WO2014189245A1 - Pompe de charge à tension de sortie variable et appareil de microphone mems l'utilisant - Google Patents

Pompe de charge à tension de sortie variable et appareil de microphone mems l'utilisant Download PDF

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Publication number
WO2014189245A1
WO2014189245A1 PCT/KR2014/004471 KR2014004471W WO2014189245A1 WO 2014189245 A1 WO2014189245 A1 WO 2014189245A1 KR 2014004471 W KR2014004471 W KR 2014004471W WO 2014189245 A1 WO2014189245 A1 WO 2014189245A1
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WO
WIPO (PCT)
Prior art keywords
voltage
charge pump
variable output
division
oscillator
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PCT/KR2014/004471
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English (en)
Korean (ko)
Inventor
소슬이
이명진
소명진
Original Assignee
주식회사 룩센테크놀러지
주시회사 비에스이
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Publication of WO2014189245A1 publication Critical patent/WO2014189245A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H04R3/04—Circuits for transducers, loudspeakers or microphones for correcting frequency response
    • H04R3/06—Circuits for transducers, loudspeakers or microphones for correcting frequency response of electrostatic transducers

Definitions

  • the present invention relates to a charge pump, and more particularly, to a charge pump for a MEMS (Micro Electrical-Mechanical System) microphone.
  • MEMS Micro Electrical-Mechanical System
  • the compact microphone has been mainly used an electret condenser microphone (ECM) type.
  • ECM electret condenser microphone
  • the ECM type microphone measures the amount of change in capacitance when the gap between the polymer thin film (Electret, electret) having the residual permanent charge and the fixed back plate is changed by external sound waves, and outputs the voice signal as a voice signal.
  • ECM microphones can detect small and delicate sounds in a wide range of frequencies from high to low, but use polymer diaphragms with poor heat resistance.
  • Technology cannot be packaged with other semiconductor chips, and must be protected by a special spring-loaded housing because it is sensitive to moisture, shock, and vibration of PCB boards, and requires manual manual audio tuning for each product. It is relatively expensive and difficult to mass produce.
  • MEMS microphones using MEMS technology have a size that is about one tenth of the size of diaphragm, which is a key part of ECM microphones, which is very advantageous for miniaturization. It can withstand process temperatures (approximately 260 degrees Celsius), enabling packaging based on surface mount technology and mass production only in semiconductor processes with uniform quality and no manual work.
  • MEMS microphones generally include an active membrane that is moved by vibrations of sound entering from the outside, and a back plate formed therefrom with an air gap therebetween.
  • the change in pressure and space due to external sound between the two appear as a change in capacitance, the change in capacitance is detected, amplified and output as a voice signal.
  • MEMS microphones can package semiconductor chips with diaphragms, thereby providing active biasing to the diaphragms. This results in very stable acoustics over the entire operating temperature range.
  • a charge pump circuit is used to provide this active biasing.
  • the problem to be solved by the present invention is to provide a variable output voltage charge pump and a MEMS microphone device using the same.
  • a voltage level control unit for generating an oscillator control signal
  • An oscillator for outputting a clock signal of a predetermined frequency when the oscillator control signal is activated
  • a charge pump for boosting a power supply voltage while outputting the variable output voltage while the clock signal is applied from the oscillator.
  • the voltage level control unit controls the voltage level control unit
  • a voltage divider configured to receive the variable output voltage of the charge pump and generate N divided voltages divided at predetermined voltage intervals
  • the voltage divider is implemented with N series connected resistive elements or diodes,
  • the voltage selector selects, by the voltage select signal, an nth division voltage corresponding to a division ratio n / N of the voltage divider among the N division voltages respectively output from the nodes of the N series connected resistive elements or diodes. Select and output the selected nth divided voltage.
  • variable output voltage charge pump circuit the variable output voltage charge pump circuit
  • the apparatus may further include a low pass filter for removing a ripple component of the variable output voltage due to repetitive activation and deactivation of the charge pump.
  • a MEMS microphone chip having a MEMS diaphragm and a back plate formed thereon;
  • a variable output voltage charge pump unit for outputting a variable output voltage for biasing between the MEMS diaphragm and the back plate, and detecting and detecting a change in capacitance between the MEMS diaphragm and the back plate according to external sound wave vibration
  • a MEMS microphone device comprising a signal processing chip including a detector for outputting a signal and an amplifier for outputting a microphone output signal amplified by the detection signal,
  • variable output voltage charge pump unit The variable output voltage charge pump unit
  • the variable output voltage may be output by boosting a power supply voltage while being activated according to a voltage selection signal and a reference voltage determined according to design characteristics of the MEMS diaphragm and the back plate.
