WO2015016274A1

WO2015016274A1 - Electrodeless uv radiation lamp and uv processing device

Info

Publication number: WO2015016274A1
Application number: PCT/JP2014/070100
Authority: WO
Inventors: 昭浩井上
Original assignee: 株式会社日本フォトサイエンス
Priority date: 2013-08-02
Filing date: 2014-07-30
Publication date: 2015-02-05
Also published as: JPWO2015016274A1; JP6377529B2

Abstract

Provided is an electrodeless UV radiation lamp having long life-span, low consumption of electric power and simple constitution, improved so as to be capable of effectively supplying an initial electron source and ensure starting within a short time. An electrodeless UV radiation lamp (10) provided with an airtight container (11) having sealed therein a discharge gas, and discharge generation means (14,15) provided outside the airtight container (11) for generating a discharge inside the airtight container (11), wherein an insulating metal oxide microparticle film (13) is formed on at least a portion of the inner wall surface of the airtight container (11).

Description

Electrodeless UV radiation lamp and UV treatment equipment

The present invention uses a so-called electrodeless ultraviolet radiation lamp that does not include an electrode in an airtight container in which a discharge gas is sealed, such as an ultraviolet radiation lamp that excites a discharge gas by a high-frequency electromagnetic field and emits ultraviolet light, and the lamp. The present invention relates to an ultraviolet treatment apparatus that irradiates an object to be treated with ultraviolet rays and performs sterilization, chemical reaction and the like.

Generally, in a discharge lamp, in order to start discharge, it is necessary that electrons that cause discharge are present in the discharge space. The initial electrons are accelerated by the electric field, and gas atoms in the discharge space are ionized to start discharge. If this initial electron does not exist, such as when the discharge lamp is placed in the dark, it is necessary to wait until radiation from cosmic rays or the earth ionizes the gas atoms in the discharge space and generates an initial electron source. If it is long, the discharge may not start for several tens of seconds to several minutes. For this reason, depending on the ballast, it may be determined that there is no load, and the power supply may be automatically stopped, causing problems such as the discharge lamp not lighting at all.

In the case of a discharge lamp having an electrode such as a filament in an airtight container filled with a discharge gas, it is relatively easy to solve the problem at the start. Conventionally, a material having a low work function called “emitter” which is a material constituting the electrode is applied to the electrode. If there is a trace amount of light, photoelectrons are emitted from the coating layer of the material with a low work function, or the filament type electrode emits thermionic electrons by preheating, and these electrons are supplied, and the electrons are triggered by the discharge. It acts as an initial electron, and discharge starts immediately after power is supplied, and it is sustained.

On the other hand, in a so-called electrodeless discharge lamp, since the discharge gas is excited by electromagnetic field induction, it does not have an electrode, so it is not possible to introduce an “emitter” that supplies initial electrons, Solving the startup problem of having to wait until initial electrons are formed by radiation from cosmic rays and the earth has become a difficult task.

Here, the electrodeless ultraviolet radiation lamp refers to an ultraviolet radiation lamp that does not include an electrode in an airtight container in which a discharge gas is sealed, and includes an excitation coil outside the airtight container in which the discharge gas is sealed. A container is formed by applying a high-frequency voltage between two electrodes provided on an outer wall of an airtight container in which discharge gas is excited by exciting a discharge gas by a high-frequency electromagnetic field from an excitation coil and in which a discharge gas is sealed. It includes an ultraviolet radiation lamp called an excimer lamp or the like that emits ultraviolet rays by generating a high-frequency electric field inside the container through a dielectric and generating discharge (dielectric barrier discharge) in a discharge gas.

In order to cope with this difficult problem, several techniques for supplying initial electrons have been proposed. For example, according to Patent Document 1 below, a hollow portion is provided in an airtight container formed in a substantially bulb shape and filled with discharge gas, an excitation coil is inserted into the hollow portion, and a high-frequency current is applied to the excitation coil. In the electrodeless radiation lamp that excites the discharge gas by the electric field generated by the flow, a conductive film is provided on the inner side surface of the hollow portion on the gas sealing side. Since this conductive film is provided in the vicinity of the excitation coil, a strong electric field is generated between both ends of the excitation coil and the conductive film, initial electrons are likely to increase, and discharge can be easily started.

