WO2015029118A1 - Application device - Google Patents

Abstract

The purpose of the present invention is to make a placement interval between a reservoir tank and an application head as small as possible while maintaining the ability to deliver a mixture in a highly mixed state. This application device (1) is configured so that a forced circulation flow generating mechanism (49) has: a motor (41) attached to the top of a reservoir tank (3); a rotary shaft (42) that is coupled to the motor (41) and that extends in the vertical direction in the reservoir tank (3); a circular rotating plate (48) that partitions the interior of the reservoir tank (3) into an upper chamber (51) and a lower chamber (50) by being disposed in the reservoir tank (3) in a state of being coupled to the rotary shaft (42) and that has a communicating hole (53) by which the upper chamber (51) and lower chamber (50) communicate; and a blade (49) that is fixed to the bottom face of the circular rotating plate (48). An inlet end for a supply channel (18) is opened in the lower chamber (50) from the lateral side of the reservoir tank (3).

Description

Coating device

This invention relates to the coating device which apply | coats the liquid mixture which shows a phase-separation tendency to a to-be-coated material.

Some coating apparatuses can apply a mixed solution (coating material) exhibiting a phase separation tendency to a material to be coated without uneven density. For example, Patent Document 1 (FIG. 3) discloses that the mixed liquid flows as a circulating flow between a storage tank that stores a mixed liquid that exhibits a phase separation tendency and a coating head that discharges the mixed liquid. The circulation path is configured to have a supply path that guides the liquid mixture from the storage tank side to the coating head side, and a return path that guides the liquid mixture from the coating head side to the storage tank side. However, there has been proposed a forced circulation flow generating means for forcibly creating a circulation flow of the mixed solution in the circulation path.

According to this coating apparatus, even when a liquid mixture exhibiting a phase separation tendency is applied to a material to be coated, the liquid mixture is forced to flow in the circulation path interposed between the storage tank and the coating head. The generation means forcibly causes a circulating flow, and the mixed liquid is maintained in a high mixed state at any time including when it is not discharged from the coating head (when it is in a state where phase separation is easy). As a result, the coating head is always supplied with a highly mixed liquid mixture, and when the mixed liquid is discharged from the coating head, the high mixed liquid mixture is discharged, resulting in uneven density in the coating material. The liquid mixture can be applied without any problems (to ensure uniform application).

JP 2012-134289 A

However, in the coating apparatus, the forced circulation flow generating means must be interposed in the middle of the circulation path, and accordingly, the forced circulation flow generation means can be installed (attached) to the circulation path. In addition, a space in which the forced circulation flow generating means can be disposed between the storage tank and the coating head is required. For this reason, even if it is going to make the said coating device compact by narrowing the space | interval between a storage tank and a coating head, there is a limit naturally.

The present invention has been made in view of the circumstances as described above, and its purpose is to reduce the arrangement interval between the storage tank and the coating head as much as possible while ensuring that the liquid mixture can be discharged in a highly mixed state. An object of the present invention is to provide a coating apparatus that can perform the above.

In order to achieve the above object, the present invention (the invention according to claim 1)
A circulation path for flowing the mixed liquid as a circulating flow is interposed between a storage tank for storing the mixed liquid exhibiting a phase separation tendency and an application head for discharging the mixed liquid. A supply passage that guides the liquid mixture from the storage tank side to the coating head side, and a return passage that guides the liquid mixture from the coating head side to the storage tank side. In the coating apparatus associated with the forced circulation flow generating means for forcibly generating the circulation flow,
The forced circulation flow generating means is
A rotational drive source attached to the top of the storage tank;
A rotating shaft connected to the rotational drive source and extending in the vertical direction in the storage tank;
It is disposed in the storage tank in a state of being connected to the rotating shaft, and is positioned in the upper chamber and the lower side of the upper chamber in a state in which the rotation accompanying the rotation of the rotating shaft is allowed. A rotating disk having a communication hole that communicates with the upper chamber and the lower chamber at a radially inner portion thereof.
A blade that is fixed to the lower surface of the rotating disk in an upright state from the lower surface, and extends from the radially inner side of the rotating disk to the radially outer side;
Is configured to have
The inlet end of the supply passage in the circulation path is configured to open from the side of the storage tank to the lower chamber of the storage tank. The preferred embodiment of claim 1 is as described in claim 2 and the following.

According to the present invention (the invention according to claim 1), when the rotation shaft is rotated by the rotation drive source in the storage tank, the rotation disk rotates, and based on the action of the blades on the lower surface of the rotation disk. Centrifugal force acts on the mixed liquid in the lower chamber in the storage tank. The mixed liquid that receives this centrifugal force is pushed out to the supply passage of the circulation path, and accordingly, the mixed liquid in the upper chamber in the storage tank is drawn into the lower chamber from the communication hole of the rotating disk, and the circulation path In this case, a forced circulation flow is generated, and the liquid mixture in the circulation path is maintained in a highly mixed state. For this reason, the coating head is always supplied with a highly mixed liquid mixture, and when the mixed liquid is discharged from the coating head, the high mixed liquid mixture is discharged (to ensure uniform application). ).

On the other hand, the forced circulation flow generating means is configured such that the rotation drive source is attached to the upper part of the storage tank, while the rotation shaft, the rotation disk, and the blade are incorporated in the storage tank internal space. There is no need to arrange the circulation flow generating means between the storage tank and the coating head by interposing the circulation path. For this reason, the interval between the storage tank and the coating head can be reduced by the amount that the forced circulation flow generating means need not be arranged between the storage tank and the coating head (between the storage tank and the coating head). (Shorter arrangement interval).

Therefore, in the coating apparatus, it is possible to reduce the arrangement interval between the storage tank and the coating head as much as possible while ensuring that the liquid mixture can be discharged in a highly mixed state.

According to the second aspect of the present invention, since the rotating disk is disposed so that the blades are close to the inner bottom surface of the storage tank, the pump casing is formed by the bottom side in the storage tank and the rotating disk. It is configured, and the blades are accommodated in the pump casing (lower chamber) so that the centrifugal force effectively acts on the mixed liquid in the lower chamber by the rotation of the blades accompanying the rotation of the rotating disk. be able to. For this reason, the flow velocity in the circulation path can be efficiently increased, and the mixed state of the mixed liquid in the circulation path can be further increased. As a result, even when a liquid mixture that tends to phase separate is used as a coating material, accurate coating can be performed.

In order to maintain the mixed state of the mixed liquid at a high level, the circulating flow needs to be circulated in the circulation path, so that the mixed liquid exceeding at least the lower chamber is stored in the storage tank. However, since the lower chamber is narrowed by placing the blades close to the inner bottom surface of the storage tank, the minimum height of the liquid mixture storage amount in the storage tank (minimum required) The lower limit height) can be reduced, and even when an expensive mixed liquid is stored and used in a storage tank, the mixed liquid can be used as much as possible.

According to the invention according to claim 3, since a predetermined gap is formed between the outer peripheral surface of the rotating disk and the inner peripheral surface of the storage tank, with the rotation of the rotating disk (blade), An upward flow of the mixed liquid rising from the lower chamber toward the upper chamber is generated while swirling along the inner peripheral surface of the storage tank via the predetermined gap, and the upward flow is generated by the rotating disk. It is drawn into the lower chamber through the communication hole. For this reason, in the upper chamber, a circulating flow that enters the upper chamber through a predetermined gap and returns to the lower chamber from the communication hole of the rotating disk is generated, and the circulating flow agitates the mixed liquid in the upper chamber. . Thereby, the mixed state of the liquid mixture in the upper chamber can be increased, and accordingly, the mixed state of the liquid mixture in the lower chamber can be further increased.

In addition, since a predetermined gap is provided between the outer peripheral surface of the rotating disk and the inner peripheral surface of the storage tank, the rotation disk can be assembled and removed from the storage tank with the inner peripheral surface of the storage tank. It can be performed smoothly without being disturbed by interference or the like. Thereby, maintenance work can be easily performed.

According to the invention which concerns on Claim 4, since the exit end of the return path in a circulation path is opened from the side of the storage tank in the upper chamber of the storage tank, the rotation disk (blade) can be rotated. Accordingly, an upward flow of the mixed liquid that rises from the lower chamber toward the upper chamber while rotating along the inner peripheral surface of the storage tank through a predetermined gap between the outer peripheral surface and the inner peripheral surface of the storage tank. Accordingly, even if the shape of the liquid level of the mixed liquid in the upper chamber constitutes a rotating paraboloid based on the swirling flow, the circulating flow from the return passage collides with the upward flow. And the rise of the upward flow can be suppressed. For this reason, the minimum liquid level (liquid level at the center in the radial direction of the storage tank) of the liquid level in the liquid mixture (the liquid level at the radial center of the storage tank) is increased by the amount that suppresses the increase in the upward flow. The difference (height) between the liquid level and the minimum liquid level can be narrowed, and based on the minimum liquid level of the liquid level in the liquid mixture, the liquid mixture that can be used until the circulating flow cannot be circulated in the circulation path The amount can be increased. As a result, the coating operation is performed in a state where the actual liquid level of the liquid mixture exceeds the lower limit height of the liquid mixture (the limit liquid level of the liquid mixture storage amount in the storage tank that is the minimum required for application). Even in situations where it is necessary, the liquid mixture in the storage tank can be used as much as possible, and even when an expensive liquid mixture is used, the liquid mixture can be used as much as possible.

In addition, when the rising of the upward flow can be suppressed, the amount of air taken into the liquid mixture when the liquid level of the liquid mixture on the radially outer side in the storage tank collapses radially inward is reduced. It is possible to prevent the circulation flow from being hindered in the circulation path.

