WO2014209017A1

WO2014209017A1 - Shower head for electronic device having dispersion pins fabrication, and shower head assembly

Info

Publication number: WO2014209017A1
Application number: PCT/KR2014/005644
Authority: WO
Inventors: 변철수; 정일용
Original assignee: 한국생산기술연구원
Priority date: 2013-06-26
Filing date: 2014-06-25
Publication date: 2014-12-31

Abstract

A shower head is provided. The shower head, according to one exemplary embodiment of the present invention, comprises: a body provided with one side having a plurality of spray holes penetrated therethrough, and the other side facing the one side; and a plurality of first dispersion pins protruding from the plurality of spray holes of the one side to the other side such that end portions thereof support the other side, and having first gas inlet holes on one side thereof and provided with first passages connected to the first gas inlet holes therein, wherein gas introduced between the one side and the other side is immediately discharged to the outside of the body through the plurality of spray holes by passing the first gas inlet holes and the first passages.

Description

Shower head and shower head assembly for manufacturing electronic devices with diffusion pins

The present invention relates to a shower head and a shower head assembly for manufacturing an electronic device.

As substrates such as wafers for manufacturing semiconductor devices and glass for manufacturing flat panel displays have become large diameters, it is becoming an important problem to secure process uniformity over the entire surface of the substrate. Showerheads are widely used as supply means.

In this case, the gas must be sufficiently diffused in the shower head in the lateral direction so that the gas can be uniformly sprayed over the entire shower head. The configuration that is installed to protrude upward has been introduced.

1 to 3 are views for explaining a conventional shower head having a diffusion pin, and the same reference numerals are substantially the same as those already disclosed in Korean Patent Nos. 972801 and 972802.

1 is a view for explaining an example of a conventional shower head. As shown in FIG. 1, the interior space of the shower head body 100 is divided into two spatial layers, a diffusion chamber 110 and a distribution chamber 120, by an intermediate plate 150 installed horizontally. A plurality of connection holes 171 are installed in the 150 to penetrate in the vertical direction, and the diffusion pins 160 are inserted into the connection holes 171 to protrude upward.

The bottom surface of the body 100 is formed so that the injection hole 170 penetrates. The gas supply unit 130 is installed in the diffusion chamber 110.

The gas that enters the longitudinal direction toward the center portion of the diffusion chamber 110 through the gas supply unit 130 impinges on the intermediate plate 150 and diffuses radially in the transverse direction, that is, the central portion to the outward direction.

The diffusion pin 160 is intended to allow such a lateral diffusion to occur quickly, and the gap g1 between the upper end of the diffusion pin 160 and the body 100 is relatively larger than the protruding length of the diffusion pin 160. It is more preferable when it is small.

The gas supplied into the shower head body 100 is distributed under the diffusion chamber 110 while uniformly spreading in the transverse chamber 110 in the transverse direction within a short time under the influence of the diffusion pin 160 ( 120 is injected evenly through the diffusion pin 160, more evenly distributed in the distribution chamber 120, and then sprayed downward with the substrate (not shown) at an even pressure through the injection hole 170 do.

However, in the above-described conventional showerhead, the spacer 180 must be installed in the diffusion chamber 110 so that the gap g1 is constantly maintained and the intermediate plate 150 is stably fixed. In addition, the added structure causes a problem that the lateral diffusion of the gas cannot be made quickly and stably.

2 is a view for explaining another example of the conventional shower head. In the case of FIG. 2, unlike the one of the intermediate plate of FIG. 1, two intermediate plates are installed as the first intermediate plate 151 and the second intermediate plate 152, so that the internal space of the body 100 is formed from the first diffusion chamber ( 111 is divided into a second diffusion chamber 112 and a distribution chamber 120, and two gas supply units are installed instead of one, unlike in FIG. 1, and the first gas supply unit 131 is a first diffusion chamber 111. ), And the second gas supply unit 132 is installed in the second diffusion chamber 112.

Each of the

intermediate plates

151 and 152 is formed such that a plurality of connection holes 171 pass through. In some connection holes 171 of the second intermediate plate 152, a plurality of first diffusion pins 161 pass through the second diffusion chamber 112, and then the connection holes 171 of the first intermediate plate 151 are formed. A plurality of second diffusion pins 162 are installed in the other connection hole 171 of the second intermediate plate 152 to penetrate upwardly through the first intermediate plate 151. It is fitted to protrude upward.

