WO2015185027A1 - Procédé et dispositif de déroulage et de dépôt d'un film mince - Google Patents

Procédé et dispositif de déroulage et de dépôt d'un film mince Download PDF

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Publication number
WO2015185027A1
WO2015185027A1 PCT/DE2015/000270 DE2015000270W WO2015185027A1 WO 2015185027 A1 WO2015185027 A1 WO 2015185027A1 DE 2015000270 W DE2015000270 W DE 2015000270W WO 2015185027 A1 WO2015185027 A1 WO 2015185027A1
Authority
WO
WIPO (PCT)
Prior art keywords
roller
film
liner
vacuum
axis
Prior art date
Application number
PCT/DE2015/000270
Other languages
German (de)
English (en)
Inventor
Thorben Hoffstadt
Jürgen MAAS
Dominik TEPEL
Original Assignee
Hochschule Ostwestfalen-Lippe
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochschule Ostwestfalen-Lippe filed Critical Hochschule Ostwestfalen-Lippe
Priority to DE112015002690.8T priority Critical patent/DE112015002690A5/de
Publication of WO2015185027A1 publication Critical patent/WO2015185027A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Definitions

  • the invention relates to a method and an apparatus for unwinding and depositing a thin film and further the production of a film stack, in particular for the
  • Electromechanical transducers are in manifold
  • films of electroactive polymers in particular DEAP films
  • films of dielectrically active polymers are used for the production of such transducers
  • WO 2012/120009 A1 explains the structure of a
  • Manufacturing process sees u.a. that an electroactive layer is printed with a plurality of electrodes.
  • DEAP material are extremely thin, material thicknesses of a few ⁇ have only such films are from the
  • the film is often held for their protection by one or two liners. These liners have to be used for making a electromechanical transducer are removed, with no mechanical stresses and deformations of the film may be supplied. Against this background, the invention makes it to
  • Task to provide a method and an apparatus available by which a thin film can be unrolled and stored tension-free, wrinkle-free and free of air inclusions. Placed in layers, the method and the device allow the automated production of multilayer electromechanical transducers.
  • Vacuum roller is wound, the surface of the
  • Vacuum roller is acted upon in sections with a negative pressure, and in which in a rotary and synchronized translational relative movement between the occupied with the film vacuum roller and an underlying table, the film is deposited on the table, wherein the surface of the vacuum roller is acted upon in sections with an overpressure.
  • the table is a vacuum table, so that the deposited on the table foil from a negative pressure of the
  • Vacuum table is fixed Often, the very thin films of a dielectrically active material are for their protection between two liners
  • a first liner can easily be first detached from the film and wound onto a first stationary-axis liner roll, since the film continues to be prevented from deformation or introduction by the second liner, which is significantly stiffer than the film mechanical stresses is protected.
  • the second liner is only with a fixing of the film with its liner-free side on one with negative pressure
  • Section of the vacuum roller is kept tension-free.
  • Arresting the liner with the foil makes the first liner harder to peel off and the second liner is easier to peel off. After that, the second liner can be more easily separated from the film fixed on the vacuum roll.
  • the foil When the foil is placed on the table, it is arranged with a variety of in a regular matrix
  • Electrodes preferably each one Have contact flag.
  • the device required for this purpose can be moved or pivoted on the deposited film, alternatively, the table can be pivoted or moved with the film under such a device.
  • the film is cut to length after depositing on the table or, alternatively, that after a first layer of the film is placed on the table and provided with electrodes, by reversing the relative movement, a second layer is folded over the first and hereafter
  • Electrodes is provided. Such folding can also be done several times.
  • electromechanical transducer Since the height of such an electromechanical transducer is a few centimeters regular, it is further provided that in accordance with the increasing height of the layers on the table, the height of the vacuum roller or the vacuum roller and the second liner roller is tracked to an optimum distance between the uppermost layer of a film and to comply with the vacuum roll. A shift of the films on each other is difficult to get, as these films held by Van der Waals forces as it were form a laminate.
