WO2015024233A1 - 红外大幅面远心激光打标Fθ镜头 - Google Patents

红外大幅面远心激光打标Fθ镜头 Download PDF

Info

Publication number
WO2015024233A1
WO2015024233A1 PCT/CN2013/082064 CN2013082064W WO2015024233A1 WO 2015024233 A1 WO2015024233 A1 WO 2015024233A1 CN 2013082064 W CN2013082064 W CN 2013082064W WO 2015024233 A1 WO2015024233 A1 WO 2015024233A1
Authority
WO
WIPO (PCT)
Prior art keywords
lens
curved surface
laser marking
format
infrared
Prior art date
Application number
PCT/CN2013/082064
Other languages
English (en)
French (fr)
Inventor
李家英
周朝明
孙博
黄海
高云峰
Original Assignee
深圳市大族激光科技股份有限公司
深圳市大族数控科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市大族激光科技股份有限公司, 深圳市大族数控科技有限公司 filed Critical 深圳市大族激光科技股份有限公司
Priority to CN201380078971.1A priority Critical patent/CN105531616B/zh
Priority to PCT/CN2013/082064 priority patent/WO2015024233A1/zh
Priority to DE112013007354.4T priority patent/DE112013007354B4/de
Priority to JP2016535295A priority patent/JP2016528561A/ja
Priority to US14/913,202 priority patent/US9983383B2/en
Publication of WO2015024233A1 publication Critical patent/WO2015024233A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/12—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having three components only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/34—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having four components only

