WO2014193165A1 - Photosensitive resin composition for forming spacer, and spacer prepared therefrom - Google Patents

Photosensitive resin composition for forming spacer, and spacer prepared therefrom Download PDF

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Publication number
WO2014193165A1
WO2014193165A1 PCT/KR2014/004775 KR2014004775W WO2014193165A1 WO 2014193165 A1 WO2014193165 A1 WO 2014193165A1 KR 2014004775 W KR2014004775 W KR 2014004775W WO 2014193165 A1 WO2014193165 A1 WO 2014193165A1
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Prior art keywords
group
hydroxy
spacer
compound
formula
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PCT/KR2014/004775
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French (fr)
Korean (ko)
Inventor
최화섭
김재성
이노우에카츠하루
Original Assignee
동우화인켐 주식회사
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Priority claimed from KR1020130163890A external-priority patent/KR101638354B1/en
Application filed by 동우화인켐 주식회사 filed Critical 동우화인켐 주식회사
Priority to CN201480015018.7A priority Critical patent/CN105229533B/en
Publication of WO2014193165A1 publication Critical patent/WO2014193165A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable

Definitions

  • the present invention relates to a photosensitive resin composition for forming a spacer and a spacer manufactured therefrom, and more particularly, to a photosensitive resin composition for forming a spacer which can be applied to an image display device because of excellent elastic restoring force and less deformation in external pressure. It relates to a spacer produced from.
  • display devices have used silica beads or plastic beads having a constant diameter in order to maintain a constant distance between upper and lower substrates.
  • silica beads or plastic beads having a constant diameter in order to maintain a constant distance between upper and lower substrates.
  • the aperture ratio is lowered and light leakage occurs.
  • a spacer formed by photolithography is started to be used inside a display device.
  • spacers used in most display devices are formed by photolithography.
  • the method of forming a spacer by photolithography is to apply a photosensitive resin composition on a substrate, irradiate ultraviolet rays through a mask, and then form the spacer at a desired position on the substrate according to a pattern formed on the mask through a developing process.
  • Japanese Patent Laid-Open No. 1999-133600 discloses a photosensitive resin composition for forming a spacer comprising a copolymer resin having a carboxyl group and a glycidyl ether group as a binder resin. Although the composition of JP-A-1999-133600 secured some degree of heat-resistant dimensional stability and strength, it still did not satisfy satisfactory elastic recovery rate and strength.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 1999-133600
  • An object of the present invention is to provide a photosensitive resin composition for forming a spacer, the crosslinking density of which is dramatically increased when subjected to a heating step.
  • an object of this invention is to provide the photosensitive resin composition for spacer formation which has the rigid characteristic which has the outstanding elastic recovery rate and little deformation in external pressure.
  • an object of this invention is to provide the spacer formed by apply
  • an object of this invention is to provide the image display apparatus provided with the said spacer.
  • a photosensitive resin composition comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator, and a solvent, wherein the alkali-soluble resin is a compound having an (A-1) unsaturated bond and a carboxyl group, (A-2)
  • a photosensitive resin composition for forming a spacer which is a copolymer comprising a compound which is at least one of 2 and a compound of formula (A-3)
  • R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms
  • R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group
  • R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms
  • R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group
  • R 1 is hydrogen, alkyl having 1 to 10 carbon atoms or cycloalkyl having 3 to 10 carbon atoms, the alkyl and cycloalkyl may be independently of each other a hetero atom, R 2, and R 3 are independently of each other) Linear or branched alkylene having 1 to 20 carbon atoms, wherein R 1 , R 2, and R 3 may be independently substituted with a hydroxy group)
  • R 1 is hydrogen, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, hydroxymethyl group, 1- Hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy-isopropyl group, 2 In the group consisting of -hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group and 4-hydroxy-n-butyl group
  • the photosensitive resin composition for spacer formation which is any one selected.
  • the (A-3) compound is 2-hydroxyethyl acrylate glycidyl ether; 2-hydroxyethyl methacrylate glycidyl ether; 4-hydroxybutyl acrylate glycidyl ether; 4-hydroxybutyl methacrylate glycidyl ether; 6-hydroxyhexyl acrylate glycidyl ether; 6-hydroxyhexyl methacrylate glycidyl ether;
  • a spacer that is at least one selected from the group consisting of 2-propenoic acid, 2- (2-oxyranylethoxy) ethyl ether and 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether Photosensitive resin composition for formation.
  • the alkali-soluble resin is 5 to 80 mol% of the structural unit derived from the compound (A-1), 10 to 85 mol% of the structural unit derived from the compound (A-2) and (A-3
  • the photosensitive resin composition for spacer formation containing 10-85 mol% of structural units derived from the compound.
  • Spacer made of a photosensitive resin composition for spacer formation of any one of the above 1 to 5.
  • Image display device having a spacer of the above six.
  • the photosensitive resin composition for forming a spacer of the present invention includes at least two epoxy substituents having different reactivity
  • the alkali-soluble resin includes a highly reactive epoxy substituent, particularly an aliphatic epoxy group, under heating conditions during the spacer manufacturing process. As the ring-opening reaction proceeds, the spacer to be produced may have a significantly high crosslinking density and thus excellent mechanical properties.
  • the spacer made of the photosensitive resin composition for forming a spacer of the present invention has excellent elastic recovery rate, and has a hard property with little deformation in external pressure.
  • the present invention relates to a photosensitive resin composition
  • a photosensitive resin composition comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator and a solvent, wherein the alkali-soluble resin is a compound having a (A-1) unsaturated bond and a carboxyl group, (A-2)
  • the alkali-soluble resin is a compound having a (A-1) unsaturated bond and a carboxyl group, (A-2)
  • Alkali-soluble resins have reactivity to light or heat and alkali solubility, and serve as dispersion mediums for the respective components in the composition of the present invention.
  • Alkali-soluble resin of this invention contains an alicyclic epoxy group and an aliphatic epoxy group.
  • Alicyclic means a hydrocarbon having a ring other than an aromatic ring
  • aliphatic refers to a hydrocarbon having a linear structure including a straight or branched chain. Therefore, an alicyclic epoxy group means the structure which the epoxy group connected to the ring
  • an aliphatic epoxy group means the structure which the epoxy group connected to the linear carbon chain.
  • the ring-opening reaction proceeds under heating conditions during the spacer manufacturing process, thereby remarkably improving the crosslinking density of the photosensitive resin composition.
  • a compound having a (A-1) unsaturated bond and a carboxyl group (A-2) a compound of at least one of the formulas (1) to (2) and (A-3) It may be a copolymer copolymerized with the compound of formula (3).
  • R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms
  • R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group
  • R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms
  • R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group
  • R 1 is hydrogen, alkyl of 1 to 10 carbon atoms or cycloalkyl of 3 to 10 carbon atoms, and the alkyl and cycloalkyl may independently include a hetero atom,
  • R 2, and R 3 are each independently a linear or branched alkylene having 1 to 20 carbon atoms
  • R 1 , R 2 and R 3 may be further substituted with a hydroxyl group independently of each other
  • the hetero atom in Chemical Formula 3 is not particularly limited, and for example, at least one of nitrogen, oxygen, and sulfur may be exemplified.
  • the compound having an unsaturated bond and a carboxyl group is not limited as long as it is a carboxylic acid compound having an unsaturated double bond which can be polymerized. Specific examples thereof include two compounds in a molecule such as unsaturated monocarboxylic acid, unsaturated dicarboxylic acid or unsaturated tricarboxylic acid. The polyhydric carboxylic acid etc. which have the above carboxy group are mentioned.
  • Examples of the unsaturated monocarboxylic acid include acrylic acid, methacrylic acid and crotonic acid.
  • Examples of the unsaturated polyvalent carboxylic acid include maleic acid, fumaric acid, citraconic acid, mesaconic acid and itaconic acid.
  • the polyhydric carboxylic acid may be an acid anhydride
  • the unsaturated polycarboxylic dianhydride may be, for example, maleic anhydride, itaconic anhydride, citraconic anhydride, or the like.
  • the unsaturated polyhydric carboxylic acid may be a mono (2-methacryloyloxyalkyl) ester thereof, for example, monosuccinate mono (2-acryloyloxyethyl), monosuccinate mono (2-methacryloyloxy Ethyl), mono phthalate (2-acryloyloxyethyl), mono phthalate (2-methacryloyloxyethyl), and the like.
  • the unsaturated polyhydric carboxylic acid may be mono (meth) acrylate of the sock end dicarboxy polymer, and examples thereof include ⁇ -carboxypolycaprolactone monoacrylate and ⁇ -carboxypolycaprolactone monomethacrylate. have.
  • the said unsaturated polyhydric carboxylic acid may be unsaturated acrylate containing a hydroxyl group and a carboxyl group in the same molecule, For example, (alpha)-(hydroxymethyl) acrylic acid etc. are mentioned.
  • acrylic acid, methacrylic acid, maleic anhydride and the like are preferably used in view of high copolymerization reactivity.
  • the compounds having an unsaturated bond and a carboxyl group according to the present invention can be used alone or in combination of two or more.
  • the compound of at least one of the formulas (1) to (2) according to the present invention is a compound containing an epoxy group which increases the polymerizable unsaturated bond and the crosslinking density.
  • R 1 independently from each other, hydrogen; Alkyl groups such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group and tert-butyl group; Hydroxymethyl group, 1-hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy -Isopropyl group, 2-hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group, 4-hydroxy-n Or a hydroxy group-containing alkyl group such as -butyl group.
  • Alkyl groups such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group and tert-butyl group
  • R ⁇ 1> is hydrogen, a methyl group, a hydroxymethyl group, a 1-hydroxyethyl group, or 2-hydroxyethyl group independently from each other, and it is more preferable that it is especially a hydrogen or a methyl group.
  • R 2 a single bond independently of each other; Alkylene groups such as methylene group, ethylene group and propylene group; Hetero atom-containing alkylene groups such as oxymethylene group, oxyethylene group, oxypropylene group, thiomethylene group, thioethylene group, thiopropylene group, aminomethylene group, aminoethylene group and aminopropylene group.
  • R 2 is preferably a single bond, a methylene group, an ethylene group, an oxymethylene group or an oxyethylene group, and more preferably a single bond or an oxyethylene group.
  • the case where R 2 is a single bond means a case where carbon at the 8 or 9 position of the tricyclodecaneyl group and oxygen of the acrylate group are directly connected.
  • More specific examples of the compound represented by Formula 2 include the following Formulas 2-1 to 2-15.
  • the compound of formula 3 is a compound containing an aliphatic epoxy group.
  • the aliphatic epoxy group has high reactivity, and thus the ring-opening reaction proceeds during the manufacturing process of the spacer using the photosensitive resin composition of the present invention to increase the crosslinking density, thereby enhancing mechanical properties such as strength of the spacer.
  • the compound of formula 3 includes an ether bond in the linking structure between the acrylate group and the epoxy group.
  • spacers made from the compositions of the present invention can have excellent cumulative mechanical properties (cumulative recovery) among the mechanical properties. Cumulative recovery rate refers to the ability to return to the original state even after repeated deformations. In the present invention, but was carried out by taking the repetition number of times as an example, but is not limited thereto.
  • R 1 independently from each other, hydrogen; Alkyl groups such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group and tert-butyl group; Hydroxymethyl group, 1-hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy -Isopropyl group, 2-hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group, 4-hydroxy-n Or a hydroxy group-containing alkyl group such as -butyl group.
  • R ⁇ 1> is hydrogen, a methyl group, an ethyl group, a hydroxymethyl group, a 1-hydroxyethyl group, or 2-hydroxyethy
  • the group of methylene independently of each other, an ethylene group, a propylene group, a butylene group, a tetramethylene group, ethyl ethylene, pentamethylene group than R 2 and R 3 It may be an alkylene group. Especially, it is preferable that R ⁇ 2> and R ⁇ 3> is a methylene group, ethylene group, or butylene group.
  • the compound of Formula 3 include 2-hydroxyethyl acrylate glycidyl ether, 2-hydroxyethyl methacrylate glycidyl ether, 4-hydroxybutyl acrylate glycidyl ether, 4 Unsaturated carboxylic ester compounds containing glycidyl groups such as -hydroxybutyl methacrylate glycidyl ether, 6-hydroxyhexyl acrylate glycidyl ether, 6-hydroxyhexyl methacrylate glycidyl ether; Unsaturated carboxylic acid esters containing oxiranyl groups, such as 2-propenoic acid, 2- (2-oxyranylethoxy) ethyl ether, 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether
  • a compound etc. can be mentioned, They can be used individually or in combination of 2 types or more, respectively.
  • the copolymers of (A-1), (A-2) and (A-3) include (A-1), (A-2) and (A).
  • a compound having an unsaturated bond polymerizable with (A-1), (A-2) and (A-3) can be copolymerized together.
  • Specific examples of the compound having an unsaturated bond polymerizable with the above (A-1), (A-2) and (A-3) include 2-aminoethyl acrylate, 2-aminoethyl methacrylate and 2-dimethylaminoethyl Acrylate, 2-dimethylaminoethyl methacrylate, 2-aminopropyl acrylate, 2-aminopropyl methacrylate, 2-dimethylaminopropyl acrylate, 2-dimethylaminopropyl methacrylate, 3-aminopropyl acrylate
  • Unsaturated carboxylic acid aminoalkyl esters such as 3-aminopropyl methacrylate, 3-dimethylaminopropyl acrylate and 3-dimethylaminopropyl methacrylate
  • Carboxylic acid vinyl esters such as vinyl acetate, vinyl propionate, vinyl butyrate and vinyl benzoate
  • Unsaturated ethers such as vinyl methyl
  • Unsaturated imides such as N-cyclohexylmaleimide; Aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene; And monoacryloyl or monomethacryloyl groups at the terminal of the polymer molecular chain of polystyrene, polymethylacrylate, polymethylmethacrylate, poly-n-butylacrylate, poly-n-butylmethacrylate, polysiloxane.
  • the macromonomer which has, etc. are mentioned.
  • Copolymer ((A-1), (A-2) and (A) obtained by alkali-soluble resin (A) according to the present invention copolymerizing the above (A-1), (A-2) and (A-3) -3) is included in the present invention even when a monomer other than -3) is included in the copolymer), and in the copolymer, a component derived from each of (A-1), (A-2) and (A-3) It is preferable that a ratio exists in the following ranges by a mole fraction with respect to the total number of moles of the structural unit which comprises said copolymer.
  • the ratio of the said structural unit is the following ranges.
  • alkali-soluble resin (A) for example, with reference to the method described in the document "Experimental method of polymer synthesis” (first edition March 1, 1972, first edition of Otsu Takayuki Kogyo Co., Ltd.) It can manufacture.
  • oxygen is absent by placing a predetermined amount, a polymerization initiator and a solvent of units (A-1), (A-2) and (A-3) constituting the copolymer in a reaction vessel and replacing oxygen with nitrogen.
  • the polymer is obtained by stirring, heating, and keeping warm under the following.
  • the obtained copolymer may use the solution after reaction as it is, the solution which concentrated or diluted may be used, and the thing extracted as solid (powder) by methods, such as reprecipitation, may be used.
  • alkali-soluble resin has an acid value of 20-200 (KOHmg / g).
  • the acid value is in the above range, the spacer having excellent aging stability and elastic recovery rate can be produced.
  • the weight average molecular weight of polystyrene conversion of alkali-soluble resin is 3,000-100,000, Preferably it is 5,000-50,000.
  • the weight average molecular weight of alkali-soluble resin exists in the said range, since film reduction is prevented at the time of image development, the omission property of a pattern part becomes favorable, and it is preferable.
  • the molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] of alkali-soluble resin it is more preferable that it is 1.8-4.0.
  • the said molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] is contained in the said range, since developability becomes excellent, it is preferable.
  • the content of the alkali-soluble resin is in the range of 5 to 90% by weight, preferably 10 to 70% by weight based on the total solids in the photosensitive resin composition for spacer formation.
  • the solubility in the developing solution is sufficient, so that the developability is excellent, and the preparation of the spacer having a hard property having excellent elastic recovery rate and low deformation at external pressure It becomes possible.
  • the photopolymerizable compound contained in the photosensitive resin composition for spacer formation of this invention is a compound which can superpose
  • the photopolymerizable compound used in the present invention may be used by mixing two or more photopolymerizable compounds having different structure or number of functional groups in order to improve the developability, sensitivity, adhesion, surface problem, etc. of the resin composition for spacer formation. It does not limit its scope.
  • Specific examples of the monofunctional monomers include nonylphenylcarbitol acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-ethylhexylcarbitol acrylate, 2-hydroxyethyl acrylate and N-vinylpyrroli Money, etc.
  • bifunctional monomer examples include 1,6-hexanediol di (meth) acrylate, ethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, Bis (acryloyloxyethyl) ether of bisphenol A, 3-methylpentanediol di (meth) acrylate, etc. are mentioned.
  • polyfunctional monomers include trimethylolpropane tri (meth) acrylate, ethoxylated trimethylolpropane tri (meth) acrylate, propoxylated trimethylolpropane tri (meth) acrylate, and pentaerythritol tree.
  • the photopolymerizable compound is used in the range of 1 to 90 parts by weight, preferably 10 to 80 parts by weight based on 100 parts by weight of the total amount of the alkali-soluble resin and the photopolymerizable compound based on the solids in the photosensitive for spacer formation.
  • the photopolymerizable compound is preferable because the strength and smoothness of the spacer pattern become good in the above content range.
  • the photopolymerization initiator may be applied without limitation to those generally used in the art.
  • one or more compounds selected from the group consisting of triazine compounds, acetophenone compounds, biimidazole compounds, and oxime compounds can be used.
  • the photosensitive resin composition containing the said photoinitiator is high sensitivity, and the intensity
  • triazine type compound it is 2, 4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1, 3, 5- triazine, 2, 4-bis (trichloromethyl)-, for example. 6- (4-methoxynaphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2,4- Bis (trichloromethyl) -6- (4-methoxystyryl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (5-methylfuran-2 -Yl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (furan-2-yl) ethenyl] -1,3,5-tri Azine, 2,4-bis (trichloromethyl) -6- [2- (4-diethyla
  • acetophenone type compound for example, diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyl dimethyl ketal, 2-hydroxy-1- [4- (2 -Hydroxyethoxy) phenyl] -2-methylpropane-1-one, 1-hydroxycyclohexylphenyl ketone, 2-methyl-1- (4-methylthiophenyl) -2-morpholinopropane-1- On, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) butan-1-one, 2-hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl] propane And oligomers of -1-ones.
  • R 1 to R 4 are independently of each other a hydrogen atom, a halogen atom, a hydroxyl group, a phenyl group which may be substituted by an alkyl group having 1 to 12 carbon atoms, a benzyl group which may be substituted by an alkyl group having 1 to 12 carbon atoms, Or a naphthyl group which may be substituted by an alkyl group having 1 to 12 carbon atoms.
  • Specific examples of the compound represented by Formula 4 include 2-methyl-2-amino (4-morpholinophenyl) ethan-1-one, 2-ethyl-2-amino (4-morpholinophenyl) ethane-1 -One, 2-propyl-2-amino (4-morpholinophenyl) ethan-1-one, 2-butyl-2-amino (4-morpholinophenyl) ethan-1-one, 2-methyl-2 -Amino (4-morpholinophenyl) propane-1-one, 2-methyl-2-amino (4-morpholinophenyl) butan-1-one, 2-ethyl-2-amino (4-morpholino Phenyl) propane-1-one, 2-ethyl-2-amino (4-morpholinophenyl) butan-1-one, 2-methyl-2-methylamino (4-morpholinophenyl) propan-1-one , 2-methyl-2-dimethylamino (4-morpholinophenyl) propan-1-one,
  • biimidazole compound 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'- tetraphenyl biimidazole, 2,2'-bis (2,3-, for example) Dichlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2-chlorophenyl) -4,4', 5,5'-tetra (alkoxyphenyl) biimi Dazole, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetra (trialkoxyphenyl) biimidazole, and a phenyl group at the 4,4', 5,5 'position is carbo The imidazole compound substituted with the alkoxy group etc.
  • 2,2'bis (2-chlorophenyl) -4,4 ', 5,5'-tetra phenylbiimidazole, 2,2'-bis (2,3-dichlorophenyl) -4,4', 5,5'-tetraphenylbiimidazole is preferably used.
  • Examples of the oxime compound include 0-ethoxycarbonyl- ⁇ -oxyimino-1-phenylpropan-1-one and the following formulas (5), (6) and (7).
  • the other photoinitiator etc. which are normally used in this field can also be used together.
  • a benzoin compound, a benzophenone type compound, a thioxanthone type compound, an anthracene type compound etc. are mentioned, for example. These can be used individually or in combination of 2 or more types, respectively.
  • benzoin type compound benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, etc. are mentioned, for example.
  • benzophenone type compound for example, benzophenone, methyl 0- benzoyl benzoate, 4-phenyl benzophenone, 4-benzoyl-4'- methyl diphenyl sulfide, 3, 3 ', 4, 4'- tetra ( tert-butylperoxycarbonyl) benzophenone, 2,4,6-trimethylbenzophenone, etc. are mentioned.
  • thioxanthone type compound 2-isopropyl thioxanthone, 2, 4- diethyl thioxanthone, 2, 4- dichloro thioxanthone, 1-chloro-4- propoxy thioxanthone, etc. are mentioned, for example. Can be mentioned.
  • anthracene-based compound examples include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene, and the like. Can be mentioned.
  • a photoinitiation adjuvant is used together with the said photoinitiator, since the photosensitive resin composition containing these becomes more sensitive and can improve productivity at the time of spacer formation, it is preferable.
  • an amine compound and a carboxylic acid compound are preferably used.
  • amine compound in the photopolymerization start adjuvant examples include aliphatic amine compounds such as triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, and 4-dimethylaminobenzoic acid isoamyl.
  • Aromatic amine compounds such as -bis (diethylamino) benzophenone, are mentioned. Among them, an aromatic amine compound is preferably used as the amine compound.
  • carboxylic acid compound in the photopolymerization start adjuvant examples include phenylthioacetic acid, methylphenylthioacetic acid, ethylphenylthioacetic acid, methylethylphenylthioacetic acid, dimethylphenylthioacetic acid, methoxyphenylthioacetic acid, dimethoxyphenylthioacetic acid and chlorophenyl And aromatic heteroacetic acids such as thioacetic acid, dichlorophenylthioacetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine and naphthoxyacetic acid.
