JP6584320B2 - Work transfer system - Google Patents

Description

  The present invention relates to a workpiece transfer system.

  Various types of handlers are known as an apparatus for supplying and discharging an electronic device with respect to a test apparatus that performs an electrical test of an electronic device such as an IC device. For example, Patent Document 1 individually corrects the position of a device gripping unit based on information on a plurality of device gripping units that individually grip electronic devices and the attitude and position of the electronic device gripped by each of the device gripping units. Disclosed is a handler comprising position correction means.

  In the conventional handler, a plurality of electronic devices are supported in a reference arrangement corresponding to the arrangement of the plurality of test sockets included in the test apparatus, the electronic device is transferred between the support member and the test socket, and the test socket is provided. And a rotary indexing transfer mechanism that press-contacts the electronic device.

International Publication No. 2008/13657

  In a transfer system that transfers a workpiece between a first support member and a second support member as well as a handler, it is desired to realize a high-speed operation with low vibration.

  According to one embodiment of the present invention, a first support member that supports a workpiece, a second support member that is spaced apart from the first support member, and that supports the workpiece, and a first support member from the second support member. A third support member that is disposed on the opposite side of the support member and supports the workpiece, and a first transfer that grips the workpiece and transfers it between the first support member and the second support member. A head, a second transfer head for gripping and transferring the workpiece between the second support member and the third support member, and a first transfer head relative to the first support member and the second support member A first raising / lowering drive unit that moves the second transfer head up and down relative to the second support member and the third support member, and an upper position of the first support member And horizontally moving the first transfer head between the second support member and the upper position of the second support member. A horizontal drive unit that horizontally moves the second transfer head between an upper position of the support member and an upper position of the third support member, and between the first transfer head, the second transfer head, and the horizontal drive unit And a power transmission section for releasably transmitting the driving force.

  According to the workpiece transfer system of one aspect, the first and second transfer heads are respectively combined with the linear movement by the horizontal drive unit and the linear movement by the first and second lifting drive units. Since the transfer operation of the workpiece with respect to the first support member, the second support member, and the third support member can be performed, the inertia of the transfer head is reduced and the vibration is reduced as compared with a configuration including a rotary indexing transfer head, for example. High speed operation can be realized. In addition, since the first and second transfer heads, each originally provided with a dedicated lift drive unit and horizontal drive unit, employ a power transmission unit, the horizontal drive unit is shared and the first lift drive unit and It can be operated by three driving units in combination with the second lifting / lowering driving unit. As a result, the entire workpiece transfer system can be reduced in weight, and high-speed operation with low vibration can be realized with certainty, and the manufacturing cost and maintenance cost of the workpiece transfer system can be reduced.

1 is a perspective view schematically showing an overall configuration of a workpiece transfer system according to a first embodiment. It is a partial cross section front view which shows roughly the supporting member which the workpiece | work transfer system of FIG. 1 has. It is a perspective view which shows roughly the transfer head which the workpiece | work transfer system of FIG. 1 has. It is a perspective view which shows roughly the transfer head which the workpiece | work transfer system of FIG. 1 has. It is a perspective view which shows a part of transfer head roughly. It is a perspective view which shows a part of transfer head roughly. It is a perspective view which shows a part of transfer head roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly. It is a figure which shows operation | movement of a workpiece | work transfer system roughly.

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Corresponding components are denoted by common reference symbols throughout the drawings.
FIG. 1 shows the overall configuration of a workpiece transfer system 10 according to the first embodiment. FIG. 2 shows a support member included in the workpiece transfer system 10. 3 and 4 show a transfer head included in the workpiece transfer system 10. The workpiece transfer system 10 can be adopted as a part of a handler that supplies and discharges an electronic device to and from a test apparatus that performs an electrical test of an electronic device such as an IC device or an LSI device. However, the use of the workpiece transfer system 10 is not limited to this.

  As shown in FIG. 1, the workpiece transfer system 10 includes a first support member 14 that supports the workpiece 12 (FIG. 2), and a second support member that is disposed apart from the first support member 14 and supports the workpiece 12. The second support member 16, the third support member 18 that is spaced apart from the second support member 16 on the opposite side of the first support member 14, and supports the workpiece 12, and the workpiece 12 is gripped by the first support member 16. The first transfer head 20 that transfers between the first support member 14 and the second support member 16, and the workpiece 12 is gripped and transferred between the second support member 16 and the third support member 18. And a base 24 on which the first support member 14, the third support member 18, the first transfer head 20, and the second transfer head 22 are movably mounted.

