WO2014112334A1 - Coated magnesium oxide powder, and method for producing same - Google Patents

Coated magnesium oxide powder, and method for producing same Download PDF

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Publication number
WO2014112334A1
WO2014112334A1 PCT/JP2014/000055 JP2014000055W WO2014112334A1 WO 2014112334 A1 WO2014112334 A1 WO 2014112334A1 JP 2014000055 W JP2014000055 W JP 2014000055W WO 2014112334 A1 WO2014112334 A1 WO 2014112334A1
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Prior art keywords
resin
magnesium oxide
oxide powder
phosphate
coated
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PCT/JP2014/000055
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French (fr)
Japanese (ja)
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黒田 明
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タテホ化学工業株式会社
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Priority to CN201480003982.8A priority Critical patent/CN104903239B/en
Priority to KR1020157021608A priority patent/KR101751380B1/en
Publication of WO2014112334A1 publication Critical patent/WO2014112334A1/en

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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01FCOMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F5/00Compounds of magnesium
    • C01F5/02Magnesia
    • C01F5/06Magnesia by thermal decomposition of magnesium compounds
    • C01F5/08Magnesia by thermal decomposition of magnesium compounds by calcining magnesium hydroxide
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C1/00Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
    • C09C1/02Compounds of alkaline earth metals or magnesium
    • C09C1/028Compounds containing only magnesium as metal
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/03Particle morphology depicted by an image obtained by SEM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/30Particle morphology extending in three dimensions
    • C01P2004/32Spheres
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/62Submicrometer sized, i.e. from 0.1-1 micrometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/80Particles consisting of a mixture of two or more inorganic phases
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/12Surface area
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/14Pore volume
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/16Pore diameter
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/32Thermal properties
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/80Compositional purity
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09CTREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK  ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
    • C09C3/00Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties
    • C09C3/06Treatment with inorganic compounds
    • C09C3/063Coating

Definitions

  • the present invention relates to a coated magnesium oxide powder that can be used as a filler for a resin, and a method for producing the same. Moreover, this invention relates to the heat radiating member which consists of the resin composition containing the said covering magnesium oxide powder, and the said resin composition.
  • the electronic device is composed of electronic parts such as a laminate, a printed wiring board, and a multilayer wiring board.
  • resin compositions are usually used for prepregs, spacers, sealants, adhesive sheets, and the like, and various performances or characteristics are required for the resin compositions. For example, as a recent trend, mounting of large-capacity power elements in electronic devices and high-density mounting are seen, and accordingly, heat dissipation and moisture resistance superior to conventional ones are required for resin compositions and their applications. ing.
  • silica silicon dioxide
  • alumina aluminum oxide
  • the thermal conductivity of silica is low, and heat dissipation corresponding to an increase in the amount of heat generated due to high integration, high power, high speed, etc. is insufficient, causing problems in stable operation of the semiconductor.
  • alumina having higher thermal conductivity than silica is used, the heat dissipation is improved, but since alumina has a high hardness, there has been a problem that the wear of the kneader, the molding machine and the mold becomes severe.
  • magnesium oxide which has a thermal conductivity that is an order of magnitude higher than that of silica and approximately twice that of alumina, has been studied as a material for resin fillers for semiconductor encapsulation.
  • the magnesium oxide powder has higher hygroscopicity than the silica powder. Therefore, when magnesium oxide powder is used as a resin filler for semiconductor encapsulation, the absorbed water and magnesium oxide are hydrated and the volume of the filler expands, resulting in cracks, reduced thermal conductivity, etc. The problem was occurring. For this reason, providing moisture resistance to the magnesium oxide powder used as the resin filler for semiconductor encapsulation has been a major issue in ensuring long-term stable operation of the semiconductor.
  • Patent Document 1 and Patent Document 2 include mixing an aluminum salt or a silicon compound and magnesium oxide powder, filtering off solids, drying, and firing. There is disclosed a method for producing a coated magnesium oxide powder, wherein the surface of the magnesium oxide powder is coated with a coating layer containing aluminum or a double oxide of silicon and magnesium.
  • the coated magnesium oxide powder obtained by the above-described method has improved moisture resistance, the powder particles have an angular shape, so that the filling property to the resin is low, and the obtained resin composition There is a problem of low fluidity.
  • the object of the present invention is to solve the above-mentioned problems, and is excellent in moisture resistance in addition to thermal conductivity. Further, when used as a filler for a resin, the fluidity of the resin composition after filling is high.
  • An object of the present invention is to provide a coated magnesium oxide powder excellent in moldability and a method for producing the same.
  • Another object of the present invention is to provide a resin composition containing the coated magnesium oxide powder and a heat dissipating member comprising the resin composition.
  • the amount of voids in the particle is 0.3 to 0.8 cm 3 / g
  • the mode diameter is 0.2 to 1.0 ⁇ m
  • the inflection point diameter is 0.9 ⁇ m or more.
  • a coating layer made of a magnesium phosphate compound on at least a part of the surface of the magnesium oxide powder, and the phosphorus content in the coated magnesium oxide powder is 0.1 to 10 mass % Of the coated magnesium oxide powder.
  • the present invention also relates to a filler comprising the coated magnesium oxide powder.
  • the present invention also relates to a resin composition containing a resin and the filler.
  • the said resin composition can be used as heat radiating members, such as an adhesive agent or a semiconductor sealing agent.
  • the present invention includes B in an amount of 100 to 1000 ppm, Na in an amount of 300 ppm or less, K in an amount of 300 ppm or less, Cl in an amount of 0.02 to 0.5 mass%, and Si in terms of SiO 2 in an amount of 0.02 to
  • Magnesium oxide powder is obtained by calcining magnesium hydroxide having a purity of 98% or more, containing 0.5% by mass and 0.1 to 0.8% by mass of Ca in terms of CaO at 1000 ° C. to 1200 ° C. Thereafter, the magnesium oxide powder is mixed with a phosphorus compound and fired at 300 ° C. or higher to form a coating layer made of a magnesium phosphate compound on at least a part of the surface of the magnesium oxide powder.
  • the invention also relates to a method for producing a coated magnesium oxide powder.
  • the present invention in addition to thermal conductivity, it is excellent in moisture resistance, and further, it has excellent filling properties when used as a filler for a resin, and the fluidity of the resin composition after filling is high.
  • the coated magnesium oxide powder having excellent moldability can be provided.
  • the coated magnesium oxide powder of the present invention has a magnesium oxide powder exhibiting specific physical properties and a coating layer formed on the surface and made of a magnesium phosphate compound.
  • the coating layer made of a magnesium phosphate compound may be formed on the entire surface of the magnesium oxide powder, or may be formed only on a part of the surface of the magnesium oxide powder. The surface of the magnesium oxide powder that is not covered with the coating layer made of the magnesium phosphate compound may be exposed.
  • the magnesium oxide powder satisfies an inter-particle void amount of 0.3 to 0.8 cm 3 / g, a mode diameter of 0.2 to 1.0 ⁇ m, and an inflection point diameter of 0.9 ⁇ m or more.
  • the coated magnesium oxide powder of the present invention can be suitably used as a thermally conductive filler.
  • each measured value is a numerical value measured in a mercury intrusion type pore distribution measuring device.
  • the inflection point diameter and the amount of voids in the particle can be obtained from the cumulative pore volume curve.
  • the vertical axis represents the fine particle size obtained in order from the largest pore per unit weight of the sample.
  • the cumulative pore volume which is the cumulative value of the pore volume, is represented, and the horizontal axis represents the pore diameter.
  • the inflection point is the point where the cumulative pore volume curve rises rapidly.
  • the number of inflection points is not limited to one, and there may be a plurality of inflection points, but the inflection point with the largest pore diameter is defined as the inflection point of the present invention.
  • the inflection point diameter is the pore diameter at the inflection point.
  • the inflection point diameter is less than 0.9 ⁇ m, since the amount of fine particles increases, a sudden increase in viscosity occurs when filling the resin.
  • the inflection point diameter is 0.9 to 1.5 ⁇ m.
  • the amount of voids in the particles is the amount of voids smaller than the aggregated particle diameter existing in the particles, and the amount of voids in the particles is the cumulative pores at pore diameters of 0.003 ⁇ 10 ⁇ 6 to 100 ⁇ 10 ⁇ 6 m.
  • the total pore volume represented by the volume is represented by a volume obtained by subtracting the cumulative pore volume at the inflection point.
  • the void amount in the particle of the magnesium oxide powder is less than 0.3 cm 3 / g, the void in the particle is small, a sufficient amount of resin does not penetrate into the particle, and the mechanical strength of the resin composition deteriorates. . Moreover, thermal conductivity is also reduced.
  • the amount of voids in the particles exceeds 0.8 cm 3 / g, the voids in the particles exist deep inside the particles, so that the resin does not reach the inside of the voids sufficiently, and bubbles are generated between the particles and the resin to conduct heat. Sex is reduced.
  • the amount of voids in the particle is 0.3 to 0.7 cm 3 / g.
  • the mode diameter can be obtained from mercury intrusion pore distribution measurement, and is the pore diameter corresponding to the maximum value of the log differential pore volume distribution curve.
  • the mode diameter corresponds to the diameter of the gap between the magnesium oxide particles.