The first gas supplied to the first diffusion chamber 111 through the first gas supply unit 131 is uniformly laterally in the first diffusion chamber 111 within a short time under the influence of the first diffusion pin 161. The second gas is uniformly introduced into the distribution chamber 120 through the first diffusion pin 161 and is supplied to the second diffusion chamber 112 through the second gas supply unit 132. Under the influence of 162, the diffusion is uniformly spread in the second diffusion chamber 112 laterally within the second diffusion chamber 112 and then uniformly flows into the distribution chamber 120 through the second diffusion pin 162.

For this reason, in the distribution chamber 120, the first gas and the second gas are evenly mixed with respect to the entire area, and then injected downward through the injection hole 170 at an equal pressure.

However, in this case, as in the case of FIG. 1, there is a problem that

spacers

181 and 182 must be installed in the first diffusion chamber 111 and the second diffusion chamber 112 so that the intermediate plate 150 is stably fixed.

3 is a view for explaining another example of a conventional shower head. In the case of FIG. 3, the two showerheads of FIG. 2 are stacked up and down, and the upper showerhead is installed so that the injection tube 140 extends downward from the injection hole 170. There is a guide tube 145 is installed so that the injection tube 140 of the showerhead to pass through.

Then, the first gas and the second gas introduced through the upper shower head are evenly distributed in the distribution chamber 120 and then sprayed toward the substrate (not shown) via the spray tube 140 via the lower shower head. The first gas and the second gas introduced through the shower head below may be sprayed evenly in the distribution chamber 120 and then sprayed downward through the injection tube 140.

At this time, the first gas and the second gas flowing into the upper shower head and the first gas and the second gas flowing into the lower shower head may be of the same kind or different kinds according to a desired specification. .

However, this also applies to the

spacers

181 and 182, as in FIG.

As described above, in the case of the conventional shower head,

spacers

180, 181, and 182 must be installed to stably fix the

intermediate plates

150, 151, and 152, so that gas is diffused into the

chambers

110, 111, and 112. The

spacers

180, 181, and 182 act as obstacles when the lateral diffusion is performed in the N-side diffusion, and thus the lateral diffusion cannot be made quickly and stably.

According to one embodiment of the present invention, to provide a shower head that does not need to install a spacer separately while taking advantage of the installation of the diffusion pin.

According to an aspect of the invention, the body having one surface and a plurality of injection holes are formed through and the other surface facing the one surface; Protruding from the plurality of injection holes on the one side to the other surface side to support the other surface, a gas inlet is formed on one side, and includes a plurality of diffusion pins having a passage connected to the gas inlet therein; And a shower head through which the gas introduced between the and one surface is discharged to the outside of the body through the plurality of injection holes immediately after passing through the gas inlet hole and the passage.

According to another aspect of the invention, the body having one surface formed with a plurality of injection holes and the other surface facing the one surface; A first intermediate plate disposed between the one surface and the other surface and protruding from the first connection hole of the first intermediate plate through which the first connection hole is formed and the first connection hole of the first intermediate plate to the other surface, and having an end portion supporting the other surface; And a first diffusion pin having a first passage connected to the first connection hole, wherein a first gas inlet is formed at one side of the second diffusion pin so that the gas introduced between the other surface and the first intermediate plate is A shower head is provided through the first gas inlet hole and the first passage, and is spread between the one surface and the first intermediate plate and then discharged out of the body through the injection hole.

At this time, further comprising a second intermediate plate disposed between the first intermediate plate and the other surface, the first diffusion pin may be formed to pass through the second intermediate plate.

At this time, the second connecting hole formed through the first intermediate plate and protruding from the second connecting hole toward the second intermediate plate, the end of which supports the second intermediate plate and the second connecting hole therein and And a second diffusion pin having a second passage connected thereto, wherein a second gas inlet is formed at one side of the second diffusion pin so that the gas introduced between the first intermediate plate and the second intermediate plate After passing through the second gas inlet hole and the second passageway between the one surface and the first intermediate plate may be discharged to the outside of the body through the injection hole.

In this case, the one surface may be a bottom surface of the interior space of the body, and the other surface may be a ceiling of the interior space of the body.

In this case, the first gas inlet hole may be formed at the end of the first diffusion pin, and the second gas inlet hole may be formed at the end of the second diffusion pin.

In this case, a filler sheet for brazing may be installed on the bottom surface, the surface facing the ceiling of the first intermediate plate and the second intermediate plate, and the upper surface of the ceiling.

