WO2015098788A1 - Triazine-polymer-containing composition - Google Patents

Triazine-polymer-containing composition Download PDF

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WO2015098788A1
WO2015098788A1 PCT/JP2014/083819 JP2014083819W WO2015098788A1 WO 2015098788 A1 WO2015098788 A1 WO 2015098788A1 JP 2014083819 W JP2014083819 W JP 2014083819W WO 2015098788 A1 WO2015098788 A1 WO 2015098788A1
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group
polymer
triazine
containing composition
compound
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PCT/JP2014/083819
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French (fr)
Japanese (ja)
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直也 西村
小澤 雅昭
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日産化学工業株式会社
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/04Oxygen-containing compounds
    • C08K5/10Esters; Ether-esters
    • C08K5/101Esters; Ether-esters of monocarboxylic acids
    • C08K5/103Esters; Ether-esters of monocarboxylic acids with polyalcohols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/02Polyamines
    • C08G73/026Wholly aromatic polyamines
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/02Polyamines
    • C08G73/0273Polyamines containing heterocyclic moieties in the main chain
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/0622Polycondensates containing six-membered rings, not condensed with other rings, with nitrogen atoms as the only ring hetero atoms
    • C08G73/0638Polycondensates containing six-membered rings, not condensed with other rings, with nitrogen atoms as the only ring hetero atoms with at least three nitrogen atoms in the ring
    • C08G73/0644Poly(1,3,5)triazines
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D163/00Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D179/00Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
    • C09D179/04Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029

Definitions

  • the present invention relates to a triazine polymer-containing composition.
  • a polymer containing a repeating unit having a triazine ring and an aromatic ring has a high refractive index, and the polymer alone has high heat resistance, high transparency, high refractive index, and high solubility. It has already been found that a low volume shrinkage can be achieved and it is suitable as a film-forming composition for producing an electronic device (Patent Document 1).
  • Patent Document 1 can meet the demand in terms of refractive index, but there is room for improvement in terms of fine pattern formability.
  • Patent Document 2 discloses a pattern-forming composition containing a triazine ring-containing polymer, the polymer has a refractive index of less than 1.7, and a higher refractive index is required. Not suitable for use.
  • the present invention has been made in view of the above circumstances, and can form a thin film having a high refractive index and excellent transparency by low-temperature firing, and can also form a fine pattern having a high refractive index.
  • An object is to provide a coalescence-containing composition.
  • the present inventors have obtained a composition comprising a triazine ring-containing polymer substituted with an arylamino group having a predetermined functional group, and two kinds of crosslinking agents.
  • a composition comprising a triazine ring-containing polymer substituted with an arylamino group having a predetermined functional group, and two kinds of crosslinking agents.
  • a triazine-based polymer-containing composition comprising a polymer containing a repeating unit structure represented by the following formula (1) and at least two kinds of crosslinking agents: ⁇ In the formula, R and R 'each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Ar 1 represents an aryl group having a hydroxyl group, a carboxyl group, and / or a maleimide group.
  • Ar 2 represents at least one selected from the group represented by formulas (2) to (13).
  • R 1 to R 92 are independently of each other a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or a carbon number of 1
  • R 93 and R 94 represent a hydrogen atom or an alkyl group which may have a branched structure of 1 to 10 carbon atoms
  • W 1 and W 2 is independently a single bond
  • CR 95 R 96 R 95 and R 96 are each independently a hydrogen atom or an alkyl group optionally having a branched structure of 1 to 10 carbon atoms ( However, these may be combined to form a ring.))
  • C ⁇ O, O, S, SO, SO 2 , or NR 97 R 97 is a hydrogen atom or a carbon number of 1).
  • X 1 Contact Fine X 2 are independently of each other a single bond, an alkylene group which may have a branched structure having 1 to 10 carbon atoms, or the formula, (14) (Wherein R 98 to R 101 are each independently a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or 1 carbon atom) Represents an alkoxy group which may have a branched structure of ⁇ 10, and Y 1 and Y 2 each independently represent an alkylene group which may have a single bond or a branched structure of 1 to 10 carbon atoms.
  • the triazine polymer-containing composition according to any one of 1 to 3, wherein the polymer includes a repeating unit structure represented by the following formula (18): (Wherein R, R ′ and Ar 2 represent the same meaning as described above.) 5.
  • An electronic device comprising a substrate and eleven patterns formed on the substrate is provided.
  • the present invention it is possible to form a thin film having a high refractive index and excellent transparency, and it is possible to form a fine pattern by masking, exposing and curing, and then performing alkali development or the like.
  • two kinds of crosslinking agents are used in combination, there is an advantage that a thin film can be formed by low-temperature firing.
  • the cured film and fine pattern produced from the composition of the present invention can exhibit characteristics such as high heat resistance, high refractive index, and low volume shrinkage due to the crosslinked triazine ring-containing polymer.
  • Luminescence (EL) display touch panel, optical semiconductor (LED) element, solid-state imaging device, organic thin film solar cell, dye-sensitized solar cell, organic thin film transistor (TFT), lens, prism, camera, binoculars, microscope, semiconductor exposure device, etc. It can be suitably used in the field of electronic devices and optical materials, such as one member for manufacturing the device.
  • the high refractive index pattern produced from the composition of the present invention requires a high refractive index pattern including the above-mentioned prevention of transparent electrode bone appearance such as touch panel, light extraction use of organic EL display and black matrix use. It can be suitably used for the intended use.
  • FIG. 1 is a 1 H-NMR spectrum diagram of a polymer compound [4] obtained in Example 1.
  • FIG. FIG. 3 is a graph showing a TG-DTA measurement result of the polymer compound [4] obtained in Example 1.
  • the triazine polymer-containing composition according to the present invention includes a polymer containing a repeating unit structure represented by the following formula (1) and at least two kinds of crosslinking agents.
  • R and R ′ each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group.
  • both of them may be hydrogen atoms.
  • the number of carbon atoms of the alkyl group is not particularly limited, but is preferably 1 to 20, and more preferably 1 to 10 carbon atoms in view of further improving the heat resistance of the polymer. Is even more preferable.
  • the structure may be any of a chain, a branch, and a ring.
  • alkyl group examples include methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-butyl, isobutyl, s-butyl, t-butyl, cyclobutyl, 1-methyl-cyclopropyl, 2-methyl-cyclopropyl.
  • N-pentyl 1-methyl-n-butyl, 2-methyl-n-butyl, 3-methyl-n-butyl, 1,1-dimethyl-n-propyl, 1,2-dimethyl-n-propyl, 2 , 2-dimethyl-n-propyl, 1-ethyl-n-propyl, cyclopentyl, 1-methyl-cyclobutyl, 2-methyl-cyclobutyl, 3-methyl-cyclobutyl, 1,2-dimethyl-cyclopropyl, 2,3- Dimethyl-cyclopropyl, 1-ethyl-cyclopropyl, 2-ethyl-cyclopropyl, n-hexyl, 1-methyl-n-pe Til, 2-methyl-n-pentyl, 3-methyl-n-pentyl, 4-methyl-n-pentyl, 1,1-dimethyl-n-butyl, 1,2-dimethyl-n-butyl, 1,3- Dimethyl-n-butyl, 2,2-di
  • the number of carbon atoms of the alkoxy group is not particularly limited, but is preferably 1 to 20, and more preferably 1 to 10 carbon atoms, more preferably 1 to 3 carbon atoms in view of further improving the heat resistance of the polymer. preferable.
  • the structure of the alkyl moiety may be any of a chain, a branch, and a ring.
  • alkoxy group examples include methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, s-butoxy, t-butoxy, n-pentoxy, 1-methyl-n-butoxy, 2-methyl-n -Butoxy, 3-methyl-n-butoxy, 1,1-dimethyl-n-propoxy, 1,2-dimethyl-n-propoxy, 2,2-dimethyl-n-propoxy, 1-ethyl-n-propoxy, n -Hexyloxy, 1-methyl-n-pentyloxy, 2-methyl-n-pentyloxy, 3-methyl-n-pentyloxy, 4-methyl-n-pentyloxy, 1,1-dimethyl-n-butoxy, 1,2-dimethyl-n-butoxy, 1,3-dimethyl-n-butoxy, 2,2-dimethyl-n-butoxy, 2,3-dimethyl-n-butoxy 3,3-dimethyl-n-butoxy, 1-ethoxy,
  • the number of carbon atoms of the aryl group is not particularly limited, but is preferably 6 to 40. In view of further improving the heat resistance of the polymer, 6 to 16 carbon atoms are more preferable, and 6 to 13 are even more preferable. preferable.
  • aryl group examples include phenyl, o-chlorophenyl, m-chlorophenyl, p-chlorophenyl, o-fluorophenyl, p-fluorophenyl, o-methoxyphenyl, p-methoxyphenyl, p-nitrophenyl, p-cyanophenyl, ⁇ -naphthyl, ⁇ -naphthyl, o-biphenylyl, m-biphenylyl, p-biphenylyl, 1-anthryl, 2-anthryl, 9-anthryl, 1-phenanthryl, 2-phenanthryl, 3-phenanthryl, 4 -Phenanthryl, 9-phenanthryl group and the like.
  • the number of carbon atoms of the aralkyl group is not particularly limited, but preferably 7 to 20 carbon atoms, and the alkyl portion may be linear, branched or cyclic. Specific examples thereof include benzyl, p-methylphenylmethyl, m-methylphenylmethyl, o-ethylphenylmethyl, m-ethylphenylmethyl, p-ethylphenylmethyl, 2-propylphenylmethyl, 4-isopropylphenylmethyl, Examples include 4-isobutylphenylmethyl, ⁇ -naphthylmethyl group and the like.
  • Ar 1 is not particularly limited as long as it is an aryl group having a hydroxyl group, a carboxyl group and / or a maleimide group, but those represented by the following formulas (15) to (17) are preferred.
  • R 102 to R 110 each independently represent the same meaning as R 1 above.
  • those represented by the following formula are preferable from the viewpoint of improving the solubility of the obtained cured product in an alkaline developer.
  • the triazine ring-containing polymer of the present invention preferably includes a repeating unit structure represented by the following formula (18), and more preferably includes a repeating unit structure represented by the following formula (19).
  • Ar 2 represents at least one selected from the group represented by formulas (2) to (13).
  • R 1 to R 92 are independently of each other a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group that may have a branched structure having 1 to 10 carbon atoms, or a group having 1 to 10 carbon atoms.
  • X 1 and X 2 each independently represent a single bond, an alkylene group which may have a branched structure having 1 to 10 carbon atoms, or a group represented by the formula (14).
  • R 98 to R 101 are each independently a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or a carbon atom having 1 to 10 carbon atoms.
  • An alkoxy group which may have a branched structure is represented, and Y 1 and Y 2 each independently represent an alkylene group which may have a single bond or a branched structure having 1 to 10 carbon atoms.
  • Examples of the halogen atom, alkyl group and alkoxy group are the same as those described above.
  • Examples of the alkylene group that may have a branched structure having 1 to 10 carbon atoms include methylene, ethylene, propylene, trimethylene, tetramethylene, and pentamethylene groups.
  • Ar is preferably at least one of the formulas (2), (5) to (13), and the formulas (2), (5), (7), (8), (11) to (13) More preferably, at least one selected from Specific examples of the aryl group represented by the above formulas (2) to (13) include, but are not limited to, those represented by the following formulae.
  • an aryl group represented by the following formula is more preferable because a polymer having a higher refractive index can be obtained.
  • a repeating unit structure represented by the following formula (20) in view of further improving the solubility in a highly safe solvent such as a resist solvent, and a repeating unit structure represented by the following formula (21). It is more preferable that it contains.
  • the weight average molecular weight of the polymer in the present invention is not particularly limited, but is preferably 500 to 500,000, more preferably 500 to 100,000. From the viewpoint of further improving the heat resistance and reducing the shrinkage rate. It is preferably 2000 or more, preferably 50000 or less, more preferably 30000 or less, and even more preferably 10,000 or less from the viewpoint of further increasing the solubility and decreasing the viscosity of the obtained solution.
  • the weight average molecular weight in this invention is an average molecular weight obtained by standard polystyrene conversion by gel permeation chromatography (henceforth GPC) analysis.
  • the triazine ring-containing polymer used in the present invention can be produced by the technique disclosed in Patent Document 1 described above.
  • a triazine ring-containing polymer having a repeating structure (26) is obtained by reacting a triazine compound (24) having a phenylamino group and a diamino compound (25) in a suitable organic solvent.
  • the compound represented by the above formula (24) can be produced from a cyanuric halide and 3-aminophenol by a known method. Further, the reaction may be carried out by adding a diamino compound into the reaction system of cyanuric halide and 3-aminophenol.
  • the amount of each raw material charged is arbitrary as long as the target polymer is obtained, but is preferably 0.01 to 10 equivalents of diamino compound (25) to 1 equivalent of triazine compound (24). 0.1 to 0.8 equivalent or 1 to 5 equivalent is more preferable.
  • the reaction temperature may be appropriately set in the range from the melting point of the solvent to be used to the boiling point of the solvent, but is preferably about ⁇ 30 to 150 ° C., more preferably ⁇ 10 to 100 ° C.
  • organic solvent various solvents usually used in this kind of reaction can be used, for example, tetrahydrofuran, dioxane, dimethyl sulfoxide; N, N-dimethylformamide, N-methyl-2-pyrrolidone, tetramethylurea, Hexamethylphosphoramide, N, N-dimethylacetamide, N-methyl-2-piperidone, N, N-dimethylethyleneurea, N, N, N ′, N′-tetramethylmalonic acid amide, N-methylcaprolactam, N-acetylpyrrolidine, N, N-diethylacetamide, N-ethyl-2-pyrrolidone, N, N-dimethylpropionic acid amide, N, N-dimethylisobutyramide, N-methylformamide, N, N'-dimethylpropylene urea Amide solvents such as, and mixed solvents thereof Among these, N, N-dimethylformamide, dimethyl s thereof,
  • the order of blending the components is arbitrary, but a method of adding the diamino compound (25) to a solution containing the triazine compound (24) and the organic solvent is preferable.
  • Components added later may be added neat or in a solution dissolved in an organic solvent as described above, but the latter method is preferred in view of ease of operation and ease of reaction control. It is.
  • the addition may be gradually added by dropping or the like, or may be added all at once.
  • various bases usually used during polymerization or after polymerization may be added.
  • this base include potassium carbonate, potassium hydroxide, sodium carbonate, sodium hydroxide, sodium hydrogen carbonate, sodium ethoxide, sodium acetate, lithium carbonate, lithium hydroxide, lithium oxide, potassium acetate, magnesium oxide, oxidized Calcium, barium hydroxide, trilithium phosphate, trisodium phosphate, tripotassium phosphate, cesium fluoride, aluminum oxide, ammonia, trimethylamine, triethylamine, diisopropylamine, diisopropylethylamine, N-methylpiperidine, 2,2,6 , 6-tetramethyl-N-methylpiperidine, pyridine, 4-dimethylaminopyridine, N-methylmorpholine and the like.
  • the amount of the base added is preferably 1 to 100 equivalents and more preferably 1 to 10 equivalents with respect to 1 equivalent of the triazine compound (24). These bases may be used as an aqueous solution. Although it is preferable that the raw material component does not remain in the obtained polymer, a part of the raw material may remain as long as the effect of the present invention is not impaired. In any of the scheme methods, after completion of the reaction, the product can be easily purified by a reprecipitation method or the like.
  • a part of halogen atoms of at least one terminal triazine ring is substituted with alkyl, aralkyl, aryl, alkylamino, alkoxysilyl group-containing alkylamino, aralkylamino, arylamino, alkoxy, aralkyloxy, aryloxy.
  • alkylamino, alkoxysilyl group-containing alkylamino, aralkylamino, and arylamino groups are preferable, alkylamino and arylamino groups are more preferable, and arylamino groups are more preferable. Examples of the alkyl group and alkoxy group are the same as those described above.
  • ester group examples include methoxycarbonyl and ethoxycarbonyl groups.
  • aryl group include phenyl, o-chlorophenyl, m-chlorophenyl, p-chlorophenyl, o-fluorophenyl, p-fluorophenyl, o-methoxyphenyl, p-methoxyphenyl, p-nitrophenyl, p-cyanophenyl, ⁇ -naphthyl, ⁇ -naphthyl, o-biphenylyl, m-biphenylyl, p-biphenylyl, 1-anthryl, 2-anthryl, 9-anthryl, 1-phenanthryl, 2-phenanthryl, 3-phenanthryl, 4 -Phenanthryl, 9-phenanthryl group and the like.
  • aralkyl group examples include benzyl, p-methylphenylmethyl, m-methylphenylmethyl, o-ethylphenylmethyl, m-ethylphenylmethyl, p-ethylphenylmethyl, 2-propylphenylmethyl, 4-isopropylphenyl.
  • examples include methyl, 4-isobutylphenylmethyl, ⁇ -naphthylmethyl group and the like.
  • alkylamino group examples include methylamino, ethylamino, n-propylamino, isopropylamino, n-butylamino, isobutylamino, s-butylamino, t-butylamino, n-pentylamino, 1-methyl- n-butylamino, 2-methyl-n-butylamino, 3-methyl-n-butylamino, 1,1-dimethyl-n-propylamino, 1,2-dimethyl-n-propylamino, 2,2-dimethyl -N-propylamino, 1-ethyl-n-propylamino, n-hexylamino, 1-methyl-n-pentylamino, 2-methyl-n-pentylamino, 3-methyl-n-pentylamino, 4-methyl -N-pentylamino, 1,1-dimethyl-n-butylamino, 1,2-
  • aralkylamino group examples include benzylamino, methoxycarbonylphenylmethylamino, ethoxycarbonylphenylmethylamino, p-methylphenylmethylamino, m-methylphenylmethylamino, o-ethylphenylmethylamino, m-ethylphenylmethyl.
  • arylamino group examples include phenylamino, methoxycarbonylphenylamino, ethoxycarbonylphenylamino, naphthylamino, methoxycarbonylnaphthylamino, ethoxycarbonylnaphthylamino, anthranylamino, pyrenylamino, biphenylamino, terphenylamino, fluorenyl An amino group etc. are mentioned.
  • the alkoxysilyl group-containing alkylamino group may be any of monoalkoxysilyl group-containing alkylamino, dialkoxysilyl group-containing alkylamino, trialkoxysilyl group-containing alkylamino group, and specific examples thereof include 3-trimethoxysilyl.
  • aryloxy group examples include phenoxy, naphthoxy, anthranyloxy, pyrenyloxy, biphenyloxy, terphenyloxy, and fluorenyloxy groups.
  • aralkyloxy group examples include benzyloxy, p-methylphenylmethyloxy, m-methylphenylmethyloxy, o-ethylphenylmethyloxy, m-ethylphenylmethyloxy, p-ethylphenylmethyloxy, 2-propyl Examples include phenylmethyloxy, 4-isopropylphenylmethyloxy, 4-isobutylphenylmethyloxy, ⁇ -naphthylmethyloxy groups and the like.
  • These groups can be easily introduced by substituting a halogen atom on the triazine ring with a compound that gives a corresponding substituent.
  • a halogen atom on the triazine ring For example, as shown in the following formula scheme 2, an aniline (derivative) or the like can be introduced.
  • an organic monoamine By adding and reacting an organic monoamine, a triazine ring-containing polymer (27) having a phenylamino group at at least one terminal is obtained.
  • Alkyl monoamines include methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, s-butylamine, t-butylamine, n-pentylamine, 1-methyl-n-butylamine, 2-methyl- n-butylamine, 3-methyl-n-butylamine, 1,1-dimethyl-n-propylamine, 1,2-dimethyl-n-propylamine, 2,2-dimethyl-n-propylamine, 1-ethyl-n -Propylamine, n-hexylamine, 1-methyl-n-pentylamine, 2-methyl-n-pentylamine, 3-methyl-n-pentylamine, 4-methyl-n-pentylamine, 1,1-dimethyl -N-but
  • aralkyl monoamines include benzylamine, p-methoxycarbonylbenzylamine, p-ethoxycarbonylbenzylamine, p-methylbenzylamine, m-methylbenzylamine, o-methoxybenzylamine and the like.
  • aryl monoamine examples include aniline, p-methoxycarbonylaniline, p-ethoxycarbonylaniline, p-methoxyaniline, 1-naphthylamine, 2-naphthylamine, anthranylamine, 1-aminopyrene, 4-biphenylylamine, o- And phenylaniline, 4-amino-p-terphenyl, 2-aminofluorene, and the like.
  • the amount of the organic monoamine used is preferably 0.05 to 500 equivalents, more preferably 0.05 to 120 equivalents, and even more preferably 0.05 to 50 equivalents based on the halogenated cyanuric compound. .
  • the reaction temperature is preferably 60 to 150 ° C, more preferably 80 to 150 ° C, and still more preferably 80 to 120 ° C.
  • the mixing of the three components of the organic monoamine, the halogenated cyanuric compound and the diaminoaryl compound may be carried out at a low temperature. In this case, the temperature is preferably about ⁇ 50 to 50 ° C., and about ⁇ 20 to 50 ° C. Is more preferable, and ⁇ 20 to 10 ° C. is more preferable.
  • the reaction After the low temperature charging, it is preferable to carry out the reaction by raising the temperature to the polymerization temperature at once (in one step).
  • the two components of the cyanuric halide compound and the diaminoaryl compound may be mixed at a low temperature.
  • the temperature is preferably about ⁇ 50 to 50 ° C., more preferably about ⁇ 20 to 50 ° C., More preferably, it is ⁇ 20 to 10 ° C.
  • crosslinking agent is not particularly limited as long as it is a compound having a substituent capable of reacting with the above-described triazine ring-containing polymer.
  • examples of such compounds include melamine compounds having a crosslinkable substituent such as a methylol group and methoxymethyl group, substituted urea compounds, compounds containing a crosslinkable substituent such as an epoxy group or an oxetane group, and blocked isocyanates.
  • a compound containing a group is preferable, and in particular, two types selected from a compound having a blocked isocyanate group and a polyfunctional epoxy compound and a polyfunctional (meth) acryl compound that give a photocurable composition without using an initiator.
  • a polyfunctional epoxy compound and a polyfunctional (meth) acrylic compound Seen together is more preferable.
  • These compounds may have at least one crosslink forming substituent when used for polymer terminal treatment, and at least two crosslink forming substituents when used for cross-linking treatment between polymers. It is necessary to have.
  • the polyfunctional epoxy compound is not particularly limited as long as it has two or more epoxy groups in one molecule. Specific examples include tris (2,3-epoxypropyl) isocyanurate, 1,4-butanediol diglycidyl ether, 1,2-epoxy-4- (epoxyethyl) cyclohexane, glycerol triglycidyl ether, diethylene glycol diglycidyl.
  • epoxy resins having at least two epoxy groups YH-434, YH434L (manufactured by Tohto Kasei Co., Ltd.), epoxy resins having a cyclohexene oxide structure, Epolide GT-401 and GT -403, GT-301, GT-302, Celoxide 2021, 3000 (manufactured by Daicel Chemical Industries, Ltd.), bisphenol A type epoxy resin, Epicoat (currently jER) 1001, 1002, 1003, 1004, 1007, 1009, 1010, 828 (Japan Epoxy Resin Co., Ltd.), Bisphenol F type epoxy resin, Epicoat (currently jER) 807 (Japan Epoxy Resin Co., Ltd.) , Epicoat (a phenol novolac type epoxy resin) , JER) 152, 154 (above, manufactured by Japan Epoxy Resins Co., Ltd.), EPPN 201, 202 (above, manufactured by Nippon Kayaku Co., Ltd.
  • the polyfunctional (meth) acrylic compound is not particularly limited as long as it has two or more (meth) acrylic groups in one molecule.
  • Specific examples include ethylene glycol diacrylate, ethylene glycol dimethacrylate, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, ethoxylated bisphenol A diacrylate, ethoxylated bisphenol A dimethacrylate, ethoxylated trimethylolpropane triacrylate, and ethoxylated.
