WO2016010138A1 - Cylindrical roller bearing for turbo refrigerator - Google Patents

Cylindrical roller bearing for turbo refrigerator Download PDF

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Publication number
WO2016010138A1
WO2016010138A1 PCT/JP2015/070528 JP2015070528W WO2016010138A1 WO 2016010138 A1 WO2016010138 A1 WO 2016010138A1 JP 2015070528 W JP2015070528 W JP 2015070528W WO 2016010138 A1 WO2016010138 A1 WO 2016010138A1
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Prior art keywords
silicon
cylindrical roller
dlc film
roller bearing
inner ring
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PCT/JP2015/070528
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French (fr)
Japanese (ja)
Inventor
敦賀　佳行
元紀 伏見
佐藤　努
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日本精工株式会社
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Publication of WO2016010138A1 publication Critical patent/WO2016010138A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/22—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings
    • F16C19/24—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for radial load mainly
    • F16C19/26—Bearings with rolling contact, for exclusively rotary movement with bearing rollers essentially of the same size in one or more circular rows, e.g. needle bearings for radial load mainly with a single row of rollers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/64—Special methods of manufacture

Definitions

  • the present invention relates to a cylindrical roller bearing used as a free side bearing of a turbo refrigerator.
  • the present invention has been made in view of such a situation, and a cylindrical roller bearing that can prevent damage due to skidding for a long period of time and is useful as a substitute for a combined angular ball bearing for a free-side bearing of a turbo refrigerator.
  • the purpose is to provide.
  • the present invention is characterized in that a DLC film containing silicon is formed on the inner ring raceway surface, and the silicon concentration of the outermost surface of the DLC film is 1 to 17 atomic%.
  • a cylindrical roller bearing for a turbo refrigerator is provided.
  • the cylindrical roller bearing of the present invention is formed by forming a DLC film containing a specific amount of silicon on the raceway surface of the inner ring, and since DLC film contains a predetermined amount of silicon while ensuring the slidability and hardness of the DLC film.
  • the residual stress of the film is reduced and peeling is suppressed, and as a result, skid damage can be prevented for a long period of time, and it is extremely useful as a substitute for a combination angular contact ball bearing for a free side bearing of a turbo refrigerator.
  • FIG. 1 is a cross-sectional view showing a cylindrical roller bearing for a turbo refrigerator according to the present invention.
  • a plurality of cylindrical rollers 3 are held by a cage 4 between the inner ring 1 and the outer ring 2 so as to be freely rollable.
  • a DLC film 10 containing silicon hereinafter referred to as “silicon-containing DLC film” 10 is formed on the inner ring raceway surface 1a.
  • the general DLC film itself has the effect of improving the slidability and wear resistance.
  • the inclusion of silicon further reduces the residual stress of the film as compared with the case of carbon alone. The peeling is suppressed and the durability is increased.
  • silicon is excessive on the outermost surface of the silicon-containing DLC coating 10, the slidability and hardness inherently possessed by the silicon-containing DLC coating 10 are reduced, so that the silicon concentration on the outermost surface is set to 17 atomic% or less.
  • the silicon concentration on the outermost surface needs to be 1 atomic% or more.
  • the silicon concentration at the outermost surface of the silicon-containing DLC film 10 is 3 to 5 atomic%.
  • the silicon concentration on the outermost surface of the silicon-containing DLC film 10 is 1 to 17 atomic%, but the silicon concentration may be uniformly 1 to 17 atomic% throughout the film, and the carbon concentration increases toward the surface.
