WO2014139243A1 - 一种消泡装置 - Google Patents

一种消泡装置 Download PDF

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Publication number
WO2014139243A1
WO2014139243A1 PCT/CN2013/078279 CN2013078279W WO2014139243A1 WO 2014139243 A1 WO2014139243 A1 WO 2014139243A1 CN 2013078279 W CN2013078279 W CN 2013078279W WO 2014139243 A1 WO2014139243 A1 WO 2014139243A1
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WO
WIPO (PCT)
Prior art keywords
defoaming device
guiding tube
air
air guiding
laminar flow
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PCT/CN2013/078279
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English (en)
French (fr)
Inventor
谢克成
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深圳市华星光电技术有限公司
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Publication of WO2014139243A1 publication Critical patent/WO2014139243A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B32B37/0053—Constructional details of laminating machines comprising rollers; Constructional features of the rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0007—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
    • B32B37/003—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality to avoid air inclusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays

Definitions

  • the invention relates to the field of defoaming of polarizers, and in particular to a defoaming device.
  • Thin film transistor liquid crystal display panel utilizes optical anisotropy and birefringence characteristics of liquid crystal molecules through TFT (Thin Film) Transistor: thin film transistor) switch and signal voltage input to control the penetration of light to display images, and the thin film transistor liquid crystal display panel will be attached with a polarizer on its glass substrate, which can act as a polarizing light.
  • a polarizer on its glass substrate, which can act as a polarizing light.
  • bubbles may be generated between the polarizer and the attached glass substrate due to unevenness of the blade, warpage of the polarizer, and the like; defoaming of the polarizer in the prior art The larger the size of the device and the longer the operation time, the longer the production cycle of the product is, which affects the production efficiency.
  • the main object of the present invention is to provide a defoaming device which starts to soften at a certain temperature by applying a high temperature gas having a certain pressure to the polarizer, and at the same time, under a certain pressure, the polarizer
  • the bubbles inside gradually diffuse to the periphery, thereby achieving the effect of dispersing the bubbles of the polarizer, that is, eliminating the bubbles on the surface.
  • the invention is directed to different thicknesses of the to-be-defoamed polarizer, and can freely adjust the processing size thereof, and has the advantages of simple structure, small equipment volume, and convenient operation and maintenance.
  • the present invention provides a defoaming device comprising a support mechanism and a pressurizing mechanism connected to the support mechanism, the pressurizing mechanism comprising an air guide tube and a laminar flow hood that communicates with the air guide tube.
  • the polarizer is placed on the support mechanism.
  • the air guiding tube comprises an air inlet and an air outlet communicating with the air inlet.
  • the air inlet is disposed at one end of the air guiding tube, and the air guiding tube is closed with respect to the other end of the air inlet.
  • the air inlet is an elongated hole parallel to the air guiding tube, and is disposed inside the air guiding tube, the air outlet is a long slot parallel to the air inlet, and the opening is opened in the The air duct faces the outer side of the laminar flow hood.
  • the laminar flow cover is provided with a plurality of through holes, and the through holes communicate with the air outlet.
  • the plurality of through holes are arranged equidistantly.
  • the pressurizing mechanism further includes an outer casing that houses the air guiding tube and the laminar flow hood, and the pressing mechanism connects the supporting mechanism through the outer casing.
  • the air guiding tube has a cylindrical shape or a polygonal prism shape.
  • the outer circumference of the air tube cross section is evenly distributed.
  • the support mechanism comprises a support frame and a roller connecting the support frame, and the roller is disposed opposite to the laminar flow cover.
  • the support frame is further provided with a regulating valve for adjusting the height position of the roller.
  • a polarizer is placed on the roller.
  • the temperature of the gas ranges from 30 ° C to 70 ° C.
  • the pressure of the gas ranges from 10 Pa to 50 Pa.
