WO2015178301A1

WO2015178301A1 - Conveyance device, and wet processing device

Info

Publication number: WO2015178301A1
Application number: PCT/JP2015/064000
Authority: WO
Inventors: 原田　吉典
Original assignee: シャープ株式会社
Priority date: 2014-05-21
Filing date: 2015-05-15
Publication date: 2015-11-26
Also published as: JP6349388B2; CN106458459A; JPWO2015178301A1

Abstract

This conveyance device is provided with: conveyance rollers (62) which extend like shafts, and which convey glass substrates along a conveyance direction; bearings (64) which support the conveyance rollers (62) such that the conveyance rollers (62) are capable of rotating around axes thereof; and a frame (66) which holds the bearings (64), is provided with a liquid accommodation part (70), and is configured such that a portion of a sliding contact area of each of the bearings (64) is exposed to the inside of the liquid accommodation part (70). A liquid is poured into the liquid accommodation part (70) to immerse, in the liquid, the portions of the sliding contact areas of the bearings (64) exposed to the inside of the liquid accommodation part (70), and dust and dirt can be washed from the sliding contact areas by the liquid inside the liquid accommodation part (70).

Description

Conveying device and wet process device

The technology disclosed in this specification relates to a transfer device and a wet process device.

Conventionally, in the manufacturing process of a liquid crystal panel which is a main component of a liquid crystal display device, a wet process device is known that performs a wet process such as a cleaning process or a resist coating process on the surface of a glass substrate while the glass substrate is transported by a transport device. ing. The transfer device provided in the wet process apparatus usually has a shaft-like transfer roller and bearing portions that are arranged at both ends of the transfer roller and rotatably support the transfer roller around its axis in the transfer direction of the glass substrate. It is set as the structure distribute | arranged along along.

In such a conveying device, sliding between the conveying roller and the bearing portion due to slip or the like during rotation of the conveying roller causes wear of the sliding contact portion of the bearing portion, and dust such as rust powder from the sliding contact portion. And dust may be generated. As a result, dust or dust generated from the sliding contact part may adhere to the surface of the glass substrate. Thus, for example, Patent Document 1 below discloses a wet process apparatus that can prevent such dust and dust generated from the bearing portion of the transport apparatus from adhering to the glass substrate.

Japanese Patent No. 3233243

(Problems to be solved by the invention)
However, in the wet process apparatus disclosed in Patent Document 1, the rotation mechanism of the transport roller is disposed in the external chamber provided outside the wet atmosphere and the exhaust unit is provided in the external chamber, thereby Prevents dust and dirt from adhering to the glass substrate. For this reason, there are problems that the rotation mechanism of the transport roller and the exhaust means are arranged in the external chamber in this way, thereby increasing the size of the apparatus as a whole and increasing the number of parts.

The technology disclosed in the present specification has been created in view of the above-described problems, and prevents dust and dirt generated from the bearing portion from adhering to the transport member while avoiding an increase in the size of the apparatus. Another object of the present invention is to provide a transfer device and a wet process device that can be suppressed.

(Means for solving the problem)
The technology disclosed in this specification includes a conveyance roller that extends in a shaft shape and conveys a conveyance member along a conveyance direction, a bearing portion that rotatably supports the conveyance roller around the axis, and the bearing. And a holding member that has a liquid storage portion and at least a part of a sliding contact portion of the bearing portion is exposed in the liquid storage portion.

In the transport device described above, by pouring a liquid such as pure water into the liquid storage part, it is possible to immerse the part exposed in the liquid storage part in the sliding contact part of the bearing part in the liquid. As a result, the liquid in the liquid storage portion functions as a lubricant for the bearing portion, and it is possible to prevent or suppress the generation of dust or dust at the sliding contact portion of the bearing portion. Further, even if dust or dust is generated at the sliding contact portion of the bearing portion, the dust or dust can be washed away from the sliding contact portion by the liquid in the liquid storage portion, and the dust or dust adheres to the transport member. This can be prevented or suppressed. Further, since the dust and the dust can be prevented from adhering to the conveying member only by providing the holding member on the holding member, the apparatus can be prevented from being enlarged. As described above, in the above conveying device, it is possible to prevent or suppress the dust generated from the sliding contact portion of the bearing portion from adhering to the conveying member while avoiding an increase in size of the device.

The bearing portion includes an annular annular portion disposed around an axis of the conveying roller, and a plurality of balls that are interposed between the conveying roller and the annular portion and are slidably supported by the annular portion. The sliding contact portion may be a portion that supports the plurality of balls in the annular portion.

According to this configuration, a specific configuration of the bearing portion and the sliding contact portion can be provided.

The liquid container may be extended in a groove shape.

According to this configuration, since the liquid poured into the liquid storage portion flows along the extending direction of the liquid storage portion, dust or dust generated at the sliding contact portion of the bearing portion due to the force of the liquid flow is removed. It can be washed off effectively.

A liquid supply unit that supplies liquid into the liquid storage unit is provided at one end in the extending direction of the liquid storage unit, and the liquid flowing through the liquid storage unit is discharged at the other end in the extending direction of the liquid storage unit. A liquid discharge part may be provided.

In this configuration, the liquid supply unit sequentially supplies new liquid into the liquid storage unit, and the liquid discharged from the surface of the bearing unit is sequentially discharged from the liquid storage unit at the liquid discharge unit. Thus, dust or dust generated at the sliding contact portion of the bearing portion can be more effectively washed away.

The liquid storage portion extends along the transport direction, with the one end disposed on the upstream side in the transport direction and the other end disposed on the downstream side in the transport direction. May be.

According to this configuration, dust or dirt generated at the sliding contact portion of the bearing portion can be sequentially flowed from the upstream side to the downstream side in the transport direction.

The transport member is a substrate, the transport rollers are arranged in parallel in the transport direction so that the extending direction thereof is orthogonal to the transport direction, and the bearing portions are respectively disposed at both ends of the transport roller. May be.

According to this configuration, it is possible to provide a specific configuration of a transfer device for transferring a substrate as a transfer member.

Another technique disclosed in the present specification relates to a wet process apparatus including the above-described transport apparatus and a wet process tank that performs a wet process on the substrate transported along the transport direction.

In a wet process such as a cleaning process or a coating process for a substrate, cleaning water is sprayed onto the surface of the substrate, and the sprayed cleaning water is circulated in the wet process tank and used again as cleaning water. For this reason, when dust, dust, or the like flows into the cleaning water, the dust, dust, or the like tends to adhere to the substrate. In the above wet process apparatus, dust and dirt are caused to flow down from the sliding contact portion of the bearing portion by the liquid in the liquid storage portion, so that it can be prevented or suppressed from flowing out into the cleaning water. As a result, it is possible to prevent or suppress dust or dirt generated from the sliding contact portion of the bearing portion in the wet process tank from adhering to the substrate. The wet process referred to in this specification is not limited to the substrate cleaning process and the substrate coating process, and includes other processes such as a dipping process for the substrate.