According to the invention which concerns on Claim 5, the recessed part for circulation flow introduction opened to a lower chamber is formed in the inner surface of the bottom part of a storage tank in the radial direction inner side of a rotating disc, and it is in the depression for circulation flow introduction. Since the exit end of the return passage in the circulation path is opened, a recess and a lower chamber are also incorporated in the circulation path, and the circulation flow flows through them, and the blades are arranged in the circulation flow. be able to. For this reason, the centrifugal force based on the rotation of the blades accompanying the rotation of the rotating disk can be applied to the circulating (flowing) circulating flow, and the speed of the circulating flow is further increased. The mixed state can be further enhanced. Thereby, even if it is a liquid mixture with a high phase-separation tendency, it can be made into a high mixing state and the state can be maintained.

According to the invention which concerns on Claim 6, the board | substrate is provided, and the board | substrate has the attachment recess formed in the thickness direction one side surface, and the attachment through-hole penetrated in the thickness direction, The storage tank is configured by fitting one end of the cylindrical body into the mounting recess of the substrate, and the coating head is mounted on the other side in the thickness direction of the substrate by using the mounting through hole and mixed. Opening and closing adjustment of the introduction port at the discharge part attached to one side in the thickness direction of the board by using the attachment through hole and the discharge part where the introduction port for guiding the liquid to the discharge port side faces the attachment through hole A supply passage and a return passage formed in the substrate, the supply passage having an inlet end opened in the lower chamber of the storage tank, and an outlet end thereof being attached through. Open in the hole Since the return passage has an input end opened to the attachment through hole and an outlet end opened to the storage tank, the storage tank and the coating head are connected to the common substrate using the common substrate. The circulation path interposed between the two can be formed inside the substrate so that it does not appear outside. For this reason, while being able to handle a storage tank and a coating head integrally, it can be made simple and compact in appearance. Thereby, the said coating device can be made preferable also as what is mounted in a robot.

According to the seventh aspect of the present invention, a predetermined gap is formed between the outer peripheral surface of the rotating disk and the inner peripheral surface of the storage tank, and the return passage is more than the supply passage in the thickness direction of the substrate. Since it is arrange | positioned at the side close | similar to the other end part of the said cylinder, and the exit end of a return path is opened from the side of this storage tank in the upper chamber of a storage tank, the effect | action similar to the said Claim 6 is carried out. Not only can the effect be obtained, but, as in the above-described fourth aspect, the rise in the upward flow of the mixed liquid rising from the lower chamber toward the upper chamber through the predetermined gap can be suppressed, and the actual liquid level of the mixed liquid can be suppressed. Even under circumstances where the application work must be performed in a state that exceeds the lower limit height of the liquid mixture (the minimum liquid level of the liquid mixture storage amount in the storage tank that is the minimum required for application) The liquid mixture in the storage tank can be used as much as possible.

According to the eighth aspect of the present invention, the recess for circulating flow introduction that opens to the lower chamber is formed on the inner side in the radial direction of the rotating disk at the bottom of the mounting recess in the substrate, and the return passage is formed on the substrate. Since the outlet end of the return passage is opened into the recess for introducing a circulation flow, it is disposed on the side farther from the other end portion of the cylindrical body than the supply passage in the thickness direction. As in the case of claim 5 described above, the centrifugal force based on the rotation of the blades accompanying the rotation of the rotating disk is applied to the circulating (flowing) circulating flow. Thus, the flow rate of the circulating flow can be further increased, and the mixed state of the mixed liquid can be further increased.

According to the invention according to claim 9, the substrate is configured by stacking the first substrate, the second substrate, and the partition plate disposed between the first and second substrates, and the first substrate In addition, a storage recess formed on the inner surface of the first substrate and capable of rotating the rotating disk and the blade, a first through hole penetrating in the thickness direction of the first substrate, and an inner surface of the first substrate are formed. And a first communication groove that communicates between the storage recess and the first through-hole, and is disposed on the second substrate so as to face the storage recess, and at one end of the cylindrical body on the outer surface side of the second substrate A cylindrical body holding through hole, a second through hole disposed opposite to the first through hole, a cylindrical body holding through hole and a second through hole formed on the inner surface of the second substrate, A second communication groove is formed, and the partition plate is disposed to face the storage recess and the through hole for holding the cylindrical body, and the storage recess and the cylindrical body An intermediate through-hole that forms an attachment recess in cooperation with the holding through-hole, and a first through-hole that is disposed opposite to the first and second through-holes. Since the third through hole is formed, the substrate internal structure such as the supply passage and the return passage according to claim 7 is formed by forming the substrate using the first and second substrates and the partition plate. Can be easily formed.

According to the invention of claim 10, the substrate is configured by stacking the first substrate, the second substrate, and the partition plate disposed between the first and second substrates, and the first substrate. And a base recess that is formed on the inner surface of the first substrate in a state of being smaller than the inner diameter of the cylindrical body and forms a part of the recess for circulating flow introduction, and penetrates in the thickness direction of the first substrate. A first through hole and a first communication groove formed on the inner surface of the first substrate and connecting the basic recess and the first through hole are formed, and the second substrate has a diameter larger than that of the basic recess. A cylindrical holding through-hole that is arranged concentrically with the one end of the cylindrical body on the outer surface side of the second substrate, and a second through-hole that is arranged to face the first through-hole, A second connecting groove formed on the inner surface of the second substrate and connecting the cylindrical body holding through hole and the second through hole is formed, and the partition plate is opposed to the basic recess. An intermediate through hole that is disposed with the same opening diameter and forms a circulation flow introduction recess in cooperation with the basic recess, and the first and second through holes that are disposed to face the first and second through holes. Since the third through hole constituting the mounting through hole is formed in cooperation with the circuit board internal passage structure such as the circulation flow introduction recess, the supply passage, the return passage and the like in the above-mentioned claim 8 is simplified. Can be formed.

According to the eleventh aspect of the present invention, the baffle plate is disposed on the inner peripheral surface side of the storage tank above the rotating disk, and the baffle plate is radially inward of the storage tank from the storage tank inner peripheral surface. And extending in the vertical direction while projecting toward the inner side of the storage tank through a predetermined gap between the outer peripheral surface and the inner peripheral surface of the storage tank as the rotating disk (blade) rotates. Ascending flow of the mixed liquid that rises from the lower chamber toward the upper chamber while swirling along the peripheral surface is generated, and accordingly, the shape of the liquid surface of the mixed liquid in the upper chamber is a rotating paraboloid based on the swirling flow. Even if configured, the swirling flow in the upper chamber can be stopped by the baffle plate to reduce the diameter of the swirling flow, and accordingly, the rise in the liquid level of the swirling flow can be suppressed. For this reason, the height of the minimum liquid level on the rotating paraboloid in the swirling flow is increased to reduce the difference (height) between the highest liquid level and the lowest liquid level by the amount that restrains the swirling flow from rising. Based on the lowest liquid level of the rotating paraboloid in the swirling flow, the usable amount of the mixed liquid that can be used before the circulating flow cannot be circulated in the circulation path can be increased. As a result, the coating operation is performed in a state where the actual liquid level of the liquid mixture exceeds the lower limit height of the liquid mixture (the limit liquid level of the liquid mixture storage amount in the storage tank that is the minimum required for application). Even in situations where it is necessary, the liquid mixture in the storage tank can be used as much as possible, and even when an expensive liquid mixture is used, the liquid mixture can be used as much as possible.

In addition, as the liquid level rise of the mixed liquid can be suppressed, the amount of air taken in when the liquid level of the mixed liquid collapses inward in the radial direction of the storage tank can be reduced, and the flow of the circulating flow in the circulation path can be reduced. It is possible to suppress the obstruction.

According to the twelfth aspect of the present invention, the rotational speed adjusting means for adjusting the rotational speed of the rotational drive source, the pressurizing source for pressurizing the inside of the storage tank, and the pressure for adjusting the supply pressure of the pressurizing source to the inside of the storage tank Adjustment means, so that the rotational speed of the rotary drive source can be made appropriate so that the mixed liquid does not phase-separate according to the phase separation tendency of the mixed liquid, while the rotational speed of the rotary drive source changes The change in the discharge pressure of the coating head accompanying this can be returned to an appropriate one by adjusting the pressure in the storage tank. For this reason, the discharge pressure from the coating head can be made appropriate while preventing the phase separation of the mixed liquid.

According to the invention of claim 13, since the stirring blade is attached to the rotary shaft in the upper chamber, the mixed state of the mixed liquid in the upper chamber can be increased, and the mixed liquid in the increased mixed state can be obtained. It can be taken into the lower chamber and the circulation path to form a forced circulation flow. For this reason, the mixing state of the liquid mixture of a circulation path can be improved further.

The partially broken whole block diagram which shows the coating device which concerns on 1st Embodiment. The longitudinal cross-sectional view which shows the coating device which concerns on 1st Embodiment. FIG. 3 is a partially enlarged view of FIG. 2. The figure which looked at the 1st substrate which constitutes the substrate concerning a 1st embodiment from the inner surface side. The figure which looked at the 2nd substrate which constitutes the substrate concerning a 1st embodiment from the inner surface side. FIG. 3 is a cross-sectional view taken along line X6-X6 of FIG. FIG. 3 is a cross-sectional view taken along line X7-X7 in FIG. FIG. 3 is a sectional view taken along line X8-X8 in FIG. FIG. 3 is a cross-sectional view taken along line X9-X9 in FIG. The bottom view of FIG. Explanatory drawing explaining the effect | action in 1st Embodiment. The longitudinal cross-sectional view which shows the coating device which concerns on 2nd Embodiment. FIG. 13 is a partially enlarged view of FIG. 12. The figure which looked at the 1st substrate which constitutes the substrate concerning a 2nd embodiment from the inner surface side. FIG. 13 is a sectional view taken along line X15-X15 in FIG. FIG. 13 is a sectional view taken along line X16-X16 in FIG. FIG. 13 is a sectional view taken along line X17-X17 in FIG. Explanatory drawing explaining the effect | action in 2nd Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First Embodiment>
1 and 2 show a coating apparatus 1 according to the first embodiment. The coating apparatus 1 includes a substrate 2 having a substantially rectangular shape in plan view, and a storage tank 3 and a coating head 4 provided on the substrate 2 so as to be adjacent to each other in the longitudinal direction of the substrate 2. .

