WO2014171992A2 - System, method and computer-accessible medium for depth of field imaging for three-dimensional sensing utilizing a spatial light modulator microscope arrangement - Google Patents

Abstract

Exemplary embodiment can utilize the properties of tunable thin-film, material (e.g., graphene) to efficiently modulate the intensity, phase, and/or polarization of transmitted and/or reflected radiation, including mid-infrared ("mid-IR") radiation. Exemplary embodiments include planar antennas comprising tunable thin-film material sections and metallic sections disposed in contact with the tunable thin-film material sections, each metallic section having a gap with at least one dimension related to a wavelength of the radiation, which in some embodiments may be less than the wavelength. The metallic layer may comprise rods arrange in one or more shapes, or one or more apertures of one or more shapes. Embodiments of the antenna may also comprise a substrate, which may be a semiconductor or conductor in various embodiments. Embodiments also include systems, computer-implemented methods, devices, and computer-readable media for effectuating desired modulation of incident radiation by, e.g., varying the doping level of the tunable thin-film material.

Description

SYSTEM, METHOD AM) COMPUTER-ACCESSIBLE MEDIUM FOR DEPTH OF FIELD IMAGING FOR THREE-DIMENSIONAL SENSING UTILIZING A SPATIAL

LIGHT MODULATO MICROSCOPE ARRANGEMENT

CROSS-REFERENCE TO RELATED APPL CATIQN(S)

(ΘΘΘ1 ) The present application relates to and claims priority from U.S. Patent Application. Serial No. 61/758,604 filed on January 30, 2013, the entire disclosure of which is incorporated herein by reference.

FIELD OF THE DISCLOSURE (ΘΘΘ2) The present application relates to exemplary embodiments system, apparatus and computer-accessible medium for providing a modulation of transmitted or reflected radiation (e.g., mid-infrared radiation) using one or more plasmonic antennas comprising metal and a thin-film material

BACKGROUND INFORMATION |o^"003j Mid-infrared (mid-IR) light with wavelengths ranging from 2μιη to 30μηι have unique capabilities of fingerprinting ehe.rai.cais via their characteristic absorption spectra (see, e.g., Refs. 11] and [2j) and propagating over longer distances in scattering media compared to light with shorter wavelengths (see, e.g., Refs. [3] and [4]}. As a result, mid-i^'R light is uniquely positioned to address a number of important issues in our security, health, and environment (see, e.g., Refs. [5}- 9|). Recently, there lias been a rapid development in mid-IR sources and detection systems (see, e.g., Refs. p.0]-{ 13 }). However, despite prevalent, civil aod military interests in high-performance mid-IR modulators and spatial light modulaiors (SL .s), a viable path towards realizing such devices remains elusive. Existing approaches to modulate mid-IR light have a number of drawbacks that limit their applications. For example, mid-IR modulators based on acousto-oplic effects are bulky, require high operating voltage, and have limited modulation speed (see, e.g., Ref. [ 14]), Modulators based on quantum confined Stark shift of inter-subband transitions in semiconductor quant.um wells require sophisticated material growth and it is hard to realize pure-phase modulation because of the high absorption losses associated with inter-subband transitions (see, e.g., Refs. 15)-{ 17]). Active optical components for controlling mid-IR radiation thus present a bottleneck in the development of mid-IR science and technology. [ΘΘΘ4_.Ι Graphene can be used as the active medium because of i ts largely tunable optical conductivity in the roid-l (see, e.g., Rets. i l 8 j~[20]). Metallic plasmonic antennas demonstrate a strong interaction between graphene and. infrared light so that {fee material perturbation introduced by graphene leads to large changes in the optical response of the antennas (see, e.g., Refs. [2.1 J and [22]). Modulators and SLMs consisting of arrays of such antennas can have the following distinguishing features. First, they are optically-thin planar devices. The thickness of the active antenna arrays is less than a few percent of the free-space wavelength. Abrupt and controllable changes to the intensity and phase of light are achieved through optical scattering at plasmonic antennas (see, e.g., Ref. [23 j) instead of through an accumulative effect via propagation. Second, our Oat optical components can mold optical wavefronts with high spatial resolution and with fast modulation rate because the tunable plasmonic antennas have sub-wavelength footprints and small RC time constant. Previous planar infrared and microwave components have shown static optical responses (see, e.g., Refs. [24H33]).

|0ΘΘ5| A composite structure consisting of plasmonic antennas and graphene can have widely tunable antenna resonances and, as such, can be used as a building block for recoiifigurable flat optical components. This is based on several principles or observations. First, graphene has widely tunable optical conductivity in the .mid-iR. The doping of graphene can be adjusted using a bias voltage by a factor of -10 at room temperature (see, e.g., Ref. [34]), which leads to a large change in its sheet conductivity σ and therefore the in- plane electric permittivity

where ε„ is the vacuum permittivity, ω is angular frequency, and / is the thickness of graphene. This effect is illustrated in Figures 1 (a) and 1(b), which show exemplary in-plane electric permittivity (t¾) of graphene at different doping levels at room temperature. Solid and dashed lines represent real and imaginary components, respectively. Second, metallic plasmonic antennas are able to capture light from free space and concentrate optica! energy into sub-wavelength spots with intensity a few orders of magnitude larger than that of the incident light (see, e.g., Refs. {21 H22 j). Third, by placing graphene in the hot spots created by plasmonic antennas and by tuning the optical conductivity of graphene, the resonant frequency of the metallic plasmonic antennas is tunable over a wide range.

| 06j According to perturbation theory, the change in resonant frequency a of a system caused by material perturbation is gives by equation (1 ) below (see, e.g.. Ref. | 35j).

7 -fff «jr[(40^■ ) · H (Ae^■ E)^■

( 1 ) where the denominator represents the unperturbed total energy and the noinerator represents the change in magnetic and electric energies, Δμ and Ai respectively, caused by the material perturbation (in tensor format to account for anisotropy); E arid H are electric and magnetic fields, respectively, in the presence of the material perturbation; E and H_v are the respective unperturbed fields; and £ and ff_a are their respective complex conjugates. According to the theory expressed by equation ( I ), a large timing in ¾_¾5 can be achieved by enhancing the overlap between the perturbation materia! (e.g., graphene) and a strong optical field, Ae■ E . Since optical resonances are associated, with large changes in the amplitude and phase of the scattered light {see, e.g., Ref. (23 j), the large toning in o>_ii¾ can produce significant intensity, phase, and polarization modulation.

|θθθ? Although graphene is one material that exhibits advantageous properties when combined with metal in a piasmonic antenna, the person of oixfinary skill will readily understand that graphene is merely exemplary and many other such, material may be used advantageously. For example, thin- film materials such as vanadium dioxide, ^'boron nitride, and molybdenum disulfide may be combined with metal in a piasmonic antenna.

[0008] Thus, it may be beneficial to provide a piasmonic antenna (e.g., graphene-raetal piasmonic antenna) that efficiently modulates the intensity, phase, and/or polarization of radiation (e.g., mid-l^'R radiation) that can address and/or overcome at least some of the issues and/or problems described herein above.

SUMMARY OF EXEMPLARY EMBODIMENTS

[0009] These and other objects of the present disclosure can be achieved by provision of exemplary systems, methods and computer-accessible for generating at least one image of a portion(s) of a sample.

fOOlO] To that end, it is possible to provided antennas, systems, devices, methods, and computer-accessible medium that can utilize the properties of graphene mesh to efficiently modulate the intensity, phase, and-'or polarization of incident radiation, including incident mid-infrared C'mid-IR") radiation,

[0011 ] Exemplary embodiments of the present disclosure include planar antenna comprising one or more sections of graphene mesh and a metallic layer comprising one or more .metallic sections, wherein each metallic section is disposed in contact with at least one of the one or more graphene mesh sections and comprises at least one gap that, exposes at least one portion of the at least one underlying graphene mesh section to the radiation, and at least one dimension of the at least one gap is related to at least one wavelength of the radiation, hi some exemplary embodiments, the metallic layer comprises a plurality of rods arranged with naiioscale gaps in at least one dimension between adjacent rods. In some exemplary embodiments, the metallic layer comprises one or more rectangular apertures having a width less than the at least one wavelength, of the radiation, in some exemplary embodiments, the metallic layer comprises one or more cross-shaped apertures having a width less than the at least one wavelength of the radiation. In some exemplary embodiments, the radiation comprises mid-mfrared ("mid-l ") radiation.