(The invention's effect)
According to the technology disclosed in this specification, a transport apparatus and a wet process apparatus that can prevent or suppress dust and dust generated from a bearing portion from adhering to a transport member while avoiding an increase in size of the apparatus are provided. be able to.

Schematic cross-sectional view of a cross section of a liquid crystal display device cut along the long side direction Schematic plan view of a liquid crystal panel Schematic sectional view showing the sectional structure of the liquid crystal panel The top view which shows the plane structure of the display area in the array substrate which comprises a liquid crystal panel FIG. 5 is a cross-sectional view taken along line VV in FIG. 4, showing a cross-sectional configuration of a part of the array substrate. Block diagram for explaining a processing procedure by each manufacturing apparatus for a glass substrate The side view of the conveying apparatus which concerns on Embodiment 1. Plan view of transfer device An enlarged perspective view in which the conveying device is enlarged at the downstream end in the conveying direction. Front view of bearing FIG. 11 is a cross-sectional view taken along the line XI-XI in FIG. Front view of the bearing portion in a state where pure water is poured into the liquid storage portion The front view of the bearing part of the conveying apparatus which concerns on Embodiment 2. FIG. FIG. 14 is a cross-sectional view of the XIV-XIV cross section of FIG. 13, and is a cross-sectional view of the vicinity of the bearing portion in a state where pure water is poured into the liquid storage portion Sectional drawing of the conveying apparatus which concerns on Embodiment 3. Enlarged perspective view of a part of the transport device In the examples, a table showing detection results of gate insulating film foreign matters and gate insulating film defects before and after application of the present invention. Table showing detection results of interlayer insulating film foreign matter and interlayer insulating film defect before and after application of the present invention in Examples

<Embodiment 1>
The first embodiment will be described with reference to FIGS. In the present embodiment, a cleaning device 50 (see FIG. 7) that conveys the glass substrate 30A while performing a cleaning process on the surface of the glass substrate 30A in the manufacturing process of the liquid crystal panel 11 that is a component of the liquid crystal display device 10. Illustrate. A part of each drawing shows an X-axis, a Y-axis, and a Z-axis, and each axis direction is drawn in a common direction in each drawing. 1, 3, and 5, the upper side of the figure is the upper side (front side) of the liquid crystal display device 10.

First, the configuration of the liquid crystal display device 10 and the liquid crystal panel 11 will be described. As shown in FIGS. 1 and 2, the liquid crystal display device 10 includes a liquid crystal panel 11, an IC chip 17 that is an electronic component that is mounted on the liquid crystal panel 11 and drives the liquid crystal panel 11, and the IC chip 17. A control board 19 that supplies various input signals from the outside, a flexible board 18 that electrically connects the liquid crystal panel 11 and the external control board 19, and a backlight device 14 that is an external light source that supplies light to the liquid crystal panel 11. And. In addition, the liquid crystal display device 10 includes front and back

external members

15 and 16 for housing and holding the liquid crystal panel 11 and the backlight device 14 assembled to each other. An opening 15A for visually recognizing an image displayed on the liquid crystal panel 11 is provided.

As shown in FIG. 1, the backlight device 14 includes a chassis 14A having a substantially box shape that opens toward the front side, and a light source (cold cathode tube, LED, organic EL, etc.) not shown disposed in the chassis 14A. And an optical member (not shown) arranged so as to cover the opening of the chassis 14A. The optical member has a function of converting light emitted from the light source into planar light. The light that has been planarized through the optical member is incident on the liquid crystal panel 11 and is used to display an image on the liquid crystal panel 11.

As shown in FIG. 2, the liquid crystal panel 11 has a vertically long rectangular shape as a whole, and the long side direction coincides with the Y-axis direction of each drawing, and the short side direction corresponds to the X-axis direction of each drawing. Match. In the liquid crystal panel 11, a display area A1 capable of displaying an image is arranged on the majority thereof, and no image is displayed at a position biased to one end side (the lower side in FIG. 2) in the long side direction. Area A2 is arranged. An IC chip 17 and a flexible substrate 18 are mounted on a part of the non-display area A2 by pressure-bonding via an anisotropic conductive film (not shown). In the liquid crystal panel 11, as shown in FIG. 1, a frame-shaped one-dot chain line that is slightly smaller than a color filter substrate 20 described later forms an outer shape of the display area A 1, and an area outside the one-dot chain line is It is a non-display area A2.

As shown in FIG. 3, the liquid crystal panel 11 includes a pair of

glass substrates

20 and 30 having excellent translucency, and a liquid crystal layer 11A including liquid crystal molecules that are substances whose optical characteristics change with application of an electric field. It is equipped with. The two

substrates

20 and 30 constituting the liquid crystal panel 11 are bonded together by a sealing material (not shown) while maintaining a cell gap corresponding to the thickness of the liquid crystal layer 11A. Of the two

substrates

20, 30, the front side (front side) substrate 20 is the color filter substrate 20, and the back side (back side) substrate 30 is the array substrate (an example of a circuit board) 30. As shown in FIG. 3, alignment films 11B and 11C for aligning liquid crystal molecules contained in the liquid crystal layer 11A are formed on the inner surfaces of both the

substrates

20 and 30, respectively. Further,

polarizing plates

11D and 11E are attached to the outer surface sides of the glass substrates 20A and 30A constituting both the

substrates

20 and 30, respectively.

As shown in FIG. 2, the color filter substrate 20 has a short side dimension substantially the same as that of the array substrate 30, but the long side dimension is smaller than that of the array substrate 30, and one side of the long side direction with respect to the array substrate 30. Are bonded together with their end portions (upper side shown in FIG. 2) aligned. Therefore, the color filter substrate 20 does not overlap the other end (the lower side shown in FIG. 1) of the array substrate 30 in the long side direction, and both the front and back plate surfaces are exposed to the outside. The mounting area for the IC chip 17 and the flexible substrate 18 is secured here. The glass substrate 30A constituting the array substrate 30 has the color filter substrate 20 and the polarizing plate 11E bonded to the main portion thereof, and the portion where the mounting area of the IC chip 17 and the flexible substrate 18 is secured is the color filter substrate 20 and It is not superimposed on the polarizing plate 11E.

