WO2015005667A1

WO2015005667A1 - Apparatus for generating liquid plasma torch

Info

Publication number: WO2015005667A1
Application number: PCT/KR2014/006143
Authority: WO
Inventors: 석동찬; 노태협; 정용호; 유승민; 유승열; 박준석; 홍은정
Original assignee: 한국기초과학지원연구원
Priority date: 2013-07-09
Filing date: 2014-07-09
Publication date: 2015-01-15
Also published as: KR20150006604A; KR101493673B1

Abstract

Disclosed is an apparatus for generating a liquid plasma torch. The apparatus for generating a liquid plasma torch according to an embodiment of the present invention comprises: a first electrode; a second electrode; a first dielectric located between the first electrode and the second electrode; and a flow path penetrating the first electrode, the second electrode and the first dielectric, wherein if a voltage is applied to the first electrode and the second electrode, the apparatus generates plasma on the basis of a conductive liquid passing through the flow path.

Description

Liquid Plasma Torch Generator

The present invention relates to a plasma torch generator, and more particularly, to an apparatus capable of generating a plasma torch based on a liquid.

Plasma refers to an ionized gas, and excitation using energy to a gas composed of atoms or molecules forms a plasma composed of electrons, ions, decomposed gases, photons, and the like. Such plasma is used in various ways, such as fusion power generation, surface treatment of a substrate in the semiconductor field, or surface treatment of a powder.

The plasma is generated as follows. When energy is applied to a solid, it becomes a liquid. When energy is applied to a liquid, it becomes a gas. When high energy is applied to a gas, a plasma is generated by separating the gas into negatively charged electrons and positively charged ions.

In order to generate a plasma based on a solid or a liquid, a larger amount of heat energy is required than when a plasma is generated by applying heat energy to a gas.

Therefore, applying heat energy to the gas is the most efficient and easy way to generate plasma because it does not have to supply much heat energy.

However, there is a problem that the amount of ions or radicals generated when generating plasma based on gas is very small compared to the amount of ions or radicals generated when generating plasma based on liquid. This is because the gas is larger in volume but smaller in density than the liquid.

In order to solve such a problem, apparatuses for generating plasma by applying energy to liquids have been developed, and Patent Application No. 2009-0045210 discloses "Generation apparatus and method of a high density underwater plasma torch". However, since the apparatus and method for generating a high density underwater plasma torch require a regulator for controlling the injection of gas or air into the space between the transparent quartz tube and the conductive discharge electrode of the underwater plasma reactor, the plasma cannot be generated using only pure liquid. There is this.

Accordingly, the present inventors have recognized the problems of the prior arts and, after research, have introduced the following configuration, and have developed an apparatus capable of generating plasma based on pure liquids while supplying an appropriate amount of energy.

The technical problem to be solved by the present invention is to provide an apparatus capable of generating a plasma torch based on pure liquid only without a separate gas source.

In order to solve the above technical problem, in one aspect, the liquid plasma torch generating apparatus according to an embodiment of the present invention comprises a first electrode; Second electrode; A first dielectric disposed between the first electrode and the second electrode; And a flow path penetrating the first electrode, the second electrode, and the first dielectric, and when a voltage is applied to the first electrode and the second electrode, the plasma is based on the conductive liquid passing through the flow path. Generates.

In another aspect, a liquid plasma torch generator according to an embodiment of the present invention includes a liquid supply unit for supplying a conductive liquid to the flow path; And a power supply unit applying a voltage to the first electrode and the second electrode.

In detail, the power supply unit may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage, and the magnitude of the voltage may be 300 V or more.

In detail, the conductive liquid is supplied to one side of the flow path, and in the area of the flow path penetrating through the first dielectric, the conductive liquid is vaporized to generate a plasma, and the generated plasma is formed on the other side of the flow path. Discharged to the side.

The flow path is open at both ends, and one side of the flow path means either one of the open ends, and the other side of the flow path means the other side.

Specifically, the conductivity of the conductive liquid, the cross-sectional area of the flow path, the first electrode and the so that a glow discharge or an arc discharge occurs in a region of the flow path penetrating the first dielectric. The distance between the second electrodes and the magnitude of the voltage are respectively determined.