  • a storage device is arranged horizontally and vertically above a table movable and that in the storage device a sectionally acted upon by a vacuum vacuum roller is provided for winding the film from the roll, for depositing the film on the Table sections can be acted upon with an overpressure.
  • the machine frame is not very critical because it only experiences a low weight load. It should, however
  • prestressed nut unit rotated by a stepper motor.
  • a linear motor is expediently used for the vertical adjustment, in which very small travel paths are necessary.
  • At least one cutting device Since only one, very thin film is cut, such
  • Cutting device can be formed by a hot wire, which cuts the film vertically over its entire width.
  • Alternatives include laser cutting
  • Plastic coating preferably on a Teflon basis is formed. Such a configuration allows sections
  • Openings are provided that the end plates are bordered by fixed caps that the caps
  • Liners taken film is withdrawn around a first guide roller and guided around a second guide roller, wherein a first liner is wound on a first liner roller.
  • the liner with the film is preferably the first liner of
  • a film taken in liners opposite the machine frame is pulled down around a first guide roller and is guided around a second guide roller upwards, wherein a first liner is wound on a first liner roller whose axis between the axis of Roller and the axis of the second deflection roller is arranged above the pulleys.
  • Peeling off the first liner is not critical as the film continues to be held by the second liner.
  • the preferred embodiment allows the removal of the lower liner of a wound roll in which this as it is returned to the role and the film with the other liner to the machine frame.
  • Machine frame is guided to the bearing device, that in the bearing device, a fourth deflection roller is provided, the axis in the feed direction behind the axis of the
  • Vacuum roller is arranged that the film with the
  • the remaining liner is guided deflected at the fourth deflection roller to a fifth deflection roller, whose axis is arranged above the vacuum roller, that with the winding of the film on the vacuum roller at the fifth deflection roller, the second liner is released from the film and deflected over a sixth deflection roller on one second liner roll is wound, wherein the axis of the sixth deflection roller between the fifth guide roller and the second liner roller is arranged.
  • the axis of rotation of the fifth deflection roller can be positioned above the axis of rotation of the vacuum roller such that the film and the remaining liner is enclosed directly between the vacuum roller and the fifth deflection roller. An exact separation of the film from the remaining liner can be done so and the very elastic film is thus permanently fixed to the vacuum roller.
  • At least one guide roller is height adjustable. It is initially intended to the second pulley, so that the first liner can be deducted in definable angles of the composite of the film and the second liner.
  • the third deflection roller is expediently also height-adjustable, so that the bearing device of the composite of film and remaining liner can be supplied at predeterminable angles. Also, the pulleys inside the bearing device should
  • this layer is filled with electrodes in a regular matrix
  • the table can be moved under a device for applying the electrodes or can such a device for a
  • Applying the electrodes to the machine frame can be arranged to be movable or pivotable.
  • Fig. 1 schematically a cross section through a
  • Fig. 8 in a side view, a second
  • Fig. 9 an enlarged section through the
  • FIG. 11 an end view of the vacuum roller according to FIG.
  • Fig. 10 without cap and Fig. 12 an interior view of a cap.
  • Figure 1 shows an idealized and in particular
  • This section has a plurality of layers of a film 2 of a particular dielectrically active polymer, each of which is provided with an electrode 3 with respect to the thickness dimensions not true to scale section through an electromechanical transducer.
  • the top view according to FIG. 2 shows that each electrode 3 has a lateral
  • Contact lug 4 has, according to the figure 1 on opposite sides 5,6 from layer to layer
  • Contact lugs 4 is a polymer bonding strip 7 gem.
  • Fig. 3 is provided, which has two spaced electrodes 8,9.
  • further contact flags can still be provided.
  • FIG. 4 shows in a side view a first device 11 for unwinding and depositing a thin film from a roll 12 with a stationary axis 13.