[ΘΘ1.2] Exemplary embodiments of the present disclosure also include a computer- implemented method comprising receiving input concerning desired modulation of at least one wavelength of radiation incideiii on an antenna comprising one or more graphene mesh section; determining one or more parameters for effectuating the desired modulation by varying- the doping level, of the one or more graphene mesh sections; and providing the determined one or more parameters to a modulator. In some exemplary embodiments, the method further comprises accessing dopin response information describing at least one of intensity, phase, and polarization of one or more wavelengths of the radiation for each of a plurality of doping levels of the one or more graphene mesh sections, in some exemplary embodiments, each of the one or more parameters is related to a. voltage to be applied ^'between one of the one or more graphene mesh sections and a substrate of the antenna.

(ΘΘ13) Exemplary embodiments of the present disclosure also include a non-transitory, computer-readable medium embodying instructions according to one or more of the computer-implemented method embodiments of the present disclosure. Exemplary embodiments of the present disclosure also include a device comprising a processor and a non-transitory, computer-readable medium embodying instructions according to one or more of the computer-implemented method embodiments of the present disclosure. Exemplary embodiments of the present disclosure also include a system for modulating radiation, comprising a planar antenna comprising one or more graphene mesh sections; an adjustable voltage source coupled to the one or more graphene mesh sections; and a control device coupled to the adjustable voltage source and configured to perform the steps of one or more of the computer-implemented method embodiments of the present disclosure. [ΘΘ14] These and other objects, features arid advantages of the exemplary' embodiments of the present disclosure will become apparent upon reading the following detailed description of the exemplary embodimenis of the present disclosure, when taken in conjunction with the appended drawings, and enclosed claims.

5 BRIEF DESCRIPTION OF THE DRAWINGS feOlSj Further objects, Features and advantages of ihe present disclosure will become apparent from the following detailed description taken, in. conjunction with the accompanying Figures showing illustrative embodiments, in which:

j0016 j Figures 1(a) and 1(b) are graphs of in-plane electric permittivity (¾) of graphene at J O different doping levels at a room temperature according to an exemplary embodiment of the present di sc iosure ;

10β17| Figure 2(a) i an illustration of an electrically-tunable array of metallic rod antennas loaded with graphene patterned on SiCb-Si. substrate according to one or more embodiments of the present disclosure;

.15 0018^'J Figure 2(b) is a set of cross-sectional and overhead views of a Sight intensity distribution in an antenna gap of the electrically-tunable array of Figure 2(a);

Ι0ΘΙ9} Figures 2(c) and 2(d) are exemplary graphs of a reflective intensity and a phase, respectively, at particular mid-IR wavelengths of the exemplary antenn array shown in

Figure 2(a) at different graphene doping levels,

20 [0020| Figure 3 is an intensity profile of an exemplary surface-pl.as.mon standing wave on graphene in. a 300-nm antenna gap, according to an exemplary embodiment of the present disclosure;

(0021} Figure 4(a) is an illustration, of an electrically-tunable aperture antenna loaded with having a graphene pattern on SiOj-Si substrate according to one or more embodiments of the

25 present disclosure;

(0022} Figure 4(b) shows cross-sectional and overhead views of a set of the light intensity distributions in the exemplars' antenna gap of the exemplary electrically-tunable aperture antenna shown i Figure 4(a), when graphene is provided, in the antenna gap;

|0023j Figure 4(c) shows cross-sectional and overhead views of a set of the light intensity

30 distributions in the exemplary antenna gap of the exemplary electrically-tunable aperture antenna shown in Figure 4(a), when graphene is not provided in the antenna gap;

3 [ΘΘ24] Figures 4(d) and 4(e) are exempiary graphs of the reflective intensity and phase, respectively, at particular .mid-IR wavelengths of the exemplary aperture array shown, in Figure 4(a) at different grapheme doping levels;

[ΘΘ25} Figure 5(a) is an illustration of an electrically-tunable reflect array of metallic rod antennas loaded having the grapheme pattern on SiO -Au substrate according to one or more embodiments of the present diselosiire;

|0026j Figures 5(b) and 5(c) are exemplary graphs of the exemplary reflective intensity and phase, respectively, at particular niid-IR wavelengths of the exemplary antenna reflect- array shown in Figure 5(a) at different graphene doping levels;

(ΘΘ27) Figure 6(a) is an illustration of an electrically-tunable aperture reflect array loaded having the graphene pattern on SiOj-Au substrate according to one or more embodiments of the present disclosure;

|0028j Figures 6(b) and 6(c) are exemplary graphs of the exemplary reflecti ve intensity and phase, respectively, at particular mid-IR wavelengths of the antenna reflect-array shown in Figure 6(a) at different graphene doping levels;

£00293 Figure 7 is a set of two-dimensional views (e.g., top and side cross-sectional views) corresponding to exemplary electrically-tunable arrays of metallic rod antennas) such as one or more of the exemplary embodiments illustrated by Figures 2(a) and 5 (a);

[ΘΘ30} Figure 8 is a set of two-dimensional views (e.g., top and side cross-sectional views) corresponding to exemplary electrically-tunable aperture arrays, such as one or more of the exemplary embodiments that are illustrated in Figures 4(a) and 6(a);

|ΘΘ3Ι | Figure 9 is a block diagram of an exempiary mid-IR modulation system according to one or more embodiments of the present disclosure;

£0032j Figure 10 is a perspective view of an exemplary an exemplary nikWR spatial light modulator comprising an reflect-array of metailic aperture antennas according to one or more exemplary embodiments of the present disclosure;

|ΘΘ33^'| Figure 1 1 is a block diagra of the exemplary mid-IR spatial light modulation (SLM) system according to one or more further exemplary embodiments of the present disclosure;

|0034| Figure 1.2 is a flow diagram of an exemplary method .for controlling modulation of intensity, phase, and/or polarization of radiation by a modulator, according to one or more embodiments of the present disclosure; [ΘΘ35] Figure 13 is a flow diagram of an exemplary method for controlling modulation of intensity, phase, and/or polarisation of radiation by a spatial light modulator (SL ), according to one or more exemplary embodiments of the present disclosure;

[6636) Figure 14 is a block diagram of an exemplary control device according to one or more exemplary embodiments of the prese.nl: disclosure;

[6637^'j Figure 15(a) is an illustration of a folded, aperture antenna supporting multiple antenna resonances and a wide phase tuning range, according to one or more exemplary embodiments of the present disclosure:

(0038) Figure 15(b) is an illustration of an out-of-plane component of magnetic field at two wavelengths for two modes of the exemplary folded aperture antenna shown in Figure

15(a);

[6639) figure 15(c) is an exemplary graph of reflective phase at particular wavelengths for two exemplary graphene doping levels of the exemplar - folded aperture antenna shown in Figure 15(a);

f0040] Figure 15(d) is an exemplary graph of the difference between the reflective phases at the two graphene doping levels illustrated in Figure 15(c);

|ΟΘ ί j Figures 16(a) and 1.6(b) are top and side views, respectively, illustrating a split-ring resonator antenna for binary-intensity modulation of transmitted light, according to one or more exemplary embodiments of the present disclosure;

[6642^') Figure 1.6(c) is an exemplar}' graph of the transmitted intensity in the gap of and phase, respectively, at particular mid-IR waveiengihs of the exemplar}¹ split-ring resonator antenna shown in Figure 16(a); and

(ΘΘ43) Figure 16(d) is an exemplary graph of transmission intensity at. particular wavelengths for two exemplary graphene doping levels of the exemplary split-ring resonator antenna shown in Figure 16(a).

[6644^') Throughout, the drawings, the same reference numerals and characters, unless otherwise stated, are used, to denote like features, elements, components, or portions of the illustrated embodiments. Moreover, while the present disclosure will now be described in detail with reference to the figures, it is done so in connection with the illustrative embodiments and is not limited by the particular embodiments illustrated in the figures and appended claims. DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS

[ΘΘ 5] The exemplary embodiments of the present disclosure may be further understood with reference to the following description and the related appended drawings, but not limited thereby. The exemplary embodiments of the present disclosure relate to an exemplary system, method and computer-accessible medium for extended depth of field imaging utilizing spatial light modulation. According to an. exemplary embodiment of the present disclosure, exemplary methods systems and. computer-accessible medium for modulating infrared light based on electrically-tunable piasmonic antennas.

[ΘΘ46] For example, a .large modulation of the amplitude and phase of mid-infrared (e.g., mic!~IR) light can be achieved by dynamically shifting the resonance of graphene-metal piasmonic antennas via electrical tuning of the optical conductivity of grapheme. Exemplary simulations and calculations can indicate that the scattered light from arrays of such antennas exhibit intensity modulation with high on/off extinction ratio exceeding 100, large phase timing up to 240 degrees, and fast modulation rate on the order of a few GHz. These exemplar)' properties can be useful for creating reconfigurabie fiat optical components such as modulators and spatial light modulators in the niid-IR spectral range.