Further, in the following Patent Document 2, the electrodeless discharge lamp having the same configuration as the electrodeless discharge lamp described in Patent Document 1 is provided with a starting light source for emitting initial electrons when starting the lamp. I have to. In order to simplify the configuration of the starting light source, the starting light source is configured by a closed loop composed of a light emitting element and a conductor, and this closed loop is arranged so as to interlink with the magnetic field generated by the excitation coil. An induced current is generated in the closed loop by the magnetic field generated by the coil to cause the light emitting element to emit light, thereby easily releasing initial electrons.

In the following Patent Document 3, an α-alumina coating having an average particle size of 0.05 to 1 μm is formed on the inner wall surface of an airtight container filled with a discharge gas, and a phosphor layer is formed thereon, or the above-mentioned A phosphor layer mixed with α-alumina is formed. Such an α-alumina coating layer (or a phosphor layer mixed with α-alumina) always emits electrons into the hermetic container even in the dark at room temperature, so that electrons that trigger discharge are always supplied. As a result, even when the lamp is dark and there is no external light or the environment is shielded from cosmic rays, the lamp can be lit quickly.

Japanese Patent Laying-Open No. 2005-183316 (page 4, FIG. 1) Japanese Patent Laying-Open No. 2005-56803 (pages 3 to 5, FIG. 1, FIG. 2, FIG. 4) JP-A-6-163002 (page 3, FIG. 1)

However, when a conductive film is provided on the inner surface of the lamp hermetic container as in Patent Document 1, mercury adheres to the conductive film and blackens early, shortening the lamp life due to reduced output and mercury consumption. Problems arise. In addition, the conductive film increases power consumption to some extent and decreases efficiency.

As in the above-mentioned Patent Document 2, when a closed loop composed of a light emitting element and a conductor is arranged, it is necessary to provide such a closed loop, which means that the configuration is complicated. Furthermore, it is not negligible that the efficiency decreases due to power consumption in the light emitting element.

Further, in Patent Document 3, an α-alumina-containing layer is formed on the inner wall surface of an airtight container filled with a discharge gas. This discharge lamp is an electrode-type discharge lamp, and such an α- It is difficult to efficiently supply an initial electron source by applying a technique for forming an alumina-containing layer on the inner wall surface of an airtight container to an electrodeless ultraviolet radiation lamp.

In view of the above, the present invention does not cause blackening or the like, and therefore has no short life, and does not increase power consumption, has a simple configuration, and effectively supplies an initial electron source. It is an object of the present invention to provide an electrodeless ultraviolet radiation lamp improved so that it can be reliably started in a short time even when placed in the dark, and to provide an ultraviolet treatment apparatus using the lamp. And

In order to achieve the above object, the present invention provides an electrodeless ultraviolet radiation comprising: an airtight container filled with a discharge gas; and a discharge generating means provided outside the airtight container and generating a discharge in the airtight container. In the lamp, there is provided an electrodeless ultraviolet radiation lamp having an insulating metal oxide fine particle film formed on at least a part of an inner wall surface of the hermetic container.

In one embodiment, the insulating metal oxide fine particle film is made of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, yttrium, zirconium, niobium. Of these, at least one kind of metal oxide fine particles or a mixture of a plurality of types of metal oxide fine particles can be used.

In one embodiment, the insulating metal oxide fine particle film may be formed of metal oxide fine particles having a modest appearance particle size of 0.05 μm or less in a slurry state before coating.

In one embodiment, the insulating metal oxide fine particle film is formed of metal oxide fine particles having a modest appearance particle size of 0.05 μm or less and 0.01 μm or more in a slurry state before the application. Also good.

In one embodiment, the insulating metal oxide fine particle film may be formed in a region corresponding to the discharge generating means on the inner wall surface of the hermetic container.

In one embodiment, the insulating metal oxide fine particle film may be formed over the entire inner wall surface of the hermetic container.

Further, in one embodiment, the electrodeless ultraviolet radiation lamp having an insulating metal oxide particle film formed on the inner wall surface of the hermetic container, and the ultraviolet rays from the lamp are irradiated on the object to be treated. The ultraviolet ray processing apparatus can also be configured from the object container in which the lamp is disposed.

