WO2015011956A1

WO2015011956A1 - Ultrasonic generation element, ultrasonic generation device, and method for manufacturing ultrasonic generation element

Info

Publication number: WO2015011956A1
Application number: PCT/JP2014/059642
Authority: WO
Inventors: 藤本　克己
Original assignee: 株式会社村田製作所
Priority date: 2013-07-26
Filing date: 2014-04-01
Publication date: 2015-01-29
Also published as: JP5975178B2; JPWO2015011956A1

Abstract

Provided is an ultrasonic generation element that is small in size and resists cracks and the like. An ultrasonic generation element (11) for generating ultrasonic by use of a buckling tuning-fork oscillation mode in which a first oscillator (12) and a second oscillator (13) oscillate at the same frequency and in mutually opposite phases, wherein: first and second protrusions (18, 19) are formed, on the first and second main surfaces (14a, 14b) of a first oscillation plate (14) of the first oscillator (12), around the excitation area; third and fourth protrusions (24, 25) are formed, on the first and second main surfaces (20a, 20b) of a second oscillation plate (20) of the second oscillator (13), around the excitation area; and the second protrusion (19) and third protrusion (24) are joined to each other such that the first oscillator (12) is laid on the second oscillator (13).

Description

Ultrasonic generator, ultrasonic generator, and method for manufacturing ultrasonic generator

The present invention relates to an ultrasonic wave generating element and an ultrasonic wave generating device that generate ultrasonic waves, and more specifically, an ultrasonic wave generating element in which first and second vibrators generate ultrasonic waves in a buckling tuning fork vibration mode, and The present invention relates to an ultrasonic generator.

Various ultrasonic generators that emit ultrasonic waves are used for distance measurement methods using ultrasonic waves.

For example, the following Patent Document 1 discloses an ultrasonic generator in which an ultrasonic generator is housed in a case. In this ultrasonic wave generating element, the plate-like first piezoelectric vibrator is joined to the plate-like second piezoelectric vibrator via a frame having an opening exposing the vibration part. In this ultrasonic generator, a so-called buckling tuning fork vibration mode in which the first piezoelectric vibrator and the second piezoelectric vibrator vibrate at the same frequency and in opposite phases to each other is used.

WO2012 / 026319

In order to reduce the size of the ultrasonic generator described in Patent Document 1, it is necessary to make the first and second piezoelectric vibrators smaller. However, when the first and second piezoelectric vibrators become smaller, the resonance frequency increases and the sound pressure decreases. In order to suppress a decrease in sound pressure, the first and second piezoelectric vibrators may be thinned. However, if the thickness is reduced, cracks are likely to occur in the first and second piezoelectric vibrators. In particular, when the first and second piezoelectric vibrators are joined via the frame, if a force is applied in the thickness direction, there is a problem that cracks are likely to occur in the first and second piezoelectric vibrators.

An object of the present invention is to provide an ultrasonic wave generating element that can be miniaturized and hardly generate cracks and a method for manufacturing the same.

Another object of the present invention is to provide an ultrasonic generator having an ultrasonic generator that can be miniaturized and hardly generate cracks.

The ultrasonic wave generating element according to the present invention includes a first vibrator and a second vibrator.

The first vibrator has a first diaphragm, a first protrusion, and a second protrusion. The first diaphragm has first and second main surfaces that face each other. An excitation region for exciting ultrasonic waves is provided at the center of the first diaphragm. The first protrusion protrudes from the first main surface around the excitation region of the first diaphragm. The second protrusion protrudes from the second main surface around the excitation region.

The second vibrator has a second diaphragm, a third protrusion, and a fourth protrusion. The second diaphragm has third and fourth main surfaces that face each other. An excitation region for exciting ultrasonic waves is provided in the center of the second diaphragm. The third protrusion protrudes from the third main surface around the excitation region of the second diaphragm. The fourth protrusion protrudes from the fourth main surface around the excitation region.

In the present invention, the second projecting portion of the first vibrator and the third projecting portion of the second vibrator are joined, and the first vibrator is placed on the second vibrator. The vibrator is laminated. In addition, the ultrasonic wave generating element of the present invention utilizes a buckling tuning fork vibration mode in which the first vibrator and the second vibrator vibrate at the same frequency and in opposite phases.

In a specific aspect of the ultrasonic wave generating element according to the present invention, a bonding material layer for bonding the first vibrator and the second vibrator is further provided.

