WO2014067250A1 - Element clamping device and control method therefor - Google Patents

Element clamping device and control method therefor Download PDF

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Publication number
WO2014067250A1
WO2014067250A1 PCT/CN2013/072941 CN2013072941W WO2014067250A1 WO 2014067250 A1 WO2014067250 A1 WO 2014067250A1 CN 2013072941 W CN2013072941 W CN 2013072941W WO 2014067250 A1 WO2014067250 A1 WO 2014067250A1
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WO
WIPO (PCT)
Prior art keywords
clamping
component
clamping force
humidity
working environment
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PCT/CN2013/072941
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French (fr)
Chinese (zh)
Inventor
苏建华
乔红
董继武
张宇仁
Original Assignee
中国科学院自动化研究所
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Application filed by 中国科学院自动化研究所 filed Critical 中国科学院自动化研究所
Publication of WO2014067250A1 publication Critical patent/WO2014067250A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Definitions

  • the present invention relates to the field of automatic control, and in particular to a component clamping device and a control method thereof. Background technique
  • the optical components are mounted in a supporting metal frame with a fixed support around them, and the supporting metal frame is mounted to the system's mounting bracket.
  • the clamping force needs to be able to balance the gravity of the optical component itself and the disturbing power during installation, avoiding the optical component from supporting
  • the thermal deformation includes three parts such as deformation caused by thermal expansion of the material in the axial direction by thermal expansion, thermal stress caused by temperature change, and deformation due to the free expansion restriction of the supporting metal frame to the optical element.
  • Reference 1 (Chinese invention patent: application number 01273469.1) A frame for a mirror in a laser cavity mirror and a light guiding system is proposed.
  • the laser mirror is located in the frame and is fixed by a pressing screw to press the screw head It is a conical head with a small taper shape.
  • Three holes are made on the side of the laser mirror. The hole is ground with the same taper as the conical head of the compression screw.
  • the compression screws are fixed from the corresponding fixing holes of the laser mirror on the frame.
  • Laser mirror (U.S. Patent No. 4,763,991) discloses an optical element holding mechanism.
  • the optical component clamping mechanism adopts a three-point support mode, and each support point clamps the optical component by a locking mechanism, and the three locking mechanisms can adjust the position and posture of the optical component by linkage.
  • the existing component clamping method has the following drawbacks: (1) in the process of mounting the optical component to the supporting metal frame or when carrying the supporting metal frame on which the optical component is mounted Due to the installation and handling of vibrations, the fixed position of the plastic nails and the fixed point load are difficult to balance or cancel the disturbance power: The large clamping force will generate residual micro stress inside the optical component; Small, the optical component may deviate from the original position. (2) The existing clamping method cannot change the position of the nip point and the clamping force applied to the optical element according to the change of the working environment temperature and humidity of the optical component, and also causes the optical component to Deformation. Summary of the invention
  • the present invention provides an element holding device and a control method thereof for automatically adjusting the position of the nip point and the applied clamping force.
  • an optical component holding device comprising: a clamping frame, a pressure collecting unit, and a control unit.
  • a clamping frame for applying a clamping force to the clamped component to fix the clamped component comprising: a support frame; “a clamp drive driver, respectively fixed on the outside of the support frame; “one elastic clamp, respectively Mounted on the corresponding clamp drive, the front end of which passes through the corresponding hole in the support frame and presses against the clamped component.
  • the pressure collecting unit is configured to collect a clamping force value applied by the elastic clamping member in the clamping frame to the clamped component, and input the clamping force value to the control unit.
  • a control unit configured to control n clamping member drivers, comprising: a clamping calculation module, configured to select, from the one elastic clamping member, t elastic clips that need to apply a clamping force according to a preset deformation amount of the component Holding member and clamping force value respectively required to be applied, wherein tn; output driving module for respectively controlling the corresponding clamping member drivers of the t elastic clamping members that need to apply the clamping force with corresponding clamping force values The clamping element exerts a clamping force.
  • a method for controlling a component holding device for controlling the component clamping device described above is performed by the clamping calculation module, including: obtaining an operating environment by offline experiment Training data set of temperature and humidity, clamping position and its force, component deformation amount; using the support vector machine regression algorithm, using the training data set, obtaining the deformation amount of the clamped component and the clamping force value of each elastic clamping member Regression function model; and according to the deformation amount of a given clamped component, using the regression function model, select t elastic clips that need to apply clamping force from each elastic gripper and respectively need to be applied The clamping force value.
  • the component holding device of the present invention and the control method thereof have the following beneficial effects:
  • FIG. 1 is a schematic structural view of a component holding device according to an embodiment of the present invention.
  • FIG. 2 is a schematic structural view of a clamping frame in the component clamping device shown in FIG. 1;
  • FIG. 3 is a working principle diagram of a pressure collecting unit in the component holding device shown in FIG. 1.
  • FIG. 4 is a working principle diagram of a temperature and humidity collecting unit in the component holding device shown in FIG. 1.
  • FIG. 6 is a flow chart of a method for controlling a component clamping device according to an embodiment of the present invention.
  • Fig. 7 is a detailed flow chart of step C in the method of controlling the component holding device shown in Fig. 6. detailed description
  • the component holding device and the control method thereof according to the present invention can automatically adjust the position of the nip point and the applied clamping force according to the desired deformation rate of the component, the temperature/humidity of the working environment, and the deformation amount of the component is not larger than the desired deformation amount.
  • the components involved in the component holding device of the present invention are first listed as follows:
  • 3-temperature humidity acquisition unit 4-control unit;
  • FIG. 1 is a schematic view showing the structure of a component holding device according to an embodiment of the present invention.
  • the component holding device of this embodiment comprises: a clamping frame 1, a pressure collecting unit 2, a temperature and humidity collecting unit 3, a control unit 4, and a driving unit 5.
  • the clamping frame 1 is used to fix the clamped optical component 6.
  • the pressure collecting unit 2 collects the value of the clamping force applied to the optical element 6 by the holding frame, and inputs the value of the clamping force into the control unit 4.
  • the temperature and humidity collecting unit 5 is configured to collect the temperature value and the humidity value near the clamping frame 1, and input the temperature value and the humidity value to the control unit 4.
  • the control unit 4 is configured to calculate the clamping force that should be applied to the clamping frame 1 according to the predetermined deformation amount, the temperature value and the humidity value of the preset optical component, and then control the driving unit 5 to act to drive the clamping frame 1 to be applied. Holding force.
  • FIG. 2 is a schematic view showing the structure of a holding frame in the component holding device shown in Figure 1.
  • the clamping frame 1 includes: a support frame 11 , plastic nails 131 , 132 , 133 , 134 , 135 , 136 , 137 , 138 , plastic nail drivers 141 , 142 , 143 , 144 , 145 , 146 , 147 , 148.
  • the length of the 8 nails is the same as the outer diameter.
  • Eight plastic staple drivers 14 are fixed to the outside of the support frame. Eight plastic nails are respectively mounted on the eight nail drive drivers, for example, the nails 131 are mounted on the staple drive 141. Driven by the glue driver, the glue nail can apply a clamping force to the optical element by telescopic movement.
  • the glue driver 141 or the like can select a servo cylinder, and by adjusting the telescopic length of the servo cylinder rod, the telescopic movement of the rubber nail is driven to apply a clamping force to the optical element.
  • the glue nails may be replaced by spring leaf holding members, and the nail driver may also be a servo motor or the like.
  • the number of glue and staple drivers can be adjusted as needed. It is not limited to eight in this embodiment.
  • Fig. 3 is a schematic view showing the operation of the pressure collecting unit in the component holding device shown in Fig. 1.
  • the pressure collecting unit 2 includes: 8 strain gauge pressure sensors 211, 212, 213, 214, 215, 216, 217, 218 and a pressure information processing board 22.
  • 8 strain gauge pressure sensors are respectively mounted on 8 plastic nails 131, 132, 133, 134, 135, 136, 137, 138 and 8 staple drive 141, 142, 143, 144, 145, 146, 147, 148 Connection.
  • the signal output terminals of the eight strain gauge pressure sensors are connected to the input of the pressure information processing board 22.
  • the pressure information processing board 22 includes a pressure plate microcomputer 221, a pressure signal conditioning circuit 222, and a communication circuit 223.
  • the pressure signal conditioning circuit 222 can adopt a resistor-capacitor filter circuit. The main purpose is to perform noise conditioning, amplification and filtering on the input pressure sensor signal to obtain a conditioned pressure signal.
  • the conditioned pressure signal is input to the pressure plate microcontroller 221 .