According to the present invention, in the electrodeless ultraviolet radiation lamp comprising: an airtight container filled with a discharge gas; and a discharge generating means that is provided outside the airtight container and generates a discharge in the airtight container. An insulating metal oxide fine particle film is formed on at least a part of the inner wall surface, and since electrons are effectively emitted from this insulating metal oxide fine particle film, an initial electron source can be formed efficiently. become. Since this insulating metal oxide fine particle film absorbs vacuum ultraviolet rays, it is possible to prevent the deterioration of the constituent material of the hermetic container such as quartz glass and the material forming the excitation coil due to the irradiation with vacuum ultraviolet rays, thereby extending the life. And the structure is simple and there is no element which increases power consumption. In this way, an electrodeless ultraviolet radiation lamp that can supply an initial electron source effectively, can be started reliably in a short time even when the lamp is placed in the dark, has a long life, low power consumption, and a simple configuration is provided. can do.

1 is a side view showing a part of one embodiment of an electrodeless ultraviolet radiation lamp according to the present invention. It is a perspective view which shows schematically the other Example of the electrodeless ultraviolet radiation lamp concerning this invention. FIG. 6 is a perspective view schematically showing still another embodiment of the electrodeless ultraviolet radiation lamp according to the present invention. 1 is a perspective view schematically showing an embodiment of an ultraviolet processing apparatus according to the present invention. It is the schematic front view which looked at the Example of the ultraviolet-ray processing apparatus from the front. It is a perspective view which shows schematically the other Example of the ultraviolet-ray processing apparatus concerning this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows an electrodeless ultraviolet radiation lamp according to an embodiment of the present invention. As shown in FIG. 1, the electrodeless ultraviolet radiation lamp 10 has an airtight container 11 in which a discharge gas is enclosed. The hermetic container 11 is formed of quartz glass in a substantially cylindrical shape, and is provided with a recessed portion 12 that is recessed inwardly (upward in the figure) from one end (lower end in the figure). A rod-shaped ferrite core 14 is disposed in the recessed portion 12 so as to be inserted from the lower side to the upper side. An excitation coil 15 is wound around the rod-shaped ferrite core 14, and a heat radiating fin 16 for radiating the heat of the ferrite core 14 is attached to the base (lower end).

In this embodiment, a mixed rare gas such as argon and neon and mercury amalgam are enclosed in an airtight container 11 as a discharge gas. An insulating metal oxide fine particle film 14 made of zirconium oxide fine particles is formed over the entire inner wall surface of the hermetic container 11.

The insulating metal oxide fine particle film 14 is formed by applying a slurry of zirconium oxide having a small particle diameter. The slurry is a liquid material in which fine particles are uniformly dispersed in water or an organic solvent. Here, the particle size distribution of the zirconium oxide fine particles in the slurry state before coating is between 0.005 μm and 0.1 μm, and the most frequently occurring particle size (maximum distribution particle size) is from 0.01 μm to 0.00 μm. A slurry present between 05 μm is used. Such materials are available, for example, as “NanoTek” (registered trademark) ultrafine particle material manufactured by CI Kasei Co., Ltd., manufactured by the Physical Vapor Synthesis method. After this zirconium oxide slurry is applied to the inner wall surface of the hermetic container 11, a film of only fine particles can be formed on the inner wall surface by baking and oxidizing the solvent while blowing oxygen.

In this electrodeless ultraviolet radiation lamp 10, when a high frequency current is passed through the excitation coil 15 to excite the discharge gas in the hermetic vessel 11 and discharge is started, ultraviolet rays are emitted. Since the excitation coil 15 and the ferrite core 14 generate a discharge in the hermetic container 11 as described above, the excitation coil 15 and the ferrite core 14 correspond to a discharge generation unit.

At the start of the discharge, electrons are emitted from the insulating metal oxide fine particle film 13 formed on the entire inner wall surface of the hermetic vessel 11, and the emitted electrons trigger the discharge, so that the discharge starts quickly. The mechanism by which electrons are emitted from the insulating metal oxide fine particle film 13 is not always clear, but the crystal structure constituting the fine particle is mechanically damaged during the previous discharge, and distortion is formed in the crystal structure. It is considered that electrons called exo electrons (exo electrons) are emitted when the damage and distortion disappear and the crystal structure recovers. Alternatively, charged particles from the plasma formed by the previous discharge adhere to the fine particle surface of the insulating metal oxide fine particle film 13 on the inner wall surface of the hermetic vessel 11, charge the fine particles, and are applied at the next start-up. It is also considered that electrons are emitted by a magnetic field.

In any case, such a phenomenon is difficult to occur when the metal fine particle film 13 on the inner wall surface of the hermetic container 11 is conductive, and therefore, it becomes difficult to occur. It cannot function effectively as a source. Further, in this electron emission phenomenon, the smaller the particle diameter, the larger the surface area of the layer forming the film 13, and thus the ability to store and emit the initial electron source is increased. Therefore, it can be said that the smaller the particle size, the better.