  • the gradient composition may be such that the ratio is larger than the ratio of silicon. In the case of the latter gradient composition, the effect of reducing the residual stress of the silicon-containing DLC film 10 and the improvement of improving the slidability and hardness can be obtained more effectively.
  • the silicon-containing DLC film 10 preferably contains hydrogen in addition to silicon. Although C—H bonds and Si—H bonds coexist with hydrogen, the Si—H bond has a low bond energy, so compared to the case where unbonded hydrogen atoms are positively bonded to silicon atoms and do not contain hydrogen. As a result, the residual stress of the film becomes smaller.
  • sputtering may be performed in a vacuum using a carbon target and a silicon target.
  • sputtering is performed in a hydrocarbon gas atmosphere such as methane gas using a carbon target and a silicon target.
  • Sputtering can be performed using, for example, a magnetron sputtering apparatus.
  • the voltage applied to the carbon target during film formation is gradually increased while the voltage applied to the silicon target is gradually decreased.
  • the temperature of the inner ring raceway surface 1a is preferably controlled to 150 to 180 ° C. during film formation. If it is less than 150 ° C., the film formation efficiency is poor, and if it exceeds 180 ° C., silicon tends to be formed in a crystalline state.
  • the volume expansion of the DLC film 10 can be suppressed by setting the temperature range to 150 to 180 ° C. Moreover, the hardness reduction of the steel material which comprises the inner ring
  • the film thickness of the silicon-containing DLC film 10 is preferably 0.8 to 1.6 ⁇ m. If the film thickness is less than 0.8 ⁇ m, the durability of the film is not sufficient, and if it exceeds 1.6 ⁇ m, the residual stress of the film is too large and sufficient adhesion cannot be obtained, and the film tends to peel off from the inner ring raceway surface 1a. In order to obtain such a film thickness, the sputtering time may be adjusted.
  • the silicon-containing DLC film 10 preferably has a Young's modulus of 150 to 200 GPa. When the Young's modulus is less than 150 GPa, the hardness of the DLC film 10 is not sufficient, and when it exceeds 200 GPa, the inner ring raceway surface 1a is difficult to deform and easily peels off in a high load environment.
  • the DLC film 10 may be formed through a metal intermediate layer such as chromium.
  • the silicon-containing DLC film 10 is formed on the inner ring raceway surface 1a as described above, and the materials and lubricants of the inner and outer rings may be known ones.
  • An inner ring of a general cylindrical roller bearing (nominal number “NU307”) for a turbo refrigerator was mounted on a magnetron sputtering apparatus.
  • the magnetron sputtering apparatus was provided with a carbon target and a silicon target, and a silicon-containing DLC film was formed on the inner ring raceway surface at a temperature of 180 ° C. in a vacuum.
  • the voltage applied to the carbon target was gradually increased and the voltage applied to the silicon target was gradually decreased, so that the gradient composition was obtained so that the silicon concentration on the outermost surface was 3 to 6 atomic%.
  • the bearing was assembled using the inner ring
  • test bearing B the same cylindrical roller bearing composed of an inner ring with no coating formed and the inner ring raceway surface exposed was designated as test bearing B.
  • Durability tests were conducted using the test bearings A and B at the PV values and sliding speeds shown in Table 1, where the PV value and sliding speed are ratios to the skid generation limit value. The durability was evaluated by the time until the skid damage occurred (durability time).
  • the cylindrical roller bearing for a turbo chiller of the present invention can prevent damage due to skidding for a long period of time due to the formation of the silicon-containing DLC film, has a long life, and is industrially useful.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

Provided is a cylindrical roller bearing for a turbo refrigerator, in which a silicon-containing DLC coating film is formed on the surface of an inner ring raceway and the concentration of silicon at the outermost surface of the DLC coating film is 1-17 atom %. By using this silicon-containing DLC coating film, it is possible to prevent, over a long period of time, damage caused by skidding.