In the present embodiment, as shown in FIGS. 1 to 3, the substrate 2 includes a first substrate 2A, a second substrate 2B attached in a state of being stacked on the first substrate 2A, and a first substrate 2A. And a partition plate 2C interposed between the second substrates 2A and 2B.

As the first substrate 2A, as shown in FIGS. 1 to 4, a thick plate having a substantially rectangular shape in plan view is used. A main recess 5 is formed on the inner surface of the first substrate 2A so as to extend in the longitudinal direction (see FIG. 4). The main recess 5 has a width (length in the vertical direction in FIG. 3) as it goes from one side of the first substrate 2A in the longitudinal direction (left side in FIG. 4) to the other side (right side in FIG. 4). Are formed such that the inner peripheral surface of the main recess 5 has curved surfaces having a semicircular shape in plan view with different radii of curvature on both sides in the longitudinal direction (see FIG. 4). As a result, the inner surface 2Ai of the first substrate 2A has an attachment surface 2Ai-1 formed over the entire circumference of the first substrate 2A, and the inner surface of the attachment surface 2Ai-1 from the attachment surface 2Ai-1 to the first substrate 2A. A first bottom surface 2Ai-2 that is recessed inward in the thickness direction to form a step with the mounting surface 2Ai-1 is formed. In FIG. 4, reference numeral 6 denotes an attachment hole formed in the first substrate 2A in order to integrate the first substrate 2A and the second substrate 2B.

In the first substrate 2A, as shown in FIGS. 3 and 4, a storage recess 7, a first through hole 8, and a first communication groove 9 are formed.

The storage recess 7 is opened on one side in the longitudinal direction on the first bottom surface 2Ai-2 (inner surface 2Ai) of the first substrate 2A. The storage recess 7 is one side in the longitudinal direction of the main recess 5. It is formed with an opening having a circular shape in a plan view that is somewhat smaller in diameter than the inner peripheral surface in a semicircular shape in a plan view on the side.

The first through hole 8 penetrates the first substrate 2A in the thickness direction. The first through hole 8 is arranged on the other side in the longitudinal direction on the first bottom surface 2Ai-2 of the first substrate 2A, and the first through hole 8 is located on the other side in the longitudinal direction in the main recess 5. Is formed with an opening having a circular shape in plan view that is slightly reduced in diameter from the inner peripheral surface of the semicircular shape in plan view. The opening diameter of the first through hole 8 is much smaller than the opening diameter of the storage recess 7, and both the centers of the first through hole 8 and the storage recess 7 are the first substrate 2A. Are arranged in parallel in the longitudinal direction at the center in the width direction.

The first communication groove 9 is formed on the first bottom surface 2Ai-2 (inner surface 2Ai) of the first substrate 2A. The first communication groove 9 extends straight along the inner peripheral surface in a state slightly spaced from the inner peripheral surface on one side in the width direction of the main recess 5 (upper inner peripheral surface in FIG. 4). The groove width of the first communication groove 9 is substantially the same as the diameter of the first through hole 8, and the groove depth of the first communication groove 9 is substantially equal to the depth of the storage recess 7. One end side of the first communication groove 9 is connected to the storage recess 7 so that one groove wall thereof is tangent to the storage recess 7, and the other end of the first communication groove 9 is By opening the first through hole 8 at the groove bottom at the other end, the first through hole 8 is continued. As a result, the storage recess 7, the first communication groove 9, and the first through hole 8 are formed in the first bottom surface 2Ai-2 so as to be continuous with each other. -2 is supposed to remain.

As shown in FIGS. 2, 3, 5, and 6, the second substrate 2 </ b> B includes a tank body holding through hole 10 as a cylinder holding through hole, a second through hole 11, and a second through hole 10. A communication groove 12 is formed.

The tank body holding through-hole 10 has a small-diameter portion 10A, a large-diameter portion 10B larger in diameter than the small-diameter portion 10A, and a large-diameter portion 10B in order from the inner surface side to the outer surface side of the second substrate 2B. Is formed as a stepped through hole including a step portion 10C formed between the small diameter portion 10A and the small diameter portion 10A. The small-diameter portion 10 </ b> A is disposed to face the storage recess 7, and the opening diameter thereof is set to the same size as the opening diameter of the storage recess 7. The large-diameter portion 10B has a role as a holding hole for fitting and holding a tank body 20 as a cylindrical body to be described later, and the stepped portion 10C is connected to the tank body holding through-hole 10 of the tank body 20. It has a role as a stopper to stop the entry of the.

The second through hole 11 penetrates the second substrate 2B in the thickness direction. The second through hole 11 is arranged on the second substrate 2B on the other side in the longitudinal direction, and the opening of the second through hole 11 has the same opening diameter as the opening diameter of the first through hole 8, It faces the opening of the first through hole 8.

The second communication groove 12 is formed on the inner surface 2Bi of the second substrate 2B. The second communication groove 12 extends straight while having a groove width substantially the same as the diameter of the second through-hole 11 and a groove depth substantially equal to the thickness of the small diameter portion 10A. Is symmetrical with respect to the first communication groove 9 with respect to the center line extending in the longitudinal direction at the center in the width direction of the substrate 2 (see FIG. 6). One end side of the second communication groove 12 is connected to the small diameter portion 10A such that one groove wall of the second communication groove 12 is tangent to the small diameter portion 10A. The other end of the second end is continuous with the second through-hole 11 by opening the second through-hole 11 at the bottom of the groove at the other end.

In FIG. 6, reference numeral 13 denotes an attachment hole formed in the second substrate 2B corresponding to the attachment hole 6 in the first substrate 2A. The attachment holes 6 and 13 and the fasteners are used. Thus, the first and second substrates 2A and 2B are integrated.

As shown in FIGS. 2, 3, and 7, the partition plate 2C is interposed between the first substrate 2A and the second substrate 2B. Specifically, the partition plate 2 </ b> C has the same thickness as the depth of the main recess 5, and the plan view shape of the partition plate 2 </ b> C is the same as the opening shape of the main recess 5. The partition plate 2C is fitted in the main recess 5 of the first substrate 2A (see FIG. 7). Therefore, the partition plate 2C is received by the first bottom surface 2Ai-2 of the main recess 5, and the top surface of the partition plate 2C cooperates with the mounting surface 2Ai-1 (inner surface 2Ai) of the first substrate 2A. It constitutes one aspect. Thus, as the first substrate 2A and the second substrate 2B are integrated by the fastener, the partition plate 2C is sandwiched between the first bottom surface 2Ai-2 of the first substrate 2A and the inner surface 2Bi of the second substrate 2B. Is supposed to be done.

In the partition plate 2C, as shown in FIGS. 3 and 7, an intermediate through hole 14 and a third through hole 15 are formed. The intermediate through hole 14 penetrates the partition plate 2C in the thickness direction on one side in the longitudinal direction of the partition plate 2C. The intermediate through hole 14 is arranged to face the storage recess 7 and the small diameter portion 10A while making the opening diameter the same as the opening diameters of the storage recess 7 and the small diameter portion 10A. 14 constitutes a mounting recess 16 in cooperation with the tank body holding through-hole 10 and the storage recess 7. In this case, the intermediate through hole 14, the inside of the small diameter portion 10 </ b> A of the tank body holding through hole 10 and the inside of the storage recess 7 cooperate to form a continuous hole maintaining a constant opening diameter.

The third through hole 15 penetrates the partition plate 2C in the thickness direction on the other side in the longitudinal direction of the partition plate 2C. The third through-hole 15 is opposed to the first and second through- holes 8 and 11 while having an opening diameter slightly larger than that of the first and second through- holes 8 and 11. Thus, the third through hole 15 and the first and second through holes 8 and 11 cooperate to form an attachment through hole 17.

As described above, the partition plate 2C is interposed between the first and second substrates 2A and 2B, and as a result, the opening side of the first connection groove 9 and the second connection groove 12 of the first substrate 2A. The opening side is closed. For this reason, the partition plate 2C and the first substrate 2A constitute a supply passage 18 therebetween, and the partition plate 2C and the second substrate 2B constitute a return passage 19 therebetween. Then, one end (inlet end) of the supply passage 18 is opened in the housing recess 7, and the other end (outlet end) is opened in the attachment through hole 17 (first through hole 8). One end (inlet end) of the return passage 19 is opened in the attachment through hole 17 (second through hole 11), and the other end (outlet end) is opened in the tank body holding through hole 10. .

As shown in FIGS. 1 to 3, the storage tank 3 includes a cylindrical transparent tank body (tubular body) 20 and the substrate 2. The inner diameter of the tank body 20 is substantially the same as the diameter of the storage recess 7, the intermediate through hole 14, and the small diameter portion 10 </ b> A of the tank body holding through hole 10, and the outer diameter of the tank body 20 is held in the tank body. The diameter of the large-diameter portion 10B of the through-hole 10 for use is substantially the same. One end (lower end) of the tank body 20 is fitted in the large diameter portion 10B of the tank body holding through hole 10, and one end surface of the tank body 20 is in the tank body holding through hole 10. It is in contact with the step portion 10C. Thereby, the inner peripheral surface of the tank main body 20, the inner peripheral surface of the small diameter portion 10A in the tank main body holding through hole 10, the inner peripheral surface of the intermediate through hole 14 in the partition plate 2C, and the inner peripheral surface of the storage recess 7 are the same. A continuous inner peripheral surface is formed while maintaining the diameter, and the bottom 7a of the storage recess 7 of the first substrate 2A forms the bottom of the storage tank 3, and the tank body 20 and the substrate 2 are stored The tank 3 is constituted.