In another specific aspect of the ultrasonic wave generating element according to the present invention, at least one of the first to fourth protrusions includes a plurality of protrusions separated from each other.

The ultrasonic generator according to the present invention includes an ultrasonic generator configured according to the present invention, a first case material, and a second case material. The ultrasonic wave generating element is mounted on the first case material. The second case material is bonded to the first case material, and surrounds the ultrasonic wave generating element together with the first case material. The second case material is provided with an ultrasonic wave emission hole for emitting ultrasonic waves to the outside.

The method for manufacturing an ultrasonic generator according to the present invention includes the following steps.

In the periphery of the first vibration plate having the first and second main surfaces facing each other and provided with an excitation region for exciting ultrasonic waves in the center, and the excitation region of the first vibration plate, A first vibrator having a first protrusion protruding from the first main surface and a second protrusion protruding from the second main surface around the excitation region, and opposed to the first vibrator A second diaphragm having a third and a fourth main surface that meet each other and provided with an excitation region for exciting an ultrasonic wave in the center; and around the excitation region of the second diaphragm, A third vibrator having a third protrusion protruding from the third main surface and a fourth protrusion protruding from the fourth main surface around the excitation region is prepared. Process.

Joining the second projecting portion of the first vibrator and the third projecting portion of the second vibrator.

In a specific aspect of the method of manufacturing an ultrasonic wave generating element according to the present invention, when the first vibrator and the second vibrator are joined, the first and second vibrators are used by using a joining material. Join.

In the ultrasonic wave generating element according to the present invention, the second protrusion of the first vibrator and the third protrusion of the second vibrator are joined, and the first and second vibrators are laminated. Therefore, it is difficult to apply a force to the excitation regions of the first and second vibrators in the joining process and the like. Therefore, the thickness of the first and second diaphragms can be reduced. Therefore, even if the miniaturization is advanced, the sound pressure is hardly lowered and cracks in the first and second vibrators are hardly caused.

FIG. 1 is a front sectional view of an ultrasonic generator according to an embodiment of the present invention. 2 (a) and 2 (b) are a perspective view showing an appearance of an ultrasonic wave generating element used in an embodiment of the invention and a cross-sectional view taken along the line BB in FIG. 2 (a). is there. FIG. 3A to FIG. 3C are plan views for explaining the shape of the excitation electrode provided on the first diaphragm. 4 (a) and 4 (b) are side views showing the side surface on which the external electrode of the ultrasonic wave generating element shown in FIGS. 2 (a) and 2 (b) is formed. FIG. 5 is a front cross-sectional view for explaining a step of laminating a plurality of ceramic green sheets in the method for manufacturing an ultrasonic generator according to one embodiment of the present invention. FIG. 6 is a front cross-sectional view showing a mother laminate for constituting the first diaphragm in the method of manufacturing an ultrasonic generator according to one embodiment of the present invention. FIG. 7A and FIG. 7B are a plan view and a front sectional view of the first vibrator prepared in the method for manufacturing an ultrasonic wave generating element according to the first embodiment of the present invention. FIG. 8 is a perspective view of an ultrasonic generator according to another embodiment of the present invention as viewed from below.

Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.

FIG. 1 is a front sectional view of an ultrasonic generator according to an embodiment of the present invention. The ultrasonic generator 1 has a substrate 2 as a first case material. An ultrasonic wave generating element 11 as an embodiment of the present invention is mounted on the substrate 2. A second case material 3 is bonded to the substrate 2 so as to surround the ultrasonic wave generating element 11.

The substrate 2 is made of an appropriate rigid material such as ceramics. The second case member 3 has a bottomed cylindrical shape having an opening, and surrounds the ultrasonic wave generating element 11 together with the substrate 2.

Ultrasonic emission holes

3 a and 3 a are provided on the upper surface of the second case member 3. The second case material 3 can be formed of an appropriate material such as metal or ceramics.

In this embodiment, the ultrasonic wave generated by the ultrasonic wave generating element 11 is emitted to the outside from the ultrasonic wave emission hole 3a.

2 (a) and 2 (b) are a perspective view showing an appearance of the ultrasonic wave generating element 11 and a cross-sectional view of a portion along the line BB in FIG. 2 (a).

