WO2015083239A1 - Workpiece transfer system - Google Patents

Workpiece transfer system Download PDF

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Publication number
WO2015083239A1
WO2015083239A1 PCT/JP2013/082484 JP2013082484W WO2015083239A1 WO 2015083239 A1 WO2015083239 A1 WO 2015083239A1 JP 2013082484 W JP2013082484 W JP 2013082484W WO 2015083239 A1 WO2015083239 A1 WO 2015083239A1
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Prior art keywords
support member
workpiece
transfer head
transfer
drive unit
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PCT/JP2013/082484
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French (fr)
Japanese (ja)
Inventor
祥平 松本
上野 聡
啓太郎 原田
政好 横尾
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東北精機工業株式会社
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Priority to PCT/JP2013/082484 priority Critical patent/WO2015083239A1/en
Publication of WO2015083239A1 publication Critical patent/WO2015083239A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00Programme-controlled manipulators
    • B25J9/02Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023Cartesian coordinate type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/0052Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/918Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads

Abstract

A workpiece transfer system (10) is provided with: a first supporting member (14), a second supporting member (16), and a third supporting member (18), each of which supports workpieces (12); a first transfer head (20), which holds the workpieces, and which transfers the workpieces between the first supporting member and the second supporting member; a second transfer head (22), which holds the workpieces, and which transfers the workpieces between the second supporting member and the third supporting member; a first lift drive unit (34), which lifts the first transfer head with respect to the first supporting member and the second supporting member; a second lift drive unit (36), which lifts the second transfer head with respect to the second supporting member and the third supporting member; a horizontal drive unit (38), which horizontally moves the first transfer head between a position above the first supporting member, and a position above the second supporting member, and which horizontally moves the second transfer head between the position above the second supporting member and a position above the third supporting member; and a power transmission unit (40), which transmits power between the first and second transfer heads and the horizontal drive unit such that the transmission of drive power can be interrupted.

Description

ワーク移送システムWork transfer system
 本発明は、ワーク移送システムに関する。 The present invention relates to a workpiece transfer system.
 ICデバイス等の電子デバイスの電気的試験を行う試験装置に対し、電子デバイスを供給及び排出する装置として、様々な種類のハンドラが知られている。例えば特許文献1は、個々に電子デバイスを把持する複数のデバイス把持部と、それらデバイス把持部のそれぞれに把持した電子デバイスの姿勢や位置の情報に基づき、デバイス把持部の位置を個別に補正する位置補正手段とを備えたハンドラを開示する。 Various types of handlers are known as devices for supplying and discharging an electronic device with respect to a test device that performs an electrical test of an electronic device such as an IC device. For example, Patent Document 1 individually corrects the position of a device gripping unit based on information on a plurality of device gripping units that individually grip electronic devices and the attitude and position of the electronic device gripped by each of the device gripping units. Disclosed is a handler comprising position correction means.
 従来のハンドラは、複数の電子デバイスを、試験装置が有する複数のテストソケットの配置に対応する基準配置で支持する支持部材と、支持部材とテストソケットとの間で電子デバイスを移送するとともにテストソケットに電子デバイスを圧接する回転割出式の移送機構とを備えている。 In the conventional handler, a plurality of electronic devices are supported in a reference arrangement corresponding to the arrangement of the plurality of test sockets included in the test apparatus, the electronic device is transferred between the support member and the test socket, and the test socket is provided. And a rotary indexing transfer mechanism that press-contacts the electronic device.
国際公開第2008/13657号International Publication No. 2008/13657
 ハンドラに限らず、ワークを第1の支持部材と第2の支持部材との間で移送する移送システムにおいて、低振動の高速動作を実現することが望まれている。 It is desired to realize a high-speed operation with low vibration in a transfer system that transfers a workpiece between the first support member and the second support member, not limited to the handler.
 本発明の一態様は、ワークを支持する第1の支持部材と、第1の支持部材から離間して配置され、ワークを支持する第2の支持部材と、第2の支持部材から第1の支持部材とは反対側に離間して配置され、ワークを支持する第3の支持部材と、ワークを把持して第1の支持部材と第2の支持部材との間で移送する第1の移送ヘッドと、ワークを把持して第2の支持部材と第3の支持部材との間で移送する第2の移送ヘッドと、第1の支持部材及び第2の支持部材に対し第1の移送ヘッドを昇降動作させる第1の昇降駆動部と、第2の支持部材及び第3の支持部材に対し第2の移送ヘッドを昇降動作させる第2の昇降駆動部と、第1の支持部材の上方位置と第2の支持部材の上方位置との間で第1の移送ヘッドを水平移動させるとともに、第2の支持部材の上方位置と第3の支持部材の上方位置との間で第2の移送ヘッドを水平移動させる水平駆動部と、第1の移送ヘッド及び第2の移送ヘッドと水平駆動部との間で駆動力を解除可能に伝達する動力伝達部と、を具備するワーク移送システムである。 According to one embodiment of the present invention, a first support member that supports a workpiece, a second support member that is spaced apart from the first support member, and that supports the workpiece, and a first support member from the second support member. A third support member that is disposed on the opposite side of the support member and supports the workpiece, and a first transfer that grips the workpiece and transfers it between the first support member and the second support member. A head, a second transfer head for gripping and transferring the workpiece between the second support member and the third support member, and a first transfer head relative to the first support member and the second support member A first raising / lowering drive unit that moves the second transfer head up and down relative to the second support member and the third support member, and an upper position of the first support member And horizontally moving the first transfer head between the second support member and the upper position of the second support member. A horizontal drive unit that horizontally moves the second transfer head between an upper position of the support member and an upper position of the third support member, and a first drive head, a second transfer head, and a horizontal drive unit. And a power transmission unit for releasably transmitting a driving force between the two.
 一態様のワーク移送システムによれば、第1及び第2の移送ヘッドがそれぞれ、水平駆動部による直線的な移動と第1及び第2の昇降駆動部による直線的な移動との組合せによって、第1の支持部材、第2の支持部材及び第3の支持部材に対するワークの移送動作を遂行できるので、例えば回転割出式の移送ヘッドを含む構成に比べ、移送ヘッドのイナーシャを軽減して低振動の高速動作を実現することができる。しかも、本来はそれぞれが専用の昇降駆動部及び水平駆動部を備える第1及び第2の移送ヘッドが、動力伝達部を採用したことにより、水平駆動部を共通化して第1の昇降駆動部及び第2の昇降駆動部と合わせて3つの駆動部で動作できる。その結果、ワーク移送システムの全体を軽量化でき、低振動の高速動作を確実に実現できるとともに、ワーク移送システムの製造コスト及び維持コストを削減することが可能になる。 According to the workpiece transfer system of one aspect, the first and second transfer heads are respectively combined with the linear movement by the horizontal drive unit and the linear movement by the first and second lifting drive units. Since the transfer operation of the workpiece with respect to the first support member, the second support member, and the third support member can be performed, the inertia of the transfer head is reduced and the vibration is reduced as compared with a configuration including a rotary indexing transfer head, for example. High speed operation can be realized. In addition, since the first and second transfer heads, each originally provided with a dedicated lift drive unit and horizontal drive unit, employ a power transmission unit, the horizontal drive unit is shared and the first lift drive unit and It can be operated by three driving units in combination with the second lifting / lowering driving unit. As a result, the entire workpiece transfer system can be reduced in weight, and high-speed operation with low vibration can be realized with certainty, and the manufacturing cost and maintenance cost of the workpiece transfer system can be reduced.