An upper lid 22 is provided on the other end surface of the tank body 20 via a fixing plate 21 as shown in FIGS.

The fixing plate 21 is fixed to upper ends of a plurality of support columns 23 erected on the upper surface of the substrate 2 (second substrate 2B), and a fitting recess 24 is formed on the lower surface of the fixing plate 21. Yes. The other end of the tank body 20 is fitted in the fitting recess 24, and the tank body 20 is sandwiched between the bottom 24 a of the fitting recess 24 and the substrate 2. At this time, the bottom 24 a of the fitting recess 24 exists only in the contact area with the other end surface of the tank body 20, and the other end opening of the tank body 20 is opened in the bottom 24 a of the fitting recess 24. A through-hole 25 is formed in the region where is exposed.

The upper lid 22 is detachably mounted on the fixing plate 21 by mounting screws 26 (see FIG. 1). A fitting convex portion 27 is provided on the lower surface of the upper lid 22, and when the upper lid 22 is attached to the fixing plate 21, the fitting convex portion 27 of the upper lid 22 is fitted into the through hole 25 of the fixing plate 21. Then, the other end opening of the tank body 20 is closed.

2 and 3, reference numeral 28 denotes a seal member that ensures liquid tightness.

In the storage tank 3, as shown in FIG. 2, a mixed solution 29 (see a virtual line) as a coating material is stored. The liquid mixture is intended for those exhibiting a phase separation tendency, and as such a liquid mixture, specifically, liquid particles or solid particles dispersed in a plurality of types of liquid mixtures that are easily phase-separated. A mixed liquid or the like is an object. In the present embodiment, in order to form a phosphor dispersion film on the LED light-emitting element, a liquid phosphor-containing mixed liquid in which phosphor powder is mixed with a solvent or a resin binder is used as a liquid mixture 29 in the storage tank 3. It is stored in. Of course, in the coating apparatus 1, a liquid mixture that does not undergo phase separation can also be used.

As shown in FIGS. 1 to 3, the coating head 4 adjusts the discharge unit 4A for discharging the liquid mixture 29 to the substrate 2 and the supply amount of the liquid mixture 29 to the discharge unit 4A. The supply adjustment unit 4B is assembled.

The discharge portion 4A is attached to the other side (first substrate 2A) in the thickness direction of the substrate by using the first through hole 8 (attachment through hole 17), and the first through hole 8 is connected to the discharge portion. It is blocked by 4A. The discharge unit 4A has an introduction port 30 for introducing the mixed liquid 29 therein, a discharge port 31 for discharging the mixed liquid 29 introduced into the introduction port 30 to the outside, and the discharge port 31 and the introduction port 30. , And the introduction port 30 faces the mounting through hole 17 (first through hole 8).

As shown in FIGS. 1 to 3, the supply adjusting unit 4B is attached to the one side in the thickness direction of the substrate 2 (second substrate 2B) by using the second through hole 11 (attachment through hole 17). And the 2nd through-hole 11 which comprises the attachment through-hole 17 is obstruct | occluded by the supply adjustment part 4B.

The supply adjusting unit 4B includes an operating mechanism 33 and a needle valve 34 reciprocated by the operating mechanism 33.

As is well known, the operating mechanism 33 houses the piston 36 in the hydraulic working chamber 35, reciprocates the piston 36 based on the supply and discharge of the hydraulic pressure into the hydraulic working chamber 35, etc. It is to be transmitted to an operating shaft 37 extending toward 4A.

The needle valve 34 is connected to the tip of the operating shaft 37 of the operating mechanism 33 with an arrangement state facing the inlet 30 of the discharge unit 4A. For this reason, the needle valve 34 reciprocates as the operating shaft 37 reciprocates, and based on this, the needle valve 34 adjusts the opening and closing of the inlet 30 in the discharge part 4A. In this case, as is known, the opening / closing operation by the needle valve 34 is basically performed by controlling the supply and discharge of the hydraulic pressure into the working chamber 35 using a control unit (not shown) as a control means. Of course, the hydraulic pressure in and out of the hydraulic working chamber 35 may be appropriately supplied by manual operation by the operator.

Reference numeral 38 denotes an adjustment knob for adjusting the lift amount (discharge amount) when the needle valve 34 is opened from the introduction port 30.

As shown in FIGS. 1 to 3, the coating apparatus 1 includes a forced circulation flow generation mechanism 40 as a forced circulation flow generation means. The forced circulation flow generation mechanism 40 includes a motor 41 as a rotational drive source, a rotary shaft 42 that transmits a driving force of the motor 41, and a pump mechanism 43 that is driven by the rotation of the rotary shaft 42. .

The motor 41 is mounted on the upper cover 22 of the storage tank 3 via a protective cylinder 44 and a support box 45 as shown in FIGS.

As the protective cylinder 44, a cylinder having flange portions at both ends in the axial center direction is used, and the protective cylinder 44 has one end fixed to the center of the upper lid 22. For this reason, the other end of the protective cylinder 44 extends above the upper cover 22 of the storage tank 3 while aligning the axial center of the protective cylinder 44 with the axial center of the storage tank 3.

The support box 45 has an internal space, and the other end of the protective cylinder 44 is fixed to the bottom plate of the support box 45.

The motor 41 is fixed to the upper plate portion of the support box 45, and the output shaft 41 a extends through the upper plate portion of the support box 45 so as to be rotatable and protrudes into the support box 45.

As shown in FIGS. 1 and 2, one end (upper end) of the rotating shaft 42 is connected to the output shaft 41 a of the motor 41, and the other end (lower end) passes through the storage tank 3. It extends toward the bottom 7a (the bottom 7a of the storage recess 7). The rotation shaft 42 is arranged so that the rotation axis coincides with the axis of the storage tank 3, and the rotation shaft 42 covers the bottom plate portion of the support box 45, the inside of the protective cylinder 44, and the upper lid 22 on the way. It penetrates in a rotatable state. In this case, one end of the rotating shaft 42 is connected to the output shaft 41 a of the motor 41 via the connector 46 in the support box 45, and the other end of the rotating shaft 42 is the inner periphery of the upper end of the protective cylinder 44. And it is rotatably supported via a bearing 47 on the inner periphery of the lower end.

The pump mechanism 43 is disposed on the bottom side in the storage tank 3 as shown in FIGS. The pump mechanism 43 includes a rotating disk 48 and a blade 49 fixed to the lower surface of the rotating disk 48.

The rotating disc 48 is attached to the other end of the rotating shaft 42 via a blade 49 as shown in FIGS. 1 to 3, 6, 8, and 9. The rotating disk 48 has a thickness substantially the same as that of the partition plate 2 </ b> C, and the rotating disk 48 has a plate surface of the rotating disk 48 at the bottom of the storage tank 3 in the storage tank 3. It is arranged at the same height position as the partition plate 2C. Moreover, the rotating disk 48 is disposed in the storage tank 3 in a state in which the rotation associated with the rotation of the rotating shaft 42 is allowed. The rotating disk 48 allows the inside of the storage tank 3 to be more than the partition plate 2C. The lower chamber 50 is partitioned into a lower chamber 50 and an upper chamber 51 above the partition plate 2C. Accordingly, the inlet end of the supply passage 18 is opened to the lower chamber 50 from the side of the storage tank 3, and the return passage 19 has an outlet end near the upper surface of the rotating disk 48 and the upper chamber 51. The storage tank 3 is opened from the side.

Further, the rotating disk 48 is formed with a communication hole 53 having a constant diameter from the center. The communication hole 53 passes through the rotating disk 48 in the thickness direction, and the upper chamber 51 and the lower chamber 50 in the storage tank 3 are communicated with each other through the communication hole 53.

In the present embodiment, in consideration of ensuring a state in which the rotation associated with the rotation of the rotating shaft 42 is allowed, assembling workability, and the like, between the outer peripheral surface of the rotating disk 48 and the inner peripheral surface of the storage tank 3. A predetermined gap 52 is formed, and for example, 1 to 2 mm is set as the predetermined gap 52.

In the present embodiment, as shown in FIGS. 1 to 3, 9, and 10, the blades 49 have a plurality of (four in the present embodiment) strips on the lower surface of the rotating disk 48. (The reference numeral 49 is also used for each element). Specifically, each strip-shaped blade 49 extends from the center of the rotating disk 48 radially outward while the width direction thereof is directed in the vertical direction (the direction in which the rotating shaft 42 extends). The plurality of blades 49 are fixed at equal angles in the circumferential direction of the rotating disk 48 (in this embodiment, every 90 degrees). The other end of the rotating shaft 42 is connected to the center of the plurality of blades 49, and the other end of the rotating shaft 42 is connected to the rotating disk 48 via the plurality of blades 49.

The plurality of blades 49 are arranged in a state of being close to the bottom 7a of the storage tank 3 (the bottom 7a of the storage recess 7). For this reason, the rotating disk 48 and the bottom side of the storage tank 3 constitute a pump casing, and a plurality of blades 49 are accommodated in the pump casing so as to exhibit a pump function.