  • the pressure plate MCU 221 uses the digital filtering method to process the conditioned pressure signal to obtain the pressure values collected by the eight strain gauge pressure sensors.
  • the communication circuit can transmit 8 pressure values obtained by the pressure plate MCU 221 to the control unit 4 by RS485 serial communication.
  • FIG. 4 is a working principle diagram of the temperature and humidity collecting unit 3 in the component clamping device shown in FIG.
  • the temperature/humidity collecting unit 3 includes a temperature/humidity sensor 31, a temperature/humidity board unit 32, and a temperature/humidity board communication circuit 33.
  • the temperature/humidity sensor 31 detects the working environment temperature and the ambient humidity parameter in real time, and converts the analog quantity and the digital quantity converter in the sensor chip into corresponding binary values and stores them in the RAM of the chip, and the temperature/humidity board single chip 32 transmits and reads by reading. Take the temperature and humidity sensor temperature and humidity command code, the temperature and humidity sensor will return the corresponding temperature value or humidity value.
  • the temperature/humidity board communication circuit 33 uses RS485 serial communication to transmit the working environment temperature value and humidity value obtained by the temperature single chip 32 to the control unit 4.
  • FIG. 5 is a schematic structural view of the control unit 4 in the component clamping device shown in FIG.
  • the control unit 4 includes: a control computer 41, a communication circuit 42, and an output drive module 43.
  • the control computer 41 can select an industrial control computer, the communication circuit can select a RS485 serial circuit, and the output drive module 43 can select a proportional flow valve or a hydraulic valve.
  • a grip calculation module 411 is stored in the control computer 41.
  • the clamping calculation module 411 receives the pressure value input by the pressure collecting unit 2 through the RS485 communication circuit 42, and the temperature value and the humidity value input by the temperature and humidity collecting unit 3, according to the preset deformation amount of the optical component, from the elastic clip Selecting t elastic clamping members that need to apply a clamping force and clamping force values respectively required to be applied, wherein tn;
  • the proportional flow valve of the output drive module 43 respectively controls the servo cylinders corresponding to the t glues that need to apply the clamping force to apply a clamping force to the clamped optical elements with corresponding clamping force values.
  • the present invention also provides a control method, which is executed by a clamping calculation module in the control computer 41.
  • the control method includes: Step A, offline Experiment, obtaining a training data set, each training data in the training data set includes information such as working environment temperature and humidity, clamping position and clamping force thereof, deformation amount of the clamped optical element, and the like;
  • the training data acquisition step is :
  • Sub-step A1 Under the condition that the working environment temperature is ⁇ and the working environment humidity is Mi, the driving glue pins 131, 133, 135 and 137 are extended, and the position of the glue nail is P 1 () , P 30 , P 5 o, P 7 o indicates that the applied clamping forces are F 1Q , F 3Q , F 5Q , F 7Q , respectively .
  • Measuring the amount of deformation of the clamped optical element is Yi o Recording the first set of data for S corpse (Xj, Y x , Tj , Mj ), where X corpse ( ⁇ 1() , ⁇ 30 ,
  • Sub-step A2 Under the condition that the working environment temperature is T 2 and the working environment humidity is ⁇ 2 , the driving glue pins 132, 134, 136 and 138 are extended, and the positions of the glue nails are respectively ⁇ 2 () , ⁇ 40 , ⁇ 6 ⁇ , Pso indicates that the applied clamping force is F 2Q , F 4Q , F 6Q , F 80 o , respectively, and the amount of deformation of the clamped optical element is Y 2 .
  • Sub-step A3 Under the condition that the working environment temperature is T 3 and the working environment humidity is M 3 , the driving glue nails 131, 133, 135 and 137 are extended, and the positions of the rubber nails are respectively ⁇ 1 () , ⁇ 30 , ⁇ 5 ⁇ , ⁇ 7 ⁇ indicates; the applied clamping force is F recreational, F 31 , F 51 , F 71. The amount of deformation of the clamped optical element is measured as Y 3 .
  • Sub-step 4 Under the condition that the working environment temperature is ⁇ 4 and the working environment humidity is ⁇ 4, the driving glue pins 132, 134, 136 and 138 are extended, and the positions of the glue nails are respectively P 2Q , P 4Q , P 60 , P 8 o indicates; the applied clamping force is F 21 , F 41 , F 61 , F 81 .
  • the amount of deformation of the held optical element is measured as Y 4 .
  • the above S 2 , S 3 , and S 4 are the four training data of the obtained training data set.
  • the training data in the training data set can also be more groups, and the manner of obtaining is the same, and will not be repeated.
  • Step B Using a support vector machine (SVM) regression algorithm, using the training data set, obtaining a regression function model between the deformation amount of the clamped optical component and the working environment temperature value, the humidity value, and the clamping force value;
  • SVM support vector machine
  • step B according to the support vector machine (SVM) regression algorithm, the deformation amount of the clamped optical element is obtained by training data Si, S 2 , S 3 , S 4 ; position and clamping of the clamping point
  • the force variable x, the regression function model x) is calculated as:
  • Fig. 7 is a flow chart showing a step C in the method of controlling the component holding device shown in Fig. 6. As shown in FIG. 7, the embodiment C includes:
  • Sub-step C1 receiving the working environment temperature T and the working environment humidity M obtained by the temperature and humidity collecting unit 3, according to the regression function model x), calculating the out-of-line ( ⁇ 8) position as ⁇ .
  • the deformation amount of the optical element is less than the desired deformation amount I, that is, r ⁇ i, the position of the output glue pin P ⁇ .A and its clamping force F ⁇ F ⁇ Otherwise, step C2 is performed;
  • Sub-step C2 The initial value of j is taken as 1, the j- studded nail ( ⁇ 8) in the retracted position, the plastic stud with the extended position of Pra +1 ( ⁇ +1 ⁇ 8 ), and the clamping force is applied.
  • F ra+1 according to the regression function / (x), offline calculation when the working environment temperature is T, the humidity is M, the optical deformation amount ⁇ , if ⁇ ⁇ , the output glue nail position ⁇ 1; ..., P, P + i, P ra , P ra+ i and clamping force F 1; ... , F y-1 , F y+1 , F ra , F ra+1 ; If ⁇ '> ⁇ > ⁇ ⁇ , execute ⁇ Step C3; otherwise, add 1 and repeat step C2;
  • Sub-step C3 The j-th glue in which the retracted position is, that is, only m-1 positions are applied as ⁇ ., ⁇ , ⁇ , ⁇ and the clamping force is applied F ⁇ .A ⁇ F ⁇ F ⁇ then the regression function D, calculated off when the operating temperature is T, the working environment humidity ⁇ , the optical deformation amount ', if' ⁇ ⁇ , the output of plastic nail position ⁇ ⁇ , ⁇ ⁇ ,? ⁇ and The clamping force F , ..., F J+1 , Fra; if '>; ⁇ >; ⁇ ⁇ , force ⁇ 1, w minus 1, repeat step C3.
  • the clamping force applied by a certain elastic clamping member is zero, that is, the elastic clamping member does not apply a clamping force, which is also within the protection scope of the present invention.
  • the component clamping device of the present invention is suitable for optical devices such as solid-state lasers, optical telescopes, or other devices, and can automatically adjust the position of the nip point and the applied clip according to the desired deformation rate of the component, the temperature/humidity of the working environment. With force, the deformation of the component is not greater than the desired deformation, which ensures the reliability and accuracy of the working state of the clamped component.

Abstract

An element clamping device, comprising: a clamping frame (1), a pressure acquisition unit (2) and a control unit (4). The clamping frame (1) is used for applying a clamping force to a clamped element (6) so as to fix same, and comprises: a support frame (11); n clamping element drivers (141, 142, 143, 144, 145, 146, 147, 148) respectively fixed to the outside of the support frame (11); and n elastic clamping elements (131, 132, 133, 134, 135, 136, 137, 138) respectively installed on the corresponding clamping element driver (141, 142, 143, 144, 145, 146, 147, 148), with each front end thereof passing through a corresponding hole in the support frame (11) and abutting against the clamped element (6). The pressure acquisition unit (2) is used for acquiring the value of the clamping force applied to the clamped element (6) by the elastic clamping elements (131, 132, 133, 134, 135, 136, 137, 138) in the clamping frame (1), and inputting same into the control unit (4). The control unit (4) is used for controlling the n clamping element drivers (141, 142, 143, 144, 145, 146, 147, 148). By means of the element clamping device and the control method therefor, the location of a clamping point and the applied clamping force can be adjusted according to the expected amount of deformation of the element (6), thereby reducing the deformation of the optical element (6).

