WO2014139293A1 - 一种集成旋转变压器的静态真空轴系装置 - Google Patents
一种集成旋转变压器的静态真空轴系装置 Download PDFInfo
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- WO2014139293A1 WO2014139293A1 PCT/CN2013/087398 CN2013087398W WO2014139293A1 WO 2014139293 A1 WO2014139293 A1 WO 2014139293A1 CN 2013087398 W CN2013087398 W CN 2013087398W WO 2014139293 A1 WO2014139293 A1 WO 2014139293A1
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- vacuum
- resolver
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
- H02K5/124—Sealing of shafts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F38/00—Adaptations of transformers or inductances for specific applications or functions
- H01F38/18—Rotary transformers
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
- H02K5/128—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas using air-gap sleeves or air-gap discs
Definitions
- the present invention relates to an apparatus in the field of vacuum robots, and more particularly to a static vacuum shafting apparatus integrated with a rotary transformer.
- the vacuum robot is the core component of the wafer transfer between the reaction process chambers in the cluster type equipment. Because the vacuum robot needs to operate in a vacuum environment, the seal isolation and power transmission between the atmospheric environment and the vacuum environment is the constraint vacuum. The technical bottleneck of robot performance improvement. Since the motor shafting and its displacement measuring device are the core components of the vacuum robot, the vacuum isolation of the motor and the position detecting component has become a key technology for designing the vacuum robot shafting.
- Atmospheric robots can mount the motor directly at the joint position to drive the arm; while the vacuum robot arm must work in a high vacuum and high clean environment. If the motor is still directly connected to the arm, the plastic insulation material on the motor stator armature surface is in a vacuum environment. The released particles and gas will destroy the high cleanliness and high vacuum environment.
- the copper loss (heat work) of the direct drive motor is large, and it is difficult to dissipate heat in a vacuum environment, so the stator of the motor must be placed in the atmosphere. Therefore, how to transfer the power provided by the motor from the atmospheric environment to the mechanical arm in the vacuum environment has become a technical bottleneck for the development of vacuum robots.
- the commonly used vacuum mechanical hand shaft system generally achieves static sealing through a magnetic coupling, but has the following disadvantages: the bearing needs to adopt special lubrication method in the vacuum environment to reduce the pollution of the vacuum environment caused by the particles; the permanent magnet and the bonding glue are in the vacuum In the environment, there will be a certain gas leakage; there is a gap between the stator and rotor of the motor, the active rotor of the magnetic coupling and the follower rotor, which adds complexity to the control of the system and reduces The rigidity of the system.
- a position detecting component is often required, and the position and the rotational speed of the motor rotor can be detected in real time to achieve high-precision control of the rotational speed, torque and position of the motor to obtain good performance.
- the resolver is an electromagnetic sensor, it is essentially a small AC motor for measuring angles. It is used to measure the angular displacement and angular velocity of a rotating object. It has no electronic components inside. It consists only of a stator and a rotor. simple. Therefore, as the requirements for motor automation control increase, the motor for rotating the shaft system is equipped with a resolver as a common configuration.
- the motor used for the vacuum robot shaft system is large in weight and space
- the current structure in the arrangement of the resolver, the motor bearing and the rotor of the resolver have spatial interference, resulting in difficulty in arrangement, and at the same time due to space. Restriction, the distance between the resolver and other components is small, which will bring great difficulties in design, manufacture and maintenance. At the same time, it can not solve the vacuum isolation problem between the motor and the displacement measuring device, so the rotation is rarely used in the vacuum shaft system.
- the transformer acts as a displacement measuring device for the shafting.
- the main object of the present invention is to overcome the deficiencies of the prior art described above, and to provide a vacuum static shafting device integrated with a rotary transformer, which has a compact structure, reduced volume, flexible installation, and saves development cycle; Rigid coupling with the load to achieve the so-called “zero transmission” mode, smooth operation, low noise; seamless integration of the position detection component and the motor, can achieve the "zero leakage" seal transmission of the shafting, can be used for chemical air smelting, Vacuum, liquid, harmful gases, hazardous liquids and ultra-purifying environments in pharmaceutical equipment are especially suitable for power transmission of vacuum robots in high vacuum environments.
- a static vacuum shafting device integrated with a resolver comprising: a driving component, a vacuum sealing cover, a position detecting component, a shafting base, a vacuum isolation sleeve, a second type 0 sealing ring, A type 0 sealing ring, a first rolling bearing, a second rolling bearing, a bearing spacer, a transmission shaft, a shaft flange, a moving rolling bearing, a bearing gland, a bearing gland, a third type 0 sealing ring;
- the driving component comprises a coaxially mounted motor stator, a resolver stator, a motor and a resolver integrated rotor, a rotor flange, and a stator fixed clamp, wherein: the motor and the resolver integrated rotor and the rotor flange pass the screw Connected, the stator of the motor and the stator of the resolver are fixed on the inner side of the shaft base through the stator fixed clamp, and the coaxial base is closely matched;
- the vacuum sealing cover comprises a sealing cover upper flange, a sealing cover and a sealing cover lower flange, wherein: the sealing cover lower flange is fixed to the upper end surface of the shaft base by screws, and the second ring is opened on the shaft base a groove, the second annular groove is filled with a second type 0 sealing ring; the upper flange of the sealing cover is fixed to the shaft flange of the transmission shaft by screws, on the sealing cover A third annular groove is formed in the flange, and a third type 0 sealing ring is filled in the third annular groove, and the vacuum sealing cover can freely contract up and down, and cooperates with a driving mechanism for controlling the movement in the up and down direction, and can drive the entire shafting system.
- the base moves in the up and down direction;
- the lower end surface of the drive shaft and the rotor flange are fixed by screws.
- the upper end surface of the drive shaft extends to the outside and communicates with the vacuum environment.
- the upper end surface of the drive shaft is provided with a groove for mounting a floating rolling bearing, and the floating rolling bearing passes through the bearing.
- the gland is fixed on the upper end surface of the transmission shaft; the upper end surface of the transmission shaft is fixed with a shaft flange, and the first rolling bearing and the second rolling bearing are assembled between the rotor flange and the shaft base, the first rolling bearing and the second rolling bearing A bearing spacer is added between the bearing cover and the second rolling bearing is pressed against the shaft base.
- the inside of the vacuum isolation sleeve is a stepped hollow cover, and the vacuum isolation sleeve has a threaded hole at one end.
- the first annular groove is formed on the shaft base, and the first 0-ring is filled in the first annular groove, and the motor stator and the resolver stator are both rotated and rotated.
- a gap is formed between the transformer integrated rotors, and the vacuum isolation sleeve passes through the gap to isolate the motor from the rotary transformer integrated rotor to the motor stator and the resolver Child.
- the motor stator and the two sides of the resolver stator are both convex structures.
- the gap between the motor stator and the integrated rotor of the motor and the resolver, and the gap between the resolver stator and the integrated rotor of the motor and the resolver are both 1.5 mm to 2.5 mm.
- the gap between the motor stator and the integrated rotor of the motor and the resolver, and the gap between the resolver stator and the integrated rotor of the motor and the resolver are both 2 mm.
- the motor and the resolver-integrated rotor employ a hollow structure for enabling wiring to pass through the middle of the shafting.
