WO2015178358A1 - Panel manufacturing method - Google Patents

Panel manufacturing method Download PDF

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Publication number
WO2015178358A1
WO2015178358A1 PCT/JP2015/064257 JP2015064257W WO2015178358A1 WO 2015178358 A1 WO2015178358 A1 WO 2015178358A1 JP 2015064257 W JP2015064257 W JP 2015064257W WO 2015178358 A1 WO2015178358 A1 WO 2015178358A1
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WO
WIPO (PCT)
Prior art keywords
glass
mother substrate
substrate
base material
liquid crystal
Prior art date
Application number
PCT/JP2015/064257
Other languages
French (fr)
Japanese (ja)
Inventor
直彦 八木
尚利 稲山
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to KR1020167018415A priority Critical patent/KR102246031B1/en
Priority to CN201580009294.7A priority patent/CN106029591B/en
Priority to JP2016521098A priority patent/JP6512221B2/en
Publication of WO2015178358A1 publication Critical patent/WO2015178358A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/07Cutting armoured, multi-layered, coated or laminated, glass products
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/09Severing cooled glass by thermal shock
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements

Definitions

  • the present invention relates to a method for manufacturing a liquid crystal panel, an organic EL panel or the like.
  • a liquid crystal panel includes two glass substrates facing each other, a color filter substrate on which BM, RGB, and photo spacers are patterned, and a TFT substrate on which thin film transistors and transparent electrodes are patterned. Yes. Both substrates are bonded to each other with a sealing material applied along their peripheral portions, and a liquid crystal material is sealed in a space surrounded by the sealing material between the two substrates.
  • a plurality of LCD panels can be manufactured using the following method. Sometimes manufactured together.
  • a first glass mother substrate formed by patterning BM, RGB, and photo spacers for a plurality of liquid crystal panels on a single glass plate, and a single glass plate.
  • a second glass mother substrate formed by patterning thin film transistors and transparent electrodes for a plurality of surfaces is produced.
  • the two base substrates are bonded together with a plurality of sealing materials, and a liquid crystal material is sealed in each of the spaces surrounded by the sealing materials, so that a liquid crystal panel base material including a plurality of liquid crystal panels is obtained. Make it.
  • the liquid crystal panel base material is cut to obtain individual liquid crystal panels from the base material.
  • Patent Document 1 discloses a method for cutting a liquid crystal panel base material when a liquid crystal panel is manufactured by the above-described technique.
  • the laser L1 A method of cutting the base material 100 by irradiating the laser L2 from the back side is disclosed.
  • this method in each of the first glass mother substrate 100a existing on the front surface side of the liquid crystal panel base material 100 and the second glass mother substrate 100b existing on the rear surface side, on the back surface of the portion irradiated with the lasers L1 and L2, Films 301 and 302 having higher thermal conductivity than both mother substrates 100a and 100b are formed in advance.
  • heat by laser irradiation is concentrated on the boundary Y through the films 301 and 302, and the base material 100 (both base substrates 100a and 100b) is cut.
  • Patent Document 1 has the following problems to be solved. That is, in the method disclosed in the document, in order to cut the liquid crystal panel base material, in each of the first glass base substrate and the second glass base substrate, in all the portions that are the boundary of the adjacent liquid crystal panels, It is necessary to perform a film forming process in advance. Therefore, especially when there are a large number of liquid crystal panels to be cut out from the liquid crystal panel base material, the film forming process becomes complicated and the manufacturing efficiency is deteriorated, and an inherently unnecessary film is formed on the product. This also increases the manufacturing cost.
  • the laser irradiated from the front surface side of the liquid crystal panel base material can cut only the first glass mother substrate, and the laser irradiated from the back surface side can only cut the second glass mother substrate. Can be cut. Therefore, in cutting the liquid crystal panel base material, it is essential to irradiate the laser from both the front surface side and the back surface side of the base material. And the glass cutting method using a laser tends to be expensive as compared with other glass cutting methods (for example, folding). For this reason, there is a concern about further increase in manufacturing cost due to the laser irradiation from both the front surface side and the back surface side.
  • Such a problem is a problem that may occur not only when the liquid crystal panel base material is cut but also when other panel base materials such as a base material of an organic EL panel are cut.
  • the present invention made in view of such circumstances is to enable cutting of a panel base material at a low cost and in a simple manner when cutting and manufacturing individual panels by cutting the panel base material. As an objective.
  • the present invention which was created to solve the above problems, includes a first glass mother substrate provided with a first glass substrate in each region partitioned by a planned cutting line, and a first glass substrate facing each region.
  • a second glass mother substrate provided with two glass substrates and a built-in member incorporated so as to be interposed between the first glass substrate and the second glass substrate in each region, the first in each region
  • a panel base material including a glass substrate, a second glass substrate, and a panel including a built-in member as a component, and a panel manufacturing method including a cutting step of cutting the panel base material along a planned cutting line.
  • an initial crack forming step for forming an initial crack at an end located on one end side of the planned cutting line in each of the first glass mother substrate and the second glass mother substrate, and to be cut into a panel base material Le along the line Heating by Heather irradiation, and, with the cooling by refrigerant to follow this to perform the one side of the panel base material, by progress together both initial crack, characterized in performing the cutting step.
  • the irradiation source side mother substrate the mother substrate located on the laser irradiation source side (hereinafter referred to as the irradiation source side mother substrate) has a temperature gradient and thermal stress is generated. appear. Then, the initial crack propagates along the planned cutting line due to the thermal stress.
  • the irradiation destination side mother substrate not only the irradiation source side mother substrate but also the mother substrate located on the laser irradiation destination side (hereinafter referred to as the irradiation destination side mother substrate) can propagate the initial crack along the planned cutting line. Is possible. It is assumed that such an effect is obtained for the following reason. That is, the built-in member is interposed between the irradiation source side mother board and the irradiation destination side mother board. Due to the interposition of this built-in member, the thermal stress generated in the irradiation-source side mother board propagates to the irradiation-destination-side mother board through the built-in member, and this propagated stress propagates the initial crack in the irradiation-destination-side mother board.
  • both base substrates are cut by both initial cracks that propagate together, and the panel base material is cut.
  • a panel base material first glass base substrate
  • the second glass mother substrate the second glass mother substrate
  • the initial crack forming step may be performed by rolling a scribe wheel.
  • an end portion located on one end side of the planned cutting line in the first glass mother substrate and a first end side of the planned cutting line in the second glass mother substrate It is preferable that the end portion (hereinafter referred to as the second end portion) positioned is shifted and positioned in the direction in which the planned cutting line extends.
  • both initial cracks can be obtained by rolling a single scribe wheel only once from one end side of the planned cutting line to the other end side or from the other end side to the one end side. Can be formed continuously.
  • the length of deviation between the first end and the second end is 0.2 mm to 5 mm.
  • the length that protrudes is 0.2 mm or more, scribe on the end portion that protrudes It is possible to ensure a sufficient length for the wheel to roll. Therefore, it is possible to suitably form an initial crack with respect to the end portion on the protruding side.
  • the protruding length is 5 mm or less, it is possible to prevent as much as possible an increase in the number of parts that are inherently unnecessary in the panel base material (parts provided to form initial cracks). It is possible to avoid an unreasonable increase in manufacturing costs. From these facts, if the length of the first end portion and the second end portion is shifted to 0.2 mm to 5 mm, initial cracks can be suitably formed, and an unreasonable increase in manufacturing cost can be avoided. Is possible.
  • the initial crack formation step by rolling the scribe wheel in a direction from the other end side to the one end side of the planned cutting line.
  • the scribe wheel rolls from the inner side of the panel base material toward the outer peripheral end.
  • the initial crack formation step may be performed by irradiating a pulse laser.
  • the gap formed between the first glass mother substrate and the second glass mother substrate is extremely narrow. For this reason, when the first end portion and the second end portion are not shifted and positioned in the direction in which the planned cutting line extends (when the panel base material is viewed in a plan view, the first end portion and the second end portion Even if an attempt is made to form an initial crack by inserting a scribe wheel between the two mother substrates in a case where the portion overlaps the portion, it may be difficult to execute.
  • the pulse laser it is possible to form an initial crack at a spot where the laser is condensed regardless of whether the first end and the second end are shifted from each other. . Thereby, both initial cracks can be reliably formed in a desired location.
  • the laser irradiation conditions in the cutting step are the heating by laser irradiation on a glass plate having a thickness equal to or greater than the thickness of the first glass mother substrate and the second glass mother substrate, and this It is preferable that the initial crack formed at the end portion of the glass plate is advanced to be cut and cut by cooling with a refrigerant that follows.
  • the panel base material can be suitably cut.
  • the thickness of the first glass mother substrate and the second glass mother substrate is preferably 10 ⁇ m to 300 ⁇ m.
  • the thickness of the first glass base substrate and the second glass base substrate is sufficiently thin, so that both glass base substrates can be prevented from being damaged when the panel base material is cut, and the panel base material is cut. It becomes easy to do.
  • the width of the gap formed between the first glass mother substrate and the second glass mother substrate is preferably 0.1 ⁇ m to 20 ⁇ m.
  • the present invention by cutting the panel base material, it is possible to cut the panel base material at low cost and easily when individual panels are cut out and manufactured.
  • FIG. 1 It is a perspective view which shows a liquid crystal panel base material. It is a perspective view which shows the state which removed the 1st glass base substrate virtually from the liquid crystal panel base material shown to FIG. It is a top view which shows the initial stage crack formation process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. It is a top view which shows the initial stage crack formation process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. It is a top view which shows the cutting process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. It is a top view which shows the cutting process in the manufacturing method of the panel which concerns on 1st embodiment of this invention.
  • FIG. 4a It is a top view which shows the state which removed the 1st glass mother board
  • the liquid crystal panel base material 1 includes a first glass base substrate provided with a first glass substrate 31 in each region (two regions in the present embodiment) defined by the planned cutting line 2. 3 and a second glass substrate 4 provided with a second glass substrate 41 facing the first glass substrate 31 in each region, and interposed between the first glass substrate 31 and the second glass substrate 41 in each region. And a sealing material 5 as a built-in member.
  • the liquid crystal panel base material 1 includes the liquid crystal panel 11 that is a panel including the first glass substrate 31, the second glass substrate 41, and the sealing material 5 as components in each region. That is, the liquid crystal panel base material 1 includes two surfaces of liquid crystal panels 11.
  • the first glass mother substrate 3 (first glass substrate 31) and the second glass mother substrate 4 (second glass substrate 41) are made of, for example, non-alkali glass.
  • Each of the first glass mother substrate 3 and the second glass mother substrate 4 has a rectangular shape and a thickness of 10 ⁇ m to 300 ⁇ m.
  • the width of the gap (cell gap) formed between the mother substrates 3 and 4 is 0.1 ⁇ m to 20 ⁇ m.
  • Each first glass substrate 31 included in the first glass mother substrate 3 is a color filter substrate on which BM, RGB, and photo spacers (all of which are not shown) are patterned.
  • each second glass substrate 41 included in the second glass mother substrate 4 is a TFT substrate on which a thin film transistor and a transparent electrode (both not shown) are patterned.
  • the sealing material 5 is interposed between the first glass substrate 31 and the second glass substrate 41 to bond the substrates 31 and 41 together, and is formed along the peripheral edge of the substrates 31 and 41.
  • a liquid crystal material (not shown) is sealed in the space 6 surrounded by the sealing material 5.