Description

元件夹持装置及其控制方法 技术领域  Component clamping device and control method thereof
本发明涉及自动控制领域, 尤其涉及一种元件夹持装置及其控制方法。 背景技术  The present invention relates to the field of automatic control, and in particular to a component clamping device and a control method thereof. Background technique
高功率固体激光系统中, 光学元件是采用四周固定支撑的方式安装在 支撑金属框中, 支撑金属框安装到系统的固定支架上。 随着高功率固体激 光技术的不断发展, 对固体激光的功率和光束质量提出了更高的要求, 用 于放大激光光路能量的光学元件的尺寸也随着增大。  In high-power solid-state laser systems, the optical components are mounted in a supporting metal frame with a fixed support around them, and the supporting metal frame is mounted to the system's mounting bracket. With the continuous development of high-power solid-state laser technology, higher requirements have been placed on the power and beam quality of solid-state lasers, and the size of optical components used to amplify the energy of laser light paths has also increased.
光学元件尺寸的增大, 对使用过程中的夹持方式提出了更高的要求: 一方面, 夹持力需要能够平衡光学元件自身的重力以及在安装过程中的扰 动力, 避免光学元件从支撑金属框中脱落; 另一方面, 在高功率激光器运 行过程中, 由于受到激光辐照的影响, 光学元件会产生热形变, 夹持力需 要保证在热形变情况下光学元件的有效支撑。 其中, 热形变包括由材料受 热沿轴向的热膨胀、温度变化产生的热应力导致的形变和由于支撑金属框 对光学元件的自由膨胀限制而导致的绕曲变形等三部分。  The increase in the size of the optical component places higher demands on the clamping method during use: On the one hand, the clamping force needs to be able to balance the gravity of the optical component itself and the disturbing power during installation, avoiding the optical component from supporting On the other hand, during the operation of the high-power laser, the optical component is thermally deformed due to the influence of the laser irradiation, and the clamping force needs to ensure the effective support of the optical component in the case of thermal deformation. Among them, the thermal deformation includes three parts such as deformation caused by thermal expansion of the material in the axial direction by thermal expansion, thermal stress caused by temperature change, and deformation due to the free expansion restriction of the supporting metal frame to the optical element.
对于光学元件夹持方法及装置的研究引起了很多技术人员的关注。参 考文献 1 (中国发明专利: 申请号 01273469.1 ) 提出了一种用于激光腔镜 及导光系统中反射镜的镜架, 激光镜位于镜架内, 由压紧螺丝固定, 压紧 螺丝头部为圆锥头, 呈小锥度圆台形, 激光镜侧面打三个固定孔, 孔口研 磨出与压紧螺丝圆锥头锥度相同的环带, 压紧螺丝分别从镜架上对应激光 镜固定孔位置固定激光镜。 参考文献 2 (美国发明专利第 4763991号) 提 出了一种光学元件夹持机构。 该光学元件夹持机构采用三点支撑方式, 每 个支撑点通过锁紧机构夹紧光学元件, 三个锁紧机构可以通过联动调整光 学元件的位置和姿态。  Research on optical component clamping methods and devices has attracted the attention of many technicians. Reference 1 (Chinese invention patent: application number 01273469.1) A frame for a mirror in a laser cavity mirror and a light guiding system is proposed. The laser mirror is located in the frame and is fixed by a pressing screw to press the screw head It is a conical head with a small taper shape. Three holes are made on the side of the laser mirror. The hole is ground with the same taper as the conical head of the compression screw. The compression screws are fixed from the corresponding fixing holes of the laser mirror on the frame. Laser mirror. Reference 2 (U.S. Patent No. 4,763,991) discloses an optical element holding mechanism. The optical component clamping mechanism adopts a three-point support mode, and each support point clamps the optical component by a locking mechanism, and the three locking mechanisms can adjust the position and posture of the optical component by linkage.
然而, 在实现本发明的过程中, 申请人发现现有的元件夹持方式存在 如下缺陷: (1 )在将光学元件安装到支撑金属框的过程中或搬运安装有光 学元件的支撑金属框时, 由于安装和搬运振动等, 位置固定不变的胶钉、 固定不变的点载荷很难平衡或抵消扰动力: 夹持力较大将会在光学元件内 部产生残余的微应力; 夹持力过小, 则光学元件有可能偏离原来的位置甚 至脱落; (2 ) 已有的夹持方式不能根据光学元件所处工作环境温度和湿度 的变换, 相应地调节夹持点的位置和施加到光学元件的夹持力, 也会造成 光学元件的变形。 发明内容 However, in the process of implementing the present invention, the Applicant has found that the existing component clamping method has the following drawbacks: (1) in the process of mounting the optical component to the supporting metal frame or when carrying the supporting metal frame on which the optical component is mounted Due to the installation and handling of vibrations, the fixed position of the plastic nails and the fixed point load are difficult to balance or cancel the disturbance power: The large clamping force will generate residual micro stress inside the optical component; Small, the optical component may deviate from the original position. (2) The existing clamping method cannot change the position of the nip point and the clamping force applied to the optical element according to the change of the working environment temperature and humidity of the optical component, and also causes the optical component to Deformation. Summary of the invention
(一) 要解决的技术问题  (1) Technical problems to be solved
鉴于上述问题, 本发明提供了一种元件夹持装置及其控制方法, 以自 动调整夹持点的位置以及施加的夹持力。  In view of the above problems, the present invention provides an element holding device and a control method thereof for automatically adjusting the position of the nip point and the applied clamping force.
(二) 技术方案  (ii) Technical solutions
根据本发明的一个方面, 提供了一种光学元件夹持装置, 包括: 夹持 框、 压力采集单元和控制单元。 夹持框, 用于对被夹持元件施加夹持力以 固定被夹持元件, 包括: 支撑框; 《个夹持件驱动器, 分别固定在支撑框 的外部; 《个弹性夹持件, 分别安装在相应的夹持件驱动器上, 其前端穿 过支撑框上对应的孔, 抵压在被夹持元件上。 压力采集单元, 用于采集夹 持框中弹性夹持件对被夹持元件施加的夹持力值, 并将该夹持力值输入到 控制单元。控制单元,用于控制 n个夹持件驱动器,包括:夹持计算模块, 用于根据预设的元件期望变形量, 从《个弹性夹持件中选择需要施加夹持 力的 t个弹性夹持件及分别需要施加的夹持力值, 其中 t n; 输出驱动模 块, 用于分别控制需要施加夹持力的 t个弹性夹持件对应的夹持件驱动器 以相应的夹持力值对被夹持元件施加夹持力。  According to an aspect of the invention, an optical component holding device is provided, comprising: a clamping frame, a pressure collecting unit, and a control unit. a clamping frame for applying a clamping force to the clamped component to fix the clamped component, comprising: a support frame; “a clamp drive driver, respectively fixed on the outside of the support frame; “one elastic clamp, respectively Mounted on the corresponding clamp drive, the front end of which passes through the corresponding hole in the support frame and presses against the clamped component. The pressure collecting unit is configured to collect a clamping force value applied by the elastic clamping member in the clamping frame to the clamped component, and input the clamping force value to the control unit. a control unit, configured to control n clamping member drivers, comprising: a clamping calculation module, configured to select, from the one elastic clamping member, t elastic clips that need to apply a clamping force according to a preset deformation amount of the component Holding member and clamping force value respectively required to be applied, wherein tn; output driving module for respectively controlling the corresponding clamping member drivers of the t elastic clamping members that need to apply the clamping force with corresponding clamping force values The clamping element exerts a clamping force.
根据本发明的另一个方面, 还提供了一种元件夹持装置的控制方法, 用于对上述的元件夹持装置进行控制, 由夹持计算模块执行, 包括: 通过 离线实验, 获得包括工作环境温度和湿度、 夹持位置及其力、 元件变形量 的训练数据组; 采用支持向量机回归算法, 利用训练数据组, 获得被夹持 元件的变形量与各弹性夹持件夹持力值之间的回归函数模型; 以及根据给 定的被夹持元件的变形量, 利用回归函数模型, 从《个弹性夹持件中选择 需要施加夹持力的 t个弹性夹持件及分别需要施加的夹持力值。  According to another aspect of the present invention, a method for controlling a component holding device for controlling the component clamping device described above is performed by the clamping calculation module, including: obtaining an operating environment by offline experiment Training data set of temperature and humidity, clamping position and its force, component deformation amount; using the support vector machine regression algorithm, using the training data set, obtaining the deformation amount of the clamped component and the clamping force value of each elastic clamping member Regression function model; and according to the deformation amount of a given clamped component, using the regression function model, select t elastic clips that need to apply clamping force from each elastic gripper and respectively need to be applied The clamping force value.