According to another aspect of the present invention, a shower head assembly including the first and second shower heads in which the above-described two shower heads are disposed in the vertical direction, wherein the first shower head is formed on the body of the first shower head. A spray tube extending downward is installed in the cavity, and the second shower head is provided with a shower head assembly in which a guide tube through which the spray tube penetrates in a vertical direction is installed.

According to another aspect of the invention, the body having one surface through which a plurality of injection holes are formed and the other surface facing the one surface; A third intermediate plate disposed between the one surface and the other surface and having a third connection hole formed therethrough; A third diffusion pin protruding from the third connection hole of the third intermediate plate toward the one surface side to support the one surface, and having a third diffusion pin having a third passage connected to the third connection hole therein; A first gas discharge hole is formed at one side of the third diffusion pin so that gas introduced between the other surface and the third intermediate plate passes through the third passage and the first gas discharge hole to the outside of the body through the injection hole. A shower head is provided which is discharged to.

At this time, further comprising a fourth intermediate plate disposed between the third intermediate plate and the one surface, the third diffusion pin may be formed to pass through the fourth intermediate plate.

In this case, a fourth connection hole formed through the fourth intermediate plate and a fourth passage protruding from the fourth connection hole toward the one side, and having an end portion supporting the one surface and having a fourth passage connected to the fourth connection hole therein. And a fourth gas diffusion hole, wherein a second gas outlet hole is formed at one side of the fourth diffusion pin, and the gas introduced between the third intermediate plate and the fourth intermediate plate is in the fourth passage and the second gas outlet hole. After passing through the fourth intermediate plate and the one surface and is discharged to the outside of the body through the injection hole, the gas passing through the first gas discharge hole is also diffused between the fourth intermediate plate and the one surface Then it may be discharged to the outside of the body through the injection hole.

In this case, the first gas discharge hole may be formed at the end of the third diffusion pin, and the second gas discharge hole may be formed at the end of the fourth diffusion pin.

At this time, a filler sheet to be brazed is installed on the ceiling, the bottom facing the bottom surface of the third and fourth intermediate plates, and the bottom surface of the bottom surface, and then the showerhead is braided upside down. Can be.

According to still another aspect of the present invention, a shower head assembly including third and fourth shower heads having the above-described two shower heads disposed in a vertical direction, wherein the third shower head is formed in a body of the third shower head. An injection tube extending downward in the injection hole is installed, and the fourth shower head is provided with a shower head assembly in which a guide tube through which the injection tube passes in the vertical direction is installed.

In the shower head according to the exemplary embodiment of the present invention, a diffusion pin installed in the shower head is formed to support a ceiling, a bottom, or an intermediate plate inside the shower head body, so that a separate spacer is not required.

The shower head according to an embodiment of the present invention may seal the inside of the shower head more firmly by brazing a gap generated at the installation position of the diffusion pin and the injection tube using the filler sheet.

1 is a cross-sectional view for explaining an example of a conventional shower head.

2 is a cross-sectional view for explaining another example of the conventional shower head.

3 is a cross-sectional view for explaining another example of a conventional shower head.

4 is a cross-sectional view of the shower head according to the first embodiment of the present invention.

5 is a cross-sectional view of the shower head according to the second embodiment of the present invention.

6 is a cross-sectional view of the shower head assembly according to the third embodiment of the present invention.

7 is a sectional view of a shower head according to a fourth embodiment of the present invention.

8 is a cross-sectional view of the shower head assembly according to the fifth embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention.

4 is a cross-sectional view of the shower head 200 according to the first embodiment of the present invention.

Referring to FIG. 4, the shower head 200 according to the first embodiment of the present invention includes a body 210 and a diffusion pin 220.

The body 210 has a hexahedron shape, and a gas injection hole 217 is formed in one side thereof, and a plurality of injection holes 213 are formed in the bottom 212 to discharge the gas injected therein. It is formed through. Accordingly, the gas injected into the body 210 may be diffused into the body 210 and then discharged to the outside through the plurality of injection holes 213 formed in the bottom surface 212 of the body 210.

According to an embodiment of the present invention, a plurality of diffusion pins 220 are installed inside the body 210. Each of the plurality of diffusion pins 220 protrudes upward from the plurality of injection holes 213 in the upper direction, and is formed to support the ceiling 214.

