WO2015066448A1 - Appareil et procédé pour distribution sous pression à contact direct à l'aide d'un élément flottant d'extraction de liquide - Google Patents

Appareil et procédé pour distribution sous pression à contact direct à l'aide d'un élément flottant d'extraction de liquide Download PDF

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Publication number
WO2015066448A1
WO2015066448A1 PCT/US2014/063378 US2014063378W WO2015066448A1 WO 2015066448 A1 WO2015066448 A1 WO 2015066448A1 US 2014063378 W US2014063378 W US 2014063378W WO 2015066448 A1 WO2015066448 A1 WO 2015066448A1
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WO
WIPO (PCT)
Prior art keywords
liquid
container
skimmer
containing material
pressure dispensing
Prior art date
Application number
PCT/US2014/063378
Other languages
English (en)
Inventor
Glenn M. Tom
Original Assignee
Advanced Technology Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials, Inc. filed Critical Advanced Technology Materials, Inc.
Publication of WO2015066448A1 publication Critical patent/WO2015066448A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D88/00—Large containers
    • B65D88/54—Large containers characterised by means facilitating filling or emptying
    • B65D88/548—Large containers characterised by means facilitating filling or emptying by pneumatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D90/00—Component parts, details or accessories for large containers
    • B65D90/02—Wall construction
    • B65D90/04—Linings
    • B65D90/046—Flexible liners, e.g. loosely positioned in the container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0238—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers
    • B67D7/0266—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid
    • B67D7/0272—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants utilising compressed air or other gas acting directly or indirectly on liquids in storage containers by gas acting directly on the liquid specially adapted for transferring liquids of high purity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2590/00—Component parts, details or accessories for large containers
    • B65D2590/02—Wall construction
    • B65D2590/04—Linings
    • B65D2590/043—Flexible liners
    • B65D2590/046—Bladders

Definitions

  • the present disclosure relates generally to fluid handling and dispensing systems, such as may be used to dispense contents of containers using pressurized gas. More specifically, the disclosure relates to direct contact pressure dispensing of liquid or liquid- containing materials from liner-less containers (wherein such liquid-containing materials are in direct contact with pressurized gas) while reducing dissolution of pressurized gas into liquids to be dispensed, and associated disclosures related to fabrication, use, and deployment of such systems.
  • liquids and liquid-containing compositions used in microelectronic device and display panel manufacturing such as photoresists, etchants, chemical vapor deposition reagents, solvents, wafer and tool cleaning formulations, chemical mechanical polishing compositions, color filtering chemistries, overcoats, liquid crystal materials, etc.
  • a first type of high-purity packaging includes rigid glass, metal, or plastic drums or bottles that contain material to be dispensed (i.e., without use of flexible liners).
  • Pressure-rated stainless steel vessels are commonly used due to their ability to withstand elevated pressures and ability to meet rigorous cleanliness specifications. Material may be dispensed from such containers using dispense pumps.
  • pumps for high purity materials are not only expensive, but also are known to contribute to contamination in the form of shedding from bellows, diaphragms, and/or check valves thereof.
  • direct contact pressure dispensing arrangements have been developed, wherein high-purity liquid is forced out of a container using a pressurized drive gas that directly contacts the liquid to be dispensed.
  • a second type of high-purity packaging that has been developed includes a flexible liner or bag arranged within a substantially rigid outer container (also known as an overpack), wherein pressurized gas is supplied to a space between the liner and the outer container to pressurize and promote dispensation of contents of the liner.
  • a substantially rigid outer container also known as an overpack
  • pressurized gas is supplied to a space between the liner and the outer container to pressurize and promote dispensation of contents of the liner.
  • BIC bag-in-can
  • BIOB bag-in-bottle
  • BID bag-in-drum packaging.
  • Packaging of such general type is commercially available (e.g., under the trademark NOWPak ® ) from Advanced Technology Materials, Inc. (Danbury, Connecticut, USA).
  • a flexible liner may be provided as a pre-cleaned, sterile collapsible bag of a polymeric film material, such as polytetrafluoroethylene (PTFE), low-density polyethylene, medium-density polyethylene, PTFE-based laminates, polyamide, polyester, polyurethane, or the like, selected to be inert to the material (e.g., liquid) to be contained in the liner.
  • a polymeric film material such as polytetrafluoroethylene (PTFE), low-density polyethylene, medium-density polyethylene, PTFE-based laminates, polyamide, polyester, polyurethane, or the like, selected to be inert to the material (e.g., liquid) to be contained in the liner.
  • Multi-layer laminates may also be used, with exemplary materials of construction further including metalized films, foils, polymers/copolymers, laminates, extrusions, co-extrusions, and blown and cast films.
  • a liquid is typically dispensed from the liner by connecting a dispensing assembly including a dip tube or short probe to a port of the liner, with the dip tube being immersed in the contained liquid.
  • Fluid e.g., gas
  • Fluid pressure is applied to the exterior surface of the liner (i.e., in the space between the liner and a surrounding container) to progressively collapse the flexible liner and thereby force liquid through the dispensing assembly for discharge to associated flow circuitry to flow to an end-use tool or site.
  • Liner-based pressure dispensing systems limit or prevent direct contact between the liquid to be dispensed and pressurized gas, thereby limiting the potential for dissolution of pressurized gas into liquid to be dispensed.
  • the liner is typically arranged for a one-time use, whereas the overpack may be configured for onetime use or (more commonly) for multiple uses.
  • an overpack may be shipped to the manufacturer or intermediary, fitted with a new liner (without need for rigorous cleaning of the overpack or outer container), and thereafter re-filled at a chemical fill facility.
  • flexible liners may be subject to influx of gas through pinholes and/or leakage along seams thereof, thereby leading to potential problems with pinhole leaks, weld tears, and overflow.
  • a third type of container that has recently been developed for storage and dispensing of high-purity materials includes substantially rigid collapsible containers (such as disclosed in International Publication No. WO 2012/051093) and substantially rigid foldable containers (such as disclosed in U.S. Patent Application Publication No. 2014/0307042 Al), the foregoing applications being assigned to the same assignee as the present application.
  • Liquid may be dispensed from a substantially rigid collapsible and/or foldable container using pumps, pressurized gas (e.g., direct pressure dispensing), or vacuum, such as by extracting liquid from a top-mounted port using a dip tube.
  • a substantially rigid molded collapsible container may include fold lines or fold patterns that define an arrangement whereby the container may be selectively collapsed or maintained in a free-standing condition, thereby permitting a container to be collapsed when empty to reduce shipping volume and shipping costs.
  • the resulting rigid collapsible container may be used as a stand-alone container without an outer container, and without a flexible liner arranged therein.
  • the container may be blow-molded as a unitary piece including folds or pre-folds permitting the container to collapse into a relatively flat position. Seams and/or welds in the rigid collapsible container may be substantially eliminated, thereby substantially reducing or eliminating the problems associated with pinholes, weld tears, and overflow.
