WO2014095417A1 - Système de mesure hydraulique à entrées de pression coplanaires et capteur de pression différentielle équipé d'un tel système de mesure - Google Patents

Système de mesure hydraulique à entrées de pression coplanaires et capteur de pression différentielle équipé d'un tel système de mesure Download PDF

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Publication number
WO2014095417A1
WO2014095417A1 PCT/EP2013/075765 EP2013075765W WO2014095417A1 WO 2014095417 A1 WO2014095417 A1 WO 2014095417A1 EP 2013075765 W EP2013075765 W EP 2013075765W WO 2014095417 A1 WO2014095417 A1 WO 2014095417A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
measuring
separation membrane
overload
chamber
Prior art date
Application number
PCT/EP2013/075765
Other languages
German (de)
English (en)
Inventor
Anh Tuan Tham
Rafael Teipen
Original Assignee
Endress+Hauser Gmbh+Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co. Kg filed Critical Endress+Hauser Gmbh+Co. Kg
Publication of WO2014095417A1 publication Critical patent/WO2014095417A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection

Definitions

  • Hydraulic measuring unit with coplanar pressure inputs and
  • the present invention relates to a hydraulic measuring unit for recording differential pressures and a differential pressure sensor with such a measuring unit.
  • Hydraulic gauges for receiving differential pressures usually include a measuring body with a first pressure input port and a second pressure input port, each of which is a hydraulic path to a
  • Differential pressure cell extends to pressurize the differential pressure measuring cell with the first pressure and the second pressure, the difference between the
  • a differential pressure measuring cell generally has a measuring cell body with two measuring chambers in its interior, which are separated from one another by a measuring diaphragm.
  • the two measuring chambers can be acted upon by a measuring chamber opening with one of the two pressures, so that the measuring diaphragm depends on the difference of the two pressures, elastic
  • the pressure inlet openings of the measuring unit body are usually closed by flexible metallic separating membranes, which each introduce a pending on an outside of the separation membrane pressure in the hydraulic path.
  • the pressure inlets lie side by side on a process connection surface of the measuring unit body.
  • Such measuring mechanisms with coplanar pressure inputs are disclosed, for example, in EP 0 370 013 B1, EP 0 560 875 B1, EP 0 774 652 B2, and EP 1 216 404 B1.
  • the hydraulic paths include, for example, capillary lines that extend from a rear surface of the process connection body that faces away from the process interface to the pressure measuring cell.
  • the capillary lines are connected, for example by a peripheral weld pressure-tight manner with the measuring body and thus each one of the
  • Pressure input ports hydraulically coupled. Differential pressure cells are usually optimized to measure small pressure differences p1-p2 at high static pressures p1, p2. It is important to find the right balance between sensitivity and overload resistance. So can
  • the named protective rights relate to differential pressure sensors whose hydraulic measuring mechanism has two separating diaphragms on opposite end faces of a
  • the hydraulic measuring mechanism for receiving differential pressures, comprising: a measuring body with a process directionally oriented in one direction, the Meßwerk redesign having a first hydraulic path extending from the process interface through the Meßwerk Congress to a rear surface of the Meßwerk stressess, the Messtechnik redesign a second hydraulic path extending from the process interface through the meter body to the back surface of the meter body; a first separation membrane closing the first hydraulic path on the side of the process port; a second separation membrane closing the second hydraulic path on the side of the process port; wherein the first hydraulic path has a first pressure tube protruding from the rear surface of the measuring body; wherein the second hydraulic path has a second pressure tube protruding from the rear surface of the measuring body; wherein the first and the second pressure tube are pressure-tightly connected to the measuring body; characterized in that the meter body comprises a first overload chamber; a second overload comb; and an elastic overload membrane, wherein the overload membrane is the first
  • Overload chamber separates from the second overload chamber, the first
  • Overload chamber communicates with the first hydraulic path, and wherein the second overload chamber communicates with the second hydraulic path.
  • the overload diaphragm is connected to a peripheral joint with a carrier body, wherein the joint runs in a plane parallel to the process interface.
  • the measuring element body comprises a base body, a first separation membrane body and a second separation membrane body, the first separation membrane being pressure-tightly connected to the first separation membrane body to form a first separation membrane chamber between the first separation membrane body and the first separation membrane with a circumferential joint, wherein the second separation membrane with the second Trennmembrankorper to form a second separation membrane chamber between the second Trennmembrankorper and the second separation membrane is pressure-tightly connected to a peripheral joint, the first Trennmembrankorper facing away from the first separation membrane back arranged in a first receptacle of the body and with the Main body along a peripheral joint pressure-tight manner, wherein the first hydraulic path includes a bore extending from the first
  • Separating diaphragm chamber extends through the first separation membrane body, and wherein the second separation membrane body with a second separation membrane facing away from behind arranged in a second receptacle of the body and pressure-tightly connected to the body along a peripheral joint, wherein the second hydraulic path includes a bore which extends from the second separation membrane chamber through the second separation membrane body.
  • Trennmemban Economics each have a corrugated membrane bed.
  • the separation membranes are each imprinted on the membrane bed of a separation membrane body.
  • the measuring element body comprises a closure body, which is arranged in a complementary receptacle of the base body and pressure-tightly connected to the main body along a circumferential joint, wherein the closure body has a cross-sectional area which is greater than a deflectable surface of the overload membrane, and wherein is closed by the closure body one of the two overload chambers.
  • the main body or the closure body can serve as a carrier body for the overload membrane.
  • At least one of the hydraulic paths passes through an overload chamber, ie the overload chamber has a first opening, via which it communicates with a separating membrane, and a second opening, via which it communicates with a pressure tube.