In this case, a gas inlet hole 223 is formed at an upper end of the diffusion pin 220, and a passage 225 connected to the gas inlet hole 223 is formed in the diffusion pin 220. The passage 225 is connected to the injection hole 213.

At this time, the gas inlet hole 223 may be made by cutting a part of the end of the diffusion pin 220, or may be made by forming a through hole in the end side.

In the present exemplary embodiment, the gas inlet hole 223 is formed at the end of the diffusion pin 220, but the position of the gas inlet hole 223 is not limited thereto, and may be formed in the middle of the diffusion pin 220. Could be

Accordingly, in the shower head 200 according to the first embodiment of the present invention, the gas introduced into the body 210 through the gas inlet 217 passes through the gas inlet 223 and passes through the diffusion pin 220. 225 is formed to pass.

The gas moved along the passage 225 is formed to be discharged to the outside of the body 210 through the injection hole 213. At this time, the diffusion pin 220 may be installed in all the injection holes 213 inside the body 210, respectively, it may be possible to be installed only in some of the injection holes (213).

At this time, in the shower head according to an embodiment of the present invention, the number of diffusion pins, the size of the confidence pin, the size of the gas inlet hole, the passage and the injection hole formed in the diffusion pin is the diffusion speed of the gas flowing into the shower head It may be selected in consideration of the like.

Shower head according to an embodiment of the present invention is formed so that the upper end supports the ceiling in the state in which the lower end of each of the diffusion pins are supported on the bottom surface, each of the plurality of diffusion pins support the inside of the shower head body and a separate spacer in the body Is not installed. Accordingly, the shower head according to an embodiment of the present invention does not interfere with the gas that the spacer diffuses inside the body.

On the other hand, according to an embodiment of the present invention, since there may be a gap between the diffusion pin and the injection hole in the upper portion of the bottom of the shower head body, the filler sheet formed with a through hole at the position where the injection hole is formed to seal such a gap ( 216 is placed on the bottom of the body and brazed under appropriate temperature and pressure to install the filler sheet on the bottom of the body.

5 is a cross-sectional view of the shower head according to the second embodiment of the present invention. In describing the shower head according to the second exemplary embodiment of the present invention with reference to FIG. 5, detailed descriptions of the same components as those of the first exemplary embodiment will be omitted, and descriptions will be given based on the configuration that is different from the first exemplary embodiment.

The shower head 300 according to the second embodiment of the present invention includes a body 310, a first intermediate plate 320, a second intermediate plate 340, a first diffusion pin 330, and a second diffusion pin 350. ) May be included.

The shower head 300 according to the second exemplary embodiment of the present invention has a rectangular parallelepiped shape similar to that described in the first exemplary embodiment, and a gas injection hole through which gas is injected into one side thereof is formed, and on the bottom 312. The first intermediate plate 320 and the second intermediate plate 340 are formed in the body 310 through which the plurality of injection holes 313 through which the gas injected into the inside is discharged is formed.

In addition, the shower head 300 according to the second embodiment includes a first diffusion pin 330 installed between the first intermediate plate 320 and the ceiling 314, the first intermediate plate 320 and the second intermediate plate. It is formed in a structure including a second diffusion pin 350 installed between the plate 340.

In more detail, as shown in FIG. 5, the first intermediate plate 320 and the second intermediate plate 340 are disposed side by side between the bottom 312 and the ceiling 314 of the body 310.

At this time, the first gas inlet 319 is formed on one side of the side of the body so that the first gas flows between the first intermediate plate 320 and the second intermediate plate 340, the second intermediate plate 340 The second gas injection hole 317 is formed at the other side of the body 310 to allow the second gas to flow between the ceiling and the ceiling 314.

In this case, the first gas and the second gas may be the same gas or may be different kinds of gases.

In the state where the second gas is introduced into the space between the second intermediate plate 340 and the ceiling 314, the injection hole 313 of the body 310 after being diffused and moved downward of the first intermediate plate 320. A first diffusion pin 330 is installed between the first intermediate plate 320 and the ceiling 314 to be discharged through.

The first diffusion pin 330 is connected to the plurality of first connection holes 323 formed at the lower end of the first intermediate plate 320, and protrudes upward to form the ceiling 314 of the body 310. It is formed to support).

A first gas inlet 333 is formed at an upper end of the first diffusion pin 330, and a first passage 335 is formed inside the first diffusion pin 330 connected to the first gas inlet 333. And a second gas introduced through the first gas inlet 333 may move to the lower space of the first intermediate plate 320 through the first connection hole 323 through the first passage 335. have.