  • Desirable materials of construction include polyethylene terephthalate (PET), polyethylene naphthalate (PEN), poly(butylene 2,6-naphthalate) (PBN), polyethylene (PE), linear low-density polyethylene (LLDPE), low-density polyethylene (LDPE), medium-density polyethylene (MDPE), high-density polyethylene (HDPE), and/or polypropylene (PP).
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • PBN poly(butylene 2,6-naphthalate)
  • PE polyethylene
  • LLDPE linear low-density polyethylene
  • LDPE low-density polyethylene
  • MDPE medium-density polyethylene
  • HDPE high-density polyethylene
  • PP polypropylene
  • a substantially rigid collapsible container may include four side walls, a top surface connected to one end of each of the four side walls and defining a square or rectangular pyramid, and a bottom surface connected to the opposite end of each of the four side walls and defining a square or rectangular pyramid.
  • a fitment may be positioned at the apex of the top surface.
  • Two opposing side walls of the four side walls may each have multiple fold lines radially extending from a central region of the respective side wall. In certain instances, radially extending fold lines may intersect at a central region, while in other instances the central region may include a stress relief limiter.
  • Exemplary thicknesses of such materials may be from about 0.05 mm to about 3 mm thick, desirably from about 1 .0 mm to about 2 mm thick.; however, desirable wall thicknesses may vary, based on factors including the volume of the container, the intended contents, the intended dispense method, or the intended application, among other factors.
  • a substantially rigid container may have sufficient wall thickness and rigidity to substantially reduce or eliminate the occurrence of pinholes.
  • substantially rigid collapsible or foldable containers may provide certain benefits relative to liner-based pressure dispensing containers, when containers are used for direct contact pressure dispensing (wherein pressurized gas contacts liquid to be dispensed), problems remain with dissolution of drive gas into liquid to be dispensed, leading to presence of microbubbles that may cause defects when layers of liquid are deposited on a target surface.
  • the present disclosure relates to fluid handling and dispensing systems and methods that overcome various issues present in conventional systems.
  • Various embodiments of the present disclosure are directed to improved fluid handling apparatuses and methods for direct contact pressure dispensing of liquids using pressurized gas, while reducing dissolution of pressurized gas into liquids to be dispensed.
  • a skimmer is arranged to float on liquid or liquid-containing material within the interior of a container and defines at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, and use of a material extraction hose coupled between the skimmer and an outlet port of the container in order to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.
  • a container may be devoid of a liner and configured to receive pressurized gas in direct contact with liquid or liquid-containing material within the container for pressure dispensing thereof.
  • the container may comprise a rigid collapsible or rigid foldable container.
  • a skimmer to extract liquid from the container proximate to the gas/liquid interface promotes (e.g., continuous) removal of liquid having the greatest concentration of dissolved gas. If liquid is withdrawn (e.g., with a skimmer) along the gas/liquid interface faster than gas can diffuse into the liquid, then the bulk liquid will not reach a condition of being saturated with pressurization gas. Also, to the extent that mixing occurs between upper layers and lower layers of liquid within the container, then gas saturation levels will also be suppressed.
  • the container, skimmer, and related components can be metallic.
  • a liquid dispensing apparatus is arranged to extract a liquid or liquid-containing material from a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the apparatus comprising: a skimmer arranged to float on the liquid or liquid-containing material within an interior of the container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container; and a material extraction hose coupled between the skimmer and an outlet port of the container, and arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.
  • a fluid processing method comprising: providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and extracting liquid from the interior of the first pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.
  • a fluid processing method comprising: providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; and providing a set of instructions on a tangible medium, the instructions comprising: • supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and
  • the set of instructions comprise attaching a container closure element to the container proximate to the outlet port, the container closure element being arranged to permit passage of liquid or liquid-containing material received from the material extraction hose.
  • the set of instructions can further comprise detecting a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container, and terminating extraction of liquid from the interior of the first pressure dispensing container responsive to said detecting.
  • the step in said instructions of detecting of the condition indicative of exhaustion or near- exhaustion of liquid or liquid-containing material from the first pressure dispensing container comprises detection of a condition indicating that the skimmer is proximate to or in contact with a bottom wall or bottom portion of the pressure dispensing container.
  • the instructions comprise: removing the skimmer and material extraction hose from the first pressure dispensing container; inserting the skimmer and material extraction hose into a second pressure dispensing container containing liquid or liquid- containing material; supplying pressurized gas to the interior of the second pressure dispensing container to contact liquid or liquid-containing material contained therein; and extracting liquid from the interior of the second pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.
  • the instructions on a tangible medium can include, but are not limited to, instructions on a printed document or label, or on a computerrreadable medium such as a compact disc or computer memory on a remote server accessible over the internet.
  • a method for dispensing liquid or liquid-containing material utilizing a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the method comprising: comparing a desired volumetric dispensing rate of liquid or liquid-containing material to a value indicative of or derived from rate of diffusion of a pressurization gas into the liquid or liquid-containing material; and selecting the pressure dispensing container with a cross-sectional area sized to permit liquid or liquid-containing material to be withdrawn using a floatable skimmer from at least one submerged extraction opening of the skimmer proximate to a liquid/gas interface within the container to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.
  • FIG. 1 is a simplified schematic view of a conventional direct contact pressure dispensing system, illustrating the phenomenon of gas dissolution in a liquid proximate to the gas/liquid interface.
  • FIG. 2 is a simplified schematic view illustrating a material delivery system including a direct contact pressure dispensing container including therein a skimmer arranged to float on liquid within the container, with the skimmer including at least one liquid extraction opening positioned below an upper level of liquid within the container, and a material extraction hose coupled between the skimmer and an outlet port of the container, according to one embodiment of the present disclosure.
  • FIG. 3 is side cross-sectional view of a skimmer including different upper and lower material portions according to one embodiment of the present disclosure.
  • FIG. 4 is side cross-sectional view of a skimmer including liquid extraction openings arranged along angled lower wall portions thereof according to one embodiment of the present disclosure.
  • FIG. 5 is a side cross-sectional view of a skimmer including primary and secondary liquid extraction openings of different sizes arranged to supply liquid to an internal sump, and including a material extraction hose arranged to extract liquid from a lower portion of the internal sump, according to one embodiment of the present disclosure.
  • FIG. 6 is a side-cross-sectional view of a liquid dispensing apparatus including a skimmer, a material extraction hose, and a container closure element arranged to be removably attached to a container proximate to an outlet port, with the skimmer including at least one liquid extraction opening arranged along a lateral wall thereof, and with the apparatus including a tether affixed to the skimmer, according to one embodiment of the present disclosure.