The ultrasonic generating element 11 has a first vibrator 12 and a second vibrator 13. The first vibrator 12 has a first diaphragm 14. The first diaphragm 14 has first and second

main surfaces

14a and 14b facing each other. In the first diaphragm 14, an excitation region is formed at the center. This excitation region is constituted by a region in which the vibrating electrodes 15 to 17 are overlapped via the piezoelectric ceramic. The first diaphragm 14 has a structure in which a plurality of piezoelectric ceramics are stacked.

3A to 3C show the planar shapes of the excitation electrodes 15 to 17. In the present embodiment, the excitation electrodes 15 to 17 have a circular shape. However, the planar shape of the excitation electrodes 15 to 17 is not particularly limited. The excitation electrodes 15 to 17 are connected to the

routing electrodes

15a, 15a to 17a, and 17a, respectively. The

routing electrodes

15a, 15a to 17a, 17a are provided so as to reach the outer surface of the first vibrator 12, although not shown in FIG.

As shown in FIG. 2B, the excitation electrodes 15 to 17 are overlapped via the piezoelectric ceramic. By applying a voltage between the

excitation electrodes

15 and 17 and the excitation electrode 16, the piezoelectric ceramic layer above the excitation electrode 16 and the piezoelectric ceramic layer below are expanded and contracted in opposite phases. Accordingly, the first vibrator 12 is a bimorph vibrator.

The first protrusion 18 is provided on the first main surface 14a around the excitation region. The first protrusion 18 protrudes in a direction away from the first main surface 14a with respect to the first main surface 14a, that is, upward in FIG. In the present embodiment, the first protrusion 18 has a frame shape having a circular opening. However, the first projecting portion 18 may have a frame shape having an opening other than a circle, or may have a shape other than the frame shape. That is, a protruding portion having a shape in which a part of the closed frame is cut out may be provided as the first protruding portion 18.

Also on the second main surface 14b side, a second protrusion 19 is provided outside the excitation region. The second protrusion 19 is configured to have the same shape as the first protrusion 18 in plan view. However, the planar shape of the second projecting portion 19 may not be equal to the planar shape of the first projecting portion 18.

In the present embodiment, the second protrusion 19 protrudes in a direction away from the second main surface 14b, that is, downward in FIG. 2 (b). The distal end surface, that is, the lower surface of the second protrusion 19 is a flat surface.

In the first vibrator 12, the excitation electrodes 15 to 17 and the routing electrodes 15a to 17a are made of an appropriate metal or alloy such as Al, Cu, or Ag.

As described above, the first diaphragm 14 is made of piezoelectric ceramics. As such a piezoelectric ceramic, an appropriate piezoelectric ceramic such as a lead zirconate titanate ceramic can be used.

Further, in the present embodiment, the first and second projecting

portions

18 and 19 are made of the same ceramic as the ceramic constituting the first diaphragm 14. But the 1st,

2nd protrusion parts

18 and 19 may be comprised with the material different from the ceramics which comprise the 1st diaphragm 14. FIG.

The second vibrator 13 is configured in substantially the same manner as the first vibrator 12. In other words, the second vibrator 13 includes the second diaphragm 20. In the center of the second diaphragm 20, excitation electrodes 21 to 23 are overlapped via piezoelectric ceramics. As a result, an excitation region is formed. The excitation electrodes 21 to 23 are configured in the same manner as the excitation electrodes 15 to 17. Also in the second vibrator 13, the third protrusion 24 is formed on the third main surface 20 a around the excitation region. In addition, a fourth protrusion 25 is formed on the fourth main surface 20b. The third protrusion 24 and the fourth protrusion 25 are configured in the same manner as the first protrusion 18 and the second protrusion 19. Note that the tip surface, that is, the upper surface of the third protrusion 24 is a flat surface. The second vibrator 13 is also a bimorph vibrator having excitation electrodes 21 to 23.

2B, the polarization direction of the piezoelectric ceramic layer sandwiched between the excitation electrodes 15 to 17 in the first vibrator 12 is indicated by an arrow. Also in the second vibrator 13, the polarization direction of the piezoelectric ceramic layer sandwiched between the excitation electrodes 21 to 23 is indicated by an arrow.

The second vibrator 13 is configured to vibrate at the same frequency as the first vibrator 12 and in the opposite phase. Therefore, in the ultrasonic wave generating element 11, ultrasonic waves are generated using a buckling tuning fork vibration mode in which the first and

second vibrators

12 and 13 vibrate at the same frequency and in opposite phases.