  • one of the pressure pipes protrudes from the closure body on the rear side of the measuring unit body, another one of the pressure pipes protruding from the base body on the rear side of the measuring unit body, wherein the distance between the pressure pipes at the rear side of the measuring unit body is less than the diameter of the deflectable surface of the overload diaphragm, in particular less than half the diameter and preferably less than a quarter of the diameter.
  • the first pressure tube and the second pressure tube from the side of the process connection surface ago are pressure-tight with the
  • the differential pressure sensor according to the invention comprises a hydraulic measuring mechanism according to the invention; and a differential pressure measuring cell, wherein the
  • Differential pressure measuring cell has a measuring cell body with two measuring chambers in its interior, which are separated by a measuring diaphragm, the measuring chambers each having a measuring chamber opening, wherein a first of the measuring chambers pressure-tight connected to the first pressure tube and can be acted upon by the first pressure tube with a first pressure, where a second of the measuring chambers
  • Measuring chambers pressure-tightly connected to the second pressure tube and can be acted upon by the second pressure tube with a second pressure, wherein the measuring diaphragm in response to a difference between the first pressure and the second pressure is elastically deformable, wherein the differential pressure measuring cell comprises a transducer, for providing one of the deformation of the diaphragm dependent signal.
  • the differential pressure measuring cell is held by the pressure pipes.
  • the two pressure pipes each have a branch, wherein in each case a branch of a pressure tube is connected to one of the measuring chambers, and wherein the respective other branch of a pressure tube a closable filling opening for filling each communicating with the branch volumes of the differential pressure sensor a transmission fluid.
  • the measuring mechanism body on two closable filling openings, one of which with a
  • 1 shows a schematic longitudinal section through a first embodiment of a differential pressure sensor according to the invention
  • 2 shows a schematic longitudinal section through a second exemplary embodiment of a differential pressure sensor according to the invention
  • Fig. 3 is a schematic longitudinal section through a third embodiment of a differential pressure sensor according to the invention.
  • Differential pressure sensor 1 comprises a hydraulic measuring unit with a
  • the separation membrane body wear separation membranes 28, 30, which are each connected with a peripheral weld pressure-tight with one of the separation membrane body.
  • the two separation membranes 28, 30 respectively close the inlet of a first and second hydraulic path 32, 33, wherein the hydraulic paths have channels which run from the process connection surface 16 to a rear side of the measuring element body.
  • the first and the second hydraulic path 32, 33 furthermore each have a first and a second pressure tube 20, 22, which is pressure-tight welded to the measuring mechanism body and in each case communicates with one of the channels through the measuring mechanism body.
  • the two metallic pressure tubes 20, 22 each carry a nitride ceramic stiffening body 42, 44, wherein between the two nitride ceramic stiffening bodies a micromechanical differential pressure measuring cell 40 is held, which in particular has silicon. Passage channels run through the stiffening bodies 42, 44, via which two measuring chambers of the differential pressure measuring cell 40 each communicate with one of the two hydraulic paths 32, 33.
  • the hydraulic meter has a first overload chamber 34 and a second overload chamber 35, which from each other are separated by an overload membrane 36.
  • the two overload chambers each communicate with one of the hydraulic paths 32, 33, the first hydraulic path extending through the first overload chamber.
  • the second overload chamber 35 is formed by welding the overload diaphragm 36 in a recess in the base body, the first overload chamber 34 is formed by welding a closure body 38 in the recess above the
  • the channel of the first hydraulic path 32 thus comprises a first closure body portion, via which the first overload chamber 34 communicates with the first separation membrane 28 and a second closure body portion, via which the first overload chamber 34 with the first pressure tube or one of the measuring chambers of the differential pressure measuring cell communicated.
  • the second hydraulic path 33 communicates via a branch line with the second overload chamber.
  • the asymmetrical guidance of the hydraulic paths 32, 33 makes it possible to keep the pressure pipes at the rear of the measuring unit body at a small distance from one another
  • Differential pressure measuring cell 40 facilitates, on the other hand, however, may be associated with asymmetries in the dynamics of the hydraulic measuring unit.
  • a measuring element body in turn has a main body 110 on whose Prozeßan gleichf pool 1 16 two Trennmemban Congress 112 114 are arranged, of which in each case a first or second hydraulic path extends substantially straight to a rear surface of the base body 1 10, wherein the hydraulic paths in first and second metallic pressure pipes 120, 122 are continued, each carrying a nitride ceramic stiffening body 142, 144, wherein between the two nitride ceramic stiffening bodies a micromechanical
  • Differential pressure measuring cell 140 is held, which in particular comprises silicon.
  • the stiffening bodies 142, 144 extend pressure channels, via which two measuring chambers of the differential pressure measuring cell 140 each communicate with one of the two hydraulic paths 132, 133.
  • the hydraulic meter has a first overload chamber 134 and a second overload chamber 135 which are separated from each other by an overload diaphragm 136.
  • the two Overload chambers each communicate via a branch line with one of the hydraulic paths 132, 133.
  • the second overload chamber 135 is formed by welding the overload diaphragm 136 into a recess in the body.
  • the first overload chamber 134 is formed by welding a closure body 138 into the recess above the overload diaphragm 136.
  • This construction has a simple hydraulic structure.
  • the pressure pipes 120, 122 have a distance which is greater than the diameter of the overload diaphragm 136 this allows on the one hand a possibly easier assembly of the pressure pipes on the base body 1 10, on the other hand, the distance between the pressure pipes to bridge, possibly by larger stiffening body 140, 142.
  • Differential pressure measuring cell 240 and the stiffening bodies 242, 244 in the main body since the above components during welding of the pressure pipes 242, 244 from the side process interface 216, the topological process does not affect the welding process.