  • Polyfunctional (meth) acrylic compounds can be obtained as commercial products. Specific examples thereof include NK ester A-200, same A-400, same A-600, same A-1000, same A- 9300 (Tris (2-acryloyloxyethyl) isocyanurate), A-9300-1CL, A-TMPT, UA-53H, 1G, 2G, 3G, 4G, 9G, 14G, 23G, ABE-300, A-BPE-4, A-BPE-6, A-BPE-10, A-BPE-20, A-BPE-30, BPE-80N, BPE- 100N, BPE-200, BPE-500, BPE-900, BPE-1300N, A-GLY-3E, A-GLY-9E, A-GLY-20E, A-TMPT-3EO, Same A- MPT-9EO, AT-20E, ATM-4E, ATM-35E (Shin Nakamura Chemical Co., Ltd.), KAYARAD (registered trademark) DPEA-12, PEG400
  • the acid anhydride compound is not particularly limited as long as it is a carboxylic acid anhydride obtained by dehydration condensation of two molecules of carboxylic acid. Specific examples thereof include phthalic anhydride, tetrahydrophthalic anhydride, hexahydroanhydride.
  • the isocyanate group (—NCO) when the isocyanate group (—NCO) has two or more blocked isocyanate groups blocked by an appropriate protective group in one molecule, it is exposed to a high temperature during thermosetting.
  • the protective group (block part) is not particularly limited as long as it is dissociated by thermal dissociation and the resulting isocyanate group causes a crosslinking reaction with the resin.
  • a group represented by the following formula Examples thereof include compounds having two or more in the molecule (note that these groups may be the same or different from each other).
  • R b represents an organic group in the block part.
  • Such a compound can be obtained, for example, by reacting an appropriate blocking agent with a compound having two or more isocyanate groups in one molecule.
  • the compound having two or more isocyanate groups in one molecule include, for example, isophorone diisocyanate, 1,6-hexamethylene diisocyanate, methylene bis (4-cyclohexyl isocyanate), polyisocyanate of trimethylhexamethylene diisocyanate, and dimers thereof. , Trimers, and reaction products of these with diols, triols, diamines, or triamines.
  • the blocking agent examples include alcohols such as methanol, ethanol, isopropanol, n-butanol, 2-ethoxyhexanol, 2-N, N-dimethylaminoethanol, 2-ethoxyethanol, cyclohexanol; phenol, o-nitrophenol , P-chlorophenol, phenols such as o-, m- or p-cresol; lactams such as ⁇ -caprolactam, oximes such as acetone oxime, methyl ethyl ketone oxime, methyl isobutyl ketone oxime, cyclohexanone oxime, acetophenone oxime, benzophenone oxime
  • pyrazoles such as pyrazole, 3,5-dimethylpyrazole and 3-methylpyrazole
  • thiols such as dodecanethiol and benzenethiol.
  • a compound containing a blocked isocyanate is also available as a commercial product.
  • Specific examples thereof include B-830, B-815N, B-842N, B-870N, B-874N, B-882N, B -7005, B-7030, B-7075, B-5010 (Mitsui Chemicals Polyurethane Co., Ltd.), Duranate (registered trademark) 17B-60PX, TPA-B80E, MF-B60X, MF-K60X, E402-B80T (above, manufactured by Asahi Kasei Chemicals Corporation), Karenz MOI-BM (registered trademark) (above, manufactured by Showa Denko Co., Ltd.), and the like.
  • the aminoplast compound is not particularly limited as long as it has two or more methoxymethylene groups in one molecule.
  • hexamethoxymethylmelamine CYMEL (registered trademark) 303 tetrabutoxymethylglycoluril 1170 Cymel series such as Tetramethoxymethylbenzoguanamine 1123 (Nippon Cytec Industries, Ltd.), Nicalac (registered trademark) MW-30HM, MW-390, MW-100LM, which are methylated melamine resins
  • melamine compounds such as MX-750LM, Nicarac series such as MX-270 and MX-280, which are methylated urea resins, and MX-280 and MX-290 (manufactured by Sanwa Chemical Co., Ltd.).
  • the oxetane compound is not particularly limited as long as it has two or more oxetanyl groups in one molecule.
  • OXT-221, OX-SQ-H, OX-SC containing oxetanyl group above And Toagosei Co., Ltd..
  • the phenoplast compound has two or more hydroxymethylene groups in one molecule, and when exposed to a high temperature during thermosetting, a crosslinking reaction proceeds with the polymer of the present invention by a dehydration condensation reaction.
  • a crosslinking reaction proceeds with the polymer of the present invention by a dehydration condensation reaction.
  • the phenoplast compound include 2,6-dihydroxymethyl-4-methylphenol, 2,4-dihydroxymethyl-6-methylphenol, bis (2-hydroxy-3-hydroxymethyl-5-methylphenyl) methane, Bis (4-hydroxy-3-hydroxymethyl-5-methylphenyl) methane, 2,2-bis (4-hydroxy-3,5-dihydroxymethylphenyl) propane, bis (3-formyl-4-hydroxyphenyl) methane Bis (4-hydroxy-2,5-dimethylphenyl) formylmethane, ⁇ , ⁇ -bis (4-hydroxy-2,5-dimethylphenyl) -4-formyltoluene and the like.
  • the phenoplast compound is also available as a commercial product, and specific examples thereof include 26DMPC, 46DMOC, DM-BIPC-F, DM-BIOC-F, TM-BIP-A, BISA-F, BI25X-DF. BI25X-TPA (above, manufactured by Asahi Organic Materials Co., Ltd.).
  • a polyfunctional (meth) acrylic compound is suitable from the viewpoint that the refractive index lowering due to the crosslinking agent blending can be suppressed and the curing reaction proceeds rapidly, and among these, the triazine ring-containing polymer is preferred. Since it is excellent in compatibility, the polyfunctional (meth) acrylic compound having the following isocyanuric acid skeleton is more preferable. Examples of the polyfunctional (meth) acrylic compound having such a skeleton include NK ester A-9300 and A-9300-1CL (both manufactured by Shin-Nakamura Chemical Co., Ltd.).
  • R 111 to R 113 are each independently a monovalent organic group having at least one (meth) acryl group at the end).
  • the resulting cured film it is liquid at 25 ° C. and its viscosity is 5000 mPa ⁇ s or less, preferably 1 To 3000 mPa ⁇ s, more preferably 1 to 1000 mPa ⁇ s, and even more preferably 1 to 500 mPa ⁇ s, a polyfunctional (meth) acrylic compound (hereinafter referred to as a low-viscosity crosslinking agent) alone or in combination of two or more.
  • a polyfunctional (meth) acrylic compound hereinafter referred to as a low-viscosity crosslinking agent
  • Such low-viscosity cross-linking agents are also commercially available.
  • NK ester A-GLY-3E 85 mPa ⁇ s, 25 ° C.
  • A-GLY -9E 95 mPa ⁇ s, 25 ° C
  • A-GLY-20E 200 mPa ⁇ s, 25 ° C
  • A-TMPT-3EO 60 mPa ⁇ s, 25 ° C
  • A-TMPT-9EO ATM
  • the chain length between (meth) acrylic groups such as -4E (150 mPa ⁇ s, 25 ° C.), ATM-35E (350 mPa ⁇ s, 25 ° C.) (manufactured by Shin-Nakamura Chemical Co., Ltd.) is relatively Long crosslinking agents.
  • NK ester A-GLY-20E (made by Shin-Nakamura Chemical Co., Ltd.) and ATM-35E (made by Shin-Nakamura Chemical Co., Ltd.)
  • a polyfunctional (meth) acrylic compound having the above isocyanuric acid skeleton in consideration of improving the alkali resistance of the cured film obtained, NK ester A-GLY-20E (made by Shin-Nakamura Chemical Co., Ltd.) and ATM-35E (made by Shin-Nakamura Chemical Co., Ltd.) ) And a polyfunctional (meth) acrylic compound having the above isocyanuric acid skeleton.
  • the total amount of the crosslinking agent used is preferably 1 to 100 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer, but considering the solvent resistance, the lower limit is preferably 2 parts by mass, more preferably 5 parts by mass. In view of controlling the refractive index, the upper limit is preferably 20 parts by mass, more preferably 15 parts by mass.
  • the use ratio of two or more kinds of crosslinking agents is not particularly limited, but when a polyfunctional (meth) acrylic compound and a polyfunctional epoxy compound, which are the preferred combinations described above, are used in combination, the polyfunctional (meth) acrylic is used.
  • the content of the compound and the polyfunctional epoxy compound can be about 1:10 to 10: 1 by mass ratio, preferably 1: 1 to 5: 1, more preferably 1: 1 to 3: 1.
  • an initiator corresponding to each crosslinking agent can be blended.
  • a polyfunctional epoxy compound and a polyfunctional (meth) acrylic compound are used as the crosslinking agent, photocuring proceeds without using an initiator to give a cured film.
  • An initiator can be used.
  • a photoacid generator or a photobase generator can be used.
  • the photoacid generator may be appropriately selected from known ones.
  • onium salt derivatives such as diazonium salts, sulfonium salts, and iodonium salts can be used.
  • aryldiazonium salts such as phenyldiazonium hexafluorophosphate, 4-methoxyphenyldiazonium hexafluoroantimonate, 4-methylphenyldiazonium hexafluorophosphate; diphenyliodonium hexafluoroantimonate, di (4-methylphenyl) Diaryliodonium salts such as iodonium hexafluorophosphate and di (4-tert-butylphenyl) iodonium hexafluorophosphate; triphenylsulfonium hexafluoroantimonate, tris (4-methoxyphenyl) sulfonium hexafluorophosphate, diphenyl-4-thiophenoxy Phenylsulfonium hexafluoroantimonate, diphenyl-4-thiophenoxy Enylsulfonium he
  • onium salts commercially available products may be used. Specific examples thereof include Sun-Aid SI-60, SI-80, SI-100, SI-60L, SI-80L, SI-100L, SI-L145, SI- L150, SI-L160, SI-L110, SI-L147 (Sanshin Chemical Industry Co., Ltd.), UVI-6950, UVI-6970, UVI-6974, UVI-6990, UVI-6990 (above, Union Carbide) Co., Ltd.), CPI-100P, CPI-100A, CPI-200K, CPI-200S (above, manufactured by San Apro Co., Ltd.), Adekaoptomer SP-150, SP-151, SP-170, SP-171 (above, Asahi Denka Kogyo Co., Ltd.), Irgacure 261 (BASF), CI-2481, CI-2624, CI-2 39, CI-2064 (above, manufactured by Nippon Soda Co., Ltd.),
  • the photobase generator may be appropriately selected from known ones, such as Co-amine complex, oxime carboxylic acid ester, carbamic acid ester, quaternary ammonium salt photobase generator.
  • a photoacid or base generator When a photoacid or base generator is used, it is preferably used in the range of 0.1 to 15 parts by mass, more preferably in the range of 1 to 10 parts by mass with respect to 100 parts by mass of the polyfunctional epoxy compound. If necessary, an epoxy resin curing agent may be blended in an amount of 1 to 100 parts by mass with respect to 100 parts by mass of the polyfunctional epoxy compound.
  • a radical photopolymerization initiator when a polyfunctional (meth) acrylic compound is used, a radical photopolymerization initiator can be used.
  • the radical photopolymerization initiator may be appropriately selected from known ones, such as acetophenones, benzophenones, Michler's benzoylbenzoate, amyloxime esters, oxime esters, tetramethylthiuram monosulfide, and thioxanthones. Is mentioned.
  • photocleavable photoradical polymerization initiators are preferred.
  • the photocleavable photoradical polymerization initiator is described in the latest UV curing technology (p. 159, publisher: Kazuhiro Takahisa, publisher: Technical Information Association, Inc., published in 1991).
  • radical photopolymerization initiators examples include BASF Corporation trade names: Irgacure 127, 184, 369, 379, 379EG, 651, 500, 754, 819, 903, 907, 784, 2959, CGI 1700, CGI 1750, CGI 1850. , CG24-61, OXE01, OXE02, Darocur 1116, 1173, MBF, manufactured by BASF, Inc.
  • Product name Lucirin TPO, manufactured by UCB, Inc.
  • radical photopolymerization initiator When using a radical photopolymerization initiator, it is preferably used in the range of 0.1 to 200 parts by weight, preferably in the range of 1 to 150 parts by weight, with respect to 100 parts by weight of the polyfunctional (meth) acrylate compound. Is more preferable.
  • solvents are added to the composition of the present invention to dissolve the triazine ring-containing polymer.
  • the solvent include water, toluene, p-xylene, o-xylene, m-xylene, ethylbenzene, styrene, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol, propylene glycol monoethyl ether, ethylene Glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol methyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, diethylene glycol dimethyl ether, propylene glycol monobutyl ether, ethylene glycol monobutyl ether, diethylene glycol diethyl ether, dipropylene Recall monomethyl ether, diethylene glycol monomethyl ether, propylene
  • the solid content concentration in the composition is not particularly limited as long as it does not affect the storage stability, and may be appropriately set according to the target film thickness.
  • the solid content concentration is preferably 0.1 to 50% by mass, and more preferably 0.1 to 40% by mass.
  • surfactant examples include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene oleyl ether; polyoxyethylene octylphenol ether, polyoxyethylene nonylphenol Polyoxyethylene alkyl allyl ethers such as ethers; polyoxyethylene / polyoxypropylene block copolymers; sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan trioleate, sorbitan tristearate Sorbitan fatty acid esters such as polyoxyethylene sorbitan monolaurate, polyoxyethyleneso Nonionic surfactants such as polyoxyethylene sorbitan fatty acid esters such as bitane monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate, polyoxyethylene sorbitan tristearate, trade name
  • surfactants may be used alone or in combination of two or more.
  • the amount of the surfactant used is preferably 0.0001 to 5 parts by mass, more preferably 0.001 to 1 part by mass, and 0.01 to 0.5 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer. Even more preferred.
  • the said other component can be added at the arbitrary processes at the time of preparing the composition of this invention.
  • the composition of the present invention can be applied to a substrate, then heated as necessary to evaporate the solvent, and then heated or irradiated with light to form a desired cured film.
  • the coating method of the composition is arbitrary, for example, spin coating method, dip method, flow coating method, ink jet method, jet dispenser method, spray method, bar coating method, gravure coating method, slit coating method, roll coating method, transfer Methods such as printing, brush coating, blade coating, and air knife coating can be employed.
  • the base material silicon, glass with indium tin oxide (ITO) formed, glass with indium zinc oxide (IZO) formed, polyethylene terephthalate (PET), plastic, glass, quartz, ceramics
  • the firing temperature is not particularly limited for the purpose of evaporating the solvent. For example, it can be carried out at 40 to 400 ° C.
  • the composition of the present invention forms a thin film by low-temperature firing at less than 150 ° C., particularly 60 to 130 ° C. can do.
  • the baking method is not particularly limited, and for example, it may be evaporated using a hot plate or an oven in an appropriate atmosphere such as air, an inert gas such as nitrogen, or in a vacuum.
  • the firing temperature and firing time may be selected in accordance with the process steps of the target electronic device, and the firing conditions may be selected so that the physical properties of the obtained film meet the required characteristics of the electronic device.
  • the conditions for the light irradiation are not particularly limited, and an appropriate irradiation energy and time may be adopted depending on the triazine ring-containing polymer and the crosslinking agent to be used.
  • a fine pattern can be formed by light irradiation through a mask and development with a developer. In this case, development after exposure can be performed by immersing the exposure resin in, for example, an organic solvent developer or an aqueous developer.
  • organic solvent developer examples include NMP, ⁇ -butyrolactone, DMSO and the like
  • aqueous developer examples include sodium carbonate, potassium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium.
  • An aqueous alkali solution such as hydroxide can be used.
  • the oxirane ring-containing compound include those having one or more, preferably two or more oxirane rings in the molecule. Specific examples thereof include glycidyl ether type epoxy resins, glycidyl ester type epoxy resins, and alicyclic epoxies. Resins, epoxy-modified polybutadiene resins, oxetane compounds and the like. These may be used alone or in combination of two or more.
  • the amount of the oxirane-containing compound is not particularly limited, but can be about 10 to 400 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer.
  • the photocurable catalyst examples include a photocation generator.
  • the photocation generator include triarylsulfonium salts such as triphenylsulfonium hexafluorophosphate and triphenylsulfonium hexafluoroantimonate; triaryl selenium salts; diphenyliodonium hexafluorophosphate, diphenyliodonium hexafluoroantimonate and the like. And diaryliodonium salts. These may be used alone or in combination of two or more.
  • the blending amount of the photocurable catalyst is not particularly limited, but can be about 0.1 to 100 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer.
  • the preparation method of the said negative pattern formation composition is not specifically limited, What is necessary is just to mix
  • the above-described solvent may be used.
  • the composition can be cured by, for example, irradiating ultraviolet light or the like at 1 to 4000 mJ / cm 2 after being applied by the method described above. Light irradiation may be performed using various known methods such as a high-pressure mercury lamp, a metal halide lamp, a xenon lamp, an LED, and laser light. If necessary, when using a base material having a low heat resistance of about 80 to 180 ° C. before and after exposure, it may be heated preferably at 80 ° C. or more and less than 150 ° C., more preferably at 80 to 130 ° C. Development after exposure can be performed by immersing the exposure resin in the organic solvent developer or aqueous developer described above.
  • an azide compound may be further added to the above composition.
  • the azide compound a compound having one or more, preferably two or more 1,2-naphthoquinonediazide groups is preferable, and specific examples thereof include 2,3,4-trihydroxy-benzophenone and 1,2-naphthoquinone- (2) 1,2-naphthoquinone diazide sulfonic acid derivatives such as esters with -diazide-5-sulfonic acid.
  • the amount of the oxirane-containing compound is not particularly limited, but can be about 4 to 60 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer.
  • the method for preparing the positive pattern forming composition is not particularly limited, and may be prepared by blending the components in any order.
  • the above-described solvent may be used.
  • the composition After the composition is applied by the above-described method, it can be cured by, for example, irradiation with ultraviolet light at 1 to 2000 mJ / cm 2 by the above-described light irradiation method.
  • the substrate may be heated at a temperature of about 80 to 180 ° C. before and after exposure and preferably at a temperature of 80 to 150 ° C., more preferably 80 to 130 ° C. .
  • Development after exposure can be performed by immersing the exposure resin in the organic solvent developer or aqueous developer described above.
  • Additives include thermal cation generators such as benzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 1-naphthylmethyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 4-hydroxyphenyldimethylsulfonium methyl sulfate; 2 , 5-diethylthioxanthone, anthracene, 9,10-ethoxyanthracene and the like, and the additives exemplified in the film-forming composition.
  • thermal cation generators such as benzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 1-naphthylmethyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 4-hydroxyphenyldimethylsulfonium methyl sulfate
  • 2 5-diethylthioxanthone, anthracene,
  • the cured film and fine pattern of the present invention obtained as described above can achieve high heat resistance, high refractive index, and low volume shrinkage, liquid crystal display, organic electroluminescence (EL) display, touch panel, optical semiconductor Electronic devices such as (LED) elements, solid-state imaging devices, organic thin film solar cells, dye-sensitized solar cells, organic thin film transistors (TFTs), lenses, prism cameras, binoculars, microscopes, and parts for manufacturing semiconductor exposure devices And can be suitably used in the field of optical materials.
  • LED organic electroluminescence
  • TFTs organic thin film transistors
  • 3-aminophenol [2] (11.00 g, 0.1 mol, manufactured by Tokyo Chemical Industry Co., Ltd.) was added to a 500 mL four-necked flask, and 104.14 g of N-methyl-2-pyrrolidone (NMP) was added. Dissolved and cooled to below 0 ° C. Thereafter, 2,4,6-trichloro-1,3,5-triazine [1] (18.34 g, 0.1 mol, manufactured by Evonik Degussa) was added and stirred for 1 hour, and then dissolved in 154.96 g of NMP.
  • NMP N-methyl-2-pyrrolidone
  • L-TmDA-100 the target polymer [4] (hereinafter referred to as L-TmDA-100).
  • the measurement result of 1 H-NMR spectrum of L-TmDA-100 is shown in FIG.
  • the weight average molecular weight Mw measured by GPC of L-TmDA-100 in terms of polystyrene was 8,200
  • the polydispersity Mw / Mn was 2.15.
  • Example 2 Preparation of composition [Example 2] Under nitrogen, 12.00 g of L-TmDA-100 obtained in Example 1 was added to a 200 mL eggplant flask, and 18.00 g of propylene glycol monomethyl ether (PGME) was added as a solvent. L-TmDA-100-M) was prepared. The obtained L-TmDA-100-M was diluted to 10% by mass with PGME, and the refractive index was measured to be 1.7494 (@ 550 nm).
  • PGME propylene glycol monomethyl ether
  • Example 3 Fabrication of fine pattern [Example 3] L-TmDA-100-M 18.95 g prepared in Example 2, polyfunctional acrylate (AT-20E, manufactured by Shin-Nakamura Chemical Co., Ltd.) 0.74 g, polyfunctional epoxy (Epolide GT-401, Daicel Chemical Industries ( Co., Ltd.) 0.37 g, photo radical initiator (Irgacure OXE02, manufactured by BASF) 0.52 g, photoacid generator (CPI-210S, manufactured by San Apro Co., Ltd.) 0.45 g, and PGME 24.0 g were added to form a solid. 45 g of a composition (LP-W) having a content of 20% by mass was prepared.
  • polyfunctional acrylate AT-20E, manufactured by Shin-Nakamura Chemical Co., Ltd.
  • polyfunctional epoxy Epolide GT-401, Daicel Chemical Industries ( Co., Ltd.) 0.37 g
  • photo radical initiator Irgacure OXE02, manufactured by BASF
  • the composition was filtered using a 0.45 ⁇ m filter and then applied onto a glass substrate using a spin coater.
  • a coating film was formed by baking (soft baking) on a hot plate at 100 ° C. for 30 seconds.
  • This coating film was irradiated with ultraviolet rays having an irradiation amount of 365 m at 200 mJ / cm 2 by an ultraviolet irradiation device MA6 (manufactured by SUSS).
  • post-bake on a hot plate at 100 ° C. for 25 minutes, develop by immersing in a NMD-3 developer (manufactured by Tokyo Ohka Kogyo Co., Ltd.) at 23 ° C. for a certain period of time, and rinse with running pure water. went.
  • Example 4 Production of cured film [Example 4] L-TmDA-100-M 18.95 g prepared in Example 2, polyfunctional acrylate (AT-20E, manufactured by Shin-Nakamura Chemical Co., Ltd.) 0.74 g, polyfunctional epoxy (Epolide GT-401, Daicel Chemical Industries ( Co., Ltd.) 0.37 g, photo radical initiator (Irgacure OXE02, manufactured by BASF) 0.52 g, photoacid generator (CPI-210S, manufactured by San Apro Co., Ltd.) 0.45 g, and PGME 24.0 g were added to form a solid. 45 g of a composition (LP-W) having a content of 20% by mass was prepared.
  • polyfunctional acrylate AT-20E, manufactured by Shin-Nakamura Chemical Co., Ltd.
  • polyfunctional epoxy Epolide GT-401, Daicel Chemical Industries ( Co., Ltd.) 0.37 g
  • photo radical initiator Irgacure OXE02, manufactured by BASF
  • This composition was filtered using a 0.45 ⁇ m filter and then applied onto a silicon wafer substrate using a spin coater.
  • a coating film was formed by baking (soft baking) on a hot plate at 100 ° C. for 30 seconds.
  • This coating film was irradiated with ultraviolet rays having an irradiation amount of 365 m at 200 mJ / cm 2 by an ultraviolet irradiation device MA6 (manufactured by SUSS). Thereafter, post-baking was performed on a hot plate at 100 ° C. for 25 minutes to produce a cured film.
  • the refractive index in 550 nm was measured with the ellipsometer, it was refractive index 1.711 (@ 550 nm).
  • permeability of 400 nm was measured about the obtained cured film, the transmittance

Abstract

A triazine-polymer-containing composition that can be used to form, by low-temperature firing, a thin film that has a high refractive index and excellent transparency, and can also be used to form a fine pattern that has a high refractive index. The triazine-polymer-containing composition includes: a polymer that includes a repeating structural unit such as is represented, for example, by formula (23), the repeating structural unit having a triazine ring and a phenolic hydroxyl group; and at least two types of photocrosslinking agents.

Description

トリアジン系重合体含有組成物Triazine polymer-containing composition
 本発明は、トリアジン系重合体含有組成物に関する。 The present invention relates to a triazine polymer-containing composition.
