WO2015177886A1 - 高周波電圧生成装置 - Google Patents
高周波電圧生成装置 Download PDFInfo
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- WO2015177886A1 WO2015177886A1 PCT/JP2014/063475 JP2014063475W WO2015177886A1 WO 2015177886 A1 WO2015177886 A1 WO 2015177886A1 JP 2014063475 W JP2014063475 W JP 2014063475W WO 2015177886 A1 WO2015177886 A1 WO 2015177886A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/062—Ion guides
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/538—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a push-pull configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/422—Two-dimensional RF ion traps
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/4815—Resonant converters
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Definitions
- the present invention relates to a high-frequency voltage generation device that generates a high-frequency voltage from a DC voltage and applies it to a load.
- This high-frequency voltage generation device can be suitably used for a charged particle control device such as an ion guide or an ion trap that controls focusing, transport, filtering, and the like for ions in a mass spectrometer.
- a spatially and temporally modulated high-frequency electric field is used to control the movement of ions (see Patent Document 1).
- V RF a high frequency voltage
- V RF a high frequency voltage
- ⁇ a pseudopotential V p (R) due to a high-frequency electric field
- R is a radial distance from the ion optical axis.
- This pseudo-potential V p (R) is obtained by using the inscribed circle radius r of the ion guide, the mass m of the ion, and the charge q of the ion.
- V p (R) ⁇ qn 2 / (4m ⁇ 2 ) ⁇ ⁇ (V / r) 2 ⁇ (R / r) 2 (n-1) It is expressed. From this equation, the following can be said.
- the Ion guide of the inscribed circle radius r the high-frequency voltage V RF amplitude V, varying the any one or more high-frequency voltage V RF frequency Omega, pseudopotential V p (R) is changed. Therefore, when the pseudo potential V p (R) is changed along the ion optical axis, a gradient of the pseudo potential V p (R) is formed, and a force due to the gradient is generated so that ions can be transported.
- the ion guide is continuously present along the ion optical axis like a rod electrode, it is not possible to change the pseudo potential by an electrical method of changing the amplitude V or frequency ⁇ of the high frequency voltage V RF. It is difficult to change the structure of the ion guide, such as the inscribed circle radius r of the ion guide. However, the structure of the ion guide cannot be changed during use, and the ions cannot be freely controlled.
- the DC voltage When switching from positive to negative, the DC voltage is set to 0 for a certain period of time, that is, the DC voltage is switched in the order of 0 ⁇ + V 0 ⁇ 0 ⁇ ⁇ V 0 ⁇ 0 during one period of the high frequency (FIG. 9B) It is described.
- the effective amplitude V of the high frequency voltage can be changed.
- the voltage switching shown in FIG. 9B is realized by an electric circuit 90 shown in FIG. 10, for example.
- the capacitor C in the electric circuit 90 corresponds to one electrode pair in the ion guide.
- One terminal of the capacitor C is grounded, and the other terminal is a first power source E 1 having a potential + V 0 through the first switch S 1 and a second terminal having a potential ⁇ V 0 through the second switch S 2. It is connected in parallel to the power source E 2.
- An electric resistance R and a zeroth switch S 0 connected in series are connected in parallel to the capacitor C at both ends of the capacitor C.
- Switching of the voltage in the electric circuit 90 is performed as follows. In the zero state opening the switch S 0 connected in parallel to the capacitor C (electrode pairs), a second opening the switch S 2, by closing the first switch S 1, the capacitor C of (electrode pairs) A voltage + V 0 is applied between them (FIG. 11 (a)). Next, by closing the 0th switch S 0 by opening the first switch S 1, the voltage across the capacitor C (electrode pairs) becomes zero (FIG. 11 (b)). Subsequently, by closing the second switch S 2 opens the 0th switch S 0, the voltage -V 0 is applied between the capacitor C (electrode pairs) (FIG. 11 (c)).
- the waveform is rectangular, and the voltage is suddenly changed when the DC voltage is switched, so that electrical noise is generated. Further, in the electric circuit 90 described above, when the voltage is changed from ⁇ V 0 to 0, the electric charge accumulated in the capacitor C flows through the electric resistance R and consumes electric power there.
- the problem to be solved by the present invention is to provide a high-frequency voltage generator capable of suppressing noise generation and power consumption.