  • the content of the photopolymerization initiator is 0.1 to 40 parts by weight, preferably 1 to 30 parts by weight based on 100 parts by weight of the total amount of the alkali-soluble resin and the photopolymerizable compound, and the content of the photopolymerization initiator is 0.1 to 50 parts by weight based on the above criteria. Parts, preferably 1 to 40 parts by weight.
  • the photosensitive resin composition When the content of the photopolymerization initiator is in the above range, the photosensitive resin composition is highly sensitive, and thus the strength and smoothness of the spacer formed by using the composition are good, which is preferable. In addition, when the content of the photopolymerization initiation aid is in the above range, the sensitivity of the photosensitive resin composition is higher and the productivity of the spacer pattern formed by using the composition is preferable.
  • the solvent can be used without any limitation as long as it is conventionally used in the art.
  • the solvent include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether; Diethylene glycol dialkyl ethers such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol dipropyl ether and diethylene glycol dibutyl ether; Ethylene glycol alkyl ether acetates such as methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, and ethylene glycol monoethyl ether acetate; Alkylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl
  • the solvents include esters such as alkylene glycol alkyl ether acetates, ketones, butanediol alkyl ether acetates, butanediol monoalkyl ethers, ethyl 3-ethoxypropionate and methyl 3-methoxypropionate in consideration of coating properties and drying properties. May be preferably used, more preferably propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, methoxybutyl acetate, methoxybutanol, ethyl 3-ethoxypropionate, 3-methoxypropionic acid Methyl and the like can be used.
  • esters such as alkylene glycol alkyl ether acetates, ketones, butanediol alkyl ether acetates, butanediol monoalkyl ethers, ethyl 3-ethoxypropionate and
  • the content of the solvent is 60 to 90% by weight, preferably 70 to 85% by weight relative to the total weight with respect to the photosensitive resin composition including the same.
  • a coating device such as a spin coater, a slit & spin coater, a slit coater (sometimes referred to as a die coater or a curtain flow coater), or an inkjet.
  • the photosensitive resin composition according to the present invention may further include additives such as fillers, other polymer compounds, curing agents, leveling agents, adhesion promoters, antioxidants, ultraviolet absorbers, anti-agglomerating agents, and chain transfer agents, as necessary.
  • additives such as fillers, other polymer compounds, curing agents, leveling agents, adhesion promoters, antioxidants, ultraviolet absorbers, anti-agglomerating agents, and chain transfer agents, as necessary.
  • the filler examples include glass, silica, alumina and the like.
  • the other high molecular compound include curable resins such as epoxy resins and maleimide resins; And thermoplastic resins such as polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, polyfluoroalkyl acrylate, polyester, and polyurethane.
  • curable resins such as epoxy resins and maleimide resins
  • thermoplastic resins such as polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, polyfluoroalkyl acrylate, polyester, and polyurethane.
  • the curing agent is used to increase the core hardening and mechanical strength, and specific examples of the curing agent include epoxy compounds, polyfunctional isocyanate compounds, melamine compounds, oxetane compounds and the like.
  • the epoxy compound in the curing agent include bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol F epoxy resin, noblock type epoxy resin, other aromatic epoxy resin, alicyclic epoxy resin, Aliphatic, cycloaliphatic or aromatic epoxy compounds other than glycidyl ester resins, glycidylamine resins, or brominated derivatives of these epoxy resins, epoxy resins and their brominated derivatives, butadiene (co) polymer epoxides, isoprene ) Polymer epoxide, glycidyl (meth) acrylate (co) polymer, triglycidyl isocyanurate, etc. are mentioned.
  • oxetane compound in the curing agent examples include carbonate bis oxetane, xylene bis oxetane, adipate bis oxetane, terephthalate bis oxetane, cyclohexane dicarboxylic acid bis oxetane and the like.
  • curing agent can use together the hardening auxiliary compound which can make ring-opening-polymerize the epoxy group of an epoxy compound, and the oxetane skeleton of an oxetane compound with a hardening
  • said hardening auxiliary compound polyhydric carboxylic acid, polyhydric carboxylic anhydride, an acid generator, etc. are mentioned, for example.
  • curing agent As said carboxylic anhydride, what is marketed can be used as an epoxy resin hardening
  • curing agent a brand name (Adekahadona EH-700) (made by Adeka Industrial Co., Ltd.), a brand name (Rikaditdo HH) (made by Nippon Ewha Co., Ltd.), a brand name (MH-700) ( New Nippon Ewha Co., Ltd.) etc. are mentioned.
  • the hardeners illustrated above can be used individually or in mixture of 2 or more types.
  • surfactants such as a silicone type, a fluorine type, ester type, a cation type, an anion type, a nonionic type, an amphoteric, etc., are mentioned, These are each independently, either You may use in combination of 2 or more type.
  • polyoxyethylene alkyl ether for example, polyoxyethylene alkyl ether, polyoxyethylene alkyl phenyl ether, polyethylene glycol diester, sorbitan fatty acid ester, fatty acid modified polyester, tertiary amine modified polyurethane
  • KP manufactured by Shin-Etsu Chemical Co., Ltd.
  • polyflow manufactured by Kyoi Chemical Co., Ltd.
  • F-Top manufactured by Tochem Products Co., Ltd.
  • MegaPac Disinippon Ink Chemical Co., Ltd.
  • Florade manufactured by Sumitomo 3M Co., Ltd.
  • Asahigard Saffron (above, Asahigarasu Co., Ltd.
  • Soapaspa Geneka Co., Ltd.
  • EFKA EFKA CHEMICALS Co. Manufacture
  • PB821 made by Ajinomoto Co.
  • a silane type compound is preferable, Specifically, a vinyl trimethoxysilane, a vinyl triethoxysilane, a vinyl tris (2-methoxyethoxy) silane, N- (2-aminoethyl)- 3-aminopropylmethyldimethoxysilane, N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-gly Cidoxypropylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloyloxy Propyl trimethoxysilane, 3-mercaptopropyl trimeth
  • antioxidants include 2-tert-butyl-6- (3-tert-butyl-2-hydroxy-5-methylbenzyl) -4-methylphenylacrylate, 2- [1- (2-hydroxy -3,5-di-tert-pentylphenyl) ethyl] -4,6-di-tert-pentylphenylacrylate, 6- [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) prop Foxy] -2,4,8,10-tetra-tert-butyldibenz [d, f] [1,3,2] dioxaphosphine, 3,9-bis [2- ⁇ 3- (3-tert -Butyl-4-hydroxy-5-methylphenyl) propionyloxy ⁇ -1,1-dimethylethyl] -2,4,8,10-tetraoxaspiro [5.5] undecane, 2,2'-methylenebis ( 6-tert-butyl-4-methylphenol), 4,4
  • ultraviolet absorber examples include 2- (3-tert-butyl-2-hydroxy-5-methylphenyl) -5-chlorobenzotriazole, alkoxybenzophenone and the like.
  • sodium polyacrylate etc. are mentioned specifically ,.
  • chain transfer agent examples include dodecyl mercaptan, 2,4-diphenyl-4-methyl-1-pentene, and the like.
  • the present invention provides a spacer formed by forming the above-described photosensitive resin composition in a predetermined pattern and then exposing and developing the same, and an image display device having the same.
  • the spacer for an image display apparatus can be manufactured by apply
  • a photosensitive resin composition is apply
  • a coating method it can carry out by a spin coat, cast coating method, the roll coating method, the slit and spin coat, the slit coat method, etc., for example.
  • Heating after drying or drying under reduced pressure to volatilize volatile components such as a solvent.
  • heating temperature is 70-200 degreeC normally, Preferably it is 80-130 degreeC.
  • the coating film thickness after heat drying is about 1-8 micrometers normally.
  • the coating film thus obtained is irradiated with ultraviolet rays through a mask for forming a target pattern.
  • apparatuses such as a mask aligner and a stepper, so that the parallel light beam may be irradiated uniformly to the whole exposure part, and the exact alignment of a mask and a board
  • ultraviolet light is irradiated, the site to which ultraviolet light is irradiated is hardened.
  • G-rays (wavelength: 436 nm), h-rays, i-rays (wavelength: 365 nm) and the like can be used as the ultraviolet rays.
  • the irradiation dose of ultraviolet rays may be appropriately selected as necessary, and the present invention is not limited thereto.
  • the spacer which has a target pattern shape can be obtained.
  • the developing method may be any of a liquid addition method, a dipping method, a spray method and the like.
  • the substrate may be tilted at an arbitrary angle.
  • the developer is usually an aqueous solution containing an alkaline compound and a surfactant.
  • the alkaline compound may be either an inorganic or organic alkaline compound.
  • the inorganic alkaline compound include sodium hydroxide, potassium hydroxide, sodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium silicate, potassium silicate, sodium carbonate, potassium carbonate And sodium hydrogen carbonate, potassium hydrogen carbonate, sodium borate, potassium borate, ammonia and the like.
  • organic alkaline compound examples include tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, Monoisopropylamine, diisopropylamine, ethanolamine and the like.
  • concentration of the alkaline compound in the alkaline developer is preferably 0.01 to 10% by mass, more preferably 0.03 to 5% by mass.
  • the surfactant in the alkaline developer may be at least one selected from the group consisting of nonionic surfactants, anionic surfactants or cationic surfactants.
  • nonionic surfactant examples include polyoxyethylene alkyl ether, polyoxyethylene aryl ether, polyoxyethylene alkyl aryl ether, other polyoxyethylene derivatives, oxyethylene / oxypropylene block copolymers, sorbitan fatty acid esters, Polyoxyethylene sorbitan fatty acid ester, polyoxyethylene sorbitol fatty acid ester, glycerin fatty acid ester, polyoxyethylene fatty acid ester, polyoxyethylene alkylamine and the like.
  • anionic surfactants include higher alcohol sulfate ester salts such as sodium lauryl alcohol sulfate and sodium oleyl alcohol sulfate, alkyl sulfates such as sodium lauryl sulfate and ammonium lauryl sulfate, sodium dodecylbenzene sulfonate, Alkyl aryl sulfonates, such as sodium dodecyl naphthalene sulfonate, etc. are mentioned.
  • cationic surfactant examples include amine salts such as stearylamine hydrochloride and lauryl trimethylammonium chloride, or quaternary ammonium salts.
  • surfactant can be used individually or in combination of 2 or more types, respectively.
  • the concentration of the surfactant in the developer is usually 0.01 to 10% by mass, preferably 0.05 to 8% by mass, more preferably 0.1 to 5% by mass.
  • the epoxide ring-opening reaction of the resin (A-1) may be performed in a heating environment during the spacer forming process, for example, may be performed in a postbaking process.
  • a pattern can be formed on a board
  • the spacer having the pattern thus obtained may be usefully used for an image display device such as a liquid crystal display device.
  • the spacer having an elastic recovery rate similar to that of a conventional spacer, but having a high crosslinking density has excellent mechanical properties. Hardness with little deformation in pressure.
  • a flask equipped with a stirrer, a thermometer reflux condenser, a dropping lot, and a nitrogen introduction tube was prepared, and as a monomer dropping lot, 3,4-epoxytricyclodecane-8-yl (meth) acrylate (Formula 1) and 20 parts by weight of a mixture of 3,4-epoxytricyclodecane-9-yl (meth) acrylate (Formula 2) (50:50 molar ratio), 20 parts by weight of 4-hydroxybutyl acrylate glycidyl ether, methylmetha 50 parts by weight of acrylate, 40 parts by weight of acrylic acid, 70 parts by weight of vinyltoluene, 4 parts by weight of t-butylperoxy-2-ethylhexanoate, 40 parts by weight of propylene glycol monomethyl ether acetate (PGMEA), and then stirred and mixed Prepared and prepared by stirring and mixing 6 parts by weight of n-dodecanethiol and 24
  • a flask equipped with a stirrer, a thermometer reflux condenser, a dropping lot, and a nitrogen introduction tube was prepared, and as a monomer dropping lot, 3,4-epoxycyclodecane-8-yl (meth) acrylate and 3,4- 30 parts by weight of a mixture of epoxytricyclodecane-9-yl (meth) acrylate (50:50 molar ratio), 30 parts by weight of 4-hydroxybutyl acrylate glycidyl ether, 50 parts by weight of methyl methacrylate, acrylic acid 40 Part by weight, 50 parts by weight of benzyl maleimide, 4 parts by weight of t-butylperoxy-2-ethylhexanoate, 40 parts by weight of propylene glycol monomethyl ether acetate, and prepared by stirring and mixing, n as a chain transfer agent dropping tank, -6 parts by weight of dodecanethiol and 24 parts by weight of PGMEA were added to prepare a mixture of stirring
  • the solid acid value was the same as in Synthesis Example 1, except that 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether was added instead of 4-hydroxybutyl acrylate glycidyl ether.
  • Resin (Ac) which was 72 mgKOH / g was obtained.
  • the weight average molecular weight of polystyrene conversion measured by GPC was 16,700, and molecular weight distribution (Mw / Mn) was 2.2.
  • a resin having a solid acid value of 73 mgKOH / g was prepared in the same manner as in Synthesis Example 1 except that 6-hydroxyhexyl acrylate glycidyl ether was added instead of 4-hydroxybutyl acrylate glycidyl ether. Ad) was obtained.
  • the weight average molecular weight of polystyrene conversion measured by GPC was 16,500, and molecular weight distribution (Mw / Mn) was 2.2.
  • the solid acid value was 74 mgKOH / in the same manner as in Synthesis Example 1, except that 3,4-epoxycyclohexyl (meth) acrylate was added instead of 4-hydroxybutyl acrylate glycidyl ether.
  • Resin (Ai) which is g was obtained.
  • the weight average molecular weight of polystyrene conversion measured by GPC was 17,800, and molecular weight distribution (Mw / Mn) was 2.3.
  • HLC-8120GPC manufactured by Tosoh Corporation
  • the ratio of the weight average molecular weight and number average molecular weight obtained above was made into molecular weight distribution (Mw / Mn).
  • the photosensitive resin composition for spacer formation was produced with the component and composition of following Table 1 (unit is a weight part).
  • a glass substrate (Eagle 2000; manufactured by Corning Corporation) having a length and width of 2 inches was washed sequentially with a neutral detergent, water, and alcohol, and dried.
  • the photosensitive resin compositions prepared in Examples and Comparative Examples were spin coated on the glass substrate, respectively, and then prebaked at 90 ° C. for 3 minutes in a clean oven. After cooling the prebaked substrate to room temperature, the distance from the quartz glass photomask was 150 ⁇ m, and light was emitted at an exposure amount (405 nm standard) of 60 mJ / cm 2 using an exposure machine (TME-150RSK; manufactured by Topcon Co., Ltd.). Investigate.
  • the irradiation to the polymerizable resin composition at this time passed the light emitted from the ultra-high pressure mercury lamp through an optical filter (LU0400; manufactured by Asahi Spectro Co., Ltd.), and cut and used light of 400 nm or less. In this case, a photomask in which the next pattern was formed on the same plane was used.
  • an optical filter L0400; manufactured by Asahi Spectro Co., Ltd.
  • One side has a square light-transmitting part (pattern) which is 10 micrometers, and the said space
  • the coating film was immersed in an aqueous developer containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide for 100 seconds at 25 ° C for development. After washing with water, postbaking was carried out at 220 ° C for 20 minutes in an oven. The obtained film thickness was 3 micrometers. The film thickness was measured using a film thickness measuring device (DEKTAK 6M; manufactured by Veeco). The physical properties were evaluated for the pattern thus obtained as follows, and the results are shown in Table 2 below.
  • CD-bias is better as it is closer to 0, and (+) means that the pattern is larger in size than the mask and (-) is smaller in size than the mask.
  • CD-bias (Formed Pattern Size)-(Mask Size used during formation)
  • the line width of the pattern formed by Mask 14 micrometers was measured for the cured film obtained above using the scanning electron microscope (S-4600; the Hitachi company make), and the cross-sectional shape was evaluated as follows.
  • the cross-sectional shape was judged as a forward taper when the angle of the pattern with respect to the board
  • a forward taper is preferable because disconnection of the ITO wiring hardly occurs at the time of forming the display device.
  • the cured film obtained above was measured using a dynamic ultra-fine hardness tester (HM-2000; Helmut Fischer GmbH + Co.KG) to measure the total amount of displacement ( ⁇ m) and the amount of elastic displacement ( ⁇ m) according to the following measurement conditions.
  • the recovery rate was calculated as follows. It was judged that the total recovery was hard and the recovery rate was large.
  • a dynamic ultra-micro hardness tester (HM-2000; Helmut Fischer GmbH + Co.KG) was applied to the same pattern 10 times under the following conditions, and the load was applied. Measurement is performed using a three-dimensional shape measuring device (SIS-2000 system; manufactured by SNU Precision).
  • Development adhesiveness is the size of the mask with 100% of the pattern formed with the thickness of 3 ⁇ m by the photomask with 1000 circular patterns with the diameter of 1 ⁇ m interval from 5 ⁇ m to 20 ⁇ m. Evaluated. The smaller the size of the mask, the better the sensitivity.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Epoxy Resins (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

The present invention relates to a photosensitive resin composition for forming a spacer, and more specifically, to a photosensitive resin composition comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator and a solvent, wherein the alkali-soluble resin comprises an alicyclic epoxy group and an aliphatic epoxy group, thereby allowing a spacer to be prepared having an excellent elastic recovery rate and having a hardness enabling little deformation from external pressure.

Description

스페이서 형성용 감광성 수지 조성물 및 이로부터 제조되는 스페이서Photosensitive resin composition for forming spacer and spacer prepared therefrom
본 발명은 스페이서 형성용 감광성 수지 조성물 및 이로부터 제조되는 스페이서에 관한 것이며, 보다 상세하게는 우수한 탄성복원력을 가지면서도 외부 압력에 변형이 적어 화상 표시 장치에 적용될 수 있는 스페이서 형성용 감광성 수지 조성물 및 이로부터 제조되는 스페이서에 관한 것이다.The present invention relates to a photosensitive resin composition for forming a spacer and a spacer manufactured therefrom, and more particularly, to a photosensitive resin composition for forming a spacer which can be applied to an image display device because of excellent elastic restoring force and less deformation in external pressure. It relates to a spacer produced from.
일반적인 표시 장치는 상하 기판의 일정 간격을 유지하기 위하여 일정한 직경을 갖는 실리카 비드 또는 플라스틱 비드 등을 사용해 왔다. 그러나 그러한 비드들이 기판 상에 무작위적으로 분산되어 픽셀 내부에 위치하게 되는 경우, 개구율이 저하되고 빛샘 현상이 발생하는 문제가 있다. 이러한 문제점들을 해결하기 위하여 표시 장치의 내부에 포토리소그래피에 의하여 형성된 스페이서를 사용하기 시작하였으며, 현재 대부분의 표시 장치에 사용되는 스페이서는 포토리소그래피에 의해 형성되고 있다.In general, display devices have used silica beads or plastic beads having a constant diameter in order to maintain a constant distance between upper and lower substrates. However, when such beads are randomly dispersed on the substrate and positioned inside the pixel, the aperture ratio is lowered and light leakage occurs. In order to solve these problems, a spacer formed by photolithography is started to be used inside a display device. Currently, spacers used in most display devices are formed by photolithography.
포토리소그래피에 의한 스페이서의 형성 방법은 기판 위에 감광성 수지 조성물을 도포하고, 마스크를 통하여 자외선을 조사한 뒤, 현상 과정을 통하여 마스크에 형성된 패턴대로 기판상의 원하는 위치에 스페이서를 형성하는 것이다.The method of forming a spacer by photolithography is to apply a photosensitive resin composition on a substrate, irradiate ultraviolet rays through a mask, and then form the spacer at a desired position on the substrate according to a pattern formed on the mask through a developing process.
최근 들어, 스마트폰 및 태블릿 PC의 대중화로 터치 패널의 수요가 증가함에 따라, 표시 장치를 구성하는 컬러 필터 기판과 어레이 기판 사이의 간격을 유지하는 스페이서의 기본적인 특성인 탄성 회복률과 아울러 외부 압력이 가해지는 경우 화소 변형이 없게 딱딱한(hard)특성이 요구되고 있다. 그러나, 기존의 스페이서 형성용 감광성 수지 조성물의 경우 탄성 회복률은 충분히 구현하고 있으나, 외부 압력에 의한 화소 변형이 없는 딱딱한 특성은 만족할만한 수준으로 구현되지 못하고 있는 실정이다.Recently, as the demand for touch panels increases due to the popularization of smartphones and tablet PCs, external pressure is applied as well as elastic recovery rate, which is a basic characteristic of spacers to maintain a gap between the color filter substrate and the array substrate constituting the display device. In the case of losing, a hard characteristic is demanded so that there is no pixel deformation. However, in the case of the conventional photosensitive resin composition for forming a spacer, the elastic recovery rate is sufficiently realized, but the rigid characteristics without pixel deformation due to external pressure are not realized to a satisfactory level.
이와 관련하여, 일본공개특허 제1999-133600호는 카르복시기 및 글리시딜에테르기를 갖는 공중합 수지를 바인더 수지로 포함하는 스페이서 형성용 감광성 수지 조성물을 제시하고 있다. 일본공개특허 제1999-133600호의 조성물은 내열 치수 안정성 및 강도는 어느 정도 확보하였으나, 여전히 만족할만한 탄성 회복률 및 강도를 만족시키지는 못하였다.In this regard, Japanese Patent Laid-Open No. 1999-133600 discloses a photosensitive resin composition for forming a spacer comprising a copolymer resin having a carboxyl group and a glycidyl ether group as a binder resin. Although the composition of JP-A-1999-133600 secured some degree of heat-resistant dimensional stability and strength, it still did not satisfy satisfactory elastic recovery rate and strength.
[선행기술문헌][Preceding technical literature]
[특허문헌][Patent Documents]
특허문헌 1: 일본공개특허 제1999-133600호Patent Document 1: Japanese Patent Application Laid-Open No. 1999-133600
본 발명은 가열 공정을 거치게 되면 가교 밀도가 비약적으로 증가하는 스페이서 형성용 감광성 수지 조성물을 제공하는 것을 목적으로 한다.An object of the present invention is to provide a photosensitive resin composition for forming a spacer, the crosslinking density of which is dramatically increased when subjected to a heating step.
또한, 본 발명은 우수한 탄성 회복률을 가지면서도 외부 압력에 변형이 적은 딱딱한 특성을 갖는 스페이서 형성용 감광성 수지 조성물을 제공하는 것을 목적으로 한다.Moreover, an object of this invention is to provide the photosensitive resin composition for spacer formation which has the rigid characteristic which has the outstanding elastic recovery rate and little deformation in external pressure.