  • variable output voltage charge pump unit the variable output voltage charge pump unit
  • a voltage level control unit for generating an oscillator control signal
  • An oscillator for outputting a clock signal of a predetermined frequency when the oscillator control signal is activated
  • a charge pump for boosting a power supply voltage while outputting the variable output voltage while the clock signal is applied from the oscillator.
  • the voltage level control unit controls the voltage level control unit
  • a voltage divider configured to receive the variable output voltage of the charge pump and generate N divided voltages divided at predetermined voltage intervals
  • the voltage divider is implemented with N series connected resistive elements or diodes,
  • the voltage selector selects, by the voltage select signal, an nth division voltage corresponding to a division ratio n / N of the voltage divider among the N division voltages respectively output from the nodes of the N series connected resistive elements or diodes. Select and output the selected nth divided voltage.
  • the apparatus may further include a low pass filter for removing a ripple component of the variable output voltage due to repetitive activation and deactivation of the charge pump.
  • a method of driving a variable output voltage charge pump device including a voltage level controller, an oscillator, and a charge pump.
  • the voltage level control unit compares the divided voltage obtained by multiplying the variable output voltage of the charge pump by the division ratio n / N according to the voltage selection signal specifying the division ratio n / N (a natural number of 1 ⁇ n ⁇ N) with a reference voltage. Generating an oscillator control signal to be activated or deactivated according to;
  • the charge pump may boost the power supply voltage while the clock signal is applied from the oscillator to output the variable output voltage.
  • the step of generating the oscillator control signal by the voltage level control unit
  • the voltage level control unit controls the voltage level control unit
  • the N distribution voltages may be output at nodes of N series connected resistive elements or diodes, respectively.
  • the driving method of the variable output voltage charge pump device is the driving method of the variable output voltage charge pump device
  • variable output voltage charge pump of the present invention and the MEMS microphone device using the same, even if the application is different, it can be applied to a new application by changing the output voltage setting without redesigning the charge pump, thereby providing versatility and expandability. can do.
  • FIG. 1 is a block diagram illustrating a MEMS microphone device according to an embodiment of the present invention.
  • FIG. 2 is a block diagram illustrating a variable output voltage charge pump according to an embodiment of the present invention.
  • FIG. 3 is a circuit diagram illustrating a voltage divider of a variable output voltage charge pump according to an embodiment of the present invention.
  • FIG. 4 is a circuit diagram illustrating a voltage selector of a variable output voltage charge pump according to an exemplary embodiment of the present invention.
  • FIG. 5 is a graph illustrating output voltages of a variable output voltage charge pump according to an exemplary embodiment of the present invention.
  • FIG. 6 is a flowchart illustrating a method of variably driving an output voltage of a charge pump according to an embodiment of the present invention.
  • FIG. 7 is a flowchart specifically illustrating a procedure of generating an oscillator control signal for controlling the level of an output voltage of a charge pump according to an embodiment of the present invention.
  • FIG. 1 is a block diagram illustrating a MEMS microphone device according to an embodiment of the present invention.
  • the MEMS microphone device 1 includes a MEMS microphone chip 10 and a signal processing chip 20.
  • the MEMS microphone chip 10 and the signal processing chip 20 may each be formed on separate chips in separate processes and then packaged together, or may be formed during the same process on one wafer. For convenience of description, in FIG. 1, the two chips 10 and 20 are separately formed and then packaged.
  • the MEMS diaphragm 11 and the backplate 12 are formed on the MEMS microphone chip 10.
  • the voltage between the diaphragm 11 and the backplate 12 is biased by the variable output voltage Vcpo applied through the bias terminal 13.
  • Vcpo variable output voltage
  • the diaphragm 11 vibrates due to external vibration, the capacitance between the diaphragm 11 and the back plate 12 changes, and the diaphragm 11 and the back plate 12 due to the change in the capacitance.
  • the diaphragm voltage Vd between is output from the output terminal 14.
  • the signal processing chip 20 may largely include a variable output voltage charge pump unit 21, a detector 22, and an amplifier 23.
  • the variable output voltage charge pump unit 21 boosts the power supply voltage Vcc according to the voltage selection signal Vsel and the reference voltage Vref according to the characteristics of the diaphragm 11 and the back plate 12 to change the variable output voltage. Output to (Vcpo)
  • the detector 22 detects a change in capacitance from the diaphragm voltage Vd and outputs a detection signal Vs.
  • the amplifier 23 amplifies the detection signal Vs to the outside as a microphone output signal Vmic. Output
  • FIG. 2 is a block diagram illustrating a variable output voltage charge pump for a MEMS microphone according to an embodiment of the present invention. to be.