On the other hand, it can be easily estimated that the ability to damage the fine crystal structure of the film 13 to form a strain or to hold electrons on the fine particles increases as the amount of absorbed ultraviolet rays increases. The ability to absorb ultraviolet rays is determined by the work function of the material constituting the fine particles, but the surface length of the fine metal particles constituting the film 13 is another factor that influences the blocking ability. If the surface length of the fine particles is around the wavelength of vacuum ultraviolet rays, the ultraviolet rays are effectively trapped by the metal oxide fine particles and the blocking effect is enhanced or scattered. Therefore, for example, if damage or the like is caused by an undesirable vacuum ultraviolet ray having a wavelength of 185 nm, the diameter of the fine particles forming the film 13 is about 60 nm (≈185 nm / π), that is, about 0.06 μm. However, since the actual metal oxide fine particles are not completely spherical and often have irregularities, the fine particle diameter should be slightly smaller than that. From such a viewpoint, the most frequently appearing particle diameter or average particle diameter of the metal fine particles constituting the film 13 is desirably 0.05 μm or less.

Since it is difficult to confirm the particle size of the metal fine particles thus obtained after the metal fine particle film 13 is formed on the inner wall surface of the airtight container 11, the most frequently appearing particle size (maximum in the slurry state before coating) Distribution particle size).

Furthermore, the insulating metal oxide fine particle film 13 also plays a role of protecting the hermetic container 11 made of quartz glass. When quartz glass is irradiated with vacuum ultraviolet light with a wavelength of 185 nm emitted from mercury or vacuum ultraviolet light with a wavelength of 172 nm from a dielectric barrier discharge using a xenon gas called an excimer lamp, the silicon oxide bond constituting the quartz is cut. Fine cracks occur, and finally a phenomenon that leads to breakage of the glass occurs. Therefore, in these excimer lamps and ultraviolet radiation lamps, it is desirable to remove these vacuum ultraviolet rays in order to protect the airtight container made of quartz glass. As described above, the insulating metal oxide fine particle film 13 effectively blocks vacuum ultraviolet rays, so that the hermetic container 11 made of quartz glass can be protected.

The metal particle diameter of the film 13 for enhancing the protective effect is desirably such that the most frequently appearing particle diameter is 0.05 μm or less and 0.01 μm or more in the slurry state before coating. The shielding effect is enhanced when the surface length of the metal fine particles is about the wavelength of vacuum ultraviolet rays to be cut off, but since the actual fine particles have irregularities and are not perfectly spherical, the diameter of the fine particles is the above wavelength. As described above, it should be slightly smaller than the value corresponding to the above. From this point of view, the most frequently appearing particle size is 0.05 μm or less and 0.01 μm or more.

By forming the insulating metal oxide fine particle film 13 having such a fine particle diameter and having a function of absorbing vacuum ultraviolet rays on the entire inner wall surface of the hermetic vessel 11, the quartz glass forming the hermetic vessel 11 is made of vacuum ultraviolet rays. It is possible to effectively prevent deterioration and generation of fine cracks and eventually destruction.

In addition, if the insulating metal oxide fine particle film 13 is formed on the entire inner wall surface of the hermetic container 11 in this way, the life of the hermetic container 11 made of quartz glass can be extended, but only as an initial electron source. Of course, when used, it may be formed only on a part of the inner wall surface of the airtight container 11. When the film 13 is formed on a part of the inner wall surface of the hermetic container 11, if the film 13 is provided on a portion corresponding to the excitation coil 15, the material constituting the excitation coil 15 can be prevented from being deteriorated by vacuum ultraviolet rays. Life can be extended.

In this embodiment, the insulating metal oxide fine particle film 13 is formed by applying fine particles of zirconium oxide, but the present invention is not limited to this. The metal constituting the insulating metal oxide fine particles is, in the periodic table, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium or It can be selected from yttrium, zirconium and niobium existing in the vicinity thereof. Alternatively, a mixture thereof may be used.

Further, the present invention can be applied not only to the electrodeless ultraviolet radiation lamp 10 shown in FIG. 1 but also to electrodeless ultraviolet radiation lamps having other configurations. Some examples are shown in FIGS.