또한, 본 발명은 상기 스페이서 형성용 감광성 수지 조성물을 소정의 패턴으로 도포, 경화하여 형성되는 스페이서를 제공하는 것을 목적으로 한다.Moreover, an object of this invention is to provide the spacer formed by apply | coating and hardening the said photosensitive resin composition for spacer formation in a predetermined pattern.
또한 본 발명은 상기 스페이서를 구비한 화상 표시 장치를 제공하는 것을 목적으로 한다.Moreover, an object of this invention is to provide the image display apparatus provided with the said spacer.
1. 알칼리 가용성 수지, 광중합성 화합물, 광중합 개시제 및 용매를 포함하는 감광성 수지 조성물로서, 상기 알칼리 가용성 수지는 (A-1)불포화 결합과 카르복시기를 갖는 화합물, (A-2)하기 화학식 1 내지 화학식 2 중 적어도 1종인 화합물 및 (A-3)하기 화학식 3의 화합물을 포함하여 공중합된 수지인 스페이서 형성용 감광성 수지 조성물:1. A photosensitive resin composition comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator, and a solvent, wherein the alkali-soluble resin is a compound having an (A-1) unsaturated bond and a carboxyl group, (A-2) A photosensitive resin composition for forming a spacer, which is a copolymer comprising a compound which is at least one of 2 and a compound of formula (A-3)
[화학식 1][Formula 1]
Figure PCTKR2014004775-appb-I000001
Figure PCTKR2014004775-appb-I000001
(식 중, R1은 수소, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬 또는 시클로알킬이고; R2는 단일결합, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬렌 또는 시클로알킬렌이고; 상기 R1 및 R2는 서로 독립적으로 히드록시기로 치환될 수 있음)Wherein R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms; R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group)
[화학식 2][Formula 2]
Figure PCTKR2014004775-appb-I000002
Figure PCTKR2014004775-appb-I000002
(식 중, R1은 수소, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬 또는 시클로알킬이고; R2는 단일결합, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬렌 또는 시클로알킬렌이고; 상기 R1 및 R2는 서로 독립적으로 히드록시기로 치환될 수 있음)Wherein R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms; R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group)
[화학식 3][Formula 3]
Figure PCTKR2014004775-appb-I000003
Figure PCTKR2014004775-appb-I000003
(식 중, R1은 수소, 탄소수 1 내지 10의 알킬 또는 탄소수 3 내지 10의 시클로알킬이고, 상기 알킬 및 시클로알킬은 서로 독립적으로 헤테로 원자가 포함될 수 있으며, R2, 및 R3는 서로 독립적으로 탄소수 1 내지 20의 직쇄 또는 분지쇄인 알킬렌이며, 상기 R1, R2 및 R3는 서로 독립적으로 히드록시기로 더 치환될 수 있음)(Wherein R 1 is hydrogen, alkyl having 1 to 10 carbon atoms or cycloalkyl having 3 to 10 carbon atoms, the alkyl and cycloalkyl may be independently of each other a hetero atom, R 2, and R 3 are independently of each other) Linear or branched alkylene having 1 to 20 carbon atoms, wherein R 1 , R 2, and R 3 may be independently substituted with a hydroxy group)
2. 위 1에 있어서, 상기 화학식 3의 R1은 수소, 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, sec-부틸기, tert-부틸기, 히드록시메틸기, 1-히드록시에틸기, 2-히드록시에틸기, 1-히드록시-n-프로필기, 2-히드록시-n-프로필기, 3-히드록시-n-프로필기, 1-히드록시-이소프로필기, 2-히드록시-이소프로필기, 1-히드록시-n-부틸기, 2-히드록시-n-부틸기, 3-히드록시-n-부틸기 및 4-히드록시-n-부틸기로 이루어진 군에서 선택되는 어느 하나인, 스페이서 형성용 감광성 수지 조성물.2. In the above 1, wherein in Formula 3 R 1 is hydrogen, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, hydroxymethyl group, 1- Hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy-isopropyl group, 2 In the group consisting of -hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group and 4-hydroxy-n-butyl group The photosensitive resin composition for spacer formation which is any one selected.
3. 위 1에 있어서, 상기 화학식 3의 R2 및 R3은 서로 독립적으로 메틸렌기, 에틸렌기, 프로필렌기, 부틸렌기, 테트라메틸렌기, 에틸에틸렌기 및 펜타메틸렌기으로 이루어진 군에서 선택되는 어느 하나인, 스페이서 형성용 감광성 수지 조성물.3. In the above 1, wherein R 2 and R 3 of the formula 3 independently of each other selected from the group consisting of methylene group, ethylene group, propylene group, butylene group, tetramethylene group, ethylethylene group and pentamethylene group Photosensitive resin composition for spacer formation which is one.
4. 위 1에 있어서, 상기 (A-3) 화합물은 2-하이드록시에틸 아크릴레이트 글리시딜 에테르; 2-하이드록시에틸 메타크릴레이트 글리시딜 에테르; 4-하이드록시부틸 아크릴레이트 글리시딜 에테르; 4-하이드록시부틸 메타크릴레이트 글리시딜 에테르; 6-하이드록시헥실 아크릴레이트 글리시딜 에테르; 6-하이드록시헥실 메타크릴레이트 글리시딜 에테르; 2-프로페노익 애시드,2-(2-옥시라닐에톡시)에틸 에테르 및 2-프로페노익 애시드,4-(4-옥시라닐부톡시)부틸 에테르로 이루어진 군에서 선택되는 적어도 하나인, 스페이서 형성용 감광성 수지 조성물.4. according to the above 1, wherein the (A-3) compound is 2-hydroxyethyl acrylate glycidyl ether; 2-hydroxyethyl methacrylate glycidyl ether; 4-hydroxybutyl acrylate glycidyl ether; 4-hydroxybutyl methacrylate glycidyl ether; 6-hydroxyhexyl acrylate glycidyl ether; 6-hydroxyhexyl methacrylate glycidyl ether; A spacer that is at least one selected from the group consisting of 2-propenoic acid, 2- (2-oxyranylethoxy) ethyl ether and 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether Photosensitive resin composition for formation.
5. 위 1에 있어서, 상기 알칼리 가용성 수지는 (A-1) 화합물로부터 유도되는 구성 단위 5 내지 80몰%, (A-2) 화합물로부터 유도되는 구성 단위 10 내지 85몰% 및 (A-3) 화합물로부터 유도되는 구성 단위 10 내지 85몰%를 포함하는 스페이서 형성용 감광성 수지 조성물.5. In the above 1, wherein the alkali-soluble resin is 5 to 80 mol% of the structural unit derived from the compound (A-1), 10 to 85 mol% of the structural unit derived from the compound (A-2) and (A-3 The photosensitive resin composition for spacer formation containing 10-85 mol% of structural units derived from the compound.
6. 위 1 내지 5 중 어느 한 항의 스페이서 형성용 감광성 수지 조성물로 제조된 스페이서.6. Spacer made of a photosensitive resin composition for spacer formation of any one of the above 1 to 5.
7. 위 6의 스페이서를 구비한 화상 표시 장치.7. Image display device having a spacer of the above six.
본 발명의 스페이서 형성용 감광성 수지 조성물은 알칼리 가용성 수지가 반응성이 서로 다른 에폭시 치환기를 적어도 2종 포함하므로, 그 중 반응성이 높은 에폭시 치환기, 특히 지방족 에폭시기를 포함하는 경우에는 스페이서 제조 공정 중 가열 조건에서 개환 반응이 진행되어, 제조되는 스페이서는 가교 밀도가 현저히 높고 그에 따라 우수한 기계적 특성을 가질 수 있다. Since the photosensitive resin composition for forming a spacer of the present invention includes at least two epoxy substituents having different reactivity, the alkali-soluble resin includes a highly reactive epoxy substituent, particularly an aliphatic epoxy group, under heating conditions during the spacer manufacturing process. As the ring-opening reaction proceeds, the spacer to be produced may have a significantly high crosslinking density and thus excellent mechanical properties.
또한, 본 발명의 스페이서 형성용 감광성 수지 조성물로 제조된 스페이서는 우수한 탄성 회복률을 가지며, 외부 압력에 변형이 적은 딱딱한 특성을 갖는다.In addition, the spacer made of the photosensitive resin composition for forming a spacer of the present invention has excellent elastic recovery rate, and has a hard property with little deformation in external pressure.
본 발명은 알칼리 가용성 수지, 광중합성 화합물, 광중합 개시제 및 용매를 포함하는 감광성 수지 조성물에 관한 것으로서, 상기 알칼리 가용성 수지는 (A-1)불포화 결합과 카르복시기를 갖는 화합물, (A-2)하기 화학식 1 내지 화학식 2 중 적어도 1종인 화합물 및 (A-3)하기 화학식 3의 화합물을 포함하여 공중합된 수지 포함함으로써, 우수한 탄성 회복률을 가지며, 외부 압력에 변형이 적은 딱딱한 특성을 갖는 스페이서를 제조할 수 있는 감광성 수지 조성물에 관한 것이다.The present invention relates to a photosensitive resin composition comprising an alkali-soluble resin, a photopolymerizable compound, a photopolymerization initiator and a solvent, wherein the alkali-soluble resin is a compound having a (A-1) unsaturated bond and a carboxyl group, (A-2) By including a compound having at least one compound of Formulas 1 to 2 and a copolymerized resin including the compound of formula (A-3) below, a spacer having excellent elastic recovery and having hard deformation with little deformation at external pressure can be prepared. The present invention relates to a photosensitive resin composition.
이하, 본 발명을 보다 상세하게 설명하도록 한다.Hereinafter, the present invention will be described in more detail.
<알칼리 가용성 수지(A)><Alkali-soluble resin (A)>
알칼리 가용성 수지는 광이나 열에 대한 반응성 및 알칼리 용해성을 가지며, 본 발명의 조성물 내의 각 성분들에 대한 분산매로서 작용한다.Alkali-soluble resins have reactivity to light or heat and alkali solubility, and serve as dispersion mediums for the respective components in the composition of the present invention.
본 발명의 알칼리 가용성 수지는 지환족 에폭시기와 지방족 에폭시기를 포함한다. 지환족이란, 방향족 고리가 아닌 고리를 가진 탄화수소를 의미하며, 지방족이란 직쇄 또는 분지쇄를 포함하는 선형 구조의 탄화수소를 의미한다. 따라서, 지환족 에폭시기란 고리에 에폭시기가 연결된 구조를 의미하고, 지방족 에폭시기란 선형 탄소 사슬에 에폭시기가 연결된 구조를 의미한다.Alkali-soluble resin of this invention contains an alicyclic epoxy group and an aliphatic epoxy group. Alicyclic means a hydrocarbon having a ring other than an aromatic ring, and aliphatic refers to a hydrocarbon having a linear structure including a straight or branched chain. Therefore, an alicyclic epoxy group means the structure which the epoxy group connected to the ring, and an aliphatic epoxy group means the structure which the epoxy group connected to the linear carbon chain.
지방족 에폭시기는 반응성이 높으므로 스페이서 제조 공정 중 가열 조건에서 개환 반응이 진행되어, 감광성 수지 조성물의 가교 밀도를 비약적으로 향상시키게 된다.Since the aliphatic epoxy group has high reactivity, the ring-opening reaction proceeds under heating conditions during the spacer manufacturing process, thereby remarkably improving the crosslinking density of the photosensitive resin composition.
본 발명에 따른 알칼리 가용성 수지의 일 구현예로는, (A-1)불포화 결합과 카르복시기를 갖는 화합물, (A-2)하기 화학식 1 내지 화학식 2 중 적어도 1종인 화합물 및 (A-3) 하기 화학식 3의 화합물을 포함하여 공중합된 수지일 수 있다. In one embodiment of the alkali-soluble resin according to the present invention, a compound having a (A-1) unsaturated bond and a carboxyl group, (A-2) a compound of at least one of the formulas (1) to (2) and (A-3) It may be a copolymer copolymerized with the compound of formula (3).
[화학식 1][Formula 1]
Figure PCTKR2014004775-appb-I000004
Figure PCTKR2014004775-appb-I000004
(식 중, R1은 수소, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬 또는 시클로알킬이고; R2는 단일결합, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬렌 또는 시클로알킬렌이고; 상기 R1 및 R2는 서로 독립적으로 히드록시기로 치환될 수 있음)Wherein R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms; R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group)
[화학식 2][Formula 2]
Figure PCTKR2014004775-appb-I000005
Figure PCTKR2014004775-appb-I000005
(식 중, R1은 수소, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬 또는 시클로알킬이고; R2는 단일결합, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬렌 또는 시클로알킬렌이고; 상기 R1 및 R2는 서로 독립적으로 히드록시기로 치환될 수 있음)Wherein R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms; R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group)
[화학식 3][Formula 3]
Figure PCTKR2014004775-appb-I000006
Figure PCTKR2014004775-appb-I000006
(식 중, R1은 수소, 탄소수 1 내지 10의 알킬 또는 탄소수 3 내지 10의 시클로알킬이고, 상기 알킬 및 시클로알킬은 서로 독립적으로 헤테로 원자가 포함될 수 있으며,(Wherein R 1 is hydrogen, alkyl of 1 to 10 carbon atoms or cycloalkyl of 3 to 10 carbon atoms, and the alkyl and cycloalkyl may independently include a hetero atom,
R2, 및 R3는 서로 독립적으로 탄소수 1 내지 20의 직쇄 또는 분지쇄인 알킬렌이며, R 2, and R 3 are each independently a linear or branched alkylene having 1 to 20 carbon atoms,
상기 R1, R2 및 R3는 서로 독립적으로 히드록시기로 더 치환될 수 있음)R 1 , R 2 and R 3 may be further substituted with a hydroxyl group independently of each other)
화학식 3에서 헤테로 원자는 특별히 제한되지 않으며, 예를 들면, 질소, 산소, 황 중 적어도 하나를 예시할 수 있다.The hetero atom in Chemical Formula 3 is not particularly limited, and for example, at least one of nitrogen, oxygen, and sulfur may be exemplified.
(A-1) 불포화 결합과 카르복시기를 갖는 화합물 (A-1) Compound having an unsaturated bond and a carboxyl group
불포화 결합과 카르복시기를 갖는 화합물로는 중합이 가능한 불포화 이중 결합을 갖는 카르복시산 화합물이라면 제한되지 않으며, 구체적인 일례로 불포화 모노카르복실산이나, 불포화 디카르복실산 또는 불포화 트리카르복실산과 같이 분자 중에 2개 이상의 카르복시기를 갖는 다가 카르복실산 등을 들 수 있다. The compound having an unsaturated bond and a carboxyl group is not limited as long as it is a carboxylic acid compound having an unsaturated double bond which can be polymerized. Specific examples thereof include two compounds in a molecule such as unsaturated monocarboxylic acid, unsaturated dicarboxylic acid or unsaturated tricarboxylic acid. The polyhydric carboxylic acid etc. which have the above carboxy group are mentioned.
상기 불포화 모노카르복실산은 예를 들어 아크릴산, 메타크릴산, 크로톤산 등을 들 수 있다.Examples of the unsaturated monocarboxylic acid include acrylic acid, methacrylic acid and crotonic acid.
상기 불포화 다가 카르복실산은 예를 들어 말레산, 푸마르산, 시트라콘산, 메사콘산, 이타콘산 등을 들 수 있다. Examples of the unsaturated polyvalent carboxylic acid include maleic acid, fumaric acid, citraconic acid, mesaconic acid and itaconic acid.
상기 다가 카르복실산은 산 무수물일 수도 있으며, 상기 불포화 다가 카르복실산 무수물은 예를 들어 말레산 무수물, 이타콘산 무수물, 시트라콘산 무수물 등을 들 수 있다. The polyhydric carboxylic acid may be an acid anhydride, and the unsaturated polycarboxylic dianhydride may be, for example, maleic anhydride, itaconic anhydride, citraconic anhydride, or the like.
또한, 상기 불포화 다가 카르복실산은 그의 모노(2-메타크릴로일옥시알킬)에스테르일 수도 있으며, 예를 들면 숙신산모노(2-아크릴로일옥시에틸), 숙신산모노(2-메타크릴로일옥시에틸), 프탈산모노(2-아크릴로일옥시에틸), 프탈산모노(2-메타크릴로일옥시에틸) 등을 들 수 있다.In addition, the unsaturated polyhydric carboxylic acid may be a mono (2-methacryloyloxyalkyl) ester thereof, for example, monosuccinate mono (2-acryloyloxyethyl), monosuccinate mono (2-methacryloyloxy Ethyl), mono phthalate (2-acryloyloxyethyl), mono phthalate (2-methacryloyloxyethyl), and the like.
상기 불포화 다가 카르복실산은 그 양말단 디카르복시 중합체의 모노(메타)아크릴레이트일 수도 있으며, 예를 들면 ω-카르복시폴리카프로락톤모노아크릴레이트, ω-카르복시폴리카프로락톤모노메타크릴레이트 등을 들 수 있다. The unsaturated polyhydric carboxylic acid may be mono (meth) acrylate of the sock end dicarboxy polymer, and examples thereof include ω-carboxypolycaprolactone monoacrylate and ω-carboxypolycaprolactone monomethacrylate. have.
또한 상기 불포화 다가 카르복실산은 동일 분자 중에 히드록시기 및 카르복실기를 함유하는 불포화 아크릴레이트일 수도 있으며, 예를 들면, α-(히드록시메틸)아크릴산 등을 들 수 있다Moreover, the said unsaturated polyhydric carboxylic acid may be unsaturated acrylate containing a hydroxyl group and a carboxyl group in the same molecule, For example, (alpha)-(hydroxymethyl) acrylic acid etc. are mentioned.
이들 중, 아크릴산, 메타크릴산, 무수 말레산 등이 공중합 반응성 높은 점에서 바람직하게 사용된다. Among these, acrylic acid, methacrylic acid, maleic anhydride and the like are preferably used in view of high copolymerization reactivity.
본 발명에 따른 불포화 결합과 카르복시기를 갖는 화합물은 각각 단독으로 또는 2종 이상을 조합하여 사용할 수 있다.The compounds having an unsaturated bond and a carboxyl group according to the present invention can be used alone or in combination of two or more.
(A-2) 화학식 1 내지 화학식 2 중 적어도 1종인 화합물(A-2) A compound which is at least one of Formulas 1 to 2
본 발명에 따른 화학식 1 내지 화학식 2 중 적어도 1종인 화합물은 중합 가능한 불포화 결합과 가교 밀도를 증가시키는 에폭시기를 함유하고 있는 화합물이다.The compound of at least one of the formulas (1) to (2) according to the present invention is a compound containing an epoxy group which increases the polymerizable unsaturated bond and the crosslinking density.
상기 화학식 1 및 화학식 2에서, R1의 보다 구체적인 예를 들면, 서로 독립적으로 수소; 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, sec-부틸기, tert-부틸기 등의 알킬기; 히드록시메틸기, 1-히드록시에틸기, 2-히드록시에틸기, 1-히드록시-n-프로필기, 2-히드록시-n-프로필기, 3-히드록시-n-프로필기, 1-히드록시-이소프로필기, 2-히드록시-이소프로필기, 1-히드록시-n-부틸기, 2-히드록시-n-부틸기, 3-히드록시-n-부틸기, 4-히드록시-n-부틸기 등의 히드록시기 함유 알킬기일 수 있다. 그 중에서도 R1은 서로 독립적으로, 수소, 메틸기, 히드록시메틸기, 1-히드록시에틸기 또는 2-히드록시에틸기인 것이 바람직하며, 특히 수소 또는 메틸기인 것이 더욱 바람직하다. In Formula 1 and Formula 2, more specific examples of R 1 , independently from each other, hydrogen; Alkyl groups such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group and tert-butyl group; Hydroxymethyl group, 1-hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy -Isopropyl group, 2-hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group, 4-hydroxy-n Or a hydroxy group-containing alkyl group such as -butyl group. Especially, it is preferable that R <1> is hydrogen, a methyl group, a hydroxymethyl group, a 1-hydroxyethyl group, or 2-hydroxyethyl group independently from each other, and it is more preferable that it is especially a hydrogen or a methyl group.
상기 화학식 1 및 화학식 2에서, R2의 보다 구체적인 예를 들면, 서로 독립적으로 단일결합; 메틸렌기, 에틸렌기, 프로필렌기 등의 알킬렌기; 옥시메틸렌기, 옥시에틸렌기, 옥시프로필렌기, 티오메틸렌기, 티오에틸렌기, 티오프로필렌기, 아미노메틸렌기, 아미노에틸렌기, 아미노프로필렌기 등의 헤테로 원자 함유 알킬렌기일 수 있다. 그 중에서도, R2는 단일결합, 메틸렌기, 에틸렌기, 옥시메틸렌기 또는 옥시에틸렌기인 것이 바람직하고, 특히 단일결합 또는 옥시에틸렌기인 것이 더욱 바람직하다. 본 발명에 있어서, R2가 단일결합인 경우는 트리시클로데칸일기의 8 위치 또는 9 위치의 탄소와 아크릴레이트기의 산소가 직접 연결되는 경우를 의미한다.In Formula 1 and Formula 2, more specific examples of R 2 , a single bond independently of each other; Alkylene groups such as methylene group, ethylene group and propylene group; Hetero atom-containing alkylene groups such as oxymethylene group, oxyethylene group, oxypropylene group, thiomethylene group, thioethylene group, thiopropylene group, aminomethylene group, aminoethylene group and aminopropylene group. Among them, R 2 is preferably a single bond, a methylene group, an ethylene group, an oxymethylene group or an oxyethylene group, and more preferably a single bond or an oxyethylene group. In the present invention, the case where R 2 is a single bond means a case where carbon at the 8 or 9 position of the tricyclodecaneyl group and oxygen of the acrylate group are directly connected.
화학식 1로 표시되는 화합물의 보다 구체적인 예시는 하기 화학식 1-1 내지 화학식 1-15를 들 수 있다.More specific examples of the compound represented by formula (1) include the following formulas (1-1) to (1-15).