In order to cause a glow discharge or an arc discharge to occur in an area of the flow path that passes through the first dielectric material, the first dielectric of the flow path area is penetrated by using Equation 1 below. The resistance (R ₁ ) of the region to be configured to be 40 ohms (Ω) or more, Equation 1 is R ₁ = (1 / S) × (L ₁ / A ₁ ), in the equation (1), S is the conductivity of the conductive liquid, A ₁ is the cross-sectional area of the flow path, and L ₁ is the distance between the first electrode and the second electrode.

Specifically, the conductivity of the conductive liquid is 10 μS / cm to 1S / cm.

In one embodiment, the flow path is a capillary tube (capillaty tube), it may be configured to supply the conductive liquid to the flow path without a separate liquid supply device for supplying the conductive liquid by the capillary phenomenon.

In one aspect, a liquid plasma torch generator according to an embodiment of the present invention includes a first electrode; Second electrode; Third electrode; A first dielectric disposed between the first electrode and the second electrode; A second dielectric disposed between the second electrode and the third electrode; And a flow path passing through the first electrode, the second electrode, the third electrode, the first dielectric, and the second dielectric, wherein a voltage is applied to the first electrode, the second electrode, and the third electrode. When applied, a plasma is generated based on the conductive liquid passing through the flow path.

For example, in an arrangement state of the first electrode 210, the second electrode 220, and the third electrode 230, two ground electrodes are spaced apart from each other by a predetermined distance with one electrode applied to a high voltage therebetween. May be in a closed state. In addition, two electrodes having a high voltage may be disposed to be spaced apart from each other by one ground electrode.

In detail, the conductive liquid is supplied to one side of the flow path, and vaporizes the conductive liquid passing through the flow path in a region penetrating the first dielectric, and passes through the second dielectric in the region of the flow passage. Plasma generated by generating a plasma based on the vaporized liquid is discharged to the other side of the flow path.

In another aspect, a liquid plasma torch generator according to an embodiment of the present invention includes a liquid supply unit for supplying a conductive liquid to the flow path; And a power supply unit applying a voltage to the first electrode, the second electrode, and the third electrode.

When a glow discharge or an arc discharge occurs in an area of the flow path that passes through the first dielectric material, all of the conductive liquid passing through the area of the flow path that penetrates the first dielectric may be vaporized. The plasma may be generated based on some of the vaporized liquid. That is, all of the liquid may be vaporized, or some of the liquid may be vaporized and the remaining vaporized liquid may be plasmalized.

In order to cause a glow discharge or an arc discharge to occur in an area of the flow path that passes through the first dielectric material, the first dielectric of the flow path is penetrated by using Equation 2 below. The resistance (R ₂ ) of the region to be configured to be 40 ohms (Ω) or more, Equation 2 is R ₂ = (1 / S) × (L ₂ / A ₂ ), in the equation (2), S is the conductivity of the conductive liquid, A ₂ is the cross-sectional area of the flow path, and L ₂ is the distance between the first electrode and the second electrode.

Specifically, the conductivity of the conductive liquid, the cross-sectional area of the flow path, the second electrode and the so as to cause a glow discharge or an arc discharge to occur in the area of the flow path penetrating the second dielectric. The distance between the third electrodes and the magnitude of the voltage are respectively determined.

When a glow discharge or an arc discharge occurs when the liquid vaporized through the region of the flow path penetrating the first dielectric material passes through the region of the flow path penetrating the second dielectric material, vaporization occurs. Plasma can be generated based on the prepared liquid. In addition, a glow discharge or an arc discharge occurs when a plasma generated by passing through a region of a flow path that passes through the first dielectric material passes through a region that passes through the second dielectric of the flow path region. Since the generated plasma can be discharged once again, more ions or radicals can be generated.

In order to cause a glow discharge or an arc discharge to occur in an area of the flow path that passes through the second dielectric, the second dielectric of the flow path is penetrated by using Equation 3 below. The resistance (R ₃ ) of the region to be configured to be 40 ohms (Ω) or more, Equation 3 is R ₃ = (1 / S) × (L ₃ / A ₂ ), in the equation (2), S is the conductivity of the conductive liquid, A ₂ is the cross-sectional area of the flow path, and L ₃ is the distance between the second electrode and the third electrode.

In detail, the conductivity of the conductive liquid may be 10 μS / cm to 1S / cm.

In detail, the flow path may be a capillary tube, and the conductive liquid may be supplied to the flow path without a separate liquid supply device for supplying the conductive liquid by capillary action.