  • a gap having a predetermined width is formed between the sealing materials 5 adjacent to each other with the planned cutting line 2 interposed therebetween.
  • the sealing material 5 is made of, for example, an ultraviolet curable resin.
  • An end 3a (hereinafter referred to as a first end 3a) located on one end 2a side of the planned cutting line 2 in the first glass mother substrate 3, and one end of the planned cutting line 2 in the second glass mother substrate 4
  • the end 4a located on the 2a side (hereinafter referred to as the second end 4a) is shifted in the direction in which the planned cutting line 2 extends.
  • the length Z in which the first end portion 3a and the second end portion 4a are displaced is set to 0.2 mm to 5 mm. Thereby, the second end 4a protrudes from the first end 3a.
  • the thicknesses of the first glass mother substrate 3 and the second glass mother substrate 4 are more preferably 10 ⁇ m to 100 ⁇ m.
  • the width of the gap formed between the mother substrates 3 and 4 is more preferably 0.1 ⁇ m to 10 ⁇ m, and most preferably 0.1 ⁇ m to 5 ⁇ m.
  • the length Z in which the first end portion 3a and the second end portion 4a are displaced is more preferably 0.5 mm to 3 mm.
  • the width of the gap formed between the adjacent sealing materials 5 is preferably 1 mm to 5 mm. If it does in this way, it will become easy to behave as the liquid crystal panel base material 1 is integrated.
  • the method for manufacturing this panel is performed by the scribe wheel 7 on the first end 3a of the first glass mother substrate 3 and the second end 4a of the second glass mother substrate 4.
  • An initial crack forming step (FIGS. 2a and 2b) for forming initial cracks 8 and 9, respectively, heating by laser irradiation along the planned cutting line 2 to the liquid crystal panel base material 1, and cooling by a refrigerant following this Is performed from the upper surface side of the liquid crystal panel base material 1, and both the initial cracks 8 and 9 are developed to cut the liquid crystal panel base material 1 (FIGS. 3, 4a, and 4b); Is included.
  • the single scribe wheel 7 is rolled only once in the direction from the other end 2b side of the planned cutting line 2 to the one end 2a side. That is, the single scribe wheel 7 is rolled only once from the inner side of the liquid crystal panel base material 1 toward the outer peripheral end.
  • the distance for rolling the scribe wheel 7 is preferably 1 mm to 10 mm.
  • the scribe wheel 7 rolls on the first end portion 3a to form the initial crack 8, and then descends from the first end portion 3a to the second end portion 4a, and on the second end portion 4a. Roll to form an initial crack 9.
  • both initial cracks 8 and 9 it is suitable when forming both the initial cracks 8 and 9 if the pressure which presses the scribe wheel 7 against the 1st end part 3a and the 2nd end part 4a is kept constant. Thereby, as shown in FIG. 2b, the formation of the initial crack 8 in the first end portion 3a and the formation of the initial crack 9 in the second end portion 4a are continuously performed. In the present embodiment, both initial cracks 8 and 9 are formed on the upper surface side of the first end portion 3a and the second end portion 4a.
  • the liquid crystal panel base material 1 is heated by laser irradiation, and the cooling unit is cooled by jetting a coolant (for example, mist-like water). 12 are formed adjacent to each other.
  • a coolant for example, mist-like water. 12 are formed adjacent to each other.
  • laser irradiation and refrigerant injection are performed only from the upper surface side of the liquid crystal panel base material 1.
  • the conditions of laser irradiation follow the heating by laser irradiation to a glass plate having a thickness equal to or more than the sum of the thickness of the first glass mother substrate 3 and the thickness of the second glass mother substrate 4, and follow this.
  • the initial crack formed at the end of the glass plate is caused to be a condition for cutting.
  • the laser irradiation condition may be a condition for cutting a glass plate having a thickness 1.1 to 2.1 times the sum of the thicknesses of both mother substrates 3 and 4 by laser cleaving.
  • the laser irradiation condition may be a condition for cutting a glass plate having a thickness 1.4 to 2.0 times the sum of the thicknesses of both mother substrates 3 and 4 by laser cutting.
  • the heating unit 10 and the cooling unit 12 are moved from the one end 2a side of the planned cutting line 2 toward the other end 2b side.
  • the formation of the heating unit 10 and the cooling unit 12 is first performed only on the second end 4a protruding from the first end 3a.
  • the temperature gradient generated by the heating unit 10 and the cooling unit 12 generates thermal stress, and the thermal stress propagates the initial crack 9 formed in the second end portion 4 a along the planned cutting line 2.
  • the heating unit 10 and the cooling unit 12 are the first glass mothers that are constituent elements of the liquid crystal panel base material 1, as shown in FIG.
  • the first glass mother substrate 3 positioned on the upper surface side (laser irradiation source side) of the liquid crystal panel base material 1 is formed.
  • the initial crack 9 Advances along the planned cutting line 2, and the second glass mother substrate 4 is cut. That is, the initial crack 9 that has progressed through the second end 4a continues to progress.
  • the sealing material 5 is interposed between the first glass mother substrate 3 and the second glass mother substrate 4.
  • the thermal stress generated in the first glass mother substrate 3 is propagated to the second glass mother substrate 4 through the sealing material 5 due to the intervention of the sealing material 5, and the propagated stress is initially generated in the second glass mother substrate 4.
  • the crack 9 is developed.
  • the propagation of thermal stress is assumed to become more prominent as the first glass mother substrate 3 and the second glass mother substrate 4 are thinner. Thereby, both mother substrates 3 and 4 are cut, and the liquid crystal panel base material 1 is cut.
  • the liquid crystal panel base material 1 is heated by laser irradiation along the planned cutting line 2 and cooled by a refrigerant that follows this, from the upper surface side, along with this,
  • the liquid crystal panel base material 1 (the first glass base substrate 3 and the second glass base substrate 4) can be cut. Therefore, the liquid crystal panel base material 1 can be cut easily at low cost.
  • the first end portion 3a and the second end portion 4a are shifted from each other in the direction in which the planned cutting line 2 extends, and the second end portion 4a protrudes from the first end portion 3a. ing. Therefore, in the initial crack formation step, the initial scribe wheel 7 is continuously rolled by rolling the single scribe wheel 7 only once from the other end 2b side of the planned cutting line 2 to the one end 2a side. Can be formed.
  • the following effects can also be obtained by setting the length Z at which the first end portion 3a and the second end portion 4a are shifted to 0.2 mm to 5 mm. That is, it becomes possible to secure a sufficient length for the scribe wheel 7 to roll on the second end portion 4a, and an unnecessary portion (initial crack 9 is originally formed in the liquid crystal panel base material 1). It is possible to prevent as much as possible the number of parts to be formed to increase, and to avoid an unreasonable increase in manufacturing cost. These effects can be further enhanced by setting the length Z in which the first end portion 3a and the second end portion 4a are displaced within the range of 0.5 mm to 3 mm.
  • the scribe wheel 7 is rolled in a direction from the other end 2b side of the planned cutting line 2 toward the one end 2a side.
  • the scribe wheel 7 rolls from the inner side of the liquid crystal panel base material 1 toward the outer peripheral end. Therefore, when forming both the initial cracks 8 and 9, the rolling scribe wheel 7 cannot run up to the first end 3a or the second end 4a. For this reason, it is possible to avoid the first end portion 3a and the second end portion 4a from being unduly damaged by an impact at the time of riding.
  • two glass substrates (OA-10G) manufactured by Nippon Electric Glass Co., Ltd. were prepared.
  • a transparent glass or the like for two surfaces was formed on each of the two glass substrates to form a first glass mother substrate 3 and a second glass mother substrate 4, respectively.
  • the thicknesses of both mother substrates 3 and 4 are 100 ⁇ m.
  • the two mother boards 3 and 4 are bonded together with the sealing material 5 for two surfaces interposed therebetween, and a liquid crystal material is sealed in each of the spaces 6 surrounded by the sealing material 5 to include the liquid crystal panel 11 for two surfaces.
  • a liquid crystal panel base material 1 was prepared. At this time, the width of the gap (cell gap) formed between the mother substrates 3 and 4 was set to 9 ⁇ m.
  • Table 1 seven types of liquid crystal panel base materials 1 having different lengths Z from which the first end portion 3a and the second end portion 4a were shifted were produced.
  • each liquid crystal panel base material 1 is heated by laser irradiation and cooled by spraying mist water that follows the liquid crystal panel base material 1, so that one end 2 a side of the planned cutting line 2 is changed from the other end 2 b side.
  • the cutting of each liquid crystal panel base material 1 was attempted.
  • the conditions for laser irradiation, the conditions for jetting mist water, and the conditions for forming both initial cracks 8 and 9 are common when cutting the liquid crystal panel base material 1, and are as follows.
  • Laser type CO2 laser, laser wavelength: 10.6 ⁇ m, laser scanning speed: 25 mm / s, laser output: 15 W, mist water injection pressure: 0.06 MPa, mist water flow rate: 0.4 ml / min
  • the diameter of the scribe wheel 7 is 3 mm, and the rolling speed of the scribe wheel 7 is 10 mm / s.
  • the panel manufacturing method according to the second embodiment is different from the panel manufacturing method according to the first embodiment described above in the liquid crystal panel base material 1 to be cut in the first end 3a.
  • both initial cracks 8 and 9 are formed by irradiation with a picosecond laser 13 as a pulse laser.
  • the picosecond laser 13 is collected on the upper surfaces of the end portions 3a and 4a. It is illuminated (the top surface is the focal point of the picosecond laser 13).
  • the formation of both initial cracks 8 and 9 may be performed by irradiating a femtosecond laser as a pulse laser instead of the picosecond laser 13.
  • the wavelength of the pulse laser may be appropriately selected from various wavelengths according to the absorption rate of the first glass mother substrate 3 and the second glass mother substrate 4 and the pulse width of the pulse laser.
  • the gap (cell gap) formed between the first glass mother substrate 3 and the second glass mother substrate 4 is extremely narrow. For this reason, when the first end portion 3a and the second end portion 4a are not shifted in the direction in which the planned cutting line 2 extends, the scribe wheel 7 is caused to enter between both the mother substrates 3 and 4. Even if the initial crack 9 is to be formed, the execution may be difficult. However, according to the picosecond laser 13, regardless of whether or not the first end portion 3a and the second end portion 4a are shifted from each other, the initial cracks are respectively generated at the locations where the picosecond laser 13 is condensed. 8, 9 can be formed. Thereby, both the initial cracks 8 and 9 can be reliably formed in a desired location.
  • the panel manufacturing method according to the present invention is not limited to the mode described in each of the above embodiments.
  • an individual liquid crystal panel is cut out by cutting a liquid crystal panel base material including liquid crystal panels for two surfaces.
  • liquid crystal panels for three or more surfaces are included. Even when the liquid crystal panel base material is cut, the panel manufacturing method according to the present invention can be applied.
  • both initial cracks may be formed by rolling a scribe wheel from one end side to the other end side. That is, both initial cracks may be formed by rolling the scribe wheel inward from the outer peripheral end of the liquid crystal panel base material.
  • both initial cracks are continuously formed by rolling a single scribe wheel only once.
  • individual initial cracks may be formed separately.
  • both initial cracks are formed by irradiating a pulse laser such as a picosecond laser or a femtosecond laser, but this is not restrictive.