Description

ターボ冷凍機用円筒ころ軸受Cylindrical roller bearing for turbo refrigerator
　本発明は、ターボ冷凍機の自由側軸受として利用される円筒ころ軸受に関する。 The present invention relates to a cylindrical roller bearing used as a free side bearing of a turbo refrigerator.
　図３に示すように、ターボ冷凍機では、回転軸は固定側及び自由側共に、主として組合せアンギュラ玉軸受により支持される（例えば、特許文献１、２参照）。自由側軸受は、温度上昇に伴う回転軸の伸張を吸収するために円筒ころ軸受が使用されることもあるが（図４参照）、高速回転で使用されるターボ冷凍機の場合、負荷されるラジアル方向荷重によっては公転すべりが大きくなる所謂スキッディングが生じ、摩耗損傷や焼き付きに至る懸念があることから、ターボ冷凍機では自由側軸受に組合せアンギュラ玉軸受が使用されるのが主流になっている。 As shown in FIG. 3, in the centrifugal chiller, the rotating shaft is supported mainly by a combined angular ball bearing on both the fixed side and the free side (see, for example, Patent Documents 1 and 2). Cylindrical roller bearings are sometimes used as free-side bearings to absorb the expansion of the rotating shaft as temperature rises (see FIG. 4), but they are loaded in the case of a turbo refrigerator used at high speed rotation. Depending on the radial load, so-called skiding that causes revolving slip increases, which may lead to wear damage and seizure.Therefore, in centrifugal chillers, the use of combined angular ball bearings for free-side bearings has become the mainstream. Yes.
　しかしながら、自由側軸受に組合せアンギュラ玉軸受を採用すると、軸受列数の増大による圧縮機のサイズアップ及び損失の増大というデメリットが生じる。また、自由側軸受の外輪とハウジング間の隙間は、大きすぎると外輪間座外径部から潤滑油の漏洩が過多となり、小さすぎると外輪とハウジングが拘束し、軸受が軸の伸張による荷重を受けて早期損傷する可能性があるなど設定が難しい。 However, when a combined angular contact ball bearing is used for the free-side bearing, there are disadvantages such as an increase in compressor size and loss due to an increase in the number of bearing rows. If the clearance between the outer ring and the housing of the free-side bearing is too large, excessive leakage of lubricating oil from the outer diameter of the outer ring spacer is excessive. Setting is difficult because there is a possibility of early damage.
日本国特開２００９－１９６０１号公報Japanese Unexamined Patent Publication No. 2009-19601 日本国特開２００９－２１５９３１号公報Japanese Unexamined Patent Publication No. 2009-215931
　本発明は、このような状況に鑑みてなされたものであり、スキッディングによる損傷を長期間防止でき、ターボ冷凍機の自由側軸受用として組合せアンギュラ玉軸受の代替品として有用な円筒ころ軸受を提供することを目的とする。 The present invention has been made in view of such a situation, and a cylindrical roller bearing that can prevent damage due to skidding for a long period of time and is useful as a substitute for a combined angular ball bearing for a free-side bearing of a turbo refrigerator. The purpose is to provide.
　上記課題を解決するために本発明は、内輪軌道面に、珪素を含むＤＬＣ皮膜が形成されており、かつ、前記ＤＬＣ皮膜における最表面の珪素濃度が１～１７原子％であることを特徴とするターボ冷凍機用円筒ころ軸受を提供する。 In order to solve the above problems, the present invention is characterized in that a DLC film containing silicon is formed on the inner ring raceway surface, and the silicon concentration of the outermost surface of the DLC film is 1 to 17 atomic%. Provided is a cylindrical roller bearing for a turbo refrigerator.
　本発明の円筒ころ軸受は、内輪軌道面に珪素を特定量含有するＤＬＣ皮膜を形成したものであり、ＤＬＣ皮膜が持つ摺動性や硬さを確保しつつ、珪素を所定量含有するためＤＬＣ皮膜の残留応力が低下して剥れが抑えられ、結果としてスキッディング損傷を長期間防止することができ、ターボ冷凍機の自由側軸受用として組合せアンギュラ玉軸受の代替品として極めて有用である。 The cylindrical roller bearing of the present invention is formed by forming a DLC film containing a specific amount of silicon on the raceway surface of the inner ring, and since DLC film contains a predetermined amount of silicon while ensuring the slidability and hardness of the DLC film. The residual stress of the film is reduced and peeling is suppressed, and as a result, skid damage can be prevented for a long period of time, and it is extremely useful as a substitute for a combination angular contact ball bearing for a free side bearing of a turbo refrigerator.