- the present invention made to solve the above problems is a high-frequency voltage generation device that generates a high-frequency voltage from a DC voltage and applies it to a load, a) a first DC voltage generator for generating a first DC voltage; b) a second DC voltage generator for generating a second DC voltage having a value different from the first DC voltage; c) a transient AC voltage having a cycle shorter than the cycle of the high-frequency voltage and having one of the first DC voltage and the second DC voltage having a maximum value and the other having a minimum value, the first DC voltage or the A transient AC voltage generator that oscillates with the second DC voltage as an initial value; d) During one cycle of the high-frequency voltage, the voltage is the first DC voltage, the transient AC voltage having the first DC voltage as the initial value, the second DC voltage, and the second DC voltage being the initial voltage.
- the transient AC voltage as a value is switched in order, and the load of the load is set so that the period of the transient AC voltage is a half integer multiple of 1.5 or more of the period of the transient AC voltage and shorter than the half period of the high-frequency voltage.
- an applied voltage switching unit that switches an applied voltage to the power source.
- a (pseudo) high-frequency voltage is basically generated by alternately applying the first DC voltage and the second DC voltage to the load.
- a transient AC voltage having one of the first DC voltage and the second DC voltage as a maximum value and the other as a minimum value is applied to the load.
- This transient AC voltage is oscillated half an integer number of 1.5 or more as the initial value of the DC voltage that was applied to the load immediately before, that is, by oscillating one or more times and then oscillating half more, the transient AC voltage can be applied.
- the first DC voltage is switched to the second DC voltage, or the second DC voltage is switched to the first DC voltage.
- the DC voltage can be switched more slowly than the conventional high-frequency voltage generation device using a rectangular wave, so that the generation of noise can be suppressed. Further, it is not necessary to use an electrical resistance that causes power loss while switching between the first DC voltage and the second DC voltage via the transient AC voltage.
- the high-frequency voltage generation device may include an effective amplitude changing unit that changes a ratio between a time for applying the first DC voltage and the second DC voltage and a time for applying the transient AC voltage.
- an effective amplitude changing unit that changes a ratio between a time for applying the first DC voltage and the second DC voltage and a time for applying the transient AC voltage.
- the time for applying the first DC voltage and the second DC voltage is lengthened, the effective amplitude of the high-frequency voltage is increased, and when the time is shortened, the amplitude is decreased.
- the effective amplitude of the high-frequency voltage can be easily controlled simply by changing the time ratio.
- the period of the transient AC voltage is (n + 0.5) times (n is a natural number) the period of the transient AC voltage, the ratio can be changed by changing the value of n. it can.
- the high-frequency voltage generator according to the present invention is a high-frequency voltage frequency change that changes one or both of the time for applying the first DC voltage and the second DC voltage and the time for applying the transient AC voltage. Can be provided. Thereby, the frequency of a high frequency voltage can be easily changed only by changing these times.
- the transient AC voltage generator includes an LC circuit in which an inductor and a capacitor are connected in series, and an LC circuit switching unit that opens and closes the LC circuit, and a first DC voltage and a second DC voltage are selectively applied to the capacitor.
- What comprises the direct-current voltage selection application part to apply can be used suitably.
- the LC circuit switching unit is the LC circuit. After the DC voltage selection application unit applies the one DC voltage to the capacitor, the DC voltage selection application unit finishes applying the one DC voltage, and the LC circuit switching unit closes the LC circuit. To do.
- the load constitutes a capacitor
- the load itself may be a capacitor of the LC circuit.
- the high-frequency voltage generator according to the present invention can be suitably used to supply a high-frequency voltage to a charged particle control device used in a mass spectrometer.
- this high-frequency voltage generator can be used to supply the high-frequency voltage V RF applied to the electrode.
- the high-frequency voltage generation device including the effective amplitude changing unit is preferable in that the pseudo-potential V p (R) in the ion guide can be easily controlled by changing the amplitude of the high-frequency voltage V RF. Can be used.
- a different high frequency voltage generator is used for each of a plurality of electrodes arranged in the direction of the ion optical axis. May be applied to the electrode.
- the waveform of the transient AC voltage is included in the waveform of the target high frequency voltage.
- the frequency of the transient AC voltage is sufficiently high, the charged AC does not follow the time change of the force received from the transient AC voltage, so the transient AC voltage does not affect the control of the charged particles.
- the influence of the transient AC voltage can be eliminated by using a high-frequency filter whose cutoff frequency is higher than the frequency ⁇ of the high-frequency voltage and lower than the frequency ⁇ of the transient AC voltage.
- the high-frequency voltage generation device can be used for devices other than the charged particle control device.
- a first DC voltage is set to a DC voltage before conversion
- a second DC voltage is set to 0
- the high-frequency voltage generator according to the present invention sets the DC voltage before conversion to 0.
- the high-frequency current is rectified to a direct current, whereby a direct current having a voltage different from that before conversion is output.