  • FIG. 7 is a side-cross-sectional view of a liquid dispensing apparatus including a container closure element arranged to be removably attached to a container proximate to an outlet port, a vertically arranged support rod suspended from the container closure element, a material extraction hose, and a skimmer arranged to travel along the support rod, with the skimmer including liquid extraction openings of different sizes arranged to supply liquid to an internal sump arranged to receive the material extraction hose, according to one embodiment of the present disclosure.
  • FIG. 8A is a perspective view of a liquid dispensing apparatus including a container closure element arranged to be removably attached to a container proximate to an outlet port, a vertically arranged support rod suspended from the container closure element, a material extraction hose, and a skimmer arranged to travel along the support rod, with the skimmer including upper liquid extraction openings comprising slots and a smaller lower liquid extraction opening all arranged to supply liquid to an internal sump arranged to receive the material extraction hose, according to one embodiment of the present disclosure.
  • FIG. 8B is an upper perspective view of portion of the liquid dispensing apparatus of FIG. 8A including the skimmer and portions of the support rod and material extraction hose.
  • FIG. 8C is a perspective transparency view of the portion of the liquid dispensing apparatus of FIG. 8B.
  • FIG. 8D is a lower perspective view of the portion of the liquid dispensing apparatus of FIGS. 8B-8C.
  • FIG. 9 is a simplified schematic view of a material dispensing system including a skimmer arranged within a direct contact pressure dispensing container, and including a pressurizable reservoir arranged between the container and a point of use.
  • FIG. 1 is a simplified schematic view of a conventional direct contact pressure dispensing system 100 is depicted, illustrating the phenomenon of gas dissolution in a liquid proximate to the gas/liquid interface, to provide context to the present disclosure.
  • a container 1 10 with a top wall 1 1 1, a bottom wall 1 12, and at least one side wall 1 13 includes a gas inlet port 116 arranged to supply pressurized gas 120 to an upper interior portion of the container 1 10.
  • a dip tube 1 18 is arranged to permit removal of pressurized liquid from the container, with an opening 1 19 of the dip tube 1 18 being submerged in liquid 125 and arranged proximate to the bottom wall 1 12 of the container 1 10.
  • pressurized gas 120 When pressurized gas 120 is supplied into the container 1 10, the gas pressure provides a gradient that moves gas into the liquid 125 according to the following equation (1):
  • k is the Boltzmann constant
  • T is the absolute temperature
  • d is the diameter of the molecule that is diffusing
  • ⁇ is the viscosity of the suspending fluid. Since extent of diffusion of gas into the liquid at any particular time is dependent upon distance, a stratification of gas concentration is present in the liquid near the gas/liquid interface 123; such stratification is schematically illustrated in the form of liquid sublayers 125A, 125B, 125C having different gas concentrations therein, with a higher gas concentration closest to the gas/liquid interface 123, and a lower gas concentration with increasing distance from the gas/liquid interface 123.
  • a rate of liquid dispensation is dictated by the demand of a fluid-utilizing process.
  • a floatable skimmer and material extraction hose as disclosed herein may be used to remove liquid or liquid-containing material from a pressure dispensing container arranged for direct contact between pressurizing gas and liquid to be dispensed, to cause the level of liquid or liquid- containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.
  • a rigid (or substantially rigid) foldable or collapsible container may be used, and such a container can be devoid of a liner and configured to receive pressurized gas for direct contact with liquid or liquid-containing material within the container.
  • the terms "rigid” or “substantially rigid” are meant to also include the characteristic of an object or material to substantially hold its shape and/or volume when in an environment of a first pressure, but wherein the shape and/or volume may be altered in an environment of increased or decreased pressure. The amount of increased or decreased pressure needed to alter the shape and/or volume of the object or material may depend on the application desired for the material or object and may vary from application to application.
  • a rigid or substantially rigid collapsible or foldable container may be fabricated of material of sufficient thickness and composition for the container to be self-supporting when filled with liquid.
  • a rigid or substantially rigid collapsible container may be of single-wall or multi-wall character, and can comprise polymeric materials. Laminated composites of multiple layers of polymeric materials and/or other materials (e.g., laminated by application of heat and/or pressure) may be used.
  • a rigid or substantially rigid collapsible container may be formed by any one or more suitable steps including molding, shaping, lamination, extrusion, and welding steps.
  • a rigid or substantially rigid collapsible container can incude a substantially rigid opening or port integrally formed with the container.
  • liquid or liquid-containing material contained in a pressure dispensing container as disclosed herein should have less than 75 particles/milliliter of particles having a diameter of 0.20 microns or larger, at the point of fill of the liner; in some embodiments, less than 50 particles/milliliter; in some embodiments, less than 35 particles/milliliter; and in some embodiments, less than 20 particles/milliliter.
  • the container should have less than 30 parts per billion (ppb) of total organic carbon (TOC) in the liquid; in some embodiments, less than 15 ppb of TOC.
  • Various embodiments present less than 10 parts per trillion metal extractable levels per critical elements, such as calcium, cobalt, copper, chromium, iron, molybdenum, manganese, sodium, nickel, and tungsten, and with less than 150 parts per trillion iron and copper extractable levels per element for liner containment of hydrogen fluoride, hydrogen peroxide and ammonium hydroxide, consistent with the specifications set out in the Semiconductor Industry Association, International Technology Roadmap for Semiconductors (SIA, ITRS) 1999 Edition.
  • critical elements such as calcium, cobalt, copper, chromium, iron, molybdenum, manganese, sodium, nickel, and tungsten
  • Containers, apparatuses and systems as disclosed can be employed for storage and dispensing of chemical reagents and compositions of widely varied character.
  • embodiments are hereafter described primarily with reference to storage and dispensing of liquid or liquid-containing compositions for use in the manufacture of microelectronic device products, it will be appreciated that the utility of the embodiments is not thus limited, but rather extend to and encompasses a wide variety of other applications and contained materials.
  • liquid containment systems have utility in numerous other applications, including but not limited to medical and pharmaceutical products, building and construction materials, food and beverage products, biological materials, radioactive materials, nanomaterials, fossil fuels and oils, agriculture chemicals, materials for manufacturing and/or industrial production processes, biopharma, solar, coatings and automobiles, where liquid media or liquid materials require packaging.
  • microelectronic device refers to semiconductor substrates, flat-panel displays, thin-film recording heads, microelectromechanical systems, LED substrates, and other advanced microelectronic components.
  • the microelectronic device may include patterned silicon wafers, flat-panel display substrates, polymeric substrates, or microporous / mesoporous inorganic solids.
  • a liquid dispensing apparatus is arranged to extract a liquid or liquid-containing material from a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, the apparatus comprising: a skimmer arranged to float on the liquid or liquid-containing material within an interior of the container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container; and a material extraction hose coupled between the skimmer and an outlet port of the container, and arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port.