(三) 有益效果  (3) Beneficial effects
从上述技术方案可以看出, 本发明元件夹持装置及其控制方法具有以 下有益效果:  As can be seen from the above technical solution, the component holding device of the present invention and the control method thereof have the following beneficial effects:
( 1 ) 根据元件期望变形量来调整夹持点的位置以及施加的夹持力, 从而减少光学元件的变形; (1) adjusting the position of the nip point and the applied clamping force according to the desired amount of deformation of the component, Thereby reducing the deformation of the optical element;
(2) 根据元件期望变形量、 工作环境温 /湿度来调整夹持点的位置及 夹持力的大小, 从而避免了损伤光学元件, 在不同的工作环境温度和工作 环境湿度条件下保持夹持装置的可靠性。 附图说明  (2) Adjust the position of the nip point and the clamping force according to the expected deformation amount of the component and the temperature/humidity of the working environment, thereby avoiding damage to the optical component and maintaining the clamping under different working environment temperatures and working environment humidity conditions. The reliability of the device. DRAWINGS
图 1根据本发明实施例元件夹持装置的结构示意图;  1 is a schematic structural view of a component holding device according to an embodiment of the present invention;
图 2为图 1所示元件夹持装置中夹持框的结构示意图;  2 is a schematic structural view of a clamping frame in the component clamping device shown in FIG. 1;
图 3为图 1所示元件夹持装置中压力采集单元的工作原理图; 图 4为图 1所示元件夹持装置中温度湿度采集单元的工作原理图; 图 5为图 1所示元件夹持装置中控制单元 4的结构示意图;  3 is a working principle diagram of a pressure collecting unit in the component holding device shown in FIG. 1. FIG. 4 is a working principle diagram of a temperature and humidity collecting unit in the component holding device shown in FIG. 1. FIG. Schematic diagram of the structure of the control unit 4 in the holding device;
图 6为本发明实施例元件夹持装置控制方法的流程图;  6 is a flow chart of a method for controlling a component clamping device according to an embodiment of the present invention;
图 7为图 6所示元件夹持装置控制方法中歩骤 C的详细流程图。 具体实施方式  Fig. 7 is a detailed flow chart of step C in the method of controlling the component holding device shown in Fig. 6. detailed description
为使本发明的目的、 技术方案和优点更加清楚明白, 以下结合具体实 施例, 并参照附图, 对本发明进一歩详细说明。  The present invention will be described in detail below with reference to the specific embodiments of the invention and the accompanying drawings.
需要说明的是, 在附图或说明书描述中, 相似或相同的部分都使用相 同的图号。 附图中未绘示或描述的实现方式, 为所属技术领域中普通技术 人员所知的形式。 另外, 虽然本文可提供包含特定值的参数的示范, 但应 了解, 参数无需确切等于相应的值, 而是可在可接受的误差容限或设计约 束内近似于相应的值。 此外, 以下实施例中提到的方向用语, 例如"上"、 "下"、 "前"、 "后"、 "左"、 "右"等, 仅是参考附图的方向。 因此, 使用的 方向用语是用来说明并非用来限制本发明。  It should be noted that in the drawings or the description of the specification, the same reference numerals are used for similar or identical parts. Implementations not shown or described in the figures are in the form known to those of ordinary skill in the art. In addition, although an example of a parameter containing a particular value may be provided herein, it should be understood that the parameter need not be exactly equal to the corresponding value, but may approximate the corresponding value within an acceptable error tolerance or design constraint. In addition, the directional terms mentioned in the following embodiments, such as "upper", "lower", "front", "back", "left", "right", etc., are only referring to the directions of the drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation.
本发明元件夹持装置及其控制方法能够根据元件期望变形率、工作环 境的温 /湿度自动调整夹持点的位置以及施加的夹持力,使元件的变形量不 大于期望变形量。 为便于理解, 首先将本发明元件夹持装置涉及的元件列 出如下:  The component holding device and the control method thereof according to the present invention can automatically adjust the position of the nip point and the applied clamping force according to the desired deformation rate of the component, the temperature/humidity of the working environment, and the deformation amount of the component is not larger than the desired deformation amount. For ease of understanding, the components involved in the component holding device of the present invention are first listed as follows:
1-夹持框; 2-压力采集单元;  1- clamping frame; 2-pressure collecting unit;
3-温度湿度采集单元; 4-控制单元;  3-temperature humidity acquisition unit; 4-control unit;
5-驱动单元; 6-光学元件;  5-drive unit; 6-optical component;
11 -支撑框; 22-压力信息处理板; 221-压力板单片机; 222-压力信号调理电路; 223-通信电路; 31-温湿度传感器; 32-温度板单片机; 33-温度板通信电路; 41-控制计算机; 42-通信电路; 43-输出驱动模块; 411-夹持计算模块; 11 - support frame; 22 - pressure information processing board; 221-pressure board MCU; 222-pressure signal conditioning circuit; 223-communication circuit; 31-temperature and humidity sensor; 32-temperature board MCU; 33-temperature board communication circuit; 41-control computer; 42-communication circuit; Drive module; 411-clamping calculation module;
131、 132、 133、 134、 135、 136、 137、  131, 132, 133, 134, 135, 136, 137,
141、 142、 143、 144、 145、 146、 147、  141, 142, 143, 144, 145, 146, 147,
211、 212、 213、 214、 215、 216、 217、  211, 212, 213, 214, 215, 216, 217,
在本发明的一个示例性实施例中, 提供了一种用于夹持光学元件的元 件夹持装置。 图 1根据本发明实施例元件夹持装置的结构示意图。 如图 1 所示, 本实施例元件夹持装置包括: 夹持框 1、 压力采集单元 2、 温度湿 度采集单元 3、 控制单元 4和驱动单元 5。 夹持框 1用于固定被夹持的光 学元件 6。 压力采集单元 2采集夹持框对光学元件 6施加的夹持力值, 并 将夹持力值输入到控制单元 4中。 温度湿度采集单元 5, 用于采集夹持框 1 附近的温度值和湿度值, 并将温度数值和湿度值输入到控制单元 4。 控 制单元 4, 用于根据预设的光学元件的期望变形量、 温度值和湿度值, 计 算出夹持框 1的应该施加的夹持力, 然后控制驱动单元 5动作, 驱动夹持 框 1施加夹持力。  In an exemplary embodiment of the invention, an element holding device for holding an optical element is provided. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic view showing the structure of a component holding device according to an embodiment of the present invention. As shown in Fig. 1, the component holding device of this embodiment comprises: a clamping frame 1, a pressure collecting unit 2, a temperature and humidity collecting unit 3, a control unit 4, and a driving unit 5. The clamping frame 1 is used to fix the clamped optical component 6. The pressure collecting unit 2 collects the value of the clamping force applied to the optical element 6 by the holding frame, and inputs the value of the clamping force into the control unit 4. The temperature and humidity collecting unit 5 is configured to collect the temperature value and the humidity value near the clamping frame 1, and input the temperature value and the humidity value to the control unit 4. The control unit 4 is configured to calculate the clamping force that should be applied to the clamping frame 1 according to the predetermined deformation amount, the temperature value and the humidity value of the preset optical component, and then control the driving unit 5 to act to drive the clamping frame 1 to be applied. Holding force.
以下分别对本实施例元件夹持装置的各个组成部分进行详细说明。 图 2为图 1所示元件夹持装置中夹持框的结构示意图。 请参照图 2, 夹持框 1包括: 支撑框 11, 胶钉 131、 132、 133、 134、 135、 136、 137、 138, 胶钉驱动器 141、 142、 143、 144、 145、 146、 147、 148。 8个胶钉 的长度和外径一样。支撑框 11上,对应着每个胶钉的位置都有一个圆孔, 圆孔的内径略大于胶钉的外径。 8个胶钉驱动器 14固定在支撑框的外部。 8个胶钉分别安装在 8个胶钉驱动器上, 例如, 胶钉 131安装在胶钉驱动 器 141上。 在胶钉驱动器的带动下, 胶钉通过伸缩运动向光学元件可以施 加夹持力。  The respective components of the component holding device of this embodiment will be described in detail below. Figure 2 is a schematic view showing the structure of a holding frame in the component holding device shown in Figure 1. Referring to FIG. 2 , the clamping frame 1 includes: a support frame 11 , plastic nails 131 , 132 , 133 , 134 , 135 , 136 , 137 , 138 , plastic nail drivers 141 , 142 , 143 , 144 , 145 , 146 , 147 , 148. The length of the 8 nails is the same as the outer diameter. On the support frame 11, there is a circular hole corresponding to the position of each plastic nail, and the inner diameter of the circular hole is slightly larger than the outer diameter of the plastic nail. Eight plastic staple drivers 14 are fixed to the outside of the support frame. Eight plastic nails are respectively mounted on the eight nail drive drivers, for example, the nails 131 are mounted on the staple drive 141. Driven by the glue driver, the glue nail can apply a clamping force to the optical element by telescopic movement.
