WO2014034318A1

WO2014034318A1 - Plasma emission device and substrate processing device

Info

Publication number: WO2014034318A1
Application number: PCT/JP2013/069610
Authority: WO
Inventors: 健一花輪
Original assignee: 東京エレクトロン株式会社
Priority date: 2012-09-03
Filing date: 2013-07-19
Publication date: 2014-03-06
Also published as: JP2014049362A; TW201424463A

Abstract

A plasma emission device (2) which emits plasma by supplying RF electricity to a plasma generation electrode (3) comprises: an RF oscillator (31) which is capable of changing an oscillating RF frequency; an RF electricity emitter (32) which amplifies the frequency RF which is oscillated from the RF oscillator (31) and emits RF electricity; a transmission path (33) which transmits the RF electricity from the RF electricity emitter (32) to the plasma generation electrode (3); a matcher (34) which is disposed upon the transmission path (33) for impedance matching; a directional coupler (35) which is disposed upon the transmission path (33); and a detector (36) which detects a spectrum of a reflected wave which is guided via the directional coupler (35), and sends feedback of a reflected component of a base frequency within the spectrum to the matcher (34).

Description

Plasma generator and substrate processing apparatus

The present invention relates to a plasma generator and a substrate processing apparatus using the same.

Conventionally, a parallel plate type plasma processing apparatus is provided with an anode / cathode electrode in a chamber, a high-frequency power generator (high-frequency power supply) provided outside the chamber passes through a matching unit (matcher), and then high-frequency power is applied to the cathode electrode. What is supplied is known (for example, Patent Document 1).

When such a parallel plate type plasma processing apparatus is applied to a plasma processing such as a film forming process or an etching process of a glass substrate used for, for example, a solar cell panel or a flat panel, a high frequency (RF) frequency (RF The frequency is fixed to one type such as 13.56 MHz, and the plasma processing is performed using the type of processing gas, flow rate, pressure, distance between electrodes, high frequency power, and the like as process parameters.

JP-A 61-119686

By the way, when a parallel plate type plasma processing apparatus is used for, for example, a CVD (Chemical Vapor Deposition) apparatus of a solar cell panel, the frequency is an effective process parameter for controlling the plasma density and improving the crystallization rate. It is known that the frequency can be changed for each process.

However, in a parallel plate type plasma processing apparatus, it is currently necessary to use a dedicated high-frequency power generator and matching unit (matcher) for each frequency, and when trying to change the frequency, a high-frequency generator is generated for each frequency. Changing the RF frequency is not adopted at the mass production level because it is necessary to replace the RF coaxial cable or the like in some cases.

Therefore, an object of the present invention is to provide a plasma generator capable of changing the RF frequency without exchanging a high-frequency power generator or a matching unit, and a substrate processing apparatus using the plasma generator.

That is, according to the first aspect of the present invention, there is provided a plasma generator for generating plasma by supplying high frequency power to a plasma generating electrode, the high frequency oscillator capable of changing the frequency of the oscillating high frequency, and the high frequency A high-frequency power generator that amplifies high-frequency power oscillated from an oscillator to generate high-frequency power, a transmission line that transmits high-frequency power from the high-frequency power generator to the plasma generation electrode, and the transmission line A matching unit for matching the impedance of the generated plasma load with the impedance of the transmission line on the high-frequency power generator side, and a directional coupling provided between the high-frequency power generator and the matching unit of the transmission line And the spectrum of the reflected wave guided through the directional coupler, and the reflected component of the fundamental frequency is detected in advance. It provided a plasma generating apparatus including a detector for feeding back to the matching unit.

In the plasma generating apparatus according to the first aspect, a pass-type power sensor provided between the high-frequency power generator and the matcher in the transmission line, and a signal from the pass-type power sensor are measured, A power meter that feeds back to the high-frequency generator can be further provided.

Also, a spectrum analyzer can be used as the detector. Further, as the detector, a detector having a Fourier transform function for obtaining a frequency spectrum by converting an input signal into a digital signal and performing fast Fourier transform can be used.