Subsequently, the configuration in the display area A1 of the array substrate 30 and the color filter substrate 20 will be described. On the inner surface side (liquid crystal layer 11A side) of a glass substrate (an example of a substrate) 30A constituting the array substrate 30, as shown in FIGS. 3 and 4, a TFT (which is a switching element having three electrodes 32A to 32C) is provided. A large number of pixel electrodes 33 made of a transparent conductive film such as a thin film transistor (ITO) 32 and an indium film (ITO) are provided side by side. Around the TFT 32 and the pixel electrode 33, as shown in FIG. 4, a gate wiring 34 and a source wiring 35 are arranged so as to surround the grid. The gate wiring 34 and the source wiring 35 are connected to the gate electrode 32A and the source electrode 32B of the TFT 32, respectively, and the pixel electrode 33 is connected to the drain electrode 32C of the TFT 32 via a drain wiring (not shown).

Further, the array substrate 30 is provided with a capacitor wiring 36 that is parallel to the gate wiring 34 and overlaps the pixel electrode 33 in plan view. The capacitor wirings 36 are alternately arranged with the gate wirings 34 in the Y-axis direction. The gate wiring 34 is disposed between the pixel electrodes 33 adjacent in the Y-axis direction, whereas the capacitor wiring 36 is disposed at a position that substantially crosses the central portion of each pixel electrode 33 in the Y-axis direction. The end portion of the array substrate 30 is provided with a terminal portion routed from the gate wiring 34 and the capacitor wiring 36 and a terminal portion routed from the source wiring 35. Each signal or reference potential is inputted from the control board 19 shown in FIG. 1, and the drive of the TFT 32 is thereby controlled.

On the other hand, on the inner surface side (liquid crystal layer 11A side) of the glass substrate 20A constituting the color filter substrate 20, as shown in FIG. The color filters are provided side by side. The color filter is arranged such that the colored portions 22 exhibiting R (red), G (green), and B (blue) are alternately arranged along the X-axis direction. Between each coloring part 22 which comprises a color filter, the substantially lattice-shaped light-shielding part (black matrix) 23 for preventing color mixing is formed. The light shielding portion 23 is arranged so as to overlap with the gate wiring 34, the source wiring 35, and the capacitor wiring 36 on the array substrate 30 side in a plan view. A counter electrode 24 is provided on the surface of each coloring portion 22 and the light shielding portion 23 so as to face the pixel electrode 33 on the array substrate 30 side. In the liquid crystal panel 11, one display pixel, which is a display unit, is configured by the combination of the three colored portions 22 of R (red), G (green), and B (blue) and the three pixel electrodes 33 that face each other. ing.

Here, the TFT 32 which is a switching element provided on the array substrate 30 will be described in detail. As shown in FIGS. 4 and 5, the TFT 32 has a structure in which a plurality of films are stacked on the array substrate 30. Specifically, as shown in FIG. 5, the gate electrode 32A, the gate insulating film 37, the semiconductor film 38, and the source wiring 35 connected to the gate wiring 34 are sequentially connected from the lower layer side (glass substrate 30A side). A drain electrode 32C connected to the source electrode 32B and the pixel electrode 33, an interlayer insulating film 39, and a protective film 40 are stacked.

The gate electrode 32A is made of the same material as the gate wiring 34 and is patterned on the array substrate 30 in the same process as the gate wiring 34, and is made of aluminum (Al), chromium (Cr), tander (Ta), titanium (Ti ), Copper (Cu), or a metal film alone or a laminated film of these metal nitrides. The gate insulating film 37 is made of, for example, a silicon oxide film (SiOx), and insulates between the gate electrode 32A and the semiconductor film 38. The semiconductor film 38 is made of, for example, amorphous silicon (a-Si) or a transparent amorphous oxide semiconductor (InGaZnOx). One end side is connected to the drain electrode 32C and the other end side is connected to the source electrode 32B. It functions as a channel region for conducting.

The source electrode 32B and the drain electrode 32C contain the same material as the source wiring 35 and are patterned on the array substrate 30 in the same process as the source wiring 35. The source electrode 32B and the drain electrode 32C are configured by laminating first conductive films 32B1 and 32C1 on the lower layer side (semiconductor film 38 side) and second conductive films 32B2 and 32C2 on the upper layer side (interlayer insulating film 39 side). The The first conductive films 32B1 and 32C1 on the lower layer side are made of amorphous silicon (n + Si) doped with an n-type impurity such as phosphorus (P) at a high concentration, and function as an ohmic contact layer. The second conductive films 32B2 and 32C2 on the upper layer side have a two-layer structure in which different metal films are stacked. The metal film on the lower layer side is made of titanium (Ti), and the metal film on the upper layer side is aluminum ( Al).

The above-mentioned source electrode 32B and drain electrode 32C are arranged in an opposing manner with a predetermined interval (opening region) interposed therebetween, so that they are not directly electrically connected to each other. However, the source electrode 32B and the drain electrode 32C are indirectly electrically connected via the semiconductor film 38 on the lower layer side, and the bridge portion between the

electrodes

32B and 32C in the semiconductor film 38 is the drain current. Functions as a channel region through which the gas flows.

The interlayer insulating film 39 is made of, for example, a silicon oxide film (SiOx), and is made of the same material as the gate insulating film 37 described above. The protective film 40 is made of an acrylic resin (for example, polymethyl methacrylate resin (PMMA)) or a polyimide resin, which is an organic material. Therefore, the protective film 40 is thicker than the gate insulating film 37 and the interlayer insulating film 39 made of other inorganic materials and functions as a planarizing film. Note that each insulating film (gate insulating film 37, interlayer insulating film 39, and protective film 40) in the TFT 32 is formed with a uniform film thickness over the entire area, including the area other than the area where the TFT 32 is formed on the array substrate 30. Has been.

In forming thin films such as the TFT 32, the pixel electrode 33, and the

wirings

34, 35, and 36 on the array substrate 30, a known photolithography method is used, and various manufacturing apparatuses 50 to 56 are used for that purpose. ing. Specifically, as shown in FIG. 6, the manufacturing apparatuses 50 to 56 include a cleaning apparatus 50, a film forming apparatus 51, a cleaning apparatus 50A, a resist coating apparatus 52, an exposure apparatus 53, a developing apparatus 54, a cleaning apparatus 50B, An etching device 55 and a resist stripping device 56 are used. The glass substrate 30A constituting the array substrate 30 is subjected to a cleaning process by the cleaning apparatus 50, a film forming process by the film forming apparatus 51, a cleaning process by the cleaning apparatus 50A, a resist coating process by the resist coating apparatus 52, and an exposure apparatus 53. Through the exposure process, the developing process by the developing device 54, the cleaning process by the cleaning device 50B, the etching process by the etching device 55, and the resist stripping step by the resist stripping device 56, the target thin film is formed in a predetermined pattern. Is repeatedly performed for each thin film, whereby the thin films are sequentially stacked.

