WO2015188878A1

WO2015188878A1 - Clamp arrangement for a substrate carrier, and method for opening and fastening a clamp arrangement

Info

Publication number: WO2015188878A1
Application number: PCT/EP2014/062420
Authority: WO
Inventors: Andre Brüning; Reiner Hinterschuster
Original assignee: Applied Materials, Inc.
Priority date: 2014-06-13
Filing date: 2014-06-13
Publication date: 2015-12-17
Also published as: TW201615323A; CN206697453U

Abstract

A clamp device (100), a clamp tool (200), and a clamp arrangement (300) for clamping a substrate (480) to be processed in a substrate carrier (500) are described. The clamp device includes a first lever (110) and a second lever (120), wherein the first lever (110) is movably supported in a first joint (115), the second lever (120) is movably supported in a second joint (125), and wherein the first lever (110) and the second lever (120) are movably connected to each other by a first common joint (140). The second lever (120) includes a clamping portion (121) adapted for being pressed against the substrate (480; 510) to be processed. At least one of the first lever (110) and the second lever (120) comprises a contact portion (116; 126) for providing functional contact to a clamp tool (200; 610). The clamp tool is adapted for opening and fastening the clamp device.

Description

CLAMP ARRANGEMENT FOR A SUBSTRATE CARRIER, AND METHOD FOR OPENING AND FASTENING A CLAMP ARRANGEMENT

TECHNICAL FIELD OF THE INVENTION

[0001] Embodiments of the present invention relate to a clamp device for a carrier of a substrate to be processed, a clamp tool for opening and fastening the clamp device, and a method for opening and fastening the clamp device. Embodiments of the present invention particularly relate to a clamp device and a clamp tool for a carrier of a thin substrate, especially a thin glass substrate, specifically to a clamp device and a clamp tool for a carrier of a substrate to be processed in a vacuum process and outside of the vacuum process.

BACKGROUND OF THE INVENTION

[0002] Several methods are known for depositing a material on a substrate. For instance, substrates may be coated by a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, etc. Typically, the process is performed in a process apparatus or process chamber, where the substrate to be coated is located. A deposition material is provided in the apparatus. A plurality of materials, but also oxides, nitrides or carbides thereof, may be used for deposition on a substrate. Further, other processing steps like etching, structuring, annealing, or the like can be conducted in processing chambers. [0003] Coated materials may be used in several applications and in several technical fields. For instance, an application lies in the field of microelectronics, such as generating semiconductor devices. Also, substrates for displays are often coated by a PVD process. Further applications include insulating panels, organic light emitting diode (OLED) panels, substrates with TFT, color filters or the like. [0004] Particularly for areas such as display production, manufacturing of thin-film solar cells and similar applications, large area substrates (e.g. glass substrates) are used to be processed. In the past, there has been a continuous increase in substrate sizes which is still to be continued. The increase of the glass substrate make handling, supporting and processing of the substrates increasingly challenging without sacrificing the throughput by substrate damage, such as glass breakage.

[0005] Typically, glass substrates can be supported on carriers during processing thereof. A carrier drives the glass or the substrate through the processing machine. The carriers typically form a frame or a plate, which supports a surface of the substrate along the periphery thereof or supports the surface as such. Clamp devices are often used for holding and fixing the substrate in the substrate carrier. The clamp device is adapted to the conditions of the process as well as to the substrate to be processed. After processing of the substrate, the clamp device is opened and the substrate is released from the clamp device. Depending on the type of clamp used, a tool may be used for opening the clamp device. However, using a tool for opening a clamp may ensure a proper function of the clamp during processing, but may also postpone the process of releasing the substrate. This may decelerate the process cycle.

[0006] In view of the above, it is an object of the present invention to provide a clamp device for a substrate to be processed, a clamp tool, a clamp arrangement and a method for opening and fastening the clamp arrangement that overcome at least some of the problems in the art.

SUMMARY OF THE INVENTION [0007] In light of the above, a clamp device for clamping a substrate to be processed in a substrate carrier, a clamp tool for a clamp device for clamping a substrate to be processed in a substrate carrier, a clamp arrangement for clamping and releasing a substrate in a substrate carrier and a method for fastening and opening a clamp device according to the independent claims are provided. Further aspects, advantages, and features of the present invention are apparent from the dependent claims, the description, and the accompanying drawings.

[0008] According to one embodiment, a clamp device for clamping a substrate to be processed in a substrate carrier for a processing apparatus is provided. The clamp device includes a first lever and a second lever, wherein the first lever is movably supported in a first joint, the second lever is movably supported in a second joint. The first lever and the second lever are movably connected to each other by a first common joint. The second lever includes a clamping portion adapted for being pressed against the substrate to be processed. Further, at least one of the first lever and the second lever includes a contact portion for providing functional contact to a clamp tool, in particular a clamp tool according to embodiments described herein. [0009] According to another embodiment, a clamp tool for a clamp device for clamping a substrate to be processed in a substrate carrier for a processing apparatus is provided. The clamp tool includes at least one of a third lever being movably supported by a third joint and a fourth lever being movably supported by a fourth joint. The at least one of the third lever and the fourth lever includes a contact portion for providing functional contact to a clamp device, in particular a clamp device according to embodiments described herein.

[0010] According to a further embodiment, a clamp arrangement for clamping and releasing a substrate in a substrate carrier for a processing apparatus is provided. The clamp arrangement includes a clamp device including a first lever and a second lever, wherein a rotation of the first lever and the second lever opens or fastens the clamp device. The clamp arrangement further includes a clamp tool including at least one of a third lever and a fourth lever, wherein the clamp device and the clamp tool are adapted to be in functional contact with each other. Further, a translational movement of at least a part of the clamp tool causes a rotational movement of the first lever and the second lever of the clamp device, when the clamp device and the clamp tool are in functional contact with each other, in particular wherein the translational movement of at least a part of the clamp tool opens or fastens the clamp device.

[0011] According to a further embodiment, a method for opening or fastening a clamp device for clamping a substrate to be processed in a substrate carrier is provided. The method includes bringing a clamp tool and a clamp device into functional contact, in particular a clamp tool and a clamp device according to embodiments described herein. The method further includes translational moving at least a part of the clamp tool; and opening or fastening the clamp device by the translational movement of the clamp tool causing a rotational movement of at least a part of the clamp device.

