WO2014094884A1 - Baw component, lamination for a baw component, and method for manufacturing a baw component, said baw component comprising two stacked piezoelectric materials that differ - Google Patents

Baw component, lamination for a baw component, and method for manufacturing a baw component, said baw component comprising two stacked piezoelectric materials that differ Download PDF

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Publication number
WO2014094884A1
WO2014094884A1 PCT/EP2012/076714 EP2012076714W WO2014094884A1 WO 2014094884 A1 WO2014094884 A1 WO 2014094884A1 EP 2012076714 W EP2012076714 W EP 2012076714W WO 2014094884 A1 WO2014094884 A1 WO 2014094884A1
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WO
WIPO (PCT)
Prior art keywords
baw
piezoelectric material
component
resonator
baw component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/076714
Other languages
French (fr)
Inventor
Gilles MOULARD
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
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Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Priority to DE112012007237.5T priority Critical patent/DE112012007237T5/en
Priority to PCT/EP2012/076714 priority patent/WO2014094884A1/en
Priority to CN201280077848.3A priority patent/CN104854793B/en
Priority to US14/653,768 priority patent/US9831851B2/en
Priority to JP2015548232A priority patent/JP6212132B2/en
Publication of WO2014094884A1 publication Critical patent/WO2014094884A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0421—Modification of the thickness of an element
    • H03H2003/0435—Modification of the thickness of an element of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0471—Resonance frequency of a plurality of resonators at different frequencies
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Definitions

  • the present invention refers to BAW components, e.g. for use in RF filters for mobile communication devices, to lamina ⁇ tions for BAW components, and to methods for manufacturing BAW components.
  • BAW bulk acoustic wave
  • a duplexer usu ⁇ ally comprises a TX (transmission) and an RX (reception) filter.
  • the TX filter and the RX filter are band pass filters with adjacent but different pass bands.
  • An important factor determining the pass band of a BAW pass band filter is the thickness of piezoelectric material arranged between two electrode layers of a resonator of the filter and the mass loading of a resonator.
  • One type of conventional BAW duplexers has different piezo- electric material thicknesses for the TX filter and for the
  • the two filters are manufactured with different processes and on different carrier chips.
  • Another type of conventional BAW duplexers has additional mass, e. g. additional layers on the upper electrode, depos ⁇ ited on selected resonators to reduce their respective reso ⁇ nance frequency.
  • the method for manufacturing for both types are relative complex, expensive and susceptible to errors.
  • conventional duplexers have TX and RX filters on different carrier chips what is contrary to the miniaturization ef- forts.
  • a BAW component where two BAW layer stacks can be easily arranged on the same chip to obtain a miniatur ⁇ ized BAW filter and where the composition of the component allows improved manufacturing methods to increase the gain of good components.
  • a lamination for a BAW component and a method for manufacturing such a BAW component . It is, thus, an object of the present invention to provide an improved BAW component, a lamination for a BAW component, and a method for manufacturing a BAW component.
  • a BAW component comprises a first BAW resonator with a bottom electrode, a top electrode, and a lamination between the bot- torn electrode and the top electrode.
  • the lamination comprises a first layer with a first piezoelectric material and a sec ⁇ ond layer with a second piezoelectric material.
  • the first piezoelectric material differs from the second piezoelectric material .
  • the two different materials of the lamination can have dif ⁇ ferent physical and/or chemical properties.
  • the first BAW resonator can be arranged on a carrier chip next to a second BAW resonator comprising the first piezoelectric material or the second piezoelectric material between a bottom electrode and a top electrode.
  • the thickness of the piezoelectric mate ⁇ rial of the second BAW resonator can be equal to the thick- ness of the layer of the first BAW resonator with the same piezoelectric material.
  • the first BAW resonator has a different resonance frequency and can provide a different pass band due to the presence of the respective other piezo ⁇ electric material of the lamination not comprised in the sec- ond BAW resonator.
  • Such a BAW component can be manufactured with a high quality of the materials atomic structure as described below.
  • the first BAW resonator is arranged on a carrier chip next to a second BAW resonator comprising the first piezoelectric material a bottom electrode and a top electrode. The thicknesses of the layer with the first material in both resonators are equal.