Definitions

  • the invention relates to the field of optical lenses, in particular to an infrared large-format telecentric laser marking F ⁇ lens.
  • the so-called telecentric technology means that in the optical design, the position of the exit pupil is set at infinity to ensure that the chief ray of the optical system of the F ⁇ lens is parallel to the optical axis, that is, the beam of all the focus points focused on the image plane. They all have the same aperture angle, and an image of an object of substantially constant size can be obtained on the image plane. Since all the main rays of the exit pupils are required to be parallel, when the image plane is large, the lens is required to have a large light-passing diameter, that is, the larger the size, the larger the lens.
  • the lens volume is proportional to the light-through diameter D or D3, so large-format F ⁇ lenses are rarely used.
  • the entrance pupil position is set at the front focus of the system so that the chief ray of the focused beam is perpendicular to the focal plane.
  • the focal length of the lens is long, the focus position is far, and the entrance position is Also in the farther place, this not only increases the overall volume of the optical system of the F ⁇ lens, but also increases the difficulty of aberration correction of the optical system of the F ⁇ lens.
  • An infrared large-format telecentric laser marking F ⁇ lens which is arranged coaxially along the transmission direction of incident light:
  • the first lens is a double concave negative lens, comprising a first curved surface and a second curved surface, the first curved surface protruding toward the image side, and the second curved surface protruding toward the object side;
  • the second lens is a meniscus positive lens, comprising a third curved surface and a fourth curved surface, wherein the third curved surface and the fourth curved surface both protrude toward the image side;
  • the third lens is a meniscus positive lens, comprising a fifth curved surface and a sixth curved surface, the fifth curved surface protruding toward the object side, wherein the sixth curved surface is a plane;
  • the first curved surface to the sixth curved surface are sequentially arranged along a transmission direction of the incident light
  • the center thickness of the first lens to the third lens is 6 mm, 16 mm, and 12, respectively.
  • Mm tolerance is 10%, upper deviation is +5%, lower deviation is -5%;
  • the radius of curvature of the first curved surface to the fifth curved surface is -143 mm, 330 mm, -1100 mm, -160 Mm, 320 mm, tolerance is 10%, upper deviation is +5%, and lower deviation is -5%.
  • a center-to-center spacing between the second curved surface and the third curved surface and between the fourth curved surface and the fifth curved surface is 76 Mm and 0.5 mm, tolerance is 10%, upper deviation is +5%, and lower deviation is -5%.
  • the first lens to the third lens are rotationally symmetric about an incident optical axis, that is, a projection of the first lens to the third lens in a plane perpendicular to an incident optical axis is a circle shape.
  • the first curved surface to the fifth curved surface are all spherical surfaces.
  • the infrared large-format telecentric laser marking F ⁇ lens further includes a fourth lens, wherein the fourth lens is a planar lens, including a seventh curved surface and an eighth curved surface, the seventh curved surface and the The eighth surface is a plane.
  • the fourth lens is disposed on a side of the third lens close to the image to protect other lenses.
  • the fourth lens has a thickness of 4 mm, an allowable tolerance of 10%, an upper deviation of +5%, and a lower deviation of -5%.
  • the seventh curved surface is adjacent to the sixth curved surface, and a center-to-center spacing between the seventh curved surface and the sixth curved surface is 4 Mm, tolerance is 10%, upper deviation is +5%, and lower deviation is -5%.
  • the infrared large-format telecentric laser marking F ⁇ lens has a working distance of 370 mm.
  • the working beam of the infrared large-format telecentric laser marking F ⁇ lens is an infrared laser.
  • the above-mentioned infrared large-format telecentric laser marking F ⁇ lens can be used as an F ⁇ lens for infrared laser marking, which first satisfies the telecentric needs of large-format laser marking, and also uses a structure of an anti-distance optical system.
  • the distance between the entrance and the system is greatly reduced, thereby greatly simplifying the structure of the system, making the volume of the lens control acceptable and applicable, enabling the overall miniaturization of the optical system and having a high correction image. Poor ability.
  • FIG. 1 is a schematic structural view of an infrared large-format telecentric laser marking F ⁇ lens according to an embodiment
  • FIG. 2 is a focus point dispersion diagram of the infrared large-area telecentric laser marking F ⁇ lens shown in FIG. 1;
  • FIG. 3 is an astigmatism and distortion diagram of the infrared large-area telecentric laser marking F ⁇ lens shown in FIG. 1;
  • the negative sign in this paper indicates that light propagates from left to right, with the intersection of the spherical surface and the main optical axis as the standard.
  • the spherical center of the sphere is left at this point, and the radius of curvature is negative. Otherwise, the center of the sphere is Point to the right, the radius of curvature is positive.
  • incident light propagates from left to right, on the left side of the lens is the object side, and on the right side of the lens is the image side.