[0012] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method step. These method steps may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the invention are also directed at methods by which the described apparatus operates. It includes method steps for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0013] So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the invention and are described in the following: Fig. 1 shows a schematic view of a clamp device for clamping a substrate to be processed in a substrate carrier according to embodiments described herein;

Fig. 2 shows a schematic view of a clamp tool for opening and fastening a clamp device according to embodiments described herein;

Fig. 3a shows a schematic view of a clamp arrangement including a clamp device and a clamp tool in a first position according to embodiments described herein;

Fig. 3b shows the clamp arrangement of Fig. 3a in a second position with engaged clamp tool and clamp device according to embodiments described herein;

Fig. 3c shows the clamp arrangement of Fig. 3a in a third position;

Fig. 3d shows the clamp arrangement of Fig. 3a in a fourth position;

Fig. 3e shows a schematic, perspective view of a clamp arrangement according to embodiments described herein; Fig. 4 shows a schematic view of a clamp arrangement clamping a substrate to a substrate carrier according to embodiments described herein;

Fig. 5 shows a schematic view of a clamp arrangement clamping a substrate to a substrate carrier according to embodiments described herein;

Fig. 6 shows a schematic view of a clamp arrangement including a clamp device and a clamp tool according to embodiments described herein; and Fig. 7 shows a flow chart of a method for opening and fastening a clamp device according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0014] Reference will now be made in detail to the various embodiments of the invention, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Generally, only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the invention and is not meant as a limitation of the invention. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0015] Furthermore, in the following description, a clamp device may be understood as a device for clamping or temporarily fixing a substrate to a substrate carrier. For instance, the clamp device may be adapted for applying a force to the substrate, in particular, the substrate may be pressed against a contact surface of a substrate carrier by the force of the clamp device. In some embodiments, the clamp device may be attachable or attached to the substrate carrier. A clamp tool as referred to herein may be understood as a tool for opening and fastening the clamp device. According to some embodiments described herein, the clamp tool may removably be attachable to the clamp device for opening and fastening the clamp device. Typically, a clamp arrangement includes a clamp device and a clamp tool.

[0016] A lever as described herein should be understood as a sort of a beam or a rod, particularly a rigid beam or rod. Typically, the lever referred to herein has a defined length and a width. In some embodiments, the lever may have a substantially rectangular shape. According to some embodiments described herein, the lever may be pivoted at a fixed hinge or fulcrum. In some embodiments, a lever as described herein amplifies an input force to provide a greater output force.

[0017] The term "substantially" as used herein may mean that there may be a certain deviation from the characteristic denoted with "substantially." For instance, the term "substantially rectangular" refers to a shape which may have certain deviations from the exact rectangular shape, such as a deviation of about 1 to 10% of the general extension in one direction, or such as having rounded corners. According to a further example, the term "substantially vertical" may refer to a direction, which may deviate from the exact vertical direction, such as deviating by about 1° to about 10°.

[0018] Typically, substrates to be processed, such as glass substrates, can be fixed to a substrate carrier for moving the substrate in a process apparatus. For instance, the substrate may be fixed with clamps, wherein the substrate is pressed to the carrier frame. Types of clamps may encompass a toggle clamp design or a knee lever mechanism for applying the desired clamping force to the substrate. However, for opening as well as for fastening a clamp device being based on a toggle clamp or knee lever mechanism, a rotational movement of the levers of the clamp is applied. In particular, a curve movement between two or more different angles is used for opening a toggle clamp. Providing a rotational movement for opening or fastening the clamp is time-consuming. Further, a rotational movement also occupies space, which may not be present in a sufficient amount in a process apparatus, or in a production line, where the substrate is placed in the substrate carrier or taken from the substrate carrier. Still further, providing a rotational movement for opening and fastening the clamp device depends on a complex mechanism, which may be error-prone over the life time of the clamp or the clamp tool. [0019] According to embodiments described herein, a clamp device and a clamp tool are provided, which overcome the problems described above. The clamp device according to embodiments described herein is provided for clamping a substrate to be processed in a substrate carrier for a processing apparatus. Typically, the clamp device includes a first lever and a second lever. The first lever is movably supported in a first joint and the second lever is movably supported in a second joint. According to embodiments described herein the first lever and the second lever are also movably connected to each other by a first common joint. The second lever includes a clamping portion adapted for being pressed against the substrate to be processed. Typically, at least one of the first lever and the second lever comprises a contact portion for providing functional contact to a clamp tool, in particular a clamp tool according to embodiments described below. [0020] The clamp tool according to embodiments described herein is provided for a clamp device for clamping a substrate to be processed in a substrate carrier for a processing apparatus, in particular for opening and fastening the clamp device according to embodiments described herein. The clamp tool includes at least one of a third lever and a fourth lever. The third lever is movably supported by a third joint. The fourth lever is movably supported by a fourth joint. Typically, if a third and a fourth lever are present in the clamp tool, the third lever and the fourth lever are movably connected to each other by a second common joint. According to embodiments described herein, the at least one of the third lever and the fourth lever comprises a contact portion for providing functional contact to a clamp device, such as a clamp device as described in embodiments herein. [0021] The clamp device according to embodiments described herein may, especially due to the described design, be opened and fastened by a rotational movement of the first and second lever. Typically, by rotating the first lever, the second lever may also be rotated and, after having rotated about a defined angle, the second lever may exert a clamping force by the clamping portion against the substrate when fastening the clamp device. The clamping force being exerted due to the movement of the first lever, as well as the design of the first lever and the second lever allowing such a force, may be described as being a knee lever mechanism according to some embodiments described herein. The clamp tool according to embodiments described herein may perform a rotational movement of the third lever and the fourth lever, e.g. by a translational movement of the second common joint between the third lever and the fourth lever. If the contact portion(s) of the levers of the clamp device and the contact portions of the clamp tool are in functional contact with each other, the translational movement of the second common joint of the clamp tool may cause a rotational movement of the first and the second lever of the clamp device. As described above, by the rotational movement of the first and second lever of the clamp device, the clamp device may be opened or fastened. According to embodiments described herein, a translational movement of a part of the clamp tool can cause the third lever and the fourth lever to rotate and can open or fasten the clamp device, if the clamp device and the clamp tool are in functional contact with each other.

[0022] According to embodiments described herein, the clamp device and the clamp tool as described herein are able to convert the rotational movement used for opening and fastening the clamp device into a straight movement. According to some embodiments, the clamp device may be a toggle clamp. With the clamp device, and the clamp tool, or with the clamp arrangement according to embodiments described herein, the complex circular mechanism of the clamp device may be opened and fastened with a translational drive, such as a cylinder or linear drive. According to some embodiments described herein, the clamp device, the clamp tool, and the clamp arrangement may be adapted for being operated in vacuum conditions, but may also be adapted to further processes, such as high temperature operations and the like.

[0023] An exemplary embodiment of the clamp device is shown in Fig. 1 and an exemplary embodiment of the clamp tool is shown in Fig. 2.

