WO2016023567A1 - Dispositif de guidage - Google Patents

Dispositif de guidage Download PDF

Info

Publication number
WO2016023567A1
WO2016023567A1 PCT/EP2014/002198 EP2014002198W WO2016023567A1 WO 2016023567 A1 WO2016023567 A1 WO 2016023567A1 EP 2014002198 W EP2014002198 W EP 2014002198W WO 2016023567 A1 WO2016023567 A1 WO 2016023567A1
Authority
WO
WIPO (PCT)
Prior art keywords
superconductor
guide device
movement
path
joint
Prior art date
Application number
PCT/EP2014/002198
Other languages
German (de)
English (en)
Inventor
Georg Berner
Laura SAWITZKI
Original Assignee
Festo Ag & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co. Kg filed Critical Festo Ag & Co. Kg
Priority to DE112014006618.4T priority Critical patent/DE112014006618A5/de
Priority to PCT/EP2014/002198 priority patent/WO2016023567A1/fr
Publication of WO2016023567A1 publication Critical patent/WO2016023567A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0436—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
    • F16C32/0438—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part with a superconducting body, e.g. a body made of high temperature superconducting material such as YBaCuO
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly

Definitions

  • the invention relates to a guide device for the articulated connection of a first device part with a second device part, with the first part of the device associated first hinge part and a second part of the device associated second hinge part, wherein the hinge parts for a linearly movable mounting of the first device part relative to the second device part along a Movement are formed.
  • the object of the invention is to provide a frictionless operating device.
  • first joint part and the second joint part form a magnet arrangement which comprises at least one superconductor and at least one permanent magnet and which for a non-contact linearly movable mounting of the
  • CONFIRMATION COPY first joint part opposite the second joint part along the movement path is formed.
  • the superconductor is a material which has superconducting properties when it falls below a material-specific transition temperature and, to a certain extent, "stores" a magnetic field impressed from the outside during cooling / cooling below the transition temperature.
  • superconducting forces are applied which counteract this change in the magnetic field.
  • the material yttrium barium copper oxide can be used, which can be cooled purely by way of example with the aid of liquid nitrogen to a temperature of 77 Kelvin and this already has its superconducting properties.
  • the superconductor is assigned to one of the two joint parts, while at least one permanent magnet is arranged on the other joint part whose magnetic field is "stored" during the cooling of the superconductor in the superconductor to subsequently maintain or fall below the transition temperature for the superconductor contactless storage of the two Gelenktei- le to ensure each other.
  • the device parts which are each equipped with the joint parts, it may be, for example, components of a machine, a handling device or a robot to be moved linearly movable to each other and where in the course of the linear movement as possible no friction auftre th.
  • the at least one permanent magnet along the path of movement has an extension which corresponds at least almost, in particular exactly, a sum of an extension of the superconductor along the path of movement and a Län ge of the movement path.
  • de guide device is advantageous that a "storage" of the magnetic field of the at least one permanent magnet in the superconductor can be done by the superconductor can be placed at an appropriate distance from the at least one permanent magnet at an arbitrary position along the path of movement and then the cooling Since the permanent magnet is longer than the superconductor, in a linear movement of the superconductor along the movement path from the viewpoint of the superconductor, the field of the permanent magnet does not change, or only slightly, to ensure the desired bearing properties advantageous that the cost of the joint parts can be kept at a favorable level, since comparatively little superconducting material is required, which at least currently has a much higher price than corresponding permanent magnet A magnetization of the permanent magnet (s) is preferably carried out in such a way that in an overdevelopment
  • the extent of the permanent magnet along the path of movement is greater than the sum of the extension of the superconductor and the length of the path of movement.
  • the at least one superconductor along the movement path has an extension which corresponds at least almost, in particular exactly, a sum of an extension of the permanent magnet along the movement path and a length of the movement path.
  • the cost of "storage" of the magnetic field of the at least one permanent magnet is greater than in the embodiment described above, since the field of the at least one permanent magnet must be impressed on the superconductor during the cooling of the superconductor below the critical temperature along the entire path of movement
  • such an embodiment may be advantageous if there are difficulties in placing the superconductor in a particular one of the two hinge allocate parts and an assignment of the permanent magnet to this joint part represents a technically simpler solution.
  • a magnetization of the at least one permanent magnet is aligned along the path of movement. This is intended to ensure that, in the case of a linear relative movement between the at least one permanent magnet and the at least one superconductor, no reaction forces of the magnet arrangement arise, which would lead to a deviating movement of the joint parts.
  • the second hinge part is arranged transversely to the movement path next to the first hinge part and is spaced by a working gap from the first hinge part.
  • the length of the movement path can be chosen freely and in particular depends on the extent of the superconductor and of the permanent magnet along the path of movement.
  • the working gap is required for the desired smooth relative mobility of the two joint parts and is essentially determined by the configuration of the magnet arrangement and the forces to be transmitted via the magnet arrangement.