  • the mode diameter of the magnesium oxide powder is less than 0.2 ⁇ m, the amount of fine particles increases, so that a sudden increase in viscosity occurs when filling the resin.
  • the mode diameter exceeds 1.0 ⁇ m, the amount of large particles increases, so that the mechanical strength of the resin composition deteriorates. Moreover, thermal conductivity is also reduced.
  • the mode diameter is 0.3 to 1.0 ⁇ m.
  • a coating layer made of a magnesium phosphate compound is formed on such magnesium oxide powder. With this coating layer, the moisture resistance of the magnesium oxide powder can be improved.
  • the coated magnesium oxide powder of the present invention has a coating layer made of a magnesium phosphate compound, it contains phosphorus as a constituent element.
  • the phosphorus content is 0.1 to 10% by mass with respect to the coated magnesium oxide powder of the present invention.
  • the coated magnesium oxide powder of the present invention can be made excellent in moisture resistance. If the phosphorus content is less than 0.1% by mass, sufficient moisture resistance cannot be exhibited. Conversely, when the phosphorus content exceeds 10% by mass, the magnesium phosphate compound not only coats the surface of the magnesium oxide powder, but the magnesium phosphate compound alone forms particles or is coated. Since the layer is too thick, there is a disadvantage that the thermal conductivity is lowered.
  • the coated magnesium oxide powder of the present invention is excellent in filling property when filling into a resin and has an advantage that the fluidity of the resin composition after filling is high. can do.
  • resin which can be used by this invention a thermosetting resin or a thermoplastic resin is mentioned, for example.
  • a thermosetting resin For example, a phenol resin, a urea resin, a melamine resin, an alkyd resin, a polyester resin, an epoxy resin, a diallyl phthalate resin, a polyurethane resin, or a silicone resin is mentioned.
  • the thermoplastic resin is not particularly limited.
  • polyamide resin polyamide resin, polyacetal resin, polycarbonate resin, polybutylene terephthalate resin, polysulfone resin, polyamideimide resin, polyetherimide resin, polyarylate resin, polyphenylene sulfide resin, polyether ether
  • examples include ketone resins, fluororesins, and liquid crystal polymers.
  • the blending amount of the coated magnesium oxide powder in the resin composition of the present invention may be appropriately determined according to the specifics required for the resin composition, and is not particularly limited. However, as an example, it may be used in the range of 0.1 to 100 parts by mass of the coated magnesium oxide powder with respect to 100 parts by mass of the resin.
  • the resin composition containing the coated magnesium oxide powder of the present invention can be used in various fields depending on the properties of the resin. However, since the coated magnesium oxide powder of the present invention is excellent in thermal conductivity, it can be suitably used particularly in applications where heat dissipation is required. Moreover, the resin composition of this invention can be utilized as a semiconductor sealing material excellent in thermal conductivity and moisture resistance.
  • magnesium hydroxide showing predetermined physical properties is obtained by firing magnesium hydroxide.
  • concentration of each impurity element contained in the magnesium hydroxide to be fired is adjusted to a predetermined concentration in advance, and the temperature at the time of firing is set to a range of 1000 to 1200 ° C. to obtain magnesium oxide exhibiting predetermined physical properties. It becomes possible.
  • the different elements in magnesium hydroxide are as follows.
  • the concentration of these different elements can be adjusted by a conventional method.
  • B when B is insufficient, it can be adjusted by adding boric acid or magnesium borate.
  • Cl when Cl is insufficient, it can be adjusted by adding hydrochloric acid or magnesium chloride.
  • Si when Si is insufficient, it can be adjusted by adding sodium silicate, magnesium silicate, calcium silicate or the like.
  • calcium when calcium is insufficient, it can be adjusted by adding calcium hydroxide, calcium oxide, calcium carbonate or the like.
  • magnesium hydroxide When B in magnesium hydroxide exceeds 1000 ppm, or Na or K exceeds 300 ppm, the obtained magnesium oxide does not satisfy the above-mentioned conditions for the void amount in the particle and / or the inflection point diameter. Further, when Ca in magnesium hydroxide is out of the range of 0.1 to 0.8% by mass in terms of CaO, or when Si is out of the range of 0.02 to 0.5% by mass in terms of SiO 2 The obtained magnesium oxide does not satisfy the conditions of the mode diameter and / or the inflection point diameter described above, and the shape is not rounded. It is preferable to use magnesium hydroxide having a purity of 98% or more.
  • the temperature at which magnesium hydroxide is fired is preferably in the range of 1000 to 1200 ° C.
  • the obtained magnesium oxide does not satisfy the above-described conditions for the void amount in the particle, the mode diameter, and / or the inflection point diameter.
  • a calcination temperature exceeds 1200 degreeC, the magnesium oxide obtained will not satisfy the conditions of the mode diameter and / or inflection point diameter mentioned above.
  • the firing furnace and firing time are not particularly limited, and may be any firing furnace and firing time in which magnesium hydroxide can be converted to magnesium oxide at the temperature described above.
  • the magnesium oxide obtained by firing magnesium hydroxide as described above is coarsely pulverized using a pulverizer as necessary. Thereby, a magnesium oxide powder is obtained.
  • This magnesium oxide powder is mixed with a phosphorus compound and, if necessary, dried at a temperature of about 120 ° C. to 200 ° C. and then pulverized using a ball mill or the like to obtain a powder.
  • a magnesium oxide powder in which a coating layer made of a magnesium phosphate compound is formed on at least a part of the surface can be obtained.
  • the phosphorus compound is not particularly limited as long as it is a compound that can react with magnesium oxide to form a magnesium phosphate compound, and examples thereof include phosphoric acid, phosphate, and acidic phosphate. These may be used alone or in combination of two or more. Preferably it is acidic phosphate ester.
  • the acidic phosphate ester include isopropyl acid phosphate, 2-ethylhexyl acid phosphate, oleyl acid phosphate, methyl acid phosphate, ethyl acid phosphate, propyl acid phosphate, butyl acid phosphate, lauryl acid phosphate, and stearyl acid phosphate.
  • the amount of phosphorus compound used may be adjusted so that the phosphorus content relative to the entire coated magnesium oxide powder as the final product is 0.1 to 10% by mass.
  • the phosphorus compound can be used in an amount of about 5 to 10% by mass with respect to the magnesium oxide powder.
  • Calcination temperature is 300 ° C. or higher, preferably about 300 to 700 ° C.
  • An example is firing at 500 ° C. for 1 hour. By this firing, the phosphorous compound is converted into a magnesium phosphate compound, whereby a coating layer made of the magnesium phosphate compound can be formed on the surface of the magnesium oxide powder.
  • the concentration in the sample was calculated by measuring the mass using a spectrophotometer (trade name: UV-2550, manufactured by Shimadzu Corporation).
  • the concentration in the sample was measured using a fluorescent X-ray apparatus (trade name: SPS-5100, manufactured by Seiko Instruments Inc.). However, respectively shown as the concentration of SiO 2 in terms and terms of CaO.
  • the concentration in the sample was measured using an atomic absorption photometer (trade name: Z-2300, manufactured by Hitachi High-Technologies).
  • the mercury As the mercury, a special grade mercury reagent having a purity of 99.5 mass% or more and a density of 13.5335 ⁇ 10 3 kg / m 3 was used.
  • the measurement cell used was a powder sample cell having an internal volume of 5 ⁇ 10 ⁇ 6 m 3 and a stem volume of 0.38 ⁇ 10 ⁇ 6 m 3 .
  • a measurement sample a sample having a uniform particle size with a 330 mesh standard sieve (JIS-R8801-87) is weighed precisely in a mass range of 0.10 ⁇ 10 ⁇ 3 to 0.13 ⁇ 10 ⁇ 3 kg, The measuring cell was filled.
  • the inside of the cell was kept under a reduced pressure at a pressure of 50 ⁇ Hg (6.67 Pa) or less for 20 minutes.
  • mercury was filled in the measurement cell until the pressure became 1.5 psia (10342 Pa).
  • mercury was injected in a pressure range of 2 psia (13790 Pa) to 60000 psia (413.7 MPa), and the pore distribution was measured.
  • the resin composition was measured according to JIS-K7210 at a measurement temperature of 230 ° C. and a load of 2.16 Kg.
  • the resin composition used in the measurement of the melt flow rate was prepared by the following procedure. After 100 g of EEA (ethylene ethyl acrylate copolymer) was melted, 333 g of filler was added in small portions over about 10 minutes while observing the kneaded state, and finish kneading was further performed for 10 minutes. The roll interval at this time was 0.5 mm.
  • EEA ethylene ethyl acrylate copolymer
  • the compound was peeled off, and the recovered compound was cut into about 5 mm square and dried in a vacuum dryer at 90 ° C. for 1 hour to obtain a sample for measuring melt flow rate.
  • Example 1 Firing the CaO in the magnesium oxide can be 0.23 mass%, the SiO 2 0.07 wt%, a Cl 0.16 wt%, B of 402Ppm, Na is 11 ppm, K is 9 ppm, the so as to adjust The magnesium hydroxide having a purity of 99.2% was baked in an electric furnace at 1100 ° C. for 1 hour to prepare magnesium oxide.
  • the obtained coated magnesium oxide powder was measured for the impurity element concentration, BET specific surface area, pore distribution, moisture resistance, thermal conductivity, and melt flow rate based on the above-mentioned method, and the results are shown in Table 1.