第1の実施形態によるワーク移送システムの全体構成を概略で示す斜視図である。1 is a perspective view schematically showing an overall configuration of a workpiece transfer system according to a first embodiment. 図1のワーク移送システムが有する支持部材を概略で示す一部断面正面図である。It is a partial cross section front view which shows roughly the supporting member which the workpiece | work transfer system of FIG. 1 has. 図1のワーク移送システムが有する移送ヘッドを概略で示す斜視図である。It is a perspective view which shows roughly the transfer head which the workpiece | work transfer system of FIG. 1 has. 図1のワーク移送システムが有する移送ヘッドを概略で示す斜視図である。It is a perspective view which shows roughly the transfer head which the workpiece | work transfer system of FIG. 1 has. 移送ヘッドの一部分を概略で示す斜視図である。It is a perspective view which shows a part of transfer head roughly. 移送ヘッドの一部分を概略で示す斜視図である。It is a perspective view which shows a part of transfer head roughly. 移送ヘッドの一部分を概略で示す斜視図である。It is a perspective view which shows a part of transfer head roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly. ワーク移送システムの動作を概略で示す図である。It is a figure which shows operation | movement of a workpiece | work transfer system roughly.
 以下、添付図面を参照して、本発明の実施の形態を詳細に説明する。全図面に渡り、対応する構成要素には共通の参照符号を付す。
 図1は、第1の実施形態によるワーク移送システム10の全体構成を示す。図2は、ワーク移送システム10が有する支持部材を示す。図3及び図4は、ワーク移送システム10が有する移送ヘッドを示す。ワーク移送システム10は、ICデバイス、LSIデバイス等の電子デバイスの電気的試験を行う試験装置に対して電子デバイスを供給及び排出するハンドラの、一部分に採用することができる。しかし、ワーク移送システム10の用途はこれに限定されない。
Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Corresponding components are denoted by common reference symbols throughout the drawings.
FIG. 1 shows the overall configuration of a workpiece transfer system 10 according to the first embodiment. FIG. 2 shows a support member included in the workpiece transfer system 10. 3 and 4 show a transfer head included in the workpiece transfer system 10. The workpiece transfer system 10 can be adopted as a part of a handler that supplies and discharges an electronic device to and from a test apparatus that performs an electrical test of an electronic device such as an IC device or an LSI device. However, the use of the workpiece transfer system 10 is not limited to this.
 図1に示すように、ワーク移送システム10は、ワーク12(図2)を支持する第1の支持部材14と、第1の支持部材14から離間して配置され、ワーク12を支持する第2の支持部材16と、第2の支持部材16から第1の支持部材14とは反対側に離間して配置され、ワーク12を支持する第3の支持部材18と、ワーク12を把持して第1の支持部材14と第2の支持部材16との間で移送する第1の移送ヘッド20と、ワーク12を把持して第2の支持部材16と第3の支持部材18との間で移送する第2の移送ヘッド22と、第1の支持部材14、第3の支持部材18、第1の移送ヘッド20及び第2の移送ヘッド22が移動可能に搭載される基台24とを備える。 As shown in FIG. 1, the workpiece transfer system 10 includes a first support member 14 that supports the workpiece 12 (FIG. 2), and a second support member that is disposed apart from the first support member 14 and supports the workpiece 12. The second support member 16, the third support member 18 that is spaced apart from the second support member 16 on the opposite side of the first support member 14, and supports the workpiece 12, and the workpiece 12 is gripped by the first support member 16. The first transfer head 20 that transfers between the first support member 14 and the second support member 16, and the workpiece 12 is gripped and transferred between the second support member 16 and the third support member 18. And a base 24 on which the first support member 14, the third support member 18, the first transfer head 20, and the second transfer head 22 are movably mounted.
 基台24は通常、ワーク移送システム10を設置する床面上で水平に配置される。基台24の所定領域には、基台24の上方から基台下方へのアクセスを可能にする開口部26が設けられる。第2の支持部材16は、基台24の下方で開口部26に重なる位置に固定的に配置される。第2の支持部材16には、ワーク12を支持する第2の支持部28が設けられる。第2の支持部28は、基台24の開口部26の内側に配置される。図示実施形態では、第2の支持部材16は、複数のワーク12を所定の基準配置(例えば2×8の行列状配置)で支持する複数の第2の支持部28を備える。 The base 24 is normally arranged horizontally on the floor surface on which the workpiece transfer system 10 is installed. In a predetermined region of the base 24, an opening 26 is provided that allows access from above the base 24 to below the base. The second support member 16 is fixedly disposed at a position overlapping the opening 26 below the base 24. The second support member 16 is provided with a second support portion 28 that supports the workpiece 12. The second support portion 28 is disposed inside the opening 26 of the base 24. In the illustrated embodiment, the second support member 16 includes a plurality of second support portions 28 that support the plurality of workpieces 12 in a predetermined reference arrangement (for example, a 2 × 8 matrix arrangement).
 第1の支持部材14は、基台24の表面24aに沿って、水平な1軸(X1軸)の位置指令に従って移動可能な構成を有することができる。第3の支持部材18は、基台24の表面24aに沿って、水平な1軸(X2軸)の位置指令に従って移動可能な構成を有することができる。X1軸とX2軸とは互いに平行である。 The first support member 14 can have a configuration that can be moved along the surface 24a of the base 24 in accordance with a horizontal one-axis (X1-axis) position command. The third support member 18 can have a configuration that can be moved along the surface 24 a of the base 24 according to a horizontal one-axis (X2 axis) position command. The X1 axis and the X2 axis are parallel to each other.
 図2に示すように、第1の支持部材14は、ワーク12を支持する第1の支持部30を有する。図示実施形態では、第1の支持部材14は、それぞれにワーク12を1個ずつ支持できる複数の第1の支持部30を有する。この場合、複数の第1の支持部30は、いずれも同一の寸法及び輪郭形状を有し、第1の支持部材14の移動方向(X1軸)に平行な方向と直交する方向とのそれぞれに等間隔に整列して配置される(図1)。第1の支持部材14は、第2の支持部28と同じ個数の第1の支持部30を同じ基準配置で有することができる。或いは第1の支持部材14は、第2の支持部28よりも多い個数の第1の支持部30を、基準配置とは異なる配置で有することもできる。この場合、第1の支持部30は、少なくともいずれかの第1の支持部30にワーク12を基準配置で支持できるように構成される。 As shown in FIG. 2, the first support member 14 has a first support portion 30 that supports the workpiece 12. In the illustrated embodiment, the first support member 14 includes a plurality of first support portions 30 that can support one workpiece 12 at a time. In this case, each of the plurality of first support portions 30 has the same size and contour shape, and is in each of a direction parallel to a direction parallel to the moving direction (X1 axis) of the first support member 14 and a direction orthogonal thereto. Arranged at equal intervals (FIG. 1). The first support member 14 can have the same number of first support portions 30 as the second support portions 28 in the same reference arrangement. Alternatively, the first support member 14 may have a greater number of first support portions 30 than the second support portion 28 in an arrangement different from the reference arrangement. In this case, the first support part 30 is configured to be able to support the workpiece 12 on at least one of the first support parts 30 in a reference arrangement.
 第3の支持部材18は、第1の支持部材14と実質的に同一の構成を有する。すなわち第3の支持部材18は、ワーク12を支持する第3の支持部32を有する(図1)。図示実施形態では、第3の支持部材18は、それぞれにワーク12を1個ずつ支持できる複数の第3の支持部32を有する。この場合、複数の第3の支持部32は、いずれも同一の寸法及び輪郭形状を有し、第3の支持部材18の移動方向(X2軸)に平行な方向と直交する方向とのそれぞれに等間隔に整列して配置される。第3の支持部材18は、第2の支持部28と同じ個数の第3の支持部32を同じ基準配置で有することができる。或いは第3の支持部材18は、第2の支持部28よりも多い個数の第3の支持部32を、基準配置とは異なる配置で有することもできる。この場合、第3の支持部32は、少なくともいずれかの第3の支持部32にワーク12を基準配置で支持できるように構成される。 The third support member 18 has substantially the same configuration as the first support member 14. That is, the third support member 18 has a third support portion 32 that supports the workpiece 12 (FIG. 1). In the illustrated embodiment, the third support member 18 includes a plurality of third support portions 32 that can support one workpiece 12 each. In this case, each of the plurality of third support portions 32 has the same size and contour shape, and is in each of a direction parallel to a direction parallel to the moving direction (X2 axis) of the third support member 18. Arranged at equal intervals. The third support member 18 can have the same number of third support portions 32 as the second support portions 28 in the same reference arrangement. Alternatively, the third support member 18 may have a larger number of third support portions 32 than the second support portion 28 in an arrangement different from the reference arrangement. In this case, the third support portion 32 is configured to support the workpiece 12 in at least one of the third support portions 32 in a reference arrangement.