  • the present invention further provides a defoaming device comprising a supporting mechanism and a pressurizing mechanism connected to the supporting mechanism, the pressurizing mechanism comprising an air guiding tube and a laminar flow hood communicating with the air guiding tube, the air guiding tube comprising a gas port and an air outlet communicating with the air inlet, the laminar flow cover is provided with a plurality of through holes, the through holes are in communication with the air outlet, and the plurality of through holes are arranged equidistantly.
  • the air inlet is an elongated hole parallel to the air guiding tube, and is disposed inside the air guiding tube, the air outlet is a long slot parallel to the air inlet, and the opening is opened in the The air duct faces the outer side of the laminar flow hood.
  • the pressurizing mechanism further includes an outer casing that houses the air guiding tube and the laminar flow hood, and the pressing mechanism connects the supporting mechanism through the outer casing.
  • the air guiding tube has a cylindrical shape or a polygonal prism shape, and the outer circumference of the air guiding tube section is evenly distributed.
  • the support mechanism comprises a support frame and a roller connecting the support frame, the roller is disposed opposite to the laminar flow cover, and the support frame is further provided with a regulating valve for adjusting the height position of the roller.
  • the defoaming device of the present invention comprises a supporting mechanism and a pressurizing mechanism connected to the supporting mechanism, the pressurizing mechanism comprising an air guiding tube and a laminar flow hood communicating the air guiding tube.
  • the defoaming device of the present invention applies a high-temperature gas having a certain pressure to the polarizer by a pressurizing mechanism, so that the polarizer starts to soften at a certain temperature, and at the same time, under a certain pressure, the bubbles in the polarizer gradually spread to the periphery. Thereby, the effect of dispersing the bubbles of the polarizer, that is, eliminating the bubbles on the surface thereof, is achieved.
  • the defoaming device can freely adjust the processing size for the different thickness of the to-be-defoamed polarizer, and has the advantages of simple structure, small equipment volume, and convenient operation and maintenance.
  • FIG. 1 is a schematic structural view of an embodiment of a defoaming device of the present invention
  • Figure 2 is a partial structural view showing a section of the defoaming device A-A shown in Figure 1;
  • FIG 3 is a partial structural schematic view of an embodiment of a defoaming device of the present invention.
  • the present invention proposes a defoaming device.
  • FIG. 1 is a schematic structural view of an embodiment of a defoaming device of the present invention
  • FIG. 2 is a partial structural view of a cross section of the defoaming device AA shown in FIG. 1
  • FIG. 3 is an implementation of the defoaming device of the present invention.
  • the defoaming device includes a supporting mechanism 10 and a pressing mechanism 20 connected to the supporting mechanism 10, and the pressing mechanism 20 includes an air guiding tube 201 and a laminar flow cover 202 that communicates with the air guiding tube 201.
  • the polarizer 30 is placed on the support mechanism 10, and the defoaming device applies a high-temperature gas having a certain pressure to the polarizer 30 through the pressurizing mechanism 20, so that the polarizer 30 starts to soften at a certain temperature, and at the same time, Under a certain pressure, the bubbles in the polarizer 30 gradually spread to the periphery, thereby achieving the effect of dispersing the bubbles of the polarizer 30, that is, eliminating the surface bubbles.
  • the air guiding tube 201 includes an air inlet 2011 and an air outlet 2012 communicating with the air inlet 2011.
  • the air inlet port 2011 is disposed at one end of the air guiding pipe 201, and the air guiding pipe 201 is closed with respect to the other end of the air inlet port 2011.
  • the air inlet port 2011 is a long hole parallel to the air guiding pipe 201, and is disposed inside the air guiding pipe 201.
  • the air outlet port 2012 is a long groove parallel to the air inlet port 2011, and the opening thereof is opened.
  • the air guiding tube 201 faces the outer side of the laminar flow hood 202.
  • the air guiding tube 201 has a cylindrical shape or a polygonal prism shape.
  • the air inlet 2011 disposed inside is more stable and reliable.
  • the air guiding tube 201 is not limited to the shape described in the embodiment as long as the effect of smoothly introducing the gas into the laminar flow hood 202 can be achieved.