本発明のターボ冷凍機用円筒ころ軸受を示す断面図である。It is sectional drawing which shows the cylindrical roller bearing for turbo refrigerators of this invention. 実施例で得られた、含珪素ＤＬＣ皮膜の剥れ量の経時変化を示すグラフである。It is a graph which shows the time-dependent change of the amount of peeling of the silicon-containing DLC film obtained in the Example. ターボ冷凍機の回転軸周辺を示す断面図であり、自由側軸受として組合せアンギュラ玉軸受を用いた一般的な場合を示す。It is sectional drawing which shows the rotating shaft periphery of a turbo refrigerator, and shows the general case using a combination angular contact ball bearing as a free side bearing. ターボ冷凍機の回転軸周辺の他の例を示す断面図であり、自由側軸受として円筒ころ軸受を用いた場合を示す。It is sectional drawing which shows the other example of the periphery of the rotating shaft of a turbo refrigerator, and shows the case where a cylindrical roller bearing is used as a free side bearing.
　以下、本発明に関して図面を参照して詳細に説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.
　図１は、本発明のターボ冷凍機用円筒ころ軸受を示す断面図である。図示されるように、内輪１と外輪２との間に、複数の円筒ころ３が保持器４により転動自在に保持されている。また、本発明では内輪軌道面１ａに、珪素を含有するＤＬＣ皮膜（以下「含珪素ＤＬＣ皮膜」）１０が形成されている。 FIG. 1 is a cross-sectional view showing a cylindrical roller bearing for a turbo refrigerator according to the present invention. As shown in the figure, a plurality of cylindrical rollers 3 are held by a cage 4 between the inner ring 1 and the outer ring 2 so as to be freely rollable. In the present invention, a DLC film 10 containing silicon (hereinafter referred to as “silicon-containing DLC film”) 10 is formed on the inner ring raceway surface 1a.
　一般的なＤＬＣ皮膜は、それ自体で摺動性及び耐摩耗性等を向上させる効果が得られるが、更に珪素を含むことにより、炭素単独の場合に比べて皮膜の残留応力が低くなり、皮膜の剥離が抑えられて耐久性が高まる。但し、含珪素ＤＬＣ皮膜１０の最表面において珪素が過多になると、含珪素ＤＬＣ皮膜１０が本来有する摺動性や硬さが低下するため、最表面における珪素濃度を１７原子％以下にする。一方、珪素による残留応力の低下効果を得るためには、最表面における珪素濃度を１原子％以上とする必要がある。好ましくは、含珪素ＤＬＣ皮膜１０の最表面における珪素濃度は３～５原子％である。 The general DLC film itself has the effect of improving the slidability and wear resistance. However, the inclusion of silicon further reduces the residual stress of the film as compared with the case of carbon alone. The peeling is suppressed and the durability is increased. However, if silicon is excessive on the outermost surface of the silicon-containing DLC coating 10, the slidability and hardness inherently possessed by the silicon-containing DLC coating 10 are reduced, so that the silicon concentration on the outermost surface is set to 17 atomic% or less. On the other hand, in order to obtain the effect of reducing the residual stress due to silicon, the silicon concentration on the outermost surface needs to be 1 atomic% or more. Preferably, the silicon concentration at the outermost surface of the silicon-containing DLC film 10 is 3 to 5 atomic%.
　上記したように含珪素ＤＬＣ皮膜１０の最表面の珪素濃度は１～１７原子％であるが、皮膜全体にわたり珪素濃度が一様に１～１７原子％であってもよく、表面に向かうにつれて炭素の割合が珪素の割合よりも大きくなるような傾斜組成であってもよい。後者の傾斜組成の場合、含珪素ＤＬＣ皮膜１０の残留応力を小さくする効果と、摺動性や硬さを高める向上とがより効果的に得られる。 As described above, the silicon concentration on the outermost surface of the silicon-containing DLC film 10 is 1 to 17 atomic%, but the silicon concentration may be uniformly 1 to 17 atomic% throughout the film, and the carbon concentration increases toward the surface. The gradient composition may be such that the ratio is larger than the ratio of silicon. In the case of the latter gradient composition, the effect of reducing the residual stress of the silicon-containing DLC film 10 and the improvement of improving the slidability and hardness can be obtained more effectively.
　また、含珪素ＤＬＣ皮膜１０は、珪素の他に水素を含有することが好ましい。水素によりＣ－Ｈ結合とＳｉ－Ｈ結合とが混在するが、Ｓｉ－Ｈ結合は結合エネルギーが小さいため、未結合の水素原子が積極的に珪素原子と結合し、水素を含有しない場合に比べて皮膜の残留応力がより小さくなる。 The silicon-containing DLC film 10 preferably contains hydrogen in addition to silicon. Although C—H bonds and Si—H bonds coexist with hydrogen, the Si—H bond has a low bond energy, so compared to the case where unbonded hydrogen atoms are positively bonded to silicon atoms and do not contain hydrogen. As a result, the residual stress of the film becomes smaller.