  The base 24 is normally arranged horizontally on the floor on which the workpiece transfer system 10 is installed. In a predetermined region of the base 24, an opening 26 is provided that allows access from above the base 24 to below the base. The second support member 16 is fixedly disposed at a position overlapping the opening 26 below the base 24. The second support member 16 is provided with a second support portion 28 that supports the workpiece 12. The second support portion 28 is disposed inside the opening 26 of the base 24. In the illustrated embodiment, the second support member 16 includes a plurality of second support portions 28 that support the plurality of workpieces 12 in a predetermined reference arrangement (for example, a 2 × 8 matrix arrangement).

  The first support member 14 can be configured to be movable along the surface 24 a of the base 24 according to a horizontal one-axis (X1 axis) position command. The third support member 18 can have a configuration that can be moved along the surface 24 a of the base 24 according to a horizontal one-axis (X2 axis) position command. The X1 axis and the X2 axis are parallel to each other.

  As shown in FIG. 2, the first support member 14 has a first support portion 30 that supports the workpiece 12. In the illustrated embodiment, the first support member 14 includes a plurality of first support portions 30 that can support one workpiece 12 at a time. In this case, each of the plurality of first support portions 30 has the same size and contour shape, and is in each of a direction parallel to a direction parallel to the moving direction (X1 axis) of the first support member 14 and a direction orthogonal thereto. Arranged at equal intervals (FIG. 1). The first support member 14 can have the same number of first support portions 30 as the second support portions 28 in the same reference arrangement. Alternatively, the first support member 14 may have a greater number of first support portions 30 than the second support portion 28 in an arrangement different from the reference arrangement. In this case, the first support part 30 is configured to be able to support the workpiece 12 on at least one of the first support parts 30 in a reference arrangement.

  The third support member 18 has substantially the same configuration as the first support member 14. That is, the third support member 18 has a third support portion 32 that supports the workpiece 12 (FIG. 1). In the illustrated embodiment, the third support member 18 includes a plurality of third support portions 32 that can support one workpiece 12 each. In this case, each of the plurality of third support portions 32 has the same size and contour shape, and is in each of a direction parallel to a direction parallel to the moving direction (X2 axis) of the third support member 18. Arranged at equal intervals. The third support member 18 can have the same number of third support portions 32 as the second support portions 28 in the same reference arrangement. Alternatively, the third support member 18 may have a larger number of third support portions 32 than the second support portion 28 in an arrangement different from the reference arrangement. In this case, the third support portion 32 is configured to support the workpiece 12 in at least one of the third support portions 32 in a reference arrangement.

  As shown in FIG. 3, the workpiece transfer system 10 includes a first raising / lowering operation for raising and lowering the first transfer head 20 with respect to the first support member 14 (FIG. 1) and the second support member 16 (FIG. 1). The drive unit 34, the second lifting drive unit 36 that moves the second transfer head 22 up and down with respect to the second support member 16 and the third support member 18 (FIG. 1), and the first support member 14 The first transfer head 20 is moved horizontally between the upper position and the upper position of the second support member 16, and between the upper position of the second support member 16 and the upper position of the third support member 18. The horizontal drive unit 38 that horizontally moves the second transfer head 22, and the first transfer head 20 and the power transmission unit that transmits the driving force releasably between the second transfer head 22 and the horizontal drive unit 38. 40.

  The first transfer head 20 is fed in the horizontal Y-axis direction by driving the horizontal drive unit 38, and is fed in the vertical Z1 axis direction orthogonal to the Y-axis by driving the first lifting / lowering drive unit 34. The second transfer head 22 performs a feed operation in the horizontal Y-axis direction by driving the horizontal drive unit 38, while performing a feed operation in the vertical Z2 axis direction orthogonal to the Y-axis by driving the second lift drive unit 36. The Z1 axis and the Z2 axis are parallel to each other.

  The first transfer head 20 moves horizontally in the Y-axis direction above the base 24 (FIG. 1) by driving the horizontal driving unit 38, and the first support member 14 by driving the first lifting / lowering driving unit 34. By moving up and down with respect to (FIG. 1) and the second support member 16 (FIG. 1), the workpiece 12 (FIG. 2) supported by the first support member 14 is gripped and removed from the first support member 14. The removed workpiece 12 is transferred to the second support member 16, the workpiece transferred to the second support member 16 is gripped and collected from the second support member 16, and the collected workpiece 12 is transferred to the first support member 16. It can operate to return to the support member 14.