The present invention as described above, there is an effect that can generate a plasma based on the liquid without a separate gas supply device.

In addition, since the plasma can be generated on the basis of the liquid, the plasma can be generated using water which can be easily obtained in the vicinity.

It is also possible to generate a plasma based on a pure liquid, so that a greater amount of ions or radicals can be produced than when generating a plasma based on a gas.

1 is a first embodiment of a liquid plasma torch generator according to an embodiment of the present invention.

FIG. 2A is a view for explaining a principle that glow discharge or arc discharge occurs in a region of the flow path that passes through the first dielectric in the liquid plasma torch generator of FIG. 1.

FIG. 2B is a diagram for describing a glow discharge or an arc discharge occurring in a region of the flow path that passes through the first dielectric in the liquid plasma torch generator of FIG. 1.

3 is a view for explaining a condition under which glow discharge or arc discharge may occur.

Figure 4 is a second embodiment of a liquid plasma torch generator according to an embodiment of the present invention.

5 is a third embodiment of a liquid plasma torch generator according to an embodiment of the present invention.

6 is a fourth embodiment of a liquid plasma torch generating device according to an embodiment of the present invention.

As the invention allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the written description. However, this is not intended to limit the present invention to specific embodiments, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like numbers refer to like elements in the figures.

Referring to FIG. 1, the liquid plasma torch generator 100 according to an exemplary embodiment of the present invention includes a first electrode 110, a second electrode 120, a first dielectric 130, a flow path 140, and a power supply unit ( 150).

The first electrode 110 and the second electrode 120 are spaced apart from each other by a predetermined distance, and the first dielectric 130 is located between the first electrode 110 and the second electrode 120.

The flow path 140 has a hollow formed along the axial direction of the flow path 140, and penetrates through the first electrode 110, the second electrode 120, and the first dielectric 130, respectively. In addition, one side of the flow path 140 may be connected to a liquid supply part (not shown).

In one embodiment, when the flow path 140 is a narrow and long capillary tube, when one side of the flow path 140 is immersed in the liquid in a direction perpendicular to the ground, the cohesion of the liquid and the flow path 140 The conductive liquid may be supplied to the flow path 140 by capillary phenomenon due to the adhesion between the liquid and the liquid. That is, when the flow path 140 is a capillary tube, the conductive liquid may be supplied to the flow path 140 even when there is no liquid supply unit, which is a separate liquid supply device for supplying the conductive liquid.

The liquid supply part may supply the conductive liquid to the flow path 140. The conductive liquid is supplied to one side of the flow path 140 connected with the liquid supply part, and the liquid supplied by the liquid supply part passes through the flow path 140.

The power supply unit 150 is connected to the first electrode 110 and the second electrode 120, respectively, and applies a voltage to the first electrode 110 and the second electrode 120. The power supply unit 150 may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage. In addition, the magnitude of the voltage applied by the power supply unit 150 is preferably 300V or more, since a high voltage is required to generate a plasma based on the liquid.

The liquid plasma torch generator 100 according to an exemplary embodiment of the present invention generates plasma based on a conductive liquid passing through the flow path 140 when a voltage is applied to the first electrode 110 and the second electrode 120. The generated plasma is discharged to the other side of the flow path 140.

FIG. 2A is a view for explaining the principle of glow discharge or arc discharge occurring in a region penetrating the first dielectric of the flow path region in the liquid plasma torch generator of FIG. 1. FIG. In the liquid plasma torch generator of FIG. 1, a glow discharge or arc discharge occurs in a region of the flow path passing through the first dielectric, and FIG. 3 is a glow discharge or arc. (arc) It is a figure for demonstrating the conditions which can generate discharge.

2A and 2B, when a voltage is applied between the first electrode 110 and the second electrode 120 when the conductive liquid passes through the flow path 140, the liquid is electrolyzed or the liquid generates thermal energy. It can be supplied and vaporized, and bubbles are generated around the electrode. For example, bubbles may be generated around the second electrode 120.

Since a high voltage is applied between the first electrode 110 and the second electrode 120, the glow discharge or the arc discharge may be started in the generated bubbles. When the glow discharge or the arc discharge is started, the bubbles generated around the electrode continue to grow, and the area where the glow discharge or the arc discharge occurs also increases as the bubbles grow.