 近年、液晶ディスプレイ、有機エレクトロルミネッセンス(EL)ディスプレイ、タッチパネル、光半導体(LED)素子、固体撮像素子、有機薄膜太陽電池、色素増感太陽電池、および有機薄膜トランジスタ(TFT)等の電子デバイスを開発する際に、高機能な高分子材料が要求されるようになってきた。
 求められる具体的な特性としては、1)耐熱性、2)透明性、3)高屈折率、4)高溶解性、5)低体積収縮率、6)高温高湿耐性、7)高膜硬度などが挙げられる。
 この点に鑑み、本発明者らは、トリアジン環および芳香環を有する繰り返し単位を含む重合体が高屈折率を有し、ポリマー単独で高耐熱性、高透明性、高屈折率、高溶解性、低体積収縮を達成でき、電子デバイスを作製する際の膜形成用組成物として好適であることを既に見出している(特許文献1)。
In recent years, electronic devices such as liquid crystal displays, organic electroluminescence (EL) displays, touch panels, optical semiconductor (LED) elements, solid-state imaging elements, organic thin film solar cells, dye-sensitized solar cells, and organic thin film transistors (TFTs) have been developed. At the same time, high-performance polymer materials have been required.
Specific characteristics required include 1) heat resistance, 2) transparency, 3) high refractive index, 4) high solubility, 5) low volume shrinkage, 6) high temperature and high humidity resistance, and 7) high film hardness. Etc.
In view of this point, the present inventors have found that a polymer containing a repeating unit having a triazine ring and an aromatic ring has a high refractive index, and the polymer alone has high heat resistance, high transparency, high refractive index, and high solubility. It has already been found that a low volume shrinkage can be achieved and it is suitable as a film-forming composition for producing an electronic device (Patent Document 1).
 ところで、液晶表示素子における、スペーサー、絶縁膜、保護膜などにおいて、透明材料を用いたパターン形成が行われており、これまでに多くのネガ型感光性組成物がこの用途に提案されてきた。
 特に、近年では、高精細液晶ディスプレイや携帯電話用ディスプレイの需要が高まっていることにより、直径10μm以下の小さなパターンが求められるようになっている。
 また、タッチパネルにおいては、透明電極の視認性向上のために高屈折率層の必要性が高まっているが、電極配線部分に絶縁膜が存在すると応答性に影響が出てくることから、配線部分から100~1000μmの幅で絶縁層を除去する必要がある。
 当該用途に用いられている既存材料は、屈折率という点で不十分であり、また、透明性を維持しつつ、その屈折率を1.7超まで向上することは困難である。
 この点、上記特許文献1の重合体は、屈折率という点では要求に応えられるものの、微細パターンの形成性という点で改善の余地がある。
By the way, pattern formation using a transparent material is performed on a spacer, an insulating film, a protective film, etc. in a liquid crystal display element, and many negative photosensitive compositions have been proposed for this purpose so far.
In particular, in recent years, due to the increasing demand for high-definition liquid crystal displays and mobile phone displays, small patterns with a diameter of 10 μm or less have been demanded.
In touch panels, the need for a high refractive index layer is increasing in order to improve the visibility of transparent electrodes. However, the presence of an insulating film in the electrode wiring part affects the responsiveness. Therefore, it is necessary to remove the insulating layer with a width of 100 to 1000 μm.
Existing materials used for this purpose are insufficient in terms of refractive index, and it is difficult to improve the refractive index to over 1.7 while maintaining transparency.
In this regard, the polymer of Patent Document 1 can meet the demand in terms of refractive index, but there is room for improvement in terms of fine pattern formability.
 なお、特許文献2には、トリアジン環含有重合体を含むパターン形成用組成物が開示されているものの、この重合体は屈折率が1.7未満であり、より高い屈折率が要求される上記用途には適していない。 Although Patent Document 2 discloses a pattern-forming composition containing a triazine ring-containing polymer, the polymer has a refractive index of less than 1.7, and a higher refractive index is required. Not suitable for use.
 また、近年のデバイスの薄型化・軽量化の潮流から、プラスチックフィルム基板等の耐熱性が低い材料が用いられることも増加してきており、薄膜作製時に低温焼成が可能な材料や組成の設計に対する要求が高まっている。 In addition, due to the trend toward thinner and lighter devices in recent years, the use of materials with low heat resistance such as plastic film substrates is increasing, and there is a need for design of materials and compositions that can be fired at low temperatures during thin film production. Is growing.
国際公開第2010/128661号International Publication No. 2010/128661 特開2004-156001号公報JP 2004-156001 A
 本発明は、上記事情に鑑みてなされたものであり、低温焼成にて、高屈折率で透明性に優れた薄膜を形成し得るとともに、高屈折率な微細パターンをも形成し得るトリアジン系重合体含有組成物を提供することを目的とする。 The present invention has been made in view of the above circumstances, and can form a thin film having a high refractive index and excellent transparency by low-temperature firing, and can also form a fine pattern having a high refractive index. An object is to provide a coalescence-containing composition.
 本発明者らは、上記目的を達成するために鋭意検討を重ねた結果、所定の官能基を有するアリールアミノ基で置換されたトリアジン環含有重合体と、2種類の架橋剤とを含む組成物を用いることで、低温焼成にて、高屈折率で透明性に優れた薄膜を形成し得るとともに、高屈折率な微細パターンをも形成し得ることを見出し、本発明を完成した。 As a result of intensive studies in order to achieve the above object, the present inventors have obtained a composition comprising a triazine ring-containing polymer substituted with an arylamino group having a predetermined functional group, and two kinds of crosslinking agents. As a result, it was found that a thin film having a high refractive index and excellent transparency can be formed by low-temperature firing, and a fine pattern having a high refractive index can be formed, thereby completing the present invention.
 すなわち、本発明は、
1. 下記式(1)で表される繰り返し単位構造を含む重合体と、少なくとも2種類の架橋剤とを含むことを特徴とするトリアジン系重合体含有組成物、
Figure JPOXMLDOC01-appb-C000007
{式中、RおよびR′は、互いに独立して、水素原子、アルキル基、アルコキシ基、アリール基、またはアラルキル基を表し、Ar1は、水酸基、カルボキシル基および/またはマレイミド基を有するアリール基を表し、Ar2は、式(2)~(13)で示される群から選ばれる少なくとも1種を表す。
Figure JPOXMLDOC01-appb-C000008
〔式中、R1~R92は、互いに独立して、水素原子、ハロゲン原子、カルボキシル基、スルホ基、炭素数1~10の分岐構造を有していてもよいアルキル基、または炭素数1~10の分岐構造を有していてもよいアルコキシ基を表し、R93およびR94は、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基を表し、W1およびW2は、互いに独立して、単結合、CR9596(R95およびR96は、互いに独立して、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基(ただし、これらは一緒になって環を形成していてもよい。)を表す。)、C=O、O、S、SO、SO2、またはNR97(R97は、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基を表す。)を表し、X1およびX2は、互いに独立して、単結合、炭素数1~10の分岐構造を有していてもよいアルキレン基、または式(14)
Figure JPOXMLDOC01-appb-C000009
(式中、R98~R101は、互いに独立して、水素原子、ハロゲン原子、カルボキシル基、スルホ基、炭素数1~10の分岐構造を有していてもよいアルキル基、または炭素数1~10の分岐構造を有していてもよいアルコキシ基を表し、Y1およびY2は、互いに独立して、単結合または炭素数1~10の分岐構造を有していてもよいアルキレン基を表す。)で示される基を表す。〕}
2. 前記架橋剤が、多官能(メタ)アクリル化合物と多官能エポキシ化合物との組み合わせである1のトリアジン系重合体含有組成物、
3. 前記多官能(メタ)アクリル化合物と多官能エポキシ化合物との含有量が、質量比で1:1~3:1である2のトリアジン系重合体含有組成物、
4. 前記重合体が、下記式(18)で示される繰り返し単位構造を含む1~3のいずれかのトリアジン系重合体含有組成物、
Figure JPOXMLDOC01-appb-C000010
(式中、R、R′およびAr2は、前記と同じ意味を表す。)
5. 下記式(19)で示される繰り返し単位構造を含む4のトリアジン系重合体含有組成物、
Figure JPOXMLDOC01-appb-C000011
(式中、R、R′およびAr2は、前記と同じ意味を表す。)
6. 下記式(23)で示される繰り返し単位構造を含む5のトリアジン系重合体含有組成物、
Figure JPOXMLDOC01-appb-C000012
7. さらに、オキシラン環含有化合物と、光硬化型触媒とを含有する1~6のいずれかのトリアジン系重合体含有組成物、
8. さらにアジド化合物を含有する1~6のいずれかのトリアジン系重合体含有組成物、
9. パターン形成用である1~8のいずれかのトリアジン系重合体含有組成物、
10. 1~8のいずれかのトリアジン系重合体含有組成物を硬化させて得られる硬化膜、
11. 9のトリアジン系重合体含有組成物から作製されたパターン、
12. 基材と、この基材上に形成された10の硬化膜とを備える電子デバイス、
13. 基材と、この基材上に形成された10の硬化膜とを備える光学部材、
14. 基材と、この基材上に形成された11のパターンとを備える電子デバイス
を提供する。
That is, the present invention
1. A triazine-based polymer-containing composition comprising a polymer containing a repeating unit structure represented by the following formula (1) and at least two kinds of crosslinking agents:
Figure JPOXMLDOC01-appb-C000007
{In the formula, R and R 'each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Ar 1 represents an aryl group having a hydroxyl group, a carboxyl group, and / or a maleimide group. Ar 2 represents at least one selected from the group represented by formulas (2) to (13).
Figure JPOXMLDOC01-appb-C000008
[Wherein R 1 to R 92 are independently of each other a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or a carbon number of 1 Represents an alkoxy group which may have a branched structure of ˜10, R 93 and R 94 represent a hydrogen atom or an alkyl group which may have a branched structure of 1 to 10 carbon atoms, W 1 and W 2 is independently a single bond, CR 95 R 96 (R 95 and R 96 are each independently a hydrogen atom or an alkyl group optionally having a branched structure of 1 to 10 carbon atoms ( However, these may be combined to form a ring.))), C═O, O, S, SO, SO 2 , or NR 97 (R 97 is a hydrogen atom or a carbon number of 1). have a branched structure to 10 represent also alkyl groups.) represents, X 1 Contact Fine X 2 are independently of each other a single bond, an alkylene group which may have a branched structure having 1 to 10 carbon atoms, or the formula, (14)
Figure JPOXMLDOC01-appb-C000009
(Wherein R 98 to R 101 are each independently a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or 1 carbon atom) Represents an alkoxy group which may have a branched structure of ˜10, and Y 1 and Y 2 each independently represent an alkylene group which may have a single bond or a branched structure of 1 to 10 carbon atoms. Represents a group represented by: ]}
2. 1 triazine polymer-containing composition, wherein the crosslinking agent is a combination of a polyfunctional (meth) acrylic compound and a polyfunctional epoxy compound;
3. 2. A triazine polymer-containing composition of 2, wherein the content of the polyfunctional (meth) acrylic compound and the polyfunctional epoxy compound is 1: 1 to 3: 1 by mass ratio;
4). The triazine polymer-containing composition according to any one of 1 to 3, wherein the polymer includes a repeating unit structure represented by the following formula (18):
Figure JPOXMLDOC01-appb-C000010
(Wherein R, R ′ and Ar 2 represent the same meaning as described above.)
5. 4 triazine-based polymer-containing composition containing a repeating unit structure represented by the following formula (19):
Figure JPOXMLDOC01-appb-C000011
(Wherein R, R ′ and Ar 2 represent the same meaning as described above.)
6). 5 a triazine polymer-containing composition containing a repeating unit structure represented by the following formula (23):
Figure JPOXMLDOC01-appb-C000012
7). And a triazine polymer-containing composition according to any one of 1 to 6, further comprising an oxirane ring-containing compound and a photocurable catalyst.
8). And a triazine polymer-containing composition according to any one of 1 to 6, further comprising an azide compound,
9. Any one of triazine-based polymer-containing compositions for forming a pattern;
10. A cured film obtained by curing the triazine-based polymer-containing composition of any one of 1 to 8,
11. A pattern prepared from the triazine-based polymer-containing composition of 9;
12 An electronic device comprising a substrate and ten cured films formed on the substrate;
13. An optical member comprising a substrate and ten cured films formed on the substrate;
14 An electronic device comprising a substrate and eleven patterns formed on the substrate is provided.
 本発明によれば、高屈折率で透明性に優れた薄膜を形成し得るとともに、マスキングして露光・硬化させた後、これをアルカリ現像等することで微細パターンを形成することができる。
 特に、2種類の架橋剤を併用していることから、低温焼成にて薄膜形成が可能であるという利点を有している。
 本発明の組成物から作製された硬化膜や微細パターンは、架橋されたトリアジン環含有重合体による、高耐熱性、高屈折率、低体積収縮という特性を発揮し得るため、液晶ディスプレイ、有機エレクトロルミネッセンス(EL)ディスプレイ、タッチパネル、光半導体(LED)素子、固体撮像素子、有機薄膜太陽電池、色素増感太陽電池、有機薄膜トランジスタ(TFT)、レンズ、プリズム、カメラ、双眼鏡、顕微鏡、半導体露光装置等を作製する際の一部材など、電子デバイスや光学材料の分野に好適に利用できる。
 また、本発明の組成物から作製された高屈折率パターンは、上述したタッチパネル等の透明電極骨見え防止、有機ELディスプレイの光取出し用途やブラックマトリックス用途をはじめとした、高屈折率パターンが要求される用途に好適に用いることできる。
According to the present invention, it is possible to form a thin film having a high refractive index and excellent transparency, and it is possible to form a fine pattern by masking, exposing and curing, and then performing alkali development or the like.
In particular, since two kinds of crosslinking agents are used in combination, there is an advantage that a thin film can be formed by low-temperature firing.
The cured film and fine pattern produced from the composition of the present invention can exhibit characteristics such as high heat resistance, high refractive index, and low volume shrinkage due to the crosslinked triazine ring-containing polymer. Luminescence (EL) display, touch panel, optical semiconductor (LED) element, solid-state imaging device, organic thin film solar cell, dye-sensitized solar cell, organic thin film transistor (TFT), lens, prism, camera, binoculars, microscope, semiconductor exposure device, etc. It can be suitably used in the field of electronic devices and optical materials, such as one member for manufacturing the device.
In addition, the high refractive index pattern produced from the composition of the present invention requires a high refractive index pattern including the above-mentioned prevention of transparent electrode bone appearance such as touch panel, light extraction use of organic EL display and black matrix use. It can be suitably used for the intended use.
実施例1で得られた高分子化合物[4]の1H-NMRスペクトル図である。1 is a 1 H-NMR spectrum diagram of a polymer compound [4] obtained in Example 1. FIG. 実施例1で得られた高分子化合物[4]のTG-DTA測定結果を示す図である。FIG. 3 is a graph showing a TG-DTA measurement result of the polymer compound [4] obtained in Example 1.
 以下、本発明についてさらに詳しく説明する。
 本発明に係るトリアジン系重合体含有組成物は、下記式(1)で表される繰り返し単位構造を含む重合体と、少なくとも2種類の架橋剤とを含むものである。
Hereinafter, the present invention will be described in more detail.
The triazine polymer-containing composition according to the present invention includes a polymer containing a repeating unit structure represented by the following formula (1) and at least two kinds of crosslinking agents.
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
 上記式中、RおよびR′は、互いに独立して、水素原子、アルキル基、アルコキシ基、アリール基、またはアラルキル基を表すが、屈折率をより高めるという観点から、ともに水素原子であることが好ましい。
 本発明において、アルキル基の炭素数としては特に限定されるものではないが、1~20が好ましく、ポリマーの耐熱性をより高めることを考慮すると、炭素数1~10がより好ましく、1~3がより一層好ましい。また、その構造は、鎖状、分岐状、環状のいずれでもよい。
In the above formula, R and R ′ each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group. However, from the viewpoint of further increasing the refractive index, both of them may be hydrogen atoms. preferable.
In the present invention, the number of carbon atoms of the alkyl group is not particularly limited, but is preferably 1 to 20, and more preferably 1 to 10 carbon atoms in view of further improving the heat resistance of the polymer. Is even more preferable. Further, the structure may be any of a chain, a branch, and a ring.
 アルキル基の具体例としては、メチル、エチル、n-プロピル、イソプロピル、シクロプロピル、n-ブチル、イソブチル、s-ブチル、t-ブチル、シクロブチル、1-メチル-シクロプロピル、2-メチル-シクロプロピル、n-ペンチル、1-メチル-n-ブチル、2-メチル-n-ブチル、3-メチル-n-ブチル、1,1-ジメチル-n-プロピル、1,2-ジメチル-n-プロピル、2,2-ジメチル-n-プロピル、1-エチル-n-プロピル、シクロペンチル、1-メチル-シクロブチル、2-メチル-シクロブチル、3-メチル-シクロブチル、1,2-ジメチル-シクロプロピル、2,3-ジメチル-シクロプロピル、1-エチル-シクロプロピル、2-エチル-シクロプロピル、n-ヘキシル、1-メチル-n-ペンチル、2-メチル-n-ペンチル、3-メチル-n-ペンチル、4-メチル-n-ペンチル、1,1-ジメチル-n-ブチル、1,2-ジメチル-n-ブチル、1,3-ジメチル-n-ブチル、2,2-ジメチル-n-ブチル、2,3-ジメチル-n-ブチル、3,3-ジメチル-n-ブチル、1-エチル-n-ブチル、2-エチル-n-ブチル、1,1,2-トリメチル-n-プロピル、1,2,2-トリメチル-n-プロピル、1-エチル-1-メチル-n-プロピル、1-エチル-2-メチル-n-プロピル、シクロヘキシル、1-メチル-シクロペンチル、2-メチル-シクロペンチル、3-メチル-シクロペンチル、1-エチル-シクロブチル、2-エチル-シクロブチル、3-エチル-シクロブチル、1,2-ジメチル-シクロブチル、1,3-ジメチル-シクロブチル、2,2-ジメチル-シクロブチル、2,3-ジメチル-シクロブチル、2,4-ジメチル-シクロブチル、3,3-ジメチル-シクロブチル、1-n-プロピル-シクロプロピル、2-n-プロピル-シクロプロピル、1-イソプロピル-シクロプロピル、2-イソプロピル-シクロプロピル、1,2,2-トリメチル-シクロプロピル、1,2,3-トリメチル-シクロプロピル、2,2,3-トリメチル-シクロプロピル、1-エチル-2-メチル-シクロプロピル、2-エチル-1-メチル-シクロプロピル、2-エチル-2-メチル-シクロプロピル、2-エチル-3-メチル-シクロプロピル基等が挙げられる。 Specific examples of the alkyl group include methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-butyl, isobutyl, s-butyl, t-butyl, cyclobutyl, 1-methyl-cyclopropyl, 2-methyl-cyclopropyl. N-pentyl, 1-methyl-n-butyl, 2-methyl-n-butyl, 3-methyl-n-butyl, 1,1-dimethyl-n-propyl, 1,2-dimethyl-n-propyl, 2 , 2-dimethyl-n-propyl, 1-ethyl-n-propyl, cyclopentyl, 1-methyl-cyclobutyl, 2-methyl-cyclobutyl, 3-methyl-cyclobutyl, 1,2-dimethyl-cyclopropyl, 2,3- Dimethyl-cyclopropyl, 1-ethyl-cyclopropyl, 2-ethyl-cyclopropyl, n-hexyl, 1-methyl-n-pe Til, 2-methyl-n-pentyl, 3-methyl-n-pentyl, 4-methyl-n-pentyl, 1,1-dimethyl-n-butyl, 1,2-dimethyl-n-butyl, 1,3- Dimethyl-n-butyl, 2,2-dimethyl-n-butyl, 2,3-dimethyl-n-butyl, 3,3-dimethyl-n-butyl, 1-ethyl-n-butyl, 2-ethyl-n- Butyl, 1,1,2-trimethyl-n-propyl, 1,2,2-trimethyl-n-propyl, 1-ethyl-1-methyl-n-propyl, 1-ethyl-2-methyl-n-propyl, Cyclohexyl, 1-methyl-cyclopentyl, 2-methyl-cyclopentyl, 3-methyl-cyclopentyl, 1-ethyl-cyclobutyl, 2-ethyl-cyclobutyl, 3-ethyl-cyclobutyl, 1,2-dimethyl-cyclyl Butyl, 1,3-dimethyl-cyclobutyl, 2,2-dimethyl-cyclobutyl, 2,3-dimethyl-cyclobutyl, 2,4-dimethyl-cyclobutyl, 3,3-dimethyl-cyclobutyl, 1-n-propyl-cyclopropyl 2-n-propyl-cyclopropyl, 1-isopropyl-cyclopropyl, 2-isopropyl-cyclopropyl, 1,2,2-trimethyl-cyclopropyl, 1,2,3-trimethyl-cyclopropyl, 2,2, 3-trimethyl-cyclopropyl, 1-ethyl-2-methyl-cyclopropyl, 2-ethyl-1-methyl-cyclopropyl, 2-ethyl-2-methyl-cyclopropyl, 2-ethyl-3-methyl-cyclopropyl Groups and the like.
 上記アルコキシ基の炭素数としては特に限定されるものではないが、1~20が好ましく、ポリマーの耐熱性をより高めることを考慮すると、炭素数1~10がより好ましく、1~3がより一層好ましい。また、そのアルキル部分の構造は、鎖状、分岐状、環状のいずれでもよい。 The number of carbon atoms of the alkoxy group is not particularly limited, but is preferably 1 to 20, and more preferably 1 to 10 carbon atoms, more preferably 1 to 3 carbon atoms in view of further improving the heat resistance of the polymer. preferable. Further, the structure of the alkyl moiety may be any of a chain, a branch, and a ring.
 アルコキシ基の具体例としては、メトキシ、エトキシ、n-プロポキシ、イソプロポキシ、n-ブトキシ、イソブトキシ、s-ブトキシ、t-ブトキシ、n-ペントキシ、1-メチル-n-ブトキシ、2-メチル-n-ブトキシ、3-メチル-n-ブトキシ、1,1-ジメチル-n-プロポキシ、1,2-ジメチル-n-プロポキシ、2,2-ジメチル-n-プロポキシ、1-エチル-n-プロポキシ、n-ヘキシルオキシ、1-メチル-n-ペンチルオキシ、2-メチル-n-ペンチルオキシ、3-メチル-n-ペンチルオキシ、4-メチル-n-ペンチルオキシ、1,1-ジメチル-n-ブトキシ、1,2-ジメチル-n-ブトキシ、1,3-ジメチル-n-ブトキシ、2,2-ジメチル-n-ブトキシ、2,3-ジメチル-n-ブトキシ、3,3-ジメチル-n-ブトキシ、1-エチル-n-ブトキシ、2-エチル-n-ブトキシ、1,1,2-トリメチル-n-プロポキシ、1,2,2-トリメチル-n-プロポキシ、1-エチル-1-メチル-n-プロポキシ、1-エチル-2-メチル-n-プロポキシ基等が挙げられる。 Specific examples of the alkoxy group include methoxy, ethoxy, n-propoxy, isopropoxy, n-butoxy, isobutoxy, s-butoxy, t-butoxy, n-pentoxy, 1-methyl-n-butoxy, 2-methyl-n -Butoxy, 3-methyl-n-butoxy, 1,1-dimethyl-n-propoxy, 1,2-dimethyl-n-propoxy, 2,2-dimethyl-n-propoxy, 1-ethyl-n-propoxy, n -Hexyloxy, 1-methyl-n-pentyloxy, 2-methyl-n-pentyloxy, 3-methyl-n-pentyloxy, 4-methyl-n-pentyloxy, 1,1-dimethyl-n-butoxy, 1,2-dimethyl-n-butoxy, 1,3-dimethyl-n-butoxy, 2,2-dimethyl-n-butoxy, 2,3-dimethyl-n-butoxy 3,3-dimethyl-n-butoxy, 1-ethyl-n-butoxy, 2-ethyl-n-butoxy, 1,1,2-trimethyl-n-propoxy, 1,2,2-trimethyl-n- Examples include propoxy, 1-ethyl-1-methyl-n-propoxy, 1-ethyl-2-methyl-n-propoxy group.
