an LC resonant circuit consisting of a respective coil 26, 30 and a (parasitic) capacitance determined and from the measured variable in the form of a path or angle and in particular rotation angle of the shaft 12 determined.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

L'invention concerne un ensemble formant capteur (10) destiné à mesurer un déplacement et/ou un angle. L'ensemble formant capteur (10) comprend un premier transmetteur (32) pourvu d'une première piste conductrice (40) et un capteur (18) pourvu d'une première bobine (26) servant à générer des courants de Foucault dans le premier transmetteur (32). Le capteur (18) et le premier transmetteur (32) sont mobiles l'un par rapport à l'autre dans une direction de déplacement (14). La première piste conductrice (40) est configurée de telle sorte qu'une impédance complexe de la première bobine (26) est variable lorsque la première piste conductrice (40) est explorée dans la direction de déplacement (14). L'ensemble formant capteur (10) comprend un second transmetteur (36) pourvu d'une seconde piste conductrice (42) et une seconde bobine (30) servant à générer des courants de Foucault dans le second transmetteur (36). La seconde piste conductrice (42) est formée de telle sorte qu'une impédance complexe de la seconde bobine (30) est variable lorsque la seconde piste (42) est explorée dans la direction de déplacement (14).
PCT/EP2015/066748 2014-09-22 2015-07-22 Ensemble formant capteur pour mesurer un déplacement et/ou un angle WO2016045816A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014218982.9A DE102014218982A1 (de) 2014-09-22 2014-09-22 Sensoranordnung zur Weg- und/oder Winkelmessung
DE102014218982.9 2014-09-22

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Publication Number Publication Date
WO2016045816A1 true WO2016045816A1 (fr) 2016-03-31

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Cited By (1)

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CN106767366A (zh) * 2016-12-05 2017-05-31 上海砺晟光电技术有限公司 基于微线圈的全数字式涡流栅传感器

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DE102015207614A1 (de) * 2015-04-24 2016-10-27 Volkswagen Aktiengesellschaft Vorrichtung und Verfahren zum Detektieren einer Drehlage eines drehbaren Bauelements
DE102018102094A1 (de) * 2018-01-31 2019-08-01 Thyssenkrupp Ag Induktiver Winkelsensor für eine Kraftfahrzeuglenkung
DE102022101622A1 (de) 2022-01-25 2023-07-27 Schaeffler Technologies AG & Co. KG Wirbelstrom-Positionssensoranordnung und Fahrzeuglenkung

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Publication number Priority date Publication date Assignee Title
US4764767A (en) * 1985-08-27 1988-08-16 Kabushiki Kaisha Sg Absolute rotational position detection device
DE4038515A1 (de) * 1990-12-03 1992-06-04 Vogt Electronic Ag Einrichtung zur statischen und/oder dynamischen laengen -und/oder winkelmessung
DE10231980A1 (de) * 2002-07-15 2004-02-19 Schubach, Rudolf, Dipl.-Ing. Vorrichtung zum berührungslosen Messen einer linearen Verschiebung oder einer Drehlage
DE102004033083A1 (de) 2004-07-08 2006-01-26 Robert Bosch Gmbh Wirbelstromsensor zur kontinuierlichen Weg- oder Winkelmessung
DE102007053601A1 (de) * 2007-11-09 2009-05-20 Vogt Electronic Components Gmbh Lagegeber mit Kunststoffkörper
US7990136B2 (en) 2002-10-07 2011-08-02 Moving Magent Technologies Variable reluctance position sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764767A (en) * 1985-08-27 1988-08-16 Kabushiki Kaisha Sg Absolute rotational position detection device
DE4038515A1 (de) * 1990-12-03 1992-06-04 Vogt Electronic Ag Einrichtung zur statischen und/oder dynamischen laengen -und/oder winkelmessung
DE10231980A1 (de) * 2002-07-15 2004-02-19 Schubach, Rudolf, Dipl.-Ing. Vorrichtung zum berührungslosen Messen einer linearen Verschiebung oder einer Drehlage
US7990136B2 (en) 2002-10-07 2011-08-02 Moving Magent Technologies Variable reluctance position sensor
DE102004033083A1 (de) 2004-07-08 2006-01-26 Robert Bosch Gmbh Wirbelstromsensor zur kontinuierlichen Weg- oder Winkelmessung
DE102007053601A1 (de) * 2007-11-09 2009-05-20 Vogt Electronic Components Gmbh Lagegeber mit Kunststoffkörper

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106767366A (zh) * 2016-12-05 2017-05-31 上海砺晟光电技术有限公司 基于微线圈的全数字式涡流栅传感器

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