[0047} Exemplary embodiments of the present disclosure can be directed to two or more exemplary antenna structures and or configurations that can support ^'strong !ight-graphene interaction: (a) arrays of metallic rods patterned into various shapes that are separated by nanoscale gaps; and (b) aperture antennas with sub-wavelength width defined in metallic films. Nevertheless these structures are merely exemplary and the person of ordinary skill can readily comprehend that the principles of enhancement by light-graphene interaction disclosed herein can be applicable to other antenna structures currently known or later devised.

|^'0048^'j it. is possible, e.g., to utilize finite-difference time-domain (FDTD) simulations to calculate or otherwise determine an optical response of antennas. The reflection spectra of antenna arrays can be obtained by simulating one unit cell of the array while applying periodic boundary conditions, Graphene is modeled as an anisotropic material. The in-plane optical conductivity graphene can be calculated or otherwise determined using the following equation based on -random-phase approximation (see, e.g., Ref. [36 j :

4ft | 2 { 2k _βΤ j 2π [(ίιω ~· 2Ε,. γ -;- Qk J J

with the first and second terms representing contributions from intra- and. inter-band transitions, respectively. In addition, is the elementary charge, ka is the Boimnann constant, T is temperature, and ft is the reduced Planck constant, E,∞ti¥_f Jitn_s is the Fermi level (where Vf—lif m/s is the Fermi velocity and is the sheet doping of graphene), and r is carrier relaxation lifetime and characterizes electron-disorder scattering processes (maintained at 0.25 ps, achievable in graphene with reasonably high carrier mobility) (see, e.g.. Ret (3?J). According to an exemplary embodiment of the present disclosure, the out-of- plane retractive index of graphene can be maintained at about 1.5 (changes to tins value have minima! effects on simulation results). For purposes of equation (2), graphene can be modeled by one layer of FDTD mesh cells with thickness / ~ 0.33nm and a planar size of Inm Inm. Figures 1 (a) and 1(b) illustrate exemplar)' graphs of a calculated room- temperature in-plane electric pe miiti vity of graphene ε« at different graphene doping levels, in particular. Figure 1 (a) shows a graph of real(fc¾), which becomes more negative with increasing wavelength, while Figure 1(h) shows a graph of im ges), which is positive bur substantially less than real(i¾).

[0049} Figure 2(a) shows an illustration of a tunable rod antenna array according to one or more exemplar}-- embodiments of the present disclosure. In these exemplary embodiments, a graphene sheet is disposed in contact with a silicon dioxide (Si<¾) layer, with the graphene covering the entire surface in certain embodiments. The Si(¾ layer is disposed in contact with a heavily doped silicon (Si) substrate. Figure 7 further illustrates the top (x-y) and side (x~z) views of such exemplary arrangement according to an exemplary embodiment of the present disclosure. For example. Si substrate 7.10 m y have an exemplary thickness of certain amount of nm, Si<¾ Saver 720 can have an exemplary thickness of about 285nm, and graphene mesh layer 730 may have an exemplary thickness of about 0.33am, as discussed herein. A plurality of metallic rods 740 can be disposed or provided on top of graphene mesh layer 730 and arranged in a regular pattern, such as the exemplary pattern shown in Figs. 2(a) and 7. In some exemplary embodiments of the present disclosure, the rods can include, e.g., gold material In the exemplary pattern shown in Figure 7, each of (he gold rods can have a length (L), width (W), and height (H) of, e.g., about 1.84 μηι, 240 am, and 50 nm, respectively, while the antenna gap (G) can be, e.g., about 60nm and the spacing (Sp) between rows of antenna rods can be about 2pm. Nevertheless, these dimensions are merely exemplary and the person of ordinary skill will readily comprehend that other dimensions may be employed advantageously.

[0050] As one example, only the portion of the graphene sheet disposed in the antenna gaps strongly interacts with optical fields and thereby contributes to the antenna resonance. As discussed in greater detail herein below, the exemplary antenna resonance can be tuned by varying the doping of the graphene mesh, in one exemplary embodiment, as shown in Figure 2(a), an adjustable bias voltage (V ) can. be applied between the antenna layer and the doped Si substrate (e.g., substrate 7 0 shown in Figure 7) to change the doping of graphene by the well-known electric-field effect In some exemplary embodiments of the present disclosure, this adjustable bias voltage can be provided by an adjustable voltage source that is coupled to, and under control of, a computer or other processing apparatus can execute instructions stored in a non-transitory, computer-readable medium.

{005 1 An illustration of a strong interaction between the graphene mesh and is shown in Figure 2(b), which illustrates an exemplary surface-plasmon. (SP) standing wave of high intensity (e.g., an intensity enhancement ~3Q00) supported by graphene (e.g.., doped at about 5x10' m^"';) located in the antenna gap. The standing wave can strongly interact with graphene, e.g., leading to a considerable perturbation to the resonant frequency of tire rod antennas. As discussed above in relation to Figures 1(a) and 1 (b), the exemplary permittivity of graphene can be, e.g., primaril a real number and can become more negative as its doping increases. According to a perturbation theory expressed by equation (1 ) above, this can lead to an increasing resonant frequency (> Figures 2(c) and 2(d) show exemplary? graphs of the reflective intensity and phase, respectively, at particular mid-IR wavelengths of the exemplary antenna array of Figure 2(a). For example, Figure 2(c) shows a graph indicating that when the sheet doping of graphene is changed, from lxlO^Ji> to 9xi0^lf> irT the dip in the reflection spectra of the antenna array shifts by Δλ - 0.6um, significant amount corresponding to -8,5% of the central operating wavelength

~ 7,05μηι). This shift of the spectral dip or notch toward shorter wavelengths is equivalent to shifting the spectral dip toward higher frequencies ··· a so-called "blue shift."

(0052J Another way to understand the blue shift is that as the graphene doping increases, the leakage current across the antenna gap mediated by graphene becomes larger. This effectively reduces the capacitive coupling between neighboring antenna rods, resulting in a shift of the resonant frequency (see, e.g., Refs. [38]-| 39]). Indeed, the exemplary graph of Figure 2(c) indicates that the structure of Figure 2(a) can facilitate a maximum reflectivity modulation, e.g., of -30%, which can occur at. λ - about 6.5μη¾. Moreover, the graph of Figure 2(d) indicates that the structure of Figure 2(a) can facilitate, e.g.. a maximum phase tuning or phase modulation of ~30 degrees (as observed in far-field) which occurs at λ ^:::: 7pm, The exemplary results shown in the graphs of Figures 2(c) and 2(d) have been confirmed in experiments (see, e.g., Ref. |40J) showing that as the graphene doping level is varied by a factor of - 10 (e.g., \x \ ()^l<> to 9x1 ^th the spectral dip shifts by Δλ = ϋ.51μη corresponding to --7.5% of the central operating wavelength. ( ^_!ώ,,5 ^:::: 6.8pm). ^"This large wavelength tuning demonstrated in experiments and simulations represents a major improvement over previous work on tunable plasmonic structures (see, e.g., Refs. [41 ]-{43J) in which there was no enhancement of the interaction between light and active media and, accordingly, very small tutting effects.

[00533 Graphene SPs can be very different from conventional SPs supported by metal- dielectric interfaces (see, e.g., Ref. [44)). Distinctive characteristics of rnid-IR graphene SPs include ultra-strong localization (e.g., 1/e decay distance normal to graphene tens of nm), "deep UV" wavelength (~ tens of nm), and very large propagation constant (e.g., in-plane wavevector ~ 100 times of free-space wavevector). Because of the large wavevector mismatch (Ak) between SPs propagating on graphene and on metal, the graphene patch in the antenna gap can form an effective Fabry -Perot cavity for graphene SPs, resulting in standing waves. This exemplary effect is shown in the illustrations of Figure 2(b), as discussed above, and is further illustrated in Figure 3, which shows an illustration of standing waves with multiple antinodes in a wide antenna gap. According to the physical principles illustrated in Figures 2(b) and 3, the antenna rods can capture incident 1R radiation from free space (e.g., ambient radiation or targeted radiation such as from a laser), and convert this I energy into surface waves propagating along the rods, which excites graphene SPs in the antenna gap. Metallic antenna rods efficiently couple antenna surface waves into graphene SPs because the sharp edges of rods provide a preferable spatial frequency component thai compensates the wavevector mismatch, Ak. Efficient generation of graphene SPs has also been theoretically demonstrated using gratings with deep-sub- wavelength period (see, e.g., Ref. [45]).