According to a second aspect of the present invention, there is provided a substrate processing apparatus for processing a substrate with plasma of a processing gas generated by high frequency power, the chamber accommodating the substrate and capable of being held under vacuum, A plasma generation electrode for generating plasma by supplying high frequency power, a plasma generator for generating plasma by supplying high frequency power to the plasma generation electrode, and a processing gas supply for supplying a processing gas to the chamber A high frequency oscillator capable of changing the frequency of the oscillating high frequency, a high frequency power generator for amplifying the high frequency of the frequency oscillated from the high frequency oscillator to generate high frequency power, A transmission line for transmitting high-frequency power from the high-frequency power generator to the plasma generation electrode, and a generation provided in the transmission line A matching unit for matching the impedance of the plasma load to the impedance of the transmission line on the high-frequency power generator side, and a directional coupler provided between the high-frequency power generator and the matching unit of the transmission line; And a detector for detecting a spectrum of a reflected wave guided through the directional coupler and feeding back a reflected component of a fundamental frequency therein to the matching unit.

In the substrate processing apparatus according to the second aspect, a plurality of plasma generation electrodes corresponding to a plurality of substrates, and plasma generated by supplying high-frequency power from the plasma generation apparatus to the plasma generation electrodes, Multiple substrates can be processed.

In the present invention, the reflected wave that has passed through the matching device is guided to the detector by the directional coupler, the spectrum of the reflected wave is detected by the detector, and the detector feeds back the reflected component of the fundamental frequency to the matching device. Thereby, the reflection component and the harmonic component of the fundamental frequency can be separated with high accuracy, and only the reflection component of the fundamental frequency is substantially fed back to the matching unit. For this reason, even when the frequency is made variable, high-precision tuning can be performed in the matching unit. Since tuning with high accuracy can be performed in this manner, the RF frequency can be changed without exchanging the high-frequency power generator or the matching unit, and a process in which the frequency is practically changed can be performed.

1 is a cross-sectional view showing a substrate processing apparatus according to a first embodiment of the present invention. It is a figure which shows the circuit structure of a matching device. It is a figure which shows a frequency spectrum when the harmonic component which is too high compared with a fundamental frequency component is output as a result of a harmonic component not being attenuate | damped sufficiently with a low-pass filter. It is a figure which shows the output waveform in the case of FIG. It is a figure which shows an appropriate output waveform. It is sectional drawing which shows the substrate processing apparatus which concerns on the 2nd Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
<First Embodiment>
First, the first embodiment will be described. FIG. 1 is a sectional view showing a substrate processing apparatus according to a first embodiment of the present invention.
The substrate processing apparatus 100 is configured as a parallel plate type plasma processing apparatus. The substrate processing apparatus 100 accommodates a substrate S and performs plasma processing, a plasma generating apparatus 2, a cathode electrode 3 and an anode electrode 4 constituting parallel plate electrodes provided in the chamber 1, and a chamber 1. A processing gas supply unit 5 that supplies processing gas therein, an exhaust unit 6 that exhausts the inside of the chamber 1, and a control unit 7 that controls each component of the substrate processing apparatus 100 are provided.

The cathode electrode 3 is configured as an upper electrode and functions as a plasma generation electrode to which high-frequency power is supplied. Further, the cathode electrode 3 has a gas diffusion space 3 a inside and a gas discharge hole 3 b provided through the gas diffusion space 3 a into the chamber 1. An eggplant shower head 10 is configured. The cathode electrode 3 is supported on the top wall of the chamber 1 through an insulating member 12.

On the other hand, the anode electrode 4 is configured as a lower electrode and functions as a mounting table on which the substrate S is mounted. In addition, a heater 14 is embedded in the anode electrode 4, and the heater 14 generates heat when power is supplied to the heater 14 from a power source (not shown) so that the substrate S on the anode electrode 4 is heated to a predetermined temperature. It has become. The anode electrode 4 is supported on the bottom wall of the chamber 1 through an insulating member 13. The anode electrode 4 is grounded. The distance between the cathode electrode 3 and the anode electrode 4 may be adjustable.

The processing gas supply unit 5 includes a processing gas supply mechanism 15 that supplies a processing gas, and the above-described shower head 10 and a processing gas supply path 16 that guides the processing gas from the processing gas supply mechanism 15 to the shower head 10.