　このような含珪素ＤＬＣ皮膜１０を形成するためには、炭素ターゲット及び珪素ターゲットを用い、真空中でスパッタリングすればよい。また、水素を更に含有する場合は、炭素ターゲット及び珪素ターゲットを用い、メタンガス等の炭化水素ガス雰囲気中でスパッタリングを行う。尚、スパッタリングは、例えばマグネトロンスパッタリング装置を用いて行うことができる。また、傾斜組成にする場合は、成膜中に炭素ターゲットに加える電圧を徐々に大きくする一方で、珪素ターゲットに加える電圧を徐々に小さくすればよい。 In order to form such a silicon-containing DLC film 10, sputtering may be performed in a vacuum using a carbon target and a silicon target. When hydrogen is further contained, sputtering is performed in a hydrocarbon gas atmosphere such as methane gas using a carbon target and a silicon target. Sputtering can be performed using, for example, a magnetron sputtering apparatus. In the case of a gradient composition, the voltage applied to the carbon target during film formation is gradually increased while the voltage applied to the silicon target is gradually decreased.
　尚、成膜時に内輪軌道面１ａの温度を１５０～１８０℃に制御することが好ましい。１５０℃未満では成膜効率が悪く、１８０℃を超えると珪素が結晶状態で成膜される傾向がある。これに対し、１５０～１８０℃の温度範囲にすることにより、ＤＬＣ皮膜１０の体積膨張を抑えることができる。また、内輪１を構成する鋼材の硬度低下を防ぎ、内輪軌道面１ａとＤＬＣ皮膜１０との密着性が良好になる。 It should be noted that the temperature of the inner ring raceway surface 1a is preferably controlled to 150 to 180 ° C. during film formation. If it is less than 150 ° C., the film formation efficiency is poor, and if it exceeds 180 ° C., silicon tends to be formed in a crystalline state. On the other hand, the volume expansion of the DLC film 10 can be suppressed by setting the temperature range to 150 to 180 ° C. Moreover, the hardness reduction of the steel material which comprises the inner ring | wheel 1 is prevented, and the adhesiveness of the inner ring raceway surface 1a and the DLC film 10 becomes favorable.
　含珪素ＤＬＣ皮膜１０の膜厚は０．８～１．６μｍが好ましい。膜厚が０．８μｍ未満では皮膜の耐久性が十分ではなく、１．６μｍを超えると皮膜の残留応力が大きすぎて十分な密着性が得られず、内輪軌道面１ａから剥がれやすくなる。尚、このような膜厚とするには、スパッタリング時間を調整すればよい。 The film thickness of the silicon-containing DLC film 10 is preferably 0.8 to 1.6 μm. If the film thickness is less than 0.8 μm, the durability of the film is not sufficient, and if it exceeds 1.6 μm, the residual stress of the film is too large and sufficient adhesion cannot be obtained, and the film tends to peel off from the inner ring raceway surface 1a. In order to obtain such a film thickness, the sputtering time may be adjusted.
　また、含珪素ＤＬＣ皮膜１０は、ヤング率１５０～２００ＧＰａであることが好ましい。ヤング率が１５０ＧＰａ未満であるとＤＬＣ皮膜１０の硬さが十分ではなく、２００ＧＰａを超えると内輪軌道面１ａが変形しにくくなり、高負荷環境で剥離しやすくなる。 The silicon-containing DLC film 10 preferably has a Young's modulus of 150 to 200 GPa. When the Young's modulus is less than 150 GPa, the hardness of the DLC film 10 is not sufficient, and when it exceeds 200 GPa, the inner ring raceway surface 1a is difficult to deform and easily peels off in a high load environment.
　更には、クロム等の金属製中間層を介してＤＬＣ皮膜１０を形成してもよい。 Furthermore, the DLC film 10 may be formed through a metal intermediate layer such as chromium.
　本発明において、上記のように内輪軌道面１ａに含珪素ＤＬＣ皮膜１０を形成した以外には制限はなく、内外輪の材質や潤滑剤等は公知のもので構わない。 In the present invention, there is no limitation except that the silicon-containing DLC film 10 is formed on the inner ring raceway surface 1a as described above, and the materials and lubricants of the inner and outer rings may be known ones.
　以下に実施例を挙げて本発明を更に説明するが、本発明はこれにより何ら制限されるものではない。 Hereinafter, the present invention will be further described with reference to examples, but the present invention is not limited thereto.
