WO2015178821A1 - Capteur et procédé de détection d'émission acoustique provenant d'un palier - Google Patents

Capteur et procédé de détection d'émission acoustique provenant d'un palier Download PDF

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Publication number
WO2015178821A1
WO2015178821A1 PCT/SE2015/050506 SE2015050506W WO2015178821A1 WO 2015178821 A1 WO2015178821 A1 WO 2015178821A1 SE 2015050506 W SE2015050506 W SE 2015050506W WO 2015178821 A1 WO2015178821 A1 WO 2015178821A1
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic emission
mechanical
mechanical resonators
bearing
emission sensor
Prior art date
Application number
PCT/SE2015/050506
Other languages
English (en)
Inventor
Daniel HEDMAN
Original Assignee
Aktiebolaget Skf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aktiebolaget Skf filed Critical Aktiebolaget Skf
Publication of WO2015178821A1 publication Critical patent/WO2015178821A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/52—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions
    • F16C19/527—Bearings with rolling contact, for exclusively rotary movement with devices affected by abnormal or undesired conditions related to vibration and noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/583—Details of specific parts of races
    • F16C33/586—Details of specific parts of races outside the space between the races, e.g. end faces or bore of inner ring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
    • G01H1/003—Measuring characteristics of vibrations in solids by using direct conduction to the detector of rotating machines
    • G01H1/006—Measuring characteristics of vibrations in solids by using direct conduction to the detector of rotating machines of the rotor of turbo machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00—Testing of machine parts
    • G01M13/04—Bearings
    • G01M13/045—Acoustic or vibration analysis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2233/00—Monitoring condition, e.g. temperature, load, vibration