[화학식 1-1] [Formula 1-1]
Figure PCTKR2014004775-appb-I000007
Figure PCTKR2014004775-appb-I000007
[화학식 1-2][Formula 1-2]
Figure PCTKR2014004775-appb-I000008
Figure PCTKR2014004775-appb-I000008
[화학식 1-3] [Formula 1-3]
Figure PCTKR2014004775-appb-I000009
Figure PCTKR2014004775-appb-I000009
[화학식 1-4][Formula 1-4]
Figure PCTKR2014004775-appb-I000010
Figure PCTKR2014004775-appb-I000010
[화학식 1-5] [Formula 1-5]
Figure PCTKR2014004775-appb-I000011
Figure PCTKR2014004775-appb-I000011
[화학식 1-6][Formula 1-6]
Figure PCTKR2014004775-appb-I000012
Figure PCTKR2014004775-appb-I000012
[화학식 1-7] [Formula 1-7]
Figure PCTKR2014004775-appb-I000013
Figure PCTKR2014004775-appb-I000013
[화학식 1-8][Formula 1-8]
Figure PCTKR2014004775-appb-I000014
Figure PCTKR2014004775-appb-I000014
[화학식 1-9] [Formula 1-9]
Figure PCTKR2014004775-appb-I000015
Figure PCTKR2014004775-appb-I000015
[화학식 1-10][Formula 1-10]
Figure PCTKR2014004775-appb-I000016
Figure PCTKR2014004775-appb-I000016
[화학식 1-11] [Formula 1-11]
Figure PCTKR2014004775-appb-I000017
Figure PCTKR2014004775-appb-I000017
[화학식 1-12][Formula 1-12]
Figure PCTKR2014004775-appb-I000018
Figure PCTKR2014004775-appb-I000018
[화학식 1-13] [Formula 1-13]
Figure PCTKR2014004775-appb-I000019
Figure PCTKR2014004775-appb-I000019
[화학식 1-14][Formula 1-14]
Figure PCTKR2014004775-appb-I000020
Figure PCTKR2014004775-appb-I000020
[화학식 1-15] [Formula 1-15]
Figure PCTKR2014004775-appb-I000021
Figure PCTKR2014004775-appb-I000021
상기 화학식 2로 표시되는 화합물의 보다 구체적인 예시는 하기 화학식 2-1 내지 화학식 2-15를 들 수 있다.More specific examples of the compound represented by Formula 2 include the following Formulas 2-1 to 2-15.
[화학식 2-1] [Formula 2-1]
Figure PCTKR2014004775-appb-I000022
Figure PCTKR2014004775-appb-I000022
[화학식 2-2][Formula 2-2]
Figure PCTKR2014004775-appb-I000023
Figure PCTKR2014004775-appb-I000023
[화학식 2-3] [Formula 2-3]
Figure PCTKR2014004775-appb-I000024
Figure PCTKR2014004775-appb-I000024
[화학식 2-4][Formula 2-4]
Figure PCTKR2014004775-appb-I000025
Figure PCTKR2014004775-appb-I000025
[화학식 2-5] [Formula 2-5]
Figure PCTKR2014004775-appb-I000026
Figure PCTKR2014004775-appb-I000026
[화학식 2-6][Formula 2-6]
Figure PCTKR2014004775-appb-I000027
Figure PCTKR2014004775-appb-I000027
[화학식 2-7] [Formula 2-7]
Figure PCTKR2014004775-appb-I000028
Figure PCTKR2014004775-appb-I000028
[화학식 2-8][Formula 2-8]
Figure PCTKR2014004775-appb-I000029
Figure PCTKR2014004775-appb-I000029
[화학식 2-9] [Formula 2-9]
Figure PCTKR2014004775-appb-I000030
Figure PCTKR2014004775-appb-I000030
[화학식 2-10][Formula 2-10]
Figure PCTKR2014004775-appb-I000031
Figure PCTKR2014004775-appb-I000031
[화학식 2-11] [Formula 2-11]
Figure PCTKR2014004775-appb-I000032
Figure PCTKR2014004775-appb-I000032
[화학식 2-12][Formula 2-12]
Figure PCTKR2014004775-appb-I000033
Figure PCTKR2014004775-appb-I000033
[화학식 2-13] [Formula 2-13]
Figure PCTKR2014004775-appb-I000034
Figure PCTKR2014004775-appb-I000034
[화학식 2-14][Formula 2-14]
Figure PCTKR2014004775-appb-I000035
Figure PCTKR2014004775-appb-I000035
[화학식 2-15] [Formula 2-15]
Figure PCTKR2014004775-appb-I000036
Figure PCTKR2014004775-appb-I000036
상기 화학식 1 및 화학식 2로 표시되는 화합물로 예시된 화합물들은 각각 단독으로 또는 2종 이상을 조합하여 사용할 수 있다. Compounds exemplified as the compounds represented by Formula 1 and Formula 2 may be used alone or in combination of two or more.
(A-3) 화학식 3의 화합물(A-3) Compound of Formula 3
화학식 3의 화합물은 지방족 에폭시기를 포함하는 화합물이다. 지방족 에폭시기는 반응성이 높아 본 발명의 감광성 수지 조성물을 사용하여 스페이서를 제조 공정 중에 개환 반응이 진행되어 가교 밀도를 높임으로써, 스페이서의 강도 등 기계적 특성을 강화시킬 수 있다. The compound of formula 3 is a compound containing an aliphatic epoxy group. The aliphatic epoxy group has high reactivity, and thus the ring-opening reaction proceeds during the manufacturing process of the spacer using the photosensitive resin composition of the present invention to increase the crosslinking density, thereby enhancing mechanical properties such as strength of the spacer.
또한, 화학식 3의 화합물은 아크릴레이트기와 에폭시기 사이의 연결 구조에 에테르 결합을 포함한다. 이러한 에테르 결합을 포함함으로써, 본 발명의 조성물로 제조된 스페이서는 기계적 특성 중 누적 기계 특성(누적 회복률)이 우수해질 수 있다. 누적 회복률이란 반복적으로 변형이 가해져도 원상태로 돌아오는 능력을 의미한다. 본 발명에서는 반복횟수로 10회를 예로 들어 실시하였으나, 이에 한정되는 것은 아니다.In addition, the compound of formula 3 includes an ether bond in the linking structure between the acrylate group and the epoxy group. By including such ether linkages, spacers made from the compositions of the present invention can have excellent cumulative mechanical properties (cumulative recovery) among the mechanical properties. Cumulative recovery rate refers to the ability to return to the original state even after repeated deformations. In the present invention, but was carried out by taking the repetition number of times as an example, but is not limited thereto.
상기 화학식 3에서, R1의 보다 구체적인 예를 들면, 서로 독립적으로 수소; 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, sec-부틸기, tert-부틸기 등의 알킬기; 히드록시메틸기, 1-히드록시에틸기, 2-히드록시에틸기, 1-히드록시-n-프로필기, 2-히드록시-n-프로필기, 3-히드록시-n-프로필기, 1-히드록시-이소프로필기, 2-히드록시-이소프로필기, 1-히드록시-n-부틸기, 2-히드록시-n-부틸기, 3-히드록시-n-부틸기, 4-히드록시-n-부틸기 등의 히드록시기 함유 알킬기일 수 있다. 그 중에서도 R1은 수소, 메틸기, 에틸기, 히드록시메틸기, 1-히드록시에틸기 또는 2-히드록시에틸기인 것이 바람직하다.In Formula 3, more specific examples of R 1 , independently from each other, hydrogen; Alkyl groups such as methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group and tert-butyl group; Hydroxymethyl group, 1-hydroxyethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy -Isopropyl group, 2-hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group, 4-hydroxy-n Or a hydroxy group-containing alkyl group such as -butyl group. Especially, it is preferable that R <1> is hydrogen, a methyl group, an ethyl group, a hydroxymethyl group, a 1-hydroxyethyl group, or 2-hydroxyethyl group.
상기 화학식 3에서 R2 및 R3의 보다 구체적인 예를 들면, 서로 독립적으로 메틸렌기, 에틸렌기, 프로필렌기, 부틸렌기, 테트라메틸렌기, 에틸에틸렌기, 펜타메틸렌기 등의 직쇄상 또는 분지쇄상의 알킬렌기일 수 있다. 그 중에서도, R2 및 R3는 메틸렌기, 에틸렌기 또는 부틸렌기인 것이 바람직하다. In the above formula (3) straight or branched one such specific example, the group of methylene, independently of each other, an ethylene group, a propylene group, a butylene group, a tetramethylene group, ethyl ethylene, pentamethylene group than R 2 and R 3 It may be an alkylene group. Especially, it is preferable that R <2> and R <3> is a methylene group, ethylene group, or butylene group.
상기 화학식 3의 화합물을 구체적으로 예를 들면, 2-하이드록시에틸 아크릴레이트 글리시딜 에테르, 2-하이드록시에틸 메타크릴레이트 글리시딜 에테르, 4-하이드록시부틸 아크릴레이트 글리시딜 에테르, 4-하이드록시부틸 메타크릴레이트 글리시딜 에테르, 6-하이드록시헥실 아크릴레이트 글리시딜 에테르, 6-하이드록시헥실 메타크릴레이트 글리시딜 에테르 등 글리시딜기를 포함하는 불포화 카르복실산 에스테르 화합물; 2-프로페노익 애시드,2-(2-옥시라닐에톡시)에틸 에테르, 2-프로페노익 애시드,4-(4-옥시라닐부톡시)부틸 에테르 등 옥시라닐기를 포함하는 불포화 카르복실산 에스테르 화합물 등을 들 수 있으며, 각각 단독으로 또는 2종 이상을 조합하여 사용할 수 있다.Specific examples of the compound of Formula 3 include 2-hydroxyethyl acrylate glycidyl ether, 2-hydroxyethyl methacrylate glycidyl ether, 4-hydroxybutyl acrylate glycidyl ether, 4 Unsaturated carboxylic ester compounds containing glycidyl groups such as -hydroxybutyl methacrylate glycidyl ether, 6-hydroxyhexyl acrylate glycidyl ether, 6-hydroxyhexyl methacrylate glycidyl ether; Unsaturated carboxylic acid esters containing oxiranyl groups, such as 2-propenoic acid, 2- (2-oxyranylethoxy) ethyl ether, 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether A compound etc. can be mentioned, They can be used individually or in combination of 2 types or more, respectively.
또한, 본 발명에 따른 알칼리 가용성 수지(A)에서 상기 (A-1), (A-2) 및 (A-3)의 공중합체에는 상기 (A-1), (A-2) 및 (A-3) 이외에 상기 (A-1), (A-2) 및 (A-3)와 중합 가능한 불포화 결합을 갖는 화합물이 함께 공중합될 수 있다. Further, in the alkali-soluble resin (A) according to the present invention, the copolymers of (A-1), (A-2) and (A-3) include (A-1), (A-2) and (A). In addition to -3), a compound having an unsaturated bond polymerizable with (A-1), (A-2) and (A-3) can be copolymerized together.
상기 (A-1), (A-2) 및 (A-3)와 중합 가능한 불포화 결합을 갖는 화합물은 구체적인 예로서 2-아미노에틸아크릴레이트, 2-아미노에틸메타크릴레이트, 2-디메틸아미노에틸아크릴레이트, 2-디메틸아미노에틸메타크릴레이트, 2-아미노프로필아크릴레이트, 2-아미노프로필메타크릴레이트, 2-디메틸아미노프로필아크릴레이트, 2-디메틸아미노프로필메타크릴레이트, 3-아미노프로필아크릴레이트, 3-아미노프로필메타크릴레이트, 3-디메틸아미노프로필아크릴레이트, 3-디메틸아미노프로필메타크릴레이트 등의 불포화 카르복실산 아미노알킬에스테르류; 아세트산비닐, 프로피온산비닐, 부티르산비닐, 벤조산비닐 등의 카르복실산비닐에스테르류; 비닐메틸에테르, 비닐에틸에테르, 알릴글리시딜에테르 등의 불포화에테르류; 아크릴로니트릴, 메타크릴로니트릴, α-클로로아크릴로니트릴, 시안화 비닐리덴 등의 시안화 비닐 화합물; 아크릴아미드, 메타크릴아미드, α-클로로아크릴아미드, N-2-히드록시에틸아크릴아미드, N-2-히드록시에틸메타크릴아미드 등의 불포화 아미드류; 말레이미드, 벤질말레이미드, N-페닐말레이미드. N-시클로헥실말레이미드 등의 불포화이미드류; 1,3-부타디엔, 이소프렌, 클로로프렌 등의 지방족 공액 디엔류; 및 폴리스티렌, 폴리메틸아크릴레이트, 폴리메틸메타크릴레이트, 폴리-n-부틸아크릴레이트, 폴리-n-부틸메타크릴레이트, 폴리실록산의 중합체 분자쇄의 말단에 모노아크릴로일기 또는 모노메타크릴로일기를 갖는 거대 단량체류 등을 들 수 있다.Specific examples of the compound having an unsaturated bond polymerizable with the above (A-1), (A-2) and (A-3) include 2-aminoethyl acrylate, 2-aminoethyl methacrylate and 2-dimethylaminoethyl Acrylate, 2-dimethylaminoethyl methacrylate, 2-aminopropyl acrylate, 2-aminopropyl methacrylate, 2-dimethylaminopropyl acrylate, 2-dimethylaminopropyl methacrylate, 3-aminopropyl acrylate Unsaturated carboxylic acid aminoalkyl esters such as 3-aminopropyl methacrylate, 3-dimethylaminopropyl acrylate and 3-dimethylaminopropyl methacrylate; Carboxylic acid vinyl esters such as vinyl acetate, vinyl propionate, vinyl butyrate and vinyl benzoate; Unsaturated ethers such as vinyl methyl ether, vinyl ethyl ether and allyl glycidyl ether; Vinyl cyanide compounds such as acrylonitrile, methacrylonitrile, α-chloroacrylonitrile and vinylidene cyanide; Unsaturated amides such as acrylamide, methacrylamide, α-chloroacrylamide, N-2-hydroxyethylacrylamide and N-2-hydroxyethyl methacrylamide; Maleimide, benzylmaleimide, N-phenylmaleimide. Unsaturated imides such as N-cyclohexylmaleimide; Aliphatic conjugated dienes such as 1,3-butadiene, isoprene and chloroprene; And monoacryloyl or monomethacryloyl groups at the terminal of the polymer molecular chain of polystyrene, polymethylacrylate, polymethylmethacrylate, poly-n-butylacrylate, poly-n-butylmethacrylate, polysiloxane. The macromonomer which has, etc. are mentioned.
본 발명에 따른 알칼리 가용성 수지(A)가 상기 (A-1), (A-2) 및 (A-3)를 공중합하여 얻어지는 공중합체((A-1), (A-2) 및 (A-3) 이외의 단량체가 더 포함되어 공중합되는 경우에도 본 발명에 포함됨)인 경우, 상기 공중합체에서 (A-1), (A-2) 및 (A-3) 각각으로부터 유도되는 구성단위의 비율은 상기의 공중합체를 구성하는 구성 단위의 합계 몰수에 대하여 몰 분율로 이하의 범위에 있는 것이 바람직하다.Copolymer ((A-1), (A-2) and (A) obtained by alkali-soluble resin (A) according to the present invention copolymerizing the above (A-1), (A-2) and (A-3) -3) is included in the present invention even when a monomer other than -3) is included in the copolymer), and in the copolymer, a component derived from each of (A-1), (A-2) and (A-3) It is preferable that a ratio exists in the following ranges by a mole fraction with respect to the total number of moles of the structural unit which comprises said copolymer.
(A-1) 로부터 유도되는 구성 단위: 5∼80몰%,Structural unit derived from (A-1): 5 to 80 mol%,
(A-2) 로부터 유도되는 구성 단위: 10∼85몰%,Structural unit derived from (A-2): 10-85 mol%,
(A-3) 로부터 유도되는 구성 단위: 10∼85몰%. Structural unit derived from (A-3): 10-85 mol%.
특히, 상기 구성 단위의 비율이 이하의 범위이면, 보다 바람직하다.In particular, it is more preferable if the ratio of the said structural unit is the following ranges.
(A-1) 로부터 유도되는 구성 단위: 10∼70몰%Structural unit derived from (A-1): 10 to 70 mol%
(A-2) 로부터 유도되는 구성 단위: 15∼75몰%Structural unit derived from (A-2): 15 to 75 mol%
(A-3) 로부터 유도되는 구성 단위: 15∼75몰%. Structural unit derived from (A-3): 15-75 mol%.
상기 구성 단위의 비율이 상기 범위에 있으면, 현상성 내용매성, 내열성 및 기계 강도가 양호한 감광성 수지 조성물의 제조가 가능해진다.If the ratio of the said structural unit exists in the said range, manufacture of the photosensitive resin composition with favorable developable solvent resistance, heat resistance, and mechanical strength will be attained.
알칼리 가용성 수지(A)는, 예를 들어 문헌 「고분자 합성의 실험법」 (오오쯔 타카유키 저 발행소 (주) 화학동인 제 1 판 제 1 쇄 1972 년 3 월 1 일 발행) 에 기재된 방법을 참고로 하여 제조할 수 있다.For the alkali-soluble resin (A), for example, with reference to the method described in the document "Experimental method of polymer synthesis" (first edition March 1, 1972, first edition of Otsu Takayuki Kogyo Co., Ltd.) It can manufacture.
구체적으로는, 공중합체를 구성하는 단위 (A-1), (A-2) 및 (A-3)의 소정량, 중합 개시제 및 용매를 반응 용기 중에 넣어 질소에 의해 산소를 치환함으로써, 산소 부존재 하에서, 교반, 가열, 보온함으로써 중합체가 얻어진다. 또, 얻어진 공중합체는 반응 후의 용액을 그대로 사용해도 되고, 농축 또는 희석한 용액을 사용해도 되고, 재침전 등의 방법으로 고체(분체) 로서 추출한 것을 사용해도 된다.Specifically, oxygen is absent by placing a predetermined amount, a polymerization initiator and a solvent of units (A-1), (A-2) and (A-3) constituting the copolymer in a reaction vessel and replacing oxygen with nitrogen. The polymer is obtained by stirring, heating, and keeping warm under the following. Moreover, the obtained copolymer may use the solution after reaction as it is, the solution which concentrated or diluted may be used, and the thing extracted as solid (powder) by methods, such as reprecipitation, may be used.
알칼리 가용성 수지는 산가가 20 내지 200(KOH㎎/g)의 범위인 것이 바람직하다. 산가가 상기 범위에 있으면, 경시안정성 및 탄성 복원율이 우수한 스페이서의 제조가 가능하게 된다.It is preferable that alkali-soluble resin has an acid value of 20-200 (KOHmg / g). When the acid value is in the above range, the spacer having excellent aging stability and elastic recovery rate can be produced.
알칼리 가용성 수지의 폴리스티렌 환산의 중량 평균 분자량은 3,000∼100,000이고, 바람직하게는 5,000∼50,000이다. 알칼리 가용성 수지의 중량 평균 분자량이 상기 범위에 있으면 현상시에 막 감소가 방지되어 패턴 부분의 누락성이 양호해지므로 바람직하다.The weight average molecular weight of polystyrene conversion of alkali-soluble resin is 3,000-100,000, Preferably it is 5,000-50,000. When the weight average molecular weight of alkali-soluble resin exists in the said range, since film reduction is prevented at the time of image development, the omission property of a pattern part becomes favorable, and it is preferable.
알칼리 가용성 수지의 분자량 분포[중량평균분자량(Mw)/수평균분자량(Mn)]는 1.5 내지 6.0인 것이 바람직하고, 1.8 내지 4.0인 것이 보다 바람직하다. 상기 분자량 분포[중량평균분자량(Mw)/수평균분자량(Mn)]가 상기 범위내에 포함되어 있으면 현상성이 우수해지기 때문에 바람직하다.It is preferable that it is 1.5-6.0, and, as for the molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] of alkali-soluble resin, it is more preferable that it is 1.8-4.0. When the said molecular weight distribution [weight average molecular weight (Mw) / number average molecular weight (Mn)] is contained in the said range, since developability becomes excellent, it is preferable.
알칼리 가용성 수지의 함량은 스페이서 형성용 감광성 수지 조성물 중의 전체 고형분에 대하여, 5 내지 90중량%, 바람직하게는 10 내지 70중량%의 범위이다. 알칼리 가용성 수지의 함량이 상기의 기준으로 5 내지 90중량%이면 현상액에의 용해성이 충분하여 현상성이 우수해지며, 우수한 탄성회복률을 가지면서 외부 압력에 변형이 적은 딱딱한 특성을 갖는 스페이서의 제조가 가능하게 된다.The content of the alkali-soluble resin is in the range of 5 to 90% by weight, preferably 10 to 70% by weight based on the total solids in the photosensitive resin composition for spacer formation. When the content of the alkali-soluble resin is 5 to 90% by weight based on the above standards, the solubility in the developing solution is sufficient, so that the developability is excellent, and the preparation of the spacer having a hard property having excellent elastic recovery rate and low deformation at external pressure It becomes possible.
<광중합성 화합물(B)><Photopolymerizable compound (B)>
본 발명의 스페이서 형성용 감광성 수지 조성물에 함유되는 광중합성 화합물은 광 및 후술하는 광중합 개시제의 작용으로 중합할 수 있는 화합물로서, 단관능 단량체, 2관능 단량체, 그 밖의 다관능 단량체 등을 들 수 있다. The photopolymerizable compound contained in the photosensitive resin composition for spacer formation of this invention is a compound which can superpose | polymerize by the action | action of light and the photoinitiator mentioned later, A monofunctional monomer, a bifunctional monomer, another polyfunctional monomer, etc. are mentioned. .
본 발명에 사용되는 광중합성 화합물은 스페이서 형성용 수지 조성물의 현상성, 감도, 밀착성, 표면문제 등을 개량하기 위해 관능기의 구조나 관능기 수가 다른 2개 또는 그 이상의 광중합성 화합물을 혼합하여 사용할 수 있으며, 그 범위에 제한을 두지 않는다. 단관능 단량체의 구체예로는 노닐페닐카르비톨아크릴레이트, 2-히드록시-3-페녹시프로필아크릴레이트, 2-에틸헥실카르비톨아크릴레이트, 2-히드록시에틸아크릴레이트, N-비닐피롤리돈 등을 들 수 있다. 2관능 단량체의 구체예로는 1,6-헥산디올디(메타)아크릴레이트, 에틸렌글리콜디(메타)아크릴레이트, 네오펜틸글리콜디(메타)아크릴레이트, 트리에틸렌글리콜디(메타)아크릴레이트, 비스페놀 A의 비스(아크릴로일옥시에틸)에테르, 3-메틸펜탄디올디(메타)아크릴레이트 등을 들 수 있다. 그 밖의 다관능 단량체의 구체예로서는 트리메틸올프로판트리(메타)아크릴레이트, 에톡실레이티드트리메틸올프로판트리(메타)아크릴레이트, 프로폭실레이티드트리메틸올프로판트리(메타)아크릴레이트, 펜타에리트리톨트리(메타)아크릴레이트, 펜타에리트리톨테트라(메타)아크릴레이트, 디펜타에리트리톨펜타(메타)아크릴레이트, 에톡실레이티드디펜타에리트리톨헥사(메타)아크릴레이트, 프로폭실레이티드디펜타에리트리톨헥사(메타)아크릴레이트, 디펜타에리트리톨헥사(메타)아크릴레이트 등을 들 수 있다. 이들 중에서 2관능 이상의 다관능 단량체가 바람직하게 사용된다. The photopolymerizable compound used in the present invention may be used by mixing two or more photopolymerizable compounds having different structure or number of functional groups in order to improve the developability, sensitivity, adhesion, surface problem, etc. of the resin composition for spacer formation. It does not limit its scope. Specific examples of the monofunctional monomers include nonylphenylcarbitol acrylate, 2-hydroxy-3-phenoxypropyl acrylate, 2-ethylhexylcarbitol acrylate, 2-hydroxyethyl acrylate and N-vinylpyrroli Money, etc. Specific examples of the bifunctional monomer include 1,6-hexanediol di (meth) acrylate, ethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, Bis (acryloyloxyethyl) ether of bisphenol A, 3-methylpentanediol di (meth) acrylate, etc. are mentioned. Specific examples of other polyfunctional monomers include trimethylolpropane tri (meth) acrylate, ethoxylated trimethylolpropane tri (meth) acrylate, propoxylated trimethylolpropane tri (meth) acrylate, and pentaerythritol tree. (Meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, ethoxylated dipentaerythritol hexa (meth) acrylate, propoxylated dipentaerythritol Hexa (meth) acrylate, dipentaerythritol hexa (meth) acrylate, etc. are mentioned. Of these, bifunctional or higher polyfunctional monomers are preferably used.