After the region in which the glow discharge or the arc discharge occurs is enlarged, the state in which the glow discharge or the arc discharge occurs in the region penetrating the first dielectric 130 in the region of the flow path 140 is maintained. Therefore, even if the conductive liquid is directly supplied to the flow path 140, the resistance of the liquid passing through the flow path 140 is destroyed, so that the plasma can be generated based on the liquid.

In order to cause a glow discharge or an arc discharge to occur in a region of the flow path 140 that passes through the first dielectric 130, the conditions described below must be satisfied. This will be described with reference to FIG. 3.

Referring to FIG. 3, in order to cause a glow discharge or an arc discharge to occur in an area of the flow path 140 that passes through the first dielectric 130, the conductivity of the conductive liquid, the flow path 40, is increased. The cross-sectional area of, the distance between the first electrode 10 and the second electrode 20, and the magnitude of the voltage should be determined in advance, and the following Equation 1 should be satisfied.

Equation 1 R ₁ = (1 / S) × (L ₁ / A ₁ )

In Equation 1, S is the conductivity of the conductive liquid, A ₁ is the cross-sectional area of the flow path, L ₁ is the distance between the first electrode and the second electrode.

That is, by using Equation 1, the resistance R ₁ of the region penetrating the first dielectric 130 in the region of the flow path 140 should be configured to be 40 Ω or more. In addition, the conductivity of the conductive liquid is preferably 10 μS / cm to 1S / cm.

Referring to FIG. 4, the liquid plasma torch generator 100 according to an exemplary embodiment of the present invention may include a first electrode 110, a second electrode 120, a first dielectric 130, a flow path 140, and a power supply unit ( 150).

The first electrode 110 and the second electrode 120 are spaced apart from each other by a predetermined distance, and the first dielectric 130 is located between the first electrode 110 and the second electrode 120. An area in which the glow discharge or the arc discharge may occur is formed in the first dielectric 130, and the area is configured to communicate with the first electrode 110. That is, a hollow is formed in the first electrode 110 and is connected to an area formed inside the first dielectric 130.

The flow passage 140 has a hollow formed along the axial direction of the flow passage 140 and penetrates through the first dielectric 130. In addition, one side of the flow path 140 may be connected to a liquid supply part (not shown).

The liquid plasma torch generator 100 according to an exemplary embodiment of the present invention generates plasma based on a conductive liquid passing through the flow path 140 when a voltage is applied to the first electrode 110 and the second electrode 120. The generated plasma is discharged and discharged through an opening formed in the first electrode 110.

5 is a third embodiment of the liquid plasma torch generator according to the embodiment of the present invention, and FIG. 6 is a fourth embodiment of the liquid plasma torch generator according to the embodiment of the present invention.

Liquid plasma torch generator 200 according to an embodiment of the present invention, the first electrode 210, the second electrode 220, the third electrode 230, the first dielectric 240, the second dielectric 250, The flow path 260 and the power supply unit 270 may be included.

The first electrode 210, the second electrode 220, and the third electrode 230 are spaced apart from each other by a predetermined distance, and the first dielectric 240 is positioned between the first electrode 210 and the second electrode 220. The second dielectric 250 is positioned between the second electrode 220 and the third electrode 230.

In addition, referring to FIG. 6, the first dielectric 240 constituting the liquid plasma torch generator 200 according to the exemplary embodiment of the present invention may be connected to the second dielectric 250 to form a dielectric. have.

The flow path 260 is hollow along the axial direction of the flow path 260, and includes a first electrode 210, a second electrode 220, a third electrode 230, a first dielectric 240, and a second. Each penetrates through the dielectric 250. In addition, one side of the flow path 260 may be connected to a liquid supply part (not shown).

In one embodiment, when the flow path 260 is a narrow and long capillaty tube, when one side of the flow path 260 is immersed in the liquid in a direction perpendicular to the ground, the cohesion of the liquid and the flow path 260 The conductive liquid may be supplied to the flow path 260 by capillary phenomenon due to the adhesion between the liquid and the liquid. That is, when the flow path 260 is a capillary tube, the conductive liquid may be supplied to the flow path 260 even when there is no liquid supply unit, which is a separate liquid supply device for supplying the conductive liquid.

The liquid supply part may supply the conductive liquid to the flow path 260. The conductive liquid is supplied to one side of the flow path 260 connected to the liquid supply part, and the liquid supplied by the liquid supply part passes through the flow path 260.