 図3に示すように、ワーク移送システム10は、第1の支持部材14(図1)及び第2の支持部材16(図1)に対し第1の移送ヘッド20を昇降動作させる第1の昇降駆動部34と、第2の支持部材16及び第3の支持部材18(図1)に対し第2の移送ヘッド22を昇降動作させる第2の昇降駆動部36と、第1の支持部材14の上方位置と第2の支持部材16の上方位置との間で第1の移送ヘッド20を水平移動させるとともに、第2の支持部材16の上方位置と第3の支持部材18の上方位置との間で第2の移送ヘッド22を水平移動させる水平駆動部38と、第1の移送ヘッド20及び第2の移送ヘッド22と水平駆動部38との間で駆動力を解除可能に伝達する動力伝達部40とをさらに備える。 As shown in FIG. 3, the workpiece transfer system 10 includes a first raising / lowering operation for raising and lowering the first transfer head 20 with respect to the first support member 14 (FIG. 1) and the second support member 16 (FIG. 1). The drive unit 34, the second lifting drive unit 36 that moves the second transfer head 22 up and down with respect to the second support member 16 and the third support member 18 (FIG. 1), and the first support member 14 The first transfer head 20 is moved horizontally between the upper position and the upper position of the second support member 16, and between the upper position of the second support member 16 and the upper position of the third support member 18. The horizontal drive unit 38 that horizontally moves the second transfer head 22, and the first transfer head 20 and the power transmission unit that transmits the driving force releasably between the second transfer head 22 and the horizontal drive unit 38. 40.
 第1の移送ヘッド20は、水平駆動部38の駆動により水平Y軸方向へ送り動作する一方で、第1の昇降駆動部34の駆動によりY軸に直交する鉛直Z1軸方向へ送り動作する。第2の移送ヘッド22は、水平駆動部38の駆動により水平Y軸方向へ送り動作する一方で、第2の昇降駆動部36の駆動によりY軸に直交する鉛直Z2軸方向へ送り動作する。Z1軸とZ2軸とは互いに平行である。 The first transfer head 20 feeds in the horizontal Y-axis direction by driving the horizontal drive unit 38, and feeds in the vertical Z1 axis direction orthogonal to the Y-axis by driving the first elevating drive unit 34. The second transfer head 22 performs a feed operation in the horizontal Y-axis direction by driving the horizontal drive unit 38, while performing a feed operation in the vertical Z2 axis direction orthogonal to the Y-axis by driving the second lift drive unit 36. The Z1 axis and the Z2 axis are parallel to each other.
 第1の移送ヘッド20は、水平駆動部38の駆動により基台24(図1)の上方でY軸方向へ水平移動するとともに、第1の昇降駆動部34の駆動により第1の支持部材14(図1)及び第2の支持部材16(図1)に対し昇降動作することにより、第1の支持部材14に支持されたワーク12(図2)を把持して第1の支持部材14から取り出し、取り出したワーク12を第2の支持部材16に移載し、第2の支持部材16に移載したワークを把持して第2の支持部材16から回収し、回収したワーク12を第1の支持部材14に返却するように動作できる。 The first transfer head 20 moves horizontally in the Y-axis direction above the base 24 (FIG. 1) by driving the horizontal driving unit 38, and the first support member 14 by driving the first lifting / lowering driving unit 34. By moving up and down with respect to (FIG. 1) and the second support member 16 (FIG. 1), the workpiece 12 (FIG. 2) supported by the first support member 14 is gripped and removed from the first support member 14. The removed workpiece 12 is transferred to the second support member 16, the workpiece transferred to the second support member 16 is gripped and collected from the second support member 16, and the collected workpiece 12 is transferred to the first support member 16. It can operate to return to the support member 14.
 第2の移送ヘッド22は、水平駆動部38の駆動により基台24(図1)の上方でY軸方向へ水平移動するとともに、第2の昇降駆動部36の駆動により第2の支持部材16(図1)及び第3の支持部材18(図1)に対し昇降動作することにより、第3の支持部材18に支持されたワーク12(図2)を把持して第3の支持部材18から取り出し、取り出したワーク12を第2の支持部材16に移載し、第2の支持部材16に移載したワークを把持して第2の支持部材16から回収し、回収したワーク12を第3の支持部材18に返却するように動作できる。 The second transfer head 22 moves horizontally in the Y-axis direction above the base 24 (FIG. 1) by driving the horizontal driving unit 38, and the second support member 16 by driving the second lifting / lowering driving unit 36. By moving up and down with respect to (FIG. 1) and the third support member 18 (FIG. 1), the workpiece 12 (FIG. 2) supported by the third support member 18 is gripped and removed from the third support member 18. The removed workpiece 12 is transferred to the second support member 16, the workpiece transferred to the second support member 16 is gripped and recovered from the second support member 16, and the recovered workpiece 12 is transferred to the third support member 16. It can operate to return to the support member 18.
 図1に示すように、ワーク移送システム10は、第1の支持部材14、第3の支持部材18、第1の移送ヘッド20及び第2の移送ヘッド22の上記した動作を制御する制御部42を備える。制御部42は、オペレータが用いる操作パネルやディスプレイを備えることができる。 As shown in FIG. 1, the workpiece transfer system 10 includes a control unit 42 that controls the above-described operations of the first support member 14, the third support member 18, the first transfer head 20, and the second transfer head 22. Is provided. The control unit 42 can include an operation panel and a display used by the operator.
 第1の支持部材14、第2の支持部材16及び第3の支持部材18が、複数のワーク12を基準配置で支持し、第1の移送ヘッド20及び第2の移送ヘッド22が、複数のワーク12を基準配置で把持する図示実施形態の構成では、第1の支持部30の位置(或いは第1の支持部材14の位置)及び第3の支持部32の位置(或いは第3の支持部材18の位置)は、第1の支持部材14が動作する水平な1軸(X1軸)、第3の支持部材18が動作する水平な1軸(X2軸)、並びに第1及び第2の移送ヘッド20、22が動作する水平な1軸(Y軸)の、それぞれの座標値で表すことができる。 The first support member 14, the second support member 16, and the third support member 18 support the plurality of workpieces 12 in a reference arrangement, and the first transfer head 20 and the second transfer head 22 include a plurality of workpieces 12. In the configuration of the illustrated embodiment in which the workpiece 12 is gripped in a reference arrangement, the position of the first support portion 30 (or the position of the first support member 14) and the position of the third support portion 32 (or the third support member). 18 position) includes a horizontal axis (X1 axis) on which the first support member 14 operates, a horizontal axis (X2 axis) on which the third support member 18 operates, and the first and second transports. It can be expressed by respective coordinate values of one horizontal axis (Y axis) on which the heads 20 and 22 operate.