As described above, the second gas moved to the lower space of the first intermediate plate 320 is diffused in the lower space of the body 310 and the lower space of the first intermediate plate 320, and thus the lower surface 312 of the body 310. It may be discharged to the outside of the body 310 through the injection hole (313).

Meanwhile, in order to move the first gas introduced between the first intermediate plate 320 and the second intermediate plate 340 to the lower side of the first intermediate plate 320, the first intermediate plate 320 and the second intermediate plate ( The second diffusion pin 350 is installed between the 340.

The second diffusion pin 350 has a lower end connected to the plurality of second connection holes 325 formed in the first intermediate plate 320, and protrudes upward, so that the upper end thereof has the second intermediate plate 340. It is formed to support the lower side of the.

At this time, the first diffusion pin 330 installed in the first intermediate plate 320 is formed to pass through the second intermediate plate 340.

A second gas inlet 353 is formed at an upper end of the second diffusion pin 350, and a second passage 355 is formed inside the second diffusion pin 350 connected to the second gas inlet 353. The first gas introduced through the second gas inlet hole 353 may move to the lower space of the first intermediate plate 320 through the second connection hole 325 through the second passage 355. have.

As described above, the first gas moved to the lower space of the first intermediate plate 320 is diffused in the lower space of the body 310 and the lower space of the first intermediate plate 320, and thus the lower surface 312 of the body 310. It may be discharged to the outside of the body 310 through the injection hole (313).

Accordingly, the first gas and the second gas supplied into the space between the first intermediate plate 320 and the bottom 312 of the body 310 may have the bottom 312 of the first intermediate plate 320 and the body 310. After being uniformly mixed in the space therebetween, it may be discharged out of the body through the injection hole (313).

In the second embodiment of the present invention, the distance between the first intermediate plate and the second intermediate plate formed inside the body, the distance between the first intermediate plate and the bottom surface, the distance between the second intermediate plate and the ceiling, etc. It may vary depending on the type of gas and the flow rate of the gas to be introduced.

The shower head 300 according to the second exemplary embodiment of the present invention may include a first diffusion pin 330 and a first intermediate plate 320 and a second intermediate plate 340 installed inside the body 310. Using a second diffusion pin 350, but the lower ends of the first diffusion pin 330 and the second diffusion pin 350 is coupled to the first intermediate plate 320, the first diffusion pin 330 and the second The upper end of the diffusion pin 350 is formed to support the ceiling 314 and the second intermediate plate 340, respectively, so that the first intermediate plate 320 and the second intermediate plate 340 are inside the body 310 without a spacer. Can be firmly supported. Accordingly, the shower head according to the second embodiment of the present invention is not disturbed by the diffusion of gas by the spacer.

On the other hand, the shower head 300 according to the second embodiment of the present invention, the upper side of the bottom 312, the upper side of the first intermediate plate 320 and the second intermediate plate 340, and the ceiling 314 The filler sheet 316 is installed on the surface facing the outside of the body as described in the first embodiment, so as to form a gap between the diffusion pin and the intermediate plate on which the diffusion pin is installed. It can be sealed.

6 is a cross-sectional view of the shower head assembly 400 according to the third embodiment of the present invention.

Referring to FIG. 6, in the description of the shower head assembly 400 according to the third embodiment of the present invention, detailed descriptions of the same components as those of the above-described embodiments will be omitted, and configurations different from those of the above-described embodiments will be omitted. The third embodiment will be described mainly.

The shower head assembly 400 according to the third embodiment of the present invention has a configuration in which two shower heads 300 according to the second embodiment are arranged in the vertical direction as shown in FIG. 6.

At this time, the shower head located on the upper side is defined as the upper shower head 401, and the shower head located on the lower side is defined and described as the lower shower head 402.

The shower head assembly 400 according to the third embodiment of the present invention uses the shower head having the same structure as the shower head 300 described in the second embodiment to connect the upper shower head 401 and the lower shower head 402. Can be configured.

At this time, the gas of the upper shower head 401 may be discharged to the injection hole 313 of the upper shower head 401 through the lower shower head 402 to be discharged to the lower side of the lower shower head 402. The injection hole 360 is installed in the hole 313 so as to extend downward.

In FIG. 6, only two spray tubes 360 are shown for the sake of simplicity, but a larger number of spray tubes may be installed in the upper shower head 401.