本实施例中, 胶钉驱动器 141等可以选用伺服气缸, 通过调节伺服气 缸杆的伸缩长度, 从而带动胶钉的伸缩运动, 向光学元件施加夹持力。 在 本发明的其他实施例中, 胶钉还可以用弹簧片夹持件来替代, 胶钉驱动器 还可以选用伺服电机等。胶钉和胶钉驱动器的数目可以根据需要进行调整, 并不局限于本实施例中的 8个。 In this embodiment, the glue driver 141 or the like can select a servo cylinder, and by adjusting the telescopic length of the servo cylinder rod, the telescopic movement of the rubber nail is driven to apply a clamping force to the optical element. In other embodiments of the present invention, the glue nails may be replaced by spring leaf holding members, and the nail driver may also be a servo motor or the like. The number of glue and staple drivers can be adjusted as needed. It is not limited to eight in this embodiment.
图 3为图 1所示元件夹持装置中压力采集单元的工作原理图。请参照 图 3, 压力采集单元 2包括: 8个应变片压力传感器 211、 212、 213、 214、 215、 216、 217、 218和压力信息处理板 22。 8个应变片压力传感器分别安 装在 8个胶钉 131、 132、 133、 134、 135、 136、 137、 138与 8个胶钉驱 动器 141、 142、 143、 144、 145、 146、 147、 148的连接部。 8个应变片压 力传感器的信号输出端与压力信息处理板 22 的输入端连接。 压力信息处 理板 22中包括压力板单片机 221、压力信号调理电路 222、通信电路 223。 压力信号调理电路 222可以采用电阻电容滤波电路, 主要目的是对输入的 压力传感器的信号进行噪声抑制、 放大和滤波等调理操作, 获得调理后的 压力信号。 调理后的压力信号输入到压力板单片机 221中。 压力板单片机 221采用数字滤波方法对调理后的压力信号进行处理, 获得 8个应变片压 力传感器采集到的压力值。通信电路可以采用 RS485串行通信,将压力板 单片机 221获得的 8个压力值传输到控制单元 4。  Fig. 3 is a schematic view showing the operation of the pressure collecting unit in the component holding device shown in Fig. 1. Referring to Fig. 3, the pressure collecting unit 2 includes: 8 strain gauge pressure sensors 211, 212, 213, 214, 215, 216, 217, 218 and a pressure information processing board 22. 8 strain gauge pressure sensors are respectively mounted on 8 plastic nails 131, 132, 133, 134, 135, 136, 137, 138 and 8 staple drive 141, 142, 143, 144, 145, 146, 147, 148 Connection. The signal output terminals of the eight strain gauge pressure sensors are connected to the input of the pressure information processing board 22. The pressure information processing board 22 includes a pressure plate microcomputer 221, a pressure signal conditioning circuit 222, and a communication circuit 223. The pressure signal conditioning circuit 222 can adopt a resistor-capacitor filter circuit. The main purpose is to perform noise conditioning, amplification and filtering on the input pressure sensor signal to obtain a conditioned pressure signal. The conditioned pressure signal is input to the pressure plate microcontroller 221 . The pressure plate MCU 221 uses the digital filtering method to process the conditioned pressure signal to obtain the pressure values collected by the eight strain gauge pressure sensors. The communication circuit can transmit 8 pressure values obtained by the pressure plate MCU 221 to the control unit 4 by RS485 serial communication.
请参照图 4, 图 4为图 1所示元件夹持装置中温度湿度采集单元 3的 工作原理图。 温 /湿度采集单元 3包括, 温 /湿度传感器 31、 温 /湿度板单片 机 32和温 /湿度板通信电路 33。 温 /湿度传感器 31对工作环境温度和环境 湿度参数实时检测, 经传感器芯片内的模拟量和数字量转换器转换成对应 的二进制值存储于芯片的 RAM中, 温 /湿度板单片机 32通过发送读取温 湿度传感器温湿度命令码, 温湿度传感器就返回对应的温度值或湿度值。 温 /湿度板通信电路 33采用 RS485串行通信, 将温度单片机 32获得的工 作环境温度值和湿度值传输到控制单元 4。  Referring to FIG. 4, FIG. 4 is a working principle diagram of the temperature and humidity collecting unit 3 in the component clamping device shown in FIG. The temperature/humidity collecting unit 3 includes a temperature/humidity sensor 31, a temperature/humidity board unit 32, and a temperature/humidity board communication circuit 33. The temperature/humidity sensor 31 detects the working environment temperature and the ambient humidity parameter in real time, and converts the analog quantity and the digital quantity converter in the sensor chip into corresponding binary values and stores them in the RAM of the chip, and the temperature/humidity board single chip 32 transmits and reads by reading. Take the temperature and humidity sensor temperature and humidity command code, the temperature and humidity sensor will return the corresponding temperature value or humidity value. The temperature/humidity board communication circuit 33 uses RS485 serial communication to transmit the working environment temperature value and humidity value obtained by the temperature single chip 32 to the control unit 4.
请参照图 5, 图 5为图 1所示元件夹持装置中控制单元 4的结构示意 图。 控制单元 4包括: 控制计算机 41、 通信电路 42和输出驱动模块 43。 控制计算机 41可以选用工业控制计算机, 通信电路可以选用 RS485串行 电路, 输出驱动模块 43可以选用比例流量阀或液压阀。 控制计算机 41内 存储有夹持计算模块 411。夹持计算模块 411通过 RS485通信电路 42, 接 收压力采集单元 2输入的压力值, 以及温度湿度采集单元 3输入的温度值 和湿度值, 根据预设的光学元件期望变形量, 从《个弹性夹持件中选择需 要施加夹持力的 t个弹性夹持件及分别需要施加的夹持力值, 其中 t n; 输出驱动模块 43的比例流量阀,分别控制需要施加夹持力的 t个胶钉对应 的伺服气缸以相应的夹持力值对被夹持光学元件施加夹持力。 Please refer to FIG. 5. FIG. 5 is a schematic structural view of the control unit 4 in the component clamping device shown in FIG. The control unit 4 includes: a control computer 41, a communication circuit 42, and an output drive module 43. The control computer 41 can select an industrial control computer, the communication circuit can select a RS485 serial circuit, and the output drive module 43 can select a proportional flow valve or a hydraulic valve. A grip calculation module 411 is stored in the control computer 41. The clamping calculation module 411 receives the pressure value input by the pressure collecting unit 2 through the RS485 communication circuit 42, and the temperature value and the humidity value input by the temperature and humidity collecting unit 3, according to the preset deformation amount of the optical component, from the elastic clip Selecting t elastic clamping members that need to apply a clamping force and clamping force values respectively required to be applied, wherein tn; The proportional flow valve of the output drive module 43 respectively controls the servo cylinders corresponding to the t glues that need to apply the clamping force to apply a clamping force to the clamped optical elements with corresponding clamping force values.
至此, 本实施例元件夹持装置介绍完毕。  So far, the component holding device of this embodiment has been introduced.