[0024] Fig. 1 shows a clamp device 100 according to embodiment described herein. The clamp device 100 includes a first lever 110 and a second lever 120. The first lever 110 and the second lever may be adapted for a lever mechanism, in particular, the first lever and the second lever may have a defined length, such as a defined ratio of the length of the first lever to the length of the second lever. In some embodiments, the length of the lever may typically be between about 15 mm and about 50. mm, more typically between about 20 mm and about 40 mm, and even more typically between about 25 mm and about 35 mm. In one embodiment, the first lever may have a length of about 35 mm. in one example, the second lever may have a length of about 25 mm. Typically, the ratio between the length of the first lever and the second lever may typically be between about 1.2 and about 2, more typically between about 1.2 and 1.8, and even more typically between about 1.2 and 1.6, such as 1.4.

[0025] According to some embodiments, the second lever 120 includes a clamping portion 121. The clamping portion 121 of the second lever 120 may be an integral part of the second lever 120 or may be attached to the second lever, such as fixedly attached to the second lever. The clamping portion 121 may further provide a clamping surface 122, which is adapted to be in contact with a substrate to be held in a substrate carrier by the clamp device 100. According to some embodiments, the clamping portion may include a surface to be in contact with the substrate to be clamped, e.g. a substantially round clamping surface. The clamping surface being in contact with the substrate may particularly have a size between about 10 mm and 80 mm 2 , more typically between about 10 mm 2 and about 60 mm 2 , and even more typically between about 20 mm 2 and about 40 mm 2 In one embodiment, the clamping surface may have a substantially circular shape having a diameter of about 5 mm to 10 mm, such as 6 mm. In some embodiments, the clamping portion of the clamping device includes more than one area being in contact with the substrate and forming the clamping surface, such as several circularlike shaped areas (having e.g. a diameter of about 6 mm) forming the clamping surface. According to some embodiments, the clamping portion of the clamp tool covers a part of substrate. In some embodiments, the area of the substrate covered by the clamping portion of the clamp device may have a width between typically about 4 mm and about 50 mm, more typically between about 4 mm and about 30 mm, and even more typically between about 4 mm and about 20 mm. The length of the substrate area covered by the clamping portion may typically be between about 20 mm and about 150 mm, more typically between about 30 mm and about 120 mm, and even more typically between about 40 mm and about 100 mm. In one example, the area of the substrate covered by the clamping portion is about 6 mm by about 80 mm. In some embodiments, the clamping portion may be made from aluminum, steel, stainless steel, copper, bronze or the like. If the clamp device is used in a vacuum environment, the clamp device may be made from aluminum, stainless steel and/or copper- alloys according to some embodiments. Generally, the clamping portion may be made from any material suitable for exerting a clamping force to a substrate to be processed. The material may also be chosen dependent on the type of process the substrate should be exposed to. According to some embodiments, the clamp surface may particularly be made from a material, which is softer or which has a rougher surface than the material of the rest of the clamping portion for ensuring a careful and secure grip of the substrate.

[0026] In the embodiment shown in Fig. 1, the first lever 110 is mounted to a first connecting device 130 by a first joint 115. According to some embodiments, the second lever 120 may also be connected to the first connecting device 130 by a second joint 125. In some embodiments, the first joint and the second joint allow for a rotation of the first lever and the second lever, respectively. The embodiment of Fig. 1 further shows that the first lever 110 and the second lever 120 are connected to each other by a first common joint 140, which in particular allows for a rotation of both the first lever 110 and the second lever 120. In some embodiments, the clamp device 100 may be described as providing a knee lever mechanism and providing respective joints and levers for the knee mechanism. [0027] According to embodiments described herein, at least one of the first lever and the second lever of the clamp device provides a contact portion for providing functional contact to a clamp tool. In the embodiment shown in Fig. 1, both the first lever 110 and the second lever 120 provide a contact portion, namely a first contact portion 116 of the first lever 110 and a second contact portion 126 of the second lever 120. Typically, the contact portion of the clamp device is adapted to be in functional contact with a clamp tool.

[0028] Fig. 2 shows a clamp tool 200 according to embodiments described herein. The clamp tool 200 includes a third lever 230 and a fourth lever 240. As can be seen in Fig. 2, the third lever 230 may be connected to a second connecting device 250 by a third joint 235. The fourth lever 240 may be connected to a second connecting device 250 by a fourth joint 245. According to embodiments described herein, the third lever 230 and the fourth lever 240 are connected to each other by a second common joint 260.

[0029] According to some embodiments, the length of the third lever may be in a fixed relation to the length of the fourth lever, in particular, the ratio of the third lever to the fourth lever may be the same as the length ratio of the first lever and the second lever. In particular, the length of the third lever may correspond to the length of the first lever and the length of the fourth lever may correspond to the length of the second lever. In some embodiments, other characteristics (apart from the length) of the first and second lever compared to the third and fourth lever may correspond to each other. For instance, the design of the levers may correspond to each other, in particular, the shape of the third lever may correspond to the shape of the first lever, and the shape of the fourth lever may correspond to the shape of the second lever. Also, further dimensions apart from the length of the levers, the materials used for the levers of the clamp device and the clamp tool, or the design and construction of the joints may correspond to each other.

[0030] In the embodiment shown in Fig. 2, each of the third lever 230 and the fourth lever 240 provides a contact portion 236 and 246, respectively. According to some embodiments, the contact portion(s) of the clamp device and the contact portion(s) of the clamp tool may be adapted to be in functional contact with each other.

[0031] The term "functional contact" as used herein should be understood in that the parts being in functional contact with each other are in contact to each other and the contact allows for providing a defined function of the two parts, in particular a function with respect to each other. For instance, the functional contact may be a contact that allows for coupling two parts to each other (e.g. for a defined time interval), such as coupling the movement of one part with the movement of the other part. According to some embodiments, the functional contact may make the movements of the two parts dependent on one another. The coupled movement of the two parts may result in forces acting on the two parts, such as a drag force, a pressing force, a frictional force, but also a magnetic force, an adhesion force, or the like. In some embodiments, the functional contact may be a contact between two parts, which is able to withstand forces between the two parts acting against the functional contact, at least to a defined amount, such as a contact by engagement of an engagement portion of one part to a receiving portion of the other part, or a contact by magnetic forces between the two parts, or the like. Also, a functional contact according to some embodiments described herein may be understood as a functional contact allowing for effecting a reaction in the one part upon action of the other part, e.g. by a movement or other action of the other part.

[0032] As can be seen in the Figs. 1 and 2, the contact portions 116, 126, 236, and 246 are designed so as to provide functional contact between the clamp device and the clamp tool by respective engagement and receiving portions which allow for a geometrical engagement of the clamp device and the clamp tool. In particular, the second lever 120 of the clamp device 100 includes a receiving portion as a contact portion 126 with which a respective contact portion 236 being designed as an engagement portion of the third lever 230 of the clamp tool 200 may engage. Further, in the embodiments shown in Figs. 1 and 2, the fourth lever 240 of the clamp tool 200 may include a receiving portion as a contact portion 246, in which a respective contact portion 116 being designed as an engagement portion of the first lever 110 of the clamp device 100 may engage. By engaging the contact portions of the clamp device and the clamp tool, a functional contact may be provided which allows a coupling of the movements of the clamp device and the clamp tool. [0033] Figs 3a and 3b show an example of a clamp arrangement including a clamp device and a clamp tool being brought into functional contact with each other according to some embodiments described herein.