- the magnet of the integrated rotor of the motor and the resolver is surrounded by a non-magnetic protective tube.
- the motor and the resolver integrated rotor use both gluing and positioning flanges to fix the position of the magnet.
- the surface of all of the motor and the resolver integrated rotor, the motor stator, and the resolver stator may be nickel plated or galvanized.
- the vacuum insulation sleeve is made of a non-magnetic material.
- the primary and secondary windings of the resolver are distributed on the stator side of the resolver.
- the present invention is achieved by the following technical solutions, including: a drive member, a position detecting member, a shaft base, a vacuum isolator, a vacuum seal cover, a flange, and a drive shaft.
- the driving component and the position detecting component are integrally assembled by a shafting static vacuum isolation method, and are uniformly installed inside the shaft base; the vacuum isolation sleeve passes through a gap between the driving component and the position detecting component, thereby realizing power from Atmospheric environment to vacuum The environment is transmitted, and the atmospheric environment and the vacuum environment are isolated at the same time; the lower end surface of the flange is connected to the vacuum isolation sleeve and the shaft base through the threaded holes, and the upper end surface of the flange is connected with the lower end of the transmission shaft, thereby realizing the driving part
- the power transmission of the shaft drive shaft is rotated coaxially; the lower end of the vacuum seal sleeve is connected with the shaft base through the flange, and the upper end of
- the driving component is a permanent magnet synchronous motor having a magnetic direct drive technology, which is composed of an outer magnetic stator and an inner magnetic rotor, and there is no contact between the stator and the rotor.
- the outer magnetic stator is composed of a rotating electromagnetic field coil as a driving component of the shaft. When the coil is energized, a rotating magnetic field is generated to drive the inner magnetic rotor that is closed in the vacuum vessel by the isolating sealing sleeve.
- the inner magnetic rotor and the vacuum robot's arm drive shaft are directly connected, and no deceleration mechanism such as a gear or a pulley can be used in the middle to drive the load for movement.
- stator and rotor of the motor work in both atmospheric and vacuum environments. This has the advantage of providing a high degree of vacuum, a relatively simple design, and all motor terminals in the atmosphere.
- the position detecting component is a sine-cosine reluctance type resolver capable of detecting the rotor position and the rotational speed of the motor in real time; the resolver is composed of an outer magnetic stator and an inner magnetic rotor, and there is no contact between the stator and the rotor, and The structure and working principle of the magnetic synchronous motor are similar.
- the working principle of the integrated design method of the inner magnetic rotor of the motor and the inner magnetic rotor of the rotary transformer is: the working principle of the sine and cosine reluctance resolver and the permanent magnet synchronous motor are similar, and their windings are all in the outer magnetic stator
- the inner magnetic rotor portion is only a core with a permanent magnet material, and no winding is embedded.
- the shape of each pair of magnetoresistive poles on the rotor causes the air gap flux to have only a constant component and a fundamental component as the rotor position changes. So as to obtain a position signal that changes sinusoidally in the signal winding.
- the inner magnetic rotor of the motor is extended as the inner magnetic rotor of the rotary transformer, and the inner magnetic rotor of the rotary transformer is removed, so that the driving component and the position detecting component are integrally mounted.
- the vacuum and the atmosphere can be isolated between the stator and the rotor so that there is no electrical signal connection between the vacuum and the atmosphere;
- the integrated inner magnetic rotor adopts a hollow structure design, so that the wiring can pass through the middle of the shafting.
- the integrated inner magnetic rotor has a hole or a threaded hole at one end to facilitate the connection of the drive shaft.
- the magnet of the integrated inner magnetic rotor is surrounded by a non-magnetic protective tube to prevent the permanent magnet from being scattered and polluting the vacuum environment.
- the inner magnetic rotor uses both the adhesive and the positioning flange to fix the position of the magnet to improve the connection reliability of the shaft; the positioning flange can be selected from the dovetail groove type or the ⁇ -shaped groove type.
- all of the magnet surfaces on the rotor and stator may be nickel plated or galvanized.
- the stator fixed clamp has a threaded hole for fixing the stator of the motor and the stator of the resolver to the shaft base.
- the shaft base can be divided into several parts and processed and assembled, and is composed of a shell body and a bottom of the casing.
- the gap between the stator and the rotor is larger than the gap between the ordinary motors, and needs to reach 1.5 mm ⁇
- the vacuum isolation sleeve is a hollow cover. The size is determined by the size of the outer magnetic stator of the corresponding resolver and the outer magnetic stator of the permanent magnet synchronous motor.
- the vacuum isolation sleeve is a thin-walled container member. In the magnetic drive design, it is also necessary to check whether the strength of the vacuum isolation sleeve is sufficient to withstand different pressures of the medium on both sides, and whether the compression deformation amount satisfies the requirements of the application.
- the vacuum isolation sleeve may be made of a non-magnetic material such as glass, copper alloy, aluminum alloy or stainless steel. To avoid changing the distribution of magnetic flux density. Based on the limitation of the gap width between the inner and outer rotors and the stator of the motor, the thickness of the side of the vacuum isolating sleeve should not be too large, and the invention is selected to be 0.75 mm.
- the 0-type rubber ring is further sealed between the vacuum isolation sleeve and the inner magnetic rotor.
- the vacuum sealing cover can be freely contracted up and down, and the driving mechanism for controlling the movement in the up and down direction can drive the entire shaft base to move in the up and down direction, thereby controlling the up and down movement of the robot arm.
- a shafting static vacuum isolation method for an integrated rotary transformer comprising the steps of:
- Step 1 Design a permanent magnet synchronous motor with magnetic direct drive technology as the drive component of the shafting.
- the motor consists of an outer magnetic stator and an inner magnetic rotor. There is no contact between the stator and rotor. External magnetic stator The ring is composed as a driving component of the shafting. After the coil is energized, a rotating magnetic field is generated to drive the inner magnetic rotor that is closed by the isolating sealing sleeve in the vacuum vessel.
- the inner magnetic rotor and the arm of the vacuum robot are directly connected, and no deceleration mechanism such as a gear or a pulley can be used in the middle to drive the load for movement. There is a certain gap between the outer magnetic stator and the inner magnetic rotor to facilitate vacuum isolation.
- Step 2 Design a sine-cosine magnetoresistive resolver as the position detecting component of the motor, which can detect the rotor position and speed of the motor in real time.
- the resolver consists of an external magnetic stator and an inner magnetic rotor. There is no contact between the stator and rotor. Similar to the structure of a permanent magnet synchronous motor;
- Step 3 In order to transform the dynamic seal of the shafting into a static seal, since the designed permanent magnet synchronous motor is similar in structure and working principle to the designed rotary transformer, the method of the present invention proposes an internal magnetic rotor and rotation of the motor.
- the integrated magnetic rotor design method of the transformer lengthens the end of the inner magnetic rotor of the motor to remove the inner magnetic rotor of the rotary transformer, so that the motor and the resolver share an inner magnetic rotor, simplifying the structure of the entire shaft system. , provides the necessary conditions for the static vacuum isolation method of the shafting.
- Step 4 Since the inner magnetic rotor needs to operate in a high-purity vacuum environment, the surface of the magnet easily adsorbs tiny ferromagnetic particles, which may damage the clean environment and affect the processing quality of the chip. Therefore, a sealed vacuum isolation sleeve is designed to enclose the entire integrated motor and the inner magnetic rotor of the resolver in the sealing sleeve, and at the same time limit the radial and axial movement of the magnet and improve the reliability.