Specifically, in the cleaning process, the cleaning apparatus 50 supplies the cleaning liquid onto the glass substrate 30A before forming each thin film, thereby cleaning the glass substrate 30A and removing dust and dirt on the glass substrate 30A. To do. In the film forming process, the film forming apparatus 51 forms the thin film material to be formed so as to have a uniform film thickness with respect to the plate surface of the glass substrate 30A. Specifically, as the film forming apparatus 51, a CVD apparatus, a sputtering apparatus, a vacuum deposition apparatus, or the like is used. Thereafter, the substrate is cleaned by the cleaning apparatus 50A in order to remove residual substances and dust accompanying the film formation. Next, in the resist coating step, a photoresist is applied to the material film formed by the film forming device 51 by the resist coating device 52 so as to have a uniform film thickness, and is laminated. At this time, a positive type or a negative type is used as the photoresist. In the exposure process, the exposure device 53 irradiates the photoresist applied by the resist coating device 52 with UV light or the like through a photomask having a predetermined pattern, thereby providing a range corresponding to the pattern of the photomask. To expose.

In the developing step, the developing device 54 supplies the developer onto the plate surface of the glass substrate 30A, thereby developing the photoresist and removing either the exposed area or the non-exposed area. After the substrate is cleaned by the cleaning device 50B to clean the residue such as the developer, in the etching process, the region not covered by the remaining photoresist in the material film is etched away by the etching device 55. Thus, the material film is patterned. As the etching apparatus 55, specifically, a dry etching apparatus that etches a material film with an etching gas, ions, or radicals, a wet etching apparatus that etches a material film with an etchant, or the like is used. Among these, in the wet etching apparatus, the material film is etched by supplying an etching solution onto the plate surface of the glass substrate 30A. In the resist stripping step, the resist stripping device 56 supplies a resist stripping solution onto the plate surface of the glass substrate 30A, thereby removing the remaining photoresist.

Of the manufacturing apparatuses 50 to 56 described above, the cleaning apparatus is used after the processes by the other manufacturing apparatuses 51 to 56 in addition to the cleaning process before and after the film formation and the cleaning process after development. There is. Specifically, for example, when a dry etching apparatus is used as the etching apparatus 55, a cleaning process may be performed after the etching process in order to remove residues by dry etching. A device is used.

Of the manufacturing apparatuses 50 to 56 described above, a process is performed by supplying a liquid onto the glass substrate 30A, specifically, cleaning

apparatuses

50, 50A, 50B, a resist coating apparatus 52, a developing apparatus 54, wet etching. A common transfer device 60 for transferring the glass substrate 30A is employed for the etching device 55 and the resist stripping device 56 that perform the above. Below, the structure of the conveying apparatus 60 in the washing | cleaning apparatus 50 is demonstrated in detail. 7 to 12, the X-axis direction is the conveyance direction of the glass substrate 30A. In FIGS. 7 and 8, the left side of the drawing is the upstream side of the conveyance direction, and the right side of the drawing is the downstream side of the conveyance direction. The In FIGS. 7, 8, and 10 to 12, the upper side of the drawing is the upper side of the conveying device 60, and the lower side of the drawing is the lower side of the conveying device 60. The cleaning device 50, the resist coating device 52, the developing device 54, the etching device 55 that performs wet etching, and the resist stripping device 56 are examples of wet process devices.

As shown in FIG. 7, the cleaning device 50 includes a cleaning tank (an example of a wet process tank) 50 A separated from the external atmosphere, and a transfer device 60 disposed in the cleaning tank 50 A. The A plurality of nozzles (not shown) for injecting the cleaning liquid onto the glass substrate 30 A transported by the transport device 60 are provided above the cleaning tank 50 A. In the cleaning device 50, the cleaning liquid ejected from the nozzle is collected, circulated by a circulation device (not shown), and used again as the cleaning liquid. In the cleaning apparatus 50, the glass substrate 30 A is loaded on the upstream side in the transport direction with the formation surface or the formation scheduled surface of various thin films facing upward, the long side direction is along the X-axis direction, and the short side direction is In the posture along the Y-axis direction, it is transported from the upstream side to the downstream side in the transport direction by the transport device 60 (see arrows in FIGS. 7 and 8).

As shown in FIG. 7 and FIG. 8, the transport device 60 extends in a shaft shape, and includes a plurality of transport rollers 62 that transport the glass substrate 30 A along the transport direction, and both end portions of each transport roller 62. A bearing portion 64 that supports the bearing portion 64 so as to be rotatable around, and a pair of frames (an example of a holding member) 66 and 67 that are fixed to a predetermined height position and hold the bearing portion 64 are provided. Among these, the pair of

frames

66 and 67 has a shape extending along the conveyance direction of the glass substrate 30 A, and has a plurality of concave portions 66 A 1 that are concavely recessed at positions corresponding to the attachment positions of the respective conveyance rollers 62. is doing. Each concave portion 66A1 is provided intermittently along the conveyance direction of the glass substrate 30A so as to open upward.

Each conveyance roller 62 is bridged between a pair of

frames

66 and 67, and its extending direction is in a posture along the Y-axis direction, and is arranged in parallel at a predetermined interval along the conveyance direction. As shown in FIGS. 7 and 8, each transport roller 62 has a metal shaft portion 62A and a plurality of synthetic resin substrate support portions 62B attached to the shaft portion 62A. As shown in FIG. 11, the tip at both ends of the shaft portion 62A is a reduced diameter portion 62A1 that is reduced in diameter from other portions of the shaft portion 62A. Each substrate support portion 62B has a disk shape larger in diameter than the shaft portion 62A, and is attached to the shaft portion 62A with a predetermined interval in the extending direction of the transport roller 62. The glass substrate 30 A is transported along the transport direction while the plate surface opposite to the surface on which various thin films are formed or the surface to be formed is continuously supported by the substrate support portion 62 B of the transport roller 62. As shown in FIG. 8, the transport device 60 includes a rotation mechanism 68 for rotating each transport roller 62 around its axis. The rotation mechanism 68 is provided on one end side (upper side in the drawing in FIG. 8) in the extending direction of each conveyance roller 62, and includes a plurality of gears.

As shown in FIG. 10, the bearing portion 64 is a so-called ball bearing, and is disposed on the outer side of the reduced diameter portion 62 A 1 of the shaft portion 62 A of the transport roller 62. The bearing portion 64 has an annular metal annular portion 64A and a plurality of metallic balls 64B interposed between the reduced diameter portion 62A1 and the annular portion 64A. The bearing portion 64 is held with respect to the frame 66 by the lower portion of the annular portion 64A being bonded and fixed to the concave portions 66A1 of the

respective frames

66 and 67. As shown in FIG. 11, the annular portion 64 A is opposed to the reduced diameter portion 62 A 1 of the shaft portion 62 A. Example) 64A1 is provided. The bearing side recess 64A1 is provided in a groove shape along the annular portion 64A. On the other hand, in the reduced diameter portion 62A1 of the shaft portion 62A, a portion facing the bearing-side recess 64A1 is similarly provided with a groove-like shaft-side recess 62A2 that is recessed inward and into which a part of each ball 64B enters. Yes. The shaft side recess 62A2 is provided in a groove shape along the outer periphery of the reduced diameter portion 62A1.