  • the BAW component further comprises a carrier chip and a second BAW resonator.
  • the first BAW resonator and the second BAW resonator are arranged on the same carrier chip.
  • the lamination of the first BAW resonator has a first thickness and the second BAW has a pie ⁇ zoelectric layer with a second thickness different from the first thickness.
  • the BAW resonator having the thicker piezoelectric layer can be utilized in a filter having the lower pass band and vice- versa.
  • the first piezoelectric material and the second piezoelectric material have a different etching selec ⁇ tivity with respect to an etching agent.
  • the respective other piezoelectric material of the first BAW resonator can be deposited at the area of both BAW resonators. Then, the area of the first BAW resonator can be covered with a resist layer and an etching agent can etch the other piezoelectric material away from the area of the second resonator.
  • the first piezoelectric mate ⁇ rial acts as an etch stop layer for the etching agent. After the etching process, the respective top electrodes can be ar ⁇ ranged on the piezoelectric materials of both resonators.
  • the etching agent is a wet etching agent.
  • the etching agent is a metal iron-free de ⁇ veloper that can also be used for photolithographic proc ⁇ esses. It is possible that the etching agent comprises 2,36% Tetramethyl amonium hydroxyl in combination with a wetting agent
  • the etching agent is a dry etching agent.
  • the first piezoelectric material is Sc (scandium) doped A1N (aluminum nitride)
  • the second piezoelectric material is A1N.
  • a lamination for a BAW component can have a first layer comprising Sc doped AIN and a second layer comprising AIN.
  • first piezoelectric material or for the second piezoelectric material are GaAs (gallium arsenide), ZnO (zinc oxide), PZT (lead zirconate titanate) , KNN ( (K( i- x) Na x ) Nb0 3 ) (with K: Kalium, Na : Sodium, Nb : Niobium, 0 : Oxygen) .
  • the component is a duplexer and the first resonator is a resonator of the TX filter of the duplexer.
  • the BAW component can be a Bragg-Mirror based component or or a FBAR component with a cavity under the lamination for confining acoustic energy.
  • the component can comprise a piezo MEMS switch.
  • a component with more than one switch is also possible.
  • both switches can be made a single carrier chip.
  • the first cantilever can have one piezoelectric layer while the second cantilever has two piezoelectric layers. Therefore, it is possible to process on the same chip two switches having two different closing voltages.
  • a method for manufacturing a BAW component comprises the steps :
  • the method further comprises the step:
  • the present method yields layer sys ⁇ tems with a higher layer quality resulting in improved electro-acoustic properties as parameters, e.g. the electro- acoustic coupling coefficient ⁇ 2 , are enhanced.
  • Such a BAW component can be utilized to obtain a BAW resona ⁇ tor having a different resonance frequency than other resona ⁇ tors.
  • Different resonance frequencies can be needed for TX and RX filters in duplexers .
  • differences in resonance frequencies can also be needed in ladder type fil ⁇ ter structures where series resonators need to have a differ ⁇ ent frequency compared to parallel branch resonators.
  • the anti-resonance frequency of parallel resonators mainly match the resonance frequency of serial branch resonators in a ladder type structure, then a band pass filter is obtained.
  • the resonance frequency of parallel branch resonators matches the anti-resonance frequency of serial branch resona ⁇ tors, then a band stop filter of a notch filter can be ob- tained.
  • the two deposition steps relating to the first piezoelectric material and to the second piezoelectric material respec ⁇ tively can be done in situ or with a vacuum break. Even with a vacuum break during the different deposition steps good layer quality is obtained.
  • FIG. 1 shows a basic BAW resonator stack with a lamination L
  • FIG. 2 shows a BAW component with two BAW resonator
  • FIG. 3 shows elements of a BAW component comprising acous ⁇ tic mirrors
  • FIG. 4 shows a stage of a manufacturing process
  • FIG. 5 shows a stage of a manufacturing process
  • FIG. 6 shows a stage of a manufacturing process
  • FIG. 7 shows a final stage of a manufacturing process
  • FIG. 8 shows a component with piezoelectric switches with different closing voltages.