 図4は、図示実施形態における第1の移送ヘッド20を示す。第1の移送ヘッド20は、その先端のヘッド部分44に、ワーク12(図2)の基準配置に対応する配置で設けられた複数の把持部46を有する。各把持部46は、図示しない真空源に接続され、ワーク12を真空吸着により解放可能に把持することができる。なお、把持部46の把持構造は、真空吸着に限定されず、磁気吸着や指状部材による把握等を採用できる。図示実施形態における第2の移送ヘッド22(図1)は、第1の移送ヘッド20と実質的に同一の構成を有する。すなわち第2の移送ヘッド22は、第1の移送ヘッド20と同様に、ワーク12(図2)の基準配置に対応する配置で設けられた複数の把持部を備える。 FIG. 4 shows the first transfer head 20 in the illustrated embodiment. The first transfer head 20 has a plurality of gripping portions 46 provided in the head portion 44 at the tip thereof in an arrangement corresponding to the reference arrangement of the workpiece 12 (FIG. 2). Each gripping portion 46 is connected to a vacuum source (not shown) and can grip the workpiece 12 releasably by vacuum suction. Note that the gripping structure of the gripping portion 46 is not limited to vacuum suction, and magnetic suction, grasping by a finger-like member, or the like can be employed. The second transfer head 22 (FIG. 1) in the illustrated embodiment has substantially the same configuration as the first transfer head 20. That is, similarly to the first transfer head 20, the second transfer head 22 includes a plurality of grip portions provided in an arrangement corresponding to the reference arrangement of the workpiece 12 (FIG. 2).
 図5A~図5Cは、第1及び第2の移送ヘッド20、22の駆動構造の細部を示す。以下、図1~図5Cを参照して、ワーク移送システム10の構成をさらに詳細に説明する。 5A to 5C show details of the drive structure of the first and second transfer heads 20 and 22. FIG. Hereinafter, the configuration of the workpiece transfer system 10 will be described in more detail with reference to FIGS. 1 to 5C.
 第1の昇降駆動部34は、基台24に支持される電動機等の動力源48と、基台24に支持され、ベルト50等を介して動力源48に接続される送りねじ装置52と、送りねじ装置52のナット要素(図示せず)に一体に連結されるガイド部材54とを備える。送りねじ装置52は、動力源48の駆動により、ガイド部材54をZ1軸方向へ往復移動させる。ガイド部材54は、Y軸に平行な方向へ延びるレール56を有する。第1の移送ヘッド20には、レール56に係合する一対のガイドローラ58が設けられる。第1の移送ヘッド20は、一対のガイドローラ58がレール56に係合した状態(図5A)で、動力源48の駆動によりZ1軸方向へ往復移動できるとともに、レール56に沿ってY軸方向へ往復移動できる。 The first elevating drive unit 34 includes a power source 48 such as an electric motor supported by the base 24, a feed screw device 52 supported by the base 24 and connected to the power source 48 via a belt 50 and the like, And a guide member 54 integrally connected to a nut element (not shown) of the feed screw device 52. The feed screw device 52 reciprocates the guide member 54 in the Z1 axis direction by driving the power source 48. The guide member 54 has a rail 56 that extends in a direction parallel to the Y axis. The first transfer head 20 is provided with a pair of guide rollers 58 that engage with the rails 56. The first transfer head 20 can reciprocate in the Z1 axis direction by driving the power source 48 with the pair of guide rollers 58 engaged with the rail 56 (FIG. 5A), and can be moved along the rail 56 in the Y axis direction. Can be moved back and forth.
 第2の昇降駆動部36は、基台24に支持される電動機等の動力源60と、基台24に支持され、ベルト62等を介して動力源60に接続される送りねじ装置64と、送りねじ装置64のナット要素(図示せず)に一体に連結されるガイド部材66とを備える。送りねじ装置64は、動力源60の駆動により、ガイド部材66をZ2軸方向へ往復移動させる。ガイド部材66は、Y軸に平行な方向へ延びるレール68を有する。第2の移送ヘッド22には、レール68に係合する一対のガイドローラ70が設けられる。第2の移送ヘッド22は、一対のガイドローラ70がレール68に係合した状態(図5A)で、動力源60の駆動によりZ2軸方向へ往復移動できるとともに、レール68に沿ってY軸方向へ往復移動できる。 The second elevating drive unit 36 includes a power source 60 such as an electric motor supported by the base 24, a feed screw device 64 supported by the base 24 and connected to the power source 60 via a belt 62 and the like, And a guide member 66 integrally connected to a nut element (not shown) of the feed screw device 64. The feed screw device 64 reciprocates the guide member 66 in the Z2 axis direction by driving the power source 60. The guide member 66 has a rail 68 extending in a direction parallel to the Y axis. The second transfer head 22 is provided with a pair of guide rollers 70 that engage with the rails 68. The second transfer head 22 can reciprocate in the Z2 axis direction by driving the power source 60 in a state where the pair of guide rollers 70 are engaged with the rail 68 (FIG. 5A), and in the Y axis direction along the rail 68. Can be moved back and forth.
 水平駆動部38は、基台24に支持される電動機等の動力源72と、動力源72に接続される送りねじ装置74と、送りねじ装置74のナット要素(図示せず)に一体に連結されるガイド部材76とを備える。送りねじ装置74は、動力源72の駆動により、ガイド部材76をY軸方向へ往復移動させる。ガイド部材76は、Z1軸に平行な方向へ延びるレール78と、Z2軸に平行な方向へ延びるレール80とを有する。第1の移送ヘッド20には、レール78に係合する一対のガイドローラ82が設けられる。第2の移送ヘッド22には、レール80に係合する一対のガイドローラ84が設けられる。第1の移送ヘッド20は、一対のガイドローラ82がレール78に係合した状態(図5B)で、動力源72の駆動によりY軸方向へ往復移動できるとともに、レール78に沿ってZ1軸方向へ往復移動できる。第2の移送ヘッド22は、一対のガイドローラ84がレール80に係合した状態(図5B)で、動力源72の駆動によりY軸方向へ往復移動できるとともに、レール80に沿ってZ2軸方向へ往復移動できる。 The horizontal drive unit 38 is integrally coupled to a power source 72 such as an electric motor supported by the base 24, a feed screw device 74 connected to the power source 72, and a nut element (not shown) of the feed screw device 74. The guide member 76 is provided. The feed screw device 74 reciprocates the guide member 76 in the Y-axis direction by driving the power source 72. The guide member 76 includes a rail 78 extending in a direction parallel to the Z1 axis and a rail 80 extending in a direction parallel to the Z2 axis. The first transfer head 20 is provided with a pair of guide rollers 82 that engage with the rails 78. The second transfer head 22 is provided with a pair of guide rollers 84 that engage with the rails 80. The first transfer head 20 can reciprocate in the Y-axis direction by driving the power source 72 with the pair of guide rollers 82 engaged with the rail 78 (FIG. 5B), and the Z1-axis direction along the rail 78. Can be moved back and forth. The second transfer head 22 can reciprocate in the Y-axis direction by driving the power source 72 with the pair of guide rollers 84 engaged with the rail 80 (FIG. 5B), and in the Z2-axis direction along the rail 80. Can be moved back and forth.
 動力伝達部40は、ガイド部材76のレール78及びレール80と、第1の移送ヘッド20の一対のガイドローラ82と、第2の移送ヘッド22の一対のガイドローラ84とによって構成される(図5B)。動力伝達部40の作用は後述する。 The power transmission unit 40 includes a rail 78 and a rail 80 of the guide member 76, a pair of guide rollers 82 of the first transfer head 20, and a pair of guide rollers 84 of the second transfer head 22 (see FIG. 5B). The operation of the power transmission unit 40 will be described later.