Since the bearing-side recess 64A1 and the shaft-side recess 62A2 into which the balls 64B have entered are configured as described above, the balls 64B are slidably supported by the annular portion 64A. In other words, the bearing portion 64 is in sliding contact with the shaft portion 62A of the transport roller via the ball 64B in each bearing-side recess 64A1. As described above, since the bearing portion 64 is held by the frame 66, each ball 64B slides between the annular portion 64A of the bearing portion 64 and the shaft portion 62A (the reduced diameter portion 62A1) of the conveying roller 62. Thus, the annular portion 64A does not rotate, and only the transport roller 62 is rotated around its axis by the rotating mechanism 68.

The configuration of each of the

frames

66 and 67 will be described in more detail. As shown in FIG. 11, each frame 66 includes a main body portion 66 A that constitutes a main part of the frame 66, an outer plate 66 B, and a plurality of inner plates 66 C. Of these, the main body portion 66A is provided with the concave portion 66A1 described above. The pair of

frames

66 and 67 are partially different from each other. First, a frame 66 (hereinafter referred to as “one side”) shown in FIG. 7 provided on the other end side in the extending direction of each conveyance roller 62 (the lower side in FIG. Will be described.

The main body portion 66A constituting one frame 66 extends in a wall shape along the transport direction (X-axis direction), and the thickness in the Y-axis direction of a portion located slightly below the concave portion 66A1 is It is larger than the width dimension of the bearing portion 64 in the Y-axis direction. Specifically, in the main body 66A, the portion located slightly below the concave portion 66A1 is outside the tip of the reduced diameter portion 62A1 of the shaft portion 62A of the transport roller 62 (left side, transport roller 62 shown in FIG. 11). (Hereinafter, the protruding portion is referred to as “protruding portion 66A2”). The outer plate 66B is a transparent synthetic resin plate-like member, and its upper portion is positioned at substantially the same height as the rotation shaft of the transport roller 62 in the vertical direction (Z-axis direction). It is stuck and fixed to the outer surface (left surface shown in FIG. 11) of the protruding portion 66A2. The plurality of inner plates 66C are plate-like members, and their upper ends are close to the reduced diameter portion 62A1 of the shaft portion 62A of the conveying roller 62 in the vertical direction, and the lower portion is each of the inner surfaces of the main body portion 66A. Each of them is affixed and fixed at a position corresponding to the concave portion 66A1. As shown in FIGS. 10 and 12, above the respective concave portions 66A1 in the main body portion 66A, a slip-off prevention plate 69 (FIGS. 10 and 12) that prevents the bearing portion 64 from being pulled upward from the concave portions 66A1. (The illustration is omitted in each drawing except for).

Since one frame 66 is configured as described above, a portion surrounded by the main body 66A, the outer plate 66B, and the plurality of inner plates 66C in the one frame 66 is shown in FIGS. Thus, the liquid storage part 70 which can store a liquid is formed. Here, as described above, the plurality of inner plates 66C are arranged in a state where the upper ends thereof are close to the reduced diameter portion 62A1 of the shaft portion 62A of the transport roller 62, so as shown in FIG. In the portion 70, at least a part of the bearing-side concave portion 64A1 of the bearing portion 64 is exposed. In one frame 66, the protruding portion 66A2 of the main body portion 66A is provided from the upstream end to the downstream end in the transport direction. For this reason, as shown in FIGS. 7 and 8, the liquid storage portion 70 in one frame 66 extends in a groove shape from the upstream end portion to the downstream end portion in the transport direction.

As shown in FIG. 7, a circular supply port (an example of a liquid supply unit) 66 A 3 for supplying a liquid into the liquid storage unit 70 is provided at the upstream end of the main body 66 A in the transport direction. It is provided so as to be exposed inside. On the other hand, at the downstream end of the main body 66A in the transport direction, as shown in FIGS. 7 and 9, a circular drainage port (an example of a liquid discharger) for discharging the liquid in the liquid container 70 to the outside. 66A4 is exposed in the liquid container 70. As shown in FIG. 7, one end of a supply pipe 72 for supplying a liquid to the supply port 66A3 from the outside of the cleaning device 50 is attached to the supply port 66A3, and the discharge port 66A4 has a discharge port 66A4. One end of a discharge pipe 74 for discharging the liquid from the discharge port 66A4 to the outside of the cleaning device 50 is attached. With such a configuration, in one frame 66, the liquid supplied from the outside of the cleaning device 50 through the supply port 66 A 3 into the liquid storage unit 70 is upstream in the transport direction in the liquid storage unit 70. It flows from the side toward the downstream side and is discharged from the discharge port 66A4 to the outside of the cleaning device 50. Since the outer plate 66B is transparent as described above, the liquid in the liquid storage unit 70 can be viewed from the side of the transport device 60 when the liquid is stored in the liquid storage unit 70. it can.

In the present embodiment, pure water W1 is exemplified as an example of the liquid supplied into the liquid storage unit 70 (see FIGS. 7, 8, 11, and 12). In one frame 66, when pure water W 1 is poured into the liquid storage part 70, a part of the bearing-side recess 64 A 1 of the bearing part 64 exposed in the liquid storage part 70 is formed as shown in FIGS. 11 and 12. It will be in the state immersed in the pure water W1. Here, in the transport device 60 of the present embodiment, the bearing-side concave portion 64A1 of the bearing portion 64 is worn by sliding between the transport roller 62 and the bearing portion 64 due to slip or the like when the transport roller 62 rotates. Dust and dust such as rust powder may be generated from the bearing side recess 64A1. In this regard, in one frame 66 in the transport device 60, even when dust or dust such as rust powder is generated in the bearing-side concave portion 64A1 of the bearing portion 64 disposed on the one frame 66 side, liquid is generated. The pure water W1 is poured into the housing portion 70, and the bearing-side recess 64A1 in which dust or dust such as rust powder is generated is immersed in the pure water W1 as described above. It is made to flow down from the recess 64A1. Further, even when the dust or dust is generated in a portion of the bearing-side recess 64A1 other than the portion exposed in the liquid storage portion 70, the dust or dust is transferred to the bearing-side recess as the transport roller 62 rotates. By moving to the bearing-side concave portion 64A1 exposed in the liquid storage portion 70 along 64A, the dust and dirt are washed away by the pure water W1 in the liquid storage portion 70.