[0034] According to embodiments described herein, a clamp arrangement may be provided for clamping and releasing a substrate in a substrate carrier for a processing apparatus. The clamp arrangement includes a clamp device including a first lever and a second lever. Typically, a rotation of the first lever and the second lever opens or fastens the clamp device. The clamp arrangement may further include a clamp tool device including at least one of a third lever and a fourth lever. Typically, the clamp device and the clamp tool are adapted to be in functional contact with each other. According to embodiments described herein, the translational movement of at least a part of the clamp tool causes a rotational movement of the first lever and the second lever of the clamp device, when the clamp device and the clamp tool are in functional contact with each other. In particular, the translational movement of at least a part of the clamp tool opens or fastens the clamp device. [0035] Fig. 3a shows a clamp arrangement according to embodiments described herein. In one embodiment, the clamp arrangement 300 may include a clamp device 100 and a clamp tool 200, as exemplarily described above. Fig. 3a shows the clamp arrangement 300 in a first position, before the clamp tool 200 engages with the clamp device 100. As can be seen in Fig. 3a, the clamp device 100 and the clamp tool 200 may be brought into (functional) contact by a translational movement of the clamp tool in direction 280. In the embodiment of Fig. 3a, the clamp tool 200 is brought in engagement with the clamp device 100 by translational movement of the clamp tool 200 in a substantially vertical direction, or in a direction, which runs substantially parallel to the substrate surface. In particular, the contact portions of the clamp device and the clamp tool are designed and/or adapted to allow a functional contact to be made by a translational movement of the clamp tool. For instance, the contact portions may be designed so as to provide an opening in one direction at one side and being closed in another direction, such as having an opening in the upward (or downward) direction in the drawing, and being closed in a left-right direction in the drawing. Details of an example of a clamp device and a clamp tool each having a receiving portion and an engagement portion are shown and described with respect to Fig. 3e. In another example, e.g. where magnetic forces, adhesive forces or the like are used for the functional contact between clamp device and clamp tool, the contact portions may respectively be arranged. For instance, the contact portion of the clamp device may be arranged as a contact surface at the top or the bottom of the first and/or the second lever.

[0036] Generally, bringing the clamp device and the clamp tool in contact by a translational movement (only) further facilitates the opening and/or fastening process of the clamp device, and spares time and costs in the production line. In some embodiments, the clamp tool may be provided by an automated mechanism, such as a robot, which grips and places the clamp tool in a suitable manner for providing a functional contact.

[0037] Fig. 3b shows the clamp arrangement 300 in a second position. In the second position, the clamp device 100 and the clamp tool 200 are in functional contact with each other. The clamp device 100 and the clamp tool 200 are brought in functional contact by a translational movement of the clamp tool 200 in a substantially vertical direction (direction 280), which can be seen when comparing Fig. 3b with Fig. 3a.

[0038] In some embodiments, the clamping surface 122 may be in contact with a substrate to be processed, in particular when the clamping surface 122 is substantially vertically positioned. According to some embodiments, the first connecting device 130, which provides the first joint 115 of the first lever 110 and the second joint 125 of the second lever 120, may be attachable or fixable to a substrate carrier, in particular the connecting device 130 may be substantially unmovably connectable to the substrate carrier. In one embodiment, the first connecting device 130 may be supported by the substrate carrier, to which it is attached. The connection between the substrate carrier and a connecting device according to embodiments described herein may be able to withstand forces exerted on the connecting device, such as forces resulting from a movement of the levers of the clamp device. The connecting device being attached to a substrate carrier is shown in detail below with respect to Fig. 4.

[0039] According to some embodiments described herein, the second connecting device 250 which provides the third joint 235 and the fourth joint 245, may freely be movable, or may at least be movable in a translational direction, such as the left-right direction in the drawing. In one embodiment, the translational movement of the clamp tool 200 may be guided by a guiding device, such as a robot, a track, a bar, a guide groove or the like.

[0040] Fig. 3c shows the clamp arrangement 300 in a third position. In the third position, the clamp device 100 and the clamp tool 200 are in engagement with each other. A part of the clamp tool 200, in particular the second connecting device 250, has been moved in a translational movement in the direction of arrow 310. By the functional contact of the clamp tool 200 and the clamp device 100, the translational movement of the second connecting device 250 results in a rotational movement of the third lever and the fourth lever, and, by the functional contact between the levers, in a rotational movement of the first lever 110 and the second lever 120 of the clamp device 100 too. In the third position shown in Fig. 3c, the first lever 110 and the second lever 120 are moved by a certain extent and the clamping portion 121 is rotated with the second lever 120. By the rotation of the second lever 120, the clamping portion 121 is brought out of the fastened position (in the shown examples, the fastened position is a substantially vertical position) and may release a substrate, which has been in contact with the clamping surface 122 in the second position in Fig. 3b.

[0041] According to some embodiments, which may be combined with other embodiments described herein, the joints allow for a rotational mount of the first lever and the second lever of the clamp device as well as at least one of the third lever and the fourth lever of the clamp tool. The joints as described herein may fix the levers in any translational direction and may only allow a rotation of the levers, such as a pivot joint. In some embodiments, the joints are able to connect two parts with each other, such as a first lever and a second lever, in particular to connect two parts in a rotatable way. Typically, a joint as described herein may be adaptable in that the force may be adjustable, at which the joint allows a rotation. For instance, if a low force is applied to the joint, the joint may be adjusted not to move until a defined threshold value is reached. If a force above the defined threshold value is applied to a joint according to embodiments described herein (such as a force exerted by the movement of a lever), the joint may allow for a rotation of the parts being connected via the joint (such as the levers shown in the examples of the drawings). [0042] In some embodiments, the joints as described herein may include a bearing, which allows the parts being connected by the joint to move (rotate). For instance, the joint may include a bush bearing, a pin being movable in a bore, some sort of thread, or the like, or may just be made from materials suitable for allowing the rotational movement between two parts described above. According to some embodiments, a first part of the joint may be provided by one of the components being connected by the joint (such as a bore in a lever) and a second part of the joint may be provided by the other of the components connected by the joint (such as a pin being provided by the connecting device). In some embodiments, the joint may include further parts for securing the position of the respective parts, such as nuts, disks or the like, for avoiding a translational movement of the components connected via the joint.