[0054] A perturbation theory can indicate that a larger tutting of plasmonic resonance is achieved in structures supporting a larger spatial overlap between graphene and optical fields. The rod-antenna design discussed herein ma not be optimized to achieve the largest toning because the structure can. have considerable fringing fields outside antenna gaps. According to an exemplary embodiment of the present disclosure, an aperture antenna structure cao provide an interaction between the antenna near-fields and the graphene in the aperture that can result in, e.g., a larger tuning of optical resonance. In addition, the exemplary aperture antennas can be more suitable as building blocks for SLMs because they can operate alone, while rod antennas rely on neighbors to confine light,

[0Θ55] Figure 4(a) shows a schematic illustration, of a tunable aperture antenna according to one or more exemplary embodiments of the present disclosure, in these exemplary embodiments, a graphene sheet can be disposed in contact with a silicon dioxide (Si<¾) layer, wit the graphene covering the entire surface in certain embodiments. The SiO? layer can be disposed in contact with a heavily doped silicon (Si.) substrate. Figure 8 further illustrates top (x-y) and side (x~z) views of this exemplary arrangement. For example. Si substrate 810 may have an exemplary thickness of a certain number of nm, SiQ_;> layer 820 may have an exemplary thickness of 285mn, and graphene mesh layer 830 may have an exemplar)' thickness of 0.33riru, as discussed above. A metallic layer 840 can be disposed in contact with graphene mesh layer 830, with layer 840 having at least one aperture through which the underlying portion of the graphene mesh is exposed to incident radiation, including mid-1 R radiation. In some exemplary embodiments, metallic layer 840 can include, e.g. , a gold material, in the exemplary arrangement shown in Fig, 8, the aperture can have a length (L), width (W), and height (H) of about, e.g., 3.7 μηι, 100 nm, and. 50 nm, respectively... Nevertheless, these dimensions are merely exemplary and the person of ordinary skill will readily comprehend that other dimensions may be employed advantageously,

[ΘΘ56] A strong exemplary interaction between the graphene mesh and mid-IR radiation is further illustrated in Figure 4(b), which shows an illustration of an exemplary surface- plasrtion (SF) standing wave of high intensity (intensity enhancement -6000) supported by graphene (doped at 2xlO^io mr). As shown therein, an area located in the antenna aperture can. be 4.4μπτ-χ-2μ∞. The standing wave can strongly interact with graphene, e.g., leading to a considerable perturbation to the resonant frequency of the rod antennas. The exemplary effect of graphene is further illustrated i a graph of Figure 4(c), which shows that in the absence of the underlying graphene mesh, the near-Held maxima of the exemplary structure shown in Figure 4(a) can be located on the long edges of the aperture where charges are accumulated, hi contrast. Figure 4(b) shows that whe the aperture is loaded with graphene. a near-field maximum advantageously occurs at the aperture center on the surface of the graphene.

(ΘΘ57] As a result of the stronger graphene-SP interaction, the tuning of reflection spectra of aperture antennas can be much larger than that of the rod antennas. This can be evident by comparing the reflectivity performance of the rod array and apertore structures shown in the exemplary graphs of Figures 2(c) and. 4(d), respectively. For example, the graph of Figure

4(d) indicates that Δλ ~ 12,4% is achieved when graphene doping is changed from ixK^)lfc to xl ^> m (compare to 7.5% λ._Λ¾ΪΚίί in Figure 2(c)). Figure 4(d) also shows that the exemplary structure shown in Figure 4(a) can facilitate a maximum reflectivity modulation of., e.g., -30%, which, .occurs at λ ^::~ 6μ^ηι, while Figure 4(e) shows that the exemplary structure of Figure 4(a) can facilitate a maximum phase modulation of -30 degrees (e.g., as observed in far-field) which occurs at λ ^::: 6.25μ.ηι. These exemplary results are comparable to the exem lary rod array structure shown in Figure 2(a).

[ΘΘ58} Nevertheless, the amount of intensity modulation available from the exemplary rod and apertore antenna, structures discussed above is limited because the resonant dips of the intensity spectra have broad width and limited depth, as shown in the exemplary graphs of Figures 2(c) and 4(d). in addition, the available phase toning may not be sufficient for certain applications. Such problems may be addressed by designs based on reflect-arrays, which comprise of arrays of phased antennas separated from a metallic back-plane b a dielectric spacin layer (see, e.g., Ref. 146]). in some exemplary embodiments of the present disclosure, the spacing layer can be, e.g., a sub-wavelength in thickness, resulting in a strong optical coupling between the metallic antennas and metallic back-plane. Compared to exemplary configurations including a single layer of seatterers, as illustrated by Figures 2(a)- 2(d) and 4(a)-4(d), exemplary reflect-arrays can facilitate a larger reflected power and support plasmonic resonances with higher quality factors, leading to narrower antenna resonances and a larger range of phase tuning.

(ΘΘ59) Figure 5(a) shows a schematic illustration of a tunable rod antenna reflect-array according to one or more exemplary' embodiments of the present disclosure, in these exemplary embodiments, a graphene sheet can be disposed in contact, with a silicon dioxide (Si<¾) layer, with the graphene covering the entire surface in certain embodiments. The SiC layer is disposed in contact with a metallic substrate, which in some exemplary embodiments of the present disclosure may be a gold (A.u) substrate; Figure 7 further illustrates the top (x- y) and side (x-z) views of this exemplary arrangement for the exemplary embodiment shown in Figure 5(a). For example, the parameters of Figure 7 for this exemplary embodiment can be similar or substantially the same as the parameters for the embodiment shown in Figtsre 2(a), except that substrate 710 can be of a different material, Si<¾ layer 720 may have an exemplary thickness of e.g., about 400 ran, and the antenna gap (G) may be, e.g., about 30 m Nevertheless, these dimensions are merely exemplary and the person of ordinary skill will readily comprehend that other dimensions may be employed advantageously,

|OO6 j Figures 5(b) and 5(c) sho exemplar graphs of the reflective intensity and reflective phase, respectively, at particular mid-IR wavelengths of the exemplary antenna reflect-array of Figure 5(a). These exemplary graphs illustrate a number of desirable features and significant improvements of the reflect-array compared to the array on the doped Si substrate shown in. the illustration of Figure 2(a). First, the resonant dips of the reflection spectra can be quite sharp. As shown, in the graph of Figure 5(b), the waist of the dips (e.g., measured between λ corresponding to 50% of maximum reflective intensity) are -0.7 μηι and the change in reflectivity AR (i.e., from maximum to minimum) can be 80-90%. As shown in the graphs of Figures 2(c) and 4(d), single layers of antennas produce resonant dips with waists of, e.g., about 1.5-2.5μηι and AR of about 40-60%. These sharp resonances can be due to the coupling between rod antennas and their image resonators in the metallic (e.g., gold) back-plane. Coupled optical resonators with a sub-wavelength separation can have a muc larger quadrupolar component in their charge distribution than individual resonators. This can indicate that considerable optical energy is trapped in the near-field and. resulting in a higher qualit factor or sharper resonance.

[^'0061 j Second, the wa velength tuning range of the exemplary reflect-array shown in the graph of Figure 5(a) can be large. For example, by changing the bias voltage fVg), the resonant wavelength can be shifted by Δ = 0.85μηι 02.5% λ^^ compared, to Α - ϋ.δμ.ϊ« (8.5% ^' ζϊά_ΐ ) for the exemplary single layer of rod antennas shown in Figure 2(c). The increased wavelength tuning can also he due to enhanced optical near-fields in the reflect- array structure. For example, the intensity enhancement in the antenna gap of the reflect- array can be, e.g., -20,000, about six (6) times greater than enhancement in the antenna gap of the single-layered rod array structure shown in Figure 2(a).

[ΘΘ62} Third, the available exemplary phase tuning range for particular wavelengths of niid-IR radiation can be large due to the coupling between the antennas and their images in the back-plane. For example, the graph, of Figure 5(c) can indicate that the phase of the reflected roid-IR radiation can be continuously tuned over, e.g., --240 degrees for wavelengths in the range, e.g., about 6.5-7.0μη This exemplary range can represent: an eight-fold increase over ihe range available from the single-layer rod array structure shown in ihe illustration of Figure 2(a). Coupled antennas can provide the entire 2it phase coverage, as demonstrated in near- infrared and microwave spectral ranges (see, e.g., Refs. |30),[3 l , and

[36]}.

[0063] According to other exemplary embodiments of the present disclosure, these exemplar)'' principles may be applied to the aperture antenna structure shown in Figure 4(a) to obtain an aperture reflect-array, such as the exemplary structure shown in Figure 6(a). In these embodiments, a graphene sheet is disposed in contact with a silicon dioxide (SiO?) layer, with the graphene covering the entire surface i certai embodiments. The SiO? layer is disposed in contact with a metallic substrate, which in some exemplary embodiments of the present disclosure ma be a gold (Au) substrate. Figure 8 further illustrates the top (x-y) and side (x-z) views of this arrangement for the exemplar).' embodiment shown in Figure 6(a). In some exemplary embodiments of the present disclosure, the parameters of Figure 8 for this exemplary embodiment ma be substantially the same as the parameters for the exemplary embodiment shown in Figure 2(a), except that substrate 810^' can be a different material, and SiOj layer 820 can have an. exemplary thickness of about 400 am. Nevertheless, these dimensions are merely exemplary and the person of ordinary skill will readily comprehend that other dimensions may be employed advantageously.