　ターボ冷凍機用として一般的な円筒ころ軸受（呼び番号「ＮＵ３０７」）の内輪を、マグネトロンスパッタリング装置に装着した。マグネトロンスパッタリング装置は炭素ターゲットと珪素ターゲットを備えており、温度１８０℃、真空中で含珪素ＤＬＣ皮膜を内輪軌道面に形成した。その際、炭素ターゲットに加える電圧を徐々に大きくし、珪素ターゲットに加える電圧を徐々に小さくして、最表面の珪素濃度が３～６原子％となるように傾斜組成にした。そして、含珪素ＤＬＣ皮膜を形成した内輪を用いて同軸受を組み立て、試験軸受Ａとした。 An inner ring of a general cylindrical roller bearing (nominal number “NU307”) for a turbo refrigerator was mounted on a magnetron sputtering apparatus. The magnetron sputtering apparatus was provided with a carbon target and a silicon target, and a silicon-containing DLC film was formed on the inner ring raceway surface at a temperature of 180 ° C. in a vacuum. At that time, the voltage applied to the carbon target was gradually increased and the voltage applied to the silicon target was gradually decreased, so that the gradient composition was obtained so that the silicon concentration on the outermost surface was 3 to 6 atomic%. And the bearing was assembled using the inner ring | wheel in which the silicon-containing DLC film was formed, and it was set as the test bearing A.
　また、比較のために、皮膜を形成せず、内輪軌道面が露出している内輪からなる同一の円筒ころ軸受を試験軸受Ｂとした。 For comparison, the same cylindrical roller bearing composed of an inner ring with no coating formed and the inner ring raceway surface exposed was designated as test bearing B.
　試験軸受Ａ、Ｂを用い、表１に示すＰＶ値及びすべり速度にて耐久試験を行った、尚、ＰＶ値及びすべり速度はスキッディング発生限界値に対する比である。耐久性は、スキッディング損傷が発生するまでの時間（耐久時間）で評価した。 Durability tests were conducted using the test bearings A and B at the PV values and sliding speeds shown in Table 1, where the PV value and sliding speed are ratios to the skid generation limit value. The durability was evaluated by the time until the skid damage occurred (durability time).
　結果を表１に示すが、試験軸受Ｂでは、３０時間経過後にスキッディング損傷が発生したのに対し、含珪素ＤＬＣ皮膜を形成した試験軸受Ａでは４８０時間経過後でもスキッディング損傷発生の兆しが見られなかった。また、試験軸受Ａについて、所定時間毎に含珪素ＤＬＣ皮膜の剥れ量（皮膜の全面積に対して皮膜が剥れている領域の面積の割合）を求めたが、図２に示すように、剥れ量も実用上影響を及ぼすと考えられる限界値３０％に対し、十分な余裕がある。 The results are shown in Table 1. In test bearing B, skid damage occurred after 30 hours, while in test bearing A with a silicon-containing DLC film, there was no sign of skid damage even after 480 hours. I couldn't see it. Moreover, about the test bearing A, the peeling amount (area ratio of the area | region where the film has peeled with respect to the total area of a film | membrane) was calculated | required for every predetermined time, but as shown in FIG. Further, there is a sufficient margin with respect to the limit value of 30%, which is considered to have a practical effect on the amount of peeling.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
　このように、本発明のように、内輪軌道面に含珪素ＤＬＣ皮膜を形成することにより、長期にわたりスキッディング損傷防止効果が維持できることが確認された。 Thus, it was confirmed that the effect of preventing skidding damage can be maintained over a long period of time by forming a silicon-containing DLC film on the inner ring raceway surface as in the present invention.
　本発明を詳細にまた特定の実施態様を参照して説明したが、本発明の精神と範囲を逸脱することなく様々な変更や修正を加えることができることは当業者にとって明らかである。
　本出願は、２０１４年７月１７日出願の日本特許出願（特願２０１４－１４６９３５）に基づくものであり、その内容はここに参照として取り込まれる。 Although the present invention has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention.
This application is based on a Japanese patent application (Japanese Patent Application No. 2014-146935) filed on July 17, 2014, the contents of which are incorporated herein by reference.
　本発明のターボ冷凍機用円筒ころ軸受は、含珪素ＤＬＣ皮膜を形成したことによりスキッディングによる損傷を長期間防止することができ、長寿命となり産業上有用である。 The cylindrical roller bearing for a turbo chiller of the present invention can prevent damage due to skidding for a long period of time due to the formation of the silicon-containing DLC film, has a long life, and is industrially useful.
１　内輪
１ａ　内輪軌道面
２　外輪
３　円筒ころ
４　保持器
１０　含珪素ＤＬＣ皮膜 DESCRIPTION OF SYMBOLS 1 Inner ring 1a Inner ring raceway surface 2 Outer ring 3 Cylindrical roller 4 Cage 10 Silicon-containing DLC film

