WO2014069197A1 - Alkali developable photosensitive composition - Google Patents

Alkali developable photosensitive composition Download PDF

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Publication number
WO2014069197A1
WO2014069197A1 PCT/JP2013/077445 JP2013077445W WO2014069197A1 WO 2014069197 A1 WO2014069197 A1 WO 2014069197A1 JP 2013077445 W JP2013077445 W JP 2013077445W WO 2014069197 A1 WO2014069197 A1 WO 2014069197A1
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group
alkali
carbon atoms
substituent
photosensitive composition
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PCT/JP2013/077445
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French (fr)
Japanese (ja)
Inventor
洋介 前田
清水 正晶
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株式会社Adeka
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Priority to KR1020147035975A priority Critical patent/KR102093446B1/en
Priority to CN201380033121.XA priority patent/CN104395824B/en
Priority to JP2014544402A priority patent/JP6333727B2/en
Publication of WO2014069197A1 publication Critical patent/WO2014069197A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029

Definitions

  • the present invention relates to an alkali-developable photosensitive composition containing an infrared-absorbing dye, and a near-infrared absorbing filter using the alkali-developable photosensitive composition.
  • Patent Document 1 discloses a color filter using a photosensitive coloring composition that is cured by irradiation with near-infrared light
  • Patent Document 2 discloses a plasma display panel that can block wavelengths in the near-infrared region.
  • a filter is disclosed.
  • Patent Document 3 discloses an infrared-sensitive lithographic printing plate using a particulate matting agent containing an alkali-soluble resin and an infrared-absorbing dye.
  • Patent Document 4 discloses a near-infrared light.
  • a near infrared absorption filter using a curable composition containing an absorbing dye is disclosed.
  • the photosensitive compositions described in these documents are not satisfactory in terms of light resistance.
  • an object of the present invention is to provide an alkali-developable photosensitive composition having excellent light resistance.
  • Another object of the present invention is to provide a near-infrared absorption filter using the alkali-developable photosensitive composition.
  • the present inventors have found that a cured product of an alkali-developable photosensitive composition using an oxime ester compound as a photopolymerization initiator is excellent in light resistance, and the alkali-developable feeling described above.
  • the present inventors have found that the light composition is suitable for a near-infrared absorption filter, and have reached the present invention.
  • the present invention relates to an infrared-absorbing dye (A), a polymerizable compound (B) having an alkali-soluble substituent that imparts alkali developability, an ethylenically unsaturated bond, a photopolymerization initiator (C), and a solvent (D). And an alkali developable photosensitive composition in which the photopolymerization initiator (C) contains an oxime ester compound.
  • the present invention also provides a cured product of the alkali-developable photosensitive composition and a near-infrared absorbing filter formed using the cured product.
  • the alkali-developable photosensitive composition containing an oxime ester compound as a photopolymerization initiator is excellent in light resistance.
  • a near-infrared absorption filter formed using the cured product has a low transmittance at a wavelength of 900 to 1100 nm, effectively blocks infrared rays, and has excellent photolithography characteristics because the cured product has high alkali resistance.
  • the alkali-developable photosensitive composition of the present invention comprises an infrared-absorbing dye (A), a polymerizable compound (B) having an ethylenically unsaturated bond, having an alkali-soluble substituent that imparts alkali developability, and a photopolymerization initiator. (C) and a solvent (D) are contained.
  • A infrared-absorbing dye
  • B polymerizable compound
  • C ethylenically unsaturated bond
  • having an alkali-soluble substituent that imparts alkali developability and a photopolymerization initiator.
  • C and a solvent (D) are contained.
  • Infrared absorbing dye (A) used in the alkali-developable photosensitive composition of the present invention those having characteristic absorption in the infrared region and conventionally used as infrared absorbing dyes can be used.
  • diimonium compounds those represented by the following general formula (II) are more preferable because they are excellent in light resistance of a cured product of the photosensitive composition.
  • R 19 , R 20 , R 21 , R 22 , R 23 , R 24 , R 25 and R 26 each independently has 1 to 10 carbon atoms which may have a hydrogen atom or a substituent.
  • An methylene group in the alkyl group may be interrupted by —O— or —CH ⁇ CH—, t represents a number of 1 to 4, and An q ⁇ represents a q valence.
  • Q represents 1 or 2
  • p represents a coefficient for keeping the charge neutral.
  • substituents represented by R 19 , R 20 , R 21 , R 22 , R 23 , R 24 , R 25 , R 26 , R 27 , R 28 , R 29 and R 30 Examples of the alkyl group having 1 to 10 carbon atoms that may have are methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, isobutyl, amyl, isoamyl, tert-amyl, hexyl, cyclohexyl, cyclohexyl Methyl, cyclohexylethyl, heptyl, isoheptyl, tertiary heptyl, n-octyl, isooctyl, tertiary octyl, 2-ethylhexyl, trifluoromethyl, trichloromethyl, tribrom
  • Examples of the amino group which may have a substituent represented by R 27 , R 28 , R 29 and R 30 include amino, ethylamino, dimethylamino, diethylamino, butylamino, cyclopentylamino, 2-ethylhexylamino, dodecyl Amino, anilino, chlorophenylamino, toluidino, anisidino, N-methyl-anilino, diphenylamino, naphthylamino, 2-pyridylamino, methoxycarbonylamino, phenoxycarbonylamino, acetylamino, benzoylamino, formylamino, pivaloylamino, lauroylamino, carbamoyl Amino, N, N-dimethylaminocarbonylamino, N, N-diethylaminocarbonylamino, morpholinocarbonylamino, methoxycarbony
  • Examples of the q-valent anion represented by pAn q- in the general formula (II) include methanesulfonate anion, dodecylsulfonate anion, benzenesulfonate anion, toluenesulfonate anion, trifluoromethanesulfonate anion, naphthalenesulfone.
  • chloride ions bromide ions, iodide ions, fluoride ions, chlorate ions, thiocyanate ions, perchlorate ions, hexafluorophosphate ions, hexafluoroantimonate ions, tetrafluoroborate ions, Octyl phosphate ion, dodecyl phosphate ion, octadecyl phosphate ion, phenyl phosphate ion, nonylphenyl phosphate ion, 2,2'-methylenebis (4,6-di-t-butylphenyl) phosphonate ion, tetrakis (penta Fluorophenyl) borate ion, sulfur Phosphonimide anion, quencher anion that has the function of deexciting (quenching) active molecules in the excited state, and anionic groups such as carboxyl, phosphonic acid, and s
  • dye (A) can be used individually or in combination of multiple types.
  • the content of the compound represented by the general formula (II) is preferably 50 to 100% by mass, more preferably 70 to 100% by mass.
  • the solubility in a solvent may be lowered, or the stability of a cured product may be lowered.
  • the content of the infrared absorbing dye (A) is preferably 0.01 to 50% by mass, more preferably 0.05 to 30% by mass in the alkali-developable photosensitive composition of the present invention.
  • the infrared absorption dye (A) preferably has a maximum absorption wavelength ( ⁇ max) of the cured product of 700 nm or more, more preferably 780 to 850 nm. If the maximum absorption wavelength ( ⁇ max) of the cured product is less than 700 nm, it does not absorb light of the target wavelength, which is not preferable.
  • the polymerizable compound (B) having an alkali-soluble substituent that gives alkali developability and having an ethylenically unsaturated bond is not particularly limited, and those conventionally used for alkali-developable photosensitive compositions are used.
  • Mono (meth) acrylate and hydroxyethyl (meth) acrylate of polymer having carboxy group and hydroxyl group Unsaturated polybasic compounds such as poly (meth) acrylates having one carboxyl group and two or more (meth) acryloyl groups, or thiolate malate, hydroxypropyl (meth) acrylate malate, dicyclopentadiene malate Acid: a polyfunctional compound having an acid value that is a reaction product of a hydroxyl group-containing polyfunctional acrylate such as pentaerythritol triacrylate or dipentaerythritol pentaacrylate and a dibasic acid anhydride such as succinic anhydride, phthalic anhydride, or tetrahydrophthalic anhydride
  • Acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate
  • the compound (B) having an alkali developability and having an ethylenically unsaturated bond preferably contains 0.2 to 1.0 equivalent of an unsaturated group.
  • X 1 is a direct bond, a methylene group, an alkylidene group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, —O—, —S—, —SO 2 —, —SS—, —SO—, —CO—, —OCO—, or a substituent represented by the following formula (A), (B) or (C), wherein the alkylidene group may be substituted with a halogen atom
  • R 31 , R 32 , R 33 and R 34 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, or an alkenyl having 2 to 5 carbon atoms. Represents a group or a halogen atom, and the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom, and m is an integer of 0 to 10.
  • Z 1 is a hydrogen atom, a phenyl group optionally substituted by an alkyl group having 1 to 10 carbon atoms or an alkoxy group having 1 to 10 carbon atoms, or an alkyl group having 1 to 10 carbon atoms, or A cycloalkyl group having 3 to 10 carbon atoms which may be substituted by an alkoxy group having 1 to 10 carbon atoms
  • Y 1 is an alkyl group having 1 to 10 carbon atoms, alkoxy having 1 to 10 carbon atoms A group, an alkenyl group having 2 to 10 carbon atoms or a halogen atom, wherein the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom, and d is an integer of 0 to 5).
  • Y 2 and Z 2 are each independently an alkyl group having 1 to 10 carbon atoms which may be substituted with a halogen atom, or 6 to 20 carbon atoms which may be substituted with a halogen atom.
  • Examples of the unsaturated monobasic acid that acts on the epoxy group of the epoxy compound include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, hydroxyethyl methacrylate / malate, and the like. Examples thereof include hydroxyethyl acrylate / malate, hydroxypropyl methacrylate / malate, hydroxypropyl acrylate / malate, and dicyclopentadiene / malate.
  • the polybasic acid anhydride to be acted after the unsaturated monobasic acid is allowed to act is biphenyltetracarboxylic dianhydride, tetrahydrophthalic anhydride, succinic anhydride, maleic anhydride, trimellitic anhydride , Pyromellitic anhydride, 2,2'-3,3'-benzophenone tetracarboxylic anhydride, ethylene glycol bisanhydro trimellitate, glycerol tris anhydro trimellitate, hexahydro phthalic anhydride, methyl tetrahydro phthalic anhydride Acid, nadic anhydride, methyl nadic anhydride, trialkyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene-1,2- Dicarboxylic anhydride, trialkyltetra
  • the reaction molar ratio of the epoxy compound, the unsaturated monobasic acid and the polybasic acid anhydride is preferably as follows. That is, in an epoxy adduct having a structure in which 0.1 to 1.0 carboxyl groups of the unsaturated monobasic acid are added to one epoxy group of the epoxy compound, the hydroxyl group 1 of the epoxy adduct is It is preferable that the ratio of the acid anhydride structure of the polybasic acid anhydride is 0.1 to 1.0. Reaction of the said epoxy compound, the said unsaturated monobasic acid, and the said polybasic acid anhydride can be performed in accordance with a conventional method.
  • a monofunctional or polyfunctional epoxy compound can be used.
  • the alkali-developable compound having an ethylenically unsaturated bond preferably has a solid content acid value in the range of 5 to 120 mgKOH / g, and the use amount of the monofunctional or polyfunctional epoxy compound satisfies the acid value. It is preferable to select as follows.
  • Examples of the monofunctional epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, isobutyl glycidyl ether, t-butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl Glycidyl ether, octyl glycidyl ether, nonyl glycidyl ether, decyl glycidyl ether, undecyl glycidyl ether, dodecyl glycidyl ether, tridecyl glycidyl ether, tetradecyl glycidyl ether, pentadecy
  • the polyfunctional epoxy compound it is preferable to use one or more selected from the group consisting of bisphenol type epoxy compounds and glycidyl ethers because an alkali-developable photosensitive composition with better characteristics can be obtained.
  • the bisphenol-type epoxy compound the epoxy compound represented by the general formula (1) can be used, and for example, a bisphenol-type epoxy compound such as a hydrogenated bisphenol-type epoxy compound can also be used.
  • glycidyl ethers examples include ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, 1,8-octanediol diglycidyl ether, 1 , 10-decanediol diglycidyl ether, 2,2-dimethyl-1,3-propanediol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, tetraethylene glycol diglycidyl ether, hexaethylene glycol diglycidyl ether 1,4-cyclohexanedimethanol diglycidyl ether, 1,1,1-tri (glycidyloxymethyl) propane, 1,1,1-tri (g Glycidyl oxymethyl) ethane, 1,1,1-tri (g
  • novolac epoxy compounds such as phenol novolac epoxy compounds, biphenyl novolac epoxy compounds, cresol novolac epoxy compounds, bisphenol A novolac epoxy compounds, dicyclopentadiene novolac epoxy compounds; 3,4-epoxy-6-methyl Cycloaliphatic epoxy such as cyclohexylmethyl-3,4-epoxy-6-methylcyclohexanecarboxylate, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 1-epoxyethyl-3,4-epoxycyclohexane Compound: Glycidyl esters such as diglycidyl phthalate, diglycidyl tetrahydrophthalate, glycidyl dimer, tetraglycidyl diamino Glycidylamines such as phenylmethane, triglycidyl-p-aminophenol and N, N-diglycidylaniline; hetero
  • polymerizable compounds (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives the alkali developability unsaturated polybasic acids, acids from the viewpoint of compatibility, alkali developability, and heat resistance Resins obtained by allowing an unsaturated monobasic acid to act on a polyfunctional acrylate having a valence and an epoxy group, and further causing a polybasic acid anhydride to act, are preferred, and unsaturated polybasic acids are more preferred.
  • the content of the polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that imparts the alkali developability is the alkali-developable photosensitive composition of the present invention. 30 to 99 mass%, particularly 60 to 95 mass% is preferable in the solid matter. If the content of the polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives alkali developability is less than 30% by mass, the cured product has insufficient mechanical strength and cracks are formed. If it is larger than 99% by weight, curing due to exposure may be insufficient and tack may occur, or the development time may be long and the cured part may be damaged by alkali. There is.
  • Photopolymerization initiator (C) As the photopolymerization initiator (C), conventionally known compounds can be used. For example, acetophenone compounds, benzophenone compounds, benzoin compounds, benzyl compounds, benzyl ketal compounds, oxime ester compounds, acylphosphine compounds, triazines. Compounds, xanthone compounds, thioxanthone compounds, benzoquinone compounds, anthraquinone compounds, disulfide compounds, biimidazole compounds, 4,4-azobisisobutyronitrile, camphorquinone, benzoyl peroxide, and the like.
  • an oxime ester compound is preferable from the viewpoint of sensitivity and color tone, and a compound represented by the following general formula (I) is more preferable.
  • R 1 and R 2 are each independently a hydrogen atom, a cyano group, an optionally substituted alkyl group having 1 to 20 carbon atoms, or an optionally substituted carbon atom number
  • R 3 and R 4 are each independently a hydrogen atom, halogen atom, nitro group, cyano group, hydroxyl group, carboxyl group, R 5 , OR 6 , SR 7 , NR 8 R 9 , COR 10 , SOR 11 , SO 2.
  • R 12 or CONR 13 R 14 Represents R 12 or CONR 13 R 14 , R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 and R 14 each independently has 1 to 20 carbon atoms which may have a substituent.
  • An alkyl group, an aryl group having 6 to 30 carbon atoms which may have a substituent, an arylalkyl group having 7 to 30 carbon atoms which may have a substituent or a carbon atom which may have a substituent Represents a heterocyclic group of formula 2 to 20, X represents an oxygen atom, a sulfur atom, a selenium atom, CR 15 R 16 , CO, NR 17 or PR 18 ; R 15 , R 16 , R 17 and R 18 each independently represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms which may have a substituent, or an optionally substituted carbon atom having 6 carbon atoms.
  • R 15 , R 16 , R 17 and R 18 may each independently form a ring together with one of the adjacent benzene rings, a represents an integer of 0 to 4, b represents an integer of 1 to 5.
  • Examples of the alkyl group having 1 to 20 carbon atoms represented by R 17 and R 18 include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, t-butyl, amyl, isoamyl, and t-amyl.
  • R 1 , R 2 , R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , R 15 , R 16 As the aryl group having 6 to 30 carbon atoms represented by R 17 and R 18 , for example, phenyl, tolyl, xylyl, ethylphenyl, naphthyl, anthryl, phenanthrenyl, phenyl substituted by one or more of the above alkyl groups , Biphenylyl, naphthyl, anthryl and the like.
  • Examples of the arylalkyl group having 7 to 30 carbon atoms represented by R 17 and R 18 include benzyl, ⁇ -methylbenzyl, ⁇ , ⁇ -dimethylbenzyl, phenylethyl and the like.