광중합성 화합물은 스페이서 형성용 감광성 중의 고형분을 기준으로 알칼리 가용성 수지 및 광중합성 화합물의 합계 100중량부에 대하여, 1 내지 90중량부, 바람직하게는 10 내지 80중량부의 범위에서 사용된다. 광중합성 화합물가 상기의 함량 범위에서 스페이서 패턴의 강도나 평활성이 양호하게 되기 때문에 바람직하다.The photopolymerizable compound is used in the range of 1 to 90 parts by weight, preferably 10 to 80 parts by weight based on 100 parts by weight of the total amount of the alkali-soluble resin and the photopolymerizable compound based on the solids in the photosensitive for spacer formation. The photopolymerizable compound is preferable because the strength and smoothness of the spacer pattern become good in the above content range.
<광중합 개시제(C)><Photoinitiator (C)>
광중합 개시제는 당분야에서 일반적으로 사용되는 것을 제한 없이 적용할 수 있다. The photopolymerization initiator may be applied without limitation to those generally used in the art.
예를 들면, 트리아진계 화합물, 아세토페논 계 화합물, 비이미다졸계 화합물 및 옥심 화합물로 이루어지는 군으로부터 선택되는 1종 이상의 화합물을 사용할 수 있다. 상기 광중합 개시제를 함유하는 감광성 수지 조성물은 고감도이고, 이 조성물을 사용하여 형성되는 스페이서 패턴의 강도나 표면 평활성이 양호해진다.For example, one or more compounds selected from the group consisting of triazine compounds, acetophenone compounds, biimidazole compounds, and oxime compounds can be used. The photosensitive resin composition containing the said photoinitiator is high sensitivity, and the intensity | strength and surface smoothness of the spacer pattern formed using this composition become favorable.
상기 트리아진계 화합물로서는, 예를 들면 2,4-비스(트리클로로메틸)-6-(4-메톡시페닐)-1,3,5-트리아진, 2,4-비스 (트리클로로메틸)-6-(4-메톡시나프틸)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-피페로닐-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시스티릴)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(5-메틸퓨란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(퓨란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리 클로로메틸)-6-[2-(4-디에틸아미노-2-메틸페닐)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(3,4-디메톡시페닐)에테닐]-1,3,5-트리아진 등을 들 수 있다.As said triazine type compound, it is 2, 4-bis (trichloromethyl) -6- (4-methoxyphenyl) -1, 3, 5- triazine, 2, 4-bis (trichloromethyl)-, for example. 6- (4-methoxynaphthyl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6-piperonyl-1,3,5-triazine, 2,4- Bis (trichloromethyl) -6- (4-methoxystyryl) -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (5-methylfuran-2 -Yl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloromethyl) -6- [2- (furan-2-yl) ethenyl] -1,3,5-tri Azine, 2,4-bis (trichloromethyl) -6- [2- (4-diethylamino-2-methylphenyl) ethenyl] -1,3,5-triazine, 2,4-bis (trichloro Methyl) -6- [2- (3,4-dimethoxyphenyl) ethenyl] -1,3,5-triazine and the like.
상기 아세토페논계 화합물로서는, 예를 들면, 디에톡시아세토페논, 2-히드록시-2-메틸-1-페닐프로판-1-온, 벤질디메틸케탈, 2-히드록시-1-[4-(2-히드록시에톡시)페닐]-2-메틸프로판-1-온, 1-히드록시시클로헥실페닐케톤, 2-메틸-1-(4-메틸티오페닐)-2-모르폴리노프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온, 2-히드록시-2-메틸-1-[4-(1-메틸비닐)페닐]프로판-1-온의 올리고머 등을 들 수 있다. As said acetophenone type compound, for example, diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyl dimethyl ketal, 2-hydroxy-1- [4- (2 -Hydroxyethoxy) phenyl] -2-methylpropane-1-one, 1-hydroxycyclohexylphenyl ketone, 2-methyl-1- (4-methylthiophenyl) -2-morpholinopropane-1- On, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) butan-1-one, 2-hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl] propane And oligomers of -1-ones.
또한 상기 아세토페논계 화합물로서는, 예를 들면 하기 화학식 4로 표시되는 화합물을 들 수 있다.Moreover, as said acetophenone type compound, the compound represented by following formula (4) is mentioned, for example.
[화학식 4][Formula 4]
Figure PCTKR2014004775-appb-I000037
Figure PCTKR2014004775-appb-I000037
화학식 4에서, R1 내지 R4는 서로 독립적으로 수소 원자, 할로겐 원자, 수산기, 탄소수 1 내지 12의 알킬기에 의해 치환될 수도 있는 페닐기, 탄소수 1 내지 12의 알킬기에 의해 치환될 수도 있는 벤질기, 또는 탄소수1 내지 12의 알킬기에 의해 치환될 수도 있는 나프틸기를 나타낸다.In formula (4), R 1 to R 4 are independently of each other a hydrogen atom, a halogen atom, a hydroxyl group, a phenyl group which may be substituted by an alkyl group having 1 to 12 carbon atoms, a benzyl group which may be substituted by an alkyl group having 1 to 12 carbon atoms, Or a naphthyl group which may be substituted by an alkyl group having 1 to 12 carbon atoms.
상기 화학식 4로 표시되는 화합물의 구체적인 예로는 2-메틸-2-아미노(4-모르폴리노페닐)에탄-1-온, 2-에틸-2-아미노(4-모르폴리노페닐)에탄-1-온, 2-프로필-2-아미노(4-모르폴리노페닐)에탄-1-온, 2-부틸-2-아미노(4-모르폴리노페닐)에탄-1-온, 2-메틸-2-아미노(4-모르폴리노페닐)프로판-1-온,2-메틸-2-아미노(4-모르폴리노페닐)부탄-1-온, 2-에틸-2-아미노(4-모르폴리노페닐)프로판-1-온, 2-에틸-2-아미노(4-모르폴리노페닐)부탄-1-온, 2-메틸-2-메틸아미노(4-모르폴리노페닐)프로판-1-온, 2-메틸-2-디메틸아미노(4-모르폴리노페닐)프로판-1-온, 2-메틸-2-디에틸아미노(4-모르폴리노페닐)프로판-1-온 등을 들 수 있다.Specific examples of the compound represented by Formula 4 include 2-methyl-2-amino (4-morpholinophenyl) ethan-1-one, 2-ethyl-2-amino (4-morpholinophenyl) ethane-1 -One, 2-propyl-2-amino (4-morpholinophenyl) ethan-1-one, 2-butyl-2-amino (4-morpholinophenyl) ethan-1-one, 2-methyl-2 -Amino (4-morpholinophenyl) propane-1-one, 2-methyl-2-amino (4-morpholinophenyl) butan-1-one, 2-ethyl-2-amino (4-morpholino Phenyl) propane-1-one, 2-ethyl-2-amino (4-morpholinophenyl) butan-1-one, 2-methyl-2-methylamino (4-morpholinophenyl) propan-1-one , 2-methyl-2-dimethylamino (4-morpholinophenyl) propan-1-one, 2-methyl-2-diethylamino (4-morpholinophenyl) propan-1-one, etc. may be mentioned. .
상기 비이미다졸 화합물로서는, 예를 들면 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(알콕시페닐)비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(트리알콕시페닐)비이미다졸, 4,4',5,5' 위치의 페닐기가 카르보알콕시기에 의해 치환되어 있는 이미다졸 화합물 등을 들 수 있다. 이들 중에서 2,2'비스(2-클로로페닐)-4,4',5,5'-테트라 페닐비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸이 바람직하게 사용된다.As said biimidazole compound, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'- tetraphenyl biimidazole, 2,2'-bis (2,3-, for example) Dichlorophenyl) -4,4 ', 5,5'-tetraphenylbiimidazole, 2,2'-bis (2-chlorophenyl) -4,4', 5,5'-tetra (alkoxyphenyl) biimi Dazole, 2,2'-bis (2-chlorophenyl) -4,4 ', 5,5'-tetra (trialkoxyphenyl) biimidazole, and a phenyl group at the 4,4', 5,5 'position is carbo The imidazole compound substituted with the alkoxy group etc. are mentioned. Among these, 2,2'bis (2-chlorophenyl) -4,4 ', 5,5'-tetra phenylbiimidazole, 2,2'-bis (2,3-dichlorophenyl) -4,4', 5,5'-tetraphenylbiimidazole is preferably used.
상기 옥심 화합물로서는, 0-에톡시카르보닐-α-옥시이미노-1-페닐프로판-1-온, 하기의 화학식 5, 6, 7 등을 들 수 있다.Examples of the oxime compound include 0-ethoxycarbonyl-α-oxyimino-1-phenylpropan-1-one and the following formulas (5), (6) and (7).
[화학식 5][Formula 5]
Figure PCTKR2014004775-appb-I000038
Figure PCTKR2014004775-appb-I000038
[화학식 6][Formula 6]
Figure PCTKR2014004775-appb-I000039
Figure PCTKR2014004775-appb-I000039
[화학식 7][Formula 7]
Figure PCTKR2014004775-appb-I000040
Figure PCTKR2014004775-appb-I000040
또한, 본 발명의 효과를 손상하지 않는 정도이면 이 분야에서 통상 사용되고 있는 그 밖의 광중합 개시제 등을 추가로 병용할 수도 있다. 그 밖의 광중합 개시제로서는, 예를 들면 벤조인계 화합물, 벤조페논계 화합물, 티오크산톤계 화합물, 안트라센계 화합물 등을 들 수 있다. 이들은 각각 단독으로 또는 2종 이상 조합하여 사용할 수 있다.Moreover, as long as it does not impair the effect of this invention, the other photoinitiator etc. which are normally used in this field can also be used together. As another photoinitiator, a benzoin compound, a benzophenone type compound, a thioxanthone type compound, an anthracene type compound etc. are mentioned, for example. These can be used individually or in combination of 2 or more types, respectively.
상기 벤조인계 화합물로서는, 예를 들면, 벤조인, 벤조인메틸에테르, 벤조인에틸에테르, 벤조인이소프로필에테르, 벤조인이소부틸에테르 등을 들 수 있다.As said benzoin type compound, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, etc. are mentioned, for example.
상기 벤조페논계 화합물로서는, 예를 들면 벤조페논, 0-벤조일벤조산메틸, 4-페닐벤조페논, 4-벤조일-4'-메틸디페닐술피드, 3,3',4,4'-테트라(tert-부틸퍼옥시카르보닐)벤조페논, 2,4,6-트리메틸벤조페논 등을 들 수 있다.As said benzophenone type compound, for example, benzophenone, methyl 0- benzoyl benzoate, 4-phenyl benzophenone, 4-benzoyl-4'- methyl diphenyl sulfide, 3, 3 ', 4, 4'- tetra ( tert-butylperoxycarbonyl) benzophenone, 2,4,6-trimethylbenzophenone, etc. are mentioned.
상기 티오크산톤계 화합물로서는, 예를 들면 2-이소프로필티오크산톤, 2,4-디에틸티오크산톤, 2,4-디클로로티오크산톤, 1-클로로-4-프로폭시티오크산톤 등을 들 수 있다.As said thioxanthone type compound, 2-isopropyl thioxanthone, 2, 4- diethyl thioxanthone, 2, 4- dichloro thioxanthone, 1-chloro-4- propoxy thioxanthone, etc. are mentioned, for example. Can be mentioned.
상기 안트라센계 화합물로서는, 예를 들면 9,10-디메톡시안트라센, 2-에틸-9,10- 디메톡시안트라센, 9,10-디에톡시안트라센, 2-에틸-9,10-디에톡시안트라센 등을 들 수 있다.Examples of the anthracene-based compound include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-diethoxyanthracene, and the like. Can be mentioned.
그 밖에 2,4,6-트리메틸벤조일디페닐포스핀옥시드, 10-부틸-2-클로로아크리돈, 2-에틸안트라퀴논, 9,10-페난트렌퀴논, 캄포퀴논, 페닐클리옥실산 메틸, 티타노센 화합물 등을 그 밖의 광중합 개시제로서 들 수 있다.In addition, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 10-butyl-2-chloroacridone, 2-ethylanthraquinone, 9,10-phenanthrenequinone, camphorquinone, methyl phenyloxyoxylate, A titanocene compound etc. are mentioned as another photoinitiator.
또한, 광중합 개시제로 연쇄 이동을 일으킬 수 있는 기를 갖는 광중합 개시제를 사용할 수도 있다. 이러한 광중합 개시제로서는, 예를 들면 일본특허 공표 2002-544205호 공보에 기재되어 있는 것을 들 수 있다.Moreover, you may use the photoinitiator which has group which can cause chain transfer as a photoinitiator. As such a photoinitiator, what was described in Unexamined-Japanese-Patent No. 2002-544205 is mentioned, for example.
상기의 연쇄 이동을 일으킬 수 있는 기를 갖는 광중합 개시제로서는, 예를 들면 하기 화학식 8 내지 13으로 표시되는 화합물을 들 수 있다. As a photoinitiator which has group which can cause said chain transfer, the compound represented by following formula (8) -13 is mentioned, for example.
[화학식 8][Formula 8]
Figure PCTKR2014004775-appb-I000041
Figure PCTKR2014004775-appb-I000041
[화학식 9][Formula 9]
Figure PCTKR2014004775-appb-I000042
Figure PCTKR2014004775-appb-I000042
[화학식 10][Formula 10]
Figure PCTKR2014004775-appb-I000043
Figure PCTKR2014004775-appb-I000043
[화학식 11][Formula 11]
Figure PCTKR2014004775-appb-I000044
Figure PCTKR2014004775-appb-I000044
[화학식 12][Formula 12]
Figure PCTKR2014004775-appb-I000045
Figure PCTKR2014004775-appb-I000045
[화학식 13][Formula 13]
Figure PCTKR2014004775-appb-I000046
Figure PCTKR2014004775-appb-I000046
또한, 본 발명에 있어서, 광중합 개시제에는 광중합 개시 보조제를 조합하여 사용할 수도 있다. 상기 광중합 개시제에 광중합 개시 보조제를 병용하면, 이들을 함유하는 감광성 수지 조성물은 더욱 고감도가 되어 스페이서 형성시 생산성의 향상을 도모할 수 있으므로 바람직하다. In addition, in this invention, you may use combining a photoinitiator as a photoinitiator. When a photoinitiation adjuvant is used together with the said photoinitiator, since the photosensitive resin composition containing these becomes more sensitive and can improve productivity at the time of spacer formation, it is preferable.
상기 광중합 개시 보조제로서는 아민 화합물, 카르복실산 화합물이 바람직하게 사용된다. As the photopolymerization start adjuvant, an amine compound and a carboxylic acid compound are preferably used.
상기 광중합 개시 보조제 중 아민 화합물의 구체적인 예로서는 트리에탄올아민, 메틸디에탄올아민, 트리이소프로판올아민 등의 지방족 아민 화합물과, 4-디메틸아미노벤조산메틸, 4-디메틸아미노벤조산에틸, 4-디메틸아미노벤조산이소아밀, 4-디메틸아미노벤조산2-에틸헥실, 벤조산2-디메틸아미노에틸, N,N-디메틸파라톨루이딘, 4,4'-비스(디메틸아미노)벤조페논(통칭 : 미힐러 케톤), 4,4'-비스(디에틸아미노)벤조페논 등의 방향족 아민 화합물을 들 수 있다. 이중에서 상기 아민 화합물로서는 방향족 아민 화합물이 바람직하게 사용된다. Specific examples of the amine compound in the photopolymerization start adjuvant include aliphatic amine compounds such as triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, and 4-dimethylaminobenzoic acid isoamyl. , 4-dimethylaminobenzoic acid 2-ethylhexyl, benzoic acid 2-dimethylaminoethyl, N, N-dimethylparatoluidine, 4,4'-bis (dimethylamino) benzophenone (common name: Michler's ketone), 4,4 ' Aromatic amine compounds, such as -bis (diethylamino) benzophenone, are mentioned. Among them, an aromatic amine compound is preferably used as the amine compound.
상기 광중합 개시 보조제 중 카르복실산 화합물의 구체적인 예로서는 페닐티오아세트산, 메틸페닐티오아세트산, 에틸페닐티오아세트산, 메틸에틸페닐티오아세트산, 디메틸페닐티오아세트산, 메톡시페닐티오아세트산, 디메톡시페닐티오아세트산, 클로로페닐티오아세트산, 디클로로페닐티오아세트산, N-페닐글리신, 페녹시아세트산, 나프틸티오아세트산, N-나프틸글리신, 나프톡시아세트산 등의 방향족 헤테로아세트산류를 들 수 있다.Specific examples of the carboxylic acid compound in the photopolymerization start adjuvant include phenylthioacetic acid, methylphenylthioacetic acid, ethylphenylthioacetic acid, methylethylphenylthioacetic acid, dimethylphenylthioacetic acid, methoxyphenylthioacetic acid, dimethoxyphenylthioacetic acid and chlorophenyl And aromatic heteroacetic acids such as thioacetic acid, dichlorophenylthioacetic acid, N-phenylglycine, phenoxyacetic acid, naphthylthioacetic acid, N-naphthylglycine and naphthoxyacetic acid.
광중합 개시제의 함량은 알칼리 가용성 수지 및 광중합성 화합물의 합계 100중량부에 대하여, 0.1 내지 40중량부, 바람직하게는 1 내지 30중량부고, 상기 광중합 개시 보조제의 함량은 상기의 기준으로 0.1 내지 50중량부, 바람직하게는 1 내지 40중량부이다.The content of the photopolymerization initiator is 0.1 to 40 parts by weight, preferably 1 to 30 parts by weight based on 100 parts by weight of the total amount of the alkali-soluble resin and the photopolymerizable compound, and the content of the photopolymerization initiator is 0.1 to 50 parts by weight based on the above criteria. Parts, preferably 1 to 40 parts by weight.
상기 광중합 개시제의 함량이 상기의 범위에 있으면 감광성 수지 조성물이 고감도화 되어 이 조성물을 사용하여 형성한 스페이서의 강도나 평활성이 양호하게 되기 때문에 바람직하다. 또한, 광중합 개시 보조제의 함량이 상기의 범위에 있으면 감광성 수지 조성물의 감도가 더 높아지고, 이 조성물을 사용하여 형성되는 스페이서 패턴의 생산성이 향상되기 때문에 바람직하다.When the content of the photopolymerization initiator is in the above range, the photosensitive resin composition is highly sensitive, and thus the strength and smoothness of the spacer formed by using the composition are good, which is preferable. In addition, when the content of the photopolymerization initiation aid is in the above range, the sensitivity of the photosensitive resin composition is higher and the productivity of the spacer pattern formed by using the composition is preferable.
<용매(D)><Solvent (D)>
용매는 당해 분야에서 통상적으로 사용하는 것이라면 어떠한 것이라도 제한 없이 사용할 수 있다.The solvent can be used without any limitation as long as it is conventionally used in the art.