  • the working gap between the joint parts is constant over the entire movement path.
  • the second joint part surrounds the first joint part at least regionally, preferably L-shaped, particularly preferably U-shaped, in particular annular.
  • a particularly stable guidance of the first joint part can be realized, since reaction forces can be built up between the two joint parts in several spatial directions.
  • the aim of this stabilization effect between the joint parts depends inter alia on how largely the second joint part surrounds the first joint part.
  • an embodiment of the second joint part can be provided such that the second joint part has two superconductors arranged opposite one another and the first joint part, preferably in the center.
  • the second hinge part has an L-shaped superconductor arrangement, wherein the legs of this L-shaped superconductor arrangement can optionally have identical or different lengths.
  • An additional stabilization with respect to the L-shaped superconductor arrangement is achieved by a U-shaped superconductor arrangement in which a stabilization on the first joint part can be achieved both by the lateral U-legs and by the transverse web for connecting the U-legs.
  • the second joint part particularly preferably has an annular, in particular annular, superconductor arrangement, so that a support of the first joint part is ensured by the reaction forces of the second joint part in all spatial directions of a support plane aligned transversely to the movement path.
  • the first device part in particular the first joint part and the second device part, in particular the second joint part, a drive means for initiating a linear relative movement between the device parts is assigned.
  • the guide device according to the invention can be used in a device such as a processing machine or a handling device, in particular a robot.
  • the Drive device which may be in particular an electrical or fluidic drive device, driving forces are exerted on at least one of the two device parts, so that the desired linear relative movement between the device parts can be controlled or regulated.
  • the drive device can be designed to provide a cyclically recurring or demand-dependent movement.
  • first joint part or the second joint part or both joint parts are formed as components of a drive device or comprise components of a drive device.
  • components of a drive device are received in the first and / or second joint part in order to exert drive forces on the respective other joint part or the device part assigned to the other joint part.
  • an electrical coil arrangement can be arranged, which is provided for generating a dynamic magnetic field, in order to exert a force re-action on the other joint part and to effect a relative movement of the other joint part.
  • the magnet arrangement comprises a plurality of, preferably one of the joint parts associated, permanent magnets, which are arranged to a magnetic exciter system, in particular in Halbach arrangement or flux collector arrangement.
  • the objective is to be able to provide a magnetic field tailored specifically to the requirements of the respective joint parts by suitable arrangement of individual permanent magnets.
  • a Halbach arrangement achieves a one-sided field concentration, so that a high magnetic efficiency between the permanent magnet arrangement tion and the at least one superconductor can be achieved.
  • ferromagnetic elements are arranged between the permanent magnets in order to concentrate the magnetic flux of the permanent magnets and thus to be able to effect an advantageous expression of the provided magnetic field when saving permanent magnet material.
  • the at least one superconductor is associated with a cooling device, which is designed for cooling the superconductor at or below its critical temperature.
  • a cooling of the superconductor is required in order to maintain or fall below the critical temperature during operation of the guide means.
  • the cooling device can be designed as a so-called cryostat, in which either a cooling liquid, in particular a liquefied gas such as nitrogen, surrounds the superconductor or the critical temperature can be maintained or undershot by evaporation of a liquefied gas.
  • the cooling device can also be designed as an electrical cryostat, in which the cooling effect is caused by means of electrical energy, which is particularly advantageous in stationary arrangement of the cooling device on the superconductor.
  • only a temporary cooling of the superconductor can be provided, for example by spraying a cooling fluid such as liquefied nitrogen, on the surface of the superconductor. A dosage of the amount of sprayed cooling fluid and a Frequency for the spraying process are dependent on the environmental conditions of the superconductor.
  • the cooling device is associated with a generator arrangement for providing electrical energy during a relative movement of the two joint parts.
  • a generator arrangement for providing electrical energy during a relative movement of the two joint parts.
  • the generator arrangement may comprise a coil arrangement which is assigned to one of the two joint parts, with excitation of these coils taking place by means of the permanent magnet arrangement arranged in the other joint part or the at least one permanent magnet.
  • the coil assembly is associated with the superconductor and in particular made of a superconducting material in order to ensure a generator function with a high efficiency can.
  • the magnet arrangement is associated with a damping device which is designed for a local change in the magnetic interaction of the joint parts, in order at least on at least one end region of the movement. to ensure contact-free cushioning for the joint parts.
  • a damping device which is designed for a local change in the magnetic interaction of the joint parts, in order at least on at least one end region of the movement.
  • the damping device is to be achieved that when reaching the end of the movement path, a deceleration of the relative movement of the joint parts to each other.
