WO2013187300A1 - Light irradiating device, and exposure device - Google Patents

Light irradiating device, and exposure device Download PDF

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Publication number
WO2013187300A1
WO2013187300A1 PCT/JP2013/065652 JP2013065652W WO2013187300A1 WO 2013187300 A1 WO2013187300 A1 WO 2013187300A1 JP 2013065652 W JP2013065652 W JP 2013065652W WO 2013187300 A1 WO2013187300 A1 WO 2013187300A1
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WIPO (PCT)
Prior art keywords
light
integrator
lens array
light source
source unit
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PCT/JP2013/065652
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French (fr)
Japanese (ja)
Inventor
松島　竹夫
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ウシオ電機株式会社
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Publication of WO2013187300A1 publication Critical patent/WO2013187300A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection

Definitions

  • the present invention relates to a light irradiation apparatus including a plurality of LEDs, and more particularly to a light irradiation apparatus that can be used as a light source of an exposure apparatus.
  • the present invention also relates to an exposure apparatus provided with such a light irradiation apparatus.
  • an exposure apparatus is used for fine processing using light.
  • exposure techniques have been developed in various fields, and are used for the production of relatively large patterns and three-dimensional microfabrication among microfabrication. More specifically, for example, an exposure technique is used for manufacturing an electrode pattern of an LED, a manufacturing process of MEMS (Micro Electro Mechanical Systems) represented by an acceleration sensor, and the like.
  • MEMS Micro Electro Mechanical Systems
  • Patent Document 1 discloses an exposure apparatus in which a solid light source unit including a plurality of solid light sources is used as a light source, and a fly-eye lens (a kind of lens array integrator) is arranged in an illumination optical system arranged between the light source and a mask. Is disclosed.
  • LED has a small amount of radiated light flux per chip as a light source for exposure. For this reason, in order to use it for the light irradiation apparatus for exposure, it is necessary to collect the emitted light from a plurality of LEDs and make it incident on the light incident surface of the lens array integrator. In order to further increase the amount of light, it is necessary to increase the number of LEDs arranged as light sources.
  • the present invention makes uniform the illuminance distribution of the emitted light from the light incident surface of the lens array integrator when taking the emitted light from the light source composed of a plurality of LEDs into the lens array integrator. It is an object of the present invention to provide an optical system capable of realizing the above and to realize a high-quality light irradiation apparatus.
  • the lens array integrator is used for the purpose of uniformizing the emitted light from each LED, starting with the above-mentioned Patent Document 1.
  • the light source unit is configured by a lamp
  • a lens array integrator or a rod integrator is provided for the purpose of uniforming the illuminance on the irradiation surface of the object.
  • both the lens array integrator and the rod integrator were considered to exhibit the same function in terms of the function of uniforming the illuminance distribution, a configuration including only one of them was normal.
  • a lens array integrator is generally used.
  • the lens array integrator has a feature that the viewing angle on the irradiation surface can be controlled.
  • the viewing angle corresponds to the diameter of the light emitting surface of the lens array integrator.
  • the rod integrator has a feature that the light distribution of incident light is maintained and emitted, but the viewing angle cannot be controlled.
  • lens array integrators are generally used in exposure applications that require viewing angle control when adjusting pattern processing accuracy.
  • the present inventor has noticed that the lens array integrator and the rod integrator have different mechanisms for uniformizing the illuminance distribution, and combining these both in a certain method enables light having a plurality of LEDs as a light source unit.
  • the present inventors have found that it greatly contributes to the uniformity of the illuminance distribution in the irradiating apparatus, and have reached the present invention.
  • the apparatus includes a light source unit including a plurality of LEDs, a lens array integrator, and an optical system that projects light emitted from the light source unit onto a light incident surface of the lens array integrator.
  • the optical system includes a rod integrator.
  • the lens array integrator has a function of making the illuminance distribution uniform by superimposing the illuminance distribution on the incident surface of each lens on the irradiation surface.
  • the illuminance distribution of the light incident on each lens of the lens array integrator is an illuminance distribution having the same pattern non-uniformity, the non-uniformity (light incident on each lens) also on the irradiated surface.
  • Illuminance distribution pattern For example, when a plurality of LEDs are arranged in an array and each LED is installed so as to correspond to each lens of the lens array integrator (the center of each LED comes to the center of each lens), The illuminance at the center of the entrance surface of each lens is high and the periphery is low.
  • the illuminance surface has a high illuminance at the center and a low illuminance distribution at the peripheral portion.
  • the illuminance distribution cannot be made uniform.
  • the rod integrator has a function of making the illuminance distribution uniform on the exit surface by repeatedly reflecting the light incident on the entrance surface inside and overlapping the reflected light. Since the light exit surface of the rod integrator is reflected on the irradiated surface, the uniformity of the illuminance on the exit surface of the light output surface of the rod integrator is equivalent to the uniformity of the irradiated surface.
  • This device before entering the lens array integrator, once causes the emitted light from the light source unit made up of the LED array to enter the rod integrator. Thereby, the superposition of the incident light is performed.
  • the light emitted from the LED has a certain divergence angle, and each angle component is multiple-reflected by the inner surface of the rod integrator, and the light reaches a plurality of points on the light output surface of the rod integrator. It will be.
  • the arrival positions of these lights differ depending on the positions where the LEDs are arranged, and they are made uniform by overlapping them. As a result, the light emitted from the rod integrator has a uniform light and dark pattern in the light source unit, and the arrangement pattern of individual LEDs in the LED array is not reflected.
  • the light emitted from the rod integrator is incident on the light incident surface of the lens array integrator without reflecting the LED arrangement pattern. Since the illuminance on the entrance surface of each lens of the lens array integrator is uniform, the illumination surface, which is a superposition of these illuminance distributions, is also uniform.
  • the light with uniform illuminance distribution can be emitted from the lens array integrator to the object without reflecting the LED arrangement pattern.
  • the light entrance surface of the lens array integrator may be connected to the light exit surface of the rod integrator.
  • the light emitted from the light exit surface of the rod integrator maintains the spread angle of the light incident on the rod integrator.
  • the light emitted from the LED has a divergence angle based on the light emission principle. Therefore, if the LED is used as the light source, the light emitted from the rod integrator has a divergence angle.
  • the optical system may include a first optical member that forms an image of the light emitted from the light source unit on the light incident surface of the rod integrator.
  • the 1st optical member can employ
  • the light emitted from the light source unit can be condensed (imaged) on the light incident surface of the rod integrator.
  • the light entrance surface of the rod integrator may be connected to the light exit surface of the light source unit.
  • the light emitted from the light source unit can be efficiently incident on the light incident surface of the rod integrator.
  • the optical system may include a second optical member that forms an image of the light emitted from the rod integrator on the light incident surface of the lens array integrator.
  • the second optical member can adopt a configuration in which the light enters through an optical member such as a convex lens.
  • the light emitted from the rod integrator can be condensed on the light incident surface of the lens array integrator, and almost all the light emitted from the rod integrator is directed to the lens array integrator. It can be taken in.
  • an LED is used as a light source by the light irradiation device having the above characteristics and an exposure device having a projection optical system that irradiates the mask with light from the irradiation surface of the integrator and projects a pattern image of the mask onto the photosensitive substrate.
  • An exposure apparatus is realized.
  • the lens array integrator can take out light emitted from a light source composed of a plurality of LEDs and emit light with uniform illuminance distribution.
  • the high quality light irradiation apparatus which uses LED as a light source is implement
  • this apparatus Embodiments of a light irradiation apparatus according to the present invention (hereinafter abbreviated as “this apparatus” where appropriate) will be described with reference to the drawings.
  • this apparatus the dimensional ratio in the drawing does not necessarily match the actual dimensional ratio.
  • FIG. 1 is a schematic diagram showing the configuration of the optical system of the present apparatus.
  • the apparatus 1 includes a light source unit 11, an optical system 13, and a lens array integrator 15.
  • an object (not shown in FIG. 1) to be irradiated with light from the light source unit 11 is installed at the rear stage of the lens array integrator 15 (on the side opposite to the light source unit 11).
  • An optical system such as a projection lens may be installed between the object and the lens array integrator 15 as necessary.
  • the light emitted from the light source unit 11 enters the optical system 13. Then, the optical system 13 projects this light onto the light incident surface 15S of the lens array integrator 15.
  • the optical system 13 includes a rod integrator 17.
  • the lens array integrator 15 includes a plurality of lenses, and has a function of making the illuminance distribution uniform by superimposing the illuminance distribution of light incident on the incident surface of each lens on the irradiation surface.