  • a skimmer may comprise any suitable shape or conformation that permits a skimmer to float on the surface of liquid or liquid-containing material within a container, to permit the skimmer to translate downward as liquid level in a container drops due to removal (dispensation) of liquid through the skimmer.
  • a skimmer and associated material extraction hose are arranged for removable insertion into a container through a container opening (e.g., a container outlet port, which may be arranged at a mouth of a container along an upper wall thereof).
  • a material extraction hose is intermediately arranged between a skimmer and a container closure element arranged to be removably engaged (e.g., manually engaged) to a container proximate to a container opening such as a container outlet port and/or container mouth.
  • a container mouth may include a male threaded surface
  • a container closure element may include a female threaded surface arranged to engage a neck or mouth of a container.
  • a container mouth may include a female threaded surface
  • a container closure element may comprise a male threaded surface arranged to engage the container neck or mouth.
  • a skimmer is sized and shaped to substantially conform to a bottom surface of a container that contains the skimmer, in order to enhance removal of liquid or liquid-containing material from a container.
  • a bottom of a skimmer may be substantially flat (e.g., horizontally arranged), and a bottom wall of a container that contains the skimmer includes a bottom wall that is also substantially flat and arranged to receive a bottom surface of the skimmer.
  • a bottom portion of a container may include a rounded surface, and a bottom portion of a skimmer may include a rounded portion that is sized and shaped to conform to the bottom portion of the corresponding container.
  • a bottom portion of a container may include a sump (e.g., a portion of reduced width or cross-sectional area relative to a main body portion of the container), and at least a portion of a skimmer may be arranged to fit into the sump.
  • a bottom portion of a container (or sump thereof) may include a conical or frustoconical (i.e., truncated conical) shape, and at least a portion of a skimmer may comprise a corresponding conical or frustoconical shape arranged to fit into or against the bottom portion of the container.
  • a skimmer may include one or multiple materials.
  • a lower portion of the skimmer comprises a greater density material than an upper portion of the skimmer (with such configuration desirably operating similar to a keel to cause the skimmer to maintain a desired (e.g., upright) attitude when floating on the liquid or liquid-containing material).
  • at least the liquid- contacting surfaces of a skimmer may comprise the same material(s) of construction as the container in which the skimmer is contained.
  • Desirable materials for surfaces of a skimmer arranged to contact liquids include (but are not limited to) polymers such as polyethylene, polypropylene, PEEK, etc. as well as fluorinated polymers such as polytetrafluoroethylene.
  • a floatable skimmer includes at least one or more liquid extraction openings that are submerged below a level of liquid or liquid-containing material within a container. In certain embodiments, at least one liquid extraction opening (or at least a portion thereof) is arranged within 3 millimeters of the upper level of liquid or liquid-containing material within the container. In certain embodiments, a skimmer includes at least one first submerged liquid extraction opening arranged at a first vertical level, and includes at least one second submerged liquid extraction opening arranged at a second vertical level that is below the first vertical level. In certain embodiments, the at least one second liquid extraction opening may include a smaller diameter or cross- sectional area than a diameter or cross-sectional area of the at least one first liquid extraction opening.
  • a skimmer may include at least one channel or recess defined in an upper surface of the skimmer, wherein a lower boundary of the at least one channel or recess is arranged to be positioned below an upper level of liquid or liquid- containing material within the container, and at least one extraction opening arranged to receive liquid or liquid-containing material from the at least one channel or recess.
  • a skimmer includes a second liquid extraction opening that is defined in a lower or lateral surface of the skimmer that is arranged at a vertical level below a vertical level of the first liquid extraction opening, and/or that has a smaller cross- sectional area than a cross-sectional area of the first liquid extraction opening.
  • a skimmer may define or otherwise include an internal sump arranged to receive liquid or liquid-containing material from at least one liquid extraction opening defined in the skimmer, and a material extraction hose (or an extension thereof) may be arranged to withdraw liquid or liquid-containing material from the internal sump (in some embodiments, from a lower portion of the internal sump).
  • a skimmer may include an upper liquid extraction opening arranged to supply liquid or liquid containing material to the internal sump, and may include a lower liquid extraction opening arranged to supply liquid or liquid containing material to the internal sump, with the lower liquid extraction opening having a smaller cross- sectional area than the upper liquid extraction opening, and the lower liquid extraction opening being arranged at a vertical level below a vertical level of the upper liquid extraction opening.
  • a material extraction hose may be flexible or otherwise moveable to permit reliable fluid connection between the skimmer and an outlet port of the container, despite the need for a floatable skimmer to change position (e.g., height) within a container due to dropping level in the container of liquid on which the skimmer floats.
  • a material extraction hose useful with comprises a flexible, self-coiling hose.
  • at least the liquid-contacting surfaces of the material extraction hose may comprise the same material(s) of construction as the container in which the hose is contained.
  • Desirable materials for surfaces of a material extraction hose arranged to contact liquids include (but are not limited to) polymers such as polyethylene, polypropylene, PEEK, etc. as well as fluorinated polymers such as polytetrafluoroethylene.
  • a material extraction hose may be reinforced with fibers, wires, and/or other materials to promote enhanced strength and/or durability.
  • a container closure element is arranged to be removably attached to the container proximate to an outlet port, and the container closure element is arranged to permit passage of liquid or liquid-containing material received from the material extraction hose.
  • a container closure element may include a threaded surface arranged to engage a corresponding threaded surface along or proximate to a container outlet port. Any of various types of removal connections (which can be manually removable) may be provided between a container closure element and a corresponding container.
  • a container closure element may include connections thereof for pressurized gas, for a material extraction hose, and for a pressure relief valve (or gas liner arranged in fluid communication with a pressure relief valve).
  • a container closure element may have associated therewith a support rod, a retractable tether, and/or another mechanical element providing a mechanical link (secondary to the material extraction hose) between the container closure element and the skimmer, such as may be desirable to facilitate removal of the skimmer without imposing undue stress on the material extraction hose.
  • a retractable tether may embody a wire or flexible line (similar to fishing line) and may be joined to a retraction mechanism such as a windable spool or reel arranged external to the container, to permit tether to be selectively lengthened or shortened.
  • a tether i.e., to a length shorter than a material extraction hose
  • a material dispensing apparatus includes a rigid vertical support element (e.g., a rod) suspended within the container, and a skimmer is arranged to translate vertically along the vertical support element.
  • a skimmer includes a vertically aligned aperture or opening arranged to receive the vertical support element, wherein cooperation between the vertically aligned aperture and the vertical support rod received therein simultaneously permits vertical translation of the skimmer and limits lateral translation of the skimmer relative to the container.
  • a container closure element is arranged to be removably attached to the container proximate to an outlet port of the container, and the vertical support rod is affixed to the container closure element.