The power supply unit 270 is connected to the first electrode 210, the second electrode 220, and the third electrode 230, respectively, between the first electrode 210 and the second electrode 220 and the second electrode 220. ) And a third electrode 230 are applied. The power supply unit 270 may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage. In addition, the magnitude of the voltage applied by the power supply unit 270 is preferably 300 V or more, and a high voltage is required to generate a plasma based on the liquid.

The liquid plasma torch generator 200 according to an exemplary embodiment of the present invention has a conductivity passing through the flow path 260 when a voltage is applied to the first electrode 210, the second electrode 220, and the third electrode 230. Generate a plasma based on the liquid.

The region in which the plasma is generated is a region penetrating the first dielectric material 240 and a region penetrating the second dielectric material 250, and the conductive liquid supplied to the flow channel 260 is a first dielectric ( 240 and the second dielectric 250 are sequentially penetrated.

In the region penetrating the first dielectric material 240, all of the conductive liquid passing through the flow path 260 may be vaporized by glow discharge or arc discharge, or part of the liquid may be vaporized, and the rest may be plasma.

In the region penetrating the second dielectric 250, plasma may be generated based on the liquid vaporized by the glow discharge or the arc discharge, or the plasma generated in the region penetrating the first dielectric 240 may be discharged again. have.

In order to cause glow discharge or arc discharge to occur in the region of the flow path 260 that passes through the first dielectric material 240, the conductivity of the conductive liquid, the cross-sectional area of the flow path 260, and the first electrode The distance between the 210 and the second electrode 220 and the magnitude of the voltage must be determined in advance, and the following Equation 2 must be satisfied.

Equation 2 R ₂ = (1 / S) × (L ₂ / A ₂ )

In Equation 2, S is the conductivity of the conductive liquid, A ₂ is the cross-sectional area of the flow path 260, L ₂ is the distance between the first electrode 210 and the second electrode 220.

That is, by using Equation 2, the resistance R ₁ of the region penetrating the first dielectric material 240 in the region of the flow path 260 should be configured to be 40 Ω or more, and the conductivity of the conductive liquid ( conductivity) is preferably 10 µS / cm to 1S / cm.

In addition, in order to cause a glow discharge or an arc discharge to occur in an area of the flow path 260 that passes through the second dielectric 250, the conductivity of the conductive liquid and the cross-sectional area A of the flow path 260 are defined. ₂ ), the distance L ₃ and the magnitude of the voltage between the second electrode 220 and the third electrode 230 must be determined in advance, and the following Equation 2 must be satisfied.

Equation 3 R ₃ = (1 / S) × (L ₃ / A ₂ )

In Equation 3, S is the conductivity of the conductive liquid, A ₂ is the cross-sectional area of the flow path 260, L ₃ is the distance between the second electrode 220 and the third electrode 230.

That is, by using Equation 3, the resistance R ₃ of the region penetrating the second dielectric 250 of the region of the flow path 260 should be configured to be 40 Ω or more, and the conductivity of the conductive liquid ( conductivity) is preferably 10 µS / cm to 1S / cm.

Winries and conditions for causing a glow discharge or an arc discharge in a region penetrating the first dielectric material 240 and a region penetrating the second dielectric material 250 in the region of the flow path 260 are respectively It is the same as the method described with reference to FIG.

Through this manner, the liquid plasma torch generator 200 according to the embodiment of the present invention may generate two times of a glow discharge or an arc discharge in succession. Therefore, the amount of generated ions or radicals in the plasma may be higher than in the case of only causing the glow discharge or the arc discharge once, and the plasma flame length may be further increased.

Although embodiments according to the present invention have been described above, these are merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent embodiments of the present invention are possible therefrom. Therefore, the true technical protection scope of the present invention will be defined by the following claims.