  • the rod integrator 17 is composed of a glass member or a cylindrical member having a mirror on the inner surface, and the light incident on the incident surface is repeatedly reflected inside, and the reflected light is superimposed, thereby aligning the incident light. It has a function of making the illuminance distribution of the light on the exit surface uniform while maintaining the distribution.
  • the light source unit 11 is configured by arranging a plurality of LEDs 21.
  • Various arrangement methods such as a circular shape, an elliptical shape, a rectangular shape, and a hexagonal shape may be adopted as the arrangement method, and the arrangement manner of the LEDs 21 may be selected according to the arrangement manner of a plurality of lenses provided in the lens array integrator 15. Good.
  • the non-uniform luminous flux (light / dark pattern) generated by the plurality of LEDs 21 of the light source unit 11 is superposed in the rod integrator 17.
  • the light emitted from the rod integrator 17 has a uniform light and dark pattern in the light source unit 11 and the arrangement pattern of the LEDs 21 is not reflected.
  • the lens array integrator 15 when the light / dark pattern in the light source unit 11 is made uniform on the light exit surface of the rod integrator 17 via the rod integrator 17, and the light is incident on the lens array integrator 15, the lens array integrator 15.
  • the illuminance distribution of the light incident on the incident surface of each of the 15 lenses is uniform. Since the irradiation surface is an overlap of the illuminance distributions, a uniform illuminance distribution can be obtained.
  • the arrangement pattern of the LEDs 21 can be made uniform without being reflected and emitted to the object.
  • FIG. 2 is a schematic diagram showing the configuration of the optical system of the apparatus 1A according to the second embodiment.
  • This apparatus 1A is different from the apparatus 1 of the first embodiment only in that the light incident surface 15S of the lens array integrator 15 is connected to the light emitting surface of the rod integrator 17. The others are the same as in the first embodiment.
  • the rod integrator 17 Since the rod integrator 17 maintains the angle component of the incident light, the emitted light from the rod integrator 17 has a spread angle.
  • the configuration of the present apparatus 1 ⁇ / b> A almost all of the light emitted from the rod integrator 17 can be taken into the lens array integrator 15. Thereby, the emitted light from LED21 can be efficiently entered into the lens array integrator 15.
  • join is a matter of course when the top of the lens on the light incident surface of the lens array integrator 15 and the light emitting surface of the rod integrator 17 are completely in contact with each other.
  • the light incident surface of the integrator 15 may cover the light exit surface of the rod integrator 17.
  • the case where the maximum diameter of the rod integrator 17 is smaller than the maximum diameter of the lens array integrator 15 includes the case where the distance between them is about the difference in diameter.
  • FIG. 3 is a schematic diagram showing the configuration of the optical system of the apparatus 1B in the third embodiment.
  • the present apparatus 1B is different from the present apparatus 1 of the first embodiment only in that the optical system 13 further includes a first optical member 23, and the rest is common to the first embodiment.
  • the first optical member 23 is arranged so as to image the light emitted from the light source unit 11 on the incident surface 17S of the rod integrator 17.
  • the light emitted from the light source unit 11 can be condensed on the light incident surface 17S of the rod integrator 17.
  • the light emitting surface of the rod integrator 17 may be connected to the light incident surface 15S of the lens array integrator 15 as in the second embodiment.
  • FIG. 4 is a schematic diagram showing the configuration of the optical system of the apparatus 1C according to the fourth embodiment.
  • the present apparatus 1C is different from the present apparatus 1B of the third embodiment only in that the optical system 13 further includes a convex lens 25, and is otherwise the same as the third embodiment.
  • the convex lens 25 is provided between the light source unit 11 and the first optical member 23 so that the focal position on the first optical member 23 side coincides with the focal position on the light source unit 11 side of the first optical member 23. Be placed.
  • the light incident surface 17S of the rod integrator 17 is disposed at a position where the vicinity of the exit surface of the convex lens 25 is projected by the first optical member 23.
  • an optical system for collimating the light from the LED 21 may be added to the front stage of the convex lens 25 (between the light source unit 11 and the convex lens 25).
  • the light emitted from the light source unit 11 is once collected by the convex lens 25 at the focal position on the first optical member 23 side of the convex lens 25 and then incident on the first optical member 23.
  • Light from the vicinity of the convex lens 25 is imaged by the first optical member 23 on the light incident surface 17S of the rod integrator 17.
  • the emitted light from the light source unit 11 can be condensed on the light incident surface 17S of the rod integrator 17.
  • the “coincidence of focal positions” is a concept including a case where the focal positions completely coincide with each other and a case where there is some deviation.
  • the lens used here may be a spherical lens, and the spherical lens has spherical aberration.
  • the focal position of the convex lens 25 is the waist position of the beam produced by the light passing through the peripheral edge of the lens.
  • the focal position of the convex lens 25 of the first optical member 23 is preferably in the range of a distance corresponding to ⁇ 10% of the waist diameter in the optical axis direction.
  • the light emitted from the light source unit 11 is incident on the first optical member 23 via one convex lens 25, but is incident on the first optical member 23 via a plurality of lenses. It does n’t matter.
  • FIG. 5 is a schematic diagram illustrating a configuration of an optical system of the apparatus 1D according to the fifth embodiment.
  • the present apparatus 1D is different from the present apparatus 1 of the first embodiment only in that the light incident surface 17S of the rod integrator 17 is connected to the emission surface of the light source unit 11, and the other is Common to one embodiment.
  • the outgoing light from the LED 21 has a spread angle, if the distance between the LED 21 and the light incident surface 17S of the rod integrator 17 is more than a certain distance, a part of the outgoing light cannot be taken into the rod integrator 17.
  • the light emitted from the light source unit 11 can be efficiently incident on the light incident surface 17 ⁇ / b> S of the rod integrator 17.
  • the light exit surface of the rod integrator 17 may be connected to the light entrance surface 15S of the lens array integrator 15 (see FIG. 6).
  • the term “join” here means that the top of the lens on the light entrance surface of the lens array integrator 15 and the light exit surface of the rod integrator 17 are completely in contact with each other.
  • the arrangement may be such that the light exit surface of the rod integrator 17 covers the light entrance surface of the lens array integrator 15.
  • the case where the maximum diameter of the rod integrator 17 is smaller than the maximum diameter of the lens array integrator 15 includes the case where the distance between them is about the difference in diameter.
  • FIG. 7 is a schematic diagram showing a configuration of an optical system of the apparatus 1E according to the sixth embodiment.
  • the present apparatus 1E is different from the present apparatus 1 of the first embodiment only in that the optical system 13 further includes a second optical member 27, and the rest is common to the first embodiment.
  • the second optical member 27 is disposed between the rod integrator 17 and the lens array integrator 15, and is disposed so as to form an image of the light emitted from the rod integrator 17 on the light incident surface 15 ⁇ / b> S of the lens array integrator 15. Is done.
  • the light emitted from the rod integrator 17 can be condensed on the light incident surface 15S of the lens array integrator 15, and almost all the light emitted from the rod integrator 17 is taken into the lens array integrator 15. It becomes possible.
  • the incident surface 17S of the rod integrator 17 may be connected to the emission surface of the light source unit 11.
  • FIG. 8 is a schematic diagram showing the configuration of the optical system of the present apparatus 1F in the seventh embodiment.
  • the present apparatus 1F is different from the present apparatus 1E of the sixth embodiment only in that the optical system 13 further includes a convex lens 29, and is otherwise the same as the sixth embodiment.
  • the convex lens 29 is provided between the rod integrator 17 and the second optical member 27 so that the focal position on the second optical member 27 side coincides with the focal position on the light source unit 11 side of the second optical member 27. Placed in.
  • the light incident surface 15S of the lens array integrator 15 is disposed at a position where the second optical member 27 projects the vicinity of the exit surface of the convex lens 29.
  • an optical system for collimating the light from the LED 21 may be added to the front stage of the rod integrator 17.
  • the light emitted from the rod integrator 17 is once condensed by the convex lens 29 at the focal position on the second optical member 27 side of the convex lens 29 and then incident on the second optical member 27.
  • Light from the vicinity of the convex lens 29 is imaged by the second optical member 27 on the light incident surface 15S of the lens array integrator 15.
  • almost all the emitted light from the rod integrator 17 can be taken into the lens array integrator 15.
  • FIG. 8 shows a configuration in which light emitted from the rod integrator 17 is incident on the second optical member 27 through one convex lens 29, but is incident on the second optical member 27 through a plurality of lenses. It does not matter as a thing.
  • FIG. 9 is a schematic diagram showing a configuration of an optical system of an exposure apparatus including the apparatus 1.
