WO2015145280A1 - Puce microfluidique à cavités de piégeage de billes coniques et son procédé de fabrication - Google Patents

Puce microfluidique à cavités de piégeage de billes coniques et son procédé de fabrication Download PDF

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Publication number
WO2015145280A1
WO2015145280A1 PCT/IB2015/051579 IB2015051579W WO2015145280A1 WO 2015145280 A1 WO2015145280 A1 WO 2015145280A1 IB 2015051579 W IB2015051579 W IB 2015051579W WO 2015145280 A1 WO2015145280 A1 WO 2015145280A1
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WO
WIPO (PCT)
Prior art keywords
cavities
beads
array
layer
microfluidic chip
Prior art date
Application number
PCT/IB2015/051579
Other languages
English (en)
Inventor
Emmanuel Delamarche
Yuksel TEMIZ
Original Assignee
International Business Machines Corporation
Ibm (China) Investment Company Ltd.
Ibm Research Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corporation, Ibm (China) Investment Company Ltd., Ibm Research Gmbh filed Critical International Business Machines Corporation
Priority to GB1617833.7A priority Critical patent/GB2548941B/en
Priority to JP2016556828A priority patent/JP2017512987A/ja
Priority to CN201580012689.2A priority patent/CN106104271B/zh
Priority to DE112015000920.5T priority patent/DE112015000920B4/de
Publication of WO2015145280A1 publication Critical patent/WO2015145280A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
    • B01L2200/0668—Trapping microscopic beads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0864—Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/08—Regulating or influencing the flow resistance
    • B01L2400/084—Passive control of flow resistance
    • B01L2400/086—Passive control of flow resistance using baffles or other fixed flow obstructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/554—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals the carrier being a biological cell or cell fragment, e.g. bacteria, yeast cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Definitions

  • the said layer comprises one or more semiconductor element such as silicon, and the pyramidal shapes of the cavities exhibit a geometry consistent with an anisotropic etching process of fabrication of the cavities in the layer.
  • the cavities are, each, filled with a bead, preferably a microbead, having, on average, a diameter between 1 and 40 ⁇ , preferably 2 and 20 ⁇ , and more preferably 2 and 10 ⁇ .
  • the chip comprises several arrays of one or more bead trapping cavities, wherein said arrays are preferably inserted between distinct pairs of microchannel portions.
  • the invention is embodied as a method of fabrication of a microfluidic chip according to any one of the above embodiments, which method comprises:
  • microfluidic chip body with a layer
  • a cone is a particular case of a pyramid, i.e., defining a cone as a pyramid with a circular cross section, see e.g., b.tt : //m ath w or 3 d . wolfram . corn /Con e .him] .
  • conic shapes include pyramids (with polygonal bases) as a particular case. That is, present conic shapes do not necessarily have a circular cross section.
  • the conic shape shall nevertheless be likely truncated or, at least, not terminate as a perfect, point-like, apex. In fact, advantage can even be taken of a truncated cone, as to be discussed later.
  • the conic hole shall preferably have a polygonal base (the base corresponding to the aperture of the cavity 20), and therefore be pyramidal (with a polygonal base).
  • DEP electrodes can indeed be located in or near the traps, e.g., to levitate the beads 50, for example to recover beads, if desired, or expose the beads more to a solution flowing in the microchannel where an array 30 of traps is located.
  • the surface of the cavities can be metalized, e.g., using Al in order to amplify the fluorescence signal by reflection.
  • WD denotes the working distance between the sample surface and the low portion of the lens
  • Mag is for magnification
  • the beads are integrated to the cover layer 60 (e.g., a dry-film resist), instead of the layer 10.
  • cover layer 60 e.g., a dry-film resist

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Urology & Nephrology (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Micromachines (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Devices For Use In Laboratory Experiments (AREA)

Abstract

Une puce microfluidique (100) comprend une couche (10, 60) dotée d'un réseau (30) de cavités (20) de piégeage de billes formées dans cette couche (10, 60), chacune des cavités (20) ayant une forme conique, délimitée par une ou plusieurs parois latérales (21 à 24) qui sont, chacune, hydrophiles, et chacune des cavités (20) s'étendant sous la forme d'un trou borgne dans l'épaisseur de ladite couche (10, 60). Des procédés de fabrication d'une telle puce sont en outre décrits.
PCT/IB2015/051579 2014-03-26 2015-03-04 Puce microfluidique à cavités de piégeage de billes coniques et son procédé de fabrication WO2015145280A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1617833.7A GB2548941B (en) 2014-03-26 2015-03-04 Microfluidic chip with conic bead trapping cavities and fabrication thereof
JP2016556828A JP2017512987A (ja) 2014-03-26 2015-03-04 錐形ビーズ捕捉キャビティを備えるマイクロ流体チップおよびその作製
CN201580012689.2A CN106104271B (zh) 2014-03-26 2015-03-04 具有锥形珠陷获腔的微流体芯片及其制造
DE112015000920.5T DE112015000920B4 (de) 2014-03-26 2015-03-04 Mikrofluid-Chip mit pyramidenförmigen, Perlen einfangenden Hohlräumen sowie Herstellungsverfahren desselben