Next, a configuration of a frame 67 (hereinafter, referred to as “the other frame 67”) provided on one end side in the extending direction of each conveyance roller 62 (the upper side in FIG. 8, the side on which the rotation mechanism 68 is provided). A brief explanation will be given. In the other frame 67, as shown in FIG. 8, the liquid storage portion 71 formed in a portion surrounded by the main body portion, the outer plate, and the plurality of inner plates has an upstream side in the transport direction like the one frame 66. It is not provided from the end portion to the downstream end portion, and is formed intermittently along the transport direction. For this reason, in the other frame 67, the pure water W1 poured into the liquid container 71 does not flow from the upstream side to the downstream side in the transport direction, and is stored in the liquid container 71. It has become so. Even in such a configuration, when pure water W1 is poured into the liquid storage portion 71, the bearing-side concave portion 64A1 of the bearing portion 64 exposed in the liquid storage portion 71 is immersed in the pure water W1. For this reason, when dust or dirt such as rust powder is generated in the bearing side concave portion of the bearing portion arranged on the other frame 67 side, pure water W1 is poured into the liquid storage portion 70, and rust powder or the like is generated. The bearing-side recess in which dust or dust is generated is immersed in the pure water W1 as described above in accordance with the rotation of the transport roller 62, so that the dust or dust is washed away from the bearing-side recess. Yes.

Incidentally, in the cleaning device 50 of the present embodiment, dust such as rust powder generated from the bearing-side recess 64A1 of the bearing portion 64 may be mixed into the cleaning liquid ejected from the nozzle. As described above, since the cleaning liquid ejected from the nozzles is circulated and used again as the cleaning liquid in the cleaning apparatus 50, in the manufacturing process of the array substrate 30, the cleaning apparatus 50 is replaced with another manufacturing apparatus 51. When used after the steps of .about.56, the cleaning liquid mixed with dust or dust may be sprayed onto the glass substrate 30A. For this reason, when the cleaning apparatus 50 is used after the process by the other manufacturing apparatuses 51 to 56, dust such as rust powder generated from the bearing-side recess 64A1 is mixed with the cleaning liquid and formed on, for example, the glass substrate 30A. The film may adhere to the gate insulating film 37 and the interlayer insulating film 39 and may be detected as a gate insulating film foreign material or an interlayer insulating film foreign material.

Further, when the cleaning apparatus 50 is used after the process by the other manufacturing apparatuses 51 to 56, the above-described gate formed on the glass substrate 30A, for example, with dust or dust generated from the bearing-side recess 64A1 being mixed with the cleaning liquid. Attached to the insulating film 37 and the interlayer insulating film 39 and peeled off from the glass substrate 30A together with a part of the gate insulating film 37 and the interlayer insulating film 39 may be detected as a gate insulating film defect or an interlayer insulating film defect. . The array substrate 30 in which such foreign matter or defect is detected is regarded as a defective product. In this regard, in the transfer device 60 provided in the cleaning device 50, as described above, dust and dirt generated from the bearing-side recess 64A1 are washed away by the pure water W1 that has been poured into the liquid storage portion 70. In the manufacturing process of the substrate 30, it is prevented or suppressed that defective products are generated on the array substrate 30 due to dust or dust generated from the bearing-side recess 64A1.

As described above, in the transfer device 60 included in the cleaning device 50 of the present embodiment, the pure water W1 is poured into the liquid storage unit 70, so that the bearing side recess 64A1 of the bearing unit 64 is exposed to the liquid storage unit 70. The part to be performed can be immersed in the pure water W1. As a result, the pure water W1 in the liquid storage part 70 functions as a lubricant for the bearing part 64, and it is possible to prevent or suppress the generation of dust and dirt in the bearing-side recess 64A1 of the bearing part 64. Further, even if dust or dirt is generated in the bearing-side recess 64A1 of the bearing portion 64, the dust or dust can be washed away from the bearing-side recess 64A1 by the pure water W1 in the liquid storage portion 70. It is possible to prevent or suppress dust from adhering to the glass substrate 30A. In addition, since the dust and dust can be prevented or suppressed from adhering to the glass substrate 30A only by providing the

frames

66 and 67 with the liquid container 70 having the above-described configuration, an increase in the size of the apparatus is avoided. be able to. As described above, in the transport device 60 of the present embodiment, dust and dust generated from the bearing-side recess 64A1 of the bearing portion 64 are prevented from adhering to the glass substrate 30A to be transported while avoiding an increase in size of the device. Or can be suppressed.

In the present embodiment, the liquid storage portion 70 provided on the one frame 66 side extends in a groove shape. Further, on one frame 66 side, a supply port 66A3 that supplies pure water W1 into the liquid storage unit 70 is provided at the upstream end in the transport direction (extending direction of the liquid storage unit 70), and downstream in the transport direction. A discharge port 66A4 for discharging the pure water W1 flowing in the liquid storage unit 70 is provided at the side end. With such a configuration, on one frame 66 side, new pure water W1 is sequentially supplied from the supply port 66A3 into the liquid storage portion 70, and dust or dust generated in the bearing-side recess 64A1. The pure water W1 that has been washed away is sequentially discharged from the liquid container 70 at the discharge port 66A4. For this reason, dust, dust, and the like generated in the bearing-side recess 64A1 of the bearing portion 64 are effectively generated by the force of the pure water W1 flowing in the groove-shaped liquid storage portion 70 from the upstream side to the downstream side in the transport direction. Can be washed away.

Further, in the present embodiment, as described above, it is possible to prevent dust and dust generated from the bearing portion 64 and the bearing-side concave portion 64A1 from being mixed with the cleaning liquid and adhering to the glass substrate 30A to be transported. As a result, it is possible to prevent or suppress the occurrence of defective products on the array substrate 30 due to the dust or dust during the manufacturing process of the array substrate 30.

In the present embodiment, as described above, the pure water W1 in the liquid storage portion 70 flows into the liquid storage portion 70, so that the pure water W1 in the liquid storage portion 70 also functions as a lubricant for the bearing portion 64 configured as a ball bearing. . For this reason, the rotation performance of the conveyance roller 62 rotatably supported by the bearing portion 64 can be maintained in a good state.

<Embodiment 2>
The second embodiment will be described with reference to FIGS. 13 and 14. The second embodiment is different from the first embodiment in the configuration of the transport roller 162 in the transport device, the configuration of the bearing unit 164, the support mode of the transport roller 162 by the bearing unit 164, and the holding mode of the bearing unit 164 in the frame 166. ing. Since the other configuration is the same as that of the first embodiment, the description of the structure, operation, and effect is omitted. In FIGS. 13 and 14, the parts obtained by adding the numeral 100 to the reference numerals in FIGS. 10 and 11 are the same as the parts described in the first embodiment.