- the DC voltage on the output side can be controlled by changing the amplitude of the high-frequency voltage using a high-frequency voltage generating device including an effective amplitude changing unit.
- the high-frequency voltage generation device by applying a transient AC voltage while switching between the first DC voltage and the second DC voltage, it is more gradual than a conventional high-frequency voltage generation device using a rectangular wave.
- the voltage can be switched, thereby suppressing the generation of noise. Further, it is not necessary to use an electrical resistance that causes power loss while switching between the first DC voltage and the second DC voltage via the transient AC voltage.
- the figure which shows the electric circuit in one Example of the high frequency voltage generation apparatus which concerns on this invention The figure which shows the operation
- condenser C in the high frequency voltage generator of a present Example It is an example of the ion guide using the high frequency voltage generation apparatus of a present Example as a power supply, Comprising: (a) One cross section parallel to an ion optical axis, (b) The figure which shows one cross section perpendicular
- the graph which shows the waveform of the voltage produced
- the high-frequency voltage generator 10 of the present embodiment has an electric circuit shown in FIG.
- the high-frequency voltage generator 10 supplies a high-frequency voltage to an ion guide used in a mass spectrometer, and the capacitor C in the electric circuit corresponds to one electrode pair of the ion guide.
- the high-frequency voltage generation apparatus 10 includes a first DC power supply 11, a second DC power supply 12, a transient AC voltage generation circuit 13, and an applied voltage switching unit 14.
- the first DC power source 11 corresponds to the first DC voltage generator
- the second DC power source 12 corresponds to the second DC voltage generator
- the transient AC voltage generator circuit 13 corresponds to the transient AC voltage generator.
- One terminal of the capacitor C (electrode pairs) is grounded, the potential -V and the other terminal via the first power source E 1 and the second switch S 2 potential + V 0 through the first switch S 1 It is connected in parallel to a second power source E 2 0.
- the applied voltage switching unit 14 includes a 0th switch S 0 , a first switch S 1, a second switch S 2 , and a control unit 141 that performs control to open / close these three switches.
- a positive DC voltage + V 0 is applied as follows. From the state where all of the 0th switch S 0 , the first switch S 1 , and the second switch S 2 are open, the control unit 141 transmits a predetermined control signal to the first switch S 1 , whereby the first switch closing the S 1 (FIG. 2 (1)). By this operation, the voltage of the capacitor C (electrode pair) rises to + V 0 (the period indicated by the reference numeral (1) in FIG. 4; hereinafter, simply referred to as “FIG. 4 (1)” or the like. ).
- This time may be controlled based on the CPU clock frequency of the control unit 141 after the frequency ⁇ is obtained in advance.
- a frequency counter that detects voltage oscillation may be provided in the LC circuit, and the timing for ending application of the transient AC voltage may be determined based on the count number.
- the voltage applied to the capacitor C is theoretically just before the transient AC voltage is applied when the transient AC voltage application time has elapsed due to the transient AC voltage oscillating half an integer times (but 1.5 times or more).
- the voltage + V 0 is inverted to ⁇ V 0 .
- the voltage applied to the capacitor C (electrode pair) is actually attenuated as shown in FIG. 5, and the absolute value is slightly smaller than ⁇ V 0. -(V 0 - ⁇ ). In FIG. 5, the attenuation is emphasized more than actual for convenience of explanation.
- a second opens the switch S 2 (FIG. 3 (c)), the state for a predetermined time (hereinafter referred to as "DC voltage maintaining time") is maintained (FIG. 4 (c)).
- the predetermined time is the sum of the predetermined time, the transient AC voltage application time (FIG. 4 (a)), and the negative DC voltage ⁇ V 0 application time (FIG. 4 (b)). Set to be equal to the period.
- the DC voltage maintaining time is controlled based on the CPU clock frequency of the control unit 141.
- the high frequency voltage is applied to the capacitor C (electrode pair) for one cycle. Thereafter, by repeating the above operation, a high frequency voltage is continuously applied to the capacitor C (electrode pair).
- the capacitor C when switching from the positive DC voltage + V 0 to the negative DC voltage ⁇ V 0 and from the negative DC voltage ⁇ V 0 to the positive DC voltage, the capacitor C ( By applying a transient AC voltage to the electrode pair), the voltage can be switched more slowly than the conventional high-frequency voltage generator using a rectangular wave, thereby suppressing noise and power loss. .
- the effective high-frequency voltage applied to the capacitor C is changed by changing the ratio of the DC voltage maintaining time and the transient AC voltage application time.
- the overall size can be controlled.