The exhaust unit 6 controls an exhaust pipe 17 connected to the bottom of the chamber 1, an exhaust device 18 including a vacuum pump connected to the exhaust pipe 17, and the pressure in the chamber 1 provided in the middle of the exhaust pipe 17. And an automatic pressure control valve (APC) 19.

A loading / unloading port 20 for loading / unloading the substrate S is provided on the side wall of the chamber 1, and the loading / unloading port 20 can be opened and closed by a gate valve 21.

The plasma generator 2 includes an external oscillator (high frequency oscillator) 31, a high frequency power generator 32, a transmission line 33, a matching unit 34, a directional coupler 35, a spectrum analyzer (detector) 36, and a pass type. A power sensor 37 and a power meter 38 are included.

The external oscillator (high frequency oscillator) 31 oscillates a high frequency and can change the frequency of the oscillating high frequency. The high frequency power generator 32 amplifies the high frequency of the frequency oscillated from the external oscillator 31 to generate high frequency power. The transmission line 33 transmits high frequency power from the high frequency power generator 32 to the cathode electrode 3. The matching unit 34 is provided in the transmission line 33 and matches the impedance of the plasma load generated in the chamber 1 with the impedance of the transmission line 33 on the high-frequency power generator 32 side. The directional coupler 35 is provided between the high frequency power generator 32 and the matching unit 34 of the transmission line 33. The spectrum analyzer 36 detects the spectrum of the reflected wave guided through the directional coupler 35 and feeds back the reflected component of the fundamental frequency to the matching unit 34. The pass-type power sensor 37 is provided between the high-frequency power generator 32 and the matching unit 34 in the transmission line 33, and the power meter 38 measures a signal from the pass-type power sensor 37, and the high-frequency generator 32. Feedback to

The external oscillator 31 has an external interface, and the frequency is variable by remote control. The high frequency power generator 32 amplifies the high frequency oscillated by the external oscillator 31 by a class C or class AB analog amplifier. The high frequency power generator 32 is provided with a low pass filter (LPF) 32a for attenuating harmonics.

The external oscillator 31 may be housed in the same housing as the high frequency power generator 32. Further, the high frequency power generator 32 may have the frequency variable function of the external oscillator 31. Since the circuit constant of the low-pass filter (LPF) 32a provided in the high-frequency power generator 32 is fixed, when the frequency is made variable in this way, the cutoff frequency does not match the output frequency, and the low-pass filter A harmonic component that cannot be attenuated by the (LPF) 32 a is generated from the high-frequency power generator 32.

The transmission line 33 is composed of a coaxial cable. Further, as shown in FIG. 2, the matching unit 34 includes a transmission line 41 connecting the input side and the output side of the transmission line 33, and a first variable capacitor provided by branching from a branch point 42 of the transmission line 41. 43, a second variable capacitor 44 provided on the output side of the branch point 42 of the transmission line 41, and a coil (inductor) 45 provided on the input side of the branch point 42. Based on the detection value of the built-in RF sensor (not shown), the positions (capacities) of the first variable capacitor 43 and the second variable capacitor 44 are automatically adjusted to automatically transmit the transmission line. The impedance of 33 (50Ω) and the impedance of the plasma load are matched. The transmission line 33 on the output side of the matching unit 34 is connected to the center of the upper surface of the cathode electrode 3.

The directional coupler 35 is inserted into the transmission line 33 and extracts a reflected wave propagating through the transmission line 33 to another port, and a spectrum analyzer 36 is connected to the other port.

The spectrum analyzer 36 obtains a spectrum of a signal including harmonics obtained through the directional coupler 35 after being reflected by the plasma and passing through the matching unit 34, and extracts only the reflected component of the fundamental frequency from the spectrum. The signal is fed back to the matching unit 34. As a result, the matching unit 34 can be tuned by detecting only the fundamental frequency. If the frequency of the RF sensor existing in the matching unit 34 is made variable, the reflected component and the harmonic component of the fundamental frequency may not be separated with high accuracy. In this way, the directional coupler 35 and the spectrum analyzer 36 By using this, only the fundamental frequency can be detected with high accuracy, and the matching unit 34 can perform high-precision tuning.