[0064] Figures 6(b) and 6(c) show exemplar}-' graphs of the intensity and phase, respectively, at particular mid- R wavelengths of the aperture re fleet-array shown, in the illustration of Figure 6(a). For example, the graph of Figure 6(b) illustrates that the in resonant wavelength tuning range can be, e.g., Δλ ~ 0.66μκί (ϊθ.8% of %vxa∞i)_> the resonant dips can have a waist of e.g., about 0.5-1 μηα, and the change in reflectivity A can be -90%. Moreover, the graph of Figure 6(c) indicates thai in the mid-IR wavelength range of, e.g., 6.0-6.25pm, the available phase tuning range can be approximately 240 degrees. These properties compare favorably with the results for aperture antennas on a SiOj-Si substrate, shown in and discussed abo ve wit reference to the exemplary graphs of Figures 4(d)-4(e).

[Θ065) Figure 15(a) shows a schematic illustration of a a further tunable aperture antenna supporting multiple resonances that can provide a wider phase tuning range, according to one or more exemplary embodiments of the present disclosure. The exemplary aperture antenna shown in Figure .15(a), which may be a unit cell of an. antenna array, may provide at. least three resonances due to its folded, multi -segment geometry. As discussed herein with respect to other exemplary embodiments, (he exemplary structure of Figure 15(a) may comprise a metallic layer disposed on top of a graphene mesh, layer, such, that the graphene mesh is exposed in the antenna gaps.

|ΘΘ66| Figure .15(b) shows an illustration of a strong interact ion between the graphene and metal in the antenna gaps, showing an exemplary out-of-plane component of magnetic field, of two antenna modes at wavelengths of 8.5 and 10,7 μηι for a graphene doping level of 1x10'⁶ ra^"':. Figure 15(b) illustrates, for example, two higher-order antenna resonances in the exemplary antenna structure shown in Figure 15(a). Each of these resonances may introduce large phase shifts, bringing the total available phase shift to -600 degrees. This is illustrated, for example, by Figure 15(c), which shows the phase shift introduced by the exemplary antenna, structure of Figure 15(a) for a range o f mkH wavelengths at. each of two graphene doping levels. Figure 15(d) shows the difference betwee the two phase curves of Figure 15(c), illustrating that, an exemplary phase modulation range of 460 degrees can be achieved by selecting between the two graphene doping levels.

(0067) Figures 16( a) and 16(b) show i tins (rations of the top and side views, respectively, of a split-ring resonator antenna, according to one or more exemplary embodiments of the present disclosure. The exemplary split-ring resonator antenna shown in Figures f 6(a) and 16(b), which may be unit cell of an antenna array for binary-intensity modulation, comprises a long gap that can increase the volume of interaction between light and graphene, thereby maximizing the perturbation caused by the resonator. This exemplary effect is shown in an exemplary illustration of Figure 16(c), which indicates the strong interaction between infrared light and graphene in the antenna gap of the exemplary antenna structure shown in Figure 16(a), Figure 16(d) illustrates a graph providing additional advantages of this structure, including an available 18.7% tuning of resonant wavelength and >10x range of transmission power modulation (e.g., 7% to 75%) at λ=6.3 μηι by selecting between two exemplary graphene doping levels.

|0068| In other exemplary embodiments according to the present disclosure, exemplary mid-lR intensit modulators with a desirable high extinction ratio r_e (i.e., ratio of "on" and "off reflective intensities) and fast modulation speed can be constructed using re fleet-arrays comprising identical rod or aperture antennas sharing a common bias voltage. For example, a maximum r_e -980 at λ-7.24μηι can be achieved using refiect-arrays of rod antennas. Moreover, exemplary refiect-arrays of rod antennas may have a range of wavelength exhibiting a suitably large r_e, e.g., the range for /^■> 100 may be as much as 0.15 pm. Reflect-arrays of aperture antennas can have similar performance, e.g., ?y~l 10 at λ^::::6.45 μπι and

as shown in the graph, of Figure 6(b). A mid-IR intensity modulator, can comprise a 50x50 array of rod antennas with a footprint of -lOOjim x 100μη% provides an available modulation rate of a few GHz. This rate is limited by the resistance-capacitance (R.C) time constant of the exemplary device. The resistance is typically a few kilo-ohms (kO), mainly due to the contact resistance between graphene and antenna electrodes. The exemplary capacitance can occur between the graphene mesh and the gold back-plane. The large extinction ratio r_e and high available modulation rate can be suitable for modulating, e.g., single-mode, mid-IR lasers such as CO? lasers and quantum cascade lasers.

[ΘΘ69] A block diagram of an exemplary modulation system 900 according to one or more exemplary embodiments of the present disclosure is shown in Figure 9. Exemplary modulation system 900 can comprise a control device 910, an adjustable voltage source 920, and a modulator 930, Modulator 930 can receive an incident radiation, such as from a CO?, infrared laser, and outputs radiation in which one or more wavelengths (e.g., one or more mid-IR wavelengths) have been modulated in intensity, phase, and/or polarization. Modulator 930 can comprise, for exampie, an aperture reflect-array antenna with a graphene mesh layer such as shown in Figure 6. Source 920 provides a single output voltage for controlling modulator 930. Control device 910 can instruct source 920 to output a particular voltage level corresponding to the intensity, phase, and/or polarization modulation desired for one or more wavelengths of the radiation incident to modulator 930. This can. be performed in various ways including, for example, by accessing doping response information corresponding to the wavelength(s) to be modulated that can be stored in memory' of control device 910, e.g., in a lookup table. For exampie, the doping response information may comprise on or more settings for voltage source 920 corresponding to the graphene doping required to effect a desired range of amplitude and/or phase modulations for each of the mid- IR wavelengths of interest. In some exemplary embodiments of the present disciosore, the doping response information may comprise sampled versions of one or more of the intensity, phase, and polarization versus wavelength for the particular antenna comprising modulator 930 such as, for example, intensity and phase graphs shown in Figures 5(b) and 5(c).

|007Oj Figure 12 is a flow diagram of an exemplary method for controlling modulation of intensity, phase, and/or polarizatio of radiation (e.g., mid-IR radiation.) by a modulator, such as modulator 930 comprising an aperture reflect-array antenna with a graphene .mesh laye described above with reference to Figure 9, The exemplary method shown in Figure 12 may be performed by a control device, such as control device 910 described above with reference to Figure 9. Although the exemplary method is illustrated, in Figure 12 by blocks in a particular order, this order is merely exemplary and the steps/procedures of the method may be performed in a different order than shown by Figure 12, and may be combined and/or divided into blocks having different functionality.

[0071 j For example, as shown in Figure 12, in block 12 0, the control, device can receive input indicating the desired modulation of intensity, phase, and/or polarization of radiation (e.g., mid-IR radiation). The range of radiation to be modulated may comprise a single wavelength or a range of wavelengths, in some exemplary embodiments of tire present disclosure, the desired intensity modulation may comprise a binary ("on'T'off') value. In some exemplary embodiments of the present disclosure, the desired phase modulation may- comprise a value between ~π and it radians. In block 1220. the control device can determine one or more parameters for effectuating the desired modulation. This can. be performed in various ways including, for example, by accessing doping response information corresponding to one or more wavelength(s) to be modulated. As discussed above, the doping response information ma comprise information that can be used to determine one or more parameters (e.g., settings) for an adjustable voltage source whose output controls the doping of the graphene mesh layer as re uired to effectuate the desired modulation, in block 1230, the control device provides the one or more parameters determined in block 1220, e.g., by sending a message comprising the one or more parameters to an adjustable voltage source or a modulator, in block 1240, the control device can deiemrine the next action required. If a change in modulation is required (e.g., new input received), the process returns to block 1210. if the current .modulation is t be maintained, the process can loop back to the input of block 1240. If the control device determines that the modulation is to be terminated, it can proceed to block 1250 where the process ends.