  • An external high-temperature gas having a certain pressure enters the air duct 201 through the air inlet 2011, since the air outlet 2012 communicates with the air inlet 2012, and the air duct 201 is opposite to the air inlet 2011 The other end is closed, so that the above-mentioned high-temperature gas having a certain pressure is led out from the gas outlet 2012 and enters the laminar flow hood 202.
  • the shape and positional relationship of the air inlets 2011 and the air outlets 2012 are not limited to those described in the embodiment, as long as the high temperature gas that enters the outside is derived and exits from the air outlets 2012.
  • the effect of the laminar flow hood 202 is sufficient.
  • the temperature range of the externally introduced gas may preferably be 30 ° C to 70 ° C; and the pressure range thereof may preferably be 10 Pa to 50 Pa.
  • the laminar flow cover 202 is provided with a plurality of through holes 2021 , and the through holes 2021 are in communication with the air outlets 2011 .
  • the plurality of through holes 2021 are arranged equidistantly. After the high-temperature gas having a certain pressure is led out from the air outlet 2012, since the air outlet 2012 communicates with the through hole 2021, the gas is led out from the laminar flow hood 202 through the through hole 2021. It is evenly distributed to the polarizer 30 placed on the support mechanism 10, and is defoamed.
  • the pressurizing mechanism 20 further includes a housing 203 for accommodating the air guiding tube 201 and the laminar flow cover 202, and the pressing mechanism 20 is connected to the supporting mechanism 10 through the outer casing 203. Due to the high temperature gas flowing with a certain pressure during the defoaming process, the leakage of the gas may cause damage to an external operator, so the arrangement of the outer casing 203 can not only protect the components housed therein. At the same time, it can also prevent it from harming external operators.
  • the support mechanism 10 includes a support frame 101 and a roller 102 connected to the support frame 101 , and the roller 102 is disposed opposite to the laminar flow cover 202 .
  • the support frame 101 is further provided with a regulating valve 103 for adjusting the height position of the roller 102.
  • the polarizer 30 is placed on the roller 102, and the upper and lower height positions of the roller 102 can be adjusted by the regulating valve 103, thereby driving the polarizer 30 to move up and down, and adjusting the polarizer 30 and
  • the distance between the laminar flow hoods 202 is such that, depending on the product requirements, the gas uniformly extracted from the through holes 2021 is injected onto the polarizer 30, thereby affecting the defoaming process.
  • the rolling speed of the roller 102 can adjust the moving speed of the polarizer 30 thereon. Therefore, the defoaming time of the polarizer 30 can be changed by adjusting the rolling speed of the roller 102 according to the product requirements.
  • the high temperature gas having a certain pressure is applied to the polarizer by the pressing mechanism, so that the polarizer starts to soften at a certain temperature, and at the same time, under a certain pressure, the bubbles in the polarizer gradually spread to the periphery.
  • the invention is directed to different thicknesses of the to-be-defoamed polarizer, and can freely adjust the processing size thereof, and has the advantages of simple structure, small equipment volume, and convenient operation and maintenance.