  • composition of the coating layer on the surface of the obtained coated magnesium oxide powder was measured based on the method described above, it was found to be Mg 2 P 2 O 7 .
  • FIG. 1 is an electron micrograph of the obtained coated magnesium oxide powder.
  • the particle shape of the coated magnesium oxide powder was spherical.
  • a spherical powder refers to a powder composed of rounded particles without corners
  • an amorphous powder refers to a powder composed of angular particles in which a plurality of crystal particles are combined. Point to.
  • Example 2 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the firing temperature of magnesium hydroxide was changed to 1175 ° C. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 3 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the CaO concentration of magnesium oxide was adjusted to 0.48% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 4 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the SiO 2 concentration of magnesium oxide was adjusted to 0.12% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 5 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the B concentration of magnesium hydroxide was adjusted to 700 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 6 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the Na concentration of magnesium hydroxide was adjusted to 200 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 7 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the K concentration of magnesium hydroxide was adjusted to 200 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 8 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content in the coated magnesium oxide powder was 0.18% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 9 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content in the coated magnesium oxide powder was 4.6% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
  • Example 1 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the firing temperature of magnesium hydroxide was changed to 950 ° C. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 2 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the firing temperature of magnesium hydroxide was changed to 1400 ° C. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 3 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the CaO concentration of magnesium hydroxide was changed to 1% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 4 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the SiO 2 concentration of magnesium hydroxide was changed to 4% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 5 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the B concentration of magnesium hydroxide was changed to 1200 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 6 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the Na concentration of magnesium hydroxide was changed to 400 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 7 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the K concentration of magnesium hydroxide was changed to 400 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 8 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content relative to the entire coated magnesium oxide powder was 0.058% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
  • Example 9 A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content relative to the entire coated magnesium oxide powder was 12.1% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.

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Abstract

Provided is a coated magnesium oxide powder which has excellent heat conductivity and moisture resistance, can exhibit an excellent filling property when used as a filler for a resin, and can be filled into a resin composition to impart high fluidability to the resin composition and therefore impart excellent moldability to the resin composition. A coated magnesium oxide powder comprising a magnesium oxide powder and a coating layer formed on at least a part of the surface of the powder and comprising a magnesium-phosphate-type compound, wherein the magnesium oxide powder has a particle internal void volume of 0.3 to 0.8 cm3/g, a mode diameter of 0.2 to 1.0 μm and an inflection point diameter of 0.9 μm or more in a mercury intrusion pore size distribution, and wherein the content of phosphorus in the coated magnesium oxide powder is 0.1 to 10 mass%.

Description

被覆酸化マグネシウム粉末及びその製造方法Coated magnesium oxide powder and method for producing the same
 本発明は、樹脂に対する充填材として使用可能な被覆酸化マグネシウム粉末、及びその製造方法に関する。また、本発明は、前記被覆酸化マグネシウム粉末を含む樹脂組成物、及び当該樹脂組成物からなる放熱性部材に関する。 The present invention relates to a coated magnesium oxide powder that can be used as a filler for a resin, and a method for producing the same. Moreover, this invention relates to the heat radiating member which consists of the resin composition containing the said covering magnesium oxide powder, and the said resin composition.
 電子デバイスは、積層体、プリント配線板、多層配線板等の電子部品により構成されている。電子部品には、通常、樹脂組成物がプリプレグ、スペーサー、封止剤、接着性シート等に用いられており、当該樹脂組成物には、様々な性能又は特性が要求されている。例えば、最近の傾向として、電子デバイスにおける大容量パワー素子の搭載、高密度な実装が見られ、それに伴い樹脂組成物及びその応用品に対し従来よりも更に優れた放熱性、耐湿性が要求されている。 The electronic device is composed of electronic parts such as a laminate, a printed wiring board, and a multilayer wiring board. In electronic parts, resin compositions are usually used for prepregs, spacers, sealants, adhesive sheets, and the like, and various performances or characteristics are required for the resin compositions. For example, as a recent trend, mounting of large-capacity power elements in electronic devices and high-density mounting are seen, and accordingly, heat dissipation and moisture resistance superior to conventional ones are required for resin compositions and their applications. ing.
 半導体封止用の樹脂組成物に用いる充填材(フィラー)は、従来、二酸化ケイ素(以下、シリカという)、酸化アルミニウム(以下、アルミナという)が用いられてきた。しかし、シリカの熱伝導性は低く、高集積化、高電力化、高速化等による発熱量の増大に対応する放熱が充分ではないため、半導体の安定動作等に問題が生じていた。一方、シリカより熱伝導性が高いアルミナを使用すると、放熱性は改善されるが、アルミナは硬度が高いために、混練機や成型機及び金型の摩耗が激しくなるという問題点があった。 Conventionally, silicon dioxide (hereinafter referred to as silica) and aluminum oxide (hereinafter referred to as alumina) have been used as a filler (filler) used in a resin composition for semiconductor encapsulation. However, the thermal conductivity of silica is low, and heat dissipation corresponding to an increase in the amount of heat generated due to high integration, high power, high speed, etc. is insufficient, causing problems in stable operation of the semiconductor. On the other hand, when alumina having higher thermal conductivity than silica is used, the heat dissipation is improved, but since alumina has a high hardness, there has been a problem that the wear of the kneader, the molding machine and the mold becomes severe.
 そこで、シリカに比べて熱伝導率が1桁高く、アルミナの約2倍の熱伝導率を有する酸化マグネシウムが半導体封止用樹脂充填材の材料として検討されている。しかし、酸化マグネシウム粉末は、シリカ粉末に比べ、吸湿性が大きい。そのため、半導体封止用樹脂充填材として酸化マグネシウム粉末を用いた場合、吸湿した水と酸化マグネシウムが水和して、充填材の体積が膨張し、これによるクラックの発生、熱伝導性の低下等の問題が発生していた。このため、半導体封止用樹脂充填材として用いる酸化マグネシウム粉末に耐湿性を付与することが、半導体の長期的な安定動作を保証する上で大きな課題となっていた。 Therefore, magnesium oxide, which has a thermal conductivity that is an order of magnitude higher than that of silica and approximately twice that of alumina, has been studied as a material for resin fillers for semiconductor encapsulation. However, the magnesium oxide powder has higher hygroscopicity than the silica powder. Therefore, when magnesium oxide powder is used as a resin filler for semiconductor encapsulation, the absorbed water and magnesium oxide are hydrated and the volume of the filler expands, resulting in cracks, reduced thermal conductivity, etc. The problem was occurring. For this reason, providing moisture resistance to the magnesium oxide powder used as the resin filler for semiconductor encapsulation has been a major issue in ensuring long-term stable operation of the semiconductor.
 酸化マグネシウム粉末の耐湿性を改善させる方法として、特許文献1及び特許文献2にはアルミニウム塩又はケイ素化合物と酸化マグネシウム粉末を混合し、固体分をろ別し、乾燥させて、焼成することにより、該酸化マグネシウム粉末の表面を、アルミニウム又はケイ素とマグネシウムの複酸化物を含む被覆層で被覆することを特徴とする被覆酸化マグネシウム粉末の製造方法が開示されている。 As a method for improving the moisture resistance of magnesium oxide powder, Patent Document 1 and Patent Document 2 include mixing an aluminum salt or a silicon compound and magnesium oxide powder, filtering off solids, drying, and firing. There is disclosed a method for producing a coated magnesium oxide powder, wherein the surface of the magnesium oxide powder is coated with a coating layer containing aluminum or a double oxide of silicon and magnesium.
特開2003-34522号公報JP 2003-34522 A 特開2003-34523号公報JP 2003-34523 A
 しかしながら、上述した方法により得られた被覆酸化マグネシウム粉末は耐湿性が改善されたものの、粉末粒子は角張った形状をしているため、樹脂への充填性が低く、さらに得られた樹脂組成物の流動性が低いという問題がある。 However, although the coated magnesium oxide powder obtained by the above-described method has improved moisture resistance, the powder particles have an angular shape, so that the filling property to the resin is low, and the obtained resin composition There is a problem of low fluidity.
 本発明の目的は、上記の課題を解消し、熱伝導性に加えて耐湿性に優れると共に、さらに、樹脂への充填材として用いる際、充填後の樹脂組成物の流動性が高く、その結果、成形性に優れた被覆酸化マグネシウム粉末、及びその製造方法を提供することである。本発明の他の目的は、当該被覆酸化マグネシウム粉末を含む樹脂組成物、及び当該樹脂組成物からなる放熱性部材を提供することである。 The object of the present invention is to solve the above-mentioned problems, and is excellent in moisture resistance in addition to thermal conductivity. Further, when used as a filler for a resin, the fluidity of the resin composition after filling is high. An object of the present invention is to provide a coated magnesium oxide powder excellent in moldability and a method for producing the same. Another object of the present invention is to provide a resin composition containing the coated magnesium oxide powder and a heat dissipating member comprising the resin composition.