  • Examples of the heterocyclic group having 2 to 20 carbon atoms represented by R 17 and R 18 include pyridyl, pyrimidyl, furyl, thienyl, tetrahydrofuryl, dioxolanyl, benzooxazol-2-yl, tetrahydropyranyl, pyrrolidyl
  • Preferred examples include 5- to 7-membered heterocycles such as imidazolidyl, pyrazolidyl, thiazolidyl, isothiazolidyl, oxazolidyl, isoxazolidyl, piperidyl, piperazyl, morpholinyl and the like.
  • examples of the ring formed by R 15 , R 16 , R 17 and R 18 together with the adjacent benzene ring include a cyclopentane ring, a cyclohexane ring, a cyclopentene ring and a benzene ring.
  • Preferred examples include 5- to 7-membered rings such as a piperidine ring, a morpholine ring, a lactone ring and a lactam ring.
  • examples of the halogen atom represented by R 3 and R 4 include fluorine, chlorine, bromine and iodine.
  • Specific examples of the compound represented by the general formula (I) according to the present invention include the following compound No. 2-1 to 2-19.
  • the content of the photopolymerization initiator (C) is 0.1 to 30% by mass, particularly 0.5 to 0.5% in the alkali-developable photosensitive composition of the present invention. 10 mass% is preferable.
  • the content of the photopolymerization initiator (C) is less than 0.1% by mass, curing by exposure may be insufficient, and when the content is more than 30% by mass, light is contained in the alkali-developable photosensitive composition.
  • a polymerization initiator (C) may precipitate.
  • the ratio of the oxime ester compound in the photopolymerization initiator (C) is preferably 0.1 to 30% by mass, more preferably 0.5 to 10% by mass, based on the solid content of the alkali-developable photosensitive composition.
  • a solvent (D) can be further added to the alkali-developable photosensitive composition of the present invention.
  • the solvent is usually a solvent capable of dissolving or dispersing each of the above components (the infrared absorbing dye (A) of the present invention, etc.) as necessary, for example, methyl ethyl ketone, methyl amyl ketone, diethyl ketone, acetone, methyl isopropyl.
  • Ketones such as ketone, methyl isobutyl ketone, cyclohexanone, 2-heptanone, diacetone alcohol; ethers such as ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1,2-diethoxyethane, dipropylene glycol dimethyl ether
  • Solvent ester solvents such as methyl acetate, ethyl acetate, acetic acid-n-propyl, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, texanol; ethylene glycol monomethyl ether, ethylene glycol Cellosolve solvents such as methanol monoethyl ether; alcohol solvents such as methanol, ethanol, iso- or n-propanol, iso- or n-butanol, amyl alcohol;
  • ketones, ether ester solvents, etc. particularly propylene glycol-1-monomethyl ether-2-acetate, cyclohexanone, dimethylacetamide, methyl ethyl ketone, diacetone alcohol, and the like are photopolymerized with a resist in an alkali-developable photosensitive composition. It is preferable because the compatibility of the initiator is good.
  • the amount of the solvent (D) used is preferably such that the concentration of the composition other than the solvent (D) is 5 to 30% by mass, and less than 5% by mass. It is not preferable because it is difficult to increase the film thickness and the light of the desired wavelength cannot be sufficiently absorbed, and when it exceeds 30% by mass, the storage stability of the composition due to precipitation of the composition is reduced, and the viscosity is improved. Therefore, handling is reduced, which is not preferable.
  • the alkali-developable photosensitive composition of the present invention may further contain an inorganic color material and / or an organic color material. These color materials can be used alone or in admixture of two or more.
  • Examples of the inorganic color material and / or organic color material include nitroso compounds, nitro compounds, azo compounds, diazo compounds, xanthene compounds, quinoline compounds, anthraquinone compounds, coumarin compounds, phthalocyanine compounds, isoindolinone compounds, isoindoline compounds.
  • the average particle size is 8 nm or more, the DBP oil absorption is 90 ml / 100 g or less, the total oxygen amount calculated from CO and CO 2 in the volatile matter at 950 ° C. is 9 mg or more per 100 m 2 of the surface area of the carbon black.
  • Graphite graphitized carbon black, activated carbon, carbon fiber, carbon nanotube, carbon microcoil, carbon nanohorn, carbon aerogel, fullerene; aniline black, pigment black 7, titanium black; hydrophobic resin, chromium oxide green, miloli blue, cobalt Green, cobalt blue, Ngan, ferrocyanide, phosphate ultramarine, bitumen, ultramarine, cerulean blue, pyridian, emerald green, lead sulfate, yellow lead, zinc yellow, red bean (red iron (III) oxide), cadmium red, synthetic iron black Inorganic pigments such as amber or organic pigments can be used.
  • the alkali-developable photosensitive composition of the present invention can further contain an inorganic compound.
  • the inorganic compound include metal oxides such as nickel oxide, iron oxide, iridium oxide, titanium oxide, zinc oxide, magnesium oxide, calcium oxide, potassium oxide, silica, and alumina; lamellar clay mineral, miloli blue, calcium carbonate, Magnesium carbonate, cobalt, manganese, glass powder, mica, talc, kaolin, ferrocyanide, various metal sulfates, sulfides, selenides, aluminum silicate, calcium silicate, aluminum hydroxide, platinum, gold, silver, copper Among these, titanium oxide, silica, layered clay mineral, silver and the like are preferable.
  • These inorganic compounds are used, for example, as fillers, antireflection agents, conductive agents, stabilizers, flame retardants, mechanical strength improvers, special wavelength absorbers, ink repellents, and the like.
  • a dispersant can be added when a pigment and / or an inorganic compound is used.
  • the dispersant any colorant or inorganic compound can be used as long as it can disperse and stabilize, and commercially available dispersants such as BYK series manufactured by BYK Chemie can be used, and polyester having a basic functional group, Polymer dispersing agent made of polyether, polyurethane, nitrogen atom as basic functional group, functional group having nitrogen atom is amine and / or quaternary salt thereof, amine value is 1 to 100 mgKOH / g Those are preferably used.
  • the alkali-developable photosensitive composition of the present invention includes, if necessary, a thermal polymerization inhibitor such as p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, phenothiazine; a plasticizer; an adhesion promoter; Antifoaming agent; Leveling agent; Surface conditioner; Antioxidant; Ultraviolet absorber; Dispersion aid; Aggregation inhibitor; Catalyst; Effect promoter; Cross-linking agent; Can do.
  • a thermal polymerization inhibitor such as p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, phenothiazine
  • a plasticizer an adhesion promoter; Antifoaming agent; Leveling agent; Surface conditioner; Antioxidant; Ultraviolet absorber; Dispersion aid; Aggregation inhibitor; Catalyst; Effect promoter; Cross-linking agent; Can do.
  • an infrared-absorbing dye (A) a polymerizable compound (B) having an ethylenically unsaturated bond, having an alkali-soluble substituent that imparts alkali developability, and a photopolymerization initiator
  • the content of optional components other than (C) (excluding the solvent (D)) is appropriately selected according to the purpose of use and is not particularly limited, but is preferably an alkali-soluble substituent that gives the alkali developability.
  • the content of the polymerizable compound (B) having an ethylenically unsaturated bond is 50 parts by mass or less in total with respect to 100 parts by mass.
  • the alkali-developable photosensitive composition of the present invention by using another organic polymer together with the polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives the alkali developability, the alkali-developable photosensitive composition of the present invention. It is also possible to improve the properties of a cured product made of a product.
  • the organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly (meth) acrylic acid, styrene- (meth) acrylic acid copolymer, (meth) acrylic acid-methyl methacrylate.
  • Copolymer ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate polyvinyl butyral, cellulose ester, polyacrylamide, saturated Polyester, phenolic resin, phenoxy resin, polyamideimide resin, polyamic acid resin, epoxy resin, and the like.
  • polystyrene, (meth) acrylic acid-methyl methacrylate copolymer, and epoxy resin are included. Masui.
  • a monomer having an unsaturated bond a chain transfer agent, a sensitizer, a surfactant, a silane coupling agent, a melamine compound and the like can be further used.
  • Examples of the monomer having an unsaturated bond include 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, isobutyl acrylate, n-octyl acrylate, isooctyl acrylate, isononyl acrylate, stearyl acrylate, acrylic acid Methoxyethyl, dimethylaminoethyl acrylate, zinc acrylate, 1,6-hexanediol diacrylate, trimethylolpropane triacrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, butyl methacrylate, methacrylic acid Tertiary butyl, cyclohexyl methacrylate, trimethylolpropane trimethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pen Examples include erythritol tetraacrylate, pentaeryth
  • a sulfur atom-containing compound is generally used.
  • Alkyl compounds trimethylolpropane tris (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4- Methyl mercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate, butanediol bisthiopropionate, trimethylolpropane tristhiopropionate , Trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyl tristhiopropionate, the following compound no. C1, aliphatic polyfunctional thiol
  • the surfactant examples include fluorine surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates, anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates, and higher amines. Cationic surfactants such as halogenates and quaternary ammonium salts, nonionic surfactants such as polyethylene glycol alkyl ethers, polyethylene glycol fatty acid esters, sorbitan fatty acid esters and fatty acid monoglycerides, amphoteric surfactants, silicone surfactants Surfactants such as agents can be used, and these may be used in combination.
  • fluorine surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates
  • anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates,
  • silane coupling agent for example, a silane coupling agent manufactured by Shin-Etsu Chemical Co., Ltd. can be used. Among them, KBE-9007, KBM-502, KBE-403 and the like, silane cups having an isocyanate group, a methacryloyl group, and an epoxy group. A ring agent is preferably used.
  • Examples of the melamine compound include all or part of active methylol groups (CH 2 OH groups) in nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea. Mention may be made of compounds in which (at least two) are alkyl etherified.
  • examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, and a butyl group, which may be the same as or different from each other.
  • the methylol group that is not alkyletherified may be self-condensed within one molecule, or may be condensed between two molecules to form an oligomer component.
  • hexamethoxymethyl melamine, hexabutoxymethyl melamine, tetramethoxymethyl glycoluril, tetrabutoxymethyl glycoluril and the like can be used.
  • alkyl etherified melamines such as hexamethoxymethyl melamine and hexabutoxymethyl melamine are preferable.
  • the alkali-developable photosensitive composition of the present invention is a known method such as spin coater, roll coater, bar coater, die coater, curtain coater, various printing, dipping, soda glass, quartz glass, semiconductor substrate, metal, It can be applied on a supporting substrate such as paper or plastic. Moreover, after once applying on support bases, such as a film, it can also transfer on another support base
  • the active light source used for curing the alkali-developable photosensitive composition of the present invention may be a light source that emits light having a wavelength of 300 to 450 nm, such as ultra-high pressure mercury, mercury vapor.
  • An arc, carbon arc, xenon arc, or the like can be used.
  • the laser direct drawing method that directly forms an image from digital information such as a computer without using a mask improves not only productivity but also resolution and positional accuracy.
  • the laser beam light having a wavelength of 340 to 430 nm is preferably used, but an argon ion laser, a helium neon laser, a YAG laser, a semiconductor laser, etc. are visible to infrared region. Those that emit light are also used. When these lasers are used, a sensitizing dye that absorbs the region from visible to infrared is added.
  • the alkali-developable photosensitive composition (or cured product thereof) of the present invention is a photocurable paint or varnish, a photocurable adhesive, a printed circuit board, or a color television, a PC monitor, a portable information terminal, a digital camera, or the like.
  • the alkali-developable photosensitive composition of the present invention is useful as an alkali-developable photosensitive composition for forming a near infrared absorption filter.
  • the near-infrared absorption filter includes (1) a step of forming a coating film of the alkali-developable photosensitive composition of the present invention on a substrate, and (2) active light through a mask having a predetermined pattern shape on the coating film. (3) a step of developing the exposed film with a developer (particularly an alkali developer), and (4) a step of heating the film after development.
  • the alkali-developable photosensitive composition of the present invention is also useful as a photosensitive composition for an ink jet system or a transfer system without a development process.
  • Example 1 Alkali-developable photosensitive composition No. 1 Preparation of Compound No. 1 as component (A) 0.16 g of 1-1 bis (trifluoromethanesulfonyl) imide salt and 3.70 g of dimethylacetamide as a part of component (D) were added and dissolved by stirring.
  • the near-infrared absorption filter formed using the cured product of the alkali-developable photosensitive composition of the present invention has low transmittance at a wavelength of 900 to 1100 nm, that is, effective. Infrared rays are also blocked and light resistance is high. In addition, since the cured product has high alkali resistance, it has excellent photolithography characteristics.

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Abstract

This alkali developable photosensitive composition contains an infrared absorbing dye (A), a polymerizable compound (B) having an ethylenically unsaturated bond and an alkali-soluble substituent group that imparts alkali developability, a photopolymerization initiator (C) and a solvent (D), wherein the photopolymerization initiator (C) contains an oxime ester compound. The aforementioned photopolymerization initiator (C) preferably contains a compound represented by general formula (I). (Refer to the description for definitions of R1, R2, R3, R4, X, a and b in the formula.)

Description

アルカリ現像性感光性組成物Alkali-developable photosensitive composition
 本発明は、赤外線吸収色素を含有するアルカリ現像性感光性組成物、及び該アルカリ現像性感光性組成物を用いた近赤外線吸収フィルターに関する。 The present invention relates to an alkali-developable photosensitive composition containing an infrared-absorbing dye, and a near-infrared absorbing filter using the alkali-developable photosensitive composition.
 赤外線吸収色素を含有する感光性組成物は、様々な用途に用いられている。
 特許文献1には、近赤外線光を照射して硬化する感光性着色組成物を用いたカラーフィルターが開示されており、特許文献2には、近赤外領域の波長を遮蔽できるプラズマディスプレイパネル用フィルターが開示されており、特許文献3には、アルカリ可溶性樹脂及び赤外線吸収染料を含む粒子状マット剤を用いた赤外線感光性平版印刷板が開示されており、特許文献4には、近赤外吸収色素を含有する硬化性組成物を用いた近赤外吸収フィルターが開示されている。
 しかし、これらの文献に記載の感光性組成物は、耐光性の点で満足できるものではなかった。
Photosensitive compositions containing infrared absorbing dyes are used in various applications.
Patent Document 1 discloses a color filter using a photosensitive coloring composition that is cured by irradiation with near-infrared light, and Patent Document 2 discloses a plasma display panel that can block wavelengths in the near-infrared region. A filter is disclosed. Patent Document 3 discloses an infrared-sensitive lithographic printing plate using a particulate matting agent containing an alkali-soluble resin and an infrared-absorbing dye. Patent Document 4 discloses a near-infrared light. A near infrared absorption filter using a curable composition containing an absorbing dye is disclosed.
However, the photosensitive compositions described in these documents are not satisfactory in terms of light resistance.
特開平9-230126号公報JP-A-9-230126 US2004090170A1US2004090170A1 US2008035000A1US2008035000A1 US2011070407A1US2011070407A1
 従って、本発明の目的は、耐光性に優れるアルカリ現像性感光性組成物を提供することにある。また、本発明の別の目的は、上記アルカリ現像性感光性組成物を用いた近赤外吸収フィルターを提供することにある。 Accordingly, an object of the present invention is to provide an alkali-developable photosensitive composition having excellent light resistance. Another object of the present invention is to provide a near-infrared absorption filter using the alkali-developable photosensitive composition.
 本発明者等は、鋭意検討を重ねた結果、光重合開始剤としてオキシムエステル化合物を用いたアルカリ現像性感光性組成物の硬化物が耐光性に優れることを知見し、また、上記アルカリ現像性感光性組成物が、近赤外吸収フィルターに好適であることを知見し、本発明に到達した。 As a result of intensive studies, the present inventors have found that a cured product of an alkali-developable photosensitive composition using an oxime ester compound as a photopolymerization initiator is excellent in light resistance, and the alkali-developable feeling described above. The present inventors have found that the light composition is suitable for a near-infrared absorption filter, and have reached the present invention.
 本発明は、赤外線吸収色素(A)、アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)、光重合開始剤(C)及び溶媒(D)を含有し、上記光重合開始剤(C)がオキシムエステル化合物を含有するアルカリ現像性感光性組成物を提供するものである。 The present invention relates to an infrared-absorbing dye (A), a polymerizable compound (B) having an alkali-soluble substituent that imparts alkali developability, an ethylenically unsaturated bond, a photopolymerization initiator (C), and a solvent (D). And an alkali developable photosensitive composition in which the photopolymerization initiator (C) contains an oxime ester compound.
 また、本発明は、上記アルカリ現像性感光性組成物の硬化物及び該硬化物を用いて形成される近赤外線吸収フィルターを提供するものである。 The present invention also provides a cured product of the alkali-developable photosensitive composition and a near-infrared absorbing filter formed using the cured product.