Thus, when the rotating disk 48 and the plurality of blades 49 are rotated by the motor 41 and the rotating shaft 42 in the state where the mixed liquid 29 is stored in the storage tank 3, the plurality of blades 49 are in the lower chamber. Thus, the centrifugal force can be effectively applied to the mixed solution 29 in 50, and the mixed solution 29 receiving the centrifugal force is pushed out to the supply passage 18 (the arrow in the supply passage 18 in FIGS. 2 and 3). reference). Along with this, the mixed liquid 29 in the upper chamber 51 is drawn from the communication hole 53 of the rotating disk 48, and the mixed liquid 29 pushed out to the supply passage 18 continues. When the liquid mixture 29 continues to be extruded, the extruded liquid mixture 29 is supplied to the coating head 4 via the supply passage 18, and the liquid mixture 29 is not discharged from the coating head 4 to the outside. Sometimes, it returns to the upper chamber 51 through the attachment through hole 17 and the return passage 19. Thus, the upper chamber 51, the communication hole 53, the lower chamber 50, the supply passage 18, the attachment through-hole 17, and the return passage 19 constitute a circulation path 60, and forced circulation flow generation is performed in the circulation path 60. The mechanism 40 produces | generates the 1st forced circulation flow C1, as shown by the arrow of FIG. 2, FIG.

As shown in FIG. 2, a power source 55 is connected to the motor 41 via a driver circuit 54 (current control unit 54a), and a speed setting device is connected to the driver circuit 54 (comparison amplification unit 54b). The speed setting voltage can be input from 56. For this reason, when the speed setting voltage is input from the speed setter 56 to the comparison amplification section 54b of the driver circuit 54, the comparison amplification section 54b of the driver circuit 54 detects the rotational speed of the motor 41 and uses it as a speed signal. Convert to voltage. Then, the comparison amplification unit 54b calculates a difference between the speed signal voltage and the speed setting voltage, and outputs the difference to the current control unit 54a of the driver circuit 54. As a result, the current control unit 54 a of the driver circuit 54 gives a current corresponding to the output value from the comparison amplification unit 54 b to the motor 41, and the rotation speed of the motor 41 approaches the rotation speed set by the speed setting unit 56. become. Of course, in this case, a voltage control unit may be used instead of the current control unit 54a of the driver circuit 54. In this case, the voltage control unit applies a voltage to the motor 41 according to the output value from the comparison amplification unit 54b. Will be output.

Accordingly, when the phase separation tendency of the mixed liquid 29 in the storage tank 3 is particularly strong, the rotational speed of the motor 41 is increased by the speed setting device 56 accordingly (the rotational speed of the plurality of blades 49 is increased). The flow rate of the liquid mixture 29 (first forced circulation flow C1) in the circulation path 60 (in particular, the supply passage 18, the mounting through hole 17, and the return passage 19) can be increased, and the liquid mixture in the storage tank 3 can be increased. Even if 29 has a strong phase separation tendency, the mixed state of the mixed liquid 29 is set to a high state (phase separation preventing state) in the circulation path 60, and the state can be maintained.

In the present embodiment, a stirring blade 61 is attached to the rotating shaft 42 in the upper chamber 51 as shown in FIGS. This enhances the mixed state of the mixed liquid 29 in the upper chamber 51 to stirring, and supplies it to the lower chamber 50 through the communication hole 53, whereby the mixed liquid 29 in the high mixed state is supplied to the first forced circulation flow C1. It is trying to. Thereby, the mixed state of the liquid mixture 29 in the circulation path 60 further increases.

As shown in FIG. 2, a compressed air source 57 as a pressurizing source is connected to the storage tank 3 via a supply pipe 58. The compressed air source 57 pressurizes the storage tank 3 when the coating apparatus 1 is used. Based on this pressurization, the discharge pressure of the mixed liquid 29 from the coating head 4 is made appropriate. Yes. Specifically, when the inside of the storage tank 3 is not pressurized when the coating apparatus 1 is used (in the case of atmospheric pressure), the flow velocity at the outlet end (near the inlet 30) of the supply passage 18 is fast. The flow velocity at the outlet end of the return passage 19 (flow velocity into the storage tank 3) is a result of the throttle structure (for example, between the third through hole 15 and the supply adjusting portion 4B) from the supply passage 18 to the return passage. Or the pressure loss in the passage, the flow velocity at the outlet end of the supply passage 18 is reduced, and the pressure (discharge pressure) at the outlet end of the supply passage 18 is reduced to the return passage 19. It drops below the pressure at the outlet end (atmospheric pressure) (Bernoulli's theorem). For this reason, when the inside of the storage tank is not pressurized (atmospheric pressure state), even if an attempt is made to discharge the liquid mixture from the coating head 4 (discharge portion 4A), the discharge pressure is lower than the atmospheric pressure. The liquid 29 cannot be discharged. Therefore, in the discharge unit 4A, the inside of the storage tank 3 is pressurized by the compressed air source 57 so that the liquid mixture can be discharged with an appropriate discharge pressure higher than the atmospheric pressure.

As shown in FIG. 2, the supply pipe 58 is provided with a regulator 59 as pressure adjusting means between the compressed air source 57 and the storage tank 3. The regulator 59 adjusts the supply of compressed air pressure from the compressed air source 57 in order to maintain the inside of the storage tank at a predetermined pressure (set pressure). As the regulator 59, the set pressure is adjusted by manual operation. What can be used is used. As described above, the regulator 59 is provided when the flow rate of the mixed liquid 29 in the supply passage 18 is adjusted by the speed setting device 56 in accordance with the phase separation tendency of the mixed liquid 29, and the outlet in the supply passage 18. This is because the end pressure (discharge pressure) changes. More specifically, if the flow rate of the mixed liquid 29 in the supply passage 18 changes, the flow rate at the outlet end of the return passage 19 changes accordingly, and the pressure (discharge pressure) at the outlet end in the supply passage 18 changes. Then, it changes in proportion to the square difference of each flow velocity after the change (Bernoulli's theorem). In particular, when the flow rate of the liquid mixture 29 in the supply passage 18 is increased as compared with the normal case (reference mode), the pressure drop at the outlet end of the supply passage 18 becomes large, and the storage tank 3 in the reference mode is in the reference mode. With the applied pressure, the discharge pressure is insufficient, and an appropriate discharge pressure cannot be secured. For this reason, the discharge pressure from the coating head 4 is made appropriate by applying the pressure in the storage tank 3 so that the set pressure of the regulator 59 can be adjusted. In this case, the set pressure of the regulator 59 is manually adjusted because there are many types of mixed liquids 29 to be handled and the tendency of phase separation of the mixed liquids 29 varies. This is because there is a possibility that it cannot be exhausted. For this reason, in the present embodiment, basically, before starting a full-scale coating operation, the rotational speed of the motor 41 is appropriately adjusted by the speed setting device 56 from the viewpoint of preventing phase separation of the mixed liquid. Then, the set pressure of the regulator 59 is appropriately adjusted from the viewpoint of securing an appropriate discharge pressure, and then test coating is performed on the test piece, and the test results (measurement results of coating amount per unit area, density unevenness, etc. Appropriate set values are found from visual inspection results.

Of course, from the viewpoint of workability, the degree of the phase separation tendency of the mixed liquid is changed to each mode of “fast phase separation tendency (strong)”, “slow phase separation tendency (weak)”, and “normal phase separation tendency”. It is preferable that a typical set value (a set value by the speed setting device 56, a set pressure of the regulator 59) corresponding to each mode is obtained in advance and provided to an operator (user).

Next, the usage method for the coating apparatus 1 will be described together with the operation.

When using the coating apparatus 1, first, the upper lid 22 is removed from the fixed plate 21, and the upper end opening of the tank body 20 is opened to the outside. At this time, each element 41, 42, 43, etc. of the forced circulation flow generation mechanism 40 is integrally assembled to the upper lid 22 via the protective cylinder 44, the support box 45, etc., and with the removal of the upper lid 22, The forced circulation flow generation mechanism 40 is also removed. In this case, the rotary disk 48 is also taken out by pulling out the rotary shaft 42 from the tank body 20 when the upper lid 22 is removed, but between the rotary disk 48 and the inner peripheral surface of the tank body 20. The predetermined gap 52 is formed, and interference between the rotating disk 48 and the inner peripheral surface of the tank body 20 does not become a problem.

When the upper end opening of the tank body 20 is opened to the outside, a mixed liquid as a coating material is injected into the tank body 20 from the upper end opening, and when the injection is finished, the upper lid 22 is fixed on the fixing plate 21. . Of course, along with this, the elements 41, 42, 43, etc. of the forced circulation flow generating mechanism 40 are arranged at predetermined positions (set state).

When the mixed liquid 29 is stored in the storage tank 3 (tank body 20), the test application is performed on the test piece. Based on the test result for the test piece, the set rotation speed of the motor 41 (flow velocity of the first forced circulation flow C1 in the circulation path 60) and the storage tank 3 are applied to apply the mixed liquid 29 to the material to be coated without unevenness of concentration. This is to determine whether or not the set pressure (discharge pressure from the coating head 4) is appropriate according to the liquid mixture 29.

The setting of each set value basically increases the set rotational speed of the motor 41 as the phase separation tendency of the mixed liquid 29 increases (supply passage 18. mounting through hole 17 and first forced circulation in the return passage 19). In addition, the set pressure of the compressed air source 57 is increased as the flow rate of the first forced circulation flow C1 in the supply passage 18 and the like is increased. Usually, from the viewpoint of workability and the like, A typical set value (set rotation speed of the motor 41, set pressure in the storage tank 3) according to the type of the mixed liquid 29 (classification based on the phase separation tendency) is used as the set value.