 上記アリール基の炭素数としては特に限定されるものではないが、6~40が好ましく、ポリマーの耐熱性をより高めることを考慮すると、炭素数6~16がより好ましく、6~13がより一層好ましい。
 アリール基の具体例としては、フェニル、o-クロルフェニル、m-クロルフェニル、p-クロルフェニル、o-フルオロフェニル、p-フルオロフェニル、o-メトキシフェニル、p-メトキシフェニル、p-ニトロフェニル、p-シアノフェニル、α-ナフチル、β-ナフチル、o-ビフェニリル、m-ビフェニリル、p-ビフェニリル、1-アントリル、2-アントリル、9-アントリル、1-フェナントリル、2-フェナントリル、3-フェナントリル、4-フェナントリル、9-フェナントリル基等が挙げられる。
The number of carbon atoms of the aryl group is not particularly limited, but is preferably 6 to 40. In view of further improving the heat resistance of the polymer, 6 to 16 carbon atoms are more preferable, and 6 to 13 are even more preferable. preferable.
Specific examples of the aryl group include phenyl, o-chlorophenyl, m-chlorophenyl, p-chlorophenyl, o-fluorophenyl, p-fluorophenyl, o-methoxyphenyl, p-methoxyphenyl, p-nitrophenyl, p-cyanophenyl, α-naphthyl, β-naphthyl, o-biphenylyl, m-biphenylyl, p-biphenylyl, 1-anthryl, 2-anthryl, 9-anthryl, 1-phenanthryl, 2-phenanthryl, 3-phenanthryl, 4 -Phenanthryl, 9-phenanthryl group and the like.
 アラルキル基の炭素数としては特に限定されるものではないが、炭素数7~20が好ましく、そのアルキル部分は、直鎖、分岐、環状のいずれでもよい。
 その具体例としては、ベンジル、p-メチルフェニルメチル、m-メチルフェニルメチル、o-エチルフェニルメチル、m-エチルフェニルメチル、p-エチルフェニルメチル、2-プロピルフェニルメチル、4-イソプロピルフェニルメチル、4-イソブチルフェニルメチル、α-ナフチルメチル基等が挙げられる。
The number of carbon atoms of the aralkyl group is not particularly limited, but preferably 7 to 20 carbon atoms, and the alkyl portion may be linear, branched or cyclic.
Specific examples thereof include benzyl, p-methylphenylmethyl, m-methylphenylmethyl, o-ethylphenylmethyl, m-ethylphenylmethyl, p-ethylphenylmethyl, 2-propylphenylmethyl, 4-isopropylphenylmethyl, Examples include 4-isobutylphenylmethyl, α-naphthylmethyl group and the like.
 上記Ar1は、水酸基、カルボキシル基および/またはマレイミド基を有するアリール基であれば特に限定されるものではないが、下記式(15)~(17)で示されるものが好ましい。 Ar 1 is not particularly limited as long as it is an aryl group having a hydroxyl group, a carboxyl group and / or a maleimide group, but those represented by the following formulas (15) to (17) are preferred.
Figure JPOXMLDOC01-appb-C000014
(式中、R102~R110は、互いに独立して、上記R1と同様の意味を表す。)
Figure JPOXMLDOC01-appb-C000014
(In the formula, R 102 to R 110 each independently represent the same meaning as R 1 above.)
 これらの中でも、置換基R102~R110が水素原子である下記式で示されるものが好ましい。 Among these, those represented by the following formulas in which the substituents R 102 to R 110 are hydrogen atoms are preferable.
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
 特に、得られる硬化物のアルカリ現像液に対する溶解性を向上させるという点から、下記式で示されるものが好ましい。 In particular, those represented by the following formula are preferable from the viewpoint of improving the solubility of the obtained cured product in an alkaline developer.
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
 以上のアリール基の中でも、得られる硬化膜の高屈折率や透明性および微細パターンの解像度等を考慮すると、フェノール性水酸基を有するものが好ましい。
 したがって、本発明のトリアジン環含有重合体は、下記式(18)で示される繰り返し単位構造を含むことが好ましく、下記式(19)で示される繰り返し単位構造を含むことがより好ましい。
Among the aryl groups described above, those having a phenolic hydroxyl group are preferred in view of the high refractive index and transparency of the resulting cured film and the resolution of the fine pattern.
Therefore, the triazine ring-containing polymer of the present invention preferably includes a repeating unit structure represented by the following formula (18), and more preferably includes a repeating unit structure represented by the following formula (19).
Figure JPOXMLDOC01-appb-C000017
(式中、R、R′およびAr2は、上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000017
(In the formula, R, R ′ and Ar 2 represent the same meaning as described above.)
Figure JPOXMLDOC01-appb-C000018
(式中、R、R′およびAr2は、上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000018
(In the formula, R, R ′ and Ar 2 represent the same meaning as described above.)
 上記Ar2は、式(2)~(13)で示される群から選ばれる少なくとも1種を表す。 Ar 2 represents at least one selected from the group represented by formulas (2) to (13).
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
 上記R1~R92は、互いに独立して、水素原子、ハロゲン原子、カルボキシル基、スルホ基、炭素数1~10の分岐構造を有していてもよいアルキル基、または炭素数1~10の分岐構造を有していてもよいアルコキシ基を表し、W1およびW2は、互いに独立して、単結合、CR9596(R95およびR96は、互いに独立して、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基(ただし、これらは一緒になって環を形成していてもよい。)を表す。)、C=O、O、S、SO、SO2、またはNR97(R97は、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基を表す。)を表し、R93およびR94は、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基を表す。
 ハロゲン原子としては、フッ素原子、塩素原子、臭素原子、ヨウ素原子が挙げられる。
 なお、アルキル基、アルコキシ基としては上記と同様のものが挙げられる。
 また、X1およびX2は、互いに独立して、単結合、炭素数1~10の分岐構造を有していてもよいアルキレン基、または式(14)で示される基を表す。
R 1 to R 92 are independently of each other a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group that may have a branched structure having 1 to 10 carbon atoms, or a group having 1 to 10 carbon atoms. Represents an alkoxy group which may have a branched structure, W 1 and W 2 are each independently a single bond, CR 95 R 96 (R 95 and R 96 are each independently a hydrogen atom or carbon; An alkyl group which may have a branched structure of 1 to 10 (note that these may be combined to form a ring), C═O, O, S, SO, SO 2 , or NR 97 (R 97 represents a hydrogen atom or an alkyl group which may have a branched structure having 1 to 10 carbon atoms), and R 93 and R 94 represent a hydrogen atom or a carbon number Represents an alkyl group which may have 1 to 10 branched structures;
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Examples of the alkyl group and alkoxy group are the same as those described above.
X 1 and X 2 each independently represent a single bond, an alkylene group which may have a branched structure having 1 to 10 carbon atoms, or a group represented by the formula (14).
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000020
 上記R98~R101は、互いに独立して、水素原子、ハロゲン原子、カルボキシル基、スルホ基、炭素数1~10の分岐構造を有していてもよいアルキル基、または炭素数1~10の分岐構造を有していてもよいアルコキシ基を表し、Y1およびY2は、互いに独立して、単結合または炭素数1~10の分岐構造を有していてもよいアルキレン基を表す。これらハロゲン原子、アルキル基、アルコキシ基としては上記と同様のものが挙げられる。
 炭素数1~10の分岐構造を有していてもよいアルキレン基としては、メチレン、エチレン、プロピレン、トリメチレン、テトラメチレン、ペンタメチレン基等が挙げられる。
R 98 to R 101 are each independently a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or a carbon atom having 1 to 10 carbon atoms. An alkoxy group which may have a branched structure is represented, and Y 1 and Y 2 each independently represent an alkylene group which may have a single bond or a branched structure having 1 to 10 carbon atoms. Examples of the halogen atom, alkyl group and alkoxy group are the same as those described above.
Examples of the alkylene group that may have a branched structure having 1 to 10 carbon atoms include methylene, ethylene, propylene, trimethylene, tetramethylene, and pentamethylene groups.
 特に、Arとしては、式(2)、(5)~(13)で示される少なくとも1種が好ましく、式(2)、(5)、(7)、(8)、(11)~(13)で示される少なくとも1種がより好ましい。上記式(2)~(13)で表されるアリール基の具体例としては、下記式で示されるものが挙げられるが、これらに限定されるものではない。 In particular, Ar is preferably at least one of the formulas (2), (5) to (13), and the formulas (2), (5), (7), (8), (11) to (13) More preferably, at least one selected from Specific examples of the aryl group represented by the above formulas (2) to (13) include, but are not limited to, those represented by the following formulae.
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
 これらの中でも、より高い屈折率のポリマーが得られることから、下記式で示されるアリール基がより好ましい。 Among these, an aryl group represented by the following formula is more preferable because a polymer having a higher refractive index can be obtained.
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
 特に、レジスト溶剤等の安全性の高い溶剤に対する溶解性をより高めることを考慮すると、下記式(20)で示される繰り返し単位構造を含むことが好ましく、下記式(21)で示される繰り返し単位構造を含むことがより好ましい。 In particular, it is preferable to include a repeating unit structure represented by the following formula (20) in view of further improving the solubility in a highly safe solvent such as a resist solvent, and a repeating unit structure represented by the following formula (21). It is more preferable that it contains.
Figure JPOXMLDOC01-appb-C000023
(式中、R、R′およびR1~R4は、上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000023
(In the formula, R, R 'and R 1 to R 4 have the same meaning as described above.)
Figure JPOXMLDOC01-appb-C000024
(式中、R、R′およびR1~R4は、上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000024
(In the formula, R, R 'and R 1 to R 4 have the same meaning as described above.)
 このような観点から、特に好適な繰り返し単位構造としては、下記式(22)で示されるものが挙げられ、下記式(23)で示されるものがより好ましい。 From such a viewpoint, as a particularly preferable repeating unit structure, one represented by the following formula (22) can be mentioned, and one represented by the following formula (23) is more preferable.
Figure JPOXMLDOC01-appb-C000025
(式中、RおよびR′は、上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000025
(In the formula, R and R ′ have the same meaning as described above.)
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 本発明における重合体の重量平均分子量は、特に限定されるものではないが、500~500000が好ましく、さらに500~100000が好ましく、より耐熱性を向上させるとともに、収縮率を低くするという点から、2000以上が好ましく、より溶解性を高め、得られた溶液の粘度を低下させるという点から、50000以下が好ましく、30000以下がより好ましく、さらに10000以下が好ましい。
 なお、本発明における重量平均分子量は、ゲルパーミエーションクロマトグラフィー(以下、GPCという)分析による標準ポリスチレン換算で得られる平均分子量である。
The weight average molecular weight of the polymer in the present invention is not particularly limited, but is preferably 500 to 500,000, more preferably 500 to 100,000. From the viewpoint of further improving the heat resistance and reducing the shrinkage rate. It is preferably 2000 or more, preferably 50000 or less, more preferably 30000 or less, and even more preferably 10,000 or less from the viewpoint of further increasing the solubility and decreasing the viscosity of the obtained solution.
In addition, the weight average molecular weight in this invention is an average molecular weight obtained by standard polystyrene conversion by gel permeation chromatography (henceforth GPC) analysis.
 本発明で用いるトリアジン環含有重合体は、上述した特許文献1に開示された手法によって製造することができる。
 例えば、下記スキーム1に示されるように、繰り返し構造(26)を有するトリアジン環含有重合体は、フェニルアミノ基を有するトリアジン化合物(24)およびジアミノ化合物(25)を適当な有機溶媒中で反応させて得ることができる。
 なお、上記式(24)で表される化合物は、ハロゲン化シアヌルと、3-アミノフェノールとから公知の方法で製造することができる。また、ハロゲン化シアヌルと、3-アミノフェノールとの反応系内に、ジアミノ化合物を添加して反応を行ってもよい。
The triazine ring-containing polymer used in the present invention can be produced by the technique disclosed in Patent Document 1 described above.
For example, as shown in Scheme 1 below, a triazine ring-containing polymer having a repeating structure (26) is obtained by reacting a triazine compound (24) having a phenylamino group and a diamino compound (25) in a suitable organic solvent. Can be obtained.
The compound represented by the above formula (24) can be produced from a cyanuric halide and 3-aminophenol by a known method. Further, the reaction may be carried out by adding a diamino compound into the reaction system of cyanuric halide and 3-aminophenol.
Figure JPOXMLDOC01-appb-C000027
(式中、Xは、互いに独立してハロゲン原子を表す。RおよびR′は、上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000027
(Wherein X represents a halogen atom independently of each other. R and R ′ represent the same meaning as described above.)
 上記反応において、各原料の仕込み量としては、目的とする重合体が得られる限りにおいて任意であるが、トリアジン化合物(24)1当量に対し、ジアミノ化合物(25)0.01~10当量が好ましく、0.1~0.8当量または1~5当量がより好ましい。
 反応温度は、用いる溶媒の融点から溶媒の沸点までの範囲で適宜設定すればよいが、特に、-30~150℃程度が好ましく、-10~100℃がより好ましい。
In the above reaction, the amount of each raw material charged is arbitrary as long as the target polymer is obtained, but is preferably 0.01 to 10 equivalents of diamino compound (25) to 1 equivalent of triazine compound (24). 0.1 to 0.8 equivalent or 1 to 5 equivalent is more preferable.
The reaction temperature may be appropriately set in the range from the melting point of the solvent to be used to the boiling point of the solvent, but is preferably about −30 to 150 ° C., more preferably −10 to 100 ° C.
 有機溶媒としては、この種の反応において通常用いられる種々の溶媒を用いることができ、例えば、テトラヒドロフラン、ジオキサン、ジメチルスルホキシド;N,N-ジメチルホルムアミド、N-メチル-2-ピロリドン、テトラメチル尿素、ヘキサメチルホスホルアミド、N,N-ジメチルアセトアミド、N-メチル-2-ピペリドン、N,N-ジメチルエチレン尿素、N,N,N’,N’-テトラメチルマロン酸アミド、N-メチルカプロラクタム、N-アセチルピロリジン、N,N-ジエチルアセトアミド、N-エチル-2-ピロリドン、N,N-ジメチルプロピオン酸アミド、N,N-ジメチルイソブチルアミド、N-メチルホルムアミド、N,N’-ジメチルプロピレン尿素等のアミド系溶媒、およびそれらの混合溶媒が挙げられる。
 中でもN,N-ジメチルホルムアミド、ジメチルスルホキシド、N-メチル-2-ピロリドン、N,N-ジメチルアセトアミド、およびそれらの混合系が好ましく、特に、N,N-ジメチルアセトアミド、N-メチル-2-ピロリドンが好適である。
As the organic solvent, various solvents usually used in this kind of reaction can be used, for example, tetrahydrofuran, dioxane, dimethyl sulfoxide; N, N-dimethylformamide, N-methyl-2-pyrrolidone, tetramethylurea, Hexamethylphosphoramide, N, N-dimethylacetamide, N-methyl-2-piperidone, N, N-dimethylethyleneurea, N, N, N ′, N′-tetramethylmalonic acid amide, N-methylcaprolactam, N-acetylpyrrolidine, N, N-diethylacetamide, N-ethyl-2-pyrrolidone, N, N-dimethylpropionic acid amide, N, N-dimethylisobutyramide, N-methylformamide, N, N'-dimethylpropylene urea Amide solvents such as, and mixed solvents thereof
Among these, N, N-dimethylformamide, dimethyl sulfoxide, N-methyl-2-pyrrolidone, N, N-dimethylacetamide, and a mixed system thereof are preferable, and N, N-dimethylacetamide, N-methyl-2-pyrrolidone are particularly preferable. Is preferred.
 各成分の配合順序は任意であるが、トリアジン化合物(24)および有機溶媒を含む溶液に、ジアミノ化合物(25)を加える方法が好適である。
 後から加える成分は、ニートで加えても、上述したような有機溶媒に溶かした溶液で加えてもよいが、操作の容易さや反応のコントロールのし易さなどを考慮すると、後者の手法が好適である。
 また、添加は、滴下等によって徐々に加えても、全量一括して加えてもよい。
The order of blending the components is arbitrary, but a method of adding the diamino compound (25) to a solution containing the triazine compound (24) and the organic solvent is preferable.
Components added later may be added neat or in a solution dissolved in an organic solvent as described above, but the latter method is preferred in view of ease of operation and ease of reaction control. It is.
The addition may be gradually added by dropping or the like, or may be added all at once.
 また、上記反応では、重合時または重合後に通常用いられる種々の塩基を添加してもよい。
 この塩基の具体例としては、炭酸カリウム、水酸化カリウム、炭酸ナトリウム、水酸化ナトリウム、炭酸水素ナトリウム、ナトリウムエトキシド、酢酸ナトリウム、炭酸リチウム、水酸化リチウム、酸化リチウム、酢酸カリウム、酸化マグネシウム、酸化カルシウム、水酸化バリウム、リン酸三リチウム、リン酸三ナトリウム、リン酸三カリウム、フッ化セシウム、酸化アルミニウム、アンモニア、トリメチルアミン、トリエチルアミン、ジイソプロピルアミン、ジイソプロピルエチルアミン、N-メチルピペリジン、2,2,6,6-テトラメチル-N-メチルピペリジン、ピリジン、4-ジメチルアミノピリジン、N-メチルモルホリン等が挙げられる。
 塩基の添加量は、トリアジン化合物(24)1当量に対して1~100当量が好ましく、1~10当量がより好ましい。なお、これらの塩基は水溶液にして用いてもよい。
 得られる重合体には、原料成分が残存していないことが好ましいが、本発明の効果を損なわなければ一部の原料が残存していてもよい。
 いずれのスキームの方法においても、反応終了後、生成物は再沈法等によって容易に精製できる。
In the above reaction, various bases usually used during polymerization or after polymerization may be added.
Specific examples of this base include potassium carbonate, potassium hydroxide, sodium carbonate, sodium hydroxide, sodium hydrogen carbonate, sodium ethoxide, sodium acetate, lithium carbonate, lithium hydroxide, lithium oxide, potassium acetate, magnesium oxide, oxidized Calcium, barium hydroxide, trilithium phosphate, trisodium phosphate, tripotassium phosphate, cesium fluoride, aluminum oxide, ammonia, trimethylamine, triethylamine, diisopropylamine, diisopropylethylamine, N-methylpiperidine, 2,2,6 , 6-tetramethyl-N-methylpiperidine, pyridine, 4-dimethylaminopyridine, N-methylmorpholine and the like.
The amount of the base added is preferably 1 to 100 equivalents and more preferably 1 to 10 equivalents with respect to 1 equivalent of the triazine compound (24). These bases may be used as an aqueous solution.
Although it is preferable that the raw material component does not remain in the obtained polymer, a part of the raw material may remain as long as the effect of the present invention is not impaired.
In any of the scheme methods, after completion of the reaction, the product can be easily purified by a reprecipitation method or the like.
 なお、本発明においては、少なくとも1つの末端トリアジン環のハロゲン原子の一部を、アルキル、アラルキル、アリール、アルキルアミノ、アルコキシシリル基含有アルキルアミノ、アラルキルアミノ、アリールアミノ、アルコキシ、アラルキルオキシ、アリールオキシ、エステル基等でキャップしてもよい。
 これらの中でも、アルキルアミノ、アルコキシシリル基含有アルキルアミノ、アラルキルアミノ、アリールアミノ基が好ましく、アルキルアミノ、アリールアミノ基がより好ましく、アリールアミノ基がさらに好ましい。
 上記アルキル基、アルコキシ基としては上記と同様のものが挙げられる。
In the present invention, a part of halogen atoms of at least one terminal triazine ring is substituted with alkyl, aralkyl, aryl, alkylamino, alkoxysilyl group-containing alkylamino, aralkylamino, arylamino, alkoxy, aralkyloxy, aryloxy. , And may be capped with an ester group or the like.
Among these, alkylamino, alkoxysilyl group-containing alkylamino, aralkylamino, and arylamino groups are preferable, alkylamino and arylamino groups are more preferable, and arylamino groups are more preferable.
Examples of the alkyl group and alkoxy group are the same as those described above.
 エステル基の具体例としては、メトキシカルボニル、エトキシカルボニル基等が挙げられる。
 アリール基の具体例としては、フェニル、o-クロルフェニル、m-クロルフェニル、p-クロルフェニル、o-フルオロフェニル、p-フルオロフェニル、o-メトキシフェニル、p-メトキシフェニル、p-ニトロフェニル、p-シアノフェニル、α-ナフチル、β-ナフチル、o-ビフェニリル、m-ビフェニリル、p-ビフェニリル、1-アントリル、2-アントリル、9-アントリル、1-フェナントリル、2-フェナントリル、3-フェナントリル、4-フェナントリル、9-フェナントリル基等が挙げられる。
 アラルキル基の具体例としては、ベンジル、p-メチルフェニルメチル、m-メチルフェニルメチル、o-エチルフェニルメチル、m-エチルフェニルメチル、p-エチルフェニルメチル、2-プロピルフェニルメチル、4-イソプロピルフェニルメチル、4-イソブチルフェニルメチル、α-ナフチルメチル基等が挙げられる。
Specific examples of the ester group include methoxycarbonyl and ethoxycarbonyl groups.
Specific examples of the aryl group include phenyl, o-chlorophenyl, m-chlorophenyl, p-chlorophenyl, o-fluorophenyl, p-fluorophenyl, o-methoxyphenyl, p-methoxyphenyl, p-nitrophenyl, p-cyanophenyl, α-naphthyl, β-naphthyl, o-biphenylyl, m-biphenylyl, p-biphenylyl, 1-anthryl, 2-anthryl, 9-anthryl, 1-phenanthryl, 2-phenanthryl, 3-phenanthryl, 4 -Phenanthryl, 9-phenanthryl group and the like.
Specific examples of the aralkyl group include benzyl, p-methylphenylmethyl, m-methylphenylmethyl, o-ethylphenylmethyl, m-ethylphenylmethyl, p-ethylphenylmethyl, 2-propylphenylmethyl, 4-isopropylphenyl. Examples include methyl, 4-isobutylphenylmethyl, α-naphthylmethyl group and the like.
 アルキルアミノ基の具体例としては、メチルアミノ、エチルアミノ、n-プロピルアミノ、イソプロピルアミノ、n-ブチルアミノ、イソブチルアミノ、s-ブチルアミノ、t-ブチルアミノ、n-ペンチルアミノ、1-メチル-n-ブチルアミノ、2-メチル-n-ブチルアミノ、3-メチル-n-ブチルアミノ、1,1-ジメチル-n-プロピルアミノ、1,2-ジメチル-n-プロピルアミノ、2,2-ジメチル-n-プロピルアミノ、1-エチル-n-プロピルアミノ、n-ヘキシルアミノ、1-メチル-n-ペンチルアミノ、2-メチル-n-ペンチルアミノ、3-メチル-n-ペンチルアミノ、4-メチル-n-ペンチルアミノ、1,1-ジメチル-n-ブチルアミノ、1,2-ジメチル-n-ブチルアミノ、1,3-ジメチル-n-ブチルアミノ、2,2-ジメチル-n-ブチルアミノ、2,3-ジメチル-n-ブチルアミノ、3,3-ジメチル-n-ブチルアミノ、1-エチル-n-ブチルアミノ、2-エチル-n-ブチルアミノ、1,1,2-トリメチル-n-プロピルアミノ、1,2,2-トリメチル-n-プロピルアミノ、1-エチル-1-メチル-n-プロピルアミノ、1-エチル-2-メチル-n-プロピルアミノ基等が挙げられる。 Specific examples of the alkylamino group include methylamino, ethylamino, n-propylamino, isopropylamino, n-butylamino, isobutylamino, s-butylamino, t-butylamino, n-pentylamino, 1-methyl- n-butylamino, 2-methyl-n-butylamino, 3-methyl-n-butylamino, 1,1-dimethyl-n-propylamino, 1,2-dimethyl-n-propylamino, 2,2-dimethyl -N-propylamino, 1-ethyl-n-propylamino, n-hexylamino, 1-methyl-n-pentylamino, 2-methyl-n-pentylamino, 3-methyl-n-pentylamino, 4-methyl -N-pentylamino, 1,1-dimethyl-n-butylamino, 1,2-dimethyl-n-butylamino, 1,3-dimethyl -N-butylamino, 2,2-dimethyl-n-butylamino, 2,3-dimethyl-n-butylamino, 3,3-dimethyl-n-butylamino, 1-ethyl-n-butylamino, 2- Ethyl-n-butylamino, 1,1,2-trimethyl-n-propylamino, 1,2,2-trimethyl-n-propylamino, 1-ethyl-1-methyl-n-propylamino, 1-ethyl- And 2-methyl-n-propylamino group.