  • An irradiation lens 31 and a mask 33 as the projection optical system 12 are provided at the subsequent stage of the lens array integrator 15, and a projection lens 35 is provided as necessary.
  • a mask 33 is set at the irradiation position of the irradiation lens 31, and a photosensitive substrate 37 to be a target for printing the pattern image of the mask 33 is set at the subsequent stage of the mask 33.
  • the illuminance distribution of light on the light exit surface of the rod integrator 17 is made uniform while maintaining the orientation distribution of the light via the rod integrator 17.
  • the projection optical system 12 projects the pattern image of the mask 33 onto the photosensitive substrate 35 directly or via the projection lens 35.
  • a type in which the mask 33 and the photosensitive substrate 37 are brought into contact contact exposure
  • light with a uniform illuminance distribution that does not reflect the arrangement pattern of the LEDs 21 can be taken into the lens array integrator 15. Thereby, there is no difference in light intensity depending on the location of the irradiation target, and the LED can be used as a light source for the exposure apparatus.
  • An optical system for collimating the light emitted from the light source unit 11 may be provided between the light source unit 11 and the optical system 13.
  • the exposure apparatus provided with the apparatus 1 can be used in a projection exposure system and a proximity exposure system in which the mask 33 and the photosensitive substrate 37 are not in contact, and a contact exposure system in which the mask 33 and the photosensitive substrate 37 are in contact. It is.
  • Light irradiation device 11 Light source unit 12: Projection optical system 13: Optical system 15: Lens array integrator 15S: Light incident surface of lens array integrator 17: Rod -Integrator 17S: Light entrance surface of rod integrator 21: LED 23: First optical member 25: Convex lens 27: Second optical member 29: Convex lens 31: Irradiation lens 33: Mask 35: Projection lens 37: Photosensitive substrate

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

　In order to provide an optical system which, when light emitted from a light source comprising a plurality of LEDs is introduced into a lens array integrator, can make the illumination distribution of light emitted from a light emission surface of the lens array integrator even, and thus provide a highly efficient light irradiating device, this device (1) comprises: a light source unit (11) having a plurality of LEDs (21); a lens array integrator (15); and an optical system (13) which projects light emitted from the light source unit (11) onto the light incident surface (15S) of the lens array integrator (15), and which comprises a rod integrator (17).

Description

光照射装置、露光装置Light irradiation device, exposure device
　本発明は複数のＬＥＤを備えた光照射装置に関し、特に露光装置の光源として利用可能な光照射装置に関する。また本発明は、このような光照射装置を備えた露光装置に関する。 The present invention relates to a light irradiation apparatus including a plurality of LEDs, and more particularly to a light irradiation apparatus that can be used as a light source of an exposure apparatus. The present invention also relates to an exposure apparatus provided with such a light irradiation apparatus.
　従来、光を用いた微細加工に露光装置が利用されている。近年では、露光技術は種々の分野で展開されており、微細加工の中でも比較的大きなパターンの作製や３次元的な微細加工に利用されている。より具体的には、例えばＬＥＤの電極パターンの作製や、加速度センサーに代表されるＭＥＭＳ（Micro Electro Mechanical Systems）の製造工程などに露光技術が利用されている。 Conventionally, an exposure apparatus is used for fine processing using light. In recent years, exposure techniques have been developed in various fields, and are used for the production of relatively large patterns and three-dimensional microfabrication among microfabrication. More specifically, for example, an exposure technique is used for manufacturing an electrode pattern of an LED, a manufacturing process of MEMS (Micro Electro Mechanical Systems) represented by an acceleration sensor, and the like.
　これらの露光技術において、光源としては、以前から輝度の高い放電ランプが用いられていた。しかし、近年の固体光源技術の進歩に伴い、複数のＬＥＤをマトリックス配置したものを光源として利用することが検討されている。このような技術として、例えば下記特許文献１が知られている。特許文献１には、複数の固体光源からなる固体光源ユニットを光源とし、この光源とマスクの間に配置された照明光学系にフライアイレンズ（レンズアレイ・インテグレータの一種）が配置された露光装置が開示されている。 In these exposure technologies, a discharge lamp having a high luminance has been used as a light source. However, with recent progress in solid-state light source technology, it has been studied to use a plurality of LEDs arranged in a matrix as a light source. As such a technique, for example, the following Patent Document 1 is known. Patent Document 1 discloses an exposure apparatus in which a solid light source unit including a plurality of solid light sources is used as a light source, and a fly-eye lens (a kind of lens array integrator) is arranged in an illumination optical system arranged between the light source and a mask. Is disclosed.
特開２００４－３３５９５３号公報JP 2004-335953 A
　ＬＥＤは、露光用の光源としては一チップ当たりの放射光束が少ない。このため、露光用の光照射装置に使用するためには複数個のＬＥＤからの出射光を集めて、レンズアレイ・インテグレータの光の入射面に入射させる必要がある。更に光量を増やすためには、光源として配置されるＬＥＤの個数を増やす必要がある。 LED has a small amount of radiated light flux per chip as a light source for exposure. For this reason, in order to use it for the light irradiation apparatus for exposure, it is necessary to collect the emitted light from a plurality of LEDs and make it incident on the light incident surface of the lens array integrator. In order to further increase the amount of light, it is necessary to increase the number of LEDs arranged as light sources.
　ところが、光源としてＬＥＤを複数配置する場合、各ＬＥＤに電流を供給するための信号線やスイッチング素子などの周辺回路が必要となるため、ＬＥＤを隙間なく並べることができない。このため、離間を有して並べられた複数のＬＥＤからの出射光は、照射面においてＬＥＤの配置パターンを反映した照度分布を示す。このように、ＬＥＤの配置パターンが反映された状態の光をレンズアレイ・インテグレータの光の入射面に入射させると、レンズアレイ・インテグレータの個々のレンズ内にこのパターンが反映されてしまう。この結果、照射対象物たるワーク面（光の照射面）で十分な均一性（ユニフォミティ）を確保することができなくなるという課題がある。 However, when a plurality of LEDs are arranged as a light source, peripheral circuits such as a signal line and a switching element for supplying current to each LED are required, so that the LEDs cannot be arranged without a gap. For this reason, the emitted light from the plurality of LEDs arranged with a separation shows an illuminance distribution reflecting the LED arrangement pattern on the irradiation surface. As described above, when light in a state where the LED arrangement pattern is reflected is incident on the light incident surface of the lens array integrator, the pattern is reflected in each lens of the lens array integrator. As a result, there is a problem that sufficient uniformity (uniformity) cannot be ensured on the work surface (light irradiation surface) which is an irradiation object.
　このような課題に鑑み、本発明は、複数のＬＥＤからなる光源からの出射光をレンズアレイ・インテグレータに取り込むに際し、レンズアレイ・インテグレータの光の入射面からの出射光の照度分布を均一化することのできる光学系を提供し、高品質の光照射装置を実現することを目的とする。 In view of such problems, the present invention makes uniform the illuminance distribution of the emitted light from the light incident surface of the lens array integrator when taking the emitted light from the light source composed of a plurality of LEDs into the lens array integrator. It is an object of the present invention to provide an optical system capable of realizing the above and to realize a high-quality light irradiation apparatus.
　複数のＬＥＤによって光照射装置の光源部を構成する場合、各ＬＥＤからの出射光を均一化する目的でレンズアレイ・インテグレータを用いることは上記特許文献１を初めとして従来考えられていた。 In the case where the light source unit of the light irradiation device is constituted by a plurality of LEDs, it has been conventionally considered that the lens array integrator is used for the purpose of uniformizing the emitted light from each LED, starting with the above-mentioned Patent Document 1.
　また、これとは別に、ランプによって光源部を構成する場合において、対象物への照射面における照度を均一化する目的で、レンズアレイ・インテグレータ又はロッド・インテグレータを設ける構成も従来存在していた。しかし、レンズアレイ・インテグレータとロッド・インテグレータは、共に照度分布を均一化する機能という意味において同じ働きを示すと考えられていたため、いずれか一方のみを備える構成が通常であった。 In addition to this, in the case where the light source unit is configured by a lamp, there has conventionally been a configuration in which a lens array integrator or a rod integrator is provided for the purpose of uniforming the illuminance on the irradiation surface of the object. However, since both the lens array integrator and the rod integrator were considered to exhibit the same function in terms of the function of uniforming the illuminance distribution, a configuration including only one of them was normal.