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  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Gas Separation By Absorption (AREA)
  • Polarising Elements (AREA)

Abstract

一种消泡装置，包括：支撑机构（10）及连接支撑机构（10）的加压机构（20），加压机构（20）包括导气管（201）及连通导气管（201）的层流罩（202）。消泡装置通过加压机构（10）对偏光片（30）施加具有一定压力的高温气体，使偏光片（30）在一定的温度下开始软化，同时，在一定压力的作用下，偏光片（30）内的气泡逐渐向四周扩散，从而达到将偏光片（30）的气泡打散，也即消除其表面气泡的效果。消泡装置针对不同厚度的待消泡偏光片，可以自由调节其加工尺寸，且其结构简单、设备体积小、操作及保养简便。

Description

一种消泡装置
技术领域
本发明涉及偏光片的消泡领域，尤其涉及一种消泡装置。
背景技术
薄膜晶体管液晶显示面板是利用液晶分子的光学各向异性和双折射特性通过TFT（Thin Film Transistor：薄膜晶体管）开关以及讯号电压的输入来控制光的穿透来显示图像，且薄膜晶体管液晶显示面板会在其玻璃基板上贴附偏光片，该偏光片可以起到偏光作用。但是，在贴附偏光片的过程中，由于刮刀不平整、偏光片的翘曲等因素，会导致偏光片与被贴附的玻璃基板之间产生气泡；现有技术中的偏光片的消泡装置的体积较大、作业时间较长，从而导致产品的生产周期延长，影响生产效率；并且，随着目前薄膜晶体管液晶显示面板的尺寸的增大，相应需要贴附的偏光片尺寸也随之增大，因此，设计一种可以缩短作业时间，同时可调整其可以消泡的偏光片尺寸的消泡装置势在必行。
发明内容
本发明的主要目的是提供一种消泡装置，该消泡装置通过对偏光片施加具有一定压力的高温气体，使其在一定的温度下开始软化，同时，在一定压力的作用下，偏光片内的气泡逐渐向四周扩散，从而达到将偏光片的气泡打散，也即消除其表面气泡的效果。本发明针对不同厚度的待消泡偏光片，可以自由调节其加工尺寸，且结构简单、设备体积小、操作及保养简便。
本发明提供了一种消泡装置，包括支撑机构及连接所述支撑机构的加压机构，所述加压机构包括导气管及连通所述导气管的层流罩。
优选地，偏光片放置于所述支撑机构上。
优选地，所述导气管包括进气口及与所述进气口相通的出气口。
优选地，所述进气口设置于所述导气管的一端，且所述导气管相对于所述进气口的另一端封闭。
优选地，所述进气口为与所述导气管平行的长孔，且其设置于所述导气管内部，所述出气口为与所述进气口平行的长槽，且其开设于所述导气管面对所述层流罩的外侧。
优选地，所述层流罩上设有多个通孔，所述通孔与所述出气口相通。
优选地，所述多个通孔等距排列。
优选地，所述加压机构还包括收容所述导气管及所述层流罩的外壳，所述加压机构通过所述外壳连接所述支撑机构。
优选地，所述导气管为圆柱形或多棱柱形。
优选地，所述导气管截面的外周均匀分布。
优选地，所述支撑机构包括支撑架及连接所述支撑架的滚轮，所述滚轮与所述层流罩相对设置。
优选地，所述支撑架上还设有调节所述滚轮高度位置的调节阀。
优选地，偏光片放置于所述滚轮上。
优选地，所述气体的温度范围为：30℃~70℃。
优选地，所述气体的压力范围为：10Pa~50Pa。
本发明进一步还提出一种消泡装置，包括支撑机构及连接所述支撑机构的加压机构，所述加压机构包括导气管及连通所述导气管的层流罩，所述导气管包括进气口及与所述进气口相通的出气口，所述层流罩上设有多个通孔，所述通孔与所述出气口相通，所述多个通孔等距排列。
优选地，所述进气口为与所述导气管平行的长孔，且其设置于所述导气管内部，所述出气口为与所述进气口平行的长槽，且其开设于所述导气管面对所述层流罩的外侧。
优选地，所述加压机构还包括收容所述导气管及所述层流罩的外壳，所述加压机构通过所述外壳连接所述支撑机构。
优选地，所述导气管为圆柱形或多棱柱形，所述导气管截面的外周均匀分布。