The spectrum analyzer 36 is preferably an FFT type having a fast Fourier transform (FFT) function. In the FFT method, an input signal is converted into a digital signal, and a fast Fourier transform is performed by a CPU to obtain a frequency spectrum, that is, frequency and amplitude data.

The pass-type power sensor 37 detects high-frequency power (power) in the transmission line 33. In general, the passing power sensor is more accurate than the power sensor built in the high-frequency power generator. For this reason, the pass-type power sensor 37 can recognize the high-frequency power (power) superimposed with higher harmonics more correctly than the high-frequency power generator 32. For this reason, when the transmission type power sensor 37 is provided in the transmission line 33, and the signal is fed back to the high frequency power generator 32 through the power meter 38 and used for power control and reflected wave control, the frequency is made variable. The power accuracy can be improved.

The control unit 7 controls each component of the substrate processing apparatus 100, and includes a controller including a microprocessor, a keyboard for an operator to input commands for managing the substrate processing apparatus 100, and the like. A user interface comprising a display for visualizing and displaying the operating status of the processing apparatus 100, a control program for realizing various processes executed by the substrate processing apparatus 100 under the control of the controller, and a substrate according to the processing conditions A storage unit storing a processing recipe for causing the processing apparatus 100 to execute a predetermined process. The processing recipe or the like is stored in a storage medium, and is read from the storage medium and executed in the storage unit. The storage medium may be a hard disk or a semiconductor memory, or may be a portable medium such as a CD-ROM, DVD, or flash memory. Recipes and the like are read from the storage unit according to instructions from the user interface as necessary, and are executed by the controller, whereby desired processing in the substrate processing apparatus 100 is performed under the control of the controller.

Next, the processing operation of the substrate processing apparatus 100 configured as described above will be described.
First, the gate valve 21 is opened, and the substrate S is loaded into the chamber 1 from the loading / unloading port 20 by a transfer device (not shown) and mounted on the anode electrode 4 functioning as a mounting table. After the transfer device is retracted from the chamber 1 and the gate valve 21 is closed, the interior of the chamber 1 is exhausted by the exhaust device 18 to create a predetermined vacuum atmosphere therein. At this time, the substrate S on the anode electrode 4 is heated to a predetermined temperature by the heater 14.

Then, the processing gas is discharged from the processing gas supply mechanism 15 into the chamber 1 through the processing gas supply path 16 and the shower head 10 in a shower shape, and high frequency power is supplied from the high frequency power generator 32 to the cathode electrode 3.

Thereby, a high frequency electric field is generated between the cathode electrode 3 and the anode electrode 4 facing each other, and a predetermined plasma treatment is performed on the substrate S heated by the heater 14 by the plasma of the processing gas generated by the high frequency electric field. For example, plasma CVD is performed.

In the present embodiment, the high frequency power generator 32 has a variable frequency of the high frequency power output from the external oscillator 31. For example, when the reference frequency of the high-frequency power generator 32 is 13.56 MHz, the frequency can be changed by about ± 3 MHz. The high-frequency power generator 32 is provided with a low-pass filter 32a for attenuating harmonics with respect to the fundamental frequency of the reference frequency (for example, 20MHz and 30MHz when the fundamental frequency is 10MHz), but the constant is fixed. For this reason, when the frequency is changed from the reference frequency, harmonics that cannot be attenuated by the low-pass filter (LPF) 32a are generated.

For example, as shown in the spectrum of FIG. 3, as a result of the harmonic component not being sufficiently attenuated by the low pass filter (LPF) 32a, the high frequency power generator 32 generates a second harmonic component that is too high compared to the fundamental frequency component. Is output. The output waveform at this time is as shown in FIG. 4, and the harmonic component is sufficiently attenuated and distorted as compared with the appropriate output waveform shown in FIG.