[0043] According to some embodiments, the first lever 110 of the clamp device 100 may be connected to the first connecting device 130 by an intermediate piece 135, which can also be seen in Figs. 3a and 3c. The intermediate piece may be connected to the first lever by a first intermediate joint and to the first connecting device 130 by a second intermediate joint. According to some embodiments, the intermediate piece allows for an enlarged movement range and a flexible movement of the clamp device. In some embodiments, the intermediate piece allows for a more flexible movement of the lever which does not provide the clamping portion.

[0044] Fig. 3d shows the clamp arrangement 300 according to embodiments described herein in a fourth position, which may also be described as an open position. In the open position, the claim device 100 has released the substrate in the substrate carrier, in particular, by moving the substrate clamping surface 122 from a substantially vertical direction to an approximately horizontal position. Compared to the third position of Fig. 3c, the clamp device 100 is now opened by a further translational movement of a part of the clamp tool 200, namely the second connecting device 250.

[0045] In one embodiment, the fourth position shows the maximum of the possible movement of the levers 110, 120, 230, and 240, and in some embodiment, the second connecting device 250. For instance, the levers may be movable between two angular positions, e.g. the closed position shown in Fig. 3a and 3b, in which the levers are substantially vertically arranged, and an open position shown in Fig. 3d, in which the levers have the maximum displacement and are arranged almost horizontally. In one embodiment, the maximum displacement of the levers may be defined by the arrangement of the joints to each other and the geometrical design of the levers. In the example shown in Fig. 3d, the two angular positions (e.g. the two positions between zero displacement and maximum displacement of the levers, or between the open and the fastened position of the clamp device) may typically differ from each other by about 50° to about 90°, more typically about 60° and about 85°, and even more typically by about 70° to about 80°. [0046] According to some embodiments, the clamp device may include a bar for restricting the rotational movement of the first and/or the second lever. For instance, the clamp device may have bars for limiting the angular position of the first and/or second lever. In one example, the geometry of a lever of the clamp device provides a restricting bar, which prevents, e.g., that parts of the clamp device and parts of the clamp tool collide during operation, e.g. in the fourth position as exemplarily shown in Fig. 3d. In the embodiment shown in Fig. 3d, it can be seen that the geometry of the first lever 110 and the first connecting device 130 are adapted so that the movement of the levers of the clamp device is limited. In another example, the angular position of the levers in the first position of the clamp device (as for instance shown in Fig. 3b) may be limited by the clamping portion touching and fixing the substrate in a substrate carrier, or may be limited by the arrangement of the joints with respect to each other. For instance, the geometry of the first lever of the clamp device limiting the movement of the first lever by colliding with the first connecting device at some point may prevent a movement of the second lever by the first common joint between the first lever and the second lever. Also in the first position, the geometry of the clamp device may restrict the movement by not allowing a further displacement of the levers, e.g. by providing a block or an arrester.

[0047] In some embodiments, the clamp device may substantially be moved between two angular positions, namely two stable operating points, such as dead points. The dead points may be described as being a dead point in one direction. For instance, a dead point only allows a movement in one direction for leaving the dead point, in particular the one direction, from which the dead point can be reached. In one example, the dead point of a lever can be reached by a rotational movement of the lever and can only be left by a rotational movement in the opposite direction.

[0048] As can be seen in the embodiment shown in Fig. 3d, the contact portion 116 of the first lever 110 and the contact portion 246 of the fourth lever 240 as well as the contact portion 126 of the second lever 120 and the contact portion 236 of the third lever 230 still hold contact, in particular irrespective of the opened position of the clamp arrangement 300. In particular, the contact portions may be designed so as to hold functional contact at least between (and including) the two angular positions of the clamp arrangement, namely the open position and the fastened position. [0049] With a clamp device, a clamp tool and/or a clamp arrangement according to embodiments described herein, it is possible to provide a clamp tool, which is not only able to open the clamp device and release the substrate from the substrate carrier, but also to close or fasten the clamp device for fastening and fixing the substrate to the substrate carrier. In particular, opening and fastening is made possible by the functional contact between the clamp device and the clamp tool. According to some embodiments, the functional contact may be adapted to hold the two parts together (such as the clamp device and the clamp tool), irrespective of the rotational position of the parts (such as the rotational position of the levers of the clamp device and the clamp tool). In one embodiment, the functional contact between the clamp device and the clamp tool may be released by translationally moving the clamp tool, especially in a substantially vertical direction, in a direction substantially perpendicular to the translational movement opening and/or fastening the clamp device, or in a direction substantially parallel to the substrate.

[0050] According to some embodiments, the clamp tool may be held in contact with the clamp device after opening the clamp device and after the clamp device has released the substrate to be processed. In some embodiments, the clamp tool is held in functional contact with the clamp device until the clamp device is fastened for holding another or the same substrate again. The clamp tool according to embodiments described herein may also be used for fastening the clamp device, e.g. by the inverse movement of the sequence shown in Figs. 3a to 3d, i.e. a sequence of Figs. 3d to 3a. After fastening the clamp device with the clamp tool, the functional contact between the clamp tool and the clamp device may be released by a translational movement of the clamp tool in the vertical direction, e.g. in opposite direction to direction 280 shown in Fig. 3a.

[0051] According to other embodiments, which are not shown in the drawings, the clamp tool may be moved into and removed from the functional contact with the clamp device after opening of the clamp device, e.g. by a translational movement of the clamp tool in a direction substantially perpendicular to the movement shown in Fig. 3a by arrow 280, i.e. by a movement into or out of the plane of the drawing.

[0052] Fig. 3e shows a three-dimensional drawing of the clamp arrangement 300 in the fourth position as shown in Fig. 3d. The opened clamp arrangement includes the clamp device 100 and the clamp tool 200 as exemplarily described above. In the shown embodiment of a clamp arrangement 300, the contact portions 115, 125, 235, and 245 can be seen in detail. In particular, the second lever 120 of the clamp device 100 may include a receiving portion

125 as a contact portion. The third lever 230 of the clamp tool 200 may include an engaging portion 235 or engagement portion as a contact portion. As can be seen in the example of Fig. 3e, the engaging portion 235 or the engagement portion is designed as a sort of bar, which fits in the receiving portion 125 of the first lever 110 of the clamp device. The receiving portion 115 of the first lever 110 of the clamp device 100 is adapted for receiving the engagement portion 235 of the clamp tool 230, namely by providing a portion fitting to the shape of the engaging portion of the clamp tool. In the embodiment exemplarily shown in Fig. 3e, the engaging portion 235 of the clamp tool is shaped like a substantially round bar, e.g. in a cylinder like shape, and the receiving portion 125 of the clamp device 100 includes a round recess for receiving the round bar. According to other embodiments, the shape of the receiving portion may differ from the round shape and may have, for instance, a rectangular shape, a triangular shape or any suitable shape. According to embodiments described herein, the receiving portion is adapted to the shape of the engagement portion.