  • FIG. 1 shows a BAW component BAWC comprising a lamination L between a bottom electrode BE and a top electrode TE .
  • the lamination comprises a first layer with a first piezoelectric material PMl and a second layer with a second piezoelectric material PM2.
  • the second piezoelectric material PM2 is ar ⁇ ranged between the first piezoelectric material PMl and the top electrode TE .
  • the first piezoelectric material PMl is different from the second piezoelectric material PM2. This allows high quality BAW components with more than one BAW resonators on a common carrier chip where different resona ⁇ tors have different resonance frequencies.
  • FIG. 1 shows a BAW component BAWC comprising a lamination L between a bottom electrode BE and a top electrode TE .
  • the lamination comprises a first layer with a first piezoelectric material PMl and a second layer with a second piezoelectric material PM2.
  • the second piezoelectric material PM2 is ar ⁇ range
  • both resonators can be arranged on or above a carrier substrate CS .
  • Both resonators comprise a bottom electrode BE and a top electrode TE and the first piezoelectric material PM1.
  • Only the first BAW resonator BAWR1 comprises a second piezoelec ⁇ tric material PM2.
  • the piezoelectric material of the first BAW resonator BAWR1 is thicker than the piezoelectric material of the second resonator BAWR2.
  • both resonators have different resonance frequencies although they can be manufactured with easy to perform manufacturing steps one next to the other on or above a common carrier substrate CS .
  • FIG. 3 shows main components of a BAW component BAWC where mainly the top electrode is omitted.
  • Two resonator stacks are arranged on respective acoustic mirrors AM.
  • the acoustic mir ⁇ rors AM comprise a layer system with alternating high and low acoustic impedance.
  • the acoustic mirror AM confines acoustic energy and allows to establish a resonance mode of the re- spective resonator.
  • FIG. 4 shows a stage during one of several possible
  • the first piezoelectric material PM1 is deposited and structured on the bottom electrode BE for both resonator stacks.
  • FIG. 5 shows a further stage of a manufacturing process where a second piezoelectric material PM2 is arranged on the first piezoelectric material.
  • the second piezoelectric ma- terial PM2 is only needed in one of the resonator stacks and needs to be removed in the respective other resonator stack.
  • FIG. 6 shows a stage where a resist film RES is arranged on the lamination of the first resonator.
  • the resist film RES protects the lamination of the later first resonator BAWR1 but the piezoelectric material PM2 is removed from the second resonator stack, the later second resonator BAWR2, shown on the left.
  • Different properties of the different pie- zoelectric materials ensure that an etching agent etches the second piezoelectric material in such a way that the etching process stops when the second piezoelectric material PM2 is completely removed.
  • the upper surface of the first piezoelec ⁇ tric material of the left resonator stack establishes an etch stop zone for the process.
  • FIG. 7 shows a final manufacturing stage where a top elec ⁇ trode TE has been deposited and structured on both resonator stacks .
  • FIG. 8 shows a BAW component where a lamination comprising a first piezoelectric material PM1 and a second piezoelectric material PM2 are arranged between a bottom electrode BE and a top electrode TE to establish a cantilever shaped switch SW1.
  • the switch is arranged next to a switch SW2 without the second piezoelectric material PM2.
  • AM acoustic mirror
  • BAWR1 first BAW resonator

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

An improved BAW component, a lamination for a BAW component, and a method for manufacturing a BAW component are provided. A lamination (L) for a BAW component comprises a first layer (PM1) with a first piezoelectric material and a second layer (PM2) with a second piezoelectric material being different from the first piezoelectric material. The first and the second piezoelectric material can be Sc doped AIN and AIN, respectively. A method of manufaturing a plurality of BAW components having different resonance frequencies or switch closure voltages is disclosed. The components comprise a stack of two piezoelectric layers having different etching selectivity and the method involves removing one of the layers in selected components.