  The second transfer head 22 moves horizontally in the Y-axis direction above the base 24 (FIG. 1) by driving the horizontal driving unit 38, and the second support member 16 by driving the second lifting / lowering driving unit 36. By moving up and down with respect to (FIG. 1) and the third support member 18 (FIG. 1), the workpiece 12 (FIG. 2) supported by the third support member 18 is gripped and removed from the third support member 18. The removed workpiece 12 is transferred to the second support member 16, the workpiece transferred to the second support member 16 is gripped and recovered from the second support member 16, and the recovered workpiece 12 is transferred to the third support member 16. It can operate to return to the support member 18.

  As shown in FIG. 1, the workpiece transfer system 10 includes a control unit 42 that controls the above-described operations of the first support member 14, the third support member 18, the first transfer head 20, and the second transfer head 22. Is provided. The control unit 42 can include an operation panel and a display used by the operator.

  The first support member 14, the second support member 16, and the third support member 18 support the plurality of workpieces 12 in a reference arrangement, and the first transfer head 20 and the second transfer head 22 include a plurality of workpieces 12. In the configuration of the illustrated embodiment in which the workpiece 12 is gripped in a reference arrangement, the position of the first support portion 30 (or the position of the first support member 14) and the position of the third support portion 32 (or the third support member). 18 position) includes a horizontal axis (X1 axis) on which the first support member 14 operates, a horizontal axis (X2 axis) on which the third support member 18 operates, and the first and second transports. It can be expressed by respective coordinate values of one horizontal axis (Y axis) on which the heads 20 and 22 operate.

  FIG. 4 shows the first transfer head 20 in the illustrated embodiment. The first transfer head 20 has a plurality of gripping portions 46 provided in the head portion 44 at the tip thereof in an arrangement corresponding to the reference arrangement of the workpiece 12 (FIG. 2). Each gripping portion 46 is connected to a vacuum source (not shown) and can grip the workpiece 12 releasably by vacuum suction. Note that the gripping structure of the gripping portion 46 is not limited to vacuum suction, and magnetic suction, grasping by a finger-like member, or the like can be employed. The second transfer head 22 (FIG. 1) in the illustrated embodiment has substantially the same configuration as the first transfer head 20. That is, similarly to the first transfer head 20, the second transfer head 22 includes a plurality of grip portions provided in an arrangement corresponding to the reference arrangement of the workpiece 12 (FIG. 2).

  5A-5C show details of the drive structure of the first and second transfer heads 20,22. Hereinafter, the configuration of the workpiece transfer system 10 will be described in more detail with reference to FIGS. 1 to 5C.

  The first elevating drive unit 34 includes a power source 48 such as an electric motor supported by the base 24, a feed screw device 52 supported by the base 24 and connected to the power source 48 via a belt 50 and the like, And a guide member 54 integrally connected to a nut element (not shown) of the feed screw device 52. The feed screw device 52 reciprocates the guide member 54 in the Z1 axis direction by driving the power source 48. The guide member 54 has a rail 56 that extends in a direction parallel to the Y axis. The first transfer head 20 is provided with a pair of guide rollers 58 that engage with the rails 56. The first transfer head 20 can reciprocate in the Z1 axis direction by driving the power source 48 with the pair of guide rollers 58 engaged with the rail 56 (FIG. 5A), and can be moved along the rail 56 in the Y axis direction. Can be moved back and forth.

  The second elevating drive unit 36 includes a power source 60 such as an electric motor supported by the base 24, a feed screw device 64 supported by the base 24 and connected to the power source 60 via a belt 62 and the like, And a guide member 66 integrally connected to a nut element (not shown) of the feed screw device 64. The feed screw device 64 reciprocates the guide member 66 in the Z2 axis direction by driving the power source 60. The guide member 66 has a rail 68 extending in a direction parallel to the Y axis. The second transfer head 22 is provided with a pair of guide rollers 70 that engage with the rails 68. The second transfer head 22 can reciprocate in the Z2 axis direction by driving the power source 60 in a state where the pair of guide rollers 70 are engaged with the rail 68 (FIG. 5A), and in the Y axis direction along the rail 68. Can be moved back and forth.