- the bandwidth of the whole shafting system is increased. Due to the elimination of the intermediate links such as the ball screw and the reducer, the inertia of the motor becomes smaller, the bandwidth of the position loop and the speed loop increases, and the dynamic response performance of the entire shafting system is greatly improved.
- the vacuum isolation sleeve separates the inner magnetic rotor from the outer magnetic stator, and the magnetic flux passes through the vacuum isolation sleeve to transmit the power and motion of the outer magnetic stator to the inner magnetic rotor, and the dynamic dynamic seal is frictionless and non-lubricated.
- the required static seal results in a contactless "zero leakage" seal drive.
- the design is simple and compact. After integrating the inner magnetic rotor of the motor and the resolver, the volume of the system is reduced. At the same time, the system is relatively simple, saving development cycles.
- the structure with large gap can facilitate the effective isolation between the rotor vacuum environment and the stator atmosphere, and is more suitable for the semiconductor industry.
- Figure 1 is a cross-sectional view along line A-A of a schematic view of an assembled state of the present invention.
- the present invention comprises: a drive member, a position detecting member, a shaft base 1, a vacuum isolator 4, a vacuum seal cover, a flange, and a drive shaft 13. All of these components are mounted coaxially.
- the driving component is integrated with the position detecting component, and the driving component and the position detecting component are integrated by a shaft static vacuum isolation method, and are uniformly installed inside the shaft base; the vacuum isolation sleeve is driven from the driving component and the position detecting The gap between the parts passes through, so as to realize the transmission of power from the atmospheric environment to the vacuum environment, and at the same time isolates the atmospheric environment and the vacuum environment; the lower end surface of the flange is connected to the vacuum isolation sleeve and the shaft base through the screw holes respectively.
- the driving component and the position detecting component are integrally mounted coaxially on the shaft base 1, and include: a permanent magnet synchronous motor stator 2, a resolver stator 3, a motor and a resolver integrated rotor 8, a rotor flange 9, and a stator fixed Clamp block 12.
- the motor and the resolver integrated rotor 8 and the rotor flange 9 are connected by screws, and the first rolling bearing 7 and the second rolling bearing 10 are assembled between the rotor flange 9 and the shaft base 1 , two A bearing spacer 11 is added between the bearings to prevent friction, and the second rolling bearing 10 is pressed against the shaft base 1 through the bearing gland 17;
- the motor stator 2 is similar in structure to the resolver stator 3, and both sides are in the middle
- the convex design is designed to be able to fit the coaxial base 1 tightly, with three threaded holes evenly distributed on the two stators, and the stator 12 is fixed by the stator. It is fixed to the inside of the shaft base 1.
- the motor stator 2 is arranged coaxially with the resolver stator 3, and a gap is formed between the motor stator 2 and the integrated rotor 8, facilitating the installation of the vacuum isolation sleeve. All of these components are coaxially assembled.
- the gap between the stator and the rotor is larger than the gap between the ordinary motor, it is required to reach a gap of 1. 5mm ⁇ 2. 5mm.
- the change in the gap between the stator and the rotor will affect the performance of the motor. Therefore, the gap flux density of different gap motors is compared. It is found that as the gap increases, the value of the gap magnetic density gradually decreases, but the sine of the magnetic density is better.
- the harmonic analysis of the magnetic flux of different gaps is carried out. Finally, the performance of different stator and rotor gap motors is considered comprehensively.
- the stator and rotor clearance of 2mm are selected to give the best performance of the motor.
- the stator fixed clamp 12 has a stop for centering and heat dissipation.
- the vacuum isolation sleeve 4 is designed as a stepped hollow cover; the size is determined by the size of the corresponding rotary transformer motor stator 2, the permanent magnet synchronous motor rotary transformer stator 3 and the integrated rotor 8; A threaded hole is fixed on the shaft base 1, and in order to achieve zero leakage, a first annular groove is formed in the shaft base, and a first type 0 seal 6 is filled therein.
- the lower end surface of the drive shaft 13 is fixed to the rotor flange 9 by screws.
- the upper end surface of the drive shaft 13 extends to the outside to communicate with the vacuum environment, and the length of the extension can be designed according to specific practical needs.
- the upper end surface of the drive shaft 13 is provided with a groove for mounting the movable rolling bearing 15, and the floating rolling bearing 15 is fixed to the upper end surface of the transmission shaft 13 through the bearing gland 16, and the shaft end flange 14 is fixed to the upper end surface of the transmission shaft 13.
- the vacuum sealing cover comprises a sealing cover upper flange 22, a sealing cover 20 and a sealing cover lower flange 19, and the sealing cover lower flange 19 is fixed to the upper end surface of the shafting base 1 by screws, in order to achieve zero leakage, in the shaft base 1 is provided with an annular groove in which a second 0-type sealing ring 5 is filled; the upper flange 22 of the sealing cover is fixed to the shaft flange 14 of the transmission shaft 13 by screws, and likewise, the flange on the sealing cover An annular groove is formed in the upper portion 22, and a third type 0 seal ring 18 is filled therein.
- the vacuum sealing cover 20 can be freely contracted up and down, and the driving mechanism for controlling the movement in the up and down direction can drive the entire shaft base to move in the up and down direction, thereby controlling the up and down movement of the robot arm.
- the vacuum seal housing further isolates the atmosphere from the vacuum environment.
- the rotating electromagnetic field coil on the outer magnetic stator of the permanent magnet synchronous motor is energized to generate a rotating magnetic field, and the magnetic coupling of the permanent magnet is used to drive the integrated rotor rotating in the vacuum container through the vacuum isolation sleeve.
- the permanent magnet inside the rotor forms an air gap magnetic density which is effectively distributed in a sine and cosine function state, and the sine and cosine output form becomes a standard rotary transformer output signal form, thereby obtaining a sinusoidal position signal in the signal winding, and further Get the real-time motion position and speed of the motor rotor.
- the integrated rotor is fixed to the drive shaft through a series of fastening parts and sealing parts, and the inside is a vacuum environment, the power can be transmitted directly to the outside through the drive shaft, and the drive shaft can be the same as the vacuum robot.
- the arms (not shown) are connected so that It moves in a vacuum chamber (not shown).
- the vacuum isolation sleeve 4 can be made in one piece or can be assembled in stages and finally assembled.
- Drive and position sensing components are available in different sizes for easy multi-axis design and coaxial mounting layout, simplifying construction, reducing costs, and greatly increasing the flexibility of their applications while reducing The coupling effect of the magnetic field between the drive component and the position detection component.
- a vacuum static single-axis shafting device integrated with a rotary transformer is taken as an example, and the driving structure for controlling the movement in the up and down direction can be matched to control the up and down movement of the vacuum robot arm. It is convenient to expand the structure to a vacuum static shafting device of two or more axes in sequence.