  • the braking of the joint parts takes place by an intermediate storage of kinetic energy in the damping device, so that when egg ner cyclic reversing movement of the joint parts a particularly efficient movement of the guide device made light is.
  • the damping device makes use of the components of the magnet arrangement, in particular of the at least one permanent magnet and / or the at least one superconductor, with the aid of which suitable attraction or repulsion forces can be provided in the end region of the movement path in order to achieve the desired damping effects can.
  • FIG. 1 shows a schematic representation of an application example for a guide device in which two parts of the device are connected to one another in a linearly movable manner via associated hinge parts and in addition a non-contact coupling of a drive movement is provided
  • Figure 2 shows a second functional position for that in the figure
  • FIG. 3 is a schematic side view of the in the figures
  • FIG. 4 shows a side view of a second embodiment of a guide device
  • FIG. 5 is a front view of the second embodiment of FIG.
  • FIG. 6 shows a side view of a third embodiment of a guide device
  • Figure 7 is a front view of the third embodiment of
  • FIG. 8 shows a side view of a fourth embodiment of a guide device
  • FIG. 9 is a front view of the fourth embodiment of FIG.
  • FIG. 10 shows a side view of a fifth embodiment of a guide device
  • Figure 11 is a front view of the fifth embodiment of
  • FIG. 12 shows a side view of a sixth embodiment of a guide device
  • FIG. 13 is a front view of the sixth embodiment of FIG.
  • FIG. 14 shows a side view of a seventh embodiment of a guide device
  • FIG. 15 is a front view of the seventh embodiment of FIG.
  • Figure 16 is a side view of an eighth embodiment of a guide device.
  • FIG. 17 is a front view of the eighth embodiment of FIG.
  • the application example for a guide device 1 shown in FIGS. 1 and 2 serves merely to illustrate the possible uses for such guide devices and has no limiting effect.
  • the application example shows a sawing device 2, in which for a saw blade 3 a frictionless mounting by means of the guide device 1 is realized. Furthermore, a non-contact movement coupling of a drive device 4 on the saw blade 3 is also provided purely by way of example.
  • the guide device 1 To explain the properties of the guide device 1, it is assumed below that a purely linear movement of the saw blade 3 is desired, wherein the saw blade 3 should perform an oscillating linear movement, as indicated by the movement arrow 5 drawn in the horizontal direction in FIGS. 1 and 2 which symbolizes the movement path for this guide device 1.
  • the saw blade 3 With the help of the saw blade 3, an unillustrated workpiece is to be processed, which is pressed for example by means of a lifting device, not shown from below against the toothed portion of the saw blade 3, thereby to achieve the desired machining.
  • the guide device 1 is designed with respect to the guide forces provided for the saw blade 3 such that no tilting of the saw blade 3 occurs within a predeterminable shegekraftintervalls.
  • the guide device 1 For the mounting of the saw blade, the guide device 1 comprises a saw blade carrier 6 designed as a first device part and a machine table 7 designed as a second device part, which are mounted so as to be smoothly linearly movable relative to one another with the aid of the joint parts 8 and 9 described in detail below.
  • the first joint part associated with the saw blade carrier 6 is designed as a permanent magnet arrangement, which comprises three elongate permanent magnets 10, 11 and 12, as can be seen in the schematic illustration of FIGS. 1 to 3; in particular, the permanent magnets 10 to 12 are of cuboid shape. Furthermore, each of the permanent magnets 10 to 12 is arranged in each case such that a magnetic field tailored to it is provided in the direction of the movement path of the guide device 1 symbolized by the movement arrow 5 so that no magnetic field change occurs during the movement along the movement path for the superconductor 15 described in more detail below results.
  • Adjacent permanent magnets 10 and 11 and 11 and 12 are each magnetized in opposite directions, as shown by the symbolic arrowheads or arrow ends in Figure 3, thereby ensuring an advantageous stabilizing effect against the second hinge part 9, which includes a superconductor 15 to ensure can.
  • the permanent magnets 10 to 12 are received in a manner not shown in the saw blade carrier 6, in particular cohesively attached by gluing.
  • An extension 16 of the permanent magnets 10 to 12 is selected such that it corresponds to a sum of the extensions 17, 18 of the superconductor 15 on the second joint part 9 and of the movement path indicated by the movement arrow 5.
  • a complete geomet- witz overlap between the permanent magnet 10 to 12 and the superconductor 15 guaranteed.
  • a projection of the permanent magnets 10 to 12 onto the superconductor 15 should lead to an overlap between the permanent magnets 10 to 12 and the superconductor 15.
  • This interaction between the two joint parts 9 and 9 substantially corresponds to a spring which is briefly clamped at Anrac tion of the saw blade carrier 6 to the respective reversing position and the energy stored during the tensioning can give off once a movement reversal of the saw blade carrier 6 has taken place, in the present If, unlike a spring, a lossless energy storage takes place.
  • the entire sawing device 2 is accommodated in a cooled volume, not shown, in which a temperature is lower than the critical temperature of the superconductor 15, so that the second joint part 9, for example, integrally made of a superconducting material having the desired superconducting properties.
  • the drive device 4 In order to effect a smooth coupling of the oscillation movement aui the saw blade carrier 6, is the end of the Saw blade support 6, a drive device 4 is formed, which is designed for a contactless application of force to the saw blade - carrier 6.
  • the drive device 4 comprises by way of example an electric coil 21, which is accommodated on a coil carrier 22 and which is designed for providing magnetic fields which are variable in their polarity and field strength.