Claims (1)

  1. 　内輪軌道面に、珪素を含むＤＬＣ皮膜が形成されており、かつ、前記ＤＬＣ皮膜における最表面の珪素濃度が１～１７原子％であることを特徴とするターボ冷凍機用円筒ころ軸受。 A cylindrical roller bearing for a turbo refrigerator, wherein a DLC film containing silicon is formed on the inner ring raceway surface, and the silicon concentration of the outermost surface of the DLC film is 1 to 17 atomic%.
PCT/JP2015/070528 2014-07-17 2015-07-17 Cylindrical roller bearing for turbo refrigerator WO2016010138A1 (en)

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JP2014146935A JP2016023685A (en) 2014-07-17 2014-07-17 Cylindrical roller bearing for turbo refrigerator

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06341445A (en) * 1991-10-14 1994-12-13 Shojiro Miyake Rolling bearing
JP2005195150A (en) * 2004-01-09 2005-07-21 Koyo Seiko Co Ltd Rolling device
JP2009222141A (en) * 2008-03-17 2009-10-01 Jtekt Corp Tapered roller bearing
JP2011001598A (en) * 2009-06-18 2011-01-06 Jtekt Corp Sliding member
JP2013091853A (en) * 2013-01-21 2013-05-16 Jtekt Corp Sliding member

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4947405B2 (en) * 2005-12-28 2012-06-06 株式会社Ｉｈｉ Turbo compressor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06341445A (en) * 1991-10-14 1994-12-13 Shojiro Miyake Rolling bearing
JP2005195150A (en) * 2004-01-09 2005-07-21 Koyo Seiko Co Ltd Rolling device
JP2009222141A (en) * 2008-03-17 2009-10-01 Jtekt Corp Tapered roller bearing
JP2011001598A (en) * 2009-06-18 2011-01-06 Jtekt Corp Sliding member
JP2013091853A (en) * 2013-01-21 2013-05-16 Jtekt Corp Sliding member

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