[0053] According to some embodiments, the engagement portion may have an opening at one side being especially a side opposite to the side, in which the force of the translational movement is effective, when the clamp arrangement is in the fourth, or opened, position. As can be seen in the embodiments shown in Fig. 3a and 3b, the opening of the receiving portion may be in a vertical direction, i.e. the receiving portion being opened in the upward or downward direction, when the clamp arrangement is in the first or second position as described above.

[0054] Although the receiving portion and the engaging portion are described in detail with respect to the second lever and the third lever, the first lever of the clamp device and the fourth lever of the clamp tool may also be equipped with a receiving portion and an engagement portion as described above. In the example of Fig. 3e, the fourth lever 240 of the clamp tool 200 is equipped with a receiving portion 245 and the first lever 110 of the clamp device 100 is equipped with an engagement portion 115. In the embodiment shown in Fig. 3e, each of the clamp tool and the clamp device includes a receiving portion and an engaging portion.

[0055] According to some embodiments, the clamp device may be fixable to a substrate carrier, especially a substrate carrier for a substrate to be processed in a vacuum process. As can exemplarily be seen in Fig. 3e, the clamp device may provide a fixation component 180, which may typically include means for attaching or fixing the clamp device to a substrate carrier, such as bores, receptions, pins, threaded bores, screws and the like. [0056] Fig. 4 shows an embodiment of a clamp device 400. The clamp device 400 provides a first lever 410 and a second lever 420. Typically, the second lever may include a clamping portion 421 clamping a substrate 480. In the embodiment shown in Fig. 4, the first lever 410 includes a contact portion 415 and the second lever 420 includes a contact portion 425. The contact portions 415 and 425 may be made from a magnetic material allowing a clamp tool to keep functional contact to the clamp device 400 during opening and/or fastening of the clamp device 400. The corresponding clamp tool may provide contact portions for being in functional contact with the contact portions of the clamp device 400, e.g. by providing a magnetic material of adverse polarity. According to some embodiments, the magnetic contact portions are adapted so that the magnetic force provided between the clamp tool and the clamp device are sufficient for keeping the clamp tool and the clamp device in contact during operation, i.e. during opening and/ or fastening of the clamp device. In one embodiment, the magnetic materials are chosen dependent on the weight of the clamp device and the clamp tool. [0057] According to some embodiments, the contact portions of the clamp device and the clamp tool may be different from the contact portions shown in Figs. 3a to 3e or Fig. 4. For instance, the contact portions according to embodiments may include adhesive contact portions allowing for providing functional contact for opening and fastening the clamp tool (such as by exerting a detachable connection being strong enough for keeping contact between the clamp tool and the clamp device during opening and/or fastening of the clamp device). In other embodiments the contact portions may include a hook-and-loop-fastener, a slotted shutter, a gripping device (e.g. a gripping device which partly encompassed the corresponding contact portion), a pin for gripping into a correspondingly formed contact portion and the like. [0058] Fig. 5 shows a clamp arrangement 300 as described in detail with respect to Figs. 3a to 3e. The clamp arrangement 300 including a clamp device 100 and a clamp tool 200 is applied in a substrate carrier 500. In particular, the connecting portion 130 of the clamp device 100 is attached to the substrate carrier 500, in particular substantially unmovably attached to the substrate carrier 500. The connecting device 250 of the clamp tool is freely or at least translationally movable, e.g. in the direction pointing away from the substrate, such as in a direction to the right in Fig. 5. According to some embodiments, the second connecting device 250 of the clamp tool is a part of the clamp tool, which is translationally movable and which may cause a rotational movement of the levers of the clamp tool, and also a rotational movement of the clamp device, when the clamp tool and the clamp device are in functional contact with each other.

[0059] In the position shown in Fig. 5, which may also be denoted as a second position, when considering Fig. 3b, the clamp device 100 clamps a substrate 510 with the clamping portion 121.

[0060] As can exemplarily be seen in the Figs. 1 to 5, the clamp tool may be designed in a similar or same manner as the clamp device, or using a clamp tool, which has substantially the same function as the clamp device for opening and fastening the clamp device. In particular, the clamp device and the clamp tool, or the clamp arrangement may be designed such that angles of the clamp device and the clamp tool may work against each other. As a result, the positions at 0° or 180° can be reached. For different angles, the clamp device may also be turned around by 180°. Using similar or the same design for the clamp device and the clamp tool may spare production costs for the clamp device and the clamp tool. [0061] According to some embodiments, the substrate may be a glass substrate, but may also be made from a metal, a plastic material, and any other material suitable for being clamped by a clamp device. (According to typical embodiments, which can be combined with other embodiments described herein, the substrate thickness can be from 0.1 to 1.8 mm and the camp device (and especially the clamping portion and the clamping surface) can be adapted for such substrate thicknesses. However, it is particularly beneficial when the substrate thickness is about 0.9 mm or below, such as 0.5 mm or 0.3 mm and the clamp device is adapted for such substrate thicknesses.

[0062] In some embodiments, the clamp device, the clamp tool and the clamp arrangement may be adapted for large area substrates. According to some embodiments, large area substrates may have a size of at least 0.174 m². Typically the size can be about 1.4 m to about 8 m 2 , more typically about 2 m 2 to about 9 m² or even up to 12 m². Typically, the rectangular substrates, for which the mask structures, apparatuses, and methods according to embodiments described herein are provided, are large area substrates as described herein. For instance, a large area substrate can be GEN 5, which corresponds to about 1.4 m substrates (1.1 m x 1.3 m), GEN 7.5, which corresponds to about 4.29 m substrates (1.95 m x 2.2 m), GEN 8.5, which corresponds to about 5.7m² substrates (2.2 m x 2.5 m), or even GEN 10, which corresponds to about 8.7 m substrates (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented.