Meanwhile, according to the third exemplary embodiment of the present invention, the lower shower head 402 has a plurality of guide tubes 370 through which the injection tube 360 connected to the upper shower head 401 penetrates in the vertical direction. Installed through 310.

Accordingly, the gas from the upper shower head 401 and the gas from the lower shower head 402 may be injected below the lower shower head 402.

The gas injected after entering the upper shower head 401 and the gas injected after entering the lower shower head 402 may be the same, or may be different from each other. It may be set in various ways depending on the type and process.

7 is a cross-sectional view of the shower head 500 according to the fourth embodiment of the present invention.

Referring to FIG. 7, the shower head 500 according to the fourth embodiment of the present invention may include a body 510, a third intermediate plate 520, a fourth intermediate plate 540, a third diffusion pin 530, and the like. It may include a fourth diffusion pin 550.

The shower head 500 according to the fourth embodiment of the present invention has a rectangular parallelepiped shape similar to that described in the second embodiment, and a gas inlet for injecting gas into one side is formed, and the bottom surface 512 has an interior. A plurality of injection holes 513 through which the gas injected into the outlet are discharged are formed.

The third intermediate plate 520 and the fourth intermediate plate 540 are formed in the body 510, and the third diffusion pin 530 is installed between the third intermediate plate 520 and the bottom surface 512. And a fourth diffusion pin 550 disposed between the fourth intermediate plate 540 and the bottom surface 512.

In more detail, as shown in FIG. 7, a third middle plate 520 and a fourth middle plate 540 are disposed side by side between the bottom 512 and the ceiling 514 of the body 510.

In this case, a third gas inlet 517 is formed at one side of the side of the body to allow the third gas to flow between the third middle plate 520 and the ceiling 514, and the third middle plate 520 and the fourth side. A fourth gas inlet 519 is formed at the other side of the body 510 to allow the fourth gas to flow between the intermediate plates 540.

In this case, the third gas and the fourth gas may be the same gas or different kinds of gases.

In the state where the third gas is introduced into the space between the third intermediate plate 520 and the ceiling 514, the injection hole 513 of the body 510 is moved after being diffused downward of the fourth intermediate plate 540. A third diffusion pin 530 is installed between the third intermediate plate 520 and the bottom 512 of the body 510 so as to be discharged through the third intermediate plate 520.

The third diffusion pin 530 is connected to a plurality of third connection holes 523 having an upper end formed in the third intermediate plate 520, and protrudes downward, so that the lower end has a bottom surface of the body 510 ( 512 is formed to support.

Accordingly, the third diffusion pin 530 is configured such that the upper end supports the third intermediate plate 520 while the lower end is installed on the bottom 512 of the body 510.

In this case, a first gas discharge hole 533 is formed at a lower end of the third diffusion pin 530, and a third passage 535 is formed inside the third diffusion pin 530 connected to the third connection hole 523. ) Is formed. Accordingly, the third gas introduced through the third connection hole 523 passes through the third passage 535 and passes through the first gas discharge hole 533 to the lower side of the fourth intermediate plate 540 and the body 510. It may be moved to a space between the bottom surface 512 of the.

As such, the gas discharged into the space between the fourth intermediate plate 540 and the bottom surface 512 is diffused in the space and discharged to the outside of the body 510 through the injection hole 513 of the bottom surface 512 of the body 510. Can be.

Meanwhile, between the fourth intermediate plate 540 and the bottom surface 512 to move the fourth gas introduced between the third intermediate plate 520 and the fourth intermediate plate 540 to the lower side of the fourth intermediate plate 540. The fourth diffusion pin 550 is installed.

The fourth diffusion pin 550 is connected to the plurality of fourth connection holes 543 formed at the upper end of the fourth intermediate plate 540 and protrudes downward, and thus the lower end of the fourth diffusion pin 550 is formed on the bottom surface 512 of the body 510. It is formed to be connected to).

Accordingly, the fourth diffusion pin 550 is configured such that the upper end supports the fourth intermediate plate 540 while the lower end is installed on the bottom 512 of the body 510. At this time, the third diffusion pin 530 is formed to pass through the fourth intermediate plate 540.

Meanwhile, a second gas discharge hole 553 is formed at a lower end of the fourth diffusion pin 550, and a fourth passage 555 is formed inside the fourth diffusion pin 550 connected to the fourth connection hole 543. Is formed. Accordingly, the fourth gas introduced through the fourth connection hole 543 passes through the fourth passage 555 and passes through the second gas discharge hole 553 to the lower side of the fourth intermediate plate 540 and the body 510. It may be moved to a space between the bottom surface 512 of the.