  • a material dispensing apparatus includes a skimmer , a material extraction hose, and a container closure element all as disclosed herein, wherein such apparatus is arranged to be used with a first container until contents of the first container are exhausted, and such apparatus may then be removed from the first container and then subsequently used with a second container for continued dispensation of liquid or liquid-containing material.
  • a container outlet port, a skimmer, and a material extraction hose are sized and shaped to permit the skimmer and the material extraction hose to be inserted into and removed from an interior of a container through the outlet port to promote re-use of the material dispensing apparatus with multiple containers.
  • a material dispensing apparatus may include at least one support element (e.g., support rod and/or retractable tether), at least one sensor, and/or any other features or elements as disclosed herein.
  • one or more sensors and/or sensor-responsive elements may be arranged in or along a skimmer and in or along a corresponding portion of a container (e.g., along a container bottom wall and/or container side wall) in order to sense level of the skimmer as a proxy for determining liquid level (or determining that the container is exhausted or nearly exhausted of liquid or liquid-containing material).
  • At least one of a magnet or a magnetically responsive material may be arranged in or on a lower or lateral surface of a skimmer, and a corresponding magnetically responsive or magnetic material may be arranged in or along a lower or lateral wall surface of a container, in order to permit sensing of proximity of the skimmer to the bottom wall of the container to generate an output signal indicating that the container is exhausted or nearly exhausted of liquid or liquid-containing material due to sensing of interaction of a magnetic material and a magnetically responsive material in proximity to one another.
  • sensors and/or interactive materials or devices may be provided at one or more positions and used to determine when a skimmer is proximate to a lower or lateral wall surface of a container, such as a float device or an ultrasonic detector, in order to aid in determining whether a container is exhausted or nearly exhausted of liquid or liquid-containing material.
  • a pressurizable reservoir may be arranged to receive liquid or liquid-containing material from pressure dispensing container including a skimmer and material extraction hose as disclosed herein, wherein the pressurizable reservoir is arranged to supply liquid or liquid-containing material to a downstream liquid-utilizing process or process tool.
  • an interior of the pressurizable reservoir containing liquid or liquid-containing material is arranged to be pressurized (e.g., utilizing pressurized gas, a piston, or any suitable pressurization element) to a higher pressure than the pressure dispensing container, to thereby increase pressure of liquid or liquid- containing material to be received by the downstream process or process tool.
  • the pressurizable reservoir may be used in a manner similar to a transfer pump, to increase pressure of liquid or liquid-containing material.
  • a pressurizable reservoir is substantially smaller in volume than the upstream pressure dispensing container.
  • a volumetric ratio of a pressurizable reservoir to the volume of a corresponding pressure dispensing container can be less than about one fourth (as disclosed herein), arranged upstream of the reservoir and in fluid-donating relationship with the reservoir.
  • the volumetric ratio is less than about one eighth; in some embodiments, the volumetric ratio is less than about one twelfth; in some embodiments, the volumetric ratio is less than about one sixteenth; and in some embodiments, the volumetric ratio is less than about one twentieth.
  • a pressurizable reservoir may be pressurized to a pressure ratio of at least two times the pressure level within a pressure dispensing container (as disclosed herein), arranged upstream of the reservoir and in fluid-donating relationship with the reservoir.
  • the pressure ratio is at least four; in some embodiments, the pressure ratio is at least eight; in some embodiments, the pressure ratio is at least 12; and in some embodiments, the pressure ratio is at least 20. For these embodiments, the pressure ratio does not exceed 25.
  • a fluid processing method comprises: providing a first pressure dispensing container defining an interior and having a skimmer and at least a portion of a material extraction hose inserted into the interior, the first pressure dispensing container containing liquid or liquid-containing material, the skimmer being arranged to float on the liquid or liquid-containing material within the first pressure dispensing container and defining at least one liquid extraction opening positioned below an upper level of liquid or liquid-containing material within the container, the material extraction hose being coupled between the skimmer and an outlet port of the container and being arranged to convey liquid or liquid-containing material received from the at least one liquid extraction opening to the outlet port; supplying pressurized gas to the interior of the first pressure dispensing container to contact the liquid or liquid-containing material; and extracting liquid from the interior of the first pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.
  • such method may further include attaching a container closure element to the container proximate to the outlet port, wherein the container closure element is arranged to permit passage of liquid or liquid-containing material received from the material extraction hose.
  • a fluid processing method as disclosed herein may include detecting a condition indicative of exhaustion or near-exhaustion of liquid or liquid- containing material from the first pressure dispensing container, and terminating extraction of liquid from the interior of the first pressure dispensing container responsive to said detecting.
  • the detecting of a condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material from the first pressure dispensing container may include detection of a condition indicating that the skimmer is proximate to or in contact with a bottom wall or bottom portion of the pressure dispensing container.
  • a fluid processing method as disclosed herein may include removing a skimmer and material extraction hose from a first pressure dispensing container; inserting the skimmer and material extraction hose into a second pressure dispensing container containing liquid or liquid-containing material; supplying pressurized gas to the interior of the second pressure dispensing container to contact liquid or liquid- containing material contained therein; and extracting liquid from the interior of the second pressure dispensing container through the at least one liquid extraction opening and the material extraction hose.
  • a fluid processing method as disclosed herein may include delivering liquid or liquid-containing material received from the first pressure dispensing container to a process tool arranged to utilize the liquid or liquid-containing material.
  • a process tool may include a semiconductor or microelectronic device manufacturing tool.
  • a method as disclosed herein may further include manufacturing at least a portion of a semiconductor or microelectronic device utilizing the semiconductor or microelectronic device manufacturing tool.
  • a method for dispensing liquid or liquid-containing material may utilize a pressure dispensing container configured to receive pressurized gas in direct contact with the liquid or liquid-containing material, and the method may include the following steps: comparing a desired volumetric dispensing rate of liquid or liquid- containing material to a value indicative of or derived from rate of diffusion of a pressurization gas into the liquid or liquid-containing material; and selecting the pressure dispensing container with a cross-sectional area sized to permit liquid or liquid-containing material to be withdrawn using a floatable skimmer from at least one submerged extraction opening of the skimmer proximate to a liquid/gas interface within the container to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.
  • a method may further include supplying pressurization gas to the pressure dispensing container, and withdrawing liquid or liquid-containing material from the container through (i) the at least one extraction opening of the skimmer proximate to the liquid/gas interface within the container and (ii) a material extraction hose coupled between the skimmer and an outlet port of the container, to cause the level of liquid or liquid-containing material in the container to decline faster than a rate at which the liquid or liquid-containing material could otherwise become saturated with the pressurization gas.
  • a material delivery system 200 is illustrated in an embodiment of the disclosure, including a direct contact pressure dispensing container 210 including therein a skimmer 250 arranged to float on liquid 225 within the container 210.