  The horizontal drive unit 38 is integrally coupled to a power source 72 such as an electric motor supported by the base 24, a feed screw device 74 connected to the power source 72, and a nut element (not shown) of the feed screw device 74. The guide member 76 is provided. The feed screw device 74 reciprocates the guide member 76 in the Y-axis direction by driving the power source 72. The guide member 76 includes a rail 78 extending in a direction parallel to the Z1 axis and a rail 80 extending in a direction parallel to the Z2 axis. The first transfer head 20 is provided with a pair of guide rollers 82 that engage with the rails 78. The second transfer head 22 is provided with a pair of guide rollers 84 that engage with the rails 80. The first transfer head 20 can reciprocate in the Y-axis direction by driving the power source 72 with the pair of guide rollers 82 engaged with the rail 78 (FIG. 5B), and the Z1-axis direction along the rail 78. Can be moved back and forth. The second transfer head 22 can reciprocate in the Y-axis direction by driving the power source 72 with the pair of guide rollers 84 engaged with the rail 80 (FIG. 5B), and in the Z2-axis direction along the rail 80. Can be moved back and forth.

  The power transmission unit 40 includes a rail 78 and a rail 80 of the guide member 76, a pair of guide rollers 82 of the first transfer head 20, and a pair of guide rollers 84 of the second transfer head 22 (see FIG. 5B). The operation of the power transmission unit 40 will be described later.

  The workpiece transfer system 10 further includes a positioning unit 86 that alternately positions the first transfer head 20 and the second transfer head 22 at a predetermined position in the Y-axis direction above the second support member 16. The positioning portion 86 includes a rail 88 provided on the first transfer head 20 so as to extend in a direction parallel to the Z1 axis, and a rail 90 provided on the second transfer head 22 so as to extend in a direction parallel to the Z2 axis. And a pair of guide rollers 92 that are fixed to a predetermined position of the base 24 and engage with one of the rail 88 and the rail 90. The first transfer head 20 can reciprocate in the Z1 axis direction in a state where the rail 88 is engaged with the pair of guide rollers 92 (FIG. 5C), and the plurality of gripping portions 46 (FIG. 4) correspond to the second. The support portion 28 is positioned at a position that is accurately aligned in the Z1 axis direction. The second transfer head 22 can reciprocate in the Z2 axis direction in a state where the rail 90 is engaged with the pair of guide rollers 92 (FIG. 5C), and the plurality of gripping portions 46 correspond to the second support portions 28 corresponding thereto. Is positioned at a position that is accurately aligned in the Z2 axis direction. When the rails 88 and 90 are engaged with the pair of guide rollers 92, the first and second transfer heads 20 and 22 cannot move in the Y-axis direction.

  Next, referring to FIGS. 6A to 6L, the workpiece transfer operation by the workpiece transfer system 10 and the power transmission unit 40 (rail 78, rail 80, guide roller 82, guide roller 84) during the workpiece transfer operation are described. The operation will be described. Hereinafter, an embodiment in which the workpiece transfer system 10 is applied to a handler that supplies and discharges an electronic device to and from a test apparatus that performs an electrical test of the electronic device will be described. In this embodiment, the workpiece 12 is an electronic device, the second support member 16 is a test apparatus that performs an electrical test on the electronic device, and the second support portion 28 is an electronic device during the electrical test. A test socket that supports the device. The first support member 14 and the third support member 18 include a first supply-side support plate 94 that supports a plurality of workpieces (electronic devices) 12 and a second support portion (test socket), respectively. And a second discharge-side support plate 96 that supports a plurality of workpieces (electronic devices) 12 transferred from 28 (FIG. 1). Each support member 14, 18 has a first position where the first and second transfer heads 20, 22 can place the workpiece (electronic device) 12 on the second support plate 96, and the first and second The transfer heads 20 and 22 can move in the X1 axis direction or the X2 axis direction between the second position where the work (electronic device) 12 can be taken out from the first support plate 94.