基于上述实施例的元件夹持装置, 本发明还提供了一种控制方法, 由 控制计算机 41中的夹持计算模块来执行,如图 6所示,该控制方法包括: 歩骤 A, 通过离线实验, 获得训练数据组, 该训练数据组中的每一个 训练数据均包括工作环境温度和湿度、 夹持位置及其夹持力、 被夹持光学 元件的变形量等信息;  Based on the component clamping device of the above embodiment, the present invention also provides a control method, which is executed by a clamping calculation module in the control computer 41. As shown in FIG. 6, the control method includes: Step A, offline Experiment, obtaining a training data set, each training data in the training data set includes information such as working environment temperature and humidity, clamping position and clamping force thereof, deformation amount of the clamped optical element, and the like;
其中, 歩骤 A通过离线实验, 获得的工作环境温度和湿度、 夹持位置 和夹持力、 被夹持光学元件变形量等实验数据 S2、 S3、 S4, 训练数据 获取歩骤为: In the step A, the experimental data obtained by the offline experiment, the working environment temperature and humidity, the clamping position and the clamping force, the amount of deformation of the clamped optical element, etc., S 2 , S 3 , S 4 , the training data acquisition step is :
子歩骤 A1 : 在工作环境温度为 Ί\、工作环境湿度为 Mi的条件下, 驱 动胶钉 131、 133、 135和 137伸出,胶钉的位置用 P1(), P30, P5o, P7o表示, 施加的夹持力分别为 F1Q, F3Q, F5Q, F7Q。 测量被夹持光学元件的变形量为 Yi o 记录第一组数据为 S尸 ( Xj , Yx , Tj , Mj ) , 其中, X尸 (Ρ1(), Ρ30Sub-step A1: Under the condition that the working environment temperature is Ί\ and the working environment humidity is Mi, the driving glue pins 131, 133, 135 and 137 are extended, and the position of the glue nail is P 1 () , P 30 , P 5 o, P 7 o indicates that the applied clamping forces are F 1Q , F 3Q , F 5Q , F 7Q , respectively . Measuring the amount of deformation of the clamped optical element is Yi o Recording the first set of data for S corpse (Xj, Y x , Tj , Mj ), where X corpse (Ρ 1() , Ρ 30 ,
?50 ' ?70 ' Fl0, F30 ' F50 ' F7o ) ; ?50 ' ?70 ' Fl0 , F 3 0 ' F50 ' F 7 o ) ;
子歩骤 A2: 在工作环境温度为 T2、工作环境湿度为 Μ2的条件下, 驱 动胶钉 132、 134、 136和 138伸出, 胶钉的位置分别用 Ρ2(), Ρ40, Ρ6ο, Pso 表示, 施加的夹持力分别为 F2Q, F4Q, F6Q, F80o 测量被夹持光学元件的变 形量为 Y2。 记录第二组数据为 S2= (Χ2, Υ2, Τ2, Μ2), 其中, Χ2= (Ρ20Sub-step A2: Under the condition that the working environment temperature is T 2 and the working environment humidity is Μ 2 , the driving glue pins 132, 134, 136 and 138 are extended, and the positions of the glue nails are respectively Ρ 2 () , Ρ 40 , Ρ 6 ο, Pso indicates that the applied clamping force is F 2Q , F 4Q , F 6Q , F 80 o , respectively, and the amount of deformation of the clamped optical element is Y 2 . Record the second set of data as S 2 = (Χ 2 , Υ 2 , Τ 2 , Μ 2 ), where Χ 2 = (Ρ 20 ,
?40 ' ?60 ' ?80 ' F2o, F4o, F60, Fgo ; ?40 ' ? 60 ' ? 80 ' F 2 o, F 4 o, F60, Fgo ;
子歩骤 A3 : 在工作环境温度为 T3、工作环境湿度为M3的条件下, 驱 动胶钉 131、 133、 135和 137伸出, 胶钉的位置分别用 Ρ1(), Ρ30, Ρ5ο, Ρ7ο 表示; 施加的夹持力为 F„, F31, F51, F71。 测量被夹持光学元件的变形量 为 Y3。 记录第三组数据为 S3= ( , Y3, Τ3, Μ3), 其中, Χ3= (Ρ10, Ρ30Sub-step A3: Under the condition that the working environment temperature is T 3 and the working environment humidity is M 3 , the driving glue nails 131, 133, 135 and 137 are extended, and the positions of the rubber nails are respectively Ρ 1 () , Ρ 30 , Ρ 5 ο, Ρ 7 ο indicates; the applied clamping force is F„, F 31 , F 51 , F 71. The amount of deformation of the clamped optical element is measured as Y 3 . The third set of data is recorded as S 3 = ( , Y 3 , Τ 3 , Μ 3 ), where Χ 3 = (Ρ 10 , Ρ 30 ,
?50 ' ?70 ' Fll, F-71 ) ; ?50 ' ?70 ' Fll , F-71 ) ;
子歩骤 Α4: 在工作环境温度为 Τ4、工作环境湿度为 Μ4的条件下, 驱 动胶钉 132、 134、 136和 138伸出, 胶钉的位置为分别用 P2Q, P4Q, P60, P8o表示; 施加的夹持力为 F21, F41, F61, F81。 测量被夹持光学元件的变 形量为 Y4。 记录第二组数据为 S4= (Χ4, Υ4, Τ4, Μ4), 其中, Χ4= (Ρ20, ?40' ?60' ?80' , F41, F611 Fsi)。 Sub-step 4: Under the condition that the working environment temperature is Τ 4 and the working environment humidity is Μ4, the driving glue pins 132, 134, 136 and 138 are extended, and the positions of the glue nails are respectively P 2Q , P 4Q , P 60 , P 8 o indicates; the applied clamping force is F 21 , F 41 , F 61 , F 81 . The amount of deformation of the held optical element is measured as Y 4 . Record the second set of data as S 4 = (Χ 4 , Υ 4 , Τ 4 , Μ 4 ), where Χ 4 = (Ρ 20 , ?40'?60'?80', F41, F611 Fsi).
上述的 S2、 S3、 S4即为得到的训练数据组的 4个训练数据。 当然 训练数据集中的训练数据还可以为更多组, 其获取的方式与此相同, 不再 重述。 The above S 2 , S 3 , and S 4 are the four training data of the obtained training data set. Of course, the training data in the training data set can also be more groups, and the manner of obtaining is the same, and will not be repeated.
歩骤 B, 采用支持向量机(SVM) 回归算法, 利用训练数据组, 获得 被夹持光学元件的变形量与工作环境温度值和湿度值、夹持力值之间的回 归函数模型;  Step B: Using a support vector machine (SVM) regression algorithm, using the training data set, obtaining a regression function model between the deformation amount of the clamped optical component and the working environment temperature value, the humidity value, and the clamping force value;
其中, 歩骤 B中, 根据支持向量机(SVM) 回归算法, 通过训练数据 Si, S2, S3, S4获得出被夹持光学元件的变形量; 与夹持点的位置和夹持 力的变量 x、 之间的回归函数模型 x), 计算公式为:
Figure imgf000009_0001
Wherein, in step B, according to the support vector machine (SVM) regression algorithm, the deformation amount of the clamped optical element is obtained by training data Si, S 2 , S 3 , S 4 ; position and clamping of the clamping point The force variable x, the regression function model x), is calculated as:
Figure imgf000009_0001
: =1,2,3,4, 取 0.5 等小于 1
Figure imgf000009_0002
: =1, 2, 3, 4, take 0.5, etc. less than 1
Figure imgf000009_0002
1  1
b = --(ω\(ΧΓ + A) ,其中, iy*,( r + ¾〉表示 和 ( r + Xs)的内积
Figure imgf000009_0003
b = --(ω\(Χ Γ + A) , where iy*,( r + 3⁄4> represents the inner product of and ( r + X s )
Figure imgf000009_0003
和 .*可以由下式求出:  And .* can be found by:
j 4 4 4 4  j 4 4 4 4
α,α 2 / = 1 =l i=l j=l 其中, 式子中, s取 0.5。 α, α 2 / = 1 = li = lj = l where, in the equation, s takes 0.5.