  • the skimmer 250 can include at least one liquid extraction opening 255 positioned below an upper level of liquid (i.e., a gas/liquid interface 223) within the container 210, with a material extraction hose 268 coupled between the skimmer 250 and an outlet port 216 of the container 210 (defined by container neck 215).
  • the container 210 includes an upper wall 221, a lower wall 222, at least one side wall 213, and a reduced width sump portion 214 proximate to the lower wall 222.
  • the container 210 may embody a rigid collapsible or rigid foldable container.
  • the skimmer 250 includes an upper surface 251 that may be arranged above the gas/liquid interface 223 and a lower surface 252 arranged below the gas/liquid interface 223, with the at least one liquid extraction opening 255 being submerged below the gas/liquid interface 223.
  • a container closure element 270 is removably coupled to the neck 215 of the container 210.
  • the container closure element 270 is arranged to permit passage of liquid or liquid-containing material out of the container 210 via the material extraction hose 268, is arranged to permit passage of pressurized gas (supplied by pressurization gas source 281) into the container 210 via a pressurized gas line 282, and is arranged to permit pressurized gas to be vented from the container 210 through vent line 284, which is coupled with a pressure relief valve 285 and an optional overpressure vent 285A.
  • the container 210 may have associated therewith at least one sensor 286 arranged to sense proximity of the skimmer 250; the at least one sensor 286 may be located proximate to the sump 214 along the lower wall 222.
  • the container 210 may be arranged on a scale 288 arranged to sense weight of the container 210 and liquid 225 contained therein.
  • the material extraction hose 268 may be in fluid communication with a downstream empty detection sensor 292, which may embody a first bubble detector, capacitance sensor, or other sensor.
  • the at least one sensor 286, the scale 288, and/or the downstream sensor 292 may be utilized to detect at least one condition indicative of exhaustion or near-exhaustion of liquid or liquid-containing material 225 from the container 210.
  • a pressure dispensing apparatus e.g., including the container closure element 270, material extraction hose 268, and skimmer 250
  • a pressure dispensing apparatus may be removed from the container 210 and affixed to another container (not shown) for continued dispensation of liquid or liquid- containing material to a downstream liquid-utilizing process 296.
  • gas may be supplied from a pressurization gas source 281 through pressurized gas line 282 and the container closure element 270 to an interior of the container 210 to directly contact liquid or liquid-containing material 225 contained therein.
  • gas 220 increases pressure of the liquid or liquid-containing material 225 in the container 210, and forces liquid or liquid-containing material 225 through at least one liquid extraction opening 255 of the skimmer 250 into the material extraction hose 268 (which extends through the outlet port 216 and container closure element 270) to exit the container 210.
  • liquid or liquid-containing material may be dispensed through a valve 290 to a reservoir 294, which may embody a pressurizable reservoir arranged to increase pressure of the liquid or liquid-containing material and/or may embody a ventable reservoir to facilitate removal of gas entrained in liquid or liquid- containing material received from the container 210.
  • Operation of various components of the material dispensing system 200 may be controlled with a controller 299.
  • the skimmer 350 includes an upper surface 351 , a lower end 352, a lateral wall surface 354, and an angled lower wall surface 353 that is non-perpendicular to the lateral wall surface 354.
  • the skimmer 350 can also include an upper portion 357 that includes a different material than a lower portion 358, with the lower portion 358 optionally including a material of higher density to cause the skimmer 350 to maintain a desired (e.g., upright) attitude when floating on liquid or liquid-containing material within a container, with the skimmer being arranged to cause liquid extraction openings 355A, 355B to be submerged below an upper level of liquid or liquid-containing material in dispensing operation.
  • the liquid extraction openings 355A, 355B are arranged along a lateral wall surface 354 of the skimmer 350 and are in fluid communication with an internal passage 356 that may be horizontally arranged.
  • the liquid extraction openings 355A, 355B are in fluid communication with a vertical passage 365 that conveys liquid or liquid-containing material to a material extraction hose 368.
  • a skimmer 450 is illustrated in an embodiment of the disclosure.
  • the skimmer 450 includes an upper surface 451 , a lower end 452, a lateral wall surface 454, and an angled lower wall surface 453 that is non-perpendicular to the lateral wall surface 454.
  • the skimmer 450 can maintain a desired (e.g., upright) attitude when floating on liquid or liquid-containing material within a container, with the skimmer 450 being arranged to cause liquid extraction openings 455A, 455B to be submerged below an upper level of liquid or liquid-containing material in dispensing operation. As depicted in FIG.
  • the liquid extraction openings 455A, 455B are arranged along the angled lower wall surface 453 of the skimmer 450, and admit liquid into inclined passages 456A, 456B in fluid communication with a vertical passage 465 that conveys liquid or liquid-containing material to a material extraction hose 468.
  • the skimmer 450 further includes a weight and/or magnet or magnetically responsive material 487 arranged proximate to the lower end 452.
  • the element 487 may be arranged to interact with a corresponding magnetically responsive material or magnet arranged proximate to at least one wall of a container containing the skimmer 450, in order to sense proximity and/or position of the floatable skimmer 450 as may be useful to determine when the container is exhausted or nearly exhausted of liquid or liquid-containing material.
  • a skimmer 550 is depicted in an embodiment of the disclosure.
  • the skimmer 550 includes an upper surface 551, a lower end 552, a lateral wall surface 554, and an angled lower wall surface 553 that is non-perpendicular to the lateral wall surface 554.
  • the skimmer 550 can also include an upper portion 557 that includes a different material than a lower portion 558, with the lower portion optionally including a material of higher density to cause the skimmer 550 to maintain a desired (e.g., upright) attitude when floating on liquid or liquid-containing material within a container, with the skimmer 550 being arranged to cause liquid extraction openings 555A, 555B, 559 to be submerged below an upper level of liquid or liquid-containing material in dispensing operation. As depicted in FIG.
  • primary liquid extraction openings 555A, 555B are arranged proximate to an interface between the lateral wall surface 554 and the angled lower wall surface 553, and admit liquid into at least one passage in fluid communication with an internal sump 561.
  • the internal sump 561 is also arranged to receive liquid from at least one secondary liquid extraction opening 559 arranged at a vertical level that is lower than a vertical level of the primary liquid extraction openings 555A-555B.
  • the secondary liquid extraction opening can define a smaller cross-sectional area than the primary liquid extraction openings 555A-555B to ensure that a majority of liquid or liquid-containing material is withdrawn from a container at a position closer to a gas/liquid interface therein, while the presence of the secondary liquid extraction opening also permits removal of a greater amount of liquid or liquid-containing material from a container (thereby reducing unrecoverable residual waste at the conclusion of material dispensation).
  • a lower end 567 of the material extraction hose 568 (or an extension of the material extraction hose) can be arranged to withdraw liquid or liquid containing material from a lower portion of the sump 561.