  FIG. 6A shows a state immediately before the electrical test is performed on the workpiece 12 (FIG. 2) gripped by the grip portion 46 of the second transfer head 22 via the second support portion 28 and the test is finished. Show. In this state, in the second transfer head 22, the guide roller 70 is engaged with the rail 68 of the guide member 66 (FIG. 3), and is connected to the second lift drive unit 36 (FIG. 3). Is detached from the rail 80 of the guide member 76 and separated from the horizontal drive unit 38 (FIG. 3), and the rail 90 is engaged with the guide roller 92 on the base 24 (FIG. 1), and the Y-axis direction is predetermined. Is positioned. The first transfer head 20 takes out the workpiece 12 from the first support member 14 and is disposed at a standby position in the vicinity of the second support portion 28. In this state, the guide roller 58 engages with the rail 56 of the guide member 54 (FIG. 3) and is connected to the first elevating drive unit 34 (FIG. 3), and the guide roller 82 is connected to the rail 78 of the guide member 76. Engaged and connected to the horizontal drive 38 (FIG. 3). Further, both the first support member 14 and the third support member 18 are placed at the first position, and the second support plates 96 of both are arranged adjacent to the second support portion 28. ing.

  When the electrical test is completed in the state of FIG. 6A, the second lifting drive unit 36 (FIG. 3) is activated, and the second transfer head 22 is moved to Z2 under the engagement between the guide roller 70 and the rail 68. The movement upward in the axial direction is started (FIG. 6B). Accordingly, the second transfer head 22 picks up and collects the workpiece 12 (FIG. 2) gripped by the gripping portion 46 from the second support portion 28. At this time, the roller 84 of the second transfer head 22 starts to engage with the rail 80, and the second transfer head 22 is connected to the horizontal drive unit 38 (FIG. 3).

  When the second transfer head 22 further moves upward in the Z2 axis direction, the rail 90 is detached from the guide roller 92, and the second transfer head 22 can move in the Y axis direction (FIG. 6C). At substantially the same time when the rail 90 is detached from the guide roller 92, the first raising / lowering drive unit 34 (FIG. 3) is activated, and the first transfer head 20 is moved under the engagement between the guide roller 58 and the rail 56. Starts downward movement in the Z1-axis direction. At this time, both the first and second transfer heads 20 and 22 are connected to the horizontal drive unit 38 (FIG. 3).

  When the second transfer head 22 rises to a position higher than the third support member 18 and the first transfer head 20 descends to a position substantially the same height as the second transfer head 22, the horizontal drive unit 38. (FIG. 3) is activated (FIG. 6D). By the activation of the horizontal drive unit 38, the first transfer head 20 starts moving forward in the Y-axis direction (leftward in the figure) under the engagement between the guide roller 82 and the rail 78, and in synchronization therewith, Under the engagement between the guide roller 84 and the rail 80, the second transfer head 22 starts moving forward in the Y-axis direction (leftward in the figure).

  When the first transfer head 20 reaches a predetermined position in the Y-axis direction above the second support portion 28, the horizontal drive portion 38 (FIG. 3) stops, while the first lift drive portion 34 (FIG. 3) By continuing to operate, the first transfer head 20 is lowered toward the second support portion 28 (FIG. 6E). During this time, the second transfer head 22 reaches a predetermined position in the Y-axis direction and a predetermined height in the Z2-axis direction above the third support member 18, and the second elevating drive unit 36 (FIG. 3) stops. , Rests above the third support member 18. When the first transfer head 20 is lowered to a predetermined height in the Z1 axial direction above the second support portion 28, the rail 88 begins to engage with the guide roller 92 on the base 24 (FIG. 1), and the Y axial direction. Is positioned at a predetermined position.

  When the first transfer head 20 is further lowered toward the second support portion 28, the guide roller 82 is detached from the rail 78 of the guide member 76 and separated from the horizontal drive portion 38 (FIG. 3). (FIG. 6F). After that, the first transfer head 20 transfers the workpiece 12 (FIG. 2) gripped by the grip portion 46 to the second support member 16 at a predetermined position in the Z1 axis direction and transfers it to the corresponding second support portion 28. The workpiece 12 is loaded, and the workpiece 12 is pressed against the second support portion 28. In this state, an electrical test is started on the workpiece 12 gripped by the first transfer head 20.

  While the electrical test is being performed on the workpiece 12 gripped by the first transfer head 20, the second lifting drive unit 36 (FIG. 3) is activated and the guide roller 70 and the rail 68 are engaged. The second transfer head 22 moves downward in the Z2 axial direction (FIG. 6G). When the second transfer head 22 reaches a predetermined position in the Z2 axis direction, the second lifting / lowering drive unit 36 (FIG. 3) stops, and the second transfer head 22 moves the workpiece 12 (FIG. 2) held by the holding unit 46. ) Is returned to the corresponding support portion 32 (FIG. 1) of the second support plate 96 of the third support member 18.