  • both initial cracks may be formed by irradiating with a short wavelength laser such as a UV laser.
  • a short wavelength laser such as a UV laser.
  • it may replace with the scribe wheel in said 1st embodiment, and the pulse laser in 2nd embodiment, and may form both initial stage cracks using a sandpaper etc., for example.
  • the initial crack in the initial crack forming step, is formed on the upper surface side of both the first end and the second end, but this is not restrictive. .
  • an initial crack may be formed on either the upper surface side or the lower surface side.
  • an initial crack may be formed on the upper surface side at the first end portion, and an initial crack may be formed on the lower surface side at the second end portion.
  • the initial crack is formed on the first end portion and on the upper surface side and the lower surface side of the second end portion.
  • the laser may be irradiated from the upper surface side of the liquid crystal panel base material, or may be irradiated from the lower surface side (the same applies when irradiating a short wavelength laser such as a UV laser).
  • the scribe wheel is disposed in the thickness direction of the liquid crystal panel base material.
  • the initial crack may be formed at the first end portion and the second end portion by rolling along.
  • the liquid crystal panel base material is irradiated with laser only from the upper surface side and cooled by the refrigerant that follows this, but these are performed from the lower surface side. It is good also as an aspect performed only.
  • the laser irradiation condition is a condition for cutting a glass plate having a thickness equal to or larger than the sum of the thicknesses of both mother substrates by laser cleaving, but this is not necessarily required.
  • the individual liquid crystal panels are cut out by cutting the liquid crystal panel base material.
  • the panel manufacturing method according to the present invention is, for example, an organic EL for a plurality of surfaces.
  • the present invention can also be applied to a case where individual organic EL panels are cut out by cutting an organic EL panel base material including a panel.

Abstract

Provided is a panel manufacturing method that includes a cutting step for cutting a liquid crystal panel substrate (1) along an intended cutting line (2), wherein provided is an initial crack forming step in which in a first glass substrate plate (3) and a second glass substrate plate (4), initial cracks (8, 9) are formed respectively at end parts (3a, 4a) which are located at one end (2a) of the intended cutting line (2). The cutting step is performed by carrying out, on the liquid crystal panel substrate (1) from the upper-surface side of the liquid crystal panel substrate (1), heating by radiating a laser along the intended cutting line (2) and cooling using a coolant following the heating, and in conjunction with the foregoing, causing the initial cracks (8, 9) to develop together.

Description

パネルの製造方法Panel manufacturing method
 本発明は、液晶パネルや有機ELパネル等を製造するための方法に関する。 The present invention relates to a method for manufacturing a liquid crystal panel, an organic EL panel or the like.
 周知のように、液晶パネルは、BM、RGB、フォトスペーサがパターン形成されたカラーフィルター基板と、薄膜トランジスタや透明電極がパターン形成されたTFT基板との相互に対向する二枚のガラス基板を備えている。両基板は、これらの周縁部に沿って塗布されたシール材を挟んで貼り合わされており、両基板の相互間においてシール材で囲まれるスペースには、液晶材料が封入される。 As is well known, a liquid crystal panel includes two glass substrates facing each other, a color filter substrate on which BM, RGB, and photo spacers are patterned, and a TFT substrate on which thin film transistors and transparent electrodes are patterned. Yes. Both substrates are bonded to each other with a sealing material applied along their peripheral portions, and a liquid crystal material is sealed in a space surrounded by the sealing material between the two substrates.
 ところで、液晶テレビ用やモバイル機器用等の液晶パネルを製造する場合には、一枚一枚の液晶パネルを個々に製造するのではなく、以下のような手法を採用して複数の液晶パネルをまとめて製造することがある。 By the way, when manufacturing LCD panels for LCD TVs and mobile devices, rather than manufacturing individual LCD panels one by one, a plurality of LCD panels can be manufactured using the following method. Sometimes manufactured together.
 この手法では、まず、一枚のガラス板に液晶パネル複数面分のBM、RGB、フォトスペーサをパターン形成してなる第一ガラス母基板(カラーフィルター母基板)と、同じく一枚のガラス板に複数面分の薄膜トランジスタや透明電極をパターン形成してなる第二ガラス母基板(TFT母基板)とを作製する。次に、両母基板を複数面分のシール材を挟んで貼り合せると共に、シール材で囲まれるスペースの各々に液晶材料を封入することで、複数面の液晶パネルを含んだ液晶パネル母材を作製する。最後に、この液晶パネル母材を切断して当該母材から個々の液晶パネルを切り出して得る。 In this method, first, a first glass mother substrate (color filter mother substrate) formed by patterning BM, RGB, and photo spacers for a plurality of liquid crystal panels on a single glass plate, and a single glass plate. A second glass mother substrate (TFT mother substrate) formed by patterning thin film transistors and transparent electrodes for a plurality of surfaces is produced. Next, the two base substrates are bonded together with a plurality of sealing materials, and a liquid crystal material is sealed in each of the spaces surrounded by the sealing materials, so that a liquid crystal panel base material including a plurality of liquid crystal panels is obtained. Make it. Finally, the liquid crystal panel base material is cut to obtain individual liquid crystal panels from the base material.
 ここで、上記のような手法によって液晶パネルを製造する場合に、液晶パネル母材を切断するための方法が特許文献1に開示されている。 Here, Patent Document 1 discloses a method for cutting a liquid crystal panel base material when a liquid crystal panel is manufactured by the above-described technique.
 同文献には、図6に示すように、隣り合う液晶パネル101,102の境界Y(シール材201,202の相互間)に沿って、液晶パネル母材100に対し、表面側からレーザーL1、裏面側からレーザーL2を照射することで、当該母材100を切断する方法が開示されている。この方法では、液晶パネル母材100の表面側に存する第一ガラス母基板100aと、裏面側に存する第二ガラス母基板100bとの各々において、レーザーL1,L2が照射される箇所の裏面に、両母基板100a,100bよりも熱伝導性の高い膜301,302を予め形成している。これにより、液晶パネル母材100の切断時に、レーザー照射による熱が膜301,302を介して境界Yに集中し、当該母材100(両母基板100a,100b)が切断される。 In this document, as shown in FIG. 6, along the boundary Y between adjacent liquid crystal panels 101 and 102 (between the seal materials 201 and 202), the laser L1, A method of cutting the base material 100 by irradiating the laser L2 from the back side is disclosed. In this method, in each of the first glass mother substrate 100a existing on the front surface side of the liquid crystal panel base material 100 and the second glass mother substrate 100b existing on the rear surface side, on the back surface of the portion irradiated with the lasers L1 and L2, Films 301 and 302 having higher thermal conductivity than both mother substrates 100a and 100b are formed in advance. Thereby, when the liquid crystal panel base material 100 is cut, heat by laser irradiation is concentrated on the boundary Y through the films 301 and 302, and the base material 100 (both base substrates 100a and 100b) is cut.
特開2002-224870号公報JP 2002-224870 A
 しかしながら、特許文献1に開示された方法には、以下のような解決すべき問題がある。すなわち、同文献に開示された方法では、液晶パネル母材を切断するために、第一ガラス母基板と第二ガラス母基板との各々において、隣り合う液晶パネルの境界となる全ての部位に、予め成膜処理を施しておくことが必要となる。そのため、特に液晶パネル母材から切り出すべき液晶パネルが多数に及ぶ場合には、成膜処理が煩雑となって製造効率が悪化すると共に、製品には本来的に不要な膜を形成することでパネルの製造コストの増大をも招いてしまう。 However, the method disclosed in Patent Document 1 has the following problems to be solved. That is, in the method disclosed in the document, in order to cut the liquid crystal panel base material, in each of the first glass base substrate and the second glass base substrate, in all the portions that are the boundary of the adjacent liquid crystal panels, It is necessary to perform a film forming process in advance. Therefore, especially when there are a large number of liquid crystal panels to be cut out from the liquid crystal panel base material, the film forming process becomes complicated and the manufacturing efficiency is deteriorated, and an inherently unnecessary film is formed on the product. This also increases the manufacturing cost.
 さらに、この方法においては、液晶パネル母材の表面側から照射されるレーザーは、第一ガラス母基板のみを切断することができ、裏面側から照射されるレーザーは、第二ガラス母基板のみを切断することができる。従って、液晶パネル母材を切断するにあたり、当該母材の表面側と裏面側との双方からレーザーを照射することが必須となる。そして、レーザーを利用したガラスの切断方法は、その他のガラスの切断方法(例えば、折割り等)と比較して高コストとなりやすい傾向がある。このため、表面側と裏面側との双方からレーザーを照射することに起因して、製造コストのさらなる増大が懸念される。 Further, in this method, the laser irradiated from the front surface side of the liquid crystal panel base material can cut only the first glass mother substrate, and the laser irradiated from the back surface side can only cut the second glass mother substrate. Can be cut. Therefore, in cutting the liquid crystal panel base material, it is essential to irradiate the laser from both the front surface side and the back surface side of the base material. And the glass cutting method using a laser tends to be expensive as compared with other glass cutting methods (for example, folding). For this reason, there is a concern about further increase in manufacturing cost due to the laser irradiation from both the front surface side and the back surface side.
 なお、このような問題は、液晶パネル母材を切断する場合のみならず、例えば、有機ELパネルの母材等、他のパネル母材を切断する場合にも同様に発生し得る問題である。このような事情に鑑みなされた本発明は、パネル母材を切断することにより、個々のパネルを切り出して製造する場合に、低コストで且つ簡易なパネル母材の切断を可能とすることを技術的課題とする。 Such a problem is a problem that may occur not only when the liquid crystal panel base material is cut but also when other panel base materials such as a base material of an organic EL panel are cut. The present invention made in view of such circumstances is to enable cutting of a panel base material at a low cost and in a simple manner when cutting and manufacturing individual panels by cutting the panel base material. As an objective.
 上記の課題を解決するために創案された本発明は、切断予定線によって区画される各領域に第一ガラス基板を備えた第一ガラス母基板と、各領域に第一ガラス基板と対向する第二ガラス基板を備えた第二ガラス母基板と、各領域で第一ガラス基板と第二ガラス基板との間に介在するように組み込まれた組込部材とを有することで、各領域に第一ガラス基板、第二ガラス基板、及び組込部材を構成要素として含むパネルを備えたパネル母材について、パネル母材を切断予定線に沿って切断する切断工程を含んだパネルの製造方法であって、第一ガラス母基板、及び第二ガラス母基板の各々における切断予定線の一方端側に位置する端部に、それぞれ初期クラックを形成する初期クラック形成工程を含み、パネル母材への切断予定線に沿ったレーザー照射による加熱、及び、これに追随する冷媒による冷却をパネル母材の一方面側から行うのに伴って、両初期クラックを共に進展させることで、切断工程を実行することに特徴付けられる。 The present invention, which was created to solve the above problems, includes a first glass mother substrate provided with a first glass substrate in each region partitioned by a planned cutting line, and a first glass substrate facing each region. By having a second glass mother substrate provided with two glass substrates and a built-in member incorporated so as to be interposed between the first glass substrate and the second glass substrate in each region, the first in each region A panel base material including a glass substrate, a second glass substrate, and a panel including a built-in member as a component, and a panel manufacturing method including a cutting step of cutting the panel base material along a planned cutting line. Including an initial crack forming step for forming an initial crack at an end located on one end side of the planned cutting line in each of the first glass mother substrate and the second glass mother substrate, and to be cut into a panel base material Le along the line Heating by Heather irradiation, and, with the cooling by refrigerant to follow this to perform the one side of the panel base material, by progress together both initial crack, characterized in performing the cutting step.