FIG. 2 shows a concentric cylindrical electrodeless ultraviolet radiation lamp 20. In FIG. 2, an airtight container 21 made of quartz glass in which discharge gas is sealed is formed in a cylindrical shape. A cylindrical through portion 22 is formed so as to be concentric with the airtight container 21. A cylindrical ferrite core 23 around which the excitation coil 24 is wound in a spiral shape is inserted concentrically around the through portion 22. In the concentric cylindrical electrodeless ultraviolet radiation lamp 20 configured as described above, an insulating metal oxide fine particle film (in the drawing, on the entire or a part of the inner wall surface of the cylindrical airtight container 21 having the cylindrical through-hole 22). (Omitted) is formed.

FIG. 3 shows a concentric cylindrical electrodeless ultraviolet radiation lamp 30 similar to that shown in FIG. In the concentric cylindrical electrodeless ultraviolet radiation lamp 30 shown in FIG. 3, an airtight container 31 made of quartz glass in which a discharge gas is sealed is formed in a cylindrical shape, and is cylindrical so as to be concentric with the cylindrical airtight container 31. The cylindrical ferrite core 33 is inserted concentrically so as to penetrate the through part 32, and these are the same as the concentric cylindrical electrodeless ultraviolet radiation lamp 20 of FIG. However, the excitation coil 34 is different in that it is spirally wound around the outer periphery of the cylindrical airtight container 31, not around the columnar ferrite core 33. In this concentric cylindrical electrodeless ultraviolet radiation lamp 30, an insulating metal oxide fine particle film (not shown) is formed on the whole or a part of the inner wall surface of a cylindrical airtight container 31 having a cylindrical through-hole 32. The

An ultraviolet treatment apparatus can be configured using each electrodeless ultraviolet radiation lamp formed in this way. This ultraviolet ray processing apparatus irradiates an object to be treated with ultraviolet rays emitted from an electrodeless ultraviolet radiation lamp to perform processing such as sterilization of the object to be treated or other chemical reaction. By constructing an ultraviolet treatment apparatus using an electrodeless ultraviolet radiation lamp as described above, the time from when the lamp is turned on until the object is irradiated with ultraviolet rays can be shortened. -The time efficiency of processing can be improved in applications that are repeatedly turned off. In addition, the power consumption for ultraviolet irradiation can be reduced, and the electrodeless ultraviolet radiation lamp has a long life, so that the frequency of lamp replacement can be reduced.

Next, an embodiment of an ultraviolet treatment apparatus using the electrodeless ultraviolet radiation lamp as described above will be described. In the ultraviolet processing apparatus 50 shown in FIGS. 4 and 5, a plurality of ring-shaped electrodeless ultraviolet radiation lamps 40 are used. The ring-shaped electrodeless ultraviolet radiation lamp 40 has a ring-like form not described above. The ring-shaped electrodeless ultraviolet radiation lamp 40 includes an airtight container 41 formed in a ring shape from quartz glass and a ring-shaped ferrite core 42 attached so as to surround the ring-shaped airtight container 41. Is done. As in the electrodeless ultraviolet radiation lamp 10 of FIG. 1, for example, a mixed rare gas such as argon and neon and a discharge gas made of mercury amalgam are enclosed in the hermetic container 41. Although not shown in the figure, an insulating metal oxide fine particle film made of fine particles such as zirconium oxide is formed on the whole or a part of the inner wall surface of the hermetic container 41 as in FIG. .

An excitation coil (not shown) is wound around the ring-shaped ferrite core 42, and a high-frequency magnetic field is formed in the ring-shaped hermetic container 41 by flowing a high-frequency current through the excitation coil. The induced electromotive force excites the discharge gas in the hermetic container 41 and emits ultraviolet rays.

The plurality of ring-shaped electrodeless ultraviolet radiation lamps 40 are attached so as to surround a cylindrical water flow pipe 51 through which the fluid to be treated is circulated in the left-right direction in FIG. A protective container 52 is provided so as to surround the water flow pipe 51 and the plurality of ring-shaped electrodeless ultraviolet radiation lamps 40, and the water flow pipe 51 and the lamp 40 are covered and protected by the protective container 52.

In the ultraviolet treatment apparatus 50 configured in this manner, a ring-shaped lamp 40 is provided so as to surround the water flow pipe 51 and the ultraviolet light is irradiated to the inside of the water flow pipe 51. Is efficiently irradiated, and processing such as sterilization of the fluid to be processed is performed.