 アラルキルアミノ基の具体例としては、ベンジルアミノ、メトキシカルボニルフェニルメチルアミノ、エトキシカルボニルフェニルメチルアミノ、p-メチルフェニルメチルアミノ、m-メチルフェニルメチルアミノ、o-エチルフェニルメチルアミノ、m-エチルフェニルメチルアミノ、p-エチルフェニルメチルアミノ、2-プロピルフェニルメチルアミノ、4-イソプロピルフェニルメチルアミノ、4-イソブチルフェニルメチルアミノ、ナフチルメチルアミノ、メトキシカルボニルナフチルメチルアミノ、エトキシカルボニルナフチルメチルアミノ基等が挙げられる。
 アリールアミノ基の具体例としては、フェニルアミノ、メトキシカルボニルフェニルアミノ、エトキシカルボニルフェニルアミノ、ナフチルアミノ、メトキシカルボニルナフチルアミノ、エトキシカルボニルナフチルアミノ、アントラニルアミノ、ピレニルアミノ、ビフェニルアミノ、ターフェニルアミノ、フルオレニルアミノ基等が挙げられる。
Specific examples of the aralkylamino group include benzylamino, methoxycarbonylphenylmethylamino, ethoxycarbonylphenylmethylamino, p-methylphenylmethylamino, m-methylphenylmethylamino, o-ethylphenylmethylamino, m-ethylphenylmethyl. Amino, p-ethylphenylmethylamino, 2-propylphenylmethylamino, 4-isopropylphenylmethylamino, 4-isobutylphenylmethylamino, naphthylmethylamino, methoxycarbonylnaphthylmethylamino, ethoxycarbonylnaphthylmethylamino group, etc. .
Specific examples of the arylamino group include phenylamino, methoxycarbonylphenylamino, ethoxycarbonylphenylamino, naphthylamino, methoxycarbonylnaphthylamino, ethoxycarbonylnaphthylamino, anthranylamino, pyrenylamino, biphenylamino, terphenylamino, fluorenyl An amino group etc. are mentioned.
 アルコキシシリル基含有アルキルアミノ基としては、モノアルコキシシリル基含有アルキルアミノ、ジアルコキシシリル基含有アルキルアミノ、トリアルコキシシリル基含有アルキルアミノ基のいずれでもよく、その具体例としては、3-トリメトキシシリルプロピルアミノ、3-トリエトキシシリルプロピルアミノ、3-ジメチルエトキシシリルプロピルアミノ、3-メチルジエトキシシリルプロピルアミノ、N-(2-アミノエチル)-3-ジメチルメトキシシリルプロピルアミノ、N-(2-アミノエチル)-3-メチルジメトキシシリルプロピルアミノ、N-(2-アミノエチル)-3-トリメトキシシリルプロピルアミノ基等が挙げられる。 The alkoxysilyl group-containing alkylamino group may be any of monoalkoxysilyl group-containing alkylamino, dialkoxysilyl group-containing alkylamino, trialkoxysilyl group-containing alkylamino group, and specific examples thereof include 3-trimethoxysilyl. Propylamino, 3-triethoxysilylpropylamino, 3-dimethylethoxysilylpropylamino, 3-methyldiethoxysilylpropylamino, N- (2-aminoethyl) -3-dimethylmethoxysilylpropylamino, N- (2- Aminoethyl) -3-methyldimethoxysilylpropylamino, N- (2-aminoethyl) -3-trimethoxysilylpropylamino group and the like.
 アリールオキシ基の具体例としては、フェノキシ、ナフトキシ、アントラニルオキシ、ピレニルオキシ、ビフェニルオキシ、ターフェニルオキシ、フルオレニルオキシ基等が挙げられる。
 アラルキルオキシ基の具体例としては、ベンジルオキシ、p-メチルフェニルメチルオキシ、m-メチルフェニルメチルオキシ、o-エチルフェニルメチルオキシ、m-エチルフェニルメチルオキシ、p-エチルフェニルメチルオキシ、2-プロピルフェニルメチルオキシ、4-イソプロピルフェニルメチルオキシ、4-イソブチルフェニルメチルオキシ、α-ナフチルメチルオキシ基等が挙げられる。
Specific examples of the aryloxy group include phenoxy, naphthoxy, anthranyloxy, pyrenyloxy, biphenyloxy, terphenyloxy, and fluorenyloxy groups.
Specific examples of the aralkyloxy group include benzyloxy, p-methylphenylmethyloxy, m-methylphenylmethyloxy, o-ethylphenylmethyloxy, m-ethylphenylmethyloxy, p-ethylphenylmethyloxy, 2-propyl Examples include phenylmethyloxy, 4-isopropylphenylmethyloxy, 4-isobutylphenylmethyloxy, α-naphthylmethyloxy groups and the like.
 これらの基は、トリアジン環上のハロゲン原子を対応する置換基を与える化合物で置換することで容易に導入することができ、例えば、下記式スキーム2に示されるように、アニリン(誘導体)等の有機モノアミンを加えて反応させることで、少なくとも1つの末端にフェニルアミノ基を有するトリアジン環含有重合体(27)が得られる。 These groups can be easily introduced by substituting a halogen atom on the triazine ring with a compound that gives a corresponding substituent. For example, as shown in the following formula scheme 2, an aniline (derivative) or the like can be introduced. By adding and reacting an organic monoamine, a triazine ring-containing polymer (27) having a phenylamino group at at least one terminal is obtained.
Figure JPOXMLDOC01-appb-C000028
(式中、X、RおよびR′は上記と同じ意味を表す。)
Figure JPOXMLDOC01-appb-C000028
(In the formula, X, R and R ′ have the same meaning as described above.)
 上記有機モノアミンとしては、アルキルモノアミン、アラルキルモノアミン、アリールモノアミンのいずれを用いることもできる。
 アルキルモノアミンとしては、メチルアミン、エチルアミン、n-プロピルアミン、イソプロピルアミン、n-ブチルアミン、イソブチルアミン、s-ブチルアミン、t-ブチルアミン、n-ペンチルアミン、1-メチル-n-ブチルアミン、2-メチル-n-ブチルアミン、3-メチル-n-ブチルアミン、1,1-ジメチル-n-プロピルアミン、1,2-ジメチル-n-プロピルアミン、2,2-ジメチル-n-プロピルアミン、1-エチル-n-プロピルアミン、n-ヘキシルアミン、1-メチル-n-ペンチルアミン、2-メチル-n-ペンチルアミン、3-メチル-n-ペンチルアミン、4-メチル-n-ペンチルアミン、1,1-ジメチル-n-ブチルアミン、1,2-ジメチル-n-ブチルアミン、1,3-ジメチル-n-ブチルアミン、2,2-ジメチル-n-ブチルアミン、2,3-ジメチル-n-ブチルアミン、3,3-ジメチル-n-ブチルアミン、1-エチル-n-ブチルアミン、2-エチル-n-ブチルアミン、1,1,2-トリメチル-n-プロピルアミン、1,2,2-トリメチル-n-プロピルアミン、1-エチル-1-メチル-n-プロピルアミン、1-エチル-2-メチル-n-プロピルアミン、2-エチルヘキシルアミン等が挙げられる。
As the organic monoamine, any of alkyl monoamine, aralkyl monoamine, and aryl monoamine can be used.
Alkyl monoamines include methylamine, ethylamine, n-propylamine, isopropylamine, n-butylamine, isobutylamine, s-butylamine, t-butylamine, n-pentylamine, 1-methyl-n-butylamine, 2-methyl- n-butylamine, 3-methyl-n-butylamine, 1,1-dimethyl-n-propylamine, 1,2-dimethyl-n-propylamine, 2,2-dimethyl-n-propylamine, 1-ethyl-n -Propylamine, n-hexylamine, 1-methyl-n-pentylamine, 2-methyl-n-pentylamine, 3-methyl-n-pentylamine, 4-methyl-n-pentylamine, 1,1-dimethyl -N-butylamine, 1,2-dimethyl-n-butylamine, 1,3-dimethyl-n- Tylamine, 2,2-dimethyl-n-butylamine, 2,3-dimethyl-n-butylamine, 3,3-dimethyl-n-butylamine, 1-ethyl-n-butylamine, 2-ethyl-n-butylamine, 1, 1,2-trimethyl-n-propylamine, 1,2,2-trimethyl-n-propylamine, 1-ethyl-1-methyl-n-propylamine, 1-ethyl-2-methyl-n-propylamine, Examples include 2-ethylhexylamine.
 アラルキルモノアミンの具体例としては、ベンジルアミン、p-メトキシカルボニルベンジルアミン、p-エトキシカルボニルベンジルアミン、p-メチルベンジルアミン、m-メチルベンジルアミン、o-メトキシベンジルアミン等が挙げられる。
 アリールモノアミンの具体例としては、アニリン、p-メトキシカルボニルアニリン、p-エトキシカルボニルアニリン、p-メトキシアニリン、1-ナフチルアミン、2-ナフチルアミン、アントラニルアミン、1-アミノピレン、4-ビフェニリルアミン、o-フェニルアニリン、4-アミノ-p-ターフェニル、2-アミノフルオレン等が挙げられる。
Specific examples of aralkyl monoamines include benzylamine, p-methoxycarbonylbenzylamine, p-ethoxycarbonylbenzylamine, p-methylbenzylamine, m-methylbenzylamine, o-methoxybenzylamine and the like.
Specific examples of the aryl monoamine include aniline, p-methoxycarbonylaniline, p-ethoxycarbonylaniline, p-methoxyaniline, 1-naphthylamine, 2-naphthylamine, anthranylamine, 1-aminopyrene, 4-biphenylylamine, o- And phenylaniline, 4-amino-p-terphenyl, 2-aminofluorene, and the like.
 この場合、有機モノアミンの使用量は、ハロゲン化シアヌル化合物に対して、0.05~500当量とすることが好ましく、0.05~120当量がより好ましく、0.05~50当量がより一層好ましい。
 反応温度は60~150℃が好ましく、80~150℃がより好ましく、80~120℃がより一層好ましい。
 ただし、有機モノアミン、ハロゲン化シアヌル化合物、ジアミノアリール化合物の3成分の混合は、低温下で行ってもよく、その場合の温度としては、-50~50℃程度が好ましく、-20~50℃程度がより好ましく、-20~10℃がさらに好ましい。低温仕込み後は、重合させる温度まで一気に(一段階で)昇温して反応を行うことが好ましい。
 また、ハロゲン化シアヌル化合物とジアミノアリール化合物の2成分の混合を低温下で行ってもよく、その場合の温度としては、-50~50℃程度が好ましく、-20~50℃程度がより好ましく、-20~10℃がさらに好ましい。低温仕込み後、有機モノアミンを加え、重合させる温度まで一気に(一段階で)昇温して反応を行うことが好ましい。
 また、このような有機モノアミンの存在下で、ハロゲン化シアヌル化合物と、ジアミノアリール化合物とを反応させる反応は、上述と同様の有機溶媒を用いて行ってもよい。
In this case, the amount of the organic monoamine used is preferably 0.05 to 500 equivalents, more preferably 0.05 to 120 equivalents, and even more preferably 0.05 to 50 equivalents based on the halogenated cyanuric compound. .
The reaction temperature is preferably 60 to 150 ° C, more preferably 80 to 150 ° C, and still more preferably 80 to 120 ° C.
However, the mixing of the three components of the organic monoamine, the halogenated cyanuric compound and the diaminoaryl compound may be carried out at a low temperature. In this case, the temperature is preferably about −50 to 50 ° C., and about −20 to 50 ° C. Is more preferable, and −20 to 10 ° C. is more preferable. After the low temperature charging, it is preferable to carry out the reaction by raising the temperature to the polymerization temperature at once (in one step).
In addition, the two components of the cyanuric halide compound and the diaminoaryl compound may be mixed at a low temperature. In this case, the temperature is preferably about −50 to 50 ° C., more preferably about −20 to 50 ° C., More preferably, it is −20 to 10 ° C. It is preferable to carry out the reaction by adding an organic monoamine after the low-temperature charging and raising the temperature to a temperature for polymerization (in one step).
Moreover, you may perform reaction which makes a halogenated cyanuric compound and a diaminoaryl compound react with presence of such an organic monoamine using the organic solvent similar to the above-mentioned.
 本発明の組成物では、上記トリアジン環含有重合体とともに、少なくとも2種類の架橋剤を用いる。架橋剤としては、上述したトリアジン環含有重合体と反応し得る置換基を有する化合物であれば特に限定されるものではない。
 そのような化合物としては、メチロール基、メトキシメチル基などの架橋形成置換基を有するメラミン系化合物、置換尿素系化合物、エポキシ基またはオキセタン基などの架橋形成置換基を含有する化合物、ブロック化イソシアナートを含有する化合物、酸無水物を有する化合物、(メタ)アクリル基を有する化合物、フェノプラスト化合物等が挙げられるが、耐熱性や保存安定性の観点からエポキシ基、ブロックイソシアネート基、(メタ)アクリル基を含有する化合物が好ましく、特に、ブロックイソシアネート基を有する化合物や、開始剤を用いなくとも光硬化可能な組成物を与える多官能エポキシ化合物および多官能(メタ)アクリル化合物から選ばれる2種が好ましく、多官能エポキシ化合物と多官能(メタ)アクリル化合物との組み合わせがより好ましい。
 なお、これらの化合物は、重合体の末端処理に用いる場合は少なくとも1個の架橋形成置換基を有していればよく、重合体同士の架橋処理に用いる場合は少なくとも2個の架橋形成置換基を有する必要がある。
In the composition of the present invention, at least two kinds of crosslinking agents are used together with the triazine ring-containing polymer. The crosslinking agent is not particularly limited as long as it is a compound having a substituent capable of reacting with the above-described triazine ring-containing polymer.
Examples of such compounds include melamine compounds having a crosslinkable substituent such as a methylol group and methoxymethyl group, substituted urea compounds, compounds containing a crosslinkable substituent such as an epoxy group or an oxetane group, and blocked isocyanates. A compound containing acid, a compound having an acid anhydride, a compound having a (meth) acryl group, a phenoplast compound, and the like, but from the viewpoint of heat resistance and storage stability, an epoxy group, a blocked isocyanate group, (meth) acrylic A compound containing a group is preferable, and in particular, two types selected from a compound having a blocked isocyanate group and a polyfunctional epoxy compound and a polyfunctional (meth) acryl compound that give a photocurable composition without using an initiator. Preferably, a polyfunctional epoxy compound and a polyfunctional (meth) acrylic compound Seen together is more preferable.
These compounds may have at least one crosslink forming substituent when used for polymer terminal treatment, and at least two crosslink forming substituents when used for cross-linking treatment between polymers. It is necessary to have.
 多官能エポキシ化合物としては、エポキシ基を一分子中2個以上有するものであれば特に限定されるものではない。
 その具体例としては、トリス(2,3-エポキシプロピル)イソシアヌレート、1,4-ブタンジオールジグリシジルエーテル、1,2-エポキシ-4-(エポキシエチル)シクロヘキサン、グリセロールトリグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、2,6-ジグリシジルフェニルグリシジルエーテル、1,1,3-トリス[p-(2,3-エポキシプロポキシ)フェニル]プロパン、1,2-シクロヘキサンジカルボン酸ジグリシジルエステル、4,4’-メチレンビス(N,N-ジグリシジルアニリン)、3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート、トリメチロールエタントリグリシジルエーテル、ビスフェノール-A-ジグリシジルエーテル、ペンタエリスリトールポリグリシジルエーテル等が挙げられる。
The polyfunctional epoxy compound is not particularly limited as long as it has two or more epoxy groups in one molecule.
Specific examples include tris (2,3-epoxypropyl) isocyanurate, 1,4-butanediol diglycidyl ether, 1,2-epoxy-4- (epoxyethyl) cyclohexane, glycerol triglycidyl ether, diethylene glycol diglycidyl. Ether, 2,6-diglycidylphenyl glycidyl ether, 1,1,3-tris [p- (2,3-epoxypropoxy) phenyl] propane, 1,2-cyclohexanedicarboxylic acid diglycidyl ester, 4,4'- Methylenebis (N, N-diglycidylaniline), 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, trimethylolethane triglycidyl ether, bisphenol-A-diglycidyl ether, pentaerythris Ritol polyglycidyl ether and the like can be mentioned.
 また、市販品として、少なくとも2個のエポキシ基を有するエポキシ樹脂である、YH-434、YH434L(東都化成(株)製)、シクロヘキセンオキサイド構造を有するエポキシ樹脂である、エポリードGT-401、同GT-403、同GT-301、同GT-302、セロキサイド2021、同3000(ダイセル化学工業(株)製)、ビスフェノールA型エポキシ樹脂である、エピコート(現、jER)1001、同1002、同1003、同1004、同1007、同1009、同1010、同828(以上、ジャパンエポキシレジン(株)製)、ビスフェノールF型エポキシ樹脂である、エピコート(現、jER)807(ジャパンエポキシレジン(株)製)、フェノールノボラック型エポキシ樹脂である、エピコート(現、jER)152、同154(以上、ジャパンエポキシレジン(株)製)、EPPN201、同202(以上、日本化薬(株)製)、クレゾールノボラック型エポキシ樹脂である、EOCN-102、同103S、同104S、同1020、同1025、同1027(以上、日本化薬(株)製)、エピコート(現、jER)180S75(ジャパンエポキシレジン(株)製)、脂環式エポキシ樹脂である、デナコールEX-252(ナガセケムテックス(株)製)、CY175、CY177、CY179(以上、CIBA-GEIGY A.G製)、アラルダイトCY-182、同CY-192、同CY-184(以上、CIBA-GEIGY A.G製)、エピクロン200、同400(以上、DIC(株)製)、エピコート(現、jER)871、同872(以上、ジャパンエポキシレジン(株)製)、ED-5661、ED-5662(以上、セラニーズコーティング(株)製)、脂肪族ポリグリシジルエーテルである、デナコールEX-611、同EX-612、同EX-614、同EX-622、同EX-411、同EX-512、同EX-522、同EX-421、同EX-313、同EX-314、同EX-321(ナガセケムテックス(株)製)等を用いることもできる。 In addition, as commercially available products, epoxy resins having at least two epoxy groups, YH-434, YH434L (manufactured by Tohto Kasei Co., Ltd.), epoxy resins having a cyclohexene oxide structure, Epolide GT-401 and GT -403, GT-301, GT-302, Celoxide 2021, 3000 (manufactured by Daicel Chemical Industries, Ltd.), bisphenol A type epoxy resin, Epicoat (currently jER) 1001, 1002, 1003, 1004, 1007, 1009, 1010, 828 (Japan Epoxy Resin Co., Ltd.), Bisphenol F type epoxy resin, Epicoat (currently jER) 807 (Japan Epoxy Resin Co., Ltd.) , Epicoat (a phenol novolac type epoxy resin) , JER) 152, 154 (above, manufactured by Japan Epoxy Resins Co., Ltd.), EPPN 201, 202 (above, manufactured by Nippon Kayaku Co., Ltd.), cresol novolac type epoxy resin, EOCN-102, 103S, 104S, 1020, 1025, 1027 (Nippon Kayaku Co., Ltd.), Epicort (currently jER) 180S75 (Japan Epoxy Resin Co., Ltd.), Denacol EX, which is an alicyclic epoxy resin -252 (manufactured by Nagase ChemteX Corporation), CY175, CY177, CY179 (above, manufactured by CIBA-GEIGY A.G), Araldite CY-182, CY-192, CY-184 (above, CIBA-GEIGY A) G), Epicron 200, 400 (above DIC Corporation), Epicort (currently jER) 71, 872 (Japan Epoxy Resin Co., Ltd.), ED-5661, ED-5661 (Celanese Coating Co., Ltd.), aliphatic polyglycidyl ether, Denacol EX-611, EX -612, EX-614, EX-622, EX-411, EX-512, EX-522, EX-522, EX-421, EX-313, EX-314, EX-321 (Nagase Chem) Tex Co., Ltd.) can also be used.
 多官能(メタ)アクリル化合物としては、(メタ)アクリル基を一分子中2個以上有するものであれば特に限定されるものではない。
 その具体例としては、エチレングリコールジアクリレート、エチレングリコールジメタクリレート、ポリエチレングリコールジアクリレート、ポリエチレングリコールジメタクリレート、エトキシ化ビスフェノールAジアクリレート、エトキシ化ビスフェノールAジメタクリレート、エトキシ化トリメチロールプロパントリアクリレート、エトキシ化トリメチロールプロパントリメタクリレート、エトキシ化グリセリントリアクリレート、エトキシ化グリセリントリメタクリレート、エトキシ化ペンタエリスリトールテトラアクリレート、エトキシ化ペンタエリスリトールテトラメタクリレート、エトキシ化ジペンタエリスリトールヘキサアクリレート、ポリグリセリンモノエチレンオキサイドポリアクリレート、ポリグリセリンポリエチレングリコールポリアクリレート、ジペンタエリスリトールヘキサアクリレート、ジペンタエリスリトールヘキサメタクリレート、ネオペンチルグリコールジアクリレート、ネオペンチルグリコールジメタクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパントリメタクリレート、トリシクロデカンジメタノールジアクリレート、トリシクロデカンジメタノールジメタクリレート、1,6-ヘキサンジオールジアクリレート、1,6-ヘキサンジオールジメタクリレート等が挙げられる。
The polyfunctional (meth) acrylic compound is not particularly limited as long as it has two or more (meth) acrylic groups in one molecule.
Specific examples include ethylene glycol diacrylate, ethylene glycol dimethacrylate, polyethylene glycol diacrylate, polyethylene glycol dimethacrylate, ethoxylated bisphenol A diacrylate, ethoxylated bisphenol A dimethacrylate, ethoxylated trimethylolpropane triacrylate, and ethoxylated. Trimethylolpropane trimethacrylate, ethoxylated glycerol triacrylate, ethoxylated glycerol trimethacrylate, ethoxylated pentaerythritol tetraacrylate, ethoxylated pentaerythritol tetramethacrylate, ethoxylated dipentaerythritol hexaacrylate, polyglycerol monoethylene oxide polyacrylate, polyglycerol Polyethylene Glycol polyacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethacrylate, neopentyl glycol diacrylate, neopentyl glycol dimethacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, Examples include tricyclodecane dimethanol diacrylate, tricyclodecane dimethanol dimethacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, and the like.
 また、多官能(メタ)アクリル化合物は、市販品として入手が可能であり、その具体例としては、NKエステルA-200、同A-400、同A-600、同A-1000、同A-9300(イソシアヌル酸トリス(2-アクリロイルオキシエチル))、同A-9300-1CL、同A-TMPT、同UA-53H、同1G、同2G、同3G、同4G、同9G、同14G、同23G、同ABE-300、同A-BPE-4、同A-BPE-6、同A-BPE-10、同A-BPE-20、同A-BPE-30、同BPE-80N、同BPE-100N、同BPE-200、同BPE-500、同BPE-900、同BPE-1300N、同A-GLY-3E、同A-GLY-9E、同A-GLY-20E、同A-TMPT-3EO、同A-TMPT-9EO、同AT-20E、同ATM-4E、同ATM-35E(以上、新中村化学工業(株)製)、KAYARAD(登録商標)DPEA-12、同PEG400DA、同THE-330、同RP-1040(以上、日本化薬(株)製)、M-210、M-350(以上、東亞合成(株)製)、KAYARAD(登録商標)DPHA、同NPGDA、同PET30(以上、日本化薬(株)製)、NKエステル A-DPH、同A-TMPT、同A-DCP、同A-HD-N、同TMPT、同DCP、同NPG、同HD-N(以上、新中村化学工業(株)製)、NKオリゴ U-15HA(新中村化学工業(株)製)、NKポリマー バナレジンGH-1203(新中村化学工業(株)製)等が挙げられる。 Polyfunctional (meth) acrylic compounds can be obtained as commercial products. Specific examples thereof include NK ester A-200, same A-400, same A-600, same A-1000, same A- 9300 (Tris (2-acryloyloxyethyl) isocyanurate), A-9300-1CL, A-TMPT, UA-53H, 1G, 2G, 3G, 4G, 9G, 14G, 23G, ABE-300, A-BPE-4, A-BPE-6, A-BPE-10, A-BPE-20, A-BPE-30, BPE-80N, BPE- 100N, BPE-200, BPE-500, BPE-900, BPE-1300N, A-GLY-3E, A-GLY-9E, A-GLY-20E, A-TMPT-3EO, Same A- MPT-9EO, AT-20E, ATM-4E, ATM-35E (Shin Nakamura Chemical Co., Ltd.), KAYARAD (registered trademark) DPEA-12, PEG400DA, THE-330, RP -1040 (above, Nippon Kayaku Co., Ltd.), M-210, M-350 (above, Toagosei Co., Ltd.), KAYARAD (registered trademark) DPHA, NPGDA, PET30 (above, Nippon Kayaku) NK Ester A-DPH, A-TMPT, A-DCP, A-HD-N, TMPT, DCP, NPG, HD-N (above, Shin-Nakamura Chemical Co., Ltd.) NK Oligo U-15HA (manufactured by Shin-Nakamura Chemical Co., Ltd.), NK polymer Vanare Resin GH-1203 (manufactured by Shin-Nakamura Chemical Co., Ltd.), and the like.