 ワーク移送システム10は、第1の移送ヘッド20及び第2の移送ヘッド22を交互に、第2の支持部材16の上方でY軸方向の所定位置に位置決めする位置決め部86をさらに備える。位置決め部86は、Z1軸に平行な方向へ延びるように第1の移送ヘッド20に設けられるレール88と、Z2軸に平行な方向へ延びるように第2の移送ヘッド22に設けられるレール90と、基台24の所定位置に固定して設けられ、レール88及びレール90のいずれか一方に係合する一対のガイドローラ92とを有する。第1の移送ヘッド20は、レール88が一対のガイドローラ92に係合した状態(図5C)で、Z1軸方向へ往復移動できるとともに、複数の把持部46(図4)が対応の第2の支持部28に対してZ1軸方向へ正確に整列する位置に位置決めされる。第2の移送ヘッド22は、レール90が一対のガイドローラ92に係合した状態(図5C)で、Z2軸方向へ往復移動できるとともに、複数の把持部46が対応の第2の支持部28に対してZ2軸方向へ正確に整列する位置に位置決めされる。レール88、90が一対のガイドローラ92に係合した状態では、第1及び第2の移送ヘッド20、22は、Y軸方向へ移動できない。 The workpiece transfer system 10 further includes a positioning unit 86 that alternately positions the first transfer head 20 and the second transfer head 22 at a predetermined position in the Y-axis direction above the second support member 16. The positioning portion 86 includes a rail 88 provided on the first transfer head 20 so as to extend in a direction parallel to the Z1 axis, and a rail 90 provided on the second transfer head 22 so as to extend in a direction parallel to the Z2 axis. And a pair of guide rollers 92 that are fixed to a predetermined position of the base 24 and engage with one of the rail 88 and the rail 90. The first transfer head 20 can reciprocate in the Z1 axis direction in a state where the rail 88 is engaged with the pair of guide rollers 92 (FIG. 5C), and the plurality of gripping portions 46 (FIG. 4) correspond to the second. The support portion 28 is positioned at a position that is accurately aligned in the Z1 axis direction. The second transfer head 22 can reciprocate in the Z2 axis direction in a state where the rail 90 is engaged with the pair of guide rollers 92 (FIG. 5C), and the plurality of gripping portions 46 correspond to the second support portions 28 corresponding thereto. Is positioned at a position that is accurately aligned in the Z2 axis direction. When the rails 88 and 90 are engaged with the pair of guide rollers 92, the first and second transfer heads 20 and 22 cannot move in the Y-axis direction.
 次に、図6A~図6Lを参照して、ワーク移送システム10によるワーク移送動作、及び当該ワーク移送動作の間の動力伝達部40(レール78、レール80、ガイドローラ82、ガイドローラ84)の作用を説明する。なお以下では、ワーク移送システム10を、電子デバイスの電気的試験を行う試験装置に対して電子デバイスを供給及び排出するハンドラに適用した一実施例を説明する。この実施例では、ワーク12は電子デバイスであり、第2の支持部材16は、電子デバイスに対して電気的試験を実施する試験装置であり、第2の支持部28は、電気的試験に際して電子デバイスを支持するテストソケットである。また、第1の支持部材14及び第3の支持部材18は、それぞれ、複数のワーク(電子デバイス)12を支持する第1の供給側の支持プレート94と、第2の支持部(テストソケット)28から移送された複数のワーク(電子デバイス)12を支持する第2の排出側の支持プレート96とを備える(図1)。各支持部材14、18は、第1及び第2の移送ヘッド20、22が第2の支持プレート96にワーク(電子デバイス)12を載せることができる第1の位置と、第1及び第2の移送ヘッド20、22が第1の支持プレート94からワーク(電子デバイス)12を取り出すことができる第2の位置との間で、X1軸方向又はX2軸方向へ移動できる。 6A to 6L, the workpiece transfer operation by the workpiece transfer system 10 and the power transmission unit 40 (rail 78, rail 80, guide roller 82, guide roller 84) during the workpiece transfer operation are described. The operation will be described. Hereinafter, an embodiment in which the workpiece transfer system 10 is applied to a handler that supplies and discharges an electronic device to and from a test apparatus that performs an electrical test of the electronic device will be described. In this embodiment, the workpiece 12 is an electronic device, the second support member 16 is a test apparatus that performs an electrical test on the electronic device, and the second support portion 28 is an electronic device during the electrical test. A test socket that supports the device. The first support member 14 and the third support member 18 include a first supply-side support plate 94 that supports a plurality of workpieces (electronic devices) 12 and a second support portion (test socket), respectively. And a second discharge-side support plate 96 that supports a plurality of workpieces (electronic devices) 12 transferred from 28 (FIG. 1). Each support member 14, 18 has a first position where the first and second transfer heads 20, 22 can place the workpiece (electronic device) 12 on the second support plate 96, and the first and second The transfer heads 20 and 22 can move in the X1 axis direction or the X2 axis direction between the second position where the work (electronic device) 12 can be taken out from the first support plate 94.
 図6Aは、第2の移送ヘッド22の把持部46に把持したワーク12(図2)に対し第2の支持部28を介して電気的試験が行われ、当該試験が終了する直前の状態を示す。この状態で、第2の移送ヘッド22は、ガイドローラ70がガイド部材66(図3)のレール68に係合して、第2の昇降駆動部36(図3)に接続され、ガイドローラ84がガイド部材76のレール80から脱離して、水平駆動部38(図3)から分離され、レール90が基台24(図1)上のガイドローラ92に係合して、Y軸方向の所定位置に位置決めされている。また第1の移送ヘッド20は、第1の支持部材14からワーク12を取り出して、第2の支持部28の近傍の待機位置に配置されている。この状態で、ガイドローラ58がガイド部材54(図3)のレール56に係合して、第1の昇降駆動部34(図3)に接続され、ガイドローラ82がガイド部材76のレール78に係合して、水平駆動部38(図3)に接続されている。また、第1の支持部材14及び第3の支持部材18はいずれも、第1の位置に置かれており、両者の第2の支持プレート96が第2の支持部28に隣接して配置されている。 FIG. 6A shows a state immediately before the electrical test is performed on the workpiece 12 (FIG. 2) gripped by the grip portion 46 of the second transfer head 22 via the second support portion 28 and the test is finished. Show. In this state, in the second transfer head 22, the guide roller 70 is engaged with the rail 68 of the guide member 66 (FIG. 3), and is connected to the second lift drive unit 36 (FIG. 3). Is detached from the rail 80 of the guide member 76 and separated from the horizontal drive unit 38 (FIG. 3), and the rail 90 is engaged with the guide roller 92 on the base 24 (FIG. 1), and the Y-axis direction is predetermined. Is positioned. The first transfer head 20 takes out the workpiece 12 from the first support member 14 and is disposed at a standby position in the vicinity of the second support portion 28. In this state, the guide roller 58 engages with the rail 56 of the guide member 54 (FIG. 3) and is connected to the first elevating drive unit 34 (FIG. 3), and the guide roller 82 is connected to the rail 78 of the guide member 76. Engaged and connected to the horizontal drive 38 (FIG. 3). Further, both the first support member 14 and the third support member 18 are placed at the first position, and the second support plates 96 of both are arranged adjacent to the second support portion 28. ing.
 図6Aの状態で電気的試験が完了すると、第2の昇降駆動部36(図3)が起動して、ガイドローラ70とレール68との係合の下に、第2の移送ヘッド22がZ2軸方向上方への移動を開始する(図6B)。それに伴い、第2の移送ヘッド22は、把持部46に把持したワーク12(図2)を第2の支持部28から取り上げて回収する。このとき、第2の移送ヘッド22のローラ84は、レール80に係合し始め、第2の移送ヘッド22が水平駆動部38(図3)に接続される。 When the electrical test is completed in the state of FIG. 6A, the second lifting drive unit 36 (FIG. 3) is activated, and the second transfer head 22 is moved to Z2 under the engagement between the guide roller 70 and the rail 68. The movement upward in the axial direction is started (FIG. 6B). Accordingly, the second transfer head 22 picks up and collects the workpiece 12 (FIG. 2) gripped by the gripping portion 46 from the second support portion 28. At this time, the roller 84 of the second transfer head 22 starts to engage with the rail 80, and the second transfer head 22 is connected to the horizontal drive unit 38 (FIG. 3).