 このような方法によれば、切断工程の実行時において、パネル母材への切断予定線に沿ったレーザー照射による加熱、及び、これに追随する冷媒による冷却を、パネル母材の一方面側から行う。そのため、第一ガラス母基板と第二ガラス母基板とのうち、レーザーの照射元側に位置する母基板(以下、照射元側母基板と表記する)には、温度勾配が生じて熱応力が発生する。そして、この熱応力によって初期クラックが切断予定線に沿って進展する。このとき、照射元側母基板のみでなく、レーザーの照射先側に位置する母基板(以下、照射先側母基板と表記する)においても、初期クラックを切断予定線に沿って進展させることが可能である。このような作用が得られるのは、以下のような理由によるものと想定される。すなわち、照射元側母基板と照射先側母基板との間には組込部材が介在している。この組込部材の介在により、照射元側母基板に発生した熱応力が組込部材を介して照射先側母基板に伝播すると共に、この伝播した応力が照射先側母基板において初期クラックを進展させているものと想定される。これにより、共に進展する両初期クラックによって両母基板が切断され、パネル母材が切断される。以上のように、この方法では、切断予定線に沿ったレーザー照射による加熱、及び、これに追随する冷媒による冷却を一方面側から行えば、これに伴ってパネル母材(第一ガラス母基板、及び第二ガラス母基板)を切断することができる。そのため、低コストで且つ簡易にパネル母材を切断することが可能となる。 According to such a method, at the time of performing the cutting step, heating by laser irradiation along the planned cutting line to the panel base material, and cooling by the refrigerant that follows this are performed from one side of the panel base material. Do. Therefore, among the first glass mother substrate and the second glass mother substrate, the mother substrate located on the laser irradiation source side (hereinafter referred to as the irradiation source side mother substrate) has a temperature gradient and thermal stress is generated. appear. Then, the initial crack propagates along the planned cutting line due to the thermal stress. At this time, not only the irradiation source side mother substrate but also the mother substrate located on the laser irradiation destination side (hereinafter referred to as the irradiation destination side mother substrate) can propagate the initial crack along the planned cutting line. Is possible. It is assumed that such an effect is obtained for the following reason. That is, the built-in member is interposed between the irradiation source side mother board and the irradiation destination side mother board. Due to the interposition of this built-in member, the thermal stress generated in the irradiation-source side mother board propagates to the irradiation-destination-side mother board through the built-in member, and this propagated stress propagates the initial crack in the irradiation-destination-side mother board. It is assumed that As a result, both base substrates are cut by both initial cracks that propagate together, and the panel base material is cut. As described above, in this method, if heating by laser irradiation along the planned cutting line and cooling by the refrigerant that follows this are performed from one side, a panel base material (first glass base substrate) is attached accordingly. , And the second glass mother substrate). Therefore, it becomes possible to cut the panel base material easily at low cost.
 上記の方法において、初期クラック形成工程を、スクライブホイールを転動させることで実行してもよい。 In the above method, the initial crack forming step may be performed by rolling a scribe wheel.
 このようにすれば、初期クラック形成工程を簡便、且つ迅速に実行することができる。 In this way, the initial crack formation process can be performed easily and quickly.
 上記の方法において、第一ガラス母基板における切断予定線の一方端側に位置する端部(以下、第一端部と表記する)と、第二ガラス母基板における切断予定線の一方端側に位置する端部(以下、第二端部と表記する)とを、切断予定線が延びる方向にずらして位置させることが好ましい。 In the above method, an end portion (hereinafter, referred to as a first end portion) located on one end side of the planned cutting line in the first glass mother substrate and a first end side of the planned cutting line in the second glass mother substrate It is preferable that the end portion (hereinafter referred to as the second end portion) positioned is shifted and positioned in the direction in which the planned cutting line extends.
 このようにすれば、第一端部と第二端部とのうち、一方が他方から食み出した状態となる。これにより、初期クラック形成工程において、単一のスクライブホイールを切断予定線の一方端側から他方端側、或いは、他方端側から一方端側へと一度だけ転動させることのみで、両初期クラックを連続的に形成することが可能となる。 In this way, one of the first end and the second end is in a state of protruding from the other. Thus, in the initial crack formation process, both initial cracks can be obtained by rolling a single scribe wheel only once from one end side of the planned cutting line to the other end side or from the other end side to the one end side. Can be formed continuously.
 上記の方法において、第一端部と第二端部とがずれた長さを、0.2mm~5mmとすることが好ましい。 In the above method, it is preferable that the length of deviation between the first end and the second end is 0.2 mm to 5 mm.
 第一端部と第二端部とのうち、食み出した側の端部について、その食み出した長さを0.2mm以上とすれば、食み出した側の端部上でスクライブホイールが転動するのに十分な長さを確保することができる。従って、食み出した側の端部に対して好適に初期クラックを形成することが可能となる。また、食み出した長さを5mm以下とすれば、本来的にはパネル母材に不要な部位(初期クラックを形成するために設ける部位)が増加することを可及的に防止できるため、不当な製造コストの高騰を回避することが可能となる。これらのことから、第一端部と第二端部とがずれた長さを、0.2mm~5mmとすれば、好適に初期クラックを形成できると共に、不当な製造コストの高騰を回避することが可能である。 Of the first end portion and the second end portion, for the end portion that protrudes, if the length that protrudes is 0.2 mm or more, scribe on the end portion that protrudes It is possible to ensure a sufficient length for the wheel to roll. Therefore, it is possible to suitably form an initial crack with respect to the end portion on the protruding side. In addition, if the protruding length is 5 mm or less, it is possible to prevent as much as possible an increase in the number of parts that are inherently unnecessary in the panel base material (parts provided to form initial cracks). It is possible to avoid an unreasonable increase in manufacturing costs. From these facts, if the length of the first end portion and the second end portion is shifted to 0.2 mm to 5 mm, initial cracks can be suitably formed, and an unreasonable increase in manufacturing cost can be avoided. Is possible.
 上記の方法において、スクライブホイールを、切断予定線の他方端側から一方端側へと向かう方向に転動させることで、初期クラック形成工程を実行することが好ましい。 In the above method, it is preferable to perform the initial crack formation step by rolling the scribe wheel in a direction from the other end side to the one end side of the planned cutting line.
 このようにすれば、初期クラック形成工程において、スクライブホイールはパネル母材の内側から外周端へと向かって転動することになる。これにより、両初期クラックを形成するにあたって、転動するスクライブホイールが、第一端部や第二端部へと乗り上げるような事態が生じ得ない。そのため、乗り上げ時の衝撃によって、第一端部や第二端部が不当に傷付くことを回避することができる。 In this way, in the initial crack formation step, the scribe wheel rolls from the inner side of the panel base material toward the outer peripheral end. Thereby, in forming both initial cracks, a situation in which the rolling scribe wheel rides on the first end and the second end cannot occur. Therefore, it is possible to avoid the first end portion and the second end portion from being unduly damaged by an impact at the time of riding.
 上記の方法において、初期クラック形成工程を、パルスレーザーを照射することによって実行してもよい。 In the above method, the initial crack formation step may be performed by irradiating a pulse laser.
 通常、第一ガラス母基板と第二ガラス母基板との間に形成される隙間は極めて狭い。このため、第一端部と第二端部とが、切断予定線が延びる方向にずれて位置していない場合(パネル母材を平面視で視たときに、第一端部と第二端部とが重なっている場合)に、スクライブホイールを両母基板の間に進入させて初期クラックを形成しようとしても、その実行が難しいことがある。しかしながら、パルスレーザーによれば、第一端部と第二端部とがずれて位置しているか否かに拘らず、当該レーザーを集光させた箇所に初期クラックを形成することが可能である。これにより、所望の箇所に両初期クラックを確実に形成することができる。 Usually, the gap formed between the first glass mother substrate and the second glass mother substrate is extremely narrow. For this reason, when the first end portion and the second end portion are not shifted and positioned in the direction in which the planned cutting line extends (when the panel base material is viewed in a plan view, the first end portion and the second end portion Even if an attempt is made to form an initial crack by inserting a scribe wheel between the two mother substrates in a case where the portion overlaps the portion, it may be difficult to execute. However, according to the pulse laser, it is possible to form an initial crack at a spot where the laser is condensed regardless of whether the first end and the second end are shifted from each other. . Thereby, both initial cracks can be reliably formed in a desired location.
 上記の方法において、切断工程におけるレーザー照射の条件を、第一ガラス母基板の厚みと第二ガラス母基板の厚みとの和以上の厚みを有するガラス板に対し、レーザー照射による加熱、及び、これに追随する冷媒による冷却を行うことで、ガラス板の端部に形成された初期クラックを進展させて切断する際の条件とすることが好ましい。 In the above method, the laser irradiation conditions in the cutting step are the heating by laser irradiation on a glass plate having a thickness equal to or greater than the thickness of the first glass mother substrate and the second glass mother substrate, and this It is preferable that the initial crack formed at the end portion of the glass plate is advanced to be cut and cut by cooling with a refrigerant that follows.
 このようにすれば、好適にパネル母材を切断することが可能となる。 In this way, the panel base material can be suitably cut.
 上記の方法において、第一ガラス母基板、及び第二ガラス母基板の厚みを10μm~300μmとすることが好ましい。 In the above method, the thickness of the first glass mother substrate and the second glass mother substrate is preferably 10 μm to 300 μm.
 このようにすれば、第一ガラス母基板、及び第二ガラス母基板の厚みが十分に薄いため、パネル母材の切断時に両ガラス母基板が破損することを防止できると共に、パネル母材を切断しやすくなる。 In this way, the thickness of the first glass base substrate and the second glass base substrate is sufficiently thin, so that both glass base substrates can be prevented from being damaged when the panel base material is cut, and the panel base material is cut. It becomes easy to do.
 上記の方法において、第一ガラス母基板と第二ガラス母基板との間に形成される隙間の幅を0.1μm~20μmとすることが好ましい。 In the above method, the width of the gap formed between the first glass mother substrate and the second glass mother substrate is preferably 0.1 μm to 20 μm.
 このようにすれば、さらにパネル母材を切断しやすくなる。これは組込部材の厚みが薄くなることで、照射元側母基板に発生した熱応力が、当該組込部材を介して照射先側母基板に伝播しやすくなるためと想定される。 This makes it easier to cut the panel base material. It is assumed that this is because the thermal stress generated in the irradiation source side mother board is easily propagated to the irradiation destination side mother board through the built-in member because the thickness of the built-in member is reduced.
 以上のように、本発明によれば、パネル母材を切断することにより、個々のパネルを切り出して製造する場合に、低コストで且つ簡易なパネル母材の切断が可能となる。 As described above, according to the present invention, by cutting the panel base material, it is possible to cut the panel base material at low cost and easily when individual panels are cut out and manufactured.