 酸無水物化合物としては、2分子のカルボン酸を脱水縮合させたカルボン酸無水物であれば、特に限定されるものではなく、その具体例としては、無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、無水ナジック酸、無水メチルナジック酸、無水マレイン酸、無水コハク酸、オクチル無水コハク酸、ドデセニル無水コハク酸等の分子内に1個の酸無水物基を有するもの;1,2,3,4-シクロブタンテトラカルボン酸二無水物、ピロメリット酸無水物、3,4-ジカルボキシ-1,2,3,4-テトラヒドロ-1-ナフタレンコハク酸二無水物、ビシクロ[3.3.0]オクタン-2,4,6,8-テトラカルボン酸二無水物、5-(2,5-ジオキソテトラヒドロ-3-フラニル)-3-メチル-3-シクロヘキセン-1,2-ジカルボン酸無水物、1,2,3,4-ブタンテトラカルボン酸二無水物、3,3’,4,4’-ベンゾフェノンテトラカルボン酸二無水物、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物、2,2-ビス(3,4-ジカルボキシフェニル)ヘキサフルオロプロパン二無水物、1,3-ジメチル-1,2,3,4-シクロブタンテトラカルボン酸二無水物等の分子内に2個の酸無水物基を有するもの等が挙げられる。 The acid anhydride compound is not particularly limited as long as it is a carboxylic acid anhydride obtained by dehydration condensation of two molecules of carboxylic acid. Specific examples thereof include phthalic anhydride, tetrahydrophthalic anhydride, hexahydroanhydride. One in the molecule such as phthalic acid, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, nadic anhydride, methyl nadic anhydride, maleic anhydride, succinic anhydride, octyl succinic anhydride, dodecenyl succinic anhydride Having an acid anhydride group; 1,2,3,4-cyclobutanetetracarboxylic dianhydride, pyromellitic anhydride, 3,4-dicarboxy-1,2,3,4-tetrahydro-1-naphthalene Succinic dianhydride, bicyclo [3.3.0] octane-2,4,6,8-tetracarboxylic dianhydride, 5- (2,5- Oxotetrahydro-3-furanyl) -3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride, 1,2,3,4-butanetetracarboxylic dianhydride, 3,3 ′, 4,4 ′ -Benzophenone tetracarboxylic dianhydride, 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) hexafluoropropane dianhydride, 1, Examples thereof include those having two acid anhydride groups in the molecule such as 3-dimethyl-1,2,3,4-cyclobutanetetracarboxylic dianhydride.
 ブロック化イソシアネートを含有する化合物としては、イソシアネート基(-NCO)が適当な保護基によりブロックされたブロック化イソシアネート基を一分子中2個以上有し、熱硬化の際の高温に曝されると、保護基(ブロック部分)が熱解離して外れ、生じたイソシアネート基が樹脂との間で架橋反応を起こすものであれば特に限定されるものではなく、例えば、下記式で示される基を一分子中2個以上(なお、これらの基は同一のものでも、また各々異なっているものでもよい)有する化合物が挙げられる。 As a compound containing a blocked isocyanate, when the isocyanate group (—NCO) has two or more blocked isocyanate groups blocked by an appropriate protective group in one molecule, it is exposed to a high temperature during thermosetting. The protective group (block part) is not particularly limited as long as it is dissociated by thermal dissociation and the resulting isocyanate group causes a crosslinking reaction with the resin. For example, a group represented by the following formula Examples thereof include compounds having two or more in the molecule (note that these groups may be the same or different from each other).
Figure JPOXMLDOC01-appb-C000029
(式中、Rbはブロック部の有機基を表す。)
Figure JPOXMLDOC01-appb-C000029
(In the formula, R b represents an organic group in the block part.)
 このような化合物は、例えば、一分子中2個以上のイソシアネート基を有する化合物に対して適当なブロック剤を反応させて得ることができる。
 一分子中2個以上のイソシアネート基を有する化合物としては、例えば、イソホロンジイソシアネート、1,6-ヘキサメチレンジイソシアネート、メチレンビス(4-シクロヘキシルイソシアネート)、トリメチルヘキサメチレンジイソシアネートのポリイソシアネートや、これらの二量体、三量体、および、これらとジオール類、トリオール類、ジアミン類、またはトリアミン類との反応物などが挙げられる。
 ブロック剤としては、例えば、メタノール、エタノール、イソプロパノール、n-ブタノール、2-エトキシヘキサノール、2-N,N-ジメチルアミノエタノール、2-エトキシエタノール、シクロヘキサノール等のアルコール類;フェノール、o-ニトロフェノール、p-クロロフェノール、o-、m-またはp-クレゾール等のフェノール類;ε-カプロラクタム等のラクタム類、アセトンオキシム、メチルエチルケトンオキシム、メチルイソブチルケトンオキシム、シクロヘキサノンオキシム、アセトフェノンオキシム、ベンゾフェノンオキシム等のオキシム類;ピラゾール、3,5-ジメチルピラゾール、3-メチルピラゾール等のピラゾール類;ドデカンチオール、ベンゼンチオール等のチオール類などが挙げられる。
Such a compound can be obtained, for example, by reacting an appropriate blocking agent with a compound having two or more isocyanate groups in one molecule.
Examples of the compound having two or more isocyanate groups in one molecule include, for example, isophorone diisocyanate, 1,6-hexamethylene diisocyanate, methylene bis (4-cyclohexyl isocyanate), polyisocyanate of trimethylhexamethylene diisocyanate, and dimers thereof. , Trimers, and reaction products of these with diols, triols, diamines, or triamines.
Examples of the blocking agent include alcohols such as methanol, ethanol, isopropanol, n-butanol, 2-ethoxyhexanol, 2-N, N-dimethylaminoethanol, 2-ethoxyethanol, cyclohexanol; phenol, o-nitrophenol , P-chlorophenol, phenols such as o-, m- or p-cresol; lactams such as ε-caprolactam, oximes such as acetone oxime, methyl ethyl ketone oxime, methyl isobutyl ketone oxime, cyclohexanone oxime, acetophenone oxime, benzophenone oxime And pyrazoles such as pyrazole, 3,5-dimethylpyrazole and 3-methylpyrazole; thiols such as dodecanethiol and benzenethiol.
 ブロック化イソシアネートを含有する化合物は、市販品としても入手が可能であり、その具体例としては、B-830、B-815N、B-842N、B-870N、B-874N、B-882N、B-7005、B-7030、B-7075、B-5010(以上、三井化学ポリウレタン(株)製)、デュラネート(登録商標)17B-60PX、同TPA-B80E、同MF-B60X、同MF-K60X、同E402-B80T(以上、旭化成ケミカルズ(株)製)、カレンズMOI-BM(登録商標)(以上、昭和電工(株)製)等が挙げられる。 A compound containing a blocked isocyanate is also available as a commercial product. Specific examples thereof include B-830, B-815N, B-842N, B-870N, B-874N, B-882N, B -7005, B-7030, B-7075, B-5010 (Mitsui Chemicals Polyurethane Co., Ltd.), Duranate (registered trademark) 17B-60PX, TPA-B80E, MF-B60X, MF-K60X, E402-B80T (above, manufactured by Asahi Kasei Chemicals Corporation), Karenz MOI-BM (registered trademark) (above, manufactured by Showa Denko Co., Ltd.), and the like.
 アミノプラスト化合物としては、メトキシメチレン基を一分子中2個以上有するものであれば、特に限定されるものではなく、例えば、ヘキサメトキシメチルメラミン CYMEL(登録商標)303、テトラブトキシメチルグリコールウリル 同1170、テトラメトキシメチルベンゾグアナミン 同1123(以上、日本サイテックインダストリーズ(株)製)等のサイメルシリーズ、メチル化メラミン樹脂であるニカラック(登録商標)MW-30HM、同MW-390、同MW-100LM、同MX-750LM、メチル化尿素樹脂である同MX-270、同MX-280同MX-290(以上、(株)三和ケミカル製)等のニカラックシリーズ等のメラミン系化合物が挙げられる。
 オキセタン化合物としては、オキセタニル基を一分子中2個以上有するものであれば、特に限定されるものではなく、例えば、オキセタニル基を含有するOXT-221、OX-SQ-H、OX-SC(以上、東亞合成(株)製)等が挙げられる。
The aminoplast compound is not particularly limited as long as it has two or more methoxymethylene groups in one molecule. For example, hexamethoxymethylmelamine CYMEL (registered trademark) 303, tetrabutoxymethylglycoluril 1170 Cymel series such as Tetramethoxymethylbenzoguanamine 1123 (Nippon Cytec Industries, Ltd.), Nicalac (registered trademark) MW-30HM, MW-390, MW-100LM, which are methylated melamine resins Examples thereof include melamine compounds such as MX-750LM, Nicarac series such as MX-270 and MX-280, which are methylated urea resins, and MX-280 and MX-290 (manufactured by Sanwa Chemical Co., Ltd.).
The oxetane compound is not particularly limited as long as it has two or more oxetanyl groups in one molecule. For example, OXT-221, OX-SQ-H, OX-SC containing oxetanyl group (above And Toagosei Co., Ltd.).
 フェノプラスト化合物としては、ヒドロキシメチレン基を一分子中2個以上有し、そして熱硬化の際の高温に曝されると、本発明の重合体との間で脱水縮合反応により架橋反応が進行するものである。
 フェノプラスト化合物としては、例えば、2,6-ジヒドロキシメチル-4-メチルフェノール、2,4-ジヒドロキシメチル-6-メチルフェノール、ビス(2-ヒドロキシ-3-ヒドロキシメチル-5-メチルフェニル)メタン、ビス(4-ヒドロキシ-3-ヒドロキシメチル-5-メチルフェニル)メタン、2,2-ビス(4-ヒドロキシ-3,5-ジヒドロキシメチルフェニル)プロパン、ビス(3-ホルミル-4-ヒドロキシフェニル)メタン、ビス(4-ヒドロキシ-2,5-ジメチルフェニル)ホルミルメタン、α,α-ビス(4-ヒドロキシ-2,5-ジメチルフェニル)-4-ホルミルトルエン等が挙げられる。
 フェノプラスト化合物は、市販品としても入手が可能であり、その具体例としては、26DMPC、46DMOC、DM-BIPC-F、DM-BIOC-F、TM-BIP-A、BISA-F、BI25X-DF、BI25X-TPA(以上、旭有機材工業(株)製)等が挙げられる。
The phenoplast compound has two or more hydroxymethylene groups in one molecule, and when exposed to a high temperature during thermosetting, a crosslinking reaction proceeds with the polymer of the present invention by a dehydration condensation reaction. Is.
Examples of the phenoplast compound include 2,6-dihydroxymethyl-4-methylphenol, 2,4-dihydroxymethyl-6-methylphenol, bis (2-hydroxy-3-hydroxymethyl-5-methylphenyl) methane, Bis (4-hydroxy-3-hydroxymethyl-5-methylphenyl) methane, 2,2-bis (4-hydroxy-3,5-dihydroxymethylphenyl) propane, bis (3-formyl-4-hydroxyphenyl) methane Bis (4-hydroxy-2,5-dimethylphenyl) formylmethane, α, α-bis (4-hydroxy-2,5-dimethylphenyl) -4-formyltoluene and the like.
The phenoplast compound is also available as a commercial product, and specific examples thereof include 26DMPC, 46DMOC, DM-BIPC-F, DM-BIOC-F, TM-BIP-A, BISA-F, BI25X-DF. BI25X-TPA (above, manufactured by Asahi Organic Materials Co., Ltd.).
 これらの中でも、架橋剤配合による屈折率低下を抑制し得るとともに、硬化反応が速やかに進行するという点から、多官能(メタ)アクリル化合物が好適であり、その中でも、トリアジン環含有重合体との相溶性に優れていることから、下記イソシアヌル酸骨格を有する多官能(メタ)アクリル化合物がより好ましい。
 このような骨格を有する多官能(メタ)アクリル化合物としては、例えば、NKエステルA-9300、同A-9300-1CL(いずれも、新中村化学工業(株)製)が挙げられる。
Among these, a polyfunctional (meth) acrylic compound is suitable from the viewpoint that the refractive index lowering due to the crosslinking agent blending can be suppressed and the curing reaction proceeds rapidly, and among these, the triazine ring-containing polymer is preferred. Since it is excellent in compatibility, the polyfunctional (meth) acrylic compound having the following isocyanuric acid skeleton is more preferable.
Examples of the polyfunctional (meth) acrylic compound having such a skeleton include NK ester A-9300 and A-9300-1CL (both manufactured by Shin-Nakamura Chemical Co., Ltd.).
Figure JPOXMLDOC01-appb-C000030
(式中、R111~R113は、互いに独立して、末端に少なくとも1つの(メタ)アクリル基を有する一価の有機基である。)
Figure JPOXMLDOC01-appb-C000030
(Wherein R 111 to R 113 are each independently a monovalent organic group having at least one (meth) acryl group at the end).
 また、硬化速度をより向上させるとともに、得られる硬化膜の耐溶剤性および耐酸性、耐アルカリ性を高めるという観点から、25℃で液体であり、かつ、その粘度が5000mPa・s以下、好ましくは1~3000mPa・s、より好ましくは1~1000mPa・s、より一層好ましくは1~500mPa・sの多官能(メタ)アクリル化合物(以下、低粘度架橋剤という)を、単独もしくは2種以上組み合わせて、または、上記イソシアヌル酸骨格を有する多官能(メタ)アクリル化合物と組み合わせて用いることが好適である。
 このような低粘度架橋剤も市販品として入手可能であり、例えば、上述した多官能(メタ)アクリル化合物のうち、NKエステルA-GLY-3E(85mPa・s,25℃)、同A-GLY-9E(95mPa・s,25℃)、同A-GLY-20E(200mPa・s,25℃)、同A-TMPT-3EO(60mPa・s,25℃)、同A-TMPT-9EO、同ATM-4E(150mPa・s,25℃)、同ATM-35E(350mPa・s,25℃)(以上、新中村化学工業(株)製)等の、(メタ)アクリル基間の鎖長が比較的長い架橋剤が挙げられる。
Further, from the viewpoint of further improving the curing rate and improving the solvent resistance, acid resistance, and alkali resistance of the resulting cured film, it is liquid at 25 ° C. and its viscosity is 5000 mPa · s or less, preferably 1 To 3000 mPa · s, more preferably 1 to 1000 mPa · s, and even more preferably 1 to 500 mPa · s, a polyfunctional (meth) acrylic compound (hereinafter referred to as a low-viscosity crosslinking agent) alone or in combination of two or more. Alternatively, it is preferable to use in combination with the polyfunctional (meth) acrylic compound having the isocyanuric acid skeleton.
Such low-viscosity cross-linking agents are also commercially available. For example, among the polyfunctional (meth) acrylic compounds described above, NK ester A-GLY-3E (85 mPa · s, 25 ° C.), A-GLY -9E (95 mPa · s, 25 ° C), A-GLY-20E (200 mPa · s, 25 ° C), A-TMPT-3EO (60 mPa · s, 25 ° C), A-TMPT-9EO, ATM The chain length between (meth) acrylic groups such as -4E (150 mPa · s, 25 ° C.), ATM-35E (350 mPa · s, 25 ° C.) (manufactured by Shin-Nakamura Chemical Co., Ltd.) is relatively Long crosslinking agents.
 さらに、得られる硬化膜の耐アルカリ性をも向上させることを考慮すると、NKエステルA-GLY-20E(新中村化学工業(株)製)、および同ATM-35E(新中村化学工業(株)製)の少なくとも一方と、上記イソシアヌル酸骨格を有する多官能(メタ)アクリル化合物と組み合わせて用いることが好適である。 Furthermore, in consideration of improving the alkali resistance of the cured film obtained, NK ester A-GLY-20E (made by Shin-Nakamura Chemical Co., Ltd.) and ATM-35E (made by Shin-Nakamura Chemical Co., Ltd.) ) And a polyfunctional (meth) acrylic compound having the above isocyanuric acid skeleton.
 架橋剤の総使用量は、トリアジン環含有重合体100質量部に対して、1~100質量部が好ましいが、溶剤耐性を考慮すると、その下限は、好ましくは2質量部、より好ましくは5質量部であり、さらには、屈折率をコントロールすることを考慮すると、その上限は好ましくは20質量部、より好ましくは15質量部である。
 2種以上の架橋剤の使用比率は特に限定されるものではないが、上述な好適な組み合わせである多官能(メタ)アクリル化合物と多官能エポキシ化合物とを併用する場合、多官能(メタ)アクリル化合物と多官能エポキシ化合物との含有量が、質量比で1:10~10:1程度とすることができ、好ましくは1:1~5:1であり、より好ましくは1:1~3:1である。
The total amount of the crosslinking agent used is preferably 1 to 100 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer, but considering the solvent resistance, the lower limit is preferably 2 parts by mass, more preferably 5 parts by mass. In view of controlling the refractive index, the upper limit is preferably 20 parts by mass, more preferably 15 parts by mass.
The use ratio of two or more kinds of crosslinking agents is not particularly limited, but when a polyfunctional (meth) acrylic compound and a polyfunctional epoxy compound, which are the preferred combinations described above, are used in combination, the polyfunctional (meth) acrylic is used. The content of the compound and the polyfunctional epoxy compound can be about 1:10 to 10: 1 by mass ratio, preferably 1: 1 to 5: 1, more preferably 1: 1 to 3: 1.
 本発明の組成物には、それぞれの架橋剤に応じた開始剤を配合することもできる。なお、上述のとおり、架橋剤として多官能エポキシ化合物および多官能(メタ)アクリル化合物を用いる場合、開始剤を使用せずとも光硬化が進行して硬化膜を与えるものであるが、その場合に開始剤を使用しても差し支えない。 In the composition of the present invention, an initiator corresponding to each crosslinking agent can be blended. As described above, when a polyfunctional epoxy compound and a polyfunctional (meth) acrylic compound are used as the crosslinking agent, photocuring proceeds without using an initiator to give a cured film. An initiator can be used.
 多官能エポキシ化合物を架橋剤として用いる場合には、光酸発生剤や光塩基発生剤を用いることができる。
 光酸発生剤としては、公知のものから適宜選択して用いればよく、例えば、ジアゾニウム塩、スルホニウム塩やヨードニウム塩などのオニウム塩誘導体を用いることができる。
 その具体例としては、フェニルジアゾニウムヘキサフルオロホスフェート、4-メトキシフェニルジアゾニウムヘキサフルオロアンチモネート、4-メチルフェニルジアゾニウムヘキサフルオロホスフェート等のアリールジアゾニウム塩;ジフェニルヨードニウムヘキサフルオロアンチモネート、ジ(4-メチルフェニル)ヨードニウムヘキサフルオロホスフェート、ジ(4-tert-ブチルフェニル)ヨードニウムヘキサフルオロホスフェート等のジアリールヨードニウム塩;トリフェニルスルホニウムヘキサフルオロアンチモネート、トリス(4-メトキシフェニル)スルホニウムヘキサフルオロホスフェート、ジフェニル-4-チオフェノキシフェニルスルホニウムヘキサフルオロアンチモネート、ジフェニル-4-チオフェノキシフェニルスルホニウムヘキサフルオロホスフェート、4,4′-ビス(ジフェニルスルフォニオ)フェニルスルフィド-ビスヘキサフルオロアンチモネート、4,4′-ビス(ジフェニルスルフォニオ)フェニルスルフィド-ビスヘキサフルオロホスフェート、4,4′-ビス[ジ(β-ヒドロキシエトキシ)フェニルスルホニオ]フェニルスルフィド-ビスヘキサフルオロアンチモネート、4,4′-ビス[ジ(β-ヒドロキシエトキシ)フェニルスルホニオ]フェニルスルフィド-ビス-ヘキサフルオロホスフェート、4-[4′-(ベンゾイル)フェニルチオ]フェニル-ジ(4-フルオロフェニル)スルホニウムヘキサフルオロアンチモネート、4-[4′-(ベンゾイル)フェニルチオ]フェニル-ジ(4-フルオロフェニル)スルホニウムヘキサフルオロホスフェート等のトリアリールスルホニウム塩等が挙げられる。
When a polyfunctional epoxy compound is used as a crosslinking agent, a photoacid generator or a photobase generator can be used.
The photoacid generator may be appropriately selected from known ones. For example, onium salt derivatives such as diazonium salts, sulfonium salts, and iodonium salts can be used.
Specific examples thereof include aryldiazonium salts such as phenyldiazonium hexafluorophosphate, 4-methoxyphenyldiazonium hexafluoroantimonate, 4-methylphenyldiazonium hexafluorophosphate; diphenyliodonium hexafluoroantimonate, di (4-methylphenyl) Diaryliodonium salts such as iodonium hexafluorophosphate and di (4-tert-butylphenyl) iodonium hexafluorophosphate; triphenylsulfonium hexafluoroantimonate, tris (4-methoxyphenyl) sulfonium hexafluorophosphate, diphenyl-4-thiophenoxy Phenylsulfonium hexafluoroantimonate, diphenyl-4-thiophenoxy Enylsulfonium hexafluorophosphate, 4,4′-bis (diphenylsulfonio) phenyl sulfide-bishexafluoroantimonate, 4,4′-bis (diphenylsulfonio) phenyl sulfide-bishexafluorophosphate, 4,4 '-Bis [di (β-hydroxyethoxy) phenylsulfonio] phenylsulfide-bishexafluoroantimonate, 4,4'-bis [di (β-hydroxyethoxy) phenylsulfonio] phenylsulfide-bis-hexafluorophosphate 4- [4 '-(benzoyl) phenylthio] phenyl-di (4-fluorophenyl) sulfonium hexafluoroantimonate, 4- [4'-(benzoyl) phenylthio] phenyl-di (4-fluorophenyl) sulfur Triarylsulfonium salts such as triphenylsulfonium hexafluorophosphate and the like.
 これらのオニウム塩は市販品を用いてもよく、その具体例としては、サンエイドSI-60、SI-80、SI-100、SI-60L、SI-80L、SI-100L、SI-L145、SI-L150、SI-L160、SI-L110、SI-L147(以上、三新化学工業(株)製)、UVI-6950、UVI-6970、UVI-6974、UVI-6990、UVI-6992(以上、ユニオンカーバイド社製)、CPI-100P、CPI-100A、CPI-200K、CPI-200S(以上、サンアプロ(株)製)、アデカオプトマーSP-150、SP-151、SP-170、SP-171(以上、旭電化工業(株)製)、イルガキュア 261(BASF社製)、CI-2481、CI-2624、CI-2639、CI-2064(以上、日本曹達(株)製)、CD-1010、CD-1011、CD-1012(以上、サートマー社製)、DS-100、DS-101、DAM-101、DAM-102、DAM-105、DAM-201、DSM-301、NAI-100、NAI-101、NAI-105、NAI-106、SI-100、SI-101、SI-105、SI-106、PI-105、NDI-105、BENZOIN TOSYLATE、MBZ-101、MBZ-301、PYR-100、PYR-200、DNB-101、NB-101、NB-201、BBI-101、BBI-102、BBI-103、BBI-109(以上、ミドリ化学(株)製)、PCI-061T、PCI-062T、PCI-020T、PCI-022T(以上、日本化薬(株)製)、IBPF、IBCF(三和ケミカル(株)製)等を挙げることができる。 As these onium salts, commercially available products may be used. Specific examples thereof include Sun-Aid SI-60, SI-80, SI-100, SI-60L, SI-80L, SI-100L, SI-L145, SI- L150, SI-L160, SI-L110, SI-L147 (Sanshin Chemical Industry Co., Ltd.), UVI-6950, UVI-6970, UVI-6974, UVI-6990, UVI-6990 (above, Union Carbide) Co., Ltd.), CPI-100P, CPI-100A, CPI-200K, CPI-200S (above, manufactured by San Apro Co., Ltd.), Adekaoptomer SP-150, SP-151, SP-170, SP-171 (above, Asahi Denka Kogyo Co., Ltd.), Irgacure 261 (BASF), CI-2481, CI-2624, CI-2 39, CI-2064 (above, manufactured by Nippon Soda Co., Ltd.), CD-1010, CD-1011, CD-1012 (above, made by Sartomer), DS-100, DS-101, DAM-101, DAM-102 , DAM-105, DAM-201, DSM-301, NAI-100, NAI-101, NAI-105, NAI-106, SI-100, SI-101, SI-105, SI-106, PI-105, NDI -105, BENZOIN TOSYLATE, MBZ-101, MBZ-301, PYR-100, PYR-200, DNB-101, NB-101, NB-201, BBI-101, BBI-102, BBI-103, BBI-109 ( (Midori Chemical Co., Ltd.), PCI-061T, PCI-062T, PCI-020T PCI-022T (manufactured by Nippon Kayaku Co., Ltd.), can be mentioned IBPF, IBCF (manufactured by Sanwa Chemical Co., Ltd.), and the like.