[Description of the code]

100, 200: liquid plasma torch generator 110, 210: first electrode

120, 220: second electrode 130, 240: first dielectric

230: third electrode 140, 260: flow path

250: second dielectric 150, 270: power supply

Claims

A first electrode;

Second electrode;

A first dielectric disposed between the first electrode and the second electrode; And

A flow path penetrating the first electrode, the second electrode, and the first dielectric,

And a plasma is generated based on the conductive liquid passing through the flow path when voltage is applied to the first electrode and the second electrode.
The method of claim 1,

A liquid supply unit supplying a conductive liquid to the flow path; And

And a power supply unit applying a voltage to the first electrode and the second electrode.
The method of claim 1,

The power supply unit may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage, and the magnitude of the voltage is 300 V or more.
The method of claim 1,

The conductive liquid is supplied to one side of the flow path,

In the region of the flow path penetrates through the first dielectric, the conductive liquid is vaporized to generate plasma, and the generated plasma is discharged to the other side of the flow path.
The method of claim 1,

The conductivity of the conductive liquid, the cross-sectional area of the flow path, between the first electrode and the second electrode so that a glow discharge or an arc discharge occurs in a region of the flow path that passes through the first dielectric. And a distance and a magnitude of the voltage.
The method of claim 5,

A liquid plasma torch generator according to Equation 1, wherein the resistance R 1 of a region of the flow path penetrating through the first dielectric is 40 ohms or more:

Equation 1

R 1 = (1 / S) × (L 1 / A 1 )

In Equation 1,

S is the conductivity of the conductive liquid,

A 1 is the cross-sectional area of the flow path,

L 1 is a distance between the first electrode and the second electrode.
The method of claim 1,

The conductivity of the conductive liquid (conductivity) is a liquid plasma torch generator, 10μS / ㎝ to 1S / ㎝.
The method of claim 1,

The flow path is a capillary tube (capillaty tube), the liquid plasma torch generating device configured to supply the conductive liquid to the flow path without a separate liquid supply device for supplying the conductive liquid by the capillary phenomenon.
A first electrode;

Second electrode;

Third electrode;

A first dielectric disposed between the first electrode and the second electrode;

A second dielectric disposed between the second electrode and the third electrode; And

A flow path penetrating the first electrode, the second electrode, the third electrode, the first dielectric, and the second dielectric,

And a voltage is applied to the first electrode, the second electrode, and the third electrode to generate a plasma based on the conductive liquid passing through the flow path.
The method of claim 9,

The conductive liquid is supplied to one side of the flow path,

Conductive liquid vaporization passing through the flow path in a region of the flow path that passes through the first dielectric material,

And plasma generated based on the vaporized liquid in a region penetrating through the second dielectric is discharged to the other side of the flow path.
The method of claim 9,

A liquid supply unit supplying a conductive liquid to the flow path; And

And a power supply unit applying a voltage to the first electrode, the second electrode and the third electrode.
The method of claim 9,

The power supply unit may apply a direct current, alternating current, bidirectional or unidirectional pulse voltage, and the magnitude of the voltage is 300 V or more.
The method of claim 9,

The conductivity of the conductive liquid, the cross-sectional area of the flow path, between the first electrode and the second electrode so that a glow discharge or an arc discharge occurs in a region of the flow path that passes through the first dielectric. And a distance and a magnitude of the voltage.
The method of claim 9,

The conductivity (S) of the conductive liquid, the cross-sectional area (A) of the flow path, and the second electrode so that a glow discharge or an arc discharge occurs in an area of the flow path that passes through the second dielectric. And a distance (L 2 ) between the third electrode and the third electrode and the magnitude of the voltage.
The method of claim 13,

A liquid plasma torch generator according to Equation 1, wherein the resistance R 2 of a region of the flow path penetrating through the first dielectric is 40 Ω or more:

Equation 1

R 2 = (1 / S) × (L 2 / A 2 )

In Equation 1,

S is the conductivity of the conductive liquid,

A 2 is the cross-sectional area of the flow path,

L 2 is a distance between the first electrode and the second electrode.
The method of claim 14,

A liquid plasma torch generator according to Equation 2, wherein the resistance R 3 of the region of the flow path penetrating the second dielectric is 40 ohms or more:

Equation 2

R 3 = (1 / S) × (L 3 / A 2 )

In Equation 2,

S is the conductivity of the conductive liquid,

A 2 is the cross-sectional area of the flow path,

L 3 is a distance between the second electrode and the third electrode.
The method of claim 9,

The conductivity of the conductive liquid (conductivity) is a liquid plasma torch generator, 10μS / ㎝ to 1S / ㎝.
The method of claim 9,

The flow path is a capillary tube (capillaty tube), the liquid plasma torch generator, the conductive liquid is supplied to the flow path without a separate liquid supply device for supplying the conductive liquid by the capillary phenomenon.