[0072] In other embodiments, binary'- intensity (i.e., on/off) SLMs can be created by using arrays of aperture antennas individually addressable by electronics. Figure 10 shows an exemplary SLM created from an array of metallic aperture antennas (identified by representative elements 1010-1040). Each metallic aperture section (e.g., element 1010) is disposed in contact with a graphene mesh section (e.g., element 101.1) that is isolated from graphene mesh sections in contact with other metallic aperture section (e.g., antenna 1020), Similar to the arrangement of Figure 6(a), the mesh sections are disposed on a SiO? layer 1080, which is disposed on a gold (Au) substrate 1090. Moreover, each metallic section is conaected to an individual control line (e.g.,. element 1012) such, that die voltage between each metallic section (e.g., element 1010} and substrate .1090 can be adjusted independently of the voltage applied to other antenna sections (e.g., element 1020), in this exemplary manner, spatial dependent modulation of radiation (e.g., .tivid-i.R. wavelengths) can be achieved by adjusting the doping of each grap.hene mesh section according to the principles discussed herein. A binary-intensity SLM constructed according to these principles will exhibit a fast frame rate because the RC time constant of individual antennas can be very small (e.g.. a few tens of ps) allowing for fast switching. SLMs based on antennas with sub- wavelength footprints will have high spatial resolution, which facilitates control of not only far-Held but. also optical near-field nd meso-field. A binary-intensity SLM constructed according to these principles can be configured into a binary hologram to synthesize complex 3D light fields (see, e.g., Refs. [4?|-|48]).

[0073] A block diagram, of an exemplar)' spatial light modulation (SLM) system 1 1.00 according to one or more further exemplary embodiments of the present disclosure is shown in Figure 1 1. SLM system 1100 comprises a control device 1 1 1 , an adjustable voltage source 1.120, and a N-pixel SLM 1. 1.30. For example, as shown in Figure 1 .1 , SLM 1 I 30 receives incident radiation, including an N-pixel image, and outputs an N-pixel image for which one or more wavelengths (e.g., nud-iR wavelengths) of one or more of the N pixels has been modulated in amplitude, phase, and/or polarization. SLM 1130 may comprise, for example, an aperture refleet-array antenna such as shown in Figure 10. Source 1 120 provides independent output voltages corresponding to each of the pixels that SLM 1130 is capable of modulating. For each of the pixels in each frame of the output image, control device 1.1 10 instructs source 1 120 to output: a particular voltage corresponding to the amplitude and/or phase modulation desired for that pixel. This can be performed in various ways including, for example, by accessing doping response information that can be stored in memory of control device 1 1 1 , e.g., in a lookup table. For example, the doping response information may comprise one or more settings for voltage source 1 120 corresponding to the graphene doping required to effect a desired range of amplitude, phase, and/or intensity modulations for one or more wavelengths of interest. In some exemplary embodiments of the present disclosure, the doping response information may comprise sampled versions of one or more of the intensity, phase, and polarization versus wavelength for the particular antenna comprising SLM 1 130 such as, for example, the exemplary intensity and phase graphs shown in Figures 5(b) and 5(c). [ΘΘ74] Figure 13 is a flow diagram of an exemplary method for controlling modulation of intensity, phase, and/or polarization of radiation (e.g., mid-l^'R radiation) by a spatial light modulator (SLM), such as SLM 1 130 comprising an aperture reflect-array antenna with a graphene mesh layer described above with, reference to Figure 1 1 . The exemplary method shown hi Figure 13 may be performed by a control device, such, as control device 1 110 described above with reference to Figure 1 1. Although the exemplary method is illustrated in Figure 13 by blocks in a particular order, this order is merely exemplary and the steps/procedures of the method may be performed in a different order than shown by Figure 13, and may be combined and/or divided into blocks having different functionality.

(ΘΘ75) In block 1310, the control device can receive input indicating the desired ^•modulation of intensity, phase, and/or polarization of radiation (e.g., mid-IR radiation) for each of the pixels in an incident image frame. The range of radiation to be modulated may comprise a single wavelength or a range of wavelengths. In some exemplary embodiments of the present disclosure, the desired intensity modulation for each of the N pixels may comprise a binary ("οη 'οίϊ") value, while in other embodiments the intensity may comprise an attenuation amoun (e.g., % or dS of maximum). In some exemplary embodiments of the present disclosure, the desired phase modulation may comprise a value between -~π and n radians for each of the N pixels, in block 1315, the control device can initialize the pixel counter, , to zero. In block 1320, the control device can determine the necessary parameters for effectuating the desired modulation for pixel . This can be performed in various ways including, for example, by accessing doping response information corresponding to one or more wavelengi!i(s) to be modulated. As discussed above, the doping response information may comprise information that, can be used to determine one or more parameters (e.g., settings) for an adjustable voltage source whose output, controls the doping of the graphene mesh layer as required to effectuate the desired modulation. In block 1330, the control device provides the one or more parameters determined in block .1320 for pixel , e.g., by sending a message comprising the one or more parameters to an adjustable voltage source or a modulator. The control device can increment the pixel counter, in block 1335 and can. determine in block 1 340 if additional pixels need to be modulated. If so, the process returns to block 1320. If not, the process can proceed to block 1350 where the control device can determine the next action preferred or required. If a new image frame is available to be modulated, the process returns to block 13 10. If the current modulation is to be maintained. the process can loop back to the input of block 1350. i f the con trol device determines that the modulation is to be terminated, it can proceed to block 1360 where the process ends.

{0066} As shown in the exemplary graphs of Figures 5(c) and 6(c), the phase toning range of the reflecl-array designs of Figures 5(a) and 6(a) can be up to -'240 degrees, which may be insufficient for applications requiring fall phase control of optica! wavefrotrts. Nevertheless, more complex structures that support two or multiple antenna resonances such as V-antennas (see, e.g., Refs. [23]-[2?^'j and {29}^') and concentric loop antennas (see, e.g., Ref. [28]) can extend the phase response to potentially cover the entire 2κ range. To realize full analog-phase SLMs, for example, array elements with large phase modulation and small variations in scatterin amplitude can be utilized. Antenna structures with multiple resonances can provide additional degrees of freedom in optical design and reduce the correlation between phase and amplitude response. For example, large phase variations with minimal changes in scattering amplitude have been demonstrated in V-antennas (see, e.g., Refs. [23 }-|27| and [2 {).

|^'006 J Although exemplary embodiments are disclosed herein as using graphene, the person of ordinary skill will readily understand that graphene is merely an exemplary material and many other such materials may he used advantageously- For example, electrically-tunable, thin-film materials such as vanadium dioxide, boron nitride, and molybdenum disulfide may be combined with metal in a plasmonic antenna according to various exemplary embodiments of the present disclosure.

{0068} Moreover, although embodiments disclosed herein (e.g., embodiments illustrated by Figures 2 , 4-8, 10, 15 and 16) are described as having a metallic layer disposed on top of a graphene (or other thin-film material) layer, winch in turn can be disposed on top of a substrate or dielectric, persons of ordinary skill will recognize that the order of the metallic and graphene layers may be reversed in other exemplary embodiments. In other words, a graphene iayer can be disposed advantageously on top of a metallic layer, which in turn can be disposed advantageously on top of a substrate or dielectric.

{0069} Figure 14 shows a block diagram of an exemplary control device or apparatus utilizing certain embodiments of the present disclosure, including execution of instructions comprising the computer-readable medium that causes modulation of mid-LR radiation according to one or more of the embodiments described herein above. For example, a device 1400 may be used as control device 910 and/or control device 1 1 10 shown in Figures 9 and 1 1 , respectively. Exemplary device 1400 can comprise a processor 1410 that can be operahly conaected to a program memory 1420 and/ r a data memory 1430 via a bus 1470 that may comprise parallel address and data buses, serial ports, or other methods and/or structures known io those of ordinary skill in the art. Program memory 1420 comprises software code or program executed by processor 1410 that facilitates, causes and/or programs exemplary device 1400 to communicate using one or more wired or wireless communication protocols, including one or more wireless communication protocols standardized by 3GP.P, 3GPP2, or IEEE, such as those commonly known as LTE, UMTS, HS^'PA, GSM, GPRS, ^'EDGE, lxRTT, CDMA2000, 802.1.1 , WiFi, HDMJ, USB, Firewire, etc, or any other protocols utilized in conjunction with radio transceiver 1440, user interface 1450, and/or host interface 1460. (ΘΘ70) Program memory 1 20 can also comprises software code executed by processor 1410 to control the functions of device HOC), including configuring and controlling various components such as radio transceiver 1440, user interface 1450, and/or host interface 1460. Program memory 1420 may also comprise an application program that causes modulation of mid-l^'R radiation according to one or more of the embodiments described herein. Such software code may be specified or written using any known or future developed programming- language, such as e.g. Java, C++, C, Objective C, HTML, XHTML, and Assembler, as long as the desired functionality, e.g. , as defined by the implemented method steps, is preserved. In addition or alternatively, program memory 1420 may comprise an external storage arrangement (not shown) remote from device 1.400, from which, the instructions can be downloaded into program memory 1420 located within or removably coupled to device 1 00, so as to enable execution of such instructions,

|M7! j Data memory 1430 may comprise memory area for processor .1 1 to store variables used in protocols, configuration, control, and other functions of device 1400, including modulating mid-i.R radiation according to one or more of the embodiments described herein. For example, data memory 1430 may include the doping response information (e.g. , lookup tables) described above with, reference to Figures 9 and 1 1 . Moreover, program, memory 1420 and/or data memory 1430 m y comprise non-volatile memory (e.g., flash memory), volatile memory (e.g., static or dynamic RAM), or a combination thereof. Furthermore, data memory 1430 may comprise a memory slot by which removable memory cards in one or more formats (e.g., SD Card, Memory Stick, Compact Flash, etc.) may be inserted and removed. Persons of ordinary skill in the art will recognize that processor 1410 may comprise multiple individual processors (e.g., multi-core processors), each of which implements a portion of the functionality described above. In such case, multiple individual processors may be commonly connected to program memory 1420 and data memory .1430 or individually connected to multiple individual program memories and or data memories. More generally, persons of ordinary skill in the art will recognize that various protocols and other functions of device 1400 may be implemented in many different combinations of hardware and software including, but not limited to, application processors, signal processors, general-purpose processors, multi-core processors, ASICs, fixed digital circuitry, programmable digital circuitry, analog baseband circuitry, radio-frequency circuitry, software, firmware,, and middleware.