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Abstract
一种集成旋转变压器的静态真空轴系装置，包括：驱动部件、真空密封罩、位置检测部件、轴系基座（1）、真空隔离套（4）、第二O型密封圏（5）、第一O型密封圏（6）、第一滚动轴承（7）、第二滚动轴承（10）、轴承隔环（11）、传动轴（13）、轴系法兰（14）、游动滚动轴承（15）、第一轴承压盖（16）、第二轴承压盖（17）和第三O型密封圏（18）。驱动部件包括同轴安装的电机定子（2）、旋转变压器定子（3）、电机与旋转变压器一体化转子（8）、转子法兰盘（9）和定子固定压块（12）。真空密封罩包括密封罩上法兰（22）、密封罩（20）和密封罩下法兰（19）。集成旋转变压器的静态真空轴系装置使电机轴与负载刚性耦合，从而实现了"零传动"方式，并实现了轴系的"零泄漏"密封传动，尤其适用高真空环境下真空机器人的动力传动。
Description
一种集成旋转变压器的静态真空轴系装置 技术领域
本发明涉及一种真空机器人领域的装置， 具体涉及一种集成旋转变压器的静态 真空轴系装置。
背景技术 随着大规模集成电路产业的迅速发展， 其主流技术正由 0 300 65nm 向
045Omm 32nm过渡， 而实践证明， 0. 35 及其以下尺寸的许多前端工艺， 如离子 注入、 刻蚀、 镀膜、 沉积、 溅射等都必须在超高洁净度的真空环境下进行。 为了提 高洁净度和生产效率， 降低成本， 集束型设备已成为半导体前端设备的发展主流。 真空机器人是集束型设备中晶圆在各反应工艺腔室之间传输的核心部件， 由于真空 机器人需要在真空环境下运作， 而大气环境与真空环境之间的密封隔离与动力传递 正是制约真空机器人性能提高的技术瓶颈。 由于电机轴系及其位移测量装置是真空 机器人的核心部件， 因此处理好电机与位置检测部件的真空隔离问题成为设计真空 机器人轴系的关键技术。
大气机器人与真空机器人最核心的区别是它们的动力传递方式不同。 大气机器 人可以把电机直接安装在关节位置来驱动手臂； 而真空机器人的手臂必须在高真空 高洁净环境下工作， 如果仍将电机直接连接手臂， 电机定子电枢表面的塑料绝缘材 料在真空环境下释放的微粒与气体将破坏高洁净度高真空环境， 此外直接驱动电机 的铜损（热功）较大，在真空环境中很难散热，所以必须把电机定子置于大气环境中。 因此如何将电机提供的动力从大气环境传递给真空环境中的机械手臂成为了真空 机器人研发的技术瓶颈。
常用的真空机械手轴系一般通过磁性联轴器实现静态密封， 但是存在以下缺 点：轴承在真空环境下， 需要采用特殊润滑方式以减少颗粒产生对真空环境的污染； 永磁体及粘结胶在真空环境下， 会带来一定的气体泄露； 电机定子与转子、 磁性联 轴器主动转子与随动转子之间都存在间隙， 给系统的控制增加了复杂性， 同时降低
了系统的刚性。
在轴系系统中往往还需要位置检测部件， 通过它能够实时地检测出电机转子的 位置、 转速， 以实现对电机的转速、 转矩及其位置的高精度控制， 以获取良好的性 能。 由于旋转变压器是一种电磁式传感器， 本质上是一种测量角度用的小型交流电 动机， 用来测量旋转物体的转轴角位移和角速度， 其内部没有任何电子元件， 仅仅 由定子和转子组成， 结构简单。 因此随着对电机自动化控制的要求日益增加， 用于 转动轴系的电机附带旋转变压器成为常见的配置。
但是由于对用于真空机器人轴系上的电机在重量和空间上较大， 现在的结构在 布置旋转变压器时， 电机轴承与旋转变压器的转子在空间上会有干涉从而导致布置 困难， 同时由于空间限制， 旋转变压器与其它零部件的距离狭小， 给设计、 制造、 维修都会带来较大困难， 同时无法解决电机与位移测量装置之间的真空隔离问题， 因此在真空轴系中很少采用旋转变压器作为轴系的位移测量装置。
发明内容
本发明的主要目的是为了克服上述已有技术的不足之处， 提供一种集成旋转变压 器的真空静态轴系装置， 使其结构紧凑， 体积减少， 安装灵活方便， 节省开发周期； 同时使电机轴与负载的刚性耦合， 从而实现所谓的"零传动"方式， 运转平稳， 噪声小； 位置检测部件与电机的无缝集成， 可实现轴系的 "零泄漏"密封传动， 可用于化工空冶 炼、 制药设备中的真空、 液体、 有害气体、 有害液体及超净化环境中， 尤其适用高真空 环境下真空机器人的动力传动。
根据本发明的一个方面， 提供一种集成旋转变压器的静态真空轴系装置， 包括： 驱 动部件、 真空密封罩、 位置检测部件、 轴系基座、 真空隔离套、 第二 0型密封圈、 第一 0型密封圈、 第一滚动轴承、 第二滚动轴承、 轴承隔环、 传动轴、 轴系法兰、 游动滚动 轴承、 轴承压盖、 轴承压盖、 第三 0型密封圈；
所述驱动部件包括同轴安装的电机定子、 旋转变压器定子、 电机与旋转变压器一体 化转子、 转子法兰盘、 定子固定压块， 其中： 电机与旋转变压器一体化转子与转子法兰 盘通过螺钉相连， 电机定子与旋转变压器定子通过定子固定压块固定在轴系基座内侧， 并同轴系基座紧密配合；
所述真空密封罩包括密封罩上法兰、 密封罩、 密封罩下法兰， 其中： 密封罩下法兰 通过螺钉固定在轴系基座上端面， 在轴系基座上开有第二环形凹槽， 在第二环形凹槽中 填有第二 0型密封圈；密封罩上法兰通过螺钉固定在传动轴的轴系法兰上，在密封罩上
法兰上开有第三环形凹槽，在第三环形凹槽中填有第三 0型密封圈，真空密封罩能够自 由地上下收縮， 配合控制上下方向运动的驱动机构， 能够带动整个轴系基座沿上下方向 运动；
传动轴的下端面与转子法兰盘通过螺钉固定在一起，传动轴的上端面一直延伸到外 部与真空环境相通， 传动轴的上端面开有安装游动滚动轴承的凹槽， 游动滚动轴承通过 轴承压盖固定在传动轴的上端面； 传动轴的上端面固定有轴系法兰， 转子法兰盘与轴系 基座之间装配有第一滚动轴承和第二滚动轴承，第一滚动轴承和第二滚动轴承之间添加 有轴承隔环， 轴承压盖将第二滚动轴承压紧在轴系基座上， 所述的真空隔离套的内部是 台阶式的空心盖状物， 真空隔离套的一端打有螺纹孔， 固定在轴系基座上， 在轴系基座 上开有第一环形凹槽，在第一环形凹槽中填有第一 0型密封圈， 电机定子和旋转变压器 定子均与电机与旋转变压器一体化转子之间形成间隙，真空隔离套从所述间隙穿过将电 机与旋转变压器一体化转子隔离于电机定子和旋转变压器定子。
优选地， 电机定子与旋转变压器定子的两侧中间均为凸台式结构。
优选地， 电机定子和电机与旋转变压器一体化转子之间的间隙、 以及旋转变压器定 子和电机与旋转变压器一体化转子之间的间隙， 均为 1.5mm〜2.5mm。
优选地， 电机定子和电机与旋转变压器一体化转子之间的间隙、 以及旋转变压器定 子和电机与旋转变压器一体化转子之间的间隙， 均为 2mm。
优选地， 所述电机与旋转变压器一体化转子采用中空结构的设计， 该中空结构用于 使配线能够从轴系的中间穿过。
优选地， 所述电机与旋转变压器一体化转子的磁铁外围包有非磁性的保护管。 优选地，所述电机与旋转变压器一体化转子同时使用胶粘和定位法兰两种方法来固 定磁体的位置。
优选地， 所述电机与旋转变压器一体化转子、 电机定子、 以及旋转变压器定子的所 有磁体表面可镀镍或镀锌。
优选地， 所述真空隔离套采用非导磁的材料。
优选地， 旋转变压器的原、 副绕组均分布在旋转变压器定子侧。
更为具体地， 本发明是通过以下技术方案实现的， 本发明包括： 驱动部件、 位置检 测部件、 轴系基座、 真空隔离套、 真空密封罩、 法兰盘、 传动轴。 驱动部件与位置检测 部件通过一种轴系静态真空隔离方法实现一体化的装配， 统一安装在轴系基座内部； 真 空隔离套从驱动部件与位置检测部件中间的间隙穿过，从而实现动力从大气环境到真空