　また、従来の露光装置では、一般的にレンズアレイ・インテグレータが用いられている。レンズアレイ・インテグレータは、照射面における視角を制御できるといった特徴を持ち、例えば、当該視角はレンズアレイ・インテグレータの光の出射面の径に対応している。また、レンズアレイ・インテグレータの光の出射面にアパーチャを設置し、その径を小さくすることで、照射面での視角を小さく出来る。一方、ロッド・インテグレータは、入射光の配光分布が維持されて出射されるといった特徴を有するが、視角を制御することはできない。このような理由から、パターン加工精度を調整する際に視角を制御する必要がある露光用途においては、一般に、レンズアレイ・インテグレータが使用されていた。 Further, in a conventional exposure apparatus, a lens array integrator is generally used. The lens array integrator has a feature that the viewing angle on the irradiation surface can be controlled. For example, the viewing angle corresponds to the diameter of the light emitting surface of the lens array integrator. Further, by installing an aperture on the light exit surface of the lens array integrator and reducing its diameter, the viewing angle on the irradiation surface can be reduced. On the other hand, the rod integrator has a feature that the light distribution of incident light is maintained and emitted, but the viewing angle cannot be controlled. For these reasons, lens array integrators are generally used in exposure applications that require viewing angle control when adjusting pattern processing accuracy.
　本発明者は、レンズアレイ・インテグレータとロッド・インテグレータでは、照度分布を均一化するメカニズムが相違する点に着目し、この両者を一定の方法で組み合わせることで、複数のＬＥＤを光源部とする光照射装置における照度分布の均一化に大きく寄与することを見出し、本発明に至ったものである。 The present inventor has noticed that the lens array integrator and the rod integrator have different mechanisms for uniformizing the illuminance distribution, and combining these both in a certain method enables light having a plurality of LEDs as a light source unit. The present inventors have found that it greatly contributes to the uniformity of the illuminance distribution in the irradiating apparatus, and have reached the present invention.
　つまり、本装置は、複数のＬＥＤを含む光源部と、レンズアレイ・インテグレータと、前記光源部から出射された光を前記レンズアレイ・インテグレータの光の入射面に投影する光学系と、を有し、前記光学系がロッド・インテグレータを有することを特徴とする。 That is, the apparatus includes a light source unit including a plurality of LEDs, a lens array integrator, and an optical system that projects light emitted from the light source unit onto a light incident surface of the lens array integrator. The optical system includes a rod integrator.
　レンズアレイ・インテグレータは、各レンズの入射面の照度分布を照射面で重ね合わせることで、照度分布を均一化する機能を有する。しかし、レンズアレイ・インテグレータの各レンズに対して入射する光の照度分布が同じパターンの不均一さを持つ照度分布である場合には、照射面においてもその不均一さ（各レンズに入射する光が持つ照度分布のパターン）が反映される。例えば、複数のＬＥＤをアレイ状に配置し、個々のＬＥＤがレンズアレイ・インテグレータの各レンズに対応するように（各レンズの中央部に各ＬＥＤの中央部が来るように）設置された場合、各レンズの入射面の中央部の照度が高く、周辺は低くなる。この様な場合レンズアレイ・インテグレータの各レンズの入射面での光の照度分布を照射面で重ね合わせても、当該照射面では中央部の照度が高く、周辺部は低い照度分布となり、照射面での照度分布の均一化は出来ない。 The lens array integrator has a function of making the illuminance distribution uniform by superimposing the illuminance distribution on the incident surface of each lens on the irradiation surface. However, when the illuminance distribution of the light incident on each lens of the lens array integrator is an illuminance distribution having the same pattern non-uniformity, the non-uniformity (light incident on each lens) also on the irradiated surface. Illuminance distribution pattern). For example, when a plurality of LEDs are arranged in an array and each LED is installed so as to correspond to each lens of the lens array integrator (the center of each LED comes to the center of each lens), The illuminance at the center of the entrance surface of each lens is high and the periphery is low. In such a case, even if the illuminance distribution of the light at the entrance surface of each lens of the lens array integrator is superimposed on the irradiation surface, the illuminance surface has a high illuminance at the center and a low illuminance distribution at the peripheral portion. The illuminance distribution cannot be made uniform.
　これに対し、ロッド・インテグレータは、入射面に入射した光が内部にて反射を繰り返し、反射光が重ね合わせられることで、出射面での照度分布を均一にする機能を有する。照射面にはこのロッド・インテグレータの光の出射面が写ることになるので、当該ロッド・インテグレータの光の出射面における出射面照度の均一性が照射面の均一性と等価となる。 In contrast, the rod integrator has a function of making the illuminance distribution uniform on the exit surface by repeatedly reflecting the light incident on the entrance surface inside and overlapping the reflected light. Since the light exit surface of the rod integrator is reflected on the irradiated surface, the uniformity of the illuminance on the exit surface of the light output surface of the rod integrator is equivalent to the uniformity of the irradiated surface.
　本装置は、レンズアレイ・インテグレータに入射する前段で、ＬＥＤアレイよりなる光源部からの出射光をいったんロッド・インテグレータに入射させる。これにより、入射した光の重ね合わせが行われる。つまり、ＬＥＤから放射される光はある広がり角を持っており、その角度成分ごとにロッド・インテグレータの内面で多重反射され、ロッド・インテグレータの光の出射面上では複数の点に光が到達することとなる。ＬＥＤアレイでは、これらの光の到達位置がＬＥＤの配置されている位置によって異なり、これらを重ね合わせることで均一化がなされる。この結果、ロッド・インテグレータから出射する光は、光源部における明暗のパターンが均一化されたものとなり、ＬＥＤアレイにおける個々のＬＥＤの配置パターンが反映されなくなる。 This device, before entering the lens array integrator, once causes the emitted light from the light source unit made up of the LED array to enter the rod integrator. Thereby, the superposition of the incident light is performed. In other words, the light emitted from the LED has a certain divergence angle, and each angle component is multiple-reflected by the inner surface of the rod integrator, and the light reaches a plurality of points on the light output surface of the rod integrator. It will be. In the LED array, the arrival positions of these lights differ depending on the positions where the LEDs are arranged, and they are made uniform by overlapping them. As a result, the light emitted from the rod integrator has a uniform light and dark pattern in the light source unit, and the arrangement pattern of individual LEDs in the LED array is not reflected.
　そして、ロッド・インテグレータから出射した光は、ＬＥＤの配置パターンは反映されずに、レンズアレイ・インテグレータの光の入射面に入射される。レンズアレイ・インテグレータの各レンズの入射面の照度が均一になっているので、それらの照度分布の重ね合わせである照射面も均一になる。 The light emitted from the rod integrator is incident on the light incident surface of the lens array integrator without reflecting the LED arrangement pattern. Since the illuminance on the entrance surface of each lens of the lens array integrator is uniform, the illumination surface, which is a superposition of these illuminance distributions, is also uniform.
　以上により、本装置によれば、ＬＥＤの配置パターンが反映されることなく、照度分布を均一化した光をレンズアレイ・インテグレータから対象物に出射することができる。 As described above, according to the present apparatus, the light with uniform illuminance distribution can be emitted from the lens array integrator to the object without reflecting the LED arrangement pattern.
　更に、前記ロッド・インテグレータの光の出射面に前記レンズアレイ・インテグレータの光の入射面を連接させる構成としても構わない。 Furthermore, the light entrance surface of the lens array integrator may be connected to the light exit surface of the rod integrator.
　ロッド・インテグレータの光の出射面から出射される光は、ロッド・インテグレータに対して入射された光の広がり角が維持される。つまり、ＬＥＤから出射される光は、その発光原理より広がり角を有しているので、ＬＥＤを光源とすれば、ロッド・インテグレータの出射光は、広がり角度を有したものとなる。 The light emitted from the light exit surface of the rod integrator maintains the spread angle of the light incident on the rod integrator. In other words, the light emitted from the LED has a divergence angle based on the light emission principle. Therefore, if the LED is used as the light source, the light emitted from the rod integrator has a divergence angle.
　ＬＥＤを光源とする光照射装置においては、できるだけ多くの光束をレンズアレイ・インテグレータに対して取り込ませるのが好ましい。そこで、ロッド・インテグレータの光の出射面にレンズアレイ・インテグレータの光の入射面を連接させることで、ロッド・インテグレータからの出射光をほとんど全てレンズアレイ・インテグレータに取り込ませることが可能となる。 In a light irradiation apparatus using an LED as a light source, it is preferable that as much light flux as possible be taken into the lens array integrator. Therefore, by connecting the light entrance surface of the lens array integrator to the light exit surface of the rod integrator, almost all of the light emitted from the rod integrator can be taken into the lens array integrator.