The second projecting portion 19 of the first vibrator 12 and the third projecting portion 24 of the second vibrator 13 are joined via a joining material layer 26. More specifically, the distal end surface of the second projecting portion 19 and the distal end surface of the third projecting portion 24 are joined via the joining material layer 26. Thereby, the first vibrator 12 is laminated on the second vibrator 13 and integrated.

In the ultrasonic wave generating element 11, the first and

second vibrators

12 and 13 are joined using the second protrusion 19 and the third protrusion 24. Therefore, as is apparent from the manufacturing method described later, even when a force is applied in the thickness direction during the joining, the force is applied to the portion where the second projecting portion 19 and the third projecting portion 24 are joined. concentrate. That is, it is difficult to apply a force to the excitation region where the excitation electrodes 15 to 17 and the excitation electrodes 21 to 23 are provided.

Therefore, in the first and

second diaphragms

14 and 20 at the time of the joining and the manufacturing process of the ultrasonic generator 11, for example, at the time of handling when assembling the ultrasonic generator 1 using the ultrasonic generator 11. Cracks are unlikely to occur.

As described above, it is necessary to make the first and

second vibrators

12 and 13 smaller in order to reduce the size. That is, it is necessary to reduce the excitation area, but the sound pressure decreases. In order not to reduce the sound pressure, the thickness of the excitation region may be reduced. However, the conventional ultrasonic generator has a fatal problem that cracks are likely to occur when the thickness of the diaphragm in the excitation region is reduced.

On the other hand, according to this embodiment, even if the thickness of the first and

second diaphragms

14 and 20 in the excitation region is reduced, cracks are hardly generated as described above. Therefore, it is possible to reduce the size of the ultrasonic wave generating element 11 without reducing the sound pressure.

Further, conventionally, a bonding material layer has been provided on the periphery of the excitation region when bonding using the bonding material layer. For this reason, there is a problem that when a force is applied in the thickness direction, the bonding material layer flows into the excitation region and the excitation of the excitation region is hindered.

On the other hand, according to the present embodiment, since the bonding material layer 26 is provided on the tip surface of the second protrusion 19 and the tip surface of the third protrusion 24, the bonding material layer 26 is excited. It is difficult to flow into the region and the excitation of the excitation region is difficult to be hindered. Therefore, it is possible to reduce the size of the ultrasonic wave generating element 11 without reducing the sound pressure.

FIGS. 4A and 4B are side views for explaining the

external electrodes

31 and 32 provided on the respective side surfaces of the ultrasonic wave generating element 11. As shown in FIGS. 1, 2 (a), 2 (b), and 4 (a), an external electrode 31 is formed on one side surface of the ultrasonic wave generating element 11. The external electrode 31 is electrically connected to the

routing electrodes

15a and 17a described above. It is also connected to the

routing electrodes

21a and 23a. The

routing electrodes

21 a and 23 a are connected to the

excitation electrodes

21 and 23.

As shown in FIGS. 1, 2 (a), 2 (b), and 4 (b), an external electrode 32 is formed on another side surface of the ultrasonic wave generating element 11. The external electrode 32 is electrically connected to the routing electrode 16a. The external electrode 32 is also connected to the routing electrode 22a. The routing electrode 22 a is connected to the excitation electrode 22 of the second vibrator 13.

The

external electrodes

31 and 32 shown in FIGS. 1, 2A, and 2B are exaggerated for easy understanding. Actually, the thicknesses of the

external electrodes

31 and 32 are extremely thin with respect to the first and

second vibrators

12 and 13. The height of the projecting direction surface of the first projecting portion 18 and the surface of the

external electrodes

31 and 32 provided so as to cover the projecting direction surface of the first projecting portion 18 are substantially the same. Similarly, the heights of the surfaces of the fourth projecting portions 25 and the surfaces of the

external electrodes

31 and 32 provided so as to cover the surfaces of the fourth projecting portions 25 in the projecting direction are substantially the same. .

Next, an example of a method for manufacturing the ultrasonic generator 11 will be described with reference to FIGS.

First, the mother ceramic green sheets 41 to 44 shown in FIG. 5 are laminated as shown by the arrows in the figure. The mother ceramic green sheets 41 to 44 are ceramic green sheets mainly composed of piezoelectric ceramics.