  • a very thin film 14 is made of, in particular, a die-active polymer for the
  • the peel angle of the liner depends u. a. from his arrest with the slide 14. In practical
  • the film 14 with the remaining liner 16 is guided to a further not shown, on a machine frame over a table 21, in particular a vacuum table, movable bearing device 20.
  • the film 14 is deflected with remaining liner 16 to a further guide roller 22.
  • the separation of the film 14 from the remaining liner 16 by the liner 16 is deflected over a further deflection roller 23 is wound on a second liner roller 24, while the film 14 is guided to a lower vacuum roller 25 and fixed thereto.
  • the surface of the vacuum roller 25 sections a negative pressure.
  • the surface of the vacuum roller 25 is partially applied with an overpressure.
  • the film 14 tension and wrinkle-free and free of air inclusions on the table 21 are stored.
  • the second liner 16 is removed from the film 14 and wound on the second liner roll 24.
  • the application of the electrodes takes place in a conventional manner
  • the deposited on the table 21 foil 14 may have been cut to length, including the table 21 with a corresponding
  • Electrodes are cut out, preferably by means of an over the entire length or width of the film coating reaching blade of an ultrasonic knife, and the individual stacks are contacted on the exposed, lateral contact lugs of the electrodes. After encapsulation, an electromechanical transducer has been obtained.
  • FIG. 8 shows a machine frame 30 on which a bearing device 31 explained in more detail in FIG.
  • Cross table is arranged horizontally and vertically above a table 32 movable.
  • a ball screw 33 is provided with preloaded nut unit, which is driven by a motor 34, in particular by a stepper motor.
  • a further motor 35 is provided, preferably a
  • a film 38 placed in liners 36, 37 is withdrawn opposite to the machine frame 30 from a roller 39 with stationary axle 40 via a first deflection roller 41.
  • a second deflection roller 42 in front of the machine frame 30 the separation of the first liner 36, which is wound on a first liner roller 43 takes place.
  • Machine frame 30 is guided. To optionally the withdrawal angle between the first liner 36 and the
  • a further height-adjustable, third deflection roller 47 is provided in an upper region of the bearing device 31, via which the film 38 with the remaining liner 37 well defined towards the
  • FIG. 9 shows within the storage device 31, a fourth guide roller 48, via which the film 38 is guided with the remaining liner 37.
  • height-adjustable axis 49 of the fourth guide roller 48 is arranged in the feed direction according to arrow 50 of the film 38 with remaining liner 37 behind the axis 51 of a vacuum roller 52.
  • a fifth deflection roller 55 is provided above the vacuum roller 52.
  • the axis 56 of the fifth guide roller 55 and the axis 51 of the vacuum roller 52 lie in one plane.
  • the axis 59 of the sixth guide roller 57 is disposed between the fifth guide roller 55 and the second liner roller 58 and in indicated slots 60 of
  • Storage device 31 height adjustable. Based on these
  • Measure is the deflection angle of the second liner 37 on the fifth guide roller 55 constantly adjustable, regardless of the circumference of the wound on the second liner roller 58 role.
  • the deposited film is then cut to length by means of an indicated cutting device 62.
  • This can be knife-shaped, for example, an ultrasonic knife, alternatively by a laser or by a hot wire, which cuts the film in the vertical direction and thus in the small thickness of the film
  • a vacuum roller 64 is further explained, shown in Fig. 10 axially shortened. This has one of preferably a stepper motor in rotation
  • the end plates 68,69 are provided with openings 72, each opening in a chamber 70.
  • the end plates 68, 69 are further enclosed by fixed caps 74, 75, of which at least one has arcuate grooves 76, 77, through which openings 72 are connected.
  • gem. 12 is acted upon by a negative pressure grooving 76 with a top opening gem.
  • Fig. 11 ends after sweeping an angle of about 230 ° counterclockwise. With the counterclockwise chamber, the admission begins with an overpressure over an angle of about 53 °.
  • chambers 70 can be applied circumferentially with a negative pressure or an overpressure.
  • Axial seals can be provided in a conventional manner between the end plates 68,69 and the caps 74,75 yet. Alternatively, the end plates can also be provided with such grooves.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Physical Vapour Deposition (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)