Description

Description
BAW COMPONENT, LAMINATION FOR A BAW COMPONENT, AND METHOD FOR MANUFACTURING A BAW COMPONENT, SAID BAW COMPONENT COMPRISING TWO
STACKED PIEZOELECTRIC MATERIALS THAT DIFFER
The present invention refers to BAW components, e.g. for use in RF filters for mobile communication devices, to lamina¬ tions for BAW components, and to methods for manufacturing BAW components.
The present trend towards miniaturization of mobile communi¬ cation devices demands for smaller electric and electro- acoustic components. BAW (BAW = bulk acoustic wave) compo¬ nents can be used in RF filters, e.g. in duplexers in front- end modules of mobile communication devices. A duplexer usu¬ ally comprises a TX (transmission) and an RX (reception) filter. The TX filter and the RX filter are band pass filters with adjacent but different pass bands. An important factor determining the pass band of a BAW pass band filter is the thickness of piezoelectric material arranged between two electrode layers of a resonator of the filter and the mass loading of a resonator.
One type of conventional BAW duplexers has different piezo- electric material thicknesses for the TX filter and for the
RX filter. Accordingly, the two filters are manufactured with different processes and on different carrier chips.
Another type of conventional BAW duplexers has additional mass, e. g. additional layers on the upper electrode, depos¬ ited on selected resonators to reduce their respective reso¬ nance frequency. The method for manufacturing for both types are relative complex, expensive and susceptible to errors. In particular, conventional duplexers have TX and RX filters on different carrier chips what is contrary to the miniaturization ef- forts.
What is needed is a BAW component where two BAW layer stacks can be easily arranged on the same chip to obtain a miniatur¬ ized BAW filter and where the composition of the component allows improved manufacturing methods to increase the gain of good components. What is further needed is a lamination for a BAW component and a method for manufacturing such a BAW component . It is, thus, an object of the present invention to provide an improved BAW component, a lamination for a BAW component, and a method for manufacturing a BAW component.
The independent claims provide a solution for the above-men- tioned problems. Dependent claims provide preferred embodi¬ ments .
A BAW component comprises a first BAW resonator with a bottom electrode, a top electrode, and a lamination between the bot- torn electrode and the top electrode. The lamination comprises a first layer with a first piezoelectric material and a sec¬ ond layer with a second piezoelectric material. The first piezoelectric material differs from the second piezoelectric material .
The two different materials of the lamination can have dif¬ ferent physical and/or chemical properties. The first BAW resonator can be arranged on a carrier chip next to a second BAW resonator comprising the first piezoelectric material or the second piezoelectric material between a bottom electrode and a top electrode. The thickness of the piezoelectric mate¬ rial of the second BAW resonator can be equal to the thick- ness of the layer of the first BAW resonator with the same piezoelectric material. Then, the first BAW resonator has a different resonance frequency and can provide a different pass band due to the presence of the respective other piezo¬ electric material of the lamination not comprised in the sec- ond BAW resonator.
Such a BAW component can be manufactured with a high quality of the materials atomic structure as described below. In one embodiment the first BAW resonator is arranged on a carrier chip next to a second BAW resonator comprising the first piezoelectric material a bottom electrode and a top electrode. The thicknesses of the layer with the first material in both resonators are equal.
In one embodiment, thus, the BAW component further comprises a carrier chip and a second BAW resonator. The first BAW resonator and the second BAW resonator are arranged on the same carrier chip.
In one embodiment thereof, the lamination of the first BAW resonator has a first thickness and the second BAW has a pie¬ zoelectric layer with a second thickness different from the first thickness.
The BAW resonator having the thicker piezoelectric layer can be utilized in a filter having the lower pass band and vice- versa. Thus, it is possible to utilize the first BAW resona- tor in a TX filter and the second BAW resonator in an RX filter .
In one embodiment, the first piezoelectric material and the second piezoelectric material have a different etching selec¬ tivity with respect to an etching agent.
This allows to deposit the piezoelectric material comprised by both resonators in the same manufacturing step and with the same layer thickness. The respective other piezoelectric material of the first BAW resonator can be deposited at the area of both BAW resonators. Then, the area of the first BAW resonator can be covered with a resist layer and an etching agent can etch the other piezoelectric material away from the area of the second resonator. The first piezoelectric mate¬ rial acts as an etch stop layer for the etching agent. After the etching process, the respective top electrodes can be ar¬ ranged on the piezoelectric materials of both resonators. In one embodiment, the etching agent is a wet etching agent.