  • the liquid dispensing apparatus 605 includes a skimmer 650, a material extraction hose 668, and a container closure element 670 arranged to be removably attached to a container proximate to an outlet port (not depicted).
  • the skimmer 650 can also include an upper surface 651 , a lower end 652, a lateral wall surface 654, and an angled lower wall surface 653 that is non-perpendicular to the lateral wall surface 654.
  • Liquid extraction openings 655A-655B are arranged along a lateral wall 654 of the skimmer 650 and in fluid communication with a horizontally arranged internal passage 656 that leads to a material extraction hose 668 (or an extension thereof within the skimmer 650).
  • the container closure element 670 includes an upper surface 671 through which multiple items extend - namely, the material extraction hose 668, a pressurization gas inlet 682 (arranged to be in fluid communication with a pressurization gas source), and a pressure relief outlet 684 (arranged to be in fluid communication with a pressure relief valve).
  • the container closure element 670 includes a threaded surface 672 (e.g., female threaded surface) to permit the container closure element 670 to removably engage a corresponding threaded surface of a container neck (not shown).
  • the container closure element further includes a plug or other removable element 644 through which a retractable tether 643 extends, with the tether 643 being affixed to the skimmer 650 and further being coupled to a retraction element 645, which may include a spool or reel.
  • the tether 643 may be selectively shortened (i.e., to a length shorter than a material extraction hose) using the retraction element 645 to ready the skimmer 650 for removal from a container, in order to avoid imposition of undue stress on the material extraction hose 668.
  • the apparatus 605 is arranged to be used with a first pressure dispensing container until contents thereof are exhausted, and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid-containing material.
  • the liquid dispensing apparatus 705 includes a container closure element 771 arranged to be removably attached to a container proximate to an outlet port thereof, a vertically arranged support rod 740 suspended from the container closure element 771 (along upper end 741 of the rod 740), a material extraction hose 768, and a skimmer 750 arranged to travel along the support rod 741.
  • the skimmer 750 can include liquid extraction openings 755, 759 of different sizes arranged to supply liquid to an internal sump 761 arranged to receive a lower end 767 of the material extraction hose 768 or an extension thereof.
  • the skimmer 750 can also include an upper surface 751 , a lower end 752, a lateral wall surface 754, and an aperture 763 through which the support rod 741 extends. Cooperation between the vertically aligned aperture 763 and the vertical support rod 740 received therein simultaneously permits vertical translation of the skimmer 750 within a container and limits lateral translation of the skimmer 750 relative to the container, and also permits the skimmer 750 to be rigidly supported during removal from a container and insertion into another container without imposing undue stress on the (flexible) material extraction hose 768.
  • a bottom surface 752 of the skimmer 750 defines a recess 752A arranged to receive a widened travel stop end portion 742 of the support rod 740.
  • a primary liquid extraction opening 755 is defined in a lateral wall 754 of the skimmer 750 and is arranged to supply liquid or liquid-containing material into the sump 761.
  • a secondary liquid extraction opening 759 which is arranged at a vertical level lower than the primary extraction opening 759 and includes a smaller cross-sectional area than that primary extraction opening 759, is also arranged to supply liquid or liquid- containing material into the sump 761.
  • the (larger and higher) primary liquid extraction opening 755 ensures that a majority of liquid or liquid-containing material is withdrawn from a container at a position closer to a gas/liquid interface therein, while the presence of the (smaller and lower) secondary liquid extraction opening also permits removal of a greater amount of liquid or liquid-containing material from near the bottom of a container (thereby reducing unrecoverable residual waste at the conclusion of material dispensation).
  • a lower end 767 of the material extraction hose 768 (or an extension of the hose 768) is arranged to extract liquid or liquid-containing material from a lower portion of the internal sump 761.
  • the apparatus 705 is arranged to be used with a first pressure dispensing container until contents thereof are exhausted, and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid-containing material.
  • a liquid dispensing apparatus 805 is depicted in an embodiment of the disclosure.
  • the liquid dispensing apparatus 805 includes a container closure element 870 arranged to be removably attached to a container proximate to an outlet port (not depicted), a vertically arranged support rod 840 suspended from the container closure element 870, a material extraction hose 868, and a skimmer 850 arranged to travel along the support rod 840.
  • FIGS. 8B-8D illustrate portions of the support rod 840 and material extraction hose 868 of FIG. 8A, with FIG. 8B providing an upper perspective view of the skimmer 850, with FIG. 8C providing a perspective transparency view of the skimmer 850, and with FIG. 8D providing a lower perspective view of the skimmer 850.
  • the skimmer 850 includes an upper surface 851, a lower end 852, a lateral wall surface 854, and an aperture 863 through which the support rod 840 extends. Cooperation between the vertically aligned aperture 863 and the vertical support rod 840 received therein simultaneously permits vertical translation of the skimmer 850 within a container and limits lateral translation of the skimmer 850 relative to the container, and also permits the skimmer 850 to be rigidly supported during removal from a container and insertion into another container without imposing undue stress on the (flexible) material extraction hose 868. Travel of the skimmer 850 along the support rod 840 may be limited with a widened travel stop lower end 842 of the rod 840.
  • the skimmer 850 includes upper (primary) liquid extraction openings 855 comprising channels or slots defined in the upper surface 851, and a smaller (secondary) lower liquid extraction opening 859, with the openings 855, 859 all arranged to supply liquid to an internal sump 861 arranged to receive the material extraction hose 868 (or an extension 866 of the hose 868, which may include a fitting 866 affixed to the skimmer 850. (Although four channels or slots are shown in the upper surface 851, it is to be appreciated that any suitable number of one or more channels or slots may be provided.) A lower end 867 of the material extraction hose 868 or extension 866 is arranged in a lower portion of the internal sump 861 for withdrawal of liquid or liquid-containing material.
  • the skimmer 850 is floatable on liquid or liquid-containing material in such a manner that a lower portion of each upper liquid extraction opening or slot 855 is arranged below an gas/liquid interface 823 (i.e., uppermost level of liquid or liquid containing material).
  • an gas/liquid interface 823 i.e., uppermost level of liquid or liquid containing material.
  • the skimmer 850 is arranged to float on liquid or liquid-containing material within a container, with a gas/liquid interface 823 positioned above a bottom surface of the upper liquid extraction openings 855.
  • pressurized gas is supplied to the container to cause pressurization of the liquid or liquid- containing material, such material is extracted from the container through the sump 861 and material extraction hose 868, which extends through the container closure element 870 to flow to a point of use.
  • liquid or liquid-containing material When liquid or liquid-containing material is sufficiently depleted from the container to cause liquid level to drop below the upper liquid extraction openings 855, liquid continues to flow through the lower liquid extraction opening 859 into the sump 861 to be extracted via the material extraction hose until liquid level in the container falls below the bottom of the sump 861.