Openings

41a and 44a are formed in the mother ceramic

green sheets

41 and 44, respectively, by punching. The

openings

41a and 44a finally form an opening surrounded by the first protrusion or the second protrusion.

A conductive paste 15A is screen-printed on the upper surface of the ceramic green sheet 43. The conductive paste 15A becomes the excitation electrode 15 after firing.

Further, on the upper surface of the ceramic green sheet 42, the conductive paste 16A is screen-printed. A conductive paste 17A is screen-printed on the lower surface. The

conductive pastes

16A and 17A become the

excitation electrodes

16 and 17 after firing.

Note that the excitation electrodes 15 to 17 may be formed by forming a metal material by other thin film forming methods or thick film forming methods without using the conductive paste.

In the present embodiment, the mother ceramic green sheets 41 to 44 are laminated, and the mother ceramic green sheet 44 and the mother ceramic green sheet 41 are further added and laminated. In this way, a mother laminate 45 shown in FIG. 6 is obtained. After obtaining the mother laminate 45, hydrostatic pressure is applied to bring the ceramic green sheets into close contact with each other. In the pressurizing process in the thickness direction, the applied pressure is applied to the mother ceramic green sheet 41 and the mother ceramic green sheet 44. Therefore, it is difficult to apply the applied pressure to the overlapping portions of the

conductive pastes

15A and 17A.

Next, the mother laminate 45 is cut along the dashed lines C and C in FIG. Thereby, a laminated body chip is obtained.

The obtained laminated chip 46 is shown in a plan view and a front sectional view in FIGS. By firing the laminate chip 46, the first vibrator 12 shown in FIG. 2B can be obtained. According to the present invention, since the first projecting portion 18 and the second projecting portion 19 are provided around the excitation region, cracks in the first vibrator 12 that occur during cutting can be suppressed, and a non-defective product produced by manufacturing can be obtained. The rate can be increased.

In the same manner as the step of obtaining the first vibrator 12, the second vibrator 13 can be obtained. Then, the obtained first and

second vibrators

12 and 13 are bonded through the bonding material layer 26. In this case, it is desirable to polish the tip end surface of the second protrusion 19 of the first vibrator 12 in advance to obtain the above-described flat surface. Further, it is desirable that the tip surface of the second protrusion 13 of the second vibrator 13 shown in FIG. If it does in this way, joint strength can be raised. Then, the distal end surface of the second projecting portion 19 and the distal end surface of the third projecting portion 24 are joined via the joining material layer 26.

When joining, a force pressing the second vibrator 13 against the first vibrator 12 side in the vertical direction of FIG. However, this force acts on the joint interface and does not reach the excitation region as described above. Therefore, the first and

second vibrators

12 and 13 can be reliably joined without causing cracks in the first and

second diaphragms

14 and 20. The ultrasonic wave generating element 11 can be obtained as described above.

In the above embodiment, the mother laminate 45 is cut to form a laminate chip, and then fired. Alternatively, after firing the mother laminated body 45, the first vibrator 12 may be obtained by cutting along the one-dot chain lines C and C described above.

In the same manner as the mother laminated body 45, a mother laminated body constituting the second vibrator 13 is prepared. Then, the mother laminate 45 and the mother laminate for forming the second vibrator 13 may be laminated, pressure-bonded, and integrally fired. In that case, the ultrasonic wave generating element 11 can be obtained by cutting the mother sintered body after firing. That is, it is possible to provide an ultrasonic wave generating element in which the first and

second vibrators

12 and 13 are bonded without using a bonding material. Therefore, in the present invention, the first and second vibrators may be integrated by joining the second protrusion 19 and the third protrusion 24 without using a bonding material.

FIG. 8 is a perspective view showing another embodiment of the ultrasonic wave generating element of the present invention. In the ultrasonic wave generating element 51 of the present embodiment, the first and

second vibrators

12 and 13 are bonded via the bonding material layer 26. In the second vibrator 13, the plurality of fourth protrusion portions 25A1 to 25A4 protrude away from the fourth main surface 20b of the second diaphragm 20, that is, downward in FIG. That is, the fourth projecting portion is not frame-shaped but is composed of a plurality of independent projecting portion portions 25A1 to 25A4. The fourth protrusion portions 25A1 to 25A are provided at rectangular corner portions of the fourth main surface 20b.