When each set value is set, the application operation of the mixed liquid 29 is started by the application head 4 of the application apparatus 1 on the LED light emitting element as the material to be applied.

When the coating operation is started, the motor 41 is driven in the coating apparatus 1, and the rotation shaft 42 is rotated around the axis by the driving of the motor 41. By the rotation of the rotating shaft 42, the mixed liquid 29 is stirred by the stirring blade 61 in the upper chamber 51 in the storage tank 3, and the mixed state of the mixed liquid 29 in the upper chamber 51 becomes high.

At the same time, the rotating disk 48 and the plurality of blades 49 are also rotated by the rotating shaft 42, and centrifugal force is applied to the mixed liquid 29 in the lower chamber 50 in the storage tank 3 by the plurality of blades 49, The liquid mixture 29 receiving the centrifugal force is pushed out to the supply passage 18. As the mixed liquid 29 is pushed out into the supply passage 18 in the lower chamber 50, the mixed liquid 29 in the upper chamber 51 is drawn through the communication hole 53 of the rotating disk 48, and the plurality of blades 49 are mixed. The liquid 29 is continuously pushed out to the supply passage 18 (pump action). The liquid mixture pushed out to the supply passage 18 flows into the return passage 19 via the attachment through-hole 17, and the liquid mixture 29 that has entered the return passage 19 flows into the upper chamber 51 in the storage tank 3 ( (See arrows in FIGS. 2 and 3). For this reason, the lower chamber 50, the supply passage 18, the mounting through-hole 17, the return passage 19, the upper chamber 51, and the communication hole 53 constitute a circulation path 60, and in the circulation path 60, the first forced circulation flow C1 will be circulated.

Therefore, the coating apparatus 1 has a relatively fast flow rate of the mixed solution 29 in the supply passage 18, the attachment through hole 17, and the return passage 19, particularly in the circulation path 60. Stirring is performed based on the flow velocity (turbulent flow state). For this reason, in the supply passage 18, the mounting through-hole 17, and the return passage 19, the mixed liquid 29 is maintained in a highly mixed state including when the mixed liquid 29 is not discharged from the coating head 4. The mixed liquid 29 in a high mixed state is always supplied. As a result, when the mixed liquid 29 is discharged from the coating head 4, the mixed liquid 29 in a highly mixed state is discharged, and the mixed liquid 29 is applied to the LED light emitting element as the material to be coated without density unevenness. can do.

In this case, as shown in FIG. 3, the rotating disc 48 divides the upper chamber 51 and the lower chamber 50, and the rotating disc 48 has a plurality of blades 49 close to the inner bottom surface of the storage tank 3. Since it is disposed, the bottom side in the storage tank 3 and the rotating disk 48 constitute a pump casing, and a plurality of blades 49 are accommodated in the pump casing so as to exhibit a pump function. . For this reason, when the plurality of blades 49 are rotated in accordance with the rotation of the rotating disk 48, the plurality of blades 49 effectively exert a centrifugal force on the mixed liquid 29 in the lower chamber 50. The flow rate of the mixed liquid 29 in the supply passage 18 and the like can be increased efficiently. (Efficient pump action).

On the other hand, at this time, with the rotation of the rotating disk 48 and the plurality of blades 49, the predetermined gap 52 is provided between the outer peripheral surface of the rotating disk 48 and the inner peripheral surface of the storage tank 3. Then, an upward flow 63 of the mixed liquid 29 rising from the lower chamber 50 toward the upper chamber 51 is generated while turning along the inner peripheral surface of the storage tank 3 via the predetermined gap 52 (in FIG. 11, Up arrow virtual line). The upward flow 63 is drawn into the lower chamber 50 through the communication hole 53 of the rotating disk 48. For this reason, the mixed liquid 29 enters the upper chamber 51 from the predetermined gap 52, and a second forced circulation flow C2 that returns from the communication hole 53 of the rotating disk 48 to the lower chamber 50 is generated. The second forced circulation flow C2 stirs the mixed liquid 29 in the upper chamber 51 (see the phantom line of the second forced circulation flow C2 in FIG. 11).

For this reason, in the upper chamber 51, not only stirring based on the rotation of the stirring blade 61 but also stirring by the flow of the second forced circulation flow C2 is added, and the mixed state of the mixed liquid 29 in the upper chamber 51 is further increased. , Enhanced. The mixed liquid 29 in a high mixed state is drawn into the lower chamber 50 through the communication hole 53 as the plurality of blades 49 rotate, and the mixed state of the mixed liquid 29 based on the flow velocity in the circulation path 60 is obtained. Is further enhanced.

On the other hand, as shown in FIG. 11, the upward flow 63 and the rotating disc 48 bring the liquid surface 29 a of the mixed liquid 29 in the upper chamber 51 into a rotating parabolic state, and the liquid level of the mixed liquid 29 is set in the storage tank 3. While increasing in the radially outward direction, the liquid level of the mixed liquid 29 at the center in the radial direction in the storage tank 3 is set to the lowest. For this reason, regarding the liquid mixture 29 in the storage tank 3, the amount which can be used substantially becomes a problem.

That is, in the circulation path 60, in order to maintain the mixed state of the mixed liquid 29 in a high state, the first forced circulation flow C1 needs to be generated, and the first forced circulation flow C1 is continued. In this case, it is necessary that the mixed liquid 29 exceeding at least the lower chamber 50 is stored in the storage tank 3. If the lower limit height of the liquid mixture in the storage tank 3 that is the minimum required to continue the first forced circulation flow C1 is indicated by the symbol Hmin in FIGS. 3 and 11, the liquid level of the actual liquid mixture 29 Need to exceed this. Under the condition that such a condition must be satisfied, the liquid level 29a of the liquid mixture 29 in the upper chamber 51 becomes a paraboloidal state as shown by the phantom line in FIG. When the liquid level of the mixed liquid 29 at the center in the radial direction in the storage tank 3 is the lowest, the mixed liquid 29 at the center in the radial direction in the storage tank 3 is higher. Is lower than the lower limit height Hmin of the liquid mixture in the storage tank 3, the liquid level of the liquid mixture 29 on the radially outer side of the storage tank 3 is the lower limit of the liquid mixture in the storage tank 3. Even if the height Hmin is exceeded, the first forced circulation flow C1 can no longer be continued.

Therefore, in the present embodiment, the outlet end of the return passage 19 is opened from the side of the storage tank 3 to the upper chamber 51 in the vicinity of the rotating disk 48 and flows out from the return passage 19. Is made to collide with the upward flow 63 (C2). As a result, the direction of the upward flow 63 is inclined inward in the radial direction of the storage tank 3 (see the upward flow 63 indicated by a solid line in FIG. 11), and the radially outermost mixed liquid 29 in the storage tank 3 The rise in the liquid level is suppressed as compared with the case where the upward flow 63 and the first forced circulation flow C1 from the return passage 19 do not collide (refer to the solid line 29a). For this reason, the height of the minimum liquid level of the paraboloid in the mixed liquid 29 is increased by the amount that suppresses the rise of the upward flow 63, and the difference (height between the highest liquid level and the lowest liquid level of the mixed liquid 29 is increased. ) And the liquid mixture 29 in the storage tank 3 can be used even in a situation where the coating operation must be performed in a state where the actual liquid level of the liquid mixture 29 exceeds the lower limit height Hmin of the liquid mixture. Can be used as much as possible.

This point is also devised in terms of structure.

In the coating apparatus 1, a plurality of blades 49 are used as the plurality of blades 49, and each blade 49 rotates in a circular shape while its width direction is directed in the vertical direction (the axial extension direction of the storage tank 3). It is fixed to the lower surface of the plate 48, and the plurality of blades 49 are arranged so as to be close to the inner bottom surface of the storage tank 3. For this reason, the vertical length from the inner bottom surface of the storage tank 3 to the rotating disk 48 can be made extremely short, and the liquid mixture in the storage tank 3 that is the minimum required to continue the first forced circulation flow C1. The lower limit height Hmin itself is low. As a result, also from this point, the liquid mixture 29 in the storage tank 3 can be used as much as possible, which is advantageous even when the expensive liquid mixture 29 is stored in the storage tank 3 and used.

Further, as described above, when the liquid surface 29a of the liquid mixture 29 in the upper chamber 51 is in a paraboloid state as shown by the phantom line in FIG. The higher the liquid level of the liquid 29, the more easily the liquid surface 29 a collapses inward in the radial direction of the storage tank 3, and accordingly, the air is more easily taken into the liquid mixture 29.

However, as described above, the rising of the upward flow 63 can be suppressed by the first forced circulation flow C1 from the outlet end of the return passage 19, and the liquid level of the mixed liquid 29 in the radial center in the storage tank 3 (the mixed liquid 29) The liquid level (maximum liquid level) of the liquid mixture 29 on the radially outer side in the storage tank 3 with reference to the minimum liquid level can be lowered. For this reason, when the liquid level 29a of the liquid mixture 29 on the radially outer side in the storage tank 3 collapses radially inward, the amount of air taken into the liquid mixture 29 can be reduced, and the circulation The passage of the first forced circulation flow C1 in the path 60, particularly the supply passage 18, the attachment through hole 17, and the return passage 19, is suppressed.

When the coating operation by the coating apparatus is completed, the driving of the motor 41 is stopped, and the remaining mixed liquid 29 in the storage tank 3 and the circulation path 60 is removed. If the mixed solution 29 is left in the circulation path 60 or the like, the mixed solution is phase-separated. In particular, in the mixed solution 29 containing solid particles, the solid particles are deposited, and the next coating operation is performed. This is because it interferes with the situation. For this reason, in the coating apparatus 1, after stopping the drive of the motor 41, the needle valve 34 is withdrawn from the introduction port 30 by the adjustment knob 38, and the introduction port 30 is opened. As a result, receiving the pressure in the storage tank 3, the remaining mixed liquid 29 is discharged to the outside from the discharge port 31 through the introduction port 30 and the delivery passage 32 of the discharge unit 4 </ b> A.