液晶パネル母材を示す斜視図である。It is a perspective view which shows a liquid crystal panel base material. 図1aに示した液晶パネル母材から第一ガラス母基板を仮想的に取り除いた状態を示す斜視図である。It is a perspective view which shows the state which removed the 1st glass base substrate virtually from the liquid crystal panel base material shown to FIG. 本発明の第一実施形態に係るパネルの製造方法における初期クラック形成工程を示す平面図である。It is a top view which shows the initial stage crack formation process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るパネルの製造方法における初期クラック形成工程を示す平面図である。It is a top view which shows the initial stage crack formation process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るパネルの製造方法における切断工程を示す平面図である。It is a top view which shows the cutting process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るパネルの製造方法における切断工程を示す平面図である。It is a top view which shows the cutting process in the manufacturing method of the panel which concerns on 1st embodiment of this invention. 図4aに示した液晶パネル母材から第一ガラス母基板を仮想的に取り除いた状態を示す平面図である。It is a top view which shows the state which removed the 1st glass mother board | substrate virtually from the liquid crystal panel base material shown to FIG. 4a. 本発明の第二実施形態に係るパネルの製造方法における初期クラック形成工程を示す縦断正面図である。It is a vertical front view which shows the initial stage crack formation process in the manufacturing method of the panel which concerns on 2nd embodiment of this invention. 本発明の第二実施形態に係るパネルの製造方法における初期クラック形成工程を示す縦断正面図である。It is a vertical front view which shows the initial stage crack formation process in the manufacturing method of the panel which concerns on 2nd embodiment of this invention. 従来におけるパネルの製造方法を示す縦断正面図である。It is a vertical front view which shows the manufacturing method of the panel in the past.
 以下、本発明の実施形態に係るパネルの製造方法について、添付の図面を参照して説明する。なお、以下に説明する実施形態では、パネル母材としての液晶パネル母材を切断することにより、個々の液晶パネルを切り出す場合を例に挙げて説明する。 Hereinafter, a panel manufacturing method according to an embodiment of the present invention will be described with reference to the accompanying drawings. In the embodiment described below, a case where individual liquid crystal panels are cut out by cutting a liquid crystal panel base material as a panel base material will be described as an example.
<第一実施形態>
 はじめに、本発明の第一実施形態に係るパネルの製造方法において、切断の対象となる液晶パネル母材について説明する。
<First embodiment>
First, a liquid crystal panel base material to be cut in the panel manufacturing method according to the first embodiment of the present invention will be described.
 図1a、図1bに示すように、液晶パネル母材1は、切断予定線2によって区画される各領域(本実施形態では二つの領域)に第一ガラス基板31を備えた第一ガラス母基板3と、各領域に第一ガラス基板31と対向する第二ガラス基板41を備えた第二ガラス母基板4と、各領域で第一ガラス基板31と第二ガラス基板41との間に介在するように組み込まれた組込部材としてのシール材5とを有している。これにより、液晶パネル母材1は、各領域に第一ガラス基板31、第二ガラス基板41、及びシール材5を構成要素として含んだパネルである液晶パネル11を備えている。すなわち、この液晶パネル母材1は、二面分の液晶パネル11を含んでいる。なお、第一ガラス母基板3(第一ガラス基板31)、及び、第二ガラス母基板4(第二ガラス基板41)は、例えば、無アルカリガラスによって構成される。 As shown in FIGS. 1a and 1b, the liquid crystal panel base material 1 includes a first glass base substrate provided with a first glass substrate 31 in each region (two regions in the present embodiment) defined by the planned cutting line 2. 3 and a second glass substrate 4 provided with a second glass substrate 41 facing the first glass substrate 31 in each region, and interposed between the first glass substrate 31 and the second glass substrate 41 in each region. And a sealing material 5 as a built-in member. Thus, the liquid crystal panel base material 1 includes the liquid crystal panel 11 that is a panel including the first glass substrate 31, the second glass substrate 41, and the sealing material 5 as components in each region. That is, the liquid crystal panel base material 1 includes two surfaces of liquid crystal panels 11. The first glass mother substrate 3 (first glass substrate 31) and the second glass mother substrate 4 (second glass substrate 41) are made of, for example, non-alkali glass.
 第一ガラス母基板3と第二ガラス母基板4との各々は、矩形の形状を有すると共に、その厚みが10μm~300μmとされている。また、両母基板3,4の間に形成される隙間(セルギャップ)の幅は0.1μm~20μmとされている。第一ガラス母基板3に含まれた各第一ガラス基板31は、BM、RGB、フォトスペーサ(いずれも図示省略)がパターン形成されたカラーフィルター基板である。一方、第二ガラス母基板4に含まれた各第二ガラス基板41は、薄膜トランジスタや透明電極(いずれも図示省略)がパターン形成されたTFT基板である。シール材5は、第一ガラス基板31、及び第二ガラス基板41の相互間に介在して両基板31,41を貼り合せると共に、両基板31,41の周縁部に沿って形成されている。そして、シール材5によって囲まれるスペース6には、液晶材料(図示省略)が封入されている。また、切断予定線2を挟んで隣り合うシール材5同士の間には、所定幅の隙間が形成されている。なお、シール材5は、例えば、紫外線硬化樹脂によって構成される。 Each of the first glass mother substrate 3 and the second glass mother substrate 4 has a rectangular shape and a thickness of 10 μm to 300 μm. The width of the gap (cell gap) formed between the mother substrates 3 and 4 is 0.1 μm to 20 μm. Each first glass substrate 31 included in the first glass mother substrate 3 is a color filter substrate on which BM, RGB, and photo spacers (all of which are not shown) are patterned. On the other hand, each second glass substrate 41 included in the second glass mother substrate 4 is a TFT substrate on which a thin film transistor and a transparent electrode (both not shown) are patterned. The sealing material 5 is interposed between the first glass substrate 31 and the second glass substrate 41 to bond the substrates 31 and 41 together, and is formed along the peripheral edge of the substrates 31 and 41. A liquid crystal material (not shown) is sealed in the space 6 surrounded by the sealing material 5. A gap having a predetermined width is formed between the sealing materials 5 adjacent to each other with the planned cutting line 2 interposed therebetween. The sealing material 5 is made of, for example, an ultraviolet curable resin.
 第一ガラス母基板3における切断予定線2の一方端2a側に位置する端部3a(以下、第一端部3aと表記する)と、第二ガラス母基板4における切断予定線2の一方端2a側に位置する端部4a(以下、第二端部4aと表記する)とは、切断予定線2が延びる方向にずれて位置している。この第一端部3aと第二端部4aとがずれた長さZは、0.2mm~5mmとされている。これにより、第二端部4aが第一端部3aから食み出した構成となっている。 An end 3a (hereinafter referred to as a first end 3a) located on one end 2a side of the planned cutting line 2 in the first glass mother substrate 3, and one end of the planned cutting line 2 in the second glass mother substrate 4 The end 4a located on the 2a side (hereinafter referred to as the second end 4a) is shifted in the direction in which the planned cutting line 2 extends. The length Z in which the first end portion 3a and the second end portion 4a are displaced is set to 0.2 mm to 5 mm. Thereby, the second end 4a protrudes from the first end 3a.
 ここで、第一ガラス母基板3、及び第二ガラス母基板4の厚みは、より好ましくは10μm~100μmとする。また、両母基板3,4の間に形成される隙間の幅は、より好ましくは0.1μm~10μm、最も好ましくは0.1μm~5μmとする。さらに、第一端部3aと第二端部4aとがずれた長さZは、より好ましくは0.5mm~3mmとする。加えて、隣り合うシール材5同士の間に形成される隙間の幅としては、1mm~5mmとすることが好ましい。このようにすれば、液晶パネル母材1が一体なものとして振る舞いやすくなる。 Here, the thicknesses of the first glass mother substrate 3 and the second glass mother substrate 4 are more preferably 10 μm to 100 μm. Further, the width of the gap formed between the mother substrates 3 and 4 is more preferably 0.1 μm to 10 μm, and most preferably 0.1 μm to 5 μm. Furthermore, the length Z in which the first end portion 3a and the second end portion 4a are displaced is more preferably 0.5 mm to 3 mm. In addition, the width of the gap formed between the adjacent sealing materials 5 is preferably 1 mm to 5 mm. If it does in this way, it will become easy to behave as the liquid crystal panel base material 1 is integrated.
 以下、第一実施形態に係るパネルの製造方法により、液晶パネル母材1を切断して、個々の液晶パネル11を切り出す態様について説明する。 Hereinafter, a mode in which the liquid crystal panel base material 1 is cut and the individual liquid crystal panels 11 are cut out by the panel manufacturing method according to the first embodiment will be described.
 図2a~図4bに示すように、このパネルの製造方法は、スクライブホイール7によって、第一ガラス母基板3の第一端部3a、及び第二ガラス母基板4の第二端部4aに、それぞれ初期クラック8,9を形成する初期クラック形成工程(図2a、図2b)と、液晶パネル母材1への切断予定線2に沿ったレーザー照射による加熱、及び、これに追随する冷媒による冷却を、当該液晶パネル母材1の上面側から行うのに伴って、両初期クラック8,9を共に進展させ、液晶パネル母材1を切断する切断工程(図3、図4a、図4b)とを含んでいる。 As shown in FIGS. 2a to 4b, the method for manufacturing this panel is performed by the scribe wheel 7 on the first end 3a of the first glass mother substrate 3 and the second end 4a of the second glass mother substrate 4. An initial crack forming step (FIGS. 2a and 2b) for forming initial cracks 8 and 9, respectively, heating by laser irradiation along the planned cutting line 2 to the liquid crystal panel base material 1, and cooling by a refrigerant following this Is performed from the upper surface side of the liquid crystal panel base material 1, and both the initial cracks 8 and 9 are developed to cut the liquid crystal panel base material 1 (FIGS. 3, 4a, and 4b); Is included.
 初期クラック形成工程では、図2aに白抜き矢印で示すように、単一のスクライブホイール7を、切断予定線2の他方端2b側から一方端2a側へと向かう方向に一度だけ転動させる。すなわち、単一のスクライブホイール7を、液晶パネル母材1の内側から外周端へと向かって一度だけ転動させる。ここで、スクライブホイール7を転動させる距離は、1mm~10mmとすることが好ましい。このとき、スクライブホイール7は、第一端部3a上を転動して初期クラック8を形成した後、第一端部3aから第二端部4aへと降下し、第二端部4a上を転動して初期クラック9を形成する。なお、スクライブホイール7を第一端部3a、及び第二端部4aに押し当てる圧力を一定に保持すれば、両初期クラック8,9を形成する上で好適である。これにより、図2bに示すように、第一端部3aへの初期クラック8の形成と、第二端部4aへの初期クラック9の形成とが連続的に行われる。なお、本実施形態においては、両初期クラック8,9をいずれも第一端部3a、第二端部4aにおける上面側に形成している。 In the initial crack formation step, as shown by the white arrow in FIG. 2a, the single scribe wheel 7 is rolled only once in the direction from the other end 2b side of the planned cutting line 2 to the one end 2a side. That is, the single scribe wheel 7 is rolled only once from the inner side of the liquid crystal panel base material 1 toward the outer peripheral end. Here, the distance for rolling the scribe wheel 7 is preferably 1 mm to 10 mm. At this time, the scribe wheel 7 rolls on the first end portion 3a to form the initial crack 8, and then descends from the first end portion 3a to the second end portion 4a, and on the second end portion 4a. Roll to form an initial crack 9. In addition, it is suitable when forming both the initial cracks 8 and 9 if the pressure which presses the scribe wheel 7 against the 1st end part 3a and the 2nd end part 4a is kept constant. Thereby, as shown in FIG. 2b, the formation of the initial crack 8 in the first end portion 3a and the formation of the initial crack 9 in the second end portion 4a are continuously performed. In the present embodiment, both initial cracks 8 and 9 are formed on the upper surface side of the first end portion 3a and the second end portion 4a.