[0063] Fig. 6 shows an embodiment of a clamp device 600 according to embodiments described herein. The clamp arrangement 600 typically includes a clamp device 100 and a clamp tool 610. The clamp device 100 may be a clamp device as described above with respect to Figs. 1 to 5. According to some embodiments, the clamp device 100 may include only one contact portion 126 being present at one of the levers of the clamp device 100. In the example shown in Fig. 6, only the second lever is equipped with a contact portion 126. However, it should be understood that also the first lever may only be provided with a contact portion for a clamp tool according to embodiments described herein. The clamp tool 610 exemplarily shown in Fig. 6 includes a third lever 630 being rotatably mounted by a third joint 635, especially rotatably mounted to a second connecting device 650 via the third joint 635. According to some embodiments, the second connecting device 650 is translationally movable, in particular in one direction when the clamp tool is in engagement with the clamp device. In some embodiments, the clamp tool or the second connecting device may be movable in any direction when the clamp tool is not yet in functional contact with the clamp device. Compared to other embodiments of a clamp tool described above, the clamp tool 610 has only one lever being pivotably supported, e.g. in the second connecting device 650. The third lever 630 of the clamp tool 610 includes a contact portion 636. The contact portion 126 of the clamp device 100 and the contact portion 636 of the third lever 630 of the clamp tool 610 are adapted to be brought into functional contact with the camp device according to embodiments described herein. In the embodiment shown in Fig. 6, the clamp tool 600 and the clamp device 100 are in functional contact with each other. The clamp tool 600 and the clamp device shown in Fig. 6 are in a third position corresponding to the third position described with respect to Fig. 3c. According to embodiments described herein, a translational movement of a part of the clamp tool 600, such as the third joint 635 or the connecting device 650 of the clamp tool 610, in the direction of arrow 660 (e.g. in a direction perpendicular to the substrate surface), may cause a rotational movement of the third lever 630 of the clamp tool 610, when the third lever 630 is in functional contact with the clamp device 100.

[0064] As can be seen in the embodiment shown in Fig. 6, the translational movement of the connecting device 650 of the clamp tool 610 may cause the third lever 630 of the clamp tool and the second lever 120 of the clamp device 100 to rotate, when the third lever 630 and the second lever 120 are in functional contact with each other. The third joint 635 of the clamp tool 610 may be adapted so as to cause a rotation of the third lever 630 about the joint dependent on the counter force exerted by the functional contact with the clamp device. [0065] As mentioned above, the clamp tool with only one lever may have a contact portion for providing functional contact to a clamp device according to embodiments described herein. The contact portion may for instance include an engagement portion (in particular for engaging with a respective part of a clamp device) a receiving portion (in particular for receiving a respective part of the clamp device), a magnetic portion (in particular for providing a magnetic force between the clamp tool and the clamp device), an adhesive portion (in particular for providing an adhesive force between the clamp tool and the clamp device), and the like. Generally, the term "functional contact" in this context should be understood as described above.

[0066] According to some embodiments, the clamp tool with only one lever may include further features described above with respect to the clamp tool shown in Figs. 2 to 5. For instance, the clamp tool with only one lever may have the dimensions of the levers described above, may include materials as referred to herein, may have a geometry as described above and the like.

[0067] In particular, the clamp tool with only one lever may be able to open and fasten the clamp device, especially with a translational movement of at least a part of the clamp tool, such as the third joint or the second connecting device of the clamp tool. According to some embodiments, the clamp tool with only one lever is able to open and fasten the clamp device due to the contact portion providing functional contact between the clamp tool and the clamp device. The contact portion of the clamp tool lever may allow for holding contact to the clamp device during movement of the clamp tool, such as during movement in the substantially horizontal direction away and towards the substrate to be held be the clamp device.

[0068] Generally, the clamp device and the clamp tool, or the clamp arrangement according to embodiments described herein may be adapted for a vacuum process or a vacuum process apparatus, or for being connected to a substrate carrier for a substrate to be processed in a vacuum process apparatus. For instance, the material may be chosen taking into account parameters relevant for vacuum processes, such as outgassing rates, wear, temperature resistance, and the like. According to some embodiments, which may be combined with other embodiments described herein, the clamp device, the clamp tool and/or the clamp arrangement as described herein may be used for a carrier utilized for PVD deposition processes, CVD deposition process, substrate structuring edging, heating (e.g. annealing) or any kind of substrate processing. Embodiments of clamp device, the clamp tool and/or the clamp arrangement as described herein and methods for opening and/or fastening a clamp device are particularly useful for non- stationary, i.e. continuous substrate processing of the vertically oriented large area glass substrates. It should be understood that the clamp device, the clamp tool and/or the clamp arrangement may also be used in a non-stationary process. [0069] Fig. 7 shows a flow chart of a method 700 for opening and/or fastening a clamp device according to embodiments described herein. According to some embodiments, the clamp device may be a clamp device as described above including the above described features and functions, such as the clamp device being adapted for clamping glass substrates, being adapted for substrates of the above described thickness and/or size, or having rotatably connected levers, a clamping surface and the like. In particular, the clamp device is adapted for clamping a substrate to be processed in a substrate carrier, as exemplarily shown in Fig. 4 or Fig. 5.

[0070] In block 710, the method 700 includes bringing a clamp tool and a clamp device into functional contact, especially by engaging a clamp tool with a clamp device. According to some embodiments, the term "functional contact" should be understood as described above and may be provided in different ways. For instance, the functional contact may be provided by magnetic or adhesive forces acting between the clamp tool and the clamp device. In one embodiment, the clamp tool may be engaged with the clamp device at a first part of the clamp tool (the first part being e.g. a third lever 230 as described above), while at a second part, the clamp tool receives the clamp device (the second part being e.g. a fourth lever 240 as described above), or the clamp device engages with the clamp tool at the second part of the clamp tool.

[0071] In one embodiment, providing a functional contact between a clamp tool and a clamp device may include - especially if the clamp tool and the clamp device are designed as described in the examples above - engaging a fourth lever of the clamp tool with a first lever of the clamp device and engaging a third lever of the clamp tool with a second lever of the clamp device. [0072] In block 720, the method 700 includes translationally moving at least a part of the clamp tool. In one embodiment, when a clamp tool according to the above described embodiments is used, the part of the clamp tool being translationally moved, may be the second connecting device, to which the third lever and the fourth lever are rotatably connected. According to some embodiments, the translational movement of a part of the clamp tool may cause a rotation of other parts of the clamp tool, such as a rotation of at least one lever of the clamp tool. For instance, the clamp tool may be designed with a second connecting device and a lever being rotatably connected in such a way that the translational movement of the second connecting part causes a rotational movement of at least one lever of the clamp tool, especially when the at least one lever of the clamp tool is held or connected to a clamp device, which offers resistance to the movement of the respective part of the clamp tool.

[0073] In block 730, the clamp device is opened or fastened by the translational movement of the clamp tool causing a rotational movement of the clamp device, or at least of parts of the clamp device, such as levers of the clamp device. In particular, the translational movement of a part of the clamp tool does not only cause a rotational movement of the at least one lever of the clamp tool, but also a rotational movement of parts of the clamp device, which stand in functional contact with the clamp tool, such as one or more levers of the clamp device.

[0074] With the clamp device, the clamp tool, and the clamp arrangement according to embodiments described herein, it is possible to use the same component or any other fixture which has the same function as the clamp device for opening and fastening the clamp device. In particular, the clamp device, the clamp tool and the clamp arrangement according to embodiments described herein allow that the angles work against each other, resulting in two positions at 0° or 180°. Further, with embodiments described herein, the rotational movement encompassing one or more different angles for opening the clamp device may be converted in a straight/linear movement of 0° or 180° to open and close the clamp device.