 本発明は、水銀圧入式細孔分布において、粒子内空隙量が0.3~0.8cm/g、モード径が0.2~1.0μm、及び変曲点径が0.9μm以上を示す酸化マグネシウム粉末と、前記酸化マグネシウム粉末の表面の少なくとも一部に、リン酸マグネシウム系化合物よりなる被覆層と、を有し、被覆酸化マグネシウム粉末内のリンの含有量が0.1~10質量%であることを特徴とする、被覆酸化マグネシウム粉末に関する。 According to the present invention, in the mercury intrusion pore distribution, the amount of voids in the particle is 0.3 to 0.8 cm 3 / g, the mode diameter is 0.2 to 1.0 μm, and the inflection point diameter is 0.9 μm or more. And a coating layer made of a magnesium phosphate compound on at least a part of the surface of the magnesium oxide powder, and the phosphorus content in the coated magnesium oxide powder is 0.1 to 10 mass % Of the coated magnesium oxide powder.
 また本発明は、当該被覆酸化マグネシウム粉末からなる充填材にも関する。 The present invention also relates to a filler comprising the coated magnesium oxide powder.
 さらに本発明は、樹脂と、当該充填材とを含有する樹脂組成物にも関する。当該樹脂組成物は、接着剤または半導体封止剤等の放熱性部材として使用することができる。 Furthermore, the present invention also relates to a resin composition containing a resin and the filler. The said resin composition can be used as heat radiating members, such as an adhesive agent or a semiconductor sealing agent.
 さらにまた、本発明は、Bを100~1000ppm、Naを300ppm以下、Kを300ppm以下、Clを0.02~0.5質量%含み、かつ、SiをSiOに換算して0.02~0.5質量%、CaをCaOに換算して0.1~0.8質量%含む、純度98%以上の水酸化マグネシウムを、1000℃~1200℃で焼成することにより、酸化マグネシウム粉末を得た後、前記酸化マグネシウム粉末を、リン化合物と混合して、300℃以上で焼成することにより、前記酸化マグネシウム粉末の表面の少なくとも一部にリン酸マグネシウム系化合物よりなる被覆層を形成することを特徴とする、被覆酸化マグネシウム粉末の製造方法にも関する。 Furthermore, the present invention includes B in an amount of 100 to 1000 ppm, Na in an amount of 300 ppm or less, K in an amount of 300 ppm or less, Cl in an amount of 0.02 to 0.5 mass%, and Si in terms of SiO 2 in an amount of 0.02 to Magnesium oxide powder is obtained by calcining magnesium hydroxide having a purity of 98% or more, containing 0.5% by mass and 0.1 to 0.8% by mass of Ca in terms of CaO at 1000 ° C. to 1200 ° C. Thereafter, the magnesium oxide powder is mixed with a phosphorus compound and fired at 300 ° C. or higher to form a coating layer made of a magnesium phosphate compound on at least a part of the surface of the magnesium oxide powder. The invention also relates to a method for producing a coated magnesium oxide powder.
 本発明によれば、熱伝導性に加えて耐湿性に優れると共に、さらに、樹脂への充填材として用いる際の充填性に優れ、かつ、充填後の樹脂組成物の流動性が高く、その結果、成形性に優れた被覆酸化マグネシウム粉末を提供することができる。 According to the present invention, in addition to thermal conductivity, it is excellent in moisture resistance, and further, it has excellent filling properties when used as a filler for a resin, and the fluidity of the resin composition after filling is high. The coated magnesium oxide powder having excellent moldability can be provided.
実施例1で製造した被覆酸化マグネシウム粉末を撮影した電子顕微鏡写真Electron micrograph of the coated magnesium oxide powder produced in Example 1
 以下、本発明を具体的に説明する。 Hereinafter, the present invention will be specifically described.
 本発明の被覆酸化マグネシウム粉末は、特定の物性を示す酸化マグネシウム粉末と、その表面に形成された、リン酸マグネシウム系化合物よりなる被覆層と、を有するものである。リン酸マグネシウム系化合物からなる被覆層は、酸化マグネシウム粉末の全表面に形成されていてもよいし、酸化マグネシウム粉末の表面の一部のみに形成されていてもよい。リン酸マグネシウム系化合物からなる被覆層によって被覆されていない酸化マグネシウム粉末表面は露出していてよい。 The coated magnesium oxide powder of the present invention has a magnesium oxide powder exhibiting specific physical properties and a coating layer formed on the surface and made of a magnesium phosphate compound. The coating layer made of a magnesium phosphate compound may be formed on the entire surface of the magnesium oxide powder, or may be formed only on a part of the surface of the magnesium oxide powder. The surface of the magnesium oxide powder that is not covered with the coating layer made of the magnesium phosphate compound may be exposed.
 本発明において、酸化マグネシウム粉末は、粒子内空隙量が0.3~0.8cm/g、モード径が0.2~1.0μm、及び変曲点径が0.9μm以上を満足する。このような酸化マグネシウム粉末の表面にリン酸マグネシウム系化合物よりなる被覆層を形成することによって、本発明の被覆酸化マグネシウム粉末を熱伝導性の充填材として好適に利用することが可能となる。 In the present invention, the magnesium oxide powder satisfies an inter-particle void amount of 0.3 to 0.8 cm 3 / g, a mode diameter of 0.2 to 1.0 μm, and an inflection point diameter of 0.9 μm or more. By forming a coating layer made of a magnesium phosphate compound on the surface of such magnesium oxide powder, the coated magnesium oxide powder of the present invention can be suitably used as a thermally conductive filler.
 なお、各測定値は、水銀圧入式細孔分布測定装置において測定された数値である。 In addition, each measured value is a numerical value measured in a mercury intrusion type pore distribution measuring device.
 変曲点径、及び粒子内空隙量は、累積細孔容積曲線から求めることができ、累積細孔容積曲線において、縦軸は、試料単位重量当たりの、大きな細孔から順に求めた粒子の細孔容積の累積値である累積細孔容積を表し、横軸は、細孔直径を表す。 The inflection point diameter and the amount of voids in the particle can be obtained from the cumulative pore volume curve. In the cumulative pore volume curve, the vertical axis represents the fine particle size obtained in order from the largest pore per unit weight of the sample. The cumulative pore volume, which is the cumulative value of the pore volume, is represented, and the horizontal axis represents the pore diameter.
 変曲点とは、累積細孔容積曲線が急激に立ち上る点である。測定試料に応じて、変曲点の数は1個に限られず、複数個存在する場合があるが、細孔直径が最も大きい変曲点を、本発明の変曲点とした。変曲点径は、変曲点における細孔直径である。 The inflection point is the point where the cumulative pore volume curve rises rapidly. Depending on the measurement sample, the number of inflection points is not limited to one, and there may be a plurality of inflection points, but the inflection point with the largest pore diameter is defined as the inflection point of the present invention. The inflection point diameter is the pore diameter at the inflection point.
 変曲点径が0.9μm未満であると、細かい粒子の量が増加するため、樹脂に充填する際に急激な粘度の上昇が発生する。好ましくは、変曲点径は0.9~1.5μmである。 When the inflection point diameter is less than 0.9 μm, since the amount of fine particles increases, a sudden increase in viscosity occurs when filling the resin. Preferably, the inflection point diameter is 0.9 to 1.5 μm.
 粒子内空隙量は、粒子内に存在する凝集粒子径よりも小さな空隙の量であり、粒子内空隙量は、細孔直径0.003×10-6~100×10-6mにおける累積細孔容積で表される全細孔容積から、前記変曲点における累積細孔容積を減じた容積で表される。 The amount of voids in the particles is the amount of voids smaller than the aggregated particle diameter existing in the particles, and the amount of voids in the particles is the cumulative pores at pore diameters of 0.003 × 10 −6 to 100 × 10 −6 m. The total pore volume represented by the volume is represented by a volume obtained by subtracting the cumulative pore volume at the inflection point.
 酸化マグネシウム粉末の粒子内空隙量が0.3cm/g未満であると、粒子中の空隙が少なく、粒子中に十分な量の樹脂が浸透せず、樹脂組成物の機械的強度が悪化する。また、熱伝導性についても低下する。一方、粒子内空隙量が0.8cm/gを超えると、粒子内空隙が粒子奥深くまで存在するため、空隙内部まで樹脂が十分に行き渡らず、粒子と樹脂の間に気泡が発生し熱伝導性が低下する。好ましくは、粒子内空隙量は0.3~0.7cm/gである。 When the void amount in the particle of the magnesium oxide powder is less than 0.3 cm 3 / g, the void in the particle is small, a sufficient amount of resin does not penetrate into the particle, and the mechanical strength of the resin composition deteriorates. . Moreover, thermal conductivity is also reduced. On the other hand, when the amount of voids in the particles exceeds 0.8 cm 3 / g, the voids in the particles exist deep inside the particles, so that the resin does not reach the inside of the voids sufficiently, and bubbles are generated between the particles and the resin to conduct heat. Sex is reduced. Preferably, the amount of voids in the particle is 0.3 to 0.7 cm 3 / g.