 本発明によれば、光重合開始剤としてオキシムエステル化合物を含有するアルカリ現像性感光性組成物は耐光性に優れるものである。また、その硬化物を用いて形成された近赤外線吸収フィルターは、波長900~1100nmにおいて透過率が低く有効に赤外線を遮断し、また硬化物の耐アルカリ性が高いためフォトリソグラフィー特性に優れる。 According to the present invention, the alkali-developable photosensitive composition containing an oxime ester compound as a photopolymerization initiator is excellent in light resistance. In addition, a near-infrared absorption filter formed using the cured product has a low transmittance at a wavelength of 900 to 1100 nm, effectively blocks infrared rays, and has excellent photolithography characteristics because the cured product has high alkali resistance.
 以下、本発明のアルカリ現像性感光性組成物について、好ましい実施形態に基づき説明する。 Hereinafter, the alkali-developable photosensitive composition of the present invention will be described based on preferred embodiments.
 本発明のアルカリ現像性感光性組成物は、赤外線吸収色素(A)、アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)、光重合開始剤(C)及び溶媒(D)を含有する。以下、各成分について順に説明する。 The alkali-developable photosensitive composition of the present invention comprises an infrared-absorbing dye (A), a polymerizable compound (B) having an ethylenically unsaturated bond, having an alkali-soluble substituent that imparts alkali developability, and a photopolymerization initiator. (C) and a solvent (D) are contained. Hereinafter, each component will be described in order.
<赤外線吸収色素(A)>
 本発明のアルカリ現像性感光性組成物に用いられる赤外線吸収色素(A)は、赤外領域に特性吸収を有し従来赤外線吸収色素として用いられているものを用いることができ、例えば、シアニン化合物、スクアリリウム化合物、ポルフィリン化合物、金属ジチオール錯体、クロム、コバルト金属錯塩化合物、アントラキノン類、フタロシアニン化合物、ナフタロシアニン化合物、ジイモニウム化合物、無機酸化物粒子等が挙げられ、中でもジイモニウム化合物が、赤外線の吸収能が高く可視光領域での透明性が高いことから好ましい。
<Infrared absorbing dye (A)>
As the infrared absorbing dye (A) used in the alkali-developable photosensitive composition of the present invention, those having characteristic absorption in the infrared region and conventionally used as infrared absorbing dyes can be used. For example, cyanine compounds , Squarylium compound, porphyrin compound, metal dithiol complex, chromium, cobalt metal complex salt compound, anthraquinones, phthalocyanine compound, naphthalocyanine compound, diimonium compound, inorganic oxide particles, etc., among which diimonium compound has infrared absorption ability It is preferable because of high transparency in the visible light region.
 上記ジイモニウム化合物の中でも、下記一般式(II)で表されるものが、感光性組成物の硬化物の耐光性に優れるためさらに好ましい。 Among the above diimonium compounds, those represented by the following general formula (II) are more preferable because they are excellent in light resistance of a cured product of the photosensitive composition.
Figure JPOXMLDOC01-appb-C000003
(式中、R19、R20、R21、R22、R23、R24、R25及びR26はそれぞれ独立に、水素原子又は置換基を有してもよい炭素原子数1~10のアルキル基を表し、R27、R28、R29及びR30はそれぞれ独立に、水素原子、ハロゲン原子、置換基を有してもよい炭素原子数1~10のアルキル基又は置換基を有してもよいアミノ基を表し、上記アルキル基中のメチレン基は、-O-又は-CH=CH-で中断されていてもよく、tは1~4の数を表し、Anq-はq価のアニオンを表し、qは1又は2を表し、pは電荷を中性に保つ係数を表す。)
Figure JPOXMLDOC01-appb-C000003
(In the formula, R 19 , R 20 , R 21 , R 22 , R 23 , R 24 , R 25 and R 26 each independently has 1 to 10 carbon atoms which may have a hydrogen atom or a substituent. Represents an alkyl group, and each of R 27 , R 28 , R 29 and R 30 independently has a hydrogen atom, a halogen atom, or an alkyl group having 1 to 10 carbon atoms which may have a substituent or a substituent. An methylene group in the alkyl group may be interrupted by —O— or —CH═CH—, t represents a number of 1 to 4, and An q− represents a q valence. Q represents 1 or 2, and p represents a coefficient for keeping the charge neutral.)
 上記一般式(II)中、R19、R20、R21、R22、R23、R24、R25、R26、R27、R28、R29及びR30で表される置換基を有してもよい炭素原子数1~10のアルキル基としては、メチル、エチル、プロピル、イソプロピル、ブチル、第二ブチル、第三ブチル、イソブチル、アミル、イソアミル、第三アミル、ヘキシル、シクロヘキシル、シクロヘキシルメチル、シクロヘキシルエチル、ヘプチル、イソヘプチル、第三ヘプチル、n-オクチル、イソオクチル、第三オクチル、2-エチルヘキシル、トリフルオロメチル、トリクロロメチル、トリブロモメチル、1,2-ジクロロエチル、3,3,3-トリフルオロプロピル、プロパ-1-エン-1-イル等が挙げられ、
 R27、R28、R29及びR30で表されるハロゲン原子としては、フッ素原子、塩素原子、臭素原子、ヨウ素原子等が挙げられ、
 R27、R28、R29及びR30で表される置換基を有してもよいアミノ基としては、アミノ、エチルアミノ、ジメチルアミノ、ジエチルアミノ、ブチルアミノ、シクロペンチルアミノ、2-エチルヘキシルアミノ、ドデシルアミノ、アニリノ、クロロフェニルアミノ、トルイジノ、アニシジノ、N-メチル-アニリノ、ジフェニルアミノ,ナフチルアミノ、2-ピリジルアミノ、メトキシカルボニルアミノ、フェノキシカルボニルアミノ、アセチルアミノ、ベンゾイルアミノ、ホルミルアミノ、ピバロイルアミノ、ラウロイルアミノ、カルバモイルアミノ、N,N-ジメチルアミノカルボニルアミノ、N,N-ジエチルアミノカルボニルアミノ、モルホリノカルボニルアミノ、メトキシカルボニルアミノ、エトキシカルボニルアミノ、t-ブトキシカルボニルアミノ、n-オクタデシルオキシカルボニルアミノ、N-メチル-メトキシカルボニルアミノ、フェノキシカルボニルアミノ、スルファモイルアミノ、N,N-ジメチルアミノスルホニルアミノ、メチルスルホニルアミノ、ブチルスルホニルアミノ、フェニルスルホニルアミノ等が挙げられる。
In the above general formula (II), substituents represented by R 19 , R 20 , R 21 , R 22 , R 23 , R 24 , R 25 , R 26 , R 27 , R 28 , R 29 and R 30 Examples of the alkyl group having 1 to 10 carbon atoms that may have are methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, isobutyl, amyl, isoamyl, tert-amyl, hexyl, cyclohexyl, cyclohexyl Methyl, cyclohexylethyl, heptyl, isoheptyl, tertiary heptyl, n-octyl, isooctyl, tertiary octyl, 2-ethylhexyl, trifluoromethyl, trichloromethyl, tribromomethyl, 1,2-dichloroethyl, 3,3,3 -Trifluoropropyl, prop-1-en-1-yl and the like,
Examples of the halogen atom represented by R 27 , R 28 , R 29 and R 30 include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom.
Examples of the amino group which may have a substituent represented by R 27 , R 28 , R 29 and R 30 include amino, ethylamino, dimethylamino, diethylamino, butylamino, cyclopentylamino, 2-ethylhexylamino, dodecyl Amino, anilino, chlorophenylamino, toluidino, anisidino, N-methyl-anilino, diphenylamino, naphthylamino, 2-pyridylamino, methoxycarbonylamino, phenoxycarbonylamino, acetylamino, benzoylamino, formylamino, pivaloylamino, lauroylamino, carbamoyl Amino, N, N-dimethylaminocarbonylamino, N, N-diethylaminocarbonylamino, morpholinocarbonylamino, methoxycarbonylamino, ethoxycarbonylamino, t-but Cicarbonylamino, n-octadecyloxycarbonylamino, N-methyl-methoxycarbonylamino, phenoxycarbonylamino, sulfamoylamino, N, N-dimethylaminosulfonylamino, methylsulfonylamino, butylsulfonylamino, phenylsulfonylamino, etc. Can be mentioned.
 上記一般式(II)中のpAnq-で表されるq価のアニオンとしては、メタンスルホン酸アニオン、ドデシルスルホン酸アニオン、ベンゼンスルホン酸アニオン、トルエンスルホン酸アニオン、トリフルオロメタンスルホン酸アニオン、ナフタレンスルホン酸アニオン、ジフェニルアミン-4-スルホン酸アニオン、2-アミノ-4-メチル-5-クロロベンゼンスルホン酸アニオン、2-アミノ-5-ニトロベンゼンスルホン酸アニオン、特開平10-235999号公報、特開平10-337959号公報、特開平11-102088号公報、特開2000-108510号公報、特開2000-168223号公報、特開2001-209969号公報、特開2001-322354号公報、特開2006-248180号公報、特開2006-297907号公報、特開平8-253705号公報、特表2004-503379号公報、特開2005-336150号公報、国際公開2006/28006号公報等に記載されたスルホン酸アニオン等の有機スルホン酸アニオンの他、塩化物イオン、臭化物イオン、ヨウ化物イオン、フッ化物イオン、塩素酸イオン、チオシアン酸イオン、過塩素酸イオン、ヘキサフルオロリン酸イオン、ヘキサフルオロアンチモン酸イオン、テトラフルオロホウ酸イオン、オクチルリン酸イオン、ドデシルリン酸イオン、オクタデシルリン酸イオン、フェニルリン酸イオン、ノニルフェニルリン酸イオン、2,2’-メチレンビス(4,6-ジ-t-ブチルフェニル)ホスホン酸イオン、テトラキス(ペンタフルオロフェニル)ホウ酸イオン、スルホニルイミドアニオン、励起状態にある活性分子を脱励起させる(クエンチングさせる)機能を有するクエンチャー陰イオンやシクロペンタジエニル環にカルボキシル基やホスホン酸基、スルホン酸基等の陰イオン性基を有するフェロセン、ルテオセン等のメタロセン化合物陰イオン等が挙げられる。 Examples of the q-valent anion represented by pAn q- in the general formula (II) include methanesulfonate anion, dodecylsulfonate anion, benzenesulfonate anion, toluenesulfonate anion, trifluoromethanesulfonate anion, naphthalenesulfone. Acid anion, diphenylamine-4-sulfonic acid anion, 2-amino-4-methyl-5-chlorobenzenesulfonic acid anion, 2-amino-5-nitrobenzenesulfonic acid anion, JP-A-10-235999, JP-A-10-337959 No. 1, JP-A No. 11-102808, JP-A No. 2000-108510, JP-A No. 2000-168223, JP-A No. 2001-209969, JP-A No. 2001-322354, JP-A No. 2006-248180 , JP 2 Organic sulfonic acids such as sulfonate anions described in Japanese Patent Application Laid-Open No. 06-297907, Japanese Patent Application Laid-Open No. 8-253705, Japanese Patent Application Publication No. 2004-503379, Japanese Patent Application Laid-Open No. 2005-336150, International Publication No. 2006/28006, etc. In addition to anions, chloride ions, bromide ions, iodide ions, fluoride ions, chlorate ions, thiocyanate ions, perchlorate ions, hexafluorophosphate ions, hexafluoroantimonate ions, tetrafluoroborate ions, Octyl phosphate ion, dodecyl phosphate ion, octadecyl phosphate ion, phenyl phosphate ion, nonylphenyl phosphate ion, 2,2'-methylenebis (4,6-di-t-butylphenyl) phosphonate ion, tetrakis (penta Fluorophenyl) borate ion, sulfur Phosphonimide anion, quencher anion that has the function of deexciting (quenching) active molecules in the excited state, and anionic groups such as carboxyl, phosphonic acid, and sulfonic acid groups on the cyclopentadienyl ring And metallocene compound anions such as ferrocene and luteocene.
 本発明に係る上記一般式(II)で表される化合物の具体例としては、下記化合物No.1-1~1-8が挙げられる。なお、以下の例示では、アニオンを省いたカチオンで示している。 Specific examples of the compound represented by the general formula (II) according to the present invention include the following compound No. 1-1 to 1-8. In addition, in the following illustration, it has shown with the cation which excluded the anion.
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 上記赤外線吸収色素(A)は、単独又は複数種を組み合わせて用いることができる。
 上記赤外線吸収色素(A)において、上記一般式(II)で表わされる化合物の含有量は、好ましくは50~100質量%、より好ましくは70~100質量%である。上記一般式(II)で表わされる化合物の含有量が50質量%より小さいと、溶媒への溶解性が低下したり、硬化物の安定性が低下したりする場合がある。
The said infrared absorption pigment | dye (A) can be used individually or in combination of multiple types.
In the infrared absorbing dye (A), the content of the compound represented by the general formula (II) is preferably 50 to 100% by mass, more preferably 70 to 100% by mass. When the content of the compound represented by the general formula (II) is less than 50% by mass, the solubility in a solvent may be lowered, or the stability of a cured product may be lowered.
 上記赤外線吸収色素(A)の含有量は、本発明のアルカリ現像性感光性組成物中、好ましくは0.01~50質量%、より好ましくは0.05~30質量%である。 The content of the infrared absorbing dye (A) is preferably 0.01 to 50% by mass, more preferably 0.05 to 30% by mass in the alkali-developable photosensitive composition of the present invention.
 上記赤外線吸収色素(A)は、硬化物の極大吸収波長(λmax)が700nm以上であるのが好ましく、780~850nmがさらに好ましい。硬化物の極大吸収波長(λmax)が700nm未満であると、目的の波長の光を吸収しないため好ましくない。 The infrared absorption dye (A) preferably has a maximum absorption wavelength (λmax) of the cured product of 700 nm or more, more preferably 780 to 850 nm. If the maximum absorption wavelength (λmax) of the cured product is less than 700 nm, it does not absorb light of the target wavelength, which is not preferable.
<アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)>
 アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)としては、特に限定されず、従来、アルカリ現像性感光性組成物に用いられているものを用いることができるが、例えば、(メタ)アクリル酸、α―クロルアクリル酸、イタコン酸、マレイン酸、シトラコン酸、フマル酸、ハイミック酸、クロトン酸、イソクロトン酸、ビニル酢酸、アリル酢酸、桂皮酸、ソルビン酸、メサコン酸、コハク酸モノ[2-(メタ)アクリロイロキシエチル]、フタル酸モノ[2-(メタ)アクリロイロキシエチル]、ω-カルボキシポリカプロラクトンモノ(メタ)アクリレート等の両末端にカルボキシ基と水酸基とを有するポリマーのモノ(メタ)アクリレート、ヒドロキシエチル(メタ)アクリレート・マレート、ヒドロキシプロピル(メタ)アクリレート・マレート、ジシクロペンタジエン・マレート或いは1個のカルボキシル基と2個以上の(メタ)アクリロイル基とを有する多官能(メタ)アクリレート等の不飽和多塩基酸;ペンタエリスリトールトリアクリレート、ジペンタエリスリトールペンタアクリレート等の水酸基含有多官能アクリレートと無水コハク酸、無水フタル酸、テトラヒドロ無水フタル酸等の二塩基酸無水物の反応物である酸価を有する多官能アクリレート;メチル(メタ)アクリレート、エチル(メタ)アクリレート、プロピル(メタ)アクリレート、イソプロピル(メタ)アクリレー ト、ブチル(メタ)アクリレート、イソブチル(メタ)アクリレート、t-ブチル(メタ)アクリレート、ベンジル(メタ)アクリレート、フェニル(メタ)アクリレート、シクロヘキシル(メタ)アクリレート、フェノキシエチル(メタ)アクリレート、2-エチルヘキシル(メタ)アクリレート、イソボルニル(メタ)アクリレート、2-ヒドロキシエチル(メタ)アクリレート、テトラヒドロフルフリル(メタ)アクリレート等の(メタ)アクリル酸エステル類;N-ビニルピロリドン;スチレン及びその誘導体、α-メチルスチレン等のスチレン類;(メタ)アクリルアミド、メチロール(メタ)アクリルアミド、アルコキシメチロール(メタ)アクリルアミド、ジアセトン(メタ)アクリルアミド等のアクリルアミド類;(メタ)アクリロニトリル、エチレン、プロピレン、ブチレン、塩化ビニル、酢酸ビニル等のその他のビニル化合物、及びポリメチルメタクリレートマクロモノマー、ポリスチレンマクロモノマー等のマクロモノマー類、トリシクロデカン骨格のモノメタクリレート、N-フェニルマレイミド、メタクリロイルオキシメチル-3-エチルオキセタン等と、(メタ)アクリル酸との共重合体及びこれらに昭和電工社製カレンズMOI、AOIのような不飽和結合を有するイソシアネート化合物を反応させた(メタ)アクリル酸の共重合体や、フェノール及び/又はクレゾールノボラックエポキシ樹脂、ビフェニル骨格、ナフタレン骨格を有するノボラックエポキシ樹脂、ビスフェノールAノボラック型エポキシ化合物、ジシクロペンタジエンノボラック型エポキシ化合物等のノボラック型エポキシ化合物、多官能エポキシ基を有するポリフェニルメタン型エポキシ樹脂、下記一般式(1)で表されるエポキシ化合物等のエポキシ基に不飽和一塩基酸を作用させ、更に多塩基酸無水物を作用させて得られた樹脂を用いることができる。これらのモノマーは、1種を単独で、又は2種以上を混合して用いることができる。また、上記アルカリ現像性を有する、エチレン性不飽和結合を有する化合物(B)は、不飽和基を0.2~1.0当量含有していることが好ましい。
<Polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives alkali developability>
The polymerizable compound (B) having an alkali-soluble substituent that gives alkali developability and having an ethylenically unsaturated bond is not particularly limited, and those conventionally used for alkali-developable photosensitive compositions are used. For example, (meth) acrylic acid, α-chloroacrylic acid, itaconic acid, maleic acid, citraconic acid, fumaric acid, hymic acid, crotonic acid, isocrotonic acid, vinyl acetic acid, allyl acetic acid, cinnamic acid, Both ends of sorbic acid, mesaconic acid, succinic acid mono [2- (meth) acryloyloxyethyl], phthalic acid mono [2- (meth) acryloyloxyethyl], ω-carboxypolycaprolactone mono (meth) acrylate, etc. Mono (meth) acrylate and hydroxyethyl (meth) acrylate of polymer having carboxy group and hydroxyl group Unsaturated polybasic compounds such as poly (meth) acrylates having one carboxyl group and two or more (meth) acryloyl groups, or thiolate malate, hydroxypropyl (meth) acrylate malate, dicyclopentadiene malate Acid: a polyfunctional compound having an acid value that is a reaction product of a hydroxyl group-containing polyfunctional acrylate such as pentaerythritol triacrylate or dipentaerythritol pentaacrylate and a dibasic acid anhydride such as succinic anhydride, phthalic anhydride, or tetrahydrophthalic anhydride Acrylate: methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, isopropyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, t-butyl (meth) acrylate, benzyl (meth) A) Chrylate, phenyl (meth) acrylate, cyclohexyl (meth) acrylate, phenoxyethyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, isobornyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, tetrahydrofurfuryl (meth) (Meth) acrylic acid esters such as acrylate; N-vinylpyrrolidone; styrene and its derivatives, styrenes such as α-methylstyrene; (meth) acrylamide, methylol (meth) acrylamide, alkoxymethylol (meth) acrylamide, diacetone ( Acrylamides such as (meth) acrylamide; (meth) acrylonitrile, other vinyl compounds such as ethylene, propylene, butylene, vinyl chloride, vinyl acetate, and polymethyl methacrylate Copolymers of (meth) acrylic acid and macromonomers such as acrylate macromonomer and polystyrene macromonomer, tricyclodecane skeleton monomethacrylate, N-phenylmaleimide, methacryloyloxymethyl-3-ethyloxetane, etc. (Meth) acrylic acid copolymer, phenol and / or cresol novolac epoxy resin, biphenyl skeleton, naphthalene skeleton obtained by reacting an isocyanate compound having an unsaturated bond such as Karenz MOI and AOI manufactured by Showa Denko KK Novolac epoxy resins, bisphenol A novolac epoxy compounds, novolac epoxy compounds such as dicyclopentadiene novolac epoxy compounds, polyphenylmethane epoxy resins having polyfunctional epoxy groups, and the following general formula Resins obtained by allowing an unsaturated monobasic acid to act on an epoxy group such as an epoxy compound represented by (1) and further causing a polybasic acid anhydride to act on it can be used. These monomers can be used individually by 1 type or in mixture of 2 or more types. The compound (B) having an alkali developability and having an ethylenically unsaturated bond preferably contains 0.2 to 1.0 equivalent of an unsaturated group.
Figure JPOXMLDOC01-appb-C000005
(式中、X1は直接結合、メチレン基、炭素原子数1~4のアルキリデン基、炭素原子数3~20の脂環式炭化水素基、-O-、-S-、-SO2-、-SS-、-SO-、-CO-、-OCO-又は下記式(イ)、(ロ)若しくは(ハ)で表される置換基を表し、該アルキリデン基はハロゲン原子で置換されていてもよく、R31、R32、R33及びR34は、それぞれ独立に、水素原子、炭素原子数1~5のアルキル基、炭素原子数1~8のアルコキシ基、炭素原子数2~5のアルケニル基又はハロゲン原子を表し、上記アルキル基、アルコキシ基及びアルケニル基はハロゲン原子で置換されていてもよく、mは0~10の整数である。)
Figure JPOXMLDOC01-appb-C000005
Wherein X 1 is a direct bond, a methylene group, an alkylidene group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, —O—, —S—, —SO 2 —, —SS—, —SO—, —CO—, —OCO—, or a substituent represented by the following formula (A), (B) or (C), wherein the alkylidene group may be substituted with a halogen atom R 31 , R 32 , R 33 and R 34 are each independently a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, or an alkenyl having 2 to 5 carbon atoms. Represents a group or a halogen atom, and the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom, and m is an integer of 0 to 10.)
Figure JPOXMLDOC01-appb-C000006
(式中、Z1は水素原子、炭素原子数1~10のアルキル基若しくは炭素原子数1~10のアルコキシ基により置換されていてもよいフェニル基、又は炭素原子数1~10のアルキル基若しくは炭素原子数1~10のアルコキシ基により置換されていてもよい炭素原子数3~10のシクロアルキル基を表し、Y1は炭素原子数1~10のアルキル基、炭素原子数1~10のアルコキシ基、炭素原子数2~10のアルケニル基又はハロゲン原子を表し、上記アルキル基、アルコキシ基及びアルケニル基はハロゲン原子で置換されていてもよく、dは0~5の整数である。)
Figure JPOXMLDOC01-appb-C000006
(Wherein Z 1 is a hydrogen atom, a phenyl group optionally substituted by an alkyl group having 1 to 10 carbon atoms or an alkoxy group having 1 to 10 carbon atoms, or an alkyl group having 1 to 10 carbon atoms, or A cycloalkyl group having 3 to 10 carbon atoms which may be substituted by an alkoxy group having 1 to 10 carbon atoms, Y 1 is an alkyl group having 1 to 10 carbon atoms, alkoxy having 1 to 10 carbon atoms A group, an alkenyl group having 2 to 10 carbon atoms or a halogen atom, wherein the alkyl group, alkoxy group and alkenyl group may be substituted with a halogen atom, and d is an integer of 0 to 5).
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000008
(式中、Y2及びZ2は、それぞれ独立して、ハロゲン原子で置換されていてもよい炭素原子数1~10のアルキル基、ハロゲン原子で置換されていてもよい炭素原子数6~20のアリール基、ハロゲン原子で置換されていてもよい炭素原子数6~20のアリールオキシ基、ハロゲン原子で置換されていてもよい炭素原子数6~20のアリールチオ基、ハロゲン原子で置換されていてもよい炭素原子数6~20のアリールアルケニル基、ハロゲン原子で置換されていてもよい炭素原子数7~20のアリールアルキル基、ハロゲン原子で置換されていてもよい炭素原子数2~20の複素環基、又はハロゲン原子を表し、上記アルキル基及びアリールアルキル基中のアルキレン部分は、不飽和結合、-O-又は-S-で中断されていてもよく、Z2は、隣接するZ2同士で環を形成していてもよく、pは0~4の整数を表し、qは0~8の整数を表し、rは0~4の整数を表し、sは0~4の整数を表し、rとsの数の合計は2~4の整数である。)
Figure JPOXMLDOC01-appb-C000008
Wherein Y 2 and Z 2 are each independently an alkyl group having 1 to 10 carbon atoms which may be substituted with a halogen atom, or 6 to 20 carbon atoms which may be substituted with a halogen atom. An aryloxy group having 6 to 20 carbon atoms which may be substituted with a halogen atom, an arylthio group having 6 to 20 carbon atoms which may be substituted with a halogen atom, or a halogen atom An arylalkenyl group having 6 to 20 carbon atoms, an arylalkyl group having 7 to 20 carbon atoms that may be substituted with a halogen atom, or a complex having 2 to 20 carbon atoms that may be substituted with a halogen atom ring group, or a halogen atom, the alkylene moiety in the alkyl group and arylalkyl group, an unsaturated bond, may be interrupted by -O- or -S-, Z 2 , May form a ring with the adjacent Z 2 together, p represents an integer of 0 to 4, q represents an integer of 0 to 8, r represents an integer of 0 to 4, s is 0 ~ Represents an integer of 4, and the sum of r and s is an integer of 2 to 4.)
 上記エポキシ化合物のエポキシ基に作用させる上記不飽和一塩基酸としては、アクリル酸、メタクリル酸、クロトン酸、桂皮酸、ソルビン酸、ヒドロキシエチルメタクリレート・マレート、等が挙げられる。ヒドロキシエチルアクリレート・マレート、ヒドロキシプロピルメタクリレート・マレート、ヒドロキシプロピルアクリレート・マレート、ジシクロペンタジエン・マレート等が挙げられる。
 また、上記不飽和一塩基酸を作用させた後に作用させる上記多塩基酸無水物としては、ビフェニルテトラカルボン酸二無水物、テトラヒドロ無水フタル酸、無水コハク酸、無水マレイン酸、トリメリット酸無水物、ピロメリット酸無水物、2,2'-3,3'-ベンゾフェノンテトラカルボン酸無水物、エチレングリコールビスアンヒドロトリメリテート、グリセロールトリスアンヒドロトリメリテート、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、ナジック酸無水物、メチルナジック酸無水物、トリアルキルテトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、5-(2,5-ジオキソテトラヒドロフリル)-3-メチル-3-シクロヘキセン-1,2-ジカルボン酸無水物、トリアルキルテトラヒドロ無水フタル酸-無水マレイン酸付加物、ドデセニル無水コハク酸、無水メチルハイミック酸等が挙げられる。
Examples of the unsaturated monobasic acid that acts on the epoxy group of the epoxy compound include acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, sorbic acid, hydroxyethyl methacrylate / malate, and the like. Examples thereof include hydroxyethyl acrylate / malate, hydroxypropyl methacrylate / malate, hydroxypropyl acrylate / malate, and dicyclopentadiene / malate.
In addition, the polybasic acid anhydride to be acted after the unsaturated monobasic acid is allowed to act is biphenyltetracarboxylic dianhydride, tetrahydrophthalic anhydride, succinic anhydride, maleic anhydride, trimellitic anhydride , Pyromellitic anhydride, 2,2'-3,3'-benzophenone tetracarboxylic anhydride, ethylene glycol bisanhydro trimellitate, glycerol tris anhydro trimellitate, hexahydro phthalic anhydride, methyl tetrahydro phthalic anhydride Acid, nadic anhydride, methyl nadic anhydride, trialkyltetrahydrophthalic anhydride, hexahydrophthalic anhydride, 5- (2,5-dioxotetrahydrofuryl) -3-methyl-3-cyclohexene-1,2- Dicarboxylic anhydride, trialkyltetrahydrophthalic anhydride Maleic anhydride adduct, dodecenyl succinic anhydride, and anhydride and methyl high Mick acid.
 上記エポキシ化合物、上記不飽和一塩基酸及び上記多塩基酸無水物の反応モル比は、以下の通りとすることが好ましい。即ち、上記エポキシ化合物のエポキシ基1個に対し、上記不飽和一塩基酸のカルボキシル基が0.1~1.0個で付加させた構造を有するエポキシ付加物において、該エポキシ付加物の水酸基1個に対し、上記多塩基酸無水物の酸無水物構造が0.1~1.0個となる比率となるようにするのが好ましい。
 上記エポキシ化合物、上記不飽和一塩基酸及び上記多塩基酸無水物の反応は、常法に従って行なうことができる。
The reaction molar ratio of the epoxy compound, the unsaturated monobasic acid and the polybasic acid anhydride is preferably as follows. That is, in an epoxy adduct having a structure in which 0.1 to 1.0 carboxyl groups of the unsaturated monobasic acid are added to one epoxy group of the epoxy compound, the hydroxyl group 1 of the epoxy adduct is It is preferable that the ratio of the acid anhydride structure of the polybasic acid anhydride is 0.1 to 1.0.
Reaction of the said epoxy compound, the said unsaturated monobasic acid, and the said polybasic acid anhydride can be performed in accordance with a conventional method.
 酸価調整して本発明のアルカリ現像性感光性組成物の現像性を改良するため、上記アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する化合物(B)と共に、更に単官能又は多官能エポキシ化合物を用いることができる。上記エチレン性不飽和結合を有するアルカリ現像性化合物は、固形分の酸価が5~120mgKOH/gの範囲であることが好ましく、単官能又は多官能エポキシ化合物の使用量は、上記酸価を満たすように選択するのが好ましい。 In order to improve the developability of the alkali-developable photosensitive composition of the present invention by adjusting the acid value, together with the compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives the alkali developability, Furthermore, a monofunctional or polyfunctional epoxy compound can be used. The alkali-developable compound having an ethylenically unsaturated bond preferably has a solid content acid value in the range of 5 to 120 mgKOH / g, and the use amount of the monofunctional or polyfunctional epoxy compound satisfies the acid value. It is preferable to select as follows.
 上記単官能エポキシ化合物としては、グリシジルメタクリレート、メチルグリシジルエーテル、エチルグリシジルエーテル、プロピルグリシジルエーテル、イソプロピルグリシジルエーテル、ブチルグリシジルエーテル、イソブチルグリシジルエーテル、t-ブチルグリシジルエーテル、ペンチルグリシジルエーテル、ヘキシルグリシジルエーテル、ヘプチルグリシジルエーテル、オクチルグリシジルエーテル、ノニルグリシジルエーテル、デシルグリシジルエーテル、ウンデシルグリシジルエーテル、ドデシルグリシジルエーテル、トリデシルグリシジルエーテル、テトラデシルグリシジルエーテル、ペンタデシルグリシジルエーテル、ヘキサデシルグリシジルエーテル、2-エチルヘキシルグリシジルエーテル、アリルグリシジルエーテル、プロパルギルグリシジルエーテル、p-メトキシエチルグリシジルエーテル、フェニルグリシジルエーテル、p-メトキシグリシジルエーテル、p-ブチルフェノールグリシジルエーテル、クレジルグリシジルエーテル、2-メチルクレジルグリシジルエーテル、4-ノニルフェニルグリシジルエーテル、ベンジルグリシジルエーテル、p-クミルフェニルグリシジルエーテル、トリチルグリシジルエーテル、2,3-エポキシプロピルメタクリレート、エポキシ化大豆油、エポキシ化アマニ油、グリシジルブチレート、ビニルシクロヘキサンモノオキシド、1,2-エポキシ-4-ビニルシクロヘキサン、スチレンオキシド、ピネンオキシド、メチルスチレンオキシド、シクロヘキセンオキシド、プロピレンオキシド、下記化合物No.A2、No.A3等が挙げられる。 Examples of the monofunctional epoxy compound include glycidyl methacrylate, methyl glycidyl ether, ethyl glycidyl ether, propyl glycidyl ether, isopropyl glycidyl ether, butyl glycidyl ether, isobutyl glycidyl ether, t-butyl glycidyl ether, pentyl glycidyl ether, hexyl glycidyl ether, heptyl Glycidyl ether, octyl glycidyl ether, nonyl glycidyl ether, decyl glycidyl ether, undecyl glycidyl ether, dodecyl glycidyl ether, tridecyl glycidyl ether, tetradecyl glycidyl ether, pentadecyl glycidyl ether, hexadecyl glycidyl ether, 2-ethylhexyl glycidyl ether, Allyl glycidyl A , Propargyl glycidyl ether, p-methoxyethyl glycidyl ether, phenyl glycidyl ether, p-methoxy glycidyl ether, p-butylphenol glycidyl ether, cresyl glycidyl ether, 2-methyl cresyl glycidyl ether, 4-nonylphenyl glycidyl ether, benzyl Glycidyl ether, p-cumylphenyl glycidyl ether, trityl glycidyl ether, 2,3-epoxypropyl methacrylate, epoxidized soybean oil, epoxidized linseed oil, glycidyl butyrate, vinylcyclohexane monooxide, 1,2-epoxy-4- Vinylcyclohexane, styrene oxide, pinene oxide, methylstyrene oxide, cyclohexene oxide, propylene oxide, the following compound No.A2, No. A3 etc. are mentioned.