(ΘΘ72} Radio transceiver 1440 may comprise radio-frequency transmitter and/or receiver functionality that enables device 1400 to communicate with other equipment supporting like wireless communication standards. In an exemplary embodiment, radio transceiver 1440 includes an LTE transmitter and receiver thai enable device 1400 to communicate with, various Long Term Evolution (LTE) networks (also known as "4G") according to standards promulgated by 3 GPP. In some exemplary embodiments of the present disclosure, radio transceiver 1440 includes circuitry, firmware, etc. necessary for device 1400 to communicate with various UMTS artd or GSM/EDGE networks, also according to 3GFP standards. In some exemplary embodiments of the present disclosure, radio transceiver 1440 includes circuitry, firmware, etc. necessary for device 1 00 to communicate with various CDMA2000 networks, according to 3GPP2 standards. In some exemplary embodiments of the present disclosure, radio transceiver 1 40 is capable of communicating using radio technologies that operate in unlicensed frequency bands, such as IEEE 802.1 1 WiFi that operates using frequencies in the regions of 2.4 and/or 5.6 GHz, In some exemplary embodiments of the present disclosure, radio transceiver 1440 may comprise a transceiver that is capable of wired communication, such as by using IEEE 802.3 Ethernet technology. The functionality particular to each of these embodiments may be coupled with or controlled by other circuitry in device 1400, .such as processor 1 10 executing protocol program code stored in program memory 1420.

[0073 j User interface 1450 ma take various forms depending on the particular embodiment of device 1400. In some exemplary embodiments of the present disclosure, user interface 1450 may comprise a microphone, a loudspeaker, slidable buttons, depressable buttons, a display, a touchscreen display, a mechanical or virtual keypad, a mechanical or virtual keyboard, and/or any other user-interface features commonly found on mobile phones. In other embodiments, device .1400 may comprise a tablet computing device (such as an iPad® sold by Apple, Inc.) including a larger touchscreen display. In such embodiments, one or more of the mechanical features of user interlace 1450 may be replaced by comparable or functionally equivalent virtual user interface features (e.g., virtual keypad, virtual buttons, etc) implemented using the touchscreen display, as familiar to persons of ordinary skill, in ihe art. In other embodiments, device .1400 may be a digital computing device, such as a laptop computer, desktop computer, workstation, etc. that comprises a mechanical keyboard that may be integrated, detached, or detachable depending on the particular embodiment. Such a digital, computing device may also comprise a touch, screen, display. Many exemplary embodiments of device 1400 having a touch screen display are capable of receiving the user inputs, e.g., related to controlling modulation of radiation incident on an antenna, according to various exemplary embodiments described herein.

[ΘΘ74] In some exemplary embodiments of the present disclosure, device 1400 may- comprise an orientation sensor, which can be used to sense when the user has changed the physical orientation of the device 1400's touch screen display. An indication signal from the orientation sensor may be available to any application program executing on device 1400, such that an application program may change the orientation of a screen, display (e.g. , .from portrait to landscape) automatically when the indication signal indicates an approximate 90- degree change in physical orientation of the device, hi this manner, the application program can maintain the screen display in a manner that is readable by die user, regardless of the physical orientation of the device.

|^'0075| Control interface 1460 of device 1400 may take various forms depending on the particular embodiment of device 1400 and of the particular interlace requirements of the hardware under control of device 1400 including adjustable voltage sources (e.g., sources 920 and 1 140 shown in figures 9 and 1 1 , respectively) used to vary the graphene doping level for modulating mid-IR radiation according to embodiments described herein. For example, control interface 1460 may comprise an RS-232 interlace, an RS-485 interface, a USB interface, an HDMi interlace, a Bluetooth interface, or the like, in some exemplary embodiments of the present disclosure, control interface 1460 may comprise an IEEE 8023 Ethernet interface such as described above, in some exemplary embodiments of the present disclosure, control interface .1460 may comprise analog interface circuitry including, for example, one or more digital-to-analog (D A) and/or analog-to-digital (A D) converters. (ΘΘ76) Persons of ordinary skill in the art will recognize the above list of features, interfaces, and radio-frequency communication standards is merely exemplary and not limiting io the scope of the present disclosure. In other words, device 1400 may comprise more functionality than is shown in Fig. 14 including, for example, a video and/or still-image camera, microphone, media player, etc. Moreover, radio transceiver 1440 may include circuitry necessary to communicate using additional radio-frequency communication standards- including Bluetooth, GPS, and/or others. Accordingly, processor 14.10 may execute software code stored in program memory 1420 to control such additional functionality,

[0Θ77] As described herein, a device or apparatus may be represented by a semiconductor chip, a chipset, or a (hardware) module comprising such chip or chipset; this, however, does not exclude the possibility thai a functionality of a device or apparatus, instead of being hardware implemented, be- implemented as a software module such as a computer program or a computer program product comprising executable software code portions lor execution or being run on processor. A device or apparatus may be regarded as a device or apparatus, or as an assembly of multiple devices and-'or apparatuses, whether functionally in cooperation with or independently of each other. Moreover, devices and apparatuses may he implemented in a distributed fashion throughout a system, so long as the functionality of the device or apparatus is preserved. Such and similar principles are considered as known to a skilled person.

(0078} In. summary, exemplary designs of electrically-tunable grapheiie-metal plasmatic antennas according to exemplary embodiments of the present disclosure can be provided, which can be used for building mid-l reconfigurable flat optical components. This can be advantageous over conventional devices, such as providing a reduction, in size and weight, elimination of movable parts and exotic materials, and increased design freedom in engineering near-field and meso-fie!d. Flat components comprising arrays of phased elements have achieved considerable success in other spectral range, examples including liquid-crystal spatial light modulators for visible light (see, e.g., Ref. (49]) and micro-wave active phased array radar (see, e.g., Ref. [50]). It Is likely that flat optical components may also have a significant impact io the roid-Dl spectral range and lead to unique and important applications. For example, mid-lR modulators can facilitate communication, navigation, and surveillance through scattering media (e.g., foggy or dusty environments); mid-lR beam-steering devices with large scan angles and fast scanning rate, and without movable components will be of primary importance to remote-sensing LI AR systems,

(0079} The foregoing merely illustrates the principles of the disclosure. Various modifications and alterations to the described embodiments will be apparent to those skilled in the art in view of the teachings herein, it will thus be appreciated that those skilled in the art will be able to devise numerous systems, arrangements, and procedures which, although not explicitly shown or described herein, embody the principles of the disclosure and can be thus within the spirit and scope of the disclosure. Various different exemplar -' embodiments can be used together with one another, as well as interchangeably therewith, as should be understood by those having ordinary skill in the art In addition, certain terms used in the present disclosure, including the specification, drawings and claims thereof can be used synonymously in certain instances, including, but not limited to, e.g., data and. information, it should he understood thai, while these words, and or other words that can be synonymous to one another, can be used synonymously herein, thai there ears be instances when such words can be intended to not be used synonymously. Further, to the extent that the prior art knowledge has not been explicitly incorporated by reference herein above, it is explicitly incorporated herein in its entirety. All publications referenced are incorporated herein by reference in their entireties.

EXEMPLARY REFERENCES pM) ] The following references are hereby incorporated by .reference in. their entireties:

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?

Claims

WHAT IS CLAIMED IS:

1 , A planar antenna for radiation, comprising:

a layer comprising one or more sections of a tunable thin-film material; and a metallic layer co»ipris.rag one or more metallic sections, wherein, each metallic section is disposed in contact with at least one of the one or more tunable thin-fihn sections and comprises at least one gap, wherein at least one dimension of the at least one gap is related to at least one wavelength of the radiation. 2, The antenna of claim 1, wherein the tunable thin-film material comprises at least one of graphene, vanadium dioxide, boron nitride or molybdenum, disulfide.