[0075] By using a translational movement for opening and/or fastening the clamp device, the process costs decrease with the decreasing process cycle time. Further, the translational movement for opening and/or fastening the clamp device helps reducing the complexity of the movement of the clamp arrangement and may be implemented in an easier way as compared to an arrangement for opening the clamp device using a rotational movement. According to some embodiments, the moving mechanism for a translational movement compared to a moving mechanism for a rotational movement may be easier to handle and easier to install in existing process systems.

[0076] While the foregoing is directed to embodiments of the invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. Clamp device (100) for clamping a substrate (480; 510) to be processed in a substrate carrier (500) for a processing apparatus, comprising: a first lever (110) and a second lever (120), wherein the first lever (110) is movably supported in a first joint (115), the second lever (120) is movably supported in a second joint (125), and wherein the first lever (110) and the second lever (120) are movably connected to each other by a first common joint (140); wherein the second lever (120) comprises a clamping portion (121) adapted for being pressed against the substrate (480; 510) to be processed; wherein at least one of the first lever (110) and the second lever (120) comprises a contact portion (116; 126) for providing functional contact to a clamp tool (200; 610), in particular a clamp tool according to any of claims 5 to 9.

2. The clamp device according to claim 1, wherein a rotation of the first lever (110) and the second lever (120) opens or fastens the clamp device (100).

3. The clamp device according to any of the preceding claims, further comprising a first connecting device (130) to which the first lever (110) is connected via the first joint (115) and the second lever (120) is connected via the second joint (125).

4. The clamping device according to any of the preceding claims, wherein the contact portions (116; 126) of the first lever (110) and the second lever (120) allow for engagement of the clamp device (100) with a clamp tool (200; 610) by a translational movement of the clamp tool (200; 610) and/or wherein the contact portion (116; 126) of one of the first lever (110) and the second lever (126) comprises a receiving portion for receiving the clamp tool (200; 610), and wherein the other one of the first lever (110) and the second lever (120) comprises an engagement portion for engaging with the clamp tool (200; 610).

5. A clamp tool (200; 610) for a clamp device (100) for clamping a substrate (480; 510) to be processed in a substrate carrier (500) for a processing apparatus, comprising: at least one of a third lever (230; 630) being movably supported by a third joint (235) and a fourth lever (240) being movably supported by a fourth joint (245); wherein the at least one of the third lever (230; 630) and the fourth lever (240) comprises a contact portion (236; 246) for providing functional contact to a clamp device (100), in particular a clamp device (100) according to any of claims 1 to 4.

6. The clamp tool according to claim 5, wherein the clamp tool (200; 610) comprises a translationally movable second connecting device (250) to which at least one of the third lever (230; 630) and the fourth lever (240) is connected via the third joint (235) and the fourth joint (245), respectively, wherein the clamp tool in particular comprises a third lever (230; 630) and a fourth lever (240) and wherein the third lever (230; 630) and the fourth lever (240) are movably connected to each other by a second common joint (260).

7. The clamp device according to any of claims 5 to 6, wherein the clamp tool (200; 610) is a tool for opening and fastening the clamp device (100), in particular for opening and fastening the clamp device (100) by a translational movement of the third joint (235), the second connecting device (250; 650), and/or the second common joint (260).

8. The clamp tool according to any of claims 5 to 7, wherein a translational movement of the third joint, the fourth joint or the second connecting device (250) of the clamp tool (200; 610) causes a rotational movement of at least one of the third lever (230; 630) and the fourth lever (240).

9. The clamp tool according to any of claims 5 to 8, wherein the contact portion (236; 246) of at least one of the third lever (230; 630) and the fourth lever (240) allows for engagement of the clamp device (100) with the clamp tool (200; 610) by a translational movement of the clamp tool (200; 610) and/ or wherein the contact portion (236; 246) of one of the third lever (230; 630) and the fourth lever (240) comprises a receiving portion for receiving a clamp device (100), and wherein the other one of the third lever and the fourth lever comprises an engagement portion for engaging with the clamp tool.

10. A clamp arrangement (300; 600) for clamping and releasing a substrate (480; 510) in a substrate carrier (500) for a processing apparatus, comprising: a clamp device (100) comprising a first lever (110) and a second lever (120), wherein a rotation of the first lever (110) and the second lever (120) opens or fastens the clamp device (100); and a clamp tool (200; 610) comprising at least one of a third lever (230; 630) and a fourth lever (240), wherein the clamp device (100) and the clamp tool (200; 610) are adapted to be in functional contact with each other; wherein a translational movement of at least a part of the clamp tool (200; 610) causes a rotational movement of the first lever (110) and the second lever (120) of the clamp device (100), when the clamp device (100) and the clamp tool (200; 610) are in functional contact with each other, in particular wherein the translational movement of at least a part of the clamp tool (200; 610) opens or fastens the clamp device (100).

11. The clamp arrangement according to claim 10, wherein the clamp tool comprises a second connecting device (250), to which at least one of the third lever (230; 630) and the fourth lever (240) are movably connected, wherein the clamp tool in particular comprises both the third lever (230; 630) and the fourth lever (240) , and wherein the part of the clamp tool (200; 610) being translationally moved is in particular the second connecting device (250) of the clamp tool (200; 610).

12. The clamp arrangement according to any of claims 10 to 11, wherein the clamp device (100) and the clamp tool (200; 610) are adapted to be brought into functional contact with each other by a further translational movement of the clamp tool (200; 610).

13. The clamp arrangement according to any of claims 10 to 12, wherein the clamp tool comprises the third lever (230; 630) and the fourth lever (240) and wherein the length ratio of the first lever (110) to the second lever (120) of the clamp device (100) is the same as the length ratio of the third lever (230; 630) to the fourth lever (240) of the clamp tool (200; 610).

14. Method for opening or fastening a clamp device (100) for clamping a substrate (480; 510) to be processed in a substrate carrier (500), the method comprising: bringing a clamp tool (200; 610) and a clamp device (100) into functional contact, in particular a clamp tool (200; 610) according to any of claims 5 to 9, and a clamp device (100) according to any of claims 1 to 4; translational moving at least a part of the clamp tool (200; 610); and opening or fastening the clamp device (100) by the translational movement of the clamp tool (200; 610) causing a rotational movement of at least a part of the clamp device (100).

15. Method according to claim 14, wherein providing a functional contact between a clamp tool (200; 610) to a clamp device (100) comprises at last one of engaging a fourth lever (240) of the clamp tool (200; 610) with a first lever (110) of a clamp device (100) and engaging a third lever (130) of the clamp tool (200; 610) with a second lever (120) of the clamp device (100), and/or wherein the translational movement of at least a part of the clamp tool (200; 610) causes a rotational movement of a first lever (110) and a second lever (120) of the clamp device (100).