상기 용매의 구체적인 예로는 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 에틸렌글리콜모노프로필에테르 및 에틸렌글리콜모노부틸에테르와 같은 에틸렌글리콜모노알킬에테르류; 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜디에틸에테르, 디에틸렌글리콜에틸메틸에테르, 디에틸렌글리콜디프로필에테르, 디에틸렌글리콜디부틸에테르 등의 디에틸렌글리콜디알킬에테르류; 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트, 에틸렌글리콜모노부틸에테르아세테이트, 에틸렌글리콜모노에틸에테르아세테이트 등의 에틸렌글리콜알킬에테르아세테이트류; 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 프로필렌글리콜모노프로필에테르아세테이트, 메톡시부틸아세테이트, 메톡시펜틸아세테이트 등의 알킬렌글리콜알킬에테르아세테이트류; 프로필렌글리콜모노메틸에테르, 프로필렌글리콜모노에틸에테르, 프로필렌글리콜모노프로필에테르, 프로필렌글리콜모노부틸에테르 등의 프로필렌글리콜모노알킬에테르류; 프로필렌글리콜디메틸에테르, 프로필렌글리콜디에틸에테르, 프로필렌글리콜에틸메틸에테르, 프로필렌글리콜디프로필에테르프로필렌글리콜프로필메틸에테르, 프로필렌글리콜에틸프로필에테르 등의 프로필렌글리콜디알킬에테르류; 프로필렌글리콜메틸에테르프로피오네이트, 프로필렌글리콜에틸에테르프로피오네이트, 프로필렌글리콜프로필에테르프로피오네이트, 프로필렌글리콜부틸에테르프로피오네이트 등의 프로필렌글리콜알킬에테르프로피오네이트류; 메톡시부틸알코올, 에톡시부틸알코올, 프로폭시부틸알코올, 부톡시부틸알코올 등의 부틸디올모노알킬에테르류; 메톡시부틸아세테이트, 에톡시부틸아세테이트, 프로폭시부틸아세테이트, 부톡시부틸아세테이트 등의 부탄디올모노알킬에테르아세테이트류; 메톡시부틸프로피오네이트, 에톡시부틸프로피오네이트, 프로폭시부틸프로피오네이트, 부톡시부틸프로피오네이트 등의 부탄디올모노알킬에테르프로피오네이트류; 디프로필렌글리콜디메틸에테르, 디프로필렌글리콜디에틸에테르, 디프로필렌글리콜메틸에틸에테르 등의 디프로필렌글리콜디알킬에테르류; 벤젠, 톨루엔, 자일렌, 메시틸렌 등의 방향족 탄화수소류; 메틸에틸케톤, 아세톤, 메틸아밀케톤, 메틸이소부틸케톤, 시클로헥사논 등의 케톤류; 에탄올, 프로판올, 부탄올, 헥산올, 시클로헥산올, 에틸렌글리콜, 글리세린 등의 알코올류; 아세트산메틸, 아세트산에틸, 아세트산프로필, 아세트산부틸, 2-히드록시프로피온산에틸, 2-히드록시-2-메틸프로피온산메틸, 2-히드록시-2-메틸프로피온산에틸, 히드록시아세트산메틸, 히드록시아세트산에틸, 히드록시아세트산부틸, 락트산메틸, 락트산에틸, 락트산프로필, 락트산부틸, 3-히드록시프로피온산메틸, 3-히드록시프로피온산에틸, 3-히드록시프로피온산프로필, 3-히드록시프로피온산부틸, 2-히드록시-3-메틸부탄산메틸, 메톡시아세트산메틸, 메톡시아세트산에틸, 메톡시아세트산프로필, 메톡시아세트산부틸, 에톡시아세트산메틸, 에톡시아세트산에틸, 에톡시아세트산프로필, 에톡시아세트산부틸, 프로폭시아세트산메틸, 프로폭시아세트산에틸, 프로폭시아세트산프로필, 프로폭시아세트산부틸, 부톡시아세트산메틸, 부톡시아세트산에틸, 부톡시아세트산프로필, 부톡시아세트산부틸, 2-메톡시프로피온산메틸, 2-메톡시프로피온산에틸, 2-메톡시프로피온산프로필, 2-메톡시프로피온산부틸, 2-에톡시프로피온산메틸, 2-에톡시프로피온산에틸, 2-에톡시프로피온산프로필, 2-에톡시프로피온산부틸, 2-부톡시프로피온산메틸, 2-부톡시프로피온산에틸, 2-부톡시프로피온산프로필, 2-부톡시프로피온산부틸, 3-메톡시프로피온산메틸, 3-메톡시프로피온산에틸, 3-메톡시프로피온산프로필, 3-메톡시프로피온산부틸, 3-에톡시프로피온산메틸, 3-에톡시프로피온산에틸, 3-에톡시프로피온산프로필, 3-에톡시프로피온산부틸, 3-프로폭시프로피온산메틸, 3-프로폭시프로피온산에틸, 3-프로폭시프로피온산프로필, 3-프로폭시프로피온산부틸, 3-부톡시프로피온산메틸, 3-부톡시프로피온산에틸, 3-부톡시프로피온산프로필, 3-부톡시프로피온산부틸 등의 에스테르류; 테트라히드로푸란, 피란 등의 고리형 에테르류; γ-부티로락톤 등의 고리형 에스테르류 등을 들 수 있다. 여기서 예시한 용매는, 각각 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. Specific examples of the solvent include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether; Diethylene glycol dialkyl ethers such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol dipropyl ether and diethylene glycol dibutyl ether; Ethylene glycol alkyl ether acetates such as methyl cellosolve acetate, ethyl cellosolve acetate, ethylene glycol monobutyl ether acetate, and ethylene glycol monoethyl ether acetate; Alkylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxy butyl acetate, and methoxy pentyl acetate; Propylene glycol monoalkyl ethers such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, and propylene glycol monobutyl ether; Propylene glycol dialkyl ethers such as propylene glycol dimethyl ether, propylene glycol diethyl ether, propylene glycol ethyl methyl ether, propylene glycol dipropyl ether propylene glycol propyl methyl ether and propylene glycol ethyl propyl ether; Propylene glycol alkyl ether propionates such as propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol propyl ether propionate and propylene glycol butyl ether propionate; Butyl diol monoalkyl ethers such as methoxy butyl alcohol, ethoxy butyl alcohol, propoxy butyl alcohol and butoxy butyl alcohol; Butanediol monoalkyl ether acetates such as methoxy butyl acetate, ethoxy butyl acetate, propoxy butyl acetate and butoxy butyl acetate; Butanediol monoalkyl ether propionates such as methoxybutyl propionate, ethoxybutyl propionate, propoxybutyl propionate and butoxybutyl propionate; Dipropylene glycol dialkyl ethers such as dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, and dipropylene glycol methyl ethyl ether; Aromatic hydrocarbons such as benzene, toluene, xylene and mesitylene; Ketones such as methyl ethyl ketone, acetone, methyl amyl ketone, methyl isobutyl ketone and cyclohexanone; Alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, glycerin; Methyl acetate, ethyl acetate, propyl acetate, butyl acetate, 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, 2-hydroxy-2-methylpropionate, methyl hydroxyacetate, ethyl hydroxyacetate , Butyl hydroxy acetate, methyl lactate, ethyl lactate, propyl lactate, butyl lactate, 3-hydroxypropionate methyl, 3-hydroxypropionate ethyl, 3-hydroxypropionate propyl, 3-hydroxypropionate butyl, 2-hydroxy 3-Methyl methyl butyrate, methyl methoxy acetate, ethyl methoxy acetate, methoxy acetate propyl, butyl acetate, ethoxy acetate methyl, ethoxy acetate, ethoxy acetate propyl, butyl ethoxy acetate, propoxy Methyl acetate, ethyl propoxy acetate, propyl propoxy acetate, butyl propoxy acetate, methyl butoxy acetate, ethyl butoxy acetate, Propyl acetate, butyl butoxy acetate, methyl 2-methoxypropionate, 2-methoxy ethylpropionate, propyl 2-methoxypropionate, butyl 2-methoxypropionate, methyl 2-ethoxypropionate, ethyl 2-ethoxypropionate Propyl 2-ethoxypropionate, butyl 2-ethoxypropionate, methyl 2-butoxypropionate, ethyl 2-butoxypropionate, propyl 2-butoxypropionate, butyl 2-butoxypropionate, methyl 3-methoxypropionate, 3-methoxy ethylpropionate, 3-methoxy propylpropionate, 3-methoxy propylpropionate, 3-ethoxy propylpropionate, 3-ethoxy propylpropionate, 3-ethoxy propylpropionate, 3-ethoxy propylpropionate, 3 Methyl propoxypropionate, 3-propoxy propionate, 3-propoxypropionate, butyl 3-propoxypropionate, methyl 3-butoxypropionate, ethyl 3-butoxypropionate, 3-butoxypropionic acid Esters such as ropil, 3-butoxy-propionic acid butyl; Cyclic ethers such as tetrahydrofuran and pyran; Cyclic ester, such as (gamma) -butyrolactone, etc. are mentioned. The solvent illustrated here can be used individually or in mixture of 2 or more types, respectively.
상기 용매는 도포성 및 건조성을 고려하였을 때 알킬렌글리콜알킬에테르아세테이트류, 케톤류, 부탄디올알킬에테르아세테이트류, 부탄디올모노알킬에테르류, 3-에톡시프로피온산에틸, 3-메톡시프로피온산메틸 등의 에스테르류가 바람직하게 사용될 수 있으며, 더욱 바람직하게는 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 시클로헥사논, 메톡시부틸아세테이트, 메톡시부탄올, 3-에톡시프로피온산에틸, 3-메톡시프로피온산메틸 등이 사용될 수 있다. The solvents include esters such as alkylene glycol alkyl ether acetates, ketones, butanediol alkyl ether acetates, butanediol monoalkyl ethers, ethyl 3-ethoxypropionate and methyl 3-methoxypropionate in consideration of coating properties and drying properties. May be preferably used, more preferably propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, methoxybutyl acetate, methoxybutanol, ethyl 3-ethoxypropionate, 3-methoxypropionic acid Methyl and the like can be used.
용매의 함량은 그것을 포함하는 감광성 수지 조성물에 대하여 총 중량에 대하여, 60 내지 90중량%, 바람직하게는 70 내지 85 중량%이다. 용매의 함량이 상기 범위에 있으면, 스핀 코터, 슬릿 & 스핀 코터, 슬릿 코터(다이 코터, 커튼플로우 코터라고도 불리는 경우가 있다), 잉크젯 등의 도포 장치로 도포했을 때 도포성이 양호해지기 때문에 바람직하다.The content of the solvent is 60 to 90% by weight, preferably 70 to 85% by weight relative to the total weight with respect to the photosensitive resin composition including the same. When the content of the solvent is in the above range, it is preferable because the applicability becomes good when applied with a coating device such as a spin coater, a slit & spin coater, a slit coater (sometimes referred to as a die coater or a curtain flow coater), or an inkjet. Do.
<첨가제(E)><Additive (E)>
본 발명에 따른 감광성 수지 조성물은 필요에 따라 충진제, 다른 고분자 화합물, 경화제, 레벨링제, 밀착촉진제, 산화 방지제, 자외선 흡수제, 응집 방지제, 연쇄 이동제 등의 첨가제를 더 포함할 수 있다. The photosensitive resin composition according to the present invention may further include additives such as fillers, other polymer compounds, curing agents, leveling agents, adhesion promoters, antioxidants, ultraviolet absorbers, anti-agglomerating agents, and chain transfer agents, as necessary.
상기 충진제의 구체적인 예로는, 유리, 실리카, 알루미나 등을 들 수 있다.Specific examples of the filler include glass, silica, alumina and the like.
상기 다른 고분자 화합물의 구체적인 예로는, 에폭시 수지, 말레이미드 수지 등의 경화성 수지; 폴리비닐알코올, 폴리아크릴산, 폴리에틸렌글리콜모노알킬에테르, 폴리플루오로알킬아크릴레이트, 폴리에스테르, 폴리우레탄 등의 열가소성 수지 등을 들 수 있다.Specific examples of the other high molecular compound include curable resins such as epoxy resins and maleimide resins; And thermoplastic resins such as polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, polyfluoroalkyl acrylate, polyester, and polyurethane.
상기 경화제는 심부 경화 및 기계적 강도를 높이기 위해 사용되며, 경화제의 구체적인 예로서는 에폭시 화합물, 다관능 이소시아네이트 화합물, 멜라민 화합물, 옥세탄 화합물 등을 들 수 있다. The curing agent is used to increase the core hardening and mechanical strength, and specific examples of the curing agent include epoxy compounds, polyfunctional isocyanate compounds, melamine compounds, oxetane compounds and the like.
상기 경화제에서 에폭시 화합물의 구체적인 예로서는 비스페놀 A계 에폭시 수지, 수소화 비스페놀 A계 에폭시 수지, 비스페놀 F계 에폭시 수지, 수소화 비스페놀 F계 에폭시 수지, 노블락형 에폭시 수지, 기타 방향족계 에폭시 수지, 지환족계 에폭시 수지, 글리시딜에스테르계 수지, 글리시딜아민계 수지, 또는 이러한 에폭시 수지의 브롬화 유도체, 에폭시 수지 및 그 브롬화 유도체 이외의 지방족, 지환족 또는 방향족 에폭시 화합물, 부타디엔 (공)중합체 에폭시화물, 이소프렌 (공)중합체 에폭시화물, 글리시딜(메타)아크릴레트 (공)중합체, 트리글리시딜이소시아눌레이트 등을 들 수 있다. Specific examples of the epoxy compound in the curing agent include bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol F epoxy resin, noblock type epoxy resin, other aromatic epoxy resin, alicyclic epoxy resin, Aliphatic, cycloaliphatic or aromatic epoxy compounds other than glycidyl ester resins, glycidylamine resins, or brominated derivatives of these epoxy resins, epoxy resins and their brominated derivatives, butadiene (co) polymer epoxides, isoprene ) Polymer epoxide, glycidyl (meth) acrylate (co) polymer, triglycidyl isocyanurate, etc. are mentioned.
상기 경화제에서 옥세탄 화합물의 구체적인 예로서는 카르보네이트비스옥세탄, 크실렌비스옥세탄, 아디페이트비스옥세탄, 테레프탈레이트비스옥세탄, 시클로헥산디카르복실산비스옥세탄 등을 들 수 있다. Specific examples of the oxetane compound in the curing agent include carbonate bis oxetane, xylene bis oxetane, adipate bis oxetane, terephthalate bis oxetane, cyclohexane dicarboxylic acid bis oxetane and the like.
상기 경화제는 경화제와 함께 에폭시 화합물의 에폭시기, 옥세탄 화합물의 옥세탄 골격을 개환 중합하게 할 수 있는 경화 보조 화합물을 병용할 수 있다. 상기 경화 보조 화합물로서는, 예를 들면 다가 카르본산류, 다가 카르본산 무수물류, 산 발생제 등을 들 수 있다. The said hardening | curing agent can use together the hardening auxiliary compound which can make ring-opening-polymerize the epoxy group of an epoxy compound, and the oxetane skeleton of an oxetane compound with a hardening | curing agent. As said hardening auxiliary compound, polyhydric carboxylic acid, polyhydric carboxylic anhydride, an acid generator, etc. are mentioned, for example.
상기 카르본산 무수물류는 에폭시 수지 경화제로서 시판되는 것을 이용할 수 있다. 상기 에폭시 수지 경화제로서는, 예를 들면, 상품명(아데카하도나 EH-700)(아데카공업㈜ 제조), 상품명(리카싯도 HH)(신일본이화㈜ 제조), 상품명(MH-700)(신일본이화㈜ 제조) 등을 들 수 있다. 상기에서 예시한 경화제는 단독으로 또는 2종 이상을 혼합하여 사용할 수 있다. As said carboxylic anhydride, what is marketed can be used as an epoxy resin hardening | curing agent. As said epoxy resin hardening | curing agent, a brand name (Adekahadona EH-700) (made by Adeka Industrial Co., Ltd.), a brand name (Rikaditdo HH) (made by Nippon Ewha Co., Ltd.), a brand name (MH-700) ( New Nippon Ewha Co., Ltd.) etc. are mentioned. The hardeners illustrated above can be used individually or in mixture of 2 or more types.
상기 레벨링제로는, 시판되는 계면 활성제를 사용할 수 있고, 예를 들어 실리콘계, 불소계, 에스테르계, 양이온계, 음이온계, 비이온계, 양성 등의 계면 활성제 등을 들 수 있고, 이들은 각각 단독으로도 2 종 이상을 조합하여 사용해도 된다. As said leveling agent, commercially available surfactants can be used, For example, surfactants, such as a silicone type, a fluorine type, ester type, a cation type, an anion type, a nonionic type, an amphoteric, etc., are mentioned, These are each independently, either You may use in combination of 2 or more type.
상기 계면 활성제로는, 예를 들어 폴리옥시에틸렌알킬에테르류, 폴리옥시에틸렌알킬페닐에테르류, 폴리에틸렌글리콜디에스테르류, 소르비탄지방산 에스테르류, 지방산 변성 폴리에스테르류, 3 급 아민 변성 폴리우레탄류, 폴리에틸렌이민류 등 외에, 상품명으로 KP (신에쯔 화학 공업 (주) 제조), 폴리플로우 (쿄에이 화학(주) 제조), 에프톱 (토켐프로덕츠사 제조), 메가팍 (다이닛폰 잉크 화학 공업 (주) 제조), 플로라드 (스미토모쓰리엠 (주) 제조), 아사히가드, 사프론 (이상, 아사히가라스 (주) 제조), 소르스파스 (제네카 (주) 제조), EFKA (EFKA CHEMICALS 사 제조), PB821 (아지노모토 (주) 제조) 등을 들 수 있다.As said surfactant, For example, polyoxyethylene alkyl ether, polyoxyethylene alkyl phenyl ether, polyethylene glycol diester, sorbitan fatty acid ester, fatty acid modified polyester, tertiary amine modified polyurethane, In addition to polyethyleneimines, KP (manufactured by Shin-Etsu Chemical Co., Ltd.), polyflow (manufactured by Kyoi Chemical Co., Ltd.), F-Top (manufactured by Tochem Products Co., Ltd.), MegaPac (Dainippon Ink Chemical Co., Ltd.) Co., Ltd., Florade (manufactured by Sumitomo 3M Co., Ltd.), Asahigard, Saffron (above, Asahigarasu Co., Ltd.), Soapaspa (Geneka Co., Ltd.), EFKA (EFKA CHEMICALS Co. Manufacture), PB821 (made by Ajinomoto Co., Ltd.), etc. are mentioned.
상기 밀착 촉진제로는, 실란계 화합물이 바람직하고, 구체적으로는, 비닐트리메톡시실란, 비닐트리에톡시실란, 비닐트리스(2-메톡시에톡시)실란, N-(2-아미노에틸)-3-아미노프로필메틸디메톡시실란, N-(2-아미노에틸)-3-아미노프로필트리메톡시실란, 3-아미노프로필트리에톡시실란, 3-글리시독시프로필트리메톡시실란, 3-글리시독시프로필메틸디메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란, 3-클로로프로필메틸디메톡시실란, 3-클로로프로필트리메톡시실란, 3-메타크릴로일옥시프로필트리메톡시실란, 3-메르캅토프로필트리메톡시실란 등을 들 수 있다.As said adhesion promoter, a silane type compound is preferable, Specifically, a vinyl trimethoxysilane, a vinyl triethoxysilane, a vinyl tris (2-methoxyethoxy) silane, N- (2-aminoethyl)- 3-aminopropylmethyldimethoxysilane, N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-gly Cidoxypropylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloyloxy Propyl trimethoxysilane, 3-mercaptopropyl trimethoxysilane, etc. are mentioned.
상기 산화 방지제로는 구체적으로, 2-tert-부틸-6-(3-tert-부틸-2-히드록시-5-메틸벤질)-4-메틸페닐아크릴레이트, 2-[1-(2-히드록시-3,5-디-tert-펜틸페닐)에틸]-4,6-디-tert-펜틸페닐아크릴레이트, 6-[3-(3-tert-부틸-4-히드록시-5-메틸페닐)프로폭시]-2,4,8,10-테트라-tert-부틸디벤즈[d,f][1,3,2]디옥사포스페핀, 3,9-비스[2-{3-(3-tert-부틸-4-히드록시-5-메틸페닐)프로피오닐옥시}-1,1-디메틸에틸]-2,4,8,10-테트라옥사스피로[5.5]운데칸, 2,2'-메틸렌비스(6-tert-부틸-4-메틸페놀), 4,4'-부틸리덴비스(6-tert-부틸-3-메틸페놀), 4,4'-티오비스(2-tert-부틸-5-메틸페놀), 2,2'-티오비스(6-tert-부틸-4-메틸페놀), 디라우릴 3,3'-티오디프로피오네이트, 디미리스틸 3,3'-티오디프로피오네이트, 디스테아릴 3,3'-티오디프로피오네이트, 펜타에리트리틸테트라키스(3-라우릴티오프로피오네이트), 1,3,5-트리스(3,5-디-tert-부틸-4-히드록시벤질)-1,3,5-트리아진-2,4,6(1H,3H,5H)-트리온, 3,3',3'',5,5',5''-헥사-tert-부틸-a,a',a''-(메시틸렌-2,4,6-트리일)트리-p-크레졸, 펜타에리트리톨테트라키스[3-(3,5-디-tert-부틸-4-히드록시페닐)프로피오네이트], 2,6-디-tert-부틸-4-메틸페놀 등을 들 수 있다.Specific examples of the antioxidant include 2-tert-butyl-6- (3-tert-butyl-2-hydroxy-5-methylbenzyl) -4-methylphenylacrylate, 2- [1- (2-hydroxy -3,5-di-tert-pentylphenyl) ethyl] -4,6-di-tert-pentylphenylacrylate, 6- [3- (3-tert-butyl-4-hydroxy-5-methylphenyl) prop Foxy] -2,4,8,10-tetra-tert-butyldibenz [d, f] [1,3,2] dioxaphosphine, 3,9-bis [2- {3- (3-tert -Butyl-4-hydroxy-5-methylphenyl) propionyloxy} -1,1-dimethylethyl] -2,4,8,10-tetraoxaspiro [5.5] undecane, 2,2'-methylenebis ( 6-tert-butyl-4-methylphenol), 4,4'-butylidenebis (6-tert-butyl-3-methylphenol), 4,4'-thiobis (2-tert-butyl-5- Methylphenol), 2,2'-thiobis (6-tert-butyl-4-methylphenol), dilauryl 3,3'-thiodipropionate, dimyristyl 3,3'-thiodipropionate , Distearyl 3,3'-thiodipropionate, pentaerythritol tetrakis (3-laurylthiopropionate), 1,3,5-tris (3,5-di-te rt-butyl-4-hydroxybenzyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione, 3,3 ', 3' ', 5,5', 5 ''-hexa-tert-butyl-a, a ', a' '-(mesitylene-2,4,6-triyl) tri-p-cresol, pentaerythritol tetrakis [3- (3,5 -Di-tert-butyl-4-hydroxyphenyl) propionate], 2,6-di-tert-butyl-4-methylphenol, etc. are mentioned.
상기 자외선 흡수제로서 구체적으로는, 2-(3-tert-부틸-2-히드록시-5-메틸페닐)-5-클로로벤조트리아졸, 알콕시벤조페논 등을 들 수 있다.Specific examples of the ultraviolet absorber include 2- (3-tert-butyl-2-hydroxy-5-methylphenyl) -5-chlorobenzotriazole, alkoxybenzophenone and the like.
상기 응집 방지제로는, 구체적으로는, 폴리아크릴산 나트륨 등을 들 수 있다.As said aggregation inhibitor, sodium polyacrylate etc. are mentioned specifically ,.
상기 연쇄 이동제로는, 구체적으로 도데실메르캅탄, 2,4-디페닐-4-메틸-1-펜텐 등을 들 수 있다 Specific examples of the chain transfer agent include dodecyl mercaptan, 2,4-diphenyl-4-methyl-1-pentene, and the like.
<스페이서 및 화상 표시 장치><Spacer and image display device>
본 발명은 전술한 감광성 수지 조성물을 소정의 패턴으로 형성한 후 노광 및 현상하여 형성되는 스페이서와 이를 구비한 화상 표시 장치를 제공한다.The present invention provides a spacer formed by forming the above-described photosensitive resin composition in a predetermined pattern and then exposing and developing the same, and an image display device having the same.
화상 표시 장치용 스페이서는 예를 들어 감광성 수지 조성물을 이하와 같이 하여 기재 상에 도포하고, 광경화 및 현상하여 패턴을 형성함으로서 제조할 수있다. The spacer for an image display apparatus can be manufactured by apply | coating a photosensitive resin composition on a base material as follows, photocuring and developing, and forming a pattern, for example.