Abstract

L'invention concerne un procédé de déroulage et de dépôt d'un film mince depuis un rouleau comportant un axe fixe, le film (14) étant enroulé sur un rouleau à vide (25), la surface du rouleau à vide (25) étant soumise par endroits à une pression négative, et, lors d'un mouvement relatif de rotation et de translation synchronisé entre le rouleau à vide (25) pourvu du film (14) et une table sous-jacente (21), le film (25), étant déposé sur la table (21), la surface du rouleau à vide (25) étant soumise par endroits à une pression négative. Le procédé est de préférence mis en œuvre au moyen d'un dispositif dans lequel un dispositif de support (31) est disposé sur un châssis de machine (30) de manière à pouvoir se déplacer horizontalement et verticalement au-dessus d'une table (32) et dans lequel il est prévu dans le dispositif de support (31) un rouleau à vide (52) qui peut être soumis à une pression négative et qui est destiné à enrouler le film (38) provenant du rouleau (39) qui peut être soumis à une surpression par endroits pour déposer le film (38) sur la table (32).
PCT/DE2015/000270 2014-06-06 2015-06-05 Procédé et dispositif de déroulage et de dépôt d'un film mince WO2015185027A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE112015002690.8T DE112015002690A5 (de) 2014-06-06 2015-06-05 Verfahren und Vorrichtung für das Abwickeln und Ablegen einer dünnen Folie

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014008165.6 2014-06-06
DE102014008165 2014-06-06

Publications (1)

Publication Number Publication Date
WO2015185027A1 true WO2015185027A1 (fr) 2015-12-10

Family

ID=53717857

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/DE2015/000270 WO2015185027A1 (fr) 2014-06-06 2015-06-05 Procédé et dispositif de déroulage et de dépôt d'un film mince
PCT/DE2015/000271 WO2015185028A2 (fr) 2014-06-06 2015-06-05 Transducteur electromecanique

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/DE2015/000271 WO2015185028A2 (fr) 2014-06-06 2015-06-05 Transducteur electromecanique

Country Status (2)

Country Link
DE (2) DE112015002680A5 (fr)
WO (2) WO2015185027A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5431384A (en) * 1994-05-10 1995-07-11 Polaroid Corporation Method and apparatus for feeding print media
EP0681918A2 (fr) * 1994-05-10 1995-11-15 Polaroid Corporation Appareil de traitement d'un support d'impression optique à sec
US6585846B1 (en) * 2000-11-22 2003-07-01 3M Innovative Properties Company Rotary converting apparatus and method for laminated products and packaging
WO2012120009A1 (fr) 2011-03-07 2012-09-13 Bayer Materialscience Ag Composite stratifié à couches électroactives

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19914411A1 (de) * 1999-03-30 2000-10-12 Bosch Gmbh Robert Piezoelektrischer Aktor
DE102008003841A1 (de) * 2008-01-10 2009-07-16 Robert Bosch Gmbh Piezoelektrisches Aktormodul und Brennstoffeinspritzventil
EP2946415A1 (fr) 2013-01-16 2015-11-25 Covestro Deutschland AG Procédé de production d'un convertisseur électromécanique multicouche

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5431384A (en) * 1994-05-10 1995-07-11 Polaroid Corporation Method and apparatus for feeding print media
EP0681918A2 (fr) * 1994-05-10 1995-11-15 Polaroid Corporation Appareil de traitement d'un support d'impression optique à sec
US6585846B1 (en) * 2000-11-22 2003-07-01 3M Innovative Properties Company Rotary converting apparatus and method for laminated products and packaging
WO2012120009A1 (fr) 2011-03-07 2012-09-13 Bayer Materialscience Ag Composite stratifié à couches électroactives

Also Published As

Publication number Publication date
DE112015002690A5 (de) 2017-02-23
WO2015185028A2 (fr) 2015-12-10
WO2015185028A3 (fr) 2016-02-04
DE112015002680A5 (de) 2017-05-11

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