Thereafter, after the regulator 59 is closed, the compressed air in the storage tank 3 is removed, and the coating apparatus 1 is ready for the next coating operation.

Therefore, in the apparatus according to the first embodiment, as described above, the liquid mixture 29 in a high mixed state can be always supplied to the coating head 4 even when it is not discharged. . On the other hand, the forced circulation flow generation mechanism 40 is configured such that the motor 41 is attached to the upper portion of the storage tank 3 and the rotation shaft 42, the rotation disc 48 and the blades 49 are incorporated in the internal space of the storage tank 3. Therefore, it is not necessary to provide the forced circulation flow generation mechanism 40 in the supply passage 18 or the return passage 19. For this reason, it is not necessary to arrange the forced circulation flow generation mechanism 40 between the storage tank 3 and the coating head 4, and the forced circulation flow generation mechanism 40 is not disposed between the storage tank 3 and the coating head 4. Therefore, the interval between the storage tank 3 and the coating head 4 can be narrowed by the amount of improvement.

Further, the coating apparatus 1 configures a storage tank 3 and a coating head 4 on the substrate 2 (first and second substrates 2A, 2B, partition plate 2C) using the substrate 2, and the storage tank 3 A supply passage 18, a return passage 19 and the like interposed between the coating head 4 and the like can be formed inside the substrate 2 so that they do not appear outside. For this reason, while being able to handle the storage tank 3 and the application | coating head 4 integrally, it can be made simple and compact in appearance. Thereby, the said coating device 1 can be made preferable as what is mounted in a robot.

Further, since the substrate 2 is formed by using the first and second substrates 2A and 2B and the partition plate 2C, the supply passage can be obtained simply by adding simple processing to the first and second substrates 2A and 2B and the partition plate 2C. 18, the internal structure of the substrate such as the return passage 19 can be easily formed.

Second Embodiment
12 to 18 show a second embodiment. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

In the second embodiment, the flow rate of the first forced circulation flow C1 in the forced circulation path 60 can be further increased, and the substantial usable amount of the liquid mixture 29 in the storage tank 3 can be reliably increased. Is shown.

As shown in FIGS. 12 and 13, the coating apparatus 1 according to the second embodiment also includes a substrate 2 having a substantially rectangular shape in plan view, and the substrate 2 on the substrate 2, as in the first embodiment. The substrate 2 is provided with a storage tank 3 and a coating head 4 provided adjacent to each other in the longitudinal direction, and the substrate 2 includes first and second substrates 2A and 2B, and a partition plate 2C interposed between the two substrates 2A and 2B. And.

On the first bottom surface 2Ai-2 of the main recess 5 in the first substrate 2A, as shown in FIGS. 12 to 14, in addition to the first through hole 8, a basic recess 70 and its basic recess 70 are provided. And a first communication groove 9 that communicates with the first through hole 8 is formed.

The basic recess 70 is opened on one side in the longitudinal direction on the first bottom surface 2Ai-2 (inner surface 2Ai) of the first substrate 2A, and the basic recess 70 is one side in the longitudinal direction of the main recess 5. An opening having a circular shape in plan view that is considerably smaller in diameter than the inner peripheral surface in a semicircular shape in plan view on the side is formed.

The first communication groove 9 extends in the longitudinal direction at the center in the width direction of the first substrate 2 with a groove width substantially the same as the diameter of the first through-hole 8 and a groove depth equal to the depth of the basic recess 70. . One end of the first communication groove 9 is connected to the basic recess 70, and the other end portion is connected to the first through hole 8 by opening the first through hole 8 at the groove bottom portion at the other end portion. Accordingly, the basic recess 70, the first communication groove 9, and the first through hole 8 are formed in the first bottom surface 2Ai-2 so as to be continuously connected to each other, and the first bottom surface 2Ai-2 is surrounded by the first bottom surface 2Ai-2. The bottom surface 2Ai-2 will remain.

In the second substrate 2B, as shown in FIGS. 12, 13, and 15, a tank body holding through hole 10 is formed. The large diameter portion 10B of the tank body holding through hole 10 is also The small diameter portion 10 </ b> A is also concentrically arranged with respect to the basic recess 70, and has a diameter larger than the opening diameter of the basic recess 70.

As shown in FIGS. 12, 13, and 16, the partition plate 2C is fitted in the main recess 5 of the first substrate 2A, and the first substrate 2A and the second substrate 2B. Are integrated by the fasteners, the partition plate 2C is sandwiched between the first bottom surface 2Ai-2 of the first substrate 2A and the inner surface 2Bi of the second substrate 2B.

In this embodiment, the partition plate 2C closes the tank body holding through-hole 10 to form a mounting recess 16, and the intermediate through-hole 14 in the partition plate 2C has an opening diameter that is the same as the basic recess. While being the same as the opening diameter of 70, it is arranged to face the basic recess 70. As a result, the intermediate through-hole 14 constitutes a circulation flow introduction recess 71 in cooperation with the basic recess 70, and the circulation flow introduction recess 71 is formed at the bottom of the attachment recess 16. It arrange | positions in a radial direction center part, and faces the attachment recess 16 from there.

As described above, the partition plate 2C is interposed between the first and second substrates 2A and 2B. As a result, as shown in FIG. 12, FIG. 13, and FIG. The opening side of the first connecting groove 9 and the opening side of the second connecting groove 12 are closed. As a result, the partition plate 2C and the first substrate 2A constitute a return passage 19 therebetween, and the partition plate 2C and the second substrate 2B constitute a supply passage 18 therebetween. The return passage 19 has an outlet end opened in the circulation flow introduction recess 71, and an inlet end opened in the attachment through hole 17 (first through hole 8). The inlet end of the supply passage 18 is opened in the tank body holding through hole 10, and the outlet end thereof is opened in the attachment through hole 17 (second through hole 11).

The storage tank 3 is configured by fitting and holding one end of the tank body 20 in the mounting recess 16, and a pump mechanism 43 is formed on the bottom side of the storage tank 3 as shown in FIGS. 12 and 13. Is arranged. The rotary disk 48 of the pump mechanism 43 is disposed in the storage tank 3 with a plurality of blades 49 in proximity to the partition plate 2C (the bottom of the storage tank 3). The tank 3 is divided into a lower chamber 50 and an upper chamber 51. Along with this, a circulating flow introduction recess 71 faces the radial center of the plurality of blades 49 in the lower chamber 50, and the inlet end of the supply passage 18 opens into the lower chamber 50 from the side of the storage tank 3. The outlet end of the return passage 19 is opened from the side of the circulation flow introduction recess 71.

On the inner peripheral surface side of the storage tank 3, a plurality of baffle plates 72 are disposed above the rotating disc 48 as shown in FIGS. The plurality of baffle plates 72 are arranged at equal intervals in the circumferential direction of the storage tank 3, and the baffle plates 72 are directed from the inner peripheral surface of the storage tank 3 toward the radially inner side of the storage tank 3. Each extending in the vertical direction. In the present embodiment, each baffle plate 72 has its upper end attached to the upper lid 22, and when the upper lid 22 is removed from the tank body 20, the baffle plates 72 have the rotating shaft 42, the rotating shaft 42. The disk 48 and the plurality of blades 49 are extracted together.

Therefore, in the coating apparatus 1 according to the second embodiment, the rotating disk 48 and the plurality of blades 49 are moved by the motor 41 and the rotating shaft 42 in a state where the mixed liquid 29 is stored in the storage tank 3. When rotated, the plurality of blades 49 effectively applies a centrifugal force to the mixed solution 29 in the lower chamber 50, and the mixed solution 29 receiving the centrifugal force is pushed out to the supply passage 18 ( (See arrows in the supply passage 18 in FIGS. 12 and 13). Along with this, the mixed liquid 29 in the upper chamber 51 is drawn from the communication hole 53 of the rotating disk 48, and the mixed liquid 29 pushed out to the supply passage 18 is continuous. When the liquid mixture 29 is supplied to the coating head 4 via the supply passage 18 and is not discharged to the outside from the coating head 4, it passes through the attachment through hole 17, the return passage 19, and the circulation flow introduction recess 71 into the lower chamber 50. Returned. Thereafter, the lower chamber 50 constituting the circulation path 60, the supply passage 18, and the mounting through-hole 17 are excluded unless the mixed liquid 29 discharged from the coating head 4 is replenished from the upper chamber 51 through the communication hole 53. The mixed liquid 29 in the return passage 19 and the recess 71 for circulating flow introduction continues to flow as the first forced circulating flow C1 while maintaining a high flow rate. For this reason, the mixed state of the mixed liquid 29 is set to a high state by the first forced circulation flow C1, and the state is maintained.

In this case, the plurality of blades 49 are arranged in the flow of the first forced circulation flow C1 without stopping the flow as much as possible. For this reason, by the rotation of the plurality of blades 49, the flow velocity of the first forced circulation flow C1 is increased as compared with the case of the first embodiment, and the mixed solution 29 has a high phase separation tendency. Even if a thing is used, it can respond appropriately.

Further, when the rotating disk 48 and the plurality of blades 49 are rotated, as shown in FIG. 18, storage is performed via a predetermined gap 52 between the outer peripheral surface of the rotating disk 48 and the inner peripheral surface of the storage tank 3. An upward flow of the mixed liquid 29 (refer to a solid line arrow in FIG. 18) that rises from the lower chamber 50 toward the upper chamber 51 while turning along the inner peripheral surface of the tank 3 is generated. Produces a swirling flow, and based on this, the shape of the liquid surface 29a of the liquid mixture 29 tends to form a paraboloid of revolution (see the phantom line of the liquid surface 29a in FIG. 18).