 一方、光塩基発生剤としても、公知のものから適宜選択して用いればよく、例えば、Co-アミン錯体系、オキシムカルボン酸エステル系、カルバミン酸エステル系、四級アンモニウム塩系光塩基発生剤などを用いることができる。
 その具体例としては、2-ニトロベンジルシクロヘキシルカルバメート、トリフェニルメタノール、O-カルバモイルヒドロキシルアミド、O-カルバモイルオキシム、[[(2,6-ジニトロベンジル)オキシ]カルボニル]シクロヘキシルアミン、ビス[[(2-ニトロベンジル)オキシ]カルボニル]ヘキサン1,6-ジアミン、4-(メチルチオベンゾイル)-1-メチル-1-モルホリノエタン、(4-モルホリノベンゾイル)-1-ベンジル-1-ジメチルアミノプロパン、N-(2-ニトロベンジルオキシカルボニル)ピロリジン、ヘキサアンミンコバルト(III)トリス(トリフェニルメチルボレート)、2-ベンジル-2-ジメチルアミノ-1-(4-モルホリノフェニル)-ブタノン、2,6-ジメチル-3,5-ジアセチル-4-(2’-ニトロフェニル)-1,4-ジヒドロピリジン、2,6-ジメチル-3,5-ジアセチル-4-(2’,4’-ジニトロフェニル)-1,4-ジヒドロピリジン等が挙げられる。
 また、光塩基発生剤は市販品を用いてもよく、その具体例としては、TPS-OH、NBC-101、ANC-101(いずれも製品名、みどり化学(株)製)等が挙げられる。
On the other hand, the photobase generator may be appropriately selected from known ones, such as Co-amine complex, oxime carboxylic acid ester, carbamic acid ester, quaternary ammonium salt photobase generator. Can be used.
Specific examples thereof include 2-nitrobenzylcyclohexylcarbamate, triphenylmethanol, O-carbamoylhydroxylamide, O-carbamoyloxime, [[(2,6-dinitrobenzyl) oxy] carbonyl] cyclohexylamine, bis [[(2 -Nitrobenzyl) oxy] carbonyl] hexane 1,6-diamine, 4- (methylthiobenzoyl) -1-methyl-1-morpholinoethane, (4-morpholinobenzoyl) -1-benzyl-1-dimethylaminopropane, N- (2-nitrobenzyloxycarbonyl) pyrrolidine, hexaamminecobalt (III) tris (triphenylmethylborate), 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone, 2,6-dimethyl- 3,5-di Cetyl-4- (2′-nitrophenyl) -1,4-dihydropyridine, 2,6-dimethyl-3,5-diacetyl-4- (2 ′, 4′-dinitrophenyl) -1,4-dihydropyridine and the like Can be mentioned.
Commercially available photobase generators may be used, and specific examples thereof include TPS-OH, NBC-101, ANC-101 (all of which are product names, manufactured by Midori Chemical Co., Ltd.).
 光酸または塩基発生剤を用いる場合、多官能エポキシ化合物100質量部に対して、0.1~15質量部の範囲で使用することが好ましく、より好ましくは1~10質量部の範囲である。
 なお、必要に応じてエポキシ樹脂硬化剤を、多官能エポキシ化合物100質量部に対して、1~100質量部の量で配合してもよい。
When a photoacid or base generator is used, it is preferably used in the range of 0.1 to 15 parts by mass, more preferably in the range of 1 to 10 parts by mass with respect to 100 parts by mass of the polyfunctional epoxy compound.
If necessary, an epoxy resin curing agent may be blended in an amount of 1 to 100 parts by mass with respect to 100 parts by mass of the polyfunctional epoxy compound.
 一方、多官能(メタ)アクリル化合物を用いる場合には、光ラジカル重合開始剤を用いることができる。
 光ラジカル重合開始剤としても、公知のものから適宜選択して用いればよく、例えば、アセトフェノン類、ベンゾフェノン類、ミヒラーのベンゾイルベンゾエート、アミロキシムエステル、オキシムエステル類、テトラメチルチウラムモノサルファイドおよびチオキサントン類等が挙げられる。
 特に、光開裂型の光ラジカル重合開始剤が好ましい。光開裂型の光ラジカル重合開始剤については、最新UV硬化技術(159頁、発行人:高薄一弘、発行所:(株)技術情報協会、1991年発行)に記載されている。
 市販の光ラジカル重合開始剤としては、例えば、BASF社製 商品名:イルガキュア 127、184、369、379、379EG、651、500、754、819、903、907、784、2959、CGI1700、CGI1750、CGI1850、CG24-61、OXE01、OXE02、ダロキュア 1116、1173、MBF、BASF社製 商品名:ルシリン TPO、UCB社製 商品名:ユベクリル P36、フラテツリ・ランベルティ社製 商品名:エザキュアー KIP150、KIP65LT、KIP100F、KT37、KT55、KTO46、KIP75/B等が挙げられる。
 光ラジカル重合開始剤を用いる場合、多官能(メタ)アクリレート化合物100質量部に対して、0.1~200質量部の範囲で使用することが好ましく、1~150質量部の範囲で使用することがより好ましい。
On the other hand, when a polyfunctional (meth) acrylic compound is used, a radical photopolymerization initiator can be used.
The radical photopolymerization initiator may be appropriately selected from known ones, such as acetophenones, benzophenones, Michler's benzoylbenzoate, amyloxime esters, oxime esters, tetramethylthiuram monosulfide, and thioxanthones. Is mentioned.
In particular, photocleavable photoradical polymerization initiators are preferred. The photocleavable photoradical polymerization initiator is described in the latest UV curing technology (p. 159, publisher: Kazuhiro Takahisa, publisher: Technical Information Association, Inc., published in 1991).
Examples of commercially available radical photopolymerization initiators include BASF Corporation trade names: Irgacure 127, 184, 369, 379, 379EG, 651, 500, 754, 819, 903, 907, 784, 2959, CGI 1700, CGI 1750, CGI 1850. , CG24-61, OXE01, OXE02, Darocur 1116, 1173, MBF, manufactured by BASF, Inc. Product name: Lucirin TPO, manufactured by UCB, Inc. Product name: Uvekril P36, manufactured by Fratteri Lamberti, Inc. KT37, KT55, KTO46, KIP75 / B etc. are mentioned.
When using a radical photopolymerization initiator, it is preferably used in the range of 0.1 to 200 parts by weight, preferably in the range of 1 to 150 parts by weight, with respect to 100 parts by weight of the polyfunctional (meth) acrylate compound. Is more preferable.
 本発明の組成物には、各種溶媒を添加し、トリアジン環含有重合体を溶解させて使用することが好ましい。
 溶媒としては、例えば、水、トルエン、p-キシレン、o-キシレン、m-キシレン、エチルベンゼン、スチレン、エチレングリコールジメチルエーテル、プロピレングリコールモノメチルエーテル、エチレングリコールモノメチルエーテル、プロピレングリコール、プロピレングリコールモノエチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノイソプロピルエーテル、エチレングリコールメチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、エチレングリコールエチルエーテルアセテート、ジエチレングリコールジメチルエーテル、プロピレングリコールモノブチルエーテル、エチレングリコ-ルモノブチルエーテル、ジエチレングリコールジエチルエーテル、ジプロピレングリコールモノメチルエーテル、ジエチレングリコールモノメチルエーテル、ジプロピレングリコールモノエチルエーテル、ジエチレングリコールモノエチルエーテル、トリエチレングリコールジメチルエーテル、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコール、1-オクタノール、エチレングリコール、ヘキシレングリコール、トリメチレングリコール、1-メトキシ-2-ブタノール、シクロヘキサノール、ジアセトンアルコール、フルフリルアルコール、テトラヒドロフルフリルアルコール、プロピレングリコール、ベンジルアルコール、1,3-ブタンジオール、1,4-ブタンジオール、2,3-ブタンジオール、γ-ブチロラクトン、アセトン、メチルエチルケトン、メチルイソプロピルケトン、ジエチルケトン、メチルイソブチルケトン、メチルノーマルブチルケトン、シクロペンタノン、シクロヘキサノン、酢酸エチル、酢酸イソプロピル、酢酸ノーマルプロピル、酢酸イソブチル、酢酸ノーマルブチル、乳酸エチル、メタノール、エタノール、イソプロパノール、tert-ブタノール、アリルアルコール、ノーマルプロパノール、2-メチル-2-ブタノール、イソブタノール、ノーマルブタノール、2-メチル-1-ブタノール、1-ペンタノール、2-メチル-1-ペンタノール、2-エチルヘキサノール、1-メトキシ-2-プロパノール、テトラヒドロフラン、1,4-ジオキサン、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド(DMAc)、N-メチルピロリドン、1,3-ジメチル-2-イミダゾリジノン、ジメチルスルホキシド、N-シクロヘキシル-2-ピロリジノン等が挙げられ、これらは単独で用いても、2種以上混合して用いてもよい。
It is preferable that various solvents are added to the composition of the present invention to dissolve the triazine ring-containing polymer.
Examples of the solvent include water, toluene, p-xylene, o-xylene, m-xylene, ethylbenzene, styrene, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, ethylene glycol monomethyl ether, propylene glycol, propylene glycol monoethyl ether, ethylene Glycol monoethyl ether, ethylene glycol monoisopropyl ether, ethylene glycol methyl ether acetate, propylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, diethylene glycol dimethyl ether, propylene glycol monobutyl ether, ethylene glycol monobutyl ether, diethylene glycol diethyl ether, dipropylene Recall monomethyl ether, diethylene glycol monomethyl ether, dipropylene glycol monoethyl ether, diethylene glycol monoethyl ether, triethylene glycol dimethyl ether, diethylene glycol monoethyl ether acetate, diethylene glycol, 1-octanol, ethylene glycol, hexylene glycol, trimethylene glycol, 1- Methoxy-2-butanol, cyclohexanol, diacetone alcohol, furfuryl alcohol, tetrahydrofurfuryl alcohol, propylene glycol, benzyl alcohol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, γ -Butyrolactone, acetone, methyl ethyl ketone, methyl isopropyl ketone, di Ethyl ketone, methyl isobutyl ketone, methyl normal butyl ketone, cyclopentanone, cyclohexanone, ethyl acetate, isopropyl acetate, normal propyl acetate, isobutyl acetate, normal butyl acetate, ethyl lactate, methanol, ethanol, isopropanol, tert-butanol, allyl alcohol, Normal propanol, 2-methyl-2-butanol, isobutanol, normal butanol, 2-methyl-1-butanol, 1-pentanol, 2-methyl-1-pentanol, 2-ethylhexanol, 1-methoxy-2- Propanol, tetrahydrofuran, 1,4-dioxane, N, N-dimethylformamide, N, N-dimethylacetamide (DMAc), N-methylpyrrolidone, 1,3-dimethyl-2-imidazo Jin Won, dimethyl sulfoxide, N- cyclohexyl-2-pyrrolidinone and the like. These may be used singly or may be used in combination of two or more.
 この際、組成物中の固形分濃度は、保存安定性に影響を与えない範囲であれば特に限定されず、目的とする膜の厚みに応じて適宜設定すればよい。具体的には、溶解性および保存安定性の観点から、固形分濃度0.1~50質量%が好ましく、より好ましくは0.1~40質量%である。 At this time, the solid content concentration in the composition is not particularly limited as long as it does not affect the storage stability, and may be appropriately set according to the target film thickness. Specifically, from the viewpoint of solubility and storage stability, the solid content concentration is preferably 0.1 to 50% by mass, and more preferably 0.1 to 40% by mass.
 本発明の組成物には、本発明の効果を損なわない限りにおいて、トリアジン環含有重合体、架橋剤および溶媒以外のその他の成分、例えば、レベリング剤、界面活性剤、シランカップリング剤などの添加剤が含まれていてもよい。
 界面活性剤としては、例えば、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンセチルエーテル、ポリオキシエチレンオレイルエーテル等のポリオキシエチレンアルキルエーテル類;ポリオキシエチレンオクチルフェノールエーテル、ポリオキシエチレンノニルフェノールエーテル等のポリオキシエチレンアルキルアリルエーテル類;ポリオキシエチレン・ポリオキシプロピレンブロックコポリマー類;ソルビタンモノラウレート、ソルビタンモノパルミテート、ソルビタンモノステアレート、ソルビタンモノオレエート、ソルビタントリオレエート、ソルビタントリステアレート等のソルビタン脂肪酸エステル類;ポリオキシエチレンソルビタンモノラウレート、ポリオキシエチレンソルビタンモノパルミテート、ポリオキシエチレンソルビタンモノステアレート、ポリオキシエチレンソルビタントリオレエート、ポリオキシエチレンソルビタントリステアレート等のポリオキシエチレンソルビタン脂肪酸エステル類等のノニオン系界面活性剤、商品名エフトップEF301、EF303、EF352(三菱マテリアル電子化成(株)製(旧(株)ジェムコ製))、商品名メガファックF171、F173、R-08、R-30、R-40、F-553、F-554、RS-75、RS-72-K(DIC(株)製)、フロラードFC430、FC431(住友スリーエム(株)製)、商品名アサヒガードAG710,サーフロンS-382、SC101、SC102、SC103、SC104、SC105、SC106(旭硝子(株)製)等のフッ素系界面活性剤、オルガノシロキサンポリマーKP341(信越化学工業(株)製)、BYK-302、BYK-307、BYK-322、BYK-323、BYK-330、BYK-333、BYK-370、BYK-375、BYK-378(ビックケミー・ジャパン(株)製)等が挙げられる。
As long as the effects of the present invention are not impaired, other components other than the triazine ring-containing polymer, the crosslinking agent and the solvent, for example, a leveling agent, a surfactant, a silane coupling agent and the like are added to the composition of the present invention. An agent may be included.
Examples of the surfactant include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, polyoxyethylene oleyl ether; polyoxyethylene octylphenol ether, polyoxyethylene nonylphenol Polyoxyethylene alkyl allyl ethers such as ethers; polyoxyethylene / polyoxypropylene block copolymers; sorbitan monolaurate, sorbitan monopalmitate, sorbitan monostearate, sorbitan monooleate, sorbitan trioleate, sorbitan tristearate Sorbitan fatty acid esters such as polyoxyethylene sorbitan monolaurate, polyoxyethyleneso Nonionic surfactants such as polyoxyethylene sorbitan fatty acid esters such as bitane monopalmitate, polyoxyethylene sorbitan monostearate, polyoxyethylene sorbitan trioleate, polyoxyethylene sorbitan tristearate, trade name EFTOP EF301, EF303, EF352 (Mitsubishi Materials Electronics Kasei Co., Ltd. (formerly Gemco Co., Ltd.)), trade names MegaFuck F171, F173, R-08, R-30, R-40, F-553, F-554, RS-75, RS-72-K (manufactured by DIC Corporation), Florard FC430, FC431 (manufactured by Sumitomo 3M Corporation), trade names Asahi Guard AG710, Surflon S-382, SC101, SC102, SC103, SC104, SC105 , SC106 (Asahi (Manufactured by Shin-Etsu Chemical Co., Ltd.), BYK-302, BYK-307, BYK-322, BYK-323, BYK-330, BYK- 333, BYK-370, BYK-375, BYK-378 (manufactured by Big Chemie Japan Co., Ltd.) and the like.
 これらの界面活性剤は、単独で使用しても、2種以上組み合わせて使用してもよい。界面活性剤の使用量は、トリアジン環含有重合体100質量部に対して0.0001~5質量部が好ましく、0.001~1質量部がより好ましく、0.01~0.5質量部がより一層好ましい。
 なお、上記その他の成分は、本発明の組成物を調製する際の任意の工程で添加することができる。
These surfactants may be used alone or in combination of two or more. The amount of the surfactant used is preferably 0.0001 to 5 parts by mass, more preferably 0.001 to 1 part by mass, and 0.01 to 0.5 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer. Even more preferred.
In addition, the said other component can be added at the arbitrary processes at the time of preparing the composition of this invention.
 本発明の組成物は、基材に塗布し、その後、必要に応じて加熱して溶剤を蒸発させた後、加熱または光照射して所望の硬化膜とすることができる。
 組成物の塗布方法は任意であり、例えば、スピンコート法、ディップ法、フローコート法、インクジェット法、ジェットディスペンサー法、スプレー法、バーコート法、グラビアコート法、スリットコート法、ロールコート法、転写印刷法、刷毛塗り、ブレードコート法、エアーナイフコート法等の方法を採用できる。
The composition of the present invention can be applied to a substrate, then heated as necessary to evaporate the solvent, and then heated or irradiated with light to form a desired cured film.
The coating method of the composition is arbitrary, for example, spin coating method, dip method, flow coating method, ink jet method, jet dispenser method, spray method, bar coating method, gravure coating method, slit coating method, roll coating method, transfer Methods such as printing, brush coating, blade coating, and air knife coating can be employed.
 また、基材としては、シリコン、インジウム錫酸化物(ITO)が成膜されたガラス、インジウム亜鉛酸化物(IZO)が成膜されたガラス、ポリエチレンテレフタレート(PET)、プラスチック、ガラス、石英、セラミックス等からなる基材等が挙げられ、可撓性を有するフレキシブル基材を用いることもできる。
 焼成温度は、溶媒を蒸発させる目的では特に限定されず、例えば40~400℃で行うことができるが、本発明の組成物では150℃未満、特に60~130℃の低温焼成にて薄膜を形成することができる。
 焼成方法としては、特に限定されるものではなく、例えば、ホットプレートやオーブンを用いて、大気、窒素等の不活性ガス、真空中等の適切な雰囲気下で蒸発させればよい。
 焼成温度および焼成時間は、目的とする電子デバイスのプロセス工程に適合した条件を選択すればよく、得られる膜の物性値が電子デバイスの要求特性に適合するような焼成条件を選択すればよい。
 光照射する場合の条件も特に限定されるものではなく、用いるトリアジン環含有重合体および架橋剤に応じて、適宜な照射エネルギーおよび時間を採用すればよい。
 また、上記組成物を光照射にて硬化膜を作製するにあたって、マスクを介して光照射した後、現像液にて現像することで微細パターンを形成することもできる。
 この場合、露光後の現像は、例えば有機溶媒現像液または水性現像液中に露光樹脂を浸漬して行うことができる。
 有機溶媒現像液の具体例としては、NMP、γ-ブチロラクトン、DMSO等が挙げられ、一方、水性現像液の具体例としては、炭酸ナトリウム、炭酸カリウム、水酸化ナトリウム,水酸化カリウム,テトラメチルアンモニウムヒドロキシド等のアルカリ水溶液が挙げられる。
As the base material, silicon, glass with indium tin oxide (ITO) formed, glass with indium zinc oxide (IZO) formed, polyethylene terephthalate (PET), plastic, glass, quartz, ceramics A flexible substrate having flexibility can be used.
The firing temperature is not particularly limited for the purpose of evaporating the solvent. For example, it can be carried out at 40 to 400 ° C. However, the composition of the present invention forms a thin film by low-temperature firing at less than 150 ° C., particularly 60 to 130 ° C. can do.
The baking method is not particularly limited, and for example, it may be evaporated using a hot plate or an oven in an appropriate atmosphere such as air, an inert gas such as nitrogen, or in a vacuum.
The firing temperature and firing time may be selected in accordance with the process steps of the target electronic device, and the firing conditions may be selected so that the physical properties of the obtained film meet the required characteristics of the electronic device.
The conditions for the light irradiation are not particularly limited, and an appropriate irradiation energy and time may be adopted depending on the triazine ring-containing polymer and the crosslinking agent to be used.
Moreover, when producing the cured film by light irradiation of the composition, a fine pattern can be formed by light irradiation through a mask and development with a developer.
In this case, development after exposure can be performed by immersing the exposure resin in, for example, an organic solvent developer or an aqueous developer.
Specific examples of the organic solvent developer include NMP, γ-butyrolactone, DMSO and the like, while specific examples of the aqueous developer include sodium carbonate, potassium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium. An aqueous alkali solution such as hydroxide can be used.
 ネガ型のパターン形成用組成物とする場合、上記組成物に、さらにオキシラン環含有化合物と、光硬化型触媒とを配合してもよい。
 オキシラン環含有化合物としては、分子内にオキシラン環を1個以上、好ましくは2個以上有するものが挙げられ、その具体例としては、グリシジルエーテル型エポキシ樹脂、グリシジルエステル型エポキシ樹脂、脂環式エポキシ樹脂、エポキシ変性ポリブタジエン樹脂、オキセタン化合物等が挙げられる。これらは単独で用いても、2種以上組み合わせて用いてもよい。
 オキシラン含有化合物の配合量は、特に限定されるものではないが、トリアジン環含有重合体100質量部に対し、10~400質量部程度とすることができる。
When setting it as a negative pattern formation composition, you may mix | blend an oxirane ring containing compound and a photocurable catalyst with the said composition further.
Examples of the oxirane ring-containing compound include those having one or more, preferably two or more oxirane rings in the molecule. Specific examples thereof include glycidyl ether type epoxy resins, glycidyl ester type epoxy resins, and alicyclic epoxies. Resins, epoxy-modified polybutadiene resins, oxetane compounds and the like. These may be used alone or in combination of two or more.
The amount of the oxirane-containing compound is not particularly limited, but can be about 10 to 400 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer.
 光硬化型触媒としては、光カチオン発生剤が挙げられる。光カチオン発生剤の具体例としては、トリフェニルスルホニウムヘキサフルオロホスフェート、トリフェニルスルホニウムヘキサフルオロアンチモネート等のトリアリールスルホニウム塩;トリアリールセレニウム塩;ジフェニルヨードニウムヘキサフルオロホスフェート、ジフェニルヨードニウムヘキサフルオロアンチモネート等のジアリールヨードニウム塩などが挙げられる。これらは単独で用いても、2種以上組み合わせて用いてもよい。
 光硬化型触媒の配合量は、特に限定されるものではないが、トリアジン環含有重合体100質量部に対し、0.1~100質量部程度とすることができる。
Examples of the photocurable catalyst include a photocation generator. Specific examples of the photocation generator include triarylsulfonium salts such as triphenylsulfonium hexafluorophosphate and triphenylsulfonium hexafluoroantimonate; triaryl selenium salts; diphenyliodonium hexafluorophosphate, diphenyliodonium hexafluoroantimonate and the like. And diaryliodonium salts. These may be used alone or in combination of two or more.
The blending amount of the photocurable catalyst is not particularly limited, but can be about 0.1 to 100 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer.
 上記ネガ型パターン形成用組成物の調製法は特に限定されるものではなく、任意の順序で各成分を配合して調製すればよい。また、その際、上述した溶媒を用いてよい。
 上記組成物は、上述した手法によって塗布した後、例えば、紫外光等を1~4000mJ/cm2にて光照射して硬化させることができる。光照射は、高圧水銀ランプ、メタルハライドランプ、キセノンランプ、LED、レーザー光等の公知の各種手法を用いて行えばよい。
 なお、必要に応じ、露光前後に80~180℃程度、耐熱性の低い基材等を用いる場合、好ましくは80℃以上150℃未満、より好ましくは80~130℃で加熱してもよい。
 露光後の現像は、上述した有機溶媒現像液または水性現像液中に露光樹脂を浸漬して行うことができる。
The preparation method of the said negative pattern formation composition is not specifically limited, What is necessary is just to mix | blend and prepare each component in arbitrary orders. At that time, the above-described solvent may be used.