먼저, 감광성 수지 조성물을 기판(통상은 유리) 또는 먼저 형성된 감광성 수지 조성물의 고형분으로 이루어지는 층 상에 도포한 후 가열건조함으로써 용매 등의 휘발 성분을 제거하여 평활한 도막을 얻는다. First, a photosensitive resin composition is apply | coated on a board | substrate (usually glass) or the layer which consists of solid content of the photosensitive resin composition formed previously, and heat-drying removes volatile components, such as a solvent, and obtains a smooth coating film.
도포 방법으로는, 예를 들어 스핀 코트, 유연 도포법, 롤 도포법, 슬릿 앤드 스핀 코트 또는 슬릿 코트법 등에 의해 실시될 수 있다. As a coating method, it can carry out by a spin coat, cast coating method, the roll coating method, the slit and spin coat, the slit coat method, etc., for example.
도포 후 가열 건조(프리베이크), 또는 감압 건조 후에 가열하여 용매 등의 휘발 성분을 휘발시킨다. 여기에서, 가열 온도는 통상 70∼200℃, 바람직하게는 80∼130℃ 이다. 가열 건조 후의 도막 두께는 통상 1∼8㎛ 정도이다.Heating after drying (pre-baking) or drying under reduced pressure to volatilize volatile components such as a solvent. Here, heating temperature is 70-200 degreeC normally, Preferably it is 80-130 degreeC. The coating film thickness after heat drying is about 1-8 micrometers normally.
이렇게 하여 얻어진 도막에, 목적으로 하는 패턴을 형성하기 위한 마스크를 통해 자외선을 조사한다. 이 때, 노광부 전체에 균일하게 평행 광선이 조사되고, 또한 마스크와 기판의 정확한 위치 맞춤이 실시되도록, 마스크 얼라이너나 스테퍼 등의 장치를 사용하는 것이 바람직하다. 자외선을 조사하면, 자외선이 조사된 부위의 경화가 이루어진다. The coating film thus obtained is irradiated with ultraviolet rays through a mask for forming a target pattern. At this time, it is preferable to use apparatuses, such as a mask aligner and a stepper, so that the parallel light beam may be irradiated uniformly to the whole exposure part, and the exact alignment of a mask and a board | substrate is performed. When ultraviolet light is irradiated, the site to which ultraviolet light is irradiated is hardened.
상기 자외선으로는 g선(파장: 436㎚), h선, i선(파장: 365㎚) 등을 사용할 수 있다. 자외선의 조사량은 필요에 따라 적절히 선택될 수 있는 것이며, 본 발명이 이를 한정하지는 않는다. G-rays (wavelength: 436 nm), h-rays, i-rays (wavelength: 365 nm) and the like can be used as the ultraviolet rays. The irradiation dose of ultraviolet rays may be appropriately selected as necessary, and the present invention is not limited thereto.
경화가 종료된 도막을 현상액에 접촉시켜 비노광부를 용해시켜 현상하면 목적으로 하는 패턴 형상을 갖는 스페이서를 얻을 수 있다. When the coating film after hardening is contacted with a developing solution and the non-exposed part is melted and developed, the spacer which has a target pattern shape can be obtained.
상기 현상 방법은, 액첨가법, 디핑법, 스프레이법 등의 어느 것이어도 된다. 또한 현상시에 기판을 임의의 각도로 기울여도 된다.The developing method may be any of a liquid addition method, a dipping method, a spray method and the like. In addition, during development, the substrate may be tilted at an arbitrary angle.
상기 현상액은 통상 알칼리성 화합물과 계면 활성제를 함유하는 수용액이다.The developer is usually an aqueous solution containing an alkaline compound and a surfactant.
상기 알칼리성 화합물은, 무기 및 유기 알칼리성 화합물의 어느 것이어도 된다. 무기 알칼리성 화합물의 구체적인 예로는, 수산화 나트륨, 수산화 칼륨, 인산수소 2나트륨, 인산 2수소나트륨, 인산수소 2암모늄, 인산2수소암모늄, 인산 2수소칼륨, 규산 나트륨, 규산 칼륨, 탄산 나트륨, 탄산 칼륨, 탄산 수소나트륨, 탄산 수소 칼륨, 붕산 나트륨, 붕산 칼륨, 암모니아 등을 들 수 있다. 또한, 유기 알칼리성 화합물의 구체적인 예로는, 테트라메틸암모늄히드록사이드, 2-히드록시에틸트리메틸암모늄히드록사이드, 모노메틸아민, 디메틸아민, 트리메틸아민, 모노에틸아민, 디에틸아민, 트리에틸아민, 모노이소프로필아민, 디이소프로필아민, 에탄올아민 등을 들 수 있다. 이들 무기 및 유기 알칼리성 화합물은, 각각 단독으로 또는 2 종 이상 조합하여 사용할 수 있다. 알칼리 현상액 중의 알칼리성 화합물의 농도는, 바람직하게는 0.01∼10 질량%이고, 보다 바람직하게는 0.03∼5질량%이다.The alkaline compound may be either an inorganic or organic alkaline compound. Specific examples of the inorganic alkaline compound include sodium hydroxide, potassium hydroxide, sodium hydrogen phosphate, sodium dihydrogen phosphate, diammonium hydrogen phosphate, ammonium dihydrogen phosphate, potassium dihydrogen phosphate, sodium silicate, potassium silicate, sodium carbonate, potassium carbonate And sodium hydrogen carbonate, potassium hydrogen carbonate, sodium borate, potassium borate, ammonia and the like. Specific examples of the organic alkaline compound include tetramethylammonium hydroxide, 2-hydroxyethyltrimethylammonium hydroxide, monomethylamine, dimethylamine, trimethylamine, monoethylamine, diethylamine, triethylamine, Monoisopropylamine, diisopropylamine, ethanolamine and the like. These inorganic and organic alkaline compounds can be used individually or in combination of 2 or more types, respectively. The concentration of the alkaline compound in the alkaline developer is preferably 0.01 to 10% by mass, more preferably 0.03 to 5% by mass.
상기 알칼리 현상액 중의 계면 활성제는 비 이온계 계면 활성제, 음이온계 계면 활성제 또는 양이온계 계면 활성제로 이루어진 군으로부터 선택되는 적어도 하나를 사용할 수 있다.The surfactant in the alkaline developer may be at least one selected from the group consisting of nonionic surfactants, anionic surfactants or cationic surfactants.
상기 비이온계 계면 활성제의 구체적인 예로는 폴리옥시에틸렌알킬에테르, 폴리옥시에틸렌아릴에테르, 폴리옥시에틸렌알킬아릴에테르, 그 밖의 폴리옥시에틸렌 유도체, 옥시에틸렌/옥시프로필렌 블록 공중합체, 소르비탄지방산에스테르, 폴리옥시에틸렌소르비탄지방산에스테르, 폴리옥시에틸렌소르비톨지방산에스테르, 글리세린지방산에스테르, 폴리옥시에틸렌지방산에스테르, 폴리옥시에틸렌알킬아민 등을 들 수 있다.Specific examples of the nonionic surfactant include polyoxyethylene alkyl ether, polyoxyethylene aryl ether, polyoxyethylene alkyl aryl ether, other polyoxyethylene derivatives, oxyethylene / oxypropylene block copolymers, sorbitan fatty acid esters, Polyoxyethylene sorbitan fatty acid ester, polyoxyethylene sorbitol fatty acid ester, glycerin fatty acid ester, polyoxyethylene fatty acid ester, polyoxyethylene alkylamine and the like.
상기 음이온계 계면 활성제의 구체적인 예로는 라우릴알코올황산에스테르나트륨이나 올레일알코올황산에스테르나트륨 등의 고급 알코올 황산에스테르염류, 라우릴황산나트륨이나 라우릴황산암모늄 등의 알킬황산염류, 도데실벤젠술폰산나트륨이나 도데실나프탈렌술폰산나트륨 등의 알킬아릴술폰산염류 등을 들 수 있다.Specific examples of the anionic surfactants include higher alcohol sulfate ester salts such as sodium lauryl alcohol sulfate and sodium oleyl alcohol sulfate, alkyl sulfates such as sodium lauryl sulfate and ammonium lauryl sulfate, sodium dodecylbenzene sulfonate, Alkyl aryl sulfonates, such as sodium dodecyl naphthalene sulfonate, etc. are mentioned.
상기 양이온계 계면 활성제의 구체적인 예로는 스테아릴아민염산염이나 라우릴트리메틸암모늄클로라이드 등의 아민염 또는 4급 암모늄염 등을 들 수 있다.Specific examples of the cationic surfactant include amine salts such as stearylamine hydrochloride and lauryl trimethylammonium chloride, or quaternary ammonium salts.
이들 계면 활성제는 각각 단독으로 또는 2종 이상 조합하여 사용할 수 있다.These surfactant can be used individually or in combination of 2 or more types, respectively.
상기 현상액 중의 계면 활성제의 농도는, 통상 0.01 내지 10질량%, 바람직하게는 0.05 내지 8 질량%, 보다 바람직하게는 0.1 내지 5 질량%이다.The concentration of the surfactant in the developer is usually 0.01 to 10% by mass, preferably 0.05 to 8% by mass, more preferably 0.1 to 5% by mass.
현상 후, 수세하고, 또한 필요에 따라 150∼230℃에서 10 내지 60분의 포스트베이크를 실시할 수 있다. After image development, it washes with water and can carry out post-baking for 10 to 60 minutes at 150-230 degreeC as needed.
본 발명의 감광성 수지 조성물에 있어서, (A-1) 수지의 에폭기 개환반응은 스페이서 형성 공정 중 가열 환경에서 진행될 수 있으며, 예를 들면 포스트베이크 공정에서 진행될 수 있다.In the photosensitive resin composition of the present invention, the epoxide ring-opening reaction of the resin (A-1) may be performed in a heating environment during the spacer forming process, for example, may be performed in a postbaking process.
본 발명의 감광성 수지 조성물을 사용하고, 이상과 같은 각 공정을 거쳐 기판 상 또는 컬러 필터 기판 상에 패턴을 형성할 수 있다. 이 패턴은 표시 장치에 사용되는 포토스페이서로서 유용하다. Using the photosensitive resin composition of this invention, a pattern can be formed on a board | substrate or a color filter substrate through each process as mentioned above. This pattern is useful as a photospacer used for a display device.
따라서, 이렇게 해서 얻어지는 패턴을 갖는 스페이서는 액정 표시 장치 등의 화상 표시 장치에 유용하게 사용될 수 있으며, 특히 터치패널에 적용시 기존 스페이서와 유사한 탄성 회복률을 가지면서도 가교 밀도가 높아 우수한 기계적 특성을 가지며 외부 압력에 변형이 적은 딱딱한 특성을 갖는다. Therefore, the spacer having the pattern thus obtained may be usefully used for an image display device such as a liquid crystal display device. In particular, when applied to a touch panel, the spacer having an elastic recovery rate similar to that of a conventional spacer, but having a high crosslinking density, has excellent mechanical properties. Hardness with little deformation in pressure.
이하, 본 발명의 이해를 돕기 위하여 바람직한 실시예를 제시하나, 이들 실시예는 본 발명을 예시하는 것일 뿐 첨부된 특허청구범위를 제한하는 것이 아니며, 본 발명의 범주 및 기술사상 범위 내에서 실시예에 대한 다양한 변경 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속하는 것도 당연한 것이다.Hereinafter, preferred examples are provided to aid the understanding of the present invention, but these examples are merely illustrative of the present invention and are not intended to limit the scope of the appended claims, which are within the scope and spirit of the present invention. It is apparent to those skilled in the art that various changes and modifications can be made to the present invention, and such modifications and changes belong to the appended claims.
<합성예 1: 알칼리 가용성 수지 (A-a)의 합성>Synthesis Example 1 Synthesis of Alkali-Soluble Resin (A-a)
교반기, 온도계 환류 냉각관, 적하 로트 및 질소 도입관을 구비한 플라스크를 준비하고, 한편, 모노머 적하 로트로서, 3,4-에폭시트리시클로데칸-8-일(메타)아크릴레이트(화학식 1)와 3,4-에폭시트리시클로데칸-9-일(메타)아크릴레이트(화학식 2)의 혼합물(50:50 몰비) 20중량부, 4-하이드록시부틸 아크릴레이트 글리시딜 에테르 20중량부, 메틸메타크릴레이트 50중량부, 아크릴산 40중량부, 비닐톨루엔 70중량부, t-부틸퍼옥시-2-에틸헥사노에이트 4중량부, 프로필렌글리콜모노메틸에테르아세테이트(PGMEA) 40중량부를 투입후 교반 혼합하여 준비하고, 연쇄 이동제 적하조로서, n-도데칸티올 6중량부, PGMEA 24중량부를 넣고 교반 혼합한 것을 준비했다. 이후 플라스크에 PGMEA 395중량부를 도입하고 플라스크내 분위기를 공기에서 질소로 한 후 교반하면서 플라스크의 온도를 90℃까지 승온했다. 이어서 모노머 및 연쇄 이동제를 적하 로트로부터 적하를 개시했다. 적하는, 90℃를 유지하면서, 각각 2 시간동안 동안 진행하고 1 시한 후에 110℃ 승온하여 5 시간동안 유지하고, 고형분 산가가 75㎎KOH/g인 수지(A-a)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 17,000이고, 분자량 분포(Mw/Mn)는 2.3이었다.A flask equipped with a stirrer, a thermometer reflux condenser, a dropping lot, and a nitrogen introduction tube was prepared, and as a monomer dropping lot, 3,4-epoxytricyclodecane-8-yl (meth) acrylate (Formula 1) and 20 parts by weight of a mixture of 3,4-epoxytricyclodecane-9-yl (meth) acrylate (Formula 2) (50:50 molar ratio), 20 parts by weight of 4-hydroxybutyl acrylate glycidyl ether, methylmetha 50 parts by weight of acrylate, 40 parts by weight of acrylic acid, 70 parts by weight of vinyltoluene, 4 parts by weight of t-butylperoxy-2-ethylhexanoate, 40 parts by weight of propylene glycol monomethyl ether acetate (PGMEA), and then stirred and mixed Prepared and prepared by stirring and mixing 6 parts by weight of n-dodecanethiol and 24 parts by weight of PGMEA as a chain transfer agent dropping tank. Thereafter, 395 parts by weight of PGMEA was introduced into the flask, the atmosphere in the flask was changed to nitrogen from air, and the temperature of the flask was raised to 90 ° C. while stirring. Subsequently, dropping of the monomer and the chain transfer agent was started from the dropping lot. The dropwise addition was carried out for 2 hours while maintaining 90 ° C, and after 1 hour, the temperature was raised to 110 ° C and maintained for 5 hours to obtain a resin (A-a) having a solid acid value of 75 mgKOH / g. The weight average molecular weight of polystyrene conversion measured by GPC was 17,000, and molecular weight distribution (Mw / Mn) was 2.3.
<합성예 2: 알칼리 가용성 수지 (A-b)의 합성>Synthesis Example 2: Synthesis of Alkali-Soluble Resin (A-b)
교반기, 온도계 환류 냉각관, 적하 로트 및 질소 도입관을 구비한 플라스크를 준비하고, 한편, 모노머 적하 로트로서, 3,4-에폭시트리시클로데칸-8-일(메타)아크릴레이트와 3,4-에폭시트리시클로데칸-9-일(메타)아크릴레이트의 혼합물(50:50 몰비) 30중량부, 4-하이드록시부틸 아크릴레이트 글리시딜 에테르 30중량부, 메틸메타크릴레이트 50중량부, 아크릴산 40중량부, 벤질말레이미드 50중량부, t-부틸퍼옥시-2-에틸헥사노에이트 4중량부, 프로필렌글리콜모노메틸에테르아세테이트 40중량부를 투입후 교반 혼합하여 준비하고, 연쇄 이동제 적하조로서, n-도데칸티올 6중량부, PGMEA 24중량부를 넣고 교반 혼합한 것을 준비했다. 이후 플라스크에 PGMEA 395중량부를 도입하고 플라스크내 분위기를 공기에서 질소로 한 후 교반하면서 플라스크의 온도를 90℃까지 승온했다. 이어서 모노머 및 연쇄 이동제를 적하 로트로부터 적하를 개시했다. 적하는, 90℃를 유지하면서, 각각 2 시간 동안 진행하고 1 시간 후에 110℃ 승온하여 5 시간동안 유지하고, 고형분 산가가 73㎎KOH/g인 수지(A-b)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 18,000이고, 분자량 분포(Mw/Mn)는 2.2이었다.A flask equipped with a stirrer, a thermometer reflux condenser, a dropping lot, and a nitrogen introduction tube was prepared, and as a monomer dropping lot, 3,4-epoxycyclodecane-8-yl (meth) acrylate and 3,4- 30 parts by weight of a mixture of epoxytricyclodecane-9-yl (meth) acrylate (50:50 molar ratio), 30 parts by weight of 4-hydroxybutyl acrylate glycidyl ether, 50 parts by weight of methyl methacrylate, acrylic acid 40 Part by weight, 50 parts by weight of benzyl maleimide, 4 parts by weight of t-butylperoxy-2-ethylhexanoate, 40 parts by weight of propylene glycol monomethyl ether acetate, and prepared by stirring and mixing, n as a chain transfer agent dropping tank, -6 parts by weight of dodecanethiol and 24 parts by weight of PGMEA were added to prepare a mixture of stirring. Thereafter, 395 parts by weight of PGMEA was introduced into the flask, the atmosphere in the flask was changed to nitrogen from air, and the temperature of the flask was raised to 90 ° C. while stirring. Subsequently, dropping of the monomer and the chain transfer agent was started from the dropping lot. The dropwise addition was performed for 2 hours while maintaining 90 ° C, and after 1 hour, the temperature was raised to 110 ° C and maintained for 5 hours to obtain a resin (A-b) having a solid acid value of 73 mgKOH / g. The weight average molecular weight of polystyrene conversion measured by GPC was 18,000, and molecular weight distribution (Mw / Mn) was 2.2.
<합성예 3: 알칼리 가용성 수지(A-c)의 합성>Synthesis Example 3: Synthesis of Alkali-Soluble Resin (A-c)
4-하이드록시부틸 아크릴레이트 글리시딜 에테르 대신 2-프로페노익 애시드,4-(4-옥시라닐부톡시)부틸 에테르를 첨가한 것을 제외하고는 합성예 1과 동일하게 수행하여, 고형분 산가가 72㎎KOH/g인 수지(A-c)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 16,700이고, 분자량 분포(Mw/Mn)는 2.2이었다.The solid acid value was the same as in Synthesis Example 1, except that 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether was added instead of 4-hydroxybutyl acrylate glycidyl ether. Resin (Ac) which was 72 mgKOH / g was obtained. The weight average molecular weight of polystyrene conversion measured by GPC was 16,700, and molecular weight distribution (Mw / Mn) was 2.2.
<합성예 4: 알칼리 가용성 수지(A-d)의 합성>Synthesis Example 4: Synthesis of Alkali-Soluble Resin (A-d)
4-하이드록시부틸아크릴레이트글리시딜에테르 대신 6-하이드록시헥실 아크릴레이트 글리시딜 에테르를 첨가한 것을 제외하고는 합성예 1과 동일하게 수행하여, 고형분 산가가 73㎎KOH/g인 수지(A-d)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 16,500이고, 분자량 분포(Mw/Mn)는 2.2이었다.A resin having a solid acid value of 73 mgKOH / g was prepared in the same manner as in Synthesis Example 1 except that 6-hydroxyhexyl acrylate glycidyl ether was added instead of 4-hydroxybutyl acrylate glycidyl ether. Ad) was obtained. The weight average molecular weight of polystyrene conversion measured by GPC was 16,500, and molecular weight distribution (Mw / Mn) was 2.2.
<합성예 5: 알칼리 가용성 수지(A-e)의 합성>Synthesis Example 5 Synthesis of Alkali-Soluble Resin (A-e)
4-하이드록시부틸 아크릴레이트 글리시딜 에테르 대신 2-에틸-3-옥세타닐 메틸메타크릴레이트를 첨가한 것을 제외하고는 합성예 1과 동일하게 수행하여, 고형분 산가가 73㎎KOH/g인 수지(A-e)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 16,500이고, 분자량 분포(Mw/Mn)는 2.1이었다.The same procedure as in Synthesis Example 1 was conducted except that 2-ethyl-3-oxetanyl methyl methacrylate was added instead of 4-hydroxybutyl acrylate glycidyl ether to have a solid acid value of 73 mgKOH / g. Resin (Ae) was obtained. The weight average molecular weight of polystyrene conversion measured by GPC was 16,500, and molecular weight distribution (Mw / Mn) was 2.1.
<합성예 6: 알칼리 가용성 수지(A-f)의 합성>Synthesis Example 6 Synthesis of Alkali-Soluble Resin (A-f)
4-하이드록시부틸 아크릴레이트 글리시딜 에테르 대신 글리시딜메타크릴레이트를 첨가한 것을 제외하고는 합성예 1과 동일하게 수행하여, 고형분 산가가 74㎎KOH/g인 수지(A-f)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 17,300이고, 분자량 분포(Mw/Mn)는 2.3이었다.The same procedure as in Synthesis Example 1 was conducted except that glycidyl methacrylate was added instead of 4-hydroxybutyl acrylate glycidyl ether to obtain a resin (A-f) having a solid acid value of 74 mgKOH / g. The weight average molecular weight of polystyrene conversion measured by GPC was 17,300, and molecular weight distribution (Mw / Mn) was 2.3.
<합성예 7: 알칼리 가용성 수지(A-g)의 합성>Synthesis Example 7: Synthesis of Alkali-Soluble Resin (A-g)
4-하이드록시부틸 아크릴레이트 글리시딜 에테르를 첨가하지 않고, 3,4-에폭시트리시클로데칸-8-일 (메타)아크릴레이트(화학식1)와 3,4-에폭시트리시클로데칸-9-일(메타)아크릴레이트 (화학식 2)의 혼합물(50:50 몰비) 40중량부 사용하는 것을 제외하고는 합성예 1과 동일하게 수행하여, 고형분 산가가 73㎎KOH/g인 수지(A-g)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 18,200이고, 분자량 분포(Mw/Mn)는 2.2이었다.3,4-Epoxytricyclodecane-8-yl (meth) acrylate (Formula 1) and 3,4-epoxytricyclodecane-9-yl without adding 4-hydroxybutyl acrylate glycidyl ether A mixture of (meth) acrylate (Formula 2) (50:50 molar ratio) was carried out in the same manner as in Synthesis Example 1 except that 40 parts by weight of a solid (acid) had a solid acid value of 73 mgKOH / g (Ag). . The weight average molecular weight of polystyrene conversion measured by GPC was 18,200, and molecular weight distribution (Mw / Mn) was 2.2.