Definitions

  • the present disclosure relates to an acoustic emission sensor for a bearing and to a method for detecting acoustic emissions in a bearing.
  • Acoustic emissions are transient elastic waves caused by a sudden change in the internal structure of a solid piece of material.
  • the development of cracks and the movement of dislocations are examples of structural changes that may generate acoustic emissions.
  • the detection and analysis of acoustic emissions provides a non-destructive way of monitoring the condition of bearings for the purpose of reducing the risk of unexpected failure due to wear and tear.
  • Acoustic emission testing is generally performed using a so-called acoustic emission sensor which converts acoustic emissions into electrical signals to be analyzed for information regarding the condition of the
  • Acoustic emission sensors are often designed for use with analog-to- digital converters which, for adequate temporal resolution, typically must operate at high sampling rates when converting high-frequency signals.
  • the real-time analysis of the resulting large amount of data may be power consuming and, consequently, problematic in situations of limited power supply, a case in point being that of a small battery-powered acoustic emission sensor integrated with a bearing.
  • Energy-efficient acoustic emission testing of bearings is therefore an important area of technological
  • a general objective of the present disclosure is to provide an improved or alternative acoustic emission sensor for a bearing and a related method.
  • An aspect of particular interest is the level of power consumption of the acoustic emission sensor.
  • an acoustic emission sensor configured to receive an acoustic emission signal from a bearing.
  • the acoustic emission sensor comprises two or more mechanical resonators, which have mutually different resonance frequencies, and a respective output terminal electrically connected to each of the mechanical resonators.
  • Each of the mechanical resonators is configured to generate an electrical signal to transmit the electrical signal to the respective output terminal if a frequency range of the acoustic emission signal comprises the resonance frequency of the mechanical resonator.
  • a mechanical resonator typically has several resonance frequencies. Unless otherwise stated, the "resonance frequency" of a mechanical resonator here refers to the lowest resonance frequency of that mechanical resonator. It should also be noted that a resonance frequency is in reality a narrow range of frequencies, the range being substantially narrower than the range that separates two adjacent resonance frequencies of the same mechanical resonator.
  • the acoustic emission sensor described above can have a simple construction and can be manufactured using conventional techniques.
  • the acoustic emission sensor may be designed so that the mechanical resonators are individually tuned to different overlapping frequency bands and together act as an array of bandpass filters. This may reduce the need for high-rate sampling of the acoustic emission sensor's output signal and subsequent computerized signal processing. In fact, the output signal may often be adequately analyzed using simple analog electronics, the result being an energy-efficient way of measuring and analyzing acoustic emissions in a bearing.
  • the mechanical resonators can be piezoelectric. Piezoelectric mechanical resonators tend to be energy efficient and to have linear response characteristics, something which is particularly suitable for the present invention. Moreover, the provision of mechanical resonators having suitable resonance frequencies, shapes and sizes may be facilitated by using piezoelectric materials.
  • the mechanical resonators can be beams, for example rectangular beams.
  • the mechanical resonators may be formed in pairs, each pair being formed by a single beam having a central portion attached to a support.
  • the mechanical resonators of each pair protrude in opposite directions from the support.
  • An acoustic emission sensor designed in this way may be easy to manufacture.
  • Each of the mechanical resonators may be provided with an electrode configured to receive the electrical signal from the mechanical resonator and transmit the electrical signal to the output terminal.
  • the electrode may be arranged on an end of the mechanical resonator which is distal to the support. Electrodes arranged in this way may help reduce the electrical signals resulting from the mechanical resonators resonating at their second-to-lowest resonance frequencies. The strength of such signals may be particularly effectively reduced for certain electrode lengths.
  • the ratio of the length of an electrode to the length of the mechanical resonator on which the electrode is arranged may for example be from about 0.70 to about 0.85, alternatively from about 0.75 to about 0.80. According to one embodiment, the ratio of the length of the electrode to the length of the mechanical resonator on which the electrode is arranged is about 0.77.
  • the mechanical resonators may be enclosed by a housing.
  • a fluid may be arranged inside the housing.
  • the fluid can be a gas, for example air.
  • the fluid may provide for viscous damping of the mechanical resonators so that they do not resonate longer than necessary. This may reduce wear on the mechanical resonators as well as the risk of interference between the detections of two subsequent acoustic emissions.
  • a wall may be arranged between two adjacent mechanical resonators. Such walls may reduce the extent to which the fluid causes interference between vibrating mechanical resonators.
  • Further variants of the acoustic emission sensor include acoustic emission sensors having ten or more mechanical resonators.
  • the resonance frequencies of the mechanical resonators may be between approximately 100 kHz and approximately 1000 kHz.
  • the frequencies of the acoustic emission signals of interest typically lie in this range.
  • a bearing arrangement may advantageously comprise a bearing having an acoustic emission sensor according to the description above.
  • a method for detecting acoustic emissions in a bearing using an acoustic emission sensor which comprises two or more mechanical resonators, which have mutually different resonance frequencies, and a respective output terminal connected to each one of the mechanical resonators to receive an electrical signal, each one of the mechanical resonators is configured to transmit an electrical signal to the respective output terminal if a frequency range of the acoustic emission signal comprises the resonance frequency of the mechanical resonator.