  • the infrared large-format telecentric laser marking F ⁇ lens 100 of an embodiment includes four lenses arranged in sequence along the transmission direction of the incident light 150, which are respectively a first lens 110, a second lens 120, and a first lens.
  • the first lens 110 to the third lens 130 are coaxially disposed along the transmission direction of the incident light 150.
  • the first lens 110 is a double concave negative lens including a first curved surface 111 and a second curved surface 112.
  • the first curved surface 111 is a spherical surface that protrudes toward one side of the image.
  • the second curved surface 112 is a spherical surface that protrudes toward one side of the object.
  • the radius of curvature of the first curved surface 111 is -143 ⁇ 5% Mm.
  • the second curved surface 112 has a radius of curvature of 330 ⁇ 5% mm.
  • the thickness of the first lens 110 along the optical axis is 6 ⁇ 5% mm.
  • the second lens 120 is a meniscus positive lens including a third curved surface 121 and a fourth curved surface 122.
  • the third curved surface 121 and the fourth curved surface 122 are both spherical surfaces and both protrude toward one side of the image.
  • the radius of curvature of the third curved surface 121 is -1100 ⁇ 5% Mm.
  • the fourth curved surface 122 has a radius of curvature of -160 ⁇ 5% mm.
  • the thickness of the second lens 120 along the optical axis is 16 ⁇ 5% Mm.
  • the distance between the second lens 120 and the first lens 110, that is, the distance between the third curved surface 121 and the second curved surface 112 on the optical axis is preferably 76 ⁇ 5% mm.
  • the third lens 130 is a meniscus positive lens including a fifth curved surface 131 and a sixth curved surface 132.
  • the fifth curved surface 131 is a spherical surface and protrudes toward one side of the object.
  • the sixth curved surface 132 is a flat surface.
  • the radius of curvature of the fifth curved surface 131 is 320 ⁇ 5% mm.
  • the thickness of the third lens 130 along the optical axis is 12 ⁇ 5% mm.
  • the distance between the third lens 130 and the second lens 120, that is, the distance between the fifth curved surface 131 and the fourth curved surface 122 on the optical axis is preferably 0.5 ⁇ 5%. Mm.
  • the first curved surface 111 to the sixth curved surface 132 described above are sequentially arranged in the transport direction of the incident light ray 150. After the incident ray 150 sequentially passes through the first curved surface 111 to the sixth curved surface 132, an image of an object having substantially constant size is obtained on the image plane 160.
  • the first to third lenses 110 to 130 are rotationally symmetric about the incident optical axis, that is, the projections of the first to third lenses 110 to 130 in a plane perpendicular to the incident ray 150 are circular.
  • the first lens 110 to the third lens 130 may also be non-rotationally symmetric, that is, the projection of the first lens 110 to the third lens 130 in a plane perpendicular to the incident ray 150 may also be elliptical. Square or other shapes.
  • the fourth lens 140 is a planar lens including a seventh curved surface 141 and an eighth curved surface 142.
  • the seventh curved surface 141 and the eighth curved surface 142 are both planar.
  • the fourth lens 140 is disposed on a side of the third lens 130 close to the image to protect other lenses. In other embodiments, the fourth lens 140 may also be disposed on a side of the third lens 130 near the object or between adjacent two lenses.
  • the thickness of the fourth lens 140 is 4 ⁇ 5% Mm.
  • the distance between the fourth lens 140 and the third lens 130, that is, the distance between the seventh curved surface 141 and the adjacent sixth curved surface 132 on the optical axis is preferably 4 ⁇ 5%. Mm. It can be understood that the fourth lens 140 can also be omitted.
  • the infrared large-area telecentric laser marking F ⁇ lens described above has a working distance of 370 mm.
  • the above-mentioned infrared large-format telecentric laser marking F? lens working beam is an infrared laser.
  • FIG. 2 is a dispersion diagram of the focus point of the above-mentioned infrared large-format telecentric laser marking F ⁇ lens, which shows that the reference line of the diffuse spot size is 40 in different fields of view.
  • Mm where the unit of the X coordinate axis is ⁇ m, and the Y coordinate axis represents the center-to-edge distance of the lens in the meridional direction.
  • 3 is an astigmatism and distortion curve of the infrared large-area telecentric laser marking F ⁇ lens described above, wherein the astigmatism and the distortion curve are both at or below a theoretical value or a theoretical level, indicating that the infrared large-format telecentric laser marking F ⁇
  • the lens has a high ability to correct aberrations.
  • FIG. 4 is a modulation transfer function MTF diagram of the above-mentioned infrared large-format telecentric laser marking F ⁇ lens.
  • the MTF is still 0.42, indicating that the infrared large-format telecentric laser marking F ⁇
  • the lens has a high image quality.
  • the above-mentioned infrared large-format telecentric laser marking F ⁇ lens can be used as an F ⁇ lens for infrared laser marking, which first satisfies the telecentric needs of large-format laser marking, and also uses a structure of an anti-distance optical system.
  • the distance between the entrance and the system is greatly reduced, thereby greatly simplifying the structure of the system, making the volume of the lens control acceptable and applicable, enabling the overall miniaturization of the optical system and having a high correction image. Poor ability.