As such, the gas discharged into the space between the fourth intermediate plate 540 and the bottom surface 512 may be diffused in the space and discharged to the outside of the body through the injection hole 513 of the bottom surface 512 of the body 510. .

Accordingly, the third gas and the fourth gas supplied into the space between the fourth intermediate plate 540 and the bottom surface 512 of the body 510 are spaces between the fourth intermediate plate 540 and the bottom surface of the body 510. After uniformly mixed in can be discharged to the outside through the injection hole 513.

The shower head 500 according to the fourth embodiment of the present invention may include a third diffusion pin 530 and a third intermediate plate 520 and a fourth intermediate plate 540 installed in the body 510. The fourth diffusion pin 550 is used, but upper ends of the third diffusion pin 530 and the fourth diffusion pin 550 are formed to support the third intermediate plate 520 and the fourth intermediate plate 540, respectively. The third intermediate plate 520 and the fourth intermediate plate 540 may be firmly supported within the body 510 without using the present invention. Accordingly, the shower head according to the fourth embodiment of the present invention is not disturbed by gas diffusion by the spacer.

On the other hand, the shower head according to the fourth embodiment of the present invention faces the outside of the body as a lower surface facing the bottom of the ceiling, the first intermediate plate and the second intermediate plate, and the side opposite to the bottom surface The filler sheet 516 may be provided on the surface to seal the gap between the diffusion pin and the intermediate plate on which the diffusion pin is installed.

At this time, when the filler sheet is to be installed on the ceiling surface, the lower side of the bottom surface, and the lower side surfaces of the first intermediate plate and the second intermediate plate, the filler sheet may be installed while the shower head according to the fourth embodiment is turned over.

8 is a cross-sectional view of the shower head assembly 600 according to the fifth embodiment of the present invention.

Referring to FIG. 8, in describing the shower head assembly 600 according to the fifth embodiment of the present invention, detailed descriptions of the same components as those of the above-described embodiments will be omitted, and configurations different from those of the above-described embodiments will be omitted. The fifth embodiment will be mainly described.

The shower head assembly 600 according to the fifth embodiment of the present invention is configured to arrange two shower heads 500 according to the fourth embodiment in the vertical direction as shown in FIG. 8.

At this time, an upper shower head is defined as the upper shower head 601 and a lower shower head is defined as the lower shower head 602.

The shower head assembly 600 according to the fifth embodiment of the present invention uses the shower head having the same structure as the shower head 500 described in the fourth embodiment to connect the upper shower head 601 and the lower shower head 602. Can be configured.

At this time, in the fifth embodiment, two shower heads 500 according to the fourth embodiment are arranged in the vertical direction, but the shower heads described in the first and second embodiments may be provided in this way.

At this time, the gas of the upper shower head 601 may be discharged to the lower portion of the lower shower head 602 through the lower shower head 602 through the gas discharged to the injection hole 513 of the upper shower head 601. The injection hole 513 is installed in the hole 513 to extend downward.

In FIG. 8, only two spray tubes 570 are shown for the sake of simplicity, but a larger number of spray tubes may be installed in the upper shower head 601.

Meanwhile, according to the fifth embodiment of the present invention, the lower shower head 602 has a plurality of guide tubes 580 through which the injection tube 570 connected to the upper shower head 601 may pass through the body (up and down). 510 is installed through.

Accordingly, the gas from the upper shower head 601 and the gas from the lower shower head 602 may be injected to the lower side of the lower shower head 602. The gas injected after entering the upper shower head 601 and the gas injected after entering the lower shower head 602 may be the same or different gases, which is a kind of gas used in manufacturing an electronic device. And can be set variously according to the process.

The shower head according to various embodiments of the present invention as described above supports the inside of the body by supporting the inside of the body by using a diffusion pin installed in the inside of the body constituting the shower head, or by supporting the intermediate plate. The diffusion of the gas can be made easier by omitting the configuration of the spacer.