　また、前記光学系が、前記光源部から出射された光を前記ロッド・インテグレータの光の入射面に結像させる第１光学部材を備える構成としても構わない。このとき、第１光学部材は、凸レンズなどの光学部材を介して入射する構成を採用することができる。 The optical system may include a first optical member that forms an image of the light emitted from the light source unit on the light incident surface of the rod integrator. At this time, the 1st optical member can employ | adopt the structure which injects via optical members, such as a convex lens.
　このような構成とすることで、光源部からの出射光をロッド・インテグレータの光の入射面に集光（結像）させることができる。 With such a configuration, the light emitted from the light source unit can be condensed (imaged) on the light incident surface of the rod integrator.
　また、前記光源部の出射面に前記ロッド・インテグレータの光の入射面を連接させる構成としても構わない。 Further, the light entrance surface of the rod integrator may be connected to the light exit surface of the light source unit.
　このような構成とした場合、光源部からの出射光を効率良くロッド・インテグレータの光の入射面に入射させることができる。 In such a configuration, the light emitted from the light source unit can be efficiently incident on the light incident surface of the rod integrator.
　また、前記光学系が、前記ロッド・インテグレータから出射された光を前記レンズアレイ・インテグレータの光の入射面に結像させる第２光学部材を備える構成としても構わない。このとき、第２光学部材は、凸レンズなどの光学部材を介して入射する構成を採用することができる。 The optical system may include a second optical member that forms an image of the light emitted from the rod integrator on the light incident surface of the lens array integrator. At this time, the second optical member can adopt a configuration in which the light enters through an optical member such as a convex lens.
　このような構成とした場合においても、ロッド・インテグレータからの出射光をレンズアレイ・インテグレータの光の入射面に集光させることができ、ロッド・インテグレータからの出射光をほとんど全てレンズアレイ・インテグレータに取り込ませることが可能となる。 Even in such a configuration, the light emitted from the rod integrator can be condensed on the light incident surface of the lens array integrator, and almost all the light emitted from the rod integrator is directed to the lens array integrator. It can be taken in.
　また、上記の特徴を有した光照射装置と、インテグレータの照射面からの光をマスクに照射してマスクのパターン像を感光性基板上に投影する投影光学系を有する露光装置によって、ＬＥＤを光源とする露光装置が実現される。 Further, an LED is used as a light source by the light irradiation device having the above characteristics and an exposure device having a projection optical system that irradiates the mask with light from the irradiation surface of the integrator and projects a pattern image of the mask onto the photosensitive substrate. An exposure apparatus is realized.
　本発明の光照射装置によれば、レンズアレイ・インテグレータは、複数のＬＥＤからなる光源からの出射光を取り込んで、照度分布を均一化した光を出射することが可能となる。これにより、光源をＬＥＤとする高品質の光照射装置が実現される。 According to the light irradiation device of the present invention, the lens array integrator can take out light emitted from a light source composed of a plurality of LEDs and emit light with uniform illuminance distribution. Thereby, the high quality light irradiation apparatus which uses LED as a light source is implement | achieved.
本発明の光照射装置の第１実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 1st Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第２実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 2nd Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第３実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 3rd Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第４実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 4th Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第５実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 5th Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第５実施形態における光学系の別構成を示す模式図である。It is a schematic diagram which shows another structure of the optical system in 5th Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第６実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 6th Embodiment of the light irradiation apparatus of this invention. 本発明の光照射装置の第７実施形態における光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system in 7th Embodiment of the light irradiation apparatus of this invention. 露光装置の光学系の構成を示す模式図である。It is a schematic diagram which shows the structure of the optical system of exposure apparatus.
　本発明の光照射装置（以下、適宜「本装置」と略記する。）の各実施形態につき、図面を参照して説明する。なお、各図において図面の寸法比と実際の寸法比は必ずしも一致しない。 Embodiments of a light irradiation apparatus according to the present invention (hereinafter abbreviated as “this apparatus” where appropriate) will be described with reference to the drawings. In each figure, the dimensional ratio in the drawing does not necessarily match the actual dimensional ratio.
　　［第１実施形態］
　本装置の第１実施形態の構成につき、図面を参照して説明する。 [First Embodiment]
The configuration of the first embodiment of the present apparatus will be described with reference to the drawings.
　図１は、本装置の光学系の構成を示す模式図である。本装置１は、光源部１１、光学系１３、レンズアレイ・インテグレータ１５を備える。 FIG. 1 is a schematic diagram showing the configuration of the optical system of the present apparatus. The apparatus 1 includes a light source unit 11, an optical system 13, and a lens array integrator 15.
　なお、レンズアレイ・インテグレータ１５の後段（光源部１１と反対側）には、光源部１１からの光を照射させる対象物（図１において不図示）が設置される。この対象物とレンズアレイ・インテグレータ１５の間には、必要に応じて投影レンズなどの光学系を設置してもよい。 Note that an object (not shown in FIG. 1) to be irradiated with light from the light source unit 11 is installed at the rear stage of the lens array integrator 15 (on the side opposite to the light source unit 11). An optical system such as a projection lens may be installed between the object and the lens array integrator 15 as necessary.
　光源部１１から出射された光は光学系１３に入射される。そして、光学系１３はレンズアレイ・インテグレータ１５の光の入射面１５Ｓにこの光を投影する。 The light emitted from the light source unit 11 enters the optical system 13. Then, the optical system 13 projects this light onto the light incident surface 15S of the lens array integrator 15.
　そして、図１に示すように、光学系１３はロッド・インテグレータ１７を備える構成である。 As shown in FIG. 1, the optical system 13 includes a rod integrator 17.
　レンズアレイ・インテグレータ１５は複数のレンズを有して構成され、それぞれのレンズの入射面に入射した光の照度分布を照射面で重ね合わせることで、照度分布を均一化する機能を有する。一方、ロッド・インテグレータ１７は、ガラス部材又は内面にミラーを有する筒型部材で構成され、入射面に入射した光が内部にて反射を繰り返し、反射光が重ね合わせられることで、入射光の配向分布を維持しながら出射面における光の照度分布を均一化する機能を有する。 The lens array integrator 15 includes a plurality of lenses, and has a function of making the illuminance distribution uniform by superimposing the illuminance distribution of light incident on the incident surface of each lens on the irradiation surface. On the other hand, the rod integrator 17 is composed of a glass member or a cylindrical member having a mirror on the inner surface, and the light incident on the incident surface is repeatedly reflected inside, and the reflected light is superimposed, thereby aligning the incident light. It has a function of making the illuminance distribution of the light on the exit surface uniform while maintaining the distribution.
　光源部１１は、ＬＥＤ２１を複数配列して構成されている。配列方法は円形状、楕円形状、矩形状、六角形状など多様な方法を採用してよく、レンズアレイ・インテグレータ１５に備えられる複数のレンズの配列態様に応じてＬＥＤ２１の配列態様を選択してもよい。 The light source unit 11 is configured by arranging a plurality of LEDs 21. Various arrangement methods such as a circular shape, an elliptical shape, a rectangular shape, and a hexagonal shape may be adopted as the arrangement method, and the arrangement manner of the LEDs 21 may be selected according to the arrangement manner of a plurality of lenses provided in the lens array integrator 15. Good.
　図１の構成とすることで、光源部１１の複数のＬＥＤ２１による不均一な光束（明暗のパターン）を、ロッド・インテグレータ１７内で重ね合わせられる。この結果、ロッド・インテグレータ１７から出射する光は、光源部１１における明暗のパターンが均一化されたものとなり、ＬＥＤ２１の配置パターンは反映されない。 1, the non-uniform luminous flux (light / dark pattern) generated by the plurality of LEDs 21 of the light source unit 11 is superposed in the rod integrator 17. As a result, the light emitted from the rod integrator 17 has a uniform light and dark pattern in the light source unit 11 and the arrangement pattern of the LEDs 21 is not reflected.
　つまり、光源部１１における明暗のパターンがロッド・インテグレータ１７を介することにより、ロッド・インテグレータ１７の光の出射面で均一になり、その光をレンズアレイ・インテグレータ１５に入射させると、レンズアレイ・インテグレータ１５のそれぞれのレンズの入射面に入射した光の照度分布は均一になっている。照射面はその照度分布の重ね合わせであるので、均一な照度分布が得られる。 That is, when the light / dark pattern in the light source unit 11 is made uniform on the light exit surface of the rod integrator 17 via the rod integrator 17, and the light is incident on the lens array integrator 15, the lens array integrator 15. The illuminance distribution of the light incident on the incident surface of each of the 15 lenses is uniform. Since the irradiation surface is an overlap of the illuminance distributions, a uniform illuminance distribution can be obtained.