 第2の移送ヘッド22がさらにZ2軸方向上方へ移動すると、レール90がガイドローラ92から脱離し、第2の移送ヘッド22がY軸方向へ移動できるようになる(図6C)。レール90がガイドローラ92から脱離すると略同時に、第1の昇降駆動部34(図3)が起動して、ガイドローラ58とレール56との係合の下に、第1の移送ヘッド20がZ1軸方向下方への移動を開始する。このとき、第1及び第2の移送ヘッド20、22の双方は、水平駆動部38(図3)に接続されている。 When the second transfer head 22 further moves upward in the Z2 axis direction, the rail 90 is detached from the guide roller 92, and the second transfer head 22 can move in the Y axis direction (FIG. 6C). At substantially the same time when the rail 90 is detached from the guide roller 92, the first raising / lowering drive unit 34 (FIG. 3) is activated, and the first transfer head 20 is moved under the engagement between the guide roller 58 and the rail 56. Starts downward movement in the Z1-axis direction. At this time, both the first and second transfer heads 20 and 22 are connected to the horizontal drive unit 38 (FIG. 3).
 第2の移送ヘッド22が第3の支持部材18よりも高い位置まで上昇するとともに、第1の移送ヘッド20が第2の移送ヘッド22と略同一高さの位置まで下降すると、水平駆動部38(図3)が起動する(図6D)。水平駆動部38の起動により、ガイドローラ82とレール78との係合の下に第1の移送ヘッド20がY軸方向前方(図で左方)への移動を開始し、それと同期して、ガイドローラ84とレール80との係合の下に第2の移送ヘッド22がY軸方向前方(図で左方)への移動を開始する。 When the second transfer head 22 rises to a position higher than the third support member 18 and the first transfer head 20 descends to a position substantially the same height as the second transfer head 22, the horizontal drive unit 38. (FIG. 3) is activated (FIG. 6D). By the activation of the horizontal drive unit 38, the first transfer head 20 starts moving forward in the Y-axis direction (leftward in the figure) under the engagement between the guide roller 82 and the rail 78, and in synchronization therewith, Under the engagement between the guide roller 84 and the rail 80, the second transfer head 22 starts moving forward in the Y-axis direction (leftward in the figure).
 第1の移送ヘッド20が第2の支持部28の上方のY軸方向所定位置に到達すると、水平駆動部38(図3)が停止する一方、第1の昇降駆動部34(図3)は継続して作動して、第1の移送ヘッド20を第2の支持部28に向かって下降させる(図6E)。この間、第2の移送ヘッド22は、第3の支持部材18の上方のY軸方向所定位置及びZ2軸方向所定高さに到達し、第2の昇降駆動部36(図3)が停止して、第3の支持部材18の上方で静止する。第1の移送ヘッド20は、第2の支持部28の上方のZ1軸方向所定高さまで下降すると、レール88が基台24(図1)上のガイドローラ92に係合し始め、Y軸方向の所定位置に位置決めされる。 When the first transfer head 20 reaches a predetermined position in the Y-axis direction above the second support portion 28, the horizontal drive portion 38 (FIG. 3) stops, while the first lift drive portion 34 (FIG. 3) By continuing to operate, the first transfer head 20 is lowered toward the second support portion 28 (FIG. 6E). During this time, the second transfer head 22 reaches a predetermined position in the Y-axis direction and a predetermined height in the Z2-axis direction above the third support member 18, and the second elevating drive unit 36 (FIG. 3) stops. , Rests above the third support member 18. When the first transfer head 20 is lowered to a predetermined height in the Z1 axial direction above the second support portion 28, the rail 88 begins to engage with the guide roller 92 on the base 24 (FIG. 1), and the Y axial direction. Is positioned at a predetermined position.
 第1の移送ヘッド20は、第2の支持部28に向かってさらに下降することで、ガイドローラ82がガイド部材76のレール78から脱離して、水平駆動部38(図3)から分離される(図6F)。その後、第1の移送ヘッド20は、Z1軸方向所定位置で、把持部46に把持したワーク12(図2)を第2の支持部材16に移載して対応の第2の支持部28に装填し、ワーク12を第2の支持部28に圧接する。この状態で、第1の移送ヘッド20が把持したワーク12に対し、電気的試験が開始される。 When the first transfer head 20 is further lowered toward the second support portion 28, the guide roller 82 is detached from the rail 78 of the guide member 76 and separated from the horizontal drive portion 38 (FIG. 3). (FIG. 6F). After that, the first transfer head 20 transfers the workpiece 12 (FIG. 2) gripped by the grip portion 46 to the second support member 16 at a predetermined position in the Z1 axis direction and transfers it to the corresponding second support portion 28. The workpiece 12 is loaded, and the workpiece 12 is pressed against the second support portion 28. In this state, an electrical test is started on the workpiece 12 gripped by the first transfer head 20.
 第1の移送ヘッド20が把持したワーク12に対して電気的試験を行っている間に、第2の昇降駆動部36(図3)が起動して、ガイドローラ70とレール68との係合の下に、第2の移送ヘッド22がZ2軸方向下方へ移動する(図6G)。第2の移送ヘッド22がZ2軸方向所定位置に達すると、第2の昇降駆動部36(図3)が停止し、第2の移送ヘッド22は、把持部46に把持したワーク12(図2)を、第3の支持部材18の第2の支持プレート96の対応の支持部32(図1)に返却する。 While the electrical test is being performed on the workpiece 12 gripped by the first transfer head 20, the second lifting drive unit 36 (FIG. 3) is activated and the guide roller 70 and the rail 68 are engaged. The second transfer head 22 moves downward in the Z2 axial direction (FIG. 6G). When the second transfer head 22 reaches a predetermined position in the Z2 axis direction, the second lifting / lowering drive unit 36 (FIG. 3) stops, and the second transfer head 22 moves the workpiece 12 (FIG. 2) held by the holding unit 46. ) Is returned to the corresponding support portion 32 (FIG. 1) of the second support plate 96 of the third support member 18.
 ワーク12の返却が完了すると、第2の昇降駆動部36(図3)が再起動して、ガイドローラ70とレール68との係合の下に、第2の移送ヘッド22をZ2軸方向上方へ移動させる(図6H)。第2の移送ヘッド22がZ2軸方向上方へ移動している間に、第3の支持部材18は第1の位置から第2の位置への移動を開始する。またこの間、第1の移送ヘッド20が把持したワーク12に対する電気的試験は、継続して行われる。 When the return of the workpiece 12 is completed, the second raising / lowering drive unit 36 (FIG. 3) is restarted, and the second transfer head 22 is moved upward in the Z2 axial direction under the engagement between the guide roller 70 and the rail 68. (Fig. 6H). While the second transfer head 22 is moving upward in the Z2 axis direction, the third support member 18 starts moving from the first position to the second position. During this time, the electrical test on the workpiece 12 held by the first transfer head 20 is continuously performed.
 第2の移送ヘッド22がZ2軸方向所定位置に到達するとともに、第3の支持部材18が第2位置に到達して第1の支持プレート94が第2の移送ヘッド22の下方に配置されると、水平駆動部38(図3)が起動する(図6I)。水平駆動部38の起動により、第2の移送ヘッド22は、ガイドローラ84とガイド部材76のレール80との係合の下に、把持部46が第3の支持部材18の第1の支持プレート94上の所望のワーク12(図2)を把持可能なY軸方向所定位置に向かって、移動(図では左方移動)を開始する。この間、第1の移送ヘッド20が把持したワーク12に対する電気的試験は、継続して行われる。 The second transfer head 22 reaches a predetermined position in the Z2 axial direction, the third support member 18 reaches the second position, and the first support plate 94 is disposed below the second transfer head 22. Then, the horizontal drive unit 38 (FIG. 3) is activated (FIG. 6I). By the activation of the horizontal drive unit 38, the second transfer head 22 causes the first support plate of the third support member 18 to be held by the gripping unit 46 under the engagement between the guide roller 84 and the rail 80 of the guide member 76. The movement (to the left in the figure) is started toward a predetermined position in the Y-axis direction where a desired workpiece 12 (FIG. 2) on 94 can be gripped. During this time, the electrical test on the workpiece 12 gripped by the first transfer head 20 is continuously performed.