In this way, the high frequency power generator 32 generates harmonic components that could not be attenuated by the low pass filter (LPF) 32a, and in addition to this, harmonics are also generated from the plasma load, and these are synthesized in the transmission line 33. This causes a problem during tuning by the matching unit 34. That is, tuning is best performed at the fundamental frequency (if the frequency is changed, the frequency after the change), and the matching unit 34 performs tuning by sensing only the fundamental frequency with an RF sensor. In general, the RF sensor of the matching device has a poor frequency characteristic (Q is low). Therefore, when the harmonic component generated when the frequency is varied in this way is included, the harmonic component cannot be removed. For this reason, the harmonic component reacts with the detector of the matching unit 34 to cause a problem in tuning, and it becomes difficult to achieve matching.

Therefore, in this embodiment, the directional coupler 35 guides the reflected wave that has passed through the matching unit 34 to the spectrum analyzer 36, detects the spectrum of the reflected wave, and feeds back the reflected component of the fundamental frequency to the matching unit 34. The spectrum analyzer 36 can accurately separate the reflection component and the harmonic component of the fundamental frequency, and substantially only the reflection component of the fundamental frequency is fed back to the matching unit 34, so that the frequency is variable. However, the matching unit 34 can perform high-precision tuning.

Since high-precision tuning can be performed in this way, the RF frequency can be changed without exchanging the high-frequency power generator or the matching unit, and a process in which the frequency is practically changed can be performed.

For example, when it is desired to increase the plasma density, in particular, when it is desired to increase the film formation rate in CVD film formation, it is preferable to increase the RF frequency to process the product. When it is desired to increase the conversion rate, it is preferable to lower the RF frequency and process the product.

It should be noted that the signal from the directional coupler 35 can be effectively used as a new process condition determination, trouble analysis, and RF signal monitor.

Also, as described above, various harmonics are reflected by the plasma and returned to the high-frequency power generator 32, so that the correct traveling wave and reflected wave may not be read by the power sensor of the high-frequency power generator 32. This is particularly noticeable when the frequency is changed and the system is operated at a frequency other than the originally adjusted frequency.

Such a problem can be solved by providing a passing power sensor 37. As described above, in general, the pass-type power sensor is more accurate than the power sensor built in the high-frequency power generator. For this reason, the pass-type power sensor 37 can recognize the high-frequency power (power) on which the harmonics are superimposed more correctly than the high-frequency power generator 32. For this reason, the signal detected by the passing type power sensor 37 is fed back to the high frequency power generator 32 via the power meter 38 and used for power control and reflected wave control, so that the frequency is variable. Power accuracy can be improved.

Even when the frequency is not changed, the pass-type power sensor 37 is attached to the tip of the coaxial cable constituting the transmission line 33. Therefore, the transmission signal is fed back to the high-frequency power generator 32, thereby transmitting the transmission line. It is possible to correct the loss due to 33, and it is possible to control the power value closer to the power value used in the actual process. In addition, the frequency range of the pass-type power sensor 37 is appropriately selected, the fundamental frequency (the frequency after the change when the frequency is changed) is set within the range of the pass-type power sensor 37, and the harmonic frequency is set. By making it out of the frequency range, the accuracy can be further improved.

When the amount of change in frequency from the high-frequency power generator 32 is not so large, high-accuracy tuning in the matching unit 34 is also realized by feeding back the detection signal of the pass-type power sensor 37 to the matching unit 34. can do.

<Second Embodiment>
Next, a second embodiment will be described. FIG. 6 is a schematic view showing a substrate processing apparatus according to the second embodiment of the present invention. The substrate processing apparatus 200 according to the present embodiment is basically the one in which the substrate processing apparatus 100 according to the first embodiment is applied to an apparatus (batch type apparatus) that performs plasma processing on a plurality of substrates. 6 having the same functions as those in FIG. 1 are denoted by the same reference numerals.

The substrate processing apparatus 200 is configured as a parallel plate type plasma processing apparatus that performs plasma processing on a plurality of substrates. The chamber 1 accommodates a plurality (three in FIG. 6) of substrates S and performs plasma processing. have. The chamber 1 is safety grounded as in the first embodiment.