 モード径は、水銀圧入式細孔分布測定から求めることができ、log微分細孔容積分布曲線の最大値に対応する細孔直径である。本発明の酸化マグネシウム粒子の細孔分布を、水銀圧入測定装置によって測定した場合、モード径は、酸化マグネシウム粒子同士の間の空隙の直径に対応する。酸化マグネシウム粉末のモード径が0.2μm未満であると、細かい粒子の量が増加するため、樹脂に充填する際に急激な粘度の上昇が発生する。一方、モード径が1.0μmを超えると、大きな粒子の量が増加するため、樹脂組成物の機械的強度が悪化する。また、熱伝導性についても低下する。好ましくは、モード径は0.3~1.0μmである。 The mode diameter can be obtained from mercury intrusion pore distribution measurement, and is the pore diameter corresponding to the maximum value of the log differential pore volume distribution curve. When the pore distribution of the magnesium oxide particles of the present invention is measured by a mercury intrusion measuring apparatus, the mode diameter corresponds to the diameter of the gap between the magnesium oxide particles. When the mode diameter of the magnesium oxide powder is less than 0.2 μm, the amount of fine particles increases, so that a sudden increase in viscosity occurs when filling the resin. On the other hand, when the mode diameter exceeds 1.0 μm, the amount of large particles increases, so that the mechanical strength of the resin composition deteriorates. Moreover, thermal conductivity is also reduced. Preferably, the mode diameter is 0.3 to 1.0 μm.
 このような酸化マグネシウム粉末に、リン酸マグネシウム系化合物よりなる被覆層を形成する。この被覆層により、酸化マグネシウム粉末の耐湿性を改善することができる。リン酸マグネシウム系化合物とは、例えば、組成式:Mg(x=1~3、y=2、z=6~8)で示される化合物である。 A coating layer made of a magnesium phosphate compound is formed on such magnesium oxide powder. With this coating layer, the moisture resistance of the magnesium oxide powder can be improved. The magnesium phosphate compound is, for example, a compound represented by a composition formula: Mg x P y O z (x = 1 to 3, y = 2, z = 6 to 8).
 本発明の被覆酸化マグネシウム粉末は、リン酸マグネシウム系化合物よりなる被覆層を有するので、リンを構成元素として含有する。リンの含有量は、本発明の被覆酸化マグネシウム粉末に対して0.1~10質量%である。リンがこのような範囲内において含まれることで、本発明の被覆酸化マグネシウム粉末を耐湿性に優れたものとすることができる。リンの含有量が0.1質量%未満であると、充分な耐湿性を発揮することができない。逆にリンの含有量が10質量%を超えると、リン酸マグネシウム系化合物が酸化マグネシウム粉末の表面を被覆するだけではなく、当該リン酸マグネシウム系化合物が単独で粒子を形成したり、または、被覆層が厚すぎたりするため、熱伝導性が低下する欠点がある。 Since the coated magnesium oxide powder of the present invention has a coating layer made of a magnesium phosphate compound, it contains phosphorus as a constituent element. The phosphorus content is 0.1 to 10% by mass with respect to the coated magnesium oxide powder of the present invention. By including phosphorus within such a range, the coated magnesium oxide powder of the present invention can be made excellent in moisture resistance. If the phosphorus content is less than 0.1% by mass, sufficient moisture resistance cannot be exhibited. Conversely, when the phosphorus content exceeds 10% by mass, the magnesium phosphate compound not only coats the surface of the magnesium oxide powder, but the magnesium phosphate compound alone forms particles or is coated. Since the layer is too thick, there is a disadvantage that the thermal conductivity is lowered.
 本発明の被覆酸化マグネシウム粉末は、樹脂に充填する際の充填性に優れており、かつ、充填後の樹脂組成物の流動性が高いという利点があるため、好適に、充填材として樹脂に配合することができる。本発明で使用可能な樹脂としては、例えば、熱硬化性樹脂、又は、熱可塑性樹脂が挙げられる。熱硬化性樹脂としては特に限定されないが、例えば、フェノール樹脂、尿素樹脂、メラミン樹脂、アルキド樹脂、ポリエステル樹脂、エポキシ樹脂、ジアリルフタレート樹脂、ポリウレタン樹脂、又はシリコーン樹脂が挙げられる。熱可塑性樹脂としては特に限定されないが、例えば、ポリアミド樹脂、ポリアセタール樹脂、ポリカーボネート樹脂、ポリブチレンテレフタレート樹脂、ポリスルフォン樹脂、ポリアミドイミド樹脂、ポリエーテルイミド樹脂、ポリアリレート樹脂、ポリフェニレンスルフィド樹脂、ポリエーテルエーテルケトン樹脂、フッ素樹脂、又は液晶ポリマーが挙げられる。 The coated magnesium oxide powder of the present invention is excellent in filling property when filling into a resin and has an advantage that the fluidity of the resin composition after filling is high. can do. As resin which can be used by this invention, a thermosetting resin or a thermoplastic resin is mentioned, for example. Although it does not specifically limit as a thermosetting resin, For example, a phenol resin, a urea resin, a melamine resin, an alkyd resin, a polyester resin, an epoxy resin, a diallyl phthalate resin, a polyurethane resin, or a silicone resin is mentioned. The thermoplastic resin is not particularly limited. For example, polyamide resin, polyacetal resin, polycarbonate resin, polybutylene terephthalate resin, polysulfone resin, polyamideimide resin, polyetherimide resin, polyarylate resin, polyphenylene sulfide resin, polyether ether Examples include ketone resins, fluororesins, and liquid crystal polymers.
 本発明の樹脂組成物における被覆酸化マグネシウム粉末の配合量は、樹脂組成物に求められる特定に応じて適宜決定すればよく、特に限定されない。しかし、一例として樹脂100質量部に対し、被覆酸化マグネシウム粉末0.1~100質量部の範囲で使用すればよい。 The blending amount of the coated magnesium oxide powder in the resin composition of the present invention may be appropriately determined according to the specifics required for the resin composition, and is not particularly limited. However, as an example, it may be used in the range of 0.1 to 100 parts by mass of the coated magnesium oxide powder with respect to 100 parts by mass of the resin.
 本発明の被覆酸化マグネシウム粉末を含む樹脂組成物は、その樹脂の特性に応じて種々の分野で利用することができる。しかし、本発明の被覆酸化マグネシウム粉末は熱伝動性に優れているので、特に放熱性が要求される用途で好適に使用することができる。また、本発明の樹脂組成物は、熱伝導性及び耐湿性に優れた半導体封止材料として利用することができる。 The resin composition containing the coated magnesium oxide powder of the present invention can be used in various fields depending on the properties of the resin. However, since the coated magnesium oxide powder of the present invention is excellent in thermal conductivity, it can be suitably used particularly in applications where heat dissipation is required. Moreover, the resin composition of this invention can be utilized as a semiconductor sealing material excellent in thermal conductivity and moisture resistance.
 次に、本発明の被覆酸化マグネシウム粉末を製造する方法について説明する。 Next, a method for producing the coated magnesium oxide powder of the present invention will be described.
 まず、水酸化マグネシウムを焼成することにより、所定の物性を示す酸化マグネシウムを得る。焼成する水酸化マグネシウムに含まれる各不純物元素の濃度をあらかじめ所定の濃度に調節しておき、焼成時の温度を1000~1200℃の範囲に設定することによって、所定の物性を示す酸化マグネシウムを得ることが可能になる。 First, magnesium hydroxide showing predetermined physical properties is obtained by firing magnesium hydroxide. The concentration of each impurity element contained in the magnesium hydroxide to be fired is adjusted to a predetermined concentration in advance, and the temperature at the time of firing is set to a range of 1000 to 1200 ° C. to obtain magnesium oxide exhibiting predetermined physical properties. It becomes possible.
 水酸化マグネシウム中の異種元素は次のとおりである。B(ホウ素):100~1000ppm(好ましくは300~800ppm)、Na(ナトリウム):300ppm以下(好ましくは200ppm以下)、K(カリウム):300ppm以下(好ましくは200ppm以下)、Cl(塩素):0.02~0.5質量%(好ましくは0.15~0.3質量%)、Si(ケイ素):SiO換算で0.02~0.5質量%(0.05~0.15質量%)、Ca:CaO換算で0.1~0.8質量%(好ましくは0.2~0.5質量%)。なお、これら異種元素の濃度調整は従来法により行うことができる。例えば、Bが不足している場合はホウ酸、又はホウ酸マグネシウムを添加して調整できる。Clが不足している場合は、塩酸、又は塩化マグネシウム等を添加して調整できる。Siが不足している場合は珪酸ナトリウム、珪酸マグネシウム、又は珪酸カルシウム等を添加して調整できる。カルシウムが不足している場合は水酸化カルシウム、酸化カルシウム、又は炭酸カルシウム等を添加して調整できる。 The different elements in magnesium hydroxide are as follows. B (boron): 100 to 1000 ppm (preferably 300 to 800 ppm), Na (sodium): 300 ppm or less (preferably 200 ppm or less), K (potassium): 300 ppm or less (preferably 200 ppm or less), Cl (chlorine): 0 0.02 to 0.5% by mass (preferably 0.15 to 0.3% by mass), Si (silicon): 0.02 to 0.5% by mass (0.05 to 0.15% by mass in terms of SiO 2 ) ), Ca: 0.1 to 0.8 mass% (preferably 0.2 to 0.5 mass%) in terms of CaO. The concentration of these different elements can be adjusted by a conventional method. For example, when B is insufficient, it can be adjusted by adding boric acid or magnesium borate. When Cl is insufficient, it can be adjusted by adding hydrochloric acid or magnesium chloride. When Si is insufficient, it can be adjusted by adding sodium silicate, magnesium silicate, calcium silicate or the like. When calcium is insufficient, it can be adjusted by adding calcium hydroxide, calcium oxide, calcium carbonate or the like.