In the transport device provided in the cleaning device of the present embodiment, unlike the first embodiment, a bearing portion 164 that is a ball bearing is disposed on the inner side of the shaft portion 162A of the transport roller 162 around the axis. That is, as shown in FIG. 13, the shaft portion 162 A of the conveying roller 162 is cylindrical, the inside is hollow, and the whole has a uniform diameter. On the other hand, as shown in FIGS. 13 and 14, the bearing portion 164 has a cylindrical shape and a shaft portion 162 A made of a metal and having a diameter smaller than the inner diameter of the shaft portion 162 A of the transport roller 162. And a plurality of metal balls 164B interposed between the cylindrical portion 164A. The bearing portion 164 is held with respect to the frame 166 by bonding and fixing the outer surface of the cylindrical portion 164 A to the inner surface of the main body portion 166 A of the frame 166. As shown in FIG. 14, the cylindrical portion 164A has a groove-like bearing-side recess (an example of a sliding contact portion) that is recessed inward and into which a part of each ball 164B enters, as shown in FIG. 164A1 is provided. On the other hand, in the portion of the shaft portion 162A that faces the bearing-side concave portion 164A1, a groove-like shaft-side concave portion 162A2 that is also recessed inward and into which a part of each ball 164B enters is provided.

Since the bearing-side recess 164A1 and the shaft-side recess 162A2 into which the balls 164B have entered are configured as described above, each ball 164B is slidably supported by the columnar portion 164A. In other words, the bearing portion 164 is in sliding contact with the shaft portion 162A of the conveying roller via the ball 164B in each bearing-side recess 164A1. As described above, since the cylindrical portion 164A of the bearing portion 164 of the present embodiment is held by the frame 166, each ball 164B slides between the cylindrical portion 164A of the bearing portion 164 and the shaft portion 162A of the conveying roller 162. By moving, the cylindrical portion 164A does not rotate, and only the transport roller 162 rotates about its axis by a rotation mechanism (not shown).

The main body 166A constituting the frame 166 extends in a wall shape along the transport direction (X-axis direction) as in the first embodiment. The main body 166A has an inner surface (surface to which the cylindrical portion 164A of the bearing portion 164 is bonded) substantially coincides with the upper end of the cylindrical portion 164A, and its outer surface is slightly below the upper end of the cylindrical portion 164A. The protruding portion 166A2 protrudes to the outer surface side with a step so as to be located at the center. The outer plate 166B is a transparent synthetic resin plate-like member, and its upper end is positioned slightly above the shaft portion 162A of the conveying roller 162 in the vertical direction (Z-axis direction), and the outer surface of the main body portion 166A. It is fixed to the adhesive. The plurality of inner plates 166C are plate-like members, and the upper ends thereof are positioned slightly above the upper ends of the columnar portions 164A of the bearing portions 164 in the vertical direction, respectively, on the inner surfaces of the columnar portions 164A of the respective bearing portions 164. Pasted and fixed.

In the present embodiment, the conveyance roller 162, the bearing portion 164, and the frame 166 are configured as described above, so that the frame 166 is surrounded by the main body 166A, the outer plate 166B, and the plurality of inner plates 166C. Further, as shown in FIGS. 13 and 14, a liquid storage portion 170 capable of storing a liquid is formed. Here, as described above, the plurality of inner plates 166C are arranged with their upper ends positioned slightly above the upper ends of the columnar portions 164A of the bearing portions 164. Therefore, as shown in FIG. At least a part of the bearing-side recess 164A1 of the bearing portion 164 is exposed in the housing portion 170. Note that, similarly to the first embodiment, the liquid storage unit 170 in the present embodiment extends in a groove shape from the upstream end in the transport direction to the downstream end, and in the transport direction in the main body 166A. A supply port is provided at the upstream end, and a discharge port is provided at the downstream end in the conveying direction of the main body 166A. In addition, a receiving plate 168 positioned below the bearing portion 164 is attached to the main body portion 166A of the frame 166, whereby liquid leaking from the ball 164B positioned below the ball 164B in FIG. ), And the received liquid is discharged from the discharge basin 169 to the outside.

As described above, also in this embodiment, when at least a part of the bearing-side recess 164A1 is exposed in the liquid storage portion 170, the pure water W1 is poured into the liquid storage portion 170 as in the first embodiment. Thus, a portion of the bearing-side concave portion 164A1 of the bearing portion 164 exposed in the liquid storage portion 170 can be immersed in the pure water W1. As a result, even if dust or dirt is generated in the bearing-side recess 164A1 of the bearing portion 164, the dust or dust can be washed away from the bearing-side recess 164A1 by the pure water W1 in the liquid storage portion 170. It is possible to prevent or suppress dust and dust from adhering to the glass substrate that is the conveyance target. In addition, since the new pure water W1 sequentially flows in the liquid storage portion 170 that has a groove shape from the upstream side to the downstream side in the transport direction, the force of the pure water W1 flowing in the liquid storage portion 170 Thus, dust or dirt generated in the bearing-side recess 164A1 of the bearing portion 164 can be effectively washed away.

<Embodiment 3>
The third embodiment will be described with reference to FIGS. 15 and 16. The third embodiment is different from the first embodiment in the configuration of the frame 266 in the transport device 260. Since the other configuration is the same as that of the first embodiment, the description of the structure, operation, and effect is omitted. 15 and FIG. 16, the parts obtained by adding the numeral 200 to the reference numerals in FIG. 7 and FIG. 9 are the same as the parts described in the first embodiment.

In the transfer device 260 provided in the cleaning device 250 of the present embodiment, as shown in FIGS. 15 and 16, the protruding portion of the main body 266A in the frame 266 (approaching outward in a portion located slightly below the concave portion 266A1). The partition 266A3 that separates the liquid storage portion 270 is provided between the adjacent concave portions 266A1. As a result, in the frame 266, a plurality of liquid storage portions 270 separated by the partition walls 266A3 along the transport direction are formed so that one liquid storage portion 270 corresponds to one bearing portion 264. Accordingly, at least a part of the bearing-side recess 264A1 of the bearing portion 264 is exposed in each liquid storage portion 270. And the pure water W1 poured into each liquid storage part 270 is stored in the liquid storage part 270 similarly to the liquid storage part 71 provided on the other frame 67 side in the first embodiment. ing.

In the present embodiment, in the transport device 260, even if a plurality of liquid storage portions 270 are formed in a form in which one liquid storage portion 270 corresponds to one bearing portion 264 as described above, When the pure water W1 is poured into the storage portions 270, each of the bearing-side recesses 264A1 of the bearing portions 264 exposed in the liquid storage portions 270 is immersed in the pure water W1. For this reason, even if dust or dust is generated in the bearing-side recess 264A1 of each bearing portion 264, the dust or dust can be washed away from the bearing-side recess 264A1 by the pure water W1 in the liquid storage portion 270. It is possible to prevent or suppress dust and dust from adhering to the glass substrate 230A that is a conveyance target.