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000009
Figure JPOXMLDOC01-appb-C000010
Figure JPOXMLDOC01-appb-C000010
 上記多官能エポキシ化合物としては、ビスフェノール型エポキシ化合物及びグリシジルエーテル類からなる群から選択される一種以上を用いると、特性の一層良好なアルカリ現像性感光性組成物を得ることができるので好ましい。該ビスフェノール型エポキシ化合物としては、上記一般式(1)で表されるエポキシ化合物を用いることができる他、例えば、水添ビスフェノール型エポキシ化合物等のビスフェノール型エポキシ化合物も用いることができる。該グリシジルエーテル類としては、エチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、1,4-ブタンジオールジグリシジルエーテル、1,6-ヘキサンジオールジグリシジルエーテル、1,8-オクタンジオールジグリシジルエーテル、1,10-デカンジオールジグリシジルエーテル、2,2-ジメチル-1,3-プロパンジオールジグリシジルエーテル、ジエチレングリコールジグリシジルエーテル、トリエチレングリコールジグリシジルエーテル、テトラエチレングリコールジグリシジルエーテル、ヘキサエチレングリコールジグリシジルエーテル、1,4-シクロヘキサンジメタノールジグリシジルエーテル、1,1,1-トリ(グリシジルオキシメチル)プロパン、1,1,1-トリ(グリシジルオキシメチル)エタン、1,1,1-トリ(グリシジルオキシメチル)メタン、1,1,1,1-テトラ(グリシジルオキシメチル)メタンが挙げられる。
 その他、フェノールノボラック型エポキシ化合物、ビフェニルノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物、ビスフェノールAノボラック型エポキシ化合物、ジシクロペンタジエンノボラック型エポキシ化合物等のノボラック型エポキシ化合物;3,4-エポキシ-6-メチルシクロヘキシルメチル-3,4-エポキシ-6-メチルシクロヘキサンカルボキシレート、3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート、1-エポキシエチル-3,4-エポキシシクロヘキサン等の脂環式エポキシ化合物;フタル酸ジグリシジルエステル、テトラヒドロフタル酸ジグリシジルエステル、ダイマー酸グリシジルエステル等のグリシジルエステル類;テトラグリシジルジアミノジフェニルメタン、トリグリシジル-p-アミノフェノール、N,N-ジグリシジルアニリン等のグリシジルアミン類;1,3-ジグリシジル-5,5-ジメチルヒダントイン、トリグリシジルイソシアヌレート等の複素環式エポキシ化合物;ジシクロペンタジエンジオキシド等のジオキシド化合物;ナフタレン型エポキシ化合物、トリフェニルメタン型エポキシ化合物、ジシクロペンタジエン型エポキシ化合物等を用いることもできる。
As the polyfunctional epoxy compound, it is preferable to use one or more selected from the group consisting of bisphenol type epoxy compounds and glycidyl ethers because an alkali-developable photosensitive composition with better characteristics can be obtained. As the bisphenol-type epoxy compound, the epoxy compound represented by the general formula (1) can be used, and for example, a bisphenol-type epoxy compound such as a hydrogenated bisphenol-type epoxy compound can also be used. Examples of the glycidyl ethers include ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, 1,4-butanediol diglycidyl ether, 1,6-hexanediol diglycidyl ether, 1,8-octanediol diglycidyl ether, 1 , 10-decanediol diglycidyl ether, 2,2-dimethyl-1,3-propanediol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, tetraethylene glycol diglycidyl ether, hexaethylene glycol diglycidyl ether 1,4-cyclohexanedimethanol diglycidyl ether, 1,1,1-tri (glycidyloxymethyl) propane, 1,1,1-tri (g Glycidyl oxymethyl) ethane, 1,1,1-tri (glycidyloxymethyl) methane, 1,1,1,1- tetra (glycidyloxymethyl) include methane.
Other novolac epoxy compounds such as phenol novolac epoxy compounds, biphenyl novolac epoxy compounds, cresol novolac epoxy compounds, bisphenol A novolac epoxy compounds, dicyclopentadiene novolac epoxy compounds; 3,4-epoxy-6-methyl Cycloaliphatic epoxy such as cyclohexylmethyl-3,4-epoxy-6-methylcyclohexanecarboxylate, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 1-epoxyethyl-3,4-epoxycyclohexane Compound: Glycidyl esters such as diglycidyl phthalate, diglycidyl tetrahydrophthalate, glycidyl dimer, tetraglycidyl diamino Glycidylamines such as phenylmethane, triglycidyl-p-aminophenol and N, N-diglycidylaniline; heterocyclic epoxy compounds such as 1,3-diglycidyl-5,5-dimethylhydantoin and triglycidyl isocyanurate; Dioxide compounds such as cyclopentadiene dioxide; naphthalene type epoxy compounds, triphenylmethane type epoxy compounds, dicyclopentadiene type epoxy compounds and the like can also be used.
 上記アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)の中でも、相溶性、アルカリ現像性及び耐熱性の点から、不飽和多塩基酸、酸価を有する多官能アクリレート、エポキシ基に不飽和一塩基酸を作用させ、更に多塩基酸無水物を作用させて得られた樹脂が好ましく、不飽和多塩基酸がより好ましい。 Among the polymerizable compounds (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives the alkali developability, unsaturated polybasic acids, acids from the viewpoint of compatibility, alkali developability, and heat resistance Resins obtained by allowing an unsaturated monobasic acid to act on a polyfunctional acrylate having a valence and an epoxy group, and further causing a polybasic acid anhydride to act, are preferred, and unsaturated polybasic acids are more preferred.
 本発明の感光性組成物において、上記アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)の含有量は、本発明のアルカリ現像性感光性組成物の固形物中、30~99質量%、特に60~95質量%が好ましい。上記アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)の含有量が30質量%より小さいと、硬化物の力学的強度が不足しクラックが入ったり、現像不良が起こったりする場合があり、99質量%より大きいと、露光による硬化が不十分になりタックが発生したり、現像時間が長くなり硬化部分もアルカリで膜やられを起こしたりする場合がある。 In the photosensitive composition of the present invention, the content of the polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that imparts the alkali developability is the alkali-developable photosensitive composition of the present invention. 30 to 99 mass%, particularly 60 to 95 mass% is preferable in the solid matter. If the content of the polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives alkali developability is less than 30% by mass, the cured product has insufficient mechanical strength and cracks are formed. If it is larger than 99% by weight, curing due to exposure may be insufficient and tack may occur, or the development time may be long and the cured part may be damaged by alkali. There is.
<光重合開始剤(C)>
 上記光重合開始剤(C)としては、従来既知の化合物を用いることが可能であり、例えば、アセトフェノン化合物、ベンゾフェノン化合物、ベンゾイン化合物、ベンジル化合物、ベンジルケタール化合物、オキシムエステル化合物、アシルホスフィン化合物、トリアジン化合物、キサントン化合物、チオキサントン化合物、ベンゾキノン化合物、アントラキノン化合物、ジスルフィド化合物、ビイミダゾール化合物、4、4-アゾビスイソブチロニトリル、カンファーキノン、過酸化ベンゾイル等が挙げられ、市販品としては、N-1414、N-1717、N-1919、PZ-408、NCI-831、NCI-930(ADEKA社製)、IRGACURE369、IRGACURE907、IRGACURE OXE 01、IRGACURE OXE 02(BASF社製)等が挙げられる。
 上記光重合開始剤(C)の中でも、感度及び色調の点から、オキシムエステル化合物が好ましく、下記一般式(I)で表される化合物が更に好ましい。
<Photopolymerization initiator (C)>
As the photopolymerization initiator (C), conventionally known compounds can be used. For example, acetophenone compounds, benzophenone compounds, benzoin compounds, benzyl compounds, benzyl ketal compounds, oxime ester compounds, acylphosphine compounds, triazines. Compounds, xanthone compounds, thioxanthone compounds, benzoquinone compounds, anthraquinone compounds, disulfide compounds, biimidazole compounds, 4,4-azobisisobutyronitrile, camphorquinone, benzoyl peroxide, and the like. 1414, N-1717, N-1919, PZ-408, NCI-831, NCI-930 (ADEKA), IRGACURE369, IRGACURE907, IRGACURE OXE 01, IRGA URE OXE 02 (manufactured by BASF), and the like.
Among the photopolymerization initiators (C), an oxime ester compound is preferable from the viewpoint of sensitivity and color tone, and a compound represented by the following general formula (I) is more preferable.
Figure JPOXMLDOC01-appb-C000011
(式中、R1及びR2は、それぞれ独立に、水素原子、シアノ基、置換基を有してもよい炭素原子数1~20のアルキル基、置換基を有してもよい炭素原子数6~30のアリール基、置換基を有してもよい炭素原子数7~30のアリールアルキル基又は置換基を有してもよい炭素原子数2~20の複素環基を表し、
 R3及びR4は、それぞれ独立に、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R5、OR6、SR7、NR89、COR10、SOR11、SO212又はCONR1314を表し、
 R5、R6、R7、R8、R9、R10、R11、R12、R13及びR14は、それぞれ独立に、置換基を有してもよい炭素原子数1~20のアルキル基、置換基を有してもよい炭素原子数6~30のアリール基、置換基を有してもよい炭素原子数7~30のアリールアルキル基又は置換基を有してもよい炭素原子数2~20の複素環基を表し、
 Xは、酸素原子、硫黄原子、セレン原子、CR1516、CO、NR17又はPR18を表し、
 R15、R16、R17及びR18は、それぞれ独立に、水素原子、置換基を有してもよい炭素原子数1~20のアルキル基、置換基を有してもよい炭素原子数6~30のアリール基又は置換基を有してもよい炭素原子数7~30のアリールアルキル基を表し、上記アルキル基又はアリールアルキル基中のメチレン基は、-O-で中断されていてもよく、
 R15、R16、R17及びR18は、それぞれ独立に、隣接するどちらかのベンゼン環と一緒になって環を形成していてもよく、
 aは、0~4の整数を表し、
 bは、1~5の整数を表す。)
Figure JPOXMLDOC01-appb-C000011
(Wherein R 1 and R 2 are each independently a hydrogen atom, a cyano group, an optionally substituted alkyl group having 1 to 20 carbon atoms, or an optionally substituted carbon atom number) An aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms which may have a substituent, or a heterocyclic group having 2 to 20 carbon atoms which may have a substituent;
R 3 and R 4 are each independently a hydrogen atom, halogen atom, nitro group, cyano group, hydroxyl group, carboxyl group, R 5 , OR 6 , SR 7 , NR 8 R 9 , COR 10 , SOR 11 , SO 2. Represents R 12 or CONR 13 R 14 ,
R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 and R 14 each independently has 1 to 20 carbon atoms which may have a substituent. An alkyl group, an aryl group having 6 to 30 carbon atoms which may have a substituent, an arylalkyl group having 7 to 30 carbon atoms which may have a substituent or a carbon atom which may have a substituent Represents a heterocyclic group of formula 2 to 20,
X represents an oxygen atom, a sulfur atom, a selenium atom, CR 15 R 16 , CO, NR 17 or PR 18 ;
R 15 , R 16 , R 17 and R 18 each independently represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms which may have a substituent, or an optionally substituted carbon atom having 6 carbon atoms. Represents an aryl group of ˜30 or an arylalkyl group of 7 to 30 carbon atoms which may have a substituent, and the methylene group in the alkyl group or arylalkyl group may be interrupted by —O—. ,
R 15 , R 16 , R 17 and R 18 may each independently form a ring together with one of the adjacent benzene rings,
a represents an integer of 0 to 4,
b represents an integer of 1 to 5. )
 上記一般式(I)中の、R1、R2、R5、R6、R7、R8、R9、R10、R11、R12、R13、R14、R15、R16、R17及びR18で表される炭素数1~20のアルキル基としては、例えば、メチル、エチル、プロピル、イソプロピル、ブチル、イソブチル、s-ブチル、t-ブチル、アミル、イソアミル、t-アミル、ヘキシル、ヘプチル、オクチル、イソオクチル、2-エチルヘキシル、t-オクチル、ノニル、イソノニル、デシル、イソデシル、ウンデシル、ドデシル、テトラデシル、ヘキサデシル、オクタデシル、イコシル、シクロペンチル、シクロヘキシル、シクロヘキシルメチル等が挙げられる。 In the above general formula (I), R 1 , R 2 , R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , R 15 , R 16 Examples of the alkyl group having 1 to 20 carbon atoms represented by R 17 and R 18 include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, sec-butyl, t-butyl, amyl, isoamyl, and t-amyl. Hexyl, heptyl, octyl, isooctyl, 2-ethylhexyl, t-octyl, nonyl, isononyl, decyl, isodecyl, undecyl, dodecyl, tetradecyl, hexadecyl, octadecyl, icosyl, cyclopentyl, cyclohexyl, cyclohexylmethyl and the like.
 上記一般式(I)中の、R1、R2、R5、R6、R7、R8、R9、R10、R11、R12、R13、R14、R15、R16、R17及びR18で表される炭素原子数6~30のアリール基としては、例えば、フェニル、トリル、キシリル、エチルフェニル、ナフチル、アンスリル、フェナンスレニル、上記アルキル基で1つ以上置換されたフェニル、ビフェニリル、ナフチル、アンスリル等が挙げられる。 In the above general formula (I), R 1 , R 2 , R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , R 15 , R 16 As the aryl group having 6 to 30 carbon atoms represented by R 17 and R 18 , for example, phenyl, tolyl, xylyl, ethylphenyl, naphthyl, anthryl, phenanthrenyl, phenyl substituted by one or more of the above alkyl groups , Biphenylyl, naphthyl, anthryl and the like.
 上記一般式(I)中の、R1、R2、R5、R6、R7、R8、R9、R10、R11、R12、R13、R14、R15、R16、R17及びR18で表される炭素原子数7~30のアリールアルキル基としては、例えば、ベンジル、α-メチルベンジル、α、α-ジメチルベンジル、フェニルエチル等が挙げられる。 In the above general formula (I), R 1 , R 2 , R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , R 15 , R 16 Examples of the arylalkyl group having 7 to 30 carbon atoms represented by R 17 and R 18 include benzyl, α-methylbenzyl, α, α-dimethylbenzyl, phenylethyl and the like.
 上記一般式(I)中の、R1、R2、R5、R6、R7、R8、R9、R10、R11、R12、R13、R14、R15、R16、R17及びR18で表される炭素原子数2~20の複素環基としては、例えば、ピリジル、ピリミジル、フリル、チエニル、テトラヒドロフリル、ジオキソラニル、ベンゾオキサゾール-2-イル、テトラヒドロピラニル、ピロリジル、イミダゾリジル、ピラゾリジル、チアゾリジル、イソチアゾリジル、オキサゾリジル、イソオキサゾリジル、ピペリジル、ピペラジル、モルホリニル等の5~7員複素環が好ましく挙げられる。 In the above general formula (I), R 1 , R 2 , R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 , R 14 , R 15 , R 16 Examples of the heterocyclic group having 2 to 20 carbon atoms represented by R 17 and R 18 include pyridyl, pyrimidyl, furyl, thienyl, tetrahydrofuryl, dioxolanyl, benzooxazol-2-yl, tetrahydropyranyl, pyrrolidyl Preferred examples include 5- to 7-membered heterocycles such as imidazolidyl, pyrazolidyl, thiazolidyl, isothiazolidyl, oxazolidyl, isoxazolidyl, piperidyl, piperazyl, morpholinyl and the like.
 上記一般式(I)中、R15、R16、R17及びR18が隣接するベンゼン環と一緒になって形成しうる環としては、例えば、シクロペンタン環、シクロヘキサン環、シクロペンテン環、ベンゼン環、ピペリジン環、モルホリン環、ラクトン環、ラクタム環等の5~7員環が好ましく挙げられる。 In the above general formula (I), examples of the ring formed by R 15 , R 16 , R 17 and R 18 together with the adjacent benzene ring include a cyclopentane ring, a cyclohexane ring, a cyclopentene ring and a benzene ring. Preferred examples include 5- to 7-membered rings such as a piperidine ring, a morpholine ring, a lactone ring and a lactam ring.
 また、上記一般式(I)中、R3、R4で表されるハロゲン原子としては、フッ素、塩素、臭素、ヨウ素が挙げられる。 In the general formula (I), examples of the halogen atom represented by R 3 and R 4 include fluorine, chlorine, bromine and iodine.
  本発明に係る上記一般式(I)で表される化合物の具体例としては、下記化合物No.2-1~2-19が挙げられる。 Specific examples of the compound represented by the general formula (I) according to the present invention include the following compound No. 2-1 to 2-19.