 切断工程では、図3に示すように、液晶パネル母材1に対して、レーザー照射によって加熱された加熱部10と、冷媒(例えば、ミスト状にした水等)の噴射によって冷却された冷却部12とを隣接させて形成する。なお、本実施形態では、レーザー照射、及び冷媒の噴射を液晶パネル母材1の上面側からのみ行っている。ここで、レーザー照射の条件は、第一ガラス母基板3の厚みと第二ガラス母基板4の厚みとの和以上の厚みを有するガラス板に対し、レーザー照射による加熱、及び、これに追随する冷媒による冷却を行うことで、ガラス板の端部に形成された初期クラックを進展させて切断する際の条件とする。つまり、両母基板3,4の厚みの和以上の厚みを有するガラス板をレーザー割断によって切断する際の条件としている。なお、レーザー照射の条件を、両母基板3,4の厚みの和の1.1倍~2.1倍の厚みを有するガラス板をレーザー割断によって切断する際の条件としてもよい。また、レーザー照射の条件を、両母基板3,4の厚みの和の1.4倍~2.0倍の厚みを有するガラス板をレーザー割断によって切断する際の条件としてもよい。 In the cutting step, as shown in FIG. 3, the liquid crystal panel base material 1 is heated by laser irradiation, and the cooling unit is cooled by jetting a coolant (for example, mist-like water). 12 are formed adjacent to each other. In the present embodiment, laser irradiation and refrigerant injection are performed only from the upper surface side of the liquid crystal panel base material 1. Here, the conditions of laser irradiation follow the heating by laser irradiation to a glass plate having a thickness equal to or more than the sum of the thickness of the first glass mother substrate 3 and the thickness of the second glass mother substrate 4, and follow this. By performing the cooling with the refrigerant, the initial crack formed at the end of the glass plate is caused to be a condition for cutting. That is, it is set as the conditions at the time of cut | disconnecting the glass plate which has the thickness more than the sum of the thickness of both mother board | substrates 3 and 4 by laser cutting. The laser irradiation condition may be a condition for cutting a glass plate having a thickness 1.1 to 2.1 times the sum of the thicknesses of both mother substrates 3 and 4 by laser cleaving. The laser irradiation condition may be a condition for cutting a glass plate having a thickness 1.4 to 2.0 times the sum of the thicknesses of both mother substrates 3 and 4 by laser cutting.
 そして、図3に白抜き矢印で示すように、加熱部10及び冷却部12を、切断予定線2の一方端2a側から他方端2b側に向かって移動させる。この加熱部10及び冷却部12の形成は、まず、第一端部3aから食み出した第二端部4aのみに対して行われる。そして、加熱部10と冷却部12とによって生じた温度勾配が熱応力を発生させると共に、この熱応力が第二端部4aに形成された初期クラック9を切断予定線2に沿って進展させる。 And as shown by the white arrow in FIG. 3, the heating unit 10 and the cooling unit 12 are moved from the one end 2a side of the planned cutting line 2 toward the other end 2b side. The formation of the heating unit 10 and the cooling unit 12 is first performed only on the second end 4a protruding from the first end 3a. The temperature gradient generated by the heating unit 10 and the cooling unit 12 generates thermal stress, and the thermal stress propagates the initial crack 9 formed in the second end portion 4 a along the planned cutting line 2.
 加熱部10及び冷却部12が、第二端部4aを通過し終えると、図4aに示すように、加熱部10及び冷却部12が、液晶パネル母材1の構成要素である第一ガラス母基板3と第二ガラス母基板4とのうち、液晶パネル母材1の上面側(レーザーの照射元側)に位置する第一ガラス母基板3に形成されていく。これにより、熱応力が第一端部3aに形成された初期クラック8を切断予定線2に沿って進展させ、第一ガラス母基板3が切断されていく。このとき、図4bに示すように、第一ガラス母基板3のみでなく、液晶パネル母材1の下面側(レーザーの照射先側)に位置する第二ガラス母基板4においても、初期クラック9が切断予定線2に沿って進展し、当該第二ガラス母基板4が切断されていく。つまり、第二端部4aを進展してきた初期クラック9が継続して進展を続ける。 When the heating unit 10 and the cooling unit 12 have passed through the second end 4a, the heating unit 10 and the cooling unit 12 are the first glass mothers that are constituent elements of the liquid crystal panel base material 1, as shown in FIG. Of the substrate 3 and the second glass mother substrate 4, the first glass mother substrate 3 positioned on the upper surface side (laser irradiation source side) of the liquid crystal panel base material 1 is formed. Thereby, the initial stress 8 formed in the first end portion 3a by the thermal stress propagates along the planned cutting line 2, and the first glass mother substrate 3 is cut. At this time, as shown in FIG. 4 b, not only the first glass mother substrate 3 but also the second glass mother substrate 4 located on the lower surface side (laser irradiation side) of the liquid crystal panel base material 1, the initial crack 9 Advances along the planned cutting line 2, and the second glass mother substrate 4 is cut. That is, the initial crack 9 that has progressed through the second end 4a continues to progress.
 このような作用が得られるのは、以下のような理由によるものと想定される。すなわち、第一ガラス母基板3と第二ガラス母基板4との間にはシール材5が介在している。このシール材5の介在により、第一ガラス母基板3に発生した熱応力がシール材5を介して第二ガラス母基板4に伝播すると共に、この伝播した応力が第二ガラス母基板4において初期クラック9を進展させているものと想定される。なお、熱応力の伝播は、第一ガラス母基板3及び第二ガラス母基板4の厚みが薄いほど、顕著になるものと想定される。これにより、両母基板3,4が切断され、液晶パネル母材1が切断される。 It is assumed that such an action is obtained for the following reason. That is, the sealing material 5 is interposed between the first glass mother substrate 3 and the second glass mother substrate 4. The thermal stress generated in the first glass mother substrate 3 is propagated to the second glass mother substrate 4 through the sealing material 5 due to the intervention of the sealing material 5, and the propagated stress is initially generated in the second glass mother substrate 4. It is assumed that the crack 9 is developed. The propagation of thermal stress is assumed to become more prominent as the first glass mother substrate 3 and the second glass mother substrate 4 are thinner. Thereby, both mother substrates 3 and 4 are cut, and the liquid crystal panel base material 1 is cut.
 以下、上記の第一実施形態に係るパネルの製造方法を採用した場合の作用・効果について説明する。 Hereinafter, the operation and effect when the panel manufacturing method according to the first embodiment is employed will be described.
 このパネルの製造方法によれば、液晶パネル母材1に対し、切断予定線2に沿ったレーザー照射による加熱、及び、これに追随する冷媒による冷却を上面側から行えば、これに伴って当該液晶パネル母材1(第一ガラス母基板3、及び第二ガラス母基板4)を切断することができる。そのため、低コストで且つ簡易に液晶パネル母材1を切断することが可能となる。なお、(1)レーザー照射の条件を、両母基板3,4の厚みの和以上の厚みを有するガラス板をレーザー割断によって切断する際の条件としたこと、(2)両母基板3,4の厚みが300μm以下であること、(3)両母基板3,4の間に形成される隙間の幅が20μm以下であることで、より液晶パネル母材1を切断しやすくなる。 According to this method for manufacturing a panel, if the liquid crystal panel base material 1 is heated by laser irradiation along the planned cutting line 2 and cooled by a refrigerant that follows this, from the upper surface side, along with this, The liquid crystal panel base material 1 (the first glass base substrate 3 and the second glass base substrate 4) can be cut. Therefore, the liquid crystal panel base material 1 can be cut easily at low cost. In addition, (1) The conditions of laser irradiation were set as the conditions at the time of cutting | disconnecting the glass plate which has the thickness more than the sum of the thickness of both mother substrates 3 and 4 by laser cleaving, (2) Both mother substrates 3 and 4 Is 3 μm or less, and (3) the width of the gap formed between the two base substrates 3 and 4 is 20 μm or less, the liquid crystal panel base material 1 can be more easily cut.
 また、液晶パネル母材1において、第一端部3aと第二端部4aとが切断予定線2が延びる方向にずれて位置し、第一端部3aから第二端部4aが食み出している。そのため、初期クラック形成工程において、単一のスクライブホイール7を切断予定線2の他方端2b側から一方端2a側へと一度だけ転動させることのみで、両初期クラック8,9を連続的に形成することができる。 Further, in the liquid crystal panel base material 1, the first end portion 3a and the second end portion 4a are shifted from each other in the direction in which the planned cutting line 2 extends, and the second end portion 4a protrudes from the first end portion 3a. ing. Therefore, in the initial crack formation step, the initial scribe wheel 7 is continuously rolled by rolling the single scribe wheel 7 only once from the other end 2b side of the planned cutting line 2 to the one end 2a side. Can be formed.
 さらに、第一端部3aと第二端部4aとがずれた長さZを0.2mm~5mmとしたことで、以下のような効果をも得ることができる。すなわち、第二端部4a上でスクライブホイール7が転動するのに十分な長さを確保することが可能となると共に、本来的には液晶パネル母材1に不要な部位(初期クラック9を形成するために設ける部位)が増加することを可及的に防止でき、不当な製造コストの高騰を回避することが可能となる。なお、これらの効果は、第一端部3aと第二端部4aとがずれた長さZを0.5mm~3mmの範囲内とすることで、より高められる。 Furthermore, the following effects can also be obtained by setting the length Z at which the first end portion 3a and the second end portion 4a are shifted to 0.2 mm to 5 mm. That is, it becomes possible to secure a sufficient length for the scribe wheel 7 to roll on the second end portion 4a, and an unnecessary portion (initial crack 9 is originally formed in the liquid crystal panel base material 1). It is possible to prevent as much as possible the number of parts to be formed to increase, and to avoid an unreasonable increase in manufacturing cost. These effects can be further enhanced by setting the length Z in which the first end portion 3a and the second end portion 4a are displaced within the range of 0.5 mm to 3 mm.
 加えて、このパネルの製造方法では、スクライブホイール7を、切断予定線2の他方端2b側から一方端2a側へと向かう方向に転動させている。これにより、スクライブホイール7は、液晶パネル母材1の内側から外周端へと向かって転動する。従って、両初期クラック8,9を形成するにあたって、転動するスクライブホイール7が、第一端部3aや第二端部4aへと乗り上げるような事態が生じ得ない。そのため、乗り上げ時の衝撃によって、第一端部3aや第二端部4aが不当に傷付くことを回避することができる。 In addition, in this panel manufacturing method, the scribe wheel 7 is rolled in a direction from the other end 2b side of the planned cutting line 2 toward the one end 2a side. Thereby, the scribe wheel 7 rolls from the inner side of the liquid crystal panel base material 1 toward the outer peripheral end. Therefore, when forming both the initial cracks 8 and 9, the rolling scribe wheel 7 cannot run up to the first end 3a or the second end 4a. For this reason, it is possible to avoid the first end portion 3a and the second end portion 4a from being unduly damaged by an impact at the time of riding.
 以下、上記の第一実施形態に係るパネルの製造方法の具体例を一つ挙げる。 Hereinafter, one specific example of the manufacturing method of the panel according to the first embodiment will be given.