Abstract

L'invention concerne un système de mesure hydraulique qui comprend un corps de système de mesure possédant une surface de raccordement au processus (16) orientée dans une direction et comportant un premier et un deuxième trajet hydraulique (32, 33) qui s'étendent dans le corps de système de mesure depuis la surface de raccordement au processus (16) jusqu'à une surface arrière du corps de système de mesure ; une première et une deuxième membrane de séparation (28, 30) qui obturent le premier et le deuxième trajet hydraulique (32, 33). Les trajets hydrauliques comprennent chacun un premier ou un deuxième tube de pression (20, 22) qui dépasse de la surface arrière du corps de système de mesure et qui est relié de manière étanche à la pression au corps de système de mesure. Le corps de système de mesure comprend une première et une deuxième chambre de surcharge (34, 35) séparées au moyen d'une membrane de surcharge élastique (36), les deux chambres de surcharge (34, 35) communiquant avec un trajet hydraulique (32, 33) respectif.
PCT/EP2013/075765 2012-12-21 2013-12-06 Système de mesure hydraulique à entrées de pression coplanaires et capteur de pression différentielle équipé d'un tel système de mesure WO2014095417A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012025070.3 2012-12-21
DE201210025070 DE102012025070A1 (de) 2012-12-21 2012-12-21 Hydraulisches Messwerk mit koplanaren Druckeingängen und Differenzdrucksensor mit einem solchen Messwerk