  When the return of the workpiece 12 is completed, the second raising / lowering drive unit 36 (FIG. 3) is restarted, and the second transfer head 22 is moved upward in the Z2 axial direction under the engagement between the guide roller 70 and the rail 68. (Fig. 6H). While the second transfer head 22 is moving upward in the Z2 axis direction, the third support member 18 starts moving from the first position to the second position. During this time, the electrical test on the workpiece 12 held by the first transfer head 20 is continuously performed.

  The second transfer head 22 reaches a predetermined position in the Z2 axial direction, the third support member 18 reaches the second position, and the first support plate 94 is disposed below the second transfer head 22. Then, the horizontal drive unit 38 (FIG. 3) is activated (FIG. 6I). By the activation of the horizontal drive unit 38, the second transfer head 22 causes the first support plate of the third support member 18 to be held by the gripping unit 46 under the engagement between the guide roller 84 and the rail 80 of the guide member 76. The movement (to the left in the figure) is started toward a predetermined position in the Y-axis direction where a desired workpiece 12 (FIG. 2) on 94 can be gripped. During this time, the electrical test on the workpiece 12 gripped by the first transfer head 20 is continuously performed.

  When the second transfer head 22 reaches a predetermined position in the Y-axis direction, the horizontal drive unit 38 (FIG. 3) stops, while the second elevating drive unit 36 (FIG. 3) is activated, and the guide roller 70 and rail Under the engagement with 68, the second transfer head 22 moves downward in the Z2 axis direction (FIG. 6J). When the second transfer head 22 reaches a predetermined position in the Z2 axis direction, the second lifting drive unit 36 (FIG. 3) stops, and the second transfer head 22 performs the first support of the third support member 18. The workpiece 12 (FIG. 2) supported by the desired support portion 32 (FIG. 1) of the plate 94 is gripped by the corresponding gripping portion 46. During this time, the electrical test on the workpiece 12 gripped by the first transfer head 20 is continuously performed.

  When the second transfer head 22 grips the workpiece 12 with the gripping portion 46, the second lifting / lowering drive portion 36 (FIG. 3) is activated, and the second roller driving portion 36 is engaged with the guide roller 70 and the rail 68. The transfer head 22 moves upward in the Z2 axis direction (FIG. 6K). At the same time or after the second transfer head 22 has reached a predetermined position in the Z2 axial direction, the horizontal drive unit 38 (FIG. 3) is activated, and the second transfer head 22 moves between the guide roller 84 and the guide member 76. Under the engagement with the rail 80, it moves rearward in the Y-axis direction (rightward in the figure) toward the standby position in the vicinity of the second support portion 28. While the second transfer head 22 is moving rearward in the Y-axis direction, the third support member 18 starts moving from the second position to the first position.

  When the second transfer head 22 reaches the standby position and the third support member 18 reaches the first position, the electrical test on the workpiece 12 gripped by the first transfer head 20 is completed. . Therefore, the first raising / lowering drive unit 34 (FIG. 3) is activated, and the first transfer head 20 starts to move upward in the Z1 axial direction under the engagement between the guide roller 58 and the rail 56 ( FIG. 6L). Thereafter, the first transfer head 20 performs the same operation as the operation of the second transfer head 22 shown in FIGS. 6A to 6K, and the second transfer head 22 performs the first operation shown in FIGS. 6A to 6K. The same operation as that of one transfer head 20 is performed. By repeating these operations, the workpiece transfer system 10 can efficiently transfer the workpiece 12 between the first and third first support members 14, 18 and the second support member 16. .

  The above-described workpiece transfer operation by the workpiece transfer system 10 is an operation in which the control unit 42 (FIG. 1) operates from the removal of the workpiece 12 to the transfer by one of the first transfer head 20 and the second transfer head 22. In the meantime, the first raising / lowering driving unit 34, the second raising / lowering driving unit 36, and the horizontal are arranged so as to perform operations from the recovery of the work 12 to the return by the other of the first transfer head 20 and the second transfer head 22. This is executed by controlling the drive unit 38. By such control, the waiting time of the first and second transfer heads 20 and 22 can be shortened, and the cycle time of the workpiece transfer process can be reduced.

