WO2015128501A3 - Electrodes suitable for producing micro- and/or nanostructures on materials - Google Patents

Electrodes suitable for producing micro- and/or nanostructures on materials Download PDF

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Publication number
WO2015128501A3
WO2015128501A3 PCT/EP2015/054221 EP2015054221W WO2015128501A3 WO 2015128501 A3 WO2015128501 A3 WO 2015128501A3 EP 2015054221 W EP2015054221 W EP 2015054221W WO 2015128501 A3 WO2015128501 A3 WO 2015128501A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
substrate
nanostructures
materials
producing micro
Prior art date
Application number
PCT/EP2015/054221
Other languages
German (de)
French (fr)
Other versions
WO2015128501A2 (en
Inventor
Cord Winkelmann
Original Assignee
Cord Winkelmann
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cord Winkelmann filed Critical Cord Winkelmann
Priority to EP15712075.9A priority Critical patent/EP3110990A2/en
Publication of WO2015128501A2 publication Critical patent/WO2015128501A2/en
Publication of WO2015128501A3 publication Critical patent/WO2015128501A3/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B23H3/04—Electrodes specially adapted therefor or their manufacture
    • B23H3/06—Electrode material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/008—Surface roughening or texturing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/10—Working turbine blades or nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electrodes For Compound Or Non-Metal Manufacture (AREA)

Abstract

The invention relates to an electrode suitable for producing micro- and/or nanostructures on materials, comprising a substrate (3) that has at least one first conducting layer (1) on the surface of the substrate or a substrate that forms a conductive substrate layer, wherein at least one first insulating layer (2) is formed on the at least one first conducting layer or the conductive substrate layer, wherein the first insulating layer covers the at least one first conducting layer or the conductive substrate layer only in some sections and at least one structuring element (6) is formed. The substrate has a substantially curved shape or can be plastically or elastically deformed. A further aspect relates to a multi-layer electrode and an electrode that has a fluidic channel (9), the flow area of which increases or decreases in a direction of longitudinal extent.
PCT/EP2015/054221 2014-02-27 2015-02-27 Electrodes suitable for producing micro- and/or nanostructures on materials WO2015128501A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15712075.9A EP3110990A2 (en) 2014-02-27 2015-02-27 Electrodes suitable for producing micro- and/or nanostructures on materials

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014102550.4A DE102014102550A1 (en) 2014-02-27 2014-02-27 Electrodes suitable for the production of micro and / or nanostructures on materials
DE102014102550.4 2014-02-27

Publications (2)

Publication Number Publication Date
WO2015128501A2 WO2015128501A2 (en) 2015-09-03
WO2015128501A3 true WO2015128501A3 (en) 2015-10-15

Family

ID=52737071

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2015/054221 WO2015128501A2 (en) 2014-02-27 2015-02-27 Electrodes suitable for producing micro- and/or nanostructures on materials

Country Status (3)

Country Link
EP (1) EP3110990A2 (en)
DE (1) DE102014102550A1 (en)
WO (1) WO2015128501A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110640242A (en) * 2018-06-27 2020-01-03 鸿富锦精密工业(衡阳)有限公司 Electric spark machining method
CN113649657B (en) * 2021-06-01 2022-10-04 清华大学 Nano-scale polycrystalline silicon tool electrode for electrolytic machining and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52126640A (en) * 1976-04-17 1977-10-24 Dainippon Printing Co Ltd Electrolytic etching method
US20080283501A1 (en) * 2004-07-24 2008-11-20 University Of Newcastle Upon Tyne Process for Manufacturing Micro-and Nano-Devices
US20120006691A1 (en) * 2010-07-08 2012-01-12 Yuefeng Luo Method, apparatus and system for flexible electrochemical processing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3485744A (en) * 1966-11-21 1969-12-23 Westinghouse Electric Corp Zirconium electrode for electro-chemical machining
KR100312831B1 (en) * 1999-07-14 2001-11-03 이은상 Micro electrochemical micromachining device for structure micro groove
DE10111019A1 (en) 2001-03-07 2002-09-12 Bosch Gmbh Robert Process for structuring a surface

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52126640A (en) * 1976-04-17 1977-10-24 Dainippon Printing Co Ltd Electrolytic etching method
US20080283501A1 (en) * 2004-07-24 2008-11-20 University Of Newcastle Upon Tyne Process for Manufacturing Micro-and Nano-Devices
US20120006691A1 (en) * 2010-07-08 2012-01-12 Yuefeng Luo Method, apparatus and system for flexible electrochemical processing

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
See also references of EP3110990A2 *
WINKELMANN C ET AL: "Influence of the electrode distance and metal ion concentration on the resulting structure in electrochemical micromachining with structured counter electrodes", INTERNATIONAL JOURNAL OF MACHINE TOOLS AND MANUFACTURE, vol. 72, 17 May 2013 (2013-05-17), pages 25 - 31, XP028687169, ISSN: 0890-6955, DOI: 10.1016/J.IJMACHTOOLS.2013.05.004 *
WINKELMANN CORD ET AL: "Sensorial Surfaces-Embedding Sensor Structures Into the Surface of Materials", IEEE SENSORS JOURNAL, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 14, no. 7, 7 November 2013 (2013-11-07), pages 2078 - 2083, XP011549205, ISSN: 1530-437X, DOI: 10.1109/JSEN.2013.2290134 *

Also Published As

Publication number Publication date
EP3110990A2 (en) 2017-01-04
DE102014102550A1 (en) 2015-08-27
WO2015128501A2 (en) 2015-09-03

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