  • a permanent magnet arrangement 28 is arranged on the saw blade carrier 6 so that attractive or repulsive forces can be provided between the drive device 4 and the saw carrier 6, depending on the polarity and flux density of the coil magnetic fields desired oscillation movement of the saw blade carrier 6 can be caused.
  • the first joint part 48 is identical to the first one.
  • Joint part 8 of the first embodiment of a guide device 1 is formed, so that here the same reference numerals are used and will be omitted for a more detailed description.
  • lateral superconductors 50 are mounted, which have the same extension 17 along the path of movement corresponding to the movement arrow 45 as the superconductor already known from FIGS 15.
  • superconductors and permanent magnets may be interchanged.
  • the lateral superconductors 50 extend only partially or not in overlap with the superconductor 15 of the second joint part 9, as is known from FIGS. 1 and 2.
  • the U-shaped arrangement of the superconductors 15, 50 ensures an improved guidance for the first joint part 48, since the two lateral superconductors 50 can advantageously exert laterally acting guiding forces on the first joint part 48.
  • permanent magnets 60, 61 and 62 are cuboid in the same way as the permanent magnets 10 to 12, as is known in the guide device 1 according to Figures 1 to 3.
  • the permanent magnets 60 to 62 which form the first joint part 58 of the guide arrangement 51, are arranged in an exemplary V-shaped manner to form a L-shaped, the second joint part 59 forming superconductor 65 to form a likewise V-shaped working gap 63 without contact to be led.
  • the two outer permanent magnets 60 and 62 are magnetized in the same direction parallel to the movement path 55, as symbolized by the corresponding arrow directions, while the permanent magnet 61 is magnetized in the opposite direction, as symbolized by the corresponding magnetization arrow.
  • the design of these joint parts 58 and 59 also ensures a high stability of the guide arrangement 51 around the axis of movement, in particular about a vertical axis, not shown in FIGS. 6 and 7, which is not illustrated.
  • the second hinge part 79 which is designed as a superconductor, is configured sleeve-shaped with an annular cross-section and completely encompasses the first hinge part 78 designed as a permanent magnet arrangement.
  • the permanent magnets 80 of the first joint part 78 are each provided with a circular segment-shaped cross-section and magnetized along the path of movement in accordance with the movement arrow 75, in each case adjacent permanently arranged permanent magnets 80 being magnetized in opposite directions.
  • the permanent magnets 80 form by way of example a rod-shaped first joint part 78 with a circular cross-section.
  • an annular working gap 73 is formed, which ensures the non-contact linear mobility between the two joint parts 78 and 79.
  • the fifth embodiment of a guide device 81 shown in FIGS. 10 and 11 is a modification of the guide device 1 according to FIGS. 1 to 3, in which flux guide pieces 82 and 83 arranged at the end are arranged on end sides of the permanent magnets 84 extending along the movement path ,
  • the object of the flux guide pieces 82 and 83 which are preferably made of a ferromagnetic material, consists in a reinforcement of the end position damping, as already described above in connection with the guide device 1.
  • additional flux guides 82 and 83 or another construction method for the first joint part 88 a reinforcement of the cushioning can be achieved, which may be for example in an oscillating movement for the first joint part 88 relative to the second joint part 89 of interest.
  • the sixth embodiment of a guide device 91 shown in FIGS. 12 and 13 differs from the guide device 1 shown in FIGS. 1 to 3 in that a series of permanent magnets 92 extending in the direction of movement is provided in a central region of the first hinge part 98.
  • the permanent magnets 92 have a smaller cross-section than the laterally arranged permanent magnets 100 of the joint part 98 in order to produce the least possible interaction with the second rod in the form of an exemplary rod-shaped superconductors 94 94.
  • the permanent magnets 92 are provided for magnetic interaction with a coil assembly 93, which is mounted centrally between the two superconductors 94 of the second joint part 99.
  • the coil arrangement 93 comprises three coils 95, which are aligned with their central axes transversely to the direction of movement and are arranged adjacent to one another along the direction of movement.
  • the coils 95 are electrically connected via connecting lines to a drive unit 96, which is designed to provide coil currents to the respective coils 95.
  • the drive unit 96 provides coil currents to the respective coils 95 in such a manner as to provide a reaction force along the direction of movement in the first hinge portion 98 which can cause movement of the first hinge portion 98 relative to the second hinge portion 99.
  • the first hinge part 108 has the same structure as the first hinge part 98 according to the sixth embodiment of the guide device 91.
  • the second hinge part 109 has in principle the same structure as the second hinge part 99 of the sixth embodiment of the guide device 91, but differs in that the coils 105 of the coil assembly 103 are electrically connected to a cooling device 106 disposed below the second hinge part 109.
  • the coils 105 of the coil arrangement 103 operate in a generator function, with the aid of which an electrical supply of the cooling device 106 can take place, so that an electrical connection cable for the cooling device 106 can be dispensed with if necessary ,
  • the first hinge part 118 is equipped with a permanent magnet arrangement, in which the permanent magnets 112 form a Halbach-type magnetic exciter system, so that a relative movement of the first hinge part 118 relative to the second hinge part 119 can take place only against a considerable resistance of the formed in the second hinge part 119 superconductor 113.
  • a kind of safety coupling for elastic and force-limited power transmission between the two joint parts 118 and 119 can be created.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