　よって、本装置１によれば、ＬＥＤ２１の配置パターンが反映されることなく均一化し、対象物に出射することができる。 Therefore, according to the present apparatus 1, the arrangement pattern of the LEDs 21 can be made uniform without being reflected and emitted to the object.
　　［第２実施形態］
　本装置の第２実施形態の構成につき、図面を参照して説明する。なお、以下の各実施形態では、第１実施形態と異なる箇所のみを説明する。 [Second Embodiment]
The configuration of the second embodiment of the present apparatus will be described with reference to the drawings. In the following embodiments, only portions different from the first embodiment will be described.
　図２は、第２実施形態における本装置１Ａの光学系の構成を示す模式図である。本装置１Ａは、第１実施形態の本装置１と比較して、ロッド・インテグレータ１７の光の出射面にレンズアレイ・インテグレータ１５の光の入射面１５Ｓが連接されている点が異なるのみであり、他は第１実施形態と共通である。 FIG. 2 is a schematic diagram showing the configuration of the optical system of the apparatus 1A according to the second embodiment. This apparatus 1A is different from the apparatus 1 of the first embodiment only in that the light incident surface 15S of the lens array integrator 15 is connected to the light emitting surface of the rod integrator 17. The others are the same as in the first embodiment.
　ロッド・インテグレータ１７は入射光が持つ角度成分を維持するため、ロッド・インテグレータ１７からの出射光は広がり角度を有したものとなる。本装置１Ａの構成とすることで、ロッド・インテグレータ１７からの出射光をほとんど全てレンズアレイ・インテグレータ１５に取り込ませることが可能となる。これにより、ＬＥＤ２１からの出射光を効率的にレンズアレイ・インテグレータ１５に入射させることができる。 Since the rod integrator 17 maintains the angle component of the incident light, the emitted light from the rod integrator 17 has a spread angle. By adopting the configuration of the present apparatus 1 </ b> A, almost all of the light emitted from the rod integrator 17 can be taken into the lens array integrator 15. Thereby, the emitted light from LED21 can be efficiently entered into the lens array integrator 15.
　なお、ここでいう「連接」とは、レンズアレイ・インテグレータ１５の光の入射面のレンズの頂上とロッド・インテグレータ１７の光の出射面が完全に接触している場合は当然のこと、レンズアレイ・インテグレータ１５の光の入射面にロッド・インテグレータ１７の光の出射面が覆いかぶさる配置でもよい。また、ロッド・インテグレータ１７の最大径がレンズアレイ・インテグレータ１５の最大径と比較して小径となる場合、両者の間隔がその径の差程度である場合も含むものとする。 The term "joint" used here is a matter of course when the top of the lens on the light incident surface of the lens array integrator 15 and the light emitting surface of the rod integrator 17 are completely in contact with each other. The light incident surface of the integrator 15 may cover the light exit surface of the rod integrator 17. Further, the case where the maximum diameter of the rod integrator 17 is smaller than the maximum diameter of the lens array integrator 15 includes the case where the distance between them is about the difference in diameter.
　　［第３実施形態］
　図３は、第３実施形態における本装置１Ｂの光学系の構成を示す模式図である。本装置１Ｂは、第１実施形態の本装置１と比較して、光学系１３が第１光学部材２３を更に備える点が異なるのみであり、他は第１実施形態と共通である。 [Third Embodiment]
FIG. 3 is a schematic diagram showing the configuration of the optical system of the apparatus 1B in the third embodiment. The present apparatus 1B is different from the present apparatus 1 of the first embodiment only in that the optical system 13 further includes a first optical member 23, and the rest is common to the first embodiment.
　第１光学部材２３は、光源部１１からの出射光をロッド・インテグレータ１７の入射面１７Ｓに結像させるように配置される。 The first optical member 23 is arranged so as to image the light emitted from the light source unit 11 on the incident surface 17S of the rod integrator 17.
　これにより、光源部１１からの出射光をロッド・インテグレータ１７の光の入射面１７Ｓに集光させることができる。 Thereby, the light emitted from the light source unit 11 can be condensed on the light incident surface 17S of the rod integrator 17.
　なお、本実施形態において、第２実施形態と同様に、ロッド・インテグレータ１７の光の出射面をレンズアレイ・インテグレータ１５の光の入射面１５Ｓに連接させる構成としても構わない。 In the present embodiment, the light emitting surface of the rod integrator 17 may be connected to the light incident surface 15S of the lens array integrator 15 as in the second embodiment.
　　［第４実施形態］
　図４は、第４実施形態における本装置１Ｃの光学系の構成を示す模式図である。本装置１Ｃは、第３実施形態の本装置１Ｂと比較して、光学系１３が更に凸レンズ２５を備える点が異なるのみであり、他は第３実施形態と共通である。 [Fourth Embodiment]
FIG. 4 is a schematic diagram showing the configuration of the optical system of the apparatus 1C according to the fourth embodiment. The present apparatus 1C is different from the present apparatus 1B of the third embodiment only in that the optical system 13 further includes a convex lens 25, and is otherwise the same as the third embodiment.
　凸レンズ２５は、光源部１１と第１光学部材２３の間に設けられ、第１光学部材２３側の焦点位置が、第１光学部材２３の光源部１１側の焦点位置と一致するような位置に配置される。またロッド・インテグレータ１７の光の入射面１７Ｓは第１光学部材２３によって凸レンズ２５の出射面近傍が投影される位置に配置される。更に図示しないが、ＬＥＤ２１からの光をコリメートする光学系を凸レンズ２５の前段（光源部１１と凸レンズ２５との間）に追加した構成であっても構わない。 The convex lens 25 is provided between the light source unit 11 and the first optical member 23 so that the focal position on the first optical member 23 side coincides with the focal position on the light source unit 11 side of the first optical member 23. Be placed. The light incident surface 17S of the rod integrator 17 is disposed at a position where the vicinity of the exit surface of the convex lens 25 is projected by the first optical member 23. Although not shown, an optical system for collimating the light from the LED 21 may be added to the front stage of the convex lens 25 (between the light source unit 11 and the convex lens 25).
　この構成では、光源部１１からの出射光は、いったん凸レンズ２５において凸レンズ２５の第１光学部材２３側の焦点位置に集光された後、第１光学部材２３に入射する。凸レンズ２５近傍からの光は第１光学部材２３によってロッド・インテグレータ１７の光の入射面１７Ｓに結像される。この場合も、第３実施形態と同様に、光源部１１からの出射光をロッド・インテグレータ１７の光の入射面１７Ｓに集光させることができる。 In this configuration, the light emitted from the light source unit 11 is once collected by the convex lens 25 at the focal position on the first optical member 23 side of the convex lens 25 and then incident on the first optical member 23. Light from the vicinity of the convex lens 25 is imaged by the first optical member 23 on the light incident surface 17S of the rod integrator 17. Also in this case, similarly to the third embodiment, the emitted light from the light source unit 11 can be condensed on the light incident surface 17S of the rod integrator 17.
　なお、ここで「焦点位置の一致」とは、焦点位置同士が完全に一致する場合の他、いくらかのずれを有する場合を含む概念である。ここで使用されるレンズは概ね球面レンズでよく、球面レンズには球面収差が存在する。凸レンズ２５の焦点位置とはレンズの周縁部を通る光が作るビームのウエスト位置とする。第１光学部材２３の凸レンズ２５の焦点位置は光軸方向にウエスト径の±１０％に相当する距離の範囲にあることが好ましい。 Note that the “coincidence of focal positions” is a concept including a case where the focal positions completely coincide with each other and a case where there is some deviation. The lens used here may be a spherical lens, and the spherical lens has spherical aberration. The focal position of the convex lens 25 is the waist position of the beam produced by the light passing through the peripheral edge of the lens. The focal position of the convex lens 25 of the first optical member 23 is preferably in the range of a distance corresponding to ± 10% of the waist diameter in the optical axis direction.
　また、図４では、一の凸レンズ２５を介して光源部１１からの出射光が第１光学部材２３に入射される構成であるが、複数のレンズを介して第１光学部材２３に入射されるものとしても構わない。 In FIG. 4, the light emitted from the light source unit 11 is incident on the first optical member 23 via one convex lens 25, but is incident on the first optical member 23 via a plurality of lenses. It does n’t matter.
　　［第５実施形態］
　図５は、第５実施形態における本装置１Ｄの光学系の構成を示す模式図である。本装置１Ｄは、第１実施形態の本装置１と比較して、光源部１１の出射面にロッド・インテグレータ１７の光の入射面１７Ｓが連接されている点が異なるのみであり、他は第１実施形態と共通である。 [Fifth Embodiment]
FIG. 5 is a schematic diagram illustrating a configuration of an optical system of the apparatus 1D according to the fifth embodiment. The present apparatus 1D is different from the present apparatus 1 of the first embodiment only in that the light incident surface 17S of the rod integrator 17 is connected to the emission surface of the light source unit 11, and the other is Common to one embodiment.