环境的传递， 同时隔离了大气环境和真空环境； 法兰盘的下端面通过螺纹孔分别与真空 隔离套和轴系基座相连， 法兰盘的上端面与传动轴下端相连， 从而实现驱动部件带动轴 系传动轴同轴旋转的动力传递； 真空密封套的下端与轴系基座通过法兰盘相连， 真空密 封套的上端与传动轴上端通过法兰盘相连； 从而可实现多轴零泄漏的轴系真空隔离， 从 而保证真空机器人的整个轴系能够以静态传动的形式运行于真空环境中。所有这些部件 均同轴装配。
所述的驱动部件是一种具有磁力直接驱动技术的永磁同步电机， 该电机由外磁定子 和内磁转子组成， 定转子之间没有任何接触。 外磁定子由旋转电磁场线圈组成， 作为轴 系的驱动部件， 该线圈通电后， 产生旋转磁场驱动被隔离密封套封闭在真空容器中的内 磁转子旋转。 内磁转子和真空机器人的手臂驱动轴直接相连， 中间无需任何减速机构如 齿轮、 皮带轮等便能达到带动负载进行运动的目的。 外磁定子和内磁转子之间留有一定 的空隙， 方便进行真空隔离套的安装从而实现真空隔离。 电机的定子和转子分别工作在 大气和真空环境下， 这种方式的优点是能够得到高的真空度， 设计相对较简单， 并且所 有的电机接线端均在大气环境下。
所述的位置检测部件是一种正余弦磁阻式的旋转变压器， 能够实时检测电机转子位 置与转速； 该旋转变压器由外磁定子和内磁转子组成， 定转子之间没有任何接触， 与永 磁同步电机结构和工作原理相似。
所述的一种电机的内磁转子与旋转变压器的内磁转子一体化设计方法的工作原理 是： 正余弦磁阻式旋转变压器和永磁同步电机的工作原理相似， 它们的绕组都在外磁定 子上， 内磁转子部分仅是一块具有永磁材料的铁心， 没有嵌放任何绕组， 转子上每对磁 阻磁极的形状使得气隙磁导随转子位置的变化中只含有恒定分量和基波分量，从而在信 号绕组中获取按正弦变化的位置信号。因此将电机的内磁转子延长同时作为旋转变压器 的内磁转子，而将旋转变压器的内磁转子去掉，使驱动部件与位置检测部件一体化安装， 这样设计的优点有：
1. 可以在定子与转子之间进行真空与大气的隔离，使真空与大气之间没有电气信号 的连接；
2. 还能够有效减少永磁体材料的过度浪费，避免过多的永磁体在运动过程容易吸附 微小的铁磁性微粒， 可能造成真空环境的污染；
3. 有效地提高旋转变压器的检测精度， 更好的保证旋转变压器的性能。
所述的一体化内磁转子采用中空结构的设计， 可使配线从轴系的中间穿过。
所述的一体化内磁转子的一端开有洞孔或螺纹孔， 以便于传动轴连接。
所述的一体化内磁转子的磁铁外围包有非磁性的保护管防止永磁体被抛散污染真 空环境。
所述的内磁转子同时使用了胶粘和定位法兰两种方法来固定磁体的位置， 以提高轴 系的连接可靠性； 定位法兰可以选择燕尾槽型或 τ形槽型。
优选地， 为了保护磁体， 转子与定子上的所有磁体表面可镀镍或镀锌。
所述的定子固定压块开有螺纹孔，用来将电机定子和旋转变压器的定子固定在轴系 基座上。
所述的轴系基座可分为若干零部件分别加工分布组装在一起， 由外壳主体、 外壳底 部组成。 所述的定、 转子之间的间隙要比普通电机之间的间隙要大， 需要达到 1.5mm〜
2.5mm的间隙。 定、 转子之间间隙的变化会对电机的性能带来影响。 因此比较了不同 间隙电机的间隙磁通密度， 发现随着间隙的增大， 间隙磁密的值逐渐减小， 但磁密的 正弦性要好。 对不同间隙的磁密进行谐波分析， 最后综合考虑不同定、 转子间隙电机 的性能， 选择了 2mm的定、 转子间隙， 可以发挥电机的最佳性能。
所述的真空隔离套为空心盖状物。尺寸由相对应的旋转变压器的外磁定子和永磁同 步电机的外磁定子的尺寸决定。 所述的真空隔离套是薄壁型容器构件， 在磁力传动设计中， 还必须校核真空隔离套 的强度是否足够承受两侧介质的不同压力， 以及受压变形量是否满足应用的要求。
所述的真空隔离套可选用非导磁的材料， 如玻璃、 铜合金、 铝合金或不锈钢。 以避 免改变磁通密度的分布。 基于电机内外转子、 定子之间间隙宽度的限制， 真空隔离套的 侧面厚度不宜过大， 本发明选为 0.75mm。
所述的真空隔离套与内磁转子之间采用 0型橡胶圈进行进一步的密封。
所述的真空密封罩可以自由的上下收縮， 配合控制上下方向运动的驱动机构， 可以 带动整个轴系基座沿上下方向运动， 从而控制机器人手臂的上下运动。
所述的法兰盘上均开有凹槽， 在其中均填有 0型密封圈用来密封。 根据本发明的另一个方面，还提供一种集成旋转变压器的轴系静态真空隔离方法， 包括以下步骤：
步骤 1 : 设计一种具有磁力直接驱动技术的永磁同步电机作为轴系的驱动部件， 该 电机由外磁定子和内磁转子组成， 定转子之间没有任何接触。 外磁定子由旋转电磁场线
圈组成， 作为轴系的驱动部件， 该线圈通电后， 产生旋转磁场驱动被隔离密封套封闭在 真空容器中的内磁转子旋转。 内磁转子和真空机器人的手臂直接相连， 中间无需任何减 速机构如齿轮、 皮带轮等便能达到带动负载进行运动的目的。 外磁定子和内磁转子之间 留有一定的空隙， 方便进行真空隔离。
步骤 2: 设计一种正余弦磁阻式旋转变压器作为电机的位置检测部件， 可以实时检 测电机转子位置与转速； 该旋转变压器由外磁定子和内磁转子组成， 定转子之间没有任 何接触， 与永磁同步电机结构类似；
步骤 3: 为了将轴系的动态密封转变成静态密封， 由于设计的永磁同步电机与设计 的旋转变压器的结构相似和工作原理相似， 因此本发明方法提出一种将电机的内磁转子 与旋转变压器的内磁转子一体化设计的方法， 将电机的内磁转子的端部进行加长， 将旋 转变压器的内磁转子除去， 使得电机和旋转变压器共用一个内磁转子， 简化了整个轴系 的结构， 为轴系的静态真空隔离方法提供了必要条件。
步骤 4: 由于内磁转子需要运行于高洁净度的真空环境下， 而磁体的表面容易吸附 微小的铁磁性微粒， 可能污染破坏洁净环境， 影响芯片的加工质量。 所以设计了一种密 封真空隔离套， 将整个一体化的电机、 旋转变压器的内磁转子封闭在此密封套中， 同时 限制了磁体径向和轴向的运动， 提高了可靠性。
与现有技术相比， 通过本发明提供的一种集成旋转变压器的真空静态轴系装置及 方法的优点在于：
1. 整个轴系带宽增加， 由于取消掉了滚珠丝杠、减速器等中间环节， 电机的惯量变 小， 位置环、 速度环的带宽增大， 整个轴系的动态响应性能大幅提升。
2. 由于采用了磁力直接驱动技术，没有高速旋转的部件， 因此高速旋转部件不平衡 带来的振动、 噪声也不存在， 不但使整个轴系的谐振频率降低， 控制对象的静态误差和 动态误差都得到了有效的控制。
3. 将伺服系统的中间传输环节取消掉，将直接驱动电机（直接驱动旋转电机或直接 驱动直线电机）直接耦合或连接到从动负载上， 实现电机轴与负载的刚性耦合， 从而实 现所谓的 "零传动"方式， 运转平稳， 噪声小。
4. 在转动过程中，真空隔离套将内磁转子与外磁定子隔离开，磁力线穿过真空隔离 套将外磁定子的动力与运动传递给内磁转子， 化动态密封为无摩擦， 无润滑要求的静态 密封， 从而实现了无接触的 "零泄漏"密封传动。
5. 设计简单，结构紧凑，整合了电机和旋转变压器的内磁转子后，系统的体积减少，
同时系统相对简单， 节省了开发周期。
6. 采用大间隙的结构能够便于实现转子真空环境与定子大气环境的有效隔离，更加 适用于半导体行业。
附图说明
通过阅读参照以下附图对非限制性实施例所作的详细描述， 本发明的其它特 征、 目的和优点将会变得更明显：
图 1为本发明的一种实施状态组组装示意图的 A-A剖面图。
具体实施方式
下面结合具体实施例对本发明进行详细说明。 以下实施例将有助于本领域的技术人 员进一步理解本发明， 但不以任何形式限制本发明。 应当指出的是， 对本领域的普通技 术人员来说， 在不脱离本发明构思的前提下， 还可以做出若干变形和改进。 这些都属于 本发明的保护范围。