- the ratio between the DC voltage maintenance time ((c), (f)) and the transient AC voltage application time ((a), (d)) is shown in FIGS.
- the effective magnitude of the high frequency voltage also decreases in this order.
- the high-frequency voltage applied to the capacitor C (electrode pair) by changing the DC voltage maintenance time and / or the transient AC voltage application time. Can be controlled.
- the transient AC voltage application time is the same, but the DC voltage maintenance time is longer in the latter than in the former, so that the frequency of the high-frequency voltage is smaller. It has become. 7 (1) and FIG. 7 (3), the DC voltage maintenance time is the same, but the latter has a longer transient AC voltage application time than the former. Is getting smaller.
- both the DC voltage maintenance time and the transient AC voltage application time may be changed.
- This ion guide 20 is a set of electrodes in a form in which rods are separated in the direction of the ion optical axis 29 and arranged at equal intervals, and eight sets thereof are arranged around the ion optical axis 29 at equal intervals. is there.
- the five electrodes arranged in the direction of the ion optical axis 29 are labeled 2xa, 2xb, 2xc, 2xd, and 2xe.
- x is a number from 1 to 8 given in the order of arrangement around the ion optical axis 29 corresponding to each of the eight sets of electrodes.
- One high-frequency voltage generation apparatus 10 according to the present embodiment is provided for each of the eight electrodes at the same position with respect to the direction of the ion optical axis 29.
- a high frequency voltage V RF1 is applied to the most upstream electrode 2xa of the ion optical axis 29 between the electrode where x is an odd number and the electrode where x is an even number using the high frequency voltage generator 10a.
- the second to fifth electrodes 2xb, 2xc, 2xd, and 2xe from the upstream of the ion optical axis 29 are respectively connected to the high-frequency voltages V RF2 , V between the electrodes where x is an odd number and the electrodes where x is an even number.
- RF3 is applied to V RF4, V RF5.
- a DC bias voltage V Bias is applied superimposed on the high-frequency voltage.
- the amplitude of the high frequency voltage is adjusted by adjusting the ratio of the DC voltage maintaining time and the transient AC voltage application time in each of the high frequency voltage generators 10a to 10e.
- a gradient in which the pseudo-potential decreases in the direction of the ion optical axis is formed in the ion guide 20.
- By adjusting the value of the DC voltage maintenance time and / or the transient AC voltage application time in each of the high-frequency voltage generators 10a to 10e, the same pseudo-potential is generated in the ion guide 20 by increasing the frequency ⁇ of the high-frequency voltage. Formed.
- the ion guide 20 can move cations toward the ion optical axis.
- the high-frequency voltage generation device 10 has been described by way of example for use as a power source for an ion guide.
- the high-frequency voltage generation device 10 is also used for charged particle control devices other than ion guides in mass spectrometers, such as ion traps and mass filters. Can be used.