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000012
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
 本発明のアルカリ現像性感光性組成物において、上記光重合開始剤(C)の含有量は、本発明のアルカリ現像性感光性組成物中、0.1~30質量%、特に0.5~10質量%が好ましい。上記光重合開始剤(C)の含有量が0.1質量%より小さいと、露光による硬化が不十分になる場合があり、30質量%より大きいと、アルカリ現像性感光性組成物中に光重合開始剤(C)が析出する場合がある。 In the alkali-developable photosensitive composition of the present invention, the content of the photopolymerization initiator (C) is 0.1 to 30% by mass, particularly 0.5 to 0.5% in the alkali-developable photosensitive composition of the present invention. 10 mass% is preferable. When the content of the photopolymerization initiator (C) is less than 0.1% by mass, curing by exposure may be insufficient, and when the content is more than 30% by mass, light is contained in the alkali-developable photosensitive composition. A polymerization initiator (C) may precipitate.
 上記光重合開始剤(C)中のオキシムエステル化合物の割合は、アルカリ現像性感光性組成物の固形分中、0.1~30質量%が好ましく、0.5~10質量%がさらに好ましい。 The ratio of the oxime ester compound in the photopolymerization initiator (C) is preferably 0.1 to 30% by mass, more preferably 0.5 to 10% by mass, based on the solid content of the alkali-developable photosensitive composition.
 <溶媒(D)>
 本発明のアルカリ現像性感光性組成物には、更に溶媒(D)を加えることができる。該溶媒としては、通常、必要に応じて上記の各成分(本発明の赤外線吸収色素(A)等)を溶解又は分散しえる溶媒、例えば、メチルエチルケトン、メチルアミルケトン、ジエチルケトン、アセトン、メチルイソプロピルケトン、メチルイソブチルケトン、シクロヘキサノン、2-ヘプタノン、ジアセトンアルコール等のケトン類;エチルエーテル、ジオキサン、テトラヒドロフラン、1,2-ジメトキシエタン、1,2-ジエトキシエタン、ジプロピレングリコールジメチルエーテル等のエーテル系溶媒;酢酸メチル、酢酸エチル、酢酸-n-プロピル、酢酸イソプロピル、酢酸n-ブチル、酢酸シクロヘキシル、乳酸エチル、コハク酸ジメチル、テキサノール等のエステル系溶媒;エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル等のセロソルブ系溶媒;メタノール、エタノール、イソ-又はn-プロパノール、イソ-又はn-ブタノール、アミルアルコール等のアルコール系溶媒;エチレングリコールモノメチルアセテート、エチレングリコールモノエチルアセテート、プロピレングリコール-1-モノメチルエーテル-2-アセテート(PGMEA)、ジプロピレングリコールモノメチルエーテルアセテート、3-メトキシブチルアセテート、エトキシエチルプロピオネート等のエーテルエステル系溶媒;ベンゼン、トルエン、キシレン等のBTX系溶媒;ヘキサン、ヘプタン、オクタン、シクロヘキサン等の脂肪族炭化水素系溶媒;テレピン油、D-リモネン、ピネン等のテルペン系炭化水素油;ミネラルスピリット、スワゾール#310(コスモ松山石油)、ソルベッソ#100(エクソン化学)等のパラフィン系溶媒;四塩化炭素、クロロホルム、トリクロロエチレン、塩化メチレン、1,2-ジクロロエタン等のハロゲン化脂肪族炭化水素系溶媒;クロロベンゼン等のハロゲン化芳香族炭化水素系溶媒;カルビトール系溶媒、アニリン、トリエチルアミン、ピリジン、酢酸、アセトニトリル、二硫化炭素、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド、N-メチルピロリドン、ジメチルスルホキシド、水等が挙げられ、これらの溶媒は1種又は2種以上の混合溶媒として使用することができる。これらの中でもケトン類、エーテルエステル系溶媒等、特にプロピレングリコール-1-モノメチルエーテル-2-アセテート、シクロヘキサノン、ジメチルアセトアミド、メチルエチルケトン、ジアセトンアルコール等が、アルカリ現像性感光性組成物においてレジストと光重合開始剤の相溶性がよいので好ましい。
<Solvent (D)>
A solvent (D) can be further added to the alkali-developable photosensitive composition of the present invention. The solvent is usually a solvent capable of dissolving or dispersing each of the above components (the infrared absorbing dye (A) of the present invention, etc.) as necessary, for example, methyl ethyl ketone, methyl amyl ketone, diethyl ketone, acetone, methyl isopropyl. Ketones such as ketone, methyl isobutyl ketone, cyclohexanone, 2-heptanone, diacetone alcohol; ethers such as ethyl ether, dioxane, tetrahydrofuran, 1,2-dimethoxyethane, 1,2-diethoxyethane, dipropylene glycol dimethyl ether Solvent: ester solvents such as methyl acetate, ethyl acetate, acetic acid-n-propyl, isopropyl acetate, n-butyl acetate, cyclohexyl acetate, ethyl lactate, dimethyl succinate, texanol; ethylene glycol monomethyl ether, ethylene glycol Cellosolve solvents such as methanol monoethyl ether; alcohol solvents such as methanol, ethanol, iso- or n-propanol, iso- or n-butanol, amyl alcohol; ethylene glycol monomethyl acetate, ethylene glycol monoethyl acetate, propylene glycol Ether ester solvents such as 1-monomethyl ether-2-acetate (PGMEA), dipropylene glycol monomethyl ether acetate, 3-methoxybutyl acetate and ethoxyethyl propionate; BTX solvents such as benzene, toluene and xylene; hexane, Aliphatic hydrocarbon solvents such as heptane, octane and cyclohexane; Terpene hydrocarbon oils such as turpentine oil, D-limonene and pinene; Mineral spirit, Swazol # 31 (Cosmo Matsuyama Petroleum), Solvesso # 100 (Exxon Chemical) and other paraffinic solvents; Carbon tetrachloride, chloroform, trichloroethylene, methylene chloride, 1,2-dichloroethane and other halogenated aliphatic hydrocarbon solvents; Chlorobenzene and other halogens Aromatic hydrocarbon solvents; carbitol solvents, aniline, triethylamine, pyridine, acetic acid, acetonitrile, carbon disulfide, N, N-dimethylformamide, N, N-dimethylacetamide, N-methylpyrrolidone, dimethyl sulfoxide, water These solvents can be used as one or a mixture of two or more. Among these, ketones, ether ester solvents, etc., particularly propylene glycol-1-monomethyl ether-2-acetate, cyclohexanone, dimethylacetamide, methyl ethyl ketone, diacetone alcohol, and the like are photopolymerized with a resist in an alkali-developable photosensitive composition. It is preferable because the compatibility of the initiator is good.
 本発明のアルカリ現像性感光性組成物において、上記溶媒(D)の使用量は、溶媒(D)以外の組成物の濃度が5~30質量%になることが好ましく、5質量%より小さい場合、膜厚を厚くする事が困難であり所望の波長光を十分に吸収できないため好ましくなく、30質量%を超える場合、組成物の析出による組成物の保存性が低下したり、粘度が向上したりするためハンドリングが低下するため好ましくない。 In the alkali-developable photosensitive composition of the present invention, the amount of the solvent (D) used is preferably such that the concentration of the composition other than the solvent (D) is 5 to 30% by mass, and less than 5% by mass. It is not preferable because it is difficult to increase the film thickness and the light of the desired wavelength cannot be sufficiently absorbed, and when it exceeds 30% by mass, the storage stability of the composition due to precipitation of the composition is reduced, and the viscosity is improved. Therefore, handling is reduced, which is not preferable.
 本発明のアルカリ現像性感光性組成物には、更に無機色材及び/又は有機色材を含有させてもよい。これらの色材は、単独で又は2種以上を混合して用いることができる。 The alkali-developable photosensitive composition of the present invention may further contain an inorganic color material and / or an organic color material. These color materials can be used alone or in admixture of two or more.
 上記無機色材及び/又は有機色材としては、例えば、ニトロソ化合物、ニトロ化合物、アゾ化合物、ジアゾ化合物、キサンテン化合物、キノリン化合物、アントラキノン化合物、クマリン化合物、フタロシアニン化合物、イソインドリノン化合物、イソインドリン化合物、キナクリドン化合物、アンタンスロン化合物、ペリノン化合物、ペリレン化合物、ジケトピロロピロール化合物、チオインジゴ化合物、ジオキサジン化合物、トリフェニルメタン化合物、キノフタロン化合物、ナフタレンテトラカルボン酸;アゾ染料、シアニン染料の金属錯体化合物;レーキ顔料;ファーネス法、チャンネル法、サーマル法によって得られるカーボンブラック、或いはアセチレンブラック、ケッチェンブラック又はランプブラック等のカーボンブラック;上記カーボンブラックをエポキシ樹脂で調整、被覆したもの、上記カーボンブラックを予め溶媒中で樹脂で分散処理し、20~200mg/gの樹脂を吸着させたもの、上記カーボンブラックを酸性又はアルカリ性表面処理したもの、平均粒径が8nm以上でDBP吸油量が90ml/100g以下のもの、950℃における揮発分中のCO、CO2から算出した全酸素量が、カーボンブラックの表面積100m2当たり9mg以上であるもの;黒鉛、黒鉛化カーボンブラック、活性炭、炭素繊維、カーボンナノチューブ、カーボンマイクロコイル、カーボンナノホーン、カーボンエアロゲル、フラーレン;アニリンブラック、ピグメントブラック7、チタンブラック;疎水性樹脂、酸化クロム緑、ミロリブルー、コバルト緑、コバルト青、マンガン系、フェロシアン化物、リン酸塩群青、紺青、ウルトラマリン、セルリアンブルー、ピリジアン、エメラルドグリーン、硫酸鉛、黄色鉛、亜鉛黄、べんがら(赤色酸化鉄(III))、カドミウム赤、合成鉄黒、アンバー等の無機顔料又は有機顔料を用いることができる。 Examples of the inorganic color material and / or organic color material include nitroso compounds, nitro compounds, azo compounds, diazo compounds, xanthene compounds, quinoline compounds, anthraquinone compounds, coumarin compounds, phthalocyanine compounds, isoindolinone compounds, isoindoline compounds. Quinacridone compounds, anthanthrone compounds, perinone compounds, perylene compounds, diketopyrrolopyrrole compounds, thioindigo compounds, dioxazine compounds, triphenylmethane compounds, quinophthalone compounds, naphthalene tetracarboxylic acids; azo dyes, metal complex compounds of cyanine dyes; lake pigments Carbon black obtained by furnace method, channel method, thermal method, or carbon black such as acetylene black, ketjen black or lamp black The carbon black prepared and coated with an epoxy resin, the carbon black previously dispersed with a resin in a solvent, adsorbed with 20 to 200 mg / g of resin, and the carbon black treated with an acidic or alkaline surface. The average particle size is 8 nm or more, the DBP oil absorption is 90 ml / 100 g or less, the total oxygen amount calculated from CO and CO 2 in the volatile matter at 950 ° C. is 9 mg or more per 100 m 2 of the surface area of the carbon black. Things: Graphite, graphitized carbon black, activated carbon, carbon fiber, carbon nanotube, carbon microcoil, carbon nanohorn, carbon aerogel, fullerene; aniline black, pigment black 7, titanium black; hydrophobic resin, chromium oxide green, miloli blue, cobalt Green, cobalt blue, Ngan, ferrocyanide, phosphate ultramarine, bitumen, ultramarine, cerulean blue, pyridian, emerald green, lead sulfate, yellow lead, zinc yellow, red bean (red iron (III) oxide), cadmium red, synthetic iron black Inorganic pigments such as amber or organic pigments can be used.
 本発明のアルカリ現像性感光性組成物には、更に無機化合物を含有させることができる。該無機化合物としては、例えば、酸化ニッケル、酸化鉄、酸化イリジウム、酸化チタン、酸化亜鉛、酸化マグネシウム、酸化カルシウム、酸化カリウム、シリカ、アルミナ等の金属酸化物;層状粘土鉱物、ミロリブルー、炭酸カルシウム、炭酸マグネシウム、コバルト系、マンガン系、ガラス粉末、マイカ、タルク、カオリン、フェロシアン化物、各種金属硫酸塩、硫化物、セレン化物、アルミニウムシリケート、カルシウムシリケート、水酸化アルミニウム、白金、金、銀、銅等が挙げられ、これらの中でも、酸化チタン、シリカ、層状粘土鉱物、銀等が好ましい。
 これら無機化合物は、例えば、充填剤、反射防止剤、導電剤、安定剤、難燃剤、機械的強度向上剤、特殊波長吸収剤、撥インク剤等として用いられる。
The alkali-developable photosensitive composition of the present invention can further contain an inorganic compound. Examples of the inorganic compound include metal oxides such as nickel oxide, iron oxide, iridium oxide, titanium oxide, zinc oxide, magnesium oxide, calcium oxide, potassium oxide, silica, and alumina; lamellar clay mineral, miloli blue, calcium carbonate, Magnesium carbonate, cobalt, manganese, glass powder, mica, talc, kaolin, ferrocyanide, various metal sulfates, sulfides, selenides, aluminum silicate, calcium silicate, aluminum hydroxide, platinum, gold, silver, copper Among these, titanium oxide, silica, layered clay mineral, silver and the like are preferable.
These inorganic compounds are used, for example, as fillers, antireflection agents, conductive agents, stabilizers, flame retardants, mechanical strength improvers, special wavelength absorbers, ink repellents, and the like.
 本発明のアルカリ現像性感光性組成物において、顔料及び/又は無機化合物を用いる場合、分散剤を加えることができる。該分散剤としては色材、無機化合物を分散、安定化できるものであれば何でも良く、市販の分散剤、例えばビックケミー社製、BYKシリーズ等を用いることができ、塩基性官能基を有するポリエステル、ポリエーテル、ポリウレタンからなる高分子分散剤、塩基性官能基として窒素原子を有し、窒素原子を有する官能基がアミン、及び/又はその四級塩であり、アミン価が1~100mgKOH/gのものが
好適に用いられる。
In the alkali-developable photosensitive composition of the present invention, a dispersant can be added when a pigment and / or an inorganic compound is used. As the dispersant, any colorant or inorganic compound can be used as long as it can disperse and stabilize, and commercially available dispersants such as BYK series manufactured by BYK Chemie can be used, and polyester having a basic functional group, Polymer dispersing agent made of polyether, polyurethane, nitrogen atom as basic functional group, functional group having nitrogen atom is amine and / or quaternary salt thereof, amine value is 1 to 100 mgKOH / g Those are preferably used.
 また、本発明のアルカリ現像性感光性組成物には、必要に応じて、p-アニソール、ハイドロキノン、ピロカテコール、t-ブチルカテコール、フェノチアジン等の熱重合抑制剤;可塑剤;接着促進剤;充填剤;消泡剤;レベリング剤;表面調整剤;酸化防止剤;紫外線吸収剤;分散助剤;凝集防止剤;触媒;効果促進剤;架橋剤;増粘剤等の慣用の添加物を加えることができる。 In addition, the alkali-developable photosensitive composition of the present invention includes, if necessary, a thermal polymerization inhibitor such as p-anisole, hydroquinone, pyrocatechol, t-butylcatechol, phenothiazine; a plasticizer; an adhesion promoter; Antifoaming agent; Leveling agent; Surface conditioner; Antioxidant; Ultraviolet absorber; Dispersion aid; Aggregation inhibitor; Catalyst; Effect promoter; Cross-linking agent; Can do.
 本発明のアルカリ現像性感光性組成物において、赤外線吸収色素(A)、アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)及び光重合開始剤(C)以外の任意成分(但し、溶媒(D)は除く)の含有量は、その使用目的に応じて適宜選択され特に制限されないが、好ましくは、上記アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)の含有量100質量部に対して合計で50質量部以下とする。 In the alkali-developable photosensitive composition of the present invention, an infrared-absorbing dye (A), a polymerizable compound (B) having an ethylenically unsaturated bond, having an alkali-soluble substituent that imparts alkali developability, and a photopolymerization initiator The content of optional components other than (C) (excluding the solvent (D)) is appropriately selected according to the purpose of use and is not particularly limited, but is preferably an alkali-soluble substituent that gives the alkali developability. The content of the polymerizable compound (B) having an ethylenically unsaturated bond is 50 parts by mass or less in total with respect to 100 parts by mass.