下面结合附图对本发明的具体结构和装配作进一步的描述。
如图 1所示， 本发明包括： 驱动部件、 位置检测部件、 轴系基座 1、 真空隔离套 4、 真空密封罩、 法兰盘、 传动轴 13。 所有这些部件均同轴安装。
驱动部件与位置检测部件集成在一起，包括驱动部件与位置检测部件通过一种轴系 静态真空隔离方法实现一体化的装配， 统一安装在轴系基座内部； 真空隔离套从驱动部 件与位置检测部件中间的间隙穿过， 从而实现动力从大气环境到真空环境的传递， 同时 隔离了大气环境和真空环境；法兰盘的下端面通过螺纹孔分别于真空隔离套和轴系基座 相连， 法兰盘的上端面与传动轴下端相连， 从而实现驱动部件带动轴系传动轴同轴旋转 的动力传递； 真空密封套的下端与轴系基座通过法兰盘相连， 真空密封套的上端与传动 轴上端通过法兰盘相连； 从而可实现多轴零泄漏的轴系真空隔离， 从而保证真空机器人 的整个轴系能够以静态传动的形式运行于真空环境中。 所有这些部件均同轴装配。
驱动部件与位置检测部件一体化同轴安装在轴系基座 1上， 包括： 永磁同步电机定 子 2、 旋转变压器定子 3、 电机与旋转变压器一体化转子 8、 转子法兰盘 9、 定子固定压 块 12。本实施例中， 电机与旋转变压器一体化转子 8与转子法兰盘 9通过螺钉相连， 转 子法兰盘 9与轴系基座 1之间装配有第一滚动轴承 7和第二滚动轴承 10，两个轴承之间 为防止摩擦添加有轴承隔环 11，并通过轴承压盖 17将第二滚动轴承 10压紧在轴系基座 1上； 电机定子 2与旋转变压器定子 3结构类似， 两侧中间均为凸台式设计， 目的是能 够同轴系基座 1 紧密配合， 两个定子上均匀分布有三个螺纹孔， 通过定子固定压块 12
固定在轴系基座 1内侧。 电机定子 2与旋转变压器定子 3同轴布置， 与一体化转子 8之 间形成间隙， 方便真空隔离套的安装。 所有这些部件均同轴装配。
所述的定、转子之间的间隙要比普通电机之间的间隙要大， 需要达到 1. 5mm〜2. 5mm 的间隙。 定、 转子之间间隙的变化会对电机的性能带来影响。 因此比较了不同间隙电机 的间隙磁通密度，发现随着间隙的增大， 间隙磁密的值逐渐减小，但磁密的正弦性要好。 对不同间隙的磁密进行谐波分析， 最后综合考虑不同定、 转子间隙电机的性能， 选择了 2mm的定、 转子间隙， 可以发挥电机的最佳性能。
所述的定子固定压块 12带有止口， 起定心和散热的作用。
所述的真空隔离套 4设计为内部是台阶式的空心盖状物；尺寸由相对应的旋转变压 器的电机定子 2、 永磁同步电机的旋转变压器定子 3及一体化转子 8的尺寸决定； 一端 打有螺纹孔， 固定在轴系基座 1上， 为实现零泄漏， 在轴系基座上开有第一环形凹槽， 在其中填有第一 0型密封圈 6。
传动轴 13的下端面与转子法兰盘 9通过螺钉固定在一起，传动轴 13的上端面一直 延伸到外部与真空环境相通，延伸的长度可以根据具体的实际需要进行设计。传动轴 13 的上端面开有安装游动滚动轴承 15的凹槽， 游动滚动轴承 15通过轴承压盖 16固定在 传动轴 13的上端面； 传动轴 13的上端面则固定有轴系法兰 14。
真空密封罩包括密封罩上法兰 22、 密封罩 20、 密封罩下法兰 19， 密封罩下法兰 19 通过螺钉固定在轴系基座 1上端面， 为了实现零泄漏， 在轴系基座 1上开有环形凹槽， 在其中填有第二 0型密封圈 5 ; 密封罩上法兰 22通过螺钉固定在传动轴 13的轴系法兰 14上， 同样的， 在密封罩上法兰 22上开有环形凹槽， 在其中填有第三 0型密封圈 18。 真空密封罩 20可以自由地上下收縮， 配合控制上下方向运动的驱动机构， 可以带动整 个轴系基座沿上下方向运动， 从而控制机器人手臂的上下运动。 真空密封罩部件进一步 隔离了大气环境和真空环境。
上述装置使用时，永磁同步电机的外磁定子上的旋转电磁场线圈通电后产生旋转磁 场，利用永磁体的磁力耦合，透过真空隔离套驱动封闭在真空容器中的一体化转子旋转。 一方面， 转子内部的永磁体形成有效地呈正余弦函数状态分布的气隙磁密， 将正余弦输 出形式便成为标准旋转变压器输出信号形式，从而在信号绕组中获取按正弦变化的位置 信号， 进而得到电机转子实时的运动位置与速度。 另一方面， 由于一体化转子通过一系 列紧固部件和密封部件同传动轴固定在一起， 而且内部均为真空环境， 这样动力可以直 接通过传动轴传给外部， 传动轴可以同真空机器人的机械手臂 （图中未标出）相连， 使
其在真空腔室 （图中未标出） 中运动。
真空隔离套 4可以做成一体式的， 也可分段加工最后组装在一起。
驱动和位置检测部件可选用不同的尺寸规格，便于多轴的最优化设计和同轴的安装 布局， 简化了结构， 降低了成本， 并大大地增加了其应用的灵活性， 同时也减小了驱动 部件与位置检测部件间磁场的耦合效应。
本实施例仅以一种集成旋转变压器的真空静态单轴轴系装置为例，可以配合控制上 下方向运动的驱动结构， 从而控制真空机器人手臂的上下运动。 可以依次结构很方便地 拓展为两轴或两轴以上的真空静态轴系装置。
以上对本发明的具体实施例进行了描述。 需要理解的是， 本发明并不局限于上 述特定实施方式， 本领域技术人员可以在权利要求的范围内做出各种变形或修改， 这并不影响本发明的实质内容。
Claims
权 利 要 求 书
1、 一种集成旋转变压器的静态真空轴系装置， 其特征在于， 包括： 驱动部件、 真空密封罩、 位置检测部件、 轴系基座 （1 )、 真空隔离套 （4)、 第二 0型密封圈 （5)、 第一 0型密封圈 （6)、 第一滚动轴承 （7)、 第二滚动轴承 （10)、 轴承隔环 （11 )、 传动 轴 （13 )、 轴系法兰 （14)、 游动滚动轴承 （15 )、 轴承压盖 （16)、 轴承压盖 （17 )、 第 三 0型密封圈 （18);
所述驱动部件包括同轴安装的电机定子 （2)、 旋转变压器定子 （3)、 电机与旋转变 压器一体化转子 （8)、 转子法兰盘 （9)、 定子固定压块 （12)， 其中： 电机与旋转变压 器一体化转子 （8 ) 与转子法兰盘 （9) 通过螺钉相连， 电机定子 （2) 与旋转变压器定 子 （3 ) 通过定子固定压块 （12) 固定在轴系基座 （1 ) 内侧， 并同轴系基座 （1 ) 紧密 配合；
所述真空密封罩包括密封罩上法兰 （22)、 密封罩 （20)、 密封罩下法兰 （19)， 其 中： 密封罩下法兰 （19) 通过螺钉固定在轴系基座 （1 ) 上端面， 在轴系基座 （1 ) 上开 有第二环形凹槽， 在第二环形凹槽中填有第二 0型密封圈 （5); 密封罩上法兰 （22)通 过螺钉固定在传动轴 （13) 的轴系法兰 （14) 上， 在密封罩上法兰 （22) 上开有第三环 形凹槽， 在第三环形凹槽中填有第三 0型密封圈 （18)， 真空密封罩 （20) 能够自由地 上下收縮，配合控制上下方向运动的驱动机构，能够带动整个轴系基座沿上下方向运动； 传动轴 （13) 的下端面与转子法兰盘 （9) 通过螺钉固定在一起， 传动轴 （13 ) 的 上端面一直延伸到外部与真空环境相通， 传动轴 （13) 的上端面开有安装游动滚动轴承
( 15) 的凹槽， 游动滚动轴承（15)通过轴承压盖（16) 固定在传动轴（13) 的上端面； 传动轴 （13 ) 的上端面固定有轴系法兰 （14)， 转子法兰盘 （9) 与轴系基座 （1 ) 之间 装配有第一滚动轴承 （7) 和第二滚动轴承 （10)， 第一滚动轴承 （7) 和第二滚动轴承