 水酸化マグネシウム中のBが1000ppmを超えたり、NaもしくはKが300ppmを超えたりすると、得られる酸化マグネシウムが上述した粒子内空隙量及び/又は変曲点径の条件を満足しない。また、水酸化マグネシウム中のCaがCaO換算で0.1~0.8質量%の範囲外の場合、または、SiがSiO換算で0.02~0.5質量%の範囲外の場合は、得られる酸化マグネシウムが上述したモード径及び/又は変曲点径の条件を満足せず、形状も丸みを帯びた形状にならない。水酸化マグネシウムとしては、純度が98%以上のものを用いることが好ましい。 When B in magnesium hydroxide exceeds 1000 ppm, or Na or K exceeds 300 ppm, the obtained magnesium oxide does not satisfy the above-mentioned conditions for the void amount in the particle and / or the inflection point diameter. Further, when Ca in magnesium hydroxide is out of the range of 0.1 to 0.8% by mass in terms of CaO, or when Si is out of the range of 0.02 to 0.5% by mass in terms of SiO 2 The obtained magnesium oxide does not satisfy the conditions of the mode diameter and / or the inflection point diameter described above, and the shape is not rounded. It is preferable to use magnesium hydroxide having a purity of 98% or more.
 さらに、水酸化マグネシウムを焼成する時の温度は1000~1200℃の範囲であることが好ましい。焼成温度が1000℃未満であると、得られる酸化マグネシウムが上述した粒子内空隙量、モード径及び/又は変曲点径の条件を満足しない。また、焼成温度が1200℃を超えると、得られる酸化マグネシウムが上述したモード径及び/又は変曲点径の条件を満足しない。焼成炉、及び焼成時間は特に限定されず、前述した温度で水酸化マグネシウムが酸化マグネシウムに変換できる焼成炉、及び焼成時間であればよい。 Furthermore, the temperature at which magnesium hydroxide is fired is preferably in the range of 1000 to 1200 ° C. When the firing temperature is less than 1000 ° C., the obtained magnesium oxide does not satisfy the above-described conditions for the void amount in the particle, the mode diameter, and / or the inflection point diameter. Moreover, when a calcination temperature exceeds 1200 degreeC, the magnesium oxide obtained will not satisfy the conditions of the mode diameter and / or inflection point diameter mentioned above. The firing furnace and firing time are not particularly limited, and may be any firing furnace and firing time in which magnesium hydroxide can be converted to magnesium oxide at the temperature described above.
 以上のように水酸化マグネシウムを焼成して得られた酸化マグネシウムを、必要に応じて粉砕機を使用して粗粉砕する。これにより酸化マグネシウム粉末が得られる。この酸化マグネシウム粉末をリン化合物と混合し、必要に応じ120℃~200℃程度の温度で乾燥処理を行った後、ボールミル等を利用して粉砕して粉末を得る。この粉末を300℃以上で焼成することで、表面の少なくとも一部にリン酸マグネシウム系化合物よりなる被覆層が形成された酸化マグネシウム粉末を得ることができる。 The magnesium oxide obtained by firing magnesium hydroxide as described above is coarsely pulverized using a pulverizer as necessary. Thereby, a magnesium oxide powder is obtained. This magnesium oxide powder is mixed with a phosphorus compound and, if necessary, dried at a temperature of about 120 ° C. to 200 ° C. and then pulverized using a ball mill or the like to obtain a powder. By baking this powder at 300 ° C. or higher, a magnesium oxide powder in which a coating layer made of a magnesium phosphate compound is formed on at least a part of the surface can be obtained.
 前記リン化合物としては、酸化マグネシウムと反応してリン酸マグネシウム系化合物を形成し得る化合物であれば特に限定されないが、例えば、リン酸、リン酸塩、酸性リン酸エステルが挙げられる。これらは単独で使用してもよいし、2種以上を併用してもよい。好ましくは酸性リン酸エステルである。酸性リン酸エステルとしては、イソプロピルアシッドホスフェート、2-エチルヘキシルアシッドホスフェート、オレイルアシッドホスフェート、メチルアシッドホスフェート、エチルアシッドホスフェート、プロピルアシッドホスフェート、ブチルアシッドホスフェート、ラウリルアシッドホスフェート、ステアリルアシッドホスフェートが挙げられる。 The phosphorus compound is not particularly limited as long as it is a compound that can react with magnesium oxide to form a magnesium phosphate compound, and examples thereof include phosphoric acid, phosphate, and acidic phosphate. These may be used alone or in combination of two or more. Preferably it is acidic phosphate ester. Examples of the acidic phosphate ester include isopropyl acid phosphate, 2-ethylhexyl acid phosphate, oleyl acid phosphate, methyl acid phosphate, ethyl acid phosphate, propyl acid phosphate, butyl acid phosphate, lauryl acid phosphate, and stearyl acid phosphate.
 リン化合物の使用量は、最終産物たる被覆酸化マグネシウム粉末全体に対するリンの含有量が0.1~10質量%となるように調節すればよい。例えば、リン化合物は酸化マグネシウム粉末に対して5~10質量%程度の量を使用することができる。 The amount of phosphorus compound used may be adjusted so that the phosphorus content relative to the entire coated magnesium oxide powder as the final product is 0.1 to 10% by mass. For example, the phosphorus compound can be used in an amount of about 5 to 10% by mass with respect to the magnesium oxide powder.
 焼成時の温度は300℃以上であり、好ましくは300~700℃程度である。一例として、500℃で1時間の焼成が挙げられる。この焼成により、リン化合物がリン酸マグネシウム系化合物に変換されることで、リン酸マグネシウム系化合物よりなる被覆層を酸化マグネシウム粉末表面に形成することができる。 Calcination temperature is 300 ° C. or higher, preferably about 300 to 700 ° C. An example is firing at 500 ° C. for 1 hour. By this firing, the phosphorous compound is converted into a magnesium phosphate compound, whereby a coating layer made of the magnesium phosphate compound can be formed on the surface of the magnesium oxide powder.
 以下に実施例を掲げて本発明をさらに詳細に説明するが、本発明はこれら実施例に限定されるものではない。 Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.
 (不純物元素の濃度測定法)
 Ba及びPについては、試料を酸に溶解した後、ICP発光分析装置(商品名:SPS-5100、セイコーインスツルメンツ製)を使用して質量を測定することで、試料中の濃度を算出した。
(Measurement method of impurity element concentration)
For Ba and P, after the sample was dissolved in acid, the concentration in the sample was calculated by measuring the mass using an ICP emission spectrometer (trade name: SPS-5100, manufactured by Seiko Instruments Inc.).
 Clについては、試料を酸に溶解した後、分光光度計(商品名:UV-2550、島津製作所製)を使用して質量を測定することで、試料中の濃度を算出した。 Regarding Cl, after the sample was dissolved in acid, the concentration in the sample was calculated by measuring the mass using a spectrophotometer (trade name: UV-2550, manufactured by Shimadzu Corporation).
 Si及びCaについては、蛍光X線装置(商品名:SPS-5100、セイコーインスツルメンツ製)を使用して試料中の濃度を測定した。ただし、それぞれSiO換算及びCaO換算の濃度として示した。 For Si and Ca, the concentration in the sample was measured using a fluorescent X-ray apparatus (trade name: SPS-5100, manufactured by Seiko Instruments Inc.). However, respectively shown as the concentration of SiO 2 in terms and terms of CaO.
 Na及びKについては、原子吸光光度計(商品名:Z-2300、日立ハイテクノロジーズ製)を使用して試料中の濃度を測定した。 For Na and K, the concentration in the sample was measured using an atomic absorption photometer (trade name: Z-2300, manufactured by Hitachi High-Technologies).
 (BET比表面積測定法)
 比表面積測定装置(商品名:Macsorb1210、マウンテック社製)を使用して、ガス吸着法により比表面積を測定した。
(細孔分布の測定)
 細孔分布(変曲点径、粒子内空隙量、及びモード径)の測定
 水銀圧入式細孔分布測定により得られる、変曲点径、粒子内空隙量、log微分細孔容積分布曲線の最大値に対応する細孔直径(モード径)は、以下の条件で求めた。水銀圧入式細孔分布測定装置は、マイクロメトリックス社製オートポア9410を使用し測定した。なお、水銀は、純度99.5mass%以上、密度13.5335×10kg/mである特級の水銀試薬を用いた。測定セルは、セル内容積5×10-6、ステム容積0.38×10-6の粉体試料用セルを用いた。測定試料は、あらかじめ330メッシュ標準篩(JIS-R8801-87)で粒径を揃えた試料を、質量0.10×10-3~0.13×10-3kgの範囲で精密に秤量し、測定セルに充填した。測定セルを装置に装着した後、セル内部を圧力50μHg(6.67Pa)以下で20分間、減圧状態に保持した。次に、測定セル内に、圧力が1.5psia(10342Pa)になるまで水銀を充填した。その後、圧力が2psia(13790Pa)から60000psia(413.7MPa)の範囲で水銀を圧入して、細孔分布を測定した。
(BET specific surface area measurement method)
The specific surface area was measured by a gas adsorption method using a specific surface area measurement apparatus (trade name: Macsorb 1210, manufactured by Mountec Co., Ltd.).