Abstract

一种红外大幅面远心激光打标Fθ镜头，包括沿入射光线的传输方向依次排列的第一透镜（110）、第二透镜（120）、第三透镜（130）和第四透镜（140）。第一透镜（110）为双凹负透镜，包括第一曲面（111）和第二曲面（112）；第二透镜（120）为弯月正透镜，包括第三曲面（121）和第四曲面（122）；第三透镜（130）为弯月正透镜，包括第五曲面（131）和第六曲面（132）；第四透镜（140）为平面透镜，起保护其他透镜的作用。第一透镜至第三透镜沿入射光线的传输方向同轴设置。第一曲面至第六曲面沿入射光线的传输方向依次排布。红外大幅面远心激光打标Fθ镜头可用作红外激光打标用Fθ镜头，满足了大幅面激光打标的远心的需要，同时使镜头的体积控制在可接受和可应用的范围，实现了光学系统的整体小型化。

Description

红外大幅面远心激光打标Fθ镜头
【技术领域】
本发明涉及光学镜头领域，特别是涉及一种红外大幅面远心激光打标Fθ镜头。
【背景技术】
所谓远心技术，是指在光学设计中，将出瞳的位置设在无限远处，以保证Fθ镜头的光学系统的主光线与光轴平行，即所有聚焦在像面上的聚焦点的光束都有相同的孔径角，在像面上能得到尺寸基本不变的物体的像。由于要求所有出瞳主光线必须平行，当像面画幅较大时，也要求镜头有较大的通光直径，即幅面愈大，镜头也愈大。镜头体积与通光直径D或D3成比例，因此大幅面的Fθ镜头实际上很少得到应用。
对于一般的远心系统而言，都是将入瞳位置设在系统的前焦点上以使聚焦光束的主光线垂直于焦平面，当镜头焦距较长时，由于焦点较远，其入瞳位置也会在较远的地方，这不但使Fθ镜头的光学系统整个体积增大，也使Fθ镜头的光学系统的像差校正的难度增加。
【发明内容】
基于此，有必要提供一种红外大幅面远心激光打标Fθ镜头，既能使镜头的体积控制在可接受和可应用的范围，同时又能降低像差校正难度。
一种红外大幅面远心激光打标Fθ镜头，包括沿入射光线的传输方向依次同轴排列的：
第一透镜，所述第一透镜为双凹负透镜，包括第一曲面和第二曲面，所述第一曲面朝图像侧凸出，所述第二曲面朝物体侧凸出；
第二透镜，所述第二透镜为弯月正透镜，包括第三曲面和第四曲面，所述第三曲面和所述第四曲面均朝图像侧凸出；
第三透镜，所述第三透镜为弯月正透镜，包括第五曲面和第六曲面，所述第五曲面朝物体侧凸出，所述第六曲面为平面；
其中，所述第一曲面至所述第六曲面沿入射光线的传输方向依次排布；
所述第一透镜至所述第三透镜的中心厚度依次为6 mm、16 mm、12 mm，允许公差为10%，上偏差为+5%，下偏差为-5%；
所述第一曲面至所述第五曲面的曲率半径依次为-143 mm、330 mm、-1100 mm、-160 mm、320 mm，允许公差为10%，上偏差为+5%，下偏差为-5%。
在其中一个实施例中，所述第二曲面与所述第三曲面之间、所述第四曲面与所述第五曲面之间的中心间距分别为 76 mm 和 0.5 mm， 允许公差为10%， 上偏差为+5%，下偏差为-5%。
在其中一个实施例中，所述第一透镜至所述第三透镜绕入射光轴旋转对称，即所述第一透镜至所述第三透镜在垂直于入射光轴的平面内的投影为圆形。
在其中一个实施例中，所述第一曲面至所述第五曲面均为球面。
在其中一个实施例中，所述红外大幅面远心激光打标Fθ镜头还包括第四透镜，所述第四透镜为平面透镜，包括第七曲面和第八曲面，所述第七曲面和所述第八曲面均为平面。所述第四透镜设于所述第三透镜靠近图像的一侧，起保护其他透镜的作用。
在其中一个实施例中，所述第四透镜的厚度为4 mm，允许公差为10%，上偏差为+5%，下偏差为-5%。
在其中一个实施例中，所述第七曲面与所述第六曲面相邻，所述第七曲面与所述第六曲面之间的中心间距为4 mm，允许公差为10%，上偏差为+5%，下偏差为-5%。
在其中一个实施例中，所述红外大幅面远心激光打标Fθ镜头的工作距离为370 mm。
在其中一个实施例中，所述红外大幅面远心激光打标Fθ镜头的工作光束为红外激光。
上述的红外大幅面远心激光打标Fθ镜头可作为红外激光打标用Fθ镜头的用途，其首先满足了大幅面激光打标的远心的需要，同时由于使用了反远距光学系统的结构，入瞳与系统距离大为减小，从而大大地简化了系统的结构，使镜头的体积控制在可接受和可应用的范围，使光学系统整体小型化得以实现，并且具有较高的校正像差的能力。
【附图说明】
图1为一实施例的红外大幅面远心激光打标Fθ镜头的结构示意图；
图2为图1所示的红外大幅面远心激光打标Fθ镜头的聚焦点弥散图；
图3为图1所示的红外大幅面远心激光打标Fθ镜头的像散和畸变图；
图4为图1所示的红外大幅面远心激光打标Fθ镜头的调制传递函数M.T.F图。
【具体实施方式】