( 10) 之间添加有轴承隔环 （11 )， 轴承压盖 ( 17 ) 将第二滚动轴承 ( 10) 压紧在轴系 基座 （1 ) 上， 所述的真空隔离套 （4) 的内部是台阶式的空心盖状物， 真空隔离套 （4) 的一端打有螺纹孔， 固定在轴系基座 （1 ) 上， 在轴系基座 （1 ) 上开有第一环形凹槽， 在第一环形凹槽中填有第一 0型密封圈 （6)， 电机定子 （2) 和旋转变压器定子 （3)均 与电机与旋转变压器一体化转子 （8)之间形成间隙， 真空隔离套 （4) 从所述间隙穿过 将电机与旋转变压器一体化转子 （8) 隔离于电机定子 （2) 和旋转变压器定子 （3)。
2、 根据权利要求 1 所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 电机定子 （2) 与旋转变压器定子 （3) 的两侧中间均为凸台式结构。
3、 根据权利要求 1 所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 电机定子 （2)和电机与旋转变压器一体化转子 （8)之间的间隙、 以及旋转变压器定子
( 3) 和电机与旋转变压器一体化转子 （8) 之间的间隙， 均为 1. 5 2. 5
4、 根据权利要求 3 所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 电机定子 （2)和电机与旋转变压器一体化转子 （8)之间的间隙、 以及旋转变压器定子
( 3) 和电机与旋转变压器一体化转子 （8) 之间的间隙， 均为 2
5、 根据权利要求 1所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 所 述电机与旋转变压器一体化转子采用中空结构的设计，该中空结构用于使配线能够从轴 系的中间穿过。
6、 根据权利要求 1所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 所 述电机与旋转变压器一体化转子的磁铁外围包有非磁性的保护管。
7、 根据权利要求 1所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 所 述电机与旋转变压器一体化转子同时使用胶粘和定位法兰两种方法来固定磁体的位置。
8、 根据权利要求 1所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 所 述电机与旋转变压器一体化转子、 电机定子、 以及旋转变压器定子的所有磁体表面可镀 镍或镀锌。
9、 根据权利要求 1所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 所 述真空隔离套采用非导磁的材料。
10、 根据权利要求 1所述的集成旋转变压器的静态真空轴系装置， 其特征在于， 旋 转变压器的原、 副绕组均分布在旋转变压器定子侧。
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117621105A (zh) * | 2023-12-25 | 2024-03-01 | 上海广川科技有限公司 | 抗腐蚀真空机器人 |
| CN118889752A (zh) * | 2024-09-27 | 2024-11-01 | 北京子牛亦东科技有限公司 | 真空电机 |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103192384B (zh) * | 2013-03-11 | 2015-08-19 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
| CN105171701A (zh) * | 2015-07-20 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | 高洁净真空位移台 |
| CN110646834B (zh) * | 2018-06-26 | 2024-08-09 | 核工业西南物理研究院 | 应用于高真空装置的全密封精确定位调节机构 |
| CN111654149B (zh) * | 2020-05-19 | 2021-09-28 | 格力电器（杭州）有限公司 | 一种轴连接结构及电机 |
| CN111641285B (zh) * | 2020-07-06 | 2024-10-01 | 上海海洋大学 | 一种小型无人船电机传动轴系密封防漏装置 |
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| US12502788B2 (en) * | 2021-05-27 | 2025-12-23 | Changxin Memory Technologies, Inc. | Device for correcting robotic arm |
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| CN115333280B (zh) * | 2022-09-22 | 2025-08-05 | 珠海格力电器股份有限公司 | 一种端盖结构、应用其的电机及大巴车 |
| CN115995935B (zh) * | 2023-02-16 | 2025-07-18 | 中国科学院高能物理研究所 | 一种快速扫描x射线吸收精细结构谱学单色器高精度转轴系统 |
| CN116658607B (zh) * | 2023-07-26 | 2023-10-10 | 北京中科科美科技股份有限公司 | 一种适用于真空设备的高精度传动系统 |
| CN117554859B (zh) * | 2023-11-14 | 2024-04-09 | 国网山东省电力公司夏津县供电公司 | 变压器智能检测装置 |
| CN118232611B (zh) * | 2024-03-22 | 2024-09-13 | 东莞市兴亚机电设备有限公司 | 一种耐高温高压的真空密封电机 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000069741A (ja) * | 1998-08-19 | 2000-03-03 | Komatsu Ltd | 真空用アクチュエータ |
| EP1006565A2 (en) * | 1998-12-04 | 2000-06-07 | Shinmaywa Industries, Ltd. | Conveying device |
| CN100584546C (zh) * | 2004-06-29 | 2010-01-27 | 株式会社爱发科 | 移送装置及其控制方法以及真空处理装置 |
| CN102152318A (zh) * | 2011-05-04 | 2011-08-17 | 中国科学院等离子体物理研究所 | 在高温真空环境下使用的机器人的驱动机构 |
| CN103192384A (zh) * | 2013-03-11 | 2013-07-10 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63181398A (ja) * | 1987-01-22 | 1988-07-26 | 株式会社東芝 | 部品移載用ロボツトハンド |
| KR100303018B1 (ko) * | 1993-04-16 | 2001-11-22 | 스탠리 디. 피에코스 | 관절형아암이송장치 |
| US5418446A (en) * | 1993-05-10 | 1995-05-23 | Hallidy; William M. | Variable speed constant frequency synchronous electric power generating system and method of using same |