<합성예 8: 알칼리 가용성 수지(A-h)의 합성>Synthesis Example 8: Synthesis of Alkali-Soluble Resin (A-h)
4-하이드록시부틸 아크릴레이트 글리시딜 에테르를 첨가하지 않고, 3,4-에폭시트리시클로데칸-8-일 (메타)아크릴레이트(화학식1)와 3,4-에폭시트리시클로데칸-9-일(메타)아크릴레이트 (화학식 2)의 혼합물(50:50 몰비) 60중량부 사용하는 것을 제외하고는 합성예 2와 동일하게 수행하여, 고형분 산가가 73㎎KOH/g인 수지(A-h)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 18,000이고, 분자량 분포(Mw/Mn)는 2.4이었다.3,4-Epoxytricyclodecane-8-yl (meth) acrylate (Formula 1) and 3,4-epoxytricyclodecane-9-yl without adding 4-hydroxybutyl acrylate glycidyl ether A mixture of (meth) acrylate (Formula 2) (50:50 molar ratio) was carried out in the same manner as in Synthesis Example 2 except for using 60 parts by weight, to obtain a resin (Ah) having a solid acid value of 73 mgKOH / g. . The weight average molecular weight of polystyrene conversion measured by GPC was 18,000, and molecular weight distribution (Mw / Mn) was 2.4.
<합성예 9: 알칼리 가용성 수지(A-i)의 합성>Synthesis Example 9: Synthesis of Alkali-Soluble Resin (A-i)
4-하이드록시부틸아크릴레이트글리시딜에테르 대신 3,4-에폭시시클로헥실(메타)아크릴레이트를 첨가한 것를 첨가한 것을 제외하고는 합성예 1과 동일하게 수행하여, 고형분 산가가 74㎎KOH/g인 수지(A-i)를 얻었다. GPC에 의해 측정한 폴리스티렌 환산의 중량 평균 분자량은 17,800이고, 분자량 분포(Mw/Mn)는 2.3이었다.The solid acid value was 74 mgKOH / in the same manner as in Synthesis Example 1, except that 3,4-epoxycyclohexyl (meth) acrylate was added instead of 4-hydroxybutyl acrylate glycidyl ether. Resin (Ai) which is g was obtained. The weight average molecular weight of polystyrene conversion measured by GPC was 17,800, and molecular weight distribution (Mw / Mn) was 2.3.
상기 알칼리 가용성 수지의 중량평균분자량(Mw) 및 수평균분자량(Mn)의 측정에 대해서는 GPC법을 이용하여 이하의 조건으로 행하였다.About the measurement of the weight average molecular weight (Mw) and number average molecular weight (Mn) of the said alkali-soluble resin, it carried out on condition of the following using GPC method.
장치 : HLC-8120GPC(도소㈜ 제조)Equipment: HLC-8120GPC (manufactured by Tosoh Corporation)
칼럼 : TSK-GELG4000HXL + TSK-GELG2000HXL(직렬 접속)Column: TSK-GELG4000HXL + TSK-GELG2000HXL (Serial Connection)
칼럼 온도 : 40℃Column temperature: 40 ℃
이동상 용매 : 테트라히드로퓨란Mobile phase solvent: tetrahydrofuran
유속 : 1.0 ㎖/분Flow rate: 1.0 ml / min
주입량 : 50 ㎕Injection volume: 50 μl
검출기 : RIDetector: RI
측정 시료 농도 : 0.6 질량%(용매 = 테트라히드로퓨란)Measurement sample concentration: 0.6 mass% (solvent = tetrahydrofuran)
교정용 표준 물질 : TSK STANDARD POLYSTYRENE F-40, F-4, F-1, A-2500, A-500(도소㈜ 제조)Calibration standard: TSK STANDARD POLYSTYRENE F-40, F-4, F-1, A-2500, A-500 (manufactured by Tosoh Corporation)
상기에서 얻어진 중량평균분자량 및 수평균분자량의 비를 분자량 분포 (Mw/Mn)로 하였다.The ratio of the weight average molecular weight and number average molecular weight obtained above was made into molecular weight distribution (Mw / Mn).
<스페이서 형성용 감광성 수지 조성물의 제조><Production of Photosensitive Resin Composition for Spacer Formation>
하기 표 1에 기재된 성분 및 조성으로 스페이서 형성용 감광성 수지 조성물을 제조하였다(단위는 중량부).The photosensitive resin composition for spacer formation was produced with the component and composition of following Table 1 (unit is a weight part).
표 1
Figure PCTKR2014004775-appb-T000001
Table 1
Figure PCTKR2014004775-appb-T000001
<시험예><Test Example>
가로 세로 2 인치의 유리 기판(이글 2000; 코닝사 제조)을 중성 세제, 물 및 알코올로 순차 세정한 후 건조하였다. 이 유리 기판 상에 상기 실시예 및 비교예에서 제조된 감광성 수지 조성물을 각각 스핀 코팅한 다음 클린오븐 중에서 90℃에서 3 분간 프리베이크하였다. 상기 프리베이크한 기판을 상온으로 냉각 후 석영 유리제 포토마스크와의 간격을 150㎛로 하여 노광기 (TME-150RSK ; 톱콘 (주) 제조)를 사용하여 60mJ/㎠의 노광량(405㎚ 기준)으로 광을 조사하였다. 이 때의 중합성 수지 조성물에 대한 조사는, 초고압 수은등으로부터의 방사광을, 광학 필터 (LU0400 ; 아사히 분광 (주) 제조) 를 통과시키고, 400㎚ 이하의 광을 커트하여 사용하였다. 이때 포토마스크는 다음 패턴이 동일 평면 상에 형성된 포토마스크가 사용되었다. A glass substrate (Eagle 2000; manufactured by Corning Corporation) having a length and width of 2 inches was washed sequentially with a neutral detergent, water, and alcohol, and dried. The photosensitive resin compositions prepared in Examples and Comparative Examples were spin coated on the glass substrate, respectively, and then prebaked at 90 ° C. for 3 minutes in a clean oven. After cooling the prebaked substrate to room temperature, the distance from the quartz glass photomask was 150 μm, and light was emitted at an exposure amount (405 nm standard) of 60 mJ / cm 2 using an exposure machine (TME-150RSK; manufactured by Topcon Co., Ltd.). Investigate. The irradiation to the polymerizable resin composition at this time passed the light emitted from the ultra-high pressure mercury lamp through an optical filter (LU0400; manufactured by Asahi Spectro Co., Ltd.), and cut and used light of 400 nm or less. In this case, a photomask in which the next pattern was formed on the same plane was used.
하나의 변이 10㎛ 인 정사각형의 투광부 (패턴) 를 가지며, 당해 정사각형의 간격이 100㎛. 광조사 후 비이온계 계면활성제 0.12%와 수산화칼륨 0.04%를 함유하는 수계 현상액에 상기 도막을 25℃ 에서 100초간 침지하여 현상하고, 수세 후 오븐 중에서, 220℃에서 20분간 포스트베이크를 실시하였다. 얻어진 막두께는 3㎛이었다. 막두께는 막두께 측정장치(DEKTAK 6M; Veeco사 제조)를 사용하여 측정하였다. 이렇게 얻어진 패턴을 아래와 같이 물성 평가를 실시하고, 그 결과를 하기 표 2에 나타내었다.One side has a square light-transmitting part (pattern) which is 10 micrometers, and the said space | interval is 100 micrometers. After the light irradiation, the coating film was immersed in an aqueous developer containing 0.12% of a nonionic surfactant and 0.04% of potassium hydroxide for 100 seconds at 25 ° C for development. After washing with water, postbaking was carried out at 220 ° C for 20 minutes in an oven. The obtained film thickness was 3 micrometers. The film thickness was measured using a film thickness measuring device (DEKTAK 6M; manufactured by Veeco). The physical properties were evaluated for the pattern thus obtained as follows, and the results are shown in Table 2 below.
1. Pattern의 CD-bias 1. CD-bias of Pattern
상기에서 얻어진 막두께 3.0㎛에서의 Pattern Size를 3차원 형상측정장치(SIS-2000 system; SNU Precision사 제조)를 사용하여 측정하고, Mask Size와의 차이를 CD-bias로 아래와 같이 산출한다. CD-bias는 0에 근접할수록 양호하며,(+)는 Pattern이 마스크보다 Size가 크고 (-)는 마스크보다 Size가 작음을 의미한다.The pattern size at the film thickness of 3.0 mu m obtained above was measured using a three-dimensional shape measuring apparatus (SIS-2000 system; manufactured by SNU Precision), and the difference from the Mask Size was calculated as CD-bias as follows. CD-bias is better as it is closer to 0, and (+) means that the pattern is larger in size than the mask and (-) is smaller in size than the mask.
CD-bias=(형성된 Pattern Size)-(형성시 사용한 Mask Size)CD-bias = (Formed Pattern Size)-(Mask Size used during formation)
2. 선폭, 단면 형상2. Line width, cross-sectional shape
상기에서 얻어진 경화막을 주사형 전자 현미경(S-4600 ; (주) 히타치 제작소사 제조)을 사용하여 Mask 14㎛에 의해 형성된 패턴의 선폭을 측정하였으며, 단면 형상을 아래와 같이 평가하였다. 단면 형상은 기판에 대한 패턴의 각도가 90도 미만이면 순테이퍼로서, 90도 이상일 때를 역테이퍼로서 판단하였다.The line width of the pattern formed by Mask 14 micrometers was measured for the cured film obtained above using the scanning electron microscope (S-4600; the Hitachi company make), and the cross-sectional shape was evaluated as follows. The cross-sectional shape was judged as a forward taper when the angle of the pattern with respect to the board | substrate was less than 90 degree, and when it was 90 degree or more as a reverse taper.
순테이퍼이면, 표시 장치의 형성시에 ITO 배선의 단선이 일어나기 어렵기 때문에 바람직하다.A forward taper is preferable because disconnection of the ITO wiring hardly occurs at the time of forming the display device.
3. 기계 특성(총 변위량 및 회복률)3. Mechanical characteristics (total displacement and recovery rate)
상기에서 얻어진 경화막을 다이나믹 초미소 경도계 (HM-2000; Helmut Fischer GmbH+Co.KG)를 사용하여 그 총 변위량(㎛) 및 탄성 변위량(㎛)을 아래의 측정조건에 따라 측정하였으며, 측정된 수치들을 사용하여 아래와 같이 회복률(%)을 산출하였다. 총변위량이 적으면서 회복률이 크면 딱딱하다고 판단하였다.The cured film obtained above was measured using a dynamic ultra-fine hardness tester (HM-2000; Helmut Fischer GmbH + Co.KG) to measure the total amount of displacement (μm) and the amount of elastic displacement (μm) according to the following measurement conditions. The recovery rate was calculated as follows. It was judged that the total recovery was hard and the recovery rate was large.
회복률(%) = [탄성 변위량(㎛)]/[총 변위량(㎛)] × 100Recovery rate (%) = [elastic displacement (μm)] / [total displacement (μm)] × 100
측정 조건은 다음과 같다.Measurement conditions are as follows.
시험 모드 ; Load-Unload 시험Test mode; Load-Unload Test
시험력 ; 50.0mNTest force; 50.0mN
부하 속도 ; 4.41mN/secLoad speed; 4.41mN / sec
유지 시간 ; 5secHolding time; 5sec
압자 ; 사각뿔대 압자 (직경 50㎛)Indenter; Square pyramid indenter (50㎛ diameter)
4. 누적 기계 특성(누적 회복률)4. Cumulative mechanical characteristics (cumulative recovery rate)
상기에서 얻어진 경화막을 다이나믹 초미소 경도계 (HM-2000; Helmut Fischer GmbH+Co.KG)를 사용하여, 동일한 패턴을 아래의 조건에 따라 10회 반복하여 하중을 가하고, 하중 전/후의 Pattern 높이 변화량을 3차원 형상측정장치(SIS-2000 system; SNU Precision사 제조)를 사용하여 측정한다.Using the cured film obtained above, a dynamic ultra-micro hardness tester (HM-2000; Helmut Fischer GmbH + Co.KG) was applied to the same pattern 10 times under the following conditions, and the load was applied. Measurement is performed using a three-dimensional shape measuring device (SIS-2000 system; manufactured by SNU Precision).
하중 전/후의 높이 변화량이 적을수록 누적 회복률이 우수하다고 판단하였다.The smaller the change in height before and after the load, the better the cumulative recovery rate.
측정 조건은 다음과 같다.Measurement conditions are as follows.
시험 모드 ; Load-Unload 시험Test mode; Load-Unload Test
시험력 ; 50.0mNTest force; 50.0mN
부하 속도 ; 4.41mN/secLoad speed; 4.41mN / sec
유지 시간 ; 5secHolding time; 5sec
압자 ; 사각뿔대 압자 (직경 50㎛)Indenter; Square pyramid indenter (50㎛ diameter)
횟수: 10회Count: 10
5. 감도5. Sensitivity
현상 밀착성은 지름(size)이 5㎛부터 20㎛까지 1㎛ 간격의 원형 패턴이 각각 1000개가 있는 포토마스크에 의해 막두께가 3㎛로 형성된 패턴이 결락없이 100% 남아있는 Mask의 Size를 현미경으로 평가하였다. Mask의 Size가 작을수록 감도가 우수하다.Development adhesiveness is the size of the mask with 100% of the pattern formed with the thickness of 3㎛ by the photomask with 1000 circular patterns with the diameter of 1㎛ interval from 5㎛ to 20㎛. Evaluated. The smaller the size of the mask, the better the sensitivity.
표 2
Figure PCTKR2014004775-appb-T000002
TABLE 2
Figure PCTKR2014004775-appb-T000002
상기 표 2를 참고하면, 본 발명에 따른 제2 수지를 포함하는 실시예들의 경우, 이를 포함하지 않는 비교예들에 비하여 기계적 특성이 우수한 것을 확인할 수 있다. 또한, 저노광량에서 기판에 대한 밀착성 및 패턴형상이 양호하고, 탄성회복율이 우수하면서 총변위량이 적은 기계적 특성을 가질 뿐만 아니라 감도가 양호한 것을 확인할 수 있다.Referring to Table 2, in the case of the embodiment including the second resin according to the present invention, it can be confirmed that the mechanical properties are superior to the comparative examples that do not include it. In addition, it can be confirmed that the adhesion and the pattern shape to the substrate is good at a low exposure amount, the elastic recovery rate is excellent, the mechanical displacement is small, and the sensitivity is good.
특히, 에테르 결합을 갖는 (A-3)화합물을 사용한 본 발명의 경우, 에테르 결합을 갖지 않는 비교예들에 비해 누적 기계적 특성이 현저하게 우수한 것을 확인할 수 있다.In particular, in the case of the present invention using the compound (A-3) having an ether bond, it can be seen that the cumulative mechanical properties are significantly superior to the comparative examples without an ether bond.

Claims (7)

  1. 알칼리 가용성 수지, 광중합성 화합물, 광중합 개시제 및 용매를 포함하는 감광성 수지 조성물로서, As a photosensitive resin composition containing alkali-soluble resin, a photopolymerizable compound, a photoinitiator, and a solvent,
    상기 알칼리 가용성 수지는 (A-1)불포화 결합과 카르복시기를 갖는 화합물, (A-2)하기 화학식 1 내지 화학식 2 중 적어도 1종인 화합물 및 (A-3)하기 화학식 3의 화합물을 포함하여 공중합된 수지인 스페이서 형성용 감광성 수지 조성물:The alkali-soluble resin is copolymerized to include a compound having a (A-1) unsaturated bond and a carboxyl group, (A-2) at least one of the following formulas (1) to (2) and (A-3) a compound of the formula (3) Photosensitive resin composition for spacer formation which is resin:
    [화학식 1][Formula 1]
    Figure PCTKR2014004775-appb-I000047
    Figure PCTKR2014004775-appb-I000047
    (식 중, R1은 수소, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬 또는 시클로알킬이고; R2는 단일결합, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬렌 또는 시클로알킬렌이고; 상기 R1 및 R2는 서로 독립적으로 히드록시기로 치환될 수 있음)Wherein R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms; R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group)
    [화학식 2][Formula 2]
    Figure PCTKR2014004775-appb-I000048
    Figure PCTKR2014004775-appb-I000048
    (식 중, R1은 수소, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬 또는 시클로알킬이고; R2는 단일결합, 또는 헤테로 원자가 포함되거나 포함되지 않은 탄소수 1-20의 알킬렌 또는 시클로알킬렌이고; 상기 R1 및 R2는 서로 독립적으로 히드록시기로 치환될 수 있음)Wherein R 1 is hydrogen or alkyl or cycloalkyl having 1 to 20 carbon atoms, with or without heteroatoms; R 2 is a single bond or alkylene having 1 to 20 carbon atoms, with or without heteroatoms or Cycloalkylene; wherein R 1 and R 2 may be independently substituted with a hydroxy group)
    [화학식 3][Formula 3]
    Figure PCTKR2014004775-appb-I000049
    Figure PCTKR2014004775-appb-I000049
    (식 중, R1은 수소, 탄소수 1 내지 10의 알킬 또는 탄소수 3 내지 10의 시클로알킬이고, 상기 알킬 및 시클로알킬은 서로 독립적으로 헤테로 원자가 포함될 수 있으며,(Wherein R 1 is hydrogen, alkyl of 1 to 10 carbon atoms or cycloalkyl of 3 to 10 carbon atoms, and the alkyl and cycloalkyl may independently include a hetero atom,
    R2, 및 R3는 서로 독립적으로 탄소수 1 내지 20의 직쇄 또는 분지쇄인 알킬렌이며, R 2, and R 3 are each independently a linear or branched alkylene having 1 to 20 carbon atoms,
    상기 R1, R2 및 R3는 서로 독립적으로 히드록시기로 더 치환될 수 있음)R 1 , R 2 and R 3 may be further substituted with a hydroxyl group independently of each other)
  2. 청구항 1에 있어서, 상기 화학식 3의 R1은 수소, 메틸기, 에틸기, n-프로필기, 이소프로필기, n-부틸기, sec-부틸기, tert-부틸기, 히드록시메틸기, 1-히드록시에틸기, 2-히드록시에틸기, 1-히드록시-n-프로필기, 2-히드록시-n-프로필기, 3-히드록시-n-프로필기, 1-히드록시-이소프로필기, 2-히드록시-이소프로필기, 1-히드록시-n-부틸기, 2-히드록시-n-부틸기, 3-히드록시-n-부틸기 및 4-히드록시-n-부틸기로 이루어진 군에서 선택되는 어느 하나인, 스페이서 형성용 감광성 수지 조성물.The method according to claim 1, R 1 of the formula (3) is hydrogen, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, hydroxymethyl group, 1-hydroxy Ethyl group, 2-hydroxyethyl group, 1-hydroxy-n-propyl group, 2-hydroxy-n-propyl group, 3-hydroxy-n-propyl group, 1-hydroxy-isopropyl group, 2-hydroxy Hydroxy-isopropyl group, 1-hydroxy-n-butyl group, 2-hydroxy-n-butyl group, 3-hydroxy-n-butyl group and 4-hydroxy-n-butyl group The photosensitive resin composition for spacer formation which is either.
  3. 청구항 1에 있어서, 상기 화학식 3의 R2 및 R3은 서로 독립적으로 메틸렌기, 에틸렌기, 프로필렌기, 부틸렌기, 테트라메틸렌기, 에틸에틸렌기 및 펜타메틸렌기으로 이루어진 군에서 선택되는 어느 하나인, 스페이서 형성용 감광성 수지 조성물.The method according to claim 1, R 2 and R 3 of the formula 3 is independently of each other any one selected from the group consisting of methylene group, ethylene group, propylene group, butylene group, tetramethylene group, ethylethylene group and pentamethylene group , Photosensitive resin composition for spacer formation.
  4. 청구항 1에 있어서, 상기 (A-3) 화합물은 2-하이드록시에틸 아크릴레이트 글리시딜 에테르; 2-하이드록시에틸 메타크릴레이트 글리시딜 에테르; 4-하이드록시부틸 아크릴레이트 글리시딜 에테르; 4-하이드록시부틸 메타크릴레이트 글리시딜 에테르; 6-하이드록시헥실 아크릴레이트 글리시딜 에테르; 6-하이드록시헥실 메타크릴레이트 글리시딜 에테르; 2-프로페노익 애시드,2-(2-옥시라닐에톡시)에틸 에테르 및 2-프로페노익 애시드,4-(4-옥시라닐부톡시)부틸 에테르로 이루어진 군에서 선택되는 적어도 하나인, 스페이서 형성용 감광성 수지 조성물.The method of claim 1, wherein the compound (A-3) is 2-hydroxyethyl acrylate glycidyl ether; 2-hydroxyethyl methacrylate glycidyl ether; 4-hydroxybutyl acrylate glycidyl ether; 4-hydroxybutyl methacrylate glycidyl ether; 6-hydroxyhexyl acrylate glycidyl ether; 6-hydroxyhexyl methacrylate glycidyl ether; A spacer that is at least one selected from the group consisting of 2-propenoic acid, 2- (2-oxyranylethoxy) ethyl ether and 2-propenoic acid, 4- (4-oxyranylbutoxy) butyl ether Photosensitive resin composition for formation.
  5. 청구항 1에 있어서, 상기 알칼리 가용성 수지는 (A-1) 화합물로부터 유도되는 구성 단위 5 내지 80몰%, (A-2) 화합물로부터 유도되는 구성 단위 10 내지 85몰% 및 (A-3) 화합물로부터 유도되는 구성 단위 10 내지 85몰%를 포함하는 스페이서 형성용 감광성 수지 조성물.The method of claim 1, wherein the alkali-soluble resin is 5 to 80 mol% of the structural units derived from the compound (A-1), 10 to 85 mol% of the structural units derived from the compound (A-2) and the compound (A-3). The photosensitive resin composition for spacer formation containing 10-85 mol% of structural units derived from.
  6. 청구항 1 내지 5 중 어느 한 항의 스페이서 형성용 감광성 수지 조성물로 제조된 스페이서.The spacer made from the photosensitive resin composition for spacer formation of any one of Claims 1-5.
  7. 청구항 6의 스페이서를 구비한 화상 표시 장치.An image display device provided with the spacer of claim 6.
PCT/KR2014/004775 2013-05-28 2014-05-28 Photosensitive resin composition for forming spacer, and spacer prepared therefrom WO2014193165A1 (en)

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