Χ^ΠΧ表示 X, (i=l,2,3,4)中的任意两个支持向量, 也就是对应 和"满足: r,a >0 图 7为图 6所示元件夹持装置控制方法中歩骤 C的流程图。如图 7所 示, 本实施例歩骤 C包括: Χ^ΠΧ denotes any two support vectors in X, (i=l, 2, 3, 4), that is, the correspondence and "satisfaction: r , a > 0 Fig. 7 is a flow chart showing a step C in the method of controlling the component holding device shown in Fig. 6. As shown in FIG. 7, the embodiment C includes:
子歩骤 C1: 接收由温度湿度采集单元 3获得的工作环境温度 T和工 作环境湿度 M, 根据回归函数模型 x), 离线计算伸出 个 ( <8) 位置 为 Ρ^.,Ρ^的胶钉并且施加夹持力 F^.,^时, 光学元件的变形量 如 果 Γ小于期望的变形量 I , 即 r<i, 则输出胶钉的位置 P^.A及其夹 持力 F^^F^ 否则执行歩骤 C2;  Sub-step C1: receiving the working environment temperature T and the working environment humidity M obtained by the temperature and humidity collecting unit 3, according to the regression function model x), calculating the out-of-line (<8) position as Ρ^. When the nail is applied and the clamping force F^., ^, the deformation amount of the optical element is less than the desired deformation amount I, that is, r < i, the position of the output glue pin P^.A and its clamping force F^^ F^ Otherwise, step C2 is performed;
子歩骤 C2: j的初始值取 1, 缩回位置为 的第 j胶钉 ( <8), 伸出 位置为 Pra+1 (^+1≤8)的胶钉,并且施加夹持力 Fra+1,根据回归函数 /(x), 离线计算当工作环境温度为 T,湿度为 M时,光学变形量 Γ,如果 Γ< , 输出胶钉的位置 Ρ1; ... ,P ,P+i, Pra,Pra+i及夹持力 F1; ... ,Fy-1,Fy+1,Fra,Fra+1; 如果 Υ' >Υ> Υτ, 执行歩骤 C3; 否则, 加 1, 重复执行歩骤 C2; Sub-step C2: The initial value of j is taken as 1, the j- studded nail (<8) in the retracted position, the plastic stud with the extended position of Pra +1 (^ +1 ≤ 8 ), and the clamping force is applied. F ra+1 , according to the regression function / (x), offline calculation when the working environment temperature is T, the humidity is M, the optical deformation amount Γ, if Γ <, the output glue nail position Ρ 1; ..., P, P + i, P ra , P ra+ i and clamping force F 1; ... , F y-1 , F y+1 , F ra , F ra+1 ; If Υ'> Υ > Υ τ , execute 歩Step C3; otherwise, add 1 and repeat step C2;
子歩骤 C3: 缩回位置为 的第 j胶钉, 即仅仅施加 m-1 个位置为 Ρ^.,Ρ ,Ρ^,Ρ^^胶钉并且施加夹持力 F^.A^F^F^ 然后根据回归函 数 D, 离线计算当工作环境温度为 T, 工作环境湿度为 Μ时, 光学变形 量 ', 如果 '< Υτ, 则输出胶钉的位置 Ρ^,Ρ^, ?及夹持力 F ,..., FJ+1,Fra; 如果 ' >;Γ> ;Γγ, 力卩 1, w减 1, 重复执行歩骤 C3。 Sub-step C3: The j-th glue in which the retracted position is, that is, only m-1 positions are applied as Ρ^., Ρ, Ρ^, Ρ^^ and the clamping force is applied F^.A^F^ F ^ then the regression function D, calculated off when the operating temperature is T, the working environment humidity Μ, the optical deformation amount ', if' <Υ τ, the output of plastic nail position Ρ ^, Ρ ^,? and The clamping force F , ..., F J+1 , Fra; if '>; Γ >; Γ γ , force 卩 1, w minus 1, repeat step C3.
当然, 本实施例中, 也有可能某个弹性夹持件施加的夹持力为零的情 况, 即该弹性夹持件并不施加夹持力, 其同样在本发明的保护范围之内。  Of course, in this embodiment, it is also possible that the clamping force applied by a certain elastic clamping member is zero, that is, the elastic clamping member does not apply a clamping force, which is also within the protection scope of the present invention.
至此, 已经结合附图对本实施例元件夹持装置进行了详细描述。 依据 以上实施例的描述, 本领域技术人员应当对本发明元件夹持装置有了清楚 的认识。  Heretofore, the component holding device of the present embodiment has been described in detail with reference to the accompanying drawings. From the description of the above embodiments, those skilled in the art should have a clear understanding of the component holding device of the present invention.
需要说明的是, 上述对各元件的定义并不仅限于实施方式中提到的各 种具体结构或形状, 本领域的普通技术人员可对其进行简单地熟知地替换, 例如: 胶钉还可以采用其它弹性元件, 如弹簧片夹持件形式; 除光学元件 外, 其他精密元件也同样可以采用本发明的装置与方法。  It should be noted that the above definitions of the various components are not limited to the specific structures or shapes mentioned in the embodiments, and those skilled in the art can simply and well replace them, for example: Other elastic elements, such as in the form of spring leaf holders; other precision elements, as well as other precision elements, can also employ the apparatus and method of the present invention.
综上所述, 本发明元件夹持装置适用于固体激光器、 光学天文望远镜 等光学装置或其他装置, 能够根据元件期望变形率、工作环境的温 /湿度自 动调整夹持点的位置以及施加的夹持力, 使元件的变形量不大于期望变形 量, 保证了被夹持元件工作状态的可靠性和精确性。 以上所述的具体实施例, 对本发明的目的、 技术方案和有益效果进行 了进一歩详细说明, 所应理解的是, 以上所述仅为本发明的具体实施例而 已, 并不用于限制本发明, 凡在本发明的精神和原则之内, 所做的任何修 改、 等同替换、 改进等, 均应包含在本发明的保护范围之内。 In summary, the component clamping device of the present invention is suitable for optical devices such as solid-state lasers, optical telescopes, or other devices, and can automatically adjust the position of the nip point and the applied clip according to the desired deformation rate of the component, the temperature/humidity of the working environment. With force, the deformation of the component is not greater than the desired deformation, which ensures the reliability and accuracy of the working state of the clamped component. The specific embodiments of the present invention have been described in detail with reference to the preferred embodiments of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and scope of the present invention are intended to be included within the scope of the present invention.

Claims

权 利 要 求 Rights request
1、 一种元件夹持装置, 其特征在于, 包括:  A component clamping device, comprising:
夹持框,用于对被夹持元件施加夹持力以固定所述被夹持元件,包括: 支撑框;  a clamping frame for applying a clamping force to the clamped component to fix the clamped component, comprising: a support frame;
«个夹持件驱动器, 分别固定在支撑框的外部;  «A clamp drive, fixed to the outside of the support frame;
«个弹性夹持件, 分别安装在相应的夹持件驱动器上, 其前端穿 过支撑框上对应的孔, 抵压在被夹持元件上;  «A plurality of elastic clamping members are respectively mounted on the corresponding clamping member drivers, and the front end thereof passes through a corresponding hole in the supporting frame and is pressed against the clamped member;
压力采集单元, 用于采集所述夹持框中所述弹性夹持件对被夹持元件 施加的夹持力值, 并将该夹持力值输入到控制单元; 以及  a pressure collecting unit, configured to collect a clamping force value applied by the elastic clamping member in the clamping frame to the clamped component, and input the clamping force value to the control unit;
控制单元, 用于控制所述《个夹持件驱动器, 包括:  a control unit, configured to control the “clamp drive”, comprising:
夹持计算模块, 用于根据预设的元件期望变形量, 从所述《个弹 性夹持件中选择需要施加夹持力的 t个弹性夹持件及分别需要施加的夹持 力值, 其中 t n;  a clamping calculation module, configured to select, according to a preset desired deformation amount of the component, t elastic clamping members that need to apply a clamping force from the “elastic clamping members” and clamping force values respectively required to be applied, wherein Tn;
输出驱动模块, 用于分别控制需要施加夹持力的 t个弹性夹持件 对应的夹持件驱动器以相应的夹持力值对所述被夹持元件施加夹持力。  An output driving module for respectively controlling t elastic clamping members that need to apply a clamping force. A corresponding clamping member driver applies a clamping force to the clamped component with a corresponding clamping force value.
2、 根据权利要求 1所述的元件夹持装置, 其特征在于:  2. The component holding device according to claim 1, wherein:
该元件夹持装置还包括:温度 /湿度采集单元,用于采集夹持框工作环 境的温度值和湿度值, 并将温度值和湿度值输入到控制单元;  The component clamping device further includes: a temperature/humidity collecting unit configured to collect temperature values and humidity values of the working environment of the clamping frame, and input the temperature value and the humidity value to the control unit;
所述夹持计算模块, 用于根据预设的元件期望变形量、 由温度湿度采 集单元采集的温度值和湿度值, 从所述《个弹性夹持件中选择需要施加夹 持力的 t个弹性夹持件及分别需要施加的夹持力值。  The clamping calculation module is configured to select t to apply a clamping force from the “elastic clamping members” according to a preset component desired deformation amount, a temperature value collected by the temperature and humidity collecting unit, and a humidity value. The elastic clamping members and the clamping force values that need to be applied respectively.
3、 根据权利要求 1或 2所述的元件夹持装置, 其特征在于, 所述夹 持件驱动器为伺服气缸或伺服电机。  The component holding device according to claim 1 or 2, wherein the gripper driver is a servo cylinder or a servo motor.
4、 根据权利要求 1或 2所述的元件夹持装置, 其特征在于, 所述弹 性夹持件为胶钉或弹簧片夹持件。  The component holding device according to claim 1 or 2, wherein the elastic holding member is a plastic nail or a spring piece holding member.
5、 根据权利要求 1或 2所述的元件夹持装置, 其特征在于, 所述输 出驱动模块为比例流量阀或液压阀。  The component holding device according to claim 1 or 2, wherein the output drive module is a proportional flow valve or a hydraulic valve.