The composition can be cured by, for example, irradiating ultraviolet light or the like at 1 to 4000 mJ / cm 2 after being applied by the method described above. Light irradiation may be performed using various known methods such as a high-pressure mercury lamp, a metal halide lamp, a xenon lamp, an LED, and laser light.
If necessary, when using a base material having a low heat resistance of about 80 to 180 ° C. before and after exposure, it may be heated preferably at 80 ° C. or more and less than 150 ° C., more preferably at 80 to 130 ° C.
Development after exposure can be performed by immersing the exposure resin in the organic solvent developer or aqueous developer described above.
 一方、ポジ型のパターン形成用組成物とする場合、上記組成物に、さらにアジド化合物を配合してもよい。
 アジド化合物としては、1,2-ナフトキノンジアジド基を1個以上、好ましくは2個以上有する化合物が好ましく、その具体例としては、2,3,4-トリヒドロキシ-ベンゾフェノンと1,2-ナフトキノン-(2)-ジアジド-5-スルホン酸とのエステル等の1,2-ナフトキノンジアジドスルホン酸誘導体などが挙げられる。
 オキシラン含有化合物の配合量は、特に限定されるものではないが、トリアジン環含有重合体100質量部に対し、4~60質量部程度とすることができる。
On the other hand, when a positive pattern forming composition is used, an azide compound may be further added to the above composition.
As the azide compound, a compound having one or more, preferably two or more 1,2-naphthoquinonediazide groups is preferable, and specific examples thereof include 2,3,4-trihydroxy-benzophenone and 1,2-naphthoquinone- (2) 1,2-naphthoquinone diazide sulfonic acid derivatives such as esters with -diazide-5-sulfonic acid.
The amount of the oxirane-containing compound is not particularly limited, but can be about 4 to 60 parts by mass with respect to 100 parts by mass of the triazine ring-containing polymer.
 上記ポジ型パターン形成用組成物の調製法も特に限定されるものではなく、任意の順序で各成分を配合して調製すればよい。また、その際、上述した溶媒を用いてもよい。
 上記組成物は、上述した手法によって塗布した後、例えば、上述の光照射法により、紫外光等を1~2000mJ/cm2にて光照射して硬化させることができる。この場合も、必要に応じ、露光前後に80~180℃程度、耐熱性の低い基材等を用いる場合、好ましくは80℃以上150℃未満、より好ましくは80~130℃で加熱してもよい。
 露光後の現像は、上述した有機溶媒現像液または水性現像液中に露光樹脂を浸漬して行うことができる。
The method for preparing the positive pattern forming composition is not particularly limited, and may be prepared by blending the components in any order. At that time, the above-described solvent may be used.
After the composition is applied by the above-described method, it can be cured by, for example, irradiation with ultraviolet light at 1 to 2000 mJ / cm 2 by the above-described light irradiation method. Also in this case, if necessary, the substrate may be heated at a temperature of about 80 to 180 ° C. before and after exposure and preferably at a temperature of 80 to 150 ° C., more preferably 80 to 130 ° C. .
Development after exposure can be performed by immersing the exposure resin in the organic solvent developer or aqueous developer described above.
 上記各パターン形成用組成物には、必要に応じて各種添加剤を加えてもよい。添加剤としては、ベンジル-4-ヒドロキシフェニルメチルスルホニウムヘキサフルオロアンチモネート、1-ナフチルメチル-4-ヒドロキシフェニルメチルスルホニウムヘキサフルオロアンチモネート、4-ヒドロキシフェニルジメチルスルホニウム メチルサルフェート等の熱カチオン発生剤;2,5-ジエチルチオキサントン、アントラセン、9,10-エトキシアントラセン等の光増感剤や、上記膜形成用組成物において例示した添加剤などが挙げられる。 Various additives may be added to the pattern forming compositions as necessary. Additives include thermal cation generators such as benzyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 1-naphthylmethyl-4-hydroxyphenylmethylsulfonium hexafluoroantimonate, 4-hydroxyphenyldimethylsulfonium methyl sulfate; 2 , 5-diethylthioxanthone, anthracene, 9,10-ethoxyanthracene and the like, and the additives exemplified in the film-forming composition.
 以上のようにして得られた本発明の硬化膜や微細パターンは、高耐熱性、高屈折率、および低体積収縮を達成できるため、液晶ディスプレイ、有機エレクトロルミネッセンス(EL)ディスプレイ、タッチパネル、光半導体(LED)素子、固体撮像素子、有機薄膜太陽電池、色素増感太陽電池、有機薄膜トランジスタ(TFT)、レンズ、プリズムカメラ、双眼鏡、顕微鏡、半導体露光装置などを作製する際の一部材など、電子デバイスや光学材料分野に好適に利用できる。 Since the cured film and fine pattern of the present invention obtained as described above can achieve high heat resistance, high refractive index, and low volume shrinkage, liquid crystal display, organic electroluminescence (EL) display, touch panel, optical semiconductor Electronic devices such as (LED) elements, solid-state imaging devices, organic thin film solar cells, dye-sensitized solar cells, organic thin film transistors (TFTs), lenses, prism cameras, binoculars, microscopes, and parts for manufacturing semiconductor exposure devices And can be suitably used in the field of optical materials.
 以下、実施例および比較例を挙げて、本発明をより具体的に説明するが、本発明は下記の実施例に限定されるものではない。なお、実施例で用いた各測定装置は以下のとおりである。
1H-NMR]
 装置:Varian NMR System 400NB(400MHz
    )JEOL-ECA700(700MHz)
 測定溶媒:DMSO-d6
 基準物質:テトラメチルシラン(TMS)(δ0.0ppm)
[GPC]
 装置:SHIMADZU社製 SCL-10Avp GPCに改造
 カラム:Shodex KF-804L+KF-805L
 カラム温度:60℃
 溶媒:NMP(1%LiCl添加)
 検出器:UV(254nm)
 検量線:標準ポリスチレン
[紫外線可視分光光度計]
 装置:(株)島津製作所製 SHIMADSU UV-3600
[エリプソメーター]
 装置:ジェー・エー・ウーラム・ジャパン製 多入射角分光エリプソメー
    ターVASE
[示差熱天秤(TG-DTA)]
 装置:(株)リガク製 TG-8120
 昇温速度:10℃/分
 測定温度:25℃-750℃
[電子顕微鏡]
日本電子(株)製 電子顕微鏡S-4800
EXAMPLES Hereinafter, although an Example and a comparative example are given and this invention is demonstrated more concretely, this invention is not limited to the following Example. In addition, each measuring apparatus used in the Example is as follows.
[ 1 H-NMR]
Apparatus: Varian NMR System 400NB (400 MHz
) JEOL-ECA700 (700MHz)
Measuring solvent: DMSO-d6
Reference substance: Tetramethylsilane (TMS) (δ0.0ppm)
[GPC]
Equipment: Modified to SHIMADZU SCL-10Avp GPC Column: Shodex KF-804L + KF-805L
Column temperature: 60 ° C
Solvent: NMP (1% LiCl added)
Detector: UV (254 nm)
Calibration curve: Standard polystyrene [UV-visible spectrophotometer]
Apparatus: SHIMADSU UV-3600 manufactured by Shimadzu Corporation
[Ellipsometer]
Equipment: Multi-angle-of-incidence spectroscopic ellipsometer VASE manufactured by JA Woollam Japan
[Differential thermal balance (TG-DTA)]
Equipment: TG-8120, manufactured by Rigaku Corporation
Temperature increase rate: 10 ° C / min Measurement temperature: 25 ° C-750 ° C
[electronic microscope]
Electron microscope S-4800 manufactured by JEOL Ltd.
[1]トリアジン環含有重合体の合成
[実施例1] 高分子化合物[4]の合成
Figure JPOXMLDOC01-appb-C000031
[1] Synthesis of triazine ring-containing polymer [Example 1] Synthesis of polymer compound [4]
Figure JPOXMLDOC01-appb-C000031
 窒素下、500mL四口フラスコに、3-アミノフェノール[2](11.00g、0.1mol、東京化成工業(株)製)を加え、N-メチル-2-ピロリドン(NMP)104.14gに溶解し、0℃以下に冷却した。その後、2,4,6-トリクロロ-1,3,5-トリアジン[1](18.34g、0.1mol、エボニック・デグサ製)を加え、1時間撹拌した後、NMP154.96gに溶かしたm-フェニレンジアミン[3](16.14g、0.15moL)を、内温を30℃以下に保つように滴下した。滴下後、90℃に加温して3時間反応させ、トリエチルアミン50.34gを加えて重合を停止した。
 生成したトリエチルアミン塩酸塩をろ過で除去し、ろ液をイオン交換水1290gに滴下し、再沈殿を行った。得られた沈殿物をろ過し、ろ物をアセトン200gに再溶解させ、さらにイオン交換水1500gに再沈殿した。沈殿物をろ過して得られた生成物を100℃で8時間乾燥し、目的の高分子化合物[4]26.6gを得た(以下、L-TmDA-100という)。
 L-TmDA-100の1H-NMRスペクトルの測定結果を図1に示す。また、L-TmDA-100のGPCによるポリスチレン換算で測定される重量平均分子量Mwは8,200、多分散度Mw/Mnは2.15であった。
Under nitrogen, 3-aminophenol [2] (11.00 g, 0.1 mol, manufactured by Tokyo Chemical Industry Co., Ltd.) was added to a 500 mL four-necked flask, and 104.14 g of N-methyl-2-pyrrolidone (NMP) was added. Dissolved and cooled to below 0 ° C. Thereafter, 2,4,6-trichloro-1,3,5-triazine [1] (18.34 g, 0.1 mol, manufactured by Evonik Degussa) was added and stirred for 1 hour, and then dissolved in 154.96 g of NMP. -Phenylenediamine [3] (16.14 g, 0.15 mol) was added dropwise so that the internal temperature was kept below 30 ° C. After dropping, the mixture was heated to 90 ° C. and reacted for 3 hours, and 50.34 g of triethylamine was added to terminate the polymerization.
The produced triethylamine hydrochloride was removed by filtration, and the filtrate was added dropwise to 1290 g of ion-exchanged water for reprecipitation. The obtained precipitate was filtered, the filtrate was redissolved in 200 g of acetone, and further reprecipitated in 1500 g of ion-exchanged water. The product obtained by filtering the precipitate was dried at 100 ° C. for 8 hours to obtain 26.6 g of the target polymer [4] (hereinafter referred to as L-TmDA-100).
The measurement result of 1 H-NMR spectrum of L-TmDA-100 is shown in FIG. Moreover, the weight average molecular weight Mw measured by GPC of L-TmDA-100 in terms of polystyrene was 8,200, and the polydispersity Mw / Mn was 2.15.
 上記実施例1で得られた高分子化合物[4]5.200mgを白金パンに加え、TG-DTAにより昇温速度15℃/minで測定を行ったところ、5%重量減少は392℃であった。その結果を図2に示す。 When 5.200 mg of the polymer compound [4] obtained in Example 1 above was added to a platinum pan and measured with TG-DTA at a heating rate of 15 ° C./min, the 5% weight loss was 392 ° C. It was. The result is shown in FIG.
[2]組成物の調製
[実施例2]
 窒素下、200mLナスフラスコに、実施例1で得られたL-TmDA-100 12.00gを加え、溶媒としてプロピレングリコールモノメチルエーテル(PGME)18.00gを加えて40質量%のポリマー溶液(以下、L-TmDA-100-Mという)を調製した。
 得られたL-TmDA-100-MをPGMEにて10質量%に希釈し、屈折率を測定したところ1.7494(@550nm)であった。
[2] Preparation of composition [Example 2]
Under nitrogen, 12.00 g of L-TmDA-100 obtained in Example 1 was added to a 200 mL eggplant flask, and 18.00 g of propylene glycol monomethyl ether (PGME) was added as a solvent. L-TmDA-100-M) was prepared.
The obtained L-TmDA-100-M was diluted to 10% by mass with PGME, and the refractive index was measured to be 1.7494 (@ 550 nm).
[3]微細パターンの作製
[実施例3]
 実施例2で調製したL-TmDA-100-M18.95g、多官能アクリレート(AT-20E、新中村化学工業(株)製)0.74g、多官能エポキシ(エポリードGT-401、ダイセル化学工業(株)製)0.37g、光ラジカル開始剤(イルガキュアOXE02、BASF社製)0.52g、光酸発生剤(CPI-210S、サンアプロ(株)製)0.45g、PGME24.0gを加えて固形分20質量%の組成物(LP-W)45gを調製した。
 この組成物を0.45μmのフィルターを用いて濾過した後、ガラス基板上にスピンコーターを用いて塗布した。100℃、30秒ホットプレート上で焼成(ソフトベーク)して塗膜を形成した。この塗膜に紫外線照射装置MA6(SUSS社製)により、365nmにおける照射量が、200mJ/cm2の紫外線を照射した。その後、100℃、25分ホットプレート上でポストベークを行い、23℃のNMD-3現像液(東京応化工業(株)製)で一定時間浸漬して現像し、さらに超純水で流水洗浄を行った。現像後、10/10μm、7/7μm、5/5μmのライン/スペースが、残渣なく解像した。
 ナトリウムランプの下で目視観察を行ったところ、ガラス基板上に形成された硬化膜上に異物は見られなかった。さらに、電子顕微鏡観察を行ったところ、硬化膜上に異物は見られなかった。
[3] Fabrication of fine pattern [Example 3]
L-TmDA-100-M 18.95 g prepared in Example 2, polyfunctional acrylate (AT-20E, manufactured by Shin-Nakamura Chemical Co., Ltd.) 0.74 g, polyfunctional epoxy (Epolide GT-401, Daicel Chemical Industries ( Co., Ltd.) 0.37 g, photo radical initiator (Irgacure OXE02, manufactured by BASF) 0.52 g, photoacid generator (CPI-210S, manufactured by San Apro Co., Ltd.) 0.45 g, and PGME 24.0 g were added to form a solid. 45 g of a composition (LP-W) having a content of 20% by mass was prepared.
The composition was filtered using a 0.45 μm filter and then applied onto a glass substrate using a spin coater. A coating film was formed by baking (soft baking) on a hot plate at 100 ° C. for 30 seconds. This coating film was irradiated with ultraviolet rays having an irradiation amount of 365 m at 200 mJ / cm 2 by an ultraviolet irradiation device MA6 (manufactured by SUSS). Then, post-bake on a hot plate at 100 ° C. for 25 minutes, develop by immersing in a NMD-3 developer (manufactured by Tokyo Ohka Kogyo Co., Ltd.) at 23 ° C. for a certain period of time, and rinse with running pure water. went. After development, lines / spaces of 10/10 μm, 7/7 μm, and 5/5 μm were resolved without residue.
As a result of visual observation under a sodium lamp, no foreign matter was found on the cured film formed on the glass substrate. Furthermore, when observed with an electron microscope, no foreign matter was found on the cured film.
[4]硬化膜の作製
[実施例4]
 実施例2で調製したL-TmDA-100-M18.95g、多官能アクリレート(AT-20E、新中村化学工業(株)製)0.74g、多官能エポキシ(エポリードGT-401、ダイセル化学工業(株)製)0.37g、光ラジカル開始剤(イルガキュアOXE02、BASF社製)0.52g、光酸発生剤(CPI-210S、サンアプロ(株)製)0.45g、PGME24.0gを加えて固形分20質量%の組成物(LP-W)45gを調製した。
 この組成物を0.45μmのフィルターを用いて濾過した後、シリコンウエハ基板上にスピンコーターを用いて塗布した。100℃、30秒ホットプレート上で焼成(ソフトベーク)して塗膜を形成した。この塗膜に紫外線照射装置MA6(SUSS社製)により、365nmにおける照射量が、200mJ/cm2の紫外線を照射した。その後、100℃、25分ホットプレート上でポストベークを行い、硬化膜を作製した。
 得られた硬化膜について、エリプソメーターにて550nmにおける屈折率を測定したところ、屈折率1.711(@550nm)であった。また、得られた硬化膜について、400nmの透過率を測定したところ、透過率75%であった。
[4] Production of cured film [Example 4]
L-TmDA-100-M 18.95 g prepared in Example 2, polyfunctional acrylate (AT-20E, manufactured by Shin-Nakamura Chemical Co., Ltd.) 0.74 g, polyfunctional epoxy (Epolide GT-401, Daicel Chemical Industries ( Co., Ltd.) 0.37 g, photo radical initiator (Irgacure OXE02, manufactured by BASF) 0.52 g, photoacid generator (CPI-210S, manufactured by San Apro Co., Ltd.) 0.45 g, and PGME 24.0 g were added to form a solid. 45 g of a composition (LP-W) having a content of 20% by mass was prepared.
This composition was filtered using a 0.45 μm filter and then applied onto a silicon wafer substrate using a spin coater. A coating film was formed by baking (soft baking) on a hot plate at 100 ° C. for 30 seconds. This coating film was irradiated with ultraviolet rays having an irradiation amount of 365 m at 200 mJ / cm 2 by an ultraviolet irradiation device MA6 (manufactured by SUSS). Thereafter, post-baking was performed on a hot plate at 100 ° C. for 25 minutes to produce a cured film.
About the obtained cured film, when the refractive index in 550 nm was measured with the ellipsometer, it was refractive index 1.711 (@ 550 nm). Moreover, when the transmittance | permeability of 400 nm was measured about the obtained cured film, the transmittance | permeability was 75%.

Claims (14)

  1.  下記式(1)で表される繰り返し単位構造を含む重合体と、少なくとも2種類の架橋剤とを含むことを特徴とするトリアジン系重合体含有組成物。
    Figure JPOXMLDOC01-appb-C000001
    {式中、RおよびR′は、互いに独立して、水素原子、アルキル基、アルコキシ基、アリール基、またはアラルキル基を表し、Ar1は、水酸基、カルボキシル基および/またはマレイミド基を有するアリール基を表し、Ar2は、式(2)~(13)で示される群から選ばれる少なくとも1種を表す。
    Figure JPOXMLDOC01-appb-C000002
    〔式中、R1~R92は、互いに独立して、水素原子、ハロゲン原子、カルボキシル基、スルホ基、炭素数1~10の分岐構造を有していてもよいアルキル基、または炭素数1~10の分岐構造を有していてもよいアルコキシ基を表し、R93およびR94は、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基を表し、W1およびW2は、互いに独立して、単結合、CR9596(R95およびR96は、互いに独立して、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基(ただし、これらは一緒になって環を形成していてもよい。)を表す。)、C=O、O、S、SO、SO2、またはNR97(R97は、水素原子または炭素数1~10の分岐構造を有していてもよいアルキル基を表す。)を表し、X1およびX2は、互いに独立して、単結合、炭素数1~10の分岐構造を有していてもよいアルキレン基、または式(14)
    Figure JPOXMLDOC01-appb-C000003
    (式中、R98~R101は、互いに独立して、水素原子、ハロゲン原子、カルボキシル基、スルホ基、炭素数1~10の分岐構造を有していてもよいアルキル基、または炭素数1~10の分岐構造を有していてもよいアルコキシ基を表し、Y1およびY2は、互いに独立して、単結合または炭素数1~10の分岐構造を有していてもよいアルキレン基を表す。)で示される基を表す。〕}
    The triazine type polymer containing composition characterized by including the polymer containing the repeating unit structure represented by following formula (1), and at least 2 types of crosslinking agent.
    Figure JPOXMLDOC01-appb-C000001
    {In the formula, R and R 'each independently represent a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and Ar 1 represents an aryl group having a hydroxyl group, a carboxyl group, and / or a maleimide group. Ar 2 represents at least one selected from the group represented by formulas (2) to (13).
    Figure JPOXMLDOC01-appb-C000002
    [Wherein R 1 to R 92 are independently of each other a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or a carbon number of 1 Represents an alkoxy group which may have a branched structure of ˜10, R 93 and R 94 represent a hydrogen atom or an alkyl group which may have a branched structure of 1 to 10 carbon atoms, W 1 and W 2 is independently a single bond, CR 95 R 96 (R 95 and R 96 are each independently a hydrogen atom or an alkyl group optionally having a branched structure of 1 to 10 carbon atoms ( However, these may be combined to form a ring.))), C═O, O, S, SO, SO 2 , or NR 97 (R 97 is a hydrogen atom or a carbon number of 1). have a branched structure to 10 represent also alkyl groups.) represents, X 1 Contact Fine X 2 are independently of each other a single bond, an alkylene group which may have a branched structure having 1 to 10 carbon atoms, or the formula, (14)
    Figure JPOXMLDOC01-appb-C000003
    (Wherein R 98 to R 101 are each independently a hydrogen atom, a halogen atom, a carboxyl group, a sulfo group, an alkyl group which may have a branched structure having 1 to 10 carbon atoms, or 1 carbon atom) Represents an alkoxy group which may have a branched structure of ˜10, and Y 1 and Y 2 each independently represent an alkylene group which may have a single bond or a branched structure of 1 to 10 carbon atoms. Represents a group represented by: ]}
  2.  前記架橋剤が、多官能(メタ)アクリル化合物と多官能エポキシ化合物との組み合わせである請求項1記載のトリアジン系重合体含有組成物。 The triazine polymer-containing composition according to claim 1, wherein the crosslinking agent is a combination of a polyfunctional (meth) acrylic compound and a polyfunctional epoxy compound.
  3.  前記多官能(メタ)アクリル化合物と多官能エポキシ化合物との含有量が、質量比で1:1~3:1である請求項2記載のトリアジン系重合体含有組成物。 3. The triazine polymer-containing composition according to claim 2, wherein the content of the polyfunctional (meth) acrylic compound and the polyfunctional epoxy compound is 1: 1 to 3: 1 by mass ratio.
  4.  前記重合体が、下記式(18)で示される繰り返し単位構造を含む請求項1~3のいずれか1項記載のトリアジン系重合体含有組成物。
    Figure JPOXMLDOC01-appb-C000004
    (式中、R、R′およびAr2は、前記と同じ意味を表す。)
    The triazine polymer-containing composition according to any one of claims 1 to 3, wherein the polymer contains a repeating unit structure represented by the following formula (18).
    Figure JPOXMLDOC01-appb-C000004
    (Wherein R, R ′ and Ar 2 represent the same meaning as described above.)
  5.  下記式(19)で示される繰り返し単位構造を含む請求項4記載のトリアジン系重合体含有組成物。
    Figure JPOXMLDOC01-appb-C000005
    (式中、R、R′およびAr2は、前記と同じ意味を表す。)
    The triazine polymer-containing composition according to claim 4, comprising a repeating unit structure represented by the following formula (19).
    Figure JPOXMLDOC01-appb-C000005
    (Wherein R, R ′ and Ar 2 represent the same meaning as described above.)
  6.  下記式(23)で示される繰り返し単位構造を含む請求項5記載のトリアジン系重合体含有組成物。
    Figure JPOXMLDOC01-appb-C000006
    The triazine polymer-containing composition according to claim 5, comprising a repeating unit structure represented by the following formula (23).
    Figure JPOXMLDOC01-appb-C000006
  7.  さらに、オキシラン環含有化合物と、光硬化型触媒とを含有する請求項1~6記載のいずれか1項記載のトリアジン系重合体含有組成物。 The triazine polymer-containing composition according to any one of claims 1 to 6, further comprising an oxirane ring-containing compound and a photocurable catalyst.
  8.  さらにアジド化合物を含有する請求項1~6のいずれか1項記載のトリアジン系重合体含有組成物。 The triazine polymer-containing composition according to any one of claims 1 to 6, further comprising an azide compound.
  9.  パターン形成用である請求項1~8のいずれか1項記載のトリアジン系重合体含有組成物。 The triazine polymer-containing composition according to any one of claims 1 to 8, which is used for pattern formation.
  10.  請求項1~8のいずれか1項記載のトリアジン系重合体含有組成物を硬化させて得られる硬化膜。 A cured film obtained by curing the triazine polymer-containing composition according to any one of claims 1 to 8.
  11.  請求項9記載のトリアジン系重合体含有組成物から作製されたパターン。 A pattern produced from the triazine-based polymer-containing composition according to claim 9.
  12.  基材と、この基材上に形成された請求項10記載の硬化膜とを備える電子デバイス。 An electronic device comprising a base material and the cured film according to claim 10 formed on the base material.
  13.  基材と、この基材上に形成された請求項10記載の硬化膜とを備える光学部材。 An optical member comprising a substrate and the cured film according to claim 10 formed on the substrate.
  14.  基材と、この基材上に形成された請求項11記載のパターンとを備える電子デバイス。 An electronic device comprising a base material and the pattern according to claim 11 formed on the base material.
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