Claims

A body having one surface through which a plurality of injection holes are formed and the other surface facing the one surface;

A plurality of diffusion pins protruding from the plurality of injection holes of the one surface to the other surface side to support the other surface, and having a gas inlet hole formed at one side thereof and having a passage connected to the gas inlet hole therein;

And a gas introduced between the other surface and the one surface is discharged to the outside of the body through the plurality of injection holes through the gas inlet and the passage.
A body having one surface through which a plurality of injection holes are formed and the other surface facing the one surface;

A first intermediate plate disposed between the one surface and the other surface and having a first connection hole formed therethrough;

A first diffusion pin protruding from the first connection hole of the first intermediate plate toward the other surface and having an end portion supporting the other surface, the first diffusion pin having a first passage connected to the first connection hole therein;

A first gas inlet hole is formed at one side of the first diffusion pin such that gas introduced between the other surface and the first intermediate plate passes through the first gas inlet hole and the first passageway between the one surface and the first intermediate plate. The shower head is diffused in and discharged out of the body through the injection hole.
The method of claim 2,

Further comprising a second intermediate plate disposed between the first intermediate plate and the other surface,

The first diffusion pin is formed to penetrate the second intermediate plate.
The method of claim 3, wherein

A second connecting hole formed through the first intermediate plate and

A second diffusion pin protruding from the second connection hole toward the second intermediate plate and having a second passage connected to the second intermediate plate at an end thereof and supporting the second intermediate plate;

A second gas inlet hole is formed at one side of the second diffusion pin, and the gas introduced between the first intermediate plate and the second intermediate plate passes through the second gas inlet hole and the second passage, and the one surface and the second passage. 1 Shower head is discharged to the outside of the body through the injection hole after being diffused between the intermediate plate.
The method of claim 4, wherein

The one surface is the bottom surface of the inner space of the body,

The other side is a shower head ceiling of the body interior space.
The method of claim 4, wherein

The first gas inlet is formed at the end of the first diffusion pin,

The second gas inlet hole is formed in the end of the second diffusion pin, the shower head.
The method of claim 5,

And a filler sheet to be brazed on the bottom surface, a surface facing the ceiling of the first and second intermediate plates, and an upper surface of the ceiling.
A shower head assembly comprising first and second shower heads in which two shower heads according to any one of claims 1 to 7 are disposed in a vertical direction.

The first shower head is provided with a spray tube extending in the downward direction in the injection hole formed in the body of the first shower head,

Shower head assembly is provided in the second shower head is a guide tube through which the injection tube penetrates in the vertical direction.
A body having one surface through which a plurality of injection holes are formed and the other surface facing the one surface;

A third intermediate plate disposed between the one surface and the other surface and having a third connection hole formed therethrough;

A third diffusion pin protruding from the third connection hole of the third intermediate plate toward the one surface side to support the one surface, and having a third diffusion pin having a third passage connected to the third connection hole therein;

A first gas discharge hole is formed at one side of the third diffusion pin so that gas introduced between the other surface and the third intermediate plate passes through the third passage and the first gas discharge hole to the outside of the body through the injection hole. Shower head discharged to.
The method of claim 9,

Further comprising a fourth intermediate plate disposed between the third intermediate plate and the one surface,

The third diffusion pin is a shower head formed to penetrate the fourth intermediate plate.
The method of claim 10,

A fourth connecting hole formed through the fourth intermediate plate and

A fourth diffusion pin protruding from the fourth connection hole toward the one surface side and having an end portion supporting the one surface and having a fourth passage connected to the fourth connection hole therein;

A second gas discharge hole is formed at one side of the fourth diffusion pin, and the gas introduced between the third intermediate plate and the fourth intermediate plate passes through the fourth passage and the fourth gas discharge hole, and the fourth intermediate plate. And after being diffused between the one surface and discharged to the outside of the body through the injection hole, the gas passing through the first gas discharge hole is also diffused between the fourth intermediate plate and the one surface and then through the injection hole. Shower head discharged to the outside of the body.
The method of claim 11,

The one surface is the bottom surface of the inner space of the body,

The other side is a shower head ceiling of the body interior space.
The method of claim 11,

The first gas discharge hole is formed at the end of the third diffusion pin,

The second gas outlet hole is formed in the end of the fourth diffusion pin, the shower head.
The method of claim 12,

And a filler sheet to be brazed on the ceiling and the bottom facing the bottom of the third and fourth intermediate plates and the bottom of the bottom.
A shower head assembly comprising third and fourth shower heads in which two shower heads according to any one of claims 9 to 14 are disposed in a vertical direction.

The third shower head is provided with a spray tube extending downward in the spray hole formed in the body of the third shower head,

The fourth shower head shower head assembly is provided with a guide tube through which the injection tube penetrates in the vertical direction.