(Measurement of pore distribution)
Measurement of pore distribution (inflection point diameter, interstitial void volume, and mode diameter) Maximum inflection point diameter, interparticle void volume, and log differential pore volume distribution curve obtained by mercury intrusion pore distribution measurement The pore diameter (mode diameter) corresponding to the value was determined under the following conditions. The mercury intrusion pore distribution measuring device was measured using an Autopore 9410 manufactured by Micrometrics. As the mercury, a special grade mercury reagent having a purity of 99.5 mass% or more and a density of 13.5335 × 10 3 kg / m 3 was used. The measurement cell used was a powder sample cell having an internal volume of 5 × 10 −6 m 3 and a stem volume of 0.38 × 10 −6 m 3 . As a measurement sample, a sample having a uniform particle size with a 330 mesh standard sieve (JIS-R8801-87) is weighed precisely in a mass range of 0.10 × 10 −3 to 0.13 × 10 −3 kg, The measuring cell was filled. After mounting the measurement cell on the apparatus, the inside of the cell was kept under a reduced pressure at a pressure of 50 μHg (6.67 Pa) or less for 20 minutes. Next, mercury was filled in the measurement cell until the pressure became 1.5 psia (10342 Pa). Thereafter, mercury was injected in a pressure range of 2 psia (13790 Pa) to 60000 psia (413.7 MPa), and the pore distribution was measured.
 水銀の圧入圧力を細孔直径に換算するには、下記(I)式(Washburnの式)を用いた。
D=-(1/P)・4γ・cosΨ(I)
ここで、D:細孔直径(m)、
P:水銀の圧入圧力(Pa)、
γ:水銀の表面張力(485dyne・cm-1(0.485Pa・m))、
Ψ:水銀の接触角(130°=2.26893rad)である。
The following formula (I) (Washburn's formula) was used to convert the intrusion pressure of mercury into the pore diameter.
D = − (1 / P) · 4γ · cosψ (I)
Where D: pore diameter (m),
P: mercury pressure (Pa)
γ: surface tension of mercury (485 dyne · cm −1 (0.485 Pa · m)),
Ψ: Mercury contact angle (130 ° = 2.26893 rad).
 (耐湿性の測定方法)
 試料10gをシャーレに秤量し、恒温恒湿機(85℃・85Rh%)内にセットした。その状態で1週間保持した後、120℃の乾燥機で一晩乾燥した。乾燥後、重量を量り、重量増加率を算出した。
(Method of measuring moisture resistance)
A 10 g sample was weighed in a petri dish and set in a constant temperature and humidity machine (85 ° C./85 Rh%). After being kept in that state for one week, it was dried overnight in a 120 ° C. dryer. After drying, the weight was measured and the weight increase rate was calculated.
 (熱伝導率の測定方法)
 本発明品を添加した樹脂を完全に硬化させたサイズが直径13mm、厚さ2mmである高熱伝導率樹脂組成物のサンプルを作製し、熱拡散率をレーザーフラッシュ法で30~100℃の範囲で測定した。装置にはNETZSCH製LFA-457を用いた。比熱と、アルキメデス法により、比重を測定し、熱拡散率と比熱と密度の積としての熱伝導率を算出した。
(Measurement method of thermal conductivity)
A sample of a high thermal conductivity resin composition having a diameter of 13 mm and a thickness of 2 mm obtained by completely curing the resin added with the product of the present invention is prepared, and the thermal diffusivity is in the range of 30 to 100 ° C. by laser flash method. It was measured. The device used was LFA-457 manufactured by NETZSCH. Specific gravity was measured by the specific heat and Archimedes method, and the thermal conductivity was calculated as the product of thermal diffusivity, specific heat and density.
 (メルトフローレートの測定方法)
 樹脂組成物について、JIS-K7210に準拠し、測定温度230℃、荷重2.16Kgで測定した。
(Measuring method of melt flow rate)
The resin composition was measured according to JIS-K7210 at a measurement temperature of 230 ° C. and a load of 2.16 Kg.
 (樹脂組成物の製造方法)
 メルトフローレートの測定で使用した樹脂組成物は以下の手順で調製した。
EEA(エチレン・エチルアクリレート・コポリマー)100gを溶融後、フィラー333gを少量ずつ、混練状態を見ながら約10分かけて添加し、さらに10分間仕上げ混練を行った。この時のロール間隔0.5mmであった。
(Production method of resin composition)
The resin composition used in the measurement of the melt flow rate was prepared by the following procedure.
After 100 g of EEA (ethylene ethyl acrylate copolymer) was melted, 333 g of filler was added in small portions over about 10 minutes while observing the kneaded state, and finish kneading was further performed for 10 minutes. The roll interval at this time was 0.5 mm.
 混練終了後、コンパウンドを引き剥がし、回収したコンパウンドを5mm角程度に裁断、真空乾燥機で90℃×1時間乾燥し、メルトフローレート測定用試料とした。 After completion of the kneading, the compound was peeled off, and the recovered compound was cut into about 5 mm square and dried in a vacuum dryer at 90 ° C. for 1 hour to obtain a sample for measuring melt flow rate.
 (リン酸マグネシウム系化合物の組成の測定方法)
 X線回折装置(商品名:RINT-Ultima III、リガク製)を使用して、Cu-Kα線を用いたX線回折法によりリン酸マグネシウム系化合物被覆層の組成を測定した。
(Method for measuring composition of magnesium phosphate compound)
Using an X-ray diffractometer (trade name: RINT-Ultima III, manufactured by Rigaku), the composition of the magnesium phosphate compound coating layer was measured by an X-ray diffraction method using Cu-Kα rays.
 (実施例1)
 焼成してできる酸化マグネシウム中のCaOを0.23質量%,SiOを0.07質量%,Clを0.16質量%,Bを402ppm,Naが11ppm,Kが9ppm,になるように調整した純度99.2%の水酸化マグネシウムを電気炉にて1100℃で1時間、焼成することにより酸化マグネシウムを作成した。
(Example 1)
Firing the CaO in the magnesium oxide can be 0.23 mass%, the SiO 2 0.07 wt%, a Cl 0.16 wt%, B of 402Ppm, Na is 11 ppm, K is 9 ppm, the so as to adjust The magnesium hydroxide having a purity of 99.2% was baked in an electric furnace at 1100 ° C. for 1 hour to prepare magnesium oxide.
 この酸化マグネシウムをパワーミルで解砕した後、酸性リン酸エステルであるイソピロピル酸性リン酸エステルを酸化マグネシウムに対し5重量%添加した。その後、120℃で2時間乾燥した後、ボールミルで粉砕し、500℃で1時間焼成を行い、目的の被覆酸化マグネシウム粉末を得た。 After pulverizing this magnesium oxide with a power mill, 5% by weight of isopropyl acid phosphate, which is an acid phosphate, was added to magnesium oxide. Then, after drying at 120 ° C. for 2 hours, the mixture was pulverized with a ball mill and fired at 500 ° C. for 1 hour to obtain a target coated magnesium oxide powder.
 得られた被覆酸化マグネシウム粉末について、上述した方法に基づき不純物元素の濃度、BET比表面積、細孔分布、耐湿性、熱伝導率、及びメルトフローレートを測定し、結果を表1に示した。 The obtained coated magnesium oxide powder was measured for the impurity element concentration, BET specific surface area, pore distribution, moisture resistance, thermal conductivity, and melt flow rate based on the above-mentioned method, and the results are shown in Table 1.
 また、上述した方法に基づき、得られた被覆酸化マグネシウム粉末表面の被覆層の組成を測定したところ、Mgであることが判明した。 Moreover, when the composition of the coating layer on the surface of the obtained coated magnesium oxide powder was measured based on the method described above, it was found to be Mg 2 P 2 O 7 .
 図1は、得られた被覆酸化マグネシウム粉末の電子顕微鏡写真である。被覆酸化マグネシウム粉末の粒子形状は球状であった。ここで、球状の粉末とは、角のない丸みを帯びた形状の粒子からなる粉末を指し、これに対し、不定形の粉末とは、結晶粒子が複数結合した角の有る粒子からなる粉末を指す。 FIG. 1 is an electron micrograph of the obtained coated magnesium oxide powder. The particle shape of the coated magnesium oxide powder was spherical. Here, a spherical powder refers to a powder composed of rounded particles without corners, whereas an amorphous powder refers to a powder composed of angular particles in which a plurality of crystal particles are combined. Point to.
 (実施例2)
 水酸化マグネシウムの焼成温度を1175℃に変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
(Example 2)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the firing temperature of magnesium hydroxide was changed to 1175 ° C. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例3)
 酸化マグネシウムのCaO濃度が0.48質量%になるように調整した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
(Example 3)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the CaO concentration of magnesium oxide was adjusted to 0.48% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例4)
 酸化マグネシウムのSiO濃度が0.12質量%になるように調整した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
Example 4
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the SiO 2 concentration of magnesium oxide was adjusted to 0.12% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例5)
 水酸化マグネシウムのB濃度を700ppmになるように調整した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
(Example 5)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the B concentration of magnesium hydroxide was adjusted to 700 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例6)
 水酸化マグネシウムのNa濃度を200ppmになるように調整した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
(Example 6)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the Na concentration of magnesium hydroxide was adjusted to 200 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例7)
 水酸化マグネシウムのK濃度を200ppmになるように調整した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
(Example 7)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the K concentration of magnesium hydroxide was adjusted to 200 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例8)
 被覆酸化マグネシウム粉末中のリンの含有量が0.18質量%になるように酸性リン酸エステルの使用量を変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
(Example 8)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content in the coated magnesium oxide powder was 0.18% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (実施例9)
 被覆酸化マグネシウム粉末中のリンの含有量が4.6質量%になるように酸性リン酸エステルの使用量を変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表1に示した。
Example 9
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content in the coated magnesium oxide powder was 4.6% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 1.