为了便于理解本发明，下面将参照相关附图对本发明的红外大幅面远心激光打标Fθ镜头进行更全面的描述。附图中给出了本发明的较佳实施例。但是，本发明可以以许多不同的形式来实现，并不限于本文所描述的实施例。相反地，提供这些实施例的目的是使对本发明的公开内容的理解更加透彻全面。
需要说明的是，本文中负号表示光从左向右传播，以球面和主光轴的交点为准，球面的球心在该点以左，则曲率半径为负，反之，球心在该点以右，则曲率半径为正。另外，本文中以入射光从左向右传播，位于镜头左边的为物体侧，位于镜头右边的为图像侧。
除非另有定义，本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在本发明的说明书中所使用的术语只是为了描述具体的实施例的目的，不是旨在于限制本发明。本文所使用的术语“及／或”包括一个或多个相关的所列项目的任意的和所有的组合。
如图1所示，一实施例的红外大幅面远心激光打标Fθ镜头100包括沿入射光线150的传输方向依次设置的四块透镜，其分别为第一透镜110、第二透镜120、第三透镜130和第四透镜140。其中，第一透镜110至第三透镜130沿入射光线150的传输方向同轴设置。
第一透镜110为双凹负透镜，包括第一曲面111和第二曲面112。第一曲面111为球面，朝图像一侧凸出。第二曲面112为球面，朝物体一侧凸出。第一曲面111的曲率半径为-143±5% mm。 第二曲面112的曲率半径为 330±5% mm 。 第一透镜110沿着光轴上的厚度为6±5% mm。
第二透镜120为弯月正透镜，包括第三曲面121和第四曲面122。第三曲面121和第四曲面122均为球面，且均朝图像一侧凸出。第三曲面121的曲率半径为-1100±5% mm。第四曲面122的曲率半径为-160±5% mm。第二透镜120沿着光轴上的厚度为16±5% mm。第二透镜120与第一透镜110之间的距离，即第三曲面121与第二曲面112在光轴上的间距优选为76±5% mm。
第三透镜130为弯月正透镜，包括第五曲面131和第六曲面132。第五曲面131为球面，朝物体一侧凸出。第六曲面132为平面。第五曲面131的曲率半径为 320±5%mm。第三透镜130沿着光轴上的厚度为12±5%mm。第三透镜130与第二透镜120之间的距离，即第五曲面131与第四曲面122在光轴上的间距优选为0.5±5% mm。
上述的第一曲面111至第六曲面132沿入射光线150的传输方向依次排布。入射光线150依次经过第一曲面111至第六曲面132后，在像平面160上得到尺寸基本不变的物体的像。
在本实施例中，第一透镜110至第三透镜130绕入射光轴旋转对称，即第一透镜110至第三透镜130在垂直于入射光线150的平面内的投影为圆形。在其他实施例中，第一透镜110至第三透镜130也可以非旋转对称体，即第一透镜110至第三透镜130在垂直于入射光线150的平面内的投影为还可以为椭圆形、方形或其他形状。
第四透镜140为平面透镜，包括第七曲面141和第八曲面142。第七曲面141和第八曲面142均为平面。第四透镜140设于第三透镜130靠近图像的一侧，起保护其他透镜的作用。在其他实施例中，第四透镜140也可设置在第三透镜130靠近物体的一侧，或设置在相邻两个透镜之间。第四透镜140的厚度为4±5% mm。第四透镜140与第三透镜130之间的距离，即第七曲面141与相邻的第六曲面132在光轴上的间距优选为4±5% mm。可以理解，第四透镜140也可省略。
上述的红外大幅面远心激光打标Fθ镜头的工作距离为370 mm。
上述的红外大幅面远心激光打标Fθ镜头的工作光束为红外激光。
图2为上述的红外大幅面远心激光打标Fθ镜头的聚焦点弥散图，表明分别在不同视场中其弥散斑尺寸的参考线为40 μm，其中，X坐标轴的单位为μm，Y坐标轴代表子午方向镜头中心到边缘距离。图3为上述的红外大幅面远心激光打标Fθ镜头的像散和畸变曲线图，其像散和畸变曲线都达到或小于理论值或理论水平，表明该红外大幅面远心激光打标Fθ镜头具有较高的校正像差的能力。图4为上述的红外大幅面远心激光打标Fθ镜头的调制传递函数M.T.F图，当分辨率达到20线对/mm时，其M.T.F仍为0.42，表明该红外大幅面远心激光打标Fθ镜头具有较高的成像质量。
上述的红外大幅面远心激光打标Fθ镜头可作为红外激光打标用Fθ镜头的用途，其首先满足了大幅面激光打标的远心的需要，同时由于使用了反远距光学系统的结构，入瞳与系统距离大为减小，从而大大地简化了系统的结构，使镜头的体积控制在可接受和可应用的范围，使光学系统整体小型化得以实现，并且具有较高的校正像差的能力。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (9)