 第2の移送ヘッド22がY軸方向所定位置に到達すると、水平駆動部38(図3)が停止する一方、第2の昇降駆動部36(図3)が起動して、ガイドローラ70とレール68との係合の下に、第2の移送ヘッド22がZ2軸方向下方へ移動する(図6J)。第2の移送ヘッド22がZ2軸方向所定位置に達すると、第2の昇降駆動部36(図3)が停止し、第2の移送ヘッド22は、第3の支持部材18の第1の支持プレート94の所望の支持部32(図1)に支持したワーク12(図2)を、対応の把持部46に把持する。この間、第1の移送ヘッド20が把持したワーク12に対する電気的試験は、継続して行われる。 When the second transfer head 22 reaches a predetermined position in the Y-axis direction, the horizontal drive unit 38 (FIG. 3) stops, while the second elevating drive unit 36 (FIG. 3) is activated, and the guide roller 70 and rail Under the engagement with 68, the second transfer head 22 moves downward in the Z2 axis direction (FIG. 6J). When the second transfer head 22 reaches a predetermined position in the Z2 axis direction, the second lifting drive unit 36 (FIG. 3) stops, and the second transfer head 22 performs the first support of the third support member 18. The workpiece 12 (FIG. 2) supported by the desired support portion 32 (FIG. 1) of the plate 94 is gripped by the corresponding gripping portion 46. During this time, the electrical test on the workpiece 12 gripped by the first transfer head 20 is continuously performed.
 第2の移送ヘッド22が把持部46にワーク12を把持すると、第2の昇降駆動部36(図3)が起動して、ガイドローラ70とレール68との係合の下に、第2の移送ヘッド22がZ2軸方向上方へ移動する(図6K)。それと同時に、又は第2の移送ヘッド22がZ2軸方向所定位置に到達した後に、水平駆動部38(図3)が起動して、第2の移送ヘッド22は、ガイドローラ84とガイド部材76のレール80との係合の下に、第2の支持部28の近傍の待機位置に向かってY軸方向後方(図では右方)へ移動する。第2の移送ヘッド22がY軸方向後方へ移動している間に、第3の支持部材18は第2の位置から第1の位置への移動を開始する。 When the second transfer head 22 grips the workpiece 12 with the gripping portion 46, the second lifting / lowering drive portion 36 (FIG. 3) is activated, and the second roller driving portion 36 is engaged with the guide roller 70 and the rail 68. The transfer head 22 moves upward in the Z2 axis direction (FIG. 6K). At the same time or after the second transfer head 22 has reached a predetermined position in the Z2 axial direction, the horizontal drive unit 38 (FIG. 3) is activated, and the second transfer head 22 moves between the guide roller 84 and the guide member 76. Under the engagement with the rail 80, it moves rearward in the Y-axis direction (rightward in the figure) toward the standby position in the vicinity of the second support portion 28. While the second transfer head 22 is moving rearward in the Y-axis direction, the third support member 18 starts moving from the second position to the first position.
 第2の移送ヘッド22が待機位置に到達し、第3の支持部材18が第1の位置に到達した時点で、第1の移送ヘッド20が把持したワーク12に対する電気的試験は終了している。そこで、第1の昇降駆動部34(図3)が起動して、ガイドローラ58とレール56との係合の下に、第1の移送ヘッド20がZ1軸方向上方への移動を開始する(図6L)。その後、第1の移送ヘッド20は、図6A~図6Kに示す第2の移送ヘッド22の動作と同様の動作を遂行し、また第2の移送ヘッド22は、図6A~図6Kに示す第1の移送ヘッド20の動作と同様の動作を遂行する。これらの動作を繰り返すことにより、ワーク移送システム10は、第1及び第3の第1の支持部材14、18と第2の支持部材16との間で、ワーク12を効率良く移送することができる。 When the second transfer head 22 reaches the standby position and the third support member 18 reaches the first position, the electrical test on the workpiece 12 gripped by the first transfer head 20 is completed. . Therefore, the first raising / lowering drive unit 34 (FIG. 3) is activated, and the first transfer head 20 starts to move upward in the Z1 axial direction under the engagement between the guide roller 58 and the rail 56 ( FIG. 6L). Thereafter, the first transfer head 20 performs the same operation as the operation of the second transfer head 22 shown in FIGS. 6A to 6K, and the second transfer head 22 performs the first operation shown in FIGS. 6A to 6K. The same operation as that of one transfer head 20 is performed. By repeating these operations, the workpiece transfer system 10 can efficiently transfer the workpiece 12 between the first and third first support members 14, 18 and the second support member 16. .
 ワーク移送システム10による上記したワーク移送動作は、制御部42(図1)が、第1の移送ヘッド20及び第2の移送ヘッド22のいずれか一方によるワーク12の取り出しから移載に至る動作の間に、第1の移送ヘッド20及び第2の移送ヘッド22の他方によるワーク12の回収から返却に至る動作を行うように、第1の昇降駆動部34、第2の昇降駆動部36及び水平駆動部38を制御することによって実行される。このような制御により、第1及び第2の移送ヘッド20、22の待機時間を短縮し、ワーク移送工程のサイクルタイムを削減することができる。 The above-described workpiece transfer operation by the workpiece transfer system 10 is an operation in which the control unit 42 (FIG. 1) operates from the removal of the workpiece 12 to the transfer by one of the first transfer head 20 and the second transfer head 22. In the meantime, the first raising / lowering driving unit 34, the second raising / lowering driving unit 36, and the horizontal are arranged so as to perform operations from the recovery of the work 12 to the return by the other of the first transfer head 20 and the second transfer head 22. This is executed by controlling the drive unit 38. By such control, the waiting time of the first and second transfer heads 20 and 22 can be shortened, and the cycle time of the workpiece transfer process can be reduced.
 上記構成を有するワーク移送システム10によれば、第1及び第2の移送ヘッド20、22がそれぞれ、水平駆動部38による直線的な移動と第1及び第2の昇降駆動部34、36による直線的な移動との組合せによって、第1の支持部材14及び第3の支持部材18に対するワーク12の取出動作及び返却動作、並びに第2の支持部材16に対するワーク12の移載動作及び回収動作を遂行できるので、例えば回転割出式の移送ヘッドを含む構成に比べ、移送ヘッド20、22のイナーシャを軽減して低振動の高速動作を実現することができる。しかも、本来はそれぞれが専用の昇降駆動部及び水平駆動部を備える第1及び第2の移送ヘッド20、22が、動力伝達部40を採用したことにより、水平駆動部38を共通化して第1の昇降駆動部34及び第2の昇降駆動部36と合わせて3つの軸駆動部で動作できる。その結果、ワーク移送システム10の全体を軽量化でき、低振動の高速動作を確実に実現できるとともに、ワーク移送システム10の製造コスト及び維持コスト並びに消費電力を削減することが可能になる。 According to the workpiece transfer system 10 having the above-described configuration, the first and second transfer heads 20 and 22 are moved linearly by the horizontal drive unit 38 and linearly generated by the first and second lifting drive units 34 and 36, respectively. The workpiece 12 is taken out and returned to the first support member 14 and the third support member 18, and the workpiece 12 is transferred to and recovered from the second support member 16 by a combination with the general movement. Therefore, for example, the inertia of the transfer heads 20 and 22 can be reduced and a high-speed operation with low vibration can be realized compared to a configuration including a rotary indexing type transfer head. In addition, since the first and second transfer heads 20 and 22 each originally provided with a dedicated lift drive unit and horizontal drive unit employ the power transmission unit 40, the horizontal drive unit 38 is made common and the first transfer heads 20 and 22 are used. In addition to the lift drive unit 34 and the second lift drive unit 36, the three drive units can be operated. As a result, the entire workpiece transfer system 10 can be reduced in weight, and high-speed operation with low vibration can be reliably realized, and the manufacturing cost and maintenance cost of the workpiece transfer system 10 and the power consumption can be reduced.