 (比較例1)
 水酸化マグネシウムの焼成温度を950℃に変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 1)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the firing temperature of magnesium hydroxide was changed to 950 ° C. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例2)
 水酸化マグネシウムの焼成温度を1400℃に変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 2)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the firing temperature of magnesium hydroxide was changed to 1400 ° C. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例3)
 水酸化マグネシウムのCaO濃度を1質量%に変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 3)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the CaO concentration of magnesium hydroxide was changed to 1% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例4)
 水酸化マグネシウムのSiO濃度を4質量%に変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 4)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the SiO 2 concentration of magnesium hydroxide was changed to 4% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例5)
 水酸化マグネシウムのB濃度を1200ppmに変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 5)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the B concentration of magnesium hydroxide was changed to 1200 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例6)
 水酸化マグネシウムのNa濃度を400ppmに変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 6)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the Na concentration of magnesium hydroxide was changed to 400 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例7)
 水酸化マグネシウムのK濃度を400ppmに変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 7)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the K concentration of magnesium hydroxide was changed to 400 ppm. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例8)
 被覆酸化マグネシウム粉末全体に対するリンの含有量が0.058質量%になるように酸性リン酸エステルの使用量を変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 8)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content relative to the entire coated magnesium oxide powder was 0.058% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
 (比較例9)
 被覆酸化マグネシウム粉末全体に対するリンの含有量が12.1質量%になるように酸性リン酸エステルの使用量を変更した以外は実施例1と同じ条件で被覆酸化マグネシウム粉末を得た。実施例1と同様に各物性の測定を行い、結果を表2に示した。
(Comparative Example 9)
A coated magnesium oxide powder was obtained under the same conditions as in Example 1 except that the amount of acidic phosphate used was changed so that the phosphorus content relative to the entire coated magnesium oxide powder was 12.1% by mass. Each physical property was measured in the same manner as in Example 1, and the results are shown in Table 2.
Figure JPOXMLDOC01-appb-T000001
 
Figure JPOXMLDOC01-appb-T000001
 
Figure JPOXMLDOC01-appb-T000002
 
Figure JPOXMLDOC01-appb-T000002
 

Claims (13)

  1.  水銀圧入式細孔分布において、粒子内空隙量が0.3~0.8cm/g、モード径が0.2~1.0μm、及び変曲点径が0.9μm以上を示す酸化マグネシウム粉末と、
     前記酸化マグネシウム粉末の表面の少なくとも一部に、リン酸マグネシウム系化合物よりなる被覆層と、を有し、
     被覆酸化マグネシウム粉末中のリンの含有量が0.1~10質量%であることを特徴とする、被覆酸化マグネシウム粉末。
    Magnesium oxide powder having an in-particle void volume of 0.3 to 0.8 cm 3 / g, a mode diameter of 0.2 to 1.0 μm, and an inflection point diameter of 0.9 μm or more in a mercury intrusion pore distribution When,
    A coating layer made of a magnesium phosphate compound on at least a part of the surface of the magnesium oxide powder;
    A coated magnesium oxide powder, wherein the content of phosphorus in the coated magnesium oxide powder is 0.1 to 10% by mass.
  2.  前記リン酸マグネシウム系化合物が、組成式:Mg(x=1~3、y=2、z=6~8)で示される、請求項1記載の被覆酸化マグネシウム粉末。 The coated magnesium oxide powder according to claim 1, wherein the magnesium phosphate-based compound is represented by a composition formula: Mg x P y O z (x = 1 to 3, y = 2, z = 6 to 8).
  3.  請求項1又は2に記載の被覆酸化マグネシウム粉末からなる充填材。 A filler comprising the coated magnesium oxide powder according to claim 1 or 2.
  4.  樹脂と、請求項3記載の充填材と、を含有する、樹脂組成物。 A resin composition containing a resin and the filler according to claim 3.
  5.  前記樹脂が熱硬化性樹脂である、請求項4記載の樹脂組成物。 The resin composition according to claim 4, wherein the resin is a thermosetting resin.
  6.  前記熱硬化性樹脂が、フェノール樹脂、尿素樹脂、メラミン樹脂、アルキド樹脂、ポリエステル樹脂、エポキシ樹脂、ジアリルフタレート樹脂、ポリウレタン樹脂、又はシリコーン樹脂である、請求項5記載の樹脂組成物。 The resin composition according to claim 5, wherein the thermosetting resin is a phenol resin, a urea resin, a melamine resin, an alkyd resin, a polyester resin, an epoxy resin, a diallyl phthalate resin, a polyurethane resin, or a silicone resin.
  7.  前記樹脂が熱可塑性樹脂である、請求項4記載の樹脂組成物。 The resin composition according to claim 4, wherein the resin is a thermoplastic resin.
  8.  前記熱可塑性樹脂が、ポリアミド樹脂、ポリアセタール樹脂、ポリカーボネート樹脂、ポリブチレンテレフタレート樹脂、ポリスルフォン樹脂、ポリアミドイミド樹脂、ポリエーテルイミド樹脂、ポリアリレート樹脂、ポリフェニレンスルフィド樹脂、ポリエーテルエーテルケトン樹脂、フッ素樹脂、又は液晶ポリマーである、請求項7記載の樹脂組成物。 The thermoplastic resin is polyamide resin, polyacetal resin, polycarbonate resin, polybutylene terephthalate resin, polysulfone resin, polyamideimide resin, polyetherimide resin, polyarylate resin, polyphenylene sulfide resin, polyetheretherketone resin, fluorine resin, Or the resin composition of Claim 7 which is a liquid crystal polymer.
  9.  請求項4~8のいずれか1項に記載の樹脂組成物からなる放熱性部材。 A heat dissipating member comprising the resin composition according to any one of claims 4 to 8.
  10.  Bを100~1000ppm、Naを300ppm以下、Kを300ppm以下、Clを0.02~0.5質量%含み、かつ、SiをSiOに換算して0.02~0.5質量%、CaをCaOに換算して0.1~0.8質量%含む、純度98%以上の水酸化マグネシウムを、1000℃~1200℃で焼成することにより、酸化マグネシウム粉末を得た後、
     前記酸化マグネシウム粉末を、リン化合物と混合して、300℃以上で焼成することにより、前記酸化マグネシウム粉末の表面の少なくとも一部にリン酸マグネシウム系化合物よりなる被覆層を形成することを特徴とする、被覆酸化マグネシウム粉末の製造方法。
    B is 100 to 1000 ppm, Na is 300 ppm or less, K is 300 ppm or less, Cl is 0.02 to 0.5 mass%, Si is converted to SiO 2 , 0.02 to 0.5 mass%, Ca After calcining magnesium hydroxide having a purity of 98% or more containing 0.1 to 0.8% by mass in terms of CaO at 1000 ° C. to 1200 ° C., magnesium oxide powder was obtained,
    The magnesium oxide powder is mixed with a phosphorus compound and fired at 300 ° C. or higher to form a coating layer made of a magnesium phosphate compound on at least a part of the surface of the magnesium oxide powder. The manufacturing method of a coated magnesium oxide powder.
  11.  前記リン化合物が、リン酸、リン酸塩、及び酸性リン酸エステルからなる群から選択される1種以上の化合物である、請求項10記載の製造方法。 The production method according to claim 10, wherein the phosphorus compound is one or more compounds selected from the group consisting of phosphoric acid, phosphate, and acidic phosphate ester.
  12.  前記リン化合物が、イソプロピルアシッドホスフェート、2-エチルヘキシルアシッドホスフェート、オレイルアシッドホスフェート、メチルアシッドホスフェート、エチルアシッドホスフェート、プロピルアシッドホスフェート、ブチルアシッドホスフェート、ラウリルアシッドホスフェート、及びステアリルアシッドホスフェートからなる群から選択される1種以上の酸性リン酸エステルである、請求項11記載の製造方法。 The phosphorus compound is selected from the group consisting of isopropyl acid phosphate, 2-ethylhexyl acid phosphate, oleyl acid phosphate, methyl acid phosphate, ethyl acid phosphate, propyl acid phosphate, butyl acid phosphate, lauryl acid phosphate, and stearyl acid phosphate The manufacturing method of Claim 11 which is 1 or more types of acidic phosphate ester.
  13.  前記リン化合物を、被覆酸化マグネシウム粉末中のリンの含有量が0.1~10質量%となるように用いる、請求項10~12のいずれか1項に記載の製造方法。 The production method according to any one of claims 10 to 12, wherein the phosphorus compound is used so that a phosphorus content in the coated magnesium oxide powder is 0.1 to 10% by mass.
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