L'invention concerne un dispositif de guidage permettant de relier de manière articulée une première pièce de mécanisme (6), à laquelle une première pièce d'articulation (8 ; 28 ; 48 ; 58 ; 78 ; 88 ; 98 ; 108 ; 118) est associée, à une deuxième pièce de mécanisme (7), à laquelle une deuxième pièce d'articulation (9 ; 29 ; 49 ; 59 ; 79 ; 99 ; 109 ; 119) est associée, les pièces d'articulation (8, 9 ; 28, 29 ; 48, 49 ; 58, 59 ; 78, 79 ; 88 ; 98, 99 ; 108, 109 ; 118, 119) étant conçues pour permettre un montage des pièces de mécanisme (6, 7) de sorte qu'elles puissent effectuer un mouvement linéaire le long d'une trajectoire de déplacement (5; 35, 36; 45; 55; 75). Selon l'invention, les pièces d'articulation forment un ensemble magnétique, qui comprend un supraconducteur (15 ; 31 ; 50 ; 85 ; 94 ; 113) et un aimant permanent (10, 11, 12 ; 60, 61, 62 ; 80 ; 92 ; 112) et qui est conçu pour permettre un montage sans contact des pièces d'articulation de sorte qu'elles puissent effectuer un mouvement linéaire le long de la trajectoire de déplacement (5 ; 35, 36 ; 45 ; 55 ; 75).
PCT/EP2014/002198 2014-08-11 2014-08-11 Dispositif de guidage WO2016023567A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112014006618.4T DE112014006618A5 (de) 2014-08-11 2014-08-11 Führungseinrichtung
PCT/EP2014/002198 WO2016023567A1 (fr) 2014-08-11 2014-08-11 Dispositif de guidage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/002198 WO2016023567A1 (fr) 2014-08-11 2014-08-11 Dispositif de guidage