　ＬＥＤ２１からの出射光は広がり角度を有するため、ＬＥＤ２１とロッド・インテグレータ１７の光の入射面１７Ｓの距離を一定以上空けると、出射光のうちの一部はロッド・インテグレータ１７に取り込めなくなってしまう。図５に示す構成とすることで、光源部１１からの出射光をロッド・インテグレータ１７の光の入射面１７Ｓに効率良く入射させることができる。 Since the outgoing light from the LED 21 has a spread angle, if the distance between the LED 21 and the light incident surface 17S of the rod integrator 17 is more than a certain distance, a part of the outgoing light cannot be taken into the rod integrator 17. With the configuration shown in FIG. 5, the light emitted from the light source unit 11 can be efficiently incident on the light incident surface 17 </ b> S of the rod integrator 17.
　なお、この構成においても、第２実施形態と同様に、ロッド・インテグレータ１７の光の出射面をレンズアレイ・インテグレータ１５の光の入射面１５Ｓに連接させる構成としても構わない（図６参照）。 In this configuration as well, as in the second embodiment, the light exit surface of the rod integrator 17 may be connected to the light entrance surface 15S of the lens array integrator 15 (see FIG. 6).
　なお、第２実施形態の場合と同様、ここでいう「連接」とは、レンズアレイ・インテグレータ１５の光の入射面のレンズの頂上とロッド・インテグレータ１７の光の出射面が完全に接触している場合は当然のこと、レンズアレイ・インテグレータ１５の光の入射面にロッド・インテグレータ１７の光の出射面が覆いかぶさる配置でもよい。また、ロッド・インテグレータ１７の最大径がレンズアレイ・インテグレータ１５の最大径と比較して小径となる場合、両者の間隔がその径の差程度である場合も含むものとする。 As in the case of the second embodiment, the term “join” here means that the top of the lens on the light entrance surface of the lens array integrator 15 and the light exit surface of the rod integrator 17 are completely in contact with each other. Of course, the arrangement may be such that the light exit surface of the rod integrator 17 covers the light entrance surface of the lens array integrator 15. Further, the case where the maximum diameter of the rod integrator 17 is smaller than the maximum diameter of the lens array integrator 15 includes the case where the distance between them is about the difference in diameter.
　　［第６実施形態］
　図７は、第６実施形態における本装置１Ｅの光学系の構成を示す模式図である。本装置１Ｅは、第１実施形態の本装置１と比較して、光学系１３が第２光学部材２７を更に備える点が異なるのみであり、他は第１実施形態と共通である。 [Sixth Embodiment]
FIG. 7 is a schematic diagram showing a configuration of an optical system of the apparatus 1E according to the sixth embodiment. The present apparatus 1E is different from the present apparatus 1 of the first embodiment only in that the optical system 13 further includes a second optical member 27, and the rest is common to the first embodiment.
　第２光学部材２７は、ロッド・インテグレータ１７とレンズアレイ・インテグレータ１５の間に配置され、ロッド・インテグレータ１７からの出射光をレンズアレイ・インテグレータ１５の光の入射面１５Ｓに結像させるように配置される。 The second optical member 27 is disposed between the rod integrator 17 and the lens array integrator 15, and is disposed so as to form an image of the light emitted from the rod integrator 17 on the light incident surface 15 </ b> S of the lens array integrator 15. Is done.
　これにより、ロッド・インテグレータ１７からの出射光をレンズアレイ・インテグレータ１５の光の入射面１５Ｓに集光させることができ、ロッド・インテグレータ１７からの出射光をほとんど全てレンズアレイ・インテグレータ１５に取り込ませることが可能となる。 Thereby, the light emitted from the rod integrator 17 can be condensed on the light incident surface 15S of the lens array integrator 15, and almost all the light emitted from the rod integrator 17 is taken into the lens array integrator 15. It becomes possible.
　なお、本実施形態においても、第５実施形態と同様に、光源部１１の出射面にロッド・インテグレータ１７の入射面１７Ｓを連接させる構成としても構わない。 In the present embodiment as well, similarly to the fifth embodiment, the incident surface 17S of the rod integrator 17 may be connected to the emission surface of the light source unit 11.
　　［第７実施形態］
　図８は、第７実施形態における本装置１Ｆの光学系の構成を示す模式図である。本装置１Ｆは、第６実施形態の本装置１Ｅと比較して、光学系１３が更に凸レンズ２９を備える点が異なるのみであり、他は第６実施形態と共通である。 [Seventh Embodiment]
FIG. 8 is a schematic diagram showing the configuration of the optical system of the present apparatus 1F in the seventh embodiment. The present apparatus 1F is different from the present apparatus 1E of the sixth embodiment only in that the optical system 13 further includes a convex lens 29, and is otherwise the same as the sixth embodiment.
　凸レンズ２９は、ロッド・インテグレータ１７と第２光学部材２７の間に設けられ、第２光学部材２７側の焦点位置が、第２光学部材２７の光源部１１側の焦点位置と一致するような位置に配置される。またレンズアレイ・インテグレータ１５の光の入射面１５Ｓは第２光学部材２７によって凸レンズ２９の出射面近傍が投影される位置に配置される。更に図示しないが、ＬＥＤ２１からの光をコリメートする光学系をロッド・インテグレータ１７の前段に追加した構成としても構わない。 The convex lens 29 is provided between the rod integrator 17 and the second optical member 27 so that the focal position on the second optical member 27 side coincides with the focal position on the light source unit 11 side of the second optical member 27. Placed in. The light incident surface 15S of the lens array integrator 15 is disposed at a position where the second optical member 27 projects the vicinity of the exit surface of the convex lens 29. Although not shown, an optical system for collimating the light from the LED 21 may be added to the front stage of the rod integrator 17.
　この構成では、ロッド・インテグレータ１７からの出射光は、いったん凸レンズ２９において凸レンズ２９の第２光学部材２７側の焦点位置に集光された後、第２光学部材２７に入射する。凸レンズ２９近傍からの光は第２光学部材２７によってレンズアレイ・インテグレータ１５の光の入射面１５Ｓに結像される。この場合も、第６実施形態と同様に、ロッド・インテグレータ１７からの出射光をほとんど全てレンズアレイ・インテグレータ１５に取り込ませることが可能となる。 In this configuration, the light emitted from the rod integrator 17 is once condensed by the convex lens 29 at the focal position on the second optical member 27 side of the convex lens 29 and then incident on the second optical member 27. Light from the vicinity of the convex lens 29 is imaged by the second optical member 27 on the light incident surface 15S of the lens array integrator 15. In this case as well, as in the sixth embodiment, almost all the emitted light from the rod integrator 17 can be taken into the lens array integrator 15.
　なお、図８は、一の凸レンズ２９を介してロッド・インテグレータ１７からの出射光が第２光学部材２７に入射される構成であるが、複数のレンズを介して第２光学部材２７に入射されるものとしても構わない。 FIG. 8 shows a configuration in which light emitted from the rod integrator 17 is incident on the second optical member 27 through one convex lens 29, but is incident on the second optical member 27 through a plurality of lenses. It does not matter as a thing.
　　［レンズアレイ・インテグレータの後段］
　図９は、本装置１を含む露光装置の光学系の構成を示す模式図である。レンズアレイ・インテグレータ１５の後段に、投影光学系１２としての照射レンズ３１、マスク３３を備え、必要に応じて投影レンズ３５を備える。照射レンズ３１の照射位置にマスク３３を設置し、マスク３３の後段にマスク３３のパターン像を焼き付ける対象となる感光性基板３７を設置する。この状態で、光源部１１から光が出射されると、この光がロッド・インテグレータ１７を介して配向分布を維持したまま、ロッド・インテグレータ１７の光の出射面における光の照度分布が均一化される。更に、この光は、レンズアレイ・インテグレータ１５を介して集光され、入射角度に応じた光の強度差が均一化されて、投影光学系１２に出射される。そして、投影光学系１２はマスク３３のパターン像を直接又は投影レンズ３５を介して感光性基板３５上に投影する。投影レンズ３５がない露光装置の場合、マスク３３と感光性基板３７を接触させるタイプ（コンタクト露光）とマスク３３と感光性基板３７の間隔を数マイクロメータから数十マイクロメータに設定するタイプ（プロキシミティ露光）がある。 [After the lens array integrator]
FIG. 9 is a schematic diagram showing a configuration of an optical system of an exposure apparatus including the apparatus 1. An irradiation lens 31 and a mask 33 as the projection optical system 12 are provided at the subsequent stage of the lens array integrator 15, and a projection lens 35 is provided as necessary. A mask 33 is set at the irradiation position of the irradiation lens 31, and a photosensitive substrate 37 to be a target for printing the pattern image of the mask 33 is set at the subsequent stage of the mask 33. When light is emitted from the light source unit 11 in this state, the illuminance distribution of light on the light exit surface of the rod integrator 17 is made uniform while maintaining the orientation distribution of the light via the rod integrator 17. The Further, this light is condensed through the lens array integrator 15, and the light intensity difference corresponding to the incident angle is made uniform and emitted to the projection optical system 12. Then, the projection optical system 12 projects the pattern image of the mask 33 onto the photosensitive substrate 35 directly or via the projection lens 35. In the case of an exposure apparatus without the projection lens 35, a type in which the mask 33 and the photosensitive substrate 37 are brought into contact (contact exposure), and a type in which the distance between the mask 33 and the photosensitive substrate 37 is set from several micrometers to several tens of micrometers (proxy). Mitty exposure).