  • the apparatus 805 may be removed from the pressure dispensing container, and then transferred to a second pressure dispensing container for continued dispensing of liquid or liquid-containing material.
  • the material dispensing system 907 includes a skimmer 950 arranged within a direct contact pressure dispensing container 910, and includes a pressurizable reservoir 994 arranged between the container 910 and a point of use 996 (e.g., a process tool).
  • the skimmer 950 includes at least one liquid extraction opening 955 positioned below an upper level of liquid (i.e., a gas/liquid interface 923) within the container 910, and a material extraction hose 968 is coupled between the skimmer 950 and an outlet port 916 of the container 910 (defined by container neck 915) arranged along a top wall 911 of the container 910.
  • the skimmer 950 includes an upper surface 951 that may be arranged above the gas/liquid interface 923 and a lower surface 952 arranged below the gas/liquid interface 923, with the at least one liquid extraction opening 955 being submerged below the gas/liquid interface 923.
  • a container closure element 970 is removably coupled to the neck 915 of the container 910. The container closure element 970 is arranged to permit passage of liquid or liquid-containing material out of the container 910 via the material extraction hose 968, to admit pressurized gas 920 into the container 910 from a pressurization gas source 981 via line 982, and may also permit pressurized gas to be vented from the container 910 through a pressure relief valve and/or vent 986.
  • At least one valve VI may be arranged between the pressurization gas source 981 and the container 910.
  • a sump portion 914 may be arranged along a lower wall 922 of the container 910, with the sump 914 and the skimmer 950 being compatible in size and shape to permit the skimmer 950 to be arranged proximate to or against a bottom of the sump 914 to maximize removal of liquid 925 from the container 910.
  • Liquid or liquid-containing material may be dispensed from the container 910 through a valve V2 to reach a pressurizable reservoir 994 arranged between the container 910 and a point of use 996 (e.g., process tool).
  • a liquid level 993 within the pressurizable reservoir 994 may be monitored with high and low level sensors 931, 932.
  • the pressurizable reservoir 994 may be in selective fluid communication with a pressurization gas source 981A by way of a gas valve V4, and optionally in selective fluid communication with a vacuum source 986A by way of a vacuum valve V5.
  • Liquid may be conveyed from the reservoir 994 through a downstream valve V3 to a point of use 996.
  • An interior of the pressurizable reservoir 994 is arranged to be pressurized to a higher pressure than the pressure dispensing container 910, to thereby increase pressure of liquid or liquid-containing material 993 before such liquid or liquid-containing material is supplied to the point of use 996.
  • the reservoir 994 can therefore operate as a transfer pump, and can define a substantially smaller volume than the volume of the upstream container 910.
  • pressurized gas 920 may be supplied from gas source 981 to contact liquid 925 in the pressure dispensing container 910, thereby pressurizing liquid to promote extraction of liquid through the skimmer 950 and material extraction hose 968. Such liquid is conveyed to the reservoir 994, and a valve between the reservoir 994 and container 910 may be closed. Pressurized gas may be supplied from gas source 981 A to the reservoir 994 to contact liquid 993, thereby elevating pressure of the liquid which is then supplied through valve to the point of use 996. When low liquid level is detected in the reservoir 994 by the low level sensor 932, additional liquid is supplied from the pressure dispensing container 910 to the reservoir 994 for continued dispensing to the point of use 996.
  • the vacuum source 986A may be used to remove gas from the reservoir 994 at times when the reservoir is not dispensing liquid to the point of use 996.
  • the vacuum source 986A may additionally or alternatively be used to transfer (or to assist in transfer) of liquid from the container 910 to the reservoir 994 by establishment of a pressure differential therebetween, thereby reducing the pressure that would otherwise need to be maintained in the container 910 to accomplish transfer of liquid to the reservoir 994.
  • Embodiments disclosed herein may provide one or more of the following beneficial technical effects: reduced dissolution of pressurized gas into liquids to be dispensed; enablement of use of rigid collapsible or rigid foldable containers without necessity for collapsible liners; and enablement of re-use of liquid dispensing components with different containers.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)

Abstract

L'invention concerne un appareil de distribution sous pression à contact direct comprenant un écumeur agencé pour flotter sur un liquide dans un récipient et définissant au moins une ouverture d'extraction de liquide positionnée au-dessous d'un niveau supérieur de liquide dans le récipient, et un flexible d'extraction de matière couplé entre l'écumeur et un orifice de sortie du récipient. Un retrait de liquide à proximité d'une interface gaz/liquide réduit ou évite la saturation du liquide avec le gaz de pressurisation. L'écumeur peut se déplacer en translation le long d'une baguette de support verticale. Un réservoir apte à être mis sous pression peut être agencé au-dessous du récipient de distribution de pression et d'un emplacement d'utilisation pour le liquide.
PCT/US2014/063378 2013-11-01 2014-10-31 Appareil et procédé pour distribution sous pression à contact direct à l'aide d'un élément flottant d'extraction de liquide WO2015066448A1 (fr)

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US201361899060P 2013-11-01 2013-11-01
US61/899,060 2013-11-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107876244A (zh) * 2017-11-13 2018-04-06 苏州晶樱光电科技股份有限公司 一种光伏切片用胶水或酒精的计量出料装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6012453A (en) * 1995-04-20 2000-01-11 Figgie Inernational Inc. Apparatus for withdrawal of liquid from a container and method
US6027313A (en) * 1997-06-13 2000-02-22 Enhanced Energy, Inc. Gas assisted fluid delivery system
US20070101935A1 (en) * 2002-03-23 2007-05-10 Wan-Soo Kim Apparatus and method for dispensing liquid crystal material
US20070113893A1 (en) * 2005-11-18 2007-05-24 Sun Jack J Pressurizing liquid delivery device
US20090045622A1 (en) * 2007-08-13 2009-02-19 Kyle Phillips Keyed Fluid Connector And Fluid Dispensing System
US20100133292A1 (en) * 2006-06-13 2010-06-03 Advanced Technology Materials, Inc. Liquid dispensing systems encompassing gas removal

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6012453A (en) * 1995-04-20 2000-01-11 Figgie Inernational Inc. Apparatus for withdrawal of liquid from a container and method
US6027313A (en) * 1997-06-13 2000-02-22 Enhanced Energy, Inc. Gas assisted fluid delivery system
US20070101935A1 (en) * 2002-03-23 2007-05-10 Wan-Soo Kim Apparatus and method for dispensing liquid crystal material
US20070113893A1 (en) * 2005-11-18 2007-05-24 Sun Jack J Pressurizing liquid delivery device
US20100133292A1 (en) * 2006-06-13 2010-06-03 Advanced Technology Materials, Inc. Liquid dispensing systems encompassing gas removal
US20090045622A1 (en) * 2007-08-13 2009-02-19 Kyle Phillips Keyed Fluid Connector And Fluid Dispensing System

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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