  • variable output voltage charge pump 21 of FIG. 2 may appear to be a circuit that can be used only in a MEMS microphone, but the variable output voltage charge pump of the present invention can be applied only to an application field of a MEMS microphone.
  • the variable output of the present invention in any application, if it is not a limited circuit, and if it is desired to provide a different output DC voltage depending on the purpose or specification when designing a device that normally requires a charge pump. It should be understood that a voltage charge pump can be applied.
  • variable output voltage charge pump unit 21 may include a voltage level controller 211, an oscillator 212, and a charge pump 213.
  • the voltage level control unit 211 is a voltage selection signal specifying a division ratio n / N (a natural number of 1 ⁇ n ⁇ N) determined according to the specifications of the diaphragm 11 and the backplate 12 in the MEMS microphone chip 10 ( Vsel) controls the operation of the oscillator 212 according to the result of comparing the divided voltage V_n obtained by multiplying the variable output voltage Vcpo of the charge pump 213 by the division ratio n / N with the reference voltage Vref. Generate an oscillator control signal ENb that is activated or deactivated.
  • the bias voltage values corresponding to the specifications of the diaphragm 11 and the backplate 12 in the MEMS microphone chip 10 are, for example, within a range from the minimum output possible voltage of the charge pump 213 to the maximum output possible voltage. Can be selected.
  • the division voltage V_n obtained by multiplying the variable output voltage Vcpo by the division ratio n / N must be equal to the reference voltage Vref. .
  • the division ratio n / N may be referred to as a ratio obtained by dividing the reference voltage Vref value by a desired bias voltage value, that is, a target variable output voltage Vcpo.
  • the charge pump unit 21 of the present invention has a variable output voltage that is fixed at a high voltage level as the division ratio n / N is lowered within the range from the minimum output possible voltage to the maximum output possible voltage of the charge pump 213. (Vcpo) can be obtained and the variable output voltage (Vcpo) fixed at a low voltage level can be obtained by increasing the distribution ratio n / N.
  • the oscillator control signal ENb is exemplified as a signal that is activated when the logic is low.
  • the oscillator control signal ENb may be generated as a signal that is activated when the logic is high.
  • the voltage level controller 211 may include a voltage divider 2111, a voltage selector 2112, and a comparator 2113.
  • the voltage divider 2111 receives the variable output voltage Vcpo of the charge pump 213 and generates N divided voltages V_1... V_N that are divided at predetermined voltage intervals, preferably at equal voltage intervals.
  • the voltage divider 2111 may be implemented with N series connected resistive elements or N series connected diodes D_1, D_2, D_3,..., D_n, ... D_N, as shown in FIG. 3.
  • the divided voltages V_1, V_2, V_3,..., Vn,... V_N may be output at the contact node of the device or the two diodes, respectively.
  • the voltage selector 2112 is the n of the voltage divider 2111 corresponding to the division ratio n / N among the N division voltages V_1,..., V_N respectively output from respective nodes of the N series connected resistive elements or diodes.
  • the second division voltage V_n is selected by the voltage selection signal Vsel, and the selected division voltage V_n is output.
  • the voltage selector 2112 includes an nth node, i.e., an nth resistive element or diode below, corresponding to the division ratio n / N of the voltage divider 2111 among the N division voltages V_1,..., V_N.
  • the nth division voltage V_n output from the node between the n + 1th resistive element or the diode is selected by the voltage selection signal Vsel, and the selected division voltage V_n is output.
  • the voltage selector 2112 has N switches SW_1 to SW_N connected in parallel to one side of the distribution voltage (one of V_1 to V_N) and the other to the comparator 2113, respectively.
  • the nth division voltage among the N division voltages V_1 to V_N provided from the voltage divider 2111 by selectively energizing only one of the switches SW_1 to SW_N by the voltage selection signal Vsel. (V_n) may be selectively output to the comparator 2113.
  • the comparator 2113 compares the nth division voltage V_n corresponding to the division ratio n / N and the reference voltage Vref so that the nth division voltage V_n corresponding to the division ratio n / N is greater than the reference voltage Vref. Low generates oscillator control signal ENb to activate the operation of oscillator 212 and otherwise disable the operation of oscillator 212.
  • the comparator 2113 is illustrated as receiving an n-th division voltage V_n corresponding to the division ratio n / N at the (+) terminal and a reference voltage Vref at the ( ⁇ ) terminal.
  • Oscillator 212 to increase the variable output voltage Vcpo while the nth division voltage V_n corresponding to the division ratio n / N is lower than the reference voltage Vref, that is, while the logic Low is output from the comparator 2113. Since the comparator 2113 exemplarily outputs an oscillator control signal ENb as the signal ENb that is activated when the logic is low.
  • the comparator 2113 may be implemented by receiving an n-th division voltage V_n corresponding to the division ratio n / N at the (-) terminal and a reference voltage Vref at the (+) terminal. .