In one embodiment, the etching agent is a metal iron-free de¬ veloper that can also be used for photolithographic proc¬ esses. It is possible that the etching agent comprises 2,36% Tetramethyl amonium hydroxyl in combination with a wetting agent
In one embodiment the etching agent is a dry etching agent. In one embodiment, the first piezoelectric material is Sc (scandium) doped A1N (aluminum nitride) , and the second piezoelectric material is A1N. Thus, a lamination for a BAW component can have a first layer comprising Sc doped AIN and a second layer comprising AIN.
Other possible materials for the first piezoelectric material or for the second piezoelectric material are GaAs (gallium arsenide), ZnO (zinc oxide), PZT (lead zirconate titanate) , KNN ( (K( i-x)Nax) Nb03) (with K: Kalium, Na : Sodium, Nb : Niobium, 0 : Oxygen) . The doping level of ScxAl( i-y)N can be approx. 1% <= x <= 25% with y mainly equal to x. Especially a level of approx. 5% <= x <= 7% is possible.
In one embodiment, the component is a duplexer and the first resonator is a resonator of the TX filter of the duplexer.
The BAW component can be a Bragg-Mirror based component or or a FBAR component with a cavity under the lamination for confining acoustic energy.
Further variants, e.g. MEMS components comprising lever structures, are also possible. For instance, the component can comprise a piezo MEMS switch. A component with more than one switch is also possible. In an embodiment comprising two switches both switches can be made a single carrier chip. The first cantilever can have one piezoelectric layer while the second cantilever has two piezoelectric layers. Therefore, it is possible to process on the same chip two switches having two different closing voltages.
A method for manufacturing a BAW component comprises the steps :
- providing a bottom electrode, - arranging a first piezoelectric material on or above the bottom electrode,
- arranging a second piezoelectric material different from the first piezoelectric material on or above the first piezo- electric material,
- arranging a top electrode on or above the second piezoelec¬ tric material.
It is possible that these steps establish a first BAW resona- tor. A second BAW resonator can be established next to the first BAW resonator where the two steps:
- providing a bottom electrode;
- arranging a first piezoelectric material on or above the bottom electrode;
for establishing the first BAW resonator are also utilized to establish the second BAW resonator.
In order to arrange the second piezoelectric material on the first BAW resonator only, further photolithographic steps, e.g. via the use of a resist layer, can be applied.
In one embodiment, the method further comprises the step:
- selectively removing the second piezoelectric material at a previously specified area before arranging material of the top electrode on or above the first piezoelectric material in the specified area and on or above the second piezoelectric material in a further area located nearby the specified area. The previously specified area is the area of the second reso¬ nator and the further area is the area of the first resona¬ tor . Compared to other methods for manufacturing a BAW component and/or a BAW duplexer, the present method yields layer sys¬ tems with a higher layer quality resulting in improved electro-acoustic properties as parameters, e.g. the electro- acoustic coupling coefficient κ2, are enhanced.
Such a BAW component can be utilized to obtain a BAW resona¬ tor having a different resonance frequency than other resona¬ tors. Different resonance frequencies can be needed for TX and RX filters in duplexers . However, such differences in resonance frequencies can also be needed in ladder type fil¬ ter structures where series resonators need to have a differ¬ ent frequency compared to parallel branch resonators. When the anti-resonance frequency of parallel resonators mainly match the resonance frequency of serial branch resonators in a ladder type structure, then a band pass filter is obtained. When the resonance frequency of parallel branch resonators matches the anti-resonance frequency of serial branch resona¬ tors, then a band stop filter of a notch filter can be ob- tained.
The two deposition steps relating to the first piezoelectric material and to the second piezoelectric material respec¬ tively can be done in situ or with a vacuum break. Even with a vacuum break during the different deposition steps good layer quality is obtained.
Examples of BAW components, laminations and methods for manu¬ facturing and the respective working principles are shown in the schematic figures.