In the chamber 1, a plurality of pairs (three pairs in FIG. 6) of parallel plate electrodes in which the cathode electrode 3 and the anode electrode 4 are arranged to face each other in the up-down direction are arranged. Like the substrate processing apparatus 100, the anode electrode 4 functions as a mounting table for the substrate S, and a heater 14 is embedded and grounded. The cathode electrode 3 is configured as an upper electrode and functions as a plasma generation electrode to which high-frequency power is supplied. However, unlike the first embodiment, the cathode electrode 3 does not have a shower head function.

The cathode electrode 3 and the anode electrode 4 are supported by the chamber 1 by a support member 52. It should be noted that a distance between the cathode electrode 3 and the anode electrode 4 may be adjustable by providing an elevating mechanism and moving the cathode electrode 3 or the anode electrode 4 up and down.

Also in this embodiment, the processing gas supply unit 5 includes the processing gas supply mechanism 15 and the processing gas supply path 16, but the processing gas supply path 16 is a gas provided on the top wall of the chamber 1. It is connected to the inlet 10 'and no shower head is used. Of course, as in the first embodiment, each cathode electrode 3 may function as a shower head, and the processing gas may be introduced from each cathode electrode in a shower shape.

The exhaust unit 6 has the same basic configuration as that of the first embodiment, and includes an exhaust pipe 17, an exhaust device 18, and an automatic pressure control valve (APC) 19. Is connected to the upper and lower portions of the side wall, not the bottom.

A transfer port (not shown) capable of transferring a plurality of substrates at once is provided on the side wall of the chamber 1, and the transfer port can be opened and closed by a gate valve (not shown).

The substrate processing apparatus 200 of this embodiment has the same plasma generator 2 as that of the first embodiment. That is, also in the present embodiment, the plasma generator 2 includes the external oscillator 31, the high frequency power generator 32, the transmission line 33, the matching unit 34, the directional coupler 35, the spectrum analyzer 36, and the transmission line 33. A pass-type power sensor 37 provided upstream of the matching unit 34, and a power meter 38 that measures a signal from the pass-type power sensor 37 and feeds it back to the high-frequency generator 32. The transmission line 33 branches to the transmission line 51 at the tip of the matching unit 34, and the branched transmission line 51 is connected to the center of the upper surface of each cathode electrode 3.

The substrate processing apparatus 200 of this embodiment also has a control unit (computer) 7 configured in the same manner as in the first embodiment, and each component is controlled by this control unit 7. ing.

In the substrate processing apparatus 200 configured as described above, plasma processing, for example, plasma CVD processing is performed in the same manner as the substrate processing apparatus 100 of the first embodiment. That is, a plurality (three) of substrates S are placed on each anode electrode 4, the chamber 1 is evacuated to a predetermined vacuum atmosphere, and the substrate S is heated to a predetermined temperature by the heater 14. Then, the processing gas is introduced into the chamber 1 from the processing gas supply mechanism 15 through the processing gas supply path 16 and the gas introduction port 10 ′, and high frequency power is supplied from the high frequency power generator 32 to each cathode electrode 3.

As a result, a high frequency electric field is generated between the cathode electrode 3 and the anode electrode 4 facing each other in each parallel plate electrode, and a predetermined gas is generated on the substrate S heated by the heater 14 by the plasma of the processing gas generated by the high frequency electric field. Plasma processing, for example, plasma CVD is performed.

Also in the present embodiment, the directional coupler 35 can guide the reflected wave that has passed through the matching unit 34 to the spectrum analyzer 36, take the spectrum of the reflected wave, and feed back only the reflected component of the fundamental frequency to the matching unit 34. Therefore, the matching unit 34 can perform highly accurate tuning.

Further, by providing the passing power sensor 37, the signal detected there can be fed back to the high frequency power generator 32 via the power meter 38, which can be used for power control and reflected wave control, and the frequency can be varied. In this case, the power accuracy can be improved.

<Modifications>
The present invention can be variously modified without being limited to the above embodiment. For example, in the above-described embodiment, the transmission power sensor 37 is provided on the high-frequency power generator 32 side of the transmission line 33 with respect to the directional coupler 35, but these positions may be reversed.