 10  ワーク移送システム
 12  ワーク
 14  第1の支持部材
 16  第2の支持部材
 18  第3の支持部材
 20  第1の移送ヘッド
 22  第2の移送ヘッド
 34  第1の昇降駆動部
 36  第2の昇降駆動部
 38  水平駆動部
 40  動力伝達部
 42  制御部
 86  位置決め部
DESCRIPTION OF SYMBOLS 10 Work transfer system 12 Work 14 1st support member 16 2nd support member 18 3rd support member 20 1st transfer head 22 2nd transfer head 34 1st raising / lowering drive part 36 2nd raising / lowering drive part 38 Horizontal drive part 40 Power transmission part 42 Control part 86 Positioning part

Claims (5)

  1.  ワークを支持する第1の支持部材と、
     前記第1の支持部材から離間して配置され、ワークを支持する第2の支持部材と、
     前記第2の支持部材から前記第1の支持部材とは反対側に離間して配置され、ワークを支持する第3の支持部材と、
     ワークを把持して前記第1の支持部材と前記第2の支持部材との間で移送する第1の移送ヘッドと、
     ワークを把持して前記第2の支持部材と前記第3の支持部材との間で移送する第2の移送ヘッドと、
     前記第1の支持部材及び前記第2の支持部材に対し前記第1の移送ヘッドを昇降動作させる第1の昇降駆動部と、
     前記第2の支持部材及び前記第3の支持部材に対し前記第2の移送ヘッドを昇降動作させる第2の昇降駆動部と、
     前記第1の支持部材の上方位置と前記第2の支持部材の上方位置との間で前記第1の移送ヘッドを水平移動させるとともに、前記第2の支持部材の上方位置と前記第3の支持部材の上方位置との間で前記第2の移送ヘッドを水平移動させる水平駆動部と、
     前記第1の移送ヘッド及び前記第2の移送ヘッドと前記水平駆動部との間で駆動力を解除可能に伝達する動力伝達部と、
    を具備するワーク移送システム。
    A first support member for supporting the workpiece;
    A second support member disposed away from the first support member and supporting the workpiece;
    A third support member arranged to be spaced apart from the second support member on the side opposite to the first support member and supporting a workpiece;
    A first transfer head for gripping and transferring a workpiece between the first support member and the second support member;
    A second transfer head for gripping and transferring a workpiece between the second support member and the third support member;
    A first raising / lowering drive unit for raising and lowering the first transfer head relative to the first support member and the second support member;
    A second raising / lowering drive unit for raising and lowering the second transfer head relative to the second support member and the third support member;
    The first transfer head is horizontally moved between an upper position of the first support member and an upper position of the second support member, and the upper position of the second support member and the third support are moved. A horizontal driving unit that horizontally moves the second transfer head between an upper position of the member;
    A power transmission unit for releasably transmitting a driving force between the first transfer head and the second transfer head and the horizontal drive unit;
    A workpiece transfer system comprising:
  2.  前記第1の移送ヘッド及び前記第2の移送ヘッドを交互に、前記第2の支持部材の上方の所定位置に位置決めする位置決め部をさらに具備する、請求項1に記載のワーク移送システム。 The workpiece transfer system according to claim 1, further comprising a positioning unit that alternately positions the first transfer head and the second transfer head at a predetermined position above the second support member.
  3.  前記第1の昇降駆動部、前記第2の昇降駆動部及び前記水平駆動部を制御する制御部を具備し、
     前記第1の移送ヘッドは、前記制御部の制御により、前記第1の支持部材に支持されたワークを把持して前記第1の支持部材から取り出し、取り出したワークを前記第2の支持部材に移載し、前記第2の支持部材に移載したワークを把持して前記第2の支持部材から回収し、回収したワークを前記第1の支持部材に返却するように動作し、
     前記第2の移送ヘッドは、前記制御部の制御により、前記第3の支持部材に支持されたワークを把持して前記第3の支持部材から取り出し、取り出したワークを前記第2の支持部材に移載し、前記第2の支持部材に移載したワークを把持して前記第2の支持部材から回収し、回収したワークを前記第3の支持部材に返却するように動作する、
    請求項1に記載のワーク移送システム。
    A controller for controlling the first elevating drive unit, the second elevating drive unit, and the horizontal drive unit;
    The first transfer head grips and takes out the work supported by the first support member from the first support member under the control of the control unit, and takes the taken-out work as the second support member. Move and transfer, move the workpiece transferred to the second support member, collect from the second support member, operate to return the recovered workpiece to the first support member,
    The second transfer head grips and takes out the work supported by the third support member from the third support member under the control of the control unit, and takes the taken-out work as the second support member. Transferring, operating to move the workpiece transferred to the second support member, collect it from the second support member, and return the recovered workpiece to the third support member;
    The workpiece transfer system according to claim 1.
  4.  前記制御部は、前記第1の移送ヘッド及び前記第2の移送ヘッドのいずれか一方によるワークの取り出しから移載に至る動作の間に、前記第1の移送ヘッド及び前記第2の移送ヘッドの他方によるワークの回収から返却に至る動作を行うように、前記第1の昇降駆動部、前記第2の昇降駆動部及び前記水平駆動部を制御する、請求項3に記載のワーク移送システム。 The control unit is configured to perform the operations of the first transfer head and the second transfer head during the operation from taking out the workpiece to transferring by the one of the first transfer head and the second transfer head. The workpiece transfer system according to claim 3, wherein the first raising / lowering driving unit, the second raising / lowering driving unit, and the horizontal driving unit are controlled so as to perform an operation from collection of the workpiece to return by the other.
  5.  前記第1の支持部材、前記第2の支持部材及び前記第3の支持部材は、複数のワークを所定の基準配置で支持し、前記第1の移送ヘッド及び前記第2の移送ヘッドは、複数のワークを前記基準配置で把持する、請求項1に記載のワーク移送システム。 The first support member, the second support member, and the third support member support a plurality of workpieces in a predetermined reference arrangement, and the first transfer head and the second transfer head include a plurality of workpieces. The workpiece transfer system according to claim 1, wherein the workpiece is gripped in the reference arrangement.
PCT/JP2013/082484 2013-12-03 2013-12-03 Workpiece transfer system WO2015083239A1 (en)

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CN105564985A (en) * 2016-02-05 2016-05-11 江苏三杰新能源有限公司 Conveyor for weighing batteries
CN111015959A (en) * 2019-12-10 2020-04-17 福建省德化鸿泰陶瓷有限公司 Paster mechanism for processing ceramic disc and use method thereof
CN111037909A (en) * 2019-12-12 2020-04-21 荆门微田智能科技有限公司 Non-contact high-precision conformal laminating manipulator for flexible curved electronic film

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CN105564985A (en) * 2016-02-05 2016-05-11 江苏三杰新能源有限公司 Conveyor for weighing batteries
CN111015959A (en) * 2019-12-10 2020-04-17 福建省德化鸿泰陶瓷有限公司 Paster mechanism for processing ceramic disc and use method thereof
CN111037909A (en) * 2019-12-12 2020-04-21 荆门微田智能科技有限公司 Non-contact high-precision conformal laminating manipulator for flexible curved electronic film

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