Short description of the figures: FIG. 1 shows a basic BAW resonator stack with a lamination L,
FIG. 2 shows a BAW component with two BAW resonator
stacks,
FIG. 3 shows elements of a BAW component comprising acous¬ tic mirrors, FIG. 4 shows a stage of a manufacturing process,
FIG. 5 shows a stage of a manufacturing process,
FIG. 6 shows a stage of a manufacturing process,
FIG. 7 shows a final stage of a manufacturing process,
FIG. 8 shows a component with piezoelectric switches with different closing voltages.
FIG. 1 shows a BAW component BAWC comprising a lamination L between a bottom electrode BE and a top electrode TE . The lamination comprises a first layer with a first piezoelectric material PMl and a second layer with a second piezoelectric material PM2. The second piezoelectric material PM2 is ar¬ ranged between the first piezoelectric material PMl and the top electrode TE . The first piezoelectric material PMl is different from the second piezoelectric material PM2. This allows high quality BAW components with more than one BAW resonators on a common carrier chip where different resona¬ tors have different resonance frequencies. FIG. 2 shows a BAW component BAWC where a first BAW resonator BAWR1 is arranged next to a second BAW resonator BAWR2. Both resonators can be arranged on or above a carrier substrate CS . Both resonators comprise a bottom electrode BE and a top electrode TE and the first piezoelectric material PM1. Only the first BAW resonator BAWR1 comprises a second piezoelec¬ tric material PM2. The piezoelectric material of the first BAW resonator BAWR1 is thicker than the piezoelectric material of the second resonator BAWR2. Thus, both resonators have different resonance frequencies although they can be manufactured with easy to perform manufacturing steps one next to the other on or above a common carrier substrate CS .
FIG. 3 shows main components of a BAW component BAWC where mainly the top electrode is omitted. Two resonator stacks are arranged on respective acoustic mirrors AM. The acoustic mir¬ rors AM comprise a layer system with alternating high and low acoustic impedance. The acoustic mirror AM confines acoustic energy and allows to establish a resonance mode of the re- spective resonator.
FIG. 4 shows a stage during one of several possible
manufacturing processes where two resonator stacks are arranged next to another on a common carrier substrate CS . After depositing and structuring a bottom electrode BE, the first piezoelectric material PM1 is deposited and structured on the bottom electrode BE for both resonator stacks.
It may not be necessary to structure one or more layers.
FIG. 5 shows a further stage of a manufacturing process where a second piezoelectric material PM2 is arranged on the first piezoelectric material. However, the second piezoelectric ma- terial PM2 is only needed in one of the resonator stacks and needs to be removed in the respective other resonator stack.
Accordingly, FIG. 6 shows a stage where a resist film RES is arranged on the lamination of the first resonator. The resist film RES protects the lamination of the later first resonator BAWR1 but the piezoelectric material PM2 is removed from the second resonator stack, the later second resonator BAWR2, shown on the left. Different properties of the different pie- zoelectric materials ensure that an etching agent etches the second piezoelectric material in such a way that the etching process stops when the second piezoelectric material PM2 is completely removed. The upper surface of the first piezoelec¬ tric material of the left resonator stack establishes an etch stop zone for the process.
FIG. 7 shows a final manufacturing stage where a top elec¬ trode TE has been deposited and structured on both resonator stacks .
FIG. 8 shows a BAW component where a lamination comprising a first piezoelectric material PM1 and a second piezoelectric material PM2 are arranged between a bottom electrode BE and a top electrode TE to establish a cantilever shaped switch SW1. The switch is arranged next to a switch SW2 without the second piezoelectric material PM2. The different
constructions of the two switches allow different closing voltages . Neither the BAW component nor the lamination for a BAW component nor the method for manufacturing a BAW component are limited to the embodiments described in the specification or shown in the figures. Components, laminations and methods comprising further materials or layers or components compris¬ ing further resonators or methods comprising further deposition steps or etching steps or combinations thereof are also comprised by the present invention.