优选地，所述支撑机构包括支撑架及连接所述支撑架的滚轮，所述滚轮与所述层流罩相对设置，所述支撑架上还设有调节所述滚轮高度位置的调节阀。
本发明消泡装置包括支撑机构及连接所述支撑机构的加压机构，所述加压机构包括导气管及连通所述导气管的层流罩。本发明消泡装置通过加压机构对偏光片施加具有一定压力的高温气体，使偏光片在一定的温度下开始软化，同时，在一定压力的作用下，偏光片内的气泡逐渐向四周扩散，从而达到将偏光片的气泡打散，也即消除其表面气泡的效果。所述消泡装置针对不同厚度的待消泡偏光片，可以自由调节其加工尺寸，且其结构简单、设备体积小、操作及保养简便。
附图说明
图1是本发明消泡装置一实施例的结构示意图；
图2是图1中所示消泡装置A-A截面的部分结构示意图；
图3是本发明消泡装置一实施例的部分结构示意图。
本发明目的的实现、功能特点及优点将结合实施例，参照附图做进一步说明。
具体实施方式
以下结合说明书附图及具体实施例进一步说明本发明的技术方案。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
本发明提出了一种消泡装置。
参照图1至图3，图1是本发明消泡装置一实施例的结构示意图；图2是图1中所示消泡装置A-A截面的部分结构示意图；图3是本发明消泡装置一实施例的部分结构示意图。
在本发明实施例中，该消泡装置包括支撑机构10及连接所述支撑机构10的加压机构20，所述加压机构20包括导气管201及连通所述导气管201的层流罩202。偏光片30放置于所述支撑机构10上，所述消泡装置通过加压机构20对偏光片30施加具有一定压力的高温气体，使所述偏光片30在一定的温度下开始软化，同时，在一定压力的作用下，偏光片30内的气泡逐渐向四周扩散，从而达到将偏光片30的气泡打散，也即消除其表面气泡的效果。
进一步的，如图1至3所示，所述导气管201包括进气口2011及与所述进气口2011相通的出气口2012。所述进气口2011设置于所述导气管201的一端，且所述导气管201相对于所述进气口2011的另一端封闭。所述进气口2011为与所述导气管201平行的长孔，且其设置于所述导气管201内部，所述出气口2012为与所述进气口2011平行的长槽，且其开设于所述导气管201面对所述层流罩202的外侧。所述导气管201为圆柱形或多棱柱形，相应的，由于所述导气管201截面的外周均匀分布，使得设置于其内部的进气口2011更稳定可靠。所述导气管201并不限于本实施例中所述形状，只要能达到将气体顺利导入至层流罩202的效果即可。
外部的具有一定压力的高温气体通过所述进气口2011进入所述导气管201内，由于所述出气口2012与所述进气口2012相通，且导气管201相对于所述进气口2011的另一端封闭，因此，上述具有一定压力的高温气体自所述出气口2012中导出并进入所述层流罩202。本发明中，所述进气口2011及所述出气口2012的形状及位置关系并不限于本实施例中所述，只要能达到将外部进入的高温气体从所述出气口2012中导出并进入层流罩202的效果即可。且所述外部导入的气体的温度范围可优选为：30℃~70℃；其压力范围可优选为：10Pa~50Pa。
进一步的，如图2及图3所示，所述层流罩202上设有多个通孔2021，所述通孔2021与所述出气口2011相通。所述多个通孔2021等距排列。所述具有一定压力的高温气体自所述出气口2012中导出之后，由于所述出气口2012与所述通孔2021相通，所述气体通过所述通孔2021自所述层流罩202导出并均匀分布到放置于所述支撑机构10的偏光片30上，并对其进行消泡。
进一步的，所述加压机构20还包括收容所述导气管201及所述层流罩202的外壳203，所述加压机构20通过所述外壳203连接所述支撑机构10。由于所述消泡过程中流动具有一定压力的高温气体，该气体的外漏可能会对外部的操作人员产生伤害，因此所述外壳203的设置不仅可以起到保护其内部收容的各部件的作用，同时，还可以防止其对外部操作人员产生伤害。