　以上説明したように、本装置１によれば、ＬＥＤ２１の配置パターンが反映されない、照度分布が均一化された光をレンズアレイ・インテグレータ１５に取り込むことができる。これにより、照射対象の場所に応じて光の強度差が生じることがなくなり、ＬＥＤを露光装置用の光源として利用することができる。 As described above, according to the present apparatus 1, light with a uniform illuminance distribution that does not reflect the arrangement pattern of the LEDs 21 can be taken into the lens array integrator 15. Thereby, there is no difference in light intensity depending on the location of the irradiation target, and the LED can be used as a light source for the exposure apparatus.
　なお、図９では、第１実施形態の本装置１について図示したが、当然にこれに代えて第２実施形態以下の装置を採用しても構わない。 In addition, in FIG. 9, although this apparatus 1 of 1st Embodiment was illustrated, naturally, you may employ | adopt the apparatus below 2nd Embodiment instead of this.
　　［別実施形態］
　以下に、別実施形態につき説明する。 [Another embodiment]
Hereinafter, another embodiment will be described.
　〈１〉光源部１１と光学系１３の間に、光源部１１からの出射光をコリメートする光学系を備えるものとしても構わない。 <1> An optical system for collimating the light emitted from the light source unit 11 may be provided between the light source unit 11 and the optical system 13.
　〈２〉本装置１を備えた露光装置として、マスク３３と感光性基板３７が接触しないプロジェクション露光方式やプロキシミティ露光方式の他、マスク３３と感光性基板３７が接触するコンタクト露光方式でも利用可能である。 <2> The exposure apparatus provided with the apparatus 1 can be used in a projection exposure system and a proximity exposure system in which the mask 33 and the photosensitive substrate 37 are not in contact, and a contact exposure system in which the mask 33 and the photosensitive substrate 37 are in contact. It is.
　　　　１、１Ａ、１Ｂ、１Ｃ、１Ｄ、１Ｅ、１Ｆ　　　：　　光照射装置
　　　１１　　　：　　光源部
　　　１２　　　：　　投影光学系
　　　１３　　　：　　光学系
　　　１５　　　：　　レンズアレイ・インテグレータ
　　　１５Ｓ　　：　　レンズアレイ・インテグレータの光の入射面
　　　１７　　　：　　ロッド・インテグレータ
　　　１７Ｓ　　：　　ロッド・インテグレータの光の入射面
　　　２１　　　：　　ＬＥＤ
　　　２３　　　：　　第１光学部材
　　　２５　　　：　　凸レンズ
　　　２７　　　：　　第２光学部材
　　　２９　　　：　　凸レンズ
　　　３１　　　：　　照射レンズ
　　　３３　　　：　　マスク
　　　３５　　　：　　投影レンズ
　　　３７　　　：　　感光性基板 1, 1A, 1B, 1C, 1D, 1E, 1F: Light irradiation device 11: Light source unit 12: Projection optical system 13: Optical system 15: Lens array integrator 15S: Light incident surface of lens array integrator 17: Rod -Integrator 17S: Light entrance surface of rod integrator 21: LED
23: First optical member 25: Convex lens 27: Second optical member 29: Convex lens 31: Irradiation lens 33: Mask 35: Projection lens 37: Photosensitive substrate

Claims (8)

  1. 　複数のＬＥＤを含む光源部と、
    　レンズアレイ・インテグレータと、
    　前記光源部から出射された光を前記レンズアレイ・インテグレータの光の入射面に投影する光学系と、を有し、
    　前記光学系がロッド・インテグレータを有することを特徴とする光照射装置。     A light source unit including a plurality of LEDs;
    A lens array integrator,
    An optical system that projects light emitted from the light source unit onto a light incident surface of the lens array integrator, and
    The light irradiation apparatus, wherein the optical system includes a rod integrator.
  2. 　前記ロッド・インテグレータの光の出射面に前記レンズアレイ・インテグレータの光の入射面が連接されていることを特徴とする請求項１に記載の光照射装置。 The light irradiation apparatus according to claim 1, wherein a light incident surface of the lens array integrator is connected to a light emitting surface of the rod integrator.
  3. 　前記光学系は、前記光源部から出射された光を前記ロッド・インテグレータの光の入射面に結像させる第１光学部材を備えることを特徴とする請求項１又は２に記載の光照射装置。 The light irradiation apparatus according to claim 1 or 2, wherein the optical system includes a first optical member that forms an image of light emitted from the light source unit on a light incident surface of the rod integrator.
  4. 　前記光学系は、前記光源部から出射された光が入射する凸レンズを備え、前記光源部から出射された光が前記凸レンズを介して前記第１光学部材に入射する構成であり、
    　前記凸レンズの焦点位置が前記第１光学部材の前記光源部側の焦点位置と一致していることを特徴とする請求項３に記載の光照射装置。     The optical system includes a convex lens on which the light emitted from the light source unit is incident, and the light emitted from the light source unit is incident on the first optical member via the convex lens,
    The light irradiation apparatus according to claim 3, wherein a focal position of the convex lens coincides with a focal position of the first optical member on the light source unit side.
  5. 　前記光源部の出射面に前記ロッド・インテグレータの光の入射面が連接されていることを特徴とする請求項１に記載の光照射装置。 The light irradiation apparatus according to claim 1, wherein the light incident surface of the rod integrator is connected to the emission surface of the light source unit.
  6. 　前記光学系は、前記ロッド・インテグレータから出射された光を前記レンズアレイ・インテグレータの光の入射面に結像させる第２光学部材を備えることを特徴とする請求項１又は５に記載の光照射装置。 The light irradiation according to claim 1, wherein the optical system includes a second optical member that forms an image of light emitted from the rod integrator on a light incident surface of the lens array integrator. apparatus.
  7. 　前記光学系は、前記光源部から出射された光が入射する凸レンズを備え、前記ロッド・インテグレータから出射された光が前記凸レンズを介して前記第２光学部材に入射する構成であり、
    　前記凸レンズの焦点位置が前記第２光学部材の前記光源部側の焦点位置と一致していることを特徴とする請求項６に記載の光照射装置。     The optical system includes a convex lens on which light emitted from the light source unit is incident, and the light emitted from the rod integrator is incident on the second optical member via the convex lens,
    The light irradiation apparatus according to claim 6, wherein a focal position of the convex lens coincides with a focal position of the second optical member on the light source unit side.
  8. 　マスクのパターンを感光性基板上に転写する露光装置であって、
    　請求項１～７のいずれか１項に記載の光照射装置と、
    　前記レンズアレイ・インテグレータの光の出射面からの光を前記マスクに照射して、前記マスクのパターン像を前記感光性基板上に投影する投影光学系と、を有することを特徴とする露光装置。     An exposure apparatus for transferring a mask pattern onto a photosensitive substrate,
    The light irradiation device according to any one of claims 1 to 7,
    An exposure apparatus comprising: a projection optical system that irradiates the mask with light from a light exit surface of the lens array integrator and projects a pattern image of the mask onto the photosensitive substrate.
PCT/JP2013/065652 2012-06-15 2013-06-06 Light irradiating device, and exposure device WO2013187300A1 (en)

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JP6529809B2 (en) * 2015-04-14 2019-06-12 株式会社サーマプレシジョン Light irradiation apparatus and exposure apparatus
JP6700982B2 (en) * 2016-06-01 2020-05-27 キヤノン株式会社 Optical system, exposure apparatus, and article manufacturing method
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