  1. 一种红外大幅面远心激光打标Fθ镜头，其特征在于，包括沿入射光线的传输方向依次同轴排列的：
    第一透镜，所述第一透镜为双凹负透镜，包括第一曲面和第二曲面，所述第一曲面朝图像侧凸出，所述第二曲面朝物体侧凸出；
    第二透镜，所述第二透镜为弯月正透镜，包括第三曲面和第四曲面，所述第三曲面和所述第四曲面均朝图像侧凸出；
    第三透镜，所述第三透镜为弯月正透镜，包括第五曲面和第六曲面，所述第五曲面朝物体侧凸出，所述第六曲面为平面；
    其中，所述第一曲面至所述第六曲面沿入射光线的传输方向依次排布；
    所述第一透镜至所述第三透镜的中心厚度依次为6 mm、16 mm、12 mm，允许公差为10%，上偏差为+5%，下偏差为-5%；
    所述第一曲面至所述第五曲面的曲率半径依次为-143 mm、 330 mm、 -1100 mm、 -160 mm、 320 mm， 允许公差为10%， 上偏差为+5%， 下偏差为-5%。
  2. 根据权利要求1所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述第二曲面与所述第三曲面之间、所述第四曲面与所述第五曲面之间的中心间距分别为76 mm和0.5 mm，允许公差为10%，上偏差为+5%，下偏差为-5%。
  3. 根据权利要求1所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述第一透镜至所述第三透镜绕入射光轴旋转对称。
  4. 根据权利要求1所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述第一曲面至所述第五曲面均为球面。
  5. 根据权利要求1所述的红外大幅面远心激光打标Fθ镜头，其特征在于，还包括第四透镜，所述第四透镜为设于所述第三透镜靠近图像的一侧的平面透镜，包括第七曲面和第八曲面，所述第七曲面和所述第八曲面均为平面。
  6. 根据权利要求5所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述第四透镜的厚度为4 mm， 允许公差为10%， 上偏差为+5%， 下偏差为-5%。
  7. 根据权利要求5所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述第七曲面与所述第六曲面相邻，所述第七曲面与所述第六曲面之间的中心间距为4 mm，允许公差为10%，上偏差为+5%，下偏差为-5%。
  8. 根据权利要求1所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述红外大幅面远心激光打标Fθ镜头的工作距离为370 mm。
  9. 根据权利要求1所述的红外大幅面远心激光打标Fθ镜头，其特征在于，所述红外大幅面远心激光打标Fθ镜头的工作光束为红外激光。
PCT/CN2013/082064 2013-08-22 2013-08-22 红外大幅面远心激光打标Fθ镜头 WO2015024233A1 (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201380078971.1A CN105531616B (zh) 2013-08-22 2013-08-22 红外大幅面远心激光打标Fθ镜头
PCT/CN2013/082064 WO2015024233A1 (zh) 2013-08-22 2013-08-22 红外大幅面远心激光打标Fθ镜头
DE112013007354.4T DE112013007354B4 (de) 2013-08-22 2013-08-22 Telezentrische F0-Linse zur großformatigen Infrarotlasermarkierung
JP2016535295A JP2016528561A (ja) 2013-08-22 2013-08-22 赤外線大判型テレセントリックレーザマーキングＦθレンズ
US14/913,202 US9983383B2 (en) 2013-08-22 2013-08-22 Infrared large-format telecentric laser marking F theta lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2013/082064 WO2015024233A1 (zh) 2013-08-22 2013-08-22 红外大幅面远心激光打标Fθ镜头