如图1至图3所示，所述支撑机构10包括支撑架101及连接所述支撑架101的滚轮102，所述滚轮102与所述层流罩202相对设置。所述支撑架101上还设有调节所述滚轮102高度位置的调节阀103。所述偏光片30放置于所述滚轮102上，所述滚轮102的上、下高度位置可以通过所述调节阀103进行调节，从而带动所述偏光片30上下移动，调节所述偏光片30与所述层流罩202之间的距离，从而根据产品需求，改变从所述通孔2021中均匀导出的气体喷射到所述偏光片30上，进而对其消泡过程产生的影响。且滚轮102的滚动，可以调节偏光片30在其上的移动速度，因此，可以根据产品需要，通过调节滚轮102的滚动速度，改变偏光片30的消泡时间。
本发明实施例通过加压机构对偏光片施加具有一定压力的高温气体，使所述偏光片在一定的温度下开始软化，同时，在一定压力的作用下，偏光片内的气泡逐渐向四周扩散，从而达到将偏光片的气泡打散，也即消除其表面气泡的效果。本发明针对不同厚度的待消泡偏光片，可以自由调节其加工尺寸，且其结构简单、设备体积小、操作及保养简便。
以上所述仅为本发明的优选实施例，并非因此限制其专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (20)

  1. 一种消泡装置，其特征在于，包括支撑机构及连接所述支撑机构的加压机构，所述加压机构包括导气管及连通所述导气管的层流罩。
  2. 如权利要求1所述的消泡装置，其特征在于，偏光片放置于所述支撑机构上。
  3. 如权利要求1所述的消泡装置，其特征在于，所述导气管包括进气口及与所述进气口相通的出气口。
  4. 如权利要求3所述的消泡装置，其特征在于，所述进气口设置于所述导气管的一端，且所述导气管相对于所述进气口的另一端封闭。
  5. 如权利要求4所述的消泡装置，其特征在于，所述进气口为与所述导气管平行的长孔，且其设置于所述导气管内部，所述出气口为与所述进气口平行的长槽，且其开设于所述导气管面对所述层流罩的外侧。
  6. 如权利要求3所述的消泡装置，其特征在于，所述层流罩上设有多个通孔，所述通孔与所述出气口相通。
  7. 如权利要求6所述的消泡装置，其特征在于，所述多个通孔等距排列。
  8. 如权利要求1所述的消泡装置，其特征在于，所述加压机构还包括收容所述导气管及所述层流罩的外壳，所述加压机构通过所述外壳连接所述支撑机构。
  9. 如权利要求1所述的消泡装置，其特征在于，所述导气管为圆柱形或多棱柱形。
  10. 如权利要求9所述的消泡装置，其特征在于，所述导气管截面的外周均匀分布。
  11. 如权利要求1所述的消泡装置，其特征在于，所述支撑机构包括支撑架及连接所述支撑架的滚轮，所述滚轮与所述层流罩相对设置。
  12. 如权利要求11所述的消泡装置，其特征在于，所述支撑架上还设有调节所述滚轮高度位置的调节阀。
  13. 如权利要求12所述的消泡装置，其特征在于，偏光片放置于所述滚轮上。
  14. 如权利要求13所述的消泡装置，其特征在于，所述气体的温度范围为：30℃~70℃。
  15. 如权利要求14所述的消泡装置，其特征在于，所述气体的压力范围为：10Pa~50Pa。
  16. 一种消泡装置，其特征在于，包括支撑机构及连接所述支撑机构的加压机构，所述加压机构包括导气管及连通所述导气管的层流罩，所述导气管包括进气口及与所述进气口相通的出气口，所述层流罩上设有多个通孔，所述通孔与所述出气口相通，所述多个通孔等距排列。
  17. 如权利要求16所述的消泡装置，其特征在于，所述进气口为与所述导气管平行的长孔，且其设置于所述导气管内部，所述出气口为与所述进气口平行的长槽，且其开设于所述导气管面对所述层流罩的外侧。
  18. 如权利要求16所述的消泡装置，其特征在于，所述加压机构还包括收容所述导气管及所述层流罩的外壳，所述加压机构通过所述外壳连接所述支撑机构。
  19. 如权利要求16所述的消泡装置，其特征在于，所述导气管为圆柱形或多棱柱形，所述导气管截面的外周均匀分布。
  20. 如权利要求16所述的消泡装置，其特征在于，所述支撑机构包括支撑架及连接所述支撑架的滚轮，所述滚轮与所述层流罩相对设置，所述支撑架上还设有调节所述滚轮高度位置的调节阀。
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