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1405402.7A GB2524541A (en) 2014-03-26 2014-03-26 Microfluidic chip with conic bead trapping cavities and fabrication thereof
GB1405402.7 2014-03-26

Publications (1)

Publication Number Publication Date
WO2015145280A1 true WO2015145280A1 (fr) 2015-10-01

Family

ID=50686941

Family Applications (1)

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PCT/IB2015/051579 WO2015145280A1 (fr) 2014-03-26 2015-03-04 Puce microfluidique à cavités de piégeage de billes coniques et son procédé de fabrication

Country Status (5)

Country Link
JP (1) JP2017512987A (fr)
CN (1) CN106104271B (fr)
DE (1) DE112015000920B4 (fr)
GB (2) GB2524541A (fr)
WO (1) WO2015145280A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107583692A (zh) * 2017-05-23 2018-01-16 深圳市博瑞生物科技有限公司 液滴微流控芯片及其制备方法
WO2019088904A1 (fr) 2017-10-31 2019-05-09 Astrego Diagnostics Ab Dispositif microfluidique de caractérisation cellulaire
US11173486B2 (en) 2019-02-13 2021-11-16 International Business Machines Corporation Fluidic cavities for on-chip layering and sealing of separation arrays
WO2023086216A3 (fr) * 2021-10-28 2023-08-31 Worcester Polytechnic Institute Refroidissement de liquide indépendant de la gravité pour composants électroniques
US11969702B2 (en) 2017-03-21 2024-04-30 Celldom, Inc. Sealed microwell assay

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GB201610426D0 (en) 2016-06-15 2016-07-27 Q-Linea Ab Sample holder for image based analysis of samples
DE102018203047A1 (de) * 2018-03-01 2019-09-05 Robert Bosch Gmbh Mikrofluidische Vorrichtung
WO2020062149A1 (fr) * 2018-09-29 2020-04-02 天津大学 Structure d'encapsulation flexible et son procédé de fabrication
CN109701671A (zh) * 2018-12-27 2019-05-03 复旦大学 一种微液滴阵列芯片及其制造和使用方法
CN112723303B (zh) * 2020-12-14 2021-09-24 苏州拉索生物芯片科技有限公司 微珠芯片及其旋涂制备方法
CN114308163B (zh) * 2021-12-31 2024-01-09 北京京东方技术开发有限公司 微流控芯片检测卡盒

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US20040053322A1 (en) * 2000-01-31 2004-03-18 Mcdevitt John T. System and method for the analysis of bodily fluids
US6908770B1 (en) * 1998-07-16 2005-06-21 Board Of Regents, The University Of Texas System Fluid based analysis of multiple analytes by a sensor array

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JP4431724B2 (ja) * 2005-07-05 2010-03-17 独立行政法人産業技術総合研究所 マイクロ流路ビーズアレイデバイス及びその作製方法
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JPH10332593A (ja) * 1997-05-27 1998-12-18 Hitachi Ltd 電気化学発光検出セル
US6908770B1 (en) * 1998-07-16 2005-06-21 Board Of Regents, The University Of Texas System Fluid based analysis of multiple analytes by a sensor array
CN1267089A (zh) * 1999-03-15 2000-09-20 清华大学 可单点选通式微电磁单元阵列芯片、电磁生物芯片及应用
US6589779B1 (en) * 1999-07-16 2003-07-08 Board Of Regents, The University Of Texas System General signaling protocol for chemical receptors in immobilized matrices
US20040053322A1 (en) * 2000-01-31 2004-03-18 Mcdevitt John T. System and method for the analysis of bodily fluids
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11969702B2 (en) 2017-03-21 2024-04-30 Celldom, Inc. Sealed microwell assay
CN107583692A (zh) * 2017-05-23 2018-01-16 深圳市博瑞生物科技有限公司 液滴微流控芯片及其制备方法
WO2019088904A1 (fr) 2017-10-31 2019-05-09 Astrego Diagnostics Ab Dispositif microfluidique de caractérisation cellulaire
EP3704058A4 (fr) * 2017-10-31 2021-11-10 Astrego Diagnostics AB Dispositif microfluidique de caractérisation cellulaire
US11173486B2 (en) 2019-02-13 2021-11-16 International Business Machines Corporation Fluidic cavities for on-chip layering and sealing of separation arrays
US11612889B2 (en) 2019-02-13 2023-03-28 International Business Machines Corporation Fluidic cavities for on-chip layering and sealing of separation arrays
US11992837B2 (en) 2019-02-13 2024-05-28 International Business Machines Corporation Fluidic cavities for on-chip layering and sealing of separation arrays
WO2023086216A3 (fr) * 2021-10-28 2023-08-31 Worcester Polytechnic Institute Refroidissement de liquide indépendant de la gravité pour composants électroniques

Also Published As

Publication number Publication date
GB2548941B (en) 2020-08-19
GB201405402D0 (en) 2014-05-07
GB2548941A (en) 2017-10-04
DE112015000920T5 (de) 2016-11-24
GB201617833D0 (en) 2016-12-07
DE112015000920B4 (de) 2021-09-30
CN106104271B (zh) 2018-04-20
CN106104271A (zh) 2016-11-09
GB2524541A (en) 2015-09-30
JP2017512987A (ja) 2017-05-25

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