However, in the present embodiment, the baffle plate 72 is provided, and the baffle plate 72 stops the swirling flow in the upper chamber 51, and the region where the baffle plate 72 exists (the radially outward direction in the storage tank 3). On the other hand, no swirling flow is generated, and the rise of the liquid level of the mixed liquid 29 is suppressed. The height of the minimum liquid level of the rotating paraboloid in the swirling flow is increased by the amount that the liquid level rise of the swirling flow is suppressed, and the difference (height) between the highest and lowest liquid levels is reduced ( In FIG. 18, the first forced circulation flow C1 is circulated until the lowest liquid level of the rotating paraboloid in the swirling flow reaches the lower limit height Hmin of the mixed liquid in the storage tank 3. be able to. For this reason, the usable amount of the liquid mixture 29 in the storage tank 3 can be increased as compared with the case where the swirling flow is not stopped by the baffle plate 72.

At the same time, the baffle plate 72 prevents the liquid level 29a of the mixed liquid 29 from rising on the radially outer side of the storage tank 3 because the liquid level 29a of the mixed liquid 29 is radially inward of the storage tank 3. This will reduce the amount of air taken in when it collapses to the side. For this reason, in the circulation path 60, it is suppressed that the flow of the 1st forced circulation flow C1 is obstructed by the air in the liquid mixture 29.

DESCRIPTION OF SYMBOLS 1 Coating device 2 Board | substrate 2A 1st board | substrate 2B 2nd board | substrate 2C Partition plate 3 Storage tank 4 Coating head 4A Discharge part 4B Supply adjustment part 7 Storage recess 8 1st through-hole (attachment through-hole)
10 Through hole for holding tank body (Mounting recess)
10A Small diameter portion 10B Large diameter portion 11 Second through hole (mounting through hole)
12 Second communication groove 14 Intermediate through hole (mounting recess)
15 3rd through hole (mounting through hole)
16 Mounting recess 17 Mounting through hole 18 Supply passage 19 Return passage 20 Tank body (tubular body)
29 Liquid mixture 30 Inlet port 31 Discharge port 40 Forced circulation flow generation mechanism 41 Motor (rotation drive source, forced circulation flow generation mechanism)
42 Rotating shaft (Forced circulation flow generation mechanism)
43 Pump mechanism (forced circulation flow generation mechanism)
48 Rotating disc (pump mechanism, forced circulation flow generation mechanism)
49 blades (pump mechanism, forced circulation flow generation mechanism)
50 Lower chamber 51 Upper chamber 52 Predetermined gap 53 Communication hole 54 Driver circuit (rotational speed adjusting means)
55 Power supply (rotational speed adjustment means)
56 Speed setter (Rotation speed adjusting means)
57 Compressed air source (pressure source)
59 Regulator (Pressure adjustment means)
60 Circulation path 61 Stirrer blade 70 Basic recess 71 Circulation flow recess 72 Baffle plate C1 First forced circulation flow
C2 Second forced circulation flow

Claims (13)

1. A circulation path for flowing the mixed liquid as a circulating flow is interposed between a storage tank for storing the mixed liquid exhibiting a phase separation tendency and an application head for discharging the mixed liquid. A supply passage that guides the liquid mixture from the storage tank side to the coating head side, and a return passage that guides the liquid mixture from the coating head side to the storage tank side. In the coating apparatus associated with the forced circulation flow generating means for forcibly generating the circulation flow,
   The forced circulation flow generating means is
   A rotational drive source attached to the top of the storage tank;
   A rotating shaft connected to the rotational drive source and extending in the vertical direction in the storage tank;
   It is disposed in the storage tank in a state of being connected to the rotating shaft, and is positioned in the upper chamber and the lower side of the upper chamber in a state in which the rotation accompanying the rotation of the rotating shaft is allowed. A rotating disk having a communication hole that communicates with the upper chamber and the lower chamber at a radially inner portion thereof.
   A blade that is fixed to the lower surface of the rotating disk in an upright state from the lower surface, and extends from the radially inner side of the rotating disk to the radially outer side;
   Is configured to have
   The inlet end of the supply passage in the circulation path is opened from the side of the storage tank to the lower chamber of the storage tank.
   An applicator characterized by that.
2. In claim 1,
   The rotating disk is arranged so that the blades are close to the inner bottom surface of the storage tank,
   An applicator characterized by that.
3. In claim 2,
   A predetermined gap is provided between the outer peripheral surface of the rotating disk and the inner peripheral surface of the storage tank.
   An applicator characterized by that.
4. In claim 3,
   The outlet end of the return passage in the circulation path is opened from the side of the storage tank to the upper chamber of the storage tank.
   An applicator characterized by that.
5. In claim 2,
   On the inner surface of the bottom of the storage tank, on the radially inner side of the rotating disk, a recess for circulating flow introduction that opens to the lower chamber is formed,
   An exit end of the return passage in the circulation path is opened in the circulation flow introduction recess.
   An applicator characterized by that.
6. In claim 2,
   A substrate is provided,
   The substrate has an attachment recess formed on one side surface in the thickness direction, and an attachment through hole penetrating in the thickness direction.
   The storage tank is configured by fitting one end of a cylindrical body into the mounting recess of the substrate,
   A discharge section in which the coating head is mounted on the other side in the thickness direction of the substrate by using the mounting through hole, and an introduction port for guiding the mixed liquid to the discharge port side faces the mounting through hole. And a supply adjustment unit that is attached to one side in the thickness direction of the substrate by using the attachment through hole and performs opening / closing adjustment of the introduction port in the discharge unit, and
   The supply passage and the return passage are formed inside the substrate;
   The supply passage has an inlet end opened in a lower chamber of the storage tank, an outlet end opened in the attachment through hole,
   The return passage has an input end opened in the attachment through hole, and an outlet end opened in the storage tank.
   An applicator characterized by that.
7. In claim 6,
   A predetermined gap is opened between the outer peripheral surface of the rotating disk and the inner peripheral surface of the storage tank,
   The return path is disposed closer to the other end of the cylindrical body than the supply path in the thickness direction of the substrate;
   The exit end of the return passage is opened from the side of the storage tank into the upper chamber of the storage tank.
   An applicator characterized by that.
8. In claim 6,
   On the bottom side of the mounting recess in the substrate, on the radially inner side of the rotating disk, a recess for circulating flow introduction that opens to the lower chamber is formed,
   The return path is disposed on the side farther from the other end of the cylinder than the supply path in the thickness direction of the substrate,
   An exit end of the return passage is opened in the recess for circulating flow introduction,
   An applicator characterized by that.
9. In claim 7,
   The substrate is configured by laminating a first substrate, a second substrate, and a partition plate disposed between the first and second substrates,
   A housing recess formed in an inner surface of the first substrate and capable of rotating the rotating disk and the blades, and a first through hole penetrating in a thickness direction of the first substrate; A first communication groove formed on the inner surface of the first substrate and connecting the storage recess and the first through hole;
   A through hole for holding a cylinder, which is disposed on the second substrate so as to face the housing recess and fits one end portion of the cylinder on the outer surface side of the second substrate, and opposed to the first through hole A second through-hole disposed on the inner surface of the second substrate, and a second communication groove formed on the inner surface of the second substrate and connecting the through-hole for holding the cylinder and the second through-hole,
   An intermediate through which is disposed in the partition plate so as to face the storage recess and the through hole for holding the cylinder and forms the mounting recess in cooperation with the storage recess and the through hole for holding the cylinder A hole, and a third through hole which is disposed to face the first and second through holes and which forms the attachment through hole in cooperation with the first and second through holes, are formed.
   An applicator characterized by that.
10. In claim 8,
    The substrate is configured by laminating a first substrate, a second substrate, and a partition plate disposed between the first and second substrates,
    A basic recess formed on the inner surface of the first substrate in a state in which the inner diameter of the first substrate is smaller than an inner diameter of the cylindrical body and constituting a part of the recess for introducing the circulation flow; A first through hole penetrating in a thickness direction of the substrate, and a first communication groove formed on the inner surface of the first substrate and connecting the basic recess and the first through hole,
    A cylindrical body holding through-hole that is concentrically arranged on the second substrate with a diameter larger than that of the basic recess and tightly fits one end of the cylindrical body on the outer surface side of the second substrate; A second through hole disposed to face the first through hole, a second communication groove formed on the inner surface of the second substrate and connecting the cylindrical body holding through hole and the second through hole; Formed,
    An intermediate through hole that is disposed in the partition plate with the same opening diameter while facing the basic recess and forms the circulation flow introducing recess in cooperation with the basic recess, and the first and second A third through hole that is disposed to face the through hole and forms the mounting through hole in cooperation with the first and second through holes is formed;
    An applicator characterized by that.
11. In claim 3,
    On the inner peripheral surface side of the storage tank, a baffle plate is disposed on the upper side of the rotating disk,
    The baffle plate extends in the vertical direction while projecting from the inner peripheral surface of the storage tank toward the radially inner side of the storage tank,
    An applicator characterized by that.
12. In any one of claims 1 to 11,
    A rotation speed adjusting means for adjusting the rotation speed of the rotation drive source;
    A pressurizing source for pressurizing the inside of the storage tank;
    Pressure adjusting means for adjusting the supply pressure of the pressurizing source to the storage tank;
    With
    An applicator characterized by that.
13. In any one of claims 1 to 11,
    A stirring blade is attached to the rotating shaft in the upper chamber,
    An applicator characterized by that.

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