| DE19532265A1 (de) * | 1995-09-01 | 1997-03-06 | Temic Auto Electr Motors Gmbh | Kollektormotor, insbesondere in geschlossener Bauart |
| US6543306B1 (en) * | 1998-12-04 | 2003-04-08 | Daihen Corporation | Conveying device |
| US6485250B2 (en) * | 1998-12-30 | 2002-11-26 | Brooks Automation Inc. | Substrate transport apparatus with multiple arms on a common axis of rotation |
| US7891935B2 (en) * | 2002-05-09 | 2011-02-22 | Brooks Automation, Inc. | Dual arm robot |
| US7578649B2 (en) * | 2002-05-29 | 2009-08-25 | Brooks Automation, Inc. | Dual arm substrate transport apparatus |
| AU2003244198A1 (en) * | 2002-07-10 | 2004-02-02 | Nikon Corporation | Motor, robot, substrate loader and exposure system |
| CN1942288B (zh) * | 2005-02-12 | 2010-12-22 | 应用材料公司 | 一种多轴真空电机组件 |
| JP2007162726A (ja) * | 2005-12-09 | 2007-06-28 | Ntn Corp | モータ一体型磁気軸受装置 |
| JP4848845B2 (ja) * | 2006-06-01 | 2011-12-28 | 株式会社安川電機 | 真空ロボット、処理装置、モータの製造方法、およびモータ |
| CN100505484C (zh) * | 2007-05-31 | 2009-06-24 | 上海交通大学 | 多轴直接驱动磁力传递装置 |
| CN201674381U (zh) * | 2010-05-06 | 2010-12-15 | 东莞宏威数码机械有限公司 | 真空磁力传动装置 |
| CN110620473B (zh) * | 2011-09-16 | 2025-05-06 | 柿子技术公司 | 具有被动转子的机器人驱动器 |
| US9202733B2 (en) * | 2011-11-07 | 2015-12-01 | Persimmon Technologies Corporation | Robot system with independent arms |
| US20130149076A1 (en) * | 2011-12-12 | 2013-06-13 | Applied Materials, Inc. | Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
| FR2997245B1 (fr) * | 2012-10-24 | 2016-01-15 | Hispano Suiza Sa | Systeme electromecanique d'actionnement et/ou generation, comprenant une isolation electrique entre la source electrique et le consommateur |
| CN102927283A (zh) * | 2012-11-08 | 2013-02-13 | 浙大新剑（上海）智能技术有限公司 | 真空环境下传动输入轴的密封装置及其使用方法 |
| WO2014085479A1 (en) * | 2012-11-30 | 2014-06-05 | Applied Materials, Inc | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing |
| US10427303B2 (en) * | 2013-03-15 | 2019-10-01 | Applied Materials, Inc. | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
| KR102448616B1 (ko) * | 2014-04-21 | 2022-09-28 | 퍼시몬 테크놀로지스 코포레이션 | 격리된 고정자와 인코더를 가진 로봇 |
| CN105171701A (zh) * | 2015-07-20 | 2015-12-23 | 中国科学院上海光学精密机械研究所 | 高洁净真空位移台 |
-
2013
- 2013-03-11 CN CN201310076619.6A patent/CN103192384B/zh active Active
- 2013-11-19 US US14/775,574 patent/US9966812B2/en not_active Expired - Fee Related
- 2013-11-19 WO PCT/CN2013/087398 patent/WO2014139293A1/zh not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000069741A (ja) * | 1998-08-19 | 2000-03-03 | Komatsu Ltd | 真空用アクチュエータ |
| EP1006565A2 (en) * | 1998-12-04 | 2000-06-07 | Shinmaywa Industries, Ltd. | Conveying device |
| CN100584546C (zh) * | 2004-06-29 | 2010-01-27 | 株式会社爱发科 | 移送装置及其控制方法以及真空处理装置 |
| CN102152318A (zh) * | 2011-05-04 | 2011-08-17 | 中国科学院等离子体物理研究所 | 在高温真空环境下使用的机器人的驱动机构 |
| CN103192384A (zh) * | 2013-03-11 | 2013-07-10 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117621105A (zh) * | 2023-12-25 | 2024-03-01 | 上海广川科技有限公司 | 抗腐蚀真空机器人 |
| CN118889752A (zh) * | 2024-09-27 | 2024-11-01 | 北京子牛亦东科技有限公司 | 真空电机 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20160020662A1 (en) | 2016-01-21 |
| CN103192384B (zh) | 2015-08-19 |
| US9966812B2 (en) | 2018-05-08 |
| CN103192384A (zh) | 2013-07-10 |
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