  • the method comprises receiving an acoustic emission signal from the bearing;
  • the second aspect may provide for technical effects which are identical or similar to those of the first aspect.
  • Figure 1 is a schematic cutaway view in perspective of an acoustic emission sensor for a bearing.
  • Figure 2 shows a schematic side view of two mechanical resonators.
  • Figure 3 shows a schematic perspective view of a few components of an acoustic emission sensor.
  • Figure 4 is a schematic perspective view of a bearing arrangement.
  • Figure 5 is a flowchart illustrating some of the steps of a method for detecting acoustic emissions in a bearing.
  • the acoustic emission sensor 1 usually comprises a housing 2.
  • a fluid 3 may be arranged inside the housing 2.
  • the fluid 3 can be a gas, for example air.
  • the fluid can be a gas having a viscosity similar to that of air, for example a noble gas such as argon or neon.
  • the mechanical resonators 5 are arranged inside the housing 2.
  • the mechanical resonators 5 may be piezoelectric.
  • the mechanical resonators 5 may for example comprise zinc oxide (ZnO) or lead zirconate titanate (PZT).
  • ZnO zinc oxide
  • PZT lead zirconate titanate
  • each mechanical resonator 5 is elongated, straight and has a transverse cross section in the form of a rectangle.
  • Other types of cross sections are conceivable, for example triangular or semicircular cross sections.
  • the mechanical resonators 5 in figures 1 and 2 are formed in pairs, each pair being formed by a single beam 4.
  • Five beams 4 are shown in figure 1 and thus ten mechanical resonators 5.
  • Figure 2 shows one beam 4 forming one pair of two mechanical resonators 5.
  • Each beam 4 has a central portion 4' between the two mechanical resonators 5 of the beam 4.
  • the beams 4 are arranged along a longitudinal axis L of a support 6 having an elongated shape.
  • Each beam 4 is attached to the support 6 by its central portion 4'.
  • the mechanical resonators 5 are pairwise arranged along the longitudinal axis L so that the mechanical resonators 5 of a pair protrude in opposite directions and substantially perpendicular to the longitudinal axis L.
  • the width s of the support 6 is sufficiently large to allow for easy attachment of the beams 4.
  • the width s of the support 6 may for example be about 50 ⁇ .
  • the longitudinal distance d between two adjacent mechanical resonators 5 can be about 20 ⁇ .
  • Different mechanical resonators 5 typically protrude from the support 6 by different amounts.
  • the length / by which a mechanical resonator 5 protrudes from the support 6 may for example be from about 60 ⁇ to about 200 ⁇ .
  • the mechanical resonators 5 in figures 1 and 2 have equal widths w and also equal thicknesses t.
  • the width ii/ may be about 50 ⁇ .
  • the thickness f may be about 5 ⁇ .
  • different mechanical resonators 5 may have different widths w and/or thicknesses t.
  • the mechanical resonators 5 are usually located at different distances ft from the housing 2.
  • the distances h may be in the range from about 0.1 ⁇ to about 2 ⁇ . The smaller the distance h between a
  • the resonance frequencies of the mechanical resonators 5 are mutually different, i.e. each mechanical resonator 5 has a resonance frequency which is different from the resonance frequencies of the other mechanical resonators 5. Furthermore, the resonance frequencies of the mechanical resonators 5 lie in a desired frequency range. This may for example be achieved by providing mechanical resonators 5 having
  • the resonance frequencies of the mechanical resonators 5 may lie in the range from approximately 100 kHz to approximately 1000 kHz, which is the frequency range of high-frequency acoustic emission signals. For example, if the acoustic emission sensor 1 has ten mechanical resonators 5, the resonance frequencies of the mechanical resonators 5 may be approximately 100 kHz, 200 kHz, 300 kHz, 400 kHz, 500 kHz, 600 kHz, 700 kHz, 800 kHz, 900 kHz and 1000 kHz, respectively.
  • the mechanical resonators 5 may be configured so that these narrow frequency ranges overlap slightly, together forming a continuum of frequencies.
  • the acoustic emission sensor 1 may be configure so that at least one mechanical resonator 5 will transmit an electrical signal in response to an acoustic emission signal having a frequency within the limits defined by the mechanical resonator 5 having the highest resonance frequency and the mechanical resonator 5 having the lowest resonance frequency.
  • the mechanical resonators 5 may be provided with electrodes 7.
  • each mechanical 5 resonator may have an electrode 7 arranged on the end which is distal to the support 6.
  • the electrodes 7 may be arranged on the side of the mechanical resonator 5 which is opposite the support 5.
  • the electrodes 7 may be a layer of a conductive material, such as gold (Au).
  • the thickness t e of the electrodes may for example be about 0.5 ⁇ or less.
  • the length l e of an electrode 7 may be from about 50 ⁇ to about 150 ⁇ , the electrodes 7 on different mechanical resonators 5 typically having different lengths.
  • the ratio / e //, i.e. the ratio between the length l e of an electrode 7 and the length / of the mechanical resonator 5 on which the electrode 7 is arranged, can for example be about 0.77.
  • the electrodes 7 may cover the entire width w of the mechanical resonators 5.
  • Each electrode 7 is configured to receive electrical signals from the mechanical resonator 5 on which the electrode 7 is arranged and transmit the electrical signals to an output terminal 9.
  • Each electrode 7 is connected to a respective output terminal 9.
  • the acoustic emission sensor 1 has as many output terminals 9 as mechanical resonators 5 which are electrically connected to the output terminals 9.
  • the electrodes 7 in figures 1 and 2 are electrically connected to the output terminals 9 by connections 8.
  • the connections 8 may be printed connections.
  • Each connection 8 may extend from an electrode 7, via the support 6, to an output terminal 9.
  • the connections 8 can be arranged on one or more insulating layers 10 provided on the mechanical resonators 5.
  • the one or more insulating layers 10 may also be provided on the support 6.
  • the one or more insulating layers 10 can for example be layers of silicon dioxide (SiO 2 ) or silicon carbide (SiC).
  • Each mechanical resonator 5 may be provided with a ground layer 1 1 on the side which faces the support 6 and between the support 6 and the mechanical resonator 5.