3. ^'The antenna of claim 1 , wherein the metallic layer comprises a plurali ty of rods arranged in a plurality of shapes, with nanoscale gaps in at leasi one dimension between adjacent shapes.

4, The antenna of claim 1, wherein the radiation comprises a mid-infrared ("mid-I^' ") radiation.

5. The antenna of claim 1 , wherein the metallic layer comprises one or more apertures having at least one dimension less than the at least one wavelength of the radiation.

6. The antenna of claim 1, wherein shapes of the one or more apertures compri ses one or more of a rectangle, a cross, a bowtie, a "V, an "H'\ or a spiral.

7, The antenna of claim 1 , further comprising a substrate comprising one of a

semiconductor and a conductor.

8 The antenna of claim ?, wherein:

the substrate comprises one of gold (An) and doped silicon (Si); and

the metallic layer comprises gold (Au).

9, The antenna of claim 7, wherein the spacing between the metallic layer and the substrate is less than the at least one wavelength of the radiation.

10. The antenna of claim ! , further comprising one or more elec trical connecti ons for tuning the resonance of the antenna, wherein each of the one or more electrical connections is attached to at least one of the one or more ^'metallic sections or to at least one of the one or more tunable thin-film materia! sections.

1 1. A system for modulating radiation, comprising:

a planar antenna comprising one or more sections of a tunable thin-film material; an adjustable voltage source coupled to the one or more sections of the tunable thin- film material; and

a control device coupled to the adjustable voltage source and configured to;

receive input concerning a desired modulation of at leasi. one wavelength of the radiation by the antenna, wherein the radiation is at least one of transmitted and reflected radiation;

determine one or more parameters of the adjustable voltage source that e ffectuate the desired modulation by varying the doping level o f the one or more sections of the tunable thin-film material; and

provide the determined one or more parameters to the adjustable voltage source.

12. The system of claim 11 , the control device farther comprising;

at least one processor; and

a non-transitory, computer-readable medium comprising computer-executable instructions that, when executed, by the at least one processor, cause the control device to receive the input, determine the setting, and send the control message.

13. The system of claim 1 ί , wherein the tunable thin-film material comprises at least one of graphene, vanadium dioxide, boron nitride, or molybdenum disulfide.

14. The system of claim i f. , wherein the desired, modulation comprises at least one o intensity, phase, and polarization modula tion of at ieast one wavelength of a mid-infrared C'niid-IR") radiation.

15. The system of claim 1 1 , wherein:

the antenna further comprises a metallic layer comprising one or more metallic sections;

each metallic section is disposed m contact with at least one of the one or more tunable tfam- film material sections and comprises at least one gap, and

a t least one dimension of the at least one gap is related to at least one wavelength of the radiation.

16. The system of claim 15, wherein the metallic layer comprises a plurality of rods arranged in a plurality of shapes, with nanoscale gaps in at least one dimension between adjacent shapes.

17. ^'The system of claim 15, wherein the metallic layer comprises one or more apertures having at least one dimension less than the at least one wavelength of the radiation,

18. The system of claim i 7, wherein shapes of the one or more apertures comprises one or more of a rectangle, a cross, a bowtie, a "T\ or "FT, and a spiral

19. The system of claim 15, wherein the metallic layer comprises gold (An).

20. The system of claim 15, wherein;

the computer-readable medium further comprises doping response information describing at least one of intensity, phase, and polarizatio of one or more wavelengths of the radiation for each of a. plurality of doping levels of the one or more sections of tunable thin- film material, and

the control device is configured to determine the one or more parameters by accessing the doping response information.

21. The system of claim 1 1 , wherein:

the adjustable voltage source is independently coupled to each of the one or more sections of the tunable thin- film material; and

the control device is configured to determine one or more parameters that will vary die doping level of at least one of the one or more sections of tunable thin-film material independently of the doping level of at least one other of the one or more sections of tunable thin-film material.

22. The system of claim 21, wherein the control device is further configured to determine one or more parameters that vary the doping level of each of the one or more sections of the tunable thin-film material independently of the doping levels of all other of the one or more sections of tunable thin-film material,

23. The device of claim 21„ wherein each of the one or more parameters is related to a voltage to be applied between one of the sections of the tunable thin-film material and a substrate of the antenna...

24. A device for controlling the modulation of radiation by an antenna comprising one or more sections of a tunable thin-.film material, comprising:

at least one processor;

control interface; and

a non-transitory,, computer-readable medium comprising computer-executable instructions that, when executed by the at least, one processor, cause the device to:

receive input concerning a desired modulation of at least one wavelength of the radiation, wherein the radiation is at least one of transmitted and reflected radiation;

determine one or more parameters for eiTectuating the desired modulation by varying the doping levels of the one or more sections of the tunable thin-film material; and

provide the determined one or more parameters via the control interface.

25. The device of claim 24, wherein:

the device further comprises doping response information describing at least one of intensity, phase, and polarization of one or more wavelengths of the radiation for each of a plurality of doping levels of the one or more sections of tunable thin-film material; and

the device is configured to determine the one or more parameters by accessing the dopin response information.

26. The device of claim 24. wherein die tunable thin-film material comprises at least one of graphene, vanadium, dioxide, boron nitride, or molybdenum disulfide.

27. The device of claim 24, wherein each of the one or more parameters is related to a voltage to be applied between one of the sections of the tunable thin-film material and a substrate of the antenna.

28. The device of claim 24, wherein each of the one or more determined parameters effectuates the modulation of an individual pixel of an image incident on the antenna.

29. The device of claim 24, wherein the desired modulation comprises at least one of an intensity, a phase, or a polarization modulation of at least one wavelength of a mid-infrared ("mid-lR") radiation.

30. A oon-transitory, computer-readable medium comprising computer-executable instructions that, when executed by at least one processor, cause the at least, one processor to: receive input concerning a desired modulation of at leas one wavelen gth of rad iation by an antenna comprising one or more sections of a tunable thin- ilm material, wherein the radiation is at least one of transmitted and reflected radiation;

determine one or more parameters for effectuating the desired, modulation by varying the doping le vel of the one or more sections of the tunable thin-film material; and

provide the determined one or more parameters to a modulator.

32. The computer-readable medium of claim 3.1 , wherein the computer-readable medium further comprises: doping response information describing at least one of a intensity, a phase, or a polarization of one o r more wavelengths of the radiation for each of a pl uralit y of doping levels of the one or more sections of a tunable thin-lint material; and

computer-executable instructions that, when executed by the at least one processor, cause the at ast one processo to determine the one or more parameters by accessing the dopin response information.

33. The computer-readable medium of claim 32, wherein the tunable thin-film material comprises at least one of graphene, vanadium dioxide, boron nitride, or molybdenum

disulfide.

34. The computer-readable medium of claim 32, wherein each of the one or more parameters is related to a voltage to be applied between one of the one or more sections of the tunable thin- film material and a substrate of the antenna.

35. The computer-readable .medium of claim 32, wherein each of the one or more parameters effectuates the modulation of an individual pixel of an image incident on the antenna, 36. The computer-readable medium of claim 32, wherein the desired, modulation.

comprises at least one of an intensity, -a phase, or a. polarization modulation of at least one wavelength of a mid-infrared ("raid-!R") radiation..

37. A computer-implemented method, comprising:

receiving input concerning a desired modulation of at least one wavelength of radiation by an antenna comprising one or more sections of a tunable thin-film material, wherein the radiation is at least one of transmitted and reflected radiation;

determining one or more parameters for effectuating the desired modulation by varying the doping level of the one or more sections of the tunable thin-film material; and providing the determined one or more parameters to a modulator.

38. The computer-implemented method of claim 37, wherein determining one or more parameters further comprises accessing doping response information describing at least one of an intensity, a phase, and a polarization of one or more wavelengths of the radiation for each of a plurality of doping levels of the one or more sections of the tunable thin-film material. 39. The computer-implemented .method, of claim 37_t wherein, the tunable thin-film material comprises at least one of graphene, vanadium dioxide, boron nitride, or molybdenum disulfide.

40. The computer-implemented method of claim 37, wherein each of the one or more parameters is related to a voltage to be applied between one of the one or more sections of the tunable thin-film materia! and ^'substrate of the antenna.

41. ^'The computer-implemented method of claim 37, wherei each of the one or more parameters effectuates the modulation of an individual pixel of an image incident on the antenna.

42. The computer-implemented method of claim 37, wherein the desired modulation comprises at least one of intensity, phase, and polarization modulation of at least one wa velength of a mid-infrared ("mid-iR") radiation.