6、 根据权利要求 1或 2所述的元件夹持装置, 其特征在于, 所述的 压力采集单元包括:  The component holding device according to claim 1 or 2, wherein the pressure collecting unit comprises:
«个压力传感器,其中,第 z个压力传感器安装在第 z个弹性夹持件与 第 ι个夹持件驱动器的连接部位; «A pressure sensor, wherein the zth pressure sensor is mounted on the zth elastic clamp The connection point of the first ι gripper driver;
压力信息处理板, 与所述 n个压力传感器的信号输出端相连接, 用于 将由所述 n个压力传感器获取的 n个压力传感信号转换为相应的夹持力值, 并传输至所述控制单元。  a pressure information processing board, connected to the signal output ends of the n pressure sensors, for converting n pressure sensing signals acquired by the n pressure sensors into corresponding clamping force values, and transmitting to the control unit.
7、 根据权利要求 1或 2所述的元件夹持装置, 其特征在于, 所述的 被夹持元件为光学元件。  The component holding device according to claim 1 or 2, wherein the member to be clamped is an optical component.
8、 一种元件夹持装置的控制方法, 用于对权利要求 1或 2所述的元 件夹持装置进行控制, 包括:  8. A method of controlling a component holding device for controlling the component holding device according to claim 1 or 2, comprising:
歩骤 A, 通过离线实验, 获得包括工作环境温度和湿度、 夹持位置及 其力、 元件变形量的训练数据组;  Step A, through the offline experiment, obtain a training data set including the working environment temperature and humidity, the clamping position and its force, and the deformation amount of the component;
歩骤 B, 采用支持向量机回归算法, 利用训练数据组, 获得被夹持元 件的变形量与各弹性夹持件夹持力值之间的回归函数模型; 以及  Step B, using a support vector machine regression algorithm, using the training data set to obtain a regression function model between the deformation amount of the clamped component and the clamping force value of each elastic clamp;
歩骤 C, 根据给定的被夹持元件的变形量, 利用所述回归函数模型, 从所述《个弹性夹持件中选择需要施加夹持力的 t个弹性夹持件及分别需 要施加的夹持力值。  Step C, according to a given amount of deformation of the clamped component, using the regression function model, selecting t elastic clips that need to apply a clamping force from the "elastic clips" and respectively need to be applied The clamping force value.
9、 根据权利要求 8所述的控制方法, 其特征在于, 所述训练数据组 中包括工作环境温度和湿度值;  The control method according to claim 8, wherein the training data set includes a working environment temperature and a humidity value;
所述歩骤 B包括: 采用支持向量机回归算法, 利用训练数据组, 获得 被夹持元件的变形量、工作环境温度和湿度值与夹持力值之间的回归函数 模型;  The step B includes: using a support vector machine regression algorithm, using a training data set to obtain a regression function model between the deformation amount of the clamped component, the working environment temperature and the humidity value, and the clamping force value;
所述歩骤 C包括: 根据给定的元件期望变形量、工作环境温度和湿度 值, 利用所述回归函数模型, 从所述《个弹性夹持件中选择需要施加夹持 力的 t个弹性夹持件及分别需要施加的夹持力值。  The step C includes: selecting, according to a given component desired deformation amount, a working environment temperature, and a humidity value, from the “elastic clamping members, t elastic forces that need to apply a clamping force. The clamping members and the clamping force values that need to be applied respectively.
10、 根据权利要求 9所述的控制方法, 其特征在于, 所述歩骤 A中, 第 1组训练数据采取以下方式获取:  The control method according to claim 9, wherein in the step A, the first group of training data is obtained in the following manner:
在工作环境温度为 T,、 工作环境湿度为 的条件下, 选择 q个位置 分别为 P;, ... ,P 的弹性夹持件伸出, 其施加的夹持力分别为?1 ...^; 测量 元件变形量的数值 Y,, 则第,组训练数据为 S,= (X,, Y,, Τ,·, Μ,·), 其中, X尸 (Ρ^, . , . ,Ρ,, Fi, ... ^) , 2≤q≤n。 Under the condition that the working environment temperature is T and the working environment humidity is the same, select the q positions which are respectively P;, ..., P. The elastic clamping members are extended, and the clamping force applied is respectively? 1 ...^ ; The value Y of the measured component deformation amount, then, the group training data is S, = (X,, Y,, Τ, ·, Μ, ·), where X corpse (Ρ^, . , . , Ρ,, Fi, ... ^) , 2 ≤ q ≤ n.
11、 根据权利要求 10所述的控制方法, 其特征在于, 所述歩骤 B包 括: The control method according to claim 10, wherein the step B package Includes:
采用基于支持向量机回归算法, 训练训练数据组中的 /组训练数据, 获得元件变形量的变量 _y与伸出的弹性夹持件及其夹持力的变量 χ、 工作 环境温度变量 和湿度变量 M之间的回归函数 x), 其中, 支持向量机采 用的核函数定义为:
Figure imgf000014_0001
Using the support vector machine regression algorithm to train the training data in the training data set, obtain the variable _y of the component deformation amount and the extended elastic clamping member and its clamping force variable 工作, working environment temperature variable and humidity The regression function between variables M), where the kernel function used by the support vector machine is defined as:
Figure imgf000014_0001
其中, ζ=1,2,3,4, 为一个小的正实数, Ί 表示工作环境温度值, Μ;· 表示工作环境湿度值, X,表示训练数据。 Where ζ=1,2,3,4, is a small positive real number, Ί represents the working environment temperature value, Μ ; · represents the working environment humidity value, X, represents the training data.
12、 根据权利要求 11所述的控制方法, 其特征在于, 所述歩骤 C包 括:  The control method according to claim 11, wherein the step C includes:
子歩骤 C1: 接收由温度湿度采集单元获得的工作环境温度 Τ和工作 环境湿度 Μ, 根据回归函数模型 f、x), 离线计算伸出 m个位置为 Ρ^.,Ρ^ 的胶钉并且施加夹持力?1...^时, 元件期望变形量 如果 Γ小于期望 的变形量 I , 则输出胶钉的位置 Pi,...^及其夹持力 Fi,...,^ 否则执行 歩骤 C2, 其中 m<n; Sub-step C1: receiving the working environment temperature Τ and the working environment humidity 获得 obtained by the temperature and humidity collecting unit, according to the regression function model f, x), calculating the protruding nails of m positions Ρ^. Apply a clamping force? When 1 ... ^, if the expected deformation amount of the component is less than the desired deformation amount I, the position of the glue pin Pi, ...^ and its clamping force Fi, ..., ^ otherwise, the execution step C2 is performed. Where m<n;
子歩骤 C2: 的初始值取 1, 缩回位置为 的第 '胶钉, 其中 <8, 伸 出位置为 Pra+1的胶钉, 其中 ^+1≤8, 并且施加夹持力 Fra+1, 根据回归函 数 D, 离线计算当工作环境温度为 T, 湿度为 Μ时, 光学变形量 Γ, 如 果 , 输出 胶钉 的位置 Ρ^,Ρ^, Pra,Pra+1 及夹持力Sub-step C2: The initial value is taken as 1, the retracted position is the 'studded nail, where <8, the protruding position is P ra+1 , where ^+1≤8, and the clamping force F is applied. Ra+1 , according to the regression function D, offline calculation when the working environment temperature is T, the humidity is Μ, the optical deformation amount Γ, if, the output glue nail position Ρ^, Ρ^, P ra , P ra+1 and clip Holding
F!,...^!^!^^!; 如果 >;r>i, 执行歩骤 C3; 否贝 ij, _y加 1, 重复 执行歩骤 C2; F!,...^!^!^^! If >;r>i, execute step C3; no ij, _y plus 1, repeat step C2;
子歩骤 C3:缩回位置为 的第 胶钉,施加 -1个位置为?^,, , +^ Pra的胶钉并且施加夹持力 F^.A^ ^F^, 根据回归函数 /( ), 离线计算 当工作环境温度为 T,工作环境湿度为 M时,元件变形量 ',如果 '< Υτ, 则输出胶钉的位置 Ρ^.,Ρ ,Ρ^, ?及夹持力 F^.A F^F^如果 ' >Υ> , 加 1, 减 1, 重复执行歩骤 C3。 Sub-step C3: Retracting the position of the first nail, applying -1 position? ^,, , +^ P ra glue nail and apply the clamping force F^.A^ ^F^, according to the regression function / ( ), offline calculation when the working environment temperature is T, the working environment humidity is M, the component is deformed Quantity ', if '< Υ τ , the position of the output glue Ρ ^., Ρ , Ρ ^, ? and clamping force F ^.AF ^ F ^ If '> Υ > , plus 1, minus 1, repeat Execute step C3.
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