  According to the workpiece transfer system 10 having the above-described configuration, the first and second transfer heads 20 and 22 are moved linearly by the horizontal drive unit 38 and linearly generated by the first and second lifting drive units 34 and 36, respectively. The workpiece 12 is taken out and returned to the first support member 14 and the third support member 18, and the workpiece 12 is transferred to and recovered from the second support member 16 by a combination with the general movement. Therefore, for example, the inertia of the transfer heads 20 and 22 can be reduced and a high-speed operation with low vibration can be realized compared to a configuration including a rotary indexing type transfer head. In addition, since the first and second transfer heads 20 and 22 each originally provided with a dedicated lift drive unit and horizontal drive unit employ the power transmission unit 40, the horizontal drive unit 38 is made common and the first transfer heads 20 and 22 are used. In addition to the lift drive unit 34 and the second lift drive unit 36, the three drive units can be operated. As a result, the entire workpiece transfer system 10 can be reduced in weight, and high-speed operation with low vibration can be reliably realized, and the manufacturing cost and maintenance cost of the workpiece transfer system 10 and the power consumption can be reduced.

DESCRIPTION OF SYMBOLS 10 Work transfer system 12 Work 14 1st support member 16 2nd support member 18 3rd support member 20 1st transfer head 22 2nd transfer head 34 1st raising / lowering drive part 36 2nd raising / lowering drive part 38 Horizontal drive part 40 Power transmission part 42 Control part 86 Positioning part

Claims (6)

A first support member for supporting the workpiece;
A second support member disposed away from the first support member and supporting the workpiece;
A third support member arranged to be spaced apart from the second support member on the side opposite to the first support member and supporting a workpiece;
A first transfer head for gripping and transferring a workpiece between the first support member and the second support member;
A second transfer head for gripping and transferring a workpiece between the second support member and the third support member;
A first raising / lowering drive unit for raising and lowering the first transfer head relative to the first support member and the second support member;
A second raising / lowering drive unit for raising and lowering the second transfer head relative to the second support member and the third support member;
The first transfer head is horizontally moved between an upper position of the first support member and an upper position of the second support member, and the upper position of the second support member and the third support are moved. A horizontal driving unit that horizontally moves the second transfer head between an upper position of the member;
A power transmission unit for releasably transmitting a driving force between the first transfer head and the second transfer head and the horizontal drive unit;
A workpiece transfer system comprising:   The workpiece transfer system according to claim 1, further comprising a positioning unit that alternately positions the first transfer head and the second transfer head at a predetermined position above the second support member. A controller for controlling the first elevating drive unit, the second elevating drive unit, and the horizontal drive unit;
The first transfer head grips and takes out the work supported by the first support member from the first support member under the control of the control unit, and takes the taken-out work as the second support member. Move and transfer, move the workpiece transferred to the second support member, collect from the second support member, operate to return the recovered workpiece to the first support member,
The second transfer head grips and takes out the work supported by the third support member from the third support member under the control of the control unit, and takes the taken-out work as the second support member. Transferring, operating to move the workpiece transferred to the second support member, collect it from the second support member, and return the recovered workpiece to the third support member;
The workpiece transfer system according to claim 1.   The control unit is configured to perform the operations of the first transfer head and the second transfer head during the operation from taking out the workpiece to transferring by the one of the first transfer head and the second transfer head. The workpiece transfer system according to claim 3, wherein the first raising / lowering driving unit, the second raising / lowering driving unit, and the horizontal driving unit are controlled so as to perform an operation from collection of the workpiece to return by the other.   The first support member, the second support member, and the third support member support a plurality of workpieces in a predetermined reference arrangement, and the first transfer head and the second transfer head include a plurality of workpieces. The workpiece transfer system according to claim 1, wherein the workpiece is gripped in the reference arrangement. The horizontal driving unit is made common to said first transfer head and the second transfer heads, thereby horizontally moving the second transfer head in synchronism with the horizontal movement of the first transfer head Configured to be able to
The power transmission unit is provided in each of the first transfer head, the second transfer head, and the horizontal drive unit, and grips a workpiece out of the first transfer head and the second transfer head. While the transmission of the driving force to one transfer head is being released, the horizontal drive unit can horizontally move the other transfer head that grips the workpiece.
The workpiece transfer system according to any one of claims 1 to 5.

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