  • the variable output voltage Vcpo is increased while the nth division voltage V_n corresponding to the division ratio n / N is higher than the reference voltage Vref, that is, while the logic High is output from the comparator 2113.
  • the comparator 2113 may output an oscillator control signal as a signal that is activated when the logic is high.
  • the oscillator 212 may output clock signals CLK and CLKb of a predetermined frequency to the charge pump 213 according to whether the oscillator control signal ENb is activated.
  • the oscillator control signal ENb is deactivated (that is, when the divided voltage V_n of the division ratio n / N in the comparator 2113 in FIG. 2 becomes higher than the reference voltage Vref)
  • the clock signal of the oscillator 212 ( The generation of CLK, CLKb) itself may be stopped.
  • the charge pump 213 boosts the power supply voltage Vcc while the clock signal CLK is applied from the oscillator 212 and outputs the variable output voltage Vcpo.
  • variable output voltage Vcpo of the charge pump 213 reaches the desired voltage level, the output of the clock signal CLK is activated from the oscillator 212 by the oscillator control signal Enb of the voltage level controller 211.
  • the variable output voltage Vcpo continues to rise.
  • variable output voltage Vcpo When the variable output voltage Vcpo reaches a predetermined voltage level, the output of the clock signal CLK from the oscillator 212 is inactivated by the oscillator control signal Enb of the voltage level controller 211, so that The operation is also disabled. Accordingly, the variable output voltage Vcpo no longer rises and decreases according to the equivalent time constant inside the MEMS microphone chip 11, but the reduction width of the variable output voltage Vcpo is reduced in the comparator (V) in the voltage level controller 211. If it exceeds the level detected by 2113, the output of the clock signal CLK of the oscillator 212 is activated again, and the variable output voltage Vcpo is raised again. In this manner, the charge pump 213 keeps the size of the variable output voltage Vcpo constant while repeating activation / deactivation.
  • a low pass filter 214 including a capacitor at an output terminal of the charge pump 213 may remove a ripple component of the variable output voltage Vcpo according to activation / deactivation of the charge pump 213. It may be.
  • FIG. 5 is a graph illustrating output voltages of a variable output voltage charge pump of a MEMS microphone device according to an embodiment of the present invention.
  • variable output voltage charge pump of the MEMS microphone device of the present invention is a bias voltage between the diaphragm 11 and the backplate 12, and according to the magnitude of the distribution ratio n / N, if the distribution ratio n / N is large ( As close to 1, one of the output voltages that vary close to the minimum level and close to the maximum level as the split ratio n / N decreases (close to 0) can be output as a bias voltage signal.
  • FIG. 6 is a flowchart illustrating a method of variably driving an output voltage of a charge pump according to an embodiment of the present invention.
  • the driving method of the variable output voltage charge pump device 21 including the voltage level controller 211, the oscillator 212, and the charge pump 213 may be described in step S61.
  • 211 obtained by multiplying the distribution ratio n / N by the variable output voltage Vcpo of the charge pump 213 according to the voltage selection signal Vsel specifying the predetermined division ratio n / N (a natural number of 1 ⁇ n ⁇ N).
  • the oscillator control signal ENb which is activated or deactivated to control the operation of the oscillator 212 according to the result of comparing the divided voltage V_n with the reference voltage Vref.
  • step S611 the voltage level controller 211 receives a variable output voltage Vcpo of the charge pump 213 at a predetermined voltage interval.
  • Vcpo the voltage level controller 211 receives a variable output voltage Vcpo of the charge pump 213 at a predetermined voltage interval.
  • N divided voltages V_1... V_N are divided at equal voltage intervals.
  • step S612 the voltage level control unit 211 corresponds to the division ratio n / N among the N division voltages V_1... V_N respectively output from respective nodes of the N series connected resistive elements or diodes.
  • the nth divided voltage V_n is selected by the voltage select signal Vsel, and the selected divided voltage V_n is output.
  • step S613 the voltage level controller 211 compares the n-th division voltage V_n corresponding to the division ratio n / N and the reference voltage Vref, so that the n-th division voltage V_n corresponding to the division ratio n / N is obtained. Is lower than the reference voltage Vref to generate an oscillator control signal ENb to activate the operation of the oscillator 212, otherwise to deactivate the operation of the oscillator 212.
  • step S62 the oscillator 212 outputs clock signals CLK and CLKb of a predetermined frequency to the charge pump 213 according to whether the oscillator control signal ENb is activated.
  • step S63 the charge pump 213 boosts the power supply voltage Vcc while the clock signal CLK is applied from the oscillator 212 and outputs the variable output voltage Vcpo.
  • variable output voltage charge pump device may output the variable output voltage Vcpo corresponding to the division ratio n / N by the voltage selection signal Vsel.
  • variable output voltage Vcpo may be low pass filtered to remove the ripple component of the variable output voltage Vcpo according to the activation / deactivation of the charge pump 213.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Dc-Dc Converters (AREA)