  • the ground layer 1 1 may be a layer of a conducting material, such as a copper foil.
  • Figure 3 shows four mechanical resonators 5 of an acoustic emission sensor having walls 12 are arranged between the mechanical resonators 5.
  • Two walls 12 are shown in figure 3.
  • the walls 12 extend substantially perpendicularly from the support 6, i.e. the walls are substantially parallel with the mechanical resonators 5.
  • the width b of the walls 12 may for example be about 10 ⁇ .
  • Figure 4 shows a bearing arrangement 16 which comprises a bearing
  • the bearing 13 may be a ball bearing, such as a deep groove ball bearing, a Y-bearing, angular contact ball bearing, a self-aligning ball bearing, a thrust ball bearing or an angular contact thrust ball bearing.
  • the bearing 13 may be a roller bearing, such as a cylindrical roller bearing, a taper roller bearing, a combined cylindrical roller and taper roller bearing, a needle roller bearing, a spherical roller bearing, a toroidal roller bearing, a roller thrust bearing, a needle roller thrust bearing, a tapered roller thrust bearing or a spherical roller thrust bearing.
  • the acoustic emission sensor 1 in figure 4 may be similar or identical to the ones described in connection with figures 1 , 2 or 3.
  • the acoustic emission sensor 1 is arranged to detect acoustic emission signals formed in the bearing 13.
  • the acoustic emission sensor 1 may be mounted inside the bearing 13. In figure 3, however, the acoustic emission sensor 1 is attached to an outer surface of the bearing 13.
  • the acoustic emission sensor 1 may be attached to the bearing mechanically, for example by means of soldering, screws and/or nails.
  • the acoustic emission sensor 1 may be attached to the bearing magnetically and/or chemically, for example by an adhesive.
  • the acoustic emission sensor 1 may alternatively be arranged inside the bearing 13.
  • the output terminals 9 are connected to an instrument 14 for measuring and/or analyzing electrical signals generated by the mechanical resonators 5 in response to an acoustic emission signal formed in the bearing 13.
  • the output terminals 9 are connected to the instrument 14 by means of one or more output connections 15, typically wired connections.
  • the instrument 14 may be configured to measure the root mean square of the potential of the electrical signals transmitted to the output terminals 9.
  • the instrument 14 can be an analog electronic instrument.
  • Figure 5 illustrates a method for detecting acoustic emissions in a bearing using an acoustic emission sensor 1 such as the ones described in connection with figures 1 , 2, 3 or 4. In step S1 , the acoustic emission sensor 1 receives an acoustic emission signal formed in the bearing 13.
  • the acoustic emission signal may for example be generated inside the bearing 13 as a result of a change in temperature, load or pressure.
  • An external force may produce a microscopic crack somewhere inside the bearing 13 from which an acoustic emission signal propagates through the bearing 13.
  • the way by which an acoustic emission sensor 1 arranged at the outer surface of the bearing 13 receives the acoustic emission signal is by starting to vibrate as a result of an acoustic emission signal having propagated to the outer surface.
  • the vibration of the acoustic emission sensor 1 causes the mechanical resonators 5 to vibrate.
  • the acoustic emission signal is thus transmitted to the mechanical resonators 5.
  • the vibration of the mechanical resonators 5 may be viscously dampened by a fluid 3 arranged inside the housing 2
  • the vibration of one mechanical resonator 5 is illustrated in figure 1 .
  • a mechanical resonator 5 whose resonance frequency is within the frequency range of the acoustic emission signal generates an electrical signal.
  • the frequencies of the acoustic emission signals of interest are typically in the range from approximately 100 kHz to approximately 1000 kHz. According to one example, the mechanical resonators 5 are
  • more than one of the mechanical resonators 5 may generate electrical signals since the frequency range of the acoustic emission signal may be large enough to include the resonance frequencies of several mechanical resonators 5. Furthermore, a mechanical resonator 5 whose resonance frequency is outside the frequency range of the acoustic emission signal may nevertheless generate an electrical signal. The electrical signal from such a mechanical resonator 5 is, however, typically substantially weaker than the electrical signal from a mechanical resonator 5 whose resonance frequency is within the frequency range of the acoustic emission signal.
  • the second-to-lowest resonance frequency of some mechanical resonators 5 may lie within the frequency range of the acoustic emission signal.
  • An electrical signal generated by such resonance may be electrically dampened.
  • the electrical signal generated by a mechanical resonator 5 in the form of a rectangular beam resonating at its second-to-lowest resonance frequency may be electrically dampened by an electrode 7 arranged on the end of the mechanical resonator 5 which is distal to the support 6. This arrangement may result in cancellation, in part or in full, of the electrical signal.
  • step S4 electrical signals generated by the mechanical resonators 5 are transmitted to the output terminals 9.
  • Each mechanical resonator 5 is electrically connected to a respective output terminal 9.
  • the acoustic emission sensor 1 has as many output terminals 9 as mechanical resonators 5.
  • the electrical signals may be transmitted through connections 8, such as printed connections or wired connections.
  • a vibration frequency of the bearing 13 is determined based on electrical signals transmitted to the output terminals 9.
  • the determination of a vibration frequency of the bearing 13 is typically carried out using an instrument 14 connected to the output terminals 9 via one or more output connections 15.
  • the instrument 14 may be a simple analog electronic instrument configured to measure the root mean square of the potential of the electrical signals transmitted to the output terminals 9.
  • two mechanical resonators 5 forming a pair protruding in opposite directions from the support 6 do not have to be formed by the same beam 4.
  • the mechanical resonators 5 of such a pair may be formed by two different beams 4, each of which protrudes on only one side of the support 6.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Acoustics & Sound (AREA)