 まず、日本電気硝子社製のガラス基板(OA-10G)を二枚準備した。次に、二枚のガラス基板の各々に二面分の透明電極等をパターン形成することで、それぞれ第一ガラス母基板3、第二ガラス母基板4とした。なお、両母基板3,4の厚みは、いずれも100μmである。次に、両母基板3,4を二面分のシール材5を挟んで貼り合せると共に、シール材5で囲まれるスペース6の各々に液晶材料を封入し、二面分の液晶パネル11を含んだ液晶パネル母材1を作製した。このとき、両母基板3,4の間に形成される隙間(セルギャップ)の幅が9μmとなるようにした。なお、液晶パネル母材1は、下記の表1に示すように、第一端部3aと第二端部4aとがずれた長さZが相互に異なる七種を作製した。 First, two glass substrates (OA-10G) manufactured by Nippon Electric Glass Co., Ltd. were prepared. Next, a transparent glass or the like for two surfaces was formed on each of the two glass substrates to form a first glass mother substrate 3 and a second glass mother substrate 4, respectively. The thicknesses of both mother substrates 3 and 4 are 100 μm. Next, the two mother boards 3 and 4 are bonded together with the sealing material 5 for two surfaces interposed therebetween, and a liquid crystal material is sealed in each of the spaces 6 surrounded by the sealing material 5 to include the liquid crystal panel 11 for two surfaces. A liquid crystal panel base material 1 was prepared. At this time, the width of the gap (cell gap) formed between the mother substrates 3 and 4 was set to 9 μm. In addition, as shown in Table 1 below, seven types of liquid crystal panel base materials 1 having different lengths Z from which the first end portion 3a and the second end portion 4a were shifted were produced.
 次に、七種の液晶パネル母材1の各々について、スクライブホイール7(ダイヤモンドチップ)を、切断予定線2の他方端2b側から一方端2a側へと向かう方向に転動させ、両初期クラック8,9を形成した。最後に、各液晶パネル母材1に対し、レーザー照射による加熱、及び、これに追随させたミスト水の噴射による冷却を行うことで、切断予定線2の一方端2a側から他方端2b側に向かって、各液晶パネル母材1の切断を試みた。レーザー照射の条件、及びミスト水の噴射の条件、及び、両初期クラック8,9の形成条件は、各液晶パネル母材1の切断に際して共通しており、以下のとおりである。レーザーの種類:CO2レーザー、レーザーの波長:10.6μm、レーザーの走査速度:25mm/s、レーザーの出力:15W、ミスト水の噴射圧力:0.06MPa、ミスト水の流量:0.4ml/min、スクライブホイール7の直径:3mm、スクライブホイール7の転動速度:10mm/s。 Next, for each of the seven types of liquid crystal panel base material 1, the scribe wheel 7 (diamond chip) is rolled in the direction from the other end 2b side to the one end 2a side of the planned cutting line 2 to thereby form both initial cracks. 8, 9 were formed. Finally, each liquid crystal panel base material 1 is heated by laser irradiation and cooled by spraying mist water that follows the liquid crystal panel base material 1, so that one end 2 a side of the planned cutting line 2 is changed from the other end 2 b side. The cutting of each liquid crystal panel base material 1 was attempted. The conditions for laser irradiation, the conditions for jetting mist water, and the conditions for forming both initial cracks 8 and 9 are common when cutting the liquid crystal panel base material 1, and are as follows. Laser type: CO2 laser, laser wavelength: 10.6 μm, laser scanning speed: 25 mm / s, laser output: 15 W, mist water injection pressure: 0.06 MPa, mist water flow rate: 0.4 ml / min The diameter of the scribe wheel 7 is 3 mm, and the rolling speed of the scribe wheel 7 is 10 mm / s.
 上記の条件の下で各液晶パネル母材1の切断を試みたところ、下記の表1のような結果となった。ここで、表1に示す切断性について、「◎」は、液晶パネル母材1を良好に切断できたことを表し、「○」は、液晶パネル母材1を切断できたことを表し、「×」は、液晶パネル母材1を切断できなかったことを表している。 When cutting each liquid crystal panel base material 1 under the above conditions, the results shown in Table 1 below were obtained. Here, with respect to the cutting properties shown in Table 1, “◎” represents that the liquid crystal panel base material 1 could be cut well, “◯” represents that the liquid crystal panel base material 1 could be cut, and “ "X" represents that the liquid crystal panel base material 1 could not be cut.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 表1に示す結果から、第一端部3aと第二端部4aとがずれた長さZが0.2mm以上である場合には、液晶パネル母材1を切断することができ、長さZが0.5mm以上である場合には、液晶パネル母材1を良好に切断できたことが分かる。なお、切断が不可能であったZ=0.186mmの液晶パネル母材1については、第二ガラス母基板4を切断できなかった。しかしながら、この液晶パネル母材1においても、上記のスクライブホイール7に加えて、サンドペーパーを用いて第二ガラス母基板4に別途初期クラックを形成することで、第一ガラス母基板3と同時に第二ガラス母基板4の切断も可能となり、液晶パネル母材1を切断できた。 From the results shown in Table 1, when the length Z where the first end portion 3a and the second end portion 4a are shifted is 0.2 mm or more, the liquid crystal panel base material 1 can be cut, and the length When Z is 0.5 mm or more, it turns out that the liquid crystal panel base material 1 was cut | disconnected favorably. In addition, about the liquid crystal panel base material 1 of Z = 0.186mm which was impossible to cut | disconnect, the 2nd glass base substrate 4 was not able to be cut | disconnected. However, in the liquid crystal panel base material 1, in addition to the scribe wheel 7 described above, a separate initial crack is formed on the second glass base substrate 4 using sandpaper, so The two-glass base substrate 4 can be cut, and the liquid crystal panel base material 1 can be cut.
<第二実施形態>
 以下、本発明の第二実施形態に係るパネルの製造方法について説明する。なお、この第二実施形態の説明において、上記の第一実施形態で既に説明した要素と同一の要素については、第二実施形態を説明するための図面、及び説明文に同一の符号を付与することで重複する説明を省略している。また、第二実施形態では、上記の第一実施形態と相違する点についてのみ説明する。
<Second embodiment>
Hereinafter, the manufacturing method of the panel which concerns on 2nd embodiment of this invention is demonstrated. In the description of the second embodiment, the same reference numerals are assigned to the same elements as those already described in the first embodiment in the drawings and the explanatory text for describing the second embodiment. Therefore, duplicate explanations are omitted. In the second embodiment, only differences from the first embodiment will be described.
 第二実施形態に係るパネルの製造方法が、上記の第一実施形態に係るパネルの製造方法と相違している点は、切断の対象となる液晶パネル母材1において、第一端部3aと第二端部4aとが、切断予定線2が延びる方向において同一の位置にあり、両者3a,4aがずれて位置していない(上記の第一実施形態において、Z=0mm)点と、図5a、図5bに示すように、初期クラック形成工程において、両初期クラック8,9をパルスレーザーとしてのピコ秒レーザー13の照射によって形成している点との二点である。 The panel manufacturing method according to the second embodiment is different from the panel manufacturing method according to the first embodiment described above in the liquid crystal panel base material 1 to be cut in the first end 3a. The second end 4a is located at the same position in the direction in which the planned cutting line 2 extends, and the points 3a and 4a are not shifted from each other (Z = 0 mm in the first embodiment), As shown in FIGS. 5a and 5b, in the initial crack formation step, both initial cracks 8 and 9 are formed by irradiation with a picosecond laser 13 as a pulse laser.
 本実施形態においては、第一端部3aへの初期クラック8の形成時、及び第二端部4aへの初期クラック9の形成時には、これら端部3a,4aの上面にピコ秒レーザー13を集光させている(上面をピコ秒レーザー13の焦点としている)。なお、両初期クラック8,9の形成は、ピコ秒レーザー13に代えて、パルスレーザーとしてフェムト秒レーザーを照射することで実行してもよい。ここで、パルスレーザーの波長に関しては、第一ガラス母基板3、第二ガラス母基板4の吸収率や、パルスレーザーのパルス幅に応じて、種々の波長の中から適宜選択すればよい。 In the present embodiment, when the initial crack 8 is formed on the first end portion 3a and when the initial crack 9 is formed on the second end portion 4a, the picosecond laser 13 is collected on the upper surfaces of the end portions 3a and 4a. It is illuminated (the top surface is the focal point of the picosecond laser 13). The formation of both initial cracks 8 and 9 may be performed by irradiating a femtosecond laser as a pulse laser instead of the picosecond laser 13. Here, the wavelength of the pulse laser may be appropriately selected from various wavelengths according to the absorption rate of the first glass mother substrate 3 and the second glass mother substrate 4 and the pulse width of the pulse laser.
 以下、上記の第二実施形態に係るパネルの製造方法を採用した場合の作用・効果について説明する。 Hereinafter, the operation and effect when the panel manufacturing method according to the second embodiment is employed will be described.
 通常、第一ガラス母基板3と第二ガラス母基板4との間に形成される隙間(セルギャップ)は極めて狭い。このため、第一端部3aと第二端部4aとが、切断予定線2が延びる方向にずれて位置していない場合に、スクライブホイール7を両母基板3,4の間に進入させて初期クラック9を形成しようとしても、その実行が難しいことがある。しかしながら、ピコ秒レーザー13によれば、第一端部3aと第二端部4aとがずれて位置しているか否かに拘らず、ピコ秒レーザー13を集光させた箇所に、それぞれ初期クラック8,9を形成することが可能である。これにより、所望の箇所に両初期クラック8,9を確実に形成することができる。 Usually, the gap (cell gap) formed between the first glass mother substrate 3 and the second glass mother substrate 4 is extremely narrow. For this reason, when the first end portion 3a and the second end portion 4a are not shifted in the direction in which the planned cutting line 2 extends, the scribe wheel 7 is caused to enter between both the mother substrates 3 and 4. Even if the initial crack 9 is to be formed, the execution may be difficult. However, according to the picosecond laser 13, regardless of whether or not the first end portion 3a and the second end portion 4a are shifted from each other, the initial cracks are respectively generated at the locations where the picosecond laser 13 is condensed. 8, 9 can be formed. Thereby, both the initial cracks 8 and 9 can be reliably formed in a desired location.
 ここで、本発明に係るパネルの製造方法は、上記の各実施形態で説明した態様に限定されるものではない。例えば、上記の各実施形態では、二面分の液晶パネルを含んだ液晶パネル母材を切断することにより、個々の液晶パネルを切り出す態様となっているが、もちろん三面分以上の液晶パネルを含んだ液晶パネル母材を切断する場合にも、本発明に係るパネルの製造方法を適用することが可能である。 Here, the panel manufacturing method according to the present invention is not limited to the mode described in each of the above embodiments. For example, in each of the above-described embodiments, an individual liquid crystal panel is cut out by cutting a liquid crystal panel base material including liquid crystal panels for two surfaces. Of course, liquid crystal panels for three or more surfaces are included. Even when the liquid crystal panel base material is cut, the panel manufacturing method according to the present invention can be applied.