- the high-frequency voltage generation device 10 can also be used in devices other than the charged particle control device, such as a device that generates a high-frequency voltage from a direct-current voltage in the process of voltage conversion in a DC-DC converter.
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Abstract
Description
Vp(R)={qn2/(4mΩ2)}・(V/r)2・(R/r)2(n-1)
と表される。この式より、以下のことがいえる。
但し、ロッド電極のようにイオンガイドがイオン光軸に沿って連続的に存在する場合には、高周波電圧VRFの振幅Vや周波数Ωを変化させるという電気的方法により擬似ポテンシャルを変化させることは困難であり、イオンガイドの内接円半径r等のイオンガイドの構造を変化させることが必要である。しかし、イオンガイドの構造は使用時に変化させることはできず、イオンを自由に制御することができない。
a) 第1直流電圧を生成する第1直流電圧生成部と、
b) 前記第1直流電圧とは異なる値の第2直流電圧を生成する第2直流電圧生成部と、
c) 前記高周波電圧の周期よりも短い周期であって、前記第1直流電圧及び前記第2直流電圧の一方を最大値、他方を最小値とする過渡交流電圧を、該第1直流電圧又は該第2直流電圧を初期値として発振する過渡交流電圧生成部と、
d) 前記高周波電圧の1周期の間に電圧を、前記第1直流電圧、該第1直流電圧を前記初期値とする前記過渡交流電圧、前記第2直流電圧、該第2直流電圧を前記初期値とする前記過渡交流電圧、の順に切り換え、該過渡交流電圧の期間がそれぞれ該過渡交流電圧の周期の1.5以上の半整数倍であって該高周波電圧の半周期よりも短くなるよう、該負荷への印加電圧を切り換える印加電圧切替部と
を備えることを特徴とする。
まず、コンデンサC(電極対)に高周波電圧を印加する前に、以下のように正の直流電圧+V0を印加する。第0スイッチS0、第1スイッチS1、第2スイッチS2がいずれも開放されている状態から、制御部141は所定の制御信号を第1スイッチS1に送信することにより、第1スイッチS1を閉鎖する(図2(1))。この操作により、コンデンサC(電極対)の電圧が+V0まで立ち上がる(図4中に符号(1)を付して示した期間。以下、単に「図4(1)」等と表記する。)。なお、図2及び図3中の太破線は、制御部141からスイッチ(第0スイッチS0、第1スイッチS1、第2スイッチS2)に開放又は閉鎖の制御信号が送信されたことを示す。以下では、制御部141による制御信号の送信については記載を省略し、各スイッチの開放又は閉鎖の動作のみを記載する。
まず、第0スイッチS0を閉鎖する(図3(a))。これにより、LC回路内に共振電流が流れ、コンデンサC(電極対)には初期値及び最大値が+V0、最小値が-V0、周波数がωである過渡交流電圧が印加される(図4(a))。この過渡交流電圧は、半整数回(但し1.5回以上)、すなわち1回以上振動した後にさらに半分振動する時間(以下、「過渡交流電圧印加時間」とする)だけ印加する。この時間は、周波数ωを予め求めておいたうえで、制御部141が有するCPUのクロック周波数に基づいて制御すればよい。あるいは、LC回路に電圧の振動を検出する周波数カウンタを設けておき、そのカウント数に基づいて過渡交流電圧の印加を終了するタイミングを定めてもよい。
11…第1直流電源
12…第2直流電源
13…過渡交流電圧生成回路
14…印加電圧切替部
141…制御部
20…イオンガイド
21a~28a、21b~28b、21c~28c、21d~28d、21e~28e…イオンガイドの電極
29…イオン光軸
90…従来の高周波電圧生成装置における電気回路
Claims (5)
- 直流電圧から高周波電圧を生成して負荷に印加する高周波電圧生成装置であって、
a) 第1直流電圧を生成する第1直流電圧生成部と、
b) 前記第1直流電圧とは異なる値の第2直流電圧を生成する第2直流電圧生成部と、
c) 前記高周波電圧の周期よりも短い周期であって、前記第1直流電圧及び前記第2直流電圧の一方を最大値、他方を最小値とする過渡交流電圧を、該第1直流電圧又は該第2直流電圧を初期値として発振する過渡交流電圧生成部と、
d) 前記高周波電圧の1周期の間に電圧を、前記第1直流電圧、該第1直流電圧を前記初期値とする前記過渡交流電圧、前記第2直流電圧、該第2直流電圧を前記初期値とする前記過渡交流電圧、の順に切り換え、該過渡交流電圧の期間がそれぞれ該過渡交流電圧の周期の1.5以上の半整数倍であって該高周波電圧の半周期よりも短くなるよう、該負荷への印加電圧を切り換える印加電圧切替部と
を備えることを特徴とする高周波電圧生成装置。 - 前記第1直流電圧及び前記第2直流電圧を印加する時間と前記過渡交流電圧を印加する時間の比を変更する実効振幅変更部を備えることを特徴とする請求項1に記載の高周波電圧生成装置。
- 前記第1直流電圧及び前記第2直流電圧を印加する時間、並びに前記過渡交流電圧を印加する時間のいずれか一方又は両方を変更する高周波電圧周波数変更部を備えることを特徴とする請求項1又は2に記載の高周波電圧生成装置。
- 前記過渡交流電圧生成部が、インダクタとコンデンサを直列に接続したLC回路であって、該LC回路を開閉するLC回路開閉部と、該コンデンサに第1直流電圧及び第2直流電圧を選択的に印加する直流電圧選択印加部を備えることを特徴とする請求項1~3のいずれかに記載の高周波電圧生成装置。
- 前記コンデンサがイオンガイド又はイオントラップの負荷であることを特徴とする請求項4に記載の高周波電圧生成装置。
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US15/312,325 US9773655B2 (en) | 2014-05-21 | 2014-05-21 | Radio-frequency voltage generator |
CN201480079032.3A CN106463333B (zh) | 2014-05-21 | 2014-05-21 | 高频电压发生装置 |
PCT/JP2014/063475 WO2015177886A1 (ja) | 2014-05-21 | 2014-05-21 | 高周波電圧生成装置 |
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EP3147932A1 (en) | 2017-03-29 |
CN106463333A (zh) | 2017-02-22 |
US20170084441A1 (en) | 2017-03-23 |
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