 また、上記アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)とともに、他の有機重合体を用いることによって、本発明のアルカリ現像性感光性組成物からなる硬化物の特性を改善することもできる。上記有機重合体としては、例えば、ポリスチレン、ポリメチルメタクリレート、メチルメタクリレート-エチルアクリレート共重合体、ポリ(メタ)アクリル酸、スチレン-(メタ)アクリル酸共重合体、(メタ)アクリル酸-メチルメタクリレート共重合体、エチレン-塩化ビニル共重合体、エチレン-ビニル共重合体、ポリ塩化ビニル樹脂、ABS樹脂、ナイロン6、ナイロン66、ナイロン12、ウレタン樹脂、ポリカーボネートポリビニルブチラール、セルロースエステル、ポリアクリルアミド、飽和ポリエステル、フェノール樹脂、フェノキシ樹脂、ポリアミドイミド樹脂、ポリアミック酸樹脂、エポキシ樹脂等が挙げられ、これらの中でも、ポリスチレン、(メタ)アクリル酸-メチルメタクリレート共重合体、エポキシ樹脂が好ましい。 Further, by using another organic polymer together with the polymerizable compound (B) having an ethylenically unsaturated bond having an alkali-soluble substituent that gives the alkali developability, the alkali-developable photosensitive composition of the present invention. It is also possible to improve the properties of a cured product made of a product. Examples of the organic polymer include polystyrene, polymethyl methacrylate, methyl methacrylate-ethyl acrylate copolymer, poly (meth) acrylic acid, styrene- (meth) acrylic acid copolymer, (meth) acrylic acid-methyl methacrylate. Copolymer, ethylene-vinyl chloride copolymer, ethylene-vinyl copolymer, polyvinyl chloride resin, ABS resin, nylon 6, nylon 66, nylon 12, urethane resin, polycarbonate polyvinyl butyral, cellulose ester, polyacrylamide, saturated Polyester, phenolic resin, phenoxy resin, polyamideimide resin, polyamic acid resin, epoxy resin, and the like. Among these, polystyrene, (meth) acrylic acid-methyl methacrylate copolymer, and epoxy resin are included. Masui.
 本発明のアルカリ現像性感光性組成物には、更に、不飽和結合を有するモノマー、連鎖移動剤、増感剤、界面活性剤、シランカップリング剤、メラミン化合物等を併用することができる。 In the alkali-developable photosensitive composition of the present invention, a monomer having an unsaturated bond, a chain transfer agent, a sensitizer, a surfactant, a silane coupling agent, a melamine compound and the like can be further used.
 上記不飽和結合を有するモノマーとしては、アクリル酸-2-ヒドロキシエチル、アクリル酸-2-ヒドロキシプロピル、アクリル酸イソブチル、アクリル酸n-オクチル、アクリル酸イソオクチル、アクリル酸イソノニル、アクリル酸ステアリル 、アクリル酸メトキシエチル、アクリル酸ジメチルアミノエチル、アクリル酸亜鉛、1,6-ヘキサンジオールジアクリレート、トリメチロールプロパントリアクリレート、メタクリル酸-2-ヒドロキシエチル、メタクリル酸-2-ヒドロキシプロピル、メタクリル酸ブチル、メタクリル酸ターシャリーブチル、メタクリル酸シクロヘキシル、トリメチロールプロパントリメタクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、ペンタエリスリトールテトラアクリレート、ペンタエリスリトールトリアクリレート、ビスフェノールAジグリシジルエーテル(メタ)アクリレート、ビスフェノールFジグリシジルエーテル(メタ)アクリレート、ビスフェノールZジグリシジルエーテル(メタ)アクリレート、トリプロピレングリコールジ(メタ)アクリレート等が挙げられる。 Examples of the monomer having an unsaturated bond include 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, isobutyl acrylate, n-octyl acrylate, isooctyl acrylate, isononyl acrylate, stearyl acrylate, acrylic acid Methoxyethyl, dimethylaminoethyl acrylate, zinc acrylate, 1,6-hexanediol diacrylate, trimethylolpropane triacrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, butyl methacrylate, methacrylic acid Tertiary butyl, cyclohexyl methacrylate, trimethylolpropane trimethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pen Examples include erythritol tetraacrylate, pentaerythritol triacrylate, bisphenol A diglycidyl ether (meth) acrylate, bisphenol F diglycidyl ether (meth) acrylate, bisphenol Z diglycidyl ether (meth) acrylate, and tripropylene glycol di (meth) acrylate. It is done.
 上記連鎖移動剤、増感剤としては、一般的に硫黄原子含有化合物が用いられる。例えばチオグリコール酸、チオリンゴ酸、チオサリチル酸、2-メルカプトプロピオン酸、3-メルカプトプロピオン酸、3-メルカプト酪酸、N-(2-メルカプトプロピオニル)グリシン、2-メルカプトニコチン酸、3-[N-(2-メルカプトエチル)カルバモイル]プロピオン酸、3-[N-(2-メルカプトエチル)アミノ]プロピオン酸、N-(3-メルカプトプロピオニル)アラニン、2-メルカプトエタンスルホン酸、3-メルカプトプロパンスルホン酸、4-メルカプトブタンスルホン酸、ドデシル(4-メチルチオ)フェニルエーテル、2-メルカプトエタノール、3-メルカプト-1,2-プロパンジオール、1-メルカプト-2-プロパノール、3-メルカプト-2-ブタノール、メルカプトフェノール、2-メルカプトエチルアミン、2-メルカプトイミダゾール、2-メルカプトベンゾイミダゾール、2-メルカプト-3-ピリジノール、2-メルカプトベンゾチアゾール、メルカプト酢酸、トリメチロールプロパントリス(3-メルカプトプロピオネート)、ペンタエリスリトールテトラキス(3-メルカプトプロピオネート)等のメルカプト化合物、該メルカプト化合物を酸化して得られるジスルフィド化合物、ヨード酢酸、ヨードプロピオン酸、2-ヨードエタノール、2-ヨードエタンスルホン酸、3-ヨードプロパンスルホン酸等のヨード化アルキル化合物、トリメチロールプロパントリス(3-メルカプトイソブチレート)、ブタンジオールビス(3-メルカプトイソブチレート)、ヘキサンジチオール、デカンジチオール、1,4-ジメチルメルカプトベンゼン、ブタンジオールビスチオプロピオネート、ブタンジオールビスチオグリコレート、エチレングリコールビスチオグリコレート、トリメチロールプロパントリスチオグリコレート、ブタンジオールビスチオプロピオネート、トリメチロールプロパントリスチオプロピオネート、トリメチロールプロパントリスチオグリコレート、ペンタエリスリトールテトラキスチオプロピオネート、ペンタエリスリトールテトラキスチオグリコレート、トリスヒドロキシエチルトリスチオプロピオネート、下記化合物No.C1、トリメルカプトプロピオン酸トリス(2-ヒドロキシエチル)イソシアヌレート等の脂肪族多官能チオール化合物、昭和電工社製カレンズMT BD1、PE1、NR1等が挙げられる。 As the chain transfer agent and sensitizer, a sulfur atom-containing compound is generally used. For example, thioglycolic acid, thiomalic acid, thiosalicylic acid, 2-mercaptopropionic acid, 3-mercaptopropionic acid, 3-mercaptobutyric acid, N- (2-mercaptopropionyl) glycine, 2-mercaptonicotinic acid, 3- [N- ( 2-mercaptoethyl) carbamoyl] propionic acid, 3- [N- (2-mercaptoethyl) amino] propionic acid, N- (3-mercaptopropionyl) alanine, 2-mercaptoethanesulfonic acid, 3-mercaptopropanesulfonic acid, 4-mercaptobutanesulfonic acid, dodecyl (4-methylthio) phenyl ether, 2-mercaptoethanol, 3-mercapto-1,2-propanediol, 1-mercapto-2-propanol, 3-mercapto-2-butanol, mercaptophenol , 2-me Captoethylamine, 2-mercaptoimidazole, 2-mercaptobenzimidazole, 2-mercapto-3-pyridinol, 2-mercaptobenzothiazole, mercaptoacetic acid, trimethylolpropane tris (3-mercaptopropionate), pentaerythritol tetrakis (3- Mercapto compounds such as mercaptopropionate), disulfide compounds obtained by oxidizing the mercapto compound, iodoacetates such as iodoacetic acid, iodopropionic acid, 2-iodoethanol, 2-iodoethanesulfonic acid, 3-iodopropanesulfonic acid, etc. Alkyl compounds, trimethylolpropane tris (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), hexanedithiol, decanedithiol, 1,4- Methyl mercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, trimethylolpropane tristhioglycolate, butanediol bisthiopropionate, trimethylolpropane tristhiopropionate , Trimethylolpropane tristhioglycolate, pentaerythritol tetrakisthiopropionate, pentaerythritol tetrakisthioglycolate, trishydroxyethyl tristhiopropionate, the following compound no. C1, aliphatic polyfunctional thiol compounds such as trimercaptopropionic acid tris (2-hydroxyethyl) isocyanurate, Karenz MT BD1, PE1, NR1, etc. manufactured by Showa Denko K.K.
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
 上記界面活性剤としては、パーフルオロアルキルリン酸エステル、パーフルオロアルキルカルボン酸塩等のフッ素界面活性剤、高級脂肪酸アルカリ塩、アルキルスルホン酸塩、アルキル硫酸塩等のアニオン系界面活性剤、高級アミンハロゲン酸塩、第四級アンモニウム塩等のカチオン系界面活性剤、ポリエチレングリコールアルキルエーテル、ポリエチレングリコール脂肪酸エステル、ソルビタン脂肪酸エステル、脂肪酸モノグリセリド等の非イオン界面活性剤、両性界面活性剤、シリコーン系界面活性剤等の界面活性剤を用いることができ、これらは組み合わせて用いてもよい。 Examples of the surfactant include fluorine surfactants such as perfluoroalkyl phosphates and perfluoroalkyl carboxylates, anionic surfactants such as higher fatty acid alkali salts, alkyl sulfonates, and alkyl sulfates, and higher amines. Cationic surfactants such as halogenates and quaternary ammonium salts, nonionic surfactants such as polyethylene glycol alkyl ethers, polyethylene glycol fatty acid esters, sorbitan fatty acid esters and fatty acid monoglycerides, amphoteric surfactants, silicone surfactants Surfactants such as agents can be used, and these may be used in combination.
 上記シランカップリング剤としては、例えば信越化学社製シランカップリング剤を用いることができ、その中でもKBE-9007、KBM-502、KBE-403等、イソシアネート基、メタクリロイル基、エポキシ基を有するシランカップリング剤が好適に用いられる。 As the silane coupling agent, for example, a silane coupling agent manufactured by Shin-Etsu Chemical Co., Ltd. can be used. Among them, KBE-9007, KBM-502, KBE-403 and the like, silane cups having an isocyanate group, a methacryloyl group, and an epoxy group. A ring agent is preferably used.
 上記メラミン化合物としては、(ポリ)メチロールメラミン、(ポリ)メチロールグリコールウリル、(ポリ)メチロールベンゾグアナミン、(ポリ)メチロールウレア等の窒素化合物中の活性メチロール基(CH2OH基)の全部又は一部(少なくとも2つ)がアルキルエーテル化された化合物を挙げることができる。ここで、アルキルエーテルを構成するアルキル基としては、メチル基、エチル基又はブチル基が挙げられ、互いに同一であってもよいし、異なっていてもよい。また、アルキルエーテル化されていないメチロール基は、一分子内で自己縮合していてもよく、二分子間で縮合して、その結果オリゴマー成分が形成されていてもよい。具体的には、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン、テトラメトキシメチルグリコールウリル、テトラブトキシメチルグリコールウリル等を用いることができる。これらのなかでも、ヘキサメトキシメチルメラミン、ヘキサブトキシメチルメラミン等のアルキルエーテル化されたメラミンが好ましい。 Examples of the melamine compound include all or part of active methylol groups (CH 2 OH groups) in nitrogen compounds such as (poly) methylol melamine, (poly) methylol glycoluril, (poly) methylol benzoguanamine, and (poly) methylol urea. Mention may be made of compounds in which (at least two) are alkyl etherified. Here, examples of the alkyl group constituting the alkyl ether include a methyl group, an ethyl group, and a butyl group, which may be the same as or different from each other. In addition, the methylol group that is not alkyletherified may be self-condensed within one molecule, or may be condensed between two molecules to form an oligomer component. Specifically, hexamethoxymethyl melamine, hexabutoxymethyl melamine, tetramethoxymethyl glycoluril, tetrabutoxymethyl glycoluril and the like can be used. Among these, alkyl etherified melamines such as hexamethoxymethyl melamine and hexabutoxymethyl melamine are preferable.
 本発明のアルカリ現像性感光性組成物は、スピンコーター、ロールコーター、バーコーター、ダイコーター、カーテンコーター、各種の印刷、浸漬等の公知の手段で、ソーダガラス、石英ガラス、半導体基板、金属、紙、プラスチック等の支持基体上に適用することができる。また、一旦フィルム等の支持基体上に施した後、他の支持基体上に転写することもでき、その適用方法に制限はない。 The alkali-developable photosensitive composition of the present invention is a known method such as spin coater, roll coater, bar coater, die coater, curtain coater, various printing, dipping, soda glass, quartz glass, semiconductor substrate, metal, It can be applied on a supporting substrate such as paper or plastic. Moreover, after once applying on support bases, such as a film, it can also transfer on another support base | substrate, There is no restriction | limiting in the application method.
 また、本発明のアルカリ現像性感光性組成物を硬化させる際に用いられる活性光の光源としては、波長300~450nmの光を発光するものを用いることができ、例えば、超高圧水銀、水銀蒸気アーク、カーボンアーク、キセノンアーク等を用いることができる。 The active light source used for curing the alkali-developable photosensitive composition of the present invention may be a light source that emits light having a wavelength of 300 to 450 nm, such as ultra-high pressure mercury, mercury vapor. An arc, carbon arc, xenon arc, or the like can be used.
 更に、露光光源にレーザー光を用いることにより、マスクを用いずに、コンピューター等のデジタル情報から直接画像を形成するレーザー直接描画法が、生産性のみならず、解像性や位置精度等の向上も図れることから有用であり、そのレーザー光としては、340~430nmの波長の光が好適に使用されるが、アルゴンイオンレーザー、ヘリウムネオンレーザー、YAGレーザー、及び半導体レーザー等の可視から赤外領域の光を発するものも用いられる。これらのレーザーを使用する場合には、可視から赤外の当該領域を吸収する増感色素が加えられる。 Furthermore, by using laser light as the exposure light source, the laser direct drawing method that directly forms an image from digital information such as a computer without using a mask improves not only productivity but also resolution and positional accuracy. As the laser beam, light having a wavelength of 340 to 430 nm is preferably used, but an argon ion laser, a helium neon laser, a YAG laser, a semiconductor laser, etc. are visible to infrared region. Those that emit light are also used. When these lasers are used, a sensitizing dye that absorbs the region from visible to infrared is added.
 本発明のアルカリ現像性感光性組成物(又はその硬化物)は、光硬化性塗料或いはワニス、光硬化性接着剤、プリント基板、或いはカラーテレビ、PCモニタ、携帯情報端末、デジタルカメラ等のカラー表示の液晶表示パネルにおけるカラーフィルタ、CCDイメージセンサのカラーフィルタ又は赤外線吸収フィルター、プラズマ表示パネル用の電極材料、粉末コーティング、印刷インク、印刷版、接着剤、歯科用組成物、光造形用樹脂、ゲルコート、電子工学用のフォトレジスト、電気メッキレジスト、エッチングレジスト、液状及び乾燥膜の双方、はんだレジスト、種々の表示用途用のカラーフィルタを製造するための或いはプラズマ表示パネル、電気発光表示装置、及びLCDの製造工程において構造を形成するためのレジスト、電気及び電子部品を封入するための組成物、ソルダーレジスト、磁気記録材料、微小機械部品、導波路、光スイッチ、めっき用マスク、エッチングマスク、カラー試験系、ガラス繊維ケーブルコーティング、スクリーン印刷用ステンシル、ステレオリトグラフィによって三次元物体を製造するための材料、ホログラフィ記録用材料、画像記録材料、微細電子回路、脱色材料、画像記録材料のための脱色材料、マイクロカプセルを使用する画像記録材料用の脱色材料、印刷配線板用フォトレジスト材料、UV及び可視レーザー直接画像系用のフォトレジスト材料、プリント回路基板の逐次積層における誘電体層形成に使用するフォトレジスト材料或いは保護膜等の各種の用途に使用することができ、その用途に特に制限はない。 The alkali-developable photosensitive composition (or cured product thereof) of the present invention is a photocurable paint or varnish, a photocurable adhesive, a printed circuit board, or a color television, a PC monitor, a portable information terminal, a digital camera, or the like. Color filters for liquid crystal display panels for display, color filters or infrared absorption filters for CCD image sensors, electrode materials for plasma display panels, powder coatings, printing inks, printing plates, adhesives, dental compositions, resin for optical modeling, Gel coat, electronic photoresist, electroplating resist, etching resist, both liquid and dry film, solder resist, plasma display panel, electroluminescent display device, for producing color filters for various display applications, and Resist, electric for forming structure in LCD manufacturing process And compositions for encapsulating electronic components, solder resists, magnetic recording materials, micromechanical components, waveguides, optical switches, plating masks, etching masks, color test systems, glass fiber cable coatings, stencils for screen printing, stereo Materials for producing three-dimensional objects by lithography, holographic recording materials, image recording materials, fine electronic circuits, decoloring materials, decoloring materials for image recording materials, decoloring materials for image recording materials using microcapsules Used for various applications such as photoresist materials for printed wiring boards, photoresist materials for UV and visible laser direct image systems, photoresist materials used for dielectric layer formation in the sequential lamination of printed circuit boards, or protective films There is no particular limitation on its use.