Publications (1)

Publication Number Publication Date
WO2015024233A1 true WO2015024233A1 (zh) 2015-02-26

Family

ID=52482969

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2013/082064 WO2015024233A1 (zh) 2013-08-22 2013-08-22 红外大幅面远心激光打标Fθ镜头

Country Status (5)

Country Link
US (1) US9983383B2 (zh)
JP (1) JP2016528561A (zh)
CN (1) CN105531616B (zh)
DE (1) DE112013007354B4 (zh)
WO (1) WO2015024233A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109143548B (zh) * 2018-10-11 2023-11-28 佛山科学技术学院 一种长工作距离高分辨率物像双侧远心光学系统
CN109188660B (zh) * 2018-10-11 2023-11-28 佛山科学技术学院 一种小型化物方远心光学系统
CN109343199B (zh) * 2018-10-11 2023-11-28 佛山科学技术学院 一种长工作距离大倍率物方远心显微光学系统
DE102020202549B4 (de) 2020-02-28 2022-05-05 Trumpf Laser Gmbh Optische Anordnung mit einem F-Theta-Objektiv
CN112180588A (zh) * 2020-09-07 2021-01-05 西安方元明科技股份有限公司 一种大视场激光告警镜头设计方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286810A (ja) * 1985-06-14 1986-12-17 Konishiroku Photo Ind Co Ltd 走査光学系用レンズ
JPS62254110A (ja) * 1986-04-28 1987-11-05 Fuji Xerox Co Ltd 光ビ−ム走査装置およびそれを用いたカラ−プリンタ
JPS63204213A (ja) * 1987-02-20 1988-08-23 Koputeitsuku:Kk Ｆθレンズ系
CN1177114A (zh) * 1996-08-26 1998-03-25 旭光学工业株式会社 级联扫描光学系统
CN101369046A (zh) * 2008-04-28 2009-02-18 深圳市大族激光科技股份有限公司 光学镜头
CN101846790A (zh) * 2010-06-11 2010-09-29 深圳市大族激光科技股份有限公司 一种紫外激光应用的光学镜头