In the ultraviolet irradiation device 60 shown in FIG. 6, the concentric electrodeless ultraviolet radiation lamp 20 shown in FIG. 2 is used. In this ultraviolet irradiation device 60, two concentric electrodeless ultraviolet radiation lamps 20 are arranged in a cylindrical object container 61, and both ends of this cylindrical object container 61 are closed in a watertight manner. In addition, an inflow port 62 and an outflow port 63 for a fluid-like object to be processed are provided.
Here, although the concentric electrodeless ultraviolet radiation lamp 20 shown in FIG. 2 is used, it is needless to say that the concentric electrodeless ultraviolet radiation lamp 30 shown in FIG. 3 can be used.

In the ultraviolet ray processing apparatus 60, a fluid-like object to be processed flows into the object-to-be-processed container 61 from the inlet 62, and flows through the cylindrical object-to-be-processed container 61 in its length direction, in the right direction in the figure. It flows out from the outlet 63. An elongated ultraviolet radiation lamp 20 is arranged in the flowing direction, and ultraviolet light is radiated from the periphery of the lamp 20, so that the fluid object to be processed flowing through the object container 61 is uniformly irradiated with ultraviolet light. Can increase the processing efficiency.

As mentioned above, although the Example of the electrodeless ultraviolet radiation lamp and the ultraviolet-ray processing apparatus using the same has been described, it is needless to say that the present invention is not limited to these Examples. The electrodeless ultraviolet discharge lamp is not limited to the above-mentioned several shapes, and the gas sealed as the discharge gas is not limited to the above, and in the case of an electrodeless ultraviolet discharge lamp using mercury, neon In addition, a rare gas such as argon, krypton, or xenon, or a mixed gas thereof may be used, and the mercury carrier may be mercury alone or an amalgam that is an alloy of mercury and another metal.

The present invention can also be applied to an electrodeless ultraviolet radiation lamp called an excimer lamp or the like. In an electrodeless ultraviolet radiation lamp called an excimer lamp or the like, a high-frequency voltage is applied to the inside of a container via a dielectric that forms a container by applying a high-frequency voltage between two electrodes provided on the outer wall of an airtight container filled with a discharge gas. Since an electric field is generated and a discharge (dielectric barrier discharge) is generated in the discharge gas to emit ultraviolet rays, the two electrodes provided on the outer wall of the hermetic container correspond to the discharge generating means. In this excimer lamp or the like, as a discharge gas, only a rare gas such as xenon or krypton or a mixed gas of a halogen gas and a rare gas may be sealed in an airtight container.

As the ultraviolet ray processing apparatus using these electrodeless ultraviolet radiation lamps, other configurations can be adopted in addition to the configurations shown in FIGS. 4 to 6 without departing from the gist of the present invention.

Claims

In an electrodeless ultraviolet radiation lamp comprising an airtight container filled with a discharge gas, and a discharge generating means provided outside the airtight container and generating a discharge in the airtight container,
An electrodeless ultraviolet radiation lamp comprising an insulating metal oxide fine particle film formed on at least a part of an inner wall surface of the hermetic container.
The insulating metal oxide fine particle film is at least one of lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, yttrium, zirconium, and niobium. 2. The electrodeless ultraviolet radiation lamp according to claim 1, wherein the electrode-less ultraviolet radiation lamp is composed of a metal oxide fine particle or a mixture of a plurality of kinds of metal oxide fine particles.
3. The insulating metal oxide fine particle film according to claim 1, wherein the insulating metal oxide fine particle film is formed of metal oxide fine particles having a modest appearance particle size of 0.05 μm or less in a slurry state before coating. Electrode ultraviolet radiation lamp.
4. The electrodeless ultraviolet ray according to claim 3, wherein the insulating metal oxide fine particle film is formed of metal oxide fine particles having a modest appearance particle size of 0.01 μm or more in a slurry state before coating. Radiant lamp.
The electrodeless ultraviolet radiation lamp according to any one of claims 1 to 4, wherein the insulating metal oxide fine particle film is formed in a region corresponding to the discharge generating means on the inner wall surface of the hermetic vessel.
The electrodeless ultraviolet radiation lamp according to any one of claims 1 to 4, wherein the insulating metal oxide fine particle film is formed over the entire inner wall surface of the hermetic container.
7. An ultraviolet ray comprising the electrodeless ultraviolet radiation lamp according to claim 1 and a workpiece container in which the lamp is disposed so that ultraviolet rays from the lamp are irradiated to the workpiece. Processing equipment.