List of reference signs:
AM: acoustic mirror
BAWC: BAW component
BAWR1 : first BAW resonator
BAWR2 : second BAW resonator
BE: bottom electrode
CS : carrier substrate
L: lamination
PM1 : first piezoelectric material
PM2 : second piezoelectric material
RES: resist film
SW1, SW2 : switch
TE : top electrode

Claims

Claims
1. A BAW component (BAWC) , comprising
- a first BAW resonator (BAWR1) with a bottom electrode (BE), a top electrode (TE) and a lamination (L) between the bottom electrode (BE) and the top electrode (TE) , wherein
- the lamination (L) comprises a first layer with a first piezoelectric material (PM1) and a second layer with a second piezoelectric material (PM2),
- the first piezoelectric material (PM1) differs from the second piezoelectric material (PM2).
2. The BAW component (BAWC) of the previous claim,
- further comprising a carrier chip (CS) and a second BAW resonator (BAWR2), wherein
- the first BAW resonator (BAWR1) and the second BAW
resonator (BAWR2) are arranged on the carrier chip (CS) .
3. The BAW component (BAWC) of the previous claim, wherein - the lamination (L) of the first BAW resonator (BAWR1) has first thickness,
- the second BAW resonator (BAWR2) has a piezoelectric layer with a second thickness different from the first thickness.
4. The BAW component (BAWC) of one of the previous claims, where
the first piezoelectric material (PM1) and the second
piezoelectric material (PM2) have a different etching
selectivity with respect to an etching agent.
5. The BAW component (BAWC) of the previous claim, wherein the etching agent is a wet etching agent.
6. The BAW component (BAWC) of the previous claim, wherein the etching agent comprises 2,36% Tetramethyl amonium hydroxyl in combination with a wetting agent.
7. The BAW component (BAWC) of one of claims 1 to 5, wherein the etching agent is a dry etching agent.
8. The BAW component (BAWC) of one of the previous claims, where
- the first piezoelectric material (PM1) is Sc doped AIN and the second piezoelectric material (PM2) is AIN.
9. The BAW component (BAWC) of one of the previous claims, where the component (BAWC) is a duplexer and the first resonator (BAWR1) is a resonator of a TX filter of the duplexer .
10. A lamination (L) for a BAW component (BAWC), having
- a first layer comprising Sc doped AIN and
- a second layer comprising AIN.
11. Method for manufacturing a BAW component (BAWC), comprising the steps:
- providing a bottom electrode (BE) ,
- arranging a first piezoelectric material (PM1) on or above the bottom electrode (BE) ,
- arranging a second piezoelectric material (PM2) different from the first piezoelectric material (PM1) on or above the first piezoelectric material (PM1),
- arranging a top electrode (TE) on or above the second piezoelectric material (PM2).
12. Method of the previous claim, further comprising the step :
- selectively removing the second piezoelectric material (PM2) at a previously specified area before arranging
material of the top electrode (TE) on or above the first piezoelectric material (PM1) in the specified area and on the second piezoelectric material (PM2) in a further area located nearby the specified area.
PCT/EP2012/076714 2012-12-21 2012-12-21 Baw component, lamination for a baw component, and method for manufacturing a baw component, said baw component comprising two stacked piezoelectric materials that differ Ceased WO2014094884A1 (en)

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PCT/EP2012/076714 WO2014094884A1 (en) 2012-12-21 2012-12-21 Baw component, lamination for a baw component, and method for manufacturing a baw component, said baw component comprising two stacked piezoelectric materials that differ
CN201280077848.3A CN104854793B (en) 2012-12-21 2012-12-21 BAW components, the lamination of BAW components and the method for manufacturing BAW components, the BAW components include two different stacking piezoelectric materials
US14/653,768 US9831851B2 (en) 2012-12-21 2012-12-21 BAW component, lamination for a BAW component, and method for manufacturing a BAW component
JP2015548232A JP6212132B2 (en) 2012-12-21 2012-12-21 BAW component comprising two different piezoelectric materials laminated, laminate for the BAW component, and method for manufacturing the BAW component

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US9831851B2 (en) 2017-11-28
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JP2016504870A (en) 2016-02-12
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