Publications (1)

Publication Number Publication Date
WO2016023567A1 true WO2016023567A1 (fr) 2016-02-18

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PCT/EP2014/002198 WO2016023567A1 (fr) 2014-08-11 2014-08-11 Dispositif de guidage

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DE (1) DE112014006618A5 (fr)
WO (1) WO2016023567A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016202506A1 (de) 2016-02-18 2017-08-24 Festo Ag & Co. Kg Trenneinrichtung und Verfahren zur trennenden Bearbeitung eines Werkstücks
DE102016225456B3 (de) * 2016-12-19 2018-02-22 Festo Ag & Co. Kg Verfahren und System zum Einrichten einer Supraleiterschienenanordnung, Supraleiterschienenanordnung und Beförderungssystem
DE102017202840A1 (de) * 2017-02-22 2018-08-23 Festo Ag & Co. Kg Bewegungseinrichtung

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06123311A (ja) * 1992-10-09 1994-05-06 Nippon Telegr & Teleph Corp <Ntt> 超伝導リニア磁気軸受け
US5631617A (en) * 1992-08-25 1997-05-20 Kabushiki Kaisha Toshiba System for levitating and guiding object by electromagnetic attractive force
US5710469A (en) * 1993-12-13 1998-01-20 Siemens Aktiengesellschaft Magnetic bearing element for a rotor shaft using high-TC superconducting materials
US5747426A (en) * 1995-06-07 1998-05-05 Commonwealth Research Corporation High performance magnetic bearing systems using high temperature superconductors
JP2006101585A (ja) * 2004-09-28 2006-04-13 Internatl Superconductivity Technology Center 超電導軸受と磁気浮上装置
DE102008048210A1 (de) * 2008-09-20 2010-05-12 Oerlikon Leybold Vacuum Gmbh Dämpfungsvorrichtung

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631617A (en) * 1992-08-25 1997-05-20 Kabushiki Kaisha Toshiba System for levitating and guiding object by electromagnetic attractive force
JPH06123311A (ja) * 1992-10-09 1994-05-06 Nippon Telegr & Teleph Corp <Ntt> 超伝導リニア磁気軸受け
US5710469A (en) * 1993-12-13 1998-01-20 Siemens Aktiengesellschaft Magnetic bearing element for a rotor shaft using high-TC superconducting materials
US5747426A (en) * 1995-06-07 1998-05-05 Commonwealth Research Corporation High performance magnetic bearing systems using high temperature superconductors
JP2006101585A (ja) * 2004-09-28 2006-04-13 Internatl Superconductivity Technology Center 超電導軸受と磁気浮上装置
DE102008048210A1 (de) * 2008-09-20 2010-05-12 Oerlikon Leybold Vacuum Gmbh Dämpfungsvorrichtung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016202506A1 (de) 2016-02-18 2017-08-24 Festo Ag & Co. Kg Trenneinrichtung und Verfahren zur trennenden Bearbeitung eines Werkstücks
DE102016202506B4 (de) 2016-02-18 2018-03-22 Festo Ag & Co. Kg Trenneinrichtung und Verfahren zur trennenden Bearbeitung eines Werkstücks
DE102016225456B3 (de) * 2016-12-19 2018-02-22 Festo Ag & Co. Kg Verfahren und System zum Einrichten einer Supraleiterschienenanordnung, Supraleiterschienenanordnung und Beförderungssystem
DE102017202840A1 (de) * 2017-02-22 2018-08-23 Festo Ag & Co. Kg Bewegungseinrichtung

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