WO2015156859A3 - Surface micromachined microphone with broadband signal detection - Google Patents

Surface micromachined microphone with broadband signal detection Download PDF

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Publication number
WO2015156859A3
WO2015156859A3 PCT/US2015/010997 US2015010997W WO2015156859A3 WO 2015156859 A3 WO2015156859 A3 WO 2015156859A3 US 2015010997 W US2015010997 W US 2015010997W WO 2015156859 A3 WO2015156859 A3 WO 2015156859A3
Authority
WO
WIPO (PCT)
Prior art keywords
μιη
response
khz
signal detection
microphone
Prior art date
Application number
PCT/US2015/010997
Other languages
French (fr)
Other versions
WO2015156859A2 (en
Inventor
Neal A. HALL
Michael L. KUNTZMAN
Karen Denise KIRK
Original Assignee
Board Of Regents, The University Of Texas System
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Board Of Regents, The University Of Texas System filed Critical Board Of Regents, The University Of Texas System
Priority to US15/111,080 priority Critical patent/US20160337761A1/en
Publication of WO2015156859A2 publication Critical patent/WO2015156859A2/en
Publication of WO2015156859A3 publication Critical patent/WO2015156859A3/en

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/80—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using ultrasonic, sonic or infrasonic waves
    • G01S3/801—Details

Abstract

A surface micromachined microphone with a 230 kHz bandwidth. The structure uses a 2.25 μιη thick, 305 μιη radius polysilicon diaphragm suspended above an 11 μιη gap to form a variable parallel-plate capacitance. The backcavity of the microphone consists of the 11 μιη thick air volume immediately behind the moving diaphragm, and also an extended larger cavity with a radius of 504 μιη. The dynamic frequency response of the sensor in response to electrostatic signals is presented using laser Doppler vibrometry, and indicates a system compliance of 0.4 nm/Pa in the flat-band of the response. The sensor is configured for acoustic signal detection using a charge amplifier configuration, and signal to noise ratio measurements and simulations are presented herein. A resolution of 0.80 mPa/√Hz (32 dB SPL in a 1 Hz bin) is achieved in the flat-band portion of the response extending from 10 kHz to 230 kHz.
PCT/US2015/010997 2014-01-13 2015-01-12 Surface micromachined microphone with broadband signal detection WO2015156859A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/111,080 US20160337761A1 (en) 2014-01-13 2015-01-12 Surface micromachined microphone with broadband signal detection

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461926868P 2014-01-13 2014-01-13
US61/926,868 2014-01-13

Publications (2)

Publication Number Publication Date
WO2015156859A2 WO2015156859A2 (en) 2015-10-15
WO2015156859A3 true WO2015156859A3 (en) 2016-03-10

Family

ID=54288510

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2015/010997 WO2015156859A2 (en) 2014-01-13 2015-01-12 Surface micromachined microphone with broadband signal detection

Country Status (2)

Country Link
US (1) US20160337761A1 (en)
WO (1) WO2015156859A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019032122A1 (en) * 2017-08-11 2019-02-14 Geist Robert A Hearing enhancement and protection with remote control
US11467025B2 (en) * 2018-08-17 2022-10-11 Invensense, Inc. Techniques for alternate pressure equalization of a sensor

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US20120189152A1 (en) * 2009-07-31 2012-07-26 Jochen Reinmuth Component having a micro-mechanical microphone structure and method for producing the component
US20120257778A1 (en) * 2011-04-08 2012-10-11 Board Of Regents, The University Of Texas System Differential microphone with sealed backside cavities and diaphragms coupled to a rocking structure thereby providing resistance to deflection under atmospheric pressure and providing a directional response to sound pressure

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EP2170531A2 (en) * 2007-07-31 2010-04-07 Koninklijke Philips Electronics N.V. Cmuts with a high-k dielectric
WO2010137528A1 (en) * 2009-05-25 2010-12-02 株式会社 日立メディコ Ultrasonic transducer and ultrasonic diagnostic apparatus provided with same
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US9078069B2 (en) * 2012-01-11 2015-07-07 Invensense, Inc. MEMS microphone with springs and interior support
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US20150109889A1 (en) * 2013-10-17 2015-04-23 Merry Electronics (Shenzhen) Co., Ltd. Acoustic transducer with membrane supporting structure
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Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783821A (en) * 1987-11-25 1988-11-08 The Regents Of The University Of California IC processed piezoelectric microphone
US20070007858A1 (en) * 2003-05-15 2007-01-11 Oticon A/S Microphone with adjustable properties
US20090278217A1 (en) * 2006-03-20 2009-11-12 Richard Ian Laming Mems device
US20080232615A1 (en) * 2007-03-21 2008-09-25 Goer Tek Inc. Condenser microphone chip
US20090202089A1 (en) * 2007-06-06 2009-08-13 Analog Devices, Inc. Microphone with Reduced Parasitic Capacitance
US20090185700A1 (en) * 2007-10-29 2009-07-23 Yamaha Corporation Vibration transducer and manufacturing method therefor
US20120189152A1 (en) * 2009-07-31 2012-07-26 Jochen Reinmuth Component having a micro-mechanical microphone structure and method for producing the component
US20120139066A1 (en) * 2010-12-03 2012-06-07 Electronics And Telecommunications Research Institute Mems microphone
US20120257778A1 (en) * 2011-04-08 2012-10-11 Board Of Regents, The University Of Texas System Differential microphone with sealed backside cavities and diaphragms coupled to a rocking structure thereby providing resistance to deflection under atmospheric pressure and providing a directional response to sound pressure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MARTIN: "A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements.", JOUMAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 16, no. 6, December 2007 (2007-12-01), pages 1289 - 1301, XP011197840, DOI: doi:10.1109/JMEMS.2007.909234 *

Also Published As

Publication number Publication date
US20160337761A1 (en) 2016-11-17
WO2015156859A2 (en) 2015-10-15

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