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3201394B2 (ja) * 1999-08-10 2001-08-20 住友電気工業株式会社 ｆθレンズ
JP4685510B2 (ja) * 2005-05-24 2011-05-18 富士フイルム株式会社 内視鏡用対物レンズ
JP4744357B2 (ja) 2006-05-16 2011-08-10 日本電産コパル株式会社 ファインダレンズ
CN101487923B (zh) 2008-12-10 2010-04-21 上海微电子装备有限公司 低成本大数值孔径的傅立叶透镜系统
CN101866043B (zh) 2010-05-27 2011-11-09 深圳市大族激光科技股份有限公司 一种紫外激光应用的光学镜头
CN101881875B (zh) * 2010-06-22 2011-09-28 深圳市大族激光科技股份有限公司 f-theta光学镜头
DE102012006244A1 (de) * 2012-03-21 2013-09-26 Jenoptik Optical Systems Gmbh Farbkorrigiertes F-Theta-Objektiv für die Lasermaterialbearbeitung
DE202013006369U1 (de) 2013-07-16 2013-09-03 Jenoptik Optical Systems Gmbh F-Theta-Objektiv

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286810A (ja) * 1985-06-14 1986-12-17 Konishiroku Photo Ind Co Ltd 走査光学系用レンズ
JPS62254110A (ja) * 1986-04-28 1987-11-05 Fuji Xerox Co Ltd 光ビ−ム走査装置およびそれを用いたカラ−プリンタ
JPS63204213A (ja) * 1987-02-20 1988-08-23 Koputeitsuku:Kk Ｆθレンズ系
CN1177114A (zh) * 1996-08-26 1998-03-25 旭光学工业株式会社 级联扫描光学系统
CN101369046A (zh) * 2008-04-28 2009-02-18 深圳市大族激光科技股份有限公司 光学镜头
CN101846790A (zh) * 2010-06-11 2010-09-29 深圳市大族激光科技股份有限公司 一种紫外激光应用的光学镜头

Also Published As

Publication number Publication date
US20160209625A1 (en) 2016-07-21
CN105531616A (zh) 2016-04-27
DE112013007354B4 (de) 2018-02-08
CN105531616A8 (zh) 2017-01-11
DE112013007354T5 (de) 2016-05-12
US9983383B2 (en) 2018-05-29
JP2016528561A (ja) 2016-09-15
CN105531616B (zh) 2017-11-03

Similar Documents

Publication Publication Date Title
CN105974561B (zh) 广角摄像镜头
TWI429944B (zh) 光學取像鏡頭組
TWI479191B (zh) 光學結像系統
WO2015024233A1 (zh) 红外大幅面远心激光打标Fθ镜头
EP2490062B1 (en) Projection lens and projection apparatus
CN106154501B (zh) 鱼眼镜头
JP2011100094A5 (zh)
TWM470267U (zh) 攝影透鏡以及具有攝影透鏡的攝影裝置
TWI781987B (zh) 鏡頭及其製造方法
JP2008275831A (ja) 撮像レンズ
CN107741625A (zh) 一种低成本高性能行车记录仪镜头
CN110261999A (zh) 光学系统和成像镜头
KR20190057200A (ko) 접안 렌즈 및 헤드웨어 표시 장치
CN207924236U (zh) 一种高分辨率低畸变镜头
WO2016033743A1 (zh) 摄影物镜
TWI443367B (zh) 拾像鏡片系統
TWI742307B (zh) 取像鏡頭及其製造方法
JP6367460B2 (ja) 光学レンズ
JP2003241082A (ja) ローコストな単焦点レンズ
CN107436482A (zh) 转折式望远定焦镜头及摄像装置
CN108845417A (zh) 一种消视差机器视觉光学系统
CN209961992U (zh) 光学系统和成像镜头
WO2016041161A1 (zh) 远心光学镜头
WO2023231111A1 (zh) 投影镜头以及投影装置
CN206362992U (zh) 高清鱼眼镜头

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201380078971.1

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13891774

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2016535295

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 14913202

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 112013007354

Country of ref document: DE

Ref document number: 1120130073544

Country of ref document: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13891774

Country of ref document: EP

Kind code of ref document: A1