In the above embodiment, the spectrum analyzer 36 is used as a detector for obtaining the spectrum of the reflected wave signal including harmonics, but the present invention is not limited to this as long as the spectrum can be obtained with high accuracy. In addition, although an FFT type detector is exemplified as a preferred example, such a detector is not limited to this, and may be another type such as a superheterodyne method.

Furthermore, although plasma CVD has been exemplified as the plasma processing in the substrate processing apparatus, it is needless to say that the present invention is not limited to this in principle, and can be applied to other plasma processing such as plasma etching. it can. Further, in the above embodiment, the high frequency power is introduced to the upper electrode of the parallel plate electrode and the lower electrode is grounded. However, the upper electrode may be grounded and the high frequency power may be introduced to the lower electrode, or both the upper electrode and the lower electrode may be introduced. High frequency power may be introduced into the. Furthermore, when the present invention is applied to a batch type apparatus, the number of substrates processed at a time is not limited to three. Furthermore, the substrate applied to the present invention is not particularly limited, and can be applied to various substrates such as a solar cell substrate and a flat panel display (FPD) glass substrate.

DESCRIPTION OF SYMBOLS 1; Chamber, 2; Plasma generator, 3; Cathode electrode (upper electrode), 4; Anode electrode (lower electrode), 5; Process gas supply part, 6: Exhaust part, 7: Control part, 10: Shower head, 14; Heater, 15; Process gas supply mechanism, 18; Exhaust device, 31; External oscillator, 32; High frequency power generator, 33; Transmission line, 34; Matching device, 35; Directional coupler, 36; 37; passing power sensor, 38; power meter, 100, 200; substrate processing apparatus, S; substrate

Claims

A plasma generator for generating plasma by supplying high frequency power to a plasma generating electrode,
A high frequency oscillator capable of changing the frequency of the high frequency to oscillate;
A high frequency power generator for amplifying a high frequency of a frequency oscillated from the high frequency oscillator to generate a high frequency power;
A transmission line for transmitting high frequency power from the high frequency power generator to the plasma generating electrode;
A matching unit provided in the transmission line, for matching the impedance of the generated plasma load with the impedance of the transmission line on the high-frequency power generator side,
A directional coupler provided between the high-frequency power generator and the matching unit of the transmission line;
A plasma generator comprising: a detector that detects a spectrum of a reflected wave guided through the directional coupler and feeds back a reflected component of a fundamental frequency therein to the matching unit.
A passing power sensor provided between the high-frequency power generator and the matching unit of the transmission line;
The plasma generating apparatus according to claim 1, further comprising a power meter that measures a signal from the passing power sensor and feeds back the signal to the high-frequency generator.
The plasma generator according to claim 1, wherein the detector is a spectrum analyzer.
2. The plasma generating apparatus according to claim 1, wherein the detector has a Fourier transform function for converting an input signal into a digital signal and performing a fast Fourier transform to obtain a frequency spectrum.
A substrate processing apparatus for processing a substrate with plasma of a processing gas generated by high frequency power,
A chamber that accommodates the substrate and can be held under vacuum;
A plasma generating electrode provided in the chamber and supplied with high frequency power to generate plasma;
A plasma generator for generating plasma by supplying high-frequency power to the plasma generating electrode;
A processing gas supply mechanism for supplying a processing gas to the chamber;
The plasma generator comprises:
A high frequency oscillator capable of changing the frequency of the high frequency to oscillate;
A high frequency power generator for amplifying a high frequency of a frequency oscillated from the high frequency oscillator to generate a high frequency power;
A transmission line for transmitting high frequency power from the high frequency power generator to the plasma generating electrode;
A matching unit provided in the transmission line, for matching the impedance of the generated plasma load with the impedance of the transmission line on the high-frequency power generator side,
A directional coupler provided between the high-frequency power generator and the matching unit of the transmission line;
A substrate processing apparatus, comprising: a detector that detects a spectrum of a reflected wave guided through the directional coupler and feeds back a reflected component of a fundamental frequency therein to the matching unit.
6. The plurality of plasma generation electrodes corresponding to the plurality of substrates, wherein the plurality of substrates are processed by plasma generated by supplying high-frequency power from the plasma generator to each plasma generation electrode. The substrate processing apparatus as described.