Abstract

La présente invention concerne un capteur (1) d'émission acoustique conçu pour recevoir un signal d'émission acoustique provenant d'un palier (13). Le capteur (1) d'émission acoustique comprend deux résonateurs mécaniques (5) ou plus ayant des fréquences de résonance différentes l'une de l'autre et une borne (9) de sortie respective connectée à chacun des résonateurs mécaniques (5) afin de recevoir un signal électrique. Chacun des résonateurs mécaniques (5) est conçu pour transmettre un signal électrique à la borne (9) de sortie respective si une gamme de fréquences du signal d'émission acoustique comprend la fréquence de résonance du résonateur mécanique (5).
PCT/SE2015/050506 2014-05-19 2015-05-07 Capteur et procédé de détection d'émission acoustique provenant d'un palier WO2015178821A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE1450585-3 2014-05-19
SE1450585 2014-05-19

Publications (1)

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WO2015178821A1 true WO2015178821A1 (fr) 2015-11-26

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018217794A1 (fr) 2017-05-22 2018-11-29 Waukesha Bearings Corporation Système de surveillance/analyse de palier
US20190178848A1 (en) * 2017-12-07 2019-06-13 Infineon Technologies Ag System and method for examining semiconductor substrates
WO2019123635A1 (fr) * 2017-12-22 2019-06-27 三菱電機エンジニアリング株式会社 Dispositif de détection de fluctuation de mouvement et système de détermination d'anomalie
DE102018221181A1 (de) * 2018-12-07 2020-06-10 Zf Friedrichshafen Ag Resonatoranordnung
JP2020148675A (ja) * 2019-03-14 2020-09-17 株式会社東芝 センサモジュール

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DE3703946A1 (de) * 1987-02-09 1988-08-18 Fraunhofer Ges Forschung Frequenzselektiver schwingungssensor
US4891984A (en) * 1985-10-08 1990-01-09 Nippondenso Co., Ltd. Acceleration detecting apparatus formed by semiconductor
US5001933A (en) * 1989-12-26 1991-03-26 The United States Of America As Represented By The Secretary Of The Army Micromechanical vibration sensor
US5517858A (en) * 1991-06-28 1996-05-21 Nsk Ltd. Method and instrument for measuring for measuring preload of rolling bearing
US6223601B1 (en) * 1998-05-22 2001-05-01 Sumitomo Metal Industries, Limited Vibration wave detecting method and vibration wave detector
US6336366B1 (en) * 1999-09-24 2002-01-08 Ut-Battelle, Llc Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
US20020083773A1 (en) * 1999-09-28 2002-07-04 Rockwell Science Center, Llc Condition based monitoring by vibrational analysis
FR2876795A1 (fr) * 2004-10-19 2006-04-21 Univ Reims Champagne Ardenne Dispositif de detection de defauts des machines tournantes

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Publication number Priority date Publication date Assignee Title
US4891984A (en) * 1985-10-08 1990-01-09 Nippondenso Co., Ltd. Acceleration detecting apparatus formed by semiconductor
DE3703946A1 (de) * 1987-02-09 1988-08-18 Fraunhofer Ges Forschung Frequenzselektiver schwingungssensor
US5001933A (en) * 1989-12-26 1991-03-26 The United States Of America As Represented By The Secretary Of The Army Micromechanical vibration sensor
US5517858A (en) * 1991-06-28 1996-05-21 Nsk Ltd. Method and instrument for measuring for measuring preload of rolling bearing
US6223601B1 (en) * 1998-05-22 2001-05-01 Sumitomo Metal Industries, Limited Vibration wave detecting method and vibration wave detector
US6336366B1 (en) * 1999-09-24 2002-01-08 Ut-Battelle, Llc Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
US20020083773A1 (en) * 1999-09-28 2002-07-04 Rockwell Science Center, Llc Condition based monitoring by vibrational analysis
FR2876795A1 (fr) * 2004-10-19 2006-04-21 Univ Reims Champagne Ardenne Dispositif de detection de defauts des machines tournantes

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018217794A1 (fr) 2017-05-22 2018-11-29 Waukesha Bearings Corporation Système de surveillance/analyse de palier
US11255750B2 (en) 2017-05-22 2022-02-22 Waukesha Bearings Corporation Bearing monitoring/analysis system
US11841290B2 (en) 2017-05-22 2023-12-12 Waukesha Bearings Corporation Bearing monitoring/analysis system
EP4293244A2 (fr) 2017-05-22 2023-12-20 Waukesha Bearings Corporation Système de surveillance/analyse de palier
US20190178848A1 (en) * 2017-12-07 2019-06-13 Infineon Technologies Ag System and method for examining semiconductor substrates
US10859534B2 (en) * 2017-12-07 2020-12-08 Infineon Technologies Ag System and method for examining semiconductor substrates
WO2019123635A1 (fr) * 2017-12-22 2019-06-27 三菱電機エンジニアリング株式会社 Dispositif de détection de fluctuation de mouvement et système de détermination d'anomalie
JPWO2019123635A1 (ja) * 2017-12-22 2020-04-02 三菱電機エンジニアリング株式会社 動作変動検出装置および異常判定システム
DE102018221181A1 (de) * 2018-12-07 2020-06-10 Zf Friedrichshafen Ag Resonatoranordnung
JP2020148675A (ja) * 2019-03-14 2020-09-17 株式会社東芝 センサモジュール

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