The modifications of the above embodiments are listed below.
(1) In each of the above embodiments, the configuration of the transport device included in the cleaning device has been illustrated, but a device that performs a wet process on the glass substrate other than the cleaning device, that is, a resist coating device, a developing device, and wet etching is performed. You may apply the conveying apparatus provided with the above-mentioned liquid accommodating part in each apparatus of an etching apparatus and a resist peeling apparatus. In this case, even if dust or dust generated from the shaft bearing side recess of the bearing portion is mixed into the processing liquid used in each apparatus, the dust or dust can be washed away by pure water poured into the liquid storage portion, The dust or dust can be prevented or suppressed from adhering to the glass substrate conveyed by the conveying device.

(2) In each of the above embodiments, the cleaning apparatus used in the manufacturing process of the array substrate has been exemplified. However, the present invention may be applied to a cleaning apparatus used in the manufacturing process of the color filter substrate. In this case, it is possible to prevent or suppress the occurrence of defective products on the color filter substrate due to dust generated from the bearing-side recess.

(3) In each of the above embodiments, pure water is exemplified as an example of the liquid that is poured into the liquid storage unit. However, the liquid that is poured into the liquid storage unit allows dust and dust generated from the bearing-side recess of the bearing unit to flow. The liquid is not limited to pure water as long as it has a viscosity that can be dropped.

(4) In each of the above embodiments, the glass substrate is illustrated as an example of the conveyance target member conveyed to the conveyance device, but the conveyance target member conveyed to the conveyance device is not limited to the glass substrate. Even if the conveyance target member is other than the glass substrate, by applying the present invention, it is possible to prevent or suppress dust and dust generated from the bearing-side concave portion of the bearing portion from adhering to the conveyance target member.

(5) In each of the above embodiments, the configuration in which the bearing portion is a ball bearing has been illustrated, but the bearing portion may have a configuration other than the ball bearing. Even in this case, by applying the present invention, it is possible to prevent or suppress the dust generated from the sliding contact portion of the bearing portion from adhering to the conveyance target member.

(6) In addition to the above embodiments, the shape and configuration of the liquid storage portion in the holding member can be changed as appropriate.

As mentioned above, although each embodiment of this invention was described in detail, these are only illustrations and do not limit a claim. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.

Next, the present invention will be specifically described with reference to examples. In the embodiment, in the manufacturing process of the array substrate, before and after the application of the present invention to the transfer device provided in the cleaning device, the gate insulating film foreign matter of the gate insulating film formed on the glass substrate, the gate insulating film defect, and the glass substrate Interlayer insulating film foreign matter and interlayer insulating film defects in the interlayer insulating film formed on the top were respectively detected. The numerical values in FIG. 17 and FIG. 18 indicate the individual defect rate (ratio of individuals with defective products with respect to the total number of inspected individuals) as a percentage (%).

As shown in FIG. 17, the detected gate insulating film foreign matter and gate insulating film defects were greatly reduced before and after the application of the present invention. Therefore, by applying the present invention, it is possible to prevent or suppress the occurrence of foreign substances or gate insulating film defects in the gate insulating film on the array substrate due to dust or dirt generated from the bearing-side concave portion of the bearing portion. I was able to confirm.

In addition, as shown in FIG. 18, the detected interlayer insulating film foreign matter and interlayer insulating film defect are not significantly changed before and after the application of the present invention, but the interlayer insulating film foreign object is not observed. A large decrease was observed before and after the application of the present invention. Therefore, it can be confirmed that the application of the present invention can prevent or suppress the generation of foreign substances in the interlayer insulating film on the interlayer insulating film on the array substrate due to dust or dust generated from the bearing-side recess of the bearing part. It was.

From the above results, by applying the present invention to the cleaning device used in the manufacturing process of the array substrate, it is possible to prevent defective products from being generated on the array substrate due to dust and dirt generated from the bearing side recess of the bearing portion. It was confirmed that it could be suppressed.

10: liquid crystal display device, 11: liquid crystal panel, 20: color filter substrate, 30: array substrate, 30A: glass substrate, 37: gate insulating film, 39: interlayer insulating film, 50, 250: cleaning device, 50A, 250A: Cleaning tank, 60: transfer device, 62, 162, 262: transfer roller, 62A, 162A, 262A: shaft portion, 62A1, 262A1: reduced diameter portion, 62B, 262B: substrate support portion, 64, 164, 262: bearing

portion

64A, 164A: annular part, 64A1, 164A1, 264A1: bearing side recess, 64B, 164B, 264B: ball, 66, 67, 166, 266: frame, 66A, 166A, 266A: main body part, 66A3: supply port, 66A4: discharge port, 66B, 166B, 266B: outer plate, 66C, 166C: inner plate, 70, 71, 170 270: liquid reservoir, 72,272: supply pipe, 74,274: exhaust pipe, 264A: cylinder part, W1: pure water

Claims

A transport roller extending in a shaft shape and transporting the transport member along the transport direction;
A bearing that rotatably supports the transport roller around its axis;
A holding member for holding the bearing portion, the holding member having a liquid storage portion, wherein at least a part of a sliding contact portion of the bearing portion is exposed in the liquid storage portion;
A transport apparatus comprising:
The bearing portion includes an annular annular portion disposed around an axis of the conveying roller, and a plurality of balls that are interposed between the conveying roller and the annular portion and are slidably supported by the annular portion. A ball bearing having
The conveying device according to claim 1, wherein the sliding contact portion is a portion that supports the plurality of balls in the annular portion.
3. The transport apparatus according to claim 1, wherein the liquid storage portion extends in a groove shape.
A liquid supply unit that supplies liquid into the liquid storage unit is provided at one end in the extending direction of the liquid storage unit, and the liquid flowing through the liquid storage unit is discharged at the other end in the extending direction of the liquid storage unit. The transport apparatus according to claim 3, further comprising a liquid discharge unit that performs the operation.
The liquid storage portion extends along the transport direction, with the one end disposed on the upstream side in the transport direction and the other end disposed on the downstream side in the transport direction. The conveying device according to claim 4, wherein
The transport member is a substrate;
A plurality of the transport rollers are arranged in parallel in the transport direction so that the extending direction is orthogonal to the transport direction,
The conveying device according to any one of claims 1 to 5, wherein the bearing portions are respectively disposed at both ends of the conveying roller.
A wet process apparatus comprising: the transport apparatus according to claim 6; and a wet process tank that performs a wet process on the substrate transported along the transport direction.