Publications (1)

Publication Number Publication Date
WO2014095417A1 true WO2014095417A1 (fr) 2014-06-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2013/075765 WO2014095417A1 (fr) 2012-12-21 2013-12-06 Système de mesure hydraulique à entrées de pression coplanaires et capteur de pression différentielle équipé d'un tel système de mesure

Country Status (2)

Country Link
DE (1) DE102012025070A1 (fr)
WO (1) WO2014095417A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113063542A (zh) * 2019-12-12 2021-07-02 阿自倍尔株式会社 差压计
CN114593866A (zh) * 2022-03-08 2022-06-07 贾秀梅 一种油田用防压力过载的动态调节式油压座
DE102020132960A1 (de) 2020-12-10 2022-06-15 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer mit Überlastschutz

Families Citing this family (4)

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CN110383028B (zh) 2017-03-10 2021-07-30 霍尼韦尔国际公司 输出误差减小的具有过压保护的压力传感器
US10378987B2 (en) * 2017-03-10 2019-08-13 Honeywell International Inc. Pressure sensor with flow porting having integral flame-proof safety mechanism
CN110402378B (zh) * 2017-03-10 2022-03-08 霍尼韦尔国际公司 具有带有传感器过压保护的共面仪表主体的压力传感器
US20240068895A1 (en) * 2019-12-20 2024-02-29 Endress+Hauser SE+Co. KG Differential pressure sensor for determining the differential pressure between two pressures

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EP0334611A2 (fr) * 1988-03-22 1989-09-27 Honeywell Inc. Ensemble de mesure de pression
EP0560875A1 (fr) * 1990-12-06 1993-09-22 Rosemount Inc Transmetteur de pression avec depression l'isolant des contraintes.
US5531120A (en) * 1992-04-23 1996-07-02 Hitachi, Ltd. Compact differential pressure transmitter having first and second damper chambers

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US4466290A (en) * 1981-11-27 1984-08-21 Rosemount Inc. Apparatus for conveying fluid pressures to a differential pressure transducer
US4798089A (en) 1987-03-12 1989-01-17 Rosemount Inc. Isolator apparatus
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US6484107B1 (en) 1999-09-28 2002-11-19 Rosemount Inc. Selectable on-off logic modes for a sensor module
EP1172640A1 (fr) 2000-07-13 2002-01-16 Endress + Hauser GmbH + Co. Capteur de pression différentielle
DE10200779B4 (de) * 2002-01-10 2009-03-12 Endress + Hauser Gmbh + Co. Kg Druckmittler mit Modul zur Erkennung von Membranbrüchen und Druckmessgerät zur Erkennung von Membranbrüchen
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DE102008019054A1 (de) * 2008-04-15 2009-11-05 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor

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Publication number Priority date Publication date Assignee Title
EP0334611A2 (fr) * 1988-03-22 1989-09-27 Honeywell Inc. Ensemble de mesure de pression
EP0560875A1 (fr) * 1990-12-06 1993-09-22 Rosemount Inc Transmetteur de pression avec depression l'isolant des contraintes.
US5531120A (en) * 1992-04-23 1996-07-02 Hitachi, Ltd. Compact differential pressure transmitter having first and second damper chambers

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113063542A (zh) * 2019-12-12 2021-07-02 阿自倍尔株式会社 差压计
DE102020132960A1 (de) 2020-12-10 2022-06-15 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer mit Überlastschutz
WO2022122411A1 (fr) 2020-12-10 2022-06-16 Endress+Hauser SE+Co. KG Capteur de mesure de pression différentielle doté d'une protection contre les surcharges
CN114593866A (zh) * 2022-03-08 2022-06-07 贾秀梅 一种油田用防压力过载的动态调节式油压座

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