Abstract

La présente invention concerne un appareil de microphone MEMS comportant: une microplaquette de microphone dans laquelle sont formés un diaphragme MEMS et une platine arrière; et une microplaquette de traitement de signaux comportant un composant de pompe de charge à tension de sortie variable délivrant une tension de sortie variable servant à la polarisation entre le diaphragme MEMS et la platine arrière, un composant de détection servant à délivrer un signal de détection suite à la détection d'une variation de capacitance électrostatique entre le diaphragme MEMS et la platine arrière en fonction de la vibration d'une onde sonore externe, et un composant d'amplification servant à délivrer un signal de sortie de microphone obtenu en amplifiant le signal de détection. Dans le cas présent, le composant de pompe de charge à tension de sortie variable peut fonctionner de façon à délivrer la tension de sortie variable en élevant une tension d'alimentation tout en étant activé en fonction d'un signal prédéterminé de sélection de tension et d'une tension de référence conformes aux caractéristiques de conception du diaphragme MEMS et de la platine arrière.
PCT/KR2014/004471 2013-05-24 2014-05-19 Pompe de charge à tension de sortie variable et appareil de microphone mems l'utilisant WO2014189245A1 (fr)

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KR20130059055A KR20140138473A (ko) 2013-05-24 2013-05-24 가변 출력 전압 차지 펌프 및 이를 이용한 멤스 마이크로폰 장치
KR10-2013-0059055 2013-05-24

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116545239A (zh) * 2023-07-06 2023-08-04 芯耀辉科技有限公司 一种电荷泵系统、电源装置、存储器及电子设备

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210146132A (ko) * 2020-05-26 2021-12-03 삼성전자주식회사 마이크로폰의 특성을 보정하는 방법 및 전자 장치

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Publication number Priority date Publication date Assignee Title
KR100300077B1 (ko) * 1999-07-28 2001-11-01 김영환 가변 오실레이션 주기를 갖는 차지펌프회로
KR20020035070A (ko) * 2002-04-15 2002-05-09 이석순 지향성 마이크로폰
KR20050088778A (ko) * 2004-03-03 2005-09-07 매그나칩 반도체 유한회사 고전압 발생회로
KR20100025590A (ko) * 2007-11-05 2010-03-09 가부시키가이샤 리코 차지 펌프 회로의 동작 제어 방법
WO2013033142A2 (fr) * 2011-08-31 2013-03-07 Knowles Electronics, Llc Multiplicateur haute tension pour microphone et son procédé de fabrication

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100300077B1 (ko) * 1999-07-28 2001-11-01 김영환 가변 오실레이션 주기를 갖는 차지펌프회로
KR20020035070A (ko) * 2002-04-15 2002-05-09 이석순 지향성 마이크로폰
KR20050088778A (ko) * 2004-03-03 2005-09-07 매그나칩 반도체 유한회사 고전압 발생회로
KR20100025590A (ko) * 2007-11-05 2010-03-09 가부시키가이샤 리코 차지 펌프 회로의 동작 제어 방법
WO2013033142A2 (fr) * 2011-08-31 2013-03-07 Knowles Electronics, Llc Multiplicateur haute tension pour microphone et son procédé de fabrication

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116545239A (zh) * 2023-07-06 2023-08-04 芯耀辉科技有限公司 一种电荷泵系统、电源装置、存储器及电子设备
CN116545239B (zh) * 2023-07-06 2024-01-16 芯耀辉科技有限公司 一种电荷泵系统、电源装置、存储器及电子设备

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