Therefore, the fourth projecting portions 25A1 to 25A4 can have a function as a pedestal when the ultrasonic wave generating element 11 is mounted on the substrate 2 shown in FIG.

Thus, the fourth protrusion 25 of the second vibrator 13 may be divided into a plurality of protrusions so as to function as a pedestal. Similarly, the first protrusion 18, the second protrusion 19, or the third protrusion 24 shown in FIG. 2B may be divided into a plurality of protrusions.

In the above-described embodiment, the first diaphragm 14 is made of a lead zirconate titanate ceramic, but is not limited thereto. For example, it may be made of a lead-free piezoelectric ceramic piezoelectric material such as potassium sodium niobate or alkali niobate ceramic.

In the above-described embodiment, as shown in FIG. 1, the tip surface of the fourth protrusion 25 is in direct contact with the substrate while being covered by the

external electrodes

31 and 32, but the fourth protrusion The tip surface of the portion 25 may be in direct contact with the substrate.

DESCRIPTION OF SYMBOLS 1 ... Ultrasonic generator 2 ... Board | substrate 3 ... 2nd case material 3a ... Ultrasonic emission hole 11 ... Ultrasonic generating

element

12, 13 ... 1st, 2nd vibrator | oscillator 14 ...

1st diaphragm

14a, 14b ... first and second main surfaces 15 to 17 ... excitation electrodes 15A to 17A ... conductive pastes 15a to 17a ... leading

electrodes

18, 19 ... first and second protrusions 20 ...

second diaphragms

20a, 20b ... Third and fourth main surfaces 21 to 23... Excitation electrodes 21a to 23a... Leading

electrodes

24 and 25... Third and fourth protrusions 25A1 to 25A4. ... External electrodes 41 to 44 ... Ceramic

green sheets

41a, 44a ... Opening 45 ... Laminated body 46 ... Laminated body chip 51 ... Ultrasonic wave generating element

Claims

In the periphery of the first vibration plate having the first and second main surfaces facing each other and provided with an excitation region for exciting ultrasonic waves in the center, and the excitation region of the first vibration plate, A first vibrator having a first protrusion protruding from the first main surface and a second protrusion protruding from the second main surface around the excitation region;
In the periphery of the excitation area of the second diaphragm, the second diaphragm having the third and fourth main surfaces facing each other and provided with an excitation area for exciting ultrasonic waves in the center, A second vibrator having a third protrusion protruding from the third main surface and a fourth protrusion protruding from the fourth main surface around the excitation region; ,
The second protrusion of the first vibrator and the third protrusion of the second vibrator are joined together, and the first vibrator is stacked on the second vibrator. An ultrasonic wave generating element using a buckling tuning fork vibration mode in which the first vibrator and the second vibrator vibrate in the opposite phase with each other at the same frequency.
The ultrasonic generating element according to claim 1, further comprising a bonding material layer bonding the first vibrator and the second vibrator.
3. The ultrasonic generating element according to claim 1, wherein at least one of the first to fourth protrusions comprises a plurality of protrusions separated from each other.
The ultrasonic generator according to any one of claims 1 to 3,
A first case material on which the ultrasonic wave generating element is mounted;
A second case material joined to the first case material and surrounding the ultrasonic generating element together with the first case material, and the second case material emits ultrasonic waves to the outside. An ultrasonic generator provided with an ultrasonic discharge hole.
In the periphery of the first vibration plate having the first and second main surfaces facing each other and provided with an excitation region for exciting ultrasonic waves in the center, and the excitation region of the first vibration plate, A first vibrator having a first protrusion protruding from the first main surface and a second protrusion protruding from the second main surface around the excitation region;
In the periphery of the excitation area of the second diaphragm, the second diaphragm having the third and fourth main surfaces facing each other and provided with an excitation area for exciting ultrasonic waves in the center, A third protrusion having a third protrusion protruding from the third main surface, and a second vibrator having a fourth protrusion protruding from the fourth main surface around the excitation region is prepared. And a process of
A method for manufacturing an ultrasonic wave generating element, comprising the step of joining the second protrusion of the first vibrator and the third protrusion of the second vibrator.
The method for manufacturing an ultrasonic generating element according to claim 5, wherein when the first vibrator and the second vibrator are joined, the first and second vibrators are joined using a joining material.