 本発明のアルカリ現像性感光性組成物は、近赤外線吸収フィルターを形成するためのアルカリ現像性感光性組成物として有用である。 The alkali-developable photosensitive composition of the present invention is useful as an alkali-developable photosensitive composition for forming a near infrared absorption filter.
 上記近赤外線吸収フィルターは、(1)本発明のアルカリ現像性感光性組成物の塗膜を基板上に形成する工程、(2)該塗膜に所定のパターン形状を有するマスクを介して活性光を照射する工程、(3)露光後の被膜を現像液(特にアルカリ現像液)にて現像する工程、(4)現像後の該被膜を加熱する工程により好ましく形成される。また、本発明のアルカリ現像性感光性組成物は、現像工程の無いインクジェット方式、転写方式の感光性組成物としても有用である。 The near-infrared absorption filter includes (1) a step of forming a coating film of the alkali-developable photosensitive composition of the present invention on a substrate, and (2) active light through a mask having a predetermined pattern shape on the coating film. (3) a step of developing the exposed film with a developer (particularly an alkali developer), and (4) a step of heating the film after development. The alkali-developable photosensitive composition of the present invention is also useful as a photosensitive composition for an ink jet system or a transfer system without a development process.
 以下、実施例を挙げて本発明を更に詳細に説明するが、本発明はこれらの実施例に限定されるものではない。 Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.
 [実施例1]アルカリ現像性感光性組成物No.1の調製
 (A)成分として化合物No.1-1のビス(トリフルオロメタンスルホニル)イミド塩を0.16gと、(D)成分の一部としてジメチルアセトアミド3.70gを加え、撹拌して溶解した。その後、(B)成分としてACA Z250(ダイセルサイテック社製)を4.95g並びにアロニックスM-450(東亜合成社製)を1.96g、(C)成分としてOXE-01(BASF社製)を0.07g、(D)成分の一部としてPGMEAを2.92g、その他の成分としてFZ2122(東レ・ダウコーニング社製)を0.001g混合し、不溶物が無くなるまで撹拌し、アルカリ現像性感光性組成物No.1を得た。
[Example 1] Alkali-developable photosensitive composition No. 1 Preparation of Compound No. 1 as component (A) 0.16 g of 1-1 bis (trifluoromethanesulfonyl) imide salt and 3.70 g of dimethylacetamide as a part of component (D) were added and dissolved by stirring. Thereafter, 4.95 g of ACA Z250 (manufactured by Daicel Cytec Co., Ltd.) as component (B) and 1.96 g of Aronix M-450 (manufactured by Toa Gosei Co., Ltd.), 0 of OXE-01 (manufactured by BASF Corp.) as component (C) 0.07 g, 2.92 g of PGMEA as a part of component (D), 0.001 g of FZ2122 (manufactured by Toray Dow Corning) as another component, and stir until insoluble matter disappears, alkali developing photosensitive Composition No. 1 was obtained.
[実施例2~13及び比較例1~3]アルカリ現像性感光性組成物No.2~No.13及び比較アルカリ現像性感光性組成物No.1~No.3の調整
 実施例1と同様の手順で、[表1]に示す配合で各成分を混合し、アルカリ現像性感光性組成物No.2~No.13及び比較アルカリ現像性感光性組成物No.1~No.3を得た。
[Examples 2 to 13 and Comparative Examples 1 to 3] Alkali-developable photosensitive composition No. 2 to No. 13 and comparative alkali-developable photosensitive composition No. 1-No. In the same procedure as in Example 1, each component was mixed with the formulation shown in [Table 1], and the alkali-developable photosensitive composition no. 2 to No. 13 and comparative alkali-developable photosensitive composition No. 1-No. 3 was obtained.
Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
[実施例14~26及び比較例4~6]近赤外線吸収フィルターNo.1~No.13及び比較近赤外線吸収フィルターNo.1~No.3の製造
 ガラス基板上に実施例1~13及び比較例1~3で得られたアルカリ現像性感光性組成物No.1~No.13及び比較アルカリ現像性感光性組成物No.1~No.3の2.5mLを滴下し、250rpm×10秒の条件でスピンコートした後、90℃で100秒間乾燥して、高圧水銀ランプで300mJ/cm2露光して近赤外線吸収フィルターNo.1~No.13及び比較近赤外線吸収フィルターNo.1~No.3を作成した。
[Examples 14 to 26 and Comparative Examples 4 to 6] Near-infrared absorbing filter no. 1-No. 13 and comparative near-infrared absorption filter no. 1-No. Production of Alkali Developable Photosensitive Composition Nos. Obtained in Examples 1 to 13 and Comparative Examples 1 to 3 on a glass substrate. 1-No. 13 and comparative alkali-developable photosensitive composition No. 1-No. 3 was added dropwise, spin-coated under the conditions of 250 rpm × 10 seconds, dried at 90 ° C. for 100 seconds, exposed to 300 mJ / cm 2 with a high-pressure mercury lamp, and subjected to near-infrared absorption filter no. 1-No. 13 and comparative near-infrared absorption filter no. 1-No. 3 was created.
[評価例1-1~1-13及び比較評価例1-1~1-2]近赤外線吸収フィルターNo.1~No.13及び比較近赤外線吸収フィルターNo.1~No.2の耐アルカリ試験
 実施例14~26で得られた近赤外線吸収フィルターNo.1~No.13及び比較例4~5で得られた比較近赤外線吸収フィルターNo.1~No.2について、2.5%炭酸カリウム水溶液を180秒間スプレーし、スプレー前後での膜厚を測定し、膜厚減少率を算出することにより耐アルカリ試験とした。結果を[表2]に示す。
[Evaluation Examples 1-1 to 1-13 and Comparative Evaluation Examples 1-1 to 1-2] 1-No. 13 and comparative near-infrared absorption filter no. 1-No. 2. Alkali resistance test No. 2 of near-infrared absorption filter No. obtained in Examples 14 to 26 1-No. No. 13 and Comparative Near Infrared Absorbing Filter Nos. 1-No. For No. 2, a 2.5% potassium carbonate aqueous solution was sprayed for 180 seconds, the film thickness before and after spraying was measured, and the film thickness reduction rate was calculated to make an alkali resistance test. The results are shown in [Table 2].
Figure JPOXMLDOC01-appb-T000017
Figure JPOXMLDOC01-appb-T000017
[評価例2-1~2-13及び比較評価例2-1]近赤外線吸収フィルターNo.1~No.13及び比較近赤外線吸収フィルターNo.3の透過率測定
 実施例14~26で得られた近赤外線吸収フィルターNo.1~No.13及び比較例6で得られた比較近赤外線吸収フィルターNo.3について、日本分光社製紫外可視近赤外分光光度計V-570を用いて900nm、1000nm、1100nmの透過率を測定した。結果を[表3]に示す。
[Evaluation Examples 2-1 to 2-13 and Comparative Evaluation Example 2-1] Near-infrared absorbing filter no. 1-No. 13 and comparative near-infrared absorption filter no. Measurement of the transmittance of the near-infrared absorption filter No. 1 obtained in Examples 14 to 26. 1-No. 13 and Comparative Near Infrared Absorption Filter No. For No. 3, transmittances at 900 nm, 1000 nm, and 1100 nm were measured using an ultraviolet-visible near-infrared spectrophotometer V-570 manufactured by JASCO Corporation. The results are shown in [Table 3].
Figure JPOXMLDOC01-appb-T000018
Figure JPOXMLDOC01-appb-T000018
[評価例3-1~3-4及び比較評価例3-1]
 実施例14、16、19、24及び比較例6で得られた近赤外線吸収フィルターNo.1、No.3、No.6、No.9及び比較近赤外線吸収フィルターNo.3について、スガ試験機製キセノン耐光性試験機テーブルサンXT-1500Lにて50時間耐光性試験を実施し、900nm透過率の変化量を評価した。具体的には該変化量は、耐光性試験後の透過率から耐光性試験前の透過率を引いて得られる値を、耐光性試験前の透過率で除して得られる値である。耐光性試験前及び耐光性試験後の透過率は日本分光社製紫外可視近赤外分光光度計V-570を用いて測定した。評価結果を[表4]に示す。
[Evaluation Examples 3-1 to 3-4 and Comparative Evaluation Example 3-1]
The near-infrared absorption filter No. obtained in Examples 14, 16, 19, 24 and Comparative Example 6 was used. 1, no. 3, no. 6, no. 9 and comparative near-infrared absorption filter no. For No. 3, a 50-hour light resistance test was carried out with Xenon Light Resistance Tester Table Sun XT-1500L manufactured by Suga Test Instruments Co., Ltd., and the change in transmittance at 900 nm was evaluated. Specifically, the amount of change is a value obtained by dividing a value obtained by subtracting the transmittance before the light resistance test from the transmittance after the light resistance test by the transmittance before the light resistance test. The transmittance before the light resistance test and after the light resistance test was measured using an ultraviolet-visible near-infrared spectrophotometer V-570 manufactured by JASCO Corporation. The evaluation results are shown in [Table 4].
Figure JPOXMLDOC01-appb-T000019
Figure JPOXMLDOC01-appb-T000019
 [表3]及び[表4]の結果より、本発明のアルカリ現像性感光性組成物の硬化物を用いて形成される近赤外線吸収フィルターは、波長900~1100nmにおいて透過率が低い、すなわち有効に赤外線を遮断しており、かつ耐光性が高い。また、硬化物の耐アルカリ性が高いため、フォトリソグラフィー特性に優れる。 From the results of [Table 3] and [Table 4], the near-infrared absorption filter formed using the cured product of the alkali-developable photosensitive composition of the present invention has low transmittance at a wavelength of 900 to 1100 nm, that is, effective. Infrared rays are also blocked and light resistance is high. In addition, since the cured product has high alkali resistance, it has excellent photolithography characteristics.

Claims (6)

  1.  赤外線吸収色素(A)、アルカリ現像性を与えるアルカリ可溶性の置換基を有する、エチレン性不飽和結合を有する重合性化合物(B)、光重合開始剤(C)及び溶媒(D)を含有し、
     上記光重合開始剤(C)がオキシムエステル化合物を含有することを特徴とするアルカリ現像性感光性組成物。
    Containing an infrared-absorbing dye (A), an alkali-soluble substituent that gives alkali developability, a polymerizable compound (B) having an ethylenically unsaturated bond, a photopolymerization initiator (C), and a solvent (D);
    The alkali-developable photosensitive composition, wherein the photopolymerization initiator (C) contains an oxime ester compound.
  2.  上記光重合開始剤(C)が下記一般式(I)で表される化合物を含有することを特徴とする請求項1記載のアルカリ現像性感光性組成物。
    Figure JPOXMLDOC01-appb-C000001
    (式中、R1及びR2は、それぞれ独立に、水素原子、シアノ基、置換基を有してもよい炭素原子数1~20のアルキル基、置換基を有してもよい炭素原子数6~30のアリール基、置換基を有してもよい炭素原子数7~30のアリールアルキル基又は置換基を有してもよい炭素原子数2~20の複素環基を表し、
     R3及びR4は、それぞれ独立に、水素原子、ハロゲン原子、ニトロ基、シアノ基、水酸基、カルボキシル基、R5、OR6、SR7、NR89、COR10、SOR11、SO212又はCONR1314を表し、
     R5、R6、R7、R8、R9、R10、R11、R12、R13及びR14は、それぞれ独立に、置換基を有してもよい炭素原子数1~20のアルキル基、置換基を有してもよい炭素原子数6~30のアリール基、置換基を有してもよい炭素原子数7~30のアリールアルキル基又は置換基を有してもよい炭素原子数2~20の複素環基を表し、
     Xは、酸素原子、硫黄原子、セレン原子、CR1516、CO、NR17又はPR18を表し、
     R15、R16、R17及びR18は、それぞれ独立に、水素原子、置換基を有してもよい炭素原子数1~20のアルキル基、置換基を有してもよい炭素原子数6~30のアリール基又は置換基を有してもよい炭素原子数7~30のアリールアルキル基を表し、上記アルキル基又はアリールアルキル基中のメチレン基は、-O-で中断されていてもよく、
     R15、R16、R17及びR18は、それぞれ独立に、隣接するどちらかのベンゼン環と一緒になって環を形成していてもよく、
     aは、0~4の整数を表し、
     bは、1~5の整数を表す。)
    The alkali-developable photosensitive composition according to claim 1, wherein the photopolymerization initiator (C) contains a compound represented by the following general formula (I).
    Figure JPOXMLDOC01-appb-C000001
    (Wherein R 1 and R 2 are each independently a hydrogen atom, a cyano group, an optionally substituted alkyl group having 1 to 20 carbon atoms, or an optionally substituted carbon atom number) An aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms which may have a substituent, or a heterocyclic group having 2 to 20 carbon atoms which may have a substituent;
    R 3 and R 4 are each independently a hydrogen atom, halogen atom, nitro group, cyano group, hydroxyl group, carboxyl group, R 5 , OR 6 , SR 7 , NR 8 R 9 , COR 10 , SOR 11 , SO 2. Represents R 12 or CONR 13 R 14 ,
    R 5 , R 6 , R 7 , R 8 , R 9 , R 10 , R 11 , R 12 , R 13 and R 14 each independently has 1 to 20 carbon atoms which may have a substituent. An alkyl group, an aryl group having 6 to 30 carbon atoms which may have a substituent, an arylalkyl group having 7 to 30 carbon atoms which may have a substituent or a carbon atom which may have a substituent Represents a heterocyclic group of formula 2 to 20,
    X represents an oxygen atom, a sulfur atom, a selenium atom, CR 15 R 16 , CO, NR 17 or PR 18 ;
    R 15 , R 16 , R 17 and R 18 each independently represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms which may have a substituent, or an optionally substituted carbon atom having 6 carbon atoms. Represents an aryl group of ˜30 or an arylalkyl group of 7 to 30 carbon atoms which may have a substituent, and the methylene group in the alkyl group or arylalkyl group may be interrupted by —O—. ,
    R 15 , R 16 , R 17 and R 18 may each independently form a ring together with one of the adjacent benzene rings,
    a represents an integer of 0 to 4,
    b represents an integer of 1 to 5. )
  3.  上記赤外線吸収色素(A)がジイモニウム化合物であることを特徴とする請求項1又は2に記載のアルカリ現像性感光性組成物。 3. The alkali-developable photosensitive composition according to claim 1 or 2, wherein the infrared absorbing dye (A) is a diimonium compound.
  4.  上記赤外線吸収色素(A)が下記一般式(II)で表されることを特徴とする請求項1~3のいずれか1項に記載のアルカリ現像性感光性組成物。
    Figure JPOXMLDOC01-appb-C000002
    (式中、R19、R20、R21、R22、R23、R24、R25及びR26はそれぞれ独立に、水素原子又は置換基を有してもよい炭素原子数1~10のアルキル基を表し、R27、R28、R29及びR30はそれぞれ独立に、水素原子、ハロゲン原子、置換基を有してもよい炭素原子数1~10のアルキル基又は置換基を有してもよいアミノ基を表し、上記アルキル基中のメチレン基は、-O-又は-CH=CH-で中断されていてもよく、tは1~4の数を表し、Anq-はq価のアニオンを表し、qは1又は2を表し、pは電荷を中性に保つ係数を表す。)
    The alkali-developable photosensitive composition according to any one of claims 1 to 3, wherein the infrared absorbing dye (A) is represented by the following general formula (II).
    Figure JPOXMLDOC01-appb-C000002
    (In the formula, R 19 , R 20 , R 21 , R 22 , R 23 , R 24 , R 25 and R 26 each independently has 1 to 10 carbon atoms which may have a hydrogen atom or a substituent. Represents an alkyl group, and each of R 27 , R 28 , R 29 and R 30 independently has a hydrogen atom, a halogen atom, or an alkyl group having 1 to 10 carbon atoms which may have a substituent or a substituent. An methylene group in the alkyl group may be interrupted by —O— or —CH═CH—, t represents a number of 1 to 4, and An q− represents a q valence. Q represents 1 or 2, and p represents a coefficient for keeping the charge neutral.)
  5.  請求項1~4のいずれか1項に記載のアルカリ現像性感光性組成物の硬化物。 A cured product of the alkali-developable photosensitive composition according to any one of claims 1 to 4.
  6.  請求項5に記載の硬化物を用いて形成される近赤外線吸収フィルター。 A near-infrared absorption filter formed using the cured product according to claim 5.
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