 また、上記の第一実施形態では、初期クラック形成工程において、切断予定線の他方端側から一方端側へとスクライブホイールを転動させることで、両初期クラックを形成する態様となっているが、一方端側から他方端側へとスクライブホイールを転動させ、両初期クラックを形成してもよい。すなわち、スクライブホイールを、液晶パネル母材の外周端から内側へと向かって転動させることで、両初期クラックを形成してもよい。さらに、上記の第一実施形態では、単一のスクライブホイールを一度だけ転動させることで、両初期クラックを連続的に形成しているが、個々の初期クラックを別々に形成してもよい。 Moreover, in said 1st embodiment, although it becomes the aspect which forms both initial stage cracks by rolling a scribe wheel from the other end side of a planned cutting line to the one end side in an initial crack formation process. Alternatively, both initial cracks may be formed by rolling a scribe wheel from one end side to the other end side. That is, both initial cracks may be formed by rolling the scribe wheel inward from the outer peripheral end of the liquid crystal panel base material. Further, in the first embodiment, both initial cracks are continuously formed by rolling a single scribe wheel only once. However, individual initial cracks may be formed separately.
 また、上記の第二実施形態では、ピコ秒レーザーやフェムト秒レーザー等のパルスレーザーを照射することで、両初期クラックを形成する態様となっているが、この限りではない。パルスレーザーに代えて、UVレーザーをはじめとする短波長レーザーを照射することで、両初期クラックを形成してもよい。なお、上記の第一実施形態におけるスクライブホイール、第二実施形態におけるパルスレーザーに代えて、例えば、サンドペーパー等を用いて両初期クラックを形成してもよい。 In the second embodiment described above, both initial cracks are formed by irradiating a pulse laser such as a picosecond laser or a femtosecond laser, but this is not restrictive. Instead of the pulse laser, both initial cracks may be formed by irradiating with a short wavelength laser such as a UV laser. In addition, it may replace with the scribe wheel in said 1st embodiment, and the pulse laser in 2nd embodiment, and may form both initial stage cracks using a sandpaper etc., for example.
 また、上記の各実施形態では、初期クラック形成工程において、第一端部、及び第二端部の双方に対し、その上面側に初期クラックを形成する態様となっているが、この限りではない。第一端部、及び第二端部のいずれにおいても、上面側、下面側のどちらに初期クラックを形成してもよい。例えば、第一端部には上面側に初期クラックを形成し、第二端部には下面側に初期クラックを形成してもよい。なお、上記の第二実施形態のように、パルスレーザーの照射によって初期クラックを形成する場合には、初期クラックを第一端部、及び第二端部の上面側、下面側のいずれに形成するかに拘らず、当該レーザーを液晶パネル母材の上面側から照射してもよいし、下面側から照射してもよい(UVレーザーをはじめとする短波長レーザーを照射する場合も同じ)。さらに、上記の第二実施形態のように、第一端部と第二端部とが、切断予定線が延びる方向において同一の位置にある場合には、スクライブホイールを液晶パネル母材の厚み方向に沿って転動させることで、第一端部、及び第二端部に初期クラックを形成してもよい。 In each of the above embodiments, in the initial crack forming step, the initial crack is formed on the upper surface side of both the first end and the second end, but this is not restrictive. . In either the first end portion or the second end portion, an initial crack may be formed on either the upper surface side or the lower surface side. For example, an initial crack may be formed on the upper surface side at the first end portion, and an initial crack may be formed on the lower surface side at the second end portion. In addition, when forming an initial crack by irradiation of a pulse laser as in the second embodiment, the initial crack is formed on the first end portion and on the upper surface side and the lower surface side of the second end portion. Regardless, the laser may be irradiated from the upper surface side of the liquid crystal panel base material, or may be irradiated from the lower surface side (the same applies when irradiating a short wavelength laser such as a UV laser). Furthermore, as in the second embodiment, when the first end and the second end are at the same position in the direction in which the planned cutting line extends, the scribe wheel is disposed in the thickness direction of the liquid crystal panel base material. The initial crack may be formed at the first end portion and the second end portion by rolling along.
 また、上記の各実施形態では、切断工程において、液晶パネル母材に対して上面側からのみレーザー照射、及び、これに追随する冷媒による冷却を行う態様となっているが、これらを下面側からのみ行う態様としてもよい。さらに、上記の各実施形態では、レーザー照射の条件を、両母基板の厚みの和以上の厚みを有するガラス板をレーザー割断によって切断する際の条件としているが、必ずしもこのようにせずともよい。 Further, in each of the above embodiments, in the cutting step, the liquid crystal panel base material is irradiated with laser only from the upper surface side and cooled by the refrigerant that follows this, but these are performed from the lower surface side. It is good also as an aspect performed only. Further, in each of the above-described embodiments, the laser irradiation condition is a condition for cutting a glass plate having a thickness equal to or larger than the sum of the thicknesses of both mother substrates by laser cleaving, but this is not necessarily required.
 また、上記の各実施形態では、液晶パネル母材を切断することにより、個々の液晶パネルを切り出す態様となっているが、本発明に係るパネルの製造方法は、例えば、複数面分の有機ELパネルを含んだ有機ELパネル母材を切断することで、個々の有機ELパネルを切り出すような場合等にも、適用することが可能である。 In each of the above embodiments, the individual liquid crystal panels are cut out by cutting the liquid crystal panel base material. The panel manufacturing method according to the present invention is, for example, an organic EL for a plurality of surfaces. The present invention can also be applied to a case where individual organic EL panels are cut out by cutting an organic EL panel base material including a panel.
 1     液晶パネル母材
 11    液晶パネル
 2     切断予定線
 2a    切断予定線の一方端
 3     第一ガラス母基板
 3a    第一端部
 31    第一ガラス基板
 4     第二ガラス母基板
 4a    第二端部
 41    第二ガラス基板
 5     シール材
 7     スクライブホイール
 8,9   初期クラック
 13    ピコ秒レーザー
 
DESCRIPTION OF SYMBOLS 1 Liquid crystal panel base material 11 Liquid crystal panel 2 Planned cutting line 2a One end of the planned cutting line 3 First glass mother substrate 3a First end 31 First glass substrate 4 Second glass mother substrate 4a Second end 41 Second glass Substrate 5 Sealing material 7 Scribe wheel 8, 9 Initial crack 13 Picosecond laser

Claims (9)

  1.  切断予定線によって区画される各領域に第一ガラス基板を備えた第一ガラス母基板と、前記各領域に前記第一ガラス基板と対向する第二ガラス基板を備えた第二ガラス母基板と、前記各領域で前記第一ガラス基板と前記第二ガラス基板との間に介在するように組み込まれた組込部材とを有することで、前記各領域に前記第一ガラス基板、前記第二ガラス基板、及び前記組込部材を構成要素として含むパネルを備えたパネル母材について、該パネル母材を前記切断予定線に沿って切断する切断工程を含んだパネルの製造方法であって、
     前記第一ガラス母基板、及び前記第二ガラス母基板の各々における前記切断予定線の一方端側に位置する端部に、それぞれ初期クラックを形成する初期クラック形成工程を含み、
     前記パネル母材への前記切断予定線に沿ったレーザー照射による加熱、及び、これに追随する冷媒による冷却を該パネル母材の一方面側から行うのに伴って、両初期クラックを共に進展させることで、前記切断工程を実行することを特徴とするパネルの製造方法。
    A first glass mother substrate provided with a first glass substrate in each region partitioned by a planned cutting line; a second glass mother substrate provided with a second glass substrate facing the first glass substrate in each region; The first glass substrate and the second glass substrate are provided in each region by including an assembly member incorporated so as to be interposed between the first glass substrate and the second glass substrate in each region. And a panel base material provided with a panel including the built-in member as a component, a panel manufacturing method including a cutting step of cutting the panel base material along the planned cutting line,
    Including an initial crack forming step for forming an initial crack at an end located on one end side of the planned cutting line in each of the first glass mother substrate and the second glass mother substrate;
    As the panel base material is heated from the laser irradiation along the planned cutting line and cooled by the cooling medium that follows this, both initial cracks are developed together. Then, the said cutting process is performed, The manufacturing method of the panel characterized by the above-mentioned.
  2.  前記初期クラック形成工程を、スクライブホイールを転動させることで実行することを特徴とする請求項1に記載のパネルの製造方法。 2. The method for manufacturing a panel according to claim 1, wherein the initial crack forming step is performed by rolling a scribe wheel.
  3.  前記第一ガラス母基板における前記切断予定線の一方端側に位置する端部と、前記第二ガラス母基板における前記切断予定線の一方端側に位置する端部とを、前記切断予定線が延びる方向にずらして位置させたことを特徴とする請求項2に記載のパネルの製造方法。 In the first glass mother substrate, an end portion located on one end side of the planned cutting line, and an end portion located on one end side of the planned cutting line in the second glass mother substrate, the planned cutting line is The panel manufacturing method according to claim 2, wherein the panel is shifted in the extending direction.
  4.  前記第一ガラス母基板における前記切断予定線の一方端側に位置する端部と、前記第二ガラス母基板における前記切断予定線の一方端側に位置する端部とがずれた長さを、0.2mm~5mmとしたことを特徴とする請求項3に記載のパネルの製造方法。 The length of the end portion located on one end side of the planned cutting line in the first glass mother substrate and the end portion located on one end side of the planned cutting line in the second glass mother substrate are shifted, The panel manufacturing method according to claim 3, wherein the thickness is 0.2 mm to 5 mm.
  5.  前記スクライブホイールを、前記切断予定線の他方端側から一方端側へと向かう方向に転動させることで、前記初期クラック形成工程を実行することを特徴とする請求項2~4のいずれかに記載のパネルの製造方法。 5. The initial crack forming step is performed by rolling the scribe wheel in a direction from the other end side to the one end side of the planned cutting line. The manufacturing method of the panel of description.
  6.  前記初期クラック形成工程を、パルスレーザーを照射することによって実行することを特徴とする請求項1に記載のパネルの製造方法。 The method for manufacturing a panel according to claim 1, wherein the initial crack forming step is performed by irradiating a pulse laser.
  7.  前記切断工程における前記レーザー照射の条件を、
     前記第一ガラス母基板の厚みと前記第二ガラス母基板の厚みとの和以上の厚みを有するガラス板に対し、レーザー照射による加熱、及び、これに追随する冷媒による冷却を行うことで、該ガラス板の端部に形成された初期クラックを進展させて切断する際の条件としたことを特徴とする請求項1~6のいずれかに記載のパネルの製造方法。
    Conditions for the laser irradiation in the cutting step,
    A glass plate having a thickness equal to or greater than the sum of the thickness of the first glass mother substrate and the thickness of the second glass mother substrate is heated by laser irradiation, and cooled by a refrigerant that follows this, The method for producing a panel according to any one of claims 1 to 6, characterized in that the initial crack formed at the end of the glass plate is used as a condition for cutting.
  8.  前記第一ガラス母基板、及び前記第二ガラス母基板の厚みを10μm~300μmとしたことを特徴とする請求項1~7のいずれかに記載のパネルの製造方法。 The panel manufacturing method according to any one of claims 1 to 7, wherein the first glass mother substrate and the second glass mother substrate have a thickness of 10 袖 m to 300 袖 m.
  9.  前記第一ガラス母基板と前記第二ガラス母基板との間に形成される隙間の幅を0.1μm~20μmとしたことを特徴とする請求項1~8のいずれかに記載のパネルの製造方法。
     
    9. The manufacturing of a panel according to claim 1, wherein a width of a gap formed between the first glass mother substrate and the second glass mother substrate is 0.1 μm to 20 μm. Method.
PCT/JP2015/064257 2014-05-